X-ray generator and X-ray inspection apparatus equipped therewith

Abstract

To provide an x-ray generator and an x-ray inspection device equipped with the same that can be made smaller and lighter.SOLUTION: An x-ray generator includes an x-ray tube 22 that generates x-rays, a high-voltage circuit board 23 that applies a high tube voltage to the x-ray tube 22, and a housing 20 that is filled with insulating oil and houses the x-ray tube 22 and the high-voltage circuit board 23. A shielding cover 21 made of a shielding material that blocks x-rays is provided within the housing 20, the x-ray tube 22 is disposed within the shielding cover 21, and the high-voltage circuit board 23 is attached to the outer bottom surface 21e of the shielding cover 21.SELECTED DRAWING: Figure 2

Description

【Technical Field】 【0001】 The present invention relates to an X-ray generator and an X-ray inspection apparatus including the same. 【Background Art】 【0002】 Patent Document 1 discloses an X-ray generator including an X-ray tube that generates X-rays, a high-voltage circuit board that applies a high voltage to the X-ray tube and heats a filament, and a tube container that encloses the X-ray tube and the high-voltage circuit board in insulating oil, and a lead plate for preventing leakage of X-rays is lined inside the tube container. 【Prior Art Documents】 【Patent Documents】 【0003】 【Patent Document 1】 Japanese Patent Application Laid-Open No. 2002-25792 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0004】 However, in the X-ray generator described in Patent Document 1, an X-ray tube and a high-voltage circuit board having different sizes are accommodated in the same tube container, so there is an extra space in the tube container, and thus the X-ray generator itself becomes large-sized. 【0005】 In addition, since a heavy lead plate is lined on the inner front surface of the tube container to shield X-rays, the weight of the X-ray generator itself increases. 【0006】 The present invention has been made in view of the above circumstances, and an object thereof is to provide an X-ray generator capable of achieving miniaturization and weight reduction, and an X-ray inspection apparatus including the same. 【Means for Solving the Problems】 【0007】 The X-ray generator according to the present invention comprises an X-ray tube for generating X-rays, a high-voltage circuit board for applying a high voltage to the X-ray tube, and a housing filled with insulating oil that houses the X-ray tube and the high-voltage circuit board. Inside the housing is a shielding cover made of a shielding material for shielding the X-rays, the X-ray tube is positioned inside the shielding cover, and the high-voltage circuit board is positioned outside the shielding cover. surface X-ray generator attached to The housing has an opening on one side and a removable cover that closes the opening on the one side, the cover having an X-ray window through which X-rays generated by the X-ray tube pass, and the shielding cover and the X-ray tube are attached to the cover. It has a structure. 【0008】 In this configuration, the X-ray generator according to the present invention has a shielding cover made of a shielding material that shields X-rays provided inside the housing, an X-ray tube arranged inside the shielding cover, and a high-voltage circuit board on the outside of the shielding cover. surface Because it is mounted in this way, the high-voltage circuit board can be efficiently arranged inside the housing. In addition, by shielding the area around the X-ray tube with a shielding cover, the weight of the shielding material inside the housing can be reduced. This makes it possible to miniaturize and lighten the X-ray generator. 【0009】 Furthermore, in the X-ray generator according to the present invention, the high-voltage circuit board is located outside the shielding cover. surface Because it is positioned in such a way, the high-voltage circuit board is not constantly exposed to X-rays generated by the X-ray tube, thus preventing deterioration of the high-voltage circuit board due to X-rays. Furthermore, in the X-ray generator according to the present invention, a shielding cover and an X-ray tube are attached to a lid that closes one side of the housing, and a high-voltage circuit board is attached to the outer surface of the shielding cover. Therefore, there is no need for space to place the high-voltage circuit board on the lid, and the X-ray tube, shielding cover, and high-voltage circuit board can be simultaneously removed from and re-inserted from the housing when the lid is attached or detached. This improves the maintainability of the X-ray generator. 【0010】 In the X-ray generator according to the present invention, the high-voltage circuit board is connected to the shielding cover via an insulating leg member. the outer surface It is preferable that it be attached to the shielding cover and held at a predetermined distance from the shielding cover by the leg member. 