Substrate transport device and substrate detection method

Abstract

This substrate conveyance device comprises: a driving unit that conveys a substrate along a conveyance path; a substrate sensor that is provided at a prescribed position on the conveyance path and that detects the presence / absence of a substrate at the prescribed position; a substrate confirmation unit that is provided so as to be horizontally movable, and that is capable of confirming the presence / absence of a substrate in the conveyance path; and a control unit that, when a substrate conveyance amount of the driving unit does not correspond with a detection result of the substrate sensor, controls the driving unit to stop substrate conveyance, and controls the substrate confirmation unit to confirm the presence / absence of a substrate in the conveyance path, wherein the control unit has a determination unit that determines the presence / absence of a false detection of the substrate sensor on the basis of the detection result of the substrate sensor and the confirmation result of the substrate confirmation unit.

Description

Technical Field

[0005]

[0001] This specification relates to a substrate transfer device and a substrate detection method.

Background Art

[0002] Conventionally, for example, a substrate working device disclosed in Patent Document 1 and a substrate processing device disclosed in Patent Document 2 are known. In a conventional substrate working device, when there is no substrate to be produced on a conveyor belt, the presence or absence of a dummy substrate is detected by a substrate sensor for detecting the substrate, and the detection state is confirmed. And when it is determined that the detection state of the substrate sensor is abnormal by the above-described confirmation in a conventional substrate working device, the substrate sensor is imaged by a camera to perform image diagnosis. Also, a conventional substrate processing device constantly monitors the conveyor belt by imaging with a camera and stops the conveyance when an abnormality is detected during the conveyance of the substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in the above-described conventional substrate working device, the detection state of the substrate sensor is confirmed using a dummy substrate in a state where production is stopped such as during maintenance execution. Therefore, in a conventional substrate working device, for example, it is difficult to determine whether an abnormality has occurred in the detection state of the substrate sensor during production.

[0005] This specification aims to provide a substrate transport device and a substrate detection method that can determine whether or not a substrate sensor is falsely detecting a problem, even during production. [Means for solving the problem]

[0006] This specification discloses a substrate transport device comprising: a drive unit for transporting substrates along a transport path; a substrate sensor installed at a predetermined position in the transport path for detecting the presence or absence of a substrate at the predetermined position; a substrate confirmation unit provided to be movable in the horizontal direction and capable of confirming the presence or absence of a substrate in the transport path; and a control unit that controls the drive unit to stop transporting substrates and also controls the substrate confirmation unit to confirm the presence or absence of a substrate in the transport path when the amount of substrate transported by the drive unit does not correspond to the detection result of the substrate sensor, wherein the control unit has a determination unit that determines whether or not there is a false detection by the substrate sensor based on the detection result of the substrate sensor and the confirmation result of the substrate confirmation unit.

[0007] Furthermore, this specification discloses a substrate detection method applicable to the above-mentioned substrate transport apparatus, comprising: a transport step in which a drive unit transports a substrate along a transport path; a detection step in which a substrate sensor detects the presence or absence of a substrate at a predetermined position; a stopping step in which the transport of the substrate by the drive unit is stopped when the amount of substrate transported in the transport step does not correspond to the detection result of the substrate sensor in the detection step; a confirmation step in which a substrate confirmation unit confirms the presence or absence of a substrate in the transport path; and a determination step in which the substrate sensor determines whether or not it has made a false detection based on the detection result of the substrate sensor in the detection step and the confirmation result of the substrate confirmation unit in the confirmation step.

[0008] This specification also discloses the technical idea of ​​changing "the substrate transport device described in claim 1 or 2" to "the substrate transport device described in any one of claims 1-4" in claim 5 of the original application. Furthermore, this specification also discloses the technical idea of ​​changing "the substrate transport device described in claim 1 or 2" to "the substrate transport device described in any one of claims 1-7" in claim 8 of the original application. Furthermore, this specification also discloses the technical idea of ​​changing "the substrate transport device described in claim 1 or 2" to "the substrate transport device described in any one of claims 1-7" in claim 12 of the original application. Furthermore, this specification also discloses the technical idea of ​​changing "the substrate transport device described in claim 1 or 2" to "the substrate transport device described in any one of claims 1-14" in claim 15 of the original application. Moreover, this specification also discloses the technical idea of ​​changing "the substrate transport device described in claim 1 or 2" to "the substrate transport device described in any one of claims 1-15" in claim 16 of the original application.

[0009] According to this, the substrate transport device can determine whether or not the substrate sensor is making a false detection during production. Furthermore, the substrate detection method can also determine whether or not the substrate sensor is making a false detection during production. [Brief explanation of the drawing]

[0010] [Figure 1] This is a schematic perspective view showing the overall structure of a component mounting machine, which is used as an example of a circuit board work machine. [Figure 2] This is a diagram illustrating the configuration of a parts mounting machine. [Figure 3] Figure 2 is a diagram illustrating the configuration of the positioning device. [Figure 4] Figure 2 is a front cross-sectional view of the substrate transport device. [Figure 5] Figure 2 is a side cross-sectional view of the substrate transport device. [Figure 6] Figure 2 is a functional block diagram illustrating the configuration of the control device. [Figure 7] This is a diagram illustrating the process of the substrate detection method. [Figure 8] Figure 6 illustrates the determination made by the determination unit and Figure 7 illustrates the determination made in the determination process. [Figure 9] Figure 6 illustrates the determination made by the determination unit and Figure 7 illustrates the determination made in the determination process. [Figure 10] Figure 6 illustrates the determination made by the determination unit and Figure 7 illustrates the determination made in the determination process. [Modes for carrying out the invention]

[0011] The substrate transport device and substrate detection method will be described below with reference to the drawings. In this embodiment, the substrate transport device is exemplified as being installed on a component mounting machine, which is a substrate work machine. However, the substrate work machine on which the substrate transport device can be installed is not limited to a component mounting machine; other machines equipped with a work execution device that performs predetermined work on a substrate, such as a solder printing machine or a substrate inspection machine, can also be used.

[0012] 1. Overall configuration of the circuit board work machine The configuration of the substrate mounting machine will be explained with reference to Figure 1-3. The substrate mounting machine of this embodiment is exemplified by a component mounting machine 10 that performs the work of mounting components (for example, electronic components, etc.) onto a substrate. As shown in Figure 1, in this embodiment, multiple component mounting machines 10 of the same type are arranged in the width direction to form a production line for mounting components onto substrates. In the production line formed by the multiple component mounting machines 10, substrates are transported sequentially into each component mounting machine 10, and components are mounted in each component mounting machine 10.

[0013] Here, as shown in FIG. 1, the component mounting machine 10 of the present embodiment is narrow in width and can be arranged close to each other in the width direction. Therefore, in the present embodiment, a case where three component mounting machines 10 are mounted on one base B and the entire production line is configured compactly is exemplified. Note that the arrangement of the component mounting machines 10 is not limited to mounting three component mounting machines 10 on one base B, and one, two, or four or more component mounting machines 10 can be mounted on one base B according to the production content.

[0014] The component mounting machine 10 includes a working machine body 11 fixed to the base B. The working machine body 11 includes a frame 12 and a cover member 13 that covers the frame 12. And the working machine body 11 has a working space S inside the machine, which is a space for performing a mounting operation as a substrate operation on the substrate K (see FIG. 2). Here, the working space S can be a space formed including the placement surface on which the substrate K is placed, the opposing surface of the component transfer device 16 (described later) facing the substrate K before the mounting operation is performed, and the inner surface of the cover member 13.

