Conveying device

Abstract

To prevent occurrence of dust.SOLUTION: A conveyance device for conveying a holding member having a placement plane for placing a plate-shaped object thereon from a first position outside a frame to a second position inside the frame through an opening portion in the frame includes a first rail, a second rail, a third rail, and a fourth rail which are provided along a horizontal direction, a plurality of rollers provided to each of the first rail to the fourth rail, and one or a plurality of pinions which are provided to each of the first rail to the fourth rail. The first rail and the third rail are provided outside the frame, and the second rail and the fourth rail are provided inside the frame. The first rail and the second rail are provided on a first straight line that is substantially parallel to a conveying direction of the holding member, and the third rail and the fourth rail are provided on a second straight line that is parallel to the first straight line and has the same height. The rotational axis of the roller is approximately perpendicular to the first straight line and the second straight line, and the holding member is placed on the plurality of rollers. The holding member is provided with racks engageable with the pinion on two sides substantially parallel to the conveying direction.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to a conveying device.

Background Art

[0002] Patent Document 1 discloses a transporter for a photomask substrate or the like, in which a movable frame is rotatably connected to a telescopic fixed frame, substrate support members are provided at the ends of the fixed frame and the movable frame, and a handle is provided near the connection portion of the movable frame to the fixed frame. By using two of these transporters and connecting the fixed frames to each other, a large substrate material can be conveyed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The transporter described in Patent Document 1 is housed in a case or the like and used to convey a photomask substrate to a device such as a cleaning holder. The photomask substrate conveyed by this transporter is horizontally placed on the mounting surface of the jig outside the device (for example, an inspection device), and then moved into the device together with the jig. The placement of the photomask substrate on the jig and the movement of the jig are manually performed by an operator.

[0005] However, when manually moving the jig, there is a risk that a part of the jig may be chipped or dust may be generated inside the device by hitting the jig against the parts inside the device. Dust inside the device causes contamination of the photomask substrate to be inspected.

[0006] The present invention has been made in view of such circumstances, and an object thereof is to provide a conveying device capable of preventing the generation of dust.

Means for Solving the Problems

[0007] To solve the above problems, the present invention provides a conveying device that, for example, conveys a holding member having a mounting surface on which a plate-shaped object is placed, from a first position outside the frame to a second position inside the frame through an opening in the frame, comprising: a first rail, a second rail, a third rail and a fourth rail provided horizontally; a plurality of rollers provided on each of the first rail, the second rail, the third rail and the fourth rail; and one or more pinions provided on each of the first rail, the second rail, the third rail and the fourth rail, wherein the first rail and the third rail are connected to the frame The frame is provided on the outside of the body, the second rail and the fourth rail are provided inside the frame, the first rail and the second rail are provided on a first straight line substantially parallel to the transport direction of the holding member, the third rail and the fourth rail are provided on a second straight line parallel to the first straight line and of the same height, the rollers are provided on a first rotation axis, the first rotation axis is substantially perpendicular to the first straight line and the second straight line, the holding member is placed on a plurality of rollers, and the holding member is provided with racks that mesh with the pinion on two sides substantially parallel to the transport direction.

[0008] According to the conveying device of the present invention, a first rail and a second rail, and a third rail and a fourth rail, are provided on a first and second straight line substantially parallel to the conveying direction of the holding member, respectively, and a pinion and rollers are provided on the first, second, third, and fourth rails, respectively. The holding member is placed on a plurality of rollers, and racks that mesh with the pinions are provided on two sides substantially parallel to the conveying direction. Therefore, when the holding member is conveyed, the holding member is positioned in a direction perpendicular to the conveying direction. As a result, the holding member does not come into contact with unexpected parts, and consequently, the generation of dust can be prevented.

[0009] The retaining member comprises a main body having the aforementioned surface plane and a gripping portion provided on the main body. When the retaining member is in the second position, the periphery of the main body is inserted into the retaining portion located in the second position, and at least one of the pinions provided on the second rail and the fourth rail may engage with a first rack provided on the gripping portion of the rack. This allows force to be transmitted from the pinion to the retaining member, ensuring that the retaining member is reliably moved to the second position.

[0010] The main body has a first side and a second side, which are two sides adjacent to the plane described above. The first and second sides each have a first inclined surface that is tilted with respect to the vertical direction such that the width of the holding member narrows as it approaches the aforementioned plane, and a vertical surface perpendicular to the aforementioned plane. The first inclined surface abuts against the second inclined surface of the holding part, and the rack may have a second rack provided on the vertical surface. This allows the holding member (main body) to be positioned in a direction perpendicular to the transport direction and in a vertical direction while being transported in the transport direction.

[0011] The gripping portion includes a rod-shaped gripping rod extending substantially perpendicular to the first and second straight lines, and plate-shaped first and second connecting portions that connect both ends of the gripping rod to the main body, respectively. The height of the first and second connecting portions is greater than the height of the vertical surface, and the first rack is provided on the entire end face of the first and second connecting portions. The first and second racks may be located on the same plane. As a result, the height of the first rack is greater than the height of the second rack, making it easier to transmit force from the pinion when pushing the holding member into the second position.

[0012] The holding member has a front end surface facing the frame when the holding portion is in the first position, and the holding member has a contact surface against which the front end surface abuts, and the contact surface is provided with an air suction portion having a connector and a suction hose joined to the connector, and the holding member has an air hole that opens at one end to the front end surface and at the other end to the aforementioned mounting plane, and the connector has a joining portion that can be joined to the air hole, and the joining portion is movable along the transport direction, and the joining portion may be joined to the air hole when the front end surface is not in contact with the contact surface. This makes it possible to suck the object toward the mounting plane before the front end surface abuts the contact surface, and to prevent the object from shifting due to the impact when the front end surface abuts the contact surface.

[0013] The pinion is provided on the second rotation shaft, and a pulley is provided on the second rotation shaft. The pulleys provided on the first rail and the third rail are wrapped with a first belt, and the pulleys provided on the second rail and the fourth rail may be wrapped with a second belt. This allows all the pinions provided on the first rail and the third rail to be rotated simultaneously by the same amount, and all the pinions provided on the second rail and the fourth rail to be rotated simultaneously by the same amount.

[0014] The first rail may be provided so as to be movable in a direction perpendicular to the transport direction. This prevents damage from collisions between the pinion and the rack, and prevents the generation of dust.

[0015] The holding member has a central portion including the aforementioned mounting plane made of aluminum, and an outer portion on which the rack is formed made of iron or ceramics, and the central portion may have an oxide film formed on its surface. This significantly reduces the generation of dust caused by the rack and pinion colliding. [Effects of the Invention]

[0016] According to the present invention, the generation of dust can be prevented.

Brief Description of the Drawings

[0017] [Figure 1] It is a perspective view showing an overview of the inspection apparatus 1. [Figure 2] It is a plan view showing an overview of the inspection apparatus 1. [Figure 3] It is a view showing an overview of the vibration isolation table 61, (A) schematically shows the state during floating, and (B) schematically shows the state during seating. [Figure 4] It is a partially enlarged view when the inspection apparatus 1 is viewed from the front. [Figure 5] It is a partially perspective view when the inspection apparatus 1 is viewed obliquely from the front. [Figure 6] It is a plan view of the columnar portions 22a, 22b, 22c, 22d of the mounting device 2 and the holding member 4. [Figure 7] It is a view showing an overview of the columnar portion 22c of the mounting device 2 and the mounting portion 25c provided at the tip of the columnar portion 22c, (A) is a perspective view, (B) is a plan view, and (C) is a D-D cross-sectional view of (B). [Figure 8] It is a plan view showing an overview of the inspection apparatus 1, and is a view with the main part enlarged. [Figure 9] It is a view showing an overview of the holding member 4, (A) is an A-A cross-sectional view of FIG. 6, (B) is a view taken in the direction of arrow B in FIG. 6, and (C) is a view taken in the direction of arrow C in FIG. 6. [Figure 10] It is a view schematically showing the state where the side surface 41c of the main body portion 41 of the holding member 4 abuts against the rail 52a of the holding portion 52 of the inspection portion 50. [Figure 11] It is a view schematically showing the drive portion 35 that drives the pinion 31 of the transfer device 3. [Figure 12] It is a view schematically showing the state where the front end surface 41b of the main body portion 41 of the holding member 4 is located in the vicinity of the abutting surface 52c of the holding portion 52 of the inspection portion 50. [Figure 13] It is a view showing an overview of the connector 58a of the air suction portion 58. [Figure 14]This is a block diagram showing the electrical configuration of inspection device 1. [Figure 15] This is a schematic cross-sectional view showing the main body portion 41A of the retaining member according to a modified example. [Figure 16] This is a schematic plan view of inspection device 1A. [Figure 17] This diagram shows a schematic of inspection device 1B, where (A) is a top view and (B) is a front view. [Figure 18] This is a block diagram showing the electrical configuration of inspection device 1B. [Figure 19] This is a schematic plan view of inspection device 1C. [Figure 20] This diagram schematically shows the state of the pinion 31, 31A and gear 34 when the first stage 51A is moved to the loading position, with (A) showing the state just before the loading position and (B) showing the state at the loading position. [Figure 21] This is a schematic diagram of the conveying device 3C. [Modes for carrying out the invention]

[0018] Embodiments of the present invention will now be described in detail with reference to the drawings. In each drawing, the same elements are denoted by the same reference numerals, and the description of overlapping parts will be omitted.

[0019] The mounting device in this invention is a device for horizontally mounting a plate-shaped object on a holding section having a mounting surface. Hereinafter, a mask will be used as an example object. A mask is produced by irradiating a photosensitive substrate (for example, a glass substrate with a thin film of chromium formed on one side and a resist coated on top of it) with light such as a laser. Generally, photosensitive substrates have a very low coefficient of thermal expansion (for example, approximately 5.5 × 10⁻⁶). -7 Quartz glass (around K) is used.

