Nanocomposite coating material and manufacturing system for rollers in secondary battery electrode manufacturing equipment

Abstract

To provide a novel coating material having heat resistance, seizure resistance, durability, chemical resistance, low friction, and releasability applied to a base material, and to provide a manufacturing method and manufacturing system for such a coating material.SOLUTION: A ternary nanocomposite coating material comprising C-F-H or C-F-Si applied to a base material is disclosed.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a nanocomposite coating material for a roller of a secondary battery electrode manufacturing facility and a manufacturing system thereof.

[0002] This application claims the priority of Korean Patent Application No. 10-2023-0167831, filed with the Korean Intellectual Property Office on November 28, 2023, the disclosure of which is incorporated herein by reference in its entirety.

Background Art

[0003] Parts of combustion engines such as rolling rollers, dies, pins for die extraction, pistons, tappets, cylinder heads, shafts, and motor members require seizure resistance. In particular, after the molten metal at high temperature is solidified, the die must be detached from the inside of the die without seizure when the product is taken out. Combustion engine parts are also members that are rubbed at high temperatures, so a surface with high-temperature seizure resistance is required, and motor members also require high-temperature seizure resistance due to frictional heat. In addition, large rollers used in secondary battery manufacturing equipment roll slurry-type substances, and in this case, durability, chemical resistance, low friction, mold release property, seizure resistance, and heat resistance are required.

[0004] In order to have such characteristics, Patent Document 1: Korean Registered Patent No. 10-1709538 proposes a method of coating DLC (Diamond-Like-Carbon) on the roller surface. However, DLC is weak against heat and it is difficult to apply it to rollers for hot rolling, and there is a need to provide a better coating material that satisfies the above characteristics.

[0005] In addition, the roller attached to the manufacturing equipment of the secondary battery electrode is a large roller with a weight of up to 5 tons, and unlike the coating for small members, there is a problem that a uniform coating must be applied to a large area.

Prior Art Documents

Patent Documents

[0006] [Patent Document 1] Registered Patent Gazette No. 10-1709538 of the Republic of Korea [Overview of the project] [Problems that the invention aims to solve]

[0007] The object of the present invention is to provide a novel coating material that possesses heat resistance, anti-seize properties, durability, chemical resistance, low friction, and release properties, and to provide a method for manufacturing such a coating material and a manufacturing system. [Means for solving the problem]

[0008] For the purposes described above, the present invention provides a ternary nanocoposite coating material containing CF-Si or CFH.

[0009] In other words, the present invention provides a coating material for rollers of secondary battery electrode manufacturing equipment, comprising a ternary nanocomposite coating layer of CFH, wherein the ternary nanocomposite coating layer is formed by adding reducing hydrogen in addition to the C and F components during the formation process, the amount of F in the coating layer is 0-20 at%, but it is a gradient coating layer that contains more F towards the surface, has a contact angle of 90° or more, and has high hardness characteristics of 17-27 GPa.

[0010] In other words, the present invention provides a coating material for rollers of secondary battery electrode manufacturing equipment, comprising a ternary nanocomposite coating layer of CF-Si, wherein the ternary nanocomposite coating layer is formed by adding reducing hydrogen in addition to C, F, and Si components during the formation process, the amount of F in the coating layer is 0-20 at%, but it is a gradient coating layer that contains more F towards the surface, has a contact angle of 90° or more, and has high hardness characteristics of 17-27 GPa.

[0011] Furthermore, the present invention provides a coating system that enables uniform coating over a large area, and for this purpose, provides a nanocomposite coating system that includes a large chamber into which a base material (object to be coated) is placed, an ion source applied to the chamber, and a raw material supply unit that supplies C, F, Si or C, F, H as raw materials to the ion source, and coats the base material with a ternary nanocomposite coating material containing CF-Si or CFH in a CVD process.

[0012] As mentioned above, in order to uniformly coat a large area within a large chamber, it is necessary to form a high-density plasma. Therefore, by arranging ion source permanent magnets or electromagnets, a magnetic field is formed to cause the plasma to concentrate in a predetermined space.

