High-precision microscopic scanner

Abstract

A high-precision microscopic scanner, comprising a whole unit base (1), wherein the whole unit base (1) is provided with a Y-axis crossed roller sliding assembly (2) by means of a Z-axis and Y-axis shared bottom plate (15), and one side of the whole unit base (1) is provided with a Y-axis sliding driving assembly (3); the Y-axis crossed roller sliding assembly (2) is provided with an X-axis crossed roller sliding assembly (4) and an X-axis sliding driving assembly (5); the X-axis crossed roller sliding assembly (4) is provided with a slide holder assembly (6) and a global lower light source assembly (8); a lifting focusing assembly (7) is provided in the middle of the whole unit base (1); the Z-axis and Y-axis shared bottom plate (15) is provided with a Z-axis sliding final-assembly assembly (9); the Z-axis sliding final-assembly assembly (9) is provided with an oil immersion objective assembly (10); a fluorescence assembly (13) is provided above the X-axis crossed roller sliding assembly (4) by means of a portal frame (16), with a lower end of the fluorescence assembly (13) being in butt-joint with the oil immersion objective assembly (10) and an upper end of the fluorescence assembly (13) being in butt-joint with a scanning camera (14); and the portal frame (16) is provided with a global camera (11) and an upper light source assembly (12). By means of optimizing the design of X, Y and Z-axis moving structures of the microscopic scanner, the control precision during scanning is improved.

Description

A high-precision microscope scanner Technical Field

[0001] The present invention relates to the technical field of automated microscopes, in particular to a high-precision microscope scanner. Background Art

[0002] The fully automatic microscope is a high-tech product that integrates optoelectronics and computing, and uses advanced distributed control technology and modular embedded structure to achieve XYZ three-axis control of the stage and automatic adjustment of the brightness of the light source. It also uses software to realize fully automated functions such as panoramic automatic scanning, automatic puzzle, automatic return, synchronous browsing, and remote control to improve work efficiency.

[0003] The fully automatic microscope adopts the standard RS232 communication interface. Users can easily adjust the microscope's field of view, focus and brightness through computer control. Relying on the control system's automatic focusing, automatic XYZ three-axis motion control, automatic high and low magnification conversion and other functions, the specimen can be scanned in a bow-shaped row-by-row motion, thereby realizing multi-field and fully automatic measurement and analysis of the image.

[0004] Fully automated microscopes are indispensable components of automated microscopic image analysis equipment due to their high reliability, stability, and precision. However, existing automated microscopes have a control accuracy of 1 to 2 μm, making them suitable only for 20X or 40X dry (air) objective scanning and incapable of immersion objective scanning above 60X, which requires a control accuracy of 0.2 μm. This has been a persistent problem for the high-precision microscopy industry.

[0005] Summary of the Invention

[0006] In view of the defects of the prior art, the present invention provides a high-precision microscopy scanner to greatly improve the control accuracy during scanning.

[0007] In order to solve the above technical problems and achieve the above technical effects, the present invention is implemented through the following technical solutions:

[0008] A high-precision microscope scanner includes a complete machine base, a Y-axis cross roller sliding assembly, a Y-axis sliding drive assembly, an X-axis cross roller sliding assembly, an X-axis sliding drive assembly, a slide rack assembly, a lifting and focusing assembly, a global lower light source assembly, a Z-axis sliding assembly assembly, an oil lens assembly, a global camera, an upper light source assembly, a fluorescence assembly, and a scanning camera.

[0009] The Y-axis cross roller sliding assembly is arranged on the whole machine base through the ZY axis common base plate, the Y-axis sliding drive assembly is arranged on one side of the whole machine base and is transmission-connected to the Y-axis cross roller sliding assembly, the X-axis cross roller sliding assembly and the X-axis sliding drive assembly are both arranged on the Y-axis cross roller sliding assembly, and the X-axis sliding drive assembly is transmission-connected to the X-axis cross roller sliding assembly, the slide rack assembly and the global lower light source assembly are arranged on the X-axis cross roller sliding assembly, the lifting and focusing assembly is arranged in the middle of the whole machine base and is located below the slide rack assembly; the Z-axis sliding assembly assembly is arranged on the ZY axis common base plate and is located between the Y-axis cross roller sliding assembly and the X On one side of the Z-axis cross roller sliding assembly, the oil lens assembly is arranged on the Z-axis sliding assembly and is located above the glass slide rack assembly. The fluorescent assembly is arranged above the Y-axis cross roller sliding assembly and the X-axis cross roller sliding assembly through a gantry. The lower end of the fluorescent assembly is docked with the oil lens assembly, and the upper end of the fluorescent assembly is docked with the scanning camera. The global camera and the upper light source assembly are both arranged on the gantry and are located on one side of the fluorescent assembly.

[0010] Furthermore, the base of the whole machine includes a base bottom plate, and a front support block and a rear support block of the base bottom plate are respectively provided on the front and rear sides of the lower surface of the base bottom plate, a marble base is provided between the front support block of the base bottom plate and the rear support block of the base bottom plate, and the marble base is fit and fixed to the lower surface of the base bottom plate, and a carrying handle is respectively provided on the left and right sides of the base bottom plate, and each of the carrying handles is fixedly connected to the end of the front support block of the base bottom plate and the rear support block of the base bottom plate on its corresponding side; a Y-axis sliding drive assembly mounting hole for installing the Y-axis sliding drive assembly and a lifting and focusing assembly mounting groove for installing the bottom structure of the lifting and focusing assembly are provided on the base bottom plate.

[0011] Furthermore, the Y-axis cross roller sliding assembly includes a Y-axis cross roller mounting lower base plate, the upper surface of the Y-axis cross roller mounting lower base plate is provided with a Y-axis sliding area upper plate through two left and right pairs of Y-axis cross roller guide rails, and the outer side surfaces of the two pairs of Y-axis cross roller guide rails are respectively provided with a Y-axis independent top screw plate, and the two Y-axis independent top screw plates are respectively fixedly connected to the left and right sides of the lower surface of the Y-axis sliding area upper plate, and the top screws of the two Y-axis independent top screw plates are respectively aligned inwardly with the two pairs of The outer surface of the Y-axis cross roller guide; at the same time, a Y-axis cross roller backrest limit plate is provided between the two pairs of Y-axis cross roller guides, the lower surface of the Y-axis cross roller backrest limit plate is fixedly connected to the upper surface of the Y-axis cross roller mounting lower base plate, the upper surface of the Y-axis cross roller backrest limit plate does not contact the lower surface of the Y-axis sliding area upper top plate, and the left and right side surfaces of the Y-axis cross roller backrest limit plate are respectively fixedly connected to the inner side surfaces of the Y-axis cross roller guide on the corresponding side. The middle part of the Y-axis cross roller mounting lower base plate is provided with a first focusing mirror mounting hole for mounting the lifting and focusing assembly; the middle front part of the upper surface of the Y-axis sliding area top plate is the X-axis cross roller sliding assembly mounting area for mounting the X-axis cross roller sliding assembly; the rear part of the upper surface of the Y-axis sliding area top plate is the X-axis sliding drive assembly mounting area for mounting the X-axis sliding drive assembly; the upper surface of the Y-axis sliding area top plate located between the X-axis cross roller sliding assembly mounting area and the X-axis sliding drive assembly mounting area is the Y-axis sliding drive assembly connection area for transmission connection with the Y-axis sliding drive assembly; the middle part of the Y-axis sliding area top plate and the corresponding position of the Y-axis cross roller backrest limit plate are provided with a first focusing mirror avoidance hole for avoiding the top structure of the lifting and focusing assembly.

[0012] Furthermore, the Y-axis sliding drive assembly includes a crossbeam rod for flexibly and fixedly connected to the Y-axis sliding drive assembly connection area, and soft pads are respectively provided at the front and rear of the Y-axis sliding drive assembly connection area, and the crossbeam rod is clamped and connected to the upper top plate of the Y-axis sliding area through the front and rear soft pads; one end of the crossbeam rod is fixedly connected to the right column support block of the crossbeam rod through the right column support block of the crossbeam rod, and the right column support block of the crossbeam rod is slidably connected to a Y-axis sliding right slide rail fixed to the common bottom plate of the ZY axis; the other end of the crossbeam rod is fixedly connected to the left column adapter block of the crossbeam rod through the left column of the crossbeam rod, and the crossbeam rod is fixedly connected to the left column adapter block of the crossbeam rod. The left column adapter block of the beam is fixedly connected to a rack fixing plate, the rack fixing plate is slidably connected to a Y-axis sliding left slide rail fixed on the Y-axis motor fixing plate, the Y-axis motor fixing plate is fixedly connected to the base of the whole machine, a Y-axis motor is provided on the Y-axis motor fixing plate through a Y-axis motor mounting bracket, a Y-axis gear is provided on the motor shaft of the Y-axis motor, a Y-axis rack is provided on the rack fixing plate, and the Y-axis gear is meshed with the Y-axis rack; a spring fixing block is provided on the rack fixing plate, and a spring for tightening the rack fixing plate is provided between the spring fixing block and the Y-axis motor fixing plate.

