Microscope objective and mechanical structure

Abstract

A microscope objective and a mechanical structure. The microscope objective comprises a first lens group (G1), a second lens group (G2), and a third lens group (G3) which are sequentially arranged in a light transmission direction; the first lens group (G1) has positive focal power and is used for excluding temperature influence when the microscope is in a low-temperature environment, and increasing the angle at which the microscope objective collects light and correcting the spherical aberration, distortion and chromatic aberration of the microscope objective; the second lens group (G2) has negative focal power and is used for correcting the spherical aberration, coma aberration, astigmatism, and chromatic aberration of the microscope objective; and the third lens group (G3) has negative focal power and is used for correcting the spherical aberration, lateral chromatic aberration, and field curvature of the microscope objective.

Description

Microscope objective lens and mechanical structure

[0001] This disclosure claims priority to Chinese Patent Application No. 202310802428.7 filed on June 30, 2023, the entire contents of which are incorporated herein by reference. Technical Field

[0002] The present disclosure relates to the field of optical imaging technology, and in particular to a microscope objective lens and a mechanical structure. Background Art

[0003] Biological microscopes are one of the indispensable tools in life science research, and optical performance is a key factor affecting the imaging quality of microscopes. Important parameters for measuring the optical performance of objective lenses include numerical aperture (NA), working distance (WD), and chromatic aberration (CA). Numerical aperture refers to the tangent value of the half-angle of the maximum allowable incident light on the front focal plane of the objective lens. The larger the numerical aperture, the higher the imaging resolution and the clearer the image. Working distance refers to the distance from the front surface of the objective lens to the sample plane. The longer the working distance, the thicker the sample can be accommodated, and a variety of different imaging modes can also be performed, such as reflection, fluorescence, and confocal. Chromatic aberration refers to the fact that light of different wavelengths has different focal lengths after passing through the lens, resulting in color deviation in the image.

[0004] With the rapid development of life science research, cryogenic microscopy has become an important branch of life science research. When traditional microscope objectives work at low temperatures, the dispersion effect caused by the change of refractive index with temperature will cause serious chromatic aberration problems, affecting the imaging quality. Therefore, designing a cryogenic microscope objective with apochromatism has become an important challenge in today's life science research. At the same time, cryogenic samples usually need to be frozen using cryogenic media such as liquid nitrogen. Currently, most commercial microscopes are used at room temperature. Low temperatures will cause the objective lens adhesive to fail and affect the optical properties of the glass, resulting in poor image quality. This requires cryogenic microscope objectives to have a long working distance, a large numerical aperture and the ability to withstand low temperatures in order to obtain high-resolution imaging under low-temperature conditions. However, long working distance and large numerical aperture are often in conflict with achromatism in design, and a balance needs to be struck between these factors.

[0005] Summary of the Invention

[0006] In response to the above technical problems, the present disclosure provides a microscope objective lens and a mechanical structure for at least partially solving the technical problem that the long working distance and large numerical aperture are often inconsistent with achromatism in design.

[0007] Based on this, a first aspect of an embodiment of the present disclosure provides a microscope objective lens, comprising: a first lens group, a second lens group, and a third lens group arranged in sequence along a light transmission direction; wherein: the first lens group has positive optical power, which is used to isolate the microscope from temperature influences when the microscope is in a low-temperature environment, while increasing the angle at which the microscope objective lens collects light and correcting the spherical aberration, distortion, and chromatic aberration of the microscope objective lens; the second lens group has negative optical power, which is used to correct the spherical aberration, coma, astigmatism, and chromatic aberration of the microscope objective lens; and the third lens group has negative optical power, which is used to correct the spherical aberration, lateral chromatic aberration, and field curvature of the microscope objective lens.

[0008] According to an embodiment of the present disclosure, the first lens group includes: a plane glass, a meniscus lens, a biconvex lens, and a first cemented lens formed by cementing a first lens, a second lens, and a third lens, which are arranged in sequence along the direction of light transmission; the plane glass is used to provide thermal insulation; the meniscus lens is used to correct the spherical aberration introduced by the plane glass and increase the working distance of the microscope objective lens; the biconvex lens is used to increase the angle at which the microscope objective lens collects light; and the first cemented lens is used to reduce the spherical aberration, distortion, and chromatic aberration of the microscope objective lens.

