Cooling structure and laser device including same

Abstract

A laser device according to various embodiments may comprise: a housing; an inlet valve that is disposed in a first direction of the housing and configured to receive cooling water; an outlet valve that is disposed in a second direction of the housing and configured to discharge the cooling water; a laser output unit that is accommodated in the housing and configured to receive power and output a laser beam; and a cooling structure for cooling the laser output unit. The cooling structure may include: a support member for accommodating the laser output unit therein; and a flow path that is formed to go from the surface of the support member toward the inside of the support member and is for providing a path through which the cooling water flows.

Description

Cooling structure and laser device including the same

[0001] Various embodiments of the present disclosure relate to a cooling structure and a laser device including the same, and more particularly, to a cooling structure having a microchannel and a laser device including the same.

[0002] Cooling of the laser medium is related to laser quality, and therefore, the cooling efficiency of the laser medium can be a critical factor in determining laser quality. Typically, the laser medium is enclosed in a thick housing, with cooling water channels arranged at the top of the housing.

[0003] In such cases, not only is the cooling efficiency reduced due to indirect cooling through the housing, but there is also a risk that the device may be subject to vibration due to the flow of coolant flowing in the channel.

[0004] The problem to be solved in this disclosure is to improve the cooling efficiency of a laser medium through direct cooling and to suppress vibration of a laser device.

[0005] According to various embodiments, a laser device (e.g., a laser device (100) of FIG. 1) may be provided, comprising: a housing (e.g., a second housing (107) of FIG. 2); an inlet valve (e.g., an inlet (103) of FIG. 2) disposed in a first direction of the housing and configured to receive cooling water; an outlet valve (e.g., an outlet (105) of FIG. 2) disposed in a second direction of the housing and configured to discharge cooling water; a laser output unit (e.g., a laser output unit (110) of FIG. 2) accommodated in the housing and configured to output a laser beam when supplied with power; and a cooling structure (e.g., a cooling structure (200) of FIG. 2) for cooling the laser output unit; wherein the cooling structure includes: a support member (e.g., a support member (201) of FIG. 2) for accommodating the laser output unit therein; and a flow path formed on a surface of the support member so as to face an inward direction of the support member and providing a path for the cooling water to flow.

[0006] According to various embodiments, a laser device (e.g., a laser device (300) of FIG. 5) comprises: a housing (e.g., a second housing (307) of FIG. 5); an inlet valve (e.g., an inlet (303) of FIG. 5) arranged in a first direction of the housing and configured to receive cooling water; an outlet valve (e.g., an outlet (305) of FIG. 5) arranged in a second direction of the housing and configured to discharge cooling water; a laser output unit (e.g., a laser output unit (310) of FIG. 5) accommodated in the housing and configured to output a laser beam upon receiving power; and a cooling structure (e.g., a cooling structure (400) of FIG. 5) for cooling the laser output unit; wherein the cooling structure comprises: a support member (e.g., a support member (401) of FIG. 5) for accommodating the laser output unit therein; And a flow path region (e.g., flow path region (410) of FIG. 6) provided on the support member and providing a fluid movement path of the coolant, wherein the flow path region includes a first flow path region (e.g., a first flow path region (410a) of FIG. 6) provided close to the inlet valve and a second flow path region (e.g., a second flow path region (410b) of FIG. 6) provided close to the outlet valve, and a laser device may be provided.

[0007] According to the present disclosure, by using a support member (supporting a laser active medium) having microchannels, not only can the laser active medium be directly cooled using cooling water, but vibration due to flow velocity can also be suppressed using the microchannels.

[0008] FIG. 1 is an example implementation of a laser device according to various embodiments.

[0009] FIG. 2 is a cross-sectional view of a laser device according to various embodiments.

[0010] Figure 3 is a drawing showing a cooling structure according to various embodiments.

[0011] FIG. 4 is a drawing showing a cooling structure according to various embodiments from different angles.

[0012] Fig. 5 is a cross-sectional view of a laser device according to the second embodiment.

[0013] Figure 6 is a drawing showing a cooling structure according to the second embodiment.

[0014] Fig. 7 is a drawing showing a cooling structure according to the second embodiment from a different angle.

[0015] Fig. 8 is a cross-sectional view of the XZ plane of the cooling structure according to the second embodiment.

[0016] Fig. 9 is a drawing showing a part of the cooling process of the cooling structure according to the second embodiment.

[0017] Fig. 10 is a drawing showing another part of the cooling process of the cooling structure according to the second embodiment.

[0018] Fig. 11 is a drawing showing another part of the cooling process of the cooling structure according to the second embodiment.

[0019] The above-described objects, features, and advantages of the present invention will become more apparent through the following detailed description taken in conjunction with the accompanying drawings. However, the present invention is susceptible to various modifications and various embodiments. Therefore, specific embodiments will be illustrated in the drawings and described in detail below.

