Testing connector

Abstract

Provided is a testing connector arranged between a testing device and a device to be tested. The testing connector comprises: a lower support sheet; an upper support sheet; conductive portions which are supported in the vertical direction by at least one of the lower support sheet and the upper support sheet; an insulation sheet arranged between the lower support sheet and the upper support sheet; lower elastic pillars supporting the insulation sheet on the lower support sheet; and upper elastic pillars supporting the upper support sheet on the insulation sheet. The insulation sheet has buckling prevention portions which prevent buckling of the conductive portions due to a contact with the outer circumferential surface of the conductive portions in the horizontal direction. The lower elastic pillars and the upper elastic pillars are spaced apart from the buckling prevention portions so as to allow the conductive portions to expand.

Description

Inspection connector

[0001] The present disclosure relates to a test connector disposed between a test device and a test device and used for testing the test device.

[0002] To test devices under test (DUTs), such as semiconductor devices, connectors are used between the test apparatus and the DUT. These connectors electrically connect the DUTs to the test apparatus. As an example of such connectors, a conductive rubber sheet capable of elastically deforming in response to pressure applied by the DUT is known in the art.

[0003] A conductive rubber sheet has a plurality of conductive portions and an insulating portion that insulates the plurality of conductive portions from each other. A plurality of metal particles are electrically assembled in a vertical direction to form each conductive portion. Each conductive portion transmits a signal between a test device and a device under test. The insulating portion is made of an elastic insulating material and holds the conductive portions in a vertical direction. The insulating portion has a thickness corresponding to the height of the conductive portion and can be formed integrally with the conductive portion. A pressing force is applied to the conductive portion via the device under test, and the conductive portion elastically deforms in response to the pressing force.

[0004] In order for the conductive part to exhibit a certain level of conductivity (low resistance), the applied pressure through the device under test must be above a certain level. However, the conductive part is constrained by the insulating part and cannot be elastically deformed or elastically restored beyond the desired level. Therefore, a strong pressure must be applied to the conductive part through the device under test. A strong pressure can damage the device under test, and repeated testing under a strong pressure can cause damage to the conductive part and shorten the service life of the conductive rubber sheet. Therefore, the conductive part is required to be elastically deformed smoothly under a low pressure and to have high operability and durability under a low pressure.

[0005] To improve the operability and durability of the conductive part, it may be considered to form a gap along the periphery of the conductive part to separate the conductive part and the insulating part along the periphery of the conductive part. However, if the gap formed along the periphery of the conductive part is narrow, the conductive part receiving a pressing force from the device under test cannot expand smoothly and has poor operability. In addition, the pressing force cannot be distributed through the conductive rubber sheet. If the gap formed along the periphery of the conductive part is wide, the conductive part is more likely to buckle in a direction orthogonal to the direction in which the pressing force is applied rather than expand in response to the pressing force. If the conductive rubber sheet is repeatedly used for testing the device under test, the buckling of the conductive part causes damage to the conductive part and reduces the durability of the conductive part.

[0006] One embodiment of the present disclosure provides a test connector having sufficient space for a conductive portion to expand horizontally under the pressure of a test device. One embodiment of the present disclosure provides a connector that allows the conductive portion to expand without buckling under the pressure of a test device. One embodiment of the present disclosure provides a test connector in which conductive portions having high operability are modularized and members that prevent buckling of the conductive portion and enable expansion of the conductive portion are modularized.

[0007] Embodiments of the present disclosure relate to a test connector disposed between a test device and a test device and used for testing the test device.

[0008] According to one embodiment of the present disclosure, a test connector includes a lower support sheet, an upper support sheet, a conductive portion, an insulating sheet, and lower and upper elastic columns. The lower support sheet is disposed above a test device. The upper support sheet is disposed below a device under test. The conductive portion is supported vertically by at least one of the lower support sheet and the upper support sheet. The insulating sheet is disposed between the lower support sheet and the upper support sheet. The insulating sheet has an anti-buckling portion configured to prevent buckling of the conductive portion by horizontal contact with an outer surface of the conductive portion, into which the conductive portion is inserted vertically. The lower elastic column is spaced apart from the anti-buckling portion to allow expansion of the conductive portion and supports the insulating sheet on the lower support sheet. The upper elastic column is spaced apart from the anti-buckling portion to allow expansion of the conductive portion and supports the upper support sheet on the insulating sheet.

[0009] In one embodiment, a lower expansion space allowing expansion of the conductive portion is formed below the buckling prevention portion between the upper surface of the lower support sheet and the lower surface of the insulating sheet, and an upper expansion space allowing expansion of the conductive portion is formed above the buckling prevention portion between the upper surface of the insulating sheet and the lower surface of the upper support sheet.

[0010] In one embodiment, the lower elastic column protrudes downwardly from the insulating sheet and is bonded to the upper surface of the lower support sheet, and the upper elastic column is positioned to correspond to the lower elastic column, protrudes upwardly from the insulating sheet, and is bonded to the lower surface of the upper support sheet.

[0011] In one embodiment, the upper support sheet and the conductive member are formed integrally to form a conductive module that can be assembled with the lower support sheet and the insulating sheet.

[0012] According to another embodiment of the present disclosure, a test connector includes a lower support sheet, a conductive portion, an insulating sheet, and lower and upper elastic columns. The lower support sheet is disposed on top of a test device. The conductive portion is supported vertically by the lower support sheet. The insulating sheet is disposed on top of the lower support sheet. The insulating sheet has an anti-buckling portion configured to prevent buckling of the conductive portion by horizontal contact with an outer surface of the conductive portion, into which the conductive portion is inserted vertically. The lower elastic column is spaced apart from the anti-buckling portion to allow expansion of the conductive portion and supports the insulating sheet on the lower support sheet. The upper elastic column is spaced apart from the anti-buckling portion to allow expansion of the conductive portion and protrudes upward from the insulating sheet.

[0013] In one embodiment, a lower expansion space allowing expansion of the conductive portion is formed below the buckling prevention portion between the upper surface of the lower support sheet and the lower surface of the insulating sheet, and an upper expansion space allowing expansion of the conductive portion is formed above the buckling prevention portion between the upper surface of the insulating sheet and the upper end of the conductive portion.

[0014] In one embodiment, the lower elastic column protrudes downwardly from the insulating sheet and is bonded to the upper surface of the lower support sheet, and the upper elastic column is positioned to correspond to the lower elastic column and protrudes upwardly from the insulating sheet.

[0015] In one embodiment, the lower support sheet and the conductive member are formed integrally to form a conductive module that can be assembled with the insulating sheet.

[0016] In an embodiment of the inspection connector of the present disclosure, the insulating sheet has a through hole through which the conductive portion is inserted in a vertical direction, and the buckling prevention portion is formed as at least a portion of the circumference of the through hole. In one embodiment, the through hole is formed to surround the outer circumference of the conductive portion with a gap. In one embodiment, the through hole has a radius smaller than the distance between the central axis of the conductive portion and the central axis of the lower elastic column and the distance between the central axis of the conductive portion and the central axis of the upper elastic column.

[0017] In an embodiment of the inspection connector of the present disclosure, in response to a pressing force of the inspection device, the conductive portion is configured to expand horizontally in the lower expansion space and the upper expansion space, and the buckling prevention portion is configured to suppress buckling of the conductive portion.

[0018] In an embodiment of the inspection connector of the present disclosure, the insulating sheet, the lower elastic pillar, and the upper elastic pillar are formed integrally to form an insulating support module disposed on the upper surface of the lower support sheet.

[0019] In one embodiment, the insulating sheet comprises a first insulating sheet having a portion of the anti-buckling portion formed thereon, and a second insulating sheet attached to one of the lower and upper surfaces of the first insulating sheet and having a hardness lower than the hardness of the first insulating sheet and having the remaining portion of the anti-buckling portion formed thereon. One of the lower elastic column and the upper elastic column is formed integrally with the second insulating sheet.

[0020] In one embodiment, the insulating sheet comprises a first insulating sheet having a portion of the buckling prevention portion formed thereon, a second insulating sheet attached to a lower surface of the first insulating sheet and having a hardness lower than a hardness of the first insulating sheet and having another portion of the buckling prevention portion formed thereon, and a third insulating sheet attached to an upper surface of the first insulating sheet and having a hardness lower than a hardness of the first insulating sheet and having the remaining portion of the buckling prevention portion formed thereon. The lower elastic column is formed integrally with the second insulating sheet, and the upper elastic column is formed integrally with the third insulating sheet.

[0021] In an embodiment of the inspection connector of the present disclosure, the lower elastic column and the upper elastic column have any one of a cylindrical shape, a truncated cone shape, and a polygonal truncated pyramid shape.

[0022] In an embodiment of the inspection connector of the present disclosure, at least one end of the lower elastic column and the upper elastic column is attached to an insulating sheet and has a flange protruding as an anti-buckling member.

[0023] According to one embodiment of the present disclosure, lower and upper elastic columns disposed on an insulating sheet form a sufficient expansion space along the periphery of the outer surface of the conductive portion, allowing the conductive portion to expand in response to a pressing force. Therefore, the inspection connector according to one embodiment can smoothly expand the conductive portion in response to a pressing force of the device under inspection, can disperse the pressing force of the device under inspection, and can realize inspection of the device under inspection using a low pressing force.