[0020] The masks M used in mounting devices come in various sizes. Rectangular masks such as 5x5 inches, 6x6 inches, 7x7 inches, and 9x9 inches are used, while circular masks with a diameter of 7.25 inches are used. The present invention can accommodate masks M of various sizes and multiple shapes with a single device.

[0021] <First Embodiment> Figure 1 is a perspective view showing the general structure of inspection device 1. Figure 2 is a plan view (viewed from the +z direction) showing the general structure of inspection device 1. Note that some components are omitted from the illustration in Figure 1. Also, the main parts are shown in perspective in Figure 2.

[0022] Hereafter, the direction along the vertical will be defined as the z direction, and the vertically upward direction will be defined as +z. The two orthogonal directions along the horizontal will be defined as the x and y directions.

[0023] The inspection device 1 mainly comprises a mounting device 2, a transport device 3, a holding member 4, a frame 10, an inspection section 50, a vibration isolation table 61, and a surface plate 62. A plate-shaped object, the mask M, is placed on the holding member 4. The mounting device 2 is a device for placing the mask M on the holding member 4. The transport device 3 is a device for transporting the holding member 4 with the mask M on it into the inspection section 50 and transporting it out of the inspection section 50.

[0024] The frame 10 covers the inspection section 50, the vibration isolation table 61, and the surface plate 62. The inspection device 1 (inside the frame 10) is kept at a constant temperature by a temperature control unit (not shown).

[0025] The frame 10 has a front section 11 on which an opening / closing door 12 is provided. An opening 11a is provided in the front section 11, and when the opening / closing door 12 is closed, the opening / closing door 12 covers the opening 11a. Figure 1 illustrates the state in which the opening / closing door 12 is closed. The opening / closing door 12 is movable in the vertical direction (z direction) and can move between a position that covers the opening 11a and a position that does not cover it. A rail 13 is provided in the front section 11, and a movable member (not shown) provided on the opening / closing door 12 moves along the rail 13 by an actuator 14 (see Figure 14), causing the opening / closing door 12 to move in the z direction.

[0026] The surface plate 62 is a roughly rectangular (thick plate) shaped member, made of stone (e.g., granite) or a casting with a low coefficient of expansion (e.g., a nickel-based alloy). The surface plate 62 is placed on a mounting surface (e.g., the floor).

[0027] Multiple (in this case, three) vibration isolation tables 61 are placed on the surface plate 62. Figure 3 is a schematic diagram of the vibration isolation tables 61, with (A) schematically showing the state when floating and (B) schematically showing the state when seated. The vibration isolation tables 61 mainly consist of a base 611, a frame 612, and a movable member 613.

[0028] The frame 612 is provided on the base 611 and has a hole 612a. A movable member 613 is provided in the hole 612a so as to be movable in the vertical direction. The movable member 613 mainly has a rod-shaped member 613a, positioning members 613b and 613e, and a plate-shaped portion 613d. The positioning members 613b and 613e are, for example, nuts and are provided on the rod-shaped member 613a. The positioning member 613b has a conical portion 613c on its lower side. The plate-shaped portion 613d is provided above the positioning member 613e.

[0029] A vibration isolation table 61, in this case, has an inspection section 50 on the upper side of the movable member 613. As a result, the inspection section 50 is placed on the surface plate 62 via the vibration isolation table 61. When the movable member 613 moves in the vertical direction, the vibration isolation table 61 can move the inspection section 50 in the vertical direction.

[0030] When inserting and removing the holding member 4 into the inspection section 50, as shown in Figure 3(B), the conical portion 613c is in contact with (seaten) the frame 612, and the inspection section 50 is lowered by the vibration isolation table 61. The seating of the conical portion 613c on the frame 612 improves the reproducibility of positioning in the height direction (z direction) and horizontal direction (xy direction), allowing the transport device 3 to load and unload the mask M without any problems.

[0031] In contrast, while the mask M is being inspected in the inspection unit 50, the conical portion 613c is raised from the frame 612, as shown in Figure 3(A). This raises the inspection unit 50 from the base plate 62, preventing it from vibrating. The plate-shaped portion 613d is located inside the frame 612, and the plate-shaped portion 613d contacts the frame 612 to prevent the moving member 613 from coming out of the hole 612a.

[0032] The form of the vibration isolation table 61 is not limited to this. For example, the vibration isolation table 61 may be an active vibration isolation table.

[0033] The inspection unit 50 mainly comprises a first stage 51, a holding unit 52, a second stage 53, belts 54 and 56, and rails 55 and 57.

[0034] The second stage 53 is provided so as to be movable in the x-direction along the rail 57 by an actuator 59a (see Figure 14) driving a belt 56. The first stage 51 is provided on the second stage 53 and is provided so as to be movable in the y-direction along the rail 55 by an actuator 59b (see Figure 14) driving a belt 54. Therefore, the first stage 51 is movable in both the x-direction and the y-direction.

[0035] The holding portion 52 is located on the upper side (+z side) of the first stage 51. The holding portion 52 is fixed to the first stage 51 and holds the holding member 4 inside the inspection portion 50. The holding portion 52 will be described in detail later.

[0036] Next, the mounting device 2 will be described. Figure 4 is a partially enlarged view of the inspection device 1 as seen from the front. The mounting device 2 is located in front of the front section 11 (towards the -y side). The holding member 4 is placed on the roller 32 of the conveying device 3.

[0037] The mounting device 2 is movable in the z direction by a drive unit (not shown). The mounting device 2 mainly consists of a base 21, a plurality of columnar parts 22, a first moving part 23, and a second moving part 24. In Figure 4, the state in which the mounting device 2 is positioned at the lower end is shown by a solid line, and the state in which it is positioned at the upper end is shown by a dashed line.

[0038] The base 21 is plate-shaped and is provided vertically below the holding member 4. The base 21 is provided so as to be movable in the vertical direction by the first moving part 23. The first moving part 23 has a rail 23a, a moving member 23b, and an actuator 23c (see Figure 14). The moving member 23b is provided on the base 21 and is movable along the rail 23a. Therefore, the actuator 23c moves the moving member 23b along the rail 23a in the z direction, causing the first moving part 23 to move the base 21 in the z direction.

[0039] The columnar portion 22 is a columnar member and is provided on the base 21 via the second movable portion 24. The second movable portion 24 is provided on the base 21. The columnar portion 22 protrudes vertically upward from the base 21. A mounting portion 25 (described in detail later) for placing the mask M is provided at the tip of the columnar portion 22.

[0040] As the base 21 moves in the z direction, the columnar portion 22 and the second movable portion 24 also move in the z direction. When the base 21, columnar portion 22, and second movable portion 24 are at their lower ends, the mounting portion 25 is positioned below the holding member 4 (see solid line in Figure 4). Also, when the base 21, columnar portion 22, and second movable portion 24 are at their upper ends, the mounting portion 25 is positioned above the holding member 4 (see dashed line in Figure 4).

[0041] Figure 5 is a partial perspective view of the inspection device 1 as seen from a diagonal front. In Figure 5, the state in which the mounting device 2 is positioned at the lower end is shown by a solid line, and the state in which it is positioned at the upper end is shown by a dashed line. The columnar part 22 has four columnar parts 22a, 22b, 22c, and 22d. When the base 21, the columnar part 22, and the second movable part 24 move upward from the lower end, the columnar parts 22a, 22b, 22c, and 22d are inserted into the holes 43 of the main body part 41.

[0042] The second movable section 24 has four second movable sections 24a, 24b, 24c, and 24d. Each of the second movable sections 24a, 24b, 24c, and 24d is provided with a columnar section 22a, 22b, 22c, and 22d. That is, the columnar sections 22a, 22b, 22c, and 22d are attached to the base 21 via the second movable sections 24a, 24b, 24c, and 24d.

[0043] The second moving sections 24a, 24b, 24c, and 24d each include rails 241a, 241b, 241c, and 241d, moving members 242a, 242b, 242c, and 242d, belts 243a, 243b, 243c, and 243d, and pulleys 244a, 244b, 244c, and 244d, respectively.

[0044] Rails 241a, 241b, 241c, and 241d are mounted on the base 21. The base 21 is rectangular in shape, and rails 241a, 241b, 241c, and 241 are each mounted along the diagonals of the base 21.

[0045] The movable members 242a, 242b, 242c, and 242d are provided on rails 241a, 241b, 241c, and 241d, respectively, and are movable along rails 241a, 241b, 241c, and 241d.

[0046] The columnar sections 22a, 22b, 22c, and 22d are provided on the movable members 242a, 242b, 242c, and 242d, respectively. Therefore, the columnar sections 22a, 22b, 22c, and 22d are movable along the rails 241a, 241b, 241c, and 241d.

[0047] The movable members 242a, 242b, 242c, and 242d are each provided with belts 243a, 243b, 243c, and 243d. The belts 243a, 243b, 243c, and 243d are wrapped around pulleys 244a, 244b, 244c, and 244d, respectively, and extend downward from the base 21 through holes 21a provided in the base 21. That is, the belts 243a, 243b, 243c, and 243d pull the movable members 242a, 242b, 242c, and 242d along the rails 241a, 241b, 241c, and 241d diagonally inward from the base 21.

[0048] A drive unit is provided on the underside of the base 21. The drive unit includes a belt winding unit (not shown) and an actuator 24e (see Figure 14). Belts 243a, 243b, 243c, and 243d are connected to the actuator 24e via the belt winding unit. The actuator 24e drives belts 243a, 243b, 243c, and 243d simultaneously by the same amount.

