Ozone concentration measuring device, ozone concentration measuring method, and ozone generation system

Abstract

An ozone concentration measuring device (100) for measuring the concentration of ozone in a measured gas inside a container (8) includes a photoelectric sensor (4) integrally formed with a light-emitting unit (2) for irradiating light, a light-receiving unit (3) for receiving light, and a signal processing unit (1) for transmitting and receiving a light-emitting signal to the light-emitting unit (2) and a light-receiving signal from the light-receiving unit (3), a light-projecting optical fiber (5) connected to the light-emitting unit (2) for introducing light into the inside of the container, a light-receiving optical fiber (6) for guiding the light that has passed through the inside of the container (8) to the light-receiving unit (3), and a calculation unit (9) for calculating the ozone concentration of the measured gas based on the light-receiving signal of the signal processing unit (1).

Description

[Technical field]

[0001] The present disclosure relates to an ozone concentration measuring device, an ozone concentration measuring method, and an ozone generation system. [Background technology]

[0002] Ozone is used in a wide variety of fields, including water treatment, deodorization, semiconductor manufacturing, sterilization, and virus inactivation. In the industrial use of ozone, it is necessary to measure the concentration of ozone supplied, and a simple and highly accurate ozone concentration measuring device is required. For example, as a method for measuring a high concentration of ozone of 200 g / Nm3 or more generated from an ozone generator, an ozone concentration measuring device is disclosed that measures the ozone concentration by irradiating light from a visible light source onto ozone in a light-shielded container and measuring the absorbance of the ozone with a light-receiving element placed opposite the light (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-132827 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the conventional ozone concentration measuring device, a pair of light transmission windows is provided in a light-shielded container, and visible light having a wavelength of 550 nm to 630 nm is irradiated from a visible light source provided outside one of the light transmission windows toward the other light transmission window, and the visible light including the wavelength of 550 nm to 630 nm is detected by a light receiving element attached to the outside of the other light transmission window with the light receiving surface facing the visible light source, thereby measuring the absorbance of ozone. Therefore, the visible light source and the light receiving element are installed at a location at least the optical path length apart, and there is a problem that the measured absorbance becomes unstable due to the influence of the temperature difference between them and the weak noise induced in the electric wiring connected to them, and the like, and the measurement accuracy of the ozone concentration is reduced. In addition, since the visible light source and the light receiving element are installed outside the pair of light transmission windows, respectively, and a power source is required to drive them, there is a problem that the device becomes complicated and large.

[0005] The present disclosure discloses techniques for solving the problems described above, and aims to provide an ozone concentration measuring device and an ozone concentration measuring method that are small and simply configured and can measure ozone concentration with high accuracy, and an ozone generation system that employs them. [Means for solving the problem]

[0006] The ozone concentration measuring device of the present disclosure is An ozone concentration measuring device for measuring the concentration of ozone in a measurement gas inside a container, comprising: a photoelectric sensor in which a light emitting unit that irradiates light, a light receiving unit that receives the light, and a signal processing unit that transmits and receives a light emitting signal to the light emitting unit and a light receiving signal from the light receiving unit are integrally formed; a light-projecting optical fiber connected to the light-emitting portion formed in the photoelectric sensor and configured to introduce the light into the container; a light-receiving optical fiber that guides the light that has passed through the inside of the container to the light-receiving portion formed in the photoelectric sensor; The signal processing unit formed in the photoelectric sensor detects the gas to be measured based on the received light signal. A calculation unit for calculating the concentration of ozone is provided. picture, The container is formed of a hollow tubular member, the light-projecting optical fiber is installed on one end side of the container, The light receiving optical fiber is installed on the other end side of the container, The hollow tubular member is made of metal or glass with a reflective film formed on the outer periphery, and the light propagates while being reflected by the wall surface of the hollow tubular member. It is something. In addition, the ozone concentration measuring method of the present disclosure includes: 1. An ozone concentration measuring method for measuring an ozone concentration in a measurement gas inside a container, comprising: The container is formed of a hollow tubular member, the light-projecting optical fiber is installed on one end side of the container, The light receiving optical fiber is installed on the other end side of the container, the hollow tubular member is made of metal or glass having a reflective film formed on its outer periphery, and light propagates while being reflected by a wall surface of the hollow tubular member, The above a photoelectric sensor preparation process for preparing a photoelectric sensor in which a light emitting unit for irradiating light, a light receiving unit for receiving the light, and a signal processing unit for transmitting and receiving a light emitting signal to the light emitting unit and a light receiving signal from the light receiving unit are integrally formed; The light emitting portion is connected to the photoelectric sensor and introduces the light into the container. The above a light projection optical fiber preparing step of preparing a light projection optical fiber; The light that has passed through the inside of the container is guided to the light receiving portion formed in the photoelectric sensor. The above a light receiving optical fiber preparing step of preparing a light receiving optical fiber; and a calculation step of calculating an ozone concentration of the measurement target gas based on the light receiving signal of the signal processing unit formed in the photoelectric sensor. It is something. The ozone generating system of the present disclosure also includes: an ozone generator that generates ozone and sends it to the outside as the measured gas; an ozone concentration measuring device for introducing the measurement gas sent from the ozone generator into the container and measuring the concentration of ozone in the measurement gas; a control unit that controls the ozone generator based on a measurement result of the ozone concentration of the measurement target gas by the ozone concentration measuring device. It is something. Effect of the Invention