[0024] According to one embodiment of the present disclosure, the buckling prevention portion of the insulating sheet supports the outer surface of the conductive portion in a horizontal direction to prevent buckling of the conductive portion. Therefore, the inspection connector according to one embodiment can prevent buckling of the conductive portion while realizing expansion of the conductive portion due to a pressing force, thereby providing improved operability and durability of the conductive portion.

[0025] According to one embodiment of the present disclosure, the insulating sheet can be formed to have a thin thickness while having sufficient supporting force to prevent buckling of the conductive portion. Therefore, the inspection connector according to one embodiment can have sufficient expansion space for the conductive portion within the connector, thereby simultaneously providing supporting force to the conductive portion and distributing the pressing force.

[0026] According to one embodiment of the present disclosure, the conductive portion and the support sheet are formed as conductive modules, and the insulating sheet, which prevents buckling of the conductive portion, and the elastic column, which allows expansion of the conductive portion, are formed as insulating elastic modules. Therefore, the inspection connector according to one embodiment can be easily manufactured by assembling the conductive module and the insulating elastic module.

[0027] FIG. 1 schematically illustrates an example in which a connector according to one embodiment of the present disclosure is used.

[0028] FIG. 2 is a cross-sectional view illustrating a portion of a connector according to one embodiment of the present disclosure.

[0029] Figure 3 is a cross-sectional perspective view showing a part of the connector shown in Figure 2.

[0030] Figure 4 is a cross-sectional view taken along line 4-4 of Figure 3.

[0031] Figure 5 is a cross-sectional view taken along line 5-5 of Figure 3.

[0032] Fig. 6 is an exploded cross-sectional view showing a part of the connector shown in Fig. 2.

[0033] Fig. 7 is an exploded cross-sectional perspective view showing a part of the connector shown in Fig. 2.

[0034] Fig. 8 is a cross-sectional view schematically showing the operating state of a part of the connector shown in Fig. 2.

[0035] Figure 9 is an exploded cross-sectional perspective view showing a portion of a connector having a truncated cone-shaped elastic column.

[0036] Figure 10 is an exploded cross-sectional perspective view showing a portion of a connector having an elastic column in the shape of a polygonal pyramid.

[0037] Fig. 11 is a cross-sectional view schematically showing the operating state of a part of a connector having an elastic pillar as shown in Fig. 9.

[0038] Figure 12 is a cross-sectional view showing a portion of a connector having an elastic column with a flange.

[0039] Fig. 13 is an exploded cross-sectional perspective view showing a part of the connector shown in Fig. 12.

[0040] Figure 14 is an exploded cross-sectional perspective view showing a portion of a connector having a flange and an elastic column having a truncated cone shape.

[0041] Figure 15 is a cross-sectional view showing a portion of a connector including an insulating sheet composed of two layers.

[0042] Fig. 16 is an exploded cross-sectional perspective view showing a part of the connector shown in Fig. 15.

[0043] Figure 17 is a cross-sectional view showing a portion of a connector including an insulating sheet composed of three layers.

[0044] Fig. 18 is an exploded cross-sectional perspective view showing a part of the connector shown in Fig. 17.

[0045] FIG. 19 is a cross-sectional view illustrating a portion of a connector according to another embodiment of the present disclosure.

[0046] Fig. 20 is an exploded cross-sectional perspective view showing a part of the connector shown in Fig. 19.

[0047] Fig. 21 is an exploded cross-sectional view showing a portion of the connector shown in Fig. 19.

[0048] Fig. 22 is an exploded cross-sectional perspective view showing a portion of the connector shown in Fig. 19, wherein the elastic column having a cylindrical shape has a flange.

[0049] Figure 23 is an exploded cross-sectional perspective view showing a portion of the connector shown in Figure 19, wherein the elastic column having a truncated cone shape has a flange.

[0050] Figure 24 is an exploded cross-sectional perspective view showing a portion of the connector shown in Figure 19, including an insulating sheet made of two layers.

[0051] Figure 25 is an exploded cross-sectional perspective view showing a portion of the connector shown in Figure 19, including an insulating sheet composed of three layers.

[0052] The embodiments of this disclosure are provided for the purpose of illustrating the technical concepts of this disclosure. The scope of rights under this disclosure is not limited to the embodiments presented below or the specific descriptions of these embodiments.

[0053] All technical and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by those of ordinary skill in the art to which this disclosure pertains. All terms used in this disclosure have been selected for the purpose of more clearly explaining this disclosure and are not intended to limit the scope of rights under this disclosure.

[0054] Expressions such as “including,” “comprising,” and “having” used in this disclosure should be understood as open-ended terms that imply the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included.

[0055] The singular forms described in this disclosure may include plural meanings unless otherwise stated, and the same applies to the singular forms described in the claims.

[0056] The expressions 'first', 'second', etc. used in this disclosure are used to distinguish between multiple components, and do not limit the order or importance of the components.

[0057] In this disclosure, when it is said that a component is 'connected' or 'coupled' to another component, it should be understood that said component can be directly connected or coupled to said other component, or can be connected or coupled via a new other component.

[0058] The directional term "upward" used in this disclosure refers to the direction in which the connector is positioned relative to the inspection device, and the directional term "downward" refers to the direction opposite to upward. It should be understood that the directional term "upward / downward" used in this disclosure includes both upward and downward directions, but does not refer to a specific direction among the upward and downward directions.

[0059] Embodiments are described with reference to examples illustrated in the accompanying drawings. In the accompanying drawings, identical or corresponding components are assigned the same reference numerals. Furthermore, in the description of the embodiments below, redundant descriptions of identical or corresponding components may be omitted. However, omission of a description of a component does not imply that such component is not included in any embodiment.

[0060] The embodiments described below and examples illustrated in the attached drawings relate to a test connector (hereinafter simply referred to as a connector) used for testing a device under test. The connector of the embodiments may be placed between a test apparatus and the device under test during the test of the device under test, and may be used for testing the device under test. For example, the connector of the embodiments may be used for the final test of a semiconductor device in a post-process during the manufacturing process of the semiconductor device. However, examples of tests to which the connector of the embodiments is applied are not limited to the tests described above.

[0061] Figure 1 illustrates an example of a connector used according to one embodiment. Figure 1 schematically illustrates the shapes of a connector, a component to which the connector is attached, a test apparatus, and a device to be tested. The shapes illustrated in Figure 1 are one example selected for understanding the embodiment.

[0062] Referring to Fig. 1, a connector (10) is a sheet-shaped structure and is placed between a test device (20) and a device to be tested (30). For example, the connector (10) may form a test socket. The connector (10) is attached to a socket housing (40) and may be positioned on the test device (20) by the socket housing (40). The socket housing (40) may have a socket guide (41), and a receiving hole (42) may be formed in the socket guide (41) in a vertical direction (VD). The socket housing (40) may be removably mounted on the test device (20) in the socket guide (41), and the connector (10) may be removably coupled to the socket guide (41). A test device (30) transported to a test apparatus (20) manually or by a transport device is received in a receiving hole (42) of a socket housing, and the socket housing (40) aligns the test device (30) with respect to a connector (10). When testing the test device (30), the connector (10) contacts the test apparatus (20) and the test apparatus (30) in a vertical direction (VD), electrically connecting the test apparatus (20) and the test apparatus (30) to each other.

[0063] The device to be inspected (30) may be a semiconductor device manufactured by packaging a semiconductor IC chip and a plurality of terminals in a hexahedral shape using a resin material. The device to be inspected (30) may include a flat substrate (31) and a plurality of terminals (32) protruding from the lower surface of the substrate (31). The terminal (32) illustrated in Fig. 1 is of a ball type. The terminal (32) is not limited to the ball type and may be, for example, a land type or a pin type.

[0064] The inspection device (20) can inspect various operating characteristics of the device under test (30). The inspection device (20) can have a board on which inspection is performed, and the board can be equipped with an inspection circuit (21) for inspecting the device under test. In addition, the inspection circuit (21) has a plurality of pads (22) that are electrically connected to terminals of the device under test through a connector (10). The pads (22) can transmit electrical test signals to the device under test and receive response signals from the device under test.

[0065] The connector (10) includes a conductive portion (110) that transmits a signal between the inspection device (20) and the device to be inspected (30). When the connector (10) is placed on the inspection device (20), the conductive portion (110) is positioned in the vertical direction (VD). The conductive portion (110) can be in contact with the terminal (32) of the device to be inspected (30) at its upper end, and can be in contact with the pad (22) of the inspection device (20) at its lower end. The conductive portion (110) is configured to be conductive in the vertical direction (VD) and may have elasticity. When inspecting the device to be inspected, the conductive portion (110) electrically connects the terminal (32) of the device to be inspected and the pad (22) of the inspection device corresponding thereto in the vertical direction (VD) to transmit a signal between the inspection device (20) and the device to be inspected (30). Accordingly, inspection of the test device (30) is performed by the inspection device (20).