[0013] As described above, in order to strongly attract the generated plasma and electrons towards the base material, a power supply is included and a high bias voltage of 50 to 500V is applied to the base material.

[0014] As described above, the jig for fixing the base material is configured to be rotatable and rotates during the coating process.

[0015] As described above, a cylinder sputtering apparatus including a Cr cylinder target is mounted in the chamber so that a Cr-based buffer layer is formed on the surface of the base material before coating with the ternary nanocomposite material.

[0016] The present invention also provides a method for forming a ternary nanocomposite coating material containing CF-Si or CFH using the aforementioned coating system, which involves supplying one or more of hydrocarbon gas, F gas, SiH4, Si2H6, or SiH2Cl2 to the raw material supply section of an ion source, additionally supplying hydrogen (H2) to form a reducing atmosphere, applying a power of 500-2000V and 0.3-1.8A to the ion source, and applying a bias voltage of 50-500V to the base material to form a ternary nanocomposite coating material containing CF-Si.

[0017] Furthermore, the present invention provides a method for forming a ternary nanocomposite coating material containing CFH by supplying hydrocarbon gas and F gas to the raw material supply section of an ion source, additionally supplying hydrogen (H2) to form a reducing atmosphere, applying a power of 500-2000V and 0.3-1.8A to the ion source, and applying a bias voltage of 50-500V to a jig on which the base material is fixed.

[0018] As described above, before forming the ternary nanocomposite coating material, the base material is plasma-cleaned, an inert gas (such as Ar) is flowed through the raw material supply section of the ion source, and a power of 500-2000V and 0.3-1.8A is applied to the ion source, thereby applying a bias voltage of 50-500V to the base material.

[0019] As described above, after plasma cleaning and before forming the ternary nanocomposite coating material, a Cr-based buffer layer is formed using a sputtering apparatus including a Cr cylinder target. The sputtering apparatus is subjected to 5-20A and 300-1000V, a bias voltage of 80-500V is applied to the base material, and the process is carried out by flowing inert gas and / or nitrogen (N2).

[0020] As described above, the plasma cleaning is performed for 30 to 300 minutes, the buffer layer formation process for 40 to 200 minutes, and the ternary nanocomposite coating material formation process for 240 to 780 minutes.

[0021] As described above, the ternary nanocomposite coating material increases the content of the F component toward the surface side, strengthening the mold release property and the anti-burnishing property.

[0022] As described above, the buffer layer is a gradient layer formed in the order of Cr / CrN / CrN2 / CrN2 (N component strengthened) / CrCH.

Advantages of the Invention

[0023] The ternary nanocomposite coating material containing C-F-Si according to the present invention exhibits a high hardness property of 17 to 27 GPa, has a bonding strength of the coating material of 20 N or more, excellent durability, a low friction coefficient of 0.12 or less, a contact angle of 90° or more, and excellent anti-burnishing property, mold release property, and chemical resistance.

[0024] That is, according to the present invention, since the ternary nanocomposite coating material can be formed on the surface of the base material and continuous processes can be performed without maintenance for a long time, the productivity of in-line type manufacturing equipment is improved.

[0025] In addition, the ternary nanocomposite coating material according to the present invention has an electrical resistance of 10 5 ~10 8 Ω, preventing the generation of static electricity and arcing during operation or downtime, and preventing the adhesion of foreign substances.

[0026] In addition, in the ternary nanocomposite coating material manufacturing system according to the present invention, defects on the surface of the coating material due to arcing, which was a problem with existing ion sources, are not generated, so the surface illuminance of the product is good and the quality is improved.