【0011】 With this configuration, the X-ray generator according to the present invention has a high-voltage circuit board shielded by an insulating leg member. outer surfaceSince it is attached and held at a predetermined distance from the shielding cover by the leg members, an insulating distance can be ensured between the high-voltage circuit board and the shielding cover. This prevents discharge from occurring between the high-voltage circuit board and the shielding cover. 【0012】 In the X-ray generator according to the present invention, The shielding cover has an open shape on both sides of the axial direction of the X-ray tube and is welded to the lid. It is preferable. 【0014】 In the X-ray generator according to the present invention, the high-voltage circuit board is Of the outer surfaces of the shielding cover The opposite side of the lid Outside It is preferable that it be attached to a surface. 【0015】 With this configuration, the X-ray generator according to the present invention has a high-voltage circuit board. Of the outer surfaces of the shielding cover The side opposite the lid Outside Because it is mounted on the surface, there is no need for space to place the high-voltage circuit board on the outer surface of the shielding cover that extends in a direction intersecting the lid and sandwiching the X-ray tube inside the housing. Therefore, the dimensions of the housing can be reduced in the direction perpendicular to the direction in which X-rays are emitted from the X-ray tube. 【0016】 In the X-ray generator according to the present invention, the high-voltage circuit board is Of the outer surfaces of the shielding cover Extending in a direction intersecting the aforementioned lid outside It is preferable that it be attached to the circumferential surface. 【0017】 With this configuration, the X-ray generator according to the present invention has a high-voltage circuit board. Of the outer surfaces of the shielding cover It extends in a direction that intersects with the lid. outside Because it is mounted on the periphery, space is not required to place the high-voltage circuit board on the outer surface of the shielding cover opposite the lid side within the housing. Therefore, the dimensions (height) of the housing can be reduced in the direction in which X-rays are emitted from the X-ray tube. 【0018】 In the X-ray generator according to the present invention, it is preferable that an insulating plate-like member is disposed between the high-voltage circuit board and the shielding cover, and the high-voltage circuit board is attached to the shielding cover via the plate-like member. 【0019】 With this configuration, in the X-ray generator according to the present invention, the high-voltage circuit board is attached to the shielding cover via the insulating plate-like member disposed between the high-voltage circuit board and the shielding cover, so that the insulation between the high-voltage circuit board and the shielding cover can be further enhanced. 【0020】 The X-ray inspection apparatus according to the present invention includes the X-ray generator according to claim 1 or claim 2, and an X-ray detector that detects the X-rays. 【0021】 With this configuration, the X-ray inspection apparatus according to the present invention can achieve miniaturization and weight reduction of the X-ray generator, and thus can achieve miniaturization and weight reduction of the X-ray inspection apparatus. 【Effect of the Invention】 【0022】 According to the present invention, it is possible to provide an X-ray generator capable of achieving miniaturization and weight reduction, and an X-ray inspection apparatus including the same. 【Brief Description of the Drawings】 【0023】 [Figure 1] FIG. 1 is a schematic block diagram of an X-ray inspection apparatus including an X-ray generator according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view of an X-ray generator according to a first embodiment of the present invention. [Figure 3] FIG. 3 is a front view of an X-ray generator according to a first embodiment of the present invention. [Figure 4] FIG. 4 is a side view of an X-ray generator according to a first embodiment of the present invention. [Figure 5] FIG. 5 is a perspective view showing a modified example of an X-ray generator according to a first embodiment of the present invention. [Figure 6]Figure 6 is a transmission perspective view of an X-ray generator according to a second embodiment of the present invention. [Figure 7] Figure 7 is a transmission front view of an X-ray generator according to a second embodiment of the present invention. [Figure 8] Figure 8 is a transmission side view of an X-ray generator according to a second embodiment of the present invention. [Figure 9] Figure 9 is a transmission perspective view showing a modified example of an X-ray generator according to a second embodiment of the present invention. [Modes for carrying out the invention] 【0024】 An X-ray generator and an X-ray inspection apparatus according to one embodiment of the present invention will be described below with reference to the drawings. 