[0066] The connector (10) includes a lower support sheet (120) and an upper support sheet (130) that hold the conductive portion (110) so that the conductive portion (110) is positioned in the vertical direction (VD). When the connector (10) is placed on the inspection device (20), the lower support sheet (120) and the upper support sheet (130) are positioned in the horizontal direction (HD). For example, the lower support sheet (120) may be coupled to a socket guide (41) of a socket housing (40) to be positioned in the horizontal direction (HD). The horizontal direction (HD) is a direction orthogonal to the vertical direction (VD), and for example, when the horizontal direction (HD) is assumed to be the Y-axis, the horizontal direction (HD) may be a direction positioned in the X-axis plane.

[0067] When inspecting a device to be inspected, a pressure force (PF) is applied to the device to be inspected (30) by a mechanical device or manually. As the terminal (32) of the device to be inspected receiving the pressure force (PF) presses the conductive portion (110) downward, the conductive portion (110) can be elastically deformed to be compressed downward and expanded in the horizontal direction. When the pressure force (PF) is removed from the conductive portion (110), the conductive portion (110) can be restored to its original shape.

[0068] The connector (10) may include a plurality of conductive portions (110). The planar arrangement of the conductive portions (110) may vary depending on the arrangement of the terminals of the device to be tested (30). For example, the conductive portions (110) may be arranged in a single matrix or in the form of one or more pairs of matrixes. Alternatively, the conductive portions (110) may be arranged in a zigzag pattern.

[0069] A connector according to an embodiment of the present disclosure allows a conductive portion (110) compressed by a pressing force from a device to be tested to be smoothly elastically deformed, and prevents the conductive portion (110) from being buckled by the pressing force. Here, buckling of the conductive portion may mean that the conductive portion (110) is convexly bent in the horizontal direction (HD). In order to realize smooth elastic deformation of the conductive portion and prevent buckling of the conductive portion, the connector according to the embodiment includes an insulating sheet (140) having an anti-buckling portion (141) and a plurality of elastic pillars (151, 152) arranged around the conductive portion (110). The insulating sheet (140) is arranged in the horizontal direction (HD) between a lower support sheet (120) and an upper support sheet (130) by the elastic pillars (151, 152). An insulating sheet (140) having an anti-buckling portion (141) comes into contact with the outer surface (111) of a conductive portion (110) that is subjected to a pressurizing force, thereby preventing buckling of the conductive portion. Elastic columns (151, 152) position the insulating sheet (140) inside the connector, specifically, between the lower support sheet (120) and the upper support sheet (130). Each elastic column (151, 152) is spaced apart from the outer surface (111) of the conductive portion, thereby allowing expansion of the conductive portion (110) that is subjected to a pressurizing force. Accordingly, an expansion space (161, 162) that does not restrict expansion of the conductive portion (110) up and down based on the insulating sheet (140) is formed. The expansion space (161, 162) can be filled with air.

[0070] When a pressing force (PF) is applied to the conductive portion (110), buckling of the conductive portion (110) is prevented by the buckling prevention portion (141), and the conductive portion (110) can smoothly expand in the horizontal direction (HD) into the expansion space (161, 162). Therefore, the conductive portion (110) can be elastically deformed in response to the pressing force (PF) without buckling, and thus the conductive portion can have improved operability and durability. In addition, since the conductive portion (110) can sufficiently expand in the horizontal direction (HD) into the expansion space, the pressing force (PF) can be effectively distributed.

[0071] For the description of embodiments of the connector, reference is made to FIGS. 2 to 25. FIGS. 2 to 25 schematically illustrate the shapes and numbers of components of the connector. The shapes and numbers of components illustrated in FIGS. 2 to 25 are examples selected for understanding embodiments of the connector.

[0072] FIG. 2 is a cross-sectional view illustrating a portion of a connector according to one embodiment of the present disclosure, and FIG. 3 is a cross-sectional perspective view illustrating a portion of the connector illustrated in FIG. 2. FIG. 4 is a cross-sectional view taken along line 4-4 of FIG. 3, and FIG. 5 is a cross-sectional view taken along line 5-5 of FIG. 3. FIG. 6 is an exploded cross-sectional view illustrating a portion of the connector illustrated in FIG. 2, and FIG. 7 is an exploded cross-sectional perspective view illustrating a portion of the connector illustrated in FIG. 2. See FIGS. 2 to 7.

[0073] The connector (10) includes a lower support sheet (120), an upper support sheet (130), a conductive portion (110) supported in a vertical direction (VD) by one or both of the lower support sheet (120) and the upper support sheet (130), and an insulating sheet (140) into which the conductive portion (110) is inserted in a vertical direction (VD) and which is placed between the lower support sheet (120) and the upper support sheet (130).

[0074] The conductive portion (110) is configured to be conductive in the vertical direction (VD) and transmits signals between the inspection device and the device to be inspected. The conductive portion (110) may be formed in a cylindrical shape, but the shape of the conductive portion (110) is not limited to a cylindrical shape. The conductive portion (110) contacts a terminal of the device to be inspected corresponding to the conductive portion at its upper end and contacts a pad of the inspection device corresponding to the conductive portion at its lower end. A test signal of the inspection device and a response signal of the device to be inspected are transmitted through the conductive portion (110). The conductive portion (110) includes a plurality of conductive particles (112) and an elastic material (113), and thus has elasticity.

[0075] A plurality of conductive particles (112) are assembled in a cylindrical shape so as to be conductive in the vertical direction (VD), and adjacent conductive particles (112) can be conductively contacted in any direction. The plurality of conductive particles (112) assembled in the vertical direction function as conductors that transmit signals between the pads of the inspection device and the terminals of the device to be inspected. The conductive particles (112) may be formed of a highly conductive metal material. Alternatively, the conductive particles (112) may have a form in which the highly conductive metal material is coated on a core formed of an elastic resin material or metal material. Alternatively, the conductive particles (112) may be made of a conductive material such as a carbon nanotube.

[0076] The elastic material (113) is in a hardened state and has elasticity. The elastic material (113) maintains the conductive particles (112) in the vertical direction (VD) so that the conductive particles (112) are gathered in a cylindrical shape. The space between the conductive particles (112) can be filled with the elastic material (113). The conductive particles (112) and the elastic material (113) are integrally formed to form a conductive portion (110). The elastic material (113) can have insulating properties. For example, the elastic material (113) can be hardened silicone rubber, but is not limited thereto.

[0077] A conductive portion (110) including an elastic material (113) is elastically deformable in the vertical direction (VD) and the horizontal direction (HD). The pressing force of the test device (see FIG. 1) presses the conductive portion (110) downward. In this pressed state of the conductive portion, the conductive portion (110) can be elastically deformed so as to be compressed downward while slightly expanding in the horizontal direction (HD). When the pressing force is removed, the conductive portion (110) can be restored to its original shape (unpressured state) from the pressed state. The conductive portion (110) can be elastically deformed in the unpressured state and the pressed state.

[0078] The conductive portion (110) is positioned and supported in the vertical direction (VD) by the lower support sheet (120) or the upper support sheet (130). The conductive portion (110) can be coupled to either or both of the lower and upper support sheets (130). The lower and upper support sheets (120, 130) maintain and support the conductive portion (110) in the vertical direction (VD) and insulate the conductive portion (110). The lower and upper support sheets (120, 130) space the conductive portions (110) apart in the horizontal direction (HD), so that adjacent conductive portions do not short-circuit with each other.

[0079] The lower support sheet (120) is a member located at the lowest side of the connector and is placed above the inspection device when inspecting the device to be inspected (see FIG. 1). The upper support sheet (130) is a member located at the highest side of the connector and is spaced upward from the lower support sheet (120). The upper support sheet (130) is placed below the device to be inspected when inspecting the device to be inspected (see FIG. 1). For example, the conductive portion (110) may be coupled to the lower and upper support sheets (120, 130) and supported by them in the vertical direction (VD). Alternatively, the conductive portion (110) may be coupled to one of the lower and upper support sheets (120, 130) and supported in the vertical direction (VD), and may be inserted or fitted into the other of the lower and upper support sheets (120, 130).

[0080] The lower support sheet (120) may have a thin sheet shape. The lower support sheet (120) may be made of an insulating material such as silicone rubber, FR4 (e.g., a synthetic material composed of glass fiber and epoxy resin). Alternatively, the lower support sheet (120) may be a polyimide film. Alternatively, the lower support sheet (120) may be made of a synthetic material of silicone rubber and polyimide film. Alternatively, the lower support sheet (120) may be a porous sheet. Alternatively, the lower support sheet (120) may be made of a metal material such as stainless steel.

[0081] The lower support sheet (120) has a connecting hole (121) extending in the vertical direction (VD). The connecting hole (121) may have an inner diameter that is the same as or slightly larger than the diameter of the conductive portion (110). In one embodiment, the conductive portion (110) is arranged to pass through the connecting hole (121) of the lower support sheet (120), so that the lower end of the conductive portion (110) protrudes downward from the lower support sheet (120). When the lower support sheet (120) is made of the above-described metal material, an insulating treatment may be performed on the inner surface of the connecting hole (121) to insulate the conductive portion (110) from the lower support sheet (120), or an insulating ring into which the conductive portion is inserted or fitted may be arranged in the connecting hole (121).