Brief Description of the Drawings

[0027] [Figure 1] It is a layered cross-sectional view showing the configuration of the ternary nanocomposite coating material according to the present invention. [Figure 2] It is a schematic diagram explaining the elemental functionality of the ternary nanocomposite coating material configuration according to the present invention. [Figure 3] These are diagrams and photographs illustrating the configuration of the ternary nanocomposite coating material manufacturing system according to the present invention and the resulting generation of high-density plasma. [Figure 4] This table illustrates the manufacturing process of the ternary nanocomposite coating material of the present invention. [Figure 5] This table compares the physical properties of the ternary nanocomposite coating material of the present invention with those of the prior art. [Figure 6] This photograph illustrates the problems that occurred on the roller surface, which is the base material, using conventional technology. [Figure 7] These are photographs and schematic diagrams illustrating the configuration of a manufacturing system for producing a buffer layer and a ternary nanocomposite coating material together according to the present invention. [Figure 8] As an example of a roller to which the coating material of the present invention is applied, the length of the functional surface Lf and the total length Lt of the roller are shown. [Modes for carrying out the invention]

[0028] The correct embodiments of the present invention will be described in detail below with reference to the attached drawings.

[0029] The nanocomposite coating material of the present invention exhibits anti-seizure properties, heat resistance, chemical resistance, mold release properties, low friction, and durability, and can be applied to rolling rollers, molds, extraction pins, combustion engine parts (pistons, tappets, cylinder heads, shafts, etc.), motor components, rollers for secondary battery manufacturing equipment, and the like. The nanocomposite coating material of the present invention can be applied to various articles where the above-mentioned physical properties are required. The following examples will be described in detail in relation to rollers for secondary battery manufacturing equipment, but the same coating technology can be applied when other articles such as molds are used as the base material, and changing the base material should be an easy technique for those skilled in the art.

[0030] Rollers used in secondary battery manufacturing equipment include those for cold rolling, hot rolling, and guiding. In this equipment, which continuously processes electrode materials using rollers to manufacture electrodes, the durability, seizure resistance, heat resistance, chemical resistance, release properties, and low friction of the rollers directly affect the maintenance cycle and also impact the performance of the final product, the electrodes. Therefore, these physical properties of the rollers ultimately contribute to the competitiveness of battery pricing.

[0031] As illustrated in Figure 6, conventional roller surfaces corrode and stick to the mating material, leaving wear marks on the resulting products. As a coating material with enhanced properties compared to conventional nitride-based coatings, the present invention proposes a ternary nanocomposite coating material containing CF-Si, as shown in Figure 1. Figure 1 is a cross-sectional view showing how the ternary nanocomposite coating material is formed on a base material (1), with a buffer layer (2) on top of the buffer layer and a top layer (3) on top of the buffer layer.

[0032] In other words, as shown in Figure 2, we designed a ternary nanocomposite coating material based on a C component that exhibits high hardness, low friction, and chemical resistance, and containing an F component that enhances release properties, anti-seize properties, and corrosion resistance, as well as a Si component that enhances amorphous properties, heat resistance, and corrosion resistance.

[0033] The rollers before coating are typically made of chromium steel, and it is advantageous to incorporate a Cr-based buffer layer to enhance the adhesion of the nanocomposite coating material of the present invention. The buffer layer contains one or more of Cr, CrN, and Cr-NC. Such a buffer layer configuration can be applied to other articles (such as combustion engine parts, motor parts, press molds, die-casting molds, and mold components like extraction pins) as long as the base material contains chromium steel.

[0034] The buffer layer should preferably be formed with a thickness of 20-200 nm, and the ternary nanocomposite coating material containing CF-Si should preferably be formed with a thickness of 1-5 μm.

[0035] The formation of nanocomposite coatings for rollers in secondary battery manufacturing equipment requires a large manufacturing system due to the large size of the rollers. As the manufacturing equipment, including the chamber, becomes larger, there is a need for a method that can form a uniform coating over a large area. Uniform coating over a large area is also required for large molds and rolling mill rollers, and the requirement for uniform coating over a large area is the same for small components such as combustion engine parts and extraction pins, as they are loaded in large quantities.

[0036] Figure 3 illustrates the manufacturing system for a ternary nanocomposite coating material for rollers in secondary battery manufacturing equipment according to the present invention.

[0037] The roller (20), weighing approximately 5 tons, includes a roller with a functional surface Lf in the center and shafts extending from its center outwards to both ends. The chamber (10), which can accommodate a roller with a total length of approximately 3m, has also been enlarged. A larger chamber is desirable because it is necessary to form a coating layer on a large number of products in a single coating process in order to reduce the unit cost of manufacturing.