【0025】 [First Embodiment] An X-ray inspection apparatus equipped with an X-ray generator according to the first embodiment of the present invention will be described with reference to Figures 1 to 4. 【0026】 (Configuration of X-ray inspection equipment) As shown in Figure 1, the X-ray inspection apparatus 1 of this embodiment is an X-ray inspection apparatus that irradiates an object to be inspected W with X-rays, detects the transmitted X-rays, and uses the transmitted image obtained to inspect the object W for foreign matter contamination, shape, etc. 【0027】 The X-ray inspection apparatus 1 of this embodiment comprises a housing (not shown), an X-ray generator 2 that generates X-rays, an X-ray detector 3 that detects X-rays that have passed through the object W to be inspected, and a control device 4. The X-ray generator 2, the X-ray detector 3, and the control device 4 are housed in the housing (not shown). 【0028】 The housing is incorporated, for example, into a conveyor 5 that transports the object to be inspected W. The conveyor 5 is part of the production equipment for the object to be inspected W and is configured separately from the X-ray inspection device 1. In this embodiment, an example of an integrated type X-ray inspection device 1 incorporated into a separate conveyor 5 will be described. The X-ray inspection device 1 of this embodiment is incorporated into an existing conveyor 5 that transports the object to be inspected W in a horizontal direction, such as a top chain conveyor or a belt conveyor. 【0029】 The X-ray generator 2 and the X-ray detector 3 are positioned opposite each other in the vertical direction of the conveyor 5, with the conveyor path through which the object to be inspected W passes on the conveyor 5. 【0030】 The X-ray generator 2 generates X-rays by irradiating an electron beam from the cathode of an X-ray tube 22 located inside it onto a target at the anode, and irradiates the X-rays radially in a direction perpendicular to the transport direction of the object to be inspected W, as shown by the dashed line in Figure 1. In this way, the X-ray generator 2 irradiates the objects to be inspected W on the conveyor belt 5 as they are transported sequentially with X-rays. 【0031】 The X-ray tube 22 is housed within a shielding cover 21, which will be described later, to prevent X-ray leakage. Furthermore, the shielding cover 21 is housed within a housing 20, which will be described later. The detailed housing structure of the X-ray generator 2 will be described later. 【0032】 The X-ray detector 3 comprises a photodiode (not shown) and a plurality of X-ray detection elements (not shown) consisting of scintillators provided on the photodiode. As the X-ray detector 3, for example, an area sensor can be used in which the X-ray detection elements are arranged in a planar manner in the transport direction and in a direction perpendicular to the transport direction, or a line sensor in which the X-ray detection elements are arranged in a line in a direction perpendicular to the transport direction. 【0033】 The X-ray detector 3 captures a transmission image of the X-rays that have passed through the object W after being irradiated with X-rays from the X-ray generator 2. Specifically, the X-rays are converted into an optical signal by the scintillator of the X-ray detection element, and this optical signal is converted into an electrical signal by a photodiode. Further processing, such as noise reduction, is then applied to generate a transmission image of the density distribution based on the amount of X-ray transmission. 【0034】 The control device 4 is connected to the display unit 6 and the setting operation unit 7. 【0035】 The display unit 6 consists of a flat-panel display or the like, and is configured to output information to the user. The display unit 6 displays images such as inspection results from the control device 4. 【0036】 Furthermore, the display unit 6 displays the pass / fail judgment result of the inspected object W using characters or symbols such as "OK" or "NG". The display unit 6 also displays statistical values ​​such as the total number of inspected items, the number of good items, and the total number of NG items. 【0037】 The display content and display mode of the display unit 6 are determined based on default settings or requests made by predetermined key operations from the setting operation unit 7. 【0038】 The setting operation unit 7 is used to input various parameters and other settings to the control device 4. The setting operation unit 7 consists of multiple keys and switches operated by the user, and is used to input various parameters and other settings to the control device 4 and to select the operating mode. 【0039】 In this embodiment, the display unit 6 and the setting operation unit 7 are integrated as a touch panel display and are located on the upper front of a housing (not shown). 【0040】 The control device 4 comprises an X-ray image storage unit 41, an image processing unit 42, a determination unit 43, and a control unit 44. 