[0015] Here, in the present embodiment, the three component mounting machines 10 are mounted on the base B such that the respective working spaces S are adjacent to each other. And substrate conveyance openings 13a are formed in each of the cover members 13 that cover both side surfaces in the width direction of the working machine body 11. Thereby, the substrate K is carried into the working space S through the substrate conveyance opening 13a by a substrate conveyance device 20 (described later), and the substrate K on which the mounting operation has been performed is carried out (see FIG. 2).

[0016] As shown in FIG. 2, a positioning device 14, a component supply device 15, a component transfer device 16, a component camera 17, and a control device 18 are assembled to the working machine body 11. Further, a substrate conveyance device 20, which will be described in detail later, is assembled to the working machine body 11.

[0017] The positioning device 14 positions the substrate K carried in by the substrate transfer device 20. As shown in FIG. 3, the positioning device 14 has a lifter 141 and a plurality of clamp rods 142 fixed to the lifter 141, and is disposed below the work execution position for performing the mounting operation, which is an operation on the substrate K. The plurality of clamp rods 142 push up the substrate K in the Z-axis direction as the lifter 141 moves upward, and clamp the substrate K between the substrate K and a guide rail 21 (described later) of the substrate transfer device 20. Thereby, the substrate K is positioned so as not to move from the work execution position.

[0018] The component supply device 15 is detachably mounted on a plurality of groove-shaped slots provided in a pallet member 150 installed on the front side of the work machine main body 11, as shown in FIG. 2. The component supply device 15 includes a plurality of feeders 151 and reels 152 provided corresponding to the respective feeders 151. A carrier tape (not shown) in which components are respectively stored in a large number of cavities is wound around the reel 152, and each feeder 151 is loaded with the carrier tape fed out from the reel 152. A predetermined supply position 153 for supplying components is set at the upper part closer to the rear side of the feeder 151. Each feeder 151 intermittently feeds the carrier tape by a tape feeding mechanism (not shown) and supplies the components so that they can be collected at the supply position 153. Thereby, the component supply device 15 performs the component supply operation.

[0019] The component transfer device 16 is a work execution device that performs a mounting operation of mounting the collected components on the substrate K positioned at the work execution position P in the work space S inside the machine. The component transfer device 16 is disposed above the component supply device 15 in the Z-axis direction (vertical direction). The component transfer device 16 picks up components from the component supply device 15 and mounts the components on the substrate K. The component transfer device 16 includes a head drive mechanism 160, a moving stage 164, a work head 165, a suction nozzle 166, and the like.

[0020] The head drive mechanism 160 comprises a pair of Y-axis rails 161 and 162, a Y-axis slider 163, and a drive motor (not shown). The Y-axis rails 161 and 162 extend in the Y-axis direction and are spaced apart from each other and arranged parallel to one another. The Y-axis slider 163, which is long in the X-axis direction, is provided across both Y-axis rails 161 and 162 and moves in the Y-axis direction. The mobile platform 164 is attached to the Y-axis slider 163 and moves in the X-axis direction. As a result, the head drive mechanism 160 drives the Y-axis slider 163 in the Y-axis direction and drives the mobile platform 164 on the Y-axis slider 163 in the X-axis direction. In other words, the mobile platform 164 can move in the X-axis direction and the Y-axis direction in the XY plane (i.e., the horizontal direction).

[0021] The mobile platform 164 holds a work head 165 that performs mounting operations on the substrate K. The work head 165 holds one or more suction nozzles 166 downward in the Z-axis direction. The work head 165 is driven by a head drive mechanism 160 and moves together with the mobile platform 164 in the X-axis and Y-axis directions. The suction nozzles 166 are driven up and down by a lifting drive unit (not shown).

[0022] The suction nozzle 166 descends from above in the Z-axis direction of the supply position 153 and performs a suction operation to pick up parts by supplying negative pressure air. The suction nozzle 166 is also driven upward in the Z-axis direction of the substrate K and performs a mounting operation to attach parts by supplying positive pressure air. There are multiple types of work heads 165 and suction nozzles 166, which are replaced automatically or manually.

[0023] The component camera 17 is mounted on the upper surface of the base B between the component supply device 15 and the substrate transport device 20, facing upward in the Z-axis direction. The component camera 17 captures images of the component held by the suction nozzle 166 as the work head 165 moves from the supply position 153 of the component supply device 15 to the mounting position on the substrate K. The image data acquired by the component camera 17 is used in image processing to determine the presence and correctness of the component, and to acquire the suction posture of the component. The results of the image processing are reflected in the mounting operation of the suction nozzle 166.

[0024] The control device 18 is, for example, mounted on base B. The placement of the control device 18 is not particularly limited. The control device 18 is a computer device whose main components are a CPU, ROM, RAM, and various interfaces, and it comprehensively controls the operation of the component mounting machine 10, including the board transport device 20, which will be described in detail later. The control device 18 may also be configured by distributing multiple CPUs within the machine. The control device 18 controls the component mounting operation according to a pre-stored control program. Here, the control program differs for each type of circuit board product being produced.

[0025] 2. Overview of the substrate transport device 20 The substrate transport device 20 transports the substrate K, before it is mounted, along the transport path T (see Figure 5) to the work position P inside the work space S, for example, from the work space S of an adjacent component mounting machine 10 on one side. The substrate transport device 20 then transports the substrate K, after it has been mounted at the work position inside the work space S, for example, to the work space S of an adjacent component mounting machine 10 on the other side.

[0026] As described later, the substrate transport device 20 is equipped with a substrate sensor 24 that detects substrates K being transported along the transport path T. The substrate sensor 24 is positioned at a predetermined location in the transport path T and, under normal circumstances, detects substrates K passing along the transport path T and outputs a signal indicating the presence or absence of substrates K within the detection range. This allows the control device 18 to determine whether or not the substrates K are being transported smoothly along the transport path T during production.

[0027] Incidentally, if the substrate sensor 24 falsely detects substrate K during production, the conventional response is to temporarily stop production for an operator to check the detection status of the substrate sensor 24. If the operator confirms that the substrate sensor 24 has falsely detected the substrate, the detection sensitivity of the substrate sensor 24 is adjusted accordingly. In other words, in the conventional substrate handling equipment described above, if the substrate sensor 24 falsely detects the substrate during production (if a false detection exists), production must be stopped until the operator has completed the confirmation, which can affect productivity.

[0028] Therefore, as shown in Figure 4-6, the substrate transport device 20 of this embodiment includes a conveyor belt 22 and a drive motor 23 that form a drive unit for transporting substrates K along a transport path T, a substrate sensor 24 installed at predetermined positions on the transport path T, namely the loading position Pi and the unloading position Po, which detects the presence or absence of substrates K at the loading position Pi and the unloading position Po, a substrate camera 25 that is provided to be movable in the horizontal direction and serves as a substrate confirmation unit capable of confirming the presence or absence of substrates K within the transport path T, and the transport amount Dr of the substrate K by the conveyor belt 22 and the substrate sensor The control device 18 (drive control unit 181 and substrate confirmation control unit 182) is a control unit that controls the drive motor 23 (conveyor belt 22) to stop transporting the substrate K when the detection result of 24 (signal Sc, described later) does not correspond, and controls the substrate camera 25 to check for the presence or absence of the substrate K in the transport path T. The control device 18 has a determination unit 184 that determines whether or not there is a false detection by the substrate sensor 24 based on the detection result of the substrate sensor 24 (signal Sc) and the confirmation result by the substrate camera 25 (image data Id).

[0029] Furthermore, the control device 18 of this embodiment includes a correspondence determination unit 183 that determines whether the amount Dr of substrate K transported by the conveyor belt 22 corresponds to the detection result (signal Sc) of the substrate sensor 24, and an adjustment unit 185 that adjusts the detection sensitivity of the substrate sensor 24 (reference light reception amount Lb, described later) when the determination unit 184 determines that a false detection has occurred by the substrate sensor 24.