[0013] Furthermore, the X-axis cross roller sliding assembly includes a first X-axis cross roller mounting lower base plate, the upper surface of the first X-axis cross roller mounting lower base plate is provided with a first X-axis sliding area upper plate through the front and rear pairs of first X-axis cross roller guide rails, the first X-axis sliding area upper plate is fixedly connected to the upper surfaces of the front and rear pairs of the first X-axis cross roller guide rails through three fixing screws distributed in a triangular shape, and at the same time, a number of screws are provided around each of the fixing screws for adjusting the first X-axis sliding area upper plate between the front and rear pairs of the first X-axis cross roller guide rails. The top screw of the horizontality on the column guide rail; an X-axis cross roller backrest limit plate is provided between the two pairs of the first X-axis cross roller guide rails, the lower surface of the X-axis cross roller backrest limit plate is fixedly connected to the upper surface of the first X-axis cross roller mounting lower base plate, the upper surface of the X-axis cross roller backrest limit plate does not contact the lower surface of the upper top plate of the first X-axis sliding area, and the front and rear sides of the X-axis cross roller backrest limit plate are respectively fixedly connected to the inner side surfaces of the front and rear two pairs of the first X-axis cross roller guide rails; the outer side surfaces of the two pairs of the first X-axis cross roller guide rails are respectively A first X-axis independent top screw plate is separately provided, and the two first X-axis independent top screw plates are respectively fixedly connected to the front and rear sides of the lower surface of the upper top plate of the first X-axis sliding area, and the top screws of the two first X-axis independent top screw plates are respectively aligned inwardly with the outer side surfaces of the two pairs of the first X-axis cross roller guide rails; a second focusing mirror avoidance hole for avoiding the top structure of the lifting focusing assembly is opened in the middle of the lower bottom plate of the first X-axis cross roller installation and the corresponding position of the X-axis cross roller backrest limit plate; an upper and lower through hole is opened in the middle of the upper top plate of the first X-axis sliding area The slide rack mounting groove is connected to the slide rack mounting groove, the rear part of the upper top plate of the first X-axis sliding area is the X-axis sliding drive assembly connection area for transmission connection with the X-axis sliding drive assembly, the upper surface of the X-axis cross roller backrest limit plate is provided with a global lower light source assembly mounting groove for fixing the global lower light source assembly, a part of the global lower light source assembly is fixedly connected to the X-axis cross roller backrest limit plate through the global lower light source assembly mounting groove, and the other part of the global lower light source assembly extends inwardly between the slide rack mounting groove and the second focusing mirror avoidance hole.

[0014] Furthermore, an electromagnetic adsorption component for adsorbing the glass slide rack assembly is provided on one side frame of the glass slide rack mounting groove, and the electromagnetic adsorption component includes an electromagnet mounting seat fixed on one side frame of the glass slide rack mounting groove, and at least two electromagnet coils are embedded on the upper surface of the electromagnet mounting seat, and the electromagnet mounting seat is provided with an electromagnet terminal for connecting the electromagnet coil to an external power supply; two steel balls are embedded on the inner side surface of the electromagnet mounting seat for contacting the side surface of the glass slide rack assembly, and one steel ball is embedded on the upper surface of the frame of the glass slide rack mounting groove on the side opposite to the electromagnet mounting seat for contacting the lower surface of the glass slide rack assembly.

[0015] Furthermore, the X-axis sliding drive assembly includes an X-axis soft pad clamping plate arranged in the X-axis sliding drive assembly mounting area at the rear portion of the upper surface of the Y-axis sliding area top plate, the X-axis soft pad clamping plate is provided with an X-axis power fixing plate, the front portion of the upper surface of the X-axis power fixing plate is provided with a second X-axis cross roller mounting lower base plate, the front and rear sides of the upper surface of the second X-axis cross roller mounting lower base plate are provided with a second X-axis sliding area top plate through two pairs of second X-axis cross roller guides, the outer sides of the two pairs of second X-axis cross roller guides are respectively provided with a second X-axis independent top screw plate, the two second X-axis independent top screw plates are respectively fixedly connected to the front and rear sides of the lower surface of the second X-axis sliding area top plate, and the two second X-axis independent top screw plates The top screws are respectively aligned inwardly with the outer side surfaces of the two pairs of second X-axis cross roller guides; an X-axis linear motor is provided on the rear part of the upper surface of the X-axis power fixed plate through a pair of left and right linear motor mounting seats, and the X-axis linear motor is fixedly connected to the rear part of the upper top plate of the second X-axis sliding area through an X-axis movable connecting piece, and an X-axis movable push block is respectively provided on the left and right sides of the upper top plate of the second X-axis sliding area. At the same time, an X-axis movable push block fixing piece is provided on the X-axis sliding drive assembly connection area at the rear part of the upper top plate of the first X-axis sliding area, and an X-axis movable push block fine-motion lifting slide rail is respectively provided on the left and right sides of the X-axis movable push block fixing piece, and the two X-axis movable push blocks are respectively connected to the two X-axis movable push block fine-motion lifting slide rails.

[0016] Furthermore, the glass slide rack assembly includes a glass slide rack main board, a glass slide rack handle is provided on one side of the glass slide rack main board, and at least one glass slide mounting recess for placing a glass slide is provided on the glass slide rack main board, the middle part of each of the glass slide mounting recess is a hollow structure, and the frame of each of the glass slide mounting recess is provided with a glass slide end limit plate, an inner glass slide support block and an outer glass slide spring composite push block structure, and the inner glass slide support block and the outer glass slide spring composite push block structure are arranged opposite to each other, and the frame of each of the glass slide mounting recess is provided with a glass slide bottom support protrusion and two top screw holes, and the two top screw holes are respectively provided with glass slide top screws, and the glass slide bottom support protrusion and the two glass slide top screws are distributed in an inverted triangle.

[0017] Furthermore, the lifting and focusing assembly includes a T-frame, a condenser lifting motor is provided at the rear of the upper end surface of the T-frame, a ball screw is provided at the front of the upper end surface of the T-frame, a driving wheel is provided on the motor shaft of the condenser lifting motor, a driven wheel is provided at the top end of the ball screw, a synchronous belt is wound between the driving wheel and the driven wheel, a ball screw auxiliary guide rail is provided on the front surface of the vertical plate of the T-frame, a slider on the ball screw auxiliary guide rail is fixedly connected to the nut on the ball screw, and the nut of the ball screw is fixedly connected to the nut by a condenser. The optical mirror lifting block is provided with a condenser support plate, a condenser adjustment upper plate is provided on the condenser support plate through a condenser adjustment middle plate, and a condenser is provided on the condenser adjustment upper plate through a condenser connecting tube; a condenser limit micro-photoelectric switch is provided on one side of the vertical plate of the T-frame, and a condenser limit plate for sensing and cooperating with the condenser limit micro-photoelectric switch is provided on the nut of the ball screw, and a global lower light source assembly is provided directly below the condenser support plate, and the global lower light source assembly is fixedly connected to the ZY axis common base plate.

[0018] Furthermore, the Z-axis sliding assembly includes a Z-axis column fixed on the ZY-axis common base plate, and the Z-axis column is located on one side of the Y-axis cross-roller sliding assembly and the X-axis cross-roller sliding assembly combination; the inner side surface of the Z-axis column is provided with a Z-axis ball screw through an upper and lower pair of bearing seats, and the inner side surface of the Z-axis column is provided with a Z-axis guide rail parallel to the left and right of the Z-axis ball screw, and the top of the Z-axis column is provided with a Z-axis drive motor, the motor shaft of the Z-axis drive motor is connected to the top of the screw of the Z-axis ball screw, and a Z-axis lifting plate is provided on the nut of the Z-axis ball screw, and the Z-axis lifting plate is connected to the Z-axis guide rail The slider on the rail is fixedly connected, and a Z-axis bracket is provided on the Z-axis lifting plate. A Z-axis cantilever is provided on the side of the Z-axis bracket through two pairs of Z-axis cross roller guides. A piezoelectric ceramic stack displacement device hanger is provided on the top of the Z-axis bracket, and a pen-type piezoelectric ceramic stack displacement device is connected between the piezoelectric ceramic stack displacement device hanger and the Z-axis cantilever. An oil mirror mounting hole is provided on the Z-axis cantilever, and an oil mirror adjusting plate is provided on the oil mirror mounting hole. The oil mirror adjusting plate is fixedly connected to the Z-axis cantilever by three locking screws distributed in a triangle, and each of the locking screws is provided with a top screw on one side for adjusting the horizontality of the oil mirror adjusting plate in the oil mirror mounting hole.

[0019] Furthermore, the oil lens assembly includes an objective lens, an elastic oil drip nozzle, and an oil drip nozzle fixing block. The objective lens is installed in the oil lens mounting hole on the Z-axis cantilever and is fixedly connected to the oil lens adjustment plate. The oil drip nozzle fixing block is fixed to the lower surface of the Z-axis cantilever. The elastic oil drip nozzle is installed on the oil drip nozzle fixing block and is attached to the side wall of the objective lens through the oil drip tube pressing piece, and the oil outlet is aligned with the lens of the objective lens.

[0020] The beneficial effects of the present invention are:

[0021] The present invention uses a new structural installation method for X and Y cross roller sliders to control the random jump in the Z direction within 0.2 μm. The X and Y movements are driven by non-rigid direct connection, so that the instability of the motion axis is not transmitted to the X and Y moving areas. The vertical adjustment base and fixing method of the lens adopted can ensure that the Z axis does not deflect during high-speed up and down movement. The Z-axis grating scale feedback is generated from the Y moving base, which can effectively compensate for the instability of the Z-axis structure. The three-point supported slide rack can easily adjust the level of the slide on the slide rack. At the same time, the three-point supported electromagnet is used to adsorb and fix the slide rack, so that the force on the slide rack during X and Y movement is minimized. Combining all the above advantages, the present invention can greatly improve the control accuracy of the microscope scanning.