[0049] Each of the movable members 242a, 242b, 242c, and 242d is provided with an elastic member (not shown). This elastic member pulls the movable members 242a, 242b, 242c, and 242d along the rails 241a, 241b, 241c, and 241d diagonally outward from the base 21.

[0050] As a result, the moving members 242a, 242b, 242c, and 242d move along the rails 241a, 241b, 241c, and 241d via the belts 243a, 243b, 243c, and 243d and the elastic members. Specifically, the belts 243a, 243b, 243c, and 243d pull the moving members 242a, 242b, 242c, and 242d against the biasing force of the elastic members, causing the moving members 242a, 242b, 242c, and 242d and the columnar parts 22a, 22b, 22c, and 22d to move inward. Furthermore, when the belts 243a, 243b, 243c, and 243d are loosened by the drive unit, the moving members 242a, 242b, 242c, and 242d, and the columnar parts 22a, 22b, 22c, and 22d move outward due to the biasing force of the elastic members.

[0051] At this time, since the drive unit drives belts 243a, 243b, 243c, and 243d simultaneously by the same amount, the moving members 242a, 242b, 242c, and 242d and the columnar parts 22a, 22b, 22c, and 22d move simultaneously by the same amount.

[0052] Figure 6 is a plan view of the columnar parts 22a, 22b, 22c, 22d and the holding member 4 of the mounting device 2. The holding member 4 is made of aluminum and has an oxide film formed on its surface. The holding member 4 has a main body part 41 and a gripping part 42 provided on the main body part. The +z side surface of the main body part 41 is the mounting plane 41a. The main body part 41 has a hole 43 that penetrates in the z direction. The hole 43 has a rectangular hole 43e and holes 43a, 43b, 43c, 43d provided at the four corners of the hole 43e, respectively. Holes 43a, 43b, 43c, 43d and hole 43e are integrated to form the hole 43.

[0053] When the mounting device 2 is moved up and down, the base 21 and the main body 41 are positioned such that the diagonals of the base 21 and the diagonals of the main body 41 approximately coincide when viewed from the +z direction. The columnar parts 22a, 22b, 22c, and 22d are inserted into the holes 43a, 43b, 43c, and 43d, respectively. Furthermore, the columnar parts 22a, 22b, 22c, and 22d move within the holes 43a, 43b, 43c, and 43d, respectively, along the diagonals of the base 21 and the main body 41 (see arrows in Figure 6).

[0054] The back surface of the main body 41 is provided with a marking 41j consisting of one or more recesses 41i. In this embodiment, the marking 41j includes two recesses 41i. The base 21 is provided with a proximity sensor 26 (see Figure 14), which detects the holding member 4 and reads the marking 41j provided on the main body 41. In this embodiment, three proximity sensors 26 are provided, and each proximity sensor 26 detects the presence or absence of a recess 42i. In the configuration shown in Figure 6, the two proximity sensors 26 on the sides of the three proximity sensors 26 detect the recess 42i, and the central proximity sensor 26 detects that there is no recess 42i.

[0055] The marking 41j varies depending on the type (shape and size) of the mask M. For example, as shown in Figure 6, if recesses 42i are provided on both sides and there is no recess 42i between them, it indicates a 6x6 inch mask. Also, for example, if there are three recesses 42i, it indicates a 9x9 inch mask. Note that the form of the marking 41j is not limited to this, nor is the number of proximity sensors 26. At least one proximity sensor 26 is required.

[0056] The tips of the columnar sections 22a, 22b, 22c, and 22d are provided with mounting sections 25a, 25b, 25c, and 25d, respectively, on which the mask M is placed. By moving the columnar sections 22a, 22b, 22c, and 22d, masks M of various sizes can be placed on the mounting section 25.

[0057] Figure 7 is a schematic diagram of the columnar portion 22c of the mounting device 2 and the mounting portion 25c provided at the tip of the columnar portion 22c, where (A) is a perspective view, (B) is a plan view, and (C) is a DD cross-sectional view of (B). Note that the structures of the columnar portions 22a, 22b, 22c, 22d and the mounting portions 25a, 25b, 25c, 25d are identical, so the explanation of the columnar portions 22a, 22b, 22d and the mounting portions 25a, 25b, 25d is omitted.

[0058] The columnar portion 22c is columnar (rod-shaped), and when viewed from the vertically upward side (+z direction) (in a plan view), it is symmetrical with respect to the diagonal d, and the angle between two adjacent faces 221 and 222 is a right angle. However, the shape of the columnar portion 22c is not limited to this.

[0059] The columnar portion 22c is made of a material that is resistant to deformation, such as iron. The mounting portion 25c is made of a material that is resistant to damaging the mask M, such as a resin material like peak material, as it is used to mount the mask M and to slide the mask M during positioning.

[0060] The mounting section 25c has two surfaces 251 and 252 of different heights. Surface 251 is the tip surface of the columnar section 22c and is flat in this embodiment. Surface 252 is a surface that is stepped down from surface 251 (in the -z direction). The mask M is mounted on surface 252.

[0061] Faces 251 and 252 are symmetrical with respect to the diagonal d, and the angles between two adjacent sides 251a and 251b, and between two adjacent sides 252a and 252b, are right angles. Face 251 is located outside face 252. Here, "outside" means the side closer to the periphery of the base 21. That is, face 251 is located on the periphery side of the base 21, and face 252 is located on the center side of the base 21. This allows a rectangular mask M to be placed on face 252. However, the shapes of faces 251 and 252 when viewed from the +z direction are not limited to this.

[0062] Surface 252 is inclined at an angle θ1 with respect to the horizontal, such that its height decreases inward (as it moves away from surface 251). Furthermore, surface 252 is inclined at an angle θ1 with respect to the horizontal, such that its height increases towards both ends (as it moves away from the diagonal d). In other words, surface 252 is a composite surface formed by the joining of two surfaces in the center (on the diagonal d). The angle θ1 is preferably 1° to 5°, and in this embodiment it is 3°. Therefore, the contact area between the mask M placed on surface 252 and surface 252 is minimized, making it less likely for the film surface, which is the functional surface of the mask M, to be contaminated.

[0063] Furthermore, surfaces 253 and 254, which connect surfaces 251 and 252, are inclined at an angle θ2 with respect to the vertical, so that they slope outward as they become higher. The angle θ2 is preferably 1° to 5°, and in this embodiment it is 3°. Therefore, when the mask M placed on surface 252 comes into contact with surfaces 253 and 254, the contact area between the mask M and surfaces 253 and 254 is minimized, making the mask M less susceptible to contamination.

[0064] Surface 251 has arc-shaped recesses 255 at its inner corners. Surface 251 also has arc-shaped notches 256 and 257 at both inner ends. When viewed from the +z direction, the notches 256 and 257 coincide with a curve of arbitrary radius Ra centered at the center point O (see Figure 6) of the circle connecting the outer corners 258 of the multiple columnar parts 22 (mounting parts 25c). For example, radius Ra is more than half of 7.25 inches (18.415 cm), for example, 9.25 cm. This allows a circular mask M with a diameter of 7.25 inches to be placed on surface 252.

[0065] Next, the conveying device 3 will be described using Figure 8. Figure 8 is a plan view showing a schematic of the inspection device 1, with enlarged views of the main parts. The conveying device 3 mainly consists of a holding member 4, a pinion 31, a roller 32, and rails 33a, 33b, 33c, and 33d.

[0066] The conveying device 3 conveys the holding member 4 on which the mask M is placed, from a first position I (see dotted line) outside the frame 10 to a second position II (see solid line) inside the frame 10, and from the second position II back to the first position I, through the opening 11a of the frame 10. The first position I is any position near the front end (end in the -y direction) of the conveying device 3. The second position II is the position where the holding part 52 is provided, and when the holding member 4 is in the second position II, the front end surface 41b (see Figure 6) of the holding member 4 contacts the contact surface 52c of the holding part 52.

[0067] Rails 33a, 33b, 33c, and 33d are provided along the horizontal direction. Rails 33a and 33c are provided on a straight line L1, and rails 33b and 33d are provided on a straight line L2. Straight lines L1 and L2 are along the transport direction (y-direction) of the holding member 4, and straight lines L1 and L2 are parallel and at the same height (position in the z-direction). Rails 33a and 33b are provided on the outside of the frame 10, and rails 33c and 33d are provided on the inside of the frame 10.

[0068] The pinions 31 are provided on each of the rails 33a, 33b, 33c, and 33d. The number of pinions 31 provided on rails 33a, 33b, 33c, and 33d is not limited to the illustrated configuration. In this embodiment, multiple pinions 31 are provided on each of the rails 33a, 33b, 33c, and 33d, but it is sufficient for rails 33c and 33d to have at least one pinion 31. Rails 33a and 33b may have multiple pinions 31.

[0069] The pinion 31 mainly comprises a rotating shaft 31a provided along the z-direction and a pinion body 31b that is rotatable about the rotating shaft 31a. The pinion body 31b is, for example, a pinion gear with a module of 1.

[0070] Multiple rollers 32 are provided on each of the rails 33a, 33b, 33c, and 33d. Each roller 32 mainly has a rotation axis 32a that is approximately perpendicular to the straight lines L1 and L2, and a cylindrical roller body 32b that can rotate around the rotation axis 32a. A bearing is provided between the rotation axis 32a and the roller body 32b. The holding member 4 is mounted on multiple rollers 32. Note that the number of rollers 32 provided on rails 33a, 33b, 33c, and 33d is not limited to the configuration shown in the illustration.

[0071] Returning to the explanation of Figure 6, the main body 41 of the holding member 4 has two sides 41c and 41d adjacent to the mounting plane 41a. The sides 41c and 41d are substantially parallel to the conveying direction.