[0082] The upper support sheet (130) has a thin sheet shape with insulating properties. The upper support sheet (130) may be made of an insulating material such as silicone rubber. Alternatively, the upper support sheet (130) may be a polyimide film. The upper support sheet (130) has a joining hole (131) that is joined to the outer peripheral surface (111) of the conductive portion (110), and the conductive portion (110) may be joined to the joining hole (131) of the upper support sheet (130).

[0083] In one embodiment, the upper support sheet (130) and the conductive portion (110) are formed integrally. Accordingly, as illustrated in FIGS. 6 and 7, the upper support sheet (130) and the conductive portion (110) can constitute one module for transmitting signals, i.e., one conductive module (170). The conductive module (170) composed of the conductive portion and the upper support sheet is independent from the lower support sheet (120) and the insulating sheet (140). The conductive module (170) is manufactured separately from the lower support sheet (120) and the insulating sheet (140). The conductive module (170) can be assembled with the lower support sheet (120) and the insulating sheet (140) in such a manner that the conductive portion (110) penetrates the insulating sheet (140) from top to bottom and is inserted into the through hole (121) of the lower support sheet (120). Accordingly, the connector can be manufactured in such a way that a challenge module (170) for performing signal transmission and other sheet members are assembled.

[0084] The conductive module (170) can be manufactured using a mold and a liquid molding material. The liquid molding material includes a liquid material of an elastic material (113) forming a conductive portion, and a plurality of conductive particles (112) dispersed within the liquid material. The mold can have a first molding cavity corresponding to an upper support sheet (130), and a plurality of second molding cavities formed at each position of the conductive portion (110) and communicating with the first molding cavity. An upper support sheet (130) having a joining hole (131) formed therein is placed within the first molding cavity, and the liquid molding material is injected into the second molding cavity. Alternatively, the liquid molding material is injected into the first molding cavity and the second molding cavity. A magnetic field is applied vertically to the liquid molding material injected into the second molding cavity. Accordingly, as the plurality of conductive particles are gathered vertically by the magnetic field, adjacent conductive particles can come into contact in any direction. Thereafter, through a predetermined curing process, the elastic material of the liquid molding material is cured. Accordingly, a conductive module (170) can be formed that is integral with the upper support sheet (130) and has a plurality of conductive portions (110) protruding downward from the upper support sheet (130).

[0085] An insulating sheet (140) is disposed horizontally (HD) between the lower and upper support sheets (120, 130). The insulating sheet (140) is spaced upward from the lower support sheet (120) and downward from the upper support sheet (130). The connector according to the embodiments includes lower and upper elastic posts (151, 152) that position the insulating sheet (140) between the lower and upper support sheets (120, 130) and support the insulating sheet (140). The insulating sheet (140) is positioned above the lower support sheet (120) by the lower elastic post (151). The lower and upper elastic posts (151, 152) are elastically deformable in response to a pressing force of a device under test.

[0086] The insulating sheet (140) has a thin sheet shape. The insulating sheet (140) may be made of an insulating material such as silicone rubber or urethane. Alternatively, the insulating sheet (140) may be a polyimide film. The insulating sheet (140) may be formed as a single layer made of an insulating material. Alternatively, the insulating sheet (140) may be formed as a laminate in which two or more layers made of an insulating material are laminated. The insulating sheet (140) illustrated in FIGS. 2 to 7 is formed as a single layer and may be made of, for example, a sheet of silicone rubber or a polyimide film.

[0087] The insulating sheet (140) is configured so that the conductive portion (110) is inserted in the vertical direction (VD). In addition, the insulating sheet (140) is configured to prevent the conductive portion (110) from buckling due to the pressing force of the device to be tested. The insulating sheet (140) has an anti-buckling portion (141) that prevents the conductive portion from buckling, for example, prevents the conductive portion from bending in the horizontal direction (HD) due to the pressing force of the device to be tested. The conductive portion (110) is inserted into the anti-buckling portion (141) in the vertical direction (VD). The anti-buckling portion (141) is formed so as to surround at least a part or all of the outer circumferential surface (111) of the conductive portion (110) in the circumferential direction of the central axis (CA1) of the conductive portion. Therefore, when a force that causes the conductive part to buckle in the horizontal direction is applied to the conductive part by the pressing force of the test device, the buckling prevention part (141) can prevent the conductive part from buckling by contact with the outer surface (111) of the conductive part in the horizontal direction (HD).

[0088] In one embodiment, the insulating sheet (140) has a through hole (142) formed vertically (VD), and the through hole (142) can form an anti-buckling portion (141). The through hole (142) is formed to correspond to a conductive portion (110) in the insulating sheet (140), and the conductive portion (110) is inserted into the through hole (142) vertically (VD). The anti-buckling portion (141) is formed as a part of the insulating sheet (140) that defines the through hole (142). Therefore, the anti-buckling portion (141) can be formed as at least a part or the entirety of a peripheral portion of the through hole (142) of the insulating sheet.

[0089] The diameter of the through hole (142) may be slightly larger than the diameter of the conductive portion (110). Therefore, the through hole (142) surrounds the outer circumferential surface (111) of the conductive portion with a gap. The gap may have a constant width or a varying width. Therefore, in the non-pressurized state of the conductive portion, the buckling prevention portion (141) may be positioned with the gap between the outer circumferential surface (111) of the conductive portion. In addition, in the pressurized state of the conductive portion, the gap between the buckling prevention portion (141) and the outer circumferential surface (111) of the conductive portion may be eliminated.

[0090] The buckling prevention portion (141) protrudes horizontally (HD) from the lower and upper elastic columns (151, 152) toward the conductive portion (110), based on the lower and upper elastic columns (151, 152). The protrusion range of the buckling prevention portion (141) can be determined by adjusting the size of the diameter of the through hole (142). The diameter of the through hole (142) is smaller than the distance between the neighboring elastic columns (151, 152) in the horizontal direction (HD). Specifically, the through hole (142) has a radius (R) smaller than the distance (D1) between the central axis (CA1) of the conductive portion and the central axis (CA2) of the lower elastic column, or a radius (R) smaller than the distance (D2) between the central axis (CA1) of the conductive portion and the central axis (CA3) of the upper elastic column. The protruding range of the buckling prevention portion (141) is determined so that the through hole (142) does not come into contact with the outer surface (111) of the conductive portion when the through hole (142) surrounds the outer surface (111) of the conductive portion with a gap therebetween. The diameter of the through hole (142) forming the buckling prevention portion may vary depending on the material of the insulating sheet having the buckling prevention portion, the required operability of the conductive portion, or the degree to which the buckling prevention portion suppresses expansion of the conductive portion.

[0091] In some embodiments, the diameter of the through hole (142) may correspond to the diameter of the conductive portion (110). Accordingly, in the non-pressurized state of the conductive portion, the anti-buckling portion (141) may partially contact the outer surface (111) of the conductive portion.

[0092] The lower and upper elastic columns (151, 152) are spaced apart from the conductive portion (110) and the anti-buckling portion (141) in the horizontal direction (HD) to allow expansion of the conductive portion in the horizontal direction (HD). The lower and upper elastic columns (151, 152) maintain the insulating sheet (140) having the anti-buckling portion (141) at a predetermined height from the lower support sheet (120). The lower and upper elastic columns (151, 152) have elasticity and insulation. For example, the lower and upper elastic columns (151, 152) may be made of an elastic insulating material such as silicone rubber or urethane.

[0093] The lower elastic column (151) is disposed between the lower support sheet (120) and the insulating sheet (140), and is spaced apart in the horizontal direction (HD) from the buckling prevention portion (141). The lower elastic column (151) supports the insulating sheet (140) on the lower support sheet (120) and spaced the insulating sheet (140) upward from the lower support sheet (120). The lower elastic column (151), which is spaced apart from the buckling prevention portion (141), allows expansion of the conductive portion (110) in the horizontal direction in the space between the lower support sheet (120) and the insulating sheet (140). In addition, as a pressure is applied to the device under test, the lower elastic column (151) is elastically deformable in the horizontal direction (HD) in the lower expansion space (161).

[0094] A lower expansion space (161) is formed between the lower support sheet (120) and the insulating sheet (140), and a portion of the conductive portion (110) positioned below the insulating sheet (140) can be expanded into the lower expansion space (161). Specifically, the lower expansion space (161) is formed below the buckling prevention portion (141) between the upper surface (122) of the lower support sheet and the lower surface (143) of the insulating sheet. Referring to FIGS. 3 and 4, the lower expansion space (161) may be a space excluding the lower elastic pillar (151) and the conductive portion (110) between the upper surface (122) of the lower support sheet and the lower surface (143) of the insulating sheet. Additionally, the lower expansion space (161) may be a space surrounding the outer surface (111) of the conductive part between the outer surface (111) of the conductive part and the outer surface (153) of the lower elastic column (151).