[0022] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the description, the following preferred embodiments of the present invention are described in detail with reference to the accompanying drawings. The specific implementation methods of the present invention are given in detail by the following embodiments and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0024] FIG1 is a front perspective view of the overall structure of the high-precision microscanner of the present invention;

[0025] FIG2 is a rear perspective view of the overall structure of the high-precision microscanner of the present invention;

[0026] FIG3 is a top perspective view of the base of the whole machine in the present invention;

[0027] FIG4 is a bottom perspective view of the base of the whole machine in the present invention;

[0028] FIG5 is a front perspective view of the Y-axis cross roller sliding assembly of the present invention;

[0029] FIG6 is a rear perspective view of the Y-axis cross roller sliding assembly of the present invention;

[0030] FIG7 is an enlarged view of the Y-axis sliding grating assembly of the Y-axis cross roller sliding assembly of the present invention;

[0031] FIG8 is a front perspective view of the Y-axis sliding drive assembly of the present invention;

[0032] FIG9 is an enlarged view of the motor portion of the Y-axis sliding drive assembly of the present invention;

[0033] FIG10 is an assembly diagram of the Y-axis sliding drive assembly and the Y-axis cross roller sliding assembly of the present invention;

[0034] FIG11 is a front perspective view of an X-axis cross roller sliding assembly and a Y-axis cross roller sliding assembly assembly according to the present invention;

[0035] FIG12 is a rear perspective view of the X-axis cross roller sliding assembly and the Y-axis cross roller sliding assembly assembly of the present invention;

[0036] FIG13 is an enlarged view of the electromagnetic adsorption assembly in the X-axis cross roller sliding assembly of the present invention;

[0037] FIG14 is a front perspective view of the X-axis sliding drive assembly of the present invention;

[0038] FIG15 is a rear perspective view of the X-axis sliding drive assembly of the present invention;

[0039] FIG16 is an assembly diagram of the X-axis sliding drive assembly and the X-axis cross roller sliding assembly of the present invention;

[0040] FIG17 is a perspective view of the slide rack assembly of the present invention after loading a slide;

[0041] FIG18 is a perspective view of a slide rack assembly according to the present invention;

[0042] FIG19 is an enlarged view of the spring composite push block structure on the outer side of the slide of the slide rack assembly of the present invention;

[0043] FIG20 is a schematic diagram of the installation position of the lifting and focusing assembly in the present invention;

[0044] FIG21 is a perspective view of a lifting and focusing assembly according to the present invention;

[0045] FIG22 is a front perspective view of the Z-axis sliding assembly of the present invention;

[0046] FIG23 is a rear perspective view of the Z-axis sliding assembly of the present invention;

[0047] FIG24 is an enlarged view of the oil mirror assembly of the present invention;

[0048] FIG25 is a front perspective view of the Y-axis sliding drive assembly, Y-axis cross roller sliding assembly, X-axis cross roller sliding assembly, X-axis sliding drive assembly, Z-axis sliding assembly, and oil mirror assembly assembly of the present invention;

[0049] FIG26 is a rear perspective view of the Y-axis sliding drive assembly, Y-axis cross roller sliding assembly, X-axis cross roller sliding assembly, X-axis sliding drive assembly, Z-axis sliding assembly, and oil immersion lens assembly assembly according to the present invention;

[0050] FIG27 is a bottom perspective view of the functional components located on the gantry according to the present invention;

[0051] FIG28 is a top perspective view of the functional components located on the gantry in the present invention. DETAILED DESCRIPTION

[0052] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments. The description herein is intended to provide a further understanding of the present invention and constitutes a part of this application. The illustrative embodiments of the present invention and their description are intended to explain the present invention and do not constitute an improper limitation of the present invention.

[0053] Referring to Figures 1-2, a high-precision microscope scanner includes a base 1, a Y-axis cross-roller sliding assembly 2, a Y-axis sliding drive assembly 3, an X-axis cross-roller sliding assembly 4, an X-axis sliding drive assembly 5, a slide rack assembly 6, a lifting and focusing assembly 7, a global lower light source assembly 8, a Z-axis sliding assembly 9, an oil lens assembly 10, a global camera 11, an upper light source assembly 12, a fluorescent assembly 13, and a scanning camera 14.

[0054] The Y-axis cross roller sliding assembly 2 is arranged on the whole machine base 1 through the ZY axis common base plate 15, the Y-axis sliding drive assembly 3 is arranged on one side of the whole machine base 1 and is transmission-connected to the Y-axis cross roller sliding assembly 2, the X-axis cross roller sliding assembly 4 and the X-axis sliding drive assembly 5 are both arranged on the Y-axis cross roller sliding assembly 2, and the X-axis sliding drive assembly 5 is transmission-connected to the X-axis cross roller sliding assembly 4, the glass slide rack assembly 6 and the global lower light source assembly 8 are arranged on the X-axis cross roller sliding assembly 4, the lifting and focusing assembly 7 is arranged in the middle of the whole machine base 1 and is located below the glass slide rack assembly 6; the Z-axis sliding assembly Component 9 is arranged on the ZY axis common base plate 15 and is located on one side of the combination of the Y axis cross roller sliding component 2 and the X axis cross roller sliding component 4. The oil lens component 10 is arranged on the Z axis sliding assembly component 9 and is located above the glass slide rack component 6. The fluorescent component 13 is arranged above the combination of the Y axis cross roller sliding component 2 and the X axis cross roller sliding component 4 through the gantry 16. The lower end of the fluorescent component 13 is docked with the oil lens component 10, and the upper end of the fluorescent component 13 is docked with the scanning camera 14; the global camera 11 and the upper light source component 12 are both arranged on the gantry 16 and are located on one side of the fluorescent component 13.

[0055] As an embodiment of the present invention, referring to Figures 3-4, the entire machine base 1 includes a base bottom plate 101, and a front base support block 102 and a rear base support block 103 are respectively provided on the front and rear sides of the lower surface of the base bottom plate 101, a marble base 104 is provided between the front base support block 102 and the rear base support block 103, and the marble base 104 is fixed to the lower surface of the base bottom plate 101, and a carrying handle 105 is respectively provided on the left and right sides of the base bottom plate 101, and each of the carrying handles 105 is fixedly connected to the end of the front base support block 102 and the rear base support block 103 on its corresponding side; the base bottom plate 101 is provided with a Y-axis sliding drive assembly mounting hole 106 for mounting the Y-axis sliding drive assembly 3 and a lifting and focusing assembly mounting groove 107 for mounting the bottom structure of the lifting and focusing assembly 7.

[0056] As an embodiment of the present invention, referring to Figures 5-6, the Y-axis cross roller sliding assembly 2 includes a Y-axis cross roller mounting lower base plate 201 fixed on the ZY axis common base plate 15, the upper surface of the Y-axis cross roller mounting lower base plate 201 is provided with a Y-axis sliding area upper top plate 203 through two left and right pairs of Y-axis cross roller guide rails 202, and the outer side surfaces of the two pairs of Y-axis cross roller guide rails 202 are respectively provided with a Y-axis independent top screw plate 204, the two Y-axis independent top screw plates 204 are respectively fixedly connected to the left and right sides of the lower surface of the Y-axis sliding area upper top plate 203, and the top screws of the two Y-axis independent top screw plates 204 are respectively aligned inwardly with the two pairs of The outer surface of the Y-axis cross roller guide 202, and a Y-axis cross roller backrest limiting plate 213 is arranged between the two pairs of Y-axis cross roller guides 202, the lower surface of the Y-axis cross roller backrest limiting plate 213 is fixedly connected to the upper surface of the Y-axis cross roller mounting lower base plate 201, the upper surface of the Y-axis cross roller backrest limiting plate 213 does not contact the lower surface of the Y-axis sliding area upper top plate 203, the left and right side surfaces of the Y-axis cross roller backrest limiting plate 213 are respectively fixedly connected to the inner side surfaces of the Y-axis cross roller guide 202 on the corresponding side; under this structure, the spatial parallelism of the two pairs of Y-axis cross roller guides 202 is optimal and can withstand large loads.

[0057] The middle part of the Y-axis cross roller mounting lower base plate 201 is provided with a first focusing mirror mounting hole 205 for mounting the lifting and focusing assembly 7; the middle front part of the upper surface of the Y-axis sliding area upper plate 203 is the X-axis cross roller sliding assembly mounting area for mounting the X-axis cross roller sliding assembly 4; the rear part of the upper surface of the Y-axis sliding area upper plate 203 is the X-axis sliding drive assembly mounting area for mounting the X-axis sliding drive assembly 5; the upper surface of the Y-axis sliding area upper plate 203 located between the X-axis cross roller sliding assembly mounting area and the X-axis sliding drive assembly mounting area is the Y-axis sliding drive assembly connection area for transmission connection with the Y-axis sliding drive assembly 3; the middle part of the Y-axis sliding area upper plate 203 and the corresponding position of the Y-axis cross roller backrest limit plate 213 are provided with a first focusing mirror avoidance hole 206 for avoiding the top structure of the lifting and focusing assembly 7.

[0058] As a further preferred embodiment, referring to FIG6 , a Y-axis sliding limit assembly for limiting the sliding position of the top plate 203 of the Y-axis sliding area in the Y direction is provided on one side of the Y-axis cross-roller sliding assembly 2, and the Y-axis sliding limit assembly includes a Y-axis optical coupling limit plate 207 and a Y-axis optical limit plate 208 for triggering the optical couplers at the front and rear ends of the Y-axis optical coupling limit plate 207, wherein the Y-axis optical coupling limit plate 207 is arranged on the ZY-axis common base plate 15, and the Y-axis optical limit plate 208 is arranged on the end face on the left or right side of the top plate 203 of the Y-axis sliding area, and the Y-axis optical limit plate 208 corresponds to the position of the Y-axis optical coupling limit plate 207 up and down.

