Exposure apparatus, device manufacturing method, and control method

Abstract

This exposure apparatus includes: a plurality of modules each including a spatial light modulation element that includes a plurality of micromirrors to be driven so as to be switched between an on-state and an off-state on the basis of rendering data, an illumination unit that irradiates the spatial light modulation element with illumination light, and a projection unit that causes reflected light from the micromirrors in the on-state in the spatial light modulation element to be incident as an image formation light flux on a substrate; a control unit that stores, for each of the modules, correction information for correcting the state of the image formation light flux; and an adjustment mechanism that, on the basis of the correction information, adjusts, for each of the modules, the position or angle of an optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element.

Description

Exposure apparatus, device manufacturing method and control method

[0001] The present invention relates to an exposure apparatus that exposes a pattern for an electronic device, and a device manufacturing method and control method using such an exposure apparatus.This application claims priority to Japanese Patent Application No. 2022-208554, filed on December 26, 2022, the contents of which are incorporated herein by reference.

[0002] Conventionally, in the lithography process for manufacturing electronic devices (microdevices) such as liquid crystal or organic EL display panels and semiconductor elements (integrated circuits, etc.), a step-and-repeat projection exposure apparatus (a so-called stepper) or a step-and-scan projection exposure apparatus (a so-called scanning stepper (also called a scanner)) has been used. This type of exposure apparatus projects and exposes a mask pattern for the electronic device onto a photosensitive layer applied to the surface of an exposed substrate (hereinafter simply referred to as a substrate), such as a glass substrate, a semiconductor wafer, a printed wiring board, or a resin film.

[0003] Since it takes time and money to fabricate a mask substrate on which the mask pattern is fixedly formed, an exposure apparatus is known that uses a spatial light modulation element (variable mask pattern generator) such as a digital mirror device (DMD) in which a large number of micromirrors that are slightly displaced are regularly arranged instead of a mask substrate (see, for example, Patent Document 1). In the exposure apparatus disclosed in Patent Document 1, for example, illumination light obtained by mixing light from a laser diode (LD) with a wavelength of 375 nm and light from an LD with a wavelength of 405 nm through a multimode fiber bundle is irradiated onto the digital mirror device (DMD), and the reflected light from each of a large number of tilt-controlled micromirrors is projected onto the substrate for exposure via an imaging optical system and a microlens array.

[0004] In digital systems, the tilt angle of each micromirror on a DMD is set, for example, to 0° when it is off (when reflected light does not enter the imaging optical system) and 12° when it is on (when reflected light enters the imaging optical system). Because the numerous micromirrors are arranged in a matrix at a fixed pitch (e.g., 10 μm or less), they also function as an optical diffraction grating. In particular, when projecting and exposing fine patterns for electronic devices, the imaging quality of the pattern can be degraded depending on the wavelength of the illumination light on the DMD and the effect of the DMD's diffraction grating (the direction of diffracted light and the intensity distribution).

[0005] Japanese Patent Application Publication No. 2019-23748

[0006] According to a first aspect of the present invention, an exposure apparatus includes a plurality of modules each including a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data, an illumination unit that irradiates illumination light onto the spatial light modulation element, and a projection unit that causes reflected light from the on-state micromirrors in the spatial light modulation element to be incident on a substrate as an imaging light beam; a control unit that stores correction information for correcting the state of the imaging light beam for each of the modules; and an adjustment mechanism that adjusts the position or angle of an optical element in the illumination unit or the projection unit, or the angle of the spatial light modulation element, for each of the modules based on the correction information.

[0007] According to a second aspect of the present invention, a device manufacturing method includes a step of identifying a telecentric error of the imaging light beam that occurs depending on the distribution state of the micromirrors in the on-state of the spatial light modulation element, or a light intensity fluctuation error of the imaging light beam that occurs due to a driving error of the micromirrors in the on-state, and the correction information includes information for correcting the state of the imaging light beam based on the light intensity fluctuation error, and a step of adjusting the installation state of the spatial light modulation element for each module based on the correction information when the imaging light beam is incident on the substrate using the exposure apparatus described in the first aspect above.

[0008] According to a third aspect of the present invention, a device manufacturing method includes exposing the substrate using the exposure apparatus according to the first aspect.

[0009] According to a fourth aspect of the present invention, a control method is a control method for an exposure apparatus including a module including an illumination unit that irradiates illumination light onto a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data, and a projection unit that causes reflected light from the micromirrors that are in the on state of the spatial light modulation element to be incident onto a substrate as an imaging light beam, and projects a device pattern corresponding to the drawing data onto the substrate, the control method including adjusting an angular change in the imaging light beam that occurs based on the distribution of the micromirrors that are in the on state of the spatial light modulation element, and adjusting a line width change in the device pattern that occurs due to the adjustment of the angular change by correcting the drawing data.

[0010] According to a fifth aspect of the present invention, an exposure apparatus includes a module including: a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data; an illumination unit that irradiates illumination light onto the spatial light modulation element; and a projection unit that projects reflected light from the on-state micromirrors of the spatial light modulation element onto a substrate as an imaging light beam; a control unit that stores illuminance-related information including an illuminance difference of the imaging light beam that occurs depending on the distribution density of the on-state micromirrors of the spatial light modulation element and an angular error in the tilt angle of the on-state micromirrors; and an adjustment mechanism that adjusts the position or angle of an optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element, depending on the illuminance-related information when driving the spatial light modulation element based on the drawing data to project the imaging light beam onto the substrate.

[0011] 1 is a perspective view showing an outline of the external configuration of a pattern exposure apparatus EX according to the present embodiment; FIG. 2 is a diagram showing an example of the arrangement of projection areas IAn of a DMD 10 projected onto a substrate P by each projection unit PLU of a plurality of exposure modules MU; FIG. 3 is a diagram explaining the state of splice exposure by each of four specific projection areas IA8, IA9, IA10, and IA27 in FIG. 2; FIG. 4 is an optical layout diagram showing the specific configuration of two exposure modules MU18 and MU19 lined up in the X direction (scanning exposure direction) as viewed in the XZ plane; FIG. 5 is a diagram schematically showing a state in which the DMD 10 and the projection unit PLU are tilted by an angle θk in the XY plane; and FIG. 6 is a diagram explaining in detail the imaging state of the micromirrors of the DMD 10 by the projection unit PLU. The diagram is a schematic diagram of an MFE lens 108A as an optical integrator 108 as viewed from the exit surface side. 7 is a diagram schematically showing an example of the positional relationship between a point light source SPF formed on the exit surface side of the lens element EL of the MFE lens 108A of FIG. 7 and the exit end of the optical fiber bundle FBn. This diagram is a diagram schematically showing the state of a light source image formed on the pupil Ep in the second lens group 118 of the projection unit PLU shown in FIG. 6. This diagram is a diagram schematically showing the behavior of illumination light (imaging light beam) Sa on the optical path from the pupil Ep of the second lens group 118 to the substrate P shown in FIG. 6. This is an enlarged perspective view of the state of a part of the micromirrors Ms of the DMD 10 when power supply to the drive circuit of the DMD 10 is off. This is an enlarged perspective view of a part of the mirror surface of the DMD 10 when the micromirrors Ms of the DMD 10 are in the on state and the off state. This is a diagram showing a part of the mirror surface of the DMD 10 as seen in the X'Y' plane, showing a case where only one row of micromirrors Ms aligned in the Y' direction are in the on state. 12 is a view of the a-a' arrow portion of the mirror surface of the DMD 10 in FIG. 12 as viewed in the X'Z plane. 13 is a diagram showing the imaging state of the light (imaging light beam) Sa reflected from the isolated micromirror Msa by the projection unit PLU in the X'Z plane. 14 is a graph showing the point spread function Iea of ​​the diffraction image in the pupil Ep due to the specularly reflected light Sa from the isolated micromirror Msa. 15 is a diagram showing a part of the mirror surface of the DMD 10 as viewed in the X'Y' plane, showing a case where many micromirrors Ms adjacent in the X' direction are simultaneously in the ON state. 16 is a view of the a-a' arrow portion of the mirror surface of the DMD 10 as viewed in the X'Z plane.21 is a graph showing an example of the distribution of the angle θj of the diffracted light Idj generated from the DMD 10 in the state shown in FIGS. 17 and 18. This is a diagram schematically showing the intensity distribution of the imaging light beam at the pupil Ep when diffracted light is generated as shown in FIG. 19. This is a diagram showing the state of a part of the mirror surface of the DMD 10 as viewed in the X'Y' plane when a line-and-space pattern is projected. This is a diagram showing the portion of the mirror surface of the DMD 10 as viewed in the X'Z plane, as viewed along the arrow a-a' of FIG. 21. This is a diagram showing a modified example of the distributor of this embodiment. This is a graph showing an example of the distribution of the angle θj of the diffracted light Idj generated from the DMD 10 in the state shown in FIGS. 21 and 22. This is a graph showing the results of a simulation of the contrast of the aerial image of a line-and-space pattern with a line width of 1 μm on the image plane. This is a graph showing the relationship between the wavelength λ and the telecentric error Δθt calculated based on equation (2). This is a diagram showing a specific configuration of the optical path from the optical fiber bundle FBn to the MFE lens 108A in the illumination unit ILU shown in FIG. 4 or 6. 1 is a diagram showing a specific configuration of the optical path from the MFE lens 108A of the illumination unit ILU shown in FIG. 4 or 6 to the DMD 10.

[0033] FIG. 1 is an exaggerated diagram showing the state of a point light source SPF formed on the exit surface side of the MFE lens 108A when the illumination light ILm incident on the MFE lens 108A is tilted in the X'Z plane.

[0034] FIG. 1 is a diagram showing the configuration of an example of a beam supply unit that is attached to the exposure apparatus EX shown in FIG. 1 and supplies illumination light ILm to each module MUn (n = 1 to 27).

[0035] FIG. 1 is a diagram showing a schematic representation of the wavelength distribution of a beam LBb after beams LB1 to LB7 from seven laser light sources FL1 to FL7 are combined by a beam combining unit 200.

[0036] FIG. 1 is a diagram showing the state of a portion of the mirror surface of the DMD 10 during exposure of a line-and-space pattern tilted at an angle of 45° on a substrate P.

[0037] FIG. 1 is a block diagram showing a schematic example of a portion of an exposure control device attached to the exposure apparatus EX of the present embodiment, particularly related to adjustment control of telecentricity error. 1 is a diagram showing an example of the arrangement of a display area DPA and peripheral areas PPAx and PPAy for a display panel exposed on a substrate P by an exposure apparatus EX. FIG. 2 is a diagram showing an example of the arrangement of pixels PIX in the display area DPA that appear in a projection area IAn (n=1 to 27).39 is a diagram showing a schematic configuration of an optical measurement unit provided in a calibration reference unit CU attached to an end portion on a substrate holder 4B of the exposure apparatus EX shown in FIG. 1 ; 39 is a diagram showing a schematic configuration of one of the drawing modules provided in a pattern exposure apparatus according to a second embodiment; 39 is a diagram showing, in an exaggerated manner, the state of the micromirror Ms when an isolated pattern with a minimum line width is projected by the DMD 10′ of FIG. 36 ; 39 is a graph showing, in an exaggerated manner, the point spread function Iea of ​​the diffraction image in the pupil Ep of the reflected light Sa from the micromirror Msa in the isolated on-state as shown in FIG. 37 ; 39 is a diagram showing, in an exaggerated manner, the state of the micromirror Ms when a large land-shaped pattern is projected by the DMD 10′ of FIG. 39 ; 39 is a diagram showing, in an exaggerated manner, an example of the direction of generation of the central rays of the zeroth-order diffracted light and the ±1st-order diffracted light contained in the reflected light Sa′ in the state of FIG.

[0012] A pattern exposure apparatus (pattern formation apparatus) according to an aspect of the present invention will be described in detail below with reference to the accompanying drawings, showing preferred embodiments. It should be noted that the aspects of the present invention are not limited to these embodiments and include various modifications or improvements. That is, the components described below include those that would be easily conceivable to a person skilled in the art and those that are substantially identical, and the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention. The same reference numerals are used throughout the drawings and the following detailed description for members and components that achieve the same or similar functions.

[0013] [Overall Configuration of Pattern Exposure Apparatus] FIG. 1 is a perspective view showing the outline of the external configuration of a pattern exposure apparatus (hereinafter also referred to simply as an exposure apparatus) EX according to this embodiment. The exposure apparatus EX is an apparatus that projects exposure light, the intensity distribution of which is dynamically modulated in space by a spatial light modulation element (digital mirror device: DMD), onto a substrate to be exposed. In a specific embodiment, the exposure apparatus EX is a step-and-scan projection exposure apparatus (scanner) that uses a rectangular (square) glass substrate used in display devices (flat panel displays) as the exposure target. The glass substrate is a substrate P for flat panel displays, with at least one side or diagonal length of 500 mm or more and a thickness of 1 mm or less. The exposure apparatus EX exposes a projected image of a pattern created by the DMD onto a photosensitive layer (photoresist) formed to a constant thickness on the surface of the substrate P. After exposure, the substrate P is transported from the exposure apparatus EX and sent to a predetermined process (such as a film formation process, etching process, or plating process) after a development process.

[0014] The exposure apparatus EX is equipped with a stage device that includes a pedestal 2 placed on active vibration isolation units 1a, 1b, 1c, and 1d (1d not shown), a surface plate 3 placed on the pedestal 2, an XY stage 4A that is movable two-dimensionally on the surface plate 3, a substrate holder 4B that holds a substrate P on a plane by suction on the XY stage 4A, and laser length measurement interferometers (hereinafter simply referred to as interferometers) IFX, IFY1 to IFY4 that measure the two-dimensional movement position of the substrate holder 4B (substrate P). Such a stage device is disclosed, for example, in U.S. Patent Publication No. 2010 / 0018950 and U.S. Patent Publication No. 2012 / 0057140.

[0015] In FIG. 1 , the XY plane of the Cartesian coordinate system XYZ is set parallel to the flat surface of the stage device's base 3, and the XY stage 4A is set to be able to translate within the XY plane. In this embodiment, the direction parallel to the X axis of the coordinate system XYZ is set as the scanning movement direction of the substrate P (XY stage 4A) during scan exposure. The movement position of the substrate P in the X-axis direction is sequentially measured by the interferometer IFX, and the movement position in the Y-axis direction is sequentially measured by at least one (preferably two or more) of the four interferometers IFY1 to IFY4. The substrate holder 4B is configured to be able to move slightly relative to the XY stage 4A in the Z-axis direction, which is perpendicular to the XY plane, and to be able to tilt slightly in any direction relative to the XY plane, thereby actively adjusting the focus and leveling (parallelism) between the surface of the substrate P and the imaging plane of the projected pattern. Furthermore, the substrate holder 4B is configured to be able to rotate slightly (θz rotation) about an axis parallel to the Z axis in order to actively adjust the tilt of the substrate P in the XY plane.

[0016] The exposure apparatus EX further includes an optical base 5 that holds multiple exposure (drawing) modules MU(A), MU(B), and MU(C), and main columns 6a, 6b, 6c, and 6d (6d is not shown) that support the optical base 5 from the pedestal 2. Each of the multiple exposure modules MU(A), MU(B), and MU(C) includes an illumination unit ILU that is attached to the +Z side of the optical base 5 and receives illumination light from an optical fiber unit FBU, and a projection unit PLU that is attached to the -Z side of the optical base 5 and has an optical axis parallel to the Z axis. Each of the exposure modules MU(A), MU(B), and MU(C) further includes a digital mirror device (DMD) 10 that serves as a light modulation unit that reflects illumination light from the illumination unit ILU in the -Z direction and causes it to enter the projection unit PLU. A detailed configuration of the exposure module including the illumination unit ILU, DMD 10, and projection unit PLU will be described later.

[0017] A plurality of alignment systems (microscopes) ALG are attached to the -Z direction side of the optical surface plate 5 of the exposure apparatus EX, and detect alignment marks formed at a plurality of predetermined positions on the substrate P. A calibration reference unit CU is provided at the -X direction end of the substrate holder 4B to confirm (calibrate) the relative positional relationship in the XY plane of the detection fields of the alignment systems ALG, to confirm (calibrate) the baseline error between the projection positions of the pattern images projected from the projection units PLU of the exposure modules MU(A), MU(B), and MU(C) and the positions of the detection fields of the alignment systems ALG, or to confirm the position and image quality of the pattern images projected from the projection units PLU. Note that, although some of the components are not shown in FIG. 1 , in this embodiment, nine exposure modules MU(A), MU(B), and MU(C) are arranged at regular intervals in the Y direction, for example, but the number of modules may be more or less than nine.

[0018] 2 is a diagram showing an example of the arrangement of projection areas IAn of the digital mirror device (DMD) 10 projected onto the substrate P by the projection units PLU of each of the exposure modules MU(A), MU(B), and MU(C), and the Cartesian coordinate system XYZ is set to the same as in FIG. 1. In this embodiment, the first row of exposure modules MU(A), the second row of exposure modules MU(B), and the third row of exposure modules MU(C), which are spaced apart in the X direction, each comprise nine modules arranged in the Y direction. The exposure module MU(A) comprises nine modules MU1 to MU9 arranged in the +Y direction, the exposure module MU(B) comprises nine modules MU10 to MU18 arranged in the -Y direction, and the exposure module MU(C) comprises nine modules MU19 to MU27 arranged in the +Y direction. All modules MU1 to MU27 have the same configuration, and when exposure module MU(A) and exposure module MU(B) are arranged face to face in the X direction, exposure module MU(B) and exposure module MU(C) are arranged back to back in the X direction.

[0019] 2, the shape of the projection areas IA1, IA2, IA3, ..., IA27 (sometimes represented as IAn, where n is 1 to 27) by each of the modules MU1 to MU27 is, as an example, a rectangle extending in the Y direction with an aspect ratio of approximately 1:2. In this embodiment, as the substrate P is scanned and moved in the +X direction, spliced ​​exposure is performed at the -Y direction end of each of the first row of projection areas IA1 to IA9 and the +Y direction end of each of the second row of projection areas IA10 to IA18. Then, areas on the substrate P that were not exposed by each of the first and second rows of projection areas IA1 to IA18 are spliced ​​and exposed by each of the third row of projection areas IA19 to IA27. The center point of each of the projection areas IA1 to IA9 in the first column is located on a line k1 parallel to the Y axis, the center point of each of the projection areas IA10 to IA18 in the second column is located on a line k2 parallel to the Y axis, and the center point of each of the projection areas IA19 to IA27 in the third column is located on a line k3 parallel to the Y axis. The distance in the X direction between lines k1 and k2 is set to a distance XL1, and the distance in the X direction between lines k2 and k3 is set to a distance XL2.

[0020] Here, assuming that the joint portion between the −Y direction end of projection area IA9 and the +Y direction end of projection area IA10 is OLa, the joint portion between the −Y direction end of projection area IA10 and the +Y direction end of projection area IA27 is OLb, and the joint portion between the +Y direction end of projection area IA8 and the −Y direction end of projection area IA27 is OLc, the state of the joint exposure will be described with reference to Figure 3. In Figure 3, the Cartesian coordinate system XYZ is set in the same way as in Figures 1 and 2, and the coordinate system X'Y' in projection areas IA8, IA9, IA10, and IA27 (and all other projection areas IAn) is set so as to be inclined at an angle θk with respect to the X and Y axes (lines k1 to k3) of the Cartesian coordinate system XYZ. That is, the entire DMD 10 is tilted by an angle θk in the XY plane so that the two-dimensional arrangement of the many micromirrors of the DMD 10 forms the coordinate system X'Y'.

[0021] 3, the circular area encompassing each of the projection areas IA8, IA9, IA10, and IA27 (and all other projection areas IAn) represents the circular image field PLf' of the projection unit PLU. At the joint OLa, the projected image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA9 in the -Y' direction is set to overlap with the projected image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA10 in the +Y' direction. At the joint OLb, the projected image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA10 in the -Y' direction is set to overlap with the projected image of the micromirrors arranged diagonally (at an angle θk) at the end of the projection area IA27 in the +Y' direction. Similarly, at the joint OLc, the projected image of the micromirror arranged diagonally (at an angle θk) at the end of the +Y' direction of the projection area IA8 and the projected image of the micromirror arranged diagonally (at an angle θk) at the end of the -Y' direction of the projection area IA27 are set to overlap.

[0022] [Configuration of the Illumination Unit] Figure 4 is an optical layout diagram showing the specific configuration of module MU18 in exposure module MU(B) and module MU19 in exposure module MU(C) shown in Figures 1 and 2, viewed in the XZ plane. The Cartesian coordinate system XYZ in Figure 4 is set to be the same as the Cartesian coordinate system XYZ in Figures 1 to 3. As is clear from the arrangement of each module in the XY plane shown in Figure 2, module MU18 is shifted by a fixed distance in the +Y direction relative to module MU19, and they are installed back-to-back. Since the optical components in module MU18 and module MU19 are made of the same materials and configured identically, the optical configuration of module MU18 will be mainly described in detail here. Note that the optical fiber unit FBU shown in Figure 1 is composed of 27 optical fiber bundles FB1 to FB27, corresponding to the 27 modules MU1 to MU27 shown in Figure 2.

[0023] The illumination unit ILU of the module MU18 is composed of a mirror 100 that reflects illumination light ILm traveling in the −Z direction from the output end of the optical fiber bundle FB18, a mirror 102 that reflects the illumination light ILm from the mirror 100 in the −Z direction, an input lens system 104 that acts as a collimator lens, an illuminance adjustment filter 106, an optical integrator 108 that includes a micro fly's eye (MFE) lens, a field lens, etc., a condenser lens system 110, and an inclined mirror 112 that reflects the illumination light ILm from the condenser lens system 110 toward the DMD 10. The mirror 102, the input lens system 104, the optical integrator 108, the condenser lens system 110, and the inclined mirror 112 are arranged along an optical axis AXc that is parallel to the Z axis.

[0024] The optical fiber bundle FB18 is composed of a single optical fiber line or a bundle of multiple optical fiber lines. The numerical aperture (NA, also referred to as the divergence angle) of the illumination light ILm emitted from the output end of the optical fiber bundle FB18 (each optical fiber line) is set so that it can enter the downstream input lens system 104 without being eclipsed. The position of the front focal point of the input lens system 104 is designed to be the same as the position of the output end of the optical fiber bundle FB18. Furthermore, the position of the back focal point of the input lens system 104 is set so that the illumination light ILm from a single or multiple point light sources formed at the output end of the optical fiber bundle FB18 is superimposed on the incident surface of the MFE lens 108A of the optical integrator 108. Therefore, the incident surface of the MFE lens 108A is Koehler illuminated by the illumination light ILm from the output end of the optical fiber bundle FB18. In the initial state, the geometric center point of the output end of the optical fiber bundle FB18 in the XY plane is located on the optical axis AXc, and the chief ray (center line) of the illumination light ILm from the point light source at the output end of the optical fiber line is parallel to (or coaxial with) the optical axis AXc.

[0025] The illumination light ILm from the input lens system 104 is attenuated by an illuminance adjustment filter 106 to a value between 0% and 90%, and then passes through an optical integrator 108 (MFE lens 108A, field lens, etc.) and enters a condenser lens system 110. The MFE lens 108A is a two-dimensional array of numerous rectangular microlenses, each measuring several tens of micrometers square, and its overall shape is set to be approximately similar to the overall shape of the mirror surface of the DMD 10 (aspect ratio of approximately 1:2) in the XY plane. The position of the front focal point of the condenser lens system 110 is set to be approximately the same as the position of the exit surface of the MFE lens 108A. Therefore, each of the illumination light beams from the point light sources formed on the exit side of each of the numerous microlenses of the MFE lens 108A is converted into approximately parallel beams by the condenser lens system 110, reflected by an inclined mirror 112, and then superimposed on the DMD 10 to form a uniform illuminance distribution. A surface light source in which a large number of point light sources (light-converging points) are densely arranged two-dimensionally is generated on the exit surface of the MFE lens 108A, and therefore the MFE lens 108A functions as a surface light source member.

[0026] In module MU18 shown in FIG. 4 , optical axis AXc, which is parallel to the Z axis and passes through condenser lens system 110, is bent by tilted mirror 112 and reaches DMD 10. The optical axis between tilted mirror 112 and DMD 10 is referred to as optical axis AXb. In this embodiment, a neutral plane including the center points of each of the numerous micromirrors of DMD 10 is set parallel to the XY plane. Therefore, the angle between the normal to this neutral plane (parallel to the Z axis) and optical axis AXb is the angle of incidence θα of illumination light ILm with respect to DMD 10. DMD 10 is attached to the lower side of mount 10M, which is fixed to the support column of illumination unit ILU. Mount 10M is provided with a fine-motion stage combining a parallel link mechanism and an extendable piezoelectric element, such as that disclosed in International Patent Publication No. 2006 / 120927, to fine-tune the position and orientation of DMD 10.