[0007] According to the ozone concentration measuring device, the ozone concentration measuring method, and the ozone generating system disclosed in the present disclosure, The present invention is capable of measuring ozone concentration with high accuracy using a small and simple configuration. [Brief description of the drawings]

[0008] [Figure 1] 1 is a diagram showing a configuration of an ozone concentration measuring device in accordance with a first embodiment. [Diagram 2] 2 is a cross-sectional view showing a configuration of a container portion of the ozone concentration measuring device shown in FIG. [Diagram 3] FIG. 11 is a cross-sectional view showing a configuration of a container portion of an ozone concentration measuring device according to a second embodiment. [Figure 4] 10 is a cross-sectional view showing the configuration of another container portion of the ozone concentration measuring device according to the second embodiment. FIG. [Diagram 5] 13 is a diagram showing a light emission pattern of a light emitting section of a photoelectric sensor of an ozone concentration measuring device according to embodiment 3. FIG. [Figure 6] FIG. 11 is a diagram showing a configuration of an ozone concentration measuring device according to a fourth embodiment. [Figure 7] FIG. 13 is a diagram showing a configuration of an ozone concentration measuring device according to a fifth embodiment. [Figure 8] FIG. 13 is a diagram showing the configuration of an ozone generation system according to a sixth embodiment. [Figure 9] FIG. 13 is a diagram showing the configuration of an ozone generation system according to a seventh embodiment. [Figure 10] FIG. 11 is a block diagram showing another example of a photoelectric sensor according to the embodiment. [Figure 11] 2 is a block diagram showing an example of a hardware configuration of a control unit and a calculation unit according to an embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, preferred embodiments of the ozone concentration measuring device, ozone concentration measuring method, and ozone generating system according to the present disclosure will be described with reference to the drawings. Note that the same reference numerals are used for the same contents and corresponding parts, and detailed descriptions thereof will be omitted as appropriate. In the same manner for all the embodiments, duplicate descriptions of the configurations and operations of the same reference numerals are omitted as appropriate.

[0010] Embodiment 1 Fig. 1 is a diagram showing the configuration of an ozone concentration measuring device according to embodiment 1. Fig. 2 is a cross-sectional view showing the configuration of a container part of the ozone concentration measuring device shown in Fig. 1.

[0011] As shown in FIG. 1, the ozone concentration measuring device 100 includes a photoelectric sensor 4, a light projecting optical fiber 5, a light receiving optical fiber 6, a container (also called a cell) 8 containing a gas 7 to be measured, and a calculation unit 9. The photoelectric sensor 4 includes a light emitting unit 2, a light receiving unit 3, and a signal processing unit 1 integrally formed in a housing 40. The light emitting unit 2 irradiates visible light 10 as light. In particular, it is preferable to use a four-element red light emitting diode made of AlInGAP (aluminum, indium, gallium, phosphorus) from the viewpoints of wavelength, brightness, and stability, and the ozone concentration can be measured with high accuracy. The visible light 10 includes light with a wavelength of at least 500 nm or more and 700 nm or less. This is a wavelength with a large absorption cross-section by ozone, and the ozone concentration can be measured with high accuracy.

[0012] The light receiving unit 3 receives visible light 10. In the photoelectric sensor 4, the light emitting unit 2 and the light receiving unit 3 are arranged parallel to the central axis of the container 8. The signal processing unit 1 transmits an emission signal for causing the light emitting unit 2 to emit visible light 10 with a preset emission intensity, and receives a light receiving signal from the light receiving unit 3 that receives the visible light 10. The light projecting optical fiber 5 is connected to the light emitting unit 2 and one end side of the container 8, and introduces the visible light 10 irradiated from the light emitting unit 2 into the container 8 from one end side of the container 8. The light receiving optical fiber 6 is connected to the other end side of the container 8 and the light receiving unit 3, and receives the visible light 10 that has passed through the container 8 from the other end side of the container 8, and guides it to the light receiving unit 3.

[0013] As the photoelectric sensor 4 thus formed, for example, a digital fiber sensor can be used. The digital fiber sensor, like the photoelectric sensor 4 according to the present disclosure, has a structure in which a light emitting unit 2, a light receiving unit 3, and a signal processing unit 1 are provided inside a housing 40, and these are connected to an optical fiber. Also, like the present disclosure, the signal processing unit 1 has a function of adjusting the light emission intensity of the light emitting unit 2 and a function of outputting a signal of the light receiving intensity of the light receiving unit 3 to the outside, and therefore can be suitably applied to the ozone concentration measuring device 100 according to the present disclosure. Also, by using the digital fiber sensor as the photoelectric sensor 4, it becomes easy to obtain a photoelectric sensor 4 that is small in size, low in cost, and highly stable, and is extremely effective in forming the ozone concentration measuring device 100 according to the present disclosure that can measure the ozone concentration with high accuracy with a small and simple configuration.