[0009] According to an embodiment of the present disclosure, the radius of curvature of the side of the meniscus lens close to the flat glass is -11mm to -10mm, and the radius of curvature of the side of the meniscus lens close to the biconvex lens is -5.5mm to -4.5mm; the radius of curvature of the side of the biconvex lens close to the meniscus lens is 260mm to 270mm, and the radius of curvature of the side of the biconvex lens close to the first lens is -27mm to -25mm; the radius of curvature of the side of the first lens close to the biconvex lens is 12.5mm to 14.5mm, and the radius of curvature of the side of the first lens close to the second lens is -11mm to -9mm; the radius of curvature of the side of the third lens close to the second lens is 10mm to 12mm, and the radius of curvature of the side of the third lens away from the second lens is -13mm to -11mm.

[0010] According to an embodiment of the present disclosure, the material of the flat glass includes fused silica.

[0011] According to an embodiment of the present disclosure, the second lens group includes: at least one group of cemented lenses for correcting spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective.

[0012] According to an embodiment of the present disclosure, at least one group of cemented lenses includes: a second cemented lens, which is formed by cementing a fourth lens and a fifth lens arranged in sequence along the light transmission direction, and is used to correct the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective; or a third cemented lens, which is formed by cementing a sixth lens, a seventh lens and an eighth lens arranged in sequence along the light transmission direction, and is used to correct the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective; or a second cemented lens and a third cemented lens arranged in sequence along the light transmission direction, the second cemented lens is formed by cementing a fourth lens and a fifth lens, and the third cemented lens is formed by cementing a sixth lens, a seventh lens and an eighth lens; the second cemented lens performs a primary correction on the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective, and the third cemented lens is used to perform a secondary correction on the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective.

[0013] According to an embodiment of the present disclosure, the radius of curvature of the fourth lens away from the fifth lens is 12.5 mm to 14.5 mm; the radius of curvature of the fourth lens close to the fifth lens is -13.5 mm to 11.5 mm; the radius of curvature of the fifth lens away from the fourth lens is -30 mm to -27 mm; and / or the radius of curvature of the sixth lens away from the seventh lens is 18 mm to 20 mm; the radius of curvature of the sixth lens close to the seventh lens is 5 mm to 7 mm; the radius of curvature of the eighth lens close to the seventh lens is -9.5 mm to -7.5 mm; and the radius of curvature of the eighth lens away from the seventh lens is -35 mm to -33 mm.

[0014] According to an embodiment of the present disclosure, the third lens group includes: a fourth cemented lens, which is formed by cementing a ninth lens and a tenth lens; the fourth cemented lens is used to correct the spherical aberration and lateral chromatic aberration of the microscope objective; and a plano-concave lens, which is used to correct the field curvature of the microscope objective.

[0015] According to an embodiment of the present disclosure, the curvature radius of the ninth lens away from the tenth lens is 6 mm to 7 mm; the curvature radius of the ninth lens close to the tenth lens is 70 mm to 75 mm; the curvature radius of the tenth lens away from the ninth lens is 3.5 mm to 4.5 mm; the curvature radius of the plano-concave lens close to the tenth lens is -6 mm to -4 mm; and the curvature radius of the plano-concave lens away from the tenth lens is 73 mm to 76 mm.

[0016] A second aspect of the embodiments of the present disclosure provides a mechanical structure for assembling the above-mentioned microscope objective lens, wherein the portion of the mechanical structure for assembling the flat glass is an independent structure, and the material of the portion for assembling the flat glass includes indium steel.

[0017] The microscope objective lens and mechanical structure provided by the embodiments of the present disclosure have at least the following beneficial effects:

[0018] Since the microscope objective adopts a three-section objective structure, the first lens group is used to isolate the influence of the low temperature environment on the microscope, while increasing the angle of the objective lens to collect light, and preliminarily correcting the spherical aberration, distortion and chromatic aberration of the microscope objective, thereby providing a large numerical aperture and a long working distance. The second lens group is used to further correct the spherical aberration, coma, astigmatism and chromatic aberration in the entire field of view, and realize apochromatism in the visible light range. The third lens group is used to correct the residual spherical aberration and lateral chromatic aberration as well as the field curvature, and finally realize a low-temperature resistant, large numerical aperture, long working distance and apochromat microscope objective, which is compatible with the advantages of long working distance, large numerical aperture and apochromatism in a low-temperature environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and other objects, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0020] FIG1 schematically shows a structural diagram of a microscope objective lens provided by an embodiment of the present disclosure.