[0020] In the drawings, the thicknesses of layers and regions are exaggerated for clarity, and when an element or layer is referred to as "on" or "on" another element or layer, it includes not only the case where the element or layer is directly on top of the other element or layer, but also the case where another layer or other element is interposed. In principle, the same reference numerals represent the same elements throughout the specification. In addition, elements that have the same function within the scope of the same idea that appear in the drawings of each embodiment are described using the same reference numerals.

[0021] If a detailed description of a known function or configuration related to the present invention is deemed to unnecessarily obscure the gist of the present invention, such detailed description will be omitted. Furthermore, numbers (e.g., "first," "second," etc.) used throughout the description of this specification are merely identifiers used to distinguish one component from another.

[0022] Additionally, the suffixes "area," "part," and "sub" used in the description below are assigned or used interchangeably solely for the convenience of writing specifications, and do not have distinct meanings or roles in themselves.

[0023]

[0024] The present disclosure relates to a cooling structure and a laser device to which the cooling structure is applied according to various embodiments.

[0025] The cooling structure described in this disclosure can utilize a water-cooling method using coolant. In various embodiments described below, the water-cooling structure is provided within the laser device and has a flow path through which coolant can flow. The flow paths provided in the water-cooling structure may be microchannels having a fine structure.

[0026]

[0027] FIG. 1 is an example implementation of a laser device according to various embodiments.

[0028] Referring to FIG. 1, a laser device (100) according to various embodiments may include all or part of a first housing (101), an inlet (103), and an outlet (105).

[0029] According to various embodiments, the laser device (100) can generate and output a laser beam. In one embodiment, the laser device (100) may refer to a laser device used for semiconductor processing and / or general material marking processes. Without being limited thereto, various types of laser devices (100) may be applied to the present disclosure.

[0030] In one embodiment, the laser device (100) may include a laser output unit (110) for irradiating a laser beam to the outside of the first housing (101). The laser output unit (110) is disposed within the first housing (101) and may generate and output a laser beam when power is applied. The laser output unit (110) may be exposed to the outside of the first housing (101). For example, the laser output unit (110) may include a laser source (e.g., a laser-active medium). The laser-active medium may be, but is not limited to, an Nd:YAG laser, an Er:YAG laser, and / or an Ytterbium:YAG laser, and various laser-active media may be used. In various embodiments, the laser output unit (110) may be provided in a rod shape.

[0031] According to various embodiments, the laser device (100) may include an inlet (103) and an outlet (105). The inlet (103) and the outlet (105) may be arranged symmetrically with respect to the laser output unit (110) on the outer surface of the first housing (101). In one embodiment, the inlet (103) may be arranged vertically upward with respect to the ground, and the outlet (105) may be arranged vertically downward with respect to the ground.

[0032] In one embodiment, the inlet (103) and the outlet (105) may be positioned opposite each other with respect to a horizontal axis (e.g., y-axis direction and / or x-axis direction). For example, the inlet (103) may be positioned so as to be biased in a first horizontal direction (e.g., +y-axis direction) and the outlet (105) may be positioned so as to be biased in a second horizontal direction (e.g., -y-axis direction). It will be appreciated that a similar description may equally apply to the x-axis direction.

[0033] In some embodiments, the inlet (103) and the outlet (105) may be arranged to be oriented in the same direction with respect to a horizontal axis (e.g., y-axis direction and / or x-axis direction). For example, the inlet (103) and the outlet (105) may be arranged at the same or substantially corresponding positions with respect to a first horizontal direction (e.g., +y-axis direction) while being arranged symmetrically with respect to the laser output unit (110). Specifically, the inlet (103) may be arranged at the upper side of the first horizontal direction (+y and +z directions), and the outlet (105) may be arranged at the lower side of the first horizontal direction (+y and -z directions). Similarly, it will be appreciated that the inlet (103) and the outlet (105) may also be arranged to be oriented in the second horizontal direction (-y-axis direction).

[0034] In some embodiments, the inlet (103) and the outlet (105) may be positioned at corresponding positions with respect to a horizontal axis (e.g., y-axis direction and / or x-axis direction). For example, the inlet (103) and the outlet (105) may be positioned symmetrically with respect to a vertical direction (z-axis direction) and at the same positions with respect to a horizontal direction (y-axis direction and / or x-axis direction). In other words, when the laser device (100) is viewed from a direction parallel to a vertically upward direction (+z-axis direction) and / or a vertically downward direction (-z-axis direction), all or at least a portion of the inlet (103) and the outlet (105) may be said to overlap with each other. As another example, the inlet (103) and the outlet (105) may be positioned near the center of the laser device (100) with respect to a horizontal axis (e.g., y-axis direction).

[0035] In addition to this, various implementation variations are possible for the arrangement positions of the inlet (103) and outlet (105).