[0027] Illumination light ILm irradiated onto micromirrors of DMD 10 that are in the On state is reflected in the X direction within the XZ plane so as to head toward the projection unit PLU. On the other hand, illumination light ILm irradiated onto micromirrors of DMD 10 that are in the Off state is reflected in the Y direction within the YZ plane so as not to head toward the projection unit PLU. As will be described in more detail below, DMD 10 in this embodiment is of a roll and pitch drive type that switches between the On state and the Off state by tilting the micromirrors in the roll direction and the pitch direction.

[0028] A movable shutter 114 is removably provided in the optical path between the DMD 10 and the projection unit PLU to block light reflected from the DMD 10 during non-exposure periods. As shown on the module MU19 side, the movable shutter 114 is rotated to an angular position where it is removed from the optical path during exposure periods, and as shown on the module MU18 side, it is rotated to an angular position where it is inserted obliquely into the optical path during non-exposure periods. A reflective surface is formed on the DMD 10 side of the movable shutter 114, and light reflected therefrom from the DMD 10 is irradiated onto a light absorber 115. The light absorber 115 absorbs light energy in the ultraviolet wavelength range (wavelengths of 400 nm or less) without re-reflecting it and converts it into heat energy. For this reason, the light absorber 115 is also provided with a heat dissipation mechanism (heat dissipation fins and a cooling mechanism). Although not shown in FIG. 4, the reflected light from the micromirrors of DMD 10, which are in the off state during the exposure period, is absorbed by a similar light absorber (not shown in FIG. 4) installed in the Y direction (a direction perpendicular to the plane of the paper in FIG. 4) with respect to the optical path between DMD 10 and projection unit PLU.

[0029] [Configuration of Projection Unit] The projection unit PLU attached to the underside of the optical surface plate 5 is configured as a double-telecentric imaging projection lens system composed of a first lens group 116 and a second lens group 118 arranged along an optical axis AXa parallel to the Z axis. The first lens group 116 and the second lens group 118 are each configured to move translationally in the direction along the Z axis (optical axis AXa) by a micro-motion actuator relative to a support column fixed to the underside of the optical surface plate 5. The projection magnification Mp of the imaging projection lens system formed by the first lens group 116 and the second lens group 118 is determined by the relationship between the array pitch Pd of the micromirrors on the DMD 10 and the minimum line width (minimum pixel dimension) Pg of the pattern projected within the projection area IAn (n = 1 to 27) on the substrate P.

[0030] As an example, if the required minimum line width (minimum pixel dimension) Pg is 1 μm and the micromirror array pitch Pd is 5.4 μm, the projection magnification Mp is set to approximately 1 / 6, taking into consideration the tilt angle θk in the XY plane of the projection area IAn (DMD 10) described above in Figure 3. The imaging projection lens system consisting of lens groups 116 and 118 inverts / reflects a reduced image of the entire mirror surface of DMD 10 and forms an image on the projection area IA18 (IAn) on the substrate P.

[0031] The first lens group 116 of the projection unit PLU is capable of slight movement in the direction of the optical axis AXa by an actuator in order to make fine adjustments (on the order of ±several tens of ppm) to the projection magnification Mp, and the second lens group 118 is capable of slight movement in the direction of the optical axis AXa by an actuator in order to make high-speed focus adjustments. Furthermore, in order to measure positional changes in the Z-axis direction of the surface of the substrate P with an accuracy of submicron or less, a plurality of oblique incidence focus sensors 120 are provided below the optical surface plate 5. The plurality of focus sensors 120 measure overall positional changes in the Z-axis direction of the substrate P, positional changes in the Z-axis direction of partial areas on the substrate P corresponding to each of the projection areas IAn (n = 1 to 27), partial tilt changes of the substrate P, etc.

[0032] As explained above in Figure 3, the illumination unit ILU and projection unit PLU described above require that the projection area IAn be tilted by an angle θk in the XY plane, and therefore the DMD 10 and illumination unit ILU in Figure 4 (at least the optical path portion of mirrors 102 to 112 along the optical axis AXc) are arranged so that they are tilted overall by an angle θk in the XY plane.

[0033] Figure 5 is a schematic diagram showing the state in the XY plane where the DMD 10 and projection unit PLU are tilted by an angle θk within the XY plane. In Figure 5, the Cartesian coordinate system XYZ is the same as the coordinate systems XYZ in Figures 1 to 4, and the coordinate system X'Y' for arranging the micromirrors Ms of the DMD 10 is the same as the coordinate system X'Y' shown in Figure 3. The circle containing the DMD 10 is the image field PLf on the object side of the projection unit PLU, and the optical axis AXa is located at its center. Meanwhile, the optical axis AXb, which is obtained by bending the optical axis AXc that passes through the condenser lens system 110 of the illumination unit ILU by the tilted mirror 112, is positioned so that it is tilted by an angle θk from a line Lu that is parallel to the X axis, when viewed within the XY plane.

[0034] [Imaging Optical Path by DMD] Next, with reference to Figure 6, the imaging state of the micromirrors Ms of the DMD 10 by the projection unit PLU (imaging projection lens system) will be described in detail. The Cartesian coordinate system X'Y'Z in Figure 6 is the same as the coordinate systems X'Y'Z shown in Figures 3 and 5, and Figure 6 illustrates the optical path from the condenser lens system 110 of the illumination unit ILU to the substrate P. Illumination light ILm from the condenser lens system 110 travels along the optical axis AXc, is totally reflected by the inclined mirror 112, and reaches the mirror surface of the DMD 10 along the optical axis AXb. Here, the micromirror Ms located at the center of the DMD 10 is referred to as Msc, and the micromirrors Ms located on the periphery are referred to as Msa, and it is assumed that these micromirrors Msc and Msa are in the On state.

[0035] If the tilt angle of micromirror Ms in the On state is, for example, a standard value of 17.5° with respect to the X'Y' plane (XY plane), then the angle of incidence θα (the angle of optical axis AXb from optical axis AXa) of illumination light ILm irradiated onto DMD 10 is set to 35.0° in order to make the chief rays of reflected light Sc and Sa from micromirrors Msc and Msa parallel to the optical axis AXa of projection unit PLU. Accordingly, in this case, the reflective surface of tilted mirror 112 is also tilted by 17.5° (=θα / 2) with respect to the X'Y' plane (XY plane). The chief ray Lc of reflected light Sc from micromirror Msc is coaxial with the optical axis AXa, and the chief ray La of reflected light Sa from micromirror Msa is parallel to the optical axis AXa, so that the reflected light Sc and Sa enter projection unit PLU with a predetermined numerical aperture (NA).

[0036] The reflected light Sc forms a telecentric image ic of the micromirror Msc, which has been reduced by the projection magnification Mp of the projection unit PLU, on the substrate P at the position of the optical axis AXa. Similarly, the reflected light Sa forms a telecentric image ia of the micromirror Msa, which has been reduced by the projection magnification Mp of the projection unit PLU, on the substrate P at a position away from the reduced image ic in the +X' direction. As an example, the first lens group 116 of the projection unit PLU is composed of two lens groups G1 and G2, and the second lens group 118 is composed of three lens groups G3, G4, and G5. An exit pupil (also simply referred to as a pupil) Ep is set between the lens group G3 and the lens group G4 of the second lens group 118. At the position of the pupil Ep, a light source image of the illumination light ILm (a collection of numerous point light sources formed on the exit surface side of the MFE lens 108A) is formed, resulting in a Koehler illumination configuration. The pupil Ep is also called the aperture of the projection unit PLU, and the size (diameter) of this aperture is one factor that determines the resolving power of the projection unit PLU.

[0037] The specularly reflected light from the micromirror Ms of the DMD 10 in the On state is set to pass through without being blocked by the maximum aperture (diameter) of the pupil Ep, and the numerical aperture NAi on the image side (substrate P side) in the equation R=k1·(λ / NAi), which expresses the resolution R, is determined by the maximum aperture of the pupil Ep and the distance of the rear (image side) focal point of the projection unit PLU (lens group G1 to G5 as an imaging projection lens system). Also, the numerical aperture NAo on the object plane (DMD 10) side of the projection unit PLU (lens group G1 to G5) is expressed as the product of the projection magnification Mp and the numerical aperture NAi, and when the projection magnification Mp is 1 / 6, then NAo=NAi / 6.

[0038] 6 and 4, the exit ends of the optical fiber bundles FBn (n = 1 to 27) connected to each module MUn (n = 1 to 27) are set by the input lens system 104 to be optically conjugate with the exit end side of the MFE lens 108A of the optical integrator 108, and the entrance end side of the MFE lens 108A is set by the condenser lens system 110 to be optically conjugate with the center of the mirror surface (neutral plane) of the DMD 10. As a result, the illumination light ILm irradiated onto the entire mirror surface of the DMD 10 has a uniform illuminance distribution (for example, intensity unevenness within ±1%) due to the action of the optical integrator 108. Furthermore, the exit end side of MFE lens 108A and the plane of pupil Ep of projection unit PLU are set in an optically conjugate relationship by condenser lens system 110 and lens groups G1 to G3 of projection unit PLU.

[0039] 7 is a schematic diagram of the MFE lens 108A of the optical integrator 108, viewed from the exit surface side. The MFE lens 108A is configured by densely arranging a large number of lens elements EL, each having a rectangular cross section extending in the Y' direction within the X'Y' plane, whose cross-sectional shape is similar to the shape of the entire mirror surface (image formation area) of the DMD 10, in the X' and Y' directions. Illumination light ILm from the input lens system 104 shown in FIG. 4 is irradiated onto the entrance surface side of the MFE lens 108A, forming a substantially circular irradiation area Ef. The irradiation area Ef has a shape similar to each exit end of the single or multiple optical fiber lines of the optical fiber bundle FB18 (FBn) shown in FIG. 4, and is designed to be a circular area centered on the optical axis AXc.

[0040] Of the numerous lens elements EL of the MFE lens 108A, those lens elements EL located within the illumination area Ef have point light sources SPF produced by illumination light ILm from the output ends of the optical fiber bundles FB18 (FBn) densely distributed within a substantially circular area on the output surface side of each. The circular area APh in Figure 7 represents the aperture range when a variable aperture diaphragm is provided on the output surface side of the MFE lens 108A. The actual illumination light ILm is produced by the numerous point light sources SPF scattered within the circular area APh, and light from point light sources SPF outside the circular area APh is blocked.

[0041] 8A, 8B, and 8C are schematic diagrams illustrating an example of the positional relationship between a point light source SPF formed on the output surface side of the lens element EL of the MFE lens 108A in FIG. 7 and the output end of the optical fiber bundle FBn. The coordinate system X'Y' in each of FIG. 8A, 8B, and 8C is the same as the coordinate system X'Y' set in FIG. 7. FIG. 8A illustrates a case where the optical fiber bundle FBn is a single optical fiber line, FIG. 8B illustrates a case where two optical fiber lines are arranged in the X' direction as the optical fiber bundle FBn, and FIG. 8C illustrates a case where three optical fiber lines are arranged in the X' direction as the optical fiber bundle FBn.

[0042] The output end of the optical fiber bundle FBn and the output surface of the MFE lens 108A (lens element EL) are set in an optically conjugate relationship (imaging relationship), so when the optical fiber bundle FBn is a single optical fiber line, a single point light source SPF is formed at the center position of the output surface side of the lens element EL, as shown in Figure 8(A). When two optical fiber lines are bundled in the X' direction as the optical fiber bundle FBn, the geometric centers of the two point light sources SPF are formed at the center position of the output surface side of the lens element EL, as shown in Figure 8(B). Similarly, when three optical fiber lines are bundled in the X' direction as the optical fiber bundle FBn, the geometric centers of the three point light sources SPF are formed at the center position of the output surface side of the lens element EL, as shown in Figure 8(C).

[0043] If the illumination light ILm from the optical fiber bundle FBn has a high power and the point light source SPF converges on the exit surface of each lens element EL of the MFE lens 108A, which serves as a surface light source component or optical integrator, damage (such as clouding or burning) to each lens element EL may occur. In this case, the convergence position of the point light source SPF may be set in space slightly offset from the exit surface of the MFE lens 108A (the exit surface of the lens element EL). A configuration in which the position of the point light source (focusing point) is offset to the outside of the lens element in an illumination system using a fly's eye lens is disclosed, for example, in U.S. Pat. No. 4,939,630.

[0044] 9 is a schematic diagram showing the state of the light source image Ips formed on the pupil Ep in the second lens group 118 of the projection unit PLU shown in FIG. 6 when the entire mirror surface of the DMD 10 is assumed to be a single plane mirror tilted by an angle θα / 2 so as to be parallel to the inclined mirror 112 shown in FIG. 6. The light source image Ips shown in FIG. 9 is a re-image of a number of point light sources SPF (which form a surface light source gathered in a nearly circular shape) formed on the exit surface side of the MFE lens 108A. In this case, no diffracted light or scattered light is generated from the single plane mirror placed in place of the DMD 10, and only the light source image Ips consisting of specularly reflected light (zeroth-order light) is generated at the center of the pupil Ep, coaxial with the optical axis AXa.

[0045] 9, when the radius corresponding to the maximum diameter of the pupil Ep is re and the radius corresponding to the effective diameter of the light source image Ips as a surface light source is ri, the σ value representing the size (area) of the light source image Ips relative to the size (area) of the pupil Ep is σ=ri / re. The σ value may be changed as appropriate to improve the line width or density of the pattern to be projected and exposed, or the depth of focus (DOF). The σ value can be changed by providing a variable aperture stop (circular region APh in FIG. 7) at a position on the exit surface side of the MFE lens 108A or at the position of the pupil Ep within the second lens group 118.

[0046] In this type of exposure apparatus EX, the pupil Ep in the second lens group 118 is often used at its maximum diameter, so the σ value is changed mainly by a variable aperture stop provided on the exit surface side of the MFE lens 108A. In this case, the radius ri of the light source image Ips is defined by the radius of the circular area APh in Figure 7. Of course, a variable aperture stop may be provided in the pupil Ep of the projection unit PLU to adjust the σ value and depth of focus (DOF).

[0047] [Telecentric Error During Projection Exposure] Next, we will explain telecentric errors that can occur in an exposure apparatus EX that uses a DMD 10 as in this embodiment. Before that, we will briefly explain one of the causes of telecentric errors using FIG. 10. FIGS. 10A and 10B are diagrams that schematically show the behavior of illumination light (imaging light beam) Sa on the optical path from the pupil Ep of the second lens group 118 shown in FIG. 6 to the substrate P. The Cartesian coordinate system X'Y'Z in FIGS. 10A and 10B is the same as the coordinate system X'Y'Z in FIG. 6. For simplicity's sake, we will assume that the entire mirror surface of the DMD 10 is a single plane mirror that is tilted by an angle θα / 2 parallel to the inclined mirror 112 in FIG. 6. 10A and 10B, lens groups G4 and G5 are arranged along the optical axis AXa between the pupil Ep and the substrate P, and a circular light source image (surface light source image) Ips is formed within the pupil Ep as shown in Fig. 9. Note that the chief ray of reflected light (imaging light beam) Sa that passes through a point on the periphery in the X' direction of the light source image (surface light source image) Ips and enters the lens groups G4 and G5 is denoted as La.

[0048] 10A shows the behavior of reflected light (imaging light beam) Sa when the light source image (surface light source image) Ips is accurately positioned at the center of the pupil Ep. The chief rays La of the reflected light (imaging light beam) Sa directed toward a single point within the projection area IAn on the substrate P are all parallel to the optical axis AXa, and the imaging light beam projected onto the projection area IAn is telecentric, i.e., the telecentric error is zero. In contrast, FIG. 10B shows the behavior of the reflected light (imaging light beam) Sa when the light source image (surface light source image) Ips is shifted laterally by ΔDx in the X' direction from the center of the pupil Ep. In this case, the chief rays La of the reflected light (imaging light beam) Sa directed toward a single point within the projection area IAn on the substrate P are all tilted by Δθt with respect to the optical axis AXa. The tilt amount Δθt becomes a telecentric error, and as the tilt amount Δθt (i.e., the lateral shift amount ΔDx) becomes larger than a predetermined allowable value, the imaging condition of the pattern image projected onto the projection area IAn deteriorates.

[0049] [DMD Configuration] As previously described, the DMD 10 used in this embodiment employs a roll and pitch drive system. Its specific configuration will be described with reference to FIGS. 11 and 12. FIGS. 11 and 12 are enlarged perspective views of a portion of the mirror surface of the DMD 10. The Cartesian coordinate system X'Y'Z is the same as the coordinate system X'Y'Z shown in FIG. 6. FIG. 11 shows the state when power is turned off to the drive circuits provided below each micromirror Ms of the DMD 10. When power is turned off, the reflective surface of each micromirror Ms is set parallel to the X'Y' plane. Here, the arrangement pitch of each micromirror Ms in the X' direction is Pdx (μm), and the arrangement pitch in the Y' direction is Pdy (μm). In practice, Pdx = Pdy.

[0050] FIG. 12 shows a state in which power is supplied to the drive circuit, resulting in a mixture of micromirrors Msa in the ON state and micromirrors Msb in the OFF state. In this embodiment, the micromirror Msa in the ON state is driven to tilt at an angle θd (= θα / 2) from the X'Y' plane around a line parallel to the Y' axis, and the micromirror Msb in the OFF state is driven to tilt at an angle θd (= θα / 2) from the X'Y' plane around a line parallel to the X' axis. Illumination light ILm is irradiated onto each of the micromirrors Msa and Msb along a principal ray Lp parallel to the X'Z plane (parallel to the optical axis AXb shown in FIG. 6). Note that the line Lx' in FIG. 11 is a projection of the principal ray Lp onto the X'Y' plane and is parallel to the X' axis.

[0051] The angle of incidence θα of illumination light ILm on DMD 10 is the tilt angle with respect to the Z axis in the X'Z plane, and from the perspective of geometric optics, reflected light (imaging light beam) Sa travels in the -Z direction, approximately parallel to the Z axis, from the micromirror Msa in the ON state, which is tilted in the X' direction by an angle θα / 2. On the other hand, reflected light Sg reflected by the micromirror Msb in the OFF state is generated in the -Z direction, non-parallel to the Z axis, because the micromirror Msb is tilted in the Y' direction. In Figure 12, if line Lv is a line parallel to the Z axis (optical axis AXa) and line Lh is a projection of the chief ray of reflected light Sg onto the X'Y' plane, reflected light Sg travels in a tilted direction within the plane containing lines Lv and Lh.

[0052] [Imaging State by DMD] In projection exposure using the DMD 10, pattern exposure is performed by rapidly switching each of the numerous micromirrors Ms between an on-state tilt and an off-state tilt based on pattern data (drawing data) using the operation shown in Figure 12, while scanning the substrate P in the X direction at a speed corresponding to the switching speed. However, depending on the fineness, density, or periodicity of the projected pattern, the telecentricity of the imaging light beam projected from the projection unit PLU (first lens group 116 and second lens group 118) onto the substrate P may change. This is because the mirror surface of the DMD 10 acts as a reflective diffraction grating (blazed diffraction grating) depending on the tilt state of the numerous micromirrors Ms of the DMD 10 according to the pattern.

[0053] FIG. 13 is a diagram showing a portion of the mirror surface of the DMD 10 as viewed in the X'Y' plane, and FIG. 14 is a diagram showing the a-a' arrow portion of the mirror surface of the DMD 10 in FIG. 13 as viewed in the X'Z plane. In FIG. 13, among the numerous micromirrors Ms, only one row of micromirrors Ms aligned in the Y' direction is in the ON state (micromirrors Msa), while the remaining micromirrors Ms are in the OFF state (micromirrors Msb). The tilted state of the micromirrors Ms shown in FIG. 13 occurs when an isolated line pattern with a line width at the resolution limit (e.g., approximately 1 μm) is projected. In the X'Y' plane, reflected light (imaging light beam) Sa from the ON-state micromirror Msa occurs in the -Z direction, parallel to the Z axis, while reflected light Sg from the OFF-state micromirror Msb occurs in the -Z direction but tilted in the direction along line Lh in FIG. 11.

[0054] In this case, as shown in FIG. 14 , only one of the many micromirrors Ms aligned in the X' direction is an on-state micromirror Msa tilted at an angle θd (=θα / 2) around a line parallel to the Y' axis with respect to the neutral plane Pcc (a plane parallel to the X'Y' plane that includes the center points of all micromirrors Ms). Therefore, when viewed in the X'Z plane, the reflected light (imaging light beam) Sa emitted from the on-state micromirror Msa is a simple regular reflection light that does not contain first-order or higher-order diffracted light, and its chief ray La is parallel to the optical axis AXa and enters the projection unit PLU. Reflected light Sg from the other off-state micromirrors Msb does not enter the projection unit PLU. Note that if there is only one on-state micromirror Msa isolated in the X' direction (or a row aligned in the Y' direction), the chief ray La of the reflected light (imaging light beam) Sa will be parallel to the optical axis AXa regardless of the wavelength λ of the illumination light ILm.

[0055] Figure 15 is a schematic diagram showing, in the X'Z plane, the imaging state of the reflected light (imaging light beam) Sa from the isolated micromirror Msa shown in Figure 14 by the projection unit PLU. In Figure 15, components with the same functions as those described in Figure 6 are assigned the same reference numerals. Because the projection unit PLU (lens groups G1-G5) is a double-telecentric reduction projection system, if the chief ray La of the reflected light (imaging light beam) Sa from the isolated micromirror Msa is parallel to the optical axis AXa, the chief ray La of the reflected light (imaging light beam) Sa that forms the reduced image ia will also be parallel to the normal (optical axis AXa) to the surface of the substrate P, and no telecentric error will occur. The numerical aperture NAo of the reflected light (imaging light beam) Sa on the object plane side (DMD 10) of the projection unit PLU shown in Figure 15 is equal to the numerical aperture of the illumination light ILm.

[0056] 9 and 10A, when DMD 10 is a single large plane mirror tilted by an angle θα / 2, the center position of the circular light source image (surface light source image) Ips formed on the pupil Ep of projection unit PLU passes through the optical axis AXa. Similarly, when only specularly reflected light Sa from an isolated micromirror Msa on the mirror surface of DMD 10 is incident on projection unit PLU, the point spread function of the light beam Isa of that specularly reflected light Sa at the position of the pupil Ep (Fourier transform plane) is expressed by a sinc2 function (point spread function of a rectangular aperture) centered on the optical axis AXa, because the reflective surface of micromirror Ms is a minute rectangle (square).

[0057] Fig. 16 is a graph schematically showing a theoretical point spread function Iea (a distribution produced by a light beam from one point light source SPF shown in Figs. 7 and 8 ) of a light beam (here, zeroth-order diffracted light) Isa at a pupil Ep due to reflected light Sa from a single row (or single unit) of micromirrors Msa isolated in the X' direction. In the graph of Fig. 16 , the horizontal axis represents the coordinate position in the X' (or Y') direction relative to the position of the optical axis AXa, and the vertical axis represents light intensity Ie. The point spread function Iea is expressed by the following equation (1):

[0058]

[0059] In this equation (1), Io represents the peak value of the light intensity Ie, and the position of the peak value Io due to the reflected light Sa from an isolated row (or a single unit) of micromirrors Msa coincides with the origin 0 in the X' (or Y') direction, i.e., the position of the optical axis AXa. Furthermore, the X' (or Y') direction positions ±ra of the first dark line where the light intensity Ie of the point spread distribution Iea first reaches its minimum value (0) from the origin 0 roughly correspond to the position of the radius ri of the light source image Ips described above in Figure 9. The actual intensity distribution at the pupil Ep is obtained by convolving the point spread distribution Iea over the range (σ value) of the light source image Ips shown in Figure 9, resulting in a roughly uniform intensity.

[0060] Next, a case where the width of the projected pattern in the X' direction (X direction) is sufficiently large will be described with reference to FIGS. 17 and 18. FIG. 17 is a diagram showing a portion of the mirror surface of the DMD 10 as viewed in the X'Y' plane, and FIG. 18 is a diagram showing the portion of the mirror surface of the DMD 10 in FIG. 17 as viewed in the X'Z plane, as viewed along the arrow a-a'. FIG. 17 shows a case where all of the numerous micromirrors Ms shown in FIG. 13 are in the on-state micromirrors Msa. While FIG. 17 shows only an arrangement of nine micromirrors Ms in the X' direction and ten micromirrors Ms in the Y' direction, there are also cases where more than two adjacent micromirrors Ms (or even all of the micromirrors Ms on the DMD 10) are in the on-state.