[0059] As a further preferred embodiment, referring to Figures 5 and 7, the other side of the Y-axis cross-roller sliding assembly 2 is provided with a Y-axis sliding grating assembly for sensing the sliding distance of the upper plate 203 of the Y-axis sliding area in the Y direction, and the Y-axis sliding grating assembly includes a Y-axis grating scale 209, a Y-axis grating scale reading head 210, a Y-axis grating scale reading head bracket 211 and a Y-axis zero position magnet 212, wherein the Y-axis grating scale reading head 210 is arranged on the ZY-axis common base plate 15 through the Y-axis grating scale reading head bracket 211, the Y-axis grating scale 209 is arranged on the left or right end surface of the upper plate 203 of the Y-axis sliding area, and the positions of the Y-axis grating scale 209 and the Y-axis grating scale reading head 210 correspond to each other on the left and right sides, and the Y-axis zero position magnet 212 is located below the Y-axis grating scale 209 and is fixedly connected to the side end surface of the upper plate 203 of the Y-axis sliding area.

[0060] As an embodiment of the present invention, referring to FIG8-9 , the Y-axis sliding drive assembly 3 includes a crossbeam 301 for flexibly and fixedly connecting to the connection area of ​​the Y-axis sliding drive assembly.

[0061] The right end of the crossbeam 301 is fixedly connected to the crossbeam right column support block 303 through the crossbeam right column 302, and the crossbeam right column support block 303 is slidably connected to a Y-axis sliding right rail 304 fixed on the ZY-axis common base plate 15.

[0062] The left end of the crossbeam 301 is fixedly connected to the crossbeam left column adapter block 306 through the crossbeam left column 305, and the crossbeam left column adapter block 306 is fixedly connected to a rack fixing plate 307, and the rack fixing plate 307 is slidably connected to a Y-axis sliding left slide rail 314 fixed on a Y-axis motor fixing plate 308, and the Y-axis motor fixing plate 308 is located at the Y-axis sliding drive assembly mounting hole 106 on the base bottom plate 101, and the position height of the Y-axis motor fixing plate 308 is lower than the position height of the base bottom plate 101, and the Y-axis motor fixing plate 308 is fixed to the rack fixing plate 307. 8 is fixedly connected to the lower surface of the base bottom plate 101, and a Y-axis motor 310 is provided on the Y-axis motor fixing plate 308 through a Y-axis motor mounting bracket 309, and a Y-axis gear 311 is provided on the motor shaft of the Y-axis motor 310, and a Y-axis rack 312 is provided on the rack fixing plate 307, and the Y-axis gear 311 is engaged with the Y-axis rack 312; a spring fixing block 313 is provided on the rack fixing plate 307, and a spring (not shown) for tightening the rack fixing plate 307 is provided between the spring fixing block 313 and the Y-axis motor fixing plate 308.

[0063] As shown in FIG10 , the crossbeam 301 is clamped to the Y-axis sliding area upper plate 203 via front and rear soft pads 316, thereby enabling the Y-axis sliding drive assembly 3 to drive the Y-axis cross-roller sliding assembly 2 to slide. The specific process is as follows: the Y-axis motor 310 drives the Y-axis gear 311 to rotate forward or reverse, thereby driving the meshed Y-axis rack 312 to slide back and forth on the Y-axis sliding left rail 314. The Y-axis rack 312 acts as a power source, driving the crossbeam 301 to move back and forth in the Y-axis direction via the rack fixing plate 307, the crossbeam left column adapter block 306, and the crossbeam left column 305. Simultaneously, the crossbeam right column 302 and the crossbeam right column support block 303 assist in supporting the crossbeam 301 to slide back and forth synchronously on the Y-axis sliding right rail 304. Under the drive of the crossbeam 301, the upper top plate 203 of the Y-axis sliding area slides back and forth along the two pairs of Y-axis cross-roller guide rails 202 on the Y-axis cross-roller mounting lower base plate 201, thereby driving the X-axis cross-roller sliding assembly 4 and the X-axis sliding drive assembly 5 located on the Y-axis cross-roller sliding assembly 2 to move in the Y-axis direction, and with the cooperation of the Y-axis sliding limit assembly and the Y-axis sliding grating assembly, the glass slide rack assembly 6 can be moved stably and accurately in the Y-axis direction.

[0064] The Y-axis cross roller sliding assembly 2 is driven by a Y-axis motor 310, a Y-axis gear 311 and a Y-axis rack 312, and is driven by a gantry structure consisting of a cross beam 301, a left cross beam column 305 and a right cross beam column 302. The cross beam 301 spans the upper surface of the top plate 203 of the Y-axis sliding area, and is clamped and connected to each other using soft pads 316. When the Y-axis sliding drive assembly 3 drives the Y-axis cross roller sliding assembly 2, the cross beam 301 and the top plate 203 of the Y-axis sliding area are not rigidly linked, and the torsional force between them is not easily transmitted, and the rack fixing plate is tightened on one side by a spring (not shown) to clear the return clearance.

[0065] As an embodiment of the present invention, referring to Figures 11-12, the X-axis cross-roller sliding assembly 4 includes a first X-axis cross-roller mounting lower base plate 401 fixed to the X-axis cross-roller sliding assembly mounting area on the Y-axis sliding area upper top plate 203, the upper surface of the first X-axis cross-roller mounting lower base plate 401 is provided with a first X-axis sliding area upper plate 403 through two front and rear pairs of first X-axis cross-roller guide rails 402, the first X-axis sliding area upper plate 403 is fixedly connected to the upper surfaces of the two front and rear pairs of first X-axis cross-roller guide rails 402 through three fixing screws distributed in a triangular shape, and at the same time, a number of top screws are arranged around each of the fixing screws. In this way, the first X-axis sliding area top plate 403 is supported on the front and rear pairs of the first X-axis cross roller guides 402 by means of screws surrounding the set screws. Two set screws can be provided on one pair of the first X-axis cross roller guides 402, and one set screw can be provided on the other pair. Utilizing the principle that three points define a plane, the levelness of the first X-axis sliding area top plate 403 on the front and rear pairs of the first X-axis cross roller guides 402 can be quickly adjusted by adjusting the screws surrounding the three set screws. Finally, the three set screws are tightened to secure the first X-axis sliding area top plate 403 to the front and rear pairs of the first X-axis cross roller guides 402. This structure and installation method ensures that the first X-axis cross roller guides 402 are free of stress in the Z direction, eliminating the impact of level deviation of the first X-axis sliding area top plate 403 caused by deformation of the first X-axis cross roller guides 402, making it suitable for light loads.

[0066] An X-axis cross roller backrest limiting plate 404 is provided between the two pairs of the first X-axis cross roller guides 402. The lower surface of the X-axis cross roller backrest limiting plate 404 is fixedly connected to the upper surface of the first X-axis cross roller mounting lower base plate 401. The upper surface of the X-axis cross roller backrest limiting plate 404 does not contact the lower surface of the first X-axis sliding area upper top plate 403. The front and rear sides of the X-axis cross roller backrest limiting plate 404 are respectively fixedly connected to the inner side surfaces of the front and rear pairs of the first X-axis cross roller guides 402; the outer side surfaces of the two pairs of the first X-axis cross roller guides 402 are respectively provided with a first X-axis independent top screw plate 405. The two first X-axis independent top screw plates 405 are respectively fixedly connected to the front and rear sides of the lower surface of the first X-axis sliding area upper top plate 403, and the top screws of the two first X-axis independent top screw plates 405 are respectively aligned inwardly with the outer side surfaces of the two pairs of the first X-axis cross roller guides 402.

[0067] A second focusing mirror avoidance hole 406 for avoiding the top structure of the lifting and focusing assembly 7 is provided in the middle of the lower base plate 401 for mounting the first X-axis cross roller and at the corresponding position of the X-axis cross roller backrest limit plate 404. A glass slide rack mounting groove 407 running through the middle of the upper top plate 403 of the first X-axis sliding area is provided. The rear part of the upper top plate 403 of the first X-axis sliding area is an X-axis sliding drive assembly connection area for transmission connection with the X-axis sliding drive assembly 5. The upper surface of the X-axis cross roller backrest limit plate 404 is provided with a global lower light source assembly mounting groove 408 for fixing the global lower light source assembly 8. A part of the global lower light source assembly 8 is fixedly connected to the X-axis cross roller backrest limit plate 404 through the global lower light source assembly mounting groove 408, and the other part of the global lower light source assembly 8 extends inward between the glass slide rack mounting groove 407 and the second focusing mirror avoidance hole 406.

[0068] As a further preferred embodiment, referring to Figures 11-13, an electromagnetic adsorption component 409 for adsorbing the glass slide rack assembly 6 is provided on one side frame of the glass slide rack mounting groove 407, and the electromagnetic adsorption component 409 includes an electromagnet mounting seat 4091 fixed on one side frame of the glass slide rack mounting groove 407, at least two electromagnet coils 4092 are embedded on the upper surface of the electromagnet mounting seat 4091, and the electromagnet mounting seat 4091 is provided with an electromagnet terminal 4093 for connecting the electromagnet coils 4092 to an external power supply; two steel balls 4094 for contacting the side surface of the glass slide rack assembly 6 are embedded on the inner side surface of the electromagnet mounting seat 4091, and one steel ball 4094 for contacting the lower surface of the glass slide rack assembly 6 is embedded on the upper surface of the frame of the glass slide rack mounting groove 407 on the side opposite to the electromagnet mounting seat 4091. Under this structure, the glass slide rack assembly 6 will be placed on the glass slide rack mounting groove 407 in a three-point supported manner, two of which are located on the electromagnet mounting seat 4091. These two supporting points are the magnetic output points. After power is turned on, the iron glass slide rack assembly 6 will be firmly sucked onto the three supporting points, so that the force on the glass slide rack assembly 6 can be minimized during X and Y movements.

