Mask plate, manufacturing method therefor and display panel

Abstract

The present application belongs to the technical field of display. Disclosed are a mask plate, a manufacturing method therefor and a display panel. On a mask net, providing auxiliary openings on the peripheries of multiple opening areas and providing shielding strips to cover the auxiliary openings can ensure a low probability of bad warping phenomena at the boundaries of the opening areas arranged at the edge of the mask net while ensuring no additional film layer structure is formed on a substrate. Thus, during the process of using the mask plate for depositing films onto a substrate, a material to be used for film deposition can accurately pass through each opening area to be deposited onto the substrate, so that none of the films deposited onto the substrate on the basis of the opening areas will contain a redundant shadow part, allowing for high accuracy of the films to be formed on the substrate so as to ensure the high reliability of a display panel obtained by subsequently cutting the substrate.

Description

Mask plate and manufacturing method thereof, and display panel

[0001] This application claims priority to Chinese patent application No. 202311430148.4 filed on October 31, 2023, entitled “Mask plate, manufacturing method thereof, and display panel”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of display technology, and in particular to a mask plate and a manufacturing method thereof, and a display panel. Background Art

[0003] Organic light-emitting diodes (OLEDs) are hailed as the next generation of display devices due to their advantages such as self-luminescence, high efficiency, bright colors, light weight, power saving, and rollability, and have attracted increasing attention in recent years.

[0004] For OLED display panels, encapsulation technology is particularly critical. The thin-film encapsulation process uses a mask to deposit a thin film on a substrate, forming an encapsulation layer. Typically, a mask consists of a frame and a mask mesh welded to the frame. The mask mesh has an array of openings for film deposition. During film deposition using the mask, the material to be deposited passes through the openings in the mask and adheres to the substrate, allowing a thin film to form on the substrate in areas corresponding to the openings.

[0005] However, the edge areas of current mask plates are easily affected by gravity, causing the boundaries of the opening areas set at the edges of the mask plates to easily warp, which in turn leads to low accuracy of the thin films formed on the areas corresponding to these opening areas in the substrate, affecting the yield rate of the finished display panels to be formed subsequently.

[0006] Summary of the Invention

[0007] The present invention provides a mask plate and a manufacturing method thereof, as well as a display panel. The technical solution can solve the yield problem of display panels.

[0008] In one aspect, a mask is provided, comprising:

[0009] Ring frame;

[0010] a mask net located on one side of the annular frame and fixedly connected to the annular frame, the mask net having a plurality of opening areas arranged in an array and auxiliary openings located peripherally of the plurality of opening areas, wherein orthographic projections of the plurality of opening areas and the auxiliary openings on a reference plane parallel to the mask net are both located within an area enclosed by the orthographic projection of the annular frame on the reference plane;

[0011] and a shielding strip located on a side of the mask net facing away from the annular frame, wherein the shielding strip covers the auxiliary opening.

[0012] Optionally, the plurality of opening areas are arranged into a plurality of columns along the first direction, and are arranged into a plurality of rows along the second direction;

[0013] The mask net has a plurality of auxiliary openings, and the plurality of auxiliary openings include: first auxiliary openings arranged in at least one row along the first direction, and / or second auxiliary openings arranged in at least one row along the second direction.

[0014] Optionally, there are multiple shielding strips, and the multiple shielding strips include: at least one first shielding strip arranged corresponding to at least one row of the first auxiliary openings, and / or at least one second shielding strip arranged corresponding to at least one row of the second auxiliary openings;

[0015] The extension direction of the first shielding strip is parallel to the first direction, and the first shielding strip covers a corresponding row of the first auxiliary openings; the extension direction of the second shielding strip is parallel to the second direction, and the second shielding strip covers a corresponding row of the second auxiliary openings.

[0016] Optionally, when the plurality of auxiliary openings include the at least one row of first auxiliary openings, a width of the first shielding strip in the second direction is greater than or equal to a width of the first auxiliary opening in the second direction;

[0017] And / or, when the plurality of auxiliary openings include the at least one row of second auxiliary openings, the width of the second shielding strip in the first direction is greater than or equal to the width of the second auxiliary opening in the first direction.

[0018] Optionally, the length of the first shielding strip in the first direction is greater than the width of the area enclosed by the annular frame in the first direction;

[0019] And / or, the length of the second shielding strip in the second direction is greater than the width of the area enclosed by the annular frame in the second direction.