[0061] 17 and 18, from a large number of micromirrors Msa in the ON state that are adjacently arranged in the X' direction, reflected light Sa' is generated at a slight inclination from the optical axis AXa due to diffraction. If the mirror surface of DMD 10 in the state of Figure 18 is considered as a diffraction grating arranged at a pitch Pdx in the X' direction along the neutral plane Pcc, the angle θj of generation of the diffracted light can be expressed as the following equation (2), where j is the order (j = 0, 1, 2, 3, ...), λ is the wavelength, and θα is the angle of incidence of illumination light ILm.

[0062]

[0063] 19 is a graph showing the distribution of the angles θj of the diffracted light Idj calculated assuming, as an example, that the angle of incidence θα of the illumination light ILm (the inclination angle of the chief ray Lp of the illumination light ILm relative to the optical axis AXa) is 35.0°, the inclination angle θd of the micromirror Msa in the on state is 17.5°, the pitch Pdx of the micromirrors Msa is 5.4 μm, and the wavelength λ is 355.0 nm. As shown in FIG. 19, since the angle of incidence θα of the illumination light ILm is 35°, the zeroth-order diffracted light Id0 (j=0) is inclined at +35° relative to the optical axis AXa, and the angle θj relative to the zeroth-order diffracted light Id0 increases as the diffraction order increases. The numerical values ​​shown in the lower part of FIG. 19 represent the order j in parentheses and the inclination angle of the diffracted light Idj of each order from the optical axis AXa.

[0064] Under the numerical conditions of Figure 19, the tilt angle of the ninth-order diffracted light Id9 from the optical axis AXa is smallest, at approximately -1.04°. Therefore, when the micromirrors Ms of the DMD 10 are densely packed and turned on as shown in Figures 17 and 18, the center of the intensity distribution of the imaging light beam (Sa') within the pupil EP of the projection unit PLU is decentered to a position that is laterally shifted by an angle equivalent to -1.04° from the position of the optical axis AXa (corresponding to the lateral shift amount ΔDx shown in Figure 10(B) above). The actual distribution of the imaging light beam within the pupil Ep can be found by convolving the diffracted light distribution expressed by equation (2) with the sinc2 function expressed by equation (1).

[0065] Fig. 20 is a diagram schematically illustrating the intensity distribution of the imaging light beam (Sa') at the pupil Ep when diffracted light is generated as in Fig. 19. The horizontal axis in Fig. 20 represents the angle θj of the diffracted light Idj converted into the numerical aperture NAo on the object plane (DMD 10) side and the numerical aperture NAi on the image plane (substrate P) side when the projection magnification Mp of the projection unit PLU is set to 1 / 6. It is also assumed that the numerical aperture NAi on the image plane side of the projection unit PLU is 0.3 (object plane side numerical aperture NAo = 0.05). In this case, the resolving power (minimum resolution linewidth) Rs is expressed as Rs = k1(λ / NAi) using a process constant k1 (0 < k1 ≦ 1).

[0066] Therefore, when the wavelength λ=355.0 nm and k1=0.7, the resolving power Rs is approximately 0.83 μm. The pitch Pdx (Pdy) of the micromirrors Ms is reduced to 0.9 μm on the image plane (substrate P) side at the projection magnification Mp=1 / 6. Therefore, if the projection unit PLU has an image plane side numerical aperture NAi of 0.3 or more (object plane side numerical aperture NAo is 0.05), it is possible to form a projected image of one micromirror Msa in the on state with high contrast.

[0067] 20, the angle θe from the optical axis AXa in the X' direction when the object-side numerical aperture NAo=0.05, which is the maximum aperture of the pupil Ep of the projection unit PLU, is NAo=sin θe, so θe≈±2.87°. As shown in FIG. 19, the tilt angle of the ninth-order diffracted light Id9, −1.04° (more precisely, −1.037°), converts to an object-side numerical aperture NAo of approximately 0.018, and the intensity distribution Hpa of the imaging light beam Sa' (regularly reflected light component) in the pupil Ep is displaced in the X' direction by a shift amount ΔDx from the original position of the light source image Ips (radius ri). Note that, while part of the intensity distribution Hpb due to the eighth-order diffracted light Id8 also appears around the +X' direction within the pupil Ep. However, its peak intensity is low. Furthermore, the tilt angle of the 10th-order diffracted light Id10 from the optical axis AXa on the object plane side is large at 4.81°, so its intensity distribution is distributed outside the pupil Ep and does not pass through the projection unit PLU.

[0068] As explained above in Figure 10(B), the telecentricity error Δθt on the image plane side caused by the shift amount ΔDx of the center of the intensity distribution Hpa is Δθt = -6.22° (= -1.037° / projection magnification Mp) under the conditions shown in Figures 19 and 20. Thus, when exposing a large pattern in which many of the numerous micromirrors Ms of the DMD 10 are densely turned on, the chief ray of the imaging light beam (Sa') onto the substrate P will be inclined by 6° or more with respect to the optical axis AXa. This telecentricity error Δθt can also be a factor in degrading the imaging quality (contrast characteristics, distortion characteristics, symmetry, etc.) of the projected image.

[0069] Next, a case where the projected pattern is a line-and-space pattern having a constant pitch in the X' direction (X direction) will be described with reference to FIGS. 21 and 22. FIG. 21 is a diagram showing a portion of the mirror surface of the DMD 10 as viewed in the X'Y' plane, and FIG. 22 is a diagram showing the a-a' arrow portion of the mirror surface of the DMD 10 in FIG. 21 as viewed in the X'Z plane. FIG. 21 illustrates a case where, of the numerous micromirrors Ms shown in FIG. 13 above, odd-numbered micromirrors Ms aligned in the X' direction are micromirrors Msa in the on state, and even-numbered micromirrors Msb are micromirrors in the off state. It is assumed that all of the odd-numbered micromirrors Ms aligned in the Y' direction in one row in the X' direction are in the on state, and all of the even-numbered micromirrors Ms aligned in the Y' direction in one row are in the off state.

[0070] As shown in Figure 22, when the micromirrors Msa are arranged in the on state every other one in the X' direction, the angle of occurrence θj of diffracted light generated from DMD 10 is expressed by the following equation (3), which is similar to the previous equation (2), by considering the mirror surface of DMD 10 as a diffraction grating arranged at a pitch of 2·Pdx in the X' direction along the neutral plane Pcc.

[0071]

[0072] As in the case of Figure 19, Figure 23 is a graph showing the distribution of angles θj of diffracted light Idj calculated assuming that the angle of incidence θα of illumination light ILm (the inclination angle of the chief ray Lp of illumination light ILm relative to the optical axis AXa) is 35.0°, the inclination angle θd of the micromirror Msa in the on state is 17.5°, the pitch 2Pdx of the micromirror Msa is 10.8 μm, and the wavelength λ is 355.0 nm. As shown in Figure 23, since the angle of incidence θα of illumination light ILm is 35°, the zeroth-order diffracted light Id0 (j = 0) is inclined at +35° relative to the optical axis AXa, and the angle θj relative to the zeroth-order diffracted light Id0 increases as the diffraction order increases. The numerical values ​​shown in the lower part of Figure 23 represent the order j in parentheses and the inclination angle of the diffracted light Idj of each order from the optical axis AXa.

[0073] Under the numerical conditions of Figure 23, the tilt angle of the 17th-order diffracted light Id17 from the optical axis AXa is the smallest, at approximately 0.85°. Furthermore, an 18th-order diffracted light Id18 is also generated, with a tilt angle of -1.04° from the optical axis AXa. Therefore, when the micromirrors Ms of the DMD 10 are turned on in the finest line-and-space pattern, as shown in Figures 21 and 22, the center of the intensity distribution of the imaging light beam (Sa') within the pupil EP of the projection unit PLU is decentered to a position laterally shifted by an angle equivalent to 0.85° or -1.04° from the position of the optical axis AXa. The actual distribution of the imaging light beam (Sa') within the pupil Ep can be found by convolving the diffracted light distribution expressed by equation (3) with the sinc2 function expressed by equation (1).

[0074] 20, in the case of Fig. 23, the intensity distribution Hpa of the imaging light beam (regularly reflected light component) at the pupil Ep appears displaced in the X' direction from the original position of the light source image Ips (radius ri) in response to the inclination angle of 0.85° of the 17th-order diffracted light Id17 and the inclination angle of -1.04° of the 18th-order diffracted light Id18. In the case of the diffracted light distribution as shown in Fig. 23, the intensity of one of the intensity distribution Hpa formed in the direction of the 17th-order diffracted light Id17 and the intensity distribution Hpa formed in the direction of the 18th-order diffracted light Id18 is high and the intensity of the other is low, so the telecentric error Δθt on the image plane side caused by the shift of the intensity distribution Hpa is generally within the range of Δθt = 5.1° and Δθt = -6.22°.

[0075] This range is slightly different from the telecentricity error Δθt = -6.22°, which is the direction of generation of the ninth-order diffracted light Id9 (see FIG. 19 ) when multiple adjacent micromirrors Ms are in the ON state and become micromirrors Msa, as shown in FIGS. 17 and 18 . Furthermore, it is significantly different from the telecentricity error Δθt = 0°, which is the direction of generation of the ninth-order diffracted light Id9 (see FIG. 19 ) when multiple adjacent micromirrors Ms are in the ON state and become micromirrors Msa, as shown in FIGS. 13 and 14 . The actual pattern image projected onto the substrate P by the projection unit PLU is formed by the interference of reflected light Sa′, including diffracted light from the DMD 10, which is captured within the projection unit PLU. Equation (3) can be used to determine the state of generation of diffracted light in a line-and-space pattern whose array pitch and line width are n times Pdx (5.4 μm) using the following equation (4), where n is a real number:

[0076]

[0077] Thus, even when many of the numerous micromirrors Ms of the DMD 10 are in the on state in a line-and-space pattern, the chief ray of the imaging light beam on the substrate P may be significantly tilted with respect to the optical axis AXa, which may significantly degrade the imaging quality (contrast characteristics, distortion characteristics, etc.) of the projected image. An example of the change in imaging quality due to the occurrence of a telecentric error Δθt will now be described with reference to FIG. 24 . FIG. 24 is a graph showing the results of a simulation of an aerial image of a line-and-space pattern with a line width of 1 μm and a pitch of 2 μm in the X′ direction on the image plane. The horizontal axis of FIG. 24 represents the position (μm) in the X′ direction on the image plane, and the vertical axis represents the relative intensity value obtained by normalizing the intensity of the illumination light (incident light) to 1.

[0078] In the graph of Figure 24, the simulation was performed assuming that the image-side numerical aperture NAi of the projection unit PLU was 0.25, the σ value of the illumination light ILm was 0.6, the imaging light beam (Sa') at the pupil Ep of the projection unit PLU was decentered in the X' direction with respect to the optical axis AXa, and the image-side telecentric error Δθt was 50 mrad (≈2.865°). In the graph of Figure 24, the characteristic Q1 shown by the dashed line is the contrast characteristic at the best focus plane (best imaging plane) of the projection unit PLU, and the characteristic Q2 shown by the solid line is the contrast characteristic at a plane defocused by 3 μm from the best focus plane in the direction of the optical axis AXa. Note that in Figure 24, dark lines with a line width of 1 μm were formed at five locations: positions 0, ±2 μm, and ±4 μm.

[0079] While defocusing typically reduces the contrast (intensity amplitude) of characteristic Q2 compared to characteristic Q1, it can be seen that the symmetry between the characteristics near +5 μm and the characteristics near −5 μm deteriorates due to the influence of the telecentricity error Δθt. This indicates that, in the case of a pattern in which the image-plane telecentricity error Δθt exceeds the allowable range (e.g., ±2°), i.e., when the on-state micromirrors Msa among the numerous micromirrors Ms of the DMD 10 are densely packed over a wide area or arranged with periodicity, the accuracy of the edge position of the resist image corresponding to the edge portion of the exposed pattern is impaired, resulting in errors in the line width and dimensions of the pattern. In other words, as the intensity distribution (diffracted light distribution) formed on the pupil Ep of the projection unit PLU by the reflected light (imaging light beam) Sa′ from the DMD 10 deviates from an isotropic or symmetrical state about the optical axis AXa, the asymmetry of the projected pattern image increases.

[0080] [Wavelength Dependence of Telecentricity Error] As is clear from the above-described formula (2) or (3), the telecentricity error Δθt described above varies depending on the wavelength λ. For example, in the state shown in Figures 17 and 18 and represented by formula (2), in order to make the telecentricity error Δθt on the image plane side zero, it is sufficient to set the wavelength λ so that the tilt angle of -1.04° (-1.037° to be precise) of the ninth-order diffracted light Id9 from the optical axis AXa shown in Figures 19 and 20 becomes zero.

[0081] 25 is a graph showing the relationship between the center wavelength λ and the telecentricity error Δθt calculated based on the above equation (2), where the horizontal axis represents the center wavelength λ (nm) and the vertical axis represents the image-side telecentricity error Δθt (deg). If the pitch Pdx (Pdy) of the micromirrors Ms of the DMD 10 is 5.4 μm, the tilt angle θd of the micromirrors Ms is 17.5°, and the angle of incidence θα of the illumination light ILm is 35°, and the micromirrors Ms are in the densely on state as shown in FIGS. 17 and 18, the telecentricity error Δθt is theoretically zero when the center wavelength λ is approximately 344.146 nm. While it is desirable to minimize the image-side telecentricity error Δθt, a tolerance can be set depending on the minimum line width (or resolving power Rs) of the pattern to be projected, etc.

[0082] For example, when the allowable range of the image-side telecentricity error Δθt is set to within ±0.6° (approximately 10 mrad) as shown in Figure 25, the center wavelength λ may be in the range of 343.098 nm to 345.193 nm (2.095 nm in width). Also, when the allowable range of the image-side telecentricity error Δθt is set to within ±2.0°, the center wavelength λ may be in the range of 340.655 nm to 347.636 nm (6.98 nm in width).

[0083] Thus, the telecentric error Δθt, which occurs due to the arrangement (periodicity) and density of the micromirrors Msa that are turned on in the DMD 10, i.e., the magnitude of the distribution density, also has wavelength dependence. Generally, the pitch Pdx (Pdy) and tilt angle θd of the micromirrors Ms of the DMD 10 are uniquely set for a ready-made product (e.g., an ultraviolet-compatible DMD manufactured by Texas Instruments), and therefore the wavelength λ of the illumination light ILm is set to match those specifications. In the DMD 10 of this embodiment, the pitch Pdx (Pdy) of the micromirrors Ms is 5.4 μm and the tilt angle θd is 17.5°, so a fiber amplifier laser light source that generates high-intensity ultraviolet pulsed light can be used as the light source that supplies the illumination light ILm to each of the optical fiber bundles FBn (n = 1 to 27).

[0084] As disclosed in Japanese Patent No. 6428675, for example, a fiber amplifier laser light source includes a semiconductor laser element that generates seed light in the infrared wavelength region, a high-speed switching element (such as an electro-optic element) for the seed light, an optical fiber that amplifies the switched seed light with pump light, and a wavelength conversion element that converts the amplified light in the infrared wavelength region into pulsed light of a harmonic (ultraviolet wavelength region). In the case of such a fiber amplifier laser light source, the peak wavelength of ultraviolet light that can achieve high generation efficiency (conversion efficiency) with a combination of available semiconductor laser elements, optical fibers, and wavelength conversion elements is 343.333 nm. At this peak wavelength, the maximum image-side telecentricity error Δθt (the tilt angle on the image side of the ninth-order diffracted light Id9 in FIGS. 19 and 20 ) that can occur in the state shown in FIG. 17 is approximately 0.466° (approximately 8.13 mrad).

[0085] For the above reasons, when two light beams (wavelengths of 375 nm and 405 nm) with widely separated peak wavelengths are combined as illumination light ILm, as disclosed in the conventional Patent Document 1, the telecentricity error Δθt can vary significantly depending on the shape of the pattern to be projected (an isolated pattern, a line-and-space pattern, or a large land pattern). In this embodiment, illumination light ILm supplied to each module MUn (n = 1 to 27) is obtained by combining light beams from multiple fiber amplifier laser light sources whose peak wavelengths are slightly shifted within an allowable range for the wavelength-dependent telecentricity error Δθt. By using illumination light ILm thus combined from multiple light beams whose peak wavelengths are slightly shifted, the contrast of speckles (or interference fringes) generated on the micromirror Ms of the DMD 10 (and on the substrate P) due to the coherence of illumination light ILm can be suppressed. Details of this will be described later.

[0086] [Telecentricity Adjustment Mechanism] As explained above, when the micromirrors Msa, which are turned on in accordance with the pattern to be exposed on the substrate P, among the many micromirrors Ms of the DMD 10, are densely arranged in the X' and Y' directions, or when they are arranged with periodicity in the X' (or Y') direction, a telecentricity error (angle change) Δθt occurs, although to varying degrees, in the imaging light beam (Sa, Sa') projected from the projection unit PLU. Because each of the many micromirrors Ms of the DMD 10 is switched between the on and off states at a response speed of about 10 kHz, the pattern image generated by the DMD 10 also changes rapidly in accordance with the drawing data. Therefore, during scanning exposure of a pattern on a display panel or the like, the pattern image projected from each module MUn (n = 1 to 27) instantaneously changes shape to, for example, an isolated line or dot pattern, a line and space pattern, or a large land pattern.

[0087] A typical television display panel (liquid crystal type, organic EL type) consists of an image display area on a substrate P, where pixel units approximately 200 to 300 μm square are arranged in a matrix to achieve a predetermined aspect ratio, such as 2:1 or 16:9, and a peripheral circuit unit (e.g., lead wiring, connection pads) arranged around the image display area. Each pixel unit has a thin-film transistor (TFT) for switching or current driving, but the size (line width) of the TFT patterns (patterns for gate layer, drain / source layer, semiconductor layer, etc.) and the gate and drive wiring are sufficiently small compared to the pixel unit arrangement pitch (200 to 300 μm). Therefore, when exposing a pattern within the image display area, the pattern image projected from the DMD 10 is almost isolated, so no telecentric error Δθt occurs.

[0088] However, depending on the configuration of the lighting drive circuit (TFT circuit) for each pixel unit, line-and-space wiring may be formed in the X or Y direction at a pitch smaller than the pixel unit arrangement pitch. In such cases, when a pattern within the image display area is exposed, the pattern image projected from the DMD 10 exhibits periodicity. As a result, a telecentricity error Δθt may occur depending on the degree of periodicity. Furthermore, when exposing the image display area, a rectangular pattern approximately the same size as the pixel unit or at least half the area of ​​the pixel unit may be uniformly exposed. In such cases, more than half of the numerous micromirrors Ms of the DMD 10 are turned on in a densely packed state during exposure of the image display area. As a result, a relatively large telecentricity error Δθt may occur.

[0089] The occurrence state of the telecentricity error Δθt can be estimated before exposure based on drawing data of the pattern for the display panel to be exposed in each of the multiple modules MUn (n = 1 to 27). In this embodiment, the position and attitude of each of several optical members in the module MUn are configured to be finely adjustable, and from among those optical members, an adjustable optical member can be selected according to the magnitude of the estimated telecentricity error Δθt, and the telecentricity error Δθt can be corrected.

[0090] Fig. 26 shows a specific configuration of an optical path from the optical fiber bundle FBn in the illumination unit ILU of the module MUn shown in Fig. 4 or 6 to the MFE lens 108A, and Fig. 27 shows a specific configuration of an optical path from the MFE lens 108A in the illumination unit ILU to the DMD 10. In Figs. 26 and 27, the Cartesian coordinate system X'Y'Z is set to be the same as the coordinate system X'Y'Z in Fig. 4 (Fig. 6), and members having the same functions as the members shown in Fig. 4 are assigned the same reference numerals.

[0091] Although not shown in Fig. 4, in Fig. 26, a collector lens 101 is disposed immediately after the output end of the optical fiber bundle FBn, thereby suppressing the spread of the illumination light ILm from the output end. The optical axis of the collector lens 101 is set parallel to the Z axis, and the illumination light ILm traveling from the optical fiber bundle FBn at a predetermined numerical aperture is reflected by the mirror 100, travels parallel to the X' axis, and is reflected in the -Z direction by the mirror 102. A condenser lens system 104' is disposed in the optical path from the mirror 102 to the MFE lens 108A and is composed of three lens groups 104A, 104B, and 104C spaced apart from one another along the optical axis AXc.

[0092] The illuminance adjustment filter 106 is supported by a holding member 106A that is translated by a drive mechanism 106B, and is disposed between the lens group 104A and the lens group 104B. An example of the illuminance adjustment filter 106 is, as disclosed in Japanese Patent Application Laid-Open No. 11-195587, a transparent plate made of quartz or the like on which a fine light-blocking dot pattern is formed with gradually varying density, or a plurality of rows of elongated light-blocking wedge-shaped patterns, and by translating the quartz plate, the transmittance of the illumination light ILm can be continuously changed within a predetermined range.

[0093] The first telecentric adjustment mechanism is composed of a tilt mechanism 100A that finely adjusts the two-dimensional tilt (rotation angle around the X' axis and the Y' axis) of the mirror 100 that reflects the illumination light ILm from the optical fiber bundle FBn, a translation mechanism 100B that finely moves the mirror 100 two-dimensionally within the X'Y' plane perpendicular to the optical axis AXc, and a drive unit 100C that is a microhead or a piezoelectric actuator or the like that drives each of the tilt mechanism 100A and the translation mechanism 100B individually.

[0094] By adjusting the tilt of the mirror 100, the central ray (principal ray) of the illumination light ILm entering the condenser lens system 104' can be adjusted to be coaxial with the optical axis AXc. Furthermore, since the exit ends of the fiber bundles FBn are positioned at the front focal point of the condenser lens system 104', slight movement of the mirror 100 in the X' direction causes the central ray (principal ray) of the illumination light ILm entering the condenser lens system 104' to shift parallel to the X' direction with respect to the optical axis AXc. As a result, the central ray (principal ray) of the illumination light ILm emerging from the condenser lens system 104' travels at a slight tilt with respect to the optical axis AXc. Therefore, the illumination light ILm entering the MFE lens 108A is slightly tilted overall within the X'Z plane.

[0095] Figure 28 is an exaggerated diagram showing the state of point light sources SPF formed on the exit surface side of the MFE lens 108A when the illumination light ILm incident on the MFE lens 108A is tilted within the X'Z plane. When the central ray (principal ray) of the illumination light ILm is parallel to the optical axis AXc, the point light sources SPF focused on the exit surface side of each lens element EL of the MFE lens 108A are located at the center in the X' direction, as indicated by the white circles in Figure 28. When the illumination light ILm is tilted with respect to the optical axis AXc within the X'Z plane, the point light sources SPF focused on the exit surface side of each lens element EL are decentered by Δxs in the X' direction from the central position, as indicated by the black circles in Figure 28. In this case, as described above with reference to Figures 7 to 9, the surface light source formed by the collection of multiple point light sources SPF formed on the exit surface side of the MFE lens 108A is shifted laterally by Δxs in the X' direction as a whole. Since the cross-sectional dimensions of each lens element EL of the MFE lens 108A in the X'Y' plane are small, the amount of decentering Δxs in the X' direction as a surface light source is also small.

[0096] 26, a variable aperture diaphragm (a sigma-value adjustable diaphragm) 108B is provided on the exit surface side of the MFE lens 108A, and the MFE lens 108A and variable aperture diaphragm 108B are integrally attached to a holder 108C. The holder 108C (MFE 108A) is provided so that its position in the X'Y' plane can be finely adjusted by a fine movement mechanism 108D such as a microhead or a piezoelectric motor. In this embodiment, the fine movement mechanism 108D, which finely moves the MFE lens 108A two-dimensionally in the X'Y' plane, functions as a second telecentricity adjustment mechanism.

[0097] A plate-type beam splitter 109A inclined at approximately 45° with respect to the optical axis AXc is provided immediately after the MFE lens 108A. The beam splitter 109A transmits most of the amount of illumination light ILm from the MFE lens 108A and reflects the remaining amount of light (for example, approximately a few percent) toward the condenser lens 109B. A portion of the illumination light ILm condensed by the condenser lens 109B is guided to a photoelectric element 109D by an optical fiber bundle 109C. The photoelectric element 109D is used as an integration sensor (integration monitor) that monitors the intensity of the illumination light ILm and measures the exposure amount of the imaging light beam projected onto the substrate P.