[0069] As a further preferred embodiment, referring to Figure 12, an X-axis sliding grating assembly for sensing the sliding distance of the upper plate 403 of the first X-axis sliding area in the X direction is provided on one side of the X-axis cross-roller sliding assembly 4, and the X-axis sliding grating assembly includes an X-axis grating scale 514, an X-axis grating scale reading head 515, an X-axis grating scale reading head bracket 516 and an X-axis zero position magnet (not shown), wherein the X-axis grating scale reading head 515 is set on the first X-axis cross-roller mounting lower base plate 401 through the X-axis grating scale reading head bracket 516, the X-axis grating scale 514 is set on the end surface of the front or rear side of the upper plate 403 of the first X-axis sliding area, and the positions of the X-axis grating scale 514 and the X-axis grating scale reading head 515 correspond to each other in front and back, and the X-axis zero position magnet (not shown) is located below the X-axis grating scale 514 and is fixedly connected to the side end surface of the upper plate 403 of the first X-axis sliding area.

[0070] As an embodiment of the present invention, referring to Figures 14-15, the X-axis sliding drive assembly 5 includes an X-axis padded splint 501 arranged in the X-axis sliding drive assembly installation area at the rear of the upper surface of the top plate 203 of the Y-axis sliding area, and an X-axis power fixing plate 502 is arranged on the X-axis padded splint 501.

[0071] A second X-axis cross roller mounting lower base plate 503 is provided at the front of the upper surface of the X-axis power fixing plate 502, and a second X-axis sliding area upper top plate 506 is provided on the front and rear sides of the upper surface of the second X-axis cross roller mounting lower base plate 503 through two pairs of second X-axis cross roller guides 504. The outer side surfaces of the two pairs of second X-axis cross roller guides 504 are respectively provided with a second X-axis independent top screw plate 505. The two second X-axis independent top screw plates 505 are respectively fixedly connected to the front and rear sides of the lower surface of the second X-axis sliding area upper top plate 506, and the top screws of the two second X-axis independent top screw plates 505 are respectively aligned inwardly with the outer side surfaces of the two pairs of second X-axis cross roller guides 504.

[0072] An X-axis linear motor 508 is provided at the rear of the upper surface of the X-axis power fixed plate 502 through a pair of left and right linear motor mounting seats 507. The X-axis linear motor 508 is fixedly connected to the rear of the second X-axis sliding area upper plate 506 through an X-axis movable connecting piece 509. An X-axis movable push block 510 is provided on both sides of the left and right sides of the second X-axis sliding area upper plate 506.

[0073] As a further preferred embodiment, referring to Figure 15, the rear side of the X-axis sliding drive assembly 5 is provided with an X-axis sliding limit assembly for limiting the sliding position of the upper top plate 506 of the second X-axis sliding area in the X direction, and the X-axis sliding limit assembly includes an X-axis optical coupling limit plate 512 and an X-axis optical limit plate 513 for triggering the optical couplers at the front and rear ends of the X-axis optical coupling limit plate 512, wherein the X-axis optical coupling limit plate 512 is arranged on the X-axis power fixing plate 502, and the X-axis optical limit plate 513 is arranged on the rear side end surface of the upper top plate 506 of the second X-axis sliding area, and the X-axis optical limit plate 513 corresponds to the position of the X-axis optical coupling limit plate 512 up and down.

[0074] As shown in Figure 16, an X-axis moving push block fixing part 511 is provided on the X-axis sliding drive assembly connection area at the rear of the upper top plate 403 of the first X-axis sliding area, and an X-axis moving push block fine-motion lifting slide 517 is provided on the left and right sides of the X-axis moving push block fixing part 511. The two X-axis moving push blocks 510 are respectively connected to the two X-axis moving push block fine-motion lifting slides 517, thereby realizing the X-axis sliding drive assembly 5 driving the X-axis cross roller sliding assembly 4 to slide. The specific process is as follows: the X-axis linear motor 508 drives the second X-axis sliding area upper plate 506 to slide left and right along the two pairs of second X-axis cross roller guide rails 504 on the second X-axis cross roller mounting lower base plate 503 through the X-axis moving connecting piece 509; a pair of horn-shaped X-axis moving push blocks 510 on the second X-axis sliding area upper plate 506 drives the first X-axis sliding area upper plate 403 to slide left and right along the two pairs of first X-axis cross roller guide rails 402 on the first X-axis cross roller mounting lower base plate 401 by clamping the two ends of the X-axis moving push block fixing piece 511 on the second X-axis sliding area upper plate 506; and with the cooperation of the X-axis sliding limit assembly and the X-axis sliding grating assembly, the glass slide rack assembly 6 is moved stably and accurately in the X-axis direction.

[0075] The X-axis cross roller sliding assembly 4 is driven by the X-axis linear motor 508. The upper top plate 506 of the second X-axis sliding area of ​​the X-axis cross roller sliding assembly 4 is installed on two independent second X-axis cross roller guide rails 504 to lock the swing of the X-axis linear motor 508 mover during movement; the X-axis moving push block fine-motion lifting slide rails 517 at both ends of the X-axis moving push block fixing part 511 form a sliding hard connection between the X-axis moving push block 510 and the X-axis moving push block fixing part 511, thereby minimizing the vibration transmitted to the X-axis cross roller sliding assembly 4 due to the operation of the X-axis sliding drive assembly 5.

[0076] As an embodiment of the present invention, referring to Figures 17-19, the slide rack assembly 6 includes a slide rack main board 601, a slide rack handle 602 is provided on one side of the slide rack main board 601, and at least one slide mounting recess 604 for placing a slide 603 is provided on the slide rack main board 601. The middle portion of each slide mounting recess 604 is a hollow structure, and the frame of each slide mounting recess 604 is provided with a slide end limit plate 605, a slide end limit plate 606, a slide end limit plate 607, and a slide end limit plate 608. The inner slide support block 606 and the outer slide spring composite push block structure 607 are arranged opposite each other. Each slide mounting recess 604 is provided with a bottom slide support protrusion 608 and two top screw holes 609 on the frame. Each of the two top screw holes 609 is provided with a slide top screw (not shown). The bottom slide support protrusion 608 and the two top screws are arranged in an inverted triangle. With this structure, the slide 603 is placed in the slide mounting recess 604 in a three-point support manner. The rear end of the slide 603 is supported by the bottom slide support protrusion 608 as one fulcrum, and the head of the slide 603 is supported by the two top screws as the other two fulcrums. This facilitates adjustment of the level of the slide 603 on the slide holder main board 601.

[0077] As a further preferred embodiment, referring to FIG19 , the slide outer spring composite push block structure 607 is composed of a spring fixing frame 6071, a spring 6072, an elastic head 6073 and an elastic head handrail 6074. The spring fixing frame 6071 is fixed to the front end of one side edge of the slide mounting recess 604, the front end of the spring 6072 is fixed to the front end of the inner side of the spring fixing frame 6071, and the elastic head 6073 is fixed to the inner side of the rear portion of the spring 6072. On the surface, the elastic head armrest 6074 is fixed on the outer side surface of the elastic head 6073; the inner side surface of the elastic head 6073 is provided with a side push contact head 6075 in the shape of an inverted triangle. At the same time, the inner side support block 606 of the glass slide is fixed to the front end of the other side edge of the slide mounting recess 604, and is paired with the elastic head 6073 on the left and right, and a support contact head 6061 in the shape of an inverted triangle is provided on the side of the contact surface between the inner side support block 606 of the glass slide and the slide 603. When the glass slide 603 needs to be loaded, the elastic head armrest 6074 is moved outward by toggling the elastic head armrest 6074, thereby opening the glass slide mounting recess 604, and then the glass slide 603 is placed in the glass slide mounting recess 604, and positioned in the X and Y directions by the glass slide end limit plate 605 and the inner glass slide support block 606. Finally, the elastic head armrest 6074 is released, and the elastic head 6073 is reset under the action of the restoring force of the spring piece 6072. While the elastic head 6073 and the inner glass slide support block 606 clamp the glass slide 603, the inverted triangular side push contact head 6075 and the support contact head 6061 provide downward pressure for the glass slide 603, thereby ensuring that the glass slide 603 falls on the three fulcrums formed by a glass slide bottom support protrusion 608 and two glass slide top screws.

[0078] As an embodiment of the present invention, referring to Figures 20-21, the lifting and focusing assembly 7 includes a T-frame 701, a condenser lifting motor 702 is provided at the rear of the upper end surface of the T-frame 701, a ball screw 703 is provided at the front of the upper end surface of the T-frame 701, a driving wheel 704 is provided on the motor shaft of the condenser lifting motor 702, a driven wheel 705 is provided at the top of the ball screw 703, a synchronous belt (not shown) is wound between the driving wheel 704 and the driven wheel 705, a ball screw auxiliary guide rail 706 is provided on the front surface of the vertical plate of the T-frame 701, a slider on the ball screw auxiliary guide rail 706 is fixedly connected to the nut on the ball screw 703, and the ball screw A condenser support plate 708 is provided on the nut of the lever 703 through a condenser lifting block 707, and a condenser adjustment upper plate 710 is provided on the condenser support plate 708 through a condenser adjustment middle plate 709, and a condenser 712 is provided on the condenser adjustment upper plate 710 through a condenser connecting tube 711; a condenser limit micro photoelectric switch 713 is provided on one side of the vertical plate of the T-frame 701, and a condenser limit plate 714 for sensing and cooperating with the condenser limit micro photoelectric switch 713 is provided on the nut of the ball screw 703, and a global lower light source assembly 715 is provided directly below the condenser support plate 708, and the global lower light source assembly 715 is fixedly connected to the ZY axis common base plate 15.

[0079] As shown in FIG8 , the ZY-axis common base plate 15 is provided with a second focusing lens mounting hole 315 for mounting the lifting and focusing assembly 7. When the lifting and focusing assembly 7 is mounted on the complete machine base 1, the bottom portion of the lifting and focusing assembly 7 passes downward through the first focusing lens mounting hole 205 in the middle of the Y-axis cross roller mounting lower base plate 201 and the second focusing lens mounting hole 315 on the ZY-axis common base plate 15, and is then fixedly connected to the lifting and focusing assembly mounting groove 107 on the base base 101. The top portion of the lifting and focusing assembly 7 passes upward through the first focusing lens avoidance hole 206 in the middle of the Y-axis sliding area upper plate 203, and extends into the second focusing lens avoidance hole 406 in the middle of the first X-axis cross roller mounting lower base plate 401, aligning with the slide holder assembly 6 on the slide holder mounting groove 407 in the middle of the first X-axis sliding area upper plate 403. The lifting process of the condenser 712 is as follows: the condenser lifting motor 702 drives the active wheel 704 to rotate, the active wheel 704 drives the driven wheel 705 to rotate through a synchronous belt (not shown), and the driven wheel 705 drives the nut on the ball screw 703 to move up and down along its screw, thereby driving the condenser lifting block 707 to move up and down along the ball screw auxiliary guide rail 706, and the condenser lifting block 707 drives the condenser 712 to move up and down through the condenser support plate 708, the condenser adjustment middle plate 709, the condenser adjustment upper plate 710, and the condenser connecting tube 711, and with the cooperation of the condenser limit micro photoelectric switch 713 and the condenser limit plate 714, the condenser 712 is accurately adjusted up and down.

[0080] As an embodiment of the present invention, referring to Figures 22-23, the Z-axis sliding assembly 9 includes a Z-axis column 901 fixed on the ZY-axis common base plate 15, and the Z-axis column 901 is located on one side of the combination of the Y-axis cross-roller sliding component 2 and the X-axis cross-roller sliding component 4; the inner side surface of the Z-axis column 901 is provided with a Z-axis ball screw 902 through a pair of upper and lower bearing seats, and the inner side surface of the Z-axis column 901 is provided with a Z-axis guide rail 903 parallel to the Z-axis ball screw 902, and the top of the Z-axis column 901 is provided with a Z-axis drive motor 904, the motor shaft of the Z-axis drive motor 904 is connected to the top of the screw of the Z-axis ball screw 902, and a Z-axis lifting plate 905 is provided on the nut of the Z-axis ball screw 902, and the Z-axis lifting plate 905 is fixedly connected to the slider on the Z-axis guide rail 903, and a Z-axis bracket 906 is provided on the Z-axis lifting plate 905. A Z-axis cantilever 909 is provided on the side of the Z-axis bracket 906 through two pairs of Z-axis cross roller guides 908. A piezoelectric ceramic stack displacement device hanger 912 is provided on the top of the Z-axis bracket 906, and a pen-type piezoelectric ceramic stack displacement device 913 is connected between the piezoelectric ceramic stack displacement device hanger 912 and the Z-axis cantilever 909. An oil mirror mounting hole is provided on the Z-axis cantilever 909, and an oil mirror adjustment plate 907 is provided on the oil mirror mounting hole. The oil mirror adjustment plate 907 is fixedly connected to the Z-axis cantilever 909 by three locking screws distributed in a triangle, and at the same time, a top screw for adjusting the horizontality of the oil mirror adjustment plate 907 in the oil mirror mounting hole is provided on one side of each of the locking screws.

[0081] As a further preferred embodiment, a ball screw adapter is provided on the screw of the Z-axis ball screw 902, and the ball screw adapter is fixedly connected to the Z-axis column 901. The upper part of the Z-axis lifting plate 905 is provided with a Z-axis ball screw upper limit block that can contact and cooperate with the ball screw adapter.

[0082] As a further preferred embodiment, a Z-axis sliding limit assembly is provided on one side of the Z-axis sliding assembly component 9 for limiting the sliding position of the Z-axis lifting plate 905 in the Z direction, and the Z-axis sliding limit assembly includes a Z-axis optical coupling limit plate 914 and a Z-axis optical limit plate 915 for triggering the optical couplers at the front and rear ends of the Z-axis optical coupling limit plate 914, wherein the Z-axis optical coupling limit plate 914 is arranged on the Z-axis column 901, and the Z-axis optical limit plate 915 is arranged on the Z-axis lifting plate 905, and the position of the Z-axis optical limit plate 915 corresponds to that of the Z-axis optical coupling limit plate 914.

[0083] As a further preferred embodiment, a Z-axis sliding grating assembly for sensing the sliding distance of the Z-axis cantilever 909 in the Z direction is provided on the other side of the Z-axis sliding assembly component 9, and the Z-axis sliding grating assembly includes a Z-axis grating scale 911, a Z-axis grating scale reading head 916, a Z-axis grating scale reading head bracket 917 and a Z-axis zero position magnet (not shown), wherein the Z-axis grating scale reading head 916 is set on the Z-axis bracket 906 through the Z-axis grating scale reading head bracket 917, and the Z-axis grating scale reading head bracket 917 is fixedly connected to the ZY-axis common base plate 15, the Z-axis grating scale 911 is set on the Z-axis cantilever 909, and the positions of the Z-axis grating scale 911 and the Z-axis grating scale reading head 916 correspond to each other on the left and right, and the Z-axis zero position magnet is located on the left side of the Z-axis grating scale 911 and is fixedly connected to the side end face of the Z-axis cantilever 909.

[0084] As a further preferred embodiment, the pen-type piezoelectric ceramic stack displacement device includes a pressure-resistant tube, a piezoelectric ceramic stack, an upper cap, a lower nut, a force nut, a force nut adapter and a disc spring; the pressure-resistant tube is in the shape of a straight tube, the piezoelectric ceramic stack is in the shape of a rod or a stick, the piezoelectric ceramic stack is variably arranged in the pressure-resistant tube, the upper cap is arranged at the top port of the pressure-resistant tube, and the inner side surface of the upper cap is fixedly connected to the top of the piezoelectric ceramic stack, the lower nut is arranged at the bottom port of the pressure-resistant tube, and the force nut is retractable is arranged in the lower nut, the output end of the force-bearing nut is located outside the pressure-resistant cylinder, and the input end of the force-bearing nut is located inside the pressure-resistant cylinder; the force-bearing nut adapter and the disc spring are both arranged inside the pressure-resistant cylinder, wherein the upper end of the force-bearing nut adapter is fixedly connected to the bottom of the piezoelectric ceramic stack, the lower end of the force-bearing nut adapter is fixedly connected to the input end of the force-bearing nut, the upper end of the disc spring contacts the lower end of the force-bearing nut adapter, and the lower end of the disc spring contacts the bottom surface of the inner wall of the lower nut.

[0085] The Z-axis sliding assembly component 9 is responsible for controlling the up and down movement of the microscope lens. The specific process is as follows: the Z-axis drive motor 904 drives the Z-axis lifting plate 905 to move up and down along the Z-axis guide rail 903 on the Z-axis column 901 through the Z-axis ball screw 902, and the Z-axis lifting plate 905 drives the Z-axis cantilever 909 to move up and down through the Z-axis bracket 906 for large-scale coarse adjustment. At the same time, the pen-type piezoelectric ceramic stack displacement device 913 drives the Z-axis cantilever 909 to move up and down along the Z-axis cross roller guide rail 908 on the Z-axis bracket 906 for small-scale fine adjustment. With the cooperation of the Z-axis sliding limit assembly and the Z-axis sliding grating assembly, the lens is driven to move precisely in the Z-axis direction.

[0086] The Z-axis sliding assembly 9 consists of two stages: coarse adjustment and fine adjustment. The coarse adjustment stage is driven by a high-rigidity Z-axis cross roller guide 908 and a Z-axis ball screw 902, with a stroke of 30 mm, and is responsible for large-step movement; the fine adjustment stage is driven by a pen-type piezoelectric ceramic stack displacement device 913, with a stroke of 100 μm, and is responsible for small-step movement of the lens.

[0087] The Z-axis sliding assembly 9 also adjusts the spatial position of the microscope lens. The microscope lens is mounted on an oil immersion lens adjustment plate 907, which is supported by three jackscrews and secured to the Z-axis cantilever 909 by three locking screws. Adjusting the height of the three jackscrews adjacent to the locking screws adjusts the perpendicularity between the oil immersion lens and the slide. Once adjusted, tighten the three locking screws, locking the Z-axis cantilever 909 with high torque, ensuring that the oil immersion lens does not wobble during high-speed up and down motion of the Z-axis.

[0088] The Z-axis sliding assembly component 9 is fixed on the ZY-axis common base plate 15, and the Z-axis grating scale is fed back from the Y base, which can compensate for the instability of the Z-axis sliding assembly component 9 to the maximum extent.

[0089] As an embodiment of the present invention, referring to Figures 24-26, the oil lens assembly 10 includes an objective lens 1001, an elastic oil drip nozzle 1003, and an oil drip nozzle fixing block 1002. The objective lens 1001 is installed in the oil lens mounting hole 910 on the Z-axis cantilever 909 and is fixedly connected to the oil lens adjustment plate 907. The oil drip nozzle fixing block 1002 is fixed to the lower surface of the Z-axis cantilever 909. The elastic oil drip nozzle 1003 is installed on the oil drip nozzle fixing block 1002 and is attached to the side wall of the objective lens 1001 through the oil drip tube pressing piece, and the oil outlet is aligned with the lens of the objective lens 1001.