[0038] The ends of both roller shafts are fixed to a rotatable jig (500), which is made of conductors and also serves as an electrical connection point that allows a strong bias voltage to be applied to the roller.

[0039] Because the rollers weigh approximately 5 tons, a structure in which both ends of the shaft are supported by the bottom and top surfaces of the chamber is more stable than one in which both ends of the shaft are supported in the air. In other words, the fixtures are positioned on the bottom and top surfaces of the chamber, the rollers are arranged vertically and rotated by a turntable-type fixture (500) during the process. This type of fixing configuration for the base material is also applied to the rolling rollers and molds, and many other small components are fixed radially to a large rotating fixture, which includes components such as latches.

[0040] As a means of forming a CF-Si ternary nanocomposite coating material in a large chamber, an ion source (150), preferably a linear ion source, is installed. A raw material supply unit (100) is configured to supply the reaction gas supplied to the ion source, ionizing the reaction gas, and performing a CVD process in which the electrons of the generated ions create plasma to form a coating layer on the roller surface. As will be described later, a sputtering source is added in addition to the ion source (150). (See Figure 7)

[0041] If the chamber space is large and ternary cations are dispersed and generated, and the generated plasma is not densely packed, it is difficult to efficiently form a uniform coating layer over a large area. Therefore, the present invention configures an ion induction device (200) with an array of ion source magnets to confine the plasma in a predetermined space and increase its density using electromagnetic force. The array of magnets can be permanent magnets and / or electromagnets. Preferably, permanent magnets are arranged to generate a constant magnetic force and prevent heat generation. However, it can be composed of electromagnets, and electromagnets can be arranged in conjunction with permanent magnets to complement the magnetic field of the permanent magnets. In other words, to analyze the plasma density in a coating system with an array of permanent magnets, or to adjust the plasma distribution from sample coating results, the magnetic field can be complemented by driving electromagnets at positions where the magnetic force can be changed. The generated ions and plasma form a low-density plasma region (300) in the initial stage of generation, and the ion induction device (200) forms a high-density plasma region (400).

[0042] Furthermore, since it is necessary to strongly induce the high-density plasma toward the base material roller, a bias voltage is applied to the base material roller side, and a very large power bias is applied at this time. In this embodiment, the bias voltage applied to the roller is 50 to 500 V, as shown in Figure 4, and a bias current of 0.3 to 1.5 A flows. In the case of small base materials other than rollers, the bias voltage is applied to the jig. In the case of mold base materials, the bias voltage is applied to the mold through the mold body or mold fixing member.

[0043] The upper right section of Figure 3 includes a photograph illustrating the behavior of high-density plasma generated by a magnetic field and a strong bias voltage. Even in the large space within the large chamber, the plasma is not dispersed but concentrated in the area where the coating layer is to be formed, creating a coating layer with strong attractive force and high energy.

[0044] On the other hand, as described above, a buffer layer is formed so that the ternary nanocomposite coating material is strongly adhered to the base material, thereby adding a buffer layer formation system. In other words, as shown in Figure 7, a sputtering source (sputtering device) (160) is added to the chamber in addition to the ion source (150). A cylinder sputtering source equipped with a Cr cylinder target is installed in the chamber to form a Cr-based buffer layer.

[0045] The ion source and sputter source are arranged in pairs, one at each end of the chamber, with the base material at the center. This arrangement of coating sources is advantageous for forming a uniform coating layer on the roller rotating in the center.

[0046] The manufacturing process for ternary nanocomposite coating materials using the coating system is as follows: (See Figure 4)

[0047] First, the surface of the base material is plasma cleaned. The inside of the chamber is 10 -6 ~10 -5 Torr, preferably a process initiation pressure of 7.0 × 10 -5 After evacuating to below torr, an inert gas such as Ar is supplied to the chamber at an operating pressure of 8-20 mtorr, and the ion source is driven to clean for 30-300 minutes. The voltage applied to the ion source is 500-2000V, the current is 0.3-1.8A, and the bias voltage applied to the rollers is 50-150kHz, 50-500V, with a bias current of 0.3-1.5A.

