Coating head and coating apparatus equipped therewith

Abstract

To provide a coating head which can achieve improvement of accuracy of the coating position, and to provide a coating device equipped with the coating head.SOLUTION: A coating head 10 applies a coating liquid to a coating surface and comprises: a discharge tool 21 which discharges the coating liquid; an angle adjustment plate 31 configured to adjust an angle of the discharge tool 21 with respect to the coating surface in a discharge direction and be rotatable in a rotation direction along a plane of the angle adjustment plate 31 together with the discharge tool 21, the angle adjustment plate 31 having a plurality of structure parts 35 provided at different positions in the rotation direction; and a positioning part 36 which positions the angle of the discharge tool 21 by fixing the angle adjustment plate 31 in contact with at least one of the plurality of structure parts 35.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a coating head and a coating apparatus including the same.

Background Art

[0002] When it is desired to locally and highly accurately apply a coating liquid, a dispenser that discharges the coating liquid from the tip of a needle is used. For example, when bonding a crystal vibration element to a package in the manufacturing process of a crystal oscillator, a conductive adhesive is applied to the electrode surface using a dispenser. For example, in coating apparatuses used in the manufacturing processes of electronic components such as crystal oscillators that have been miniaturized in recent years, further improvement in the application position accuracy is required.

[0003] For example, Patent Document 1 discloses an adhesive coating apparatus including a parallel movement means for moving a coating tool parallel to a coating region, a vertical movement means for moving the coating tool so as to have a component in a direction perpendicular to the coating region, and an angle changing means for changing the inclined angle of the coating tool. The angle changing means is a stepping motor connected to a substantially central portion regarding the center of gravity in the longitudinal direction of the coating tool.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the adhesive coating apparatus described in Patent Document 1, due to play in the gears in the stepping motor or the like, after the angle of the coating tool is positioned, the angle of the coating tool may fluctuate and the coating position may fluctuate.

[0006] The present invention has been made in view of these circumstances, and the object of the present invention is to provide a coating head that can improve the positional accuracy of coating and a coating apparatus equipped therewith. [Means for solving the problem]

[0007] An application head according to one aspect of the present invention is an application head for applying an application liquid to an application surface, comprising: a dispensing tool for dispensing the application liquid; an angle adjustment plate for adjusting the angle of the dispensing direction of the dispensing tool with respect to the application surface, the angle adjustment plate being configured to rotate together with the dispensing tool in a rotational direction along the plane of the angle adjustment plate and having a plurality of structural parts provided at different positions in the rotational direction; and a positioning part for positioning the angle of the dispensing tool by contacting at least one of the plurality of structural parts and fixing the angle adjustment plate. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a coating head that can improve the positional accuracy of coating and a coating apparatus equipped therewith. [Brief explanation of the drawing]

[0009] [Figure 1] This is a perspective view showing a coating apparatus according to one embodiment of the present invention. [Figure 2] This is a perspective view of the dispensing head. [Figure 3] This is a front view of the dispensing head. [Figure 4] This is a rear view of the dispensing head. [Figure 5] This is a front view showing the coating head during angle adjustment. [Figure 6] This is a rear view showing the coating head during angle adjustment. [Figure 7] This is a rear view showing the coating head during angle adjustment. [Figure 8] This figure shows the relationship between the angle-adjusted dispensing tool and the application surface. [Modes for carrying out the invention]

[0010] Embodiments of the present invention are described below. In the following drawings, identical or similar components are represented by identical or similar reference numerals. The drawings are illustrative, and the dimensions and shapes of each part are schematic; the technical scope of the present invention should not be interpreted as being limited to these embodiments.

[0011] For convenience, each figure is labeled with a Cartesian coordinate system consisting of the X, Y, and Z axes to explain positional relationships and directions of movement. The directions parallel to the X, Y, and Z axes are referred to as the X-axis direction, Y-axis direction, and Z-axis direction, respectively. For convenience, the positive Y-axis direction is referred to as the front and the negative Y-axis direction as the back, but these designations do not limit the orientation of the coating device 1.