[0098] As shown in FIG. 27 , illumination light ILm from a surface light source (a collection of point light sources SPF) on the exit surface side of the MFE lens 108A passes through a beam splitter 109A and enters a condenser lens system 110. The condenser lens system 110 is composed of a front lens group 110A and a rear lens group 110B arranged at a distance from each other, and its two-dimensional position in the X'Y' plane can be finely adjusted by a fine movement mechanism 110C such as a microhead or a piezoelectric motor. In other words, the fine movement mechanism 110C enables decentering adjustment of the condenser lens system 110. In this embodiment, the fine movement mechanism 110C, which finely moves the condenser lens system 110 two-dimensionally in the X'Y' plane, functions as a third telecentricity adjustment mechanism. The first telecentric adjustment mechanism, the second telecentric adjustment mechanism, and the third telecentric adjustment mechanism all adjust the relative positional relationship in the decentering direction between the surface light source generated on the exit surface side of the MFE lens 108A (or the surface light source limited within the circular aperture of the variable aperture stop 108B) and the condenser lens system 110.

[0099] The front focus of the condenser lens system 110 is set at the position of the surface light source (a collection of point light sources SPF) on the exit surface side of the MFE lens 108A, and the illumination light ILm that travels in a telecentric state from the condenser lens system 110 via the tilted mirror 112 provides Koehler illumination to the DMD 10. As previously described with reference to FIG. 28 , when the surface light source, which is a collection of multiple point light sources SPF formed on the exit surface side of the MFE lens 108A, is shifted laterally in the X' direction by an amount Δxs, the chief ray (central ray) of the illumination light ILm irradiating the DMD 10 becomes slightly tilted with respect to the optical axis AXb in FIG. 27 . In other words, by intentionally imparting a telecentric error to the illumination light ILm using the first telecentricity adjustment mechanism, the incident angle θα of the illumination light ILm described previously with reference to FIGS. 6 , 14 , 18 , and 22 can be slightly changed from the initial setting angle (35.0°) in the X'Z plane.

[0100] Furthermore, when the MFE lens 108A and the variable aperture stop 108B are displaced together in the X' direction within the X'Y' plane by the fine adjustment mechanism 108D, which serves as the second telecentricity adjustment mechanism shown in FIG. 26, the circular aperture of the variable aperture stop 108B (circular region APh in FIG. 7) becomes decentered with respect to the optical axis AXc. This causes the surface light source formed within the circular aperture (circular region APh) to shift overall in the X' direction. In this case, too, the chief ray (central ray) of the illumination light ILm irradiating the DMD 10 can be tilted within the X'Z plane with respect to the optical axis AXb in FIG. 27, i.e., the angle of incidence θα of the illumination light ILm onto the DMD 10 can be changed from the initial setting angle (35.0°) within the X'Z plane. Note that the angle of incidence θα can also be changed in a similar manner even if the fine adjustment mechanism 108D is configured to finely move only the variable aperture stop 108B independently within the X'Y' plane.

[0101] In order to displace the MFE lens 108A and the variable aperture stop 108B together by a relatively large amount, it is necessary to widen the beam width (diameter of the illumination range) of the illumination light ILm irradiated onto the MFE lens 108A from the condenser lens system 104'. Furthermore, it is also effective to provide a shift mechanism that shifts the illumination light ILm irradiated onto the MFE lens 108A laterally within the X'Y' plane in conjunction with the amount of displacement. The shift mechanism can be configured with a mechanism that tilts the direction of the exit end of the optical fiber bundle FBn, or a mechanism that tilts a plane-parallel plate (quartz plate) placed in front of the MFE lens 108A.

[0102] Both the first telecentricity adjustment mechanism (drive unit 100C, etc.) and the second telecentricity adjustment mechanism (fine movement mechanism 108D, etc.) can adjust the angle of incidence θα of the illumination light ILm onto the DMD 10, but with regard to the amount of adjustment, the first telecentricity adjustment mechanism can be used for fine adjustment, and the second telecentricity adjustment mechanism can be used for coarse adjustment. During actual adjustment, it is possible to select appropriately whether to use both the first telecentricity adjustment mechanism and the second telecentricity adjustment mechanism, or to use only one of them, depending on the form of the pattern to be projected and exposed (the amount of telecentricity error Δθt and the amount of correction).

[0103] Furthermore, the fine movement mechanism 110C, which serves as a third telecentricity adjustment mechanism for decentering the condenser lens system 110 in the X'Y' plane, has the same effect as when the second telecentricity adjustment mechanism relatively decenters the position of the surface light source defined by the MFE lens 108A and the variable aperture stop 108B. However, decentering the condenser lens system 110 in the X' direction (or Y' direction) also causes a lateral shift in the illumination area of ​​the illumination light ILm projected onto the DMD 10, so the illumination area is set to be larger than the entire mirror surface of the DMD 10 to account for this lateral shift. The third telecentricity adjustment mechanism using the fine movement mechanism 110C can also be used for coarse adjustment, just like the second telecentricity adjustment mechanism.

[0104] [Other Telecentricity Adjustment Mechanisms] The telecentricity error can also be adjusted (corrected) by laterally shifting the position in the X'Y' plane of each of the output ends of the optical fiber bundles FBn (n = 1 to 27) shown in Figures 4 and 26 using a fine movement mechanism. In this case, similar to the first telecentricity adjustment mechanism (drive mechanism 100C, etc.), it is possible to finely adjust the position of the surface light source (a collection of many point light sources SPF) formed on the output surface side of the MFE lens 108A.

[0105] Telecentricity error can also be corrected by adjusting the original angle of the tilted mirror 112 shown in Figures 4, 6, and 27 using a fine-adjustment mechanism such as a microhead or piezoelectric actuator to finely adjust the angle of incidence θα (e.g., 35.0° in design) of the illumination light ILm onto the DMD 10. Alternatively, telecentricity error can be corrected by finely adjusting the tilt of the mirror surface (neutral plane Pcc) of the DMD 10 using a fine-adjustment stage that combines the parallel link mechanism and piezoelectric element of the mount unit 10M shown in Figures 4 and 27. However, adjustment of the angle of the tilted mirror 112 or DMD 10 is used for coarse adjustment because the reflected light tilts at an angle double the adjustment angle. Furthermore, adjusting the angle of the DMD 10 causes an image plane tilt in the direction of scanning exposure (X' direction or X direction) relative to a plane perpendicular to the optical axis AXa.

[0106] When the image plane tilt direction is the scanning exposure direction, the scanning exposure is performed at the average image plane position of the tilted image plane, so the reduction in contrast of the exposed pattern image is minor. Therefore, the function of correcting the telecentricity error Δθt by tilting the DMD 10 in the scanning exposure direction (X' direction or X direction) can also be utilized to the extent that the reduction in contrast of the exposed pattern image is negligible. If the DMD 10 is tilted to an extent that the reduction in contrast cannot be ignored, some kind of image plane tilt correction system (e.g., two wedge-shaped deflection prisms) will be provided within the projection unit PLU. Alternatively, a mechanism for decentering a specific lens group or lens within the projection unit PLU with respect to the optical axis AXa may be provided to correct the telecentricity error Δθt. The tilt correction system (e.g., two wedge-shaped deflection prisms) may also be provided in the illumination unit ILU.

[0107] [Beam Supply Unit] Next, an example of a beam supply unit that is attached to the exposure apparatus EX shown in FIG. 1 and supplies illumination light ILm to each module MUn (n = 1 to 27) will be described with reference to FIG. 29. For convenience, the Cartesian coordinate system XYZ in FIG. 29 is set to be the same as the coordinate system XYZ in FIG. 1. In the beam supply unit of FIG. 29, beams LB1 to LB4 (beam diameters of 1 mm or less) from four laser light sources (fiber amplifier laser light sources) FL1 to FL4 are combined into a single beam LBa by a beam combining unit 200. Each of the laser light sources FL1 to FL4 emits pulsed light with a fundamental peak wavelength of 343.333 nm and a peak wavelength (spectral width of about 0.05 nm) that differs by a predetermined wavelength, with an emission duration on the order of several tens of picoseconds.

[0108] Each of the four laser light sources FL1 to FL4 synchronously emits pulsed light at a predetermined timing in response to clock pulses of a common clock signal (e.g., a frequency of 200 kHz). The timing of the pulse oscillation of each of the four laser light sources FL1 to FL4 may be completely identical in synchronization with the clock signal, or they may be emitted sequentially with a time difference (delay) of approximately the light emission duration. In this way, by providing a time difference (delay) in the light emission timing, it is also possible to reduce the coherence of the illumination light ILm irradiated onto the DMD 10.

[0109] The beam LBa combined by the beam combining unit 200 is split into multiple optical path paths with different beam path lengths, circulates, and then combines the split beams into a retarder unit 202. The retarder unit 202 generates multiple beams with temporally delayed wavefronts to reduce speckle caused by the high coherency (temporal and spatial coherence) of the original beams LB1 to LB4, and then emits a combined beam LBb. For this purpose, the retarder unit 202 includes multiple delay optical path units 202A with different optical path lengths, and a splitting / combining unit 202B that splits the incident beam LBa into each delay optical path unit 202A and combines the return beams from each delay optical path unit 202A. The basic configuration of such a retarder unit 202 is disclosed, for example, in Japanese Patent Publication No. 2007-227973.

[0110] Beam LBb, whose temporal coherence has been reduced by retarder unit 202, enters beam switching unit 204. Beam switching unit 204 is provided with a rotating polygon mirror PM that rotates at high speed, and beam LBb is deflected into a fan shape by each reflecting surface of the rotating polygon mirror PM. At positions approximately equidistant from the incident position of beam LBb on the reflecting surface of the rotating polygon mirror PM, incident ends FB1a to FB9a of nine optical fiber bundles FB1 to FB9 are arranged in an arc shape at a constant angle in the direction in which beam LBb is incident.

[0111] As described above with reference to FIG. 8 , each of the optical fiber bundles FB1-FB9 is a single optical fiber line or a bundle of multiple optical fiber lines. Although not shown in FIG. 29 , an f-θ lens (non-telecentric) that covers the fan-shaped deflection range of the beam LBb is provided immediately after the rotating polygon mirror PM, and a small lens that focuses the beam LBb from the rotating polygon mirror PM into a small spot is provided in front of each of the entrance ends FB1a-FB9a of the optical fiber bundles FB1-FB9. The beam LBb pulses in response to a clock signal common to each of the laser light sources FL1-FL4, and the period of the clock signal and the rotational speed (angular phase) of the rotating polygon mirror PM are synchronized so that the beam LBb is incident on the entrance ends FB1a-FB9a of the optical fiber bundles FB1-FB9 in sequence for each pulse of light.

[0112] In this embodiment, two other beam supply units having the same configuration as that of Fig. 29 are provided, one of which switches and supplies beam LBb to optical fiber bundles FB10 to FB18 of modules MU10 to MU18, and the other switches and supplies beam LBb to optical fiber bundles FB19 to FB27 of modules MU19 to MU27. Furthermore, although the beam supply unit of Fig. 29 uses four laser light sources FL1 to FL4, three or fewer laser light sources may be used, or even more laser light sources may be provided and five or more beams may be combined in beam combining section 200.

[0113] As explained above, the peak wavelengths of the beams LBn (n = 1, 2, 3, ...) emitted from the multiple laser light sources FLn (n = 1, 2, 3, ...) may be made to differ from one another by a fixed wavelength in order to reduce speckle. As an example, FIG. 30 is a diagram schematically illustrating the wavelength distribution of the beam LBb obtained after the beams LB1 to LB7 emitted from the seven laser light sources FL1 to FL7 are combined by the beam combining unit 200. In FIG. 30, the horizontal axis represents wavelength (nm), and the vertical axis represents values ​​obtained by normalizing the peak intensities of the beams LB1 to LB7 to 1. The seven laser light sources FL1 to FL7 have substantially the same configuration, but the wavelengths of the seed beams are made to differ by a fixed value so that the peak wavelengths (center wavelengths) of the beams LB1 to LB7 finally output are shifted by approximately 30 pm (0.03 nm).

[0114] Because this type of ultraviolet wavelength fiber amplifier laser light source uses a wavelength conversion element, the spectral width of the oscillation wavelength is narrow, for example, approximately 50 pm (0.05 nm) at 1 / e2 of the peak intensity, as shown in Figure 30. In the case of Figure 30, the center wavelength of beam LB4 from laser light source FL4 is set to 343.333 nm, the center wavelength of beam LB3 from laser light source FL3 is set to 343.303 nm, the center wavelength of beam LB2 from laser light source FL2 is set to 343.273 nm, and the center wavelength of beam LB1 from laser light source FL1 is set to 343.243 nm. Furthermore, the center wavelength of beam LB5 from laser light source FL5 is set to 343.363 nm, the center wavelength of beam LB6 from laser light source FL6 is set to 343.393 nm, and the center wavelength of beam LB7 from laser light source FL7 is set to 343.423 nm.

[0115] Therefore, the wavelength spectral width of beam LBb, which is a combination of beams LB1 to LB7, is approximately 180 pm (0.18 nm) when viewed in terms of the interval between peak wavelengths, and approximately 230 pm (0.23 nm) when viewed in terms of the interval at 1 / e2 intensity (343.218 nm to 343.448 nm). Thus, when the spectral width of beam LBb, i.e., illumination light ILm from DMD 10, is broadened to reduce speckle, a corresponding telecentricity error Δθt also occurs, but the spectral width is set so that the effect is within an acceptable range. In the above example of the spectral width, assuming the cases shown in Figures 17 and 18 where peak wavelengths of 343.243 nm and 343.423 nm are included in illumination light ILm and a large telecentricity error Δθt can occur, a trial calculation is performed using equation (2) described in Figure 19.

[0116] In this calculation, assuming that the incident angle θα of the illumination light ILm is 35.0°, the tilt angle θd of the micromirror Msa in the on state is 17.5°, and the projection magnification Mp is 1 / 6, the telecentricity error on the object plane side (DMD 10 side) of the ninth-order diffracted light Id9 generated when the peak wavelength of the illumination light ILm is 343.243 nm is approximately 0.086° (image-side telecentricity error Δθt ≈ 0.517°). Similarly, the telecentricity error on the object plane side (DMD 10 side) of the ninth-order diffracted light Id9 generated when the peak wavelength of the illumination light ILm is 343.423 nm is approximately 0.069° (image-side telecentricity error Δθt ≈ 0.414°). Therefore, if the spectral width of the illumination light ILm is between peak wavelengths of 343.243 nm and 343.423 nm, the telecentricity error Δθt on the image plane side that may occur due to the broadening of the wavelength spectral width can be kept, for example, within the tolerance range of ±2° (more preferably within the tolerance range of ±1°) described in Figure 25.

[0117] When the illumination light ILm is given a spectral width (broadbanded) to reduce speckle, the limits of the short wavelength value and the long wavelength value can be set taking into consideration the allowable range (for example, within ±2°) of the telecentric error Δθt on the image plane side that occurs due to differences in wavelength. Therefore, the number of laser light sources FLn is not limited to seven, and the degree of shift in the center wavelength of the beam LBn from each laser light source is not limited to 30 pm.

[0118] Figure 31 shows the state of a portion of the mirror surface of the DMD 10 during exposure of a line-and-space pattern tilted at a 45° angle on the substrate P. In Figure 31, as in Figures 13, 17, and 21, reflected light Sa from each micromirror Msa in the ON state is reflected in the -Z direction, while reflected light Sg from each micromirror Msb in the OFF state is reflected in an oblique direction in the X'Y' plane. The ON-state micromirrors Msa are arranged in a row, with adjacent ones arranged at a 45° angle, and this row is arranged to form a diffraction grating. Therefore, a telecentric error Δθt occurs in the reflected light (imaging light beam) Sa' generated from all the ON-state micromirrors Msa due to the effects of diffraction.

[0119] In the case of a line and space pattern such as that shown in Fig. 21, the telecentricity error Δθt occurs only in the X' direction, but in the case of a line and space pattern such as that shown in Fig. 31, the telecentricity error Δθt occurs in both the X' and Y' directions. Therefore, even in the case of a line and space pattern tilted at an angle of 45° or 30 to 60° as shown in Fig. 31, if the telecentricity error Δθt that can occur exceeds the allowable range in either the X' or Y' direction, it can be corrected by using some of the telecentricity error adjustment mechanisms described above in Figs. 26 and 27.

[0120] [Control System for Telecentricity Error Correction] Figure 32 is a block diagram showing a schematic example of a portion of an exposure control device attached to the exposure apparatus EX of the present embodiment, particularly related to adjustment control of telecentricity error. The telecentricity error adjustment control system TEC shown in Figure 32 is applied when all or at least one of the first telecentricity adjustment mechanism (drive unit 100C, etc.), second telecentricity adjustment mechanism (fine movement mechanism 108D, etc.), and third telecentricity adjustment mechanism (fine movement mechanism 110C, etc.) explained in Figures 26 and 27 can be electrically driven by an actuator such as a motor.

[0121] 32, a drawing data storage unit (hereinafter also referred to simply as a storage unit) 300 that sends drawing data MD1 to MD27 for pattern exposure is provided in each DMD 10 of the 27 modules MU1 to MU27 shown in FIG. 2. Each of the drawing data MD1 to MD27 is sent to an angle change specification unit (hereinafter also referred to as a telecentric error specification unit) 302 before the exposure operation. The telecentric error specification unit 302 has a data analysis unit 302A that analyzes the form (e.g., isolated, line and space, pad) of the pattern exposed in each of the projection areas IA1 to IA27 on the substrate P (see FIGS. 2 and 3) and its position on the substrate P based on each of the drawing data MD1 to MD27, and a telecentric error calculation unit 302B that calculates information SDT related to the telecentric error Δθt corresponding to the analyzed pattern form.

[0122] An example of the main functions of the angle change specifying unit (telecentric error specifying unit) 302 will now be described with reference to FIGS. 33 and 34. FIG. 33 shows an example of the arrangement of the display area DPA and peripheral areas PPAx and PPAy for the display panel exposed on the substrate P by the exposure apparatus EX shown in FIGS. 1 and 2, with the maximum exposure area EXA on the outer edge representing the range that can be exposed by the modules MU1 to MU27 in a single scanning exposure by the exposure apparatus EX. The display area DPA is made up of a large number of pixels arranged at a constant pitch in the X and Y directions, and has an overall aspect ratio of 16:9, 2:1, etc. Note that here, the longitudinal direction of the display area DPA is defined as the X direction.

[0123] As an example, we will explain the areas DA7 and DA10 that are scanned and exposed by the projection areas IA7 and IA10 of the modules MU7 and MU10, respectively, shown in Figure 2. As shown in Figure 3, the actual projection areas IA7 and IA10 are tilted by an angle θk with respect to the XY coordinate system. While the area DA7 includes a peripheral area PPAx with a narrow X-direction width at the edge in the -X direction (or +X direction), it is mostly occupied by the display area DPA extending in the X direction (scanning exposure direction). Within the display area DPA, for example, pixels approximately 200 μm to 300 μm square are arranged in the XY direction. The pattern exposed within the pixels can be an isolated pattern, a line-and-space pattern, or a large land pattern, depending on the manufacturing process step.

[0124] FIG. 33 shows an example of the arrangement of pixels PIX in a display area DPA that appear within one projection area IAn (n = 1 to 27). As previously mentioned as an example, the array pitch Pd of the micromirrors Ms of the DMD 10 is 5.4 μm, and 2,160 micromirrors Ms are arranged in the X' direction and 3,840 in the Y' direction. In this case, the aspect ratio is 16:9 (= 3,840:2,160), and the actual dimensions of the mirror surface of the DMD 10 in the X' direction are 11.664 mm and the actual dimensions in the Y' direction are 20.736 mm. When the projection magnification Mp of the projection unit PLU is 1 / 6, the dimension of the projection area IAn on the substrate P is 1,944 μm in the X' direction and 3,456 μm in the Y' direction. Furthermore, the projected image of a single micromirror Msa in the ON state is approximately 0.9 μm square on the substrate P.

[0125] If the pitch of the pixels PIX on the substrate P in the X' and Y' directions is 300 μm, then approximately six pixels PIX will appear in the X' direction and approximately 11 pixels PIX in the Y' direction within the projection area IAn. The patterns exposed within the pixels PIX for each layer may be an isolated pattern PA1, a line-and-space pattern PA2, or a land-like pattern PA3. For the sake of explanation, three types of patterns PA1, PA2, and PA3 are shown together in Figure 34, but when pattern PA1 is exposed, pattern PA1 will appear within all pixels PIX included within the projection area IAn, when pattern PA2 is exposed, pattern PA2 will appear within all pixels PIX included within the projection area IAn, and when pattern PA3 is exposed, pattern PA3 will appear within all pixels PIX included within the projection area IAn.

[0126] In Figure 34, for the sake of simplicity, the vertical and horizontal arrangement of pixels PIX within the projection area IAn is made to match the X'Y' coordinates, but in reality, as explained in Figures 3 and 5, the vertical and horizontal arrangement of pixels PIX is tilted by an angle θk with respect to the X'Y' coordinates, and is set so that it appears to match the XY coordinate system, which is the movement coordinate of the substrate P.

[0127] As shown in FIG. 34 , the exposure of the isolated pattern PA1 to all pixels PIX within the display area DPA is performed, for example, during the process of forming the semiconductor layer or electrode layer of a TFT, or via holes. In such a case, as previously described with reference to FIGS. 13 to 16 , a telecentricity error Δθt exceeding the allowable range does not occur. That is, if the illumination unit ILU and projection unit PLU are telecentrically adjusted with respect to the projected image of the isolated pattern projected by a single on-state micromirror Msa, a telecentricity error Δθt exceeding the allowable range does not occur. However, even with an isolated pattern, when an isolated pattern with a pixel size of approximately tens of micrometers is exposed on the substrate P, such as a display panel for a smartphone, approximately tens of on-state micromirrors Msa are densely arranged in the X' and Y' directions on the DMD 10. Therefore, even with an isolated pattern, a telecentricity error Δθt may occur depending on its size (pattern dimensions).

[0128] 33, wirings extending mainly in the X direction (X' direction) are formed in a grid pattern arranged at regular intervals in the Y direction (Y' direction). Therefore, the influence of diffraction in the X' direction is small, and even if a telecentric error Δθt occurs, it is within an allowable range.

[0129] Furthermore, as shown in Figure 34, the exposure of the line-and-space pattern PA2 to all pixels PIX within the display area DPA is performed during the process of forming, for example, wiring connecting electrode layers of TFTs, power lines, earth lines, signal lines, selection lines, etc. In such cases, as described above with reference to Figures 21 to 23, a telecentricity error Δθt exceeding the allowable range may occur depending on the pitch and width of the lines and spaces. Furthermore, as shown in Figure 34, the exposure of the land-like pattern PA3 to all pixels PIX within the display area DPA is performed during the process of forming, for example, banks and electrode layers of the light-emitting portions of the pixels PIX. The land-like pattern PA3 often occupies more than half (in some cases, nearly 90%) of the area of ​​the pixel PIX (approximately 300 μm square). In such cases, as described above with reference to Figures 18 to 20, a telecentricity error Δθt exceeding the allowable range is likely to occur.

[0130] Furthermore, in the peripheral region PPAx within the region DA7 shown in Figure 33, wiring lines extending mainly in the X direction (X' direction) are formed in a grid pattern arranged at regular intervals in the Y direction (Y' direction). Therefore, the effect of diffraction in the X' direction is small, and even if a telecentricity error Δθt occurs, it is within an acceptable range. However, if line-and-space wiring lines tilted with respect to both the X' direction and the Y' direction as described above in Figure 31 are formed within the peripheral region PPAx, a telecentricity error Δθt may occur.

[0131] From the above, the data analysis unit 302A of the angle change specifying unit (telecentric error specifying unit) 302 in Fig. 32 analyzes the drawing data MD7 for the entire area DA7 sent to the module MU7, and generates position information for each partial area obtained by dividing the area DA7 in the X direction into a plurality of partial areas, and form information indicating whether the form of the pattern appearing in the partial area is an isolated pattern PA1, a line-and-space pattern PA2, or a land pattern PA3 as shown in Fig. 34. The telecentric error calculation unit 302B of the angle change specifying unit (telecentric error specifying unit) 302 in Fig. 32 calculates a telecentric error Δθt occurring in accordance with the line width, pitch, etc. of the pattern appearing in the partial area when the form information of the pattern appearing in the partial area is the line-and-space pattern PA2, and calculates a telecentric error Δθt occurring in accordance with the size, etc. of the pattern appearing in the partial area when the form information of the pattern appearing in the partial area is the land pattern PA3.

[0132] Note that the telecentricity error calculation unit 302B may calculate the telecentricity error Δθt as a simple calculation by dividing the area DA7 in the X direction into a plurality of partial areas, calculating the ratio of the area of ​​the partial area onto which the exposure light is irradiated onto the substrate P to the area of ​​the entire partial area, and estimating the telecentricity error Δθt according to that ratio. This ratio can be taken as the average density of micromirrors Msa that are turned on while the partial area is being exposed, out of all the micromirrors Ms on the DMD 10. Therefore, if that density is a specified value, for example, 50%, or more, the telecentricity error Δθt can be estimated according to that density.

[0133] The above-described operation is similarly performed for the region DA10 shown in Fig. 33, and the angle change specifying unit (telecentricity error specifying unit) 302 in Fig. 32 calculates the telecentricity error Δθt that may occur for each partial region during pattern exposure using the projection region IA10 of the module MU10, based on the drawing data MD10 from the storage unit 300. The region DA10 shown in Fig. 33 includes many patterns of the peripheral region PPAy. The peripheral region PPAy includes line-and-space patterns in which wirings extending mainly in the Y direction (Y' direction) are arranged at a constant pitch in the X direction (X' direction), and therefore there is a possibility that a telecentricity error Δθt exceeding the allowable range may occur.

[0134] 32 generates information SDT (including position information in the scanning exposure direction) on the telecentricity error Δθt calculated (estimated) as described above for each of the modules MU1 to MU27, and sends it to the telecentricity error correction unit 304. Based on the information SDT on the telecentricity error Δθt for each of the modules MU1 to MU27, the telecentricity error correction unit 304 selects at least one of the first telecentricity adjustment mechanisms (drive unit 100C, etc.), second telecentricity adjustment mechanisms (fine movement mechanism 108D, etc.), and third telecentricity adjustment mechanisms (fine movement mechanism 110C, etc.) described in FIGS. 26 and 27 that matches the adjustment amount and adjustment accuracy, and outputs adjustment command information AS1 to AS27 for each of the modules MU1 to MU27.

[0135] The adjustment command information AS1 to AS27 from the telecentricity error correction unit 304 is sent to the corresponding telecentricity adjustment mechanism when each of the modules MU1 to MU27 is actually performing an exposure operation, and the telecentricity error Δθt is corrected in real time. The exposure control unit (sequencer) 306 controls the sending of the drawing data MD1 to MD27 from the storage unit 300 to the modules MU1 to MU27 and the sending of the adjustment command information AS1 to AS27 from the telecentricity error correction unit 304, in synchronization with the scanning exposure (movement position) of the substrate P.

[0136] According to the present embodiment as described above, in a pattern exposure apparatus which includes a DMD 10 as a spatial light modulation element having a large number of micromirrors Ms that are selectively driven based on drawing data MDn (n=1 to 27), an illumination unit ILU which irradiates illumination light ILm onto the DMD 10 at a predetermined incident angle θα, and a projection unit PLU which receives reflected light Sa (imaging light beam) from selected micromirrors Msa of the DMD 10 that are in an on-state and projects it onto the substrate P, and which projects a pattern corresponding to the drawing data MDn onto the substrate P by exposure, a telecentric error Δθt occurring in the reflected light Sa projected from the projection unit PLU onto the substrate P during projection exposure of the pattern is By providing an angle change specifying unit (telecentricity error specifying unit) 302 that specifies (estimates) in advance the telecentricity error Δθt in accordance with the distribution state (density and periodicity) of the micromirrors Msa that are turned on in the DMD 10, and an adjustment mechanism (drive unit 100C, fine movement mechanism 108D, fine movement mechanism 110C, etc.) that adjusts the positions of some of the optical components (mirror 100, aperture stop 108B, condenser lens system 110, etc.) within the illumination unit ILU or projection unit PLU in accordance with the pre-specified telecentricity error Δθt, it is possible to always keep the telecentricity error Δθt of the reflected light (imaging light beam) Sa' that occurs due to diffraction when a large number of micromirrors Ms of the DMD 10 are turned on within an acceptable range.

[0137] [Variation 1] As explained above, depending on the distribution of micromirrors Msa in the on state of DMD 10, a telecentric error occurs in the reflected light (imaging light beam) Sa' reflected by DMD 10, and because projection unit PLU is a reduced projection system, the telecentric error Δθt on the image plane side is magnified by the reciprocal of the projection magnification Mp. The magnitude of the telecentric error Δθt that actually occurs varies depending on the shape of the pattern generated by DMD 10, so it is a good idea to measure in advance the extent of the telecentric error Δθt that will occur for each of several pattern shapes.

[0138] Figure 35 is a diagram showing a schematic configuration of an optical measurement unit provided in the calibration reference unit CU attached to the end of the substrate holder 4B of the exposure apparatus EX shown in Figure 1. In Figure 35, it is assumed that reflected light (imaging light beam) Sa from the DMD 10 passes through lens groups G4 and G5 on the image plane side of the projection unit PLU and is imaged on the best focus plane (best imaging plane) IPo, with the chief ray La of the reflected light Sa being parallel to the optical axis AXa. The first optical measurement unit is composed of a quartz plate 320 attached to the top surface of the calibration reference unit CU, an imaging system 322 (objective lens 322a and lens group 322b) that enlarges and forms an image of the pattern image formed by the DMD 10 projected from the projection unit PLU through the quartz plate 320, a reflecting mirror 324, and a CCD or CMOS image sensor 326 that captures the enlarged pattern image. The surface of the quartz plate 320 and the imaging surface of the imaging element 326 are in a conjugate relationship.

[0139] The second optical measurement unit is composed of a pinhole plate 340 attached to the top surface of the calibration reference unit CU, an objective lens 342 that forms an image of the pupil Ep of the projection unit PLU (the intensity distribution of the imaging light beam and light source image within the pupil Ep) by receiving reflected light (imaging light beam) Sa from the DMD 10 projected from the projection unit PLU via the pinhole plate 340, and a CCD or CMOS image sensor 344 that captures the image of the pupil Ep. In other words, the imaging surface of the image sensor 344 of the second optical measurement unit is conjugate with the position of the pupil Ep of the projection unit PLU.

[0140] Because the substrate holder 4B (calibration reference unit CU) can be moved two-dimensionally in the XY plane by the XY stage 4A, the quartz plate 320 of the first optical measurement unit or the pinhole plate 340 of the second optical measurement unit is placed directly below the projection unit PLU of any of the modules MU1 to MU27 to be measured, and reflected light Sa corresponding to various test patterns for measurement is generated by the DMD 10. When measuring the telecentric error by the first optical measurement unit, the substrate holder 4B (calibration reference unit CU), or the entire projection unit PLU, or the lens groups G4 and G5, is moved up and down so that the surface of the quartz plate 320 is defocused by a certain amount in each of the +Z and −Z directions with respect to the best focus plane IPo.

[0141] The telecentricity error Δθt can then be measured based on the lateral shift of the image of the test pattern captured by the image sensor 326 when defocused in the +Z direction and the -Z direction, and the defocus amount (±Z fine movement range). Because the image sensor 326 of the first optical measurement unit captures an image of the mirror surface of the DMD 10 via the projection unit PLU, it can also be used to identify malfunctioning micromirrors Ms among the many micromirrors Ms of the DMD 10. Furthermore, several typical test patterns (isolated, line-and-space, or land patterns) that may cause a telecentricity error Δθt can be generated on the DMD 10, and the asymmetry of the intensity distribution of the projected image of the test pattern (such as the distribution shown in FIG. 24 ) can be measured by the image sensor 326 of the first optical measurement unit.

[0142] [Variation 2] Furthermore, in measuring the telecentricity error by the second optical measurement unit, the image sensor 344 measures the eccentricity of the intensity distribution within the pupil Ep of the imaging light beam (Sa, Sa') formed on the pupil Ep of the projection unit PLU when the test pattern is projected. In this case, the telecentricity error Δθt can be measured based on the amount of eccentricity of the intensity distribution within the pupil Ep and the focal length of the projection unit PLU on the image plane side. Furthermore, as previously described with reference to FIGS. 13 to 15 , only a specific micromirror Ms among the many micromirrors Ms of the DMD 10 is turned on, and the image sensor 344 of the second optical measurement unit measures the positional relationship between the center of gravity of the intensity distribution formed on the pupil Ep and the optical axis AXa. If there is a deviation in this positional relationship, it is found that the tilt angle θd of the specific micromirror Msa in the on-state has an error from the standard value (e.g., 17.5°).

[0143] Although it takes time to measure, it is also possible to determine the error in the tilt angle θd (drive error) of each micromirror Ms by turning on all of the micromirrors Ms of the DMD 10 one by one and measuring them with the image sensor 344. The error in the tilt angle θd of each micromirror Ms cannot be adjusted or corrected because it is a characteristic unique to the DMD 10, but if micromirrors Ms with large errors in the tilt angle θd are distributed evenly, a telecentric error due to the error in the tilt angle θd may also occur.

[0144] For example, if the nominal value (standard value) of the tilt angle θd of the micromirror Ms of the DMD 10 is 17.5° and the drive error of that angle is ±0.5°, and if the incident angle θα of the illumination light ILm to the DMD 10 is 35.0°, the telecentricity error on the object plane side (DMD 10 side) of the projection unit PLU will be a maximum of ±1°. Therefore, if the projection magnification Mp of the projection unit PLU is 1 / 6, the telecentricity error Δθt on the image plane side due to the drive error of the micromirror Ms will be a maximum of ±6°. According to this modification, the telecentricity error Δθt due to the drive error of the tilt angle θd of the micromirror Ms specific to the DMD 10 can also be measured, and therefore adjustment (calibration) can be performed before the exposure of the actual pattern to correct the telecentricity error Δθt.

[0145] As explained in the previous modification 1, before exposing the actual pattern onto the substrate P, the telecentric error Δθt that may occur in some typical pattern forms (particularly line-and-space patterns and pad patterns) included in the actual pattern is measured in advance using the first optical measurement unit (image sensor 326) or the second optical measurement unit (image sensor 344). Then, the relationship between the measured telecentric error Δθt and the pattern form can be learned (stored) as a database in the exposure control unit 306 shown in FIG.

[0146] Typically, this type of exposure apparatus EX receives, as recipe information, information such as various exposure conditions, drive unit setting conditions, operating parameters, and operating sequences related to the actual exposure pattern for each layer of an electronic device (such as a display panel) formed on a substrate P, and performs a series of exposure operations. In a maskless system in which multiple drawing modules MU1-MU27 each form a dynamically changing pattern image using a DMD 10, such as the exposure apparatus EX shown in Figures 1 to 6, each of the drawing data MD1-MD27 (see Figure 32) that controls the operation of the numerous micromirrors Ms of each DMD 10 may also be included as part of the recipe information. Such recipe information is often stored and managed by a main control unit (computer) that provides overall control of the exposure apparatus EX.

[0147] Therefore, the data analysis unit 302A and telecentricity error calculation unit 302B of the adjustment control system TEC described in Fig. 32 compare each of the writing data MD1 to MD27 with the pattern form in the database learned (stored) in advance, and generate information (corrected position information) regarding the scanning exposure position of the portion where the telecentricity error Δθt is equal to or greater than the allowable range (for example, the partial area in the X direction within area DA7 or DA10 in Fig. 33), and information regarding the telecentricity error Δθt, i.e., information regarding the angle change from the telecentric state of the imaging light beam (reflected light Sa' including diffracted light) (information regarding the tilt direction, tilt amount, or tilt correction amount), as new pieces of recipe information (corresponding to information STD in Fig. 32). Note that the information regarding the scanning exposure position (corrected position information) is not necessarily required if there is no change in the pattern form throughout each area DAn (n = 1 to 27) on the substrate P exposed by each of the projection areas IAn (n = 1 to 27).

[0148] Furthermore, important pattern portions having high specification values ​​for line width accuracy, position accuracy, or overlay accuracy may be extracted from the drawing data for the actual exposure pattern included in the recipe information, and these may be registered in advance in the recipe information as test patterns for measuring telecentricity errors. Then, before switching to the recipe information and starting actual exposure, an image of the registered test pattern may be projected by the DMD 10, and the telecentricity error Δθt may be measured using the first optical measurement unit (image sensor 326) or the second optical measurement unit (image sensor 344), and adjustment (correction) information may be generated.

[0149] From the above, according to this modified example, in a pattern exposure apparatus that includes an illumination unit ILU that irradiates illumination light ILm onto a DMD 10 as a spatial light modulation element having a large number of micromirrors Ms that switch between an on state and an off state based on drawing data MDn, and a projection unit PLU that projects an image of a pattern corresponding to the drawing data MDn onto a substrate P by making reflected light from the micromirrors Msa of the DMD 10 that are in an on state incident as an imaging light beam (Sa'), information about an angle change (telecentric error Δθt) of the imaging light beam (Sa') that occurs in accordance with the distribution density of the micromirrors Msa of the DMD 10 in an on state is stored in recipe information together with the drawing data MDn. and an adjustment mechanism (driver 100C, fine movement mechanism 108D, fine movement mechanism 110C, etc.) that adjusts the position or angle of at least one optical element (mirror 100, 112, aperture stop 108B, condenser lens system 110, or DMD 10, etc.) in the illumination unit ILU (or projection unit PLU) in accordance with information about the angle change (Δθt) when driving DMD 10 based on recipe information to expose a pattern onto substrate P. By providing this, it is possible to keep within an allowable range the angle change (telecentric error) of the imaging light beam (Sa') that occurs due to the diffraction effect when the multiple micromirrors Ms of DMD 10 are turned on.

[0150] [Variation 4] As explained in Variation 3 above, when an image of a test pattern corresponding to an important pattern portion included in the recipe information is projected by DMD 10 and measured by the first optical measurement unit (image sensor 326), the first optical measurement unit (image sensor 326) measures the intensity distribution of the image of the projected test pattern. Therefore, as shown in FIG. 24 above, the degree of deterioration in symmetry (asymmetry) of the image is analyzed by, for example, the exposure control unit 306 shown in FIG. 32 . Then, to reduce the asymmetry of the image, it is possible to control the telecentric error adjustment mechanism (driver 100C, fine movement mechanism 108D, fine movement mechanism 110C, etc.) in illumination unit ILU or the decentering fine movement mechanism of the lens group or lens element in projection unit PLU.

[0151] In this case, for example, the asymmetry of the image can be reduced by learning, which involves making a predetermined amount of adjustment using the telecentricity error adjustment mechanism or the eccentricity micro-adjustment mechanism, and then repeatedly measuring the degree of asymmetry of the image of the test pattern using the first optical measurement unit (image pickup element 326). Therefore, if the degree of asymmetry of the projected pattern image and the adjustment amount of the telecentricity error adjustment mechanism or the eccentricity micro-adjustment mechanism for reducing it are associated with each other and compiled into a database, it is not necessary to quantitatively determine the telecentricity error Δθt or use that information.

[0152] From the above, according to this modified example, in a pattern exposure apparatus that includes an illumination unit ILU that irradiates illumination light ILm onto a DMD 10 as a spatial light modulation element having a large number of micromirrors Ms that switch between an on state and an off state based on drawing data MDn, and a projection unit PLU that projects an image of a pattern corresponding to the drawing data MDn onto a substrate P by making reflected light from the on-state micromirrors Msa of the DMD 10 incident as an imaging light beam (Sa'), a measurement is performed to measure the degree of asymmetry of the pattern image that occurs in accordance with the telecentric error of the imaging light beam (Sa') that occurs in accordance with the distribution density of the on-state micromirrors Msa of the DMD 10. By providing a unit (image sensor 326) and an adjustment mechanism (drive unit 100C, fine movement mechanism 108D, fine movement mechanism 110C, etc.) that adjusts the position or angle of at least one optical element (mirror 100, 112, aperture stop 108B, condenser lens system 110, or DMD 10, etc.) in the illumination unit ILU (or projection unit PLU) so that the measured asymmetry is reduced when the DMD 10 is driven based on recipe information to expose a pattern onto the substrate P, it is possible to reduce the asymmetry of the pattern image that is caused by the telecentric error of the imaging light beam (Sa') that occurs due to the diffraction effect when the multiple micromirrors Ms of the DMD 10 are turned on.

[0153] In the above description of the first embodiment and each of the modified examples, an isolated pattern as a pattern aspect is not necessarily limited to a case where a single micromirror or a whole row of micromirrors Msa among all the micromirrors Ms of the DMD 10 is in the ON state. For example, a case where two, three (1 × 3), four (2 × 2), six (2 × 3), eight (2 × 4), or nine (3 × 3) micromirrors Msa in the ON state are densely arranged and, for example, ten or more micromirrors Ms in the X' direction and Y' direction are in the OFF state micromirrors Msb can also be considered an isolated pattern. Conversely, if two, three (1x3), four (2x2), six (2x3), eight (2x4), or nine (3x3) off-state micromirrors Msb are densely arranged, and the surrounding micromirrors Ms are densely on-state micromirrors Msa over a range of, for example, several or more (corresponding to dimensions several times or more than the isolated pattern) in the X' and Y' directions, then this can also be considered a land-like pattern.

[0154] Furthermore, the line-and-space pattern as a pattern configuration is not necessarily limited to the configuration shown in Figure 21 in which one row of on-state micromirrors Msa and one row of off-state micromirrors Msb are alternately arranged. For example, two rows of on-state micromirrors Msa and two rows of off-state micromirrors Msb may be alternately arranged, three rows of on-state micromirrors Msa and three rows of off-state micromirrors Msb may be alternately arranged, or two rows of on-state micromirrors Msa and four rows of off-state micromirrors Msb may be alternately arranged. In any pattern configuration, if the distribution (density or concentration) of on-state micromirrors Ms per unit area (e.g., an array area of ​​100 x 100 micromirrors Ms) of all the micromirrors Ms on the DMD 10 is known, the telecentric error Δθt and the degree of asymmetry can be easily determined by simulation or the like.

[0155] Second Embodiment Figure 36 is a diagram showing a schematic configuration of one of the drawing modules provided in a pattern exposure apparatus according to a second embodiment. The Cartesian coordinate system X'Y'Z in Figure 36 is set to be the same as the coordinate system X'Y'Z shown in Figure 6. In this embodiment, illumination light ILm irradiated from an illumination unit ILU onto a digital mirror device (DMD) 10' serving as a spatial light modulator is epi-illuminated via a cube-shaped polarizing beam splitter PBS serving as a light splitter. In Figure 36, the neutral plane Pcc of the DMD 10' is set perpendicular to the optical axis AXa of the double-telecentric projection unit PLU, and the polarizing beam splitter PBS is disposed in the optical path between the DMD 10' and the projection unit PLU. The polarization splitting plane of the polarizing beam splitter PBS is rotated 45° from the X'Y' plane around a line parallel to the Y' axis so as to intersect the optical axis AXa at 45°.

[0156] Illumination light ILm that enters the side surface of polarizing beam splitter PBS via reflecting mirror 112' and condenser lens system 110' of illumination unit ILU is set to S-polarized light that is linearly polarized in the Y' direction in Figure 36, and 95% or more of the light amount is reflected in the +Z direction by the polarization splitting surface of polarizing beam splitter PBS. Illumination light ILm that travels in the +Z direction from polarizing beam splitter PBS passes through quarter-wave plate QP and becomes circularly polarized light, illuminating DMD 10' with a uniform illuminance distribution.

[0157] In this embodiment, the reflective surfaces of the micromirrors Ms of the DMD 10' are set to be flat and parallel to the neutral plane Pcc when in the ON state, which causes reflected light to be incident on the projection unit PLU, and tilted at a constant angle θd with respect to the neutral plane Pcc when in the OFF state, which prevents reflected light from being incident on the projection unit PLU. Therefore, during the non-exposure period when the DMD 10' is not exposing any pattern, all of the micromirrors Ms are in their initial state tilted at angle θd. Therefore, unlike the aspects shown in Figures 11 and 12, the micromirrors Msa in the ON state are parallel to the neutral plane Pcc, and the micromirrors Msb in the OFF state are tilted at angle θd from the neutral plane Pcc.

[0158] 36 , illumination light ILm from a surface light source image (a collection of point light sources SPF) formed on the exit surface side of micro fly's eye (MFE) lens 108A in illumination unit ILU illuminates DMD 10′ using Koehler illumination, and the pupil Ep of projection unit PLU is set to be conjugate with the surface light source image on the exit surface side of MFE lens 108A. Reflected light (imaging light beam) Sa′ from the micromirror Msa of DMD 10′ in the on state travels backward through quarter-wave plate QP, is converted into linearly polarized light (P-polarized light) in the X′ direction, passes through the polarization splitting surface of polarizing beam splitter PBS, and enters projection unit PLU. In this embodiment, the chief ray of the illumination light ILm is set perpendicular to the neutral plane Pcc of the DMD 10', so that the chief ray of the reflected light (imaging light beam) Sa' from the micromirror Msa in the on state is geometrically optically parallel to the optical axis AXa, and it is thought that no large telecentric error Δθt occurs.

[0159] However, a certain error can occur in the drive angle of the micromirror Ms of the DMD 10', which can result in a telecentric error Δθt. Figure 37 is an exaggerated view of the state of the micromirror Ms when the DMD 10' projects an isolated pattern with a minimum line width. In Figure 37, the micromirror Msb in the OFF state, as viewed in the X'Z plane, is tilted at an angle θd in the initial state, and the reflected light Sg due to the irradiation of the illumination light ILm is reflected at an angle 2θd, which is a double angle, with respect to the optical axis AXa. Meanwhile, the micromirror Msa in the ON state is tilted by an angle θd from its initial state orientation so that its reflective surface is parallel to the neutral plane Pcc. At this time, if there is a drive error Δθd, the micromirror Msa in the ON state is tilted by θd + Δθd from its initial state orientation.

[0160] Therefore, the chief ray of the reflected light (imaging light beam) Sa from an isolated micromirror Msa in the ON state is generated at a double angle 2·Δθd with respect to the optical axis AXa. As exemplified in the previous embodiment, the pitch Pdx and Pdy of the micromirrors Ms of the DMD 10′ are 5.4 μm, the initial angle θd is 17.5°, the projection magnification Mp of the projection unit PLU is 1 / 6, and the drive error Δθd is a maximum of ±0.5°. In this case, the telecentric error of the reflected light (imaging light beam) Sa on the object plane side is a maximum of ±1°, and the telecentric error Δθt on the image plane side is a maximum of ±6°. Generally, the drive error Δθd does not vary much among the numerous micromirrors Ms of the DMD 10′, and often averages out to a specific value (mean value) within the maximum error range. Because the maximum value of the drive error Δθd (±0.5°) is within the tolerance range of the product specifications of DMD 10', it is possible to select from several production lots those in which the average drive error Δθd of the micromirrors Msa in the on state is, for example, ±0.25° or less. In any event, due to the influence of the drive error Δθd, the point spread function of the reflected light (imaging light beam) Sa on the pupil Ep of the projection unit PLU becomes a distribution of a sinc2 function as shown in FIG.

[0161] FIG. 38 is a graph schematically illustrating the point spread function Iea of ​​the diffraction image in the pupil Ep of the reflected light Sa from the isolated micromirror Msa in the on-state, as shown in FIG. 37 . As shown in FIG. 38 , the center position of the point spread function Iea is shifted laterally by ΔDx in the X' direction from the position of the optical axis AXa within the pupil Ep. The lateral shift ΔDx corresponds to the magnitude of the drive error Δθd of the micromirror Msa in the on-state. Therefore, by measuring the telecentricity error Δθt caused by the drive error Δθd of the micromirror Msa in the on-state of the actual DMD 10′ using the first optical measurement unit (image sensor 326) or the second optical measurement unit (image sensor 344) described above in FIG. 35 and correcting it using the telecentricity error adjustment mechanism, the telecentricity error Δθt caused by the drive error Δθd can be suppressed.

[0162] Such a telecentricity error Δθt caused by the drive error Δθd of the micromirror Ms also occurs in the case of the DMD 10 of the first embodiment. For example, when projecting an isolated pattern as described above with reference to Figures 13 and 14, a telecentricity error Δθd due to diffraction does not occur, but a telecentricity error Δθt caused by the drive error Δθd may occur. Therefore, even when projecting an isolated pattern using the DMD 10 of the first embodiment, it is desirable to control the telecentricity error adjustment mechanism so that the image-plane-side telecentricity error Δθt caused by the drive error Δθd is reduced to within an allowable range (for example, within ±2°, preferably within ±1°).