[0048] After plasma cleaning, the sputtering source is driven together with the ion source to form a Cr-based buffer layer. A bias voltage is applied to the Cr cylinder target, and an inert gas such as Ar and / or nitrogen (N2) gas is flowed through it. A voltage of 300-1000V and an A of 5-20A are applied to the sputtering source for 40-200 minutes to form the buffer layer. The process temperature is room temperature. The buffer layer can be formed from one or more of Cr, CrN, and Cr-NC.

[0049] For the initial 20-30 minutes of buffer layer formation, an inert gas such as Ar is supplied to the chamber at an operating pressure of 8-20 mtorr, and a bias voltage of 80-500 V and a bias current of 0.5-2 A are applied to the rollers to form the Cr layer (first gradation layer). Next, while maintaining the sputter source power and roller bias power, Ar, N2, and reducing H2 gases are supplied to the chamber at an operating pressure of 8-20 mtorr, and the nitrogen supply density is increased in three sections of 10-30 minutes each to form the nitrided hardened layers: CrN (second gradation layer), CrN2 (third gradation layer), and CrN2 (fourth gradation layer). For the next 10-20 minutes, while maintaining the sputter source power and roller bias power, Ar, N2, carbon (C), and H2 are supplied to form the CrCH carbonitride hardened layer as the fifth gradation layer. A hydrocarbon gas can be used as the carbon supply source. The buffer layer formed in this way has a thickness of 0.3 to 1.0 μm, which strengthens the bonding force and enhances impact resistance.

[0050] Next, the ternary nanocomposite coating material of the present invention is formed.

[0051] One or more of the following are supplied to the raw material supply section of the ion source: hydrocarbon gas, CF4 gas, TMS (Tetramethylsilane), SiH4, Si2H6, or SiH2Cl2. Hydrogen (H2) is added to form a reducing atmosphere. Power of 500-2000V and 0.3-1.8A is applied to the ion source, and a bias voltage and current of 50-150kHz, 50-500V, and 0.3-1.5A is applied to the base material to form a ternary nanocomposite coating material containing CF-Si. Hydrogen is supplied by hydrocarbon gas, but in this invention, hydrogen (H2) is supplied separately to further enhance the reducing atmosphere.

[0052] In the formation of the ternary nanocomposite coating material for the top coating layer, hydrocarbons, reducing hydrogen, and TMS are supplied for the first 240-780 minutes to form a high-density, high-hardness wear-resistant nanometric coating layer based on CH as the first top coating layer. For the next 240-780 minutes, hydrocarbons, CF4, reducing hydrogen, and TMS are supplied to form the second top coating layer as an interfacial continuous layer for forming a nanocomposite carbon and anti-seize functional layer containing CFH. Subsequently, hydrocarbons, CF4, reducing hydrogen, and TMS are supplied for 30-180 minutes, but the supply of CF4 is increased to form an FCH coating layer as the third top coating layer, thereby enhancing the anti-seize properties of the roller surface. In other words, the F component increases as the top coating layer approaches the surface, enhancing the anti-seize properties of the base material surface. During the formation of the third top coating layer, the arcing of the drive unit must be controlled to avoid hindering release. The overall thickness of the top coating layer should be 1-3 μm. The process temperature should be room temperature.

[0053] On the other hand, when forming the top coating layer, Si can be excluded and CFH can be composed of a ternary nanocomposite coating material. In other words, it can be composed of a CFH composite coating material as needed, and in this case as well, it will exhibit the necessary release properties and high hardness. Including Si is advantageous in terms of improved low friction, and the coating material can be selected according to the required physical property specifications.

[0054] In a ternary nanocomposite coating layer of CFH or CF-Si, the amount of reactant supplied is controlled so that the ratio of F to Si formation is 0-20 at%. A F formation ratio of 0.1-20 at% is desirable.

[0055] Since the process temperature is at room temperature, there are virtually no restrictions on the type of base material that can be used.

[0056] By performing this process, a ternary nanocomposite coating layer with a total thickness of 1 to 5 μm, including the buffer layer, is formed.

