Method for manufacturing components of a pollution control device

Abstract

A method for fabricating an abatement device component is provided. The method includes meshing a 3D model representation of a component defining a reaction chamber of the abatement device based on specified component properties to define an optimized finite element representation of the component, and fabricating the optimized finite element representation. In this manner, a 3D model of the abatement device component can be created, from which its performance can be modeled. Specific properties of the component that affect the operation of the abatement device can be determined. These properties can then be used to fabricate an optimized finite element representation of the component having those properties using meshing (it will be understood that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation can then be fabricated to reliably produce a component having the desired properties. [Selected Figure] Figure 1

Description

Technical Field

[0001] The present invention relates to a method for manufacturing a component of a pest control device.

Background Art

[0002] Pest control devices for performing pest control are known and are generally used, for example, to treat exhaust gas streams from manufacturing processing means used in the semiconductor or flat panel display manufacturing industries. During such manufacturing, the exhaust gas stream pumped from the processing means contains residual perfluorinated compounds (PFCs) and other compounds. PFCs are difficult to remove from the exhaust gas, and since PFCs have a relatively high greenhouse effect, it is not desirable to release them into the environment.

[0003] Known pest control devices use heat to remove PFCs and other compounds from the exhaust gas stream. Generally, the exhaust gas stream is a nitrogen gas stream containing PFCs and other compounds. Induction heaters, plasmas or combustion are used to generate the heat for treating the exhaust gas stream. For example, in a combustion device, fuel gas is mixed with the exhaust gas stream, and the gas stream mixture is sent into a combustion chamber surrounded by the outlet surface of a side perforated gas burner. The fuel gas and air are simultaneously supplied to the perforated gas burner, affecting flameless combustion at the outlet surface, and the amount of air passing through the perforated burner aims to be sufficient not only for the fuel gas supply amount to the burner but also to consume all combustibles in the gas stream mixture injected into the combustion chamber.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The pest control device assists in the treatment of the exhaust gas stream, but there may be problems in the manufacture of the pest control device. Therefore, it is desired to provide an improved technique for manufacturing the pest control device.

Means for Solving the Problems

[0005] <D= According to a first embodiment, a method is provided which includes the steps of: meshing a 3D model representation of a component that defines a reaction chamber of a pollution control device based on specified component characteristics, so as to determine an optimized finite element representation of the component; and fabricating an optimized finite element representation.

[0006] In the first aspect, it is recognized that a problem associated with existing technologies for manufacturing components of abatement devices is that these technologies are complex and it is difficult to define the operation of the abatement device. Therefore, a method is provided. The method may be for manufacturing an abatement device or its components. The method may include a step of meshing a three-dimensional (3D) model representation or definition of a component, the 3D model defining at least the reaction chamber of the abatement device. The meshing step may be performed based on or in accordance with specified or defined characteristics of the component. The meshing step may define or generate an optimized finite element or cellular representation of the component based on specified component characteristics. That is, the step of meshing the 3D model representation may not only generate a finite element representation of the component, but may also optimize the finite element representation itself based on the characteristics required for that component. The method may include a step of manufacturing the component from the optimized finite element representation. In this way, a 3D model of the components of the abatement device can be made, and its performance can be modeled therefrom. Specific characteristics of the components that affect the operation of the abatement device can be defined. Next, using these properties, an optimized finite element representation of a component having these properties can be created using meshing (it should be understood that meshing is the operation of representing a geometric object as a series of finite elements). Then, by fabricating the optimized finite element representation, a component having the desired properties can be produced with high reliability.

[0007] In one embodiment, the meshing step includes meshing with at least one finite element. Thus, the 3D model representation can be meshed with one or more finite elements.

[0008] In one embodiment, the meshing step includes meshing with multiple finite elements. Therefore, the 3D model representation can be meshed with two or more finite elements.

[0009] In one embodiment, the meshing step includes fitting finite elements to fill the 3D model representation. Thus, the finite elements can be fitted to fill, sit on, or cover the 3D model representation.