【0041】 The X-ray image storage unit 41 is configured to store the X-ray images received from the X-ray detector 3. 【0042】 The image processing unit 42 applies various image processing algorithms to the X-ray image read from the X-ray image storage unit 41 to perform image processing. Here, the image processing algorithm consists of a combination of multiple image processing filters. 【0043】 The determination unit 43 distinguishes between the object to be inspected W and foreign matter in the X-ray image processed by the image processing unit 42 to determine whether or not foreign matter is present, and also determines whether or not the shape of the object to be inspected W is good or bad. 【0044】 The control unit 44 has a CPU and memory that serves as a storage area or work area for the control program, and controls the entire X-ray inspection apparatus 1. The control contents of the control unit 44 include control of the display content and display format of the display unit 6. 【0045】 (Housing structure for X-ray generator) As shown in Figure 2, the X-ray generator 2 is composed of a housing 20, a shielding cover 21, an X-ray tube 22, a high-voltage circuit board 23, and a lid 24. 【0046】 The housing 20 is made of, for example, stainless steel or iron, and is configured in a box shape with the top surface as one side open. The inside of the housing 20 is filled with insulating oil (not shown). Preferably, the insulating oil is filled to a height at least equal to the height to which the cathode and anode of the X-ray tube 22, which will be described later, are immersed. 【0047】 The insulating oil, for example, maintains insulation between the X-ray tube 22 and the shielding cover 21 and housing 20, and also functions as a cooling medium for the heat generated by the X-ray tube 22 when it is driven. 【0048】 As shown in Figures 3 and 4, the shielding cover 21 is formed to be smaller in length, width, and height than the housing 20, and is housed inside the housing 20. 【0049】 The shielding cover 21 is formed in a U-shape with openings on its top surface and both sides in the axial direction of the X-ray tube 22. It has two outer surfaces 21c and 21d that extend in a direction intersecting the lid 24 (in this embodiment, the vertical direction) and constitute the outer circumferential surface of the shielding cover 21, and an outer bottom surface 21e that constitutes the outer surface of the shielding cover 21 on the side opposite to the lid 24. 【0050】 The shielding cover 21 is joined to the back surface of the lid 24 by welding or by fastening members (not shown) on its upper surface. As a result, the shielding cover 21 is held by the lid 24 within the housing 20 with its outer bottom surface 21e separated upward from the inner bottom surface 20a of the housing 20. 【0051】 The shielding cover 21 is made of a shielding material that blocks X-rays and is designed to house the X-ray tube 22 inside. For example, lead is used as the shielding material. The shielding cover 21 may also be made of tungsten, or stainless steel or iron if the energy is low, or it may be made by lining a wall member made of stainless steel, iron, or a material other than the shielding material with a shielding material such as lead on the inside. 【0052】 In this embodiment, a high voltage, i.e., a high tube voltage, is applied to the X-ray tube 22. Therefore, in order to prevent discharge between the X-ray tube 22 and the shielding cover 21, the distance (including creepage distance) between the X-ray tube 22 housed in the shielding cover 21 and the inner surface of the shielding cover 21 must be set to a sufficiently large dimension corresponding to the tube voltage. 【0053】 Therefore, in this embodiment, the dimensions of the shielding cover 21, i.e., the length, width, and height, are set to ensure a distance (including creepage distance) between the X-ray tube 22 and the inner surface of the shielding cover 21 that prevents discharge from occurring. 【0054】 The X-ray tube 22 is formed in a cylindrical shape, with a cathode at one end (hereinafter referred to as the "cathode end") 22b in the axial direction of the cylinder, and an anode at the other end (hereinafter referred to as the "anode end") 22a. A target made of tungsten or the like is provided on the anode. The X-ray tube 22 generates X-rays by drawing an electron beam from the cathode by applying a high tube voltage between the anode and the cathode, and piercing the target with the electrons. 【0055】 An anode-side lead wire 10 is drawn out from the anode-side end 22a. The lead wire 10 is connected to the high-voltage circuit board 23. A cathode-side lead wire 11 is drawn out from the cathode-side end 22b. The lead wire 11 is connected to the high-voltage circuit board 23. 