[0057] The physical properties of the ternary nanocomposite coating layer formed as described above are summarized in the table in Figure 5.

[0058] The ternary nanocomposite coating material containing CF-Si according to the present invention exhibits high hardness properties of 17 to 27 GPa, has excellent durability due to a bonding force of 20 N or more, shows a low coefficient of friction of 0.12 or less, and has excellent seizure resistance, release properties, and chemical resistance with a contact angle of 90° or more. This represents a significant improvement over conventional nitride-based coating materials.

[0059] In particular, since the coating material has a contact angle of 90° or more, sticking to the mating material does not occur during the rolling process of the rollers, and other contaminants do not adhere to it.

[0060] Furthermore, the ternary nanocomposite coating material of the present invention has an electrical resistance of 1 x 10⁻¹⁰ 5 ~9.9x10 8 The Ω value exhibits sufficient resistance to provide equipment antistatic and foreign matter adhesion prevention functions. Base materials such as rollers coated with the nanocomposite coating material of the present invention not only have release properties during operation, but also maintain the aforementioned electrical resistance value even during periods of inactivity, thereby preventing the generation of static electricity, arcing, and foreign matter adhesion.

[0061] In other words, according to the present invention, by forming a ternary nanocomposite coating material on the surface of a base material such as a roller, a continuous process can be carried out for a long period of time without maintenance, thereby improving the productivity of the in-line system in the case of secondary battery manufacturing equipment.

[0062] Unless otherwise defined in the foregoing, all technical and scientific terms used herein have the same meaning as those commonly understood by skilled experts in the art to which the present invention pertains. Furthermore, terms defined in commonly used dictionaries shall not be interpreted unusually or excessively unless specifically defined otherwise. When a part of the specification "includes" certain components, this does not exclude other components, but rather means that more components may be included, unless otherwise stated. Also, singular forms may include plural forms depending on the context.

[0063] Furthermore, in this specification, "above" or "at the top," and "below" or "at the bottom" mean above or below the part in question, and do not necessarily mean that they are located above or below the direction of gravity.

[0064] The rights of the present invention are not limited to the embodiments described above, but are defined by the claims, and it will be obvious that a person with ordinary skill in the art of the invention can make various modifications and manufactures within the scope of the rights described in the claims.

[0065] The following is information on the national research and development project that supported this invention. Project-specific number: 020142225 Assignment number: 20142225 Department Name: Small and Medium-Sized Enterprises Department Project management (specialized) organizations: Korea Institute for Entrepreneurship Promotion, Korea University Sejong Industry-Academia Cooperation Group Research Project Name: 2023 Innovative Field Startup Package (New Industry Startup Development) Research Project Title: Advanced Services for Improving the Competitiveness of Secondary Battery Manufacturing Through Large-Area Nanocomposite Material Plasma Deposition Systems and Coating Process Technologies Project execution organization name: Innoshontech Co., Ltd. Research period: April 27, 2023 - December 1, 2023 [Explanation of Symbols]

[0066] 1: Base material 2: Buffer layer 3: Top Tier 10: Chamber 20: Roller 100: Raw material supply department 150: Ion Source 300: Low-density plasma region 200: Ion induction device 400: High-density plasma region 500: Jig

Claims

1. As a coating material for rollers in secondary battery electrode manufacturing equipment, Cr layer, CrN layer, CrN ２ A buffer layer containing a layer, a CrCH layer in that order; and, The buffer layer comprises a C-F-H ternary nanocomposite coating layer; The aforementioned ternary nanocomposite coating layer is During the formation process, reducing hydrogen is added in addition to the C and F components, The gradient coating layer contains more F component towards the surface. It has a contact angle of 90° or more and high hardness properties of 17-27 GPa. A coating material for rollers in secondary battery electrode manufacturing equipment, characterized by the following features.