[0010] In one embodiment, the fitting step includes fitting finite elements based on endpoint constraints to fill a 3D model representation. Thus, the finite elements can be fitted to fill, sit on, or cover the 3D model representation according to constraints on how well they fit.

[0011] In one embodiment, the endpoint constraint includes preventing the finite element from protruding beyond the surface of the 3D model representation. Thus, the endpoint constraint can prevent the finite element from protruding or extending beyond or past the surface or boundary of the 3D model representation.

[0012] In one embodiment, the method includes the step of selecting a combination of finite elements so as to prevent the finite elements from protruding beyond the surface of the 3D model representation. Thus, different combinations of finite elements can be selected to prevent the finite elements from protruding or extending beyond the surface or boundary of the model representation.

[0013] In one embodiment, the method includes a step of cutting out finite elements to prevent them from protruding beyond the surface of the 3D model representation. Thus, finite elements can be cut out, sliced, or subdivided to prevent them from protruding or extending beyond the surface or boundary of the 3D model representation.

[0014] In one embodiment, each finite element is regular.

[0015] In one embodiment, each finite element is a polyhedron.

[0016] In one embodiment, each finite element comprises a surface joined by its end.

[0017] In one embodiment, the surface is either open or at least partially filled. Thus, the surface can be unfilled, filled, or partially filled.

[0018] In one embodiment, the end provides a scaffold that defines a finite element. Therefore, the end can provide or define a scaffold or framework that forms a finite element.

[0019] In one embodiment, at least one of the surface and the edge is either flat or curved.

[0020] In one embodiment, the 3D model representation defines the surface of the constituent elements.

[0021] In one embodiment, the 3D model representation defines the outer surface of the constituent elements.

[0022] In one embodiment, the meshing step includes adjusting the finite element filling based on specified component characteristics. Thus, the amount or extent to which finite elements are filled is adjusted or selected based on or in accordance with the specified component characteristics.

[0023] In one embodiment, the meshing step includes adjusting the packing of finite elements to adjust fluid communication between them. Therefore, the amount or degree to which finite elements are packed can be changed or selected to control the amount of fluid communication between them. It will be understood that fluid communication is impossible with fully packed finite elements, but possible with partially packed or incompletely packed finite elements.

[0024] In one embodiment, the step of adjusting the filling includes the step of filling at least partially the surface of the finite element.

[0025] In one embodiment, the step of adjusting the filling includes at least partially filling the voids defined by the finite elements.

[0026] In one embodiment, the step of adjusting the filling includes changing the thickness or aspect ratio of the ends of the finite elements.

[0027] In one embodiment, the specified component property defines permeability, and the meshing step includes adjusting the filling of the finite elements to provide permeability.

[0028] In one embodiment, the specified component property defines the permeability in each of a plurality of regions of the component, and the meshing step includes adjusting the filling of the finite elements in each of the plurality of regions of the component to provide the permeability in that region. Thus, different permeabilities can be assigned to different regions, parts, zones, or volumes of the component, and the filling of the finite elements within those regions can be adjusted or selected within those regions to allow or restrict fluid flow to provide these permeabilities.

[0029] In one embodiment, the permeability includes an inflow permeability. Thus, the permeability can be the ratio at which flow into the component occurs.

[0030] In one embodiment, the permeability includes an internal permeability. Thus, the permeability can be the ratio at which flow within the component occurs.

[0031] In one embodiment, the permeability includes an outflow permeability. Thus, the permeability can be the ratio at which flow out of the component occurs.

[0032] In one embodiment, the step of adjusting the filling includes at least partially filling the gaps defined by the finite elements to provide permeability.

[0033] In one embodiment, the step of adjusting the filling includes changing the thickness of the ends of the finite elements to provide permeability.

[0034] In one embodiment, the specified component properties determine the porosity, and the meshing step includes adjusting the packing of finite elements to provide the porosity.