【0056】 An upper cylindrical portion 22c is provided at the top of the X-ray tube 22. The lower end of the upper cylindrical portion 22c is connected to the X-ray tube 22, surrounding the X-ray emission port. The upper end of the upper cylindrical portion 22c is fastened to the cover 24 by fastening members (not shown), surrounding the X-ray window portion 24a of the cover 24, which will be described later. As a result, the X-ray tube 22 is held approximately in the center of the shielding cover 21 in a position where its cylindrical axis is horizontal. 【0057】 When the X-ray tube 22 is driven, the X-rays emitted from the target are emitted into the upper cylindrical portion 22c through the emission port provided on the circumferential surface of the X-ray tube 22, and emitted to the outside through the X-ray window portion 24a of the lid 24. 【0058】 The high-voltage circuit board 23 is a circuit board that applies a high tube voltage to the X-ray tube 22. The high-voltage circuit board 23 is mounted on the outside of the shielding cover 21. Specifically, the high-voltage circuit board 23 is attached to the outer bottom surface 21e of the shielding cover 21 via four leg members 13. 【0059】 As a result, the high-voltage circuit board 23 is held by the four leg members 13 at a predetermined distance below the outer bottom surface 21e of the shielding cover 21. The leg members 13 are made of an insulating material such as resin. 【0060】 The predetermined distance between the high-voltage circuit board 23 and the outer bottom surface 21e of the shielding cover 21 is preferably a distance (including creepage distance) that allows insulation to be maintained between the high-voltage circuit board 23 and the shielding cover 21. Therefore, it is preferable that the axial length of the leg member 13 in this embodiment be set to a dimension corresponding to the aforementioned distance that allows insulation to be maintained. 【0061】 The number of leg members 13 is not limited to four. Furthermore, as long as the high-voltage circuit board 23 can be held at a predetermined distance below the outer bottom surface 21e of the shielding cover 21, other mounting structures may be used instead of the mounting structure using leg members 13. 【0062】 Furthermore, it is desirable that the high-voltage circuit board 23 be held within the housing 20 in a position that maintains insulation from the housing 20. Therefore, in this embodiment, it is preferable that the dimensions of the housing 20 are set such that the distance between the housing 20 and the high-voltage circuit board 23 is a distance that maintains insulation. 【0063】 The cover 24 is a cover that closes the opening on the top surface of the housing 20, and is detachably mounted on the top surface of the housing 20. When the opening of the housing 20 is closed, the cover 24 is fastened to the top surface of the housing 20 by fastening members (not shown). 【0064】 The cover 24 has an X-ray window 24a through which X-rays generated in the X-ray tube 22 pass. The X-ray window 24a is located approximately in the center of the cover 24. 【0065】 As described above, the shielding cover 21 and the X-ray tube 22 are attached to the lid 24. Therefore, when the lid 24 is removed from the housing 20, the shielding cover 21 and the X-ray tube 22 are also removed from the housing 20 together with the lid 24. 【0066】 (Effects and Benefits) As described above, in this embodiment, the X-ray generator has a shielding cover 21 made of a shielding material that shields X-rays provided inside the housing 20, an X-ray tube 22 is arranged inside the shielding cover 21, and a high-voltage circuit board 23 is mounted on the outside of the shielding cover 21. Therefore, the high-voltage circuit board 23 can be efficiently arranged inside the housing 20. In addition, by shielding the area around the X-ray tube 22 with the shielding cover 21, the weight of the shielding material on the inside of the housing can be reduced. This makes it possible to miniaturize and lighten the X-ray generator 2. 【0067】 Furthermore, in this embodiment, since the high-voltage circuit board 23 is located outside the shielding cover 21, the high-voltage circuit board 23 is not constantly exposed to X-rays generated by the X-ray tube 22, thus preventing deterioration of the high-voltage circuit board 23 due to X-rays. 【0068】 In this embodiment, the X-ray generator has a high-voltage circuit board 23 attached to the shielding cover 21 via insulating leg members 13, and the leg members 13 hold the circuit board 23 at a predetermined distance from the shielding cover 21, thereby ensuring an insulating distance between the high-voltage circuit board 23 and the shielding cover 21. This prevents discharge from occurring between the high-voltage circuit board 23 and the shielding cover 21. 【0069】 In this embodiment, the X-ray generator has a shielding cover 21 and an X-ray tube 22 attached to a lid 24 that closes the top surface of the housing 20, and a high-voltage circuit board 23 is attached to the outside of the shielding cover 21. Therefore, there is no need for space to place the high-voltage circuit board 23 on the lid 20, and the X-ray tube 22, shielding cover 21, and high-voltage circuit board 23 can be simultaneously removed from and re-installed inside the housing 20 when attaching or detaching the lid 24 of the housing 20. This improves the maintainability of the X-ray generator 2. 【0070】 For example, after wiring the X-ray tube 22 and the high-voltage circuit board 23 outside the housing 20, the lid 24 can be attached to the housing 20, thereby housing the wired X-ray tube 22 and high-voltage circuit board 23 together with the shielding cover 21 inside the housing 20. In this case, since the wiring can be done outside the housing 20, the wiring work is easy. 【0071】 In this embodiment, the X-ray generator has the high-voltage circuit board 23 attached to the outer bottom surface 21e of the shielding cover 21 on the side opposite to the lid 24. Therefore, within the housing 20, there is no need for space to place the high-voltage circuit board 23 on the outer surfaces 21c and 21d of the shielding cover 21 that extend in a direction intersecting the lid 24 so as to sandwich the X-ray tube 22. As a result, the dimensions (width) of the housing 20 can be reduced in a direction perpendicular to the direction in which X-rays are emitted from the X-ray tube 22. 【0072】 As described above, the X-ray inspection apparatus according to this embodiment can achieve miniaturization and weight reduction of the X-ray generator 2, and consequently, miniaturization and weight reduction of the X-ray inspection apparatus 1. 【0073】 (modified version) In this embodiment, an example has been described in which the high-voltage circuit board 23 and the shielding cover 21 are attached via leg members 13. However, the embodiment is not limited to this, and for example, as shown in Figure 5, an insulating plate-shaped member 15 may be placed between the high-voltage circuit board 23 and the shielding cover 21, and the high-voltage circuit board 23 may be attached to the shielding cover 21 via the plate-shaped member 15. 【0074】 The plate-shaped member 15 is made of, for example, resin, and is attached to the high-voltage circuit board 23 via four first leg members 16 and to the outer bottom surface 21e of the shielding cover 21 via four second leg members 17. The first leg members 16 and the second leg members 17 are made of an insulating material such as resin. 【0075】 In the modified example shown in Figure 5, the high-voltage circuit board 23 is attached to the shielding cover 21 via an insulating plate-shaped member 15 placed between the high-voltage circuit board 23 and the shielding cover 21, thereby further improving the insulation between the high-voltage circuit board 23 and the shielding cover 21. 【0076】 Furthermore, since the first leg member 16 and the second leg member 17 are positioned horizontally offset, that is, in positions where they do not overlap vertically, the creepage distance between the high-voltage circuit board 23 and the shielding cover 21 can be increased, further improving insulation. 【0077】 Furthermore, although this embodiment describes an example in which the X-ray generator according to the present invention is applied to an X-ray generator 2 arranged to irradiate X-rays upward, it is not limited to this, and may also be applied to an X-ray generator arranged to irradiate X-rays downward, for example. 【0078】 Furthermore, in this embodiment, an example has been described in which the X-ray generator according to the present invention is applied to an X-ray generator used in an X-ray inspection apparatus of the type in which the X-ray generator 2 and the X-ray detector 3 are arranged to face each other in the vertical direction across the transport path of the object to be inspected W. However, the invention is not limited to this, and may also be applied to an X-ray generator used in a horizontal irradiation type X-ray inspection apparatus in which the X-ray generator 2 and the X-ray detector 3 are arranged to face each other in the horizontal direction perpendicular to the transport direction of the object to be inspected W, across the transport path of the object to be inspected W. 【0079】 [Second Embodiment] Next, an X-ray generator according to a second embodiment of the present invention will be described with reference to Figures 6 to 8. 【0080】 This embodiment differs from the first embodiment in that the mounting position of the high-voltage circuit board 23 and the shape of the housing 20 in the X-ray generator of the X-ray inspection apparatus 1 are different, but the other configurations are the same as in the first embodiment. In the following description, the same reference numerals are used for components that are the same as in the first embodiment, and their descriptions are omitted. 【0081】 As shown in Figure 6, the X-ray generator 102 according to this embodiment is composed of a housing 120, a shielding cover 21, an X-ray tube 22, a high-voltage circuit board 23, and a lid 124. 【0082】 The housing 120 of this embodiment has a different shape from the housing 20 of the first embodiment, but the other configurations are the same. The housing 120 has a smaller height (vertical direction) dimension than the housing 20 of the first embodiment, and a larger dimension in the direction perpendicular to the vertical direction and the axial direction of the X-ray tube 22 (the front-to-back direction, which is the left-to-right direction in Figure 8). 