[0012] <Coating device> First, the configuration of the coating apparatus 1 according to one embodiment of the present invention will be described with reference to Figure 1. Figure 1 is a perspective view showing the coating apparatus according to one embodiment of the present invention.

[0013] The coating device 1 comprises a coating head 10 and a drive unit 50.

[0014] The coating head 10 is a dispenser that applies a coating liquid to a coating surface. For example, the coating surface is the surface of the package electrode of a quartz crystal oscillator, and the coating liquid is a conductive adhesive that electrically connects the package electrode of the quartz crystal oscillator to the quartz crystal oscillator element. However, the coating surface and coating liquid are not limited to those described above.

[0015] The drive unit 50 is an orthogonal robot that moves the coating head 10 in the X-axis direction, Y-axis direction, and Z-axis direction. The drive unit 50 includes a Z-axis actuator 51, a Y-axis actuator 52, and an X-axis actuator 53. The Z-axis actuator 51 moves the coating head 10 along the Z-axis direction. The Z-axis actuator 51, for example, moves the coating head 10 in a direction perpendicular to the coating surface. The Y-axis actuator 52 moves the coating head 10 and the Z-axis actuator 51 along the Y-axis direction. The X-axis actuator 53 moves the coating head 10, the Z-axis actuator 51, and the Y-axis actuator 52 along the X-axis direction. The drive unit 50 independently controls the movement of the coating head 10 in each of the X-axis direction, Y-axis direction, and Z-axis direction. For example, the drive unit 50 controls the Y-axis actuator 52 and the X-axis actuator 53 to move the coating head 10 directly above the coating surface, and controls the Z-axis actuator 51 to move the coating head 10 closer to or farther away from the coating surface. The Z-axis actuator 51 corresponds to an example of a first moving part that moves the coating head 10 in a direction intersecting the coating surface. The Y-axis actuator 52 corresponds to an example of a second moving part that moves the coating head 10 in a direction along the coating surface. The X-axis actuator 53 corresponds to an example of a third moving part that moves the coating head 1 in a direction along the coating surface and intersecting the moving direction of the second moving part.

[0016] Next, the configuration of the coating head 100 will be described while referring to FIGS. 2 to 4. FIG. 2 is a perspective view of the coating head. FIG. 3 is a front view of the coating head. FIG. 4 is a rear view of the coating head.

[0017] The coating head 10 includes a discharge unit 20, an angle adjustment unit 30, and a base plate 40.

[0018] The discharge unit 20 is a mechanism for discharging the coating liquid. The discharge unit 20 includes a needle 21, a syringe 22, a needle guide 23, a syringe holder 24, and a distance measuring sensor 25.

[0019] The needle 21 is a cylindrical member through which the coating liquid can pass inside, and has a base end portion provided on the positive Z-axis side and a tip end portion 21P provided on the negative Z-axis side. In the needle 21, the base end portion corresponds to the inlet of the coating liquid, and the tip end portion 21P corresponds to the outlet of the coating liquid. The needle 21 is an example of a discharge tool that discharges the coating liquid from the tip end portion 21P. The shape of the tip end portion 21P of the needle 21 is, for example, a tapered shape in which the outer diameter decreases as it approaches the tip surface facing the coating surface. The taper angle of the tapered tip end portion 21P is, for example, about 20 degrees. Note that the shape of the tip end portion 21P of the needle 21 is not limited to this, and it may be a tapered shape designed with a suitable taper angle, or it may be a straight shape with a constant outer diameter regardless of the distance from the tip surface.

[0020] In this embodiment, the discharge tool is the needle 21 in which the discharge holes for discharging the coating liquid are provided in a dot shape, but the discharge tool is not limited to the above. For example, the discharge tool may have linear discharge holes.

[0021] The syringe 22 is a cylindrical member having a larger diameter than the needle 21, and has a base end portion provided on the positive Z-axis side and a tip end portion provided on the negative Z-axis side. The base end portion of the needle 21 is connected to the tip end portion of the syringe 22. The syringe 22 is an example of a reservoir that stores the coating liquid supplied to the discharge tool 21, and is also an example of a pressurizer that pressurizes the stored coating liquid and supplies it to the needle 21. The discharge amount and discharge speed of the coating liquid from the needle 21 are controlled by the syringe 22.