[0072] The gripping portion 42 is provided on the side opposite to the frame 10 (-y side), i.e., the end opposite to the tip surface 41b of the main body portion 41, when the holding member 4 is in the first position I. The gripping portion 42 has a rod-shaped gripping rod 42c provided along the x direction, and plate-shaped connecting portions 42a and 42b that connect both ends of the gripping rod 42c to the main body portion 41, respectively. The gripping rod 42c is, for example, a square rod. The connecting portions 42a and 42b have two sides 42d and 42e that are substantially parallel to the transport direction (y direction) of the holding member 4.

[0073] Figure 9 is a schematic diagram of the retaining member 4, where (A) is a cross-sectional view AA of Figure 6, (B) is a view from arrow B of Figure 6, and (C) is a view from arrow C of Figure 6. Sides 41c and 41d have vertical surfaces 41e and 41g and inclined surfaces 41f and 41h, respectively. The vertical surfaces 41e and 41g are perpendicular to the mounting plane 41a. The inclined surfaces 41f and 41h are inclined with respect to the vertical direction such that the width of the retaining member 4 narrows as it approaches the mounting plane 41a. Side 42d is on the same plane as the vertical surface 41e, and side 42e is on the same plane as the vertical surface 41g. The height of sides 42d and 42e is about 2 to 3 times the height of the vertical surfaces 41e and 41g.

[0074] The rack 44 is provided on two sides (sides 41c, 41d and sides 42d, 42e) that are substantially parallel to the transport direction (y-direction) of the holding member 4. The rack 44 has racks 44c, 44d provided on sides 41c, 41d (here, vertical surfaces 41e, 41g), and racks 44a, 44b provided on sides 42d, 42e. Racks 44a, 44c are located on the same plane, and racks 44b, 44d are located on the same plane. Racks 44a, 44b, 44c, 44d have a module of 1 and can mesh with the pinion 31. Racks 44a, 44b are formed across the entire sides 42d, 42e, and racks 44c, 44d are provided across the entire vertical surfaces 41e, 41g. Since the heights of the sides 42d and 42e (connecting sections 42a and 42b) are higher than the heights of the vertical surfaces 41e and 41g, the heights of racks 44a and 44b are higher than the heights of racks 44c and 44d.

[0075] Returning to the explanation of Figure 8, when the retaining member 4 is in the first position I, the pinions 31 provided on rails 33a and 33b are engaged with racks 44c and 44d, respectively. As the retaining member 4 moves in the +y direction from the first position I to the second position II and its tip surface 41b approaches the opening 11a, the pinions 31 engage with racks 44a, 44b, 44c, and 44d. As the retaining member 4 moves further in the +y direction, the pinions 31 provided on rails 33c and 33d and the pinions 31 provided on rails 33a and 33b engage with racks 44c and 44d, and the pinions 31 provided on rails 33a and 33b engage with racks 44a and 44b. In this way, the pinion 31 engages with the racks 44a, 44b, 44c, and 44d, allowing the holding member 4 to be transported in the y direction while maintaining its position in the x direction.

[0076] Subsequently, the retaining member 4 moves further in the +y direction, and when the tip of the retaining member 4 (near the tip surface 41b) is inserted into the retaining part 52, the side surface 41c of the main body portion 41 of the retaining member 4 is inserted into the rail 52a of the retaining part 52 of the inspection part 50, and the side surface 41d of the main body portion 41 of the retaining member 4 is inserted into the rail 52b of the retaining part 52.

[0077] Figure 10 schematically shows how the side surface 41c is inserted into the rail 52a. The rail 52a has an inclined surface 52d, and the inclined surface 52d and the inclined surface 41f come into contact, thereby positioning the inclined surface 41f, i.e., the main body 41, in the x and z directions.

[0078] Returning to the explanation of Figure 8, when the vicinity of the tip surface 41b of the retaining member 4 is inserted into the retaining part 52, the pinions 31 provided on rails 33a and 33b engage with racks 44a and 44b, and the pinions 31 provided on rails 33c and 33d engage with racks 44c and 44d. Up to this state, since the pinions 31 are engaged with racks 44a, 44b, 44c, and 44d, force is easily transmitted from the pinions 31 to racks 44a, 44b, 44c, and 44d. Furthermore, because the pinions 31 engage with racks 44a, 44b, 44c, and 44d, and the periphery (side surface 41c, 41d) of the main body is inserted into the retaining part 52 (rails 52a and 52b), the retaining member 4 is positioned in the x-direction, so the retaining member 4 does not move in the x-direction or rotate along the xy-plane during transport.

[0079] Subsequently, as the retaining member 4 moves in the +y direction until its tip surface 41b is near the contact surface 52c (near the second position II), most of the sides 41c and 41d are inserted into the rails 52a and 52b, and one of the pinions 31 provided on the rails 33c and 33d engages with the racks 44a and 44b, positioning the retaining member 4 in the x direction, similar to during transport. The tooth widths of the racks 44c and 44d are smaller than the tooth widths of the pinions 31, but the tooth widths of the racks 44a and 44b are larger than the tooth widths of the pinions 31, so force is easily transmitted from the pinions 31 to the racks 44a and 44b, allowing the retaining member 4 to move in the y direction.

[0080] Next, the drive of the pinion 31 of the conveying device 3 will be explained. Figure 11 is a schematic diagram showing the drive unit 35 that drives the pinion 31. Figure 11 shows the drive units 35 provided on rails 33a and 33c, but rails 33b and 33d are also provided with drive units 35 in the same way as rails 33a and 33c (explanation omitted).

[0081] The drive unit 35 includes a pulley 35a, a belt 35b, and an actuator 35c. The pulley 35a is mounted on the rotating shaft 31a and the rotating shaft of the actuator 35c. The belt 35b is wrapped around the pulley 35a. When the actuator 35c is driven, the pulley 35a, that is, the rotating shaft 31a and the pinion body 31b, rotate via the belt 35b.

[0082] By providing one drive unit 35 to each pinion 31 on rails 33a and 33c, all pinion bodies 31b on rails 33a and 33c can be rotated simultaneously by the same amount. Similarly, by providing one drive unit 35 to each pinion 31 on rails 33b and 33d, all pinion bodies 31b on rails 33b and 33d can be rotated simultaneously by the same amount.

[0083] Furthermore, since the actuator 35c can rotate in both forward and reverse directions, the pinion body 31b can be rotated in both forward and reverse directions, thereby allowing the retaining member 4 to be moved in the +y and -y directions.

[0084] Figure 12 schematically shows a state in which the tip surface 41b of the main body portion 41 of the holding member 4 is located near the contact surface 52c of the holding portion 52 of the inspection portion 50. The inspection portion 50 has an air suction portion 58. The air suction portion 58 has a connector 58a provided on the contact surface 52c and a suction hose 58b connected to the connector 58a. The suction hose 58b is connected to a suction pump (not shown).

[0085] The main body portion 41 is provided with air holes 45. One end of the air holes 45 opens to the front surface 41b, and the other end opens to the mounting surface 41a. The opening 45a of the air holes 45 that opens to the mounting surface 41a coincides with the mask M when viewed from the vertically upward side (+z direction).

[0086] Figure 13 shows a schematic diagram of the connector 58a. The connector 58a mainly comprises a joint portion 58c, cylindrical portions 58d and 58e, and an elastic member 58f. A threaded portion 58g is formed on the outer circumferential surface of the cylindrical portion 58e, and the connector 58a is provided on the contact surface 52c by screwing the threaded portion 58g into a threaded hole (not shown) provided in the holding portion 52. In addition, a threaded hole 58h is provided in the cylindrical portion 58e, and a suction hose 58b is provided in the cylindrical portion 58e via the threaded hole 58h.

[0087] The joint portion 58c is provided on the cylindrical portion 58d and can be joined to the opening 45b (see Figure 12). An elastic member 58f is provided between the cylindrical portion 58d and the cylindrical portion 58e. Therefore, the cylindrical portion 58d and the joint portion 58c are movable along the central axis ax.

[0088] Returning to the explanation of Figure 12, the connector 58a is provided on the contact surface 52c such that its central axis ax is aligned with the y direction. Therefore, when the tip surface 41b is located a few millimeters in front of the contact surface 52c (-y side), that is, when the tip surface 41b is not in contact with the contact surface 52c, the joint portion 58c (see Figure 13) is joined to the opening 45b. As a result, the mask M is drawn toward the mounting plane 41a through the air suction portion 58 and the air hole 45.

[0089] Subsequently, the holding member 4 is transported via the pinion 31 until the tip surface 41b contacts the contact surface 52c. Since the joint 58c is movable along the y direction (transport direction), the holding member 4 is transported in the +y direction while the joint 58c remains joined to the opening that opens to the tip surface 41b of the air hole 45. When the tip surface 41b contacts the contact surface 52c, the mask M is being drawn toward the mounting plane 41a, so the mask M is held on the mounting plane 41a so that it does not shift due to the impact when the tip surface 41b contacts the contact surface 52c.

[0090] Figure 14 is a block diagram showing the electrical configuration of the inspection device 1. The inspection device 1 includes a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input / output interface (I / F) 154, a communication interface (I / F) 155, and a media interface (I / F) 156, which are interconnected with actuators 14, 23c, 24e, 35c, 59a, 59b, proximity sensors 26, etc.

[0091] The CPU 151 operates based on programs stored in the RAM 152 and ROM 153, and controls each component. Signals are input to the CPU 151 from proximity sensors 26, etc. Signals output from the CPU 151 are output to actuators 14, 23c, 24e, 35c, 59a, 59b, etc.

[0092] RAM152 is volatile memory. ROM153 is non-volatile memory that stores various control programs, etc. The CPU151 operates based on the programs stored in RAM152 and ROM153, and controls each part. ROM153 also stores the boot program that the CPU151 runs when the inspection device 1 starts up, and programs that depend on the hardware of the inspection device 1. RAM152 stores programs executed by the CPU151 and data used by the CPU151.

