Vacuum pad and pad member

Abstract

A vacuum pad (10A) uses a vacuum to clamp a workpiece (W), said vacuum pad comprising: a hollow pad body (16) that has a clamping surface (14) which contacts the workpiece; an annular attachment part (18) that is provided to the pad body and that is for attachment to a first support member (200); and a valve unit (50) that is provided to the inside of the attachment part and that adjusts the flow rate of air flowing through a suction flow path (52) which sucks air from an internal space of the pad body.

Description

Vacuum pad and pad member

[0001] The present invention relates to a vacuum pad and a pad member.

[0002] For example, International Publication No. 2015 / 141980 discloses a vacuum pad that uses vacuum pressure to adsorb a workpiece.

[0003] There is a need for better vacuum pads and pad members.

[0004] The present invention aims to solve the above-mentioned problems.

[0005] One aspect of the present invention is a vacuum pad that uses vacuum pressure to adsorb a workpiece, comprising: a hollow pad body having an adsorption surface that contacts the workpiece; an annular mounting portion provided on the pad body for attaching it to a support member; and a valve unit provided inside the mounting portion that adjusts the flow rate of air flowing through a suction flow path that sucks air from the internal space of the pad body.

[0006] Another aspect of the present invention is a pad member that uses vacuum pressure to adsorb a workpiece, comprising a hollow pad body having an adsorption surface that contacts the workpiece, and an annular mounting portion provided on the pad body, wherein the mounting portion has an annular protrusion that protrudes outward from the pad body, the outer peripheral surface of the protrusion has an outer mounting groove formed thereon that can be attached to a first support member, and the inner peripheral surface of the mounting portion has an inner mounting groove formed thereon that can be attached to an adapter for attaching the mounting portion to a second support member.

[0007] According to the present invention, a better vacuum pad and pad member can be obtained.

[0008] FIG. 1 is a perspective view of a pad member according to one embodiment of the present invention. FIG. 2 is a vertical cross-sectional view of the pad member. FIG. 3 is a horizontal cross-sectional view taken along line III-III in FIG. 2. FIG. 4 is a vertical cross-sectional view of a suction unit equipped with a vacuum pad according to the first embodiment. FIG. 5 is an enlarged vertical cross-sectional view of a portion of the vacuum pad of FIG. 4. FIG. 6 is an exploded perspective view of a valve unit. FIG. 7 is an explanatory diagram of a method for attaching a vacuum pad. FIG. 8 is a perspective view of a suction unit equipped with a vacuum pad according to a second embodiment. FIG. 9 is a vertical cross-sectional view of the vacuum pad of FIG. 8. FIG. 10 is a vertical cross-sectional view of a vacuum pad according to a first modified example. FIG. 11 is a vertical cross-sectional view of a vacuum pad according to a second modified example.

[0009] A vacuum pad and a pad member according to an embodiment of the present invention will be described below with reference to the drawings. First, the pad member, which is a component of the vacuum pad according to the present invention, will be described.

[0010] The pad member 12 shown in Figures 1 to 3 is attached to a first support member 200 (see Figure 4) or a second support member 300 (see Figures 8 and 9) depending on the workpiece W, etc. As shown in Figure 4, the first support member 200 is a direct attachment type support member to which the pad member 12 can be directly attached. As shown in Figures 8 and 9, the second support member 300 is an adapter attachment type support member to which the pad member 12 can be attached via an adapter 80.

[0011] 1 and 2, the pad member 12 is a member for suctioning the workpiece W by utilizing vacuum pressure. The pad member 12 has a cylindrical shape. One end of the pad member 12 in the axial direction (X direction) is provided with a suction surface 14 that comes into contact with the workpiece W. The pad member 12 is integrally molded from an elastic material. Examples of elastic materials that make up the pad member 12 include synthetic rubber, natural rubber, and thermoplastic elastomer.