[0020] Optionally, when the plurality of auxiliary openings include the at least one row of first auxiliary openings, in the second direction, a distance between the first auxiliary opening and an adjacent opening area is less than or equal to a distance between two adjacent opening areas;

[0021] And / or, when the plurality of auxiliary openings include the at least one row of second auxiliary openings, in the first direction, a distance between the second auxiliary opening and an adjacent opening area is less than or equal to a distance between two adjacent opening areas.

[0022] Optionally, when the plurality of auxiliary openings include the at least one row of first auxiliary openings, the number of first auxiliary openings in a row of the first auxiliary openings is the same as the number of opening areas in a row of the opening areas;

[0023] And / or, when the plurality of auxiliary openings include the at least one row of second auxiliary openings, the number of second auxiliary openings in a row of the auxiliary openings is the same as the number of opening areas in a column of the opening areas.

[0024] Optionally, when the plurality of auxiliary openings include two rows of the first auxiliary openings, the plurality of opening areas are arranged between the two rows of the first auxiliary openings in the second direction, and two first auxiliary openings are arranged on both sides of each column of the opening areas;

[0025] And / or, when the multiple auxiliary openings include two rows of second auxiliary openings, the multiple opening areas are arranged between the two rows of second auxiliary openings in the first direction, and two second auxiliary openings are arranged on both sides of each row of the opening areas.

[0026] Optionally, the length of the first auxiliary opening in the first direction is equal to the width of the opening area in the first direction;

[0027] And / or, the length of the second auxiliary opening in the second direction is equal to the width of the opening area in the second direction.

[0028] Optionally, the width of the first auxiliary opening in the second direction is less than or equal to the width of the opening area in the second direction plus twice the distance between two adjacent opening areas in the second direction;

[0029] And / or, the width of the second auxiliary opening in the first direction is less than or equal to the width of the opening area in the first direction plus twice the distance between two adjacent opening areas in the first direction.

[0030] Optionally, the mask plate has a plurality of functional openings, and the plurality of functional openings are distributed around the periphery of the plurality of opening areas.

[0031] Optionally, when the orthographic projection of the functional opening on the reference plane is located within the orthographic projection of the auxiliary opening on the reference plane, the shielding strip has the functional opening.

[0032] Optionally, when the functional opening is distributed between the auxiliary opening and the adjacent opening area, the orthographic projection of the shielding strip on the reference plane does not overlap with the orthographic projection of the functional opening on the reference plane.

[0033] Optionally, the plurality of functional openings include: a plurality of alignment openings for aligning with the substrate to be deposited, and / or a plurality of detection openings for forming a test film layer on the substrate to be deposited.

[0034] In another aspect, a method for preparing a mask plate is provided, comprising:

[0035] A mask net fixedly connected to the annular frame is formed on one side of the annular frame, the mask net having a plurality of opening areas arranged in an array and auxiliary openings located outside the plurality of opening areas, wherein orthographic projections of the plurality of opening areas and the auxiliary openings on a reference plane parallel to the mask net are both located within an area enclosed by the orthographic projection of the annular frame on the reference plane;

[0036] A shielding strip is formed on a side of the mask mesh facing away from the annular frame, and the shielding strip covers the auxiliary opening.

[0037] On the other hand, a display panel is provided, comprising: at least one functional film layer, wherein the at least one functional film layer is formed based on any of the above-mentioned mask plates.

[0038] Optionally, the display panel includes: a driving backplane, a plurality of light-emitting devices located on one side of the driving backplane, and an encapsulation layer located on a side of the plurality of light-emitting devices away from the driving backplane;

[0039] The encapsulation layer includes: a first inorganic encapsulation layer, an organic encapsulation layer, and a second inorganic encapsulation layer that are stacked, and the first inorganic encapsulation layer and the second inorganic encapsulation layer are both the functional film layers.