[0036] According to various embodiments, the inlet (103) and the outlet (105) may be provided as valves. The inlet (103) may be configured to introduce cooling water into the laser device (100), and the outlet (105) may be configured to discharge cooling water inside the laser device (100) to the outside. The cooling water introduced through the inlet (103) may cool the laser output unit (110) and be discharged through the outlet (105).

[0037] According to various embodiments, the laser device (100) may include a cooling structure for cooling the laser output unit (110). For example, the laser output unit (110) may be heated when generating a laser beam, and the cooling structure may be used to cool the heated laser output unit (110). In various embodiments, the cooling structure may be provided as a combination of all or part of a flow path for cooling water to flow, an inlet (103), and an outlet (105).

[0038]

[0039] FIG. 2 is a cross-sectional view of a laser device according to various embodiments.

[0040] Referring to FIG. 2, the laser device (100) may include a cooling structure (200). In one embodiment, the cooling structure (210) may include a second housing (107), a support member (201), and a flow path (202). The laser device (100) of FIG. 2 may mean a configuration that is all or partly the same as the laser device (100) of FIG. 1.

[0041] According to various embodiments, a second housing (107) may be disposed inside the first housing (101). The second housing (107) may provide a cavity (108) therein. In addition, the second housing (107) may include a second input region (103b) fluidly connected to the inlet (103) and a first discharge region (105a) fluidly connected to the outlet (105). For example, cooling water introduced through the first input region (103a) of the inlet (103) may be introduced into the second housing (107) through the second input region (103b). In addition, cooling water delivered through the first discharge region (105a) may be discharged to the outside of the laser device (100) through the second discharge region (105b).

[0042] According to various embodiments, the support member (201) may be disposed inside the second housing (107). The support member (200) may accommodate the laser output unit (110) therein and stably support the laser output unit (110). According to various embodiments, a flow path (202) may be provided on the outer surface of the support member (201). The flow path (202) may provide a path for cooling water introduced into the second housing (107) to flow.

[0043] According to various embodiments, the cavity (108) may include a first cavity (108a) and a second cavity (108b). In one embodiment, the first cavity (108a) may be disposed adjacent to the inlet (103) and may provide a space for cooling water introduced through the inlet (103) to be maintained for a predetermined period of time. The cooling water flowing inside the first cavity (108a) may flow along the flow path (202) to cool the support member (201) and the laser output unit (110) inside the support member (201). In one embodiment, the cooling water flowing along the flow path (202) from the first cavity (108a) may flow to the second cavity (108b). For example, the support member (201) may have a substantially cylindrical shape, and the cooling water may flow from the first cavity (108a) to the second cavity (108b) along the flow path (202) formed on the outer surface of the cylindrical support member (201). The cooling water may flow from the first cavity (108a) to the second cavity (108b) along the flow path (202) and cool the support member (201) and the laser output unit (110) mounted inside the support member (201).

[0044] In one embodiment, within the laser device (100), fluid (coolant) can flow from the inlet (103) toward the outlet (105). For example, the inlet (103) is positioned vertically upward (in the +Z-axis direction) relative to the ground, and the outlet (105) is positioned vertically downward (in the -Z-axis direction) relative to the ground, so that the coolant can flow from the inlet (103) toward the outlet (105) due to the influence of gravity. As another example, the coolant can flow from the inlet (103) toward the outlet (105) by utilizing the pressure difference between the inlet (103) and the outlet (105).

[0045]

[0046] Fig. 3 is a drawing showing a cooling structure according to various embodiments. Fig. 4 is a drawing showing a cooling structure according to various embodiments from different angles.

[0047] Referring to FIGS. 3 and 4, the support member (201) applied to the cooling structure (200) may include a bulkhead portion (211), a channel portion (212), and a support portion (213). The support member (201) of FIGS. 3 and 4 may mean a configuration that is all or partly the same as the support member (201) of FIG. 2.

[0048] According to various embodiments, a plurality of partition walls (211) may be arranged to surround the outer surface of the support member (213). In one embodiment, the plurality of partition walls (211) may be arranged to be spaced apart from each other by a predetermined distance. For example, when the support member (213) has a cylindrical shape, the partition walls (211) may have a circular plate shape surrounding the support member (213). However, this is exemplary, and the shape of the partition walls (211) may be determined in various ways. In one embodiment, the space between the plurality of partition walls (211) may be provided as a channel portion (212).

[0049] According to various embodiments, the cooling water may flow along the channel portion (212) provided as a space between the plurality of partition portions (211), and the cooling water may flow along the surface of the support portion (213). In one embodiment, a heatable laser output portion (110, laser active medium) is disposed inside the support portion (213), and the cooling water flowing on the surface of the support portion (213) may cool the laser output portion (110). The support portion (213) is disposed as close to the laser output portion (110) as possible, and the cooling efficiency of the laser output portion (110) may be improved. According to one embodiment, the channel portion (212) may be formed by processing the outer surface of the support member (201). For example, the channel portion (212) may be provided by forming a groove on the outer surface of the support member (201). Here, the channel portion (212) can be provided by micro-machining the outer surface of the support member (201) and can be referred to as a micro channel.