[0093] The CPU 151 controls input / output devices 141 such as a touch panel, keyboard, and mouse via the input / output interface 154. The communication interface 155 receives data from other devices via the network 142 and transmits it to the CPU 151, and also transmits data generated by the CPU 151 to other devices via the network 142.

[0094] The media interface 156 reads programs or data stored in the storage medium 143 and stores them in the RAM 152. The storage medium 143 is, for example, an IC card or an SD card.

[0095] The programs that implement each function are, for example, read from the storage medium 143, installed in the inspection device 1 via the RAM 152, and executed by the CPU 151.

[0096] The CPU 151 has the function of a control unit 151a that controls each part of the inspection device 1 based on input signals. The control unit 151a is constructed by executing a predetermined program read by the CPU 151. The processing performed by the control unit 151a will be described in detail later.

[0097] The configuration of the inspection device 1 shown in Figure 14 is described as the main configuration in order to explain the features of this embodiment, and does not exclude configurations that are present in, for example, a general information processing device. The components of the inspection device 1 may be further classified into many components depending on the processing content, or one component may perform processing for multiple components.

[0098] The operation of the inspection device 1 configured in this way will now be explained. The following processes are mainly performed by the control unit 151a. First, the operator grasps the gripping rod 42c of the gripping part 42 of the holding member 4 and lifts the holding member 4, then places the holding member 4 on the roller 32 of the conveying device 3. Three proximity sensors 26 read the marking 41j, and based on the results, the control unit 151a controls the actuator 35c of the conveying device 3 and the actuator 24e of the placement device 2. Specifically, the control unit 151a controls the actuator 35c of the conveying device 3 to move the holding member 4 in the y direction, so that the center of the base 21 and the center of the main body 41 coincide. The control unit 151a also controls the actuator 24e of the placement device 2 to move the columnar part 22 of the placement device 2, so that the columnar part 22 is positioned to match the size of the mask M that will be placed on the holding member 4.

[0099] Next, the control unit 151a controls the actuator 23c of the mounting device 2 to move the base 21 of the mounting device 2 in the +z direction, causing the mounting portion 25, which is provided at the tip of the columnar portion 22 of the mounting device 2, to protrude in the +z direction from the mounting plane 41a of the main body portion 41 of the holding member 4. This makes it possible to place the mask M on the mounting portion 25.

[0100] The operator places the mask M on the mounting section 25 using a mask gripping device (not shown). When an instruction is received via the input / output device 141, the control unit 151a controls the actuator 24e of the mounting device 2 to move the columnar section 22 of the mounting device 2 inward by about 1 mm, and grips the mask M with the mounting section 25 of the mounting device 2. Because the surface 252 of the mounting section 25 is inclined at an angle θ1 with respect to the horizontal, only the corners of the mask M rub against the mounting section 25 when the columnar section 22 is moved inward, minimizing contamination of the mask M. However, this process is not mandatory.

[0101] Next, the control unit 151a controls the actuator 23c of the mounting device 2 to move the base 21 of the mounting device 2 in the -z direction, thereby placing the mask M, which is placed on the mounting section 25 of the mounting device 2, onto the mounting plane 41a. Because the mask M is held in place by the mounting section 25, the mask M does not move when the base 21 moves. When the base 21 is in the predetermined position, that is, the position where the mask M is placed on the mounting plane 41a, the control unit 151a controls the actuator 24e of the mounting device 2 to move the columnar section 22 of the mounting device 2 outward, thereby releasing the grip of the mask M by the mounting section 25. As a result, the mask M is placed on the holding member 4 by the mounting device 2.

[0102] When the base 21 is moved to the -z end, the control unit 151a controls the actuator 35c of the transport device 3 to drive the pinion 31 of the transport device 3 and transport the holding member 4 in the +y direction. At this time, the actuator 35c is controlled so that the acceleration is 0.1g or less so that the mask M placed on the mounting plane 41a of the holding member 4 does not shift on the mounting plane 41a.

[0103] When the operating current of actuator 35c reaches its maximum current value (overload), that is, when the front end surface 41b of the main body portion 41 of the holding member 4 comes into contact with the contact surface 52c of the holding portion 52, the control unit 151a stops actuator 35c. As a result, the holding member 4 is transported into the inspection device 1 by the transport device 3.

[0104] According to this embodiment, a columnar portion 22 is provided on a base 21 that is movable in the vertical direction, so as to protrude vertically upward, and a mounting portion 25 is provided at the tip of the columnar portion 22. When the base 21 is moved upward from the lower end, the columnar portion 22 is inserted into the hole 43 of the holding member 4, and when the base 21 is at the upper end, the mounting portion 25 is positioned above the mounting plane 41a of the holding member 4. Therefore, the worker only needs to place the mask M on the mounting portion 25 and does not need to place the mask M directly on the mounting plane 41a. Consequently, the mask M and the mounting plane 41a are less likely to be damaged when the plate-shaped mask M is placed on it.

[0105] For example, when placing the mask M on the mounting surface 41a manually, it is difficult to maintain the mask M's horizontal position, and there is a risk of dust generation if the mask M is bumped against the mounting surface 41a, causing part of the mask M to chip or part of the mounting surface 41a to deform. In contrast, according to this embodiment, the mask M is not placed directly on the mounting surface 41a, but the mounting device 2 places the mask M, which is placed horizontally on the mounting section 25, onto the mounting surface 41a while maintaining its position. This makes it possible to avoid damaging the mask M or the mounting surface 41a, or generating dust, when placing the plate-shaped mask M.

[0106] Furthermore, according to this embodiment, the columnar parts 22a to 22d are provided on the base 21 via the second movable parts 24a to 24d, and the columnar parts 22a to 22d are made movable along the rails 241a to 241d provided on the base 21, so that a single mounting device 2 can accommodate masks M of various sizes.

[0107] Furthermore, according to this embodiment, since the belts 243a, 243b, 243c, and 243d provided on the moving members 242a, 242b, 242c, and 242d are driven simultaneously by the same amount, the columnar parts 22a, 22b, 22c, and 22d can be moved simultaneously by the same amount.

[0108] Furthermore, according to this embodiment, the surface 252 on which the mask M is placed is inclined at an angle θ1 (1° to 5°) with respect to the horizontal direction such that its height decreases inward, minimizing the contact area between the mask M placed on surface 252 and surface 252, making it less likely for the film surface of the mask M to be contaminated. In addition, the surfaces 253 and 254 connecting surface 251 and surface 252 are inclined at an angle θ2 (1° to 5°) with respect to the vertical direction such that they inclin outward as they become higher, minimizing the contact area between the mask M placed on surface 252 and surfaces 253 and 254 when the mask M comes into contact with surfaces 253 and 254, making it less likely for the mask M to be contaminated.

[0109] Furthermore, according to this embodiment, the notches 256 and 257 provided on the surface 251 coincide with a curve of any radius Ra centered on the center point O of the circle connecting the outer corners 258 of the multiple columnar parts 22 (mounting parts 25c) when viewed from the +z direction. Therefore, not only a rectangular mask M but also a circular mask M with a diameter of Ra × 2 can be placed on the mounting part 25.

[0110] Furthermore, according to this embodiment, a proximity sensor 26 is provided on the base 21. The proximity sensor 26 detects the holding member 4 and reads the marking 41j provided on the back surface of the holding member 4. This allows the actuator 35c to be controlled to move the holding member 4 in the y-direction, aligning the center of the base 21 with the center of the main body 41. Additionally, the actuator 24e is controlled to move the columnar portion 22, positioning it to match the size of the mask M placed on the holding member 4.

[0111] Furthermore, according to this embodiment, a pinion 31 and a roller 32 are provided on rails 33a, 33c and rails 33b, 33d, respectively, which are located on straight lines L1 and L2 along the transport direction (y direction). The holding member 4 is placed on the roller 32, and the pinion 31 engages with the racks 44a, 44b, 44c, and 44d. As a result, the holding member 4 can be transported along the straight lines L1 and L2 while positioned in the x direction. In addition, since the holding member 4 does not move in the x direction or rotate along the xy plane during transport, the holding member 4 does not collide with the holding part 52, etc., within the inspection device 1, and as a result, dust generation can be prevented.

[0112] Furthermore, according to this embodiment, when the retaining member 4 is located in or near the second position II inside the frame 10, at least one of the pinions 31 provided on the rails 33c and 33d engages with the racks 44a and 44b, thereby enabling force to be transmitted from the pinion 31 to the retaining member 4. Therefore, the retaining member 4 can be reliably moved to the second position II.

[0113] Furthermore, according to this embodiment, the sides 41c and 41d each have vertical surfaces 41e and 41g and inclined surfaces 41f and 41h, respectively, and the inclined surfaces 41f and 41h are in contact with the inclined surface 52d of the holding part 52, and racks 44c and 44d are provided on the vertical surfaces 41e and 41g, so that the main body 41 can be positioned in the x and z directions while the holding member 4 is transported in the y direction.

[0114] Furthermore, according to this embodiment, the gripping portion 42 has side surfaces 42d and 42e that are on the same plane as the vertical surfaces 41e and 41g, and racks 44a and 44b are formed on the entire surface of side surfaces 42d and 42e. Therefore, when the holding member 4 is pushed to the second position II in the +y direction, force is easily transmitted from the pinion 31 to the racks 44a and 44b.

[0115] Furthermore, according to this embodiment, the contact surface 52c to which the tip surface 41b of the holding member 4 abuts is provided with a connector 58a of the air suction unit 58. Since the connector 58a has a joint portion 58c that is movable in the y direction, the joint portion 58c is joined to the opening 45b when the tip surface 41b is not in contact with the contact surface 52c, and the mask M is sucked toward the mounting plane 41a. This prevents the mask M from shifting due to the impact when the tip surface 41b abuts the contact surface 52c.