[0040] The beneficial effects of the technical solutions provided in the embodiments of the present application include at least:

[0041] By providing auxiliary openings on the mask web at the periphery of the plurality of opening areas, and providing shielding strips to cover the auxiliary openings, it is possible to ensure that no additional film layer structures are formed on the substrate, while also ensuring that the probability of warping defects occurring at the boundaries of the opening areas provided at the edges of the mask web is low. Thus, during the process of depositing a film on a substrate using this mask plate, the material to be deposited can accurately pass through each opening area and be deposited on the substrate, so that the thin film formed on the substrate based on the deposition of each opening area does not contain redundant shadow portions, thereby ensuring a high degree of accuracy in the thin film to be formed on the substrate, thereby ensuring a high reliability of the display panel obtained after the substrate is subsequently cut. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0043] FIG1 is a schematic structural diagram of a mask plate;

[0044] FIG2 is a schematic diagram of the film structure of the mask plate at AA' shown in FIG1;

[0045] FIG3 is a schematic structural diagram of a mask provided in an embodiment of the present application;

[0046] FIG4 is a schematic diagram of the film layer structure of the mask plate at position BB′ shown in FIG3 ;

[0047] FIG5 is a top view of a mask web provided in an embodiment of the present application;

[0048] FIG6 is a top view of another mask web provided in an embodiment of the present application;

[0049] FIG7 is a top view of another mask web provided in an embodiment of the present application;

[0050] FIG8 is a schematic structural diagram of a mask plate provided in an embodiment of the present application and adapted to match the mask net shown in FIG7 ;

[0051] FIG9 is a schematic structural diagram of another mask plate provided in an embodiment of the present application;

[0052] FIG10 is a schematic structural diagram of another mask provided in an embodiment of the present application;

[0053] FIG11 is a top view of another mask web provided in an embodiment of the present application;

[0054] FIG12 is a schematic structural diagram of a mask plate provided in an embodiment of the present application and cooperating with the mask net shown in FIG11 ;

[0055] FIG13 is a schematic structural diagram of another mask provided in an embodiment of the present application;

[0056] FIG14 is a schematic structural diagram of a mask provided in another embodiment of the present application;

[0057] FIG15 is a top view of a mask web provided in another embodiment of the present application;

[0058] FIG16 is a schematic structural diagram of a mask plate provided in an embodiment of the present application and cooperating with the mask net shown in FIG15 . DETAILED DESCRIPTION

[0059] In order to make the objectives, technical solutions and advantages of this application clearer, the implementation methods of this application will be further described in detail below with reference to the accompanying drawings.

[0060] Please refer to Figures 1 and 2. Figure 1 is a schematic diagram of the structure of a mask plate, and Figure 2 is a schematic diagram of the film layer structure of the mask plate shown in Figure 1 at the line AA'. The mask plate 00 may include: an annular frame 01, and a mask net 02 fixedly connected to one side of the annular frame 01. The mask net 02 has a plurality of opening areas 02a arranged in an array, and these opening areas 02a may be distributed within the area enclosed by the annular frame 01.

[0061] When using the mask plate 00 to deposit a film on a substrate, the material to be deposited can be attached to the substrate through the multiple opening areas 02a arranged in an array on the mask net 02, so that a thin film can be formed on the area of ​​the substrate corresponding to the opening areas 02a. Here, the multiple opening areas 02a in the mask net 00 can correspond one-to-one with multiple display panels. That is, each opening area 02a in the mask net 00 can form a thin film in the corresponding display panel. To this end, after each layer of thin film on the substrate is formed, the substrate can be cut to obtain multiple display panels.

[0062] However, the width d of the edge portion of the mask web 02 surrounding the plurality of openings 02a is typically relatively large, and the edge portion of the mask web 02 is fixedly connected to the annular frame 01. Therefore, when the width d of the edge portion of the mask web 02 is relatively large, as shown in FIG2 , the width d0 of the portion of the edge portion of the mask web 02 protruding inwardly relative to the annular frame 01 is also relatively large. Consequently, the portion of the edge portion of the mask web 02 protruding inwardly relative to the annular frame 01 is highly susceptible to drooping due to gravity, resulting in the edges of the openings 02a disposed at the edge of the mask web 02 being highly susceptible to warping.

[0063] Because the material to be deposited passes through the openings 02a at a certain angle and is deposited on the substrate, if the edges of the openings 02a set at the edges of the mask 02 begin to warp, the material to be deposited cannot accurately pass through these warped openings 02a. As a result, the thin film deposited on the substrate based on these warped openings 02a contains redundant shadows compared to the theoretically deposited thin film. This can lead to significant deviations in the thin film formed on the substrate, which in turn seriously affects the reliability of the display panel obtained after the substrate is subsequently cut.