2. As a coating material for rollers in secondary battery electrode manufacturing equipment, Cr layer, CrN layer, CrN ２ A buffer layer containing a layer, a CrCH layer in that order; and, The buffer layer includes a C-F-Si ternary nanocomposite coating layer; The aforementioned ternary nanocomposite coating layer is During the formation process, reducing hydrogen is added in addition to the C, F, and Si components. The gradient coating layer contains more F component towards the surface. It has a contact angle of 90° or more and high hardness properties of 17-27 GPa. A coating material for rollers in secondary battery electrode manufacturing equipment, characterized by the following features.

3. The coating material for rollers in secondary battery electrode manufacturing equipment has a low friction coefficient of 0.12 or less and a bonding strength of 20 N or more. A coating material for rollers in secondary battery electrode manufacturing equipment according to claim 1.

4. The coating material for rollers in secondary battery electrode manufacturing equipment has a low friction coefficient of 0.12 or less and a bonding strength of 20 N or more. The coating material for rollers in secondary battery electrode manufacturing equipment according to claim 2.

5. As a manufacturing system for ternary nanocomposite coating materials containing C-F-H or C-F-Si, applicable to rollers in secondary battery electrode manufacturing equipment, A large chamber into which one or more base materials are inserted; An ion source applied to the aforementioned chamber; A sputtering source containing a Cr target is used to form a Cr-based buffer layer on the base material surface before coating it with a ternary nanocomposite coating material; A raw material supply unit that supplies the ion sources C, F, and H, or C, F, and Si, respectively, as raw materials; and, Power supply unit; including, The power supply device applies a bias voltage of 50 to 500 V to the base material in order to attract the generated plasma and electrons to the base material side. The ion source includes permanent magnets or electromagnets arranged to form a high-density plasma; Using the aforementioned sputtering source, a Cr layer, a CrN layer, and a CrN layer are formed on the base material. ２ A buffer layer is formed that sequentially includes a layer and a CrCH layer. Hydrocarbons, CF ４ , and reduced hydrogen (H ２ ) is supplied as an ion source raw material to form a C-F-H ternary nanocomposite coating layer, On the buffer layer, hydrocarbons, CF ４ , reducing hydrogen (H2), and as a Si source, TMS (Tetramethylsilane), SiH ４ , Si ２ H ６ , or SiH ２ Cl ２ Among these, one or more are supplied as ion source raw materials to form a ternary nano-composite coating layer of C-F-Si. The aforementioned nanocomposite coating layer is formed as a gradient coating layer containing more F component towards the surface. In order to uniformly coat the surface of the base material within a large chamber, permanent magnets or electromagnets are arranged in the ion source to form a magnetic field, thereby concentrating the plasma in a predetermined space and forming a high-density plasma. Permanent magnets and electromagnets are arranged together. The permanent magnets form a magnetic field, and by selectively driving the electromagnets at predetermined positions, the electromagnets complement the magnetic field formed by the permanent magnets. A nanocomposite coating material manufacturing system characterized by the following features.

6. The system includes a jig for fixing the base material, the jig being configured to rotate, and the base material rotating during the coating process. A nanocomposite coating material manufacturing system according to claim 5.

7. A method for forming a ternary nanocomposite coating material containing C-F-H using the nanocomposite coating material manufacturing system described in Claim 5, Before forming the ternary nanocomposite coating material, a sputtering source containing a Cr target is subjected to a voltage of 300-1000V, and a bias voltage of 80-500V is applied to the base material, and an inert gas, nitrogen (N) is used. ２ The sputtering process is performed by flowing one or more of the following to form a Cr-based buffer layer, In the Cr-based buffer layer formation process, initially only an inert gas is supplied to form a Cr layer, and then an inert gas, nitrogen, and reducing hydrogen are supplied to form a CrN layer. However, by increasing the nitrogen supply ratio, a nitrided hardened layer with a strengthened N component is formed. In the final buffer layer formation stage, an inert gas, nitrogen, reducing hydrogen, and hydrocarbons are supplied to form a carbonitride hardened layer of CrCH, thus forming a gradient layer. Hydrocarbon gas, CF, in the raw material supply section of the ion source. ４ gas, and reduced hydrogen (H ２ ) to supply, A ternary nanocomposite coating material containing C-F-H is formed by applying a voltage of 500-2000V to the ion source and a bias voltage of 50-500V to the base material, but CF is applied to the raw material supply section of the ion source. ４ By gradually increasing the gas generation ratio, a gradient layer is formed in which the F component increases towards the surface of the ternary nanocomposite coating material. In the formation of a ternary nanocomposite coating material, initially, hydrocarbons and reducing hydrogen are supplied to form a high-density, high-hardness, wear-resistant nanometric coating layer based on CH as the first top coating layer. Next, hydrocarbons, CF ４ A gas and reducing hydrogen are supplied to form a second top coating layer as an interfacial continuous layer for forming a nanocomposite carbon containing CFH and a bake-resistant functional layer. Next, hydrocarbons, CF ４ , and supplies reducing hydrogen, but CF ４ The supply ratio was increased, and the FCH coating layer was formed as the third top coating layer to enhance the anti-seize properties of the base material surface. A method for forming a nanocomposite coating material characterized by the above.