[0012] The pad member 12 has a hollow pad body 16 and an attachment portion 18. The pad body 16 is a cylindrical portion having an internal space S. The pad body 16 has a bellows shape that is expandable and contractable along the axial direction of the pad member 12 and bendable relative to the axial direction of the pad member 12. The pad body 16 is, for example, a 2.5-stage bellows. The number of stages of the pad body 16 can be set as appropriate. One end of the pad body 16 (the end in the X1 direction) widens in the X1 direction. The pad body 16 is not limited to a bellows shape and may be, for example, a nozzle shape having constant outer and inner diameters along its entire length.

[0013] As shown in Figures 1 to 3, the mounting portion 18 is provided at the other end (the end in the X2 direction) of the pad main body 16. The mounting portion 18 is formed in an annular shape. The mounting portion 18 has a protrusion 20 and a stopper portion 22. As shown in Figures 1 and 2, the protrusion 20 is an annular portion that protrudes from the pad main body 16 in the direction opposite to the internal space S (the X2 direction).

[0014] An outer mounting groove 24 that can be attached to the first support member 200 is formed on the outer peripheral surface of the protrusion 20. The outer mounting groove 24 is used when attaching the pad member 12 to the first support member 200 of a direct mounting type (see FIG. 4). The outer mounting groove 24 is not used when attaching the pad body 16 to the second support member 300 of an adapter mounting type (see FIGS. 8 and 9). The outer mounting groove 24 extends in an annular shape. A tapered surface 26 that narrows in diameter in the X2 direction is formed on the outer peripheral surface of the protrusion 20 in a portion of the X2 direction beyond the outer mounting groove 24.

[0015] As shown in FIG. 2 , an inner mounting groove 28 into which an adapter 80 can be attached is formed on the inner circumferential surface of the protruding portion 20. The inner mounting groove 28 is used when attaching the pad member 12 to an adapter-attached second support member 300 (see FIGS. 8 and 9 ). The inner mounting groove 28 is not used when attaching the pad member 12 to a direct-attached first support member 200 (see FIG. 5 ). The inner mounting groove 28 extends in an annular shape. The inner mounting groove 28 and the outer mounting groove 24 are located at the same height in the axial direction of the pad member 12. However, the inner mounting groove 28 and the outer mounting groove 24 may be positioned offset from each other in the axial direction of the pad member 12.

[0016] The stopper portion 22 is located in the internal space S of the pad main body 16. The stopper portion 22 restricts contraction of the pad main body 16 in the X direction. As shown in FIGS. 2 and 3 , the stopper portion 22 has an inward protrusion 30 and a pair of locking claws 32. The inward protrusion 30 is an annular portion that protrudes from the pad main body 16 in the X1 direction. The inner diameter of the inward protrusion 30 is larger than the inner diameter of the protrusion 20 (see FIG. 2 ).

[0017] The locking claw 32 can support a valve unit 50 (see FIG. 5 , etc.), which will be described later. The locking claw 32 can also support a filter 100 (see FIG. 11 ), which will be described later. The locking claw 32 includes a leg portion 34 and a claw body 36. The leg portion 34 protrudes in the X1 direction from the X1-direction end face of the inward protruding portion 30. The claw body 36 extends from the X1-direction end face of the leg portion 34 toward the axis Ax of the pad member 12. A groove portion 38 is formed between the end face of the inward protruding portion 30 and the claw body 36, into which the valve unit 50 (see FIG. 5 ) or the filter 100 (see FIG. 11 ) can be inserted.

[0018] As shown in FIG. 2 , the claw body 36 has a stopper surface 40 and an inclined surface 42. The stopper surface 40 is a flat surface facing the X1 direction. When the stopper surface 40 contacts the workpiece W, contraction of the pad body 16 in the X direction is restricted. The inclined surface 42 is inclined in the X2 direction from the stopper surface 40 toward the axis Ax of the pad body 16. A gap 44 is formed between adjacent locking claws 32 in the circumferential direction of the inward protrusion 30 (see FIGS. 2 and 3 ). The stopper portion 22 may have three or more locking claws 32.

[0019] As described above, such a pad member 12 can be attached to both the direct-attachment type first support member 200 and the adapter-attachment type second support member 300. Therefore, the attachment method of the pad member 12 can be flexibly changed depending on the workpiece W. Therefore, in this embodiment, a good pad member 12 can be obtained.

[0020] First Embodiment Next, a suction unit 11A including vacuum pads 10A according to a first embodiment will be described. As shown in Fig. 4, the suction unit 11A includes a plurality of vacuum pads 10A and a first support member 200. The suction unit 11A suctions the workpiece W by utilizing vacuum pressure from the plurality of vacuum pads 10A.

[0021] The vacuum pad 10A allows the pad member 12 to be directly attached to the first support member 200. The first support member 200 includes a body 204 having a negative pressure chamber 202, and a plate 206. Air inside the negative pressure chamber 202 is sucked out by a vacuum generator (not shown). The plate 206 is attached to the body 204 so as to cover the negative pressure chamber 202. The plate 206 has a plurality of holes 208 that communicate with the negative pressure chamber 202. The pad member 12 is fixed to the plate 206 by inserting the protrusions 20 of the pad member 12 into each hole 208.

[0022] As shown in Figures 4 to 6, the vacuum pad 10A includes a pad member 12 and a valve unit 50. The valve unit 50 is detachably attached to the inside of the mounting portion 18 of the pad member 12. As shown in Figures 5 and 6, the valve unit 50 adjusts the flow rate of a suction flow path 52 that sucks air from the internal space S of the pad body 16. The valve unit 50 includes a valve housing 54, a valve body 56, a spring 58, and a filter 60.

[0023] The valve housing 54 may be made of, for example, a resin material or a metal material. The resin material may be a soft resin material or a hard resin material. Examples of soft resin materials include synthetic rubber, natural rubber, and thermoplastic elastomer.

[0024] The valve housing 54 is cylindrical and has a suction flow path 52 therein. The valve housing 54 has a large diameter portion 62, an intermediate portion 64, and a small diameter portion 66. The large diameter portion 62 is disposed inside the inward protruding portion 30. The small diameter portion 66 is disposed inside the protruding portion 20. The intermediate portion 64 connects the large diameter portion 62 and the small diameter portion 66. The outer peripheral surface of the intermediate portion 64 is provided with an intermediate surface 68 that tapers in diameter from the large diameter portion 62 toward the small diameter portion 66. The large diameter portion 62 is provided with an annular valve flange portion 70. The valve housing 54 is fixed to the inside of the mounting portion 18 by inserting the valve flange portion 70 into the groove portion 38 of the mounting portion 18.

[0025] The valve element 56 is disposed in the suction flow passage 52 of the valve housing 54. The valve element 56 is displaceable in the axial direction relative to the valve housing 54. The valve housing 54 includes a tapered seat portion 72 against which the head of the valve element 56 can abut. The spring 58 is disposed between the valve element 56 and the valve housing 54. The spring 58 biases the valve element 56 in a direction away from the seat portion 72 (the X1 direction). The filter 60 is fixed to the end of the large diameter portion 62 in the X1 direction. The filter 60 restricts displacement of the valve element 56 in the X1 direction. The filter 60 prevents foreign matter from entering the suction flow passage 52 of the valve housing 54 from the internal space S of the pad body 16. The filter 60 is configured in a mesh shape. The filter 60 may be made of, for example, a metal material.

[0026] An orifice 74 is formed in the center of the head of the valve body 56. A plurality of openings 76 are formed in the side of the valve body 56. The area of ​​the openings 76 is sufficiently larger than the area of ​​the orifices 74. When the head of the valve body 56 is separated from the seat portion 72 of the valve housing 54, the internal space S of the pad body 16 communicates with the negative pressure chamber 202 via the orifice 74 of the valve body 56 and the plurality of openings 76. When the head of the valve body 56 is in contact with the seat portion 72 of the valve housing 54, the internal space S of the pad body 16 communicates with the negative pressure chamber 202 only via the orifice 74 of the valve body 56.

[0027] When air in the internal space S is sucked through the suction flow path 52 and the internal space S of the pad body 16 is not blocked by the workpiece W, the air flowing through the suction flow path 52 passes through the orifice 74 of the valve body 56 in the X2 direction at a first flow velocity. Therefore, the valve body 56 is displaced in the X2 direction due to the pressure difference between the front and rear of the orifice 74, and the head of the valve body 56 abuts against the seat portion 72 of the valve housing 54. When the head of the valve body 56 abuts against the seat portion 72, air no longer flows through the multiple openings 76 of the valve body 56, and the flow velocity of the air passing through the orifice 74 becomes even greater than the first flow velocity. This further increases the pressure difference between the front and rear of the orifice 74, thereby reliably maintaining the state in which the head of the valve body 56 abuts against the seat portion 72 of the valve housing 54. In this state, the flow rate of air flowing through the suction flow path 52 is a sufficiently small first flow rate. Therefore, the internal space S that is not blocked by the workpiece W can prevent the pressure in the negative pressure chamber 202 from increasing.

[0028] If the internal space S of the pad body 16 is blocked by the workpiece W while air in the internal space S is being sucked through the suction flow path 52, the air flowing through the suction flow path 52 passes through the orifice 74 of the valve body 56 in the X2 direction at a second flow velocity that is smaller than the first flow velocity. Therefore, the pressure difference across the orifice 74 is smaller than the pressure difference across the first flow velocity. In this case, the valve body 56 is displaced in the X1 direction by the biasing force of the spring 58, and the head of the valve body 56 moves away from the seat portion 72 of the valve housing 54. When the head of the valve body 56 moves away from the seat portion 72, air flows through the orifice 74 and the multiple openings 76, so the flow velocity of the air passing through the orifice 74 becomes even smaller than the second flow velocity. This further reduces the pressure difference across the orifice 74, thereby reliably maintaining the head of the valve body 56 spaced away from the seat portion 72 of the valve housing 54. In this state, the flow rate of the air flowing through the suction flow path 52 is the second flow rate, which is greater than the first flow rate, so that the pressure in the internal space S of the pad body 16 can be quickly reduced to a pressure equivalent to the pressure in the negative pressure chamber 202.

[0029] With such an adsorption unit 11A, even if the internal space S of some of the vacuum pads 10A is not blocked by the workpiece W and is open to the atmosphere when the workpiece W is adsorbed, the adsorption force of the vacuum pads 10A whose internal space S is blocked by the workpiece W can be prevented from decreasing.

[0030] The vacuum pad 10A configured as described above is attached to the first support member 200, for example, as follows: As shown in Fig. 7, the protrusion 20 of the attachment portion 18 of the pad member 12 is inserted into the hole 208 of the first support member 200. As a result, the edge surrounding the hole 208 is inserted into the outer mounting groove 24 of the protrusion 20, and the pad member 12 is fixed to the plate 206. In this embodiment, the tapered surface 26 of the protrusion 20 allows the protrusion 20 to be smoothly inserted into the hole 208.

[0031] Thereafter, the valve unit 50 is inserted into the mounting portion 18 through the internal space S of the pad body 16. As a result, the small diameter portion 66 of the valve housing 54 is inserted into the protruding portion 20, and the large diameter portion 62 is inserted into the inward protruding portion 30. The valve flange portion 70 also climbs over the inclined surface 42 of the locking claw 32 and is positioned in the groove portion 38. This fixes the valve unit 50 to the pad member 12, completing the attachment of the vacuum pad 10A to the first support member 200.

