Spray plate, spray method and treatment device

Abstract

A spray plate, a spray method and a treatment device. The spray plate comprises a plate body having a gas outlet face, the plate body thereof being internally provided with at least two spray flow channel groups, and the at least two spray flow channel groups being successively arranged within a spray surface of the spray plate; each spray flow channel group comprises at least two process gas flow channels, the at least two process gas flow channels being offset with respect to each other in the thickness direction of the plate body; each process gas flow channel comprises a main gas channel, a plurality of spray gas channels and a plurality of gas outlet holes, the main gas channel being separately communicated with the plurality of spray gas channels, the plurality of gas outlet holes being arranged at intervals in the spray gas channels, and all of the plurality of gas outlet holes being arranged in the gas outlet face of the plate body. The present solution can partition the spray surface into multiple regions so as to effectively shorten the length of the flow channels and accordingly reduce the pressure drop, such that the amount of gas discharged from the gas outlet holes in the same flow path is reasonably controlled, thus effectively improving the gas outlet uniformity of the spray plate.

Description

Spray plate, spray method and treatment device

[0001] This application claims priority to the Chinese patent application with application number 202310981606.7 filed with the Patent Office of China on August 7, 2023, and with the invention name “A spray plate, spray method and treatment device”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of vacuum coating technology, and in particular to a spray plate, a spray method and a processing device. Background Art

[0003] In industrial production processes, it is often necessary to spray specific process gases into the reaction chamber of a processing device through a shower plate to achieve the corresponding reaction. For example, but not limited to, atomic layer deposition (ALD) technology is a thin film deposition technology based on surface chemical vapor reaction. It can deposit a substance on the surface of a substrate in the form of a single atomic film, and can accurately control the thickness and uniformity of the deposited film within the atomic layer thickness range. To ensure the uniformity of film formation, it is necessary to first introduce the process gas into the reaction chamber through a shower plate to initiate the coating reaction.

[0004] The existing uniform gas structure used for atomic layer deposition is a shower plate. In a specific implementation, an external gas source is introduced into the shower plate, and the process gas is evenly blown into the reaction chamber through the flow channels and outlet holes integrated in the plate. The gas source interface of this shower plate structure is located on both sides of the shower plate. The two process gases enter the plate through the longitudinal flow channels located on both sides, and then flow to the opposite side through multiple transverse flow channels connected to the corresponding longitudinal flow channels. They are ejected through the outlet holes on the transverse flow channels in sequence. When the process gas flows through the transverse flow channels, the gas pressure gradually decreases due to the flow resistance on the flow path. The flow rate of the gas ejected from each outlet hole on the transverse flow channel decreases, resulting in uneven gas concentration entering the reaction chamber.

[0005] In particular, as the equipment production capacity increases, the size of the reaction chamber and the spray plate increases accordingly. The concentration of the process gas at both ends of the length direction of the transverse flow channel differs greatly, which seriously affects the uniformity of the gas output, resulting in poor uniformity of thin film deposition and low product yield.

[0006] In view of this, it is urgent to optimize the design of the shower plate structure to overcome the above defects.

[0007] Summary of the Invention

[0008] The purpose of this application is to provide a spray plate, a spray method and a treatment device, which can effectively improve the uniformity of the gas output of the spray plate by optimizing the structure of the spray plate.

[0009] The spray plate described in the embodiment of the present application includes a plate body having an air outlet surface, at least two spray flow channel groups are arranged in the plate body, and the at least two spray flow channel groups are arranged sequentially within the spray width of the spray plate; wherein each spray flow channel group includes at least two process gas flow channels, and at least two process gas flow channels are staggered in the thickness direction of the plate body; wherein each process gas flow channel includes a main air channel, multiple spray air channels and a plurality of air outlet holes, the main air channel is respectively connected to the multiple spray air channels, and multiple air outlet holes are arranged at intervals on the spray air channel, and the multiple air outlet holes are all opened on the air outlet surface of the plate body.

[0010] Optionally, each spray flow channel group includes two process gas flow channels; the first process gas flow channel of the two process gas flow channels includes a first main gas channel, multiple first spray gas channels and multiple first air outlets; the first main gas channel is connected to the multiple first spray gas channels respectively, and each first spray gas channel is provided with multiple first air outlets arranged in sequence; the second process gas flow channel of the two process gas flow channels includes a second main gas channel, multiple second spray gas channels and multiple second air outlets; the second main gas channel is connected to the multiple second spray gas channels respectively, and each second spray gas channel is provided with multiple second air outlets arranged in sequence.