[0095] The upper elastic column (152) can be positioned to correspond to the lower elastic column (151) with respect to the insulating sheet (140). In some embodiments, the upper elastic column (152) may not correspond to the position of the lower elastic column (151). The upper elastic column (152) is disposed between the insulating sheet (140) and the upper support sheet (130) and is spaced apart from the buckling prevention portion (141) in the horizontal direction (HD). The upper elastic column (152) supports the upper support sheet (130) on the insulating sheet (140). The upper elastic column (152) spaced apart from the buckling prevention portion (141) allows expansion of the conductive portion (110) in the horizontal direction in the space between the insulating sheet (140) and the upper support sheet (130). Additionally, as a pressure force is applied to the test device, the upper elastic column (152) is elastically deformable in the horizontal direction (HD) in the upper expansion space (162).

[0096] An upper expansion space (162) is formed between the insulating sheet (140) and the upper support sheet (130), and a portion of the conductive portion (110) positioned above the insulating sheet (140) can be expanded into the upper expansion space (162). Specifically, the upper expansion space (162) is formed above the buckling prevention portion (141) between the upper surface (144) of the insulating sheet and the lower surface (132) of the upper support sheet. Referring to FIGS. 3 and 5, the upper expansion space (162) may be a space excluding the upper elastic pillar (152) and the conductive portion (110) between the upper surface (144) of the insulating sheet and the lower surface (132) of the upper support sheet. Additionally, the upper expansion space (162) may be a space surrounding the outer surface (111) of the conductive part between the outer surface (111) of the conductive part and the outer surface (153) of the upper elastic column (152).

[0097] The lower elastic column (151) may be coupled to the lower support sheet or the insulating sheet and may be positioned between the lower support sheet and the insulating sheet. The upper elastic column (152) may be coupled to the insulating sheet or the upper support sheet and may be positioned between the insulating sheet and the upper support sheet. In one embodiment, the lower elastic column (151) and the upper elastic column (152) may be formed integrally with the insulating sheet (140). Accordingly, the lower elastic column (151) protrudes downwardly from the insulating sheet (140), and the upper elastic column (152) protrudes upwardly from the insulating sheet (140). In addition, the lower elastic column (151) may be coupled to the upper surface (122) of the lower support sheet by an adhesive, and the upper elastic column (152) may be coupled to the lower surface (132) of the upper support sheet by an adhesive.

[0098] In embodiments of the connector, one or more lower and upper elastic columns (151, 152) may be arranged around one anti-buckling member (141) surrounding the outer periphery (111) of the conductive portion. Alternatively, at least one lower and upper elastic column (151, 152) may be arranged between adjacent conductive portions (110).

[0099] As described above, the insulating sheet (140), the lower elastic column (151), and the upper elastic column (152) may be formed integrally. The insulating sheet and the lower and upper elastic columns formed integrally may constitute one module, i.e., one insulating support module (180), which is arranged within the connector to prevent buckling of the conductive portion and allow horizontal expansion of the conductive portion. The insulating support module (180), which is formed of the insulating sheet and the lower and upper elastic columns, is independent of the lower support sheet (120) and the upper support sheet (130), and is arranged on the upper surface (122) of the lower support sheet. The insulating support module (180) is manufactured separately from the lower support sheet and the upper support sheet, or the conductive module, and can be assembled with the lower support sheet (120) and the upper support sheet (130) in such a manner that the conductive portion (110) of the conductive module is inserted from above into the through hole (142) of the insulating sheet (140) from below. Accordingly, the connector can be easily manufactured in such a manner that the conductive module (170) for performing signal transmission and the insulating support module (180) for preventing buckling are assembled.

[0100] The insulating support module (180) can be manufactured using a mold and a liquid molding material. For example, if the insulating sheet and the lower and upper elastic columns are made of silicone rubber, the insulating support module (180) can be molded using a single mold. Alternatively, the insulating support module (180) can be molded by bonding the lower and upper elastic columns to the insulating sheet (140).

[0101] Fig. 8 is a cross-sectional view schematically illustrating the operating state of a portion of the connector illustrated in Fig. 2. The left side of Fig. 8 illustrates the aforementioned non-pressurized state of the conductive portion, and the right side of Fig. 8 illustrates the aforementioned pressed state of the conductive portion. Referring to Figs. 2, 3, and 8, deformation of the conductive portion under a pressurized force will be described.

[0102] Based on the insulating sheet (140), a lower expansion space (161) is formed below the insulating sheet, and an upper expansion space (162) is formed above the insulating sheet. The lower elastic column (151) is arranged in the lower expansion space (161), and the upper elastic column (152) is arranged in the upper expansion space (162). Each expansion space surrounds the outer circumference (111) of the conductive portion. Therefore, expansion of the conductive portion (110) in the horizontal direction is not inhibited in each expansion space. The insulating sheet (140) having the buckling prevention portion (141) is arranged between the lower support sheet (120) and the upper support sheet (130) and supported by the lower elastic column (151). The buckling prevention portion (141) of the insulating sheet (140) is positioned closer to the outer circumference (111) of the conductive portion than each elastic column. In addition, the anti-buckling portion (141) may partially contact the outer surface (111) of the conductive portion in a non-pressurized state of the conductive portion, or may be spaced apart from the outer surface of the conductive portion with a gap. When the conductive portion (110) expands in the horizontal direction (HD), the anti-buckling portion (141) contacts the outer surface (111) of the conductive portion in the horizontal direction (HD).

[0103] As shown on the right side of Fig. 8, when the device to be tested is inspected, a pressing force (PF) is applied to the device to be tested, and the terminal (32) of the device to be tested presses the upper end (114) of the conductive portion (110) downward by the pressing force (PF). As the conductive portion is pressed by the pressing force (PF), the conductive portion is elastically deformed in response to the pressing force (PF). For example, the conductive portion (110) can be elastically deformed in a shape in which the height dimension in the vertical direction (VD) becomes smaller and expands in the horizontal direction (HD). In addition, as the pressing force (PF) is applied to the device to be tested, each elastic column can be elastically deformed to expand in the horizontal direction (HD).

[0104] When the conductive part (110) expands in the horizontal direction (HD) by the pressing force (PF), the lower expansion space (161) and the upper expansion space (162) do not impede the expansion of the conductive part. Therefore, each expansion space (161, 162) provides sufficient space for the conductive part (110) to expand in the horizontal direction (HD), and the conductive part (110) is configured to expand in the horizontal direction (HD) in the lower expansion space (161) and the upper expansion space (162). The outer surface (111) of the conductive part, which expands horizontally by the pressing force (PF), comes into contact with the buckling prevention part (141). Accordingly, when the pressing force (PF) is applied to the device under test, the buckling prevention part (141) comes into contact with the outer surface (111) of the conductive part, thereby suppressing and preventing buckling of the conductive part. An insulating sheet having an anti-buckling portion (141) formed thereon is disposed between the lower and upper support sheets (120, 130), and the anti-buckling portion (141) can contact the outer surface (111) near the middle of the conductive portion, so that movement of the conductive portion in the horizontal direction is suppressed by the anti-buckling portion (141), and buckling of the conductive portion is prevented by the anti-buckling portion (141). In this way, the anti-buckling portion (141) is configured to suppress movement of the conductive portion (110) that elastically deforms in response to a pressing force (PF) in the horizontal direction.

[0105] In the pressurized state of the conductive portion as shown in Fig. 8, the conductive portion (110) can be smoothly expanded into each expansion space (161, 162). Therefore, a sufficient space is secured within the connector for the conductive portion to expand horizontally. Accordingly, the pressing force applied to the connector can be distributed, and the conductive portion can be smoothly expanded in response to the pressing force. Such a connector can reduce the pressing force applied to the device under test, and the connector enables inspection of the device under test under a low pressing force. In addition, since the horizontal movement of the conductive portion is suppressed by the buckling prevention portion (141) of the insulating sheet, the conductive portion is prevented from being buckled by the pressing force (PF). Therefore, the connector can have improved operability and durability of the conductive portion.

[0106] The elastic columns respectively positioned below and above the insulating sheet form an expansion space of the conductive portion and elastically deform to disperse the pressing force applied to the connector. Each elastic column positions the insulating sheet inside the connector at an appropriate height and can elastically deform due to the pressing force. As shown in FIGS. 3 and 7, the lower and upper elastic columns (151, 152) may have a cylindrical shape, but the shape of the elastic columns is not limited thereto. FIG. 9 is an exploded cross-sectional perspective view illustrating another example of the shape of the elastic column, and FIG. 10 is an exploded cross-sectional perspective view of a portion of the connector illustrating another example of the shape of the elastic column.

[0107] Referring to Fig. 9, the lower and upper elastic columns (151, 152) may have a truncated cone shape. Referring to Fig. 10, the lower and upper elastic columns (151, 152) may have a polygonal truncated pyramid shape. Fig. 10 illustrates, as an example of a polygonal truncated pyramid, lower and upper elastic columns (151, 152) having a square truncated pyramid shape. The polygonal truncated pyramid may be, for example, a triangular truncated pyramid, a square truncated pyramid, a pentagonal truncated pyramid, a hexagonal truncated pyramid, or a polygonal truncated pyramid having a higher number of polygonal truncated pyramids. In this way, each elastic column having a truncated cone shape or a polygonal truncated pyramid shape is formed so that its cross-sectional area decreases from the end in contact with the insulating sheet (140) toward the end located on the opposite side of such end.