[0032] In this state, the small diameter portion 66 of the valve housing 54 restricts inward elastic deformation of the protrusion 20, and therefore functions as a retainer for preventing the pad member 12 from slipping out of the hole 208. Therefore, even when, for example, sucking and lifting a relatively heavy workpiece W, the pad member 12 can be prevented from falling off the plate 206. In this way, in this embodiment, the vacuum pad 10A can be easily attached to the first support member 200.

[0033] To remove the vacuum pad 10A from the first support member 200, the valve unit 50 is removed from the pad member 12. In this embodiment, a tool such as pliers can be inserted through the gaps 44 between adjacent locking claws 32 to clamp the valve flange portion 70, allowing the valve unit 50 to be easily removed from the mounting portion 18. This releases the function of the valve housing 54 to prevent the mounting portion 18 from coming off the first support member 200. The vacuum pad 10A is then removed from the first support member 200 by pulling out the pad member 12 in the X1 direction.

[0034] With this vacuum pad 10A, the flow rate of air flowing through the suction flow path 52 can be adjusted by the valve unit 50, so that it is possible to prevent more air than necessary from being sucked in when the internal space S of the pad body 16 is not blocked by the workpiece W. Therefore, a good vacuum pad 10A can be obtained.

[0035] Second Embodiment Next, a suction unit 11B including a vacuum pad 10B according to a second embodiment will be described. In this embodiment, the same components as those of the vacuum pad 10A described above will be assigned the same reference numerals, and detailed description thereof will be omitted.

[0036] 8, the suction unit 11B includes a plurality of vacuum pads 10B and a second support member 300. The suction unit 11B suctions the workpiece W by utilizing vacuum pressure with the plurality of vacuum pads 10B.

[0037] The vacuum pad 10B allows the pad member 12 to be attached to the second support member 300 via an adapter 80. The second support member 300 includes a support shaft 302, a pair of first arms 304, and three second arms 306. The tip of a robot arm (not shown) is attached to the support shaft 302. The pair of first arms 304 extend in opposite directions from the support shaft 302. The first arms 304 are formed in a plate shape. A first groove 308 extending along the longitudinal direction of the first arm 304 is formed in the first arm 304. The first groove 308 penetrates the first arm 304 in the thickness direction.

[0038] The second arm 306 extends in a direction intersecting (for example, perpendicular to) the extension direction of the first arm 304. The second arm 306 is formed in a plate shape. A second groove 310 extending along the longitudinal direction of the second arm 306 is formed in the second arm 306. The second groove 310 penetrates the second arm 306 in the thickness direction.

[0039] One second arm 306 is fixed to the support shaft portion 302. The two second arms 306 are respectively connected to the two first arms 304 by fastening members 312. The fastening members 312 are inserted through the first groove 308 and the second groove 310. Two vacuum pads 10B are attached to the second arms 306. The shape and the like of the second support member 300 can be set as appropriate.

[0040] 9, the vacuum pad 10B includes a pad member 12, a valve unit 50a, and an adapter 80. The valve unit 50a is detachably attached to the inside of the mounting portion 18 of the pad member 12. The valve unit 50a adjusts the flow rate of a suction flow path 52a that sucks air from the internal space S of the pad body 16. The valve unit 50a includes a valve housing 54a, a valve element 56, a spring 58, and a filter 60.

[0041] The valve housing 54a has a housing main body 82 and a valve flange portion 70. The housing main body 82 is formed in the same manner as the large diameter portion 62 of the valve housing 54 described above. The valve housing 54a does not have the intermediate portion 64 and small diameter portion 66 of the valve housing 54 described above. The outer peripheral surface of the housing main body 82 is formed with a tapered surface 84 whose diameter decreases in the X2 direction.

[0042] The adapter 80 is a member for attaching the pad member 12 to the second support member 300. The adapter 80 includes an adapter body 86 and a mounting nut 88. The adapter body 86 is cylindrical. A gap 87 is provided between the adapter body 86 and the valve housing 54a. An inner bore 89 of the adapter body 86 communicates with the inner bore 83 of the housing body 82 via the gap 87. The suction flow path 52a includes the inner bore 89 of the adapter body 86, the gap 87, and the inner bore 83 of the housing body 82. In other words, the valve housing 54a has at least a portion of the suction flow path 52a. One end (the end in the X1 direction) of the adapter body 86 is provided with an annular adapter flange portion 90 that can be attached to the inner mounting groove 28 of the pad member 12.

[0043] An annular protrusion 92 that bulges outward in the radial direction is provided in the axially intermediate portion of the adapter 80. A placement groove 96 in which an annular elastic member 94 is placed is formed on the surface of the protrusion 92 facing the X2 direction. The elastic member 94 is made of, for example, a rubber material. A male thread portion 98 into which the mounting nut 88 screws is formed on the outer circumferential surface of the adapter main body 86 in a portion in the X2 direction beyond the protrusion 92.

[0044] The vacuum pad 10B configured as described above is attached to the second support member 300 as follows. As shown in FIG. 9 , the valve unit 50a and the adapter body 86 are assembled to the pad member 12. Then, as shown in FIG. 8 , the adapter body 86 is inserted into the second groove 310 of the second arm 306, and the mounting nut 88 is tightened onto the male thread portion 98 of the adapter body 86. This clamps the second arm 306 between the mounting nut 88 and the protruding portion 92, thereby fixing the adapter 80 to the second arm 306. In this embodiment, the elastic member 94 is pressed against the protruding portion 92 by the second arm 306, thereby preventing the adapter 80 from shifting position relative to the second arm 306.

[0045] The vacuum pad 10B is not limited to the above-described configuration. Below, a description will be given of a modified example of the vacuum pad 10B that can be attached to the adapter-attached second support member 300. Note that in the modified example, the same components as those in the above-described vacuum pad 10B are given the same reference numerals, and detailed description thereof will be omitted.

[0046] (First Modification) As shown in FIG. 10 , a vacuum pad 10Ba according to a first modification differs from the vacuum pad 10B described above in that the valve unit 50a is integrally provided with the adapter 80. In this case, the adapter main body 86 also functions as the valve housing 54a. The adapter main body 86 and the valve housing 54a have a suction flow path 52b therein. This vacuum pad 10Ba can reduce the number of parts in the vacuum pad 10Ba compared to when the valve unit 50a and the adapter 80 are provided separately. Furthermore, the time required to assemble the vacuum pad 10Ba can be shortened.

[0047] (Second Modification) As shown in Figure 11, a vacuum pad 10Bb according to a second modification includes a pad member 12, an adapter 80, and a filter 100. The vacuum pad 10Bb does not include the valve unit 50a described above. The suction flow path 52c of the vacuum pad 10Bb includes the inner hole 31 of the inward protrusion 30 and the inner hole 89 of the adapter main body 86. The filter 100 is detachably attached to the groove 38 of the mounting portion 18 of the pad member 12. The outer diameter of the filter 100 is larger than the inner diameter of the inward protrusion 30. The filter 100 prevents foreign matter from entering the suction flow path 52c from the internal space S of the pad main body 16. The filter 100 is formed in a mesh shape.

[0048] The filter 100 is inserted into the mounting portion 18 from the internal space S side of the pad body 16. In this modification, a tool such as pliers can be inserted through the gaps 44 between adjacent locking claws 32 to clamp the outer edge of the filter 100, making it easy to remove the filter 100 from the mounting portion 18. This vacuum pad 10Bb does not have a valve unit 50a, allowing the vacuum pad 10Bb to have a simple configuration.

[0049] In addition to the above disclosure, the following additional notes are disclosed.

[0050] (Note 1) The vacuum pad (10A, 10B, 10Ba, 10Bb) is a vacuum pad that uses vacuum pressure to adsorb a workpiece (W), and includes a hollow pad body (16) having an adsorption surface (14) that contacts the workpiece, an annular mounting portion (18) that is provided on the pad body and is used to attach the pad to a support member (200, 300), and a valve unit (50, 50a) that is provided inside the mounting portion and adjusts the flow rate of air flowing through a suction flow path (52, 52a, 52b) that sucks air from an internal space (S) of the pad body.

[0051] With this configuration, the flow rate of air flowing through the suction flow path can be adjusted by the valve unit, so that the internal space of the pad body is not blocked by the workpiece, and more air than necessary can be prevented from being sucked in. Therefore, a good vacuum pad can be obtained.

[0052] (Appendix 2) In the vacuum pad described in Appendix 1, the valve unit may be formed so that, when air is sucked from the internal space through the suction flow path and the internal space is not blocked by the workpiece, the flow rate is smaller than the flow rate when the internal space is blocked by the workpiece.

[0053] This configuration can prevent the pressure on the upstream side of the suction flow path (negative pressure chamber) from increasing when the internal space is not blocked by workpieces, and can quickly reduce the pressure in the internal space of the pad body to the same pressure as the negative pressure chamber when the internal space is blocked by workpieces.

[0054] (Appendix 3) In the vacuum pad described in Appendix 1 or 2, the valve unit may have a valve housing (54, 54a) having at least a portion of the suction flow path therein, and a valve body (56) provided in the suction flow path.

[0055] With this configuration, the configuration of the valve unit can be simplified.

[0056] (Appendix 4) In the vacuum pad described in Appendix 3, the mounting portion may have an annular protrusion (20) protruding from the pad body on the side opposite the internal space, and an outer mounting groove (24) that can be attached to the support member may be formed on the outer peripheral surface of the protrusion.

[0057] According to this configuration, the vacuum pad can be attached to the direct mounting type support member (first support member).

[0058] (Appendix 5) In the vacuum pad described in Appendix 4, the protrusion may be elastically deformable, the valve unit may be mounted on the inside of the mounting portion with the outer mounting groove attached to the support member, and the valve housing may be positioned inside the protrusion with the valve unit mounted on the inside of the mounting portion to restrict the protrusion from elastically deforming inward.

[0059] With this configuration, it is possible to prevent the vacuum pad from unintentionally falling off the first support member.

[0060] (Appendix 6) In the vacuum pad described in any one of Appendices 1 to 5, the valve unit may be detachable from the mounting portion, and an inner mounting groove (28) may be formed on the inner surface of the mounting portion, into which an adapter (80) for attaching the mounting portion to the support member can be attached.

[0061] According to this configuration, the vacuum pad can be attached to the adapter-mounted type support member (second support member).

[0062] (Appendix 7) The vacuum pad described in any one of Appendices 1 to 4 may include an adapter for attaching the mounting portion to the support member, and an inner mounting groove into which the adapter can be attached may be formed on the inner surface of the mounting portion, and the adapter may have the valve unit.

[0063] With this configuration, the number of parts of the vacuum pad can be reduced compared to when the adapter and the valve unit are provided separately.

[0064] (Supplementary Note 8) In the vacuum pad according to any one of Supplementary Notes 1 to 7, the mounting portion may be provided with a locking claw (32) for supporting the valve unit.

[0065] With this configuration, the valve unit can be easily fixed to the mounting portion.

[0066] (Supplementary Note 9) In the vacuum pad according to any one of Supplementary Notes 1 to 8, the pad body may be formed in a bellows shape.

[0067] With this configuration, the pad body can be expanded and contracted in the axial direction and can be bent in the axial direction of the pad body, which makes it difficult for the suction surface to come off the workpiece even when an external force is applied to the workpiece.

[0068] (Supplementary Note 10) The vacuum pad according to any one of Supplementary Notes 1 to 9 may further comprise a filter (60) that prevents foreign matter from flowing from the internal space into the suction channel.

[0069] Foreign matter can be prevented from entering the upstream side of the suction flow path.

[0070] (Appendix 11) The pad member (12) is a pad member that adsorbs a workpiece (W) using vacuum pressure, and comprises a hollow pad body having an adsorption surface that contacts the workpiece, and an annular mounting portion provided on the pad body, the mounting portion having an annular protrusion that protrudes outward from the pad body, an outer peripheral surface of the protrusion having an outer mounting groove that can be attached to a first support member (200), and an inner peripheral surface of the mounting portion having an inner mounting groove that can be attached to an adapter for attaching the mounting portion to a second support member (300).

[0071] With this configuration, the pad member can be attached to both the direct-attachment type first support member and the adapter-attachment type second support member. This allows for flexible changes in the pad member attachment method depending on the workpiece. As a result, a good pad member can be obtained.

[0072] The present invention is not limited to the above disclosure, and various configurations can be adopted without departing from the gist of the present invention.

Claims

1. A vacuum pad (10A, 10B, 10Ba, 10Bb) that adsorbs a workpiece (W) using vacuum pressure, comprising: a hollow pad body (16) having an adsorption surface (14) that contacts the workpiece; an annular mounting portion (18) provided on the pad body for attaching it to a support member (200, 300); and a valve unit (50, 50a) provided inside the mounting portion and that adjusts the flow rate of air flowing through a suction flow path (52, 52a, 52b) that sucks in air from the internal space (S) of the pad body.

2. A vacuum pad as described in claim 1, wherein the valve unit is configured so that, when air is sucked from the internal space through the suction flow path, the flow rate when the internal space is not blocked by the workpiece is smaller than the flow rate when the internal space is blocked by the workpiece.

3. A vacuum pad as claimed in claim 1, wherein the valve unit comprises: a valve housing (54, 54a) having at least a portion of the suction flow passage therein; and a valve body (56) provided in the suction flow passage.

4. A vacuum pad as claimed in claim 3, wherein the mounting portion has an annular protrusion (20) protruding from the pad body on the side opposite the internal space, and an outer mounting groove (24) capable of being attached to the support member is formed on the outer circumferential surface of the protrusion.

5. A vacuum pad as described in claim 4, wherein the protrusion is elastically deformable, the valve unit is mountable inside the mounting portion with the outer mounting groove mounted on the support member, and the valve housing is positioned inside the protrusion with the valve unit mounted inside the mounting portion to restrict the inward elastic deformation of the protrusion.

6. A vacuum pad as claimed in claim 1, wherein the valve unit is detachable from the mounting portion, and an inner mounting groove (28) is formed on the inner circumferential surface of the mounting portion into which an adapter (80) for mounting the mounting portion to the support member can be attached.

7. A vacuum pad as claimed in claim 1, comprising an adapter for mounting the mounting portion to the support member, an inner mounting groove is formed on the inner circumferential surface of the mounting portion into which the adapter can be mounted, and the adapter has the valve unit.

8. A vacuum pad according to claim 1, wherein the mounting portion is provided with a locking claw (32) for supporting the valve unit.

9. A vacuum pad according to claim 1, wherein the pad body is formed in a bellows shape.

10. A vacuum pad according to any one of claims 1 to 9, further comprising a filter (60) for preventing foreign matter from entering the suction flow path from the internal space.

11. A pad member (12) that adsorbs a workpiece using vacuum pressure, comprising: a hollow pad body having an adsorption surface that contacts the workpiece; and an annular mounting portion provided on the pad body, wherein the mounting portion has an annular protrusion that protrudes outward from the pad body, an outer peripheral surface of the protrusion is formed with an outer mounting groove that can be attached to a first support member (200), and an inner peripheral surface of the mounting portion is formed with an inner mounting groove that can be fitted with an adapter for attaching the mounting portion to a second support member (300).

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