[0064] For example, an inorganic encapsulation layer can be formed on a substrate through the various openings in the mask plate 00. For an inorganic encapsulation layer formed by deposition based on the openings 02 with raised edges, the inorganic encapsulation layer will contain redundant shadow portions. Consequently, when the substrate is subsequently cut, it is very easy to cut into the redundant shadow portions of the inorganic encapsulation layer, causing cracks to form in the inorganic encapsulation layer during the substrate cutting process, thereby deteriorating the encapsulation effect of the inorganic encapsulation layer in the display panel obtained by subsequent cutting.

[0065] Please refer to Figures 3 and 4. Figure 3 is a schematic diagram of the structure of a mask plate provided in an embodiment of the present application, and Figure 4 is a schematic diagram of the film layer structure of the mask plate at BB' shown in Figure 3. The mask plate 000 may include: an annular frame 100, a mask mesh 200, and shielding strips 300.

[0066] In the embodiment of the present application, as shown in Figure 3, the mask net 200 in the mask plate 000 can be located on one side of the annular frame 100 and fixedly connected to the annular frame 100. For example, the mask net 200 can be fixedly connected to the annular frame 100 by welding.

[0067] To more clearly illustrate the structure of the mask net 200 in the mask plate 000, please refer to Figure 5, which is a top view of a mask net provided in an embodiment of the present application. The mask net 200 in the mask plate 000 may include: a plurality of opening areas 200a arranged in an array, and auxiliary openings 200b located outside the plurality of opening areas 200a.

[0068] As shown in FIG4 , the provision of auxiliary openings 200b around the periphery of the plurality of opening regions 200a reduces the width d1 of the portion of the edge of the mask net 200 that protrudes inwardly relative to the annular frame 100. Consequently, the amount of droop in the portion of the edge of the mask net 200 that protrudes inwardly relative to the annular frame 101 can be effectively reduced, making it less likely that the boundaries of the opening regions 200a provided at the edge of the mask net 200 will warp. Even if some droop still exists in the portion of the edge of the mask net 200 that protrudes inwardly relative to the annular frame 100, this will only cause the edges of the auxiliary openings 200b to warp, and will not cause the boundaries of the opening regions 200a provided at the edge of the mask net 200 to warp. It should be noted that the edge of the mask net 200 refers to the portion of the mask net 200 that surrounds the plurality of opening regions 200a and the auxiliary openings 200b.

[0069] As shown in FIG3 , the orthographic projections of the plurality of openings 200a and auxiliary openings 200b in the mask web 200 on a reference plane parallel to the mask web 200 can all be located within the area enclosed by the orthographic projection of the annular frame 100 on the reference plane. This ensures a greater width at the contact point between the mask web 200 and the annular frame 100, allowing for a more secure connection between the two.

[0070] Here, please continue to refer to Figure 3. The shielding strip 300 in the mask plate 000 can be located on the side of the mask net 200 away from the annular frame 100. Here, the shielding strip 300 can be fixedly connected to the side of the mask net 200 away from the annular frame 100 by welding. Among them, the shielding strip 300 can cover the auxiliary opening 200b. That is, the shielding strip 300 can block the auxiliary opening 200b, thereby preventing the material to be deposited from passing through the auxiliary opening 200b and being deposited on the substrate during the process of depositing the film on the substrate using the mask plate 000. For this reason, no additional film layer structure formed based on the auxiliary opening 200b will be formed on the substrate, so that these additional film layer structures will not be cut in the subsequent process of cutting the substrate.

[0071] In the present application, by providing auxiliary openings 200b on the mask net 200, which are located outside the plurality of opening areas 200a, and providing shielding strips 300 to cover the auxiliary openings 200b, it is possible to ensure that no additional film layer structure is formed on the substrate, while ensuring that the probability of warping defects occurring at the boundaries of the opening areas 200a provided at the edges of the mask net 200 is low. Thus, when using this mask plate 000 to deposit a film on a substrate, the material to be deposited can accurately pass through each opening area 200a and be deposited on the substrate, so that the thin film formed on the substrate based on each opening area 200a does not contain redundant shadow portions, thereby ensuring that the accuracy of the thin film to be formed on the substrate is high, thereby ensuring that the display panel obtained after the substrate is subsequently cut has high reliability.

[0072] In one possible scenario, when an inorganic encapsulation layer is formed on a substrate through each opening region 200a in the mask plate 000, the inorganic encapsulation layer formed by deposition in each opening region 200a in the substrate will not contain redundant shadow portions. This reduces the probability of the inorganic encapsulation layer being cut during subsequent cutting of the substrate, thereby reducing the probability of cracks forming within the inorganic encapsulation layer during the cutting process and enhancing the reliability of the display panel obtained by subsequent cutting.