[0030] Furthermore, as shown in Figure 7, the substrate detection method of this embodiment includes a transport step K1 in which a conveyor belt 22 and a drive motor 23 transport a substrate K along a transport path T; a detection step K2 in which a substrate sensor 24 detects the presence or absence of a substrate K at the loading position Pi and the unloading position Po; a stop step K4 in which the transport amount Dr of the substrate K in the transport step K1 does not correspond to the detection result (signal Sc) of the substrate sensor 24 in the detection step K2, and stops the transport of the substrate K by the conveyor belt 22; a confirmation step K5 in which a substrate camera 25 confirms the presence or absence of a substrate K in the transport path T; and a determination step K6 in which the substrate sensor 24 determines whether or not there is a false detection based on the detection result (signal Sc) of the substrate sensor 24 in the detection step K2 and the confirmation result (image data Id) of the substrate camera 25 in the confirmation step K5.

[0031] Furthermore, the substrate detection method of this embodiment includes a correspondence determination step K3 between the detection step K2 and the stopping step K4, which determines whether the transport amount Dr of the substrate K in the transport step K1 corresponds to the detection result (signal Sc) of the substrate sensor 24 in the detection step K2. It also includes an adjustment step K7 that adjusts the detection sensitivity (reference light reception amount Lb) of the substrate sensor 24 if a false detection by the substrate sensor 24 is determined in the determination step K6.

[0032] 2-1. Configuration of the substrate transport device 20 As shown in detail in Figures 4 and 5, the substrate transport device 20 comprises a pair of left and right guide rails 21 and a conveyor belt 22, a drive motor 23, a substrate sensor 24, and a substrate camera 25 as a substrate verification unit. As shown in Figure 6, the operation of the substrate transport device 20 is controlled by a control device 18 which has a drive control unit 181, a substrate verification control unit 182, a correspondence determination unit 183, a determination unit 184, and an adjustment unit 185.

[0033] The substrate transport device 20 has a pair of guide rails 21 mounted on the upper side of a pair of upright left and right support plates 201. The distance between the pair of guide rails 21 can be set to correspond to the width of the substrate K. In addition, a belt guide 211 extending along the transport direction D is provided on the inner sides of the opposing pair of guide rails 21. Here, the transport direction D is the direction in which the substrate K is transported so as to be brought into the work space S (more specifically, the work execution position P) and to be transported out of the work space S (more specifically, the work execution position P).

[0034] The pair of conveyor belts 22 are formed in an endless ring shape. The conveyor belts 22 are arranged to be guided along each guide rail 21 and onto the upper surface of the belt guide 211. Here, the transport path T is formed, for example, by the pair of guide rails 21 (belt guide 211) and the pair of conveyor belts 22. The conveyor belts 22 then transport the substrate K along the transport path T (i.e., along the transport direction D) by rotating along the guide rails 21 with the substrate K placed on it. In this embodiment, the substrate transport device 20 consists of a pair of conveyor belts 22, a so-called single conveyor type. However, the substrate transport device 20 can also consist of, for example, two pairs of conveyor belts, a so-called double conveyor type.

[0035] The conveyor belt 22 is supported so as to be able to rotate by a pulley group 26. As shown in Figure 5, the pulley group 26 includes a pair of front and rear transport guide pulleys 261, a pair of front and rear return pulleys 262, a direction change pulley 263, a drive pulley 264, and a tensioning pulley 265, forming a "drive unit". Here, the drive pulley 264 is supported so as to rotate integrally with a spline shaft 266. The spline shaft 266 is rotationally driven by a drive motor 23. Therefore, when the drive motor 23 is rotationally driven, the drive pulley 264 rotates via the spline shaft 266, and the drive pulley 264 causes the conveyor belt 22 to rotate. As a result, the conveyor belt 22 transports the substrate K placed on its upper surface along the transport path T.

[0036] The substrate sensor 24 is provided at predetermined positions on the transport path T, namely the loading position Pi and the unloading position Po. Here, the loading position Pi is the position on the transport path T where, for example, the substrate K is loaded from the work space S of an adjacent component mounting machine 10 to its own work position P (work space S). The unloading position Po is the position on the transport path T where, for example, the substrate K is unloaded from its own work position P (work space S) to the work space S of an adjacent component mounting machine 10. In this embodiment, the substrate sensor 24 is exemplified by using, for example, a transmissive photoelectric sensor. In this case, the substrate sensor 24 positioned facing the loading position Pi has a light-emitting unit 241 and a light-receiving unit 242. The substrate sensor 24 positioned facing the unloading position Po has a light-emitting unit 243 and a light-receiving unit 244.

[0037] The light-emitting units 241 and 243 are each positioned on the left-hand guide rail 21 in Figure 4. The light-emitting units 241 and 243 each emit detection light Ld toward their respective corresponding light-receiving units 242 and 244 (see, for example, Figure 10). Therefore, the detection range R for detecting the presence or absence of the substrate K by the substrate sensor 24 is the range in which the detection light Ld emitted by each of the light-emitting units 241 and 243 is received by the opposingly positioned light-receiving units 242 and 244 (see, for example, Figure 10). The lighting and extinguishing of the light-emitting units 241 and 243 are controlled by the control device 18.

[0038] Here, the light-emitting units 241 and 243 have a temperature dependence, meaning that the amount of light emitted by the detection light Ld fluctuates over time due to temperature changes immediately after power-on or temporary interruptions in operation. The detection light Ld emitted by the light-emitting unit 241 is not limited to visible light; it may also be invisible light such as infrared light.

[0039] As shown in Figure 4, the light-receiving units 242 and 244 are each positioned on the right-hand guide rail 21. That is, the light-receiving units 242 and 244 are positioned opposite each other to the pair of light-emitting units 241 and 243 via the transport path T. The light-receiving units 242 and 244 then receive the detection light Ld emitted by the pair of light-emitting units 241 and 243 and determine the amount of light received Lr.

[0040] For example, if the substrate K is not present at the loading position Pi, in other words, if the substrate K is not present in the detection range R, the detection light Ld emitted by the light-emitting unit 241 located at the loading position Pi will reach the light-receiving unit 242, which is located at the loading position Pi and opposite the light-emitting unit 241. On the other hand, if the substrate K is present at the loading position Pi, in other words, if the substrate K is present in the detection range R, at least a portion of the detection light Ld will be blocked by the substrate K and will not reach the light-receiving unit 242. In other words, if the substrate K is present at the loading position Pi, the amount of light received by the light-receiving unit 242, Lr, will decrease or become "0".

[0041] Similarly, the detection light Ld emitted by the light-emitting unit 243 located at the discharge position Po reaches the light-receiving unit 244, which is located at the discharge position Po and opposite the light-emitting unit 243, if there is no substrate K at the discharge position Po, in other words, if there is no substrate K in the detection range R. On the other hand, if there is a substrate K at the discharge position Po, in other words, if there is a substrate K in the detection range R, at least a portion of the detection light Ld is blocked by the substrate K and does not reach the light-receiving unit 244. In other words, if there is a substrate K at the discharge position Po, the amount of light received by the light-receiving unit 244 Lr decreases or becomes "0".

[0042] Therefore, in this embodiment, the light receiving units 242 and 244 convert the incident detection light Ld into an electrical signal representing the amount of light received Lr. The light receiving units 242 and 244 then compare the amount of light received Lr with a preset reference amount of light received Lb, and output a signal Sc of "1" to the correspondence determination unit 183 of the control device 18, for example, if the amount of light received Lr is less than the reference amount of light received Lb, indicating that "substrate K is present".