[0022] The needle guide 23 holds the needle 21 through it. The needle guide 23 is an example of a dispensing tool holder that holds a dispensing tool. The needle guide 23 is connected to an angle adjustment plate 31, which will be described later, and positions the needle 21 relative to the angle adjustment plate 31. In other words, the needle guide 23 maintains a constant position of the tip 21P of the needle 21 relative to the angle adjustment plate 31. As shown in Figure 3, when viewed from the front, the base end of the needle 21 and the tip of the syringe 22 are located inside the needle guide 23, and the tip 21P of the needle 21 protrudes from the needle guide 23 in the negative Z-axis direction.

[0023] The syringe holder 24 holds the syringe 22. The syringe holder 24 is an example of a reservoir holder that holds a reservoir. The syringe holder 24 is connected to an angle adjustment plate 31, which will be described later, and positions the syringe 22 relative to the angle adjustment plate 31. The syringe holder 24 has a U-shaped recess into which the syringe 22 fits, and the syringe 22 is fixed by narrowing this U-shaped recess.

[0024] The distance measuring sensor 25 measures the height of the needle 21. That is, the distance measuring sensor 25 measures the distance in the Z-axis direction between the tip 21P of the needle 21 and the coating surface. Based on the measurement result of the distance measuring sensor 25, the Z-axis actuator 51 is driven to control the height of the needle 21. The distance measuring sensor 25 is, for example, a laser path meter.

[0025] The angle adjustment unit 30 is a mechanism for adjusting the angle of the discharge unit 20. The angle adjustment unit 30 comprises an angle adjustment plate 31, a guide pin 33A, guide bolts 33B and 33C, and a reference plate 36.

[0026] The angle adjustment plate 31 is a mechanism for adjusting the angle of the discharge direction of the coating liquid at the needle 21 with respect to the coating surface. The angle adjustment plate 31 has a pair of main surfaces 31a and 31b that extend along the ZX plane and face each other in the Y axis direction. Main surface 31a is provided on the front side, and main surface 31b is provided on the back side. Main surfaces 31a and 31b include planes parallel to the ZX plane. The needle guide 23 and syringe holder 24 are connected to the main surface 31a of the angle adjustment plate 31. In other words, the needle 21 and syringe 22 are connected to the main surface 31a of the angle adjustment plate 31 via the needle guide 23 and syringe holder 24, and the discharge unit 20 is interlocked with the angle adjustment plate 31. The main surface 31a of the angle adjustment plate 31 is slidably connected to the main surface on the front side of the base plate 40.

[0027] The angle adjustment plate 31, together with the discharge unit 20 connected to the main surface 31a, is configured to rotate in a rotational direction along the plane (ZX plane) included in the main surfaces 31a and 31b of the angle adjustment plate 31. In other words, the angle adjustment plate 31 and the needle 21 are configured to rotate within the ZX plane. The angle adjustment plate 31 rotates around the Y axis (hereinafter referred to as the "center of rotation") which passes through the tip 21P of the needle 21. The discharge unit 20, which is linked to the angle adjustment plate 31, rotates within the ZX plane with the tip 21P as its center of rotation, similar to the angle adjustment plate 31. In other words, the angle of the needle 21 is adjusted around the tip 21P (hereinafter referred to as the "angle center CP").

[0028] The angle center CP of the needle 21, which is also the rotation center of the angle adjustment plate 31 and the discharge unit 20, is, for example, the center of the tip surface of the tip portion 21P that faces the coating surface. The center of the tip surface of the tip portion 21P is the center of the discharge hole of the needle 21. The angle center CP may also be the edge of the discharge hole where the tip surface and the inner surface of the cylindrical tip portion 21P connect. Alternatively, the angle center CP may be the end of the tip surface of the tip portion 21P. The end of the tip surface of the tip portion 21P is the corner where the tip surface and the outer surface of the cylindrical tip portion 21P connect.