[0073] In summary, the mask plate provided in the embodiment of the present application includes: an annular frame, a mask net and a shielding strip. By providing auxiliary openings located at the periphery of a plurality of opening areas on the mask net, and providing shielding strips to cover the auxiliary openings, it is possible to ensure that no additional film layer structure is formed on the substrate, while ensuring that the probability of warping defects occurring at the boundaries of the opening areas provided at the edges of the mask net is low. In this way, in the process of depositing a film on a substrate using such a mask plate, the material to be deposited can accurately pass through each opening area and be deposited on the substrate, so that the thin film formed in the substrate based on the deposition of each opening area does not contain redundant shadow parts, thereby making the accuracy of the thin film to be formed on the substrate higher, so as to ensure that the display panel obtained after the subsequent cutting of the substrate has a higher reliability.

[0074] In an embodiment of the present application, please refer to FIG6 , which is a top view of another mask net provided in an embodiment of the present application. The multiple opening areas 200a in the mask net 200 can be arranged into multiple columns along the first direction A1, and can be arranged into multiple rows along the second direction A2. It should be noted that when the mask plate 000 is used to deposit a film on the substrate, the material to be deposited can be deposited on the substrate through the multiple opening areas 200a arranged on the mask net 200, so that a thin film can be formed on the area of ​​the substrate corresponding to the opening area 200a. Here, the area in the substrate corresponding to the opening area 200a is the area where a display panel is located.

[0075] 6 , the mask web 200 may have a plurality of auxiliary openings 200b . The plurality of auxiliary openings 200b may include: first auxiliary openings 201 arranged in at least one row along the first direction A1 , and / or second auxiliary openings 202 arranged in at least one row along the second direction A2 .

[0076] Here, when the plurality of opening regions 200a in the mask web 200 include at least one row of first auxiliary openings 201, the portion of the edge of the mask web 200 adjacent to the row of first auxiliary openings 201 is less affected by gravity, resulting in less sagging in this portion. Therefore, the edges of the opening regions 200a adjacent to the row of first auxiliary openings 201 in the mask web 200 are less likely to warp.

[0077] When the plurality of opening regions 200a in the mask web 200 include at least one row of second auxiliary openings 202, the edge portion of the mask web 200 adjacent to the row of second auxiliary openings 202 is less affected by gravity, resulting in less sagging in this portion. Consequently, the edges of the opening regions 200a adjacent to the row of second auxiliary openings 202 in the mask web 200 are less likely to warp.

[0078] In the embodiment of the present application, there may be various arrangements between the plurality of auxiliary openings 200b and the plurality of shielding strips 300. The embodiment of the present application is schematically illustrated using the following three optional implementations as examples:

[0079] A first optional implementation is shown in FIG7 , which is a top view of another mask net provided in an embodiment of the present application. When the plurality of auxiliary openings 200 b in the mask net 200 are all first auxiliary openings 201, that is, when the plurality of auxiliary openings 200 b include at least one row of first auxiliary openings 201, the first auxiliary openings 201 can be arranged in a single row along the first direction A1, or in two rows along the first direction A1. Here, when the first auxiliary openings 201 are arranged in a single row along the first direction A1, the row of first auxiliary openings 201 can be distributed on either side of the plurality of opening regions 200 a in the second direction A2. When the first auxiliary openings 201 are arranged in two rows along the first direction A1, the two rows of first auxiliary openings 201 can be distributed on both sides of the plurality of opening regions 200 a in the second direction A2, that is, the plurality of opening regions 200 a can be distributed between the two rows of first auxiliary openings 201 in the second direction A2.

[0080] In this case, please refer to Figure 8, which is a schematic structural diagram of a mask plate provided in an embodiment of the present application and coordinated with the mask net shown in Figure 7. The number of shielding strips 300 in the mask plate 000 can be multiple, and the multiple shielding strips 300 can include: at least one first shielding strip 301 corresponding to at least one row of first auxiliary openings 201. The extension direction of the first shielding strip 301 can be parallel to the first direction A1, and the first shielding strip 301 can cover the corresponding row of first auxiliary openings 201. In this way, the first shielding strip 301 can block the first auxiliary openings 201, thereby preventing the material to be deposited from passing through the first auxiliary openings 201 and being deposited on the substrate during the process of depositing a film on the substrate using the mask plate 000.