[0043] Furthermore, the light receiving units 242 and 244 compare the reference light receiving amount Lb with the light receiving amount Lr, and output a signal Sc of "0" to the correspondence determination unit 183 of the control device 18, for example, if the light receiving amount Lr is greater than or equal to the reference light receiving amount Lb, it indicates that "substrate K does not exist". In the following explanation, when distinguishing between the signals Sc output by the light receiving unit 242 and the light receiving unit 244, the signal Sc output by the light receiving unit 242 will be referred to as "signal Sc1", and the signal Sc output by the light receiving unit 244 will be referred to as "signal Sc2".

[0044] In this embodiment, the circuit board camera 25 is provided on the component transfer device 16 of the component mounting machine 10. Specifically, the circuit board camera 25 is mounted on the movable table 164 of the component transfer device 16. Here, the circuit board camera 25 is mounted on the movable table 164 together with the work head 165, so that it can move integrally with the work head 165.

[0045] The substrate camera 25 primarily captures images of the upper surface of the substrate K positioned by the positioning device 14 in the component mounting machine 10 at the work position P, loading position Pi, and loading position Po, and more specifically, captures images of the position marks attached to the upper surface of the substrate K. The image data acquired by the substrate camera 25 is used in image processing to detect the substrate K positioned at the work position P. In this embodiment, the substrate camera 25 is also used as a substrate confirmation unit, and as described later, the image (image data Id) captured within the detection range R of the substrate sensor 24 is used to confirm the presence or absence of the substrate K within the detection range R.

[0046] As described above, the control device 18 of this embodiment controls the operation of the component mounting machine 10 comprehensively, and therefore also controls the operation of the substrate transport device 20. For this reason, the control device 18 as the control unit of this embodiment includes a drive control unit 181, a substrate confirmation control unit 182, a correspondence determination unit 183, a determination unit 184, and an adjustment unit 185, as shown in Figure 6.

[0047] The drive control unit 181 controls the drive of the drive motor 23. That is, by controlling the drive of the drive motor 23, the drive control unit 181 causes the conveyor belt 22 to rotate and controls the transport of the substrate K along the transport path T. Here, the drive control unit 181 outputs the amount of drive of the drive motor 23, in other words, the amount of transport Dr of the substrate K transported by the conveyor belt 22, to the correspondence determination unit 183.

[0048] Furthermore, as will be described later, the drive control unit 181 obtains a stop signal Ss from the correspondence determination unit 183 if the transport amount Dr and the detection result of the substrate sensor 24 (more specifically, the values ​​of signals Sc1 and Sc2) do not correspond. The drive control unit 181 then stops driving the drive motor 23, that is, stops transporting the substrate K by the conveyor belt 22.

[0049] As described later, the substrate verification control unit 182 acquires an operation signal So from the correspondence determination unit 183 when the transport amount Dr and the detection result of the substrate sensor 24 (more specifically, the values ​​of signals Sc1 and Sc2) do not correspond. The substrate verification control unit 182 then controls the movement and operation of the substrate camera 25, which serves as a substrate verification unit mounted on the movable table 164 of the component transfer device 16.

[0050] In other words, in this embodiment, the substrate verification control unit 182 drives the head drive mechanism 160 to move the substrate camera 25 mounted on the mobile table 164 horizontally in the X-axis and Y-axis directions. Then, according to the operation signal So, the substrate verification control unit 182 causes the substrate camera 25 to capture an image of the detection range R of the substrate sensor 24 when, for example, the substrate camera 25 has moved together with the mobile table 164 to the vicinity of the loading position Pi and / or the loading position Po.

[0051] The correspondence determination unit 183 acquires the signal Sc1 output from the light receiving unit 242. The correspondence determination unit 183 also acquires the signal Sc2 output from the light receiving unit 244. Furthermore, the correspondence determination unit 183 acquires the transport amount Dr output from the drive control unit 181. The correspondence determination unit 183 then determines whether the acquired transport amount Dr corresponds to the detection result of the substrate sensor 24 represented by the acquired signal Sc (signal Sc1 and / or signal Sc2), i.e., the value of signal Sc.

[0052] If the correspondence determination unit 183 determines that the transport amount Dr does not correspond to the detection result, it outputs a stop signal Ss to the drive control unit 181 to stop the drive of the drive motor 23, i.e., the transport of the substrate K by the conveyor belt 22. Also, if the correspondence determination unit 183 determines that the transport amount Dr does not correspond to the detection result, it outputs an operation signal So to the substrate confirmation control unit 182 to move the substrate camera 25 together with the mobile table 164 to at least one of the loading position Pi and the unloading position Po to take an image.

[0053] Furthermore, if the correspondence determination unit 183 determines that the transport amount Dr and the detection result do not correspond, it outputs a signal Sc (signal Sc1 and / or signal Sc2) representing the detection result of the substrate sensor 24 to the determination unit 184. However, if the correspondence determination unit 183 determines that the transport amount Dr and the detection result do correspond, it does not output a stop signal Ss and an operation signal So, nor does it output a signal Sc to the determination unit 184.

[0054] If the correspondence determination unit 183 determines that the transport amount Dr and the detection result of the substrate sensor 24 do not correspond, the determination unit 184 acquires the signal Sc (signal Sc1 and / or signal Sc2) output from the correspondence determination unit 183. Then, the determination unit 184 acquires image data Id representing the image captured by the substrate camera 25 according to the operation signal So output from the substrate confirmation control unit 182.

[0055] As a result, the determination unit 184 determines whether or not the substrate sensor 24 has made a false detection, based on, for example, the image data Id captured by the substrate camera 25 at the loading position Pi or the loading position Po, i.e., the detection range R of the substrate sensor 24, i.e., the result of confirming the presence or absence of substrate K at the loading position Pi or the loading position Po. The determination unit 184 then determines, for example, that a false detection has occurred in the substrate sensor 24, i.e., that a false detection exists, if the signal Sc is "1" even though there is no substrate K at the loading position Pi (or loading position Po) according to the image data Id. In this case, the determination unit 184 outputs a request signal Sr to the adjustment unit 185 requesting adjustment of the detection sensitivity of the substrate sensor 24. When the determination unit 184 outputs a request signal Sr, it outputs the request signal Sr by specifying the loading position Pi or the loading position Po, or both the loading position Pi and the loading position Po.

[0056] Furthermore, the determination unit 184 determines, for example, that if the substrate K is at the loading position Pi (or loading position Po) and the signal Sc is "1" based on the image data Id, then no false detection has occurred in the substrate sensor 24, i.e., there is no false detection. In this case, the determination unit 184 notifies, for example, that the substrate K is jammed in the transport path T, and therefore the substrate transport device 20 will be stopped due to an error using a display device (not shown).

[0057] When the adjustment unit 185 receives a request signal Sr from the determination unit 184, it adjusts the detection sensitivity of the substrate sensor 24 according to the acquired request signal Sr. In this embodiment, the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24 by outputting a modified reference light-receiving amount Lbn, which is obtained by changing the magnitude of the reference light-receiving amount Lb, to the light-receiving units 242 and 244.

[0058] 3. Substrate detection method in the substrate transport device 20 Next, with reference to Figure 7, a substrate detection method applied to the substrate transport device 20 described above and capable of determining whether or not the substrate sensor 24 has made a false detection will be explained. In this embodiment, the substrate detection method comprises a transport step K1, a detection step K2, a correspondence determination step K3, a stop step K4, a confirmation step K5, a determination step K6, and an adjustment step K7.

[0059] In the transport process K1, the drive control unit 181 of the control device 18, which acts as the control unit, controls the drive of the drive motor 23, that is, the rotation of the conveyor belt 22, thereby transporting the substrate K along the transport path T. Here, the substrate K is transported along the transport path T in a transport direction D from the loading position Pi, through the work execution position P, to the unloading position Po (see Figure 4-5).

[0060] In the subsequent detection step K2, the control device 18 activates the substrate sensor 24, which detects the presence or absence of substrate K near the predetermined loading position Pi and / or loading position Po. That is, the substrate sensor 24 detects substrate K that are within the respective detection range R at the loading position Pi and loading position Po (see Figure 8-10).

[0061] In the subsequent correspondence determination step K3, the correspondence determination unit 183 of the control device 18 determines the correspondence between the transport amount Dr of the substrate K in the transport step K1 and the detection result of the substrate sensor 24 in the detection step K2 (i.e., the value of signal Sc). If the transport amount Dr and the detection result (value of signal Sc) do not correspond, the correspondence determination unit 183 outputs a stop signal Ss to the drive control unit 181 and an operation signal So to the substrate confirmation control unit 182 (see Figure 6).

[0062] Furthermore, in the subsequent stopping process K4, the drive control unit 181 acquires the stop signal Ss output in the corresponding determination process K3 (see Figure 6). Then, in accordance with the stop signal Ss, the drive control unit 181 stops the drive of the drive motor 23, that is, stops the transport of the substrate K by the conveyor belt 22.

[0063] Furthermore, in the subsequent verification step K5, the substrate verification control unit 182 acquires the operation signal So output in the correspondence determination step K3 (see Figure 6). Then, according to the operation signal So, the substrate verification control unit 182 operates the head drive mechanism 160 and causes the substrate camera 25, which acts as the substrate verification unit, to capture images within the detection range R near the loading position Pi and / or the loading position Po. That is, in the verification step K5, the substrate verification control unit 182 confirms the presence or absence of a substrate K within the transport path T, or more specifically, within the detection range R, by capturing images near the loading position Pi and / or the loading position Po using the substrate camera 25.

[0064] In the subsequent determination step K6, the determination unit 184 of the control device 18, which is the control unit, acquires the detection result of the substrate sensor 24 in the detection step K2 (i.e., the value of signal Sc) and the confirmation result of the substrate camera 25 in the confirmation step K5 (i.e., image data Id representing the captured image) (see Figure 6). Then, the determination unit 184 determines whether or not there was a false detection by the substrate sensor 24 based on the detection result (i.e., the value of signal Sc) and the confirmation result (i.e., image data Id representing the captured image).

[0065] In other words, the determination unit 184 determines, for example, that there is a false detection by the substrate sensor 24 if the value of signal Sc is "1", meaning that the substrate sensor 24 has detected the presence of substrate K near the loading position Pi and / or the loading position Po, but substrate K is not visible in the image represented by image data Id. Here, if the determination unit 184 determines that there is a false detection by the substrate sensor 24 on the loading position Pi side and / or the loading position Po side, that is, if it confirms that substrate K is not within the detection range R of the substrate sensor 24, it outputs a request signal Sr to the adjustment unit 185 requesting adjustment of the detection sensitivity.

[0066] Furthermore, the determination unit 184 determines, for example, that there is no false detection by the substrate sensor 24 if the value of signal Sc is "1", that is, the substrate sensor 24 has detected the presence of substrate K near the loading position Pi and / or the loading position Po, and substrate K is confirmed in the image represented by image data Id. In this case, the determination unit 184 notifies, for example, that a jam of substrate K has occurred in the transport path T, and therefore the substrate transport device 20 will be stopped due to an error using a display device (not shown).

[0067] Furthermore, in the subsequent adjustment step K7, the adjustment unit 185 of the control device 18, which is the control unit, acquires the request signal Sr output from the determination unit 184 in the determination step K6. Then, according to the request signal Sr, the adjustment unit 185 changes the reference light reception amount Lb stored in the light receiving units 242 and / or 244 that form the substrate sensor 24 to a modified reference light reception amount Lbn, and outputs the modified reference light reception amount Lbn to the light receiving units 242 and / or 244. Then, the light receiving units 242 and / or 244 update and store the modified reference light reception amount Lbn, thereby adjusting the detection sensitivity of the substrate sensor 24.

[0068] 4. Example of determining whether or not the substrate sensor 24 has falsely detected by the determination unit 184 Next, an example of how the determination unit 184 determines whether or not there is a false detection by the substrate sensor 24 will be explained.

[0069] 4-1. Example of determining whether or not the board sensor 24 on the loading position Pi side has falsely detected by the determination unit 184. The determination of whether or not there is a false detection by the substrate sensor 24 located on the loading position Pi side will be explained with reference to Figure 8. If the light receiving unit 242 of the substrate sensor 24 outputs a signal Sc1 representing "1" for a certain period of time or longer, for example, if the transport amount Dr of the substrate K is small enough that it is near the loading position Pi, then the substrate K is located at the loading position Pi, or more specifically, within the detection range R of the substrate sensor 24 (shown as a rectangle by the dot pattern in Figure 8), as indicated by the dashed line, and therefore there is no false detection. Also, if the light receiving unit 242 of the substrate sensor 24 does not output a signal Sc1 representing "1" for a certain period of time or longer, then if the transport amount Dr is large enough that it is far from the loading position Pi, then the substrate K is not in the detection range R of the substrate sensor 24, and therefore there is no false detection.

[0070] However, if the transport volume Dr is large enough to move away from the loading position Pi, and the signal Sc1 representing "1" is output for a certain period of time or longer, the substrate sensor 24 detects that the substrate K is within the detection range R, that is, that the substrate K is still at the loading position Pi. In this case, the determination unit 184 acquires image data Id from the substrate camera 25, which captures the vicinity of the loading position Pi. In this case, the substrate confirmation control unit 182 moves the moving platform 164 of the component transfer device 16 in the X-axis direction, thereby moving the substrate camera 25 to the area above the loading position Pi. The substrate confirmation control unit 182 then operates the substrate camera 25 above the loading position Pi to capture images of the vicinity of the loading position Pi, i.e., the detection range R.

[0071] The determination unit 184 then compares the image of the detection range R, represented by the image data Id acquired from the substrate camera 25, with a reference image that was previously captured showing a state where no substrate K is present in the detection range R on the loading position Pi side. Based on this comparison, if no substrate K is present in the detection range R on the loading position Pi side, the determination unit 184 determines that a false detection has occurred in the substrate sensor 24 on the loading position Pi side (there is a false detection).

[0072] If the determination unit 184 determines that there is a false detection in the substrate sensor 24 on the loading position Pi side, it outputs a request signal Sr to the adjustment unit 185. Upon receiving the request signal Sr, the adjustment unit 185 changes the reference light received amount Lb stored in the light receiving unit 242 that forms the substrate sensor 24 at loading position Pi to a lower value, for example, so that the detection sensitivity decreases. The adjustment unit 185 then outputs the changed reference light received amount Lbn to the light receiving unit 242. As a result, the light receiving unit 242 compares the changed reference light received amount Lbn with the light received amount Lr. In other words, the detection sensitivity of the substrate sensor 24 on the loading position Pi side is adjusted to detect the presence or absence of substrate K.

[0073] Here, if the detection accuracy of the light receiving unit 242, i.e., the changed reference light receiving amount Lbn, is changed and adjusted by the adjustment unit 185, the drive control unit 181 drives the stopped drive motor 23 to resume transporting the substrate K by the conveyor belt 22 (retry control). Then, in the resumed transport of the substrate K, if the determination unit 184 determines again that there is a false detection by the substrate sensor 24 according to the detection result of the substrate sensor 24, the adjustment unit 185 outputs the changed reference light receiving amount Lbn as described above and repeats the adjustment of the detection sensitivity of the light receiving unit 242. As a result, if the substrate sensor 24 makes a false detection, the substrate transport device 20 can automatically return to normal and resume transporting the substrate K. If, after adjusting the detection sensitivity, it is determined that there is a false detection by the substrate sensor 24, there is a possibility that foreign matter is present between the light emitting unit 241 and the light receiving unit 242, for example, on the upper surface of the conveyor belt 22. Therefore, if false detections are repeatedly detected beyond a predetermined number of times, the system can, for example, notify and guide the operator to check whether there is a possibility of foreign matter passing between the light-emitting unit 241 and the light-receiving unit 242.

[0074] On the other hand, the determination unit 184 compares the image acquired from the substrate camera 25 with the reference image and determines that if the substrate K is present in the detection range R on the loading position Pi side, there is no false detection by the substrate sensor 24 on the loading position Pi side. In other words, in this case, the substrate sensor 24 on the loading position Pi side has detected the substrate K which is present in the detection range R.

[0075] In this case, when the substrate K is being transported towards the work position P, for example, the substrate K is not moving from the transport position Pi despite a large amount of conveyance Dr on the conveyor belt 22, that is, the substrate K is jammed near the transport position Pi. Alternatively, when the substrate K is being transported out of the work position P, for example, a substrate K that has not yet been processed is mistakenly transported from an adjacent component mounting machine 10.

[0076] Therefore, in this case, since the abnormality is not related to the detection accuracy of the substrate sensor 24, the substrate transport device 20 is temporarily stopped due to an error, and for example, an operator removes the substrate K that is near the loading position Pi. Furthermore, if the determination unit 184 causes the substrate transport device 20 to stop due to an error, for example, a jam of substrate K in the transport path T, the operator can be notified via a display device (not shown) or the like.

[0077] 4-2. Example of determining whether or not the substrate sensor 24 on the discharge position Po side is falsely detected by the determination unit 184 The determination of whether or not there is a false detection by the substrate sensor 24 located on the output position Po side will be explained with reference to Figure 9. The determination of whether or not there is a false detection by the substrate sensor 24 located on the output position Po side is performed in the same manner as the determination of whether or not there is a false detection by the substrate sensor 24 located on the input position Pi side described above.

[0078] In other words, if the transport volume Dr is small enough that the substrate K is near the discharge position Po from the work execution position P, and a signal Sc2 that is "1" for a certain period of time or longer is acquired, that is, if the transport volume Dr and the detection result represented by the signal Sc2 correspond, then there will be no false detection if the substrate K is located within the detection range R of the substrate sensor 24 on the discharge position Po side (shown as a rectangle by the dot pattern in Figure 9) as indicated by the dashed line. Also, if the transport volume Dr is large enough that the substrate K is far enough away from the discharge position Po (for example, to the adjacent component mounting machine 10), or if the transport volume Dr from the work execution position P is small, and the signal Sc2 is "0", then there will be no false detection if the substrate K is not within the detection range R of the substrate sensor 24.

[0079] However, if the transport volume Dr is large enough to be far from the work position P, but the signal Sc2 is "1", the substrate sensor 24 detects that the substrate K is within the detection range R, that is, that the substrate K is still at the discharge position Po. Also, if the transport volume Dr is small enough to be close to the work position P (or the transport volume Dr is "0"), but the signal SC2 is "1", the substrate sensor 24 detects that the substrate K is within the detection range R, that is, that the substrate K is at the discharge position Po even though the substrate K is positioned at the work position P.

[0080] In these cases, the determination unit 184 acquires image data Id from the substrate camera 25, which captures the area near the discharge position Po. In this case, the control device 18 has a correspondence determination unit 183 that outputs a stop signal Ss to the drive control unit 181. As a result, the drive control unit 181 stops the drive of the drive motor 23 and stops the transport of the substrate K by the conveyor belt 22. The control device 18 also has a correspondence determination unit 183 that outputs an operation signal So to the substrate confirmation control unit 182. As a result, the component transfer device 16 moves the mobile table 164 in the X-axis direction to move the substrate camera 25 to the area above the discharge position Po, and the substrate camera 25 captures the area near the discharge position Po at the area above the discharge position Po.

[0081] The determination unit 184 then compares an image of the vicinity of the discharge position Po, represented by the image data Id acquired from the substrate camera 25, with a reference image that was previously captured showing a state where no substrate K is present near the discharge position Po. Based on this comparison, if no substrate K is present near the discharge position Po, i.e., within the detection range R, the determination unit 184 determines that there has been a false detection by the substrate sensor 24 on the discharge position Po side.

[0082] Therefore, in this case, similar to the case of the substrate sensor 24 on the loading position Pi side, the reference light-receiving amount Lb stored in the light-receiving unit 244 that forms the substrate sensor 24 on the unloading position Po side is changed and adjusted. In this case as well, the drive control unit 181 drives the stopped drive motor 23 to resume transporting the substrate K by the conveyor belt 22. As a result, even if a false detection occurs in the substrate sensor 24 located on the unloading position Po side, the substrate transport device 20 can automatically recover and resume transporting the substrate K. In this case as well, if it is determined that there is a false detection in the substrate sensor 24 after adjusting the detection sensitivity, there is a possibility that foreign matter is present between the light-emitting unit 243 and the light-receiving unit 244, for example, on the upper surface of the conveyor belt 22. Therefore, in this case as well, if it is repeatedly determined that there is a false detection more than a predetermined number of times, the operator can be notified and guided to check whether there is a possibility of foreign matter passing between the light-emitting unit 243 and the light-receiving unit 244.

[0083] On the other hand, the determination unit 184 compares the image acquired from the substrate camera 25 with the reference image and determines that if a substrate K is present near the discharge position Po, i.e., within the detection range R, there is no false detection by the substrate sensor 24 on the discharge position Po side. In other words, in this case, the substrate sensor 24 on the discharge position Po side has detected a substrate K that is within the detection range R.

[0084] In this case, when the substrate K is being unloaded from the work position P, for example, the substrate K is not moving from the unloading position Po despite a large amount of material being transported by the conveyor belt 22 Dr, meaning the substrate K is jammed near the unloading position Po. Alternatively, when the unloaded substrate K is being positioned at the work position P, for example, a substrate K that is too large for the substrate K to be mounted may have been mistakenly loaded. Furthermore, if a substrate K that is too large has been mistakenly loaded, there is a possibility that the substrate K may slip along the transport path T.

[0085] Therefore, in this case, the substrate sensor 24 is functioning normally, and the abnormality is not related to the detection accuracy of the substrate sensor 24. As a result, the operation of the substrate transport device 20 is temporarily stopped due to an error, and for example, the worker removes the substrate K that is near the unloading position Po or the work position P. In this case as well, the determination unit 184 can notify the worker that the substrate transport device 20 has been stopped due to an error via a display device (not shown) or the like.

[0086] 4-3. Example of determining whether or not there is a false detection by the substrate sensor 24 on the loading position Pi side and the unloading position Po side by the determination unit 184 The determination of whether or not there is a false detection when both the substrate sensors 24 located on the loading position Pi side and the unloading position Po side detect the substrate K will be explained with reference to Figure 10. In this explanation, as described above, we will assume a situation in which a signal Sc representing "1" is output from the light receiving unit 242 of the substrate sensor 24 located on the loading position Pi side for a certain period of time or longer, and a signal Sc representing "1" is also output from the light receiving unit 244 of the substrate sensor 24 located on the unloading position Po side for a certain period of time or longer.

[0087] In this situation, for example, when substrate K is being transported along the transport path T from the loading position Pi to the work execution position P, the substrate sensor 24 located on the loading position Po side may output a signal Sc2 of "1". In this case, the substrate sensor 24 located on the loading position Po side has detected that substrate K is within the detection range R (shown as a rectangle by the dot pattern in Figure 10), that is, that substrate K is at the loading position Po even though substrate K is being transported to the work execution position P.

[0088] Alternatively, when the substrate K is being transported along the transport path T from the work position P towards the discharge position Po, the substrate sensor 24 located on the side of the loading position Pi outputs a signal of "1" Sc1. In this case, the substrate sensor 24 located on the side of the loading position Pi detects that the substrate K is within the detection range R (shown as a rectangle by the dot pattern in Figure 10), that is, that the substrate K is at the loading position Pi even though the substrate K is being transported from the work position P.

[0089] In these cases, the determination unit 184 acquires image data Id from the substrate camera 25, which captures the vicinity of the discharge position Po including the detection range R, and / or image data Id capturing the vicinity of the loading position Pi including the detection range R. For this reason, the control device 18 has the corresponding determination unit 183 output an operation signal So to the substrate confirmation control unit 182. As a result, the component transfer device 16 moves the mobile table 164 in the X-axis direction to move the substrate camera 25 to the upper part of the discharge position Po and / or loading position Pi, and the substrate camera 25 takes images at the upper part of the discharge position Po and / or loading position Pi.

[0090] In this case as well, the control device 18's corresponding determination unit 183 outputs a stop signal Ss to the drive control unit 181. As a result, the drive control unit 181 stops driving the drive motor 23 and stops the transport of the substrate K by the conveyor belt 22.

[0091] The determination unit 184 then compares an image of the vicinity of the discharge position Po, represented by the image data Id acquired from the substrate camera 25, with a reference image that was previously captured showing a state where no substrate K is present near the discharge position Po. Based on this comparison, if no substrate K is present near the discharge position Po, i.e., within the detection range R, the determination unit 184 determines that there has been a false detection by the substrate sensor 24 on the discharge position Po side.

[0092] Furthermore, the determination unit 184 compares an image of the vicinity of the loading position Pi, represented by the image data Id acquired from the substrate camera 25, with a reference image previously captured showing a state where no substrate K is present near the loading position Pi. Based on this comparison, if no substrate K is present near the loading position Pi, i.e., within the detection range R, the determination unit 184 determines that there has been a false detection by the substrate sensor 24 on the loading position Pi side. Therefore, in this case, the reference light-receiving amount Lb stored in the light-receiving unit 242 that forms the substrate sensor 24 on the loading position Pi side, and / or the light-receiving unit 244 that forms the substrate sensor 24 on the unloading position Po side, is changed and adjusted. In this case as well, the drive control unit 181 drives the stopped drive motor 23 to resume transporting the substrate K by the conveyor belt 22. As a result, even if a false detection occurs in the substrate sensors 24 located on the loading position Pi side and / or the unloading position Po side, the substrate transport device 20 can automatically return to normal and resume transporting the substrate K. In this case as well, if it is repeatedly determined that there have been false detections more than a predetermined number of times, the system can, for example, notify and guide the operator to check whether there is a possibility of foreign matter passing between the light-emitting unit 241 (and / or light-emitting unit 243) and the light-receiving unit 242 (and / or light-receiving unit 244).

[0093] On the other hand, the determination unit 184 compares the image acquired from the substrate camera 25 with the reference image and determines that if a substrate K is present near the discharge position Po, i.e., within the detection range R, there is no false detection by the substrate sensor 24 on the discharge position Po side. In other words, in this case, the substrate sensor 24 on the discharge position Po side has detected a substrate K that is within the detection range R.

[0094] In this case, when the delivered substrate K is positioned at the work location P, for example, a substrate K that is too large for the substrate K to be mounted may have been mistakenly delivered. Therefore, in this case, the substrate sensor 24 is functioning normally, and the abnormality is not related to the detection accuracy of the substrate sensor 24, so the operation of the substrate transport device 20 is temporarily stopped due to an error, and for example, an operator removes the substrate K that is near the delivery location Po or at the work location P.

[0095] Similarly, the determination unit 184 compares the image acquired from the substrate camera 25 with the reference image and determines that if a substrate K is present near the loading position Pi, i.e., within the detection range R, there is no false detection by the substrate sensor 24 on the loading position Pi side. In other words, in this case, the substrate sensor 24 on the loading position Pi side has detected a substrate K that is within the detection range R.

[0096] In this case, when the substrate K is being removed from the work position P, for example, a substrate K that has not yet been worked on is mistakenly brought in from the adjacent component mounting machine 10. Therefore, since this is an anomaly that is not related to the detection accuracy of the substrate sensor 24, the operation of the substrate transport device 20 is temporarily stopped due to an error, and for example, an operator removes the substrate K that is located near the loading position Pi.

[0097] As can be understood from the above explanation, the substrate transport device 20 can automatically determine whether or not the substrate sensor 24 is detecting a false reading during production. As a result, if a false reading occurs in the substrate sensor 24 (if a false reading is present), the time required for confirmation can be shortened, in other words, the time during which production is stopped can be shortened, and as a result, the impact on productivity can be reduced.

[0098] Furthermore, with the substrate transport device 20, if the determination unit 184 determines that there is a false detection by the substrate sensor 24, the adjustment unit 185 can automatically adjust the detection sensitivity of the substrate sensor 24, i.e., by changing the reference light reception amount Lb of the light receiving unit 242 and / or light receiving unit 244 to the reference light reception amount Lbn. In other words, with the substrate transport device 20, the detection sensitivity of the substrate sensor 24 can be automatically adjusted even during production. Therefore, the time that production must be stopped to adjust the detection sensitivity of the substrate sensor 24 can be reduced, and as a result, the impact on productivity can be reduced. In addition, since the presence or absence of a false detection by the substrate sensor 24 can be automatically determined and the detection sensitivity can be automatically adjusted if a false detection is determined to exist, the burden on the operator can also be reduced. Moreover, the substrate detection method can achieve the same effect as the substrate transport device 20.

[0099] 5. First variation In the embodiment described above, a substrate camera 25 is used as the substrate verification unit. However, the substrate verification unit is not limited to the substrate camera 25, as long as it can detect the presence or absence of substrate K at predetermined positions, for example, at the loading position Pi and / or the unloading position Po. When used as the substrate verification unit, it is preferable to use a device that is pre-installed in the substrate processing machine (for example, the component mounting machine 10) as the substrate verification unit. This makes it possible to reduce manufacturing costs compared to when a separate device that functions as a substrate verification unit is provided.

[0100] As an example of a substrate inspection unit, in addition to the substrate camera 25, a distance measuring sensor that can be pre-installed on the component mounting machine 10 can be cited. The distance measuring sensor can be assembled to the movable table 164 that forms the head drive mechanism 160, similar to the substrate camera 25. This allows the distance measuring sensor to move horizontally, that is, in the X-axis and Y-axis directions. The distance measuring sensor can then move horizontally to measure the distance to the top surface of the substrate K. Furthermore, by measuring the distance with the distance measuring sensor, a physical quantity equivalent to the height of the substrate K, or the thickness of the substrate K, can be obtained, for example, when the top surface of the conveyor belt 22 that transports the substrate K is used as a reference.

[0101] Therefore, by acquiring the distance measured by the distance measuring sensor, the presence or absence of the substrate K in the transport path T can be detected. As a result, even when a distance measuring sensor is used as the substrate confirmation unit, the same effect as in the above-described embodiment can be obtained.

[0102] 6. Second variation Furthermore, in the above-described embodiment, the board camera 25, which serves as a board verification unit, moves to the vicinity of the loading position Pi or the loading position Po by driving the head drive mechanism 160, and then captures an image of the vicinity of the loading position Pi or the loading position Po. Furthermore, in the first modified example described above, the distance measuring sensor, which serves as a board verification unit, moves to the vicinity of the loading position Pi or the loading position Po by driving the head drive mechanism 160, and then measures the distance to the vicinity of the loading position Pi or the loading position Po. This allows for confirmation of the presence or absence of a board K within the detection range R provided near the loading position Pi and / or the loading position Po.