[0035] In one embodiment, a specified component characteristic determines the porosity in each of several regions of the component, and the meshing step comprises adjusting the finite element packing in each of the several regions of the component to provide porosity in that region. Thus, different regions, parts, areas, or volumes of the component can be assigned different porosity, and the finite element packing in those regions can be adjusted or selected within those regions to allow or restrict fluid flow to provide those porosity levels.

[0036] In one embodiment, the step of adjusting the filling includes the step of filling the surface of a finite element to provide porosity.

[0037] In one embodiment, the specified component characteristics define the fluid flow through the component, and the meshing step includes adjusting the packing of finite elements to provide the fluid flow.

[0038] In one embodiment, the specified component characteristics define the fluid flow from the component, and the meshing step includes adjusting the packing of finite elements to provide the fluid flow.

[0039] In one embodiment, the fluid flow includes at least one of laminar fluid flow and turbulent fluid flow.

[0040] In one embodiment, the specified component characteristics define the fluid flow in each of multiple regions of the component, and the meshing step includes adjusting the finite element filling in each of the multiple regions of the component to provide the fluid flow in that region. Thus, different fluid flows can be assigned to different regions, parts, areas, or volumes of the component, and the finite element filling in those regions can be adjusted or selected within those regions to provide these fluid flows.

[0041] In one embodiment, specified component characteristics define the structural body, and the meshing step includes adjusting the filling of finite elements to provide the structural body. Thus, finite elements can be filled within the components to define the structural body.

[0042] In one embodiment, the structural body includes a sealing surface for sealing components within the pollution control device.

[0043] In one embodiment, the specified component characteristics define the member, and the meshing step includes adjusting the configuration of finite element packing to provide the member. Thus, the finite elements can be packed together to form a member or element.

[0044] In one embodiment, the member comprises at least one of a structural member and a thermal member.

[0045] In one embodiment, the thermal member is configured to control the thermal conductivity of its constituent elements.

[0046] In one embodiment, the structural member is configured to provide mechanical rigidity to the constituent elements.

[0047] In one embodiment, the specified component characteristics define the material at a part of the component, and the meshing step includes specifying finite elements made from the material to provide an optimized cellular structure.

[0048] In one embodiment, the material is arranged to assist the catalytic reaction.

[0049] In one embodiment, the 3D model representation defines at least one component from among cylindrical, bell-shaped, finger-shaped, and polyhedral shapes.

[0050] In one embodiment, the 3D model representation defines a component having a wall portion with either a constant thickness or a varying thickness.

[0051] In one embodiment, the manufacturing step includes additive manufacturing.

[0052] In one embodiment, the meshing step includes meshing a 3D model representation of the components to define a finite element representation of the sleeve, and optimizing the cellular element representation of the components based on specified component characteristics to provide an optimized cellular element representation.

[0053] According to a second embodiment, components are provided that define the reaction chamber of a pollution control apparatus formed by the method of the first embodiment.

[0054] Further specific preferred embodiments are described in the independent and dependent claims. The features of the dependent claims may be combined with the features of the independent claims as needed, and may be combined in combinations other than those explicitly described in the claims.

[0055] When it is stated that a feature of a device is operable to provide a function, it will be understood that this includes the features of the device that provide that function, or that are adapted or configured to provide that function. Next, embodiments of the present invention will be further described with reference to the accompanying drawings. [Brief explanation of the drawing]

[0056] [Figure 1] The main steps of one embodiment are shown below. [Figure 2A] This is a schematic diagram showing the characteristics of the components according to the embodiment. [Figure 2B] This is a schematic diagram showing the characteristics of the components according to the embodiment. [Modes for carrying out the invention]