[0021] FIG2 schematically shows a structural diagram of a mechanical structure provided by an embodiment of the present disclosure.

[0022] FIG3 schematically shows a diagram of lateral chromatic aberration of a microscope objective lens provided by an embodiment of the present disclosure. DETAILED DESCRIPTION

[0023] To make the objectives, technical solutions, and advantages of the present disclosure more clearly understood, the present disclosure is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It is apparent that the embodiments described are only a portion of the embodiments of the present disclosure, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present disclosure without inventive effort are intended to fall within the scope of protection of the present disclosure.

[0024] The terms used herein are intended only to describe specific embodiments and are not intended to limit the present disclosure. The terms "comprise," "include," and the like as used herein indicate the presence of the described characteristic images, steps, operations, and / or components, but do not preclude the presence or addition of one or more other characteristic images, steps, operations, or components.

[0025] In this disclosure, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections, or communication; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in this disclosure based on specific circumstances.

[0026] In the description of the present disclosure, it should be understood that the terms "longitudinal", "length", "circumferential", "front", "rear", "left", "right", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the subsystem or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0027] Throughout the drawings, identical elements are represented by identical or similar reference numerals. Conventional structures or configurations are omitted where they may cause confusion in understanding the present disclosure. Furthermore, the shapes, sizes, and positional relationships of the components in the drawings do not reflect actual size, proportion, or actual positional relationships. Furthermore, any reference symbols placed between parentheses in this disclosure should not be construed as limiting the present disclosure.

[0028] Similarly, in order to streamline the present disclosure and aid in understanding one or more of the various disclosed aspects, in the above description of the exemplary embodiments of the present disclosure, the various characteristic images of the present disclosure are sometimes grouped together into a single embodiment, figure, or description thereof. Descriptions with reference to the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" and the like mean that the specific characteristic images, structures, materials, or features described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific characteristic images, structures, materials, or features described may be combined in an appropriate manner in any one or more embodiments or examples.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical feature images indicated. Therefore, a feature image defined as "first" or "second" may explicitly or implicitly include one or more of the feature images. In the description of this disclosure, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0030] FIG1 schematically shows a structural diagram of a microscope objective lens provided by an embodiment of the present disclosure.

[0031] As shown in Figure 1, the microscope objective lens may include: a first lens group G1, a second lens group G2, and a third lens group G3, which are arranged in sequence along the light transmission direction. The first lens group G1 has positive optical power, which is used to isolate the microscope from temperature influences when the microscope is in a low-temperature environment, while also increasing the angle at which the microscope objective lens collects light and correcting the spherical aberration, distortion, and chromatic aberration of the microscope objective lens. The second lens group G2 has negative optical power, which is used to correct the spherical aberration, coma, astigmatism, and chromatic aberration of the microscope objective lens. The third lens group G3 has negative optical power, which is used to correct the spherical aberration, lateral chromatic aberration, and field curvature of the microscope objective lens.

[0032] According to the embodiments of the present disclosure, since the microscope objective adopts a three-section objective structure, the first lens group increases the angle of the objective lens to collect light in an environment where the temperature is lower than a preset temperature, and preliminarily corrects the spherical aberration, distortion and chromatic aberration of the microscope objective, thereby providing a large numerical aperture and a long working distance. The second lens group further corrects the spherical aberration, coma, astigmatism and chromatic aberration in the entire field of view, and realizes apochromatism in the visible light range. The third lens group corrects the residual spherical aberration and lateral chromatic aberration as well as the field curvature, and finally realizes a microscope objective that is resistant to low temperatures, has a large numerical aperture, a long working distance, and is apochromatic.

[0033] Furthermore, the first lens group G1 may include: a flat glass L1, a meniscus lens L2, a biconvex lens L3, and a first cemented lens formed by cementing a first lens L4, a second lens L5, and a third lens L6, which are sequentially arranged along the light transmission direction.

[0034] Specifically, the flat glass L1 is used to provide low-temperature insulation. It can be made of a material with a very low thermal expansion coefficient. Preferably, the flat glass L1 is made of fused quartz. It should be understood that the material of the flat glass L1 is not limited to fused quartz. Other materials that can provide the same low-temperature insulation as fused quartz can also be used, and this disclosure does not limit this.

[0035] Meniscus lens L2 is used to correct the spherical aberration introduced by plane glass L1 and to increase the working distance of the microscope. Biconvex lens L3 is used to increase the angle at which the microscope collects light, thereby increasing the numerical aperture of the microscope, thereby improving the resolution and brightness of the microscope. The first cemented lens is used to reduce spherical aberration, distortion, and chromatic aberration of the microscope. That is, first lens L4, second lens L5, and third lens L6 can jointly reduce spherical aberration, distortion, and chromatic aberration.

[0036] Furthermore, the second lens group G2 may include: at least one group of cemented lenses for further correcting spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective lens, especially further correcting chromatic aberration to achieve apochromatism in the visible light range.

[0037] As an optional embodiment, the second lens group G2 may include a second cemented lens, which is formed by cementing a fourth lens L7 and a fifth lens L8 arranged in sequence along the light transmission direction, and is used to correct spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective.

[0038] As another optional embodiment, the second lens group G2 may further include a third cemented lens, which is formed by cementing a sixth lens L9, a seventh lens L10 and an eighth lens L11 arranged in sequence along the light transmission direction, and is used to correct spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective.

[0039] As another optional embodiment, the second lens group G2 may further include a second cemented lens and a third cemented lens arranged sequentially along the light transmission direction, the second cemented lens being formed by cementing the fourth lens L7 and the fifth lens L8, and the third cemented lens being formed by cementing the sixth lens L9, the seventh lens L10, and the eighth lens L11. The second cemented lens performs primary correction for the microscope objective's spherical aberration, coma, astigmatism, and chromatic aberration, while the third cemented lens performs secondary correction for the microscope objective's spherical aberration, coma, astigmatism, and chromatic aberration.

[0040] It should be noted that the number of cemented lenses in the second lens group G2 can be determined based on actual conditions. For example, in some scenarios, a good correction effect can be achieved by using only the second cemented lens, and there is no need to set up a third cemented lens. For another example, in some scenarios, the correction effect of using the second cemented lens is not good, while a good correction effect can be achieved by using the third lens group, and the second cemented lens can be omitted. For another example, if the correction effect is not good regardless of whether the second cemented lens or the third cemented lens is used, the second and third cemented lenses can be set up at the same time. The present disclosure does not limit this in detail.

[0041] Furthermore, the third lens group G3 may include a fourth cemented lens formed by cementing the ninth lens L12 and the tenth lens L13, the fourth cemented lens being used to correct residual spherical aberration and lateral chromatic aberration of the microscope objective lens, and a plano-concave lens L14 being used to correct field curvature of the microscope objective lens.

[0042] In the embodiments of the present disclosure, the parameters of the various components in the microscope objective are also optimized to further ensure the characteristics of the microscope objective such as low temperature resistance, large numerical aperture, long working distance, and apochromatism.

[0043] The parameters of each component are shown in Table 1:

[0044] Table 1

[0045] See Table 1 and Figure 1 for the specific parameters:

[0046] The radius of curvature of the meniscus lens L2 on the side close to the plane glass L1 is -11mm to -10mm, and the radius of curvature of the meniscus lens L2 on the side close to the biconvex lens L3 is -5.5mm to -4.5mm. The radius of curvature of the biconvex lens L3 on the side close to the meniscus lens L2 is 260mm to 270mm, and the radius of curvature of the biconvex lens L3 on the side close to the first lens L4 is -27mm to -25mm. The radius of curvature of the first lens L4 on the side close to the biconvex lens L3 is 12.5mm to 14.5mm, and the radius of curvature of the first lens L4 on the side close to the second lens L5 is -11mm to -9mm. The radius of curvature of the third lens L6 on the side close to the second lens L5 is 10mm to 12mm, and the radius of curvature of the third lens L6 on the side away from the second lens L5 is -13mm to -11mm.

[0047] The radius of curvature of the fourth lens L7 on the side away from the fifth lens L8 is 12.5 mm to 14.5 mm. The radius of curvature of the fourth lens L7 on the side closer to the fifth lens L8 is -13.5 mm to 11.5 mm. The radius of curvature of the fifth lens L8 on the side away from the fourth lens L7 is -30 mm to -27 mm. And / or, the radius of curvature of the sixth lens L9 on the side away from the seventh lens L10 is 18 mm to 20 mm, the radius of curvature of the sixth lens L9 on the side closer to the seventh lens L10 is 5 mm to 7 mm, the radius of curvature of the eighth lens L11 on the side closer to the seventh lens L10 is -9.5 mm to -7.5 mm, and the radius of curvature of the eighth lens L11 on the side away from the seventh lens L10 is -35 mm to -33 mm.

[0048] The radius of curvature of the ninth lens L12 on the side away from the tenth lens L13 is 6 mm to 7 mm. The radius of curvature of the ninth lens L12 on the side closer to the tenth lens L13 is 70 mm to 75 mm. The radius of curvature of the tenth lens L13 on the side away from the ninth lens L12 is 3.5 mm to 4.5 mm. The radius of curvature of the plano-concave lens L14 on the side closer to the tenth lens L13 is -6 mm to -4 mm. The radius of curvature of the plano-concave lens L14 on the side away from the tenth lens L13 is 73 mm to 76 mm.

[0049] It should be noted that, for the first cemented lens, the second cemented lens, the third cemented lens, and the fourth cemented lens, only the curvature radius of the contacting surface is described. It should be understood that the curvature radius of the two cemented surfaces is the same. For example, the curvature radius of both sides of the second lens L5 is the same as the curvature radius of the contacting surfaces of the first lens L4 and the third lens L6, respectively.

[0050] On the basis of the above embodiments, an embodiment of the present disclosure further provides a mechanical structure for assembling a microscope objective lens, wherein the portion of the mechanical structure where the flat glass L1 is assembled is an independent structure.

[0051] FIG2 schematically shows a structural diagram of a mechanical structure provided by an embodiment of the present disclosure.

[0052] As shown in Figure 2, the mechanical structure includes mounting locations corresponding to each component in the microscope objective. Because the flat glass L1 may be exposed to low temperatures and requires separate assembly, such as section M1 in the figure, the section where the flat glass L1 is assembled needs to be made of a material with a low thermal expansion coefficient, such as indium steel.

[0053] Since the assembled flat glass L1 is assembled separately in the mechanical structure, the flat glass L1 and the portion where the flat glass L1 is assembled are made of materials with low thermal expansion coefficients, so the microscope objective lens can achieve low-temperature imaging below -80 degrees Celsius.

[0054] In order to further verify the advantages of the microscope objective lens provided by the embodiment of the present disclosure, some experimental data are provided below to provide support.

[0055] The numerical aperture of the microscope objective lens provided in the embodiment of the present disclosure can reach 0.85, and the working distance can reach 1.45 mm, which are higher than the low-temperature microscope objective lens provided by the prior art.

[0056] FIG3 schematically shows a diagram of lateral chromatic aberration of a microscope objective lens provided by an embodiment of the present disclosure.

[0057] As shown in Figure 3, the dotted line represents the diffraction limit. From this, we can see that the lateral chromatic aberration in the visible light band is within the diffraction limit, and the objective lens achieves apochromatism within the entire field of view.

[0058] In summary, the embodiments of the present disclosure provide a microscope objective lens capable of imaging cryogenic biological samples, featuring a long working distance, a large numerical aperture, and apochromatism. By combining advanced optical design theory and material technology, this objective lens achieves high-resolution imaging at low temperatures and provides a new technological approach for life science research.

[0059] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present disclosure. It should be understood that the above are only specific embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A microscope objective lens, characterized in that: include: A first lens group (G1), a second lens group (G2) and a third lens group (G3) are sequentially arranged along a light transmission direction; wherein: The first lens group (G1) has positive focal power and is used to isolate the microscope from temperature influence when the microscope is in a low temperature environment, while increasing the angle at which the microscope objective lens collects light and correcting the spherical aberration, distortion and chromatic aberration of the microscope objective lens; The second lens group (G2) has negative optical power and is used to correct spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective; The third lens group (G3) has negative optical power and is used to correct spherical aberration, lateral chromatic aberration and field curvature of the microscope objective.

2. The microscope objective lens according to claim 1, characterized in that The first lens group (G1) comprises: A plane glass (L1), a meniscus lens (L2), a biconvex lens (L3), and a first cemented lens formed by cementing a first lens (L4), a second lens (L5), and a third lens (L6) are sequentially arranged along the light transmission direction; The flat glass (L1) is used to provide thermal insulation. The meniscus lens (L2) is used to correct the spherical aberration introduced by the plane glass (L1) and to increase the working distance of the microscope objective lens; The biconvex lens (L3) is used to increase the angle at which the microscope objective lens collects light; The first cemented lens is used to reduce the spherical aberration, distortion and chromatic aberration of the microscope objective lens.