[0029] As shown in Figures 2 and 3, the angle adjustment plate 31 is provided with guide slits 32A, 32B, and 32C. The guide slits 32A, 32B, and 32C penetrate the angle adjustment plate 31 in the Y-axis direction and open on both the main surface 31a and the main surface 31b. The guide slits 32A, 32B, and 32C are arranged in a concentric arc shape with the angle center CP as the center. Guide slit 32B is located on the angle center CP side of guide slit 32A, and guide slit 32C is located on the angle center CP side of guide slit 32B.

[0030] Guide pin 33A is connected to base plate 40 and inserted through guide slit 32A. Guide bolt 33B has its tip connected to base plate 40, its threaded portion inserted through guide slit 32B, and its head positioned on the main surface 31a side of angle adjustment plate 31. Guide bolt 33C has its tip connected to base plate 40, its threaded portion inserted through guide slit 32C, and its head positioned on the main surface 31a side of angle adjustment plate 31. The diameter of the head of guide bolt 33B is larger than the width of guide slit 32B, and the diameter of the head of guide bolt 33C is larger than the width of guide slit 32C. As guide pin 33A moves relative to guide slit 32A, rotation along the rotational direction with the angle center CP of the angle adjustment plate 31 as the center of rotation is enabled, while fluctuations in the direction intersecting the rotational direction of the angle adjustment plate 31 are suppressed. Similarly, the guide bolt 33B moves relative to the guide slit 32B, and the guide bolt 33C moves relative to the guide slit 32C.

[0031] Furthermore, the clearance between the guide pin 33A and the guide slit 32A is smaller than the clearance between the threaded portion of the guide bolt 33B and the guide slit 32B, and smaller than the clearance between the threaded portion of the guide bolt 33C and the guide slit 32C. By making the clearance of the guide slit 32A, which is furthest from the angle center CP among the guide slits 32A, 32B, and 32C, rattling during rotation of the angle adjustment plate 31 can be suppressed.

[0032] As shown in Figure 4, the main surface 31b of the angle adjustment plate 31 is provided with a plurality of grooves 35. The plurality of grooves 35 are an example of a plurality of structural parts provided at different positions in the rotational direction of the angle adjustment plate 31. Each of the plurality of grooves 35 is provided linearly in a direction intersecting the rotational direction of the angle adjustment plate 31. The groove 35 is tapered with an inclined surface that widens in the opening direction, and is a V-shaped recess where the inclined surfaces connect at the bottom. The plurality of grooves 35 are arranged radially in the rotational direction of the angle adjustment plate 31. The spacing between the plurality of grooves 35 is the resolution for adjusting the angle of the needle 21. For example, the plurality of grooves 35 are provided so that the angle of the needle 21 can be adjusted in 1-degree increments within an angle range of 0 degrees to 10 degrees.

[0033] In this embodiment, the multiple structural parts are multiple grooves 35 arranged in a straight line, but the multiple structural parts are not limited to those described above. For example, the multiple structural parts may be arranged in a point-like or planar manner. Furthermore, the multiple structural parts may be protrusions projecting from the plane (ZX plane) of the main surface 31b, or they may be through holes penetrating the angle adjustment plate 31 along the Y-axis direction.

[0034] Furthermore, the angular range and angular resolution for adjusting the angle of the needle 21 are not limited to those described above. For example, the multiple grooves 35 may be provided to allow adjustment of the angle of the needle 21 within an angular range of -10 degrees to 0 degrees, within an angular range of -10 degrees to 10 degrees, or within an angular range of 0 degrees to 20 degrees. The multiple grooves 35 may be provided to allow adjustment of the angle of the needle 21 in 0.5-degree increments, or in 2-degree increments.

[0035] The reference plate 36 is a thin plate-like member that can move along the Y-axis and enter into one of the multiple grooves 35. Once inside one of the multiple grooves 35, the reference plate 36 contacts both the inclined surface on one side and the inclined surface on the other side in the rotational direction of the angle adjustment plate 31. As a result, the reference plate 36 restricts the rotation of the angle adjustment plate 31 in both directions in the rotational direction. The reference plate 36 is connected to the base plate 40 in a switchable manner between a movable state and a fixed state. For example, the reference plate 36 is connected to the base plate 40 by screws. When moving the reference plate 36, the screws are loosened, and when fixing the reference plate 36 to the base plate 40, the screws are tightened. The reference plate 36 is an example of a positioning part that positions the angle of the discharge tool by contacting at least one of the multiple structural parts and fixing the angle adjustment plate 31.