[0163] Next, a case where many of the micromirrors Ms of the DMD 10' are closely spaced and become micromirrors Msa in the ON state will be described with reference to FIG. 39. FIG. 39 is an exaggerated view showing the state of the micromirrors Ms when a large land-shaped pattern is projected by the DMD 10'. In FIG. 39, the ON-state micromirrors Msa as viewed in the X'Z plane ideally function as a planar diffraction grating arranged at a pitch Pdx in the X' direction. In this case, too, it is assumed that each of the ON-state micromirrors Msa has a drive error Δθd.

[0164] In the case of FIG. 39 as well, the diffraction angle θj of the j-th order diffracted light Idj can be found based on the equation (2) as previously explained with reference to FIG.

[0165] If the pitch Pdx of the micromirrors Msa in the on state is 5.4 μm, the wavelength λ is 343.333 nm, and the angle of incidence θα of the illumination light ILm is 0°, then the diffraction angle θ0 (angle from the optical axis AXa) of the zeroth-order diffracted light Id0 contained in the reflected light (imaging light flux) Sa' from the DMD 10' is naturally 0°. Furthermore, the diffraction angle θ1 of the ±1st-order diffracted light (-Id1, +Id1) contained in the reflected light (imaging light flux) Sa' is approximately ±3.645° on either side of the optical axis AXa on the object plane side of the projection unit PLU.

[0166] 40 is a diagram schematically illustrating an example of the directions of generation of the central rays of the zeroth-order diffracted light Id0 and ±first-order diffracted light (-Id1, +Id1) contained in the reflected light (imaging light beam) Sa' in the state of FIG. 39 , on the plane of the pupil Ep of the projection unit PLU. As in FIG. 38 above, the point spread function Iea is shifted laterally by ΔDx from the optical axis AXa due to the drive error Δθd of the micromirror Msa in the on state. The actual intensity distribution of the zeroth-order diffracted light Id0 and ±first-order diffracted light (-Id1, +Id1) formed on the pupil Ep can be found by convolution (convolution operation) of the point spread function Iea (sinc2 function) shifted laterally by ΔDx with Equation (2), taking into account the size (σ value) of the surface light source (light source image Ips shown in FIG. 9 ) that may be formed on the pupil Ep.

[0167] As shown in Figure 40, the point spread function Iea is shifted laterally by ΔDx from the optical axis AXa, but the zeroth-order diffracted light Id0 is parallel to the optical axis AXa, and the ±1st-order diffracted light (-Id1, +Id1) is generated symmetrically with respect to the zeroth-order diffracted light Id0. As a result, the actual intensity distribution of the zeroth-order diffracted light Id0 obtained by convolution integral is located at the center of the pupil Ep, so no telecentric error Δθt occurs. However, the peak value of the actual intensity distribution (almost circular) of the zeroth-order diffracted light Id0 is lower than the peak value Io of the point spread function Iea. Furthermore, the peak values ​​of the actual intensity distributions (almost circular) of the ±1st-order diffracted light (-Id1, +Id1) are also significantly reduced. The change in the light intensity of the zeroth-order diffracted light Id0 and the ±1st-order diffracted light (-Id1, +Id1) can be determined by simulation, or by measuring a projected image of a test pattern or the like using the first optical measurement unit (image sensor 326) shown in Figure 35.

[0168] The diffraction angle ±θ1' on the image plane side of the diffraction angle ±θ1 (≈3.645°) of the ±1st-order diffracted light (-Id1, +Id1) on the object plane side is the reciprocal multiple of the projection magnification Mp (1 / 6), so θ1' = θ1 / Mp ≈ ±21.87°. This angle θ1' corresponds to approximately 0.37 in terms of the numerical aperture NAi on the image plane side of the projection unit PLU. If the numerical aperture NAi on the image plane side is, for example, approximately NAi = 0.30, then approximately half of the actual intensity distribution (circular shape) of each of the ±1st-order diffracted light (-Id1, +Id1) will not be transmitted through the pupil Ep. Furthermore, when the numerical aperture NAi on the image plane side of the projection unit PLU is approximately 0.25, most of the actual intensity distribution of the ±1st order diffracted light (-Id1, +Id1) will be located outside the opening of the pupil Ep, and the reflected light (imaging light beam) Sa' projected onto the substrate P will consist exclusively of the component of the 0th order diffracted light Id0.

[0169] As described above, in the epi-illumination method of this embodiment, when many of the micromirrors Ms of the DMD 10' are densely packed in the on-state micromirrors Msa corresponding to large land-like patterns, no significant telecentricity error Δθt occurs on the image plane side due to diffraction. However, the amount of reflected light (imaging light beam) Sa' that forms the land-like pattern will decrease depending on the magnitude of the drive error Δθd (lateral shift ΔDx) of the on-state micromirrors Msa. If this reduction in light amount becomes significant, defects such as increased dimensional error in the resist image of the land-like pattern that appears after development of the substrate P or worsening defects will occur.

[0170] Therefore, as shown in Figure 39, when exposing a land-like pattern in which a large number of micromirrors Msa in the on state are densely packed, the telecentricity error adjustment mechanism (drive unit 100C, fine movement mechanism 108D, fine movement mechanism 110C, etc.) in the illumination unit ILU can be adjusted to fine-tune the incident angle θα (0° by design) of the illumination light ILm to the DMD 10', not for the purpose of correcting the telecentricity error Δθt, but for the purpose of correcting the reduction in the light intensity of the reflected light (imaging light beam) Sa' due to the drive error Δθd.

[0171] Such a light intensity fluctuation error of the reflected light (imaging light beam) Sa' due to the drive error Δθd of the micromirror Msa in the ON state can also occur when the illumination light ILm is irradiated onto the DMD 10 using the oblique illumination method as in the first embodiment. Therefore, it is advisable to correct the telecentric error Δθt taking the drive error Δθd into consideration. Furthermore, if the light intensity fluctuation error of the reflected light (imaging light beam) Sa' exceeds the allowable range (e.g., 10%) after correcting the telecentric error Δθt, the illuminance adjustment filter 106 shown in FIG. 26 may be adjusted to increase the transmittance of the illumination light ILm. Therefore, to enable this adjustment, information regarding the light intensity fluctuation error of the reflected light (imaging light beam) Sa' due to the drive error Δθd of the micromirror Msa in the ON state can also be generated as part of the recipe information and stored in the main control unit (computer).

[0172] Furthermore, because the light intensity fluctuation error of the reflected light (imaging light beam) Sa' tends to decrease, this can be addressed by increasing the power of the beams LB1 to LB4 from the laser light sources FL1 to FL4, as described in FIG. 29. However, to maximize productivity (takt time), the laser light sources FL1 to FL4 often emit beams LB1 to LB4 at nearly full power, making further power increase unfeasible. The same applies to the illuminance adjustment filter 106, and it may not be possible to further increase its transmittance. In such cases, the reduction in the exposure dose (dose) imparted to the resist layer on the substrate P can be compensated for by reducing the scanning speed of the substrate P in the X direction during scanning exposure (the movement speed of the XY stage 4A in FIG. 1). In this case, the switching cycle (frequency) of the micromirrors of the DMD 10' (or DMD 10) between the ON and OFF states is also adjusted according to the scanning speed of the substrate P.

[0173] Furthermore, at least one error that presents a particularly significant error may be identified from among the telecentricity error Δθt of the reflected light (imaging light beam) Sa′ projected onto the substrate P, the asymmetry error of the pattern image caused by the telecentricity error Δθt (see FIG. 24 ), or the light intensity fluctuation error of the reflected light (imaging light beam) Sa′ caused by the drive error Δθd of the micromirror Msa in the on state, and the two-dimensional tilt of at least one of the optical members in the illumination unit ILU or the projection unit PLU, or the DMD 10′ (or DMD 10) may be adjusted to reduce that error. As is clear from the state in FIG. 40 , the amount of lateral shift of the diffracted light Id0 equivalent to the zeroth order light on the distribution of the Sinc2 function varies depending not only on the influence of the drive error Δθd but also on the telecentricity error Δθt caused by the diffraction phenomenon due to the pattern shape (isolated, L&S, land, etc.), and the intensity of the diffracted light Id0 decreases. In this case, even if the adjustment members in the illumination optical system or the attitude (tilt) of the DMD 10' or DMD 10 are adjusted so that the telecentric error Δθt, including the drive error Δθd, becomes zero, the intensity of the diffracted light Id0 remains reduced. Therefore, the total light quantity fluctuation (mainly the reduction in illuminance) that may occur due to the telecentric error Δθt according to the shape of the pattern to be exposed can be predicted (simulated) in advance, or the projection state of the test pattern can be actually measured using the first optical measurement unit (image sensor 326), and illuminance can be corrected, preferably during actual exposure.

[0174] As described above, according to the present embodiment, in a device manufacturing method in which illumination light ILm from illumination unit ILU is irradiated onto DMD 10′ (or DMD 10) as a spatial light modulation element having a large number of micromirrors Ms that switch between an on state and an off state based on drawing data MDn, and an image of a device pattern corresponding to drawing data MDn is projected onto substrate P by projection unit PLU, which receives reflected light from micromirrors Msa that are in the on state of DMD 10′ (or DMD 10), as imaging light beams (Sa′), to form a device pattern on substrate P, the telecentric error of the imaging light beams (Sa′) occurring in accordance with the distribution state of the micromirrors Msa of DMD 10′ (or DMD 10) in the on state, or the imaging light beams (Sa′) occurring due to drive error Δθd of the micromirrors Msa in the on state, is reduced. and a step of adjusting the installation state (position or angle) of at least one optical member (mirror 100, 112, aperture stop 108B, condenser lens system 110, illuminance adjustment filter 106, or alternatively DMD 10 or DMD 10') in illumination unit ILU (or projection unit PLU) so that the specified telecentric error or change in light amount is reduced when driving DMD 10' (or DMD 10) based on recipe information (writing data MDn) to expose a device pattern onto substrate P. By performing this step, it is possible to obtain a device manufacturing method that reduces the telecentric error or change in light amount that occurs due to diffraction action or drive error Δθd when micromirror Ms of DMD 10' (or DMD 10) is turned on, and forms a faithful pattern based on the writing data.

[0175] Furthermore, according to this embodiment, in a device manufacturing method in which illumination light ILm from an illumination unit ILU is irradiated onto a DMD 10′ (DMD 10) as a spatial light modulation element having a large number of micromirrors Ms that switch between an on state and an off state based on drawing data MDn, and a pattern image of an electronic device corresponding to the drawing data MDn is projected onto a substrate P by a projection unit PLU that causes reflected light Sa′ from the micromirrors Msa of the DMD 10′ (DMD 10) that are in an on state to be incident as an imaging light beam, thereby forming an electronic device on a substrate P, a telecentric error Δθt of the reflected light (imaging light beam) Sa′ that occurs due to a diffraction action in accordance with the distribution state of the micromirrors Msa of the DMD 10′ (DMD 10) in an on state, an asymmetric error of the pattern image that occurs due to the telecentric error Δθt, or an asymmetric error of the pattern image that occurs due to a drive error Δθd of the micromirrors Msa in an on state, The method includes a step of identifying at least one particularly significant error, or two errors that occur in combination (for example, a telecentric error and a light intensity fluctuation error, or a telecentric error and an asymmetric error), from among the telecentric error and light intensity fluctuation errors of the reflected light (imaging light beam) Sa' that occur due to the exposure of the DMD 10' (DMD 10), and then a step of adjusting the installation state (position or angle) of at least one optical member in the illumination unit ILU or the projection unit PLU so that the identified at least one error is reduced when the DMD 10' (DMD 10) is driven to expose a pattern image onto the substrate P. This reduces the telecentric error, asymmetric error, or light intensity fluctuation error that occurs due to the diffraction effect or drive error Δθd when the micromirror Ms of the DMD 10' (or DMD 10) is turned on, thereby providing a device manufacturing method that enables faithful pattern formation based on the drawing data.

[0176] [Calibration of Imaging State] As described above, in projection exposure using the DMD 10, each of the numerous micromirrors Ms provided on the DMD 10 is rapidly switched between an on-state tilt and an off-state tilt based on pattern data (drawing data), and the substrate P is scanned and moved in the X direction at a speed corresponding to the switching speed to perform pattern exposure. In this case, the telecentric state of the imaging light beam projected from the projection unit PLU onto the substrate P may change depending on the fineness, density, or periodicity of the projected pattern. This is because the mirror surfaces of the DMD 10 act as a reflective diffraction grating (blazed diffraction grating) depending on the tilt state of the numerous micromirrors Ms of the DMD 10. In the following description, diffracted light resulting from the mirror surfaces of the DMD 10 acting as a blazed diffraction grating will also be simply referred to as blazed diffracted light.

[0177] The state of the blazed diffracted light by the DMD 10 (i.e., the imaging state on the substrate P) is determined by the roll angle and tilt angle of the micromirrors Ms of the DMD 10, the distance between the micromirrors Ms in the On state (i.e., the pitch), the tilt angle of the fine adjustment stage for fine-tuning the position and attitude of the DMD 10, and the like.

[0178] The exposure apparatus EX of this embodiment includes multiple modules MU, as shown in FIG. 2 , for example. Each module MU includes an illumination unit ILU, a DMD 10, and a projection unit PLU. In other words, the exposure apparatus EX includes a DMD 10 for each module MU. Variations in the state of blazed diffracted light may occur between modules MU due to various factors, such as product variations due to the manufacturing process of the DMD 10, variations in the mounting state of the DMD 10 to the module MU, and variations in the operating environment for each module MU. Therefore, when including multiple modules MU, as in the exposure apparatus EX of this embodiment, it is preferable to be able to correct variations in the imaging state on the substrate P that are caused by variations in the state of blazed diffracted light for each module MU.

[0179] The exposure apparatus EX of this embodiment can align the imaging states between multiple modules MU by correcting the state of blazed diffracted light for each module MU. Below, we will explain how the exposure apparatus EX corrects the state of blazed diffracted light for each module MU. In the following explanation, the correction of the state of blazed diffracted light is also referred to as calibration of the imaging state.

[0180] The exposure apparatus EX of the present embodiment calibrates the imaging state by correcting the shift amount ΔDx of the center of the intensity distribution Hpa (see FIG. 10, etc.) and the illuminance of the illumination light on the substrate P. In the following description, the center of the intensity distribution Hpa will also be referred to as the center of gravity of the illumination light (or simply, center of gravity). As explained with reference to FIG. 26, etc., the exposure apparatus EX measures the shift amount ΔDx of the center of gravity of the illumination light and the illuminance of the illumination light, for example, using the optical measurement unit described above. The exposure apparatus EX calibrates the imaging state by adjusting the center of gravity and the illuminance based on the measurement results of the center of gravity and illuminance of the illumination light.

[0181] Specifically, the exposure apparatus EX adjusts the shift amount ΔDx of the center of gravity of the illumination light by adjusting the position of the MFE lens 108A in the illumination unit ILU. The exposure apparatus EX adjusts the illuminance of the illumination light on the substrate P by adjusting the transmittance of the illuminance adjustment filter 106. Various methods are possible for calibrating these imaging conditions. Below, a specific example of a calibration procedure performed by the exposure control device (for example, the exposure control device shown in FIG. 32) provided in the exposure apparatus EX of this embodiment will be described. Note that the exposure control device of this embodiment is capable of correcting illuminance errors in addition to center of gravity errors (the above-mentioned telecentric errors).

[0182] (1) Calibration Method Based on Reference Illumination Pattern (Step S11) The exposure control device acquires recipe information for each module MU from the storage unit 300. For each module MU, the exposure control device acquires the on / off states of the micromirrors Ms of the DMD 10 indicated in the acquired recipe information as a specific pattern of the DMD 10. The specific pattern here refers to an isolated pattern, a line and space pattern, a large land pattern, etc.

[0183] (Step S12) The exposure control device measures the center of gravity and illuminance of the reference illumination pattern of the DMD 10 for each module MU. The reference illumination pattern here is, for example, a pattern in which all micromirrors Ms of the DMD 10 are in the On state (i.e., ALL-On). Note that the reference illumination pattern may be any pattern that can serve as a basis for correcting the center of gravity and illuminance, and is not limited to the ALL-On pattern described above.

[0184] (Step S13) The exposure control device corrects the center of gravity and illuminance of the reference illumination pattern for each module MU so that they both become predetermined values. As described above, the center of gravity is corrected by adjusting the position of the MFE lens 108A. The illuminance is corrected by adjusting the transmittance of the illuminance adjustment filter 106. As a result, the centers of gravity and illuminance of the reference illumination pattern are aligned among all modules MU included in the exposure apparatus EX. In other words, variations in the center of gravity and illuminance of the reference illumination pattern among modules MU are reduced.

[0185] (Step S14) The exposure control device calculates the center of gravity and illuminance of the specific pattern acquired in step S11 by performing a simulation calculation (or experimental values) based on the previously measured roll angle and tilt angle of the micromirror Ms of the DMD 10. That is, the exposure control device calculates the correction amounts for the center of gravity and illuminance by grasping the relationship between the roll angle and tilt angle of the micromirror Ms and the center of gravity and illuminance based on the simulation calculation (or experimental values).

[0186] (Step S15) Based on the center of gravity and illuminance of the specific pattern calculated in step S14, the exposure control device corrects the center of gravity and illuminance in the specific pattern so that both the center of gravity and illuminance are in a predetermined state.

[0187] In the calibration method based on the reference illumination pattern described above, fine correction is performed to correct the difference in the state of blazed diffracted light between the reference illumination pattern and the specific pattern while reducing variations in the center of gravity and illuminance between the module MUs in the reference illumination pattern. That is, with the calibration method based on the reference illumination pattern, the correction procedure can be divided into corrections (i.e., coarse corrections) that reduce variations in the center of gravity and illuminance between the module MUs in the reference illumination pattern (steps S10 to S13), and corrections (i.e., fine corrections) that reduce variations in the center of gravity and illuminance between the module MUs in the specific pattern (steps S14 and S15). With this calibration method, the frequency of coarse corrections (e.g., once a week) can be reduced compared to the frequency of fine corrections (e.g., each time a recipe is changed). Therefore, with this calibration method, the frequency of coarse corrections can be reduced, improving productivity.

[0188] It should be noted that the angle of the micromirror Ms of the DMD 10 may change over time. In this case, the simulation conditions for the simulation calculation used in step S14 described above may be updated in accordance with the change over time.

[0189] (2) Calibration Method Based on a Predetermined Pattern (Step S21) The exposure control device acquires recipe information for each module MU from the storage unit 300. For each module MU, the exposure control device acquires the on / off states of the micromirrors Ms of the DMD 10 indicated by the acquired recipe information as a specific pattern of the DMD 10.

[0190] (Step S22) The exposure control device selects a predetermined pattern for calibration for each module MU based on the specific pattern acquired in step S21. The predetermined pattern here refers to a pattern (e.g., an isolated pattern, a line and space pattern, a large land pattern, etc.) that is prepared in advance as a typical specific pattern based on recipe information. Note that the predetermined pattern may be the specific pattern based on recipe information acquired in step S21 itself.

[0191] (Step S23) The exposure control device calculates the center of gravity and illuminance for each module MU according to the predetermined pattern selected in step S22.

[0192] (Step S24) Based on the center of gravity and illuminance of the predetermined pattern calculated in step S24, the exposure control device corrects the center of gravity and illuminance in the predetermined pattern so that both the center of gravity and illuminance are in a predetermined state.

[0193] In the case of the calibration method based on the above-mentioned predetermined pattern, correction is performed in one stage rather than the two stages of coarse correction and fine correction described above, so the configuration can be simplified and the time required for correction can be reduced, thereby improving productivity.

[0194] (Modification) In the correction of the center of gravity and illuminance in steps S15 and S24 described above, the exposure control device may provide a plurality of different specific patterns and grasp the changes in the center of gravity and illuminance for each specific pattern. For example, if the specific pattern is a line-and-space pattern, the exposure control device may grasp the changes in the center of gravity and illuminance by varying the line period (pitch). By configuring in this way, the exposure control device can grasp the degree of variation in the center of gravity and illuminance more precisely, thereby improving the accuracy of correction.

[0195] The exposure control device may also correct the center of gravity and the illuminance separately in the X direction and the Y direction of the substrate P. The exposure control device may also correct the center of gravity and the illuminance by determining a correction order such that the center of gravity is corrected in a first stage and the illuminance is corrected in a second stage. By configuring in this way, the exposure control device can distinguish between vignetting of the light beam due to a shift in the center of gravity at the pupil position and insufficient illuminance and make corrections accordingly.

[0196] Furthermore, a specific pattern based on recipe information may have an extremely small number of micromirrors Ms in the On state compared to the number of micromirrors Ms in the Off state. When the number of micromirrors Ms in the On state is extremely small, the illuminance may be insufficient, resulting in a decrease in the accuracy of measuring the center of gravity and the illuminance. In such a case, the exposure control device may operate to eliminate the insufficient illuminance and improve the measurement accuracy by dividing the specific pattern with an extremely small number of micromirrors Ms in the On state into several exposures (so-called multiple exposures) in time or space.

[0197] Furthermore, when the exposure control device performs scan exposure on the substrate P, it may correct the center of gravity and illuminance for each scan, corresponding to the actual exposure pattern for each scan. As described above, the movement position of the substrate P in the X-axis direction and the movement position in the Y-axis direction are measured by the interferometer IFY (for example, interferometers IFY1 to IFY4). Therefore, according to the exposure control device of this embodiment, even if the center of gravity and illuminance are corrected for each scan, exposure alignment is possible using the accuracy of the interferometer.

[0198] Furthermore, as described above, the exposure control device extracts important pattern portions having high specification values ​​for line width accuracy, position accuracy, or overlay accuracy from the drawing data for the actual exposure pattern included in the recipe information, and registers these as test patterns in advance in the recipe information. In each scan, the exposure control device may correct the center of gravity and illuminance corresponding to the actual exposure pattern by switching the test patterns at portions where the actual exposure pattern registered in the recipe information changes suddenly (for example, at the boundary between the bezel portion and the pixel portion in a liquid crystal display panel).

[0199] Furthermore, in areas on the substrate P where test patterns registered in the recipe information are mixed, the correction amount for the center of gravity and illuminance for each test pattern may be set to a statistically calculated value (e.g., an average value), and the center of gravity and illuminance may be corrected.

[0200] In the above description, the exposure control device corrects the illuminance by adjusting the transmittance of the illuminance adjustment filter 106, but this is not limiting. Instead of (or in addition to) adjusting the illuminance adjustment filter 106, the exposure control device may correct the effective illuminance on the substrate P by changing the line width of the actual exposure pattern projected onto the substrate P.

[0201] In addition, the exposure control device may correct the center of gravity and illuminance by measuring the line width of the actual exposure pattern on the substrate P based on the results measured by an exposure dose measurement device (e.g., photoelectric element 109D).

[0202] In addition, the exposure control device may pre-store the relationship between the illuminance in the actual exposure pattern and the line width on the substrate P, and correct the line width on the substrate P while estimating the line width of the actual exposure pattern based on the results of the illuminance measurement.

[0203] Furthermore, the exposure control device may store, as recipe information together with the drawing data, an illuminance difference due to the pattern of the imaging light beam that occurs in accordance with the drive error Δθd (angle error) as information related to illuminance. When driving the spatial light modulator (DMD) based on the recipe information to expose a pattern onto the substrate P, the exposure control device controls an adjustment mechanism that adjusts the position or angle of at least one optical member in the illumination unit or projection unit, or the angle of the spatial light modulator, in accordance with the information related to illuminance.

[0204] The exposure control device may also include a mechanism for measuring the illuminance difference of multiple modules due to the pattern of the imaging light beam that occurs in accordance with the distribution density of the micromirrors in the on-state of the spatial light modulator (DMD) and the tilt drive error Δθd (angular error) of the micromirrors, and storing the measured illuminance difference as information related to illuminance, and a mechanism for adjusting the position or angle of at least one optical element in the illumination unit or projection unit, or the angle of the spatial light modulator, in accordance with the stored information related to illuminance when driving the spatial light modulator based on recipe information to expose a pattern on the substrate P using the measured illuminance difference.

[0205] The exposure control device may also be provided with a pattern line width correction calculation unit that essentially calculates the illuminance difference of multiple modules due to the pattern of the imaging light beam that occurs in accordance with the distribution density of the micromirrors in the on state of the DMD and the tilt drive error Δθd (angle error) of the micromirrors, and that essentially corrects the line width of the drawing data when exposing the pattern on the substrate P.

[0206] As described above, according to this embodiment, in a pattern exposure device having a plurality of modules MU each including a DMD 10 as a spatial light modulation element, by correcting the state of the imaging light beam corresponding to the exposure pattern for each module MU, it is possible to reduce telecentric error or changes in light quantity for each module MU and form a faithful pattern based on the drawing data.