[0057] Before further examining the embodiments in detail, an overview will be provided. The embodiments provide a technique for manufacturing components of a pollution control device with predetermined operating characteristics with high reliability. A 3D model of the component is generated, and component characteristics are defined (such as the characteristics of the fluid flow into, out of, and / or through the component, and the structural, thermal, chemical, and / or physical requirements of the component). These characteristics are used when meshing the 3D model to provide a finite element representation of the component that includes these characteristics. In other words, when generating the finite element representation of a component, the component characteristics can be specified to affect the extent to which each finite element is filled and by what it is filled. For example, the porosity of the surface of a region of the component can be controlled by controlling the number of filling surfaces of the finite elements that make up that surface and / or by changing the thickness of the edges that connect the vertices of those surfaces. Similarly, the permeability of a region of the component can be controlled by changing the extent to which finite elements fill that region. In this case as well, such filling can be achieved by changing the thickness of the edges that connect the vertices of the finite elements. The entire structural member can be formed by filling in finite elements that define the structural member, such as ceilings, ribs, or flanges. The physical or chemical properties of different regions of the component can be changed by controlling the materials used to fabricate the component. For example, a highly conductive material can be used in one region, and a highly insulating material in another. Similarly, a mechanically strong material can be used in one region, and a mechanically weak material in another. This finite element representation is then fabricated to produce the component.

[0058] The components are typically constructed from finite element representations using additive manufacturing, because finite element representations provide modular building blocks suitable for such additive manufacturing techniques.

[0059] Figure 1 is a flowchart showing the main steps of one embodiment. For ease of explanation, the steps are shown sequentially, but many steps can be performed iteratively or in parallel, depending on the implementation used. Processing steps are typically performed by a computer (not shown) programmed to perform those steps. Manufacturing is typically carried out by additive manufacturing equipment (not shown) operating under the control of a computer (not shown).

[0060] 3D model generation In step S1, a 3D spatial model of the components of the abatement device is generated using a model processor running on a computer. It will be understood that various different modeling techniques, representations, or formats can be used to represent the components in 3D space. For example, surfaces, ends, vertices, and / or points that define the shape of a component can be identified in the 3D spatial model. Figures 2A and 2B show schematic diagrams of such models. In Figure 2A, (1) shows a non-permeable sealing surface / end, (2) shows a smooth inner surface, (3) shows a selectively porosity outer surface, (4) shows a compositional gradient with catalyst material embedded within the structure and selective "bonding" to minimize radiant heat transfer, (5) shows a solid, (6) shows a porous material, and (7) shows a nozzle. Figure 2B is bell-shaped, and (8) shows stepped porosity. The model can be part of the abatement device, such as a sleeve for a reaction chamber. Furthermore, the model can also be a larger part, which can typically be formed from separate components such as combined reaction chambers and head assemblies.

[0061] Meshing In step S2, the 3D spatial model is meshed using one or more different finite elements or cellular structures by a meshing processor. It will be understood that various different techniques can be used to perform such meshing. Cellular structures are typically formed from polyhedra with polygons joined at their ends. Two or more types of polyhedra can be used for meshing. Furthermore, the sizes of the polyhedra used can vary as needed. Cellular structures can be selected based on their suitability for the additive manufacturing techniques used to produce the components.

[0062] When meshing, endpoint constraints can be defined, which can stipulate that cellular structures cannot extend beyond the surface or boundaries of the 3D spatial model. To achieve this, the meshing processor can select and / or vary the size of different combinations of cellular structures. Depending on the situation, the meshing processor can cut or subdivide the cellular structures to fulfill these endpoint constraints.

[0063] Once the meshing processor fills the 3D spatial model with cellular structures, the process proceeds to step S3.

[0064] Characteristic assignment In step S3, properties are assigned to all, or more generally, some, of the components. For example, the porosity in a particular region may be defined, or the porosity gradient across the region may be defined. Similarly, the transmittance through the region or the transmittance gradient through the region may be defined. Similarly, the mechanical strength or thermal conductivity of the region may be defined. Depending on the circumstances, the chemical properties or material of a particular region may be defined.

[0065] Using these properties, the meshing processor determines the material required for each cellular structure, along with the method of filling that cellular structure. For example, if a low porosity is required in a certain area, the cellular structures in that area can be filled and / or have filled surfaces that form the surface of the component, and / or the thickness of the edges defining those cellular structures can be increased to reduce the porosity in that area. Conversely, if a higher porosity is required, the cellular structures in that area can be left unfilled and / or have unfilled surfaces that form the surface of the component, and / or the thickness of the edges defining those cellular structures can be reduced to increase the porosity in that area. A similar approach can be used for cellular structures within the body of a component to adjust permeability through a region of that body. Similarly, thermal properties can be adjusted by selectively filling (or shielding) surfaces to regulate radiative heat transfer.