[0108] The lower and upper elastic columns (151, 152) may have shapes that are symmetrical vertically with respect to the insulating sheet (140). For example, the upper elastic column (152) may have a truncated cone shape or a polygonal pyramidal shape, and the lower elastic column (151) may have an inverted truncated cone shape or an inverted polygonal pyramidal shape. As another example, the upper elastic column (152) may have an inverted truncated cone shape or an inverted polygonal pyramidal shape, and the lower elastic column (151) may have a truncated cone shape or a polygonal pyramidal shape.

[0109] Fig. 11 is a cross-sectional view schematically illustrating the operating state of a part of a connector having an elastic pillar as illustrated in Fig. 9, and illustrates a pressurized state of a conductive portion. Referring to Fig. 11, the lower and upper elastic pillars (151, 152) having a truncated cone shape or a polygonal truncated pyramid shape can increase the expansion space around the conductive portion (110) (i.e., the lower expansion space (161) and the upper expansion space (162)), and the operability and pressure distribution of the conductive portion (110) can be further increased.

[0110] Fig. 12 is a cross-sectional view showing a portion of a connector having an elastic column with a flange. Fig. 13 is an exploded cross-sectional perspective view showing a portion of the connector shown in Fig. 12. Fig. 14 is an exploded cross-sectional perspective view showing a portion of a connector having an elastic column with a frustoconical shape with a flange.

[0111] Referring to FIGS. 12 to 14, the lower elastic column (151) and the upper elastic column (152) have flanges (155) at the ends (154) that are coupled to the insulating sheet (140). The flanges (155) are attached to the insulating sheet (140) and protrude from the outer surface (153) of the elastic columns to the buckling prevention portion (141). The flanges (155) may be formed integrally with the elastic columns. The lower and upper elastic columns (151, 152) may have the flanges (155), or only one of the lower and upper elastic columns (151, 152) may have the flanges (155). For example, the flanges (155) may have a square shape, but the shape of the flanges is not limited thereto.

[0112] The flange (155) protrudes from the elastic column toward the buckling prevention portion (141) and is positioned close to the buckling prevention portion (141), so as to reinforce the portion of the insulating sheet (140) where the buckling prevention portion (141) is formed. Therefore, when the outer peripheral surface (111) of the conductive portion comes into contact with the buckling prevention portion (141) and buckling of the conductive portion (110) is suppressed, the supporting force of the insulating sheet (140) supporting the outer peripheral surface (111) of the conductive portion can be increased. In addition, for example, when the insulating sheet (140) is formed of a single thin sheet or film, the elastic column having the flange can form a larger expansion space while improving the performance of the buckling prevention portion (141) of the insulating sheet.

[0113] The insulating sheets illustrated in FIGS. 2 to 12 are formed of a single layer. The insulating sheet formed of a single layer may be formed of silicone rubber. The silicone rubber insulating sheet may have an appropriate thickness so as to prevent buckling of the conductive portion by contacting the outer surface of the conductive portion and supporting the conductive portion in a horizontal direction. Although the insulating sheet may have a thicker thickness to increase the supporting force for supporting the outer surface of the conductive portion in a horizontal direction, an insulating sheet having an increased thickness may reduce the expansion space inside the connector and deteriorate the performance of distributing the pressing force. According to an embodiment of the present disclosure, the insulating sheet may be formed of two or three layers so as to increase the supporting force for supporting the conductive portion in a horizontal direction while having a thin thickness, and may form an insulating support module together with an elastic column.

[0114] Fig. 15 is a cross-sectional view showing a portion of a connector including an insulating sheet made of two layers, and Fig. 16 is an exploded cross-sectional perspective view showing a portion of the connector shown in Fig. 15. See Figs. 15 and 16.

[0115] The insulating sheet (140) is composed of a first insulating sheet (145) and a second insulating sheet (146) attached to either the upper or lower surface of the first insulating sheet (145). The first insulating sheet (145) and the second insulating sheet (146) are laminated vertically to form the insulating sheet (140) as a laminate. Although FIGS. 15 and 16 illustrate the second insulating sheet (146) attached to the lower surface (1451) of the first insulating sheet (145), the second insulating sheet (146) may also be attached to the upper surface (1452) of the first insulating sheet (145).

[0116] The first insulating sheet (145) may be made of a polyimide film, and the second insulating sheet (146) may be a sheet made of an insulating material, such as silicone rubber, having a hardness lower than that of the first insulating sheet (145) or being softer than the first insulating sheet (145). The second insulating sheet (146) may have a thickness corresponding to or greater than that of the first insulating sheet (145). A portion (1411) of the buckling prevention portion (141) (e.g., a portion of the through hole (142)) is formed in the vertical direction on the first insulating sheet (145), and the remaining portion (1412) of the buckling prevention portion (141) (e.g., a portion of the through hole (142)) is formed in the vertical direction on the second insulating sheet (146). Fig. 15 illustrates an example in which the lower elastic pillar (151) is formed integrally with the second insulating sheet (146). When the second insulating sheet (146) is attached to the upper surface (1452) of the first insulating sheet (145), the upper elastic pillar (152) can be formed integrally with the second insulating sheet (146).

[0117] Since the first insulating sheet (145) is made of a polyimide film, the insulating sheet (140) can have a thinner thickness and can increase the internal expansion space of the connector. The insulating sheet (140), which is made of the first insulating sheet (145) having a thin thickness and the second insulating sheet (146) attached to the first insulating sheet (145) and having a hardness lower than that of the first insulating sheet, can have a thickness of the insulating sheet that can support the outer peripheral surface (111) of the conductive portion with an appropriate supporting force and prevent buckling of the conductive portion. In addition, such an insulating sheet (140) can prevent a reduction in the internal expansion space of the connector and can not deteriorate the performance of distributing the pressing force.

[0118] Fig. 17 is a cross-sectional view showing a portion of a connector including an insulating sheet composed of three layers, and Fig. 18 is an exploded cross-sectional perspective view showing a portion of the connector shown in Fig. 17. See Figs. 17 and 18.

[0119] The insulating sheet (140) is composed of a first insulating sheet (145), a second insulating sheet (146) attached to the lower surface (1451) of the first insulating sheet (145), and a third insulating sheet (147) attached to the upper surface (1452) of the first insulating sheet (145). The third insulating sheet (147), the first insulating sheet (145), and the second insulating sheet (146) are stacked vertically to form an insulating sheet (140) as a stack.

[0120] The first insulating sheet (145) may be made of a polyimide film. The second insulating sheet (146) may be a sheet made of an insulating material having a lower hardness than the first insulating sheet (145) or being softer than the first insulating sheet (145). The third insulating sheet (147) may be a sheet made of an insulating material having a lower hardness than the first insulating sheet (145) or being softer than the first insulating sheet (145). The second insulating sheet (146) and the third insulating sheet (147) may be made of the same insulating material, for example, silicone rubber. The second insulating sheet (146) and the third insulating sheet (147) may have a thickness corresponding to or greater than the thickness of the first insulating sheet (145).

[0121] A part (1413) of the buckling prevention portion (141) (e.g., a part of the through hole (142)) is formed in a vertical direction on a first insulating sheet (145), another part (1414) of the buckling prevention portion (141) (e.g., another part of the through hole (142)) is formed in a vertical direction on a second insulating sheet (146), and the remaining part (1415) of the buckling prevention portion (141) is formed in a vertical direction on a third insulating sheet (147). The lower elastic column (151) is formed integrally with the second insulating sheet (146), and the upper elastic column (152) is formed integrally with the third insulating sheet (147).

[0122] Since the first insulating sheet (145) is made of a polyimide film, the insulating sheet (140) can have a thinner thickness. The insulating sheet (140) is made of a first insulating sheet (145) having a thin thickness, and second and third insulating sheets (146, 147) attached to the first insulating sheet (145) and having a hardness lower than that of the first insulating sheet. This insulating sheet (140) can have a thickness that can prevent buckling of the conductive portion, can prevent a reduction in the expansion space inside the connector, and can maintain the performance of distributing the pressing force.

[0123] FIG. 19 is a cross-sectional view illustrating a portion of a connector according to another embodiment of the present disclosure, FIG. 20 is an exploded cross-sectional perspective view illustrating a portion of the connector illustrated in FIG. 19, and FIG. 21 is an exploded cross-sectional view illustrating a portion of the connector illustrated in FIG. 19. Refer to FIGS. 19 to 21. The connector according to the embodiment illustrated in FIGS. 19 to 21 has a structure and configuration similar to or identical to the structure and configuration of the connector of the embodiment described above with reference to FIGS. 2 to 7, except that it does not have an upper support sheet.

[0124] The connector (10) includes a lower support sheet (120) placed on top of an inspection device (see FIG. 1), a conductive portion (110) supported in a vertical direction (VD) by the lower support sheet (120), and an insulating sheet (140) placed on top of the lower support sheet (120) and into which the conductive portion (110) is inserted in the vertical direction (VD). The insulating sheet (140) has the aforementioned buckling prevention portion (141) that prevents buckling of the conductive portion (110) by horizontal contact with the outer surface (111) of the conductive portion.