[0116] Furthermore, according to this embodiment, a pulley 35a is provided on the rotation axis 31a of the pinion 31, and by wrapping one belt 35b around the pulleys 35a provided on rails 33a and 33c, and one belt 35b around the pulleys 35a provided on rails 33b and 33d, all pinion bodies 31b provided on rails 33a and 33c can be rotated simultaneously by the same amount, and all pinion bodies 31b provided on rails 33b and 33d can be rotated simultaneously by the same amount.

[0117] In this embodiment, the base 21 is moved using actuator 24f and the columnar section 22 is moved using actuator 24e. However, actuators 24e and 24f are not essential, and the operator may manually move the base 21 and columnar section 22. However, even when manually moving the columnar section 22, it is desirable to have a mechanism that allows all four columnar sections 22 to move simultaneously.

[0118] Furthermore, in this embodiment, the moving members 242a, 242b, 242c, and 242d are moved by the belts 243a, 243b, 243c, and 243d pulling against the biasing force of the elastic member. However, the mechanism for moving the moving members 242a, 242b, 242c, and 242d is not limited to this. For example, pulleys may be provided near both ends of the rails 241a, 241b, 241c, and 241d, and the belts 243a, 243b, 243c, and 243d may be wrapped around these two pulleys. As a result, by moving the belts 243a, 243b, 243c, and 243d in two directions, the moving members 242a, 242b, 242c, and 242d can be moved in two directions, inward and outward.

[0119] Furthermore, in this embodiment, the retaining member 4 was transported using the actuator 35c, but the actuator 35c is not essential, and the operator may manually move the retaining member 4. In this case, the pinion 31 can be made to rotate freely, and by rotating the pinion 31 in accordance with the movement of the retaining member 4, the x-direction of the retaining member 4 can be positioned, preventing the retaining member 4 from rotating during movement.

[0120] Furthermore, in this embodiment, the retaining member 4 is made of aluminum and has an oxide film formed on its surface, but the configuration of the retaining member 4 is not limited to this. Figure 15 is a schematic cross-sectional view of the main body portion 41A of a retaining member according to a modified example. The main body portion 41A has a central portion 41m made of aluminum and an outer portion 41n made of stainless steel or ceramics. The central portion 41m includes a mounting surface 41a and has an oxide film formed on its surface. The outer portion 41n includes sides 41c and 41d.

[0121] The mounting surface 41a on which the mask M is placed needs to be made of aluminum with an oxide film formed on it, but the oxide film has the problem of being easily peeled off by impact. Therefore, by forming the outer part 41n on which the rack 44 is formed using stainless steel or ceramics, which are less likely to be damaged by impact, the generation of dust caused by the rack 44 and pinion 31 colliding can be greatly reduced.

[0122] <Second Embodiment> In the second embodiment of the present invention, the rail 33a is movable in the x-direction. The only difference between the inspection device 1 of the first embodiment and the inspection device 1A of the second embodiment is the transport device; therefore, only the transport device of the inspection device of the second embodiment will be described below. Parts identical to those of the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0123] Figure 16 is a schematic plan view of the inspection device 1A. Note that only the essential parts are shown in Figure 16. The conveying device 3A mainly consists of a holding member 4, a pinion 31, rollers 32, 32A, rails 33a, 33b, 33c, 33d, and rail 36. Note that the rails 33c, 33d and the pinions 31 and rollers 32 provided on rails 33c, 33d are not shown in Figure 16.

[0124] Rail 33a is movable in the x-direction along rail 36. Rail 33a is provided with roller 32A. The difference between roller 32 and roller 32A is the width in the x-direction, with roller 32A being wider than roller 32.

[0125] Before placing the holding member 4 on the conveying device 3A, the worker moves rail 33a along rail 36 in the -x direction. Because the width of roller 32A is wider than that of roller 32, the holding member 4 can be placed on rollers 32 and 32A even if rail 33a has been moved in the -x direction.

[0126] After the operator places the holding member 4 on the rollers 32 and 32A, they move the rail 33a in the +x direction to engage the pinion 31 and the rack 44. The subsequent processing is the same as in the inspection device 1.

[0127] According to this embodiment, the pinion 31 and the rack 44 do not need to engage when the holding member 4 is placed on the conveying device 3A, thus preventing damage caused by collision between the pinion 31 and the rack 44. In particular, because the modules of the pinion 31 and the rack 44 are small (1), if the rail 33a is not moved, the teeth of the pinion 31 and the teeth of the rack 44 may not engage when the holding member 4 is placed, potentially causing some teeth to break and dust to be brought into the inspection device. However, moving the rail 33a prevents this problem.

[0128] In this embodiment, the worker moved the rail 33a along the rail 36 in the x-direction, but the transport device 3A may also move the rail 33a along the rail 36. In this case, the control unit 151a may move the rail 33a via an actuator (not shown) in response to instructions from the input / output device 141, etc.

[0129] <Third Embodiment> A third embodiment of the present invention is a configuration in which the mask M is automatically placed on the placement section 25. The only difference between the inspection device 1 of the first embodiment and the inspection device 1B of the third embodiment is the placement device, so only the placement device will be described below. Parts identical to those of the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0130] Figure 17 is a schematic diagram of the inspection device 1B, where (A) is a top view and (B) is a front view. Note that only the essential parts are shown in Figure 17.

[0131] The mounting device 2A of the inspection device 1B mainly comprises a base 21, a plurality of columnar parts 22, a first moving part 23 (not shown in Figure 17), a second moving part 24 (not shown in Figure 17), a reticle mask pod 63, a storage rack 70, and a mask transport part 80. The reticle mask pod 63 and the storage rack 70 are provided adjacent to the base 21 on the front side (-y side) of the front part 11 when viewed from above in the vertical direction. In this embodiment, the reticle mask pod 63 is provided on the -x side of the holding member 4 placed in the first position I, and the storage rack 70 is provided on the +x side of the holding member 4 placed in the first position I, sandwiching the base 21.

[0132] The reticle smif pod 63 mainly comprises a base 63a, a mounting section 63b, and a lid 63c. The mounting section 63b is provided on the base 63a, and the mask M is placed on its tip. The shape of the mounting section 63b is the same as that of the mounting section 25. The lid 63c is provided on the base 63a so as to be openable and closable, so as to cover the mounting section 63b and the mask M. Contamination of the mask M can be prevented by placing the mask M on the mounting section 63b and closing the lid 63c. In addition, the inside of the lid 63c can be filled with nitrogen by a nitrogen filling section (not shown).

[0133] The storage rack 70 mainly comprises a frame 71 and a plurality of mask storage sections 72. The mask storage sections 72 are movable in the z direction by a moving mechanism including an actuator 73 (see Figure 18). In this embodiment, the storage rack 70 has five mask storage sections 72, but the number of mask storage sections 72 in the storage rack 70 is not limited to this.

[0134] The mask storage section 72 has a base 72a and a mounting section 72b provided on the base 72a. The base 72a is provided so as to be movable in the x direction by a moving mechanism (not shown) having an actuator 72c (see Figure 18). The mask M is placed on the mounting section 72b, and the mask M moves in the x direction together with the base 72a. The shape of the mounting section 72b is the same as that of the mounting section 25.

[0135] The mask transport unit 80 is located in front of the reticle smifpod 63, the base 21, and the storage rack 70 (-y side). The mask transport unit 80 mainly consists of arms 81 and 82 and a rail 83. Arms 81 and 82 are identical in shape and hold the mask M from below. Arms 81 and 82 have a roughly U-shaped portion, which is aligned horizontally. Therefore, the arms 81 and 82 lift the mask M by bringing the roughly U-shaped portion into contact with the back surface of the mask M, thereby maintaining the mask M's horizontal position.

[0136] Arms 81 and 82 are mounted on rail 83. Actuator 84 (see Figure 18) allows arms 81 and 82 to move along rail 83 in the x-direction.

[0137] Furthermore, the arms 81 and 82 are movable in the y-direction by a moving mechanism (not shown) including actuator 85 (see Figure 18), and the arms 81 and 82 are movable in the z-direction by a moving mechanism (not shown) including actuator 86 (see Figure 18). The moving mechanism may also include rails, which are not shown.

[0138] Figure 18 is a block diagram showing the electrical configuration of the inspection device 1B. The inspection device 1B has a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input / output interface (I / F) 154, a communication interface (I / F) 155, and a media interface (I / F) 156, which are interconnected with actuators 14, 24e, 24f, 35c, 59a, 59b, 72c, 73, 84, 85, 86, proximity sensor 26, etc.

[0139] The operation of the inspection device 1B configured in this way will now be explained. The following processes are mainly performed by the control unit 151a. In this embodiment, the mask M placed on the mask storage section 72 of the storage rack 70 is placed on the holding member 4 for inspection, and the inspected mask M is placed on the reticle mask pod 63. The reticle mask pod 63 has its lid 63c open, and the mounting section 63b is exposed.

[0140] First, the worker grasps the gripping rod 42c of the gripping portion 42 of the holding member 4 and lifts the holding member 4, then places the holding member 4 on the roller 32 of the conveying device 3. Three proximity sensors 26 read the markings, and the control unit 151a controls the actuator 35c of the conveying device 3 to move the holding member 4 in the y direction, aligning the center of the base 21 with the center of the main body 41. The control unit 151a also controls the actuator 24e of the mounting device 2A to move the columnar portion 22 of the mounting device 2A, positioning the columnar portion 22 to match the size of the mask M to be placed on the holding member 4.