[0081] Optionally, as shown in Figure 8, the width h1 of the first shielding strip 301 in the second direction A2 can be greater than or equal to the width h2 of the first auxiliary opening 201 in the second direction A2. In this way, in the process of depositing a film on the substrate using the mask plate 000, the first shielding strip 301 can effectively block the first auxiliary opening 201, so that no additional film layer structure deposited based on the first auxiliary opening 201 will be formed on the substrate. In this way, these additional film layer structures will not be cut during the subsequent cutting process of the substrate.

[0082] In the embodiment of the present application, referring to FIG8 , the length d1 of the first shielding strip 301 in the mask plate 000 in the first direction A1 can be greater than the width d2 of the area enclosed by the annular frame 100 in the first direction A1. This ensures that the first shielding strip 301 in the mask plate 000 completely shields the corresponding row of first auxiliary openings 201, and also ensures that when the two ends of the first shielding strip 301 are welded on the side of the mask net 200 facing away from the annular frame 100, the welding positions of the two ends are respectively located on two opposing edge portions of the annular frame 100 in the first direction A1, allowing the first shielding strip 301 to be more securely assembled on the mask net 200.

[0083] Optionally, as shown in FIG7 , in the mask web 200, the number of first auxiliary openings 201 in a row of first auxiliary openings 201 can be the same as the number of opening regions 200a in a row of opening regions 200a. That is, the number of first auxiliary openings 201 distributed in the first direction A1 within a row of first auxiliary openings 201 is the same as the number of opening regions 200a distributed in the first direction A1 within a row of opening regions 200a. Because the plurality of opening regions 200a in the mask web 200 are arranged in multiple columns along the first direction A1, the number of first auxiliary openings 201 distributed in the first direction A1 within a row of first auxiliary openings 201 is also equal to the number of columns within the plurality of opening regions 200a. In this way, for a row of opening regions 200a adjacent to a row of first auxiliary openings 201 in the second direction A2, the boundaries of the respective opening regions 200a within the row of opening regions 200a are less likely to warp.

[0084] In the embodiment of the present application, referring again to FIG. 7 , when the plurality of auxiliary openings 200b includes two rows of first auxiliary openings 201, the plurality of opening areas 200a can be arranged between the two rows of first auxiliary openings 201 in the second direction A2, and two first auxiliary openings 201 can be arranged on either side of each column of opening areas 200a. This ensures that the two outermost opening areas 200a in each column of opening areas 200a are less likely to experience the undesirable phenomenon of warping. Thus, for the two outermost rows of opening areas 200a in the plurality of opening areas 200a in the second direction A2, the boundaries of each opening area 200a within them are less likely to experience the undesirable phenomenon of warping.

[0085] Alternatively, referring to FIG. 7 , the length L1 of the first auxiliary openings 201 in the first direction A1 can be equal to the width L2 of the opening area 200a in the first direction A1. In this case, the distance between two adjacent first auxiliary openings 201 in a row of first auxiliary openings 201 can be equal to the distance between two adjacent opening areas 200a in a row of opening areas 200a. This ensures that the first auxiliary openings 201 and the opening areas 200a are evenly distributed in the first direction A1, allowing the mask web 200 to be stretched more stably in the first direction A1.

[0086] In the embodiment of the present application, the width h2 of the first auxiliary opening 201 in the second direction A2 can be less than or equal to the width h of the opening area 200a in the second direction A2 plus twice the distance D between two adjacent opening areas in the second direction A2. In this way, it is ensured that a sufficient number of opening areas 200a can be distributed in the second direction A2 in the mask web 200, thereby increasing the utilization rate of the mask web 200.

[0087] Optionally, as shown in FIG. 7 , in the second direction A2 , a distance C between the first auxiliary opening 201 and an adjacent opening area 200 a may be less than or equal to a distance D between two adjacent opening areas 200 a .

[0088] In one possible scenario, when the minimum distance between the outermost opening area 200a distributed in the second direction A2 and the outer contour of the mask net 200 is larger, it means that there is sufficient space between the outermost opening area 200a distributed in the second direction A2 and the outer contour of the mask net 200 to distribute the first auxiliary opening 201. In this case, the distance C between the first auxiliary opening 201 and the adjacent opening area 200a distributed in the second direction A2 can be equal to the distance D between the two adjacent opening areas 200a distributed in the second direction A2, so as to ensure that the first auxiliary opening 201 and the opening area 200a are evenly distributed in the second direction A2, so that the mask net 200 can be stretched more stably in the second direction A2.