[0011] Optionally, within the spraying width, a plurality of first spraying air channels and a plurality of second spraying air channels are respectively extended along a first direction, and a first main air channel and a second main air channel are respectively extended along a second direction; the second direction is different from the first direction.

[0012] Optionally, in the second direction, the plurality of first spray air channels and the plurality of second spray air channels are arranged in an alternating manner.

[0013] Optionally, in the second direction, the plurality of first spray air channels and the plurality of second spray air channels are arranged alternately at equal intervals.

[0014] Optionally, the number of the first main air duct and the number of the second main air duct are respectively set to two, and the two first main air ducts are respectively located at the two end sides of the multiple first spray air ducts and are respectively connected to the first spray air ducts; the two second main air ducts are respectively located at the two end sides of the multiple second spray air ducts and are respectively connected to the second spray air ducts.

[0015] Optionally, the spray channel group includes two first air inlet interfaces, two first inlet air channels, two second air inlet interfaces and two first inlet air channels; in the second direction, the two first air inlet interfaces are respectively located on the two end sides of the two first main air channels; the first air inlet interface located on one end side is connected to one end of the two first main air channels through a first inlet air channel, and the first air inlet interface located on the other end side is connected to the other end of the two first main air channels through another first inlet air channel; in the second direction, the two second air inlet interfaces are respectively located on the two end sides of the two second main air channels; the second air inlet interface located on one end side is connected to one end of the two second main air channels through a second inlet air channel, and the second air inlet interface located on the other end side is connected to the other end of the two second main air channels through another second inlet air channel.

[0016] Optionally, there are multiple spray channel groups, which are arranged in sequence in a linear array within the spraying area.

[0017] Optionally, there are multiple spray channel groups, which are arranged sequentially in a matrix manner within the spraying area.

[0018] Optionally, the plate body of the spray plate is formed by splicing at least two sub-plates, and at least one spray flow channel group is provided in the plate body of the sub-plate.

[0019] The present application also provides a processing device, including a processing chamber and a spray plate, the spray plate is the aforementioned spray plate, the spray plate is arranged on the processing chamber, and the gas outlet surface of the spray plate faces the inner side of the processing chamber.

[0020] The present application also provides a spraying method based on the aforementioned processing device, comprising the following steps: introducing the process gas into the main air channel through the air inlet interface and the air inlet channel of each spray flow channel group; introducing the process gas into the spray air channel connected to the main air channel through the main air channel; the process gas entering the spray air channel is transported along the spray air channel and sprayed into the processing chamber through multiple outlet holes distributed along the extension direction of the spray air channel.

[0021] Compared to related technologies, this application optimizes the configuration of spray channel groups within the spray pattern. Specifically, at least two spray channel groups are provided within the spray pattern of the spray plate, dividing the spray pattern into multiple zones. This shortens the flow channel length, thereby reducing pressure drop. The gas volume ejected from each outlet on the same flow path can be rationally controlled, effectively improving the uniformity of the spray plate's gas output. This technical advantage is particularly significant for large-scale spray plates. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] FIG1 is a schematic structural diagram of a spray plate provided in an embodiment of the present application;

[0023] FIG2 is a view taken along the line A of FIG1 ;

[0024] FIG3 is a schematic structural diagram of another spray plate provided in an embodiment of the present application;

[0025] FIG4 is a schematic structural diagram of another spray plate provided in an embodiment of the present application;

[0026] FIG5 is a schematic structural diagram of a processing device provided in an embodiment of the present application;

[0027] FIG6 is a flow chart of a spraying method provided in an embodiment of the present application.

[0028] In the picture:

[0029] Spray plate 100, processing chamber 200, spray flow channel group 10, first main air channel 11, first spray air channel 12, first air outlet 13, first air inlet interface 14, first inlet air channel 15, second main air channel 21, second spray air channel 22, second air outlet 23, second air inlet interface 24, second inlet air channel 25. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Without loss of generality, this embodiment primarily describes the spraying of two process gases, detailing implementations for improving gas uniformity. It should be understood that the amount of spray gas and the type of gas source can be configured based on the reaction requirements of the actual application scenario and do not constitute a substantial limitation on the technical solutions claimed in this application.

[0032] Please refer to Figure 1, which is a structural schematic diagram of a spray plate provided in an embodiment of the present application.

[0033] As shown in the figure, two spray channel groups 10 are provided in the plate body of the spray plate 100, and the two spray channel groups 10 are arranged sequentially within the spray width of the spray plate 100. Here, "spray width" refers to the extended surface of the spray area covered by each air outlet of the spray plate 100.