3. The microscope objective lens according to claim 2, characterized in that: The curvature radius of the side of the meniscus lens (L2) close to the flat glass (L1) is -11 mm to -10 mm, and the curvature radius of the side of the meniscus lens (L2) close to the biconvex lens (L3) is -5.5 mm to -4.5 mm; The curvature radius of the side of the biconvex lens (L3) close to the meniscus lens (L2) is 260 mm to 270 mm, and the curvature radius of the side of the biconvex lens (L3) close to the first lens (L4) is -27 mm to -25 mm; The curvature radius of the first lens (L4) on the side close to the biconvex lens (L3) is 12.5mm~14.5mm, the curvature radius of the side of the first lens (L4) close to the second lens (L5) is -11mm~-9mm; The curvature radius of the third lens (L6) on the side close to the second lens (L5) is 10 mm to 12 mm, and the curvature radius of the third lens (L6) on the side away from the second lens (L5) is -13 mm to -11 mm.

4. The microscope objective lens according to claim 2, characterized in that: The material of the flat glass (L1) includes fused quartz.

5. The microscope objective lens according to claim 1, characterized in that: The second lens group (G2) includes: at least one group of cemented lenses, which is used to correct the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective.

6. The microscope objective lens according to claim 5, characterized in that: The at least one group of cemented lenses comprises: a second cemented lens, wherein the second cemented lens is formed by cementing a fourth lens (L7) and a fifth lens (L8) sequentially arranged along the light transmission direction, and is used to correct the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective lens; or a third cemented lens, wherein the third cemented lens is formed by cementing a sixth lens (L9), a seventh lens (L10) and an eighth lens (L11) sequentially arranged along the light transmission direction, and is used to correct the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective lens; or A second cemented lens and a third cemented lens are sequentially arranged along the light transmission direction, wherein the second cemented lens is formed by cementing a fourth lens (L7) and a fifth lens (L8), and the third cemented lens is formed by cementing a sixth lens (L9), a seventh lens (L10) and an eighth lens (L11); the second cemented lens performs a primary correction on the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective lens, and the third cemented lens is used for performing a secondary correction on the spherical aberration, coma, astigmatism and chromatic aberration of the microscope objective lens.

7. The microscope objective lens according to claim 6, characterized in that: The curvature radius of the fourth lens (L7) on the side away from the fifth lens (L8) is 12.5 mm to 14.5 mm; the curvature radius of the fourth lens (L7) on the side close to the fifth lens (L8) is -13.5 mm to 11.5 mm; the curvature radius of the fifth lens (L8) on the side away from the fourth lens (L7) is -30 mm to -27 mm; and / or The curvature radius of the sixth lens (L9) at a side away from the seventh lens (L10) is 18 mm to 20 mm; the curvature radius of the sixth lens (L9) at a side close to the seventh lens (L10) is 5 mm to 7 mm; the curvature radius of the eighth lens (L11) at a side close to the seventh lens (L10) is -9.5 mm to -7.5 mm; and the curvature radius of the eighth lens (L11) at a side away from the seventh lens (L10) is -35 mm to -33 mm.

8. The microscope objective lens according to claim 1, characterized in that: The third lens group (G3) comprises: a fourth cemented lens, which is formed by cementing the ninth lens (L12) and the tenth lens (L13); the fourth cemented lens is used to correct the spherical aberration and lateral chromatic aberration of the microscope objective lens; A plano-concave lens (L14) is used to correct the field curvature of the microscope objective.

9. The microscope objective lens according to claim 8, characterized in that: The curvature radius of the ninth lens (L12) on the side away from the tenth lens (L13) is 6 mm to 7 mm; the curvature radius of the ninth lens (L12) on the side close to the tenth lens (L13) is 70 mm to 75 mm; The curvature radius of the tenth lens (L13) on the side away from the ninth lens (L12) is 3.5 mm to 4.5 mm; The curvature radius of the side of the plano-concave lens (L14) close to the tenth lens (L13) is -6 mm to -4 mm; the curvature radius of the side of the plano-concave lens (L14) away from the tenth lens (L13) is 73 mm to 76 mm.

10. A mechanical structure for assembling the microscope objective lens according to any one of claims 2 to 4, wherein: The part of the mechanical structure on which the flat glass (L1) is assembled is an independent structure, and the material of the part on which the flat glass (L1) is assembled includes indium steel.

Images