[0050] According to various embodiments, the connecting portion (220) may be connected to the second housing (107). In one embodiment, the first connecting portion (221) may be connected to the first direction (+y-axis direction) of the second housing (107), and the second connecting portion (222) may be connected to the second direction (-y-axis direction) of the second housing (107). The supporting member (201) may be coupled to the second housing (107) through the connecting portion (220).

[0051] According to one embodiment, the first bulkhead portion (211a) may be positioned adjacent to the first connection portion (221). The second bulkhead portion (211b) may be positioned in the middle region with respect to the longitudinal direction (y-axis direction) of the support member (201). The third bulkhead portion (211c) may be positioned adjacent to the second connection portion (222).

[0052] In some embodiments, the first bulkhead portion (211a) may be disposed in close contact with the first connection portion (221) or may be formed integrally with the first connection portion (221). As another example, the third bulkhead portion (211c) may be disposed slightly apart from the second connection portion (222). In one embodiment, the longitudinal (y-axis) widths of the first channel portion (212a) and the second channel portion (212b) may be formed to be the same. In another example, the width of the third channel portion (212c) between the second connection portion (222) and the third bulkhead portion (211c) may be smaller than the widths of the first channel portion (212a) and / or the second channel portion (212b). However, this is exemplary, and the third bulkhead portion (211c) may also be disposed in close contact with the second connection portion (222) or may be formed integrally with it. In this case, the spacing between multiple bulkheads (211) can all be constant.

[0053] According to various embodiments, the flow path section (202) may include a first flow path section (202a) and a second flow path section (202b). The first flow path section (202a) and the second flow path section (202b) may be distinguished based on the flow direction of the cooling water. For example, the first flow path section (202a) may refer to the flow path section (202) provided in an upward direction (+Z-axis direction) toward the inlet (103), and the second flow path section (202b) may refer to the flow path section (202) provided in a downward direction (-Z-axis direction) toward the outlet (105). That is, the cooling water that enters through the first cavity (108a) flows through the first flow path (202a) to cool the support member (201) and the laser output unit (110), and the cooling water used for cooling can flow from the first flow path (202a) to the second flow path (202b) and pass through the second cavity (108b) to be discharged to the outlet (105).

[0054] According to various embodiments, as the coolant flows through a plurality of channels (212) formed with a fine width, unnecessary vibration due to the flow rate of the coolant can be suppressed.

[0055] In some embodiments, the first connection portion (221) and / or the second connection portion (222) may each include a first injection hole (224a) and / or a second injection hole (224b) connected to a mounting area (e.g., mounting area (441a) of FIG. 5) on which the laser output portion (110) is mounted. A curing agent may be injected through the injection hole (224) to secure the laser output portion (110) to the mounting area (e.g., mounting area (441a) of FIG. 5).

[0056]

[0057] Fig. 5 is a cross-sectional view of a laser device according to the second embodiment.

[0058] Referring to FIG. 5, a laser device (300) according to a second embodiment may include all or part of a first housing (301), a second housing (307), an inlet (303), an outlet (305), a support member (401), and a laser output unit (310). Here, a cooling structure (400) for cooling the laser output unit (310) may be provided as a combination of a support member (401), a flow path area (410) provided in the support member (401), and a second housing (307).

[0059] The description of the first housing (301), the second housing (307), the inlet (303), the outlet (305), and the laser output unit (310) of the laser device (300) according to the second embodiment may be applied to the description of the first housing (101), the second housing (107), the inlet (103), the outlet (105), and the laser output unit (110) described above with reference to FIGS. 1 to 4, and therefore, any duplicate description will be omitted. Conversely, the descriptions of the laser device (300) according to the second embodiment that will be described below may also be applied to the laser device (100) of FIGS. 1 to 4.

[0060] According to various embodiments, a flow path region (410) for cooling the laser output unit (310) may be provided in the support member (401). In one embodiment, the flow path region (410) may include a plurality of openings (411). Cooling water introduced from the inlet (303) may come into direct contact with the laser output unit (310) through the openings (411) to cool the laser output unit (310). In one embodiment, the cooling water applied to the first input region (303a) of the inlet (303) is stored in the first cavity (308a), and when the first cavity (308a) is filled with cooling water to a certain capacity or more, the cooling water may flow through the openings (411) to cool the laser output unit (310). This will be further described later.

[0061] According to various embodiments, the support member (401) may include a mounting portion (441) provided therein. The mounting portion (441) may include a mounting area (441a) therein. The mounting area (441a) may refer to a space extending in the longitudinal direction (y-axis direction) within the mounting portion (441). The laser output portion (310) may be arranged in the mounting area (441a). The mounting portion (441) may further include a fluid delivery path (e.g., an inlet opening (415a)) for delivering fluid (coolant) to the mounting area (441a). This will be described later with reference to FIGS. 9 to 11.

[0062]

[0063] Fig. 6 is a drawing showing a cooling structure according to a second embodiment. Fig. 7 is a drawing showing a cooling structure according to the second embodiment from a different angle.

[0064] Referring to FIGS. 6 and 7, the support member (401) may include at least one flow path region (410). For example, the flow path region (410) may include regions (e.g., a first flow path region (410a), a second flow path region (410b), and / or a third flow path region (410c)) formed by a plurality of openings (e.g., a plurality of first openings (411a), a plurality of second openings (411b), and / or a plurality of third openings (411c)). The support member (401) of FIG. 6 may mean a configuration that is all or partly the same as the support member (401) of FIG. 5.

[0065] According to various embodiments, coolant may be introduced into the support member (401) through the euro area (410). In one embodiment, the euro area (410) may include a plurality of openings (411: 411a, 411b, 411c) spaced apart by a predetermined interval.

[0066] According to various embodiments, the flow path areas (410) may be arranged along the circumferential periphery of the support member (401). In one embodiment, the first flow path area (410a) and the second flow path area (410b) may be arranged along the circumferential direction on the surface (413) of the support member (401). Similarly, the second flow path area (410b) and the third flow path area (410c) may also be arranged along the circumferential direction on the surface (413) of the support member (401). Although only the first to third flow path areas (410a, 410b, 410c) are illustrated in the drawings, more or fewer flow path areas (410) may be formed along the circumferential direction of the surface (413) of the support member (401).

[0067] According to various embodiments, a portion of the flow path (410) may be provided as an inlet path for the coolant, and another portion of the flow path (410) may be provided as an outlet path for the coolant. In one embodiment, a first flow path (410a) may be provided as an inlet path for the coolant, and a third flow path (410c) may be provided as an outlet path for the coolant. For example, the first flow path (410a) adjacent to the inlet (303) may be an inlet path for the coolant, and the third flow path (410c) adjacent to the outlet (305) may be an outlet path for the coolant. The second flow path (410b) may be provided as an inlet path or an outlet path for the coolant, depending on the arrangement relationship with the inlet (303) or the outlet (305).

[0068] According to various embodiments, the plurality of openings (411) may be arranged along the longitudinal direction (e.g., +z-axis direction) of the surface (413) of the support member (401). In one embodiment, the first openings (411a) may be arranged along the longitudinal direction (+z-axis direction) in the first flow region (410a). The description of the first opening (411a) may apply to the second opening (411b) and the third opening (411c).

[0069] According to various embodiments, the size of the opening (411) may be predetermined. For example, as will be described later, the size of the opening (411) may be determined so that when the pressure due to the cooling water accumulated in the first cavity (e.g., the first cavity (308a) of FIG. 9) becomes higher than a predetermined pressure, the cooling water flows in through the opening (411).

[0070]

[0071] Fig. 8 is a cross-sectional view of the XZ plane of the cooling structure according to the second embodiment.

[0072] Figure 8 shows the AA' cross-section of Figure 5.

[0073] Referring to FIG. 8, the support member (401) may include a partition (431) positioned between the first cavity (308a) and the second cavity (308b). The support member (401) of FIG. 8 may be fully or partially applied to the description of the support member (401) in the above-described embodiments.

[0074] According to various embodiments, the partition (431) may define a first cavity (308a) and a second cavity (308b). In one embodiment, the partition (431) may extend from a surface (413) of the support member (401) to the second housing (407). The partition (431) may also extend in the longitudinal direction of the support member (401) to fluidically define the first cavity (308a) and the second cavity (308b).

[0075] According to various embodiments, the first cavity (308a) partitioned by the partition (431) may be filled with coolant. In one embodiment, when the coolant fills the first cavity (308a) to a predetermined amount or more, the coolant may flow into the interior of the support member (401) through an opening (e.g., opening (411) of FIG. 7).

[0076] According to various embodiments, the coolant passing through the interior of the support member (401) may be delivered to the second cavity (308b). In one embodiment, the partition (431) may partition the second cavity (308b) and the first cavity (308a), and may prevent the heated coolant delivered to the second cavity (308b) from flowing back into the first cavity (308a).

[0077]

[0078] Fig. 9 is a drawing illustrating a portion of the cooling process of a cooling structure according to a second embodiment. Fig. 10 is a drawing illustrating another portion of the cooling process of a cooling structure according to a second embodiment. Fig. 11 is a drawing illustrating another portion of the cooling process of a cooling structure according to a second embodiment.

[0079] Referring to FIGS. 9 to 11, a cooling process according to various embodiments will be described. In describing FIGS. 9 to 11, reference numerals of FIGS. 5 to 8 may also be mentioned.