[0014] 2, the container 8 is formed of a hollow tubular member, here a straight tube, for example a stainless steel tube. The inner wall is subjected to electrolytic polishing or bright annealing treatment, etc., and has a high reflectance to visible light 10. This allows the ozone concentration to be measured with high accuracy with a simple configuration without using optical components such as lenses or collimators.

[0015] T-shaped connection pipes 11A and 11B are provided at both ends of the container 8. In the connection pipe 11A at one end of the container 8, one end of the container 8 is connected to a first receptacle 11A1, a light projecting optical fiber 5 is connected to a second receptacle 11A2 via a fiber connector 12A, and a third receptacle 11A3 serves as an inlet for the measured gas 7. In the connection pipe 11B at the other end of the container 8, the other end of the container 8 is connected to a first receptacle 11B1, a light receiving optical fiber 6 is connected to a second receptacle 11B2 via a fiber connector 12B, and a third receptacle 11B3 serves as an outlet for the measured gas 7. The connection pipes 11A and 11B are preferably made of a material having excellent ozone resistance, such as stainless steel or fluororesin.

[0016] The fiber connectors 12A and 12B are made of a material having ozone resistance and visible light transmission, and for example, glass, semitransparent fluororesin, etc. are preferably used. In this way, the light projecting optical fiber 5 and the light receiving optical fiber 6 are installed in the connection tubes 11A and 11B via the fiber connectors 12A and 12B, so that the light projecting optical fiber 5 and the light receiving optical fiber 6 are prevented from being directly exposed to ozone in the measurement gas 7, and deterioration of the light projecting optical fiber 5 and the light receiving optical fiber 6 is suppressed. Therefore, it is possible to measure the ozone concentration stably for a long period of time. In addition, since the light projecting optical fiber 5 and the light receiving optical fiber 6 do not necessarily need to be made of a material having high chemical resistance, it is possible to use inexpensive and general-purpose optical fibers. This reduces the cost of the device.

[0017] In addition, since the measurement section is composed of the container 8, the connecting pipes 11A, 11B, and the fiber connectors 12A, 12B, a highly airtight structure can be easily obtained. Therefore, the ozone concentration can be stably measured even under positive or negative pressure conditions. In addition, since the measurement section is composed of the container 8, the connecting pipes 11A, 11B, and the fiber connectors 12A, 12B, it can be constructed only with materials having excellent heat resistance. Therefore, the ozone concentration in the measurement gas over a wide temperature range can be measured.

[0018] The calculation unit 9 calculates the ozone concentration using formula (1) described later, based on the information of the light receiving signal (light receiving intensity) sent from the photoelectric sensor 4. The calculation unit 9 may be any device having such a calculation function. For example, a PC (personal computer), a microcontroller, a PLC (Programmable Logic Controller), or an FPGA (Field Programmable Gate Array) may be used.

[0019] Next, a method for measuring ozone concentration using the ozone concentration measuring device 100 of the first embodiment configured as described above will be described. First, the measurement gas 7 is continuously introduced into the container 8 from the third receiving port 11A3 of the connecting pipe 11A on one end side of the container 8 and discharged from the third receiving port 11B3 of the connecting pipe 11B on the other end side of the container 8, so that the container 8 is always filled with the measurement gas 7.

[0020] Then, a photoelectric sensor preparation step is performed to prepare a photoelectric sensor 4 in which a light emitting unit 2 that irradiates light, a light receiving unit 3 that receives light, and a signal processing unit 1 that transmits and receives a light emission signal to the light emitting unit 2 and a light receiving signal from the light receiving unit 3 are integrally formed. Then, a light projecting optical fiber preparation step is performed to prepare a light projecting optical fiber 5 that is connected to the light emitting unit 2 and introduces light into the container 8. Then, a light receiving optical fiber preparation step is performed to prepare a light receiving optical fiber 6 that guides the light that has passed through the inside of the container 8 to the light receiving unit 3.

[0021] Next, in the photoelectric sensor 4, the light emitter 2 emits visible light 10 with the set emission intensity based on the light emission signal of the signal processor 1. Then, the visible light 10 is irradiated from one end side of the container 8 through the light projecting optical fiber 5 and the fiber connector 12A into the inside of the container 8. The visible light 10 introduced into the container 8 propagates while being repeatedly reflected by the inner wall of the container 8, and reaches the light receiving optical fiber 6 through the fiber connector 12B on the other end side of the container 8, where the received light intensity is measured by the light receiving unit 3 and transmitted to the signal processor 1. Then, the calculator 9 performs a calculation step of calculating the ozone concentration of the measurement gas 7 based on the signal of the received light intensity of the signal processor 1 as shown below.

[0022] When no ozone is present in the measured gas 7 in the container 8, the visible light 10 is not absorbed by the measured gas 7, and the received intensity of the visible light 10 measured by the light receiving unit 3 does not decrease. On the other hand, when ozone is present in the measured gas 7 in the container 8, the visible light 10 is absorbed by the ozone, and the received intensity of the visible light 10 measured by the light receiving unit 3 decreases. The calculation unit 9 calculates the ozone concentration in the measured gas 7 in the container 8 based on the ratio of these received light intensities sent from the photoelectric sensor 4 using the following formula (1).

[0023]

number

[0024] Here, I0 is the light intensity in the absence of ozone, I is the light intensity in the presence of ozone, and ε is the absorption coefficient of ozone (dm 2 / mol), L is the optical path length (dm), C O3 is the ozone concentration (g / m 3 ) The absorption coefficient ε of ozone is a physical property, and the optical path length L is a constant determined by the size of the container 8. Therefore, the ozone concentration is calculated by the above formula (1) from the received light intensity when ozone is present and when it is not present.

[0025] Although an example has been shown here in which the measured gas 7 is introduced from the connecting tube 11A on the light projecting optical fiber 5 side and discharged from the connecting tube 11B on the light receiving optical fiber 6 side, there are no restrictions on the flow direction of the measured gas 7. For example, the ozone concentration of the measured gas 7 can be measured in the same way even if the flow direction is reversed, in which the measured gas 7 is introduced from the connecting tube 11B on the light receiving optical fiber 6 side and discharged from the connecting tube 11A on the light projecting optical fiber 5 side.

[0026] The optical path length of the container 8 is determined arbitrarily depending on the ozone concentration of the measurement target gas 7 and the required measurement accuracy. However, it is preferable that the optical path length is 10 cm or more and 100 cm or less. This is because if the optical path length is 10 cm or less, sufficient light absorption by ozone in the container 8 may not occur, resulting in a decrease in the measurement accuracy of the ozone concentration, and if the optical path length is 100 cm or more, if a high concentration of ozone is present in the measurement target gas 7, the light absorption by ozone becomes too large, making measurement difficult, and in addition, the device becomes large, resulting in restrictions on the installation location.

[0027] In addition, in the first embodiment, an example in which a straight stainless steel tube is used as the container 8 has been shown, but the present invention is not limited to this as long as the measured gas 7 is contained therein and the ozone concentration can be measured using visible light 10. For example, the container 8 may have a metal tank-like structure. Also, for example, a container 8 having high ozone resistance and high visible light reflection characteristics may be used by forming a metal film on the outer periphery of a glass tube.

[0028] According to the ozone concentration measuring device of the first embodiment configured as described above, An ozone concentration measuring device for measuring the concentration of ozone in a measurement gas inside a container, comprising: a photoelectric sensor in which a light emitting unit that irradiates light, a light receiving unit that receives the light, and a signal processing unit that transmits and receives a light emitting signal to the light emitting unit and a light receiving signal from the light receiving unit are integrally formed; a light-projecting optical fiber connected to the light-emitting unit and configured to introduce the light into the container; a light-receiving optical fiber that guides the light that has passed through the inside of the container to the light-receiving unit; a calculation unit that calculates the concentration of ozone in the measurement target gas based on the light receiving signal from the signal processing unit. So, Since the light-emitting section and the light-receiving section of the photoelectric sensor are formed as a single unit, a temperature difference is unlikely to occur between the light-emitting section and the light-receiving section, and a decrease in the accuracy of measuring ozone concentration due to changes in light emission intensity and light-receiving sensitivity caused by temperature differences can be suppressed. Furthermore, since the light emitting portion and the light receiving portion of the photoelectric sensor are integrally formed, the device configuration can be made small and simple. Furthermore, since only the light projecting optical fiber and the light receiving optical fiber are connected to the container, no electrical wiring is required on the container side, and there is no need to lay electrical wiring. In addition, the light emitting unit and the light receiving unit can measure the ozone concentration stably with high accuracy without being affected by temperature changes in wiring resistance and electromagnetic noise. Furthermore, since only the light projecting optical fiber and the light receiving optical fiber are connected to the container, the configuration of the container and its surroundings is simple and small, and the ozone concentration measuring device can be installed in a narrow space.

[0029] Furthermore, according to the ozone concentration measuring device of the first embodiment configured as described above, The container is formed of a hollow tubular member, the light-projecting optical fiber is installed on one end side of the container, The light receiving optical fiber is installed on the other end side of the container. So, The container can be formed with a simple structure, light can be easily propagated, and the ozone concentration can be measured with high accuracy with an inexpensive and simple structure.

[0030] Furthermore, according to the ozone concentration measuring device of the first embodiment configured as described above, a T-shaped connecting pipe having a first receiving portion, a second receiving portion, and a third receiving portion is installed on one end side and the other end side of the container, respectively; the connecting pipe on the one end side of the container is connected to the first socket, the light projecting optical fiber is connected to the second socket, and the third socket serves as an inlet for the measurement gas, The connecting pipe on the other end side of the container has the other end side of the container connected to the first receiving port, the light receiving optical fiber connected to the second receiving port, and the third receiving port serving as an outlet portion for the measurement gas. So, The connecting pipes allow easy and convenient installation of the optical fibers in the container and introduction and discharge of the gas to be measured, and can be configured with a simple structure. Furthermore, deterioration of each optical fiber can be suppressed, enabling the ozone concentration to be measured stably for a long period of time.

[0031] Moreover, according to the ozone concentration measuring method of the first embodiment configured as described above, 1. An ozone concentration measuring method for measuring an ozone concentration in a measurement gas inside a container, comprising: a photoelectric sensor preparation process for preparing a photoelectric sensor in which a light emitting unit that irradiates light, a light receiving unit that receives the light, and a signal processing unit that transmits and receives a light emitting signal to the light emitting unit and a light receiving signal from the light receiving unit are integrally formed; a light projection optical fiber preparation step of preparing a light projection optical fiber connected to the light emitting unit and configured to introduce the light into the container; a light-receiving optical fiber preparation step of preparing a light-receiving optical fiber that guides the light that has passed through the inside of the container to the light-receiving unit; and a calculation step of calculating the ozone concentration of the measurement target gas based on the light receiving signal of the signal processing unit. It is possible to suppress the decrease in accuracy of ozone concentration measurement due to changes in light emission intensity and light receiving sensitivity caused by temperature differences, and it is possible to measure ozone concentration stably with high accuracy without being affected by temperature changes in wiring resistance or electromagnetic noise.

[0032] Embodiment 2 Figures 3 and 4 are cross-sectional views showing the configuration of a container part of an ozone concentration measuring device according to embodiment 2. As shown in Figure 3, this embodiment is different from embodiment 1 in that container 8 has one curved pipe part 13 in addition to straight pipe part 80. As another example, container 8 has two curved pipe parts 13A and 13B in addition to straight pipe part 80, as shown in Figure 4.

[0033] The inner wall of container 8 is formed to have a high reflectance for visible light 10, so that visible light 10 irradiated from light-projecting optical fiber 5 propagates toward light-receiving optical fiber 6 while being reflected multiple times by the inner wall of container 8. Therefore, even if curved tube sections 13, 13A, and 13B exist in addition to straight tube section 80 as shown in Fig. 3 or 4, visible light 10 can propagate by being repeatedly reflected, and the ozone concentration can be measured in the same manner as in the first embodiment.

[0034] In this way, by providing the curved pipe parts 13, 13A, and 13B in the container 8, the degree of freedom of the shape of the ozone concentration measuring device 100 can be improved. For example, by forming the curved pipe parts 13, 13A, and 13B appropriately in a shape that follows the piping of an existing ozone generator, the degree of freedom of installation can be increased. In addition, by providing the curved pipe parts 13, 13A, and 13B, the container 8 with a long optical path length can be formed small, and even a relatively small ozone concentration measuring device 100 can measure the ozone concentration with high accuracy. Note that although the curved pipe parts 13, 13A, and 13B in Figs. 3 and 4 are at right angles, the bending angle does not necessarily have to be a right angle and can be determined arbitrarily. For example, the same effect can be obtained by bending the curved pipe parts 13, 13A, and 13B in a circular or spiral shape.

[0035] According to the ozone concentration measuring device of the second embodiment configured as described above, the same effects as those of the first embodiment can be obtained, and in addition, The container is formed of a straight pipe portion and a curved pipe portion, the light-projecting optical fiber is installed on one end side of the container, The light receiving optical fiber is installed on the other end side of the container. So, The degree of freedom in the shape of the ozone concentration measuring device can be improved.

[0036] Embodiment 3 FIG. 5 is a diagram showing a light emission pattern of the light-emitting unit 2 of the photoelectric sensor 4 of the ozone concentration measuring device according to the third embodiment.

[0037] In this embodiment, the emission pattern of visible light 10 from the light-emitting unit 2 of the photoelectric sensor 4 is pulse-modulated. The rest of the configuration and operation are the same as those of the above-mentioned embodiments. When the light-emitting unit 2 is caused to emit light continuously, the temperature may rise. In general, the emission intensity and wavelength of the light-emitting unit 2 (light-emitting element) are temperature-dependent, so that when the ozone concentration is continuously measured, if the temperature of the light-emitting unit 2 rises, there is a risk of the measurement accuracy decreasing. According to this embodiment, the light emitted by the light-emitting unit 2 is pulse-modulated to emit light intermittently, so that heat generation is suppressed compared to the case of continuous emission, and the decrease in the measurement accuracy of the ozone concentration due to the increase in temperature can be suppressed.

[0038] Embodiment 4 6 is a diagram showing the configuration of an ozone concentration measuring device according to a fourth embodiment. This embodiment differs from the above-mentioned embodiments in that the photoelectric sensor 4 and the calculation unit 9 of the ozone concentration measuring device 100 are formed as the instrumentation unit 14, and the container 8 side is formed as the measurement unit 15, and are formed separately. In order to form them in this way, the light projecting optical fiber 5 and the light receiving optical fiber 6 are respectively formed of a plurality of optical fibers 51, 52 and optical fibers 61, 62. Then, connecting units 511, 512 and connecting units 611, 612 that connect them are provided. Here, connecting units 511, 611 are provided in the instrumentation unit 14.

[0039] With this configuration, the instrumentation unit 14 and the measurement unit 15 are connected and joined at the joints 511, 512, 611, 612 of the light-projecting optical fiber 5 and the light-receiving optical fiber 6, so that the two are structurally independent. Therefore, the instrumentation unit 14 and the measurement unit 15 can be installed apart from each other. This allows the ozone concentration measuring device 100 to be installed even in a narrow place where the installation space is limited, and enables the measurement of the ozone concentration. Furthermore, the measurement unit 15 does not include any electrical equipment, and the measurement unit 15 and the instrumentation unit 14 are connected only by the optical fibers 5 and 6.

[0040] Therefore, for example, it is possible to install only the instrumentation unit 14 indoors in a low electromagnetic noise environment and protected from wind and rain, and to install the measurement unit 15, for example, outdoors at a measurement location. Also, it is possible to install the instrumentation unit 14 in the same location as the control unit of another device, such as an ozone generation system. Note that, although an example in which the light projecting optical fiber 5 and the light receiving optical fiber 6 each use two optical fibers 51, 52, 61, and 62, is shown here, the present invention is not limited to this, and it is also possible to use three or more optical fibers and form a connection part for each of them for installation.

[0041] In addition, since the connecting parts 511 and 611 are installed in the instrumentation part 14, the connecting parts 511, 512, 611 and 612 can be easily attached and detached, and changes in light intensity caused by the movement or bending of the optical fibers 51, 52, 61 and 62 can be suppressed.

[0042] According to the ozone concentration measuring device of the fourth embodiment configured as described above, the same effects as those of the above-mentioned embodiments are obtained, and The light projecting optical fiber and the light receiving optical fiber are each formed of a plurality of optical fibers and each include a connecting portion for connecting the optical fibers. So, Since the calculation unit and photoelectric sensor side can be structurally separated from the container side by optical fibers, it is possible to install only the calculation unit and photoelectric sensor side indoors in a low electromagnetic noise environment and protected from wind and rain. Also, it is possible to configure the calculation unit together with the control unit of another device.

[0043] Embodiment 5. Fig. 7 is a diagram showing the configuration of an ozone concentration measuring device according to embodiment 5. In this embodiment, an instrumentation unit 14 has a plurality of photoelectric sensors 4A, 4B, and 4C, and each of the photoelectric sensors 4A, 4B, and 4C has an independent measuring unit 15A, 15B, and 15C, which are connected to each other by optical fibers 5 and 6. The rest of the configuration is the same as that of embodiment 4.

[0044] In this embodiment, when the ozone concentration is measured at multiple locations or when the ozone concentration generated from multiple ozone generators is measured, it is possible to provide separate measuring units 15A, 15B, and 15C and measure with each photoelectric sensor 4A, 4B, and 4C, and consolidate them into instrumentation unit 14, resulting in a simple configuration of the ozone generation system. In addition, since the calculation unit 9 can be consolidated into one, the configuration can be made less expensive than when multiple measuring units 15 are provided with independent calculation units 9.

[0045] According to the ozone concentration measuring device of the fifth embodiment configured as described above, the same effects as those of the above-mentioned embodiments are obtained, and A plurality of the photoelectric sensors are provided, Each of the photoelectric sensors includes the light projecting optical fiber, the light receiving optical fiber, and the container, The calculation unit calculates the ozone concentration of the measurement gas for each of the containers connected to each of the photoelectric sensors. So, When the ozone concentration is measured at a plurality of locations, or when the concentration of ozone generated from a plurality of ozone generators is measured, the device can be constructed simply and inexpensively.

[0046] Embodiment 6 FIG. 8 is a diagram showing the configuration of an ozone generating system according to a sixth embodiment. As shown in FIG. 8, in the ozone generating system, a raw gas 23 containing oxygen is supplied from a raw gas source 20 to an ozone generator 21. Then, ozone generated in the ozone generator 21 is supplied as a measured gas 7 to an ozone-using facility 26 through an ozone pipe 25. The ozone generating system includes a control unit 22 for controlling the ozone generator 21. The ozone concentration measuring device 100 collects the measured gas 7 in a container 8 by branching the ozone flowing through the ozone pipe 25 as the measured gas 7, measures the ozone concentration, and then returns the measured gas 7 to the ozone pipe 25. The ozone concentration measuring device 100 does not necessarily need to be installed in a form branched from the ozone pipe 25 as in FIG. 8, and the container 8 itself can be used as the ozone pipe 25, and the same can be done.

[0047] The control unit 22 feedback-controls the operating conditions of the ozone generator 21 so as to stably supply ozone at a preset ozone concentration based on information on the ozone concentration measured by the ozone concentration measuring device 100. Note that the ozone generation conditions to be controlled include the power input to the ozone generator 21, the flow rate of the raw material gas 23, the composition of the raw material gas 23, and the like, but are not limited to these as long as they are conditions related to the operation of the ozone generator 21.

[0048] The ozone generation system can measure the ozone concentration of ozone generated by the ozone generator 21 in-line and in real time using an ozone concentration measuring device 100 that is small and simply configured and can measure ozone concentration with high accuracy. In addition, by feedback controlling the ozone generator 21 based on information on the measured ozone concentration, ozone at a preset ozone concentration can be stably supplied to the ozone-using facility 26.

[0049] According to the ozone generation system of the sixth embodiment configured as described above, an ozone generator that generates ozone and sends it to the outside as the measured gas; an ozone concentration measuring device for introducing the measurement gas sent from the ozone generator into the container and measuring the concentration of ozone in the measurement gas; a control unit that controls the ozone generator based on a measurement result of the ozone concentration of the measurement target gas by the ozone concentration measuring device. So, Since the ozone concentration can be measured with a simple configuration, the ozone generator can be controlled to achieve a preset ozone concentration according to the measured ozone concentration, and an ozone generation system can be constructed easily.

[0050] Embodiment 7 9 is a diagram showing the configuration of an ozone generating system according to a seventh embodiment. In this embodiment, a measurement gas passing through an upstream ozone pipe 251 introduced into an ozone-using facility 26 is defined as a first measurement gas 7A, and a measuring unit 15A is provided for measuring the ozone concentration of the first measurement gas 7A. A measurement gas passing through a downstream ozone pipe 252 discharged from an ozone-using facility 26 is defined as a second measurement gas 7B, and a measuring unit 15B is provided for measuring the ozone concentration of the second measurement gas 7B. The measuring units 15A and 15B are connected to an instrumentation unit 14 by optical fibers 5 and 6, respectively. An ozone concentration measuring device 100 is composed of the measuring units 15A and 15B, and the instrumentation unit 14.

[0051] The ozone concentration measuring device 100 measures both the ozone concentration in the measuring section 15A, i.e., the ozone concentration of the first measured gas 7A upstream of the ozone-using equipment 26, and the ozone concentration in the measuring section 15B, i.e., the ozone concentration of the second measured gas downstream of the ozone-using equipment 26, and sends the signals to the control section 22. The control section 22 feedback-controls the operating conditions of the ozone generator 21 in accordance with the sent information on the respective ozone concentrations. The other configurations and operations are the same as those of the above-mentioned embodiment 6.

[0052] An example of the ozone-using equipment 26 is a water treatment tank. In this embodiment, the ozone concentration on the upstream side and downstream side of the water treatment tank are measured simultaneously, thereby enabling advanced control such as calculating the amount of ozone consumed and minimizing the amount of ozone leaking to the downstream side. In addition, the instrumentation unit 14 can be shared by two measuring units 15A and 15B to form a single unit, so that the ozone concentration at two locations can be measured with a small and simple configuration.

[0053] According to the ozone generation system of the seventh embodiment configured as described above, an ozone generator that generates ozone and outputs a first measurement gas to the outside as the measurement gas; an ozone-using facility that introduces the first measurement gas from the ozone generator, uses the ozone, and discharges a second measurement gas as the measurement gas; the ozone concentration measuring device introduces the first measurement gas to be introduced into the ozone-using facility into the container, measures the ozone concentration of the first measurement gas, introduces the second measurement gas discharged from the ozone-using facility into the container different from the container, and measures the ozone concentration of the second measurement gas; a control unit that controls the ozone generator based on a measurement result of the ozone concentration of the first measurement gas and the second measurement gas by the ozone concentration measuring device. So, Since ozone concentration can be measured before and after ozone-using equipment using a simple configuration, it is possible to construct an ozone generation system that can control the amount of ozone generated by the ozone generator to be optimal depending on the amount of ozone used. It is possible to construct an ozone generation system that can generate a measurement gas (ozone gas) with a preset ozone concentration with a simple configuration.

[0054] In each of the above embodiments, the arrangement relationship of the light-emitting unit 2 and the light-receiving unit 3 of the photoelectric sensor 4 is parallel to the central axis of the container 8, but the arrangement is not limited to this, and the arrangement relationship of the light-emitting unit 2 and the light-receiving unit 3 may be perpendicular to the central axis of the container 8, as shown in Fig. 10. This allows the photoelectric sensor 4 to be constructed in a small size, improving the flexibility of installation.

[0055] The calculation unit 9 and the control unit 22 are configured with a processor 200 and a storage device 300, as shown in FIG. 11, which is an example of hardware. The storage device is not shown, but includes a volatile storage device such as a random access memory and a non-volatile auxiliary storage device such as a flash memory. Also, instead of the flash memory, an auxiliary storage device such as a hard disk may be provided. The processor 200 executes a program input from the storage device 300. In this case, the program is input from the auxiliary storage device to the processor 200 via the volatile storage device. Also, the processor 200 may output data such as a calculation result to the volatile storage device of the storage device 300, or may store the data in the auxiliary storage device via the volatile storage device.

[0056] Although various exemplary embodiments and examples are described in this disclosure, various features, aspects, and functions described in one or more embodiments are not limited to the application of a specific embodiment, but can be applied to the embodiments alone or in various combinations. Therefore, countless modifications not illustrated are expected within the scope of the technology disclosed in this specification. For example, the modification, addition, or omission of at least one component, and the extraction and combination of at least one component with components of other embodiments are included. [Explanation of symbols]

[0057] 1 signal processing section, 10 visible light, 100 ozone concentration measuring device, 11A connecting pipe, 11B connecting pipe, 12A fiber connector, 12B fiber connector, 13 bent pipe section, 13A bent pipe section, 13B bent pipe section, 14 instrumentation section, 15 measurement section, 15A measurement section, 15B measurement section, 15C measurement section, 2 light emitting section, 20 source gas source, 21 ozone generator, 22 control section, 23 source gas, 25 ozone piping, 251 ozone piping, 252 ozone piping, 26 ozone using equipment, 3 light receiving section, 4 photoelectric sensor, 4A photoelectric sensor, 4B photoelectric sensor, 4C photoelectric sensor, 40 housing, 5 light emitting optical fiber, 51 optical fiber, 511 connection section, 512 connection section, 52 optical fiber, 6 light receiving optical fiber, 61 optical fiber, 611 Connection portion, 612 connection portion, 62 optical fiber, 7 measured gas, 7A first measured gas, 7B second measured gas, 8 container, 80 straight tube portion, 9 calculation portion.

Claims

1. An ozone concentration measuring device for measuring the ozone concentration of a measurement gas inside a container, a photoelectric sensor in which a light emitting unit that irradiates light, a light receiving unit that receives the light, and a signal processing unit that transmits and receives a light emitting signal to the light emitting unit and a light receiving signal from the light receiving unit are integrally formed; a light-projecting optical fiber connected to the light-emitting portion formed in the photoelectric sensor and configured to introduce the light into the container; a light-receiving optical fiber that guides the light that has passed through the inside of the container to the light-receiving unit formed in the photoelectric sensor; an ozone concentration measuring device comprising: a calculating unit that calculates the ozone concentration of the measurement target gas based on the light receiving signal of the signal processing unit formed in the photoelectric sensor;

2. The container is formed of a hollow tubular member, the light-projecting optical fiber is installed on one end side of the container, 2. The ozone concentration measuring device according to claim 1, wherein the light receiving optical fiber is installed on the other end side of the container.

3. The container is formed of a straight pipe portion and a curved pipe portion, the light-projecting optical fiber is installed on one end side of the container, 3. The ozone concentration measuring device according to claim 2, wherein the light receiving optical fiber is installed on the other end side of the container.

4. An ozone concentration measuring device as described in Claim 2, wherein the hollow tubular member is made of metal or glass with a reflective film formed on its outer periphery, and the light propagates while being reflected by the wall surface of the hollow tubular member.

5. An ozone concentration measuring device as described in Claim 1, wherein the photoelectric sensor is a digital fiber sensor whose light-emitting part is composed of a light-emitting diode that emits a wavelength of 500 nm or more and 700 nm or less.

6. 6. The ozone concentration measuring device according to claim 1, wherein the light projecting optical fiber and the light receiving optical fiber are each formed of a plurality of optical fibers, and each includes a connecting portion that connects the optical fibers together.

7. 6. The ozone concentration measuring device according to claim 1, wherein the light-emitting unit and the light-receiving unit in the photoelectric sensor are arranged parallel to a central axis of the container or perpendicular to the central axis of the container.

8. a T-shaped connecting pipe having a first receiving port, a second receiving port, and a third receiving port is respectively installed on one end side and the other end side of the container; The connection pipe on the one end side of the container has the one end side of the container connected to the first receiving port, the light projection optical fiber connected to the second receiving port, and the third receiving port serving as the introduction part of the gas to be measured, The connection pipe on the other end side of the container has the other end side of the container connected to the first receiving port, the light reception optical fiber connected to the second receiving port, and the third receiving port serving as the derivation part of the gas to be measured. The ozone concentration measuring device according to any one of claims 1 to 5.

9. Comprising a plurality of the photoelectric sensors, For each one of the photoelectric sensors, respectively comprising the light projection optical fiber, the light reception optical fiber, and the container, The arithmetic unit calculates the concentration of ozone in the gas to be measured for each container connected to each photoelectric sensor. The ozone concentration measuring device according to any one of claims 1 to 5.

10. An ozone generator that generates ozone and sends it out as the gas to be measured to the outside, The ozone concentration measuring device according to any one of claims 1 to 5, which introduces the gas to be measured sent from the ozone generator into the container and measures the concentration of ozone in the gas to be measured, An ozone generation system comprising a control unit that controls the ozone generator based on the measurement result of the concentration of ozone in the gas to be measured of the ozone concentration measuring device.

11. An ozone generator that generates ozone and sends out a first gas to be measured as the gas to be measured to the outside, An ozone using facility that introduces the first gas to be measured from the ozone generator, uses the ozone, and discharges a second gas to be measured as the gas to be measured, The ozone concentration measuring device according to claim 9, which introduces the first gas to be measured introduced into the ozone using facility into the container, measures the concentration of ozone in the first gas to be measured, and introduces the second gas to be measured discharged from the ozone using facility into a container different from the container, and measures the concentration of ozone in the second gas to be measured, An ozone generation system comprising a control unit that controls the ozone generator based on the measurement results of the concentrations of ozone in the first gas to be measured and the second gas to be measured of the ozone concentration measuring device.

12. In an ozone concentration measuring method for measuring the concentration of ozone in a gas to be measured inside a container, a photoelectric sensor preparation step of preparing a photoelectric sensor in which a light emitting unit that irradiates light, a light receiving unit that receives the light, and a signal processing unit that transmits and receives a light emitting signal to the light emitting unit and a light receiving signal from the light receiving unit are integrally formed; a light projecting optical fiber preparing step of preparing a light projecting optical fiber connected to the light emitting portion formed in the photoelectric sensor and configured to introduce the light into the container; a light-receiving optical fiber preparing step of preparing a light-receiving optical fiber that guides the light that has passed through the inside of the container to the light-receiving portion formed in the photoelectric sensor; and calculating the concentration of ozone in the measurement gas based on the light-receiving signal of the signal processing unit formed in the photoelectric sensor.

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