[0090] As an embodiment of the present invention, referring to Figures 25-26, an oil pot assembly 17 is provided on one side of the Z-axis sliding assembly 9, and the oil pot assembly 17 is connected to the elastic oil drip nozzle 1003 through an oil pipe.

[0091] 27-28 , the fluorescent assembly 13 includes a six-hole wheel assembly 1301, a fluorescent side turntable 1302, and a fluorescent lamp head 1303. The six-hole wheel assembly 1301, the fluorescent side turntable 1302, and the fluorescent lamp head 1303 are all mounted on the gantry 16. The lower end of the six-hole wheel assembly 1301 is located directly above the objective lens 1001. The scanning camera 14 is fixedly mounted on the gantry 16 and is aligned downwardly with the upper end of the six-hole wheel assembly 1301. The fluorescent lamp head 1303 is aligned with the rear end of the six-hole wheel assembly 1301 via the fluorescent side turntable 1302. Furthermore, the global camera 11 and the upper light source assembly 12 are both mounted on the gantry 16 and located on one side of the six-hole wheel assembly 1301.

[0092] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A high-precision microscopy scanner, characterized in that: It comprises a whole machine base (1), a Y-axis cross roller sliding assembly (2), a Y-axis sliding drive assembly (3), an X-axis cross roller sliding assembly (4), an X-axis sliding drive assembly (5), a glass slide rack assembly (6), a lifting and focusing assembly (7), a global lower light source assembly (8), a Z-axis sliding assembly assembly (9), an oil mirror assembly (10), a global camera (11), an upper light source assembly (12), a fluorescent assembly (13), and a scanning camera (14); The Y-axis cross roller sliding assembly (2) is arranged on the whole machine base (1) through a ZY axis common base plate (15); the Y-axis sliding drive assembly (3) is arranged on one side of the whole machine base (1) and is transmission-connected to the Y-axis cross roller sliding assembly (2); the X-axis cross roller sliding assembly (4) and the X-axis sliding drive assembly (5) are both arranged on the Y-axis cross roller sliding assembly (2), and the X-axis sliding drive assembly (5) is transmission-connected to the X-axis cross roller sliding assembly (4); the glass slide rack assembly (6) and the global lower light source assembly (8) are arranged on the X-axis cross roller sliding assembly (4); the lifting and focusing assembly (7) is arranged in the middle of the whole machine base (1) and is located below the glass slide rack assembly (6); the Z-axis sliding assembly assembly (9) is arranged on the ZY axis common base plate (15) and is located on one side of the Y axis cross roller sliding assembly (2) and the X axis cross roller sliding assembly (4) assembly; the oil mirror assembly (10) is arranged on the Z axis sliding assembly (9) and is located above the glass slide rack assembly (6); the fluorescent assembly (13) is arranged above the Y axis cross roller sliding assembly (2) and the X axis cross roller sliding assembly (4) assembly through a gantry (16); the lower end of the fluorescent assembly (13) is connected to the oil mirror assembly (10), and the upper end of the fluorescent assembly (13) is connected to the scanning camera (14); the global camera (11) and the upper light source assembly (12) are both arranged on the gantry (16) and are located on one side of the fluorescent assembly (13).

2. The high-precision microscopy scanner according to claim 1, characterized in that: The whole machine base (1) comprises a base bottom plate (101), a base front support block (102) and a base rear support block (103) are respectively arranged on the front and rear sides of the lower surface of the base bottom plate (101), a marble base (104) is arranged between the base bottom plate front support block (102) and the base bottom plate rear support block (103), the marble base (104) is fitted and fixed to the lower surface of the base bottom plate (101), and the left side of the base bottom plate (101) is provided with a plurality of support blocks. A carrying handle (105) is provided on each of the right sides, and each of the carrying handles (105) is fixedly connected to the end of the front support block (102) of the base bottom plate and the end of the rear support block (103) of the base bottom plate on the corresponding side; the base bottom plate (101) is provided with a Y-axis sliding drive component mounting hole (106) for mounting the Y-axis sliding drive component (3) and a lifting and focusing component mounting groove (107) for mounting the bottom structure of the lifting and focusing component (7).

3. The high-precision microscopy scanner according to claim 1, characterized in that: The Y-axis cross roller sliding assembly (2) comprises a Y-axis cross roller mounting lower base plate (201), the upper surface of the Y-axis cross roller mounting lower base plate (201) is provided with a Y-axis sliding area upper top plate (203) through two left and right pairs of Y-axis cross roller guide rails (202), the outer side surfaces of the two pairs of Y-axis cross roller guide rails (202) are respectively provided with a Y-axis independent top screw plate (204), the two Y-axis independent top screw plates (204) are respectively fixedly connected to the left and right sides of the lower surface of the Y-axis sliding area upper top plate (203), and the top screws of the two Y-axis independent top screw plates (204) are respectively aligned inwardly with the two pairs of The outer side surface of the Y-axis cross roller guide rail (202); at the same time, a Y-axis cross roller backrest limiting plate (213) is arranged between the two pairs of the Y-axis cross roller guide rails (202), the lower surface of the Y-axis cross roller backrest limiting plate (213) is fixedly connected to the upper surface of the Y-axis cross roller mounting lower base plate (201), the upper surface of the Y-axis cross roller backrest limiting plate (213) does not contact the lower surface of the Y-axis sliding area upper top plate (203), and the left and right side surfaces of the Y-axis cross roller backrest limiting plate (213) are respectively fixedly connected to the inner side surfaces of the Y-axis cross roller guide rails (202) on the corresponding sides; A first focusing mirror mounting hole (205) for mounting the lifting and focusing assembly (7) is provided in the middle of the Y-axis cross roller mounting lower base plate (201); the middle front portion of the upper surface of the Y-axis sliding area upper top plate (203) is an X-axis cross roller sliding assembly mounting area for mounting the X-axis cross roller sliding assembly (4); the rear portion of the upper surface of the Y-axis sliding area upper top plate (203) is an X-axis sliding drive assembly mounting area for mounting the X-axis sliding drive assembly (5); the upper surface of the Y-axis sliding area upper top plate (203) located between the X-axis cross roller sliding assembly mounting area and the X-axis sliding drive assembly mounting area is a Y-axis sliding drive assembly connection area for transmission connection with the Y-axis sliding drive assembly (3); a first focusing mirror avoidance hole (206) for avoiding the top structure of the lifting and focusing assembly (7) is provided in the middle of the Y-axis sliding area upper top plate (203) and at the corresponding position of the Y-axis cross roller backrest limit plate (213).

4. The high-precision microscopy scanner according to claim 3, characterized in that: The Y-axis sliding drive assembly (3) comprises a crossbeam (301) for being flexibly fixedly connected to the connection area of ​​the Y-axis sliding drive assembly, and soft cushion blocks (316) are respectively arranged at the front and rear of the connection area of ​​the Y-axis sliding drive assembly, and the crossbeam (301) is clamped and connected to the upper top plate (203) of the Y-axis sliding area through the front and rear soft cushion blocks; One end of the crossbeam (301) is fixedly connected to a crossbeam right column support block (303) via a crossbeam right column (302), and the crossbeam right column support block (303) is slidably connected to a Y-axis sliding right rail (304) fixed on the ZY-axis common base plate (15); The other end of the crossbeam (301) is fixedly connected to the crossbeam left column adapter block (306) through the crossbeam left column (305), the crossbeam left column adapter block (306) is fixedly connected to a rack fixing plate (307), the rack fixing plate (307) is slidably connected to a Y-axis sliding left slide rail (314) fixed on a Y-axis motor fixing plate (308), the Y-axis motor fixing plate (308) is fixedly connected to the whole machine base (1), a Y-axis motor (310) is arranged on the Y-axis motor fixing plate (308) through a Y-axis motor mounting bracket (309), a Y-axis gear (311) is arranged on the motor shaft of the Y-axis motor (310), a Y-axis rack (312) is arranged on the rack fixing plate (307), and the Y-axis gear (311) is meshed with the Y-axis rack (312); the gear A spring fixing block (313) is arranged on the rack fixing plate (307), and a spring for tightening the rack fixing plate (307) is arranged between the spring fixing block (313) and the Y-axis motor fixing plate (308).