[0080] According to various embodiments, the cooling water (w) may be stored in the first cavity (308a). In one embodiment, the cooling water (w) introduced through the inlet (303) may be delivered to and filled in the first cavity (308a), which is a space between the support member (401) and the second housing (307). When the cooling water (w) is filled in the first cavity (308a) to a predetermined capacity or more, the cooling water may be delivered into the interior of the support member (401) through the opening (411). Here, it may be desirable for the cooling water (w) to be uniformly introduced into a plurality of openings (411) arranged in the longitudinal direction (e.g., y-axis direction) of the support member (401). As a result, the laser output unit (310) arranged in the longitudinal direction (y-axis direction) inside the support member (401) may be uniformly cooled in the longitudinal direction (y-axis direction). Accordingly, the openings (411) arranged along the longitudinal direction (y-axis direction) may have a predetermined size so as to allow the cooling water (w) to flow substantially simultaneously after the first cavity (308a) is filled with sufficient cooling water (w).

[0081] According to various embodiments, the cooling water introduced through the opening (411) may be delivered to the first receiving portion (412). In one embodiment, the first receiving portion (412) may be provided between the receiving portion (441) for arranging the laser output portion (310) and the supporting portion (442) of the supporting member (401) in which the opening (411) is formed. Here, the outer surface of the supporting portion (442) may be the surface (413) described above. When the first receiving portion (412) is filled with a cooling water (w) greater than a predetermined amount, the cooling water (w) may be introduced into the receiving portion (441) through the inlet opening (415a) formed in the receiving portion (441). The cooling water (w) introduced into the receiving portion (441) may be in direct contact with the laser output portion (310) to cool the laser output portion (310).

[0082] According to various embodiments, the mounting portion (441) may be provided inside the support member (401) and may refer to a member and / or region for mounting the laser output portion (310). In one embodiment, the mounting portion (441) may include a mounting area (441a) therein. The laser output portion (310) may be arranged in the mounting area (441a).

[0083] In various embodiments, the inlet opening (415a) may be formed so as to face the inlet (303) in the seating portion (441). The inlet opening (415a) may be arranged to correspond to the opening (411), but is not required. The inlet opening (415) may be fluidly connected to the first receiving portion (412) and provide a fluid path for the cooling water (w) filled in the first receiving portion (412) to be delivered to the seating area (441a).

[0084] In various embodiments, an outlet opening (415b) may be provided in the seating portion (441) so as to face substantially opposite to the inlet opening (415a) (or so as to face the outlet (305)). The outlet opening (415b) may provide a fluid path through which cooling water (w) delivered into the seating area (441a) through the inlet opening (415a) may be discharged after cooling the laser output portion (310). In one embodiment, the outlet opening (415b) may be fluidly connected to a discharge opening (417). Additionally, a second receiving portion (414) may be provided between the outlet opening (415b) and the discharge opening (417). For example, the cooling water (w) discharged from the outlet opening (415b) can be filled in the second receiving portion (414), and the cooling water (w) filled in the second receiving portion (414) can be discharged through the discharge opening (417).

[0085] In some embodiments, the opening (411) and / or the discharge opening (417) may have a predetermined depth with respect to the direction in which the coolant (w) flows (e.g., in the Z-axis direction). Here, the predetermined depth may be set so that the coolant (w) can pass through the opening (411) when a predetermined pressure is applied to the coolant (w). That is, for example, the depth of the opening (411) may be determined so that the coolant (w) can flow through the opening (411) only when the coolant (w) filled in the first cavity (309) is filled to a predetermined capacity or more. Accordingly, the coolant (w) can be simultaneously introduced into a plurality of openings (411) arranged in the longitudinal direction (e.g., in the y-axis direction) of the support member (401). The description of the opening (411) may similarly be applied to the discharge opening (417), the inlet opening (415a), and / or the outlet opening (415b).

[0086]

[0087] According to various embodiments, a laser device (e.g., a laser device (100) of FIG. 1) may be provided, comprising: a housing (e.g., a second housing (107) of FIG. 2); an inlet valve (e.g., an inlet (103) of FIG. 2) disposed in a first direction of the housing and configured to receive cooling water; an outlet valve (e.g., an outlet (105) of FIG. 2) disposed in a second direction of the housing and configured to discharge cooling water; a laser output unit (e.g., a laser output unit (110) of FIG. 2) accommodated in the housing and configured to output a laser beam when supplied with power; and a cooling structure (e.g., a cooling structure (200) of FIG. 2) for cooling the laser output unit; wherein the cooling structure includes: a support member (e.g., a support member (201) of FIG. 2) for accommodating the laser output unit therein; and a flow path formed on a surface of the support member so as to face an inward direction of the support member and providing a path for the cooling water to flow.

[0088] According to one embodiment, a laser device may be provided in which the support member includes a mounting portion (e.g., mounting portion (441) of FIG. 5) extending along the length direction of the support member on the inside thereof and for mounting the laser output portion.

[0089] According to one embodiment, the euro may be provided with a laser device including a plurality of openings (e.g., openings (411) of FIG. 7) formed in a surface of the support member so as to face the inlet.

[0090] According to one embodiment, the euro may be provided with a laser device including a plurality of discharge openings (e.g., discharge openings (417) of FIG. 9) formed on the surface of the support member so as to face the outlet valve.

[0091] According to one embodiment, a laser device may be provided in which a cavity (e.g., cavity (308) of FIG. 9) for filling the cooling water is provided between the housing and the support member, and the cavity includes a first cavity (e.g., first cavity (308a) of FIG. 9) close to the inlet valve and a second cavity (e.g., second cavity (308b) of FIG. 9) close to the outlet valve.

[0092] According to one embodiment, a laser device may be provided in which the width of the plurality of openings is provided to be less than a predetermined width so that the cooling water filled in the first cavity can flow to the plurality of openings when the volume thereof is greater than a predetermined volume.

[0093] According to one embodiment, a laser device may be provided in which the depth of the plurality of openings is provided to be greater than a predetermined depth so that the cooling water filled in the first cavity can flow through the plurality of openings when the volume thereof is greater than a predetermined capacity.

[0094] According to one embodiment, the cooling structure may be provided with a laser device further including a first receiving portion (e.g., the first receiving portion (412) of FIG. 9) provided between the mounting portion and the plurality of openings.

[0095] According to one embodiment, the cooling structure may be provided with a laser device further including a plurality of inlet openings (e.g., inlet openings (415a) of FIG. 9) connected to the interior of the mounting portion and providing a fluid movement path for the cooling water so that the cooling water comes into direct contact with the laser output portion.

[0096] According to one embodiment, a laser device may be provided in which the first cavity, the plurality of openings, the first receiving portion, and the plurality of inlet openings are fluidly connected to each other.

[0097] According to one embodiment, a laser device may be provided wherein the cooling structure further comprises a partition (e.g., partition (431) of FIG. 8) configured to fluidly partition between the first cavity and the second cavity and disposed between the housing and the support member.

[0098] According to one embodiment, a laser device may be provided in which the cooling structure is configured to provide a discharge path for cooling water that cools the laser output unit by connecting from the inside of the mounting portion to the outside of the mounting portion and further includes an outlet opening (e.g., outlet opening (415b) of FIG. 9) formed to face a different direction from the inlet opening.

[0099] According to one embodiment, the euro may be provided with a laser device formed by processing the outer surface of the support member.

[0100] According to one embodiment, a laser device may be provided in which the support member further includes a plurality of partition walls (e.g., partition walls (211) of FIG. 4) spaced apart from each other by a predetermined interval along the length direction of the support member and a channel wall (e.g., channel wall (212) of FIG. 4) provided as a space between the partition walls.

[0101] According to one embodiment, a laser device may be provided in which at least some of the plurality of bulkheads are arranged to surround the circumference of the support member.

[0102] According to one embodiment, the support member may be provided with a laser device further including an injection opening (e.g., injection opening (224) of FIG. 3) configured to inject a hardener for fixing the support member and the laser output unit.

[0103] According to one embodiment, the laser output unit may be provided with a laser device including a laser active medium.

[0104] According to various embodiments, a laser device (e.g., a laser device (300) of FIG. 5) comprises: a housing (e.g., a second housing (307) of FIG. 5); an inlet valve (e.g., an inlet (303) of FIG. 5) arranged in a first direction of the housing and configured to receive cooling water; an outlet valve (e.g., an outlet (305) of FIG. 5) arranged in a second direction of the housing and configured to discharge cooling water; a laser output unit (e.g., a laser output unit (310) of FIG. 5) accommodated in the housing and configured to output a laser beam upon receiving power; and a cooling structure (e.g., a cooling structure (400) of FIG. 5) for cooling the laser output unit; wherein the cooling structure comprises: a support member (e.g., a support member (401) of FIG. 5) for accommodating the laser output unit therein; And a flow path region (e.g., flow path region (410) of FIG. 6) provided on the support member and providing a fluid movement path of the coolant, wherein the flow path region includes a first flow path region (e.g., a first flow path region (410a) of FIG. 6) provided close to the inlet valve and a second flow path region (e.g., a second flow path region (410b) of FIG. 6) provided close to the outlet valve, and a laser device may be provided.

[0105] According to one embodiment, a laser device may be provided in which the first flow region includes a plurality of first openings (e.g., the first openings (411a) of FIG. 6) arranged along the longitudinal direction of the support member, the second flow region includes a plurality of second openings (e.g., the second openings (411b) of FIG. 6) arranged along the longitudinal direction of the support member, the first openings providing an inlet path for the cooling water to flow into the interior of the support member, and the second openings providing an exhaust path for the cooling water heated by the laser output unit within the interior of the support member.

[0106]

[0107] Although the embodiments described above have been described by way of limited examples and drawings, those skilled in the art will appreciate that various modifications and variations can be made based on the above description. For example, appropriate results can still be achieved even if the described techniques are performed in a different order than described, and / or components of the described systems, structures, devices, circuits, etc. are combined or combined in a different manner than described, or are replaced or substituted with other components or equivalents.

[0108] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims described below.

[0109]

[0110] Laser device 100

[0111] 1st Housing 101, 301

[0112] Inlets 103, 303

[0113] 1st input area 103a, 303a

[0114] Second input area 103b, 303b

[0115] Outlet 105, 305

[0116] 1st discharge area 105a, 305a

[0117] Second emission area 105b, 305b

[0118] Second Housing 107, 307

[0119] Laser output 110, 310

[0120] Cavity 308

[0121] 1st cavity 108a, 308a

[0122] Second cavity 108, 308

[0123] Cooling structure 200, 400

[0124] Support members 201, 401

[0125] Support 213, 442

[0126] Euro 202

[0127] Euro 1st Division 202a

[0128] 2nd Euro 202b

[0129] First connection part 221, 421

[0130] Second connection part 222, 422

[0131] Bulkhead 211

[0132] Bulkhead 1 211a

[0133] Second bulkhead section 211b

[0134] Bulkhead 3 211c

[0135] Channel 212

[0136] Channel 1 Section 212a

[0137] Channel 2 Section 212b

[0138] 3rd Channel Section 212c

[0139] Eurozone 410

[0140] Eurozone 1 410a

[0141] Second Eurozone 410b

[0142] Third Eurozone 410c

[0143] Opening 411

[0144] 1st opening 411a

[0145] Second opening 411b

[0146] 3rd opening 411c

[0147] Surface 413

[0148] Partition 431

[0149] Inlet opening 415a

[0150] Outlet opening 415b

[0151] exhaust opening 417

[0152] 1st Reception Unit 412

[0153] Second Reception Unit 414

[0154] Anchorage 441

[0155] Settlement area 441a

Claims

1. In laser devices, housing; An inlet valve arranged in the first direction of the housing and configured to receive cooling water; An outlet valve arranged in the second direction of the housing and configured to discharge coolant; A laser output unit configured to be housed within the housing and output a laser beam upon receiving power; and A cooling structure for cooling the laser output unit is included; The above cooling structure is, A support member for accommodating the laser output unit therein; and A channel formed on the surface of the support member so as to face the inner direction of the support member and providing a path for the cooling water to flow; Laser device.

2. In paragraph 1, The support member includes a mounting portion extending along the length of the support member on the inside thereof and for mounting the laser output portion. Laser device.

3. In paragraph 2, The above-mentioned euro includes a plurality of openings formed on the surface of the support member so as to face the inlet. Laser device.

4. In paragraph 3, The above-mentioned euro comprises a plurality of discharge openings formed on the surface of the support member so as to face the outlet valve. Laser device.

5. In paragraph 3, A cavity is provided between the housing and the support member to be filled with the cooling water, The cavity includes a first cavity close to the inlet valve and a second cavity close to the outlet valve. Laser device.

6. In paragraph 5, When the cooling water filled in the first cavity exceeds a predetermined capacity, the width of the plurality of openings is provided to be less than a predetermined width so that the cooling water can flow through the plurality of openings. Laser device.

7. In paragraph 5, When the cooling water filled in the first cavity reaches a predetermined capacity or more, the depth of the plurality of openings is provided to be greater than a predetermined depth so that the cooling water can flow through the plurality of openings. Laser device.

8. In paragraph 3, The cooling structure further includes a first receiving portion provided between the mounting portion and the plurality of openings. Laser device.

9. In paragraph 8, The cooling structure further includes a plurality of inlet openings connected to the interior of the mounting portion and providing a fluid movement path for the cooling water so that the cooling water can be in direct contact with the laser output portion. Laser device.

10. In paragraph 9, The first cavity, the plurality of openings, the first receiving portion and the plurality of inlet openings are fluidly connected to each other. Laser device.

11. In paragraph 5, The cooling structure further includes a partition configured to fluidly partition between the first cavity and the second cavity and arranged between the housing and the support member. Laser device.

12. In paragraph 10, The cooling structure is configured to provide a discharge path for cooling water that cools the laser output unit by connecting from the inside of the mounting portion to the outside of the mounting portion, and further includes an outlet opening formed to face a different direction from the inlet opening. Laser device.

13. In paragraph 1, The above euro is formed by processing the outer surface of the above support member. Laser device.

14. In paragraph 13, The above support member further includes a plurality of partition walls spaced apart at a predetermined interval along the length direction of the support member and a channel wall provided as a space between the partition walls. Laser device.

15. In paragraph 14, At least some of the above plurality of bulkheads are arranged to surround the circumference of the support member. Laser device.

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