[0089] In another possible situation, when the minimum distance between the outermost opening area 200a distributed in the second direction A2 and the outer contour of the mask net 200 is small, the distance C between the first auxiliary opening 201 and the opening area 200a distributed adjacent to the second direction A2 can be made smaller than the distance D between the two opening areas 200a distributed adjacent to each other in the second direction A2, so as to ensure that the first auxiliary opening 201 can be normally arranged in the mask net 200, so that the boundary of the opening area 200a distributed adjacent to the first auxiliary opening 201 in the second direction A2 is not prone to the undesirable phenomenon of warping.

[0090] Please refer to Figure 9, which is a schematic structural diagram of another mask provided in an embodiment of the present application. The mask 000 may have multiple functional openings 200c, and the multiple functional openings 200c may be distributed around the periphery of the multiple opening areas 200a. Here, the multiple functional openings 200c may include: multiple alignment openings for aligning with the substrate to be deposited, and / or multiple detection openings for forming a test film layer on the substrate to be deposited. In the case where the functional openings 200c include alignment openings, the alignment openings in the mask 000 can be aligned with the alignment marks in the substrate to be deposited, so that the mask 000 can be accurately aligned with the substrate, thereby ensuring that the subsequent thin film formed on the substrate has a high degree of accuracy. In the case where the functional openings 200c include detection openings, the test film layer can be deposited on the substrate to be deposited based on the detection openings in the mask 000. These test film layers are used for optical or electrical testing to verify whether the stability of the thin film deposited on the substrate based on the opening area 200a meets the design specifications.

[0091] In the embodiment of the present application, there are many possible situations for the distribution positions of the multiple functional openings 20c. The embodiment of the present application will be described using the following two possible situations as examples:

[0092] In the first possible scenario, as shown in FIG9 , the orthographic projection of the functional opening 200c in the mask plate 000 onto a reference plane parallel to the mask web 200 lies within the orthographic projection of the auxiliary opening 200b onto the reference plane. For example, when the distance C between the first auxiliary opening 201 and adjacent opening regions 200a distributed along the second direction A2 is less than the distance D between two adjacent opening regions 200a distributed along the second direction A2, this indicates that the distance C between the first auxiliary opening 201 and the adjacent opening regions 200a distributed along the second direction A2 is relatively small, and the functional opening 200c in the mask plate 000 cannot be distributed between the first auxiliary opening 201 and the adjacent opening regions 200a distributed along the second direction A2. In this case, the orthographic projection of the functional opening 200c onto the reference plane can lie within the orthographic projection of the first auxiliary opening 201 onto the reference plane. In other words, the functional opening 200c can lie within the first auxiliary opening 201.

[0093] Furthermore, in this case, the first shielding strip 301 may have a functional opening 200c. Thus, the first shielding strip 301 can only shield the areas of the first auxiliary opening 201 not covered by the functional opening 200c, without shielding the areas where the functional openings 200c are located. This ensures that subsequent film deposition on the substrate can proceed normally based on the functional openings 200c.

[0094] For the second possible scenario, please refer to FIG10 , which is a schematic diagram of the structure of another mask provided in an embodiment of the present application. The functional opening 200c in the mask 000 is distributed between the auxiliary opening 200b and the adjacent opening area 200a. For example, when the distance C between the first auxiliary opening 201 and the opening area 200a adjacently distributed in the second direction A2 is approximately equal to the distance D between the two opening areas 200a adjacently distributed in the second direction A2, it indicates that the distance C between the first auxiliary opening 201 and the opening area 200a adjacently distributed in the second direction A2 is relatively large, so that the functional opening 200c in the mask 000 can be distributed between the first auxiliary opening 201 and the opening area 200a adjacent to the second direction A2.

[0095] Furthermore, in this case, the functional openings 200c may not be provided in the first shielding strip 301, and the orthographic projection of the first shielding strip 301 on the reference plane does not overlap with the orthographic projection of the functional openings 200c on the reference plane. This ensures that the first shielding strip 301 does not block the functional openings 200c, thereby ensuring that subsequent film deposition on the substrate can proceed normally based on the functional openings 200c.

[0096] For a second optional implementation, please refer to FIG11 , which is a top view of another mask net provided in an embodiment of the present application. When the plurality of auxiliