Furnace tail sealing device and heating furnace

Abstract

Provided in the present application are a furnace tail sealing device and a heating furnace. The furnace tail sealing device is configured to seal the tail of a furnace body (600), and comprises a flange mounting plate (100), a furnace tail flange (200) and a tail cover (300), wherein the flange mounting plate (100) is sleeved on the tail of the furnace body (600); the furnace tail flange (200) is mounted on the flange mounting plate (100); and the tail cover (300) is connected to the furnace tail flange (200) and is configured to close the tail of the furnace body (600), and the tail cover (300) is provided with an air pipe (310) in communication with a furnace tube (610) in the furnace body (600). The furnace tail sealing device can seal the tail of the furnace body, so as to reduce the risk of the furnace tube in the furnace body being damaged due to movement; and the air pipe can be in communication with the furnace tube and the outside of the furnace body, such that the furnace tail sealing device is simple to assemble.

Description

Furnace tail sealing device and hot furnace Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, in particular to a furnace tail sealing device and a hot furnace. Background Art

[0002] Semiconductor manufacturing equipment is commonly used in the production and manufacturing process of photovoltaic cells. As shown in Figure 1, the boron-expanded furnace tube used in the relevant technology has a furnace tube flange welded at the front end, a closed semicircular quartz structure welded at the tail end, and a branch pipe welded at the tail end. In the relevant production process, a technical solution of air intake at the tail end and air extraction at the front end is adopted. When vacuuming is achieved, a furnace tube is inserted from the branch pipe at the tail end to the front end and then vacuumed. The other branch pipes are in a closed state. The front end of the furnace tube and the flange on the furnace body are radially sealed. There is a gap between the furnace tube flange at the front end of the furnace tube and the furnace body flange. During the vacuuming process, there is a pressure difference between the inside of the furnace tube and the outside of the furnace tail. The furnace tube will move toward the furnace door (i.e., the left end of Figure 1) under the action of the pressure difference, and it is very easy for the furnace tube to break.

[0003] Summary of the Invention

[0004] In order to solve the above technical problems, as the first aspect of the present invention, a furnace tail sealing device is provided for sealing the tail of the furnace body. The furnace tail sealing device includes: a flange mounting plate, which is sleeved on the tail of the furnace body; a furnace tail flange, which is installed on the flange mounting plate; a tail cover is connected to the furnace tail flange and is used to close the tail of the furnace body, and the tail cover is provided with an air pipe connected to the furnace pipe in the furnace body.

[0005] The furnace tail sealing device can seal the tail of the furnace body, thereby reducing the pressure difference between the inside and outside of the furnace body and reducing the risk of damage to the furnace tubes in the furnace body due to movement; and the air pipe can connect the furnace tubes and the outside of the furnace body. During the installation of the furnace tail sealing device, there is no need to pass through the branch pipe for installation, which makes the furnace tail sealing device have lower requirements for assembly techniques and less difficult to install, thereby facilitating the installation and disassembly of the furnace tail sealing device.

[0006] In some embodiments, the tail cover has an inserting protrusion, the air pipe is passed through the inserting protrusion, and the inserting protrusion is inserted into the furnace pipe.

[0007] In some embodiments, the tail cover is further provided with a plug-in groove arranged around the plug-in protrusion, and one end of the furnace tube is plugged into the plug-in groove.

[0008] In some embodiments, a seal is sandwiched between the furnace tail flange and the tail cover, a mating groove is provided on the side of the furnace tail flange facing the tail cover, and a mating protrusion is provided on the side of the tail cover facing the furnace tail flange, and the mating protrusion is used to press the seal tightly into the mating groove.

[0009] In some embodiments, a first cooling channel is provided on a side of the furnace tail flange facing the flange mounting plate, and a coolant flows through the first cooling channel.

[0010] In some embodiments, a second cooling channel is defined on the tail cover, and a liquid inlet pipe and a liquid outlet pipe communicating with the second cooling channel are provided on the tail cover.

[0011] In some embodiments, a first mounting hole is provided on the tail cover, a second mounting hole corresponding to the first mounting hole is provided on the tail flange, and a third mounting hole corresponding to the second mounting hole is provided on the flange mounting plate. The connecting member passes through the first mounting hole, the second mounting hole and the third mounting hole to fix the tail cover, the tail flange and the flange mounting plate.

[0012] In some embodiments, a cooling cavity is provided inside the tail cover, and a coolant flows in the cooling cavity. A portion of the cooling cavity is provided in the structure of the tail cover for sealing the tail of the furnace body.

[0013] In some embodiments, the cooling cavity includes a first cavity and a second cavity that are connected, the longitudinal section of the second cavity is arranged perpendicular to the axial direction of the furnace tube, and the first cavity is arranged circumferentially around the second cavity.

[0014] In some embodiments, a plurality of water baffles are provided in the second cavity and spaced apart along the circumference of the furnace tube.

[0015] In some embodiments, the air pipe passes through the second cavity, and among the two adjacent water baffles along the circumference of the furnace tube, one end of one water baffle is connected to the air pipe, and the other end is spaced apart from the side wall of the second cavity, and one end of the other water baffle is connected to the side wall of the second cavity, and the other end is spaced apart from the air pipe.

[0016] In some embodiments, a baffle is further provided in the first cavity, and the baffle is further provided in the first cavity, and the baffle is located between the liquid inlet of the first cavity and the liquid outlet of the first cavity.

[0017] In some embodiments, a liquid inlet pipe and a liquid outlet pipe are further provided on the tail cover, wherein the liquid inlet pipe is connected to the first cavity, and the liquid outlet pipe is connected to the second cavity.

[0018] In some embodiments, the tail cover includes: a surrounding plate, including a vertical plate and two annular plates connected to the vertical plate, and the two annular plates are arranged at intervals; an outer sealing plate, connected to the two annular plates, and defining a first cavity with the two annular plates; an inner sealing plate, connected to the inner circumferential wall of the annular plate located on the inner side, and defining a second cavity with the vertical plate; wherein: a connecting hole connecting the first cavity and the second cavity is provided on the annular plate located on the inner side.

[0019] Accordingly, a second aspect of the present invention further provides a heat furnace comprising a furnace body and the aforementioned furnace tail sealing device, the furnace tail sealing device being configured to seal the furnace body's tail. The heat furnace can be sealed at the furnace body's tail via the furnace tube structure or the furnace tail sealing device, and the heat furnace is relatively simple to assemble and disassemble. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, without paying creative labor, other drawings obtained based on these drawings still fall within the scope of the present invention.

[0021] FIG1 is a schematic structural diagram of a furnace tube in the related art;

[0022] FIG2 is a schematic structural diagram of a furnace tube structure according to an embodiment of the present application;

[0023] FIG3 is a cross-sectional view of a furnace tube structure according to an embodiment of the present application;

[0024] FIG4 is an enlarged view of a partial structure of a furnace tube structure according to an embodiment of the present application;

[0025] FIG5 is a schematic structural diagram of a tail cover sealing device in the related art;

[0026] FIG6 is a schematic structural diagram of a furnace tail sealing device in another direction according to an embodiment of the present application;

[0027] FIG7 is a cross-sectional view taken along line AA in FIG6 ;

[0028] FIG8 is a partial enlarged view of the structure shown in FIG7;

[0029] FIG9 is a schematic structural diagram of a tail cover according to an embodiment of the present application;

[0030] FIG10 is a schematic diagram of the internal structure of the tail cover of the present application;

[0031] FIG11 is a schematic structural diagram of a tail cover in another direction according to an embodiment of the present application;

[0032] FIG12 is a sectional view taken along line BB shown in FIG11;

[0033] FIG13 is a schematic diagram of a partial structure of a tail cover according to an embodiment of the present application;

[0034] FIG14 is a cross-sectional view taken along the CC line shown in FIG13 ;

[0035] FIG15 is a schematic structural diagram of the structure shown in FIG13 in another direction;

[0036] FIG16 is a schematic structural diagram of a tail cover according to another embodiment of the present application;

[0037] FIG17 is a schematic diagram of the internal structure of a tail cover according to another embodiment of the present application.

[0038] Reference numerals:

[0039] Figures 2-4, 16 and 7

[0040] 1. Furnace tube;

[0041] 2. Flange connection assembly; 21. Fixing plate; 22. Flange mounting plate; 23. Flange assembly; 231. Inner flange; 232. Outer flange; 24. First seal; 25. Second seal;

[0042] 3. Tail cover; 31. Branch pipe; 32. Arc surface; 33. Cooling chamber; 34. Water baffle; 35. Liquid inlet pipe; 36. Liquid outlet pipe; 121. First cavity; 122. Second cavity;

[0043] 4. Insulation parts; 41. Avoidance holes;

[0044] 5. Furnace body; 6. Heating device; 7. Furnace tube flange;

[0045] In Figure 5:

[0046] 101. Tail cover sheet metal; 102. Aluminum silicate insulation layer; 103. Thermal field; 104. Furnace tube; 141. Branch pipe;

[0047] In Figures 6 to 8:

[0048] 100, flange mounting plate; 110, third mounting hole; 200, furnace tail flange; 210, mating groove; 220, first cooling channel; 230, second mounting hole; 300, tail cover; 310, air pipe; 320, mating protrusion; 330, plug-in protrusion; 340, plug-in groove; 350, second cooling channel; 360, first mounting hole; 400, thermal insulation; 500, sealing element; 600, furnace body; 610, furnace tube;

[0049] In Figures 9 to 15:

[0050] 10. Tail cover; 11. Air pipe; 12. Cooling chamber; 121. First cavity; 1211. Baffle; 122. Second cavity; 1221. Water baffle; 13. Enclosure; 131. Vertical plate; 132. Annular plate; 1321. Connecting hole; 14. Outer sealing plate; 15. Inner sealing plate; 16. Matching groove; 17. Sealing protrusion; 18. Flange; 181. First mounting hole; 20. Liquid inlet pipe; 30. Liquid outlet pipe. DETAILED DESCRIPTION

[0051] In order to make the technical problems solved by this application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of this application are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0052] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0053] In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0054] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0055] Semiconductor manufacturing equipment is generally used in the production process of photovoltaic cells. The specific structure of the furnace tube structure of the embodiment of the present application is described below with reference to Figures 2 to 5.

[0056] The furnace tube structure can be applied to a hot furnace, which can be a diffusion furnace or other types of high-temperature furnaces used in the processing and manufacturing of photovoltaic cells, such as sintering furnaces, high-temperature furnaces, low-temperature furnaces, LPCVD reactors, PECVD reactors, oxidation furnaces, boron diffusion furnaces, etc. This application does not limit this.

[0057] The present application discloses a furnace tube structure, as shown in Figures 2 to 4. The furnace tube structure of this embodiment includes a furnace tube 1, both ends of the furnace tube 1 are open, and the tail end of the furnace tube 1 is provided with a barrier structure for blocking the outside world from contacting it. The barrier structure includes a flange connection component 2 and a tail cover 3. The flange connection component 2 is sleeved on the tail end of the furnace tube 1 and is used to be connected to the furnace body 5. The tail cover 3 is connected to the flange connection component 2 and can seal the tail end of the furnace tube 1. It can be understood that in this embodiment, both ends of the furnace tube 1 are open, the front end of the furnace tube 1 and the furnace tube flange 7 on the furnace body 5 are radially sealed, and the tail end of the furnace tube 1 is provided with a barrier structure to prevent the outside from contacting it, and the tail end of the furnace tube 1 is connected to the furnace body 5 through a flange connection assembly 2, and the tail end of the furnace tube 1 is sealed by a tail cover 3. During the actual vacuuming process, since the entire furnace tube 1 is in a relatively closed space inside the furnace body 5, there is no pressure difference between the two ends of the furnace tube 1, so that during the vacuuming process, the furnace tube 1 will remain stably inside the furnace body 5 and will not move (for example, the furnace tube 1 will not move toward the front end of the furnace tube 1 due to the action of air pressure, where the front end of the furnace tube 1 is the left end shown in Figure 3), thereby better avoiding the phenomenon of the furnace tube 1 being broken.

[0058] In addition, in existing furnace tube structures, furnace tube welding is difficult, with a transparent furnace tube in the middle, a furnace tube flange welded to the front end, and a semicircular structure welded to the rear end. This results in a complicated manufacturing process and low production yield. In contrast, in this embodiment, the furnace tube 1 is open at both ends, requiring only a furnace tube flange to be welded at one end. This results in a simple structure, easy manufacturing, and a high product yield. Furthermore, the furnace tube 1 is open at both ends, with the tail cap 3 sealing the rear end of the furnace tube 1. The flange connection assembly 2 and the tail cap 3 prevent the rear end of the furnace tube 1 from contacting the outside world, simplifying the structure of the entire furnace tube structure, facilitating assembly, and improving manufacturing efficiency.

[0059] In this embodiment, the furnace tube 1 can be made of quartz or other materials, and the material of the furnace tube is not specifically limited here.

[0060] In some embodiments, a branch pipe 31 is provided on the tail cover 3 .

[0061] In some specific embodiments, as shown in FIG4 , the flange connection assembly 2 includes a fixed plate 21, a flange mounting plate 22, a flange assembly 23, and a first sealing member 24. The fixed plate 21 is sleeved on the furnace tube 1, the flange mounting plate 22 is connected to the fixed plate 21, the flange assembly 23 is connected to the flange mounting plate 22 and is connected to the tail cover 3, and the first sealing member 24 is sandwiched between the flange assembly 23 and the tail cover 3. It will be understood that the fixed plate 21, the flange mounting plate 22, and the flange assembly 23 ensure that the tail cover 3 is stably connected to the tail end of the furnace tube 1, thereby stably sealing the tail end of the furnace tube 1. The additional first sealing member 24 can stably ensure the sealing of the connection between the flange assembly 23 and the tail cover 3.

[0062] In some more specific embodiments, as shown in FIG4 , the flange assembly 23 includes an inner flange 231 and an outer flange 232. The inner flange 231 is mounted on the flange mounting plate 22. The outer flange 232 is connected to the inner flange 231 and the tail cover 3. A first sealing member 24 is sandwiched between the outer flange 232 and the tail cover 3. A second sealing member 25 is further provided between the inner flange 231 and the outer flange 232. It will be understood that the inner flange 231 and the outer flange 232 ensure the sealing and stability of the connection between the entire flange connection assembly 2 and the tail cover 3. The additional second sealing member 25 ensures the sealing of the connection between the inner flange 231 and the outer flange 232.

[0063] In some optional embodiments, the inner flange 231 and the outer flange 232 both have cooling channels, water inlet pipes, and water outlet pipes, and the water inlet pipes and the water outlet pipes are connected to the cooling channels. It should be noted that in the boron expansion process, the temperature of the boron expansion process exceeds 1000°C. After the first round of the process, the temperature inside the diffusion furnace is still 800°C. When the second round of the process begins, vacuum is drawn at 800°C. At this time, heat will be drawn out from the branch pipe 31 along with the air. During the vacuuming process, the inner flange 231 and the outer flange 232 will experience a certain temperature rise. If the temperature of the inner flange 231 and the outer flange 232 is too high at this time, the first seal 24 and the second seal 25 will easily burn out. In this embodiment, the inner flange 231 and the outer flange 232 both have cooling channels, water inlet pipes and water outlet pipes. The water inlet pipes and the water outlet pipes are connected to the cooling channels. During the vacuuming process, coolant flows in the inner flange 231 and the outer flange 232, which can achieve cooling of the inner flange 231 and the outer flange 232, thereby avoiding the phenomenon of overheating of the inner flange 231 and the outer flange 232 damaging the first seal 24 or the second seal 25, thereby extending the service life of the first seal 24 or the second seal 25.

[0064] Optionally, a cooling source is connected between the water inlet and outlet pipes. Specifically, the outlet of the cooling source is connected to a water pump, which is connected to a flow meter and a thermometer, and then connected to the water inlet. The outlet pipe is connected to the return water port of the cooling source. This allows the coolant to circulate between the inner flange 231 and the outer flange 232, thereby effectively achieving the cooling function.

[0065] In some specific embodiments, as shown in FIG3 , the furnace tube structure further includes a heat-insulating member 4, which is disposed inside the furnace tube 1 and located at one end of the furnace tube 1 near the tail cover 3. It is understood that, during the actual process, the temperature inside the furnace tube 1 is relatively high. If the temperature of the furnace tube 1 is transmitted to the inner flange 231, the outer flange 232, or the tail cover 3, causing the temperature of the inner flange 231, the outer flange 232, or the tail cover 3 to also be relatively high, it is likely to cause the first seal 24, the second seal 25, and the sealing structure mounted on the branch pipe 31 of the tail cover 3 to burn out. In this embodiment, the thermal insulation component 4 is arranged inside the furnace tube 1 and is located at one end of the furnace tube 1 close to the tail cover 3, which can provide good thermal insulation, block the heat transfer from the furnace tube 1 toward the inner flange 231, the outer flange 232 and the tail cover 3, control the temperature of the inner flange 231, the outer flange 232 and the tail cover 3, reduce the possibility of burning of the first seal 24, the second seal 25 and the sealing structure installed on the branch pipe 31 of the tail cover 3, and extend the service life of the first seal 24, the second seal 25 and the sealing structure installed on the branch pipe 31 of the tail cover 3.

[0066] Optionally, in order to facilitate the air inlet pipe inserted into the branch pipe 31 of the tail cover 3 to extend into the interior of the furnace tube 1, the heat insulation member 4 is further provided with an escape hole 41. The lower end portion of the heat insulation member 4 can be directly cut off to avoid the furnace tube used for vacuuming.

[0067] In another related technology, the tail cover seal can be composed of parts such as a tail cover sheet metal and an aluminum silicate insulation layer, and is widely used in heat treatment equipment in the photovoltaic and semiconductor fields. As shown in Figure 5: The structure of the related technology is to nest the aluminum silicate insulation layer 102 on the tail cover sheet metal 101, and then fix the tail cover sealing device formed by bolts to the heat field, thereby isolating the heat source and protecting the tail end of the heat treatment equipment. Since the furnace tube 104 installed on the heat field 103 is integrated with the tail cover sealing device, and there are multiple branch pipes 141 at the tail end of the furnace tube 104, the structure of the related technology is difficult to process, and there are certain requirements for assembly techniques during installation, which is difficult. The quartz tube may be damaged during installation, and the production efficiency is low.

[0068] An embodiment of the present application provides a furnace tail sealing device, which has low requirements on assembly techniques and is less difficult to install, thereby facilitating the installation and disassembly of the furnace tail sealing device.

[0069] The specific structure of the furnace tail sealing device according to an embodiment of the present application will be described below with reference to FIG6 to FIG8 .

[0070] The present application discloses a furnace tail sealing device, which is installed at the tail end of the furnace body 600. As shown in Figures 6 to 8, the furnace tail sealing device includes a flange mounting plate 100, a furnace tail flange 200 and a tail cover 300. The flange mounting plate 100 is sleeved on the tail of the furnace body 600, the furnace tail flange 200 is installed on the flange mounting plate 100, the tail cover 300 is connected to the furnace tail flange 200 and is used to close the tail of the furnace body 600, and the tail cover 300 is provided with an air pipe 310 connected to the furnace pipe 610 in the furnace body 600. It can be understood that in the actual installation process, it is only necessary to put the flange mounting plate 100 on the tail of the furnace body 600, then install the furnace tail flange 200 on the flange mounting plate 100, and finally install the tail cover 300 on the flange mounting plate 100. Since the tail cover 300 is provided with an air pipe 310 connected to the furnace pipe 610, during the installation of the furnace tail sealing device, there is no need to pass through the branch pipe as required in the prior art, so that the furnace tail sealing device has lower requirements on the assembly technique and is less difficult to install, which facilitates the installation and disassembly of the furnace tail sealing device.

[0071] It should be supplemented that the rear portion of the furnace body 600 can be completely open or closed, but is provided with a plurality of avoidance holes for avoiding the air pipe 310 .

[0072] In some embodiments, as shown in Figures 7 and 8 , the furnace tail sealing device further includes a thermal insulator 400, which is sandwiched between the flange mounting plate 100 and the end face of the furnace body 600. It will be appreciated that the thermal insulator 400 can block heat transfer from the furnace body 600 to the flange mounting plate 100, thereby maintaining a relatively low temperature throughout the furnace tail sealing device during normal operation, thereby preventing burns to personnel. In the embodiments of the present application, the material of the thermal insulator 400 can be selected based on actual needs, and the specific material of the thermal insulator 400 is not limited herein.

[0073] In some embodiments, as shown in FIG8 , a seal 500 is interposed between the furnace tail flange 200 and the tail cover 300. It is understood that the seal 500 between the furnace tail flange 200 and the tail cover 300 can ensure the sealing of the connection between the furnace tail flange 200 and the tail cover 300, thereby ensuring the sealing of the entire furnace tail sealing device to the rear of the furnace body 600. At the same time, the rear of the furnace body 600 is sealed by squeezing the seal 500 between the furnace tail flange 200 and the tail cover 300. The entire furnace tail sealing device has only one sealing point, which reduces the difficulty of troubleshooting leaks. In the embodiments of the present application, the specific material and model of the seal 500 can be selected according to actual needs, and the specific material and model of the seal 500 are not limited herein.

[0074] In some specific embodiments, as shown in FIG8 , a mating groove 210 is provided on the side of the furnace tail flange 200 facing the tail cover 300, and a mating protrusion 320 is provided on the side of the tail cover 300 facing the furnace tail flange 200. The mating protrusion 320 is used to press the sealing member 500 against the mating groove 210. It can be understood that, through the connection between the mating protrusion 320 and the mating groove 210, on the one hand, the connection stability between the furnace tail flange 200 and the tail cover 300 can be improved, and on the other hand, the sealing performance of the connection between the furnace tail flange 200 and the tail cover 300 can be improved by installing the sealing member 500 in the mating groove 210 and being pressed by the mating protrusion 320, thereby further improving the sealing performance of the entire furnace tail sealing device to the tail of the furnace body 600.

[0075] In some embodiments, as shown in FIG8 , the tail cover 300 has a plug-in protrusion 330 , and the air pipe 310 (see FIG3 ) is inserted through the plug-in protrusion 330 , and the plug-in protrusion 330 is inserted into the furnace pipe 610 . It is understood that inserting the plug-in protrusion 330 into the furnace pipe 610 facilitates installation of the tail cover 300 . During installation, it is only necessary to align the plug-in protrusion 330 with the rear end of the furnace pipe 610 and push it in. Placing the air pipe 310 on the plug-in protrusion 330 ensures communication between the air pipe 310 and the furnace pipe 610 , thereby facilitating air intake or exhaust from the furnace pipe 610 .

[0076] In some specific embodiments, as shown in FIG8 , the tail cover 300 further includes an insertion groove 340 surrounding the insertion protrusion 330, and one end of the furnace tube 610 is inserted into the insertion groove 340. It will be appreciated that inserting one end of the furnace tube 610 into the insertion groove 340 ensures that the tail cover 300 seals the furnace tube 610, thereby preventing air leakage from the hot furnace during actual operation.

[0077] In some embodiments, as shown in FIG8 , a first cooling channel 220 is provided on the side of the furnace tail flange 200 facing the flange mounting plate 100, and a coolant flows through the first cooling channel 220. It is understood that in order to improve the sealing performance of the connection between the furnace tail flange 200 and the tail cover 300, a seal 500 is usually provided between the furnace tail flange 200 and the tail cover 300. If the temperature of the furnace tail flange 200 is too high, the service life of the seal 500 will be reduced. During actual operation, the seal 500 needs to be frequently replaced, thereby affecting normal production. In this embodiment, a first cooling channel 220 is provided on the side of the furnace tail flange 200 facing the flange mounting plate 100. The coolant in the first cooling channel 220 can cool the furnace tail flange 200, thereby preventing the temperature of the furnace tail flange 200 from being too high and reducing the service life of the seal 500. This extends the replacement cycle of the seal 500 and helps improve production capacity.

[0078] In some embodiments, as shown in FIG8 , a second cooling channel 350 is defined on the tail cover 300, and a liquid inlet pipe and a liquid outlet pipe connected to the second cooling channel 350 are provided on the tail cover 300. It is understandable that in order to improve the sealing performance of the connection between the furnace tail flange 200 and the tail cover 300, a seal 500 is usually provided between the furnace tail flange 200 and the tail cover 300. If the temperature of the tail cover 300 is too high, the service life of the seal 500 will be reduced. In actual operation, the seal 500 needs to be frequently replaced, thereby affecting normal production. In this embodiment, the second cooling channel 350 is defined on the tail cover 300. The coolant in the second cooling channel 350 can cool the tail cover 300, thereby avoiding the phenomenon that the temperature of the tail cover 300 is too high and reduces the service life of the seal 500, extending the replacement cycle of the seal 500, and helping to improve production capacity.

[0079] In some embodiments, as shown in FIG8 , a first mounting hole 360 ​​is provided on the tail cover 300, a second mounting hole 230 corresponding to the first mounting hole 360 ​​is provided on the tail flange 200, and the flange mounting plate 100 is provided with a third mounting hole 110 corresponding to the second mounting hole 230. A connecting member passes through the first mounting hole 360, the second mounting hole 230, and the third mounting hole 110 to securely connect the tail cover 300, the tail flange 200, and the flange mounting plate 100. It will be appreciated that securely connecting the tail cover 300, the tail flange 200, and the flange mounting plate 100 by passing the connecting member through the first mounting hole 360, the second mounting hole 230, and the third mounting hole 110 facilitates installation and removal of the tail sealing device.

[0080] Example:

[0081] As shown in Figures 6-8, the furnace tail sealing device of the present application includes a flange mounting plate 100, a furnace tail flange 200, a tail cover 300, a thermal insulation member 400, and a sealing member 500. The flange mounting plate 100 is sleeved over the tail portion of the furnace body. The tail cover 300 is provided with a first mounting hole 360, the furnace tail flange 200 is provided with a second mounting hole 230 corresponding to the first mounting hole 360, and the flange mounting plate 100 is provided with a third mounting hole 110 corresponding to the second mounting hole 230. A connector passes through the first mounting hole 360, the second mounting hole 230, and the third mounting hole 110 to securely connect the tail cover 300, the furnace tail flange 200, and the flange mounting plate 100. The tail cover 300 is provided with an air pipe 310 that communicates with the furnace pipe 610 within the furnace body 600. The thermal insulation member 400 is sandwiched between the flange mounting plate 100 and the end surface of the furnace body 600. The side of the tail flange 200 facing the tail cover 300 is provided with a mating groove 210, and the side of the tail cover 300 facing the tail flange 200 is provided with a mating protrusion 320. The mating protrusion 320 is used to press the seal 500 against the mating groove 210. The tail cover 300 has a plug-in protrusion 330, and the air pipe 310 is inserted through the plug-in protrusion 330, and the plug-in protrusion 330 is inserted into the furnace pipe 610. The side of the tail flange 200 facing the flange mounting plate 100 is provided with a first cooling channel 220, and coolant flows through the first cooling channel 220. The tail cover 300 defines a second cooling channel 350, and the tail cover 300 is provided with a liquid inlet pipe and a liquid outlet pipe connected to the second cooling channel 350.

[0082] The present application also discloses a hot furnace, including a furnace tail sealing device and a furnace body 600 as shown in Figures 6 to 8. A furnace tube 610 is provided in the furnace body 600. The furnace tail sealing device is used to seal the tail of the furnace body 600 and the tail end of the furnace tube 610.

[0083] In some embodiments, the furnace tube 610 of this hot furnace adopts the furnace tube 1 shown in Figure 3 with both ends open, so that during the vacuuming process, the furnace tail sealing device can seal the tail of the furnace body 600, thereby reducing the pressure difference between the inside and outside of the furnace body 600. The furnace tube 610 will remain stably inside the furnace body 600 and the thermal insulation component 400 and will not move, thereby reducing the risk of the furnace tube 610 being damaged by movement.

[0084] The hot furnace of the present application has the furnace tail sealing device described above, so the assembly and disassembly processes of the hot furnace are relatively simple.

[0085] The structure of a tail cover 10 according to another embodiment of the present application will be described below with reference to FIG. 9 to FIG. 15 .

[0086] The present application discloses a tail cover 10, which is used to seal the tail end of a hot furnace. The tail cover 10 is provided with an air pipe 11 that is connected to the furnace pipe 610 inside the hot furnace, and the tail cover 10 has a cooling chamber 12 inside. Cooling liquid flows in the cooling chamber 12, and a portion of the cooling chamber 12 is provided within the structure of the tail cover 10 for sealing the tail end of the furnace. It is understandable that since the tail cover 10 is provided with the air pipe 11 that is connected to the furnace pipe 610 inside the hot furnace, during the installation of the tail cover 10, there is no need to perform the installation operation of passing through the branch pipe on the furnace pipe 610 as in the prior art, so that the tail cover 10 has lower requirements on assembly techniques, is less difficult to install, and facilitates the installation and removal of the tail cover 10. At the same time, since the tail cover 10 has a cooling cavity 12 inside, a part of the cooling cavity 12 is arranged in the structure of the tail cover 10 for sealing the tail end of the furnace. On the one hand, the cooling cavity 12 can reduce the heat radiated from the inside of the furnace tube 610 to the tail end of the furnace, and can ensure that the tail end of the hot furnace has a lower temperature. On the other hand, it can also keep the ambient temperature of the tail end seal 500 installed at the tail end of the furnace within the allowable range, reduce the aging speed of the seal 500, and extend the service life of the seal 500.

[0087] In some embodiments, as shown in Figures 10 and 11 , the cooling chamber 12 includes a first cavity 121 and a second cavity 122 that are interconnected. The longitudinal section of the second cavity 122 is perpendicular to the axial direction of the furnace tube 610, and the first cavity 121 is circumferentially arranged around the second cavity 122. It is understood that because the first cavity 121 is an annular cooling channel, it can effectively cool the inner ring of the seal 500, thereby maintaining the ambient temperature of the seal 500 installed at the furnace tail end within an allowable range. In some embodiments, the second cooling channel 350 shown in Figure 8 can be the first cavity 121 shown in Figures 10 and 11 , that is, the second cooling channel 350 shown in Figure 8 is an annular cooling channel that can be used to cool the seal 500. The longitudinal section of the second cavity 122 is perpendicular to the axial direction of the furnace tube 610, allowing the second cavity 122 to reduce the heat radiated from the interior of the furnace tube 610 to the furnace tail end, thereby further cooling the seal 500.

[0088] In some specific embodiments, as shown in FIG13 , a plurality of water baffles 1221 are provided in the second cavity 122 at intervals along the circumference of the furnace tube 610. It will be appreciated that the water baffles 1221 can divide the second cavity 122 into channels for the flow of coolant and are distributed throughout the second cavity 122, thereby facilitating the coolant in the second cavity 122 to reduce the heat radiated from the interior of the furnace tube 610 to the furnace tail end.

[0089] In some more specific embodiments, as shown in FIG13 , the air pipe 11 passes through the second cavity 122. Of the two adjacent water baffles 1221 along the circumference of the furnace tube 610, one water baffle 1221 has one end connected to the air pipe 11 and the other end spaced apart from the sidewall of the second cavity 122. The other water baffle 1221 has one end connected to the sidewall of the second cavity 122 and the other end spaced apart from the air pipe 11. It is understood that during the circulation of coolant, the ends of the water baffles 1221 spaced apart from the sidewall of the second cavity 122 form a flow opening for the coolant to flow through. The ends of the water baffles 1221 spaced apart from the air pipe 11 also form a flow opening for the coolant to flow through. The flow openings formed by the two adjacent water baffles 1221 are spaced apart along the radial direction of the second cavity 122. This can extend the length of the water channel formed by the water baffles 1221 for the coolant to flow, thereby improving the cooling effect of the coolant.

[0090] It should be additionally explained here that, in the embodiment of the present application, the specific shape of the water baffle 1221 can be a straight plate, an arc-shaped plate, or a plate structure of other shapes according to actual needs, and the specific structure of the water baffle 1221 is not limited here.

[0091] In some specific embodiments, as shown in FIG15 , a baffle 1211 is further provided within the first cavity 121, and the baffle 1211 is located between the liquid inlet and the liquid outlet of the first cavity 121. It is understood that because the baffle 1211 is located between the liquid inlet and the liquid outlet of the first cavity 121, that is, in the circumferential direction of the first cavity 121, the baffle 1211 is located between the communicating hole 1321 between the first cavity 121 and the second cavity 122, and the liquid inlet of the first cavity 121. During actual operation, because the baffle 1211 is provided within the first cavity 121, after entering the first cavity 121 through the liquid inlet, the coolant needs to flow a longer distance before entering the second cavity 122 through the communicating hole 1321. Therefore, during the actual cooling process, the cooling liquid can first cool the first cavity 121 and then cool the second cavity 122 , thereby giving priority to protecting the sealing member 500 .

[0092] In some embodiments, as shown in Figures 10, 11, and 13, a liquid inlet pipe 20 and a liquid outlet pipe 30 are further provided on the tail cover 10. The liquid inlet pipe 20 is in communication with the first cavity 121, and the liquid outlet pipe 30 is in communication with the second cavity 122. It is understood that, in actual operation, the cooling liquid from the external liquid source enters the first cavity 121 through the liquid inlet pipe 20, fills the first cavity 121, enters the second cavity 122, and then returns to the external liquid source through the liquid outlet pipe 30. In this way, the cooling liquid in the entire cooling cavity 12 is always in a circulating state during actual operation, which is beneficial to cooling the furnace tail seal 500 and the furnace tail end of the hot furnace.

[0093] In some embodiments, as shown in Figures 10 and 15, the tail cover 10 includes a panel 13, an outer sealing plate 14, and an inner sealing plate 15. The panel 13 includes a vertical plate 131 and two annular plates 132 connected to the vertical plate 131. The two annular plates 132 are spaced apart. The outer sealing plate 14 is connected to the two annular plates 132 and defines a first cavity 121 with the two annular plates 132. The inner sealing plate 15 is connected to the inner circumferential wall of the inner annular plate 132 and defines a second cavity 122 with the vertical plate 131. The inner annular plate 132 is provided with a connecting hole 1321 connecting the first cavity 121 and the second cavity 122. It is understood that in the actual assembly process, the outer sealing plate 14 and the inner sealing plate 15 can be connected to the panel 13 by a sealing connection method such as welding. The structure of assembling the tail cover 10 into multiple plate-shaped structures can facilitate the manufacture of the tail cover 10 and improve the manufacturing efficiency and manufacturing yield of the tail cover 10.

[0094] Preferably, the connecting hole 1321 is symmetrically arranged with respect to the liquid inlet of the first cavity 121, that is, a baffle 1211 is arranged between the connecting hole 1321 and the liquid inlet of the first cavity 121, so that the coolant in the first cavity 121 can enter the second cavity 122 from the connecting hole 1321 only after it is full, thereby ensuring the content of the coolant in the first cavity 121.

[0095] In some embodiments, as shown in Figures 7 and 10, the side of the tail cover 10 facing the furnace tube 610 has a mating groove 16 that mates with the furnace tube 610. It is understood that inserting one end of the furnace tube 610 into the mating groove 16 ensures that the tail cover 10 seals the furnace tube 610, thereby preventing air leakage in the hot furnace during actual operation.

[0096] In some embodiments, as shown in Figures 7 and 12 , the side of the tail cover 10 facing the furnace tube 610 has a sealing protrusion 17 that abuts against the furnace tail seal 500. It is understood that during actual installation, after the tail cover 10 is connected to the furnace tail flange 200, the sealing protrusion 17 can press the furnace tail seal 500, thereby further improving the sealing performance of the entire tail cover 10 to the open furnace tail end of the hot furnace.

[0097] In some embodiments, as shown in FIG9 , the tail cover 10 is provided with a flange 18 along its circumference. The flange 18 is used to connect to the furnace tail flange 200 of the hot furnace. It is understood that the connection between the flange 18 and the furnace tail flange 200 improves the stability of the connection between the tail cover 10 and the furnace tail flange 200, and ensures the sealing performance of the connection between the tail cover 10 and the furnace tail flange 200.

[0098] Example:

[0099] The specific structure of the tail cover 10 of a specific embodiment of the present application is described below with reference to Figures 7 to 15.

[0100] As shown in Figures 7 to 15, the tail cover 10 is provided with a plurality of gas pipes 11, liquid inlet pipes 20, and liquid outlet pipes 30 that communicate with the furnace tubes 610 inside the hot furnace. The tail cover 10 includes a surrounding plate 13, an outer sealing plate 14, and an inner sealing plate 15. The surrounding plate 13 includes a vertical plate 131 and two annular plates 132 connected to the vertical plate 131. The two annular plates 132 are spaced apart. The outer sealing plate 14 is connected to the two annular plates 132 and defines a first cavity 121 with the two annular plates 132. The inner sealing plate 15 is connected to the inner circumferential wall of the annular plate 132 located on the inner side and defines a second cavity 122 with the vertical plate 131. The first cavity 121 is connected to the liquid inlet pipe 20, and the second cavity 122 is connected to the liquid outlet pipe 30. The second cavity 122 is provided with a plurality of water retaining plates 1221 spaced apart along the circumference of the furnace tube 610. One of the multiple air pipes 11 is disposed through the second cavity 122. Of the two adjacent water baffles 1221, one water baffle 1221 has one end connected to the air pipe 11 and the other end spaced apart from the sidewall of the second cavity 122. The other water baffle 1221 has one end connected to the sidewall of the second cavity 122 and the other end spaced apart from the air pipe 11. The side of the tail cover 10 facing the furnace pipe 610 includes a mating groove 16 that mates with the furnace pipe 610, a sealing protrusion 17 that abuts against the furnace tail seal 500, and a flange 18 that connects to the furnace tail flange 200. A baffle 1211 is also disposed within the first cavity 121. In the circumferential direction of the first cavity 121, the baffle 1211 is located between the communicating hole 1321 and the liquid inlet pipe 20 between the first and second cavities 121, 122.

[0101] The advantages of the tail cover 10 of this embodiment are as follows:

[0102] First, since the tail cover 10 is provided with an air pipe 11 connected to the furnace pipe 610 inside the hot furnace, during the installation of the tail cover 10, there is no need to pass through the branch pipe on the furnace pipe 610 as in the prior art, which facilitates the installation and removal of the tail cover 10;

[0103] Second, since the tail cover 10 has a first cavity 121 and a second cavity 122 for circulating cooling liquid, the cooling liquid in the first cavity 121 can effectively cool the inner ring of the seal 500, and the second cavity 122 can reduce the heat radiated from the interior of the furnace tube 610 to the furnace tail end, thereby further cooling the furnace tail seal 500;

[0104] Third: The water baffle 1221 in the second cavity 122 can divide the second cavity 122 into water channels for the flow of coolant, and covers the entire second cavity 122, which is beneficial to enhancing the effect of the coolant in the second cavity 122 in reducing the heat radiated from the inside of the furnace tube 610 to the furnace tail end.

[0105] In one embodiment, as shown in FIG16 , the inner sidewall of the open end of the tail cover 3 facing the furnace tube 1 is a curved surface 32, and the curved surface 32 is arranged to protrude in a direction away from the furnace tube 1. It is understood that during the process of evacuating the furnace tube 1, a pressure difference will exist between the inner and outer sides of the tail cover 3. Compared with a flat surface, the curved surface 32 has a superior ability to resist deformation. The inner sidewall of the open end of the tail cover 3 facing the furnace tube 1 is a curved surface 32, and the curved surface 32 is arranged to protrude in a direction away from the furnace tube 1. This ensures the deformation resistance of the tail cover 3, thereby preventing the occurrence of air leakage caused by excessive deformation of the tail cover 3 during the vacuuming process.

[0106] Preferably, the arc surface 32 is provided with an anti-corrosion and high-temperature resistant coating, which can prevent material from falling off from the inner wall of the tail cover 3 facing the open end of the furnace tube 1 during the process, and avoid contamination of the material to be processed in the furnace body 5.

[0107] In one embodiment, a cooling fan is provided on the outer side wall of the open end of the tail cover 3 facing away from the furnace tube 1. It will be appreciated that, compared to the liquid cooling solution described above in which a cooling chamber is provided on the tail cover 3 and a liquid inlet and outlet pipes are connected to the tail cover 3, in this embodiment, a cooling fan is directly installed on the outer side wall of the open end of the tail cover 3 facing away from the furnace tube 1, thereby achieving heat dissipation of the tail cover 3 through air cooling. While ensuring heat dissipation effect, this also simplifies the structure of the tail cover 3, reduces the manufacturing cost of the tail cover 3, reduces the difficulty of assembling the entire furnace tube structure, and improves the assembly efficiency of the furnace tube structure.

[0108] In other specific embodiments, as shown in FIG17 , the tail cover 3 has a cooling cavity 33, and is provided with a liquid inlet pipe 35 and a liquid outlet pipe 36 in communication with the cooling cavity 33. Compared with the embodiment of FIG10 to FIG16 , the liquid inlet pipe 35 and the liquid outlet pipe 36 in the embodiment of FIG17 are arranged at different positions from the liquid inlet pipe 20 and the liquid outlet pipe 30 in the embodiment of FIG10 to FIG16 . For example, the liquid inlet pipe 35 and the liquid outlet pipe 36 in the embodiment of FIG17 can both be arranged to communicate with the second cavity 122 of the cooling cavity 33. Alternatively, in another specific embodiment, the liquid inlet pipe 35 and the liquid outlet pipe 36 can both be arranged to communicate with the first cavity 121 of the cooling cavity 33.

[0109] It should be noted that, in the actual vacuuming process, please refer to Figures 9 and 17. The vacuum furnace tube is inserted into the branch tube 31 on the tail cover 3. There are gaps at both ends of the furnace tube after insertion. In order to ensure stable vacuuming, a sealing structure is provided between the branch tube 31 and the vacuum furnace tube. In the boron expansion process, the temperature of the boron expansion process exceeds 1000°C. After the first round of the process is completed, the temperature inside the diffusion furnace is still 800°C. When the second round of the process begins, vacuuming is performed at 800°C. At this time, heat will be extracted from the branch tube 31 along with the air. At this time, the temperature of the branch tube 31 will rise rapidly, and the sealing structure at the branch tube 31 may be burned. It can be understood that in this embodiment, the tail cover 3 has a cooling cavity 33, and is provided with a liquid inlet pipe 35 and a liquid outlet pipe 36 connected to the cooling cavity 33. In this way, during the actual vacuuming process, coolant flows in the tail cover 3, so that a part of the branch pipe 31 is immersed in the coolant, which can achieve the cooling of the branch pipe 31, thereby avoiding the phenomenon of overheating of the branch pipe 31 damaging the sealing structure, and extending the service life of the sealing structure at the branch pipe 31.

[0110] Optionally, a cooling source is connected between the liquid inlet pipe 35 and the liquid outlet pipe 36. Specifically, the water outlet of the cooling source is connected to a water pump, which is connected to a flow meter and a thermometer and then connected to the liquid inlet pipe 35. The liquid outlet pipe 36 is connected to the water return port of the cooling source. In this way, the coolant for cooling the tail cover 3 is circulated, which can better achieve the cooling function.

[0111] In some more specific embodiments, the cooling chamber 33 is provided with a plurality of water baffles 34 spaced apart along the circumference of the tail cover 3. It will be appreciated that the plurality of water baffles 34 can divide the cooling chamber 33 into a maze-like flow path, preventing the coolant from being in a "stagnant" state, ensuring that the coolant flows through the cooling chamber 33 and improving the cooling effect. It should be noted that the shape, size, number, and arrangement of the water baffles 34 can be selected according to actual needs.

[0112] Example:

[0113] As shown in Figures 2-4, 16, and 17, the furnace tube structure of this embodiment includes a furnace tube 1, a flange connection assembly 2, a tail cover 3, and a thermal insulation member 4. The furnace tube 1 is open at both ends. The flange connection assembly 2 includes a fixed plate 21, a flange mounting plate 22, a flange assembly 23, and a first sealing member 24. The fixed plate 21 is sleeved on the furnace tube 1, and the flange mounting plate 22 is connected to the fixed plate 21. The flange assembly 23 includes an inner flange 231 and an outer flange 232. The inner flange 231 is mounted on the flange mounting plate 22, and the outer flange 232 is connected to the inner flange 231 and the tail cover 3. The first sealing member 24 is sandwiched between the outer flange 232 and the tail cover 3. A second sealing member 25 is also provided between the inner flange 231 and the outer flange 232. The thermal insulation member 4 is provided inside the furnace tube 1 and is located at the end of the furnace tube 1 near the tail cover 3. The tail cover 3 has a cooling chamber 33 and is provided with a liquid inlet pipe 35 and a liquid outlet pipe 36 that communicate with the cooling chamber 33. The cooling chamber 33 is provided with a plurality of water baffles 34 spaced apart along the circumference of the tail cover 3. The inner side wall of the open end of the tail cover 3 facing the furnace tube 1 is a curved surface 32, and the curved surface 32 is convex in the direction away from the furnace tube 1.

[0114] Beneficial effects of the furnace tube structure of this embodiment:

[0115] First, since both ends of the furnace tube 1 are open, the tail cover 3 seals the tail of the furnace tube 1, so that during the vacuuming process, the furnace tube 1 will remain stably inside the furnace body 5 and will not move, thereby effectively preventing the furnace tube 1 from breaking;

[0116] Second, the furnace tube 1 is open at both ends, and only the furnace tube flange needs to be welded at one end, which has a simple structure, is easy to manufacture, and has a high product yield;

[0117] Third: The tail cover 3 has a cooling cavity 33, and is provided with a liquid inlet pipe 35 and a liquid outlet pipe 36 communicating with the cooling cavity 33. During the vacuuming process, coolant flows in the tail cover 3, which can reduce the temperature of the branch pipe 31, thereby preventing the overheated tail cover 3 from damaging the sealing structure and extending the service life of the sealing structure.

[0118] Fourth: the inner side wall of the open end of the tail cover 3 facing the furnace tube 1 is a curved surface 32, which can ensure the deformation resistance of the tail cover 3, thereby avoiding the phenomenon of excessive deformation of the tail cover 3 during the vacuuming process and causing air leakage.

[0119] The present application also discloses a heat furnace, comprising a furnace body 5 , a heating device 6 and the aforementioned furnace tube structure. The furnace tube structure is arranged in the furnace body 5 , and the heating device 6 is located in the furnace body 5 and is sleeved on the furnace tube 1 .

[0120] The heating furnace of the present application has the furnace tube structure described above, so the heating furnace has higher safety and reliability in use, and can better prevent the furnace tube structure from breaking.

[0121] Throughout this specification, references to "some embodiments," "other embodiments," and the like indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0122] The above contents are only some embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there may be changes in the specific implementation methods and application scopes. The content of this specification should not be understood as limiting the present invention.

Claims

1. A furnace tail sealing device, which is used to seal the tail of a furnace body, characterized in that: The furnace tail sealing device comprises: A flange mounting plate, wherein the flange mounting plate is sleeved on the rear portion of the furnace body; A furnace tail flange, the furnace tail flange is mounted on the flange mounting plate; A tail cover is connected to the furnace tail flange and is used to close the tail of the furnace body. The tail cover is provided with an air pipe connected to the furnace pipe in the furnace body.

2. The furnace tail sealing device according to claim 1, characterized in that: The tail cover has a plug-in protrusion, the air pipe is passed through the plug-in protrusion, and the plug-in protrusion is inserted into the furnace tube.

3. The furnace tail sealing device according to claim 2, characterized in that: The tail cover is also provided with a plug-in groove arranged around the plug-in protrusion, and one end of the furnace tube is plugged into the plug-in groove.

4. The furnace tail sealing device according to claim 1, characterized in that: A sealing member is sandwiched between the furnace tail flange and the tail cover, a matching groove is provided on the side of the furnace tail flange facing the tail cover, and a matching protrusion is provided on the side of the tail cover facing the furnace tail flange, and the matching protrusion is used to press the sealing member against the matching groove.

5. The furnace tail sealing device according to any one of claims 1 to 4, characterized in that: A first cooling channel is provided on one side of the furnace tail flange facing the flange mounting plate, and a coolant flows in the first cooling channel.

6. The furnace tail sealing device according to any one of claims 1 to 4, characterized in that: A second cooling channel is defined on the tail cover, and a liquid inlet pipe and a liquid outlet pipe communicating with the second cooling channel are provided on the tail cover.

7. The furnace tail sealing device according to any one of claims 1 to 4, characterized in that: The tail cover is provided with a first mounting hole, the furnace tail flange is provided with a second mounting hole corresponding to the first mounting hole, the flange mounting plate is provided with a third mounting hole corresponding to the second mounting hole, and the connecting member passes through the first mounting hole, the second mounting hole and the third mounting hole to fix the tail cover, the furnace tail flange and the flange mounting plate.

8. The furnace tail sealing device according to claim 1, characterized in that: The tail cover has a cooling cavity inside, and a cooling liquid flows in the cooling cavity. A part of the cooling cavity is arranged in the structure of the tail cover for sealing the tail of the furnace body.

9. The furnace tail sealing device according to claim 8, characterized in that: The cooling cavity comprises a first cavity and a second cavity which are connected, the longitudinal section of the second cavity is arranged perpendicular to the axial direction of the furnace tube, and the first cavity is arranged circumferentially around the second cavity.

10. The furnace tail sealing device according to claim 9, characterized in that: A plurality of water baffles are arranged in the second cavity at intervals along the circumference of the furnace tube.

11. The furnace tail sealing device according to claim 10, characterized in that: The air pipe passes through the second cavity. Among the two water baffles adjacent to each other along the circumference of the furnace tube, one end of one of the water baffles is connected to the air pipe, and the other end is spaced apart from the side wall of the second cavity. One end of the other water baffle is connected to the side wall of the second cavity, and the other end is spaced apart from the air pipe.

12. The furnace tail sealing device according to claim 9, characterized in that: A baffle is also disposed in the first cavity, and the baffle is located between the liquid inlet of the first cavity and the liquid outlet of the first cavity.

13. The furnace tail sealing device according to any one of claims 9 to 12, characterized in that: The tail cover is also provided with a liquid inlet pipe and a liquid outlet pipe, wherein the liquid inlet pipe is communicated with the first cavity, and the liquid outlet pipe is communicated with the second cavity.

14. The furnace tail sealing device according to any one of claims 9 to 12, characterized in that: The tail cover comprises: The enclosure plate comprises a vertical plate and two annular plates connected to the vertical plate, and the two annular plates are arranged at intervals; an outer sealing plate, the outer sealing plate being connected to the two annular plates and defining the first cavity together with the two annular plates; An inner sealing plate is connected to the inner peripheral wall of the annular plate located on the inner side and defines the second cavity with the vertical plate; wherein: a connecting hole connecting the first cavity and the second cavity is provided on the annular plate located on the inner side.

15. A heating furnace, characterized in that: The hot furnace comprises a furnace body and a furnace tail sealing device according to any one of claims 1 to 14, wherein the furnace tail sealing device is used for sealing the tail of the furnace body.

Images