【0083】 Accordingly, the lid 124 of this embodiment is formed to be larger in the vertical direction and in the direction perpendicular to the axial direction of the X-ray tube 22 (the front-to-back direction, which is the left-to-right direction in Figure 8) than the lid 24 of the first embodiment. In addition, the X-ray window portion 124a formed on the lid 124 is positioned offset to the front side of the housing 120 (left side in Figure 8) relative to the center of the lid 124. This is because, in this embodiment, the shielding cover 21 is positioned offset to the front side of the housing 120 (left side in Figure 8) in order to secure space for the high-voltage circuit board 23 inside the housing 120. 【0084】 In this embodiment, the shielding cover 21 is joined to the back surface of the lid 124 by welding or by fastening members (not shown) on its upper surface. As a result, the shielding cover 21 is held by the lid 124 within the housing 120 with its outer bottom surface 21e spaced upward away from the inner bottom surface 120a of the housing 120. 【0085】 As shown in Figures 7 and 8, in this embodiment, the high-voltage circuit board 23 is attached to the outer surface 21c, which constitutes one side of the outer circumferential surface of the shielding cover 21, via four leg members 13. Alternatively, the high-voltage circuit board 23 may be attached to the outer surface 21d. 【0086】 The high-voltage circuit board 23 is held by four leg members 13 at a predetermined distance laterally from the outer surface 21c of the shielding cover 21. 【0087】 The predetermined distance between the high-voltage circuit board 23 and the outer surface 21c of the shielding cover 21 is preferably a distance (including creepage distance) that allows insulation to be maintained between the high-voltage circuit board 23 and the shielding cover 21. Therefore, it is preferable that the axial length of the leg member 13 in this embodiment be set to a dimension corresponding to the aforementioned distance that allows insulation to be maintained. 【0088】 Furthermore, it is desirable that the high-voltage circuit board 23 be held within the housing 120 in a position that maintains insulation from the housing 120. Therefore, in this embodiment, it is preferable that the dimensions of the housing 120 are set such that the distance between the housing 120 and the high-voltage circuit board 23 is a distance that maintains insulation. 【0089】 (Effects and Benefits) As described above, in this embodiment, the X-ray generator has a shielding cover 21 made of a shielding material that shields X-rays provided inside the housing 120, an X-ray tube 22 is arranged inside the shielding cover 21, and a high-voltage circuit board 23 is mounted on the outside of the shielding cover 21. Therefore, the high-voltage circuit board 23 can be efficiently arranged inside the housing 120. In addition, by shielding the area around the X-ray tube 22 with the shielding cover 21, the weight of the shielding material on the inside of the housing can be reduced. This makes it possible to miniaturize and lighten the X-ray generator 102. 【0090】 Furthermore, in this embodiment, since the high-voltage circuit board 23 is located outside the shielding cover 21, the high-voltage circuit board 23 is not constantly exposed to X-rays generated by the X-ray tube 22, thus preventing deterioration of the high-voltage circuit board 23 due to X-rays. 【0091】 In this embodiment, the X-ray generator has a high-voltage circuit board 23 attached to the shielding cover 21 via insulating leg members 13, and the leg members 13 hold the circuit board 23 at a predetermined distance from the shielding cover 21, thereby ensuring an insulating distance between the high-voltage circuit board 23 and the shielding cover 21. This prevents discharge from occurring between the high-voltage circuit board 23 and the shielding cover 21. 【0092】 In this embodiment, the X-ray generator has a shielding cover 21 and an X-ray tube 22 attached to a lid 124 that closes the top surface of the housing 120, and a high-voltage circuit board 23 is attached to the outside of the shielding cover 21. Therefore, there is no need for space to place the high-voltage circuit board 23 on the lid 124, and the X-ray tube 22, shielding cover 21, and high-voltage circuit board 23 can be simultaneously removed from and re-installed inside the housing 120 when attaching or detaching the lid 124 of the housing 120. This improves the maintainability of the X-ray generator 102. 【0093】 For example, after wiring the X-ray tube 22 and the high-voltage circuit board 23 outside the housing 120, the lid 124 can be attached to the housing 120 to house the wired X-ray tube 22 and high-voltage circuit board 23 together with the shielding cover 21 inside the housing 120. In this case, since the wiring can be done outside the housing 120, the wiring work is easy. 