[0103] However, regarding imaging by the substrate camera 25, for example, it is also possible for the substrate camera 25 to continuously image the transport path T while moving along the transport path T by the head drive mechanism 160. Furthermore, if a distance measuring sensor is used as the substrate verification unit, for example, it is also possible for the distance measuring sensor to continuously measure the distance to the transport path T while moving along the transport path T by the head drive mechanism 160. This makes it possible to detect the position where the substrate K is located on the transport path T, and as a result, it is possible to improve the accuracy of determining whether or not there is a false detection in the substrate sensor 24.

[0104] 7. Other variations In the embodiments and modifications described above, the substrate sensor 24 is shown as a transmissive photoelectric sensor having light-emitting units 241, 243 and light-receiving units 242, 244. However, the substrate sensor 24 is not limited to a transmissive photoelectric sensor. For example, a contact sensor that detects the presence or absence of a substrate K by contacting the substrate K, or a weight sensor that detects the presence or absence of a substrate K by measuring the weight of the substrate K passing through it, can also be used.

[0105] Furthermore, in the embodiments and modifications described above, if the determination unit 184 detects a false positive in the substrate sensor 24, the adjustment unit 185 adjusts the detection sensitivity of the substrate sensor 24. In addition, if a false positive occurs in the substrate sensor 24, the light-emitting units 241, 243 and light-receiving units 242, 244 of the substrate sensor 24 may be cleaned, for example. This removes any foreign matter that may have adhered to the substrate sensor, thereby maintaining the detection sensitivity appropriately. [Explanation of Symbols]

[0106] 10...Component mounting machine, 11...Work machine body, 12...Frame, 13...Cover member, 13a...Opening for substrate transport, 14...Positioning device, 15...Component supply device, 16...Component transfer device, 160...Head drive mechanism, 164...Movement platform, 165...Work head, 17...Component camera, 18...Control device (control unit), 181...Drive control unit, 182...Substrate confirmation control unit, 183...Correspondence judgment unit, 184...Determination unit, 185...Adjustment unit, 20...Substrate transport device, 21...Guide rail, 211...Belt guide, 22...Conveyor belt (drive unit), 23...Drive motor (drive unit), 24...Substrate sensor, 241,243...Light projection 242,244…Light receiving unit, 25…Substrate camera (substrate confirmation unit), 26…Pulley group (drive unit), K…Substrate, S…Work space, T…Transport path, D…Transport direction, P…Work execution position, Pi…Loading position (determined position), Po…Loading position (determined position), Ld…Detection light, Lr…Received light amount, Lb…Reference received light amount, Lbn…Changed reference received light amount, R…Detection range, Id…Image data, Dr…Transport amount, Sc(Sc1,Sc2)…Signal, Sr…Request signal, Ss…Stop signal, So…Operation signal, K1…Transport process, K2…Detection process, K3…Correspondence judgment process, K4…Stop process, K5…Confirmation process, K6…Determination process, K7…Adjustment process

Claims

1. A drive unit that transports the substrate along the transport path, A substrate sensor is installed at a predetermined position in the transport path and detects the presence or absence of the substrate at the predetermined position, A substrate confirmation unit is provided so as to be movable in the horizontal direction and capable of confirming the presence or absence of the substrate in the transport path, The system includes a control unit that controls the drive unit to stop transporting the substrate when the amount of substrate transported by the drive unit does not correspond to the detection result of the substrate sensor, and controls the substrate confirmation unit to check for the presence or absence of the substrate in the transport path, A substrate transport device comprising a control unit having a determination unit that determines whether or not the substrate sensor has made a false detection based on the detection result of the substrate sensor and the confirmation result of the substrate confirmation unit.

2. The substrate transport apparatus according to claim 1, wherein the control unit has an adjustment unit that adjusts the detection sensitivity of the substrate sensor when the determination unit determines that the substrate sensor has made a false detection.

3. The adjustment unit is, The substrate transport device according to claim 2, wherein the substrate confirmation unit confirms that the substrate is not within the detection range of the substrate sensor, and the detection sensitivity of the substrate sensor is adjusted.

4. The control unit, The substrate transport apparatus according to claim 2 or 3, wherein, based on the confirmation result by the substrate confirmation unit, the adjustment unit adjusts the detection sensitivity of the substrate sensor, and then the drive unit retryes transporting the substrate.

5. The aforementioned substrate sensor is A light-emitting unit is positioned facing the predetermined position on the transport path and emits detection light toward the predetermined position within the detection range, A substrate transport device according to claim 1 or 2, comprising: a light receiving unit positioned facing the predetermined position and receiving the detection light.

6. The substrate transport apparatus according to claim 5, wherein the light-emitting unit and the light-receiving unit are provided in the transport path at an input position for transporting the substrate to a work position for performing substrate-related work on the substrate, and at an output position for transporting the substrate from the work position.

7. The aforementioned substrate sensor is The substrate transport device according to claim 5, wherein if the amount of light received by the light receiving unit is less than a reference amount of light received, it is detected that the substrate has passed the predetermined position.

8. The aforementioned substrate verification unit is The substrate transport apparatus according to claim 1 or 2, wherein the camera is capable of imaging the substrate and imaging at least a portion of the detection range of the substrate sensor.

9. The determination unit, The substrate transport device according to claim 8, wherein, if the transport amount of the substrate and the detection result of the substrate sensor do not correspond, the device compares an image of the detection range captured by the camera with a reference image previously captured for the detection range to determine whether or not the substrate sensor has made a false detection.

10. The determination unit, The substrate transport apparatus according to claim 8, wherein the camera moves along the transport path and continuously captures images of the transport path, and based on these images, the presence or absence of the substrate in the transport path is confirmed, and the presence or absence of the false detection by the substrate sensor is determined.

11. The substrate transport apparatus according to claim 8, wherein the camera is provided so as to be movable integrally with a work head that performs substrate work on the substrate, and is a substrate camera capable of imaging the upper surface of the substrate positioned at a predetermined position in the transport path.

12. The aforementioned substrate verification unit is The substrate transport apparatus according to claim 1 or 2, wherein the distance measuring sensor is capable of measuring the relative distance to the substrate and is capable of performing the measurement operation at a position that includes at least a part of the detection range of the substrate sensor.

13. The determination unit, The substrate transport device according to claim 12, wherein, if the transport amount of the substrate and the detection result of the substrate sensor do not correspond, the presence or absence of a false detection by the substrate sensor is determined based on the measurement result at a position including at least the detection range measured by the distance measuring sensor.

14. The substrate transport apparatus according to claim 12, wherein the distance measuring sensor is provided so as to be movable integrally with the work head that performs substrate work on the substrate, and is capable of measuring the upper surface of the substrate positioned at the predetermined position in the transport path.

15. The aforementioned substrate verification unit is The substrate transport device according to claim 1 or 2, wherein the presence or absence of the substrate is confirmed in at least one of the following cases: when the substrate sensor continues to detect the substrate at the loading position where the substrate is loaded to the work position where a substrate-facing operation is performed on the substrate; and when the substrate sensor continues to detect the substrate at the loading position where the substrate is loaded from the loading position and the work position.

16. Applicable to the substrate transport apparatus described in claim 1 or 2, The drive unit performs a transport step in which it transports the substrate along the transport path, The substrate sensor performs a detection step of detecting the presence or absence of the substrate at the predetermined position, If the amount of substrate transported in the transport process does not correspond to the detection result of the substrate sensor in the detection process, A stopping step to stop the transport of the substrate by the drive unit, The substrate verification unit performs a verification step to confirm the presence or absence of the substrate in the transport path, A determination step in which the substrate sensor determines whether or not it has made a false detection based on the detection result of the substrate sensor in the detection step and the confirmation result of the substrate confirmation unit in the confirmation step, A substrate detection method comprising the following features.

Images