[0125] The conductive portion (110) is coupled to the lower support sheet (120) and is positioned and supported in the vertical direction (VD). The conductive portion (110) may have the same structure and configuration as the conductive portion of the above-described embodiment. The lower support sheet (120) maintains and supports the conductive portion (110) in the vertical direction (VD) and insulates the conductive portion (110). The lower support sheet (120) separates the conductive portions (110) in the horizontal direction (HD), so that adjacent conductive portions do not short-circuit with each other.

[0126] The lower support sheet (120) may have the same structure and configuration as the upper support sheet of the above-described embodiment. The lower support sheet (120) has a thin sheet shape with insulating properties. The lower support sheet (120) may be made of an insulating material such as silicone rubber, FR4 (for example, a synthetic material composed of glass fiber and epoxy resin). Alternatively, the lower support sheet (120) may be a polyimide film. Alternatively, the lower support sheet (120) may be made of a synthetic material of silicone rubber and a polyimide film. Alternatively, the lower support sheet (120) may be a porous sheet. The lower support sheet (120) has a joining hole (121) that is joined to the outer circumferential surface (111) of the conductive portion (110), and the conductive portion (110) is integrally joined to the lower support sheet (120). Alternatively, the conductive portion (110) may be fitted into the joining hole (121) of the lower support sheet (120), so that the conductive portion (110) may be joined to the lower support sheet (120).

[0127] In one embodiment, the lower support sheet (120) and the conductive portion (110) are formed integrally. Accordingly, as illustrated in FIGS. 20 and 21, the lower support sheet (120) and the conductive portion (110) can form a single conductive module (170) that transmits signals in the vertical direction (VD). The conductive module (170) composed of the conductive portion and the lower support sheet is independent from the insulating sheet (140). The conductive module (170) is manufactured separately from the insulating sheet (140), and can be assembled with the insulating sheet (140) in such a manner that the conductive portion (110) is inserted into the insulating sheet (140) from below to above. The conductive module (170) can be formed using the forming method of the conductive module of the above-described embodiment.

[0128] The insulating sheet (140) is arranged horizontally (HD) on the lower support sheet (120). The insulating sheet (140) may have the same structure and configuration as the insulating sheet of the above-described embodiment. The connector (10) includes a lower elastic pillar (151) that positions and supports the insulating sheet (140) on the lower support sheet (120), and the lower elastic pillar (151) upwardly spaced the insulating sheet (140) from the lower support sheet (120). The lower elastic pillar (151) is elastically deformable by the pressing force of the device under test. In addition, the connector (10) includes an upper elastic pillar (152) that is arranged to correspond to the lower elastic pillar (151) based on the insulating sheet (140). The lower elastic column (151) and the upper elastic column (152) may have the same structure and configuration as the lower elastic column and the upper elastic column of the above-described embodiment.

[0129] The insulating sheet (140) has the aforementioned buckling prevention portion (141) that prevents buckling of the conductive portion. The buckling prevention portion (141) contacts at least a portion of the outer circumferential surface (111) of the conductive portion (110) and applies a support force in a horizontal direction, thereby preventing buckling of the conductive portion. The through hole (142) of the insulating sheet (140) forms the buckling prevention portion (141), and the buckling prevention portion (141) is formed as a part of the insulating sheet (140) that defines the through hole (142). Therefore, the buckling prevention portion (141) is formed as at least a part or the entirety of the peripheral portion of the through hole (142) of the insulating sheet.

[0130] The buckling prevention portion (141) protrudes horizontally (HD) from the lower and upper elastic columns (151, 152) toward the conductive portion (110), based on the lower and upper elastic columns (151, 152). The protruding range of the buckling prevention portion (141) is determined so that it does not come into contact with the outer circumferential surface (111) of the conductive portion when the through hole (142) surrounds the outer circumferential surface (111) of the conductive portion with a gap therebetween. Alternatively, the diameter of the through hole (142) may correspond to the diameter of the conductive portion (110), and in the non-pressurized state of the conductive portion, the buckling prevention portion (141) may partially come into contact with the outer circumferential surface (111) of the conductive portion.

[0131] The lower and upper elastic columns (151, 152) are spaced apart from the buckling prevention member (141) in the horizontal direction (HD) to allow expansion of the conductive member in the horizontal direction (HD). The lower elastic column (151) maintains the insulating sheet (140) having the buckling prevention member (141) at a predetermined height from the lower support sheet (120). The lower elastic column (151) is arranged between the lower support sheet (120) and the insulating sheet (140) and supports the insulating sheet (140) on the lower support sheet (120).

[0132] A lower elastic column (151) spaced apart from the buckling prevention portion (141) allows expansion of the conductive portion (110) in the horizontal direction between the lower support sheet (120) and the insulating sheet (140). Therefore, a lower expansion space (161) allowing expansion of the conductive portion (110) in the horizontal direction is formed between the lower support sheet (120) and the insulating sheet (140). Specifically, the lower expansion space (161) is a space formed between the upper surface (122) of the lower support sheet and the lower surface (143) of the insulating sheet, and is a space formed below the buckling prevention portion (141). The lower expansion space (161) may be a space between the upper surface (122) of the lower support sheet and the lower surface (143) of the insulating sheet, excluding the lower elastic pillar (151) and the conductive portion (110), and may be a space surrounding the outer surface (111) of the conductive portion between the outer surface (111) of the conductive portion and the outer surface (153) of the lower elastic pillar (151).

[0133] The upper elastic column (152) can be positioned to correspond to the lower elastic column (151) based on the insulating sheet (140). The upper elastic column (152) protrudes upward from the insulating sheet (140). The upper elastic column (152) is spaced apart from the buckling prevention member (141) in the horizontal direction (HD) to allow expansion of the conductive member (110) in the horizontal direction.

[0134] Therefore, an upper expansion space (151) that allows expansion of the conductive portion (110) in the horizontal direction is formed between the upper surface (144) of the insulating sheet and the upper end (114) of the conductive portion (110). Specifically, the upper expansion space (162) is a space formed above the buckling prevention portion (141) between the upper surface (144) of the insulating sheet and the upper end (114) of the conductive portion. The upper expansion space (162) may be a space excluding the upper elastic pillar (152) and the conductive portion (110) between the upper surface (144) of the insulating sheet and the upper end (114) of the conductive portion, and may be a space surrounding the outer circumference (111) of the conductive portion between the outer circumference (111) of the conductive portion and the outer circumference (153) of the upper elastic pillar (152).

[0135] The lower elastic column (151) may be coupled to the lower support sheet or the insulating sheet and may be positioned between the lower support sheet and the insulating sheet. The upper elastic column (152) may be coupled to the insulating sheet and may protrude upward. In one embodiment, the lower elastic column (151) and the upper elastic column (152) may be formed integrally with the insulating sheet (140). Accordingly, the lower elastic column (151) protrudes downward from the insulating sheet (140), and the upper elastic column (152) protrudes upward from the insulating sheet (140). In addition, the lower elastic column (151) may be coupled to the upper surface (122) of the lower support sheet by an adhesive.

[0136] The insulating sheet (140), the lower elastic column (151), and the upper elastic column (152) are formed integrally to form an insulating support module (180) that prevents buckling of the conductive portion and allows expansion of the conductive portion in the horizontal direction. The insulating support module (180) is independent of the lower support sheet (120) and is placed on the upper surface (122) of the lower support sheet. The insulating support module (180) is manufactured separately from the lower support sheet or the conductive module, and can be assembled with the conductive module (170) in such a manner that the conductive portion (110) penetrates the insulating sheet (140) from below to above. Therefore, the connector can be easily manufactured in such a manner that the conductive module (170) for performing signal transmission and the insulating support module (180) for preventing buckling are assembled.

[0137] The lower expansion space (161) formed under the insulating sheet surrounds the outer circumference (111) of the conductive portion located between the lower support sheet (120) and the insulating sheet (140). The upper expansion space (162) formed above the insulating sheet surrounds the outer circumference (111) of the conductive portion located above the insulating sheet (140). The buckling prevention portion (141) of the insulating sheet (140) is located closer to the outer circumference (111) of the conductive portion than each elastic pillar. In the non-pressurized state of the conductive portion, the buckling prevention portion (141) may partially contact the outer circumference (111) of the conductive portion, or may be spaced apart from the outer circumference of the conductive portion with a gap.

[0138] When the conductive portion (110) expands in the horizontal direction (HD) by the pressing force of the test device (e.g., see FIG. 8), the lower expansion space (161) and the upper expansion space (162) do not impede the expansion of the conductive portion. Therefore, each expansion space (161, 162) provides sufficient space for the conductive portion (110) to expand in the horizontal direction (HD). The outer circumferential surface (111) of the conductive portion, which expands in the horizontal direction by the pressing force, comes into contact with the buckling prevention portion (141). Accordingly, the buckling prevention portion (141) suppresses the movement of the conductive portion in the horizontal direction. An insulating sheet having an anti-buckling portion (141) formed thereon is placed on the lower support sheet (120), and the anti-buckling portion (141) can contact the outer surface (111) near the middle of the conductive portion, so that movement of the conductive portion in the horizontal direction is suppressed by the anti-buckling portion (141), and buckling of the conductive portion is prevented by the anti-buckling portion (141).