[0034] In this embodiment, each spray channel group 10 includes a first main gas channel 11, multiple first spray gas channels 12, multiple first gas outlets 13, a second main gas channel 21, multiple second spray gas channels 22, and multiple second gas outlets 23. The first main gas channel 11, multiple first spray gas channels 12, and multiple first gas outlets 13 form a first process gas flow channel, while the second main gas channel 21, multiple second spray gas channels 22, and multiple second gas outlets 23 form a second process gas flow channel. The first gas outlets 13 and the second gas outlets 23 are provided on the gas outlet surface of the spray plate 100 to uniformly spray the two process gases.

[0035] In this way, each spray channel group 10 can realize the ejection of the first process gas through the first gas outlet 13 and the ejection of the second process gas through the second gas outlet 23. For example, for the atomic layer deposition process, the first process gas and the second process gas can be two process reaction precursors for forming a coating product.

[0036] In other specific implementations, the number of spray channel groups 10 can be determined based on the actual application scenario and the size of the spray plate, and is not limited to the two spray channel groups 10 shown in Figure 1. For example, but not limited to, the number of spray channel groups 10 can be three, or other numbers greater than three.

[0037] Overall, the multiple spray channel groups 10 divide the spray area of ​​the spray plate 100 into multiple zones, effectively shortening the channel length and reducing the pressure drop along the flow path. This allows for reasonable control of the gas volume from each outlet on the same flow path, effectively improving the uniformity of the spray plate's gas output. This technical advantage is particularly significant for large-scale spray plates.

[0038] In addition, based on the multiple spray channel groups 10, in actual applications, the airflow size can be independently controlled as needed to achieve regional control within the spray width, further improving the uniformity of the sprayed gas.

[0039] For the convenience of description, within the spraying width of the spray plate 100, the extension direction of the first spray air channel 12 and the second spray air channel 22 is defined as the first direction, and the extension direction of the first main air channel 11 and the second main air channel 21 is defined as the second direction; at the same time, the direction of the plate thickness of the spray plate 100 is defined as the third direction.

[0040] As shown in FIG1 , a first direction X and a second direction Y that are substantially perpendicular are used as an example. In other specific implementations, the first direction X and the second direction Y may also be two different directions intersecting at other angles to reasonably distribute the process gas from the main airway to the corresponding spray airway within the spray width, which is not limited in this embodiment of the present application.

[0041] Among them, multiple first spray air channels 12 and multiple second spray air channels 22 are extended along the first direction X. Within the spray width of the spray plate 100, the first spray air channels 12 and the second spray air channels 22 are arranged alternately in the second direction Y, that is, in the second direction Y, the first spray air channels 12 and the second spray air channels 22 are arranged in an adjacent manner in sequence to improve the mixing degree of the two process gases.

[0042] In a specific implementation, within the spraying width, the first spraying air channel 12 and the second spraying air channel 22 can be staggered and arranged at equal intervals in the second direction Y, which can further improve the mixing uniformity of the two process gases.

[0043] Among them, the first main air duct 11 and the second main air duct 21 are extended along the second direction Y, the first main air duct 11 is connected with the corresponding multiple first spray air ducts 12, and each first spray air duct 12 is provided with multiple first air outlet holes 13 arranged in sequence and spaced apart, for spraying out the first process gas; the second main air duct 21 is connected with the corresponding multiple second spray air ducts 22, and each second spray air duct 22 is provided with multiple second air outlet holes 23 arranged in sequence and spaced apart, for spraying out the second process gas.

[0044] To further shorten the flow channels, each spray channel group 10 is equipped with two first main air channels 11 and two second main air channels 21, each located at either end of the corresponding spray channel. Specifically, the two first main air channels 11 are located at either end of the multiple first spray channels 12 and are connected to each of these first spray channels 12; the two second main air channels 21 are located at either end of the multiple second spray channels 22 and are connected to each of these second spray channels 22. This shortens the flow path of the process gas within the spray channels, further reducing the impact of flow resistance on gas uniformity.

[0045] In a specific implementation, the multiple first air outlet holes 13 on the first spray air channel 12 and the multiple second air outlet holes 23 on the second spray air channel 22 can be arranged at equal intervals to improve the uniformity of air outlet within the air jet width.

[0046] It should be noted that the first spray air duct 12 and the second spray air duct 22 extending along the first direction X, and the first main air duct 11 and the second main air duct 21 extending along the second direction Y include an arrangement form based on a linear air duct extending in a linear manner as shown in the figure, and also include an arrangement form based on a non-linear air duct (for example, but not limited to an air duct with a regular waveform or an irregular waveform) forming an extension trend along the illustrated direction, which is not limited in the embodiments of the present application.

[0047] Please also refer to Figure 2, which is a view taken along the A axis of Figure 1. In the third direction, Z, the first process gas flow channel and the second process gas flow channel are staggered, and the two flow channels do not intersect with each other. This prevents the mixing and reaction of different process gases within the flow channels, which could generate dust and cause blockage. In other words, in the thickness direction of the spray plate 100, each spray flow channel group 10 comprises two first main gas channels 11, multiple first spray gas channels 12, and multiple first air outlets 13 to form the first process gas flow channel, which is then layered with two second main gas channels 21, multiple second spray gas channels 22, and multiple second air outlets 23 to form the second process gas flow channel. This creates a flow channel avoidance mechanism, resulting in a simple and reasonable structure.

[0048] Furthermore, each spray channel group 10 is provided with a first air inlet port 14 and a second air inlet port 24 at both ends of the spray plate 100 in the second direction Y, further shortening the channel length. This arrangement, on the one hand, provides process gas that meets flow requirements within the corresponding spray width, and on the other hand, rationally controls the flow resistance of the process gas along the corresponding main flow channel, providing technical support for further improving gas outlet uniformity.

[0049] Among them, the first air inlet interface 14 is used to connect the first process gas. At the two end sides of the spray plate 100 in the second direction Y, the first air inlet interface 14 located at one end side is connected to one end of the two first main air channels 11 through the first inlet air channel 15, and the first air inlet interface 14 located at the other end side is connected to the other end of the two first main air channels 11 through the first inlet air channel 15, and the first process gas is introduced from both ends of the two first main air channels 11 respectively.

[0050] Among them, the second air inlet interface 24 is used to connect the second process gas. At the two end sides of the spray plate 100 in the second direction Y, the second air inlet interface 24 located at one end side is connected to one end of the two second main air channels 21 through the second inlet air channel 25, and the second air inlet interface 24 located at the other end side is connected to the other end of the two second main air channels 21 through the second inlet air channel 25, and the second process gas is introduced from both ends of the two second main air channels 21 respectively.

[0051] Generally speaking, each process gas enters the spray plate 100 through the upper and lower air inlet ports (first air inlet port 14 and second air inlet port 24), is split to the sides through the corresponding inlet channels (first inlet channel 15 and second inlet channel 25), then flows through the two side main channels (first main channel 11 and second main channel 21) before flowing toward the center through the respective spray channels (first spray channel 12 and second spray channel 22). Here, the flow resistance of the spray channels is equivalent to 1 / 4 of that of a traditional spray plate structure. This arrangement shortens the flow paths of the two process gases and distributes them relatively symmetrically, effectively reducing flow resistance and improving gas uniformity.

[0052] In other specific implementations, each spray channel group 10 may be configured with only one first air inlet interface 14 and one second air inlet interface 24 (not shown in the figure). Of course, this configuration is more suitable for relatively small-sized spray plates.

[0053] Furthermore, to ensure the operating flow rate of each spray gas channel arranged along the first direction, the flow cross-sections of the inlet gas channel and the main gas channel for each process gas flow channel are larger than the flow cross-sections of the corresponding spray gas channel. In other words, the flow cross-sections of the first inlet gas channel 15 and the first main gas channel 11 are larger than the flow cross-sections of the first spray gas channel 12; and the flow cross-sections of the second inlet gas channel 25 and the second main gas channel 21 are larger than the flow cross-sections of the second spray gas channel 22.

[0054] In addition to the application scenario of two process gases, based on the spray plate described in the above embodiment, a spray plate that can be applied to three or more process gases can also be provided. In a specific implementation, taking three process gases as an example, a third process gas flow channel (not shown in the figure) is added to the spray channel group. Similarly, the third process gas flow channel is constructed by an air inlet interface, an inlet air channel, a main air channel, a spray air channel, and corresponding air outlet holes; in the third direction Z, the first process gas flow channel, the second process gas flow channel, and the third process gas flow channel are staggered, and the three flow channels are not connected to each other.

[0055] It can be understood that the specific structure of the third process gas flow channel and its relative position relationship with the first process gas flow channel and the second process gas flow channel in the plate layout are the same as the configuration of the first process gas flow channel and the second process gas flow channel, and will not be repeated here.

[0056] In addition, for a spray plate including three or more spray channel groups 10, the spray channel groups 10 can be sequentially arranged in a linear array manner within the spray width, or can be sequentially arranged in a matrix manner within the spray width.

[0057] Please refer to Figure 3, which is a schematic diagram of the structure of another shower plate provided in an embodiment of the present application. In order to clearly illustrate the differences and connections between this embodiment and the embodiment described in Figure 1, components or structures with the same functions are indicated with the same symbols in the figure.

[0058] As shown in Figure 3 , the spray plate 100 includes three spray channel groups 10 within its body, and these three spray channel groups 10 are sequentially arranged in a linear array within the spraying area of ​​the spray plate 100. The specific structure of the spray channel groups 10 and their relative positional relationships within the spray plate 100 described in this embodiment are consistent with the implementation described in Figure 1 , and will not be further elaborated here.

[0059] Please refer to Figure 4, which is a schematic diagram of the structure of another shower plate provided in an embodiment of the present application. In order to clearly illustrate the difference and connection between this embodiment and the embodiment described in Figure 1, components or structures with the same functions are indicated with the same symbols in the figure.

[0060] As shown in Figure 4 , the spray plate 100 includes four spray channel groups 10 within its body. These groups are arranged sequentially in a matrix within the spraying area of ​​the spray plate 100; that is, two spray channel groups 10 are sequentially arranged in each row and column. Of course, for other numbers of spray channel groups 10, the specific number of rows and columns can be determined based on the overall product design.

[0061] In a specific implementation, the first air inlet port 14 and the second air inlet port 24 of each spray channel group 10 can be provided on the other side of the spray plate 100 opposite to the air outlet surface. The processing technology is relatively simple and it is convenient to connect to the external air source pipeline.

[0062] The other specific structures of the spray channel groups 10 of the spray plate 100 described in this embodiment and the relative positional relationships of the layout within the plate are consistent with the implementation described in FIG1 , and will not be described in detail here.

[0063] Furthermore, the spray plates described in the aforementioned embodiments all utilize a single plate body with multiple spray channel groups arranged sequentially, effectively shortening the channel length. In other implementations, the spray plate body is formed by splicing together multiple sub-plates, each of which can contain one or more spray channel groups (not shown).

[0064] Specifically, the manner in which the sub-panels are spliced ​​together to form the spray panel can be determined according to actual product requirements, such as, but not limited to, sequential splicing in a linear manner or sequential splicing in a matrix manner.

[0065] Based on the spliced ​​sub-panels, the spray channel groups on them are sequentially arranged within the spray pattern of the spray plate. Compared to the previous method of arranging multiple spray channel groups within a single plate, the method of splicing multiple sub-panels to form a spray plate can effectively control processing processability and processing costs, and facilitate maintenance. In addition, when the spray plate body is formed by splicing multiple sub-panels, the structural dimensions of each sub-panel can be identical, improving interchangeability and further reducing manufacturing and maintenance costs.

[0066] In addition to the aforementioned spray plate, the embodiment of the present application also provides a processing device. Please refer to Figure 5, which is a structural schematic diagram of a processing device provided in the embodiment of the present application.

[0067] The processing apparatus includes a shower plate 100 and a processing chamber 200. The shower plate 100 is disposed on the processing chamber 200 and may be the shower plate described in Figures 1 to 4 . The outlet surface of the shower plate 100 faces the interior of the processing chamber 200. Process gas is introduced into the shower plate 100 and ejected into the processing chamber 200 through the first outlet holes 13 and the second outlet holes 23 on the outlet surface.

[0068] It should be understood that the processing chamber and other functional components of the processing device can be implemented based on existing process technologies, so they will not be described in detail herein.

[0069] The present application also provides a spraying method, which can use the spray plate described in any of the above embodiments. It should be noted that the spraying method of this embodiment has all the technical effects of the above spray plates and can solve the corresponding technical problems, which will not be repeated here.

[0070] Please refer to Figure 6, which is a flow chart of a spraying method according to an embodiment of the present application.

[0071] The spraying method comprises the following steps:

[0072] Step S61, introducing the process gas into the main air channel through the air inlet interface and air inlet channel of each spray channel group;

[0073] Step S62: The process gas is introduced into the spray gas channel connected to the main gas channel through the main gas channel;

[0074] In step S63 , the process gas entering the spray gas channel is transported along the spray gas channel and is ejected into the processing chamber through a plurality of gas outlets distributed along the extending direction of the spray gas channel.

[0075] The ordinal numbers "first" and "second" used herein are only used to describe components or structures with the same function in the technical solution. It is understood that the use of the ordinal numbers "first" and "second" does not constitute an understanding of the technical solution claimed in this application.

[0076] The above is only a preferred embodiment of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A spray plate, characterized in that: It comprises a plate body with an air outlet surface, wherein at least two spray channel groups are arranged in the plate body, and the at least two spray channel groups are arranged in sequence within the spray width of the spray plate; Wherein, each of the spray flow channel groups includes at least two process gas flow channels, and the at least two process gas flow channels are staggered in the thickness direction of the plate body; Among them, each of the process gas flow channels includes a main gas channel, multiple spray gas channels and a number of gas outlets, the main gas channel is connected to the multiple spray gas channels respectively, and the spray gas channels are provided with multiple gas outlets at intervals, and the multiple gas outlets are all opened on the gas outlet surface of the plate body.

2. The shower plate according to claim 1, characterized in that: Each of the spray flow channel groups includes two process gas flow channels; The first process gas flow channel of the two process gas flow channels comprises a first main gas channel, a plurality of first spray gas channels and a plurality of first gas outlets; the first main gas channel is communicated with the plurality of first spray gas channels respectively, and each of the first spray gas channels is provided with a plurality of first gas outlets arranged in sequence and at intervals; The second process gas flow channel of the two process gas flow channels includes a second main gas channel, a plurality of second spray gas channels and a plurality of second gas outlets; the second main gas channel is connected to the plurality of second spray gas channels respectively, and each of the second spray gas channels is provided with a plurality of second gas outlets arranged in sequence and at intervals.

3. The shower plate according to claim 2, characterized in that: In the spraying width, the plurality of first spraying air channels and the plurality of second spraying air channels are respectively extended in a first direction, and the first main air channel and the second main air channel are respectively extended in a second direction; The second direction is different from the first direction.

4. The shower plate according to claim 3, characterized in that: In the second direction, the plurality of first spray air channels and the plurality of second spray air channels are arranged alternately.

5. The shower plate according to claim 4, characterized in that: In the second direction, the plurality of first spray air channels and the plurality of second spray air channels are arranged alternately at equal intervals.

6. The shower plate according to any one of claims 3 to 5, characterized in that: The number of the first main air duct and the number of the second main air duct are respectively set to two, the two first main air ducts are respectively located at the two end sides of the multiple first spray air ducts, and are respectively connected to the first spray air ducts; the two second main air ducts are respectively located at the two end sides of the multiple second spray air ducts, and are respectively connected to the second spray air ducts.

7. The shower plate according to claim 6, characterized in that: The spray flow channel group includes two first air inlet interfaces, two first inlet air channels, two second air inlet interfaces and two first inlet air channels; In the second direction, the two first air inlet interfaces are respectively located at the two end sides of the two first main air channels; the first air inlet interface located at one end side is respectively connected to one end of the two first main air channels through a first inlet air channel, and the first air inlet interface located at the other end side is respectively connected to the other end of the two first main air channels through another first inlet air channel; In the second direction, the two second air inlet interfaces are respectively located on the two end sides of the two second main air channels; the second air inlet interface located on one end side is connected to one end of the two second main air channels through a second inlet air channel, and the second air inlet interface located on the other end side is connected to the other end of the two second main air channels through another second inlet air channel.

8. The shower plate according to claim 1, characterized in that: There are multiple spray channel groups, which are arranged in sequence in the spray width in a linear array.

9. The shower plate according to claim 1, characterized in that: There are multiple spray channel groups, which are arranged in sequence in a matrix manner within the spray width.

10. The shower plate according to claim 1, characterized in that: The plate body of the spray plate is formed by splicing at least two sub-plates, and at least one spray channel group is arranged in the plate body of the sub-plate.

11. A processing device, characterized in that: It comprises a processing chamber and a shower plate, wherein the shower plate is the shower plate according to any one of claims 1 to 10, the shower plate is arranged on the processing chamber, and the gas outlet surface of the shower plate faces the inner side of the processing chamber.

12. A spraying method based on the treatment device according to claim 11, characterized in that: The steps include: The process gas is introduced into the main gas channel through the gas inlet interface and the gas inlet channel of each spray channel group; The process gas is introduced into the spray gas channel connected to the main gas channel through the main gas channel; The process gas entering the spray gas channel is transported along the spray gas channel and is sprayed into the processing chamber through a plurality of gas outlets distributed along the extending direction of the spray gas channel.

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