Analysis device, analysis method, and program

Abstract

The present invention efficiently performs analysis regarding the amount of an analyte and analysis regarding an element. An analysis device (100) comprises a radiation source, a detector (5), and an analysis unit (6). The radiation source irradiates particulate matter (FP) with radiation. The detector (5) detects transmitted radiation passing through the particulate matter (FP) and a fluorescent X-ray generated through the irradiation of the particulate matter (FP) with radiation. The analysis unit (6) performs analysis regarding the amount of the particulate matter (FP) on the basis of the transmitted radiation detected by the detector (5), and performs analysis regarding an element contained in the particulate matter (FP) on the basis of the fluorescent X-ray detected by the detector (5).

Description

Analysis device, analysis method, and program

[0001] The present invention relates to an analytical device, an analytical method, and a program for performing analysis regarding the amount of an analyte and analysis regarding elements contained in the analyte.

[0002] Known devices for analyzing an object to be analyzed include those capable of performing analysis of the amount of the object to be analyzed (e.g., measurement of mass concentration) based on the amount of beta rays that have passed through the object to be analyzed, and of performing analysis of elements contained in the object to be analyzed based on fluorescent X-rays that are generated when the object to be analyzed is irradiated with X-rays (e.g., Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2005-134270

[0004] In the above-described device, particulate matter to be analyzed is collected on a collection filter to measure its mass concentration, and then the collection filter is moved to change the particulate matter collection area. At the new location, the particulate matter is irradiated with X-rays to generate fluorescent X-rays, and the elements contained in the particulate matter are analyzed. In other words, conventional devices have separate locations for measuring mass concentration and analyzing elements. Therefore, the collection filter needs to be moved to perform both mass concentration and elemental analysis, which can reduce the efficiency of analyzing the object.

[0005] An object of the present invention is to efficiently perform analysis of the quantity of an analyte and analysis of elements.

[0006] Below, several aspects will be described as means for solving the problems. These aspects can be combined as desired as necessary. An analytical device according to one aspect of the present invention includes a radiation source, a detector, and an analysis unit. The radiation source irradiates a sample with radiation. The detector detects transmitted radiation that has passed through the sample and fluorescent X-rays generated by irradiating the sample with the radiation. The analysis unit analyzes the amount of the sample based on the transmitted radiation detected by the detector, and analyzes the elements contained in the sample based on the fluorescent X-rays detected by the detector.

[0007] In the above analytical device, the detector detects both the transmitted radiation used to analyze the quantity of the sample and the fluorescent X-rays used to analyze the elements of the sample. In other words, the transmitted radiation and the fluorescent X-rays are detected at the same position. This eliminates the need to move the sample in order to detect both the transmitted radiation and the fluorescent X-rays, allowing for efficient sample analysis. Furthermore, since there is no need to provide separate detectors for detecting the transmitted radiation and the fluorescent X-rays, the cost of the analytical device can be reduced.

[0008] In the above analytical device, the radiation source may include a β-ray source that irradiates the sample with β-rays. In this case, the transmitted radiation may be transmitted β-rays that are transmitted through the sample among the β-rays irradiated by the β-ray source. This allows the amount of the sample to be analyzed using the transmitted β-rays that have transmitted through the sample.

[0009] In the above analytical device, the radiation source may include an X-ray source that irradiates the sample with X-rays. In this case, the fluorescent X-rays may be generated by irradiating the sample with X-rays. This allows analysis of elements contained in the sample to be performed using the fluorescent X-rays generated by irradiating the sample with X-rays.

[0010] In the above-described analytical device, the sample may be particulate matter contained in the sample gas. In this case, the analytical device may further include a holding member and a trapping device. The holding member has a first surface and a second surface opposite to the first surface, and holds the sample. The trapping device causes the holding member to trap the particulate matter by passing the sample gas through the holding member. Furthermore, the radiation source and the detector may be disposed within the trapping device. This allows the analytical device to be made compact. Furthermore, the particulate matter can be irradiated with high-intensity radiation with little attenuation, and penetrating radiation and fluorescent X-rays with little attenuation can be detected by the detector.

[0011] In the above-described analytical device, the β-ray source may be disposed on the first surface side of the holding member, while the X-ray source and the detector may be disposed on the second surface side of the holding member, thereby enabling the detector to reliably detect transmitted β-rays and fluorescent X-rays.

[0012] In the above-described analytical device, the irradiation of X-rays may be switched on and off. When the detector detects transmitted β rays, the irradiation of X-rays may be stopped. This allows the transmitted β rays to be detected without being affected by fluorescent X-rays, thereby enabling accurate analysis of the amount of sample.

[0013] In the above-described analytical device, the detector may be a silicon drift detector, which allows the detector to detect transmitted radiation and fluorescent X-rays with high sensitivity.

[0014] In the above analytical device, the fluorescent X-rays may be generated by irradiating a sample with β rays, thereby enabling analysis of elements contained in the sample to be performed using the fluorescent X-rays generated by irradiating the sample with β rays.

[0015] An analytical method according to another aspect of the present invention is a method for analyzing a sample using an analytical device equipped with a detector for detecting radiation. The analytical method comprises the following steps: irradiating the sample with radiation; detecting, with a detector, transmitted radiation that has passed through the sample and fluorescent X-rays generated by irradiating the sample with the radiation; analyzing the amount of the sample based on the transmitted radiation detected by the detector; and analyzing the elements contained in the sample based on the fluorescent X-rays detected by the detector.

[0016] In the above analytical method, the detector detects both the transmitted radiation used to analyze the quantity of the sample and the fluorescent X-rays used to analyze the elements in the sample. In other words, the transmitted radiation and the fluorescent X-rays are detected at the same position. This eliminates the need to move the sample in order to detect both the transmitted radiation and the fluorescent X-rays, allowing for efficient sample analysis.

[0017] A program according to yet another aspect of the present invention is a program for causing a computer to execute a method for analyzing a sample using an analytical device equipped with a detector for detecting radiation. The analytical method includes the following steps: irradiating a sample with radiation; detecting, with a detector, transmitted radiation that has passed through the sample and fluorescent X-rays generated by irradiating the sample with the radiation; analyzing the amount of the sample based on the transmitted radiation detected by the detector; and analyzing the elements contained in the sample based on the fluorescent X-rays detected by the detector.

[0018] In the above-described analytical device, the transmitted radiation and the fluorescent X-rays are detected at the same position, so there is no need to move the sample in order to detect both the transmitted radiation and the fluorescent X-rays, and the sample can be analyzed efficiently.

[0019] FIG. 1 is a diagram showing the configuration of an analysis device according to a first embodiment. FIG. 2 is a flowchart showing the operation of analyzing particulate matter. FIG. 3 is a diagram showing the flow of sample gas inside a nozzle. FIG. 4 is a diagram showing the propagation path of β rays inside a nozzle and a suction unit. FIG. 5 is a diagram showing the propagation paths of X-rays and fluorescent X-rays. FIG. 6 is a diagram showing the configuration of an analysis device according to a second embodiment.

[0020] 1. First Embodiment (1) Overview of the Analytical Apparatus The analytical apparatus 100 will be described below. The analytical apparatus 100 is an apparatus capable of analyzing the amount of a sample held in a holding member and analyzing the elements contained in the sample. The analysis of the amount of the sample is performed by irradiating the sample with β rays and based on the intensity of the β rays that pass through the sample (referred to as transmitted β rays). The analysis of the elements contained in the sample is performed based on fluorescent X-rays generated from the sample when the sample is irradiated with X-rays. In the analytical apparatus 100, the transmitted β rays and fluorescent X-rays are detected by a single detector.