8. A method for forming a ternary nanocomposite coating material containing C-F-Si using the nanocomposite coating material manufacturing system described in claim 5, Before forming the ternary nanocomposite coating material, a sputtering source containing a Cr target is subjected to a voltage of 300-1000V, and a bias voltage of 80-500V is applied to the base material, and an inert gas, nitrogen (N) is used. ２ A Cr-based buffer layer is formed by performing a sputtering process using one or more of the following: In the Cr-based buffer layer formation process, initially only an inert gas is supplied to form a Cr layer, and then an inert gas, nitrogen, and reducing hydrogen are supplied to form a CrN layer. However, the nitrogen supply ratio is increased to form a nitrided hardened layer with a strengthened N component. In the final buffer layer formation stage, an inert gas, nitrogen, reducing hydrogen, and hydrocarbons are supplied to form a carbonitride hardened layer of CrCH, forming a gradient layer. Hydrocarbon gas, CF, in the raw material supply section of the ion source. ４ Gas, and TMS (Tetramethylsilane), SiH ４ Si ２ H ６ , or SiH ２ Cl ２ By supplying one or more of these, reducing hydrogen (H ２ ) will be supplied in additional quantities, A voltage of 500 to 2000V is applied to the ion source, and a bias voltage of 50 to 500V is applied to the base material to form a ternary nanocomposite coating material containing C-F-Si, but CF is applied to the raw material supply section of the ion source. ４ By gradually increasing the gas generation ratio, a gradient layer is formed in which the F component increases towards the surface of the ternary nanocomposite coating material. In the formation of ternary nanocomposite coatings, initially hydrocarbons and TMS (Tetramethylsilane), SiH ４ Si ２ H ６ , or SiH ２ Cl ２ By supplying one or more of these with reducing hydrogen, a high-density, high-hardness, wear-resistant nanometric coating layer is formed as the first top coating layer. Next, hydrocarbons, CF ４ Gas, TMS (Tetramethylsilane), SiH ４ Si ２ H ６ , or SiH ２ Cl ２ One or more of these, along with reducing hydrogen, are supplied to form a second top coating layer as an interfacial continuous layer for forming nanocomposite carbon and a bake-resistant functional layer. Next, hydrocarbons, CF ４ , TMS (Tetramethylsilane), SiH ４ Si ２ H ６ , or SiH ２ Cl ２ One or more of the above and reduced hydrogen are supplied, but CF ４ The supply ratio was increased, and it was formed as a third top coating layer to enhance the anti-seize properties of the base material surface. A method for forming a nanocomposite coating material characterized by the above.

9. Before forming the buffer layer, the base material is plasma-cleaned. The voltage applied to the ion source is 500-2000V, the current is 0.3-1.8A, and the bias voltage applied to the base material is 50-150kHz, 50-500V. A method for forming the nanocomposite coating material described in claim 8.

10. Before forming the buffer layer, the base material is plasma-cleaned. The voltage applied to the ion source is 500-2000V, the current is 0.3-1.8A, and the bias voltage applied to the base material is 50-150kHz, 50-500V. A method for forming the nanocomposite coating material described in claim 8.

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