5. The high-precision microscopy scanner according to claim 1, characterized in that: The X-axis cross roller sliding assembly (4) comprises a first X-axis cross roller mounting lower base plate (401), the upper surface of the first X-axis cross roller mounting lower base plate (401) is provided with a first X-axis sliding area upper top plate (403) through two front and rear first X-axis cross roller guide rails (402), the first X-axis sliding area upper top plate (403) is fixedly connected to the upper surfaces of the two front and rear first X-axis cross roller guide rails (402) through three fixing screws distributed in a triangle, and at the same time, a plurality of top screws for adjusting the horizontality of the first X-axis sliding area upper top plate (403) on the two front and rear first X-axis cross roller guide rails (402) are arranged around each of the fixing screws; An X-axis cross roller backrest limiting plate (404) is arranged between the two pairs of the first X-axis cross roller guide rails (402), the lower surface of the X-axis cross roller backrest limiting plate (404) is fixedly connected to the upper surface of the first X-axis cross roller installation lower base plate (401), the upper surface of the X-axis cross roller backrest limiting plate (404) does not contact the lower surface of the first X-axis sliding area upper top plate (403), and the front and rear sides of the X-axis cross roller backrest limiting plate (404) are respectively connected to the front and rear two pairs of the first X-axis cross roller guide rails. The inner side surface of the first X-axis cross roller guide (402) is fixedly connected; the outer side surfaces of the two pairs of the first X-axis cross roller guides (402) are respectively provided with a first X-axis independent top screw plate (405), and the two first X-axis independent top screw plates (405) are respectively fixedly connected to the front and rear sides of the lower surface of the upper top plate (403) of the first X-axis sliding area, and the top screws of the two first X-axis independent top screw plates (405) are respectively aligned inwardly with the outer side surfaces of the two pairs of the first X-axis cross roller guides (402); A second focusing mirror avoidance hole (406) for avoiding the top structure of the lifting focusing assembly (7) is provided in the middle of the lower bottom plate (401) for mounting the first X-axis cross roller and at the corresponding position of the X-axis cross roller backrest limit plate (404), a glass slide rack mounting groove (407) which passes through from top to bottom is provided in the middle of the upper top plate (403) of the first X-axis sliding area, and the rear part of the upper top plate (403) of the first X-axis sliding area is an X-axis sliding drive assembly (5) for transmission connection with the X-axis sliding drive assembly (5). A component connection area, the upper surface of the X-axis cross roller backrest limiting plate (404) is provided with a global lower light source assembly mounting groove (408) for fixing the global lower light source assembly (8), a portion of the global lower light source assembly (8) is fixedly connected to the X-axis cross roller backrest limiting plate (404) through the global lower light source assembly mounting groove (408), and another portion of the global lower light source assembly (8) extends inwardly between the glass slide rack mounting groove (407) and the second focusing mirror avoidance hole (406); An electromagnetic adsorption component (409) for adsorbing the glass slide rack assembly (6) is arranged on one side frame of the glass slide rack mounting groove (407), and the electromagnetic adsorption component (409) comprises an electromagnet mounting seat (4091) fixed on one side frame of the glass slide rack mounting groove (407), and at least two electromagnet coils (4092) are embedded on the upper surface of the electromagnet mounting seat (4091). The electromagnet mounting seat (4091) is provided with an electromagnet connection terminal (4093) for connecting the electromagnet coil (4092) to an external power source; Two steel balls (4094) for contacting the side of the glass slide rack assembly (6) are embedded on the inner side surface of the electromagnet mounting seat (4091), and one steel ball (4094) for contacting the lower surface of the glass slide rack assembly (6) is embedded on the upper surface of the frame of the glass slide rack mounting groove (407) on the side opposite to the electromagnet mounting seat (4091).

6. The high-precision microscopy scanner according to claim 5, characterized in that: The X-axis sliding drive assembly (5) comprises an X-axis soft pad clamp (501) arranged in the X-axis sliding drive assembly installation area at the rear part of the upper surface of the top plate (203) of the Y-axis sliding area, an X-axis power fixing plate (502) is arranged on the X-axis soft pad clamp (501), a second X-axis cross roller installation bottom plate (503) is arranged at the front part of the upper surface of the X-axis power fixing plate (502), and the front and rear sides of the upper surface of the second X-axis cross roller installation bottom plate (503) are connected by two pairs of second X-axis cross rollers. The roller guide rail (504) is provided with a second X-axis sliding area upper top plate (506), and the outer side surfaces of the two pairs of the second X-axis cross roller guide rails (504) are respectively provided with a second X-axis independent top screw plate (505), and the two second X-axis independent top screw plates (505) are respectively fixedly connected to the front and rear sides of the lower surface of the second X-axis sliding area upper top plate (506), and the top screws of the two second X-axis independent top screw plates (505) are respectively aligned inwardly with the outer side surfaces of the two pairs of the second X-axis cross roller guide rails (504); An X-axis linear motor (508) is arranged at the rear of the upper surface of the X-axis power fixed plate (502) through a pair of left and right linear motor mounting seats (507); the X-axis linear motor (508) is fixedly connected to the rear of the upper top plate (506) of the second X-axis sliding area through an X-axis movable connecting piece (509); an X-axis movable push block (510) is arranged on both left and right sides of the upper top plate (506) of the second X-axis sliding area; at the same time, an X-axis movable push block fixing piece (511) is arranged on the X-axis sliding drive component connecting area at the rear of the upper top plate (403) of the first X-axis sliding area; an X-axis movable push block micro-motion lifting rail (517) is arranged on the left and right sides of the X-axis movable push block fixing piece (511); the two X-axis movable push blocks (510) are connected to the two X-axis movable push block micro-motion lifting rails (517) respectively.

7. The high-precision microscopy scanner according to claim 1, characterized in that: The slide rack assembly (6) comprises a slide rack main board (601), a slide rack handle (602) is arranged on one side of the slide rack main board (601), at least one slide mounting recess (604) for placing a slide (603) is arranged on the slide rack main board (601), the middle part of each slide mounting recess (604) is a hollow structure, and a slide end limit plate (605), a slide inner side support block (606) and a slide inner side support block (607) are arranged on the frame of each slide mounting recess (604). 06) and a glass slide outer spring composite push block structure (607), and the glass slide inner support block (606) is arranged opposite to the glass slide outer spring composite push block structure (607), and each of the glass slide mounting recesses (604) is provided with a glass slide bottom support protrusion (608) and two top screw holes (609) on the frame, and the two top screw holes (609) are respectively provided with glass slide top screws, and the glass slide bottom support protrusion (608) and the two glass slide top screws are distributed in an inverted triangle.

8. The high-precision microscopy scanner according to claim 1, characterized in that: The lifting and focusing assembly (7) comprises a T-shaped frame (701), a condenser lifting motor (702) is arranged at the rear of the upper end surface of the T-shaped frame (701), a ball screw (703) is arranged at the front of the upper end surface of the T-shaped frame (701), a driving wheel (704) is arranged on the motor shaft of the condenser lifting motor (702), a driven wheel (705) is arranged at the top end of the ball screw (703), a synchronous belt is wound between the driving wheel (704) and the driven wheel (705), a ball screw auxiliary guide rail (706) is arranged on the front surface of the vertical plate of the T-shaped frame (701), a slider on the ball screw auxiliary guide rail (706) is fixedly connected to a nut on the ball screw (703), and the nut on the ball screw (703) is connected to the condenser lifting motor (702). The lowering block (707) is provided with a condenser support plate (708), a condenser adjustment upper plate (710) is provided on the condenser support plate (708) via a condenser adjustment middle plate (709), and a condenser (712) is provided on the condenser adjustment upper plate (710) via a condenser connection tube (711); a condenser position limiting micro photoelectric switch (713) is provided on the side surface of one side of the vertical plate of the T-shaped frame (701), a condenser position limiting plate (714) for sensing and cooperating with the condenser position limiting micro photoelectric switch (713) is provided on the nut of the ball screw (703), and a global lower light source assembly (715) is provided directly below the condenser support plate (708), and the global lower light source assembly (715) is fixedly connected to the ZY axis common base plate (15).

9. The high-precision microscopy scanner according to claim 1, characterized in that: The Z-axis sliding assembly (9) comprises a Z-axis column (901) fixed on the ZY-axis common base plate (15), the Z-axis column (901) being located on one side of the assembly of the Y-axis cross roller sliding assembly (2) and the X-axis cross roller sliding assembly (4); a Z-axis ball screw (902) is arranged on the inner side surface of the Z-axis column (901) via a pair of upper and lower bearing seats; A Z-axis guide rail (903) is arranged parallel to the Z-axis ball screw (902) on the left and right sides; a Z-axis driving motor (904) is arranged on the top of the Z-axis column (901); a motor shaft of the Z-axis driving motor (904) is connected to the top of the screw of the Z-axis ball screw (902); a Z-axis lifting plate (905) is arranged on the nut of the Z-axis ball screw (902); and the Z-axis lifting plate (905) is connected to the Z-axis guide rail. The slide block on the Z-axis (903) is fixedly connected, a Z-axis bracket (906) is arranged on the Z-axis lifting plate (905), a Z-axis cantilever (909) is arranged on the side of the Z-axis bracket (906) through two pairs of Z-axis cross roller guide rails (908), a piezoelectric ceramic stack displacement device hanger (912) is arranged on the top of the Z-axis bracket (906), a pen-type piezoelectric ceramic stack displacement device (913) is connected between the piezoelectric ceramic stack displacement device hanger (912) and the Z-axis cantilever (909), an oil mirror mounting hole is opened on the Z-axis cantilever (909), an oil mirror mounting hole is arranged on the oil mirror mounting hole, the oil mirror adjusting plate (907) is fixedly connected to the Z-axis cantilever (909) through three locking screws distributed in a triangle, and at the same time, a top screw for adjusting the horizontality of the oil mirror adjusting plate (907) in the oil mirror mounting hole is arranged on one side of each of the locking screws.

10. The high-precision microscopy scanner according to claim 9, characterized in that: The oil immersion lens assembly (10) comprises an objective lens (1001), an elastic oil drip nozzle (1003), and an oil drip nozzle fixing block (1002); the objective lens (1001) is mounted in the oil immersion lens mounting hole (910) on the Z-axis cantilever (909), and is fixedly connected to the oil immersion lens adjustment plate (907); the oil drip nozzle fixing block (1002) is fixed to the lower surface of the Z-axis cantilever (909); the elastic oil drip nozzle (1003) is mounted on the oil drip nozzle fixing block (1002), and is attached to the side wall of the objective lens (1001) through the oil drip tube pressing plate, and the oil outlet is aligned with the lens of the objective lens (1001).

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