[0207] The above has described in detail an embodiment of the present invention with reference to the drawings, but the configuration in the above embodiment is only an example, and various design changes, etc. can be made within the scope that does not deviate from the gist of the present invention.

[0208] According to one embodiment, a pattern exposure apparatus includes a plurality of modules, each module including an illumination unit that irradiates illumination light onto a spatial light modulation element having a number of micromirrors that are driven to switch between an on state and an off state based on drawing data, and a projection unit that receives reflected light from the on-state micromirrors of the spatial light modulation element as an imaging light beam and projects an image of a pattern corresponding to the drawing data onto a substrate. The pattern exposure apparatus includes a control unit that stores, for each module, information regarding an angular change of the imaging light beam that occurs in accordance with the distribution density of the on-state micromirrors of the spatial light modulation element as recipe information together with the drawing data, and stores, for each module, correction information that corrects the state of the imaging light beam corresponding to the pattern, and an adjustment mechanism that adjusts, for each module, the position or angle of at least one optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element, based on the information regarding the angular change and the correction information when driving the spatial light modulation element based on the recipe information to expose the pattern on the substrate.

[0209] In one example, the projection unit has an exit pupil through which the imaging light beam passes with a predetermined aperture diameter, and the adjustment mechanism adjusts the distribution of the imaging light beam within the exit pupil, which is determined from information regarding the angle change, so as to reduce the eccentricity of the distribution.

[0210] In one example, the pattern exposure apparatus further includes a stage device that supports and moves the substrate on the image plane side of the projection unit, and the stage device has an optical measurement unit that measures the distribution of the imaging light beam formed within the exit pupil of the projection unit.

[0211] In one example, the control unit generates information about the angle change as a telecentricity error amount based on the drawing data, and determines in advance whether the telecentricity error amount will be equal to or greater than a predetermined tolerance range defined according to the distribution density of the micromirrors in the on-state, and the adjustment mechanism performs an adjustment operation during pattern exposure such that the telecentricity error amount will be equal to or greater than the predetermined tolerance range.

[0212] In one example, the control unit stores drawing data for a test pattern corresponding to a pattern form in which the amount of telecentricity error may be greater than or equal to the predetermined tolerance range, and the optical measurement unit measures the distribution within the exit pupil of the imaging light beam from the spatial light modulation element driven by the drawing data for the test pattern to confirm the amount of telecentricity error.

[0213] In one example, the illumination unit includes an optical integrator that receives a beam from a light source device and a condenser lens system that Kohler-illuminates the illumination light from the surface light source generated by the optical integrator onto the mirror surface of the spatial light modulator, and the projection unit has an exit pupil that is optically conjugate with the position of the surface light source generated by the optical integrator, and projects a reduced image of the pattern generated by the on-state micromirrors of the spatial light modulator.

[0214] In one example, the adjustment mechanism is configured as an adjustment mechanism that adjusts the incident position or incident angle of the beam incident on the optical integrator so that the incident angle of the illumination light irradiated on the spatial light modulation element is changed, or an adjustment mechanism that adjusts the relative positional relationship between the optical integrator and the condenser lens system in the decentering direction.

[0215] In one example, the control unit further stores, as one piece of recipe information, information on illuminance fluctuations of the imaging light beam that occur depending on the density distribution of the micromirrors in the ON state of the spatial light modulator.

[0216] In one example, the illumination unit includes an illuminance adjustment filter that changes the illuminance of the illumination light irradiated onto the spatial light modulation element, and the adjustment mechanism further includes a mechanism that controls the illuminance adjustment filter based on information regarding the illuminance fluctuation.

[0217] In one example, the control unit further stores, as one piece of recipe information, information regarding illuminance fluctuations of the imaging light beam that occur in accordance with the density distribution of the on-state micromirrors of the spatial light modulator, and the stage device adjusts the movement speed when the projection image of the pattern generated by the on-state micromirrors is scanned and exposed onto the substrate by the projection unit based on the information regarding the illuminance fluctuations.

[0218] In one example, the projection unit includes a plurality of lenses arranged before and after the exit pupil, and an optical element that corrects image plane tilt that occurs when the angle of the spatial light modulator is adjusted by the adjustment mechanism.

[0219] In one example, the projection unit has a plurality of lenses arranged in front of and behind the exit pupil, and some of the plurality of lenses are adjusted in an eccentric direction so as to correct an image plane tilt that occurs when the angle of the spatial light modulator is adjusted by the adjustment mechanism.

[0220] According to one embodiment, a pattern exposure apparatus includes a plurality of modules, each module including a spatial light modulation element having a number of micromirrors selectively driven based on drawing data, an illumination unit that irradiates the spatial light modulation element with illumination light at a predetermined angle of incidence, and a projection unit that projects reflected light from selected micromirrors of the spatial light modulation element that are in an on-state as an imaging light beam onto a substrate, and projects a pattern corresponding to the drawing data onto the substrate by exposure. The pattern exposure apparatus also includes a control unit that stores correction information for each module that corrects the state of the imaging light beam corresponding to the pattern, and an adjustment mechanism that adjusts the position or angle of some optical members of the illumination unit or the projection unit for each module based on the correction information.

[0221] In one example, the control unit determines the magnitude of the telecentric error by analyzing the density of the on-state micromirrors according to the pattern based on the drawing data.

[0222] In one example, the control unit determines, based on the drawing data, the magnitude of the telecentric error when more than half of all the micromirrors of the spatial light modulation element are the micromirrors in the on state.

[0223] In one example, the numerous micromirrors of the spatial light modulation element are arranged two-dimensionally along a first direction and a second direction that are perpendicular to each other within the neutral plane, with the reflective surface that is flat when not driven being the neutral plane, and the control unit determines the magnitude of the telecentric error based on the drawing data when several or more of the micromirrors adjacent to both the first direction and the second direction become the on-state micromirrors.

[0224] In one example, when the pattern to be exposed is a line and space pattern, the control unit determines the magnitude of the telecentric error based on the drawing data and the periodicity and periodic direction of the arrangement of the micromirrors in the on-state among the micromirrors of the spatial light modulation element.

[0225] In one example, the adjustment mechanism adjusts the position or angle of the optical member when the magnitude of the telecentric error determined by the control unit exceeds a predetermined tolerance.

[0226] In one example, the predetermined tolerance is set to within ±2° as the tilt angle of the chief ray of the imaging light beam directed from the projection unit to the substrate with respect to the optical axis.

[0227] In one example, the illumination unit includes a surface light source member that receives a beam from a laser light source device to generate a surface light source of the illumination light, and a condenser lens system that receives the illumination light from the surface light source and performs Koehler illumination on the reflecting surface of the spatial light modulation element, and the adjustment mechanism adjusts the relative positional relationship between the surface light source and the condenser lens system in the decentering direction.

[0228] In one example, the adjustment mechanism includes a first telecentric adjustment mechanism that shifts the position of the beam from the laser light source device that is incident on the surface light source member in an eccentric direction.

[0229] In one example, the adjustment mechanism includes a second telecentric adjustment mechanism that shifts the position of the surface light source member in an eccentric direction relative to the beam from the laser light source device.

[0230] In one example, the adjustment mechanism includes a third telecentric adjustment mechanism that shifts the position of the condenser lens system in an eccentric direction relative to the position of the surface light source generated by the surface light source conversion member.

[0231] In one example, the illumination unit includes a mirror as the optical element that reflects the illumination light at a predetermined angle, and the adjustment mechanism changes the angle of the mirror to adjust the angle of incidence of the illumination light irradiated onto the spatial light modulation element.

[0232] In one example, when the reflective surface of the on-state micromirror of the spatial light modulator is tilted by an angle θd (θd > 0°) in design relative to a plane perpendicular to the optical axis of the projection unit, the illumination unit is set to an oblique illumination method in which the incident angle θα of the illumination light from the condenser lens system to the spatial light modulator is θα = 2 · θd in design, and the incident angle θα is adjusted by the adjustment mechanism.

[0233] In one example, the pattern exposure device includes a beam splitter arranged in the optical path between the spatial light modulator and the projection unit, and when the reflective surface of the on-state micromirror of the spatial light modulator is set at a design angle θd = 0° with respect to a plane perpendicular to the optical axis of the projection unit, the illumination unit is set to an epi-illumination method in which the illumination light from the condenser lens system is irradiated onto the spatial light modulator at an incident angle θα = 0° via the beam splitter, and the incident angle θα is adjusted by the adjustment mechanism.

[0234] A pattern exposure apparatus according to one embodiment includes an illumination unit that irradiates illumination light onto a spatial light modulation element having a number of micromirrors that switch between an on state and an off state based on drawing data for pattern exposure, and a projection unit that projects a pattern image corresponding to the drawing data onto a substrate by receiving reflected light from the on-state micromirrors of the spatial light modulation element as an imaging light beam. The pattern exposure apparatus also includes a measurement unit that measures the degree of asymmetry of the pattern image caused by telecentric error of the imaging light beam that occurs in accordance with the distribution density of the on-state micromirrors of the spatial light modulation element, and an adjustment mechanism that adjusts the position or angle of at least one optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element, so as to reduce the measured asymmetry when driving the spatial light modulation element based on the drawing data to expose the pattern image onto the substrate.

[0235] In one example, the pattern exposure apparatus further includes a stage device that supports the substrate on the image plane side of the projection unit and is movable along the image plane, and the measurement unit is provided in a part of the stage device and measures the intensity distribution of the pattern image to measure the degree of asymmetry.

[0236] In one example, the adjustment mechanism adjusts the position or angle of at least one optical member in the illumination unit so that the angle of incidence of the illumination light irradiated onto the spatial light modulation element is changed.

[0237] In one example, the illumination unit includes a surface light source member that receives a beam from a light source device to generate a surface light source of the illumination light, and a condenser lens system that receives the illumination light from the surface light source and performs Koehler illumination on the reflecting surface of the spatial light modulation element, and the adjustment mechanism adjusts the relative positional relationship between the surface light source and the condenser lens system in the decentering direction.

[0238] In one example, the surface light source member has a fly's eye lens that forms the surface light source on the exit surface side of a number of lens elements arranged two-dimensionally, and an aperture diaphragm that is arranged on the exit surface side of the fly's eye lens, and the adjustment mechanism adjusts the relative positional relationship between the opening of the aperture diaphragm and the condenser lens system in the decentering direction.

[0239] In one example, the surface light source member has a fly's eye lens that forms the surface light source on the exit surface side of a number of lens elements arranged two-dimensionally, and the adjustment mechanism adjusts the angle of incidence of the beam from the light source device to the fly's eye lens.

[0240] In one example, the projection unit is a reduction projection optical system composed of multiple lenses that projects a reduced image of a pattern generated by the on-state micromirrors of the spatial light modulator onto the substrate, and when the angle of the spatial light modulator is adjusted by the adjustment mechanism, the position of some of the lenses of the reduction projection optical system is adjusted in an eccentric direction so as to correct the tilt of the image plane of the reduction projection optical system.

[0241] In one example, the drawing data includes data of a test pattern in which the on-state micromirrors are arranged at a distribution density that causes a telecentric error in the imaging light beam, and the measurement unit measures the asymmetry of the projected image of the test pattern generated by the spatial light modulator by the projection unit.

[0242] In one example, the reflective surface of the micromirror of the spatial light modulator in the on state is designed to be tilted by an angle θd (θd > 0°) with respect to a plane perpendicular to the optical axis of the projection unit, and the incident angle θα of the illumination light from the illumination unit to the spatial light modulator is designed to be an oblique illumination method such that θα = 2 · θd, and the adjustment mechanism adjusts the incident angle θα.

[0243] In one example, the pattern exposure apparatus further includes a light splitter arranged between the spatial light modulator and the projection unit, wherein the reflective surface of the micromirror in the on state of the spatial light modulator is set to an angle θd = 0° in design relative to a plane perpendicular to the optical axis of the projection unit, and the incident angle θα of the illumination light irradiated onto the spatial light modulator via the light splitter is set to an epi-illumination method such that θα = 0° in design, and the adjustment mechanism adjusts the incident angle θα.

[0244] According to one embodiment, a device manufacturing method includes: irradiating illumination light from an illumination unit onto a spatial light modulator having a number of micromirrors that switch between an on state and an off state based on imaging data; projecting an image of a device pattern corresponding to the imaging data onto a substrate using a projection unit that receives reflected light from the on-state micromirrors of the spatial light modulator as an imaging light beam; identifying a telecentric error of the imaging light beam that occurs depending on a distribution state of the on-state micromirrors of the spatial light modulator or a light intensity fluctuation error of the imaging light beam that occurs due to a driving error of the on-state micromirrors; storing correction information for each module including the illumination unit, the spatial light modulator, and the projection unit, which corrects the state of the imaging light beam corresponding to the pattern based on the light intensity fluctuation error; and adjusting an installation state of the spatial light modulator for each module based on the correction information when driving the spatial light modulator based on the imaging data to expose the image of the device pattern on the substrate.

[0245] In one example, the identifying step identifies the telecentric error or the light intensity fluctuation error of the imaging light beam based on the generation state of diffracted light that is determined according to the distribution state in each of an isolated pattern in which one or several on-state micromirrors are arranged independently or in a row, a line and space pattern in which the on-state micromirrors are arranged so that the isolated patterns are arranged at a regular interval, or a land pattern in which the on-state micromirrors are densely arranged so that the dimensions are several times larger than those of the isolated pattern.

[0246] In one example, a device manufacturing method is provided in which the reflective surface of the on-state micromirror of the spatial light modulator is designed to be tilted at an angle θd (θd≧0°) with respect to a plane perpendicular to the optical axis of the projection unit, and the incident angle θα of the illumination light from the illumination unit to the spatial light modulator is designed to be θα=2·θd.

[0247] In one example, when the arrangement pitch of the micromirrors is Pdx, n is a real number, the wavelength of the illumination light is λ, and the angle for each order j (j = 0, 1, 2, ...) of the diffracted light is θj, the telecentric error of the imaging light beam is defined by the angle of the j-th diffracted light that has the smallest inclination from the optical axis of the projection unit, among the multiple orders of diffracted light defined by sin θj = j (λ / (n Pdx)) - sin θα.

[0248] In one example, the adjusting step adjusts the incident angle θα of the illumination light by adjusting the position or angle of an optical component in the illumination unit or the angle of the spatial light modulator so that the tilt angle of the jth-order diffracted light from the optical axis of the projection unit is within a predetermined tolerance range.

[0249] In one example, in the identification step, if the driving error of the micromirror in the on state includes an angular error of ±Δθd with respect to the tilt angle θd, the light intensity fluctuation error of the imaging light beam is identified based on the degree to which the point image intensity distribution of reflected light from a single micromirror in the on state at the exit pupil of the projection unit is decentered corresponding to the angular error ±Δθd.

[0250] In one example, in the adjusting step, the beam intensity from a light source device that is the source of the illumination light is adjusted, or the transmittance of the illumination light is adjusted by an illuminance adjustment filter provided in the illumination unit, depending on the identified light quantity fluctuation error.

[0251] According to one embodiment, a device manufacturing method includes: irradiating illumination light from an illumination unit onto a spatial light modulation element having a number of micromirrors that switch between an on state and an off state based on imaging data; projecting a pattern image of an electronic device corresponding to the imaging data onto a substrate using a projection unit that receives reflected light from the on-state micromirrors of the spatial light modulation element as an imaging light beam; and forming an electronic device on the substrate. The device manufacturing method includes the steps of: storing, for each module including the illumination unit, the spatial light modulation element, and the projection unit, correction information for correcting a state of the imaging light beam corresponding to the pattern; and adjusting, for each module, a position or angle of at least one optical member in the illumination unit or the projection unit or an angle of the spatial light modulation element based on the correction information when driving the spatial light modulation element to expose the pattern image onto the substrate.

[0252] In one example, the correction information corrects the effective illuminance on the substrate by changing the line width of the actual exposure pattern projected onto the substrate.

[0253] In one example, the method includes a step of identifying telecentric error, asymmetry error, or light intensity fluctuation error based on the state of diffracted light generated, which is determined according to the distribution state in each of an isolated pattern in which one or several on-state micromirrors are arranged independently or in a row, a line and space pattern in which the on-state micromirrors are arranged so that the isolated patterns are arranged at a regular interval, or a land pattern in which the on-state micromirrors are densely arranged so that the dimensions are several times larger than those of the isolated pattern.

[0254] In one example, the reflective surface of the micromirror in the on state of the spatial light modulator is designed to be tilted by an angle θd (θd≧0°) with respect to a plane perpendicular to the optical axis of the projection unit, and includes an angular error of ±Δθd as a driving error of the micromirror in the on state, and the incident angle θα of the illumination light from the illumination unit to the spatial light modulator is designed to be θα=2·θd.

[0255] In one example, in the identifying step, the telecentricity error of the imaging light beam when the micromirror in the ON state generates the isolated pattern is identified as the angular error ±Δθd.

[0256] In one example, when the arrangement pitch of the micromirrors is Pdx, n is a real number, the wavelength of the illumination light is λ, and the angle for each order j (j = 0, 1, 2, ...) of the diffracted light is θj, in the identification step, the telecentric error of the imaging light beam when the micromirror in the on state generates the land-like pattern is defined as the angle of the j-th order diffracted light that has the smallest inclination from the optical axis of the projection unit, out of multiple orders of diffracted light defined by sin θj = j (λ / (n Pdx)) - sin θα.

[0257] In one example, in the identification step, the light intensity fluctuation error of the imaging light beam is identified based on the degree of decentering of the point image intensity distribution at the exit pupil of the projection unit of the light reflected from a single micromirror in the on state, corresponding to the angular error ±Δθd.

[0258] In one example, in the identification step, a test pattern belonging to either the isolated pattern, the line and space pattern, or the land pattern is generated by the spatial light modulation element, and the asymmetric error is identified based on the intensity distribution of the projected image of the test pattern projected via the projection unit.

[0259] In one example, in the identifying step, the imaging light beam corresponding to any one of the isolated pattern, the line and space pattern, or the land pattern generated by the spatial light modulation element is projected by the projection unit, and the deviation of the intensity distribution of the imaging light beam formed at the exit pupil of the projection unit is measured to identify the telecentric error.

[0260] A control method according to one embodiment is a control method for an exposure apparatus including an illumination unit that irradiates illumination light onto a spatial light modulation element having a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data, and a projection unit that projects light reflected from the on-state micromirrors of the spatial light modulation element as an imaging light beam onto a substrate. The control method includes adjusting an angular change of the imaging light beam that occurs based on a distribution of the on-state micromirrors of the spatial light modulation element, and adjusting a line width change of an exposure pattern that occurs due to the adjustment by correcting the drawing data.

[0261] In one example, the angle change is adjusted by adjusting the position or angle of an optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element.

[0262] In one example, there are a plurality of modules each including the spatial light modulation element, the illumination unit, and the projection unit, and the adjustment of the angle change and the adjustment of the line width change are performed for each of the plurality of modules.

[0263] A pattern exposure apparatus according to one embodiment includes an illumination unit that irradiates illumination light onto a spatial light modulation element having a number of micromirrors that are driven to switch between an on state and an off state based on drawing data, and a projection unit that projects an image of a pattern corresponding to the drawing data onto a substrate by receiving reflected light from the on-state micromirrors of the spatial light modulation element as an imaging light beam. The pattern exposure apparatus also includes a control unit that stores, as recipe information together with the drawing data, information about illuminance, which indicates an illuminance difference due to a pattern of the imaging light beam that occurs depending on a distribution density of the on-state micromirrors of the spatial light modulation element and an angle error of the micromirrors, and an adjustment mechanism that adjusts a position or angle of at least one optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element, depending on the information about the illuminance, when driving the spatial light modulation element based on the recipe information to expose a pattern onto the substrate.

[0264] A pattern exposure apparatus according to one embodiment includes an illumination unit that irradiates illumination light onto a spatial light modulation element having a number of micromirrors that are driven to switch between an on state and an off state based on drawing data, and a projection unit that projects an image of a pattern corresponding to the drawing data onto a substrate by receiving reflected light from the on-state micromirrors of the spatial light modulation element as an imaging light beam. The pattern exposure apparatus includes a mechanism that has a plurality of the spatial light modulation elements, the illumination units, and the projection units, and that measures an illuminance difference among multiple modules due to a pattern of the imaging light beam that occurs depending on a distribution density of the on-state micromirrors of the spatial light modulation element and an angle error of the micromirrors, and a mechanism that adjusts the position or angle of at least one optical member in the illumination unit or the projection unit, or the angle of the spatial light modulation element, in accordance with the information on the illuminance when driving the spatial light modulation element based on recipe information including information on illuminance that indicates the measured illuminance difference to expose a pattern on the substrate.

[0265] A pattern exposure apparatus according to one embodiment includes an illumination unit that irradiates illumination light onto a spatial light modulation element having a number of micromirrors that are driven to switch between an on state and an off state based on drawing data, and a projection unit that projects an image of a pattern corresponding to the drawing data onto a substrate by receiving reflected light from the on-state micromirrors of the spatial light modulation element as an imaging light beam. The pattern exposure apparatus includes a pattern linewidth correction calculation unit that includes a plurality of the spatial light modulation elements, the illumination units, and the projection units, and that substantially calculates a linewidth error that occurs during exposure due to an illuminance difference among multiple modules and an imaging state caused by a pattern of the imaging light beam that occurs in response to a distribution density of the on-state micromirrors of the spatial light modulation element and an angle error in tilt of the micromirrors, and that substantially corrects the linewidth of the drawing data when exposing the pattern on the substrate.

[0266] An exposure apparatus according to one embodiment includes a plurality of modules each including a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data, an illumination unit that irradiates illumination light onto the spatial light modulation element, and a projection unit that causes reflected light from the on-state micromirrors in the spatial light modulation element to be incident on a substrate as an imaging light beam; a control unit that stores correction information for each module to correct the state of the imaging light beam; and an adjustment mechanism that adjusts the position or angle of an optical element in the illumination unit or the projection unit, or the angle of the spatial light modulation element, for each module based on the correction information.

[0267] In one example, the control unit stores information for each module regarding the angular change of the imaging light beam that occurs depending on the distribution density of the on-state micromirrors in the spatial light modulator, and the adjustment mechanism adjusts the position or angle of the optical element in the illumination unit or the projection unit, or the angle of the spatial light modulator, for each module based on the correction information and the information regarding the angular change.

[0268] In one example, the exposure apparatus includes a measurement unit that measures the degree of asymmetry of the device pattern corresponding to the drawing data projected onto the substrate, which occurs due to telecentric error of the imaging light beam that occurs depending on the distribution density of the on-state micromirrors in the spatial light modulator, and the adjustment mechanism adjusts the position or angle of the optical component in the illumination unit or the projection unit, or the angle of the spatial light modulator, for each module so as to reduce the asymmetry.

[0269] In one example, the projection unit includes an aperture stop that sets an exit pupil through which the imaging light beam passes with a predetermined aperture diameter, and the adjustment mechanism adjusts the intensity distribution of the imaging light beam at the exit pupil so as to reduce eccentricity, which is determined from information regarding the angle change.

[0270] In one example, the exposure apparatus further includes a stage device that supports and moves the substrate on the image plane side of the projection unit, and the stage device includes an optical measurement unit that measures the intensity distribution.

[0271] In one example, the information regarding the angle change includes a telecentricity error generated based on the drawing data, the control unit determines that the telecentricity error exceeds an acceptable range, and the adjustment mechanism adjusts based on the telecentricity error.

[0272] In one example, the control unit stores drawing data for a test pattern corresponding to a pattern form in which the telecentricity error exceeds the tolerance range, and the optical measurement unit confirms the telecentricity error by measuring the intensity distribution at the exit pupil of the imaging light beam from the spatial light modulation element driven based on the drawing data for the test pattern.

[0273] In one example, the illumination unit includes an optical integrator into which a beam from a light source device is incident, and a condenser lens system that Kohler-illuminates light from a surface light source generated by the optical integrator onto a mirror surface of the spatial light modulator, the surface light source and the exit pupil being optically conjugate, and the projection unit reduces and projects a pattern generated by the micromirrors of the spatial light modulator in an on-state.

[0274] In one example, the adjustment mechanism includes an adjustment mechanism that adjusts the incident position or incident angle of the beam incident on the optical integrator so that the incident angle of the illumination light irradiated on the spatial light modulation element is changed, or an adjustment mechanism that adjusts the relative positional relationship between the optical integrator and the condenser lens system in the decentering direction.