[0141] Next, the control unit 151a controls the actuator 73 of the storage rack 70 to make the height (position in the z direction) of the mask storage section 72 on which the mask M to be inspected is placed approximately the same as the height of the mounting section 25 provided at the tip of the columnar section 22 of the mounting device 2A. In Figure 16(B), the height of the second mask storage section 72 from the top is approximately the same as the height of the mounting section 25.

[0142] Next, the control unit 151a controls the actuator 73 of the storage rack 70 to move the mask storage section 72 on which the mask M to be inspected is placed in the -x direction, exposing the mask M to the outside of the frame 71 of the storage rack 70.

[0143] Next, the control unit 151a controls the actuator 84 of the mask transport unit 80 to move the arms 81 and 82 of the mask transport unit 80 in the x-direction along the rail 83 of the mask transport unit 80, so that the x-direction position of arm 81 matches that of the mask M placed outside the frame 71, and the x-direction position of arm 82 matches that of the holding member 4 (mounting device 2).

[0144] Next, the control unit 151a controls the actuator 86 of the mask transport unit 80 to move the arms 81 and 82 in the z direction so that the height of the arms 81 and 82 is lower than the height of the mask M. The control unit 151a also controls the actuator 85 of the mask transport unit 80 to move the arms 81 and 82 in the +y direction so that the y-direction position of the arms 81 and 82 matches that of the mask storage unit 72 and the holding member 4 (mounting device 2) of the storage rack 70 (see the dotted line in Figure 16(A)).

[0145] When the y-direction positions of the mask storage unit 72 and the arm 81, and the y-direction positions of the holding member 4 (mounting device 2) and the arm 82 coincide, the control unit 151a controls the actuator 86 to move the arms 81 and 82 in the +z direction, thereby lifting the mask M from the mounting section 72b and mounting section 25 of the mask storage unit 72 (see the dashed line in Figure 16(B)).

[0146] Next, the control unit 151a controls the actuator 84 of the mask transport unit 80 to move the arms 81 and 82 along the rail 83 in the -x direction, so that the x-direction position of arm 81 and the holding member 4 (mounting device 2) matches, and the x-direction position of arm 82 and the reticle smifpod 63 matches.

[0147] When the x-direction positions of arm 81 and holding member 4 (mounting device 2A) and the x-direction positions of arm 82 and reticle smifpod 63 coincide, the control unit 151a controls the actuator 86 of the mask transport unit 80 to move arms 81 and 82 in the -z direction, and places the mask M on the mounting unit 25 and the mounting unit 63b of the reticle smifpod 63.

[0148] This places the mask M, before inspection, onto the mounting section 25 of the mounting device 2A. The subsequent processing by the inspection device 1B is the same as that of the inspection device 1, so the explanation is omitted.

[0149] The mask M placed on the mounting section 25 is the mask M after it has been inspected by the inspection device 1. Therefore, the inspected mask M is placed on the mounting section 63b. After that, the operator closes the lid 63c of the reticle smif pod 63, stores the inspected mask M inside the reticle smif pod 63, and replaces the reticle smif pod 63 with the mask M with an empty reticle smif pod 63.

[0150] According to this embodiment, the mounting section 63b and the mounting section 72b are provided adjacent to the base 21, and the arms 81 and 82 hold the mask M from below. By moving the arms 81 and 82 along the rail 83, the mask M can be placed on the mounting section 25 or removed from the mounting section 25 without the need for an operator.

[0151] In this embodiment, the mounting device 2A has a reticle smif pod 63, a storage rack 70, and a mask transport unit 80, but it is sufficient to have either the reticle smif pod 63 or the storage rack 70. For example, the mask transport unit 80 may transport the mask M before inspection from the mounting unit 72b of the mask storage unit 72 to the mounting unit 25, and then transport the mask M after inspection from the mounting unit 25 to the mask storage unit 72 (mounting unit 72b). Alternatively, for example, the mask M after inspection may be transported from the mounting unit 25 to the reticle smif pod 63 (mounting unit 63b). In these cases, the mask transport unit 80 only needs to have one arm 81.

[0152] <Fourth Embodiment> A fourth embodiment of the present invention is a configuration in which a part of the pinion 31 of the conveying device is provided in the inspection unit 50. Since the only difference between the inspection device 1 of the first embodiment and the inspection device 1C of the fourth embodiment is the conveying device, only the conveying device of the inspection device of the fourth embodiment will be described below. Parts identical to those of the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0153] Figure 19 is a schematic plan view of the inspection device 1C. Note that only the essential parts are shown in Figure 19. The conveying device 3B of the inspection device 1C mainly consists of a holding member 4, pinions 31 and 31A, rollers 32 and 32B, rails 33a, 33b, 33c, and 33d, a gear 34, and a switching mechanism 37. Note that the rails 33a and 33b and the pinions 31 and rollers 32 provided on rails 33a and 33b are not shown in Figure 19.

[0154] The pinion 31A and roller 32B are provided on the first stage 51A. The pinion 31A is configured such that its body is rotatably mounted on a rotating shaft provided on the first stage 51A. The roller 32B is configured such that its body is rotatably mounted on a rotating shaft provided on the first stage 51A.

[0155] The first stage 51A differs from the first stage 51 only in its shape on the -y side; otherwise, it is the same. The pinion 31A and roller 32B move together with the first stage 51A in the x and y directions. Figure 19 illustrates the state in which the first stage 51A is in the loading position (the position in which the mask M is loaded by the conveying device 3B).

[0156] A switching mechanism 37 is provided on the pinion 31 located near the +y end of rails 33c and 33d. The switching mechanism 37 mainly consists of a plate-shaped member 371, an elastic member 372, and a stopper pin 373.

[0157] The plate-shaped member 371 is rotatably mounted on the rotation axis of the pinion 31. A gear 34 is provided on the plate-shaped member 371. When the plate-shaped member 371 rotates around the rotation axis of the pinion 31, the position of the gear 34 changes in accordance with the rotation of the plate-shaped member 371. The gear 34 is configured such that the gear body 34b is rotatably mounted on a rotation axis 34a provided on the plate-shaped member 371.

[0158] The elastic member 372 is, for example, a tension spring, which biases the plate-shaped member 371 with a force in the direction that brings the gear 34 closer to the rails 33c and 33d (see arrow in Figure 19).

[0159] When the first stage 51A is not in the loading position, the biasing force of the elastic member 372 causes the plate-shaped member 371 to rotate (see the black arrow in Figure 19), and the plate-shaped member 371 comes into contact with the stopper pin 373. When the first stage 51A moves to the loading position (moves in the -y direction), as shown by the white arrow in Figure 19, the pinion 31A also moves in the -y direction along with the first stage 51A, and the pinion 31A presses against the gear 34, i.e., the plate-shaped member 371, against the biasing force of the elastic member 372. As a result, the gear 34 and the pinion 31A mesh together.

[0160] Figure 20 schematically shows the state of the pinion 31, 31A and gear 34 when the first stage 51A is moved to the loading position, with (A) showing the state just before the loading position and (B) showing the state at the loading position.

[0161] Just before reaching the loading position, as shown in Figure 20(A), the gear 34 and pinion 31A are further away from their meshing position. Subsequently, the pinion 31A moves toward the loading position in the direction of the white arrow in Figure 20(A). As a result, as shown in Figure 20(B), the pinion 31A moves toward the loading position, and the gear 34 and pinion 31A mesh correctly.

[0162] At this time, the elastic member 372 applies force to the first stage 51A via the pinion 31A, but since the plate-shaped member 371 is rotatable against the biasing force of the elastic member 372, no excessive force is applied to the first stage 51A.

[0163] Note that just before reaching the loading position, there may be cases where the phase of gear 34 and the phase of pinion 31A do not match (see the dashed line in Figure 20(A)). However, since pinion 31A can rotate freely, the biasing force of the elastic member 372 causes pinion 31A to rotate to match the phase of gear 34.

[0164] The operation of the inspection device 1C configured in this way will now be explained. The following processes are mainly performed by the control unit 151a. Note that the electrical configuration of inspection device 1C is the same as that of inspection device 1, so the explanation will be omitted.

[0165] First, the control unit 151a controls the actuators 59a and 59b to move the first stage 51A to the loading position, as shown in Figure 19, and engage the gear 34 and pinion 31A.

[0166] Subsequently, as in the case of inspection device 1, once the holding member 4 is placed on the roller 32 of the transport device 3B and the mask M is placed on the holding member 4, the control unit 151a controls the actuator 35c of the transport device 3B to drive the pinion 31 of the transport device 3B, and transports the holding member 4 in the +y direction. Because the phases of the pinions 31 and 31A are aligned (see Figure 20), the rack 44 engages correctly with the pinions 31 and 31A, and the holding member 4 is smoothly transported to the holding unit 52.

[0167] Furthermore, when the first stage 51A, i.e., the pinion 31A, is moved to the loading position, the teeth of the gear 34 and the teeth of the pinion 31A may come into contact, and there is a risk that the pinion 31A may not be able to rotate in sync with the phase of the gear 34. In this case, the teeth of the pinion 31A press against the teeth of the gear 34 until the pinion 31 and gear 34 start to drive, and the contact between the teeth of the pinion 31A and the teeth of the gear 34 is maintained by the biasing force of the elastic member 372. When the pinion 31 and gear 34 start to drive (rotate), the contact between the teeth of the pinion 31A and the teeth of the gear 34 is released, and the teeth of the pinion 31A move between the teeth of the gear 34. Consequently, the biasing force of the elastic member 372 causes the gear 34 to move toward the pinion 31A, causing the gear 34 and pinion 31A to mesh and the phases of the pinion 31 and pinion 31A to align.

[0168] Subsequently, as in the case of inspection device 1, when the front end surface 41b of the main body portion 41 of the holding member 4 comes into contact with the contact surface 52c of the holding portion 52, the control unit 151a stops the actuator 35c of the transport device 3B. As a result, the transport device 3B transports the holding member 4 into the interior of inspection device 1C.