[0066] These technologies can be used to generate solid structures within a component to provide, for example, sealing surfaces or ends, reinforcing columns, connecting flanges, threads, through holes, or other mechanical structures, and to provide structures that provide precise thermal properties or thermal paths for the component.

[0067] If two or more materials are available to form a cellular structure, these materials can also be specified by a meshing processor to achieve their properties. Similarly, different materials can be specified to give specific chemical properties to different locations within a component.

[0068] In step S4, the optimized mesh is defined. For each cellular element within the optimized mesh, it is specified whether or not it is filled, and if so, the extent of the filling. If different materials can be specified, each cellular element within the optimized mesh can be defined to be formed from the specified material.

[0069] In step S5, the components are manufactured using additive manufacturing techniques, such as 3D printing.

[0070] The embodiment provides a printed cylindrical combustor structure with controlled porosity and geometric shape, resulting in a smooth outlet surface, and the combustor is robust, cleanable, washable, and suitable for gaseous flows (such as methane / propane). On the back side (where the gas enters), there is a cellular structure that can be designed / adapted to obtain the desired gaseous flow. An inner shielding surface may also be included to control thermal conductivity and heat loss by radiation. Additional designs include solid areas (typically top and bottom ring / sealing surfaces) that can be inserted into the plenum and sealed directly.

[0071] Considering these designs, the overall geometric shape of the structure can be modified, thereby resulting in a bell-shaped profile (like that of a rocket combustor), or a square or trapezoidal shape. Geometric features can be added to control the gas flow, i.e., to make the gas flow turbulent or laminar as needed. Another feature of the combustor is having a stepped composition (material), which can be used to control the catalytic properties, i.e., the noble metal in the middle or surface of the combustor's thickness, for thermal and chemical reasons (from outer ceramic to inner metal).

[0072] The embodiment provides a feature layer, i.e., a multifunctional layer in contact with the plenum, which cannot be molded or made from a sheet and therefore cannot be produced by conventional methods. The main advantage is the controllability of the structure / geometry / composition (material density, grid) and flow path. This means that the combustor nozzle can be placed wherever desired, and the design can be iterated without the cost impact / difficulty required to remake / manufacture conventionally. In the embodiment, an algorithm is used for foam or cellular geometry / grid structure. The design can be customized on a case-by-case basis for various applications, i.e., production volume, gas filling volume, etc.

[0073] The embodiments provide adapted overall shapes / geometric shapes and application-specific sizes depending on the application, multilayer configuration, variations in grid / foam structure, and skin porosity (geometric shape, e.g., circular, triangular, hexagonal mesh spacing grid positioning). The materials used, i.e., metals, ceramics, polymer alloys, can vary. The configuration, position, and number of nozzles can vary. Internal features surrounding the nozzles and guiding the flow to promote turbulent and laminar flow can be provided as needed. Internal grooves can be incorporated to extract / manage heat. Reinforcement structures / ribs can be incorporated as needed to provide strength.

[0074] The embodiments provide a technology for 3D printing components of abatement devices, such as combustor liners and induction heating susceptors. This technology can be used to create porous gas control elements to be used as small-pore combustors or susceptors for induction heating abatement systems.

[0075] This technology includes: 1) modeling a three-dimensional shape in a 3D computer-aided design (CAD) environment, such as Catia; 2) exporting the shape in a transferable format, such as a STEP file; 3) importing the three-dimensional shape into a meshing package to create a mesh foam replica; and 4) exporting the foam shape in a transferable format, such as a STEP file, for 3D printing.