[0275] In one example, the control unit stores information about variations in illuminance of the imaging light beam that occur in response to a density distribution of the micromirrors in the ON state of the spatial light modulator.

[0276] In one example, the illumination unit includes an illuminance adjustment filter that changes the illuminance of the illumination light irradiated to the spatial light modulation element, and the adjustment mechanism includes a mechanism that controls the illuminance adjustment filter based on information regarding the illuminance fluctuation.

[0277] In one example, the control unit stores information regarding illuminance fluctuations of the imaging light beam that occur depending on the density distribution of the micromirrors in the on-state of the spatial light modulator, and the movement speed of the stage device when projecting the imaging light beam onto the substrate is adjusted based on the information regarding the illuminance fluctuations.

[0278] In one example, the projection unit includes a plurality of lenses arranged before and after the exit pupil, and an optical element that corrects image plane tilt that occurs when the angle of the spatial light modulation element is adjusted by the adjustment mechanism.

[0279] In one example, the projection unit includes a plurality of lenses arranged in front of and behind the exit pupil, and some of the lenses are positioned in an eccentric direction so as to correct an image plane tilt that occurs when the angle of the spatial light modulator is adjusted by the adjustment mechanism.

[0280] In one example, the control unit determines the magnitude of the telecentricity error of the imaging light beam when more than half of all the micromirrors of the spatial light modulator are in the on state, based on the drawing data.

[0281] In one example, the plurality of micromirrors of the spatial light modulation element are arranged two-dimensionally along a first direction and a second direction that are perpendicular to each other within the neutral plane, with the reflective surface that is flat when not driven being the neutral plane, and the control unit determines the magnitude of the telecentric error based on the drawing data when several or more of the micromirrors adjacent to both the first direction and the second direction become the on-state micromirrors.

[0282] In one example, when the pattern to be exposed is a line and space pattern, the control unit determines the magnitude of the telecentric error based on the periodicity and periodic direction of the arrangement of the micromirrors in the on-state among the micromirrors of the spatial light modulation element, based on the drawing data.

[0283] In one example, the adjustment mechanism adjusts the position or angle of the optical member when the magnitude of the telecentricity error determined by the control unit exceeds an allowable range.

[0284] In one example, the tolerance is set to within ±2° as the tilt angle of the chief ray of the imaging light beam directed from the projection unit to the substrate with respect to the optical axis.

[0285] In one example, the illumination unit includes a surface light source member that receives a beam from a laser light source device and generates a surface light source of the illumination light, and a condenser lens system that receives the illumination light from the surface light source and provides Koehler illumination to the reflecting surface of the spatial light modulation element, and the adjustment mechanism adjusts the relative positional relationship between the surface light source and the condenser lens system in the decentering direction.

[0286] In one example, the adjustment mechanism includes a first telecentric adjustment mechanism that shifts the position of the beam from the laser light source device that is incident on the surface light source member in the eccentric direction, a second telecentric adjustment mechanism that shifts the position of the surface light source member in the eccentric direction relative to the beam from the laser light source device, and a third telecentric adjustment mechanism that shifts the position of the condenser lens system in the eccentric direction relative to the position of the surface light source generated by the surface light source member.

[0287] In one example, the illumination unit includes a mirror as the optical element that reflects the illumination light at a predetermined angle, and the adjustment mechanism changes the angle of the mirror to adjust the angle of incidence of the illumination light irradiated onto the spatial light modulation element.

[0288] In one example, when the reflective surface of the on-state micromirror of the spatial light modulator is tilted by an angle θd (θd > 0°) in design relative to a plane perpendicular to the optical axis of the projection unit, the illumination unit is set to an oblique illumination method in which the incident angle θα of the illumination light from the condenser lens system to the spatial light modulator is θα = 2 · θd in design, and the incident angle θα is adjusted by the adjustment mechanism.

[0289] In one example, the exposure apparatus includes a beam splitter arranged in the optical path between the spatial light modulator and the projection unit, and when the reflective surface of the on-state micromirror of the spatial light modulator is set at a design angle θd = 0° with respect to a plane perpendicular to the optical axis of the projection unit, the illumination unit is set to an epi-illumination method in which the illumination light from the condenser lens system is irradiated onto the spatial light modulator at an incident angle θα = 0° via the beam splitter, and the incident angle θα is adjusted by the adjustment mechanism.

[0290] A device manufacturing method according to one embodiment includes a step of identifying a telecentric error of the imaging light beam that occurs depending on the distribution state of the micromirrors in the on-state of the spatial light modulator, or a light intensity fluctuation error of the imaging light beam that occurs due to a driving error of the micromirrors in the on-state, and a step of adjusting the installation state of the spatial light modulator for each module based on the correction information when the imaging light beam is incident on the substrate using the exposure apparatus, wherein the correction information includes information for correcting the state of the imaging light beam based on the light intensity fluctuation error.

[0291] A device manufacturing method according to one embodiment includes exposing the substrate using the exposure apparatus.

[0292] In one example, the correction information corrects the effective illuminance on the substrate by changing the line width of the actual exposure pattern projected onto the substrate.

[0293] In one example, the device manufacturing method includes a step of identifying telecentric error, asymmetry error, or light intensity fluctuation error based on the generation state of diffracted light defined according to the distribution state in each of an isolated pattern in which one or several on-state micromirrors are arranged independently or in a row, a line and space pattern in which the on-state micromirrors are arranged so that the isolated patterns are arranged at a regular interval, or a land pattern in which the on-state micromirrors are densely arranged so that the dimensions are several times larger than the isolated pattern, wherein the reflective surface of the on-state micromirror of the spatial light modulator is designed to be inclined by an angle θd (θd≧0°) with respect to a plane perpendicular to the optical axis of the projection unit, and includes an angular error of ±Δθd as a drive error of the on-state micromirror, and the incident angle θα of the illumination light from the illumination unit to the spatial light modulator is designed to be θα=2・θd.

[0294] In one example, in the identifying step, the telecentric error of the imaging light beam when the micromirror in the ON state generates the isolated pattern is identified as the angular error ±Δθd.

[0295] In one example, when the arrangement pitch of the micromirrors is Pdx, n is a real number, the wavelength of the illumination light is λ, and the angle for each order j (j = 0, 1, 2, ...) of the diffracted light is θj, in the identification step, the telecentric error of the imaging light beam when the micromirror in the on state generates the land-like pattern is defined as the angle of the j-th order diffracted light that has the smallest inclination from the optical axis of the projection unit, out of multiple orders of diffracted light defined by sin θj = j (λ / (n Pdx)) - sin θα.

[0296] In one example, in the identifying step, the light intensity variation error of the imaging light beam is identified based on the degree of decentering of a point image intensity distribution of light reflected from a single micromirror in the on state at the exit pupil of the projection unit corresponding to the angular error ±Δθd; a test pattern belonging to any of the isolated pattern, the line and space pattern, or the land pattern is generated by the spatial light modulator, and the asymmetry error is identified based on the intensity distribution of a projected image of the test pattern projected via the projection unit; and in a state where the imaging light beam corresponding to any of the isolated pattern, the line and space pattern, or the land pattern generated by the spatial light modulator is projected by the projection unit, a deviation in the intensity distribution of the imaging light beam formed at the exit pupil of the projection unit is measured to identify the telecentric error.

[0297] According to one embodiment, a control method for an exposure apparatus includes a module including: an illumination unit that irradiates illumination light onto a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data; and a projection unit that projects a device pattern corresponding to the drawing data onto a substrate by causing reflected light from the on-state micromirrors of the spatial light modulation element to be incident on the substrate as an imaging light beam. The control method includes adjusting an angular change of the imaging light beam that occurs based on a distribution of on-state micromirrors of the spatial light modulation element, and adjusting a line width change of the device pattern that occurs due to the adjustment of the angular change by correcting the drawing data.

[0298] In one example, adjusting the angle change includes adjusting a position or angle of an optical element in the illumination unit or the projection unit, or an angle of the spatial light modulator.

[0299] In one example, correcting the drawing data includes correcting a line width of pattern data included in the drawing data.

[0300] In one example, a plurality of modules are included, and the adjustment of the angle change and the adjustment of the line width change are performed for each module.

[0301] An exposure apparatus according to one embodiment includes a module including a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data, an illumination unit that irradiates illumination light onto the spatial light modulation element, and a projection unit that projects reflected light from the on-state micromirrors in the spatial light modulation element onto a substrate as an imaging light beam; a control unit that stores illuminance-related information including an illuminance difference in the imaging light beam that occurs depending on the distribution density of the on-state micromirrors of the spatial light modulation element and an angular error in the inclination angle of the on-state micromirrors; and an adjustment mechanism that adjusts the position or angle of an optical element in the illumination unit or the projection unit, or the angle of the spatial light modulation element, depending on the illuminance-related information when driving the spatial light modulation element based on the drawing data to project the imaging light beam onto the substrate.

[0302] In one example, the exposure apparatus includes a plurality of the modules and a measurement mechanism that measures the illuminance difference between the plurality of modules of the imaging light beam that occurs according to the distribution density and the angle error, and when projecting the imaging light beam onto the substrate, the adjustment mechanism adjusts the position or angle of an optical element in the illumination unit or the projection unit, or the angle of the spatial light modulation element, and adjusts the illuminance of the imaging light beam according to the illuminance-related information including the measured illuminance difference.

[0303] In one example, the exposure apparatus includes a plurality of the modules, and an arithmetic unit that essentially calculates the illuminance difference between the plurality of modules of the imaging light beam that occurs according to the distribution density and the angle error, and the line width error that occurs due to the imaging state of the imaging light beam, and applies a correction to the line width of the drawing data.

[0304] 110... condenser lens system, 116... first lens group, 118... second lens group

Claims

1. a plurality of modules each including a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data, an illumination unit that irradiates illumination light onto the spatial light modulation element, and a projection unit that causes reflected light from the on-state micromirrors of the spatial light modulation element to be incident on a substrate as an imaging light beam; a control unit that stores correction information for correcting the state of the imaging light beam for each of the modules; an adjustment mechanism that adjusts, for each module, a position or an angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, based on the correction information; An exposure apparatus comprising:

2. the control unit stores, for each module, information regarding an angular change of the imaging light beam that occurs in accordance with a distribution density of the micromirrors in an ON state in the spatial light modulation element; the adjustment mechanism adjusts, for each module, a position or an angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, based on the correction information and the information related to the angle change.

2. The exposure apparatus according to claim 1.

3. a measurement unit that measures a degree of asymmetry of a device pattern corresponding to the drawing data projected onto the substrate, the asymmetry being caused by a telecentric error of the imaging light beam that occurs in accordance with a distribution density of micromirrors in an ON state in the spatial light modulation element, the adjustment mechanism adjusts, for each of the modules, a position or an angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, so as to reduce the asymmetry.

2. The exposure apparatus according to claim 1.

4. the projection unit includes an aperture stop that sets an exit pupil through which the imaging light beam passes with a predetermined aperture diameter; the adjustment mechanism adjusts the intensity distribution of the imaging light beam at the exit pupil so as to reduce eccentricity, the eccentricity being determined from the information regarding the angle change.

3. The exposure apparatus according to claim 2.

5. a stage device that supports and moves the substrate on the image plane side of the projection unit; the stage device includes an optical measurement unit that measures the intensity distribution.

5. The exposure apparatus according to claim 4.

6. the information about the angle change includes a telecentric error generated based on the drawing data; the control unit determines that the telecentric error exceeds an acceptable range; the adjustment mechanism adjusts based on the telecentric error.

6. The exposure apparatus according to claim 5.

7. the control unit stores writing data for a test pattern corresponding to a pattern form in which the telecentric error exceeds the allowable range; the optical measurement unit checks the telecentric error by measuring an intensity distribution at the exit pupil of the imaging light beam from the spatial light modulation element driven based on drawing data for the test pattern.

7. The exposure apparatus according to claim 6.

8. the illumination unit includes an optical integrator onto which a beam from a light source device is incident, and a condenser lens system that directs light from a surface light source generated by the optical integrator onto a mirror surface of the spatial light modulation element to provide Koehler illumination; the surface light source and the exit pupil are optically conjugate; the projection unit reduces and projects a pattern generated by the micromirrors of the spatial light modulation element in an on-state; 4. The exposure apparatus according to claim 3.

9. the adjustment mechanism includes an adjustment mechanism that adjusts the incident position or incident angle of the beam incident on the optical integrator so that the incident angle of the illumination light irradiated on the spatial light modulation element is changed, or an adjustment mechanism that adjusts the relative positional relationship between the optical integrator and the condenser lens system in a decentering direction.

9. The exposure apparatus according to claim 8.

10. the control unit stores information about illuminance fluctuations of the imaging light beam that occur in accordance with the density distribution of the micromirrors in the ON state of the spatial light modulation element.

2. The exposure apparatus according to claim 1.

11. the illumination unit includes an illuminance adjustment filter that changes the illuminance of the illumination light irradiated onto the spatial light modulation element, the adjustment mechanism includes a mechanism for controlling the illuminance adjustment filter based on information about the illuminance fluctuation. The exposure apparatus according to claim 10.

12. the control unit stores information about illuminance fluctuations of the imaging light beam that occur in accordance with the density distribution of the micromirrors in the ON state of the spatial light modulation element; a moving speed of the stage device when projecting the imaging light beam onto the substrate is adjusted based on the information regarding the illuminance fluctuation; 6. The exposure apparatus according to claim 5.

13. the projection unit includes a plurality of lenses disposed before and after the exit pupil, and an optical member that corrects an image plane tilt that occurs when the angle of the spatial light modulation element is adjusted by the adjustment mechanism.

4. The exposure apparatus according to claim 3.

14. the projection unit includes a plurality of lenses disposed before and after the exit pupil; the positions of some of the plurality of lenses are adjusted in a decentering direction so that an image plane tilt that occurs when the angle of the spatial light modulation element is adjusted by the adjustment mechanism is corrected; 4. The exposure apparatus according to claim 3.

15. the control unit determines the magnitude of the telecentric error of the imaging light beam when half or more of all the micromirrors of the spatial light modulation element are in an on state, based on the drawing data.

2. The exposure apparatus according to claim 1.

16. the plurality of micromirrors of the spatial light modulation element are two-dimensionally arranged along a first direction and a second direction that are orthogonal to each other within a neutral plane, when a reflective surface that is flat when not driven is defined as the neutral plane; the control unit determines, based on the drawing data, the magnitude of the telecentric error when several or more of the micromirrors adjacent in both the first direction and the second direction are in the on-state micromirrors.

2. The exposure apparatus according to claim 1.

17. and when the pattern to be exposed is a line and space pattern, the control unit determines the magnitude of the telecentric error based on the periodicity and periodic direction of the arrangement of the micromirrors in the on state among the micromirrors of the spatial light modulation element, based on the drawing data.

2. The exposure apparatus according to claim 1.

18. the adjustment mechanism adjusts the position or angle of the optical member when the magnitude of the telecentric error determined by the control unit exceeds an allowable range. The exposure apparatus according to claim 15.

19. the tolerance is set to within ±2° as an inclination angle of a chief ray of the imaging light beam directed from the projection unit to the substrate with respect to an optical axis.

19. The exposure apparatus according to claim 18.

20. the illumination unit includes a surface light source generating member that receives a beam from a laser light source device and generates a surface light source of the illumination light, and a condenser lens system that receives the illumination light from the surface light source and performs Koehler illumination on a reflection surface of the spatial light modulation element, the adjustment mechanism adjusts the relative positional relationship between the surface light source and the condenser lens system in a decentering direction.

2. The exposure apparatus according to claim 1.

21. The adjustment mechanism includes a first telecentric adjustment mechanism that shifts the position of the beam from the laser light source device that is incident on the surface light source member in the eccentric direction, a second telecentric adjustment mechanism that shifts the position of the surface light source member in the eccentric direction relative to the beam from the laser light source device, and a third telecentric adjustment mechanism that shifts the position of the condenser lens system in the eccentric direction relative to the position of the surface light source generated by the surface light source member.

21. The exposure apparatus according to claim 20.

22. the illumination unit includes a mirror as the optical member that reflects the illumination light at a predetermined angle; the adjustment mechanism changes the angle of the mirror to adjust the angle of incidence of the illumination light irradiated onto the spatial light modulation element.

21. The exposure apparatus according to claim 20.

23. when the reflective surface of the micromirror in the on state of the spatial light modulator is tilted by an angle θd (θd>0°) in design with respect to a plane perpendicular to the optical axis of the projection unit, the illumination unit is set to an oblique illumination method in which an incident angle θα of the illumination light from the condenser lens system to the spatial light modulator is θα=2 θd in design, and the incident angle θα is adjusted by the adjustment mechanism.

21. The exposure apparatus according to claim 20.

24. a light splitter disposed in an optical path between the spatial light modulator and the projection unit; when the reflective surface of the micromirror in the on state of the spatial light modulator is set to a design angle θd=0° with respect to a plane perpendicular to the optical axis of the projection unit, the illumination unit is set to an epi-illumination method in which the illumination light from the condenser lens system is irradiated onto the spatial light modulator at an incident angle θα=0° via the light splitter, and the incident angle θα is adjusted by the adjustment mechanism.

21. The exposure apparatus according to claim 20.

25. a step of identifying a telecentric error of the imaging light beam that occurs depending on the distribution state of the micromirrors in the ON state of the spatial light modulation element, or a light intensity fluctuation error of the imaging light beam that occurs due to a driving error of the micromirrors in the ON state; the correction information includes information for correcting the state of the imaging light beam based on the light intensity variation error, and using the exposure apparatus according to any one of claims 1 to 24, when the imaging light beam is incident on the substrate, adjusting the installation state of the spatial light modulation element for each module based on the correction information; A device manufacturing method comprising:

26. and exposing the substrate using the exposure apparatus according to any one of claims 1 to 24. Device manufacturing methods.

27. the correction information corrects the effective illuminance on the substrate by changing the line width of the actual exposure pattern projected onto the substrate; 26. The device manufacturing method of claim 25.

28. a step of identifying telecentric error, asymmetric error, or light intensity fluctuation error based on the generation state of diffracted light defined according to the distribution state in each of an isolated pattern in which one or several of the on-state micromirrors are arranged independently or in a row, a line and space pattern in which the on-state micromirrors are arranged so that the isolated patterns are arranged at a regular interval, or a land pattern in which the on-state micromirrors are densely arranged so that the dimensions are several times larger than those of the isolated pattern, a reflective surface of the micromirror in the on state of the spatial light modulation element is set to be inclined by an angle θd (θd≧0°) in design with respect to a plane perpendicular to the optical axis of the projection unit, and includes an angular error of ±Δθd as a drive error of the micromirror in the on state; an incident angle θα of the illumination light from the illumination unit to the spatial light modulation element is set to satisfy θα=2·θd in design; 26. The device manufacturing method of claim 25.

29. In the step of identifying, The telecentric error of the imaging light beam when the micromirror in the on state generates the isolated pattern is identified as the angular error ±Δθd.

29. The device manufacturing method of claim 28.

30. When the arrangement pitch of the micromirrors is Pdx, n is a real number, the wavelength of the illumination light is λ, and the angle for each order j (j=0, 1, 2, . . . ) of the diffracted light is θj, In the step of identifying, The telecentricity error of the imaging beam when the on-state micromirror generates the land-like pattern is sinθj=j・(λ / (n・Pdx))−sinθα the angle of the j-th order diffracted light having a small inclination from the optical axis of the projection unit among the multiple orders of diffracted light defined by 29. The device manufacturing method of claim 28.

31. In the step of identifying, specifying the light intensity fluctuation error of the imaging light flux based on the degree of decentering of a point image intensity distribution at an exit pupil of the projection unit of the light reflected from a single micromirror in the ON state, the point image intensity distribution corresponding to the angular error ±Δθd; generating a test pattern belonging to any one of the isolated pattern, the line and space pattern, and the land pattern using the spatial light modulation element, and identifying the asymmetric error based on an intensity distribution of a projected image of the test pattern projected via the projection unit; and measuring a deviation in intensity distribution of the imaging light beam formed at an exit pupil of the projection unit in a state in which the imaging light beam corresponding to any one of the isolated pattern, the line and space pattern, or the land pattern generated by the spatial light modulation element is projected by the projection unit, thereby identifying the telecentric error.

29. The device manufacturing method of claim 28.

32. A control method for an exposure apparatus including a module including: an illumination unit that irradiates illumination light onto a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data; and a projection unit that causes reflected light from the on-state micromirrors of the spatial light modulation element to be incident on a substrate as an imaging light beam, and projects a device pattern corresponding to the drawing data onto the substrate, the method comprising: adjusting an angular change of the imaging light beam that occurs based on a distribution of micromirrors in an on-state of the spatial light modulation element; adjusting a line width change of the device pattern caused by adjusting the angle change by correcting the drawing data; A control method comprising:

33. adjusting the angle change includes adjusting a position or angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulator; 33. The control method of claim 32.

34. correcting the drawing data includes correcting a line width of pattern data included in the drawing data; 33. The control method of claim 32.

35. a plurality of the modules; adjusting the angle change and adjusting the line width change for each module; The control method according to any one of claims 32 to 34.

36. a module including: a spatial light modulation element including a plurality of micromirrors that are driven to switch between an on state and an off state based on drawing data; an illumination unit that irradiates illumination light onto the spatial light modulation element; and a projection unit that projects reflected light from the on-state micromirrors of the spatial light modulation element onto a substrate as an imaging light beam; a control unit that stores illuminance-related information including an illuminance difference of the imaging light beam that occurs depending on the distribution density of the micromirrors in the ON state of the spatial light modulation element and the angle error of the tilt angle of the micromirrors in the ON state; an adjustment mechanism that adjusts a position or angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, in accordance with the illuminance-related information when driving the spatial light modulation element based on the drawing data to project the imaging light beam onto the substrate; An exposure apparatus comprising:

37. a plurality of the modules; a measurement mechanism that measures an illuminance difference between the plurality of modules of the imaging light beam that occurs in accordance with the distribution density and the angle error, when projecting the imaging light beam onto the substrate, the adjustment mechanism adjusts a position or angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, and adjusts the illuminance of the imaging light beam, in accordance with the illuminance-related information including the measured illuminance difference.

37. The exposure apparatus according to claim 36.

38. a plurality of the modules; a calculation unit that substantially calculates an illuminance difference between the plurality of modules of the imaging light beam that occurs in accordance with the distribution density and the angle error and a line width error that occurs due to an imaging state of the imaging light beam, and applies a correction to the line width of the drawing data; 37. The exposure apparatus according to claim 36.

39. When a first pattern is projected onto a projection area using a plurality of modules, each of which includes a spatial light modulator, information including an angle at which a chief ray of light from the module is inclined with respect to an optical axis of the module, or a value corresponding to said angle, is acquired for each of the plurality of modules; and adjusting the plurality of modules based on the information. Adjustment method.

40. Adjusting the plurality of modules includes adjusting the plurality of modules based on the information such that the difference in angle between the plurality of modules is reduced.

40. The method of claim 39.

41. The method includes selecting the first pattern from a plurality of different patterns.

40. The method of claim 39.

42. Each of the plurality of modules includes a projection unit that projects light from the spatial light modulator onto the projection area, a value corresponding to the angle included in the information includes a position of a center of an intensity distribution of light from the spatial light modulator at a pupil position of the projection unit; 40. The method of claim 39.

43. The method includes obtaining a position of a center of the intensity distribution by measuring the pupil position.

43. The adjusting method according to claim 42.

44. The method includes calculating the information based on the amount of change in state of the mirror in each of the plurality of modules when the mirror included in the spatial light modulator changes from a first state to a second state, or the difference in the amount of change in state between the plurality of modules, and the first pattern.

40. The method of claim 39.

45. In the first state, light from the mirror is incident on a part other than a projection unit included in the module, In the second state, light from the mirror is incident on a projection unit included in the module, The state change amount includes a tilt angle.

45. The adjusting method according to claim 44.

46. Each of the plurality of modules includes an illumination unit that irradiates light onto the spatial light modulator, and a projection unit that projects the light from the spatial light modulator onto the projection area, adjusting the plurality of modules includes adjusting a position or an angle of an optical member in the illumination unit or the projection unit, or an angle of the spatial light modulation element, for each of the plurality of modules.

40. The method of claim 39.

47. The method according to claim 47, comprising: An exposure apparatus that performs the adjustment method according to any one of claims 39 to 46.

48. Performing the adjustment method according to any one of claims 39 to 46; exposing a device pattern onto a substrate placed in the projection area using an exposure apparatus including the plurality of modules adjusted by the adjustment method; Manufacturing method.