[0169] According to this embodiment, by providing the pinion 31A on the first stage 51A, the pinion 31A can be brought closer to the holding portion 52. As a result, regardless of the size of the gripping portion 42, the holding member 4 can be pushed all the way in by the pinion 31A.

[0170] In this embodiment, there was only one gear 34, but the number of gears 34 is not limited to one. For example, if the distance between the rails 33c and 33d and the holding part 52 is large, the pinion 31 and pinion 31A may be connected by multiple gears.

[0171] Figure 21 is a schematic diagram of a modified transport device 3C. Figure 21 shows the state in which the first stage 51A (not shown in Figure 21), i.e., the pinion 31A, is in the loading position. The transport device 3C mainly consists of a holding member 4, pinions 31 and 31A, rollers 32 and 32B, rails 33a, 33b, 33c, and 33d, a gear 34A, and a switching mechanism 37A. In Figure 21, the rails 33a and 33b, the pinions 31 and rollers 32 and roller 32B provided on rails 33a and 33b are not shown.

[0172] A switching mechanism 37A is provided on the pinion 31 located near the +y end of rails 33c and 33d. The switching mechanism 37A mainly consists of a plate-shaped member 371A, an elastic member 372 (not shown in Figure 21), and a stopper pin 373. The plate-shaped member 371A differs in size from the plate-shaped member 371.

[0173] The plate-shaped member 371A is rotatably mounted on the rotation axis of the pinion 31. A gear 34A is provided on the plate-shaped member 371A. The gear 34A has three gears 341, 342, and 343. Each of the gears 341, 342, and 343 is configured such that its gear body 34b is rotatably mounted on a rotation axis 34a provided on the plate-shaped member 371A. When the plate-shaped member 371A rotates around the rotation axis of the pinion 31, the position of the gears 34A changes in accordance with the rotation of the plate-shaped member 371A.

[0174] When the first stage 51A is not in the loading position, the biasing force of the elastic member 372 causes the plate-shaped member 371A to come into contact with the stopper pin 373. When the first stage 51A moves to the loading position, the pinion 31A pushes the gear 343 against the biasing force of the elastic member 372, and the gear 343 meshes with the pinion 31A.

[0175] As shown in this modified example, by using multiple gears 341, 342, and 343, the distance between the rails 33c and 33d and the retaining part 52 can be increased, or the pinion 31A can be brought closer to the retaining part 52.

[0176] Although embodiments of this invention have been described in detail above with reference to the drawings, the specific configuration is not limited to these embodiments, and design modifications and the like are also included within the scope of the gist of this invention. Those skilled in the art can modify, add, or change each element of the embodiments as appropriate.

[0177] Furthermore, in this invention, "approximately" is a concept that includes not only cases where something is strictly identical, but also errors or deformations that do not result in a loss of identity. For example, "approximately horizontal" is not limited to cases where something is strictly horizontal, but is a concept that includes errors of, for example, a few degrees. Also, for example, when simply expressing parallel, orthogonal, etc., it includes not only cases where something is strictly parallel, orthogonal, etc., but also cases where something is approximately parallel, approximately orthogonal, etc. Furthermore, in this invention, "neighborhood" means including a certain range (which can be arbitrarily defined) of area near a reference position. For example, when referring to the neighborhood of A, it is a concept that indicates a certain range of area near A, which may or may not include A. [Explanation of Symbols]

[0178] 1, 1A, 1B, 1C: Inspection device 2, 2A: Mounting device 3, 3A, 3B, 3C: Conveyance device 4: Retaining member 10: Frame 11: Front view 11a: Opening 12: Opening and closing doors 13: Rail 14: Actuator 21: Base 21a: Hole 22, 22a, 22b, 22c, 22d: Columnar part 23: First Mobile Unit 23a: Rail 23b: Movable member 23c: Actuator 24, 24a, 24b, 24c, 24d: 2nd moving part 24e, 24f: Actuator 25, 25a, 25b, 25c, 25d: Mounting section 26: Proximity sensor 31, 31A: Pinion 31a: Rotation axis 31b: Pinion body 32, 32A, 32B: Laura 32a: Rotation axis 32b: Roller body 33a, 33b, 33c, 33d: Rails 34,34A: Gear 34a: Rotation axis 34b: Gear body 35: Drive unit 35a: Pulley 35b: Belt 35c: Actuator 36: Rail 37,37A: Switching mechanism 41, 41A: Main body 41a: Mounting plane 41b:Tip surface 41c, 41d: Side view 41e, 41g: Vertical surface 41f, 41h: Inclined surface 41i: recessed 41j: Marking 41m:Central part 41n :Outer part 42: Grip part 42a, 42b: Connection part 42c: Grip rod 42d, 42e: Side view 42i: recessed 43, 43a, 43b, 43c, 43d, 43e: Hole 44, 44a, 44b, 44c, 44d: storage 45: Air vent 45a, 45b: Opening 50: Inspection Department 51, 51A: Stage 1 52: Holding part 52a, 52b: Rail 52c: Contact surface 52d: Inclined surface 53: Stage 2 54, 56: Belt 55, 57: Rails 58: Air intake section 58a: Connector 58b: Suction hose 58c: Joint 58d, 58e: Cylindrical part 58f: Elastic member 58g: Screw part 58h: Screw hole 59, 59a, 59b: Actuators 61: Vibration isolation table 62: Surface plate 62b: Mounting section 63: Reticulumyphpod 63a: Bass 63b: Mounting section 63c: Lid 70: Storage rack 71: Frame 72: Mask storage section 72a: Bass 72b: Mounting section 72c, 73: Actuator 80: Mask transport unit 81, 82: Arm 83: Rail 84, 85, 86: Actuator 141: Input / Output Devices 142: Network 143:Storage medium 151: CPU 151a: Control Unit 152: RAM 153 :ROM 154: Input / Output Interface 155: Communication Interface 156: Media Interface 241, 241a, 241b, 241c, 241d: Rails 242a, 242b, 242c, 242d: Movable members 243a, 243b, 243c, 243d: Belt 244a, 244b, 244c, 244d: Pulley 251, 252: Surface 253, 254: Surface 255: recess 256, 257: Notches 258: corner 341, 342, 343: Gear 371371A: Plate-shaped member 372: Elastic member 373: Stopper pin 611: Bass 612: Frame 612a :hole 613: Movable member 613a: Rod-shaped member 613b, 613e: Positioning members 613c: Cone section 613d: Plate-like part

Claims

1. A conveying device that transports a holding member having a mounting surface on which a plate-shaped object is placed, from a first position outside the frame to a second position inside the frame, through an opening in the frame, A first rail, a second rail, a third rail, and a fourth rail are provided along the horizontal direction, Multiple rollers are provided on each of the first rail, the second rail, the third rail, and the fourth rail, One or more pinions are provided on each of the first rail, the second rail, the third rail, and the fourth rail, Equipped with, The first rail and the third rail are provided on the outside of the frame, and the second rail and the fourth rail are provided on the inside of the frame. The first rail and the second rail are provided on a first straight line substantially parallel to the transport direction of the holding member. The third rail and the fourth rail are provided on a second straight line that is parallel to and at the same height as the first straight line. The roller is provided on the first rotation axis, and the first rotation axis is substantially perpendicular to the first straight line and the second straight line. The holding member is placed on a plurality of rollers, The holding member has racks on two sides substantially parallel to the transport direction that engage with the pinion. A conveying device characterized by the following features.

2. The holding member comprises a main body having the aforementioned surface plane and a gripping portion provided on the main body, When the retaining member is in the second position, the periphery of the main body is inserted into the retaining portion located in the second position. At least one of the pinions provided on the second rail and the fourth rail engages with the first rack provided on the gripping portion of the rack. The conveying device according to feature 1.

3. The main body has a first side and a second side, which are two sides adjacent to the plane described above. The first and second sides each have a first inclined surface that is inclined with respect to the vertical direction such that the width of the holding member narrows as it approaches the aforementioned plane, and a vertical surface perpendicular to the aforementioned plane. The first inclined surface contacts the second inclined surface of the holding portion, The rack has a second rack provided on the vertical surface. The conveying device according to feature 2.

4. The gripping portion comprises a rod-shaped gripping rod extending substantially perpendicular to the first and second straight lines, and a plate-shaped first connecting portion and a second connecting portion that connect both ends of the gripping rod to the main body portion, respectively. The heights of the first and second connecting portions are greater than the height of the vertical surface. The first rack is provided on the entire end face of the first and second connecting portions, The first rack and the second rack are located on the same plane. The conveying device according to feature 3.

5. The retaining member has a front end surface that faces the frame when the retaining portion is in the first position, The holding member has a contact surface that the tip surface abuts against, The aforementioned contact surface is provided with an air suction section having a connector and a suction hose connected to the connector. The retaining member has an air hole at one end that opens to the front surface and at the other end that opens to the aforementioned surface. The connector has a connecting portion that can be joined to the air vent, The joint is movable along the transport direction, The joint portion is joined to the air hole when the tip surface is not in contact with the contact surface. The conveying device according to any one of claims 2 to 4.

6. The aforementioned pinion is mounted on the second rotation shaft, A pulley is provided on the second rotating shaft. The pulleys provided on the first rail and the third rail are wrapped with the first belt. The pulleys provided on the second rail and the fourth rail are wrapped around the second belt. The conveying device according to feature 1.

7. The first rail is provided to be movable in a direction perpendicular to the transport direction. The conveying device according to feature 1.

8. The holding member has a central portion including the aforementioned mounting plane made of aluminum, and an outer portion in which the rack is formed made of iron or ceramics. The central portion has an oxide film formed on its surface. The conveying device according to feature 1.

Images