[0076] The mesh package typically receives "high-level" parameters such as fiber thickness, porosity, and pore size per inch to generate the basic structure. The mesh arrangement (cube, tetrahedron, etc.) is selectable, or one type is preferred / optimized. The downstream end is typically unbroken, i.e., does not have dangling ends. A fully closed area on the upstream face is typically defined as a mounting surface for fitting into a fixture. Partial closure of the upstream face by closing selected cell faces is typically used to control flow and therefore control the ignition rate of a portion of the combustor. Different areas can be defined to have different porosity.

[0077] Materials of interest for printing: Fe-Cr-AI-Y "fecralloy", 314 stainless steel can be the basic material for combustors. High-temperature materials such as 0Cr27AI7Mo2 or "ferromolybdenum" can be used for induction heating.

[0078] In this embodiment, the porous geometry is loaded into a computational fluid dynamics (CFD) package, such as Star CCM+, and then "mesh the mesh" to model the flow properties of the porous material. This would be particularly useful for understanding how the flow develops downstream of a selectively blocked surface. Similarly, it may be useful to model the back surface temperature under "realistic conditions" within the combustor. Combining this information allows for optimization of the porous layer thickness, ultimately saving material.

[0079] Embodiments provide a combustor liner having one or more of the following: a smooth downstream surface, non-fraying fiber ends, robustness, cleanability, and washability; suitability for a range of surface ignition rates due to residual oxygen; a back surface that selectively covers and provides controlled flow / surface ignition rate, joining or sealing the upper and lower (in the case of a cylindrical combustor) surfaces; improved flow channels for creating a bell mouth; controlled back surface temperature through control of conductivity / opacity; and selective covering in a regular pattern across the structure to minimize radiant heat transfer in order to achieve optical coverage of the line of sight.

[0080] While exemplary embodiments of the present invention are disclosed in detail with reference to the accompanying drawings, the present invention is not limited to these detailed embodiments, and those skilled in the art will understand that various modifications and alterations are possible without departing from the scope of the invention as defined by the claims and their equivalents. [Explanation of symbols]

[0081] 1. Non-breathable sealing surface / edge 2. Smooth interior 3. Selective porosity of the outer surface 4. A compositional gradient achieved by selective "bonding" of catalyst materials embedded within the structure, minimizing radiant heat transfer. 5 Middle 6 Porous materials 7 nozzles 8-level porosity

Claims

1. S1) A step of defining the porous components of the reaction chamber of the pollution control device and generating a 3D model representation of the components, S2) A step of meshing the 3D model representation of the constituent elements so as to generate a finite element representation with a plurality of finite elements filling the 3D model representation, wherein the step of meshing the 3D model representation of the constituent elements is to select a combination of finite elements or cut out finite elements so that the plurality of finite elements cannot extend beyond the surface of the 3D model representation, S3) A step of assigning specified characteristics to one or more finite elements corresponding to the constituent elements, which define the fluid flow through the constituent elements. S4) A step of optimizing the finite element representation so as to obtain a fluid flow through the component determined by the specified characteristics by controlling the number of filling surfaces of the finite elements and / or changing the thickness of the ends connecting the vertices of those surfaces, S5) A step of manufacturing the components by additive manufacturing based on the optimized finite element representation, Methods that include...

2. The method according to claim 1, wherein the optimization step comprises controlling the number of filling surfaces of the finite elements and / or changing the thickness of the ends connecting the vertices of their surfaces in order to adjust the fluid communication between the finite elements.

3. The method according to claim 1, wherein the specified characteristic is transmittance, and the optimization step includes controlling the number of filling surfaces of the finite element and / or changing the thickness of the ends connecting the vertices of their surfaces in order to provide a fluid flow through the component as determined by the transmittance.

4. The method according to claim 1, wherein the specified characteristic is porosity, and the optimization step includes controlling the number of filling surfaces of the finite element and / or changing the thickness of the ends connecting the vertices of their surfaces in order to provide a fluid flow through the component as determined by the porosity.

5. The method according to any one of claims 1 to 4, wherein the 3D model representation defines at least one of the constituent elements, which is cylindrical, bell-shaped, and polyhedral.

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