[0036] Furthermore, the positioning part is not limited to a thin plate-shaped member; its shape is determined according to the shape of the structural part. For example, if the structural part is circular, the positioning part may be circular in shape to fit into the structural part. The positioning part may contact not just one structural part, but two or more structural parts to position the angle of the dispensing tool.

[0037] The base plate 40 connects the coating head 10 to the drive unit 50. The back of the base plate 40 is connected to the Z-axis actuator 51, and the front of the base plate 40 is connected to the angle adjustment plate 31. In other words, the angle adjustment unit 30 is connected to the Z-axis actuator 51 via the base plate 40, and the dispensing unit 20 is connected to the base plate 40 via the angle adjustment unit 30.

[0038] <Application Method> Next, a coating method using a coating apparatus 1 according to one embodiment of the present invention will be described with reference to Figures 5 to 8. Figure 5 is a front view showing the coating head during angle adjustment. Figure 6 is a rear view showing the coating head during angle adjustment. Figure 7 is a rear view showing the coating head during angle adjustment. Figure 8 is a diagram showing the relationship between the dispensing tool with the adjusted angle and the coating surface.

[0039] First, as shown in Figure 5, the angle adjustment plate 31 is rotated at a desired rotation angle θ, with the angle center CP as the rotation center. While the angle adjustment plate 31 is rotating, as shown in Figure 6, the reference plate 36 is pulled to the back side and separated from the angle adjustment plate 31.

[0040] Next, as shown in Figure 7, the reference plate 36 is moved to the front side and inserted into the groove 35, and the screws for fixing the reference plate 36 to the base plate 40 are tightened. This fixes the angle adjustment plate 31 to the base plate 40 and positions the angle of the needle 21 of the discharge unit 20.

[0041] Next, as shown in Figure 8, the tip 21P of the needle 21 is brought close to the electrode surface SF of the electrode E, which is located inside the concave package PK. Specifically, the Z-axis actuator 51 is driven to lower the coating head 10. At this time, the needle 21 is tilted from the Z-axis at a rotation angle θ with its tip 21P as the angular center CP. The package PK has a bottom wall portion BT with an upper and lower surface extending in the XY plane, and a side wall portion SD extending from the outer edge of the bottom wall portion BT toward the positive Z-axis direction. The electrode E is located on the upper surface of the bottom wall portion BT, near the side wall portion SD. Because the needle 21 is tilted away from the side wall portion SD with its tip 21P as the angular center, the needle 21 can be brought close to the electrode surface SF without colliding with the side wall portion SD. At this time, the needle 21 moves in a direction perpendicular to the electrode surface SF and approaches the electrode surface SF.

[0042] Next, as shown in Figure 8, conductive adhesive AD is dispensed from the tip 21P of the needle 21, which is brought close to the electrode surface SF of electrode E. The conductive adhesive AD is applied near the side wall portion SD of the electrode surface SF. Finally, the needle 21 is moved in a direction perpendicular to the electrode surface SF, and then moved away from the electrode surface SF.

[0043] As described above, a coating head 10 according to one aspect of the present invention comprises a needle 21 for discharging a coating liquid, an angle adjustment plate 31 for adjusting the angle of the needle 21 in the discharge direction with respect to the coating surface, and a reference plate 36 for positioning the angle of the needle 21. The angle adjustment plate 31 is configured to rotate together with the needle 21 in a rotational direction along the plane of the angle adjustment plate 31 and has a plurality of grooves 35 provided at different positions in the rotational direction. The reference plate 36 contacts at least one of the plurality of grooves 35 to fix the angle adjustment plate 31.

[0044] According to this embodiment, even when an obstacle exists near the application surface, such as when applying the coating liquid to the inner corner of a recess, the needle 21 can be brought close to the application surface while avoiding contact between the obstacle and the needle 21 by adjusting the angle of the needle 21. In other words, it is possible to suppress limitations on the application position to avoid contact between the needle 21 and the obstacle, and to suppress fluctuations in the application position due to the needle 21 contacting the obstacle. Furthermore, it is possible to suppress damage to the needle 21 due to collision with the obstacle and the needle 21.

[0045] Furthermore, the angle accuracy of the needle 21 is higher compared to configurations where the angle of the needle 21 is adjusted by a stepping motor or the like. For example, in a configuration where the angle of the needle 21 is adjusted by a stepping motor or the like, the angle of the needle 21 may fluctuate by the amount of gear play even after positioning. In contrast, in this embodiment, the angle of the needle 21 is positioned by physical contact between the multiple grooves 35 of the angle adjustment plate 31 and the reference plate 36, so there is virtually no play compared to a stepping motor or the like, and the fluctuation of the angle of the needle 21 after positioning is small. Therefore, the positional accuracy of coating can be improved.

[0046] Furthermore, since the angle adjustment unit 30, including the groove 35 and the reference plate 36, is smaller than a stepping motor, it is possible to suppress the increase in size of the coating head 10 due to the inclusion of an angle adjustment function. Since the angle adjustment unit 30 is lighter than a stepping motor, it is possible to suppress positional displacement of the coating head 10 caused by the weight of the coating head 10. Since the angle adjustment unit 30 has a simpler structure than a stepping motor, it is possible to improve the maintainability of the coating head 10.

[0047] In one embodiment described above, the angle adjustment plate 31 and the needle 21 are configured to be rotatable around the tip portion 21P of the needle 21 from which the coating liquid is discharged.

[0048] According to this embodiment, when adjusting the angle of the needle 21, the position of the tip 21P of the needle 21 is small, so it is possible to suppress a decrease in the monitoring accuracy and position control accuracy of the tip 21P caused by fluctuations in the position of the tip 21P after angle adjustment.

[0049] In one embodiment described above, each of the multiple grooves 35 is a linear groove extending in a direction intersecting the rotational direction, and the reference plate 36 is configured to be insertable into the inside of the grooves 35.

[0050] In this embodiment, the groove 35 and the reference plate 36 come into contact over a wide area in a direction intersecting the rotational direction. Since displacement in the direction intersecting the contact surface is restricted, the contact surface extends in a direction intersecting the rotational direction, effectively limiting the rotational movement of the angle adjustment plate 31. Therefore, the movement of the angle adjustment plate 31 after positioning can be further suppressed.

[0051] In one embodiment described above, the multiple grooves 35 are tapered, having inclined surfaces that widen in the opening direction.

[0052] In this embodiment, the reference plate 36 contacts both the inclined surface on one side and the inclined surface on the other side in the rotational direction of the angle adjustment plate 31 in the groove 35. As a result, the reference plate 36 restricts the rotation of the angle adjustment plate 31 in both directions. Therefore, fluctuations of the angle adjustment plate 31 after positioning can be further suppressed.

[0053] In one embodiment described above, the coating apparatus 1 is equipped with a Z-axis actuator 51 that moves the coating head 10 in a direction perpendicular to the coating surface.

[0054] In this embodiment, the needle 21 can be moved toward or away from the coating surface solely by the Z-axis actuator 51. Therefore, compared to a configuration in which the needle is moved along the angular direction of the needle, the control accuracy regarding the position of the tip portion 21P of the needle 21 can be improved.

[0055] Some or all embodiments of the present invention are described below. However, the present invention is not limited to the embodiments described below.

[0056] [Note 1] A coating head for applying a coating liquid to a coating surface, A dispensing tool for dispensing the coating liquid, An angle adjustment plate for adjusting the angle of the dispensing direction of a dispensing tool with respect to the coating surface, the angle adjustment plate is configured to rotate together with the dispensing tool in a rotational direction along the plane of the angle adjustment plate, and has a plurality of structural parts provided at different positions in the rotational direction, A positioning unit that positions the angle of the dispensing tool by contacting at least one of multiple structural parts and fixing the angle adjustment plate. Equipped with Dispensing head.

[0057] [Note 2] The angle adjustment plate and the dispensing tool are configured to be rotatable in the rotational direction around the tip of the dispensing tool from which the coating liquid is dispensed. The dispensing head described in [Note 1].

[0058] [Note 3] Each of the multiple structural parts is a linear groove extending in a direction intersecting the direction of rotation. The positioning part is configured to be insertable into the groove. The coating head described in [Note 1] or [Note 2].

[0059] [Note 4] Multiple grooves are tapered, having inclined surfaces that widen in the opening direction. The coating head described in [Note 3].

[0060] [Note 5] A storage container for storing the coating liquid to be supplied to the dispensing tool, A dispensing tool holder that holds the dispensing tool, A storage container holder that holds the storage container and Furthermore, The dispensing tool holder and the storage container holder are attached to the angle adjustment plate. The application head described in any one of the following [Appendix 1] to [Appendix 4].

[0061] [Note 6] A dispensing head described in any one of [Appendix 1] to [Appendix 5], A first moving unit moves the coating head in a direction intersecting the coating surface, A second moving unit moves the coating head in a direction along the coating surface, A third moving part moves the coating head in a direction along the coating surface and in a direction intersecting the direction of movement of the second moving part. A coating apparatus equipped with the following features.

[0062] As described above, according to one aspect of the present invention, it is possible to provide a coating head that can improve the positional accuracy of coating and a coating apparatus equipped therewith.

[0063] The dispensing head may further include an encoder for detecting the angle of the dispensing tool. For example, the dispensing head may further include a reading head provided on the base plate, which reads a plurality of structural parts provided on the angle adjustment plate as an encoder scale. Alternatively, the dispensing head may further include an encoder scale provided on the angle adjustment plate, separate from the plurality of structural parts.

[0064] The embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit its interpretation. The elements, arrangement, materials, conditions, shapes, and sizes of the embodiments are not limited to those exemplified and can be modified as appropriate. Furthermore, it is possible to partially substitute or combine the configurations shown in different embodiments. [Explanation of symbols]

[0065] 1... Coating device 10… Dispensing head 20…Discharge unit 21... Needle 21P...Tip CP…Angle center 22... Syringe 23... Needle Guide 24... Syringe holder 25… Distance measuring sensor 30…Angle adjustment unit 31…Angle adjustment plate 32A, 32B, 32C… Guide slits 33A... Guide pin 33B, 33C… Guide bolts 35… Groove 36...Reference plate 40…Base plate 50…Drive unit 51...Z-axis actuator 52…Y-axis actuator 53...X-axis actuator

Claims

1. A coating head for applying a coating liquid to a coating surface formed on the upper surface of the bottom wall portion of a concave package of an electronic component, near the side wall portion, A dispensing tool that dispenses the coating liquid from a tapered tip, An angle adjustment plate for adjusting the angle of the discharge direction of the discharge tool with respect to the coating surface, wherein the angle adjustment plate is configured to be rotatable together with the discharge tool in a rotational direction along the plane of the angle adjustment plate, and has a plurality of structural parts provided at different positions in the rotational direction, A positioning part that positions the angle of the dispensing tool by contacting at least one of the plurality of structural parts and fixing the angle adjustment plate, Equipped with Dispensing head.

2. The angle adjustment plate and the dispensing tool are configured to be rotatable in the rotational direction with respect to the tip portion of the dispensing tool from which the coating liquid is dispensed. The coating head according to claim 1.

3. Each of the aforementioned plurality of structural parts is a groove provided in a straight line that extends in a direction intersecting the rotational direction, The positioning portion is configured to be insertable into the groove portion. The coating head according to claim 1.

4. The aforementioned plurality of grooves are tapered, having inclined surfaces that widen in the opening direction. The coating head according to claim 3.

5. A storage container for storing the coating liquid to be supplied to the dispensing tool, The dispensing tool holding section holds the aforementioned dispensing tool, A storage container holding part that holds the storage container and Furthermore, The discharge tool holder and the storage container holder are attached to the angle adjustment plate. The coating head according to claim 1.

6. A coating head according to any one of claims 1 to 5, A first moving unit that moves the coating head in a direction perpendicular to the coating surface, A second moving unit moves the coating head in a direction along the coating surface, A third moving part moves the coating head in a direction along the coating surface and in a direction intersecting the direction of movement of the second moving part. A coating apparatus equipped with the following features.

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