[0021] The analysis target of the analysis device 100 is particulate matter (FP) contained in a sample gas (Gs). The sample gas (Gs) may be, for example, the atmosphere or a gas generated in various combustion processes. Examples of such combustion processes include combustion processes in thermal power plants, steel plants, incinerators, and coal combustion processes. In such combustion processes, for example, unburned matter in ash, fly ash, and the like are generated as particulate matter (FP).

[0022] Other examples of particulate matter FP to be analyzed include dust generated from various transportation devices (such as automobiles or ships) (dust from brakes, tires, internal combustion engines, steam engines, or exhaust gas purification devices and motors), dust generated by natural disasters such as volcanic eruptions (e.g., volcanic ash), and dust generated during mining development.

[0023] The analysis device 100 detects transmitted β rays that have passed through the particulate matter FP held by the holding member and fluorescent X-rays that are generated by irradiating the particulate matter FP held by the holding member with X-rays. In other words, the sample in the analysis device 100 is the particulate matter FP held by the holding member.

[0024] (2) Configuration of the Analysis Apparatus The configuration of the analysis apparatus 100 will be described below with reference to Fig. 1. Fig. 1 is a diagram showing the configuration of the analysis apparatus according to the first embodiment. The analysis apparatus 100 includes a holding member 1, a collection device 2, a β-ray source 3, an X-ray source 4, a detector 5, and an analysis unit 6.

[0025] The holding member 1 has a first surface SU1 and a second surface SU2 opposite to the first surface SU1, and is a member for capturing particulate matter FP contained in the sample gas Gs. The holding member 1 is a collection filter formed by laminating a collection layer formed of a porous fluororesin material having pores capable of capturing particulate matter FP on a reinforcing layer formed of a nonwoven fabric of a polymer material (such as polyethylene). The above-described configuration allows gas to flow through the holding member 1 in the thickness direction of the holding member 1 while improving its strength. Furthermore, the holding member 1 can be made less susceptible to electrostatic charge. Other filters, such as a single-layer glass filter or a single-layer fluororesin material filter, can also be used as the holding member 1.

[0026] The analysis device 100 includes a moving unit 11. The moving unit 11 moves the holding member 1 in the longitudinal direction. The moving unit 11 has a take-up reel 11a and a supply reel 11b. The take-up reel 11a is connected to one end of the holding member 1 in the longitudinal direction. The take-up reel 11a is rotatable in a predetermined direction by, for example, a motor. The supply reel 11b is connected to the other end of the holding member 1. The supply reel 11b rotates in accordance with the movement of the holding member 1.

[0027] With this configuration, the holding member 1 can be fed from the feed reel 11b and wound onto the take-up reel 11a by rotating the take-up reel 11a in the moving unit 11. In other words, the holding member 1 can be moved in the length direction of the holding member 1 (the direction indicated by the thick arrow in FIG. 1) by rotating the take-up reel 11a.

[0028] The mechanism for moving the holding member 1 is not limited to the above mechanism. For example, a pin may be provided in the width direction of the holding member 1, and the direction of movement of the holding member 1 may be changed before and after passing through the pin. Also, a tension controller may be provided in the holding member 1 to adjust the tension.

[0029] The collection device 2 collects particulate matter FP contained in the sample gas Gs in the holding member 1. The collection device 2 has a nozzle 21, a suction unit 23, and a suction pump 25. The nozzle 21 is provided at a position facing the first surface SU1 of the holding member 1. The nozzle 21 passes the sample gas Gs from the first surface SU1 side to the second surface SU2 side of the holding member 1, and collects the particulate matter FP contained in the sample gas Gs in the holding member 1.

[0030] The nozzle 21 has a gas flow path 21 a and an outlet opening 21 b. The gas flow path 21 a is arranged inside the nozzle 21 in the longitudinal direction of the nozzle 21 (the normal direction D of the holding member 1). Ｎ The gas flow path 21a extends in the normal direction D of the holding member 1. Ｎ By forming the holding member 1 so as to extend in the direction perpendicular to the gas flow path, it is possible to prevent particulate matter FP contained in the sample gas Gs from accumulating in the gas flow path, thereby increasing the efficiency with which the particulate matter FP is captured by the holding member 1.

[0031] In addition, the normal direction D Ｎ The normal direction D is not limited to a direction in which the angle formed with the first surface SU1 / second surface SU2 of the holding member 1 is 90°, and the angle formed with the first surface SU1 of the holding member 1 may be slightly different from 90°. Ｎ can be defined as a direction that forms an angle of 80° to 100° with the surface of the holding member 1.

[0032] The outlet opening 21b is an opening formed at the end of the gas flow path 21a on the side where the holding member 1 is disposed. The outlet opening 21b is provided to face the first surface SU1 of the holding member 1, and serves as an outlet for the sample gas Gs that has flowed through the gas flow path 21a. The end of the gas flow path 21a opposite to the side where the holding member 1 is disposed is connected to an inlet for the sample gas Gs.

[0033] The analytical device 100 may also include a diluter that dilutes the sample gas Gs with a gas such as air. The diluter is provided, for example, between the gas flow path 21a and the inlet for the sample gas Gs. The sample gas Gs may contain a high concentration of particulate matter FP. By diluting the sample gas Gs, the concentration of particulate matter FP contained in the diluted sample gas Gs can be reduced. As a result, the possibility of contamination of the nozzle 21 (including the gas flow path 21a, outlet opening 21b, etc.) and / or clogging of the holding member 1 can be reduced.

[0034] The analyzer 100 may also include a classifier that classifies the particulate matter FP contained in the sample gas Gs. The classifier is provided, for example, between the gas flow path 21 a and the intake port for the sample gas Gs. This allows the particulate matter FP of the classified size to be collected in the holding member 1.

[0035] The gas flow path 21 a may extend in the direction of gravity inside the nozzle 21. This prevents the particulate matter FP from accumulating in the gas flow path 21 a, and allows a larger amount of the particulate matter FP to be collected by the holding member 1, thereby improving the accuracy of analysis of the particulate matter FP.

[0036] The nozzle 21 has a first radiation source installation space 21c. The first radiation source installation space 21c is located at a position outside the gas flow path 21a inside the nozzle 21, and is aligned in the normal direction D of the holding member 1. Ｎ The first radiation source installation space 21c is a space formed by extending in a direction inclined with respect to the gas flow path 21a. The β-ray source 3 is provided in the first radiation source installation space 21c. The first radiation source installation space 21c merges with the gas flow path 21a at the outlet opening 21b. As a result, the gas flow path 21a and the first radiation source installation space 21c communicate with the external space via the common outlet opening 21b.

[0037] The nozzle 21 may be movable in a direction approaching the first surface SU1 of the holding member 1 and in a direction away from the first surface SU1. In this case, for example, collection of particulate matter FP on the holding member 1 and analysis of the particulate matter FP are performed with the nozzle 21 brought close to the first surface SU1 and the holding member 1 sandwiched and fixed together with the suction unit 23. On the other hand, for example, movement of the holding member 1 and maintenance of the analysis device 100 (e.g., replacement of the holding member 1) are performed with the nozzle 21 moved away from the first surface SU1.

[0038] The suction unit 23 is provided on the second surface SU2 side of the holding member 1 so as to face the nozzle 21. The suction unit 23 is provided close to the second surface SU2 of the holding member 1. The suction unit 23 is provided with a detector installation space 23a, a second radiation source installation space 23b, an entrance opening 23c, and a suction opening 23d.

[0039] A detector 5 is provided in the detector installation space 23a. The detector installation space 23a is provided at a position where it can detect transmitted β rays that are irradiated from the β-ray source 3 provided in the first radiation source installation space 21c and that have passed through the particulate matter FP held in the holding member 1, and where it can detect fluorescent X-rays that are generated by X-rays that are irradiated from the X-ray source 4 provided in the second radiation source installation space 23b onto the particulate matter FP held in the holding member 1.

[0040] Preferably, the detector installation space 23a may be provided on the second surface SU2 side of the holding member 1. Preferably, the detector installation space 23a may be provided so that a line segment connecting the vicinity of the center of the radiation receiving surface of the detector 5 provided in the detector installation space 23a and the vicinity of the center of the emission port of the β-ray source 3 passes through the collection region of the particulate matter FP. More preferably, the detector installation space 23a may be provided in the suction unit 23 so that the detector 5 and the β-ray source 3 are arranged so that the line segment passes through the vicinity of the center of the collection region. Preferably, the detector installation space 23a may be provided at a position facing the first radiation source installation space 21c (β-ray source 3) across the holding member 1. Preferably, the detector installation space 23a is inclined in the normal direction D at approximately the same angle as the inclination angle of the first radiation source installation space 21c in the nozzle 21. ＮThat is, the detector 5 may be inclined with respect to the normal direction D Ｎ The tilt angle relative to the beta ray source 3 may be approximately the same as the tilt angle of the irradiation direction of beta rays emitted from the beta ray source 3. Note that "approximately" includes cases where the angle is completely the same or completely perpendicular, as well as cases where the angle is slightly off but the light receiving surface of the detector 5 can receive beta rays from the beta ray source 3.

[0041] The second radiation source installation space 23b is provided with an X-ray source 4. The second radiation source installation space 23b is provided at a position where fluorescent X-rays generated from the particulate matter FP by irradiating the particulate matter FP with X-rays irradiated from the X-ray source 4 can be detected by the detector 5 provided in the detector installation space 23a. Preferably, the second radiation source installation space 23b may be provided on the second surface SU2 side of the holding member 1, i.e., on the same side as the side where the detector installation space 23a is provided. Preferably, the second radiation source installation space 23b is provided in a direction perpendicular to the normal direction D Ｎ In the direction opposite to the inclination direction of the detector installation space 23a, Ｎ In other words, the inclination angle of the irradiation direction of the X-rays from the X-ray source 4 provided in the second radiation source installation space 23b may be inclined at approximately the same angle as the inclination angle of the detector installation space 23a with respect to the normal direction D of the detector 5 provided in the detector installation space 23a. Ｎ In other words, the irradiation direction of the fluorescent X-rays generated from the particulate matter FP irradiated with X-rays may be substantially perpendicular to the radiation receiving surface of the detector 5.

[0042] The inlet opening 23c is provided to face the second surface SU2 of the holding member 1, and serves as an inlet for the sample gas Gs that is discharged from the nozzle 21 and passes through the holding member 1. The inlet opening 23c is connected to the detector installation space 23a and the second radiation source installation space 23b. That is, the detector installation space 23a and the second radiation source installation space 23b communicate with the external space via the common inlet opening 23c.

[0043] The suction opening 23d is an opening connected to the internal space of the suction unit 23 (the detector installation space 23a, the second radiation source installation space 23b, and the entrance opening 23c).

[0044] The suction pump 25 is connected to the suction opening 23d. The suction pump 25 suctions the internal space of the suction unit 23 connected to the suction opening 23d. When the suction pump 25 suctions the internal space of the suction unit 23, a suction force is generated at the inlet opening 23c of the suction unit 23. The suction force generated at the inlet opening 23c extends to the outlet opening 21b and the gas flow path 21a connected thereto, and the sample gas Gs is sucked into the gas flow path 21a and discharged from the outlet opening 21b. The sample gas Gs discharged from the outlet opening 21b passes through the holding member 1 and is sucked into the internal space of the suction unit 23 via the inlet opening 23c. As the sample gas Gs passes through the holding member 1, particulate matter FP contained in the sample gas Gs is collected and held by the holding member 1. The sample gas Gs sucked into the internal space of the suction unit 23 is discharged to the outside by the suction pump 25.

[0045] The β-ray source 3 is provided at a position where the detector 5 can detect β-rays emitted from the β-ray source 3. Preferably, the β-ray source 3 may be arranged with respect to the detector 5 so that a line segment connecting the vicinity of the center of the radiation receiving surface of the detector 5 and the vicinity of the center of the outlet of the β-ray source 3 passes through the collection region of the particulate matter FP. More preferably, the β-ray source 3 may be arranged with respect to the detector 5 so that the line segment passes near the center of the collection region. Preferably, the β-ray source 3 may be provided in the first radiation source installation space 21c of the nozzle 21. That is, the β-ray source 3 may be provided on the first surface SU1 side of the holding member 1. Preferably, the β-ray source 3 may be provided at a position facing the detector 5 across the holding member 1. Preferably, the β-ray source 3 is arranged so that the β-ray source 3 is aligned with the normal direction D of the holding member 1. Ｎ Preferably, the normal direction D of the β-ray source 3 Ｎ The tilt angle with respect to the normal direction D of the detector 5 Ｎ The β-ray source 3 outputs β-rays from the first surface SU1 side of the holding member 1 to irradiate the particulate matter FP captured by the holding member 1. The β-ray source 3 emits, for example, carbon-14 ( １４ C), Strontium 90 ( ９０ Sr), Promethium 147 ( １４７By using these as a beta ray source, it is possible to suppress the generation of unnecessary radiation such as gamma rays.

[0046] A portion of the β rays irradiated onto the first surface SU1 side of the holding member 1 pass through the particulate matter FP trapped in the holding member 1 and exit from the second surface SU2 of the holding member 1. The analysis device 100 calculates information about the amount of particulate matter FP trapped in the holding member 1 based on the intensity of the β rays (called transmitted β rays) that pass through the particulate matter FP and exit from the second surface SU2. The information about the amount of particulate matter FP is, for example, the mass concentration of the particulate matter FP. The "mass concentration of particulate matter FP" is defined as the mass of particulate matter contained in the total volume of collected gas, expressed as a value per unit volume of collected gas, and is expressed as, for example, μg / m ３ can be used as a unit.

[0047] By providing the β-ray source 3 in the first radiation source installation space 21c, the β-ray source 3 is Ｎ As a result, the β-ray source 3 is prevented from interfering with the flow of the sample gas Gs in the gas flow passage 21 a, and the particulate matter FP can be collected evenly and uniformly on the holding member 1.

[0048] Furthermore, by providing the first radiation source installation space 21c in which the β-ray source 3 is provided inside the nozzle 21, the β-ray source 3 can be installed inside the nozzle 21, and therefore β-rays can be output from a position close to the first surface SU1 of the holding member 1. As a result, β-rays with high intensity and little attenuation can be irradiated onto the particulate matter FP collected in the holding member 1.

[0049] As described above, the gas flow path 21a of the nozzle 21 and the first radiation source installation space 21c are connected to the external space via the common outlet opening 21b. This allows the sample gas Gs flowing through the gas flow path 21a and the beta rays output from the beta ray source 3 provided in the first radiation source installation space 21c to be emitted from the common outlet opening 21b toward the holding member 1. As a result, the collection area of ​​the particulate matter FP and the irradiation area of ​​the beta rays can be made to coincide with each other.

[0050] The X-ray source 4 is provided at a position where the detector 5 can detect fluorescent X-rays generated from the particulate matter FP by the X-rays irradiated from the X-ray source 4. Preferably, the X-ray source 4 may be provided in the second radiation source installation space 23b of the suction unit 23. That is, the X-ray source 4 may be provided on the second surface SU2 side of the holding member 1. Preferably, the X-ray source 4 is provided in a position where the fluorescent X-rays are irradiated from the particulate matter FP by the X-rays irradiated from the X-ray source 4. Ｎ Preferably, the X-ray source 4 is tilted relative to the normal direction D Ｎ , the X-ray source 4 may be disposed in the direction opposite to the tilt direction of the detector 5 with respect to the normal direction D Ｎ In the direction opposite to the tilt direction of the detector 5, Ｎ 4 is tilted at approximately the same angle as the tilt angle of the detector 5 with respect to the normal direction D of the detector 5. Ｎ The angle of inclination of the detector 5 may be approximately the same as the angle of inclination of the detector 5. In other words, the irradiation direction of the fluorescent X-rays generated from the particulate matter FP may be approximately perpendicular to the radiation receiving surface of the detector 5. The X-ray source 4 irradiates the particulate matter FP collected in the holding member 1 with X-rays from the second surface SU2 side of the holding member 1. The X-ray source 4 is, for example, a device that generates X-rays by irradiating a metal such as palladium with an electron beam.

[0051] When X-rays are irradiated onto the particulate matter FP from the second surface SU2 side of the holding member 1, fluorescent X-rays are generated from the particulate matter FP. These fluorescent X-rays have a profile corresponding to the elements contained in the particulate matter FP and their amounts. The analysis device 100 can perform analysis of the elements contained in the holding member 1 (i.e., elemental analysis) based on the fluorescent X-rays generated from the particulate matter FP irradiated with X-rays.

[0052] In the analysis device 100, the irradiation state of the X-rays on the analysis target (particulate matter FP) can be switched between an irradiation ON state (a state in which X-rays are irradiated) in which X-rays from the X-ray source 4 are irradiated on the analysis target, and an irradiation OFF state (a state in which X-ray irradiation is stopped) in which X-rays from the X-ray source 4 are not irradiated on the analysis target. For example, under the control of the analysis unit 6, the irradiation state can be set to the irradiation ON state by switching the X-ray source 4 to the ON state in which X-rays are generated, and the irradiation state can be set to the irradiation OFF state by switching the X-ray source 4 to the OFF state in which X-ray generation is stopped. Alternatively, for example, a shutter may be provided at the X-ray irradiation port (second source installation space 23b), and the irradiation ON state and the irradiation OFF state may be switched by opening and closing this shutter. This allows the detector 5 to switch between a state in which only transmitted β rays are detected and a state in which fluorescent X-rays (and transmitted β rays) generated by irradiating the particulate matter FP with X-rays are detected.

[0053] The detector 5 is positioned so as to detect beta rays irradiated from the beta ray source 3 provided in the first radiation source installation space 21c and passing through the particulate matter FP held in the holding member 1, and also so as to detect fluorescent X-rays generated by X-rays irradiated from the X-ray source 4 provided in the second radiation source installation space 23b onto the particulate matter FP held in the holding member 1.

[0054] Preferably, the detector 5 may be disposed with respect to the β-ray source 3 so that a line segment connecting the vicinity of the center of the radiation receiving surface of the detector 5 and the vicinity of the center of the emission port of the β-ray source 3 passes through the collection region of the particulate matter FP. More preferably, the detector 5 may be disposed with respect to the β-ray source 3 so that the line segment passes near the center of the collection region. Preferably, the detector 5 may be provided in the detector installation space 23a of the suction unit 23. That is, the detector 5 may be provided on the second surface SU2 side of the holding member 1, similar to the X-ray source 4. Preferably, the detector 5 may be provided at a position facing the β-ray source 3. Preferably, the detector 5 is oriented in the normal direction D at approximately the same angle as the inclination angle of the β-ray source 3. Ｎ That is, the normal direction D of the detector 5 may be inclined. ＮThe tilt angle with respect to the β-ray source 3 may be approximately the same as the tilt angle of the irradiation direction of the β-rays emitted from the β-ray source 3. This allows the detector 5 to detect transmitted β-rays generated when the β-rays output from the β-ray source 3 pass through the particulate matter FP.

[0055] The detector 5 is provided at a position where it can detect fluorescent X-rays generated from the particulate matter FP by the X-rays irradiated from the X-ray source 4. Preferably, the detector 5 is positioned such that it can detect fluorescent X-rays generated from the particulate matter FP by the X-rays irradiated from the X-ray source 4. Ｎ In the direction opposite to the X-ray source 4, the normal direction D Ｎ , at an angle substantially equal to the inclination angle of the X-ray source 4. That is, the normal direction D Ｎ The tilt angle with respect to the normal direction D of the detector 5 Ｎ In other words, the radiation receiving surface of the detector 5 may be substantially perpendicular to the irradiation direction of the fluorescent X-rays generated from the particulate matter FP. This allows the detector 5 to detect the fluorescent X-rays generated by the X-ray source 4 irradiating the particulate matter FP with X-rays.

[0056] In this way, the detector 5 can detect both transmitted beta rays generated when beta rays from the beta-ray source 3 pass through the particulate matter FP, and fluorescent X-rays generated from the particulate matter FP when irradiated with X-rays from the X-ray source 4. That is, transmitted beta rays and fluorescent X-rays can be detected in a single location. Because transmitted beta rays and fluorescent X-rays can be detected in a single location, there is no need to provide separate detectors for detecting transmitted beta rays and fluorescent X-rays and move the collection area of ​​the particulate matter FP to detect transmitted beta rays and fluorescent X-rays using the separate detectors, thereby enabling efficient analysis of the particulate matter FP. Furthermore, because separate detectors for detecting transmitted beta rays and fluorescent X-rays are not provided, the cost of the analysis device 100 can be reduced.

[0057] The inventors have found that when a silicon drift detector is used to detect transmitted beta rays, the silicon drift detector outputs a signal large enough to enable analysis using transmitted beta rays. Therefore, the analysis device 100 uses a silicon drift detector as the detector 5. Due to its configuration, a silicon drift detector can detect radiation with high sensitivity. Therefore, by using a silicon drift detector as the detector 5, transmitted beta rays and fluorescent X-rays can be detected with high sensitivity.

[0058] As described above, in the analysis device 100, the β-ray source 3 is disposed in the nozzle 21, and the X-ray source 4 and the detector 5 are disposed in the suction section 23. That is, the β-ray source 3, the X-ray source 4, and the detector 5 are disposed in the collection device 2. This allows the analysis device 100 to be made compact. Furthermore, β-rays and X-rays can be irradiated from the vicinity of the holding member 1, and transmitted β-rays and fluorescent X-rays can be detected in the vicinity of the holding member 1. As a result, the particulate matter FP can be irradiated with high-intensity β-rays and X-rays with little attenuation, and transmitted β-rays and fluorescent X-rays with little attenuation can be detected by the detector 5.

[0059] The analysis unit 6 is a computer system having a calculation unit such as a CPU, storage devices such as RAM, ROM, HDD, and SSD, various interfaces, a display, etc. The analysis unit 6 controls each component of the analysis device 100 and performs various information processing related to the analysis device 100. The analysis unit 6 has a calculation unit 61.

[0060] The calculation unit 61 is composed of the CPU, storage device, and various interfaces of the analysis unit 6, and controls each component of the analysis device 100 and performs various information processing related to the analysis device 100. The calculation unit 61 controls each component of the analysis device 100 and performs various information processing related to the analysis device 100 by software that is stored in the storage device of the computer system that constitutes the analysis unit 6 and is executable by the analysis unit 6. The calculation unit 61 may also perform part of the above control and information processing using hardware.

[0061] By executing the software, the calculation unit 61 switches between an irradiation ON state in which X-rays are irradiated onto the analysis target and an irradiation OFF state in which X-rays are not irradiated onto the analysis target. For example, by executing the software, the calculation unit 61 can switch between the irradiation ON state and the irradiation OFF state by switching the X-ray source 4 between the ON state and the OFF state. Alternatively, by executing the software, the calculation unit 61 may switch between the irradiation ON state and the irradiation OFF state by switching between the open and closed states of a shutter provided at the X-ray irradiation port (second radiation source installation space 23b).

[0062] The analysis unit 6 may have a display unit 63. The display unit 63 is a display that displays various information related to the analysis device 100 and the analysis results of the particulate matter FP (information related to mass concentration, information related to elements). The display unit 63 is, for example, a liquid crystal display, an organic EL display, or the like.

[0063] If the analysis unit 6 does not have a display unit 63, the analysis results and the like may be stored in a storage device of the analysis unit 6. The analysis results and the like stored in the storage device may be transmittable to a terminal or the like connected to the analysis unit 6. Furthermore, the analysis results and the like may be displayed on a display device of a terminal or the like connected to the analysis unit 6.

[0064] The analysis device 100 may include a main body B. The main body B is a housing that houses the analysis device 100. The main body B and each component of the analysis device 100 may generate radiation due to interaction with the radiation generated from the β-ray source 3 and the X-ray source 4, but it is preferable to minimize the effect of this radiation on the analysis results of the particulate matter FP. For example, it is preferable that the main body B and each component of the analysis device 100 be made of a material that generates radiation (such as fluorescent X-rays) with an energy different from the energy of fluorescent X-rays generated from the particulate matter FP irradiated with X-rays.

[0065] (3) Analysis of Particulate Matter in the Analysis Apparatus The analysis of particulate matter FP in the analysis apparatus 100 will now be described with reference to Figure 2. Figure 2 is a flowchart showing the analysis of particulate matter. In the analysis of particulate matter FP in the analysis apparatus 100, first, beta rays are irradiated from the beta ray source 3 toward the holding member 1 on which no particulate matter FP has been trapped (step S1). Next, the detector 5 detects the beta rays irradiated from the beta ray source 3 and passing through the holding member 1. The calculation unit 61 regards the detection signal of the beta rays that have passed through the holding member 1 on which no particulate matter FP has been trapped, input from the detector 5, as data relating to the intensity of the beta rays.

[0066] After calculating the amount of attenuation of β rays, Ｎ A sample gas Gs is passed through the holding member 1, thereby trapping particulate matter FP contained in the sample gas Gs in the holding member 1 (step S3). Note that even while the particulate matter FP is being trapped, beta rays continue to be output from the beta ray source 3. Specifically, the particulate matter FP is trapped in the holding member 1 as follows.

[0067] First, with the holding member 1 sandwiched between the nozzle 21 and the suction unit 23, the calculation unit 61 operates the suction pump 25 to generate a suction force at the inlet opening 23c of the suction unit 23. Because the inlet opening 23c faces the outlet opening 21b of the nozzle 21, the suction force generated at the inlet opening 23c extends to the outlet opening 21b and the gas flow path 21a connected thereto. As a result, as shown in FIG. 3 , the sample gas Gs is drawn into the gas flow path 21a from the intake port. The sample gas Gs drawn into the gas flow path 21a flows through the gas flow path 21a toward the holding member 1 and is discharged from the outlet opening 21b. The sample gas Gs discharged from the outlet opening 21b passes through the holding member 1. During this time, particulate matter FP contained in the sample gas Gs is collected by the holding member 1. After passing through the holding member 1, the sample gas Gs is drawn into the inlet opening 23c of the suction unit 23 and discharged by the suction pump 25. FIG. 3 is a diagram showing the flow of sample gas inside the nozzle.

[0068] As described above, in the analytical device 100, the gas flow path 21a through which the sample gas Gs flows is aligned in the normal direction D of the holding member 1. Ｎ, while the β-ray source 3 is parallel to the normal direction D Ｎ The β-ray source 3 is provided at an inclined position with respect to the gas flow path 21 a. As a result, the β-ray source 3 does not overlap with the gas flow path 21 a, and the β-ray source 3 does not interfere with the flow of the sample gas Gs. Since the β-ray source 3 does not interfere with the flow of the sample gas Gs, the particulate matter FP can be collected evenly and uniformly on the holding member 1.

[0069] As shown in Fig. 4, the beta rays output from the beta ray source 3 travel in the extension direction of the first radiation source installation space 21c and then reach the outlet opening 21b. The beta rays that reach the outlet opening 21b exit from the outlet opening 21b and are irradiated onto the holding member 1. The beta rays irradiated onto the holding member 1 are partially absorbed by the particulate matter FP captured by the holding member 1 and the holding member 1, pass through, and are then detected by the detector 5. Fig. 4 is a diagram showing the propagation path of the beta rays inside the nozzle and the suction part.

[0070] After a predetermined time (e.g., 1 hour) has elapsed since the particulate matter FP was collected or began to be collected by the holding member 1, the detector 5 detects transmitted beta rays that have been irradiated from the beta-ray source 3 and that have passed through the particulate matter FP and the holding member 1 (step S4). The calculation unit 61 uses the detection signal of the transmitted beta rays input from the detector 5 as data related to the transmitted beta rays. While the transmitted beta rays are being detected in step S4, the calculation unit 61 sets the X-ray irradiation state to an irradiation OFF state in which X-rays from the X-ray source 4 are not irradiated onto the particulate matter FP.

[0071] When β rays and X-rays are irradiated simultaneously onto particulate matter FP, transmitted β rays and fluorescent X-rays are detected simultaneously by detector 5. As a result, the signal output from detector 5 includes both a signal resulting from the detection of transmitted β rays and a signal resulting from the detection of fluorescent X-rays. It is difficult to separate the signal resulting from the detection of transmitted β rays and the signal resulting from the detection of fluorescent X-rays from the signal output from detector 5.

[0072] Therefore, as described above, when detecting transmitted beta rays using the detector 5, by setting the X-ray irradiation state from the X-ray source 4 to the OFF state, the detector 5 can detect transmitted beta rays that are not affected by fluorescent X-rays, thereby enabling accurate analysis of the amount of particulate matter FP.

[0073] After detecting the transmitted β rays, the calculation unit 61 sets the X-ray irradiation state to an irradiation ON state in which X-rays from the X-ray source 4 are irradiated onto the particulate matter FP (step S5). As shown in Fig. 5, the X-rays output from the X-ray source 4 travel in the extension direction of the second radiation source installation space 23b and then reach the entrance opening 23c. The X-rays that reach the entrance opening 23c exit from the entrance opening 23c and are irradiated onto the holding member 1. The X-rays irradiated onto the holding member 1 are irradiated onto the particulate matter FP captured by the holding member 1. The particulate matter FP irradiated with the X-rays generates fluorescent X-rays. These fluorescent X-rays enter the entrance opening 23c, travel through the detector installation space 23a, and are detected by the detector 5. Fig. 5 is a diagram showing the propagation paths of X-rays and fluorescent X-rays.

[0074] While the particulate matter FP is generating fluorescent X-rays, the detector 5 detects transmitted β rays that have passed through the particulate matter FP and the holding member 1, and fluorescent X-rays from the particulate matter FP (step S6). The calculation unit 61 inputs a detection signal from the detector 5 that has detected the transmitted β rays and fluorescent X-rays.

[0075] The calculation unit 61 subtracts the detection signal of transmitted β rays obtained in step S4 (the detection signal when the X-ray irradiation state is set to the irradiation OFF state) from the detection signal input from the detector 5, and regards this detection signal as the detection signal generated by the detector 5 detecting the fluorescent X-rays, and regards this as data related to the fluorescent X-rays (step S7). In this way, accurate data related to the fluorescent X-rays can be obtained by subtracting the detection signal obtained in step S4 (i.e., the detection signal of transmitted β rays) from the detection signal obtained in step S6 to calculate the detection signal generated by detecting the fluorescent X-rays.

[0076] After acquiring the data on the fluorescent X-rays, the X-ray irradiation state is set to an irradiation OFF state in which the particulate matter FP is not irradiated with X-rays from the X-ray source 4 (step S8). Thereafter, the calculation unit 61 analyzes the particulate matter FP based on the data on the transmitted β rays and the data on the fluorescent X-rays (step S9).

[0077] The analysis performed in step S9 includes an analysis of the amount of particulate matter FP based on transmitted β rays, and an analysis of elements contained in the particulate matter FP based on fluorescent X-rays.

[0078] Based on the data related to the transmitted beta rays, the calculation unit 61 performs an analysis on the amount of particulate matter FP trapped in the holding member 1. Specifically, the calculation unit 61 calculates the mass concentration of particulate matter FP contained in the sample gas Gs based on the ratio between the intensity of beta rays that have passed through the holding member 1 without the particulate matter FP trapped therein, i.e., the intensity of beta rays obtained by performing steps S1 to S2 above, and the intensity of transmitted beta rays that have passed through the particulate matter FP (and the holding member 1), i.e., the intensity of transmitted beta rays included in the data related to the transmitted beta rays obtained by performing step S4 above.

[0079] Furthermore, based on the data relating to the fluorescent X-rays obtained in step S7, the calculation unit 61 performs an analysis of the elements contained in the particulate matter FP collected in the holding member 1. Specifically, the calculation unit 61 can identify the elements contained in the particulate matter FP from the energy values ​​of the fluorescent X-rays contained in the data relating to the fluorescent X-rays, and can calculate the content of the elements from the intensity of the fluorescent X-rays.

[0080] After analyzing the particulate matter FP, the calculation unit 61 rotates the take-up reel 11a to move the holding member 1 (step S10). As a result, the particulate matter FP for which analysis has been completed is moved to a position outside the collection device 2. Instead, the holding member 1 on which no particulate matter FP has been collected is placed in the collection device 2. If further analysis is to be performed, the above steps S1 to S9 are newly executed.

[0081] In this way, in the analysis device 100, one detector 5 detects both transmitted beta rays used to analyze the amount of particulate matter FP and fluorescent X-rays used to analyze the elements contained in the particulate matter FP. In other words, transmitted beta rays and fluorescent X-rays are detected at the same position. As a result, the analysis device 100 does not need to move the particulate matter FP collection area of ​​the holding member 1 to detect both transmitted beta rays and fluorescent X-rays, so the particulate matter FP can be analyzed efficiently. Specifically, since the holding member 1 does not move, the irradiation position of the beta rays and X-rays on the holding member 1 (particulate matter FP) does not shift, and analysis can be performed in a short time. Furthermore, since the particulate matter FP can be collected without any gaps in the length direction of the holding member 1, waste of the holding member 1 can be reduced.

[0082] Furthermore, since there is no need to provide a detector for detecting transmitted β rays and a detector for detecting fluorescent X-rays separately, the cost of the analysis device 100 can be reduced.

[0083] 2. Second Embodiment In the analysis device 100 according to the first embodiment described above, a collection device 2 is provided to collect particulate matter FP in the atmosphere on the holding member 1. However, this is not limiting, and an analysis device 100′ according to the second embodiment may not include the collection device 2, as shown in Fig. 6. Fig. 6 is a diagram showing the configuration of the analysis device according to the second embodiment.

[0084] In the analysis device 100' according to the second embodiment, the detector 5 is also provided at a position where it can detect transmitted β rays that have been irradiated from the β-ray source 3 and passed through the object to be measured, and where it can detect fluorescent X-rays generated by X-rays irradiated from the X-ray source 4 to the object to be measured. Preferably, the β-ray source 3 and the detector 5 may be arranged so that a line segment connecting the vicinity of the center of the radiation receiving surface of the detector 5 and the vicinity of the center of the outlet of the β-ray source 3 passes through the collection region of the particulate matter FP. More preferably, the detector and the β-ray source may be arranged so that the line segment passes near the center of the collection region. Preferably, the normal direction D of the detector 5 Ｎ The inclination angle with respect to the normal direction D of the irradiation direction of the β rays irradiated from the β ray source 3 Ｎ Preferably, the detector 5 is inclined in the normal direction D ＮIn the direction opposite to the X-ray source 4, the normal direction D Ｎ The detector 5 may be inclined at approximately the same angle as the inclination angle of the X-ray source 4. In other words, the radiation receiving surface of the detector 5 may be approximately perpendicular to the irradiation direction of the fluorescent X-rays generated from the particulate matter FP.

[0085] This analysis device 100' can be used, for example, when it is not necessary to collect particulate matter FP on the holding member 1. Even when it is necessary to collect particulate matter FP on the holding member 1, for example, particulate matter FP collected on the holding member 1 at another location can be analyzed by the analysis device 100'. Furthermore, the holding member 1 does not have to be a collection filter. For example, a measurement target (e.g., particulate matter FP) may be placed on a plate-shaped member in advance, and the plate-shaped member may be provided at a position where the irradiation area of ​​beta rays from the beta ray source 3 and the irradiation area of ​​X-rays from the X-ray source 4 overlap.

[0086] Although several embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications are possible without departing from the spirit of the invention. In particular, the several embodiments and modifications described in this specification can be arbitrarily combined as necessary.

[0087] (A) In the analysis operation described using Figure 2, the processing content and processing order of each step can be changed without departing from the spirit of the invention. In the above-mentioned first embodiment, after measuring transmitted beta rays and fluorescent X-rays, an analysis of the amount of particulate matter FP based on transmitted beta rays and an analysis of elements contained in the particulate matter FP based on fluorescent X-rays were performed. However, this is not limited to this. For example, the X-ray irradiation state may be set to the irradiation ON state to generate fluorescent X-rays from the particulate matter FP, and after performing an analysis of elements contained in the particulate matter FP, an analysis of the amount of particulate matter FP based on transmitted beta rays (with the X-ray irradiation state set to the irradiation OFF state) may be performed.

[0088] Conversely to the above, for example, analysis may be performed as follows. First, the X-ray irradiation state is set to the irradiation OFF state, transmitted β rays are detected, and an analysis of the amount of particulate matter FP is performed based on the detected transmitted β rays. Next, the X-ray irradiation state is set to the irradiation ON state, and X-rays are irradiated onto the particulate matter FP to generate fluorescent X-rays from the particulate matter FP, and the transmitted β rays and fluorescent X-rays are detected by the detector 5. Thereafter, the detection signal of the transmitted β rays obtained just before the X-ray irradiation state is set to the irradiation ON state (i.e., when the irradiation is OFF) is subtracted from the detection signal obtained by detecting the transmitted β rays and fluorescent X-rays, to calculate the detection signal obtained by detecting the fluorescent X-rays, and this is used as data related to the fluorescent X-rays. Analysis of the elements contained in the particulate matter FP may be performed based on the data related to the fluorescent X-rays obtained in this manner.

[0089] The analysis of the amount of particulate matter FP can be performed at any timing after the transmitted β rays are detected by the detector 5. Furthermore, the analysis of the elements contained in the particulate matter FP can be performed at any timing after the fluorescent X-rays are detected by the detector 5.

[0090] (B) Other devices may be controlled based on the analysis results output by the analysis unit 6 of the above-described analysis device 100. For example, when the particulate matter FP generated in a waste incineration facility is the subject of analysis, the analysis result may be output as to whether or not the particulate matter FP contains harmful substances, and when this analysis result is output, a predetermined device in the waste incineration facility may be operated.

[0091] (C) By combining the above-described analytical device 100 with another analytical device (for example, a gas analyzer), a system for performing a more detailed analysis of the subject of analysis can be constructed.

[0092] (D) The configuration of the collection device 2 is not limited to the configuration described in the first embodiment. The collection device 2 may have any configuration as long as it can collect the particulate matter FP to be measured in the holding member 1.

[0093] (E) In the above-described analytical device 100, the sample gas Gs is caused to pass through the collection surface of the holding member 1 by suction using the suction unit 23. However, this is not limited to this, and the particulate matter FP may be collected on the holding member 1 by forcing the sample gas Gs onto the first surface SU1 (i.e., by blowing the sample gas Gs onto the first surface SU1 at a predetermined pressure). In this case, the suction unit 23 may be omitted, and the X-ray source 4 and the detector 5 may be disposed in external space.

[0094] (F) In the above-described analysis device 100, the β-ray source 3 is provided in the first radiation source installation space 21c inside the nozzle 21, but this is not limited to this. The β-ray source 3 may be provided outside the nozzle 21 in the normal direction D of the collection surface. Ｎ And / or, the X-ray source 4 and / or the detector 5 may be disposed in the external space instead of being disposed inside the suction part 23.

[0095] (G) The β-ray source 3 is inserted into the gas flow path 21a of the nozzle 21 in the normal direction D Ｎ The detector 5 is placed directly below the β-ray source 3 in the suction section 23 (that is, on the line connecting the β-ray source 3 and the collection area of ​​the holding member 1) and is aligned parallel to the normal direction D Ｎ and only the X-ray source 4 is parallel to the normal direction D Ｎ Alternatively, the beta ray source 3 may be tilted relative to the collection area of ​​the holding member 1 and positioned at a position deviated from the line connecting the beta ray source 3 and the collection area of ​​the holding member 1.

[0096] (H) A shutter that blocks beta rays output from the beta ray source 3 may be provided near the beta ray source 3. In this case, the shutter may be used to prevent beta rays from being irradiated onto the particulate matter FP during analysis using fluorescent X-rays. Furthermore, the calculation unit 61 may be able to control the start and stop of beta ray irradiation from the beta ray source 3. This makes it possible to prevent the detector 5 from detecting a detection signal that includes both a detection signal resulting from the detection of transmitted beta rays and a detection signal resulting from the detection of fluorescent X-rays when detecting fluorescent X-rays from the particulate matter FP. In other words, only fluorescent X-rays can be detected by the detector 5, and only a detection signal resulting from the detection of fluorescent X-rays can be obtained from the detector 5.

[0097] (I) The beta ray source 3, X-ray source 4, and detector 5 may be arranged externally as described in the second embodiment, and the collection device 2 may be arranged at a position different from the positions where the beta ray source 3, X-ray source 4, and detector 5 are arranged.

[0098] (J) The β-ray source 3 may be arranged on the second surface SU2 side of the holding member 1, and the X-ray source 4 and the detector 5 may be arranged on the first surface SU1 side of the holding member 1.

[0099] (K) In the analysis device 100 according to the first embodiment and the analysis device 100′ according to the second embodiment, the measurement target (particulate matter FP) does not have to be held by the holding member 1. In this case, for example, the measurement target can also be analyzed by introducing a gas (e.g., air, exhaust gas, etc.) containing the measurement target (particulate matter FP) into a region where the irradiation region of beta rays from the beta ray source 3 and the irradiation region of X-rays from the X-ray source 4 overlap, and detecting the transmitted beta rays that pass through this region and the fluorescent X-rays generated from this region with the detector 5.

[0100] (L) The irradiation of the particulate matter FP with X-rays may be started and stopped, for example, by opening and closing a shielding member provided at the X-ray outlet of the second radiation source installation space 23b.

[0101] (M) Analysis of elements contained in the particulate matter FP may be performed using fluorescent X-rays (referred to as β-ray-derived fluorescent X-rays) generated by irradiating the particulate matter FP with β-rays from the β-ray source 3, without irradiating the particulate matter FP with X-rays from the X-ray source 4. In this case, in step S4 of the analysis operation shown in Fig. 2, while the X-ray irradiation state is set to the irradiation OFF state, β-rays are irradiated from the β-ray source 3, and the transmitted β-rays that have passed through the particulate matter FP are detected by the detector 5, and the β-ray-derived fluorescent X-rays generated from the particulate matter FP irradiated with the β-rays are also detected by the detector 5.

[0102] 2, analysis of the elements contained in the particulate matter FP is performed based on the β-ray-derived fluorescent X-rays detected by the detector 5. At this time, analysis of the elements contained in the particulate matter FP may be performed based only on the β-ray-derived fluorescent X-rays, or analysis of the elements contained in the particulate matter FP may be performed taking into account the fluorescent X-rays generated by irradiating the particulate matter FP with the X-rays obtained by executing steps S5 and S6.

[0103] As described above, when only irradiating the particulate matter FP with β rays, the X-ray source 4 can be omitted.

[0104] (N) For example, in the detection signal generated by the detector 5 detecting both fluorescent X-rays and transmitted beta rays, if the influence of the detection signal due to the detection of transmitted beta rays is small and can be ignored, the detection signal due to the detection of transmitted beta rays and fluorescent X-rays can be used as the detection signal due to the detection of fluorescent X-rays as is.

[0105] 4. Features of the Embodiments The above embodiments can also be described as follows. (1) An analysis device (e.g., analysis device 100) includes a radiation source, a detector (e.g., detector 5), and an analysis unit (e.g., analysis unit 6). The radiation source irradiates a sample (e.g., particulate matter FP) with radiation. The detector detects transmitted radiation that has passed through the sample and fluorescent X-rays generated by irradiating the sample with the radiation. The analysis unit analyzes the amount of the sample based on the transmitted radiation detected by the detector, and analyzes the elements contained in the sample based on the fluorescent X-rays detected by the detector.

[0106] In the above analytical device, the detector detects both the transmitted radiation used to analyze the quantity of the sample and the fluorescent X-rays used to analyze the elements of the sample. In other words, the transmitted radiation and the fluorescent X-rays are detected at the same position. This eliminates the need to move the sample in order to detect both the transmitted radiation and the fluorescent X-rays, allowing for efficient sample analysis. Furthermore, since there is no need to provide separate detectors for detecting the transmitted radiation and the fluorescent X-rays, the cost of the analytical device can be reduced.

[0107] (2) In the analytical device of (1) above, the radiation source may include a β-ray source (e.g., β-ray source 3) that irradiates the sample with β-rays. In this case, the transmitted radiation may be transmitted β-rays that are transmitted through the sample among the β-rays irradiated by the β-ray source. This allows the amount of the sample to be analyzed using the transmitted β-rays that have transmitted through the sample.

[0108] (3) In the analytical device of (1) or (2) above, the radiation source may include an X-ray source (e.g., X-ray source 4) that irradiates the sample with X-rays. In this case, the fluorescent X-rays may be generated by irradiating the sample with X-rays. This allows analysis of elements contained in the sample to be performed using the fluorescent X-rays generated by irradiating the sample with X-rays.

[0109] (4) In any of the analytical devices described in (1) to (3) above, the sample may be particulate matter (e.g., particulate matter FP) contained in a sample gas (e.g., sample gas Gs). In this case, the analytical device may further include a holding member (e.g., holding member 1) and a trapping device (e.g., trapping device 2). The holding member has a first surface (e.g., first surface SU1) and a second surface (e.g., second surface SU2) opposite the first surface, and holds the sample. The trapping device causes the holding member to trap the particulate matter by passing the sample gas through the holding member. Furthermore, the radiation source and the detector may be disposed within the trapping device. This allows the analytical device to be made compact. Furthermore, the particulate matter can be irradiated with high-intensity radiation with little attenuation, and penetrating radiation and fluorescent X-rays with little attenuation can be detected by the detector.

[0110] (5) In the analyzing device of (4) above, the β-ray source may be disposed on the first surface side of the holding member. Meanwhile, the X-ray source and the detector may be disposed on the second surface side of the holding member. This allows the detector to reliably detect transmitted β-rays and fluorescent X-rays.

[0111] (6) In any of the analytical devices described in (3) to (5) above, the irradiation of X-rays may be switched on and off. When the detector detects transmitted β rays, the irradiation of X-rays may be stopped. This allows the detection of transmitted β rays that are not affected by fluorescent X-rays, thereby enabling accurate analysis of the amount of sample.

[0112] (7) In any one of the analytical devices (1) to (6) above, the detector may be a silicon drift detector, which allows the detector to detect transmitted radiation and fluorescent X-rays with high sensitivity.

[0113] (8) In any of the analytical devices described in (2) to (7), the fluorescent X-rays may be generated by irradiating a sample with β rays. This allows the analysis of elements contained in the sample to be performed using the fluorescent X-rays generated by irradiating the sample with β rays.

[0114] (9) The analytical method is a method for analyzing a sample using an analytical device (e.g., analytical device 100) that includes a detector (e.g., detector 5) that detects radiation. The analytical method includes the following steps: ◎ A step of irradiating a sample with radiation (e.g., steps S3 to S4). ◎ A step of detecting, with a detector, transmitted radiation that has passed through the sample and fluorescent X-rays that are generated by irradiating the sample with the radiation (e.g., steps S4 to S7). ◎ A step of analyzing the amount of the sample based on the transmitted radiation detected by the detector (e.g., step S9). ◎ A step of analyzing the elements contained in the sample based on the fluorescent X-rays detected by the detector (e.g., step S9).

[0115] In the above analytical method, the detector detects both the transmitted radiation used to analyze the quantity of the sample and the fluorescent X-rays used to analyze the elements in the sample. In other words, the transmitted radiation and the fluorescent X-rays are detected at the same position. This eliminates the need to move the sample in order to detect both the transmitted radiation and the fluorescent X-rays, allowing for efficient sample analysis.

[0116] (10) The program is a program for causing a computer to execute a method for analyzing a sample using an analytical device equipped with a detector for detecting radiation. The analytical method includes the following steps: irradiating a sample with radiation; detecting, with a detector, transmitted radiation that has passed through the sample and fluorescent X-rays generated by irradiating the sample with the radiation; analyzing the amount of the sample based on the transmitted radiation detected by the detector; and analyzing the elements contained in the sample based on the fluorescent X-rays detected by the detector.

[0117] The present invention can be widely applied to analytical devices that analyze samples.

[0118] 100, 100': analysis device 1: holding member SU1: first surface SU2: second surface 11: moving part 11a: take-up reel 11b: delivery reel 2: collection device 21: nozzle 21a: gas flow path 21b: outlet opening 21c: first radiation source installation space 23: suction part 23a: detector installation space 23b: second radiation source installation space 23c: inlet opening 23d: suction opening 25: suction pump 3: β-ray source 4: X-ray source 5: detector 6: analysis part 61: calculation part 63: display part B: main body FP: particulate matter Gs: sample gas

Claims

1. A radiation source that irradiates the sample with radiation, A detector that detects both transmitted radiation that has passed through the sample and fluorescent X-rays generated by irradiating the sample with the radiation, An analysis unit that performs an analysis on the quantity of the sample based on the transmitted radiation detected by the detector, and performs an analysis on the elements contained in the sample based on the fluorescent X-rays detected by the detector, An analytical device equipped with the following features.

2. The radiation source has a beta-ray source that irradiates the sample with beta rays, The analytical apparatus according to claim 1, wherein the transmitted radiation is transmitted beta rays that have passed through the sample from the beta rays irradiated by the beta ray source.

3. The radiation source has an X-ray source that irradiates the sample with X-rays, The analytical apparatus according to claim 2, wherein the fluorescent X-rays are produced by irradiating the sample with the X-rays.

4. The aforementioned sample is particulate matter contained in the sample gas, A holding member having a first surface and a second surface opposite to the first surface, for holding the sample, The collection device further comprises a device that collects the particulate matter on the holding member by passing the sample gas through the holding member, The analytical apparatus according to any one of claims 1 to 3, wherein the radiation source and the detector are arranged within the collection device.

5. The β-ray source is positioned on the first surface side of the holding member. The X-ray source and the detector are arranged on the second surface side of the holding member. The analytical apparatus according to claim 4, referencing claim 3.

6. The irradiation and stopping of the aforementioned X-rays can be switched, The analytical apparatus according to claim 3 or 5, wherein when the detector detects the transmitted beta rays, the irradiation of the X-rays is stopped.

7. The analytical apparatus according to any one of claims 1 to 6, wherein the detector is a silicon drift detector.

8. The analytical apparatus according to claim 2, wherein the fluorescent X-rays are produced by irradiating the sample with the beta rays.

9. A method for analyzing a sample using an analytical device equipped with a detector for detecting radiation, The steps include irradiating the sample with radiation, The steps include detecting both the transmitted radiation that has passed through the sample and the fluorescent X-rays generated by irradiating the sample with the radiation using the detector, A step of performing an analysis on the amount of the sample based on the transmitted radiation detected by the detector, The step of performing an analysis of the elements contained in the sample based on the fluorescent X-rays detected by the detector, An analytical method that includes the following features.

10. A program that causes a computer to execute a method for analyzing a sample using an analytical device equipped with a detector for detecting radiation, wherein the analysis method is: The steps include irradiating the sample with radiation, The steps include detecting both the transmitted radiation that has passed through the sample and the fluorescent X-rays generated by irradiating the sample with the radiation using the detector, A step of performing an analysis on the amount of the sample based on the transmitted radiation detected by the detector, The step of performing an analysis of the elements contained in the sample based on the fluorescent X-rays detected by the detector, A program that includes the following features.