【0094】 In this embodiment, since the high-voltage circuit board 23 is attached to the outer surface 21c of the shielding cover 21, there is no need for space to place the high-voltage circuit board 23 on the outer bottom surface 21e of the shielding cover 21 on the side opposite to the lid 124 inside the housing 120. Therefore, the dimensions (height) of the housing 120 can be reduced in the direction in which X-rays are emitted from the X-ray tube 22. 【0095】 In this embodiment as well, the X-ray generator 102 can be made smaller and lighter, so the X-ray inspection apparatus 1 equipped with the X-ray generator 102 can be made smaller and lighter. 【0096】 (modified version) In this embodiment as well, for example, as shown in Figure 9, an insulating plate-shaped member 15 may be placed between the high-voltage circuit board 23 and the shielding cover 21, and the high-voltage circuit board 23 may be attached to the shielding cover 21 via the plate-shaped member 15. 【0097】 The plate-shaped member 15 is made of, for example, resin, and is attached to the high-voltage circuit board 23 via four first leg members 16 and to the outer surface 21c of the shielding cover 21 via four second leg members 17. The first leg members 16 and the second leg members 17 are made of an insulating material such as resin. 【0098】 In the modified example shown in Figure 9, the high-voltage circuit board 23 is attached to the shielding cover 21 via an insulating plate-shaped member 15 placed between the high-voltage circuit board 23 and the shielding cover 21, thereby further improving the insulation between the high-voltage circuit board 23 and the shielding cover 21. 【0099】 Furthermore, since the first leg member 16 and the second leg member 17 are positioned offset in the vertical plane, that is, in positions where they do not overlap in the front-to-back direction, the creepage distance between the high-voltage circuit board 23 and the shielding cover 21 can be increased, further improving insulation. 【0100】 While embodiments of the present invention have been disclosed, it will be apparent to those skilled in the art that modifications can be made without departing from the scope of the invention. All such modifications and equivalents are intended to be included in the following claims. [Explanation of Symbols] 【0101】 1. X-ray inspection device 2.102 X-ray generator 3 X-ray detector 13 Leg members 15 Plate-shaped member 16 First leg member 17 Second leg member 20, 120 cabinets 20a, 120a inner bottom surface 21 Shielding cover 21c Outer surface (outer surface) 21e Outer bottom surface (outer surface) 22 X-ray tube 23 High-voltage circuit board 24, 124 Lid 24a, 124a X-ray window section W: Object under inspection

Claims

[Claim 1] An X-ray tube (22) that generates X-rays, A high-voltage circuit board (23) for applying a high voltage to the X-ray tube, The system comprises a housing (20) filled with insulating oil and containing the X-ray tube and the high-voltage circuit board, A shielding cover (21) made of a shielding material that blocks the X-rays is provided inside the housing. The X-ray tube is placed inside the shielding cover. An X-ray generator in which the high-voltage circuit board is attached to the outer surface (21c, 21d, 21e) of the shielding cover, The housing has an opening on one side and a detachable cover (24) that closes the opening on the one side. The cover has an X-ray window (24a) through which the X-rays generated in the X-ray tube pass. An X-ray generator in which the shielding cover and the X-ray tube are attached to the lid. [Claim 2] The X-ray generator according to claim 1, wherein the high-voltage circuit board is attached to the outer surface of the shielding cover via insulating leg members (13) and is held by the leg members at a predetermined distance from the shielding cover. [Claim 3] The X-ray generator according to claim 1 or claim 2, wherein the shielding cover has an open shape on both sides in the axial direction of the X-ray tube and is welded and joined to the lid. [Claim 4] The X-ray generator according to claim 1 or claim 2, wherein the high-voltage circuit board is attached to the outer surface (21e) of the shielding cover that is opposite to the lid side. [Claim 5] The X-ray generator according to claim 1 or claim 2, wherein the high-voltage circuit board is attached to the outer peripheral surface (21c) of the shielding cover that extends in a direction intersecting the lid. [Claim 6] An insulating plate-shaped member (15) is placed between the high-voltage circuit board and the shielding cover. The X-ray generator according to claim 1 or claim 2, wherein the high-voltage circuit board is attached to the shielding cover via the plate-shaped member. [Claim 7] An X-ray generator (2) according to claim 1 or claim 2, An X-ray inspection apparatus comprising an X-ray detector (3) for detecting the aforementioned X-rays.

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