[0139] The lower and upper elastic columns (151, 152) respectively positioned below and above the insulating sheet form an expansion space of the conductive portion and elastically deform to disperse the pressing force applied to the connector. The lower elastic column (151) positions the insulating sheet inside the connector at an appropriate height. The lower and upper elastic columns (151, 152) can elastically deform due to the pressing force of the device under test. The lower and upper elastic columns (151, 152) may have one of the cylindrical shape described with reference to Fig. 3, the truncated cone shape described with reference to Fig. 9, and the polygonal truncated pyramid shape described with reference to Fig. 10.

[0140] FIG. 22 is an exploded cross-sectional perspective view showing a part of the connector shown in FIG. 19, in which an elastic column having a cylindrical shape has a flange, and FIG. 23 is an exploded cross-sectional perspective view showing a part of the connector shown in FIG. 19, in which an elastic column having a truncated cone shape has a flange.

[0141] Referring to FIGS. 22 and 23, the lower elastic column (151) and the upper elastic column (152) have the aforementioned flange (155) at the end (154) that is coupled to the insulating sheet (140). The lower and upper elastic columns (151, 152) may have the flange (155), or only one of the lower and upper elastic columns (151, 152) may have the flange (155).

[0142] The flange (155) is positioned close to the buckling prevention portion (141), so as to reinforce the portion of the insulating sheet (140) where the buckling prevention portion (141) is formed, and increase the bearing capacity of the insulating sheet (140) supporting the outer peripheral surface (111) of the conductive portion. For example, when the insulating sheet (140) is formed of a single thin sheet or film, an elastic column having a flange can improve the performance of the buckling prevention portion (141) of the insulating sheet and form a larger expansion space.

[0143] The insulating sheet illustrated in FIGS. 19 to 21 may comprise a single layer made of an insulating material such as silicone rubber. The insulating sheet of silicone rubber may have an appropriate thickness to prevent buckling of the conductive portion. The insulating sheet of the connector of the embodiment illustrated in FIG. 19 may comprise two or three layers to increase the supporting force for supporting the conductive portion in a horizontal direction, and may form an insulating support module together with an elastic pillar.

[0144] Fig. 24 is an exploded cross-sectional perspective view illustrating a portion of the connector illustrated in Fig. 19, which includes an insulating sheet composed of two layers. The insulating sheet (140) is composed of a first insulating sheet (145) and a second insulating sheet (146) attached to either the upper or lower surface of the first insulating sheet (145). Although Fig. 24 illustrates the second insulating sheet (146) attached to the lower surface (1451) of the first insulating sheet (145), the second insulating sheet (146) may be attached to the upper surface (1452) of the first insulating sheet (145). The insulating sheet (140) of the embodiment illustrated in Fig. 24 may have the same structure and configuration as the structure and configuration of the insulating sheet described with reference to Figs. 15 and 16.

[0145] Fig. 25 is an exploded cross-sectional perspective view illustrating a portion of the connector illustrated in Fig. 19, which includes an insulating sheet composed of three layers. The insulating sheet (140) is composed of a first insulating sheet (145), a second insulating sheet (146) attached to a lower surface (1451) of the first insulating sheet (145), and a third insulating sheet (147) attached to an upper surface (1452) of the first insulating sheet (145). The insulating sheet (140) of the embodiment illustrated in Fig. 25 may have the same structure and configuration as the structure and configuration of the insulating sheet described with reference to Figs. 17 and 18.

[0146] While the technical concept of the present disclosure has been described above with reference to certain embodiments and examples illustrated in the accompanying drawings, it should be understood that various substitutions, modifications, and variations may be made without departing from the technical concept and scope of the present disclosure, which would be understood by those skilled in the art to which the present disclosure pertains. Furthermore, such substitutions, modifications, and variations should be considered to fall within the scope of the appended claims.

Claims

1. It is a test connector placed between the test device and the test device. A lower support sheet placed on top of the above inspection device, An upper support sheet placed below the above-mentioned blood test device, A conductive part supported in the vertical direction by at least one of the lower support sheet and the upper support sheet, The conductive part has an anti-buckling part configured to prevent buckling of the conductive part by contact with the outer surface of the conductive part in a horizontal direction when the conductive part is inserted in the vertical direction, and an insulating sheet disposed between the lower support sheet and the upper support sheet; A lower elastic column that is spaced apart from the buckling prevention member to allow expansion of the conductive member and supports the insulating sheet on the lower support sheet; An upper elastic column is provided that is spaced apart from the buckling prevention member to allow expansion of the conductive member and supports the upper support sheet on the insulating sheet. Connector.

2. In paragraph 1, A lower expansion space that allows expansion of the above conductive portion is formed below the buckling prevention portion between the upper surface of the lower support sheet and the lower surface of the insulating sheet, An upper expansion space that allows expansion of the conductive portion is formed above the buckling prevention portion between the upper surface of the insulating sheet and the lower surface of the upper support sheet. Connector.

3. In paragraph 1, The lower elastic column protrudes downward from the insulating sheet and is bonded to the upper surface of the lower support sheet, The upper elastic column is positioned to correspond to the lower elastic column, protrudes upward from the insulating sheet, and is joined to the lower surface of the upper support sheet. Connector.

4. In paragraph 1, The upper support sheet and the conductive part are formed integrally to form a conductive module that can be assembled with the lower support sheet and the insulating sheet. Connector.

5. An inspection connector placed between the inspection device and the inspection device. A lower support sheet placed on top of the above inspection device, A conductive part supported in the vertical direction by the lower support sheet, An insulating sheet disposed on the lower support sheet, wherein the conductive part has an anti-buckling portion configured to prevent buckling of the conductive part by contact with the outer surface of the conductive part in a horizontal direction when the conductive part is inserted in the vertical direction; A lower elastic column that is spaced apart from the buckling prevention member to allow expansion of the conductive member and supports the insulating sheet on the lower support sheet; Including an upper elastic column spaced apart from the buckling prevention member and protruding upward from the insulating sheet to allow expansion of the conductive member. Connector.

6. In paragraph 5, A lower expansion space that allows expansion of the above conductive portion is formed below the buckling prevention portion between the upper surface of the lower support sheet and the lower surface of the insulating sheet, An upper expansion space that allows expansion of the conductive portion is formed above the buckling prevention portion between the upper surface of the insulating sheet and the upper end of the conductive portion. Connector.

7. In paragraph 5, The lower elastic column protrudes downward from the insulating sheet and is bonded to the upper surface of the lower support sheet, The upper elastic column is positioned to correspond to the lower elastic column and protrudes upward from the insulating sheet. Connector.

8. In paragraph 5, The lower support sheet and the conductive part are formed integrally to form a conductive module that can be assembled with the insulating sheet. Connector.

9. In paragraph 1 or paragraph 5, The insulating sheet has a through hole through which the conductive part is inserted in the vertical direction, and the buckling prevention part is formed as at least a portion of the circumference of the through hole. Connector.

10. In paragraph 9, The above through hole is formed to surround the outer surface of the conductive part with a gap. Connector.

11. In paragraph 9, The above through hole has a radius smaller than the distance between the central axis of the conductive part and the central axis of the lower elastic column and the distance between the central axis of the conductive part and the central axis of the upper elastic column. Connector.

12. In paragraph 1 or paragraph 5, In response to the pressing force of the above-mentioned inspection device, the conductive part is configured to expand in the horizontal direction in the lower expansion space and the upper expansion space, and the buckling prevention part is configured to suppress buckling of the conductive part. Connector.

13. In paragraph 1 or paragraph 5, The above insulating sheet, the lower elastic column and the upper elastic column are formed integrally to form an insulating support module placed on the upper surface of the lower support sheet. Connector.

14. In paragraph 13, The insulating sheet is composed of a first insulating sheet having a portion of the buckling prevention portion formed thereon, and a second insulating sheet having a hardness lower than the hardness of the first insulating sheet and having a remaining portion of the buckling prevention portion formed thereon, and is attached to one of the lower and upper surfaces of the first insulating sheet. One of the lower elastic column and the upper elastic column is formed integrally with the second insulating sheet, Connector.

15. In paragraph 13, The insulating sheet is composed of a first insulating sheet having a portion of the buckling prevention portion formed thereon, a second insulating sheet attached to the lower surface of the first insulating sheet and having a hardness lower than the hardness of the first insulating sheet and having another portion of the buckling prevention portion formed thereon, and a third insulating sheet attached to the upper surface of the first insulating sheet and having a hardness lower than the hardness of the first insulating sheet and having the remaining portion of the buckling prevention portion formed thereon. The lower elastic column is formed integrally with the second insulating sheet, and the upper elastic column is formed integrally with the third insulating sheet. Connector.

16. In paragraph 1 or paragraph 5, The above lower elastic column and the above upper elastic column have any one of a cylindrical shape, a truncated cone shape, and a polygonal truncated pyramid shape. Connector.

17. In paragraph 1 or paragraph 5, At least one end of the lower elastic column and the upper elastic column is attached to the insulating sheet and has a flange protruding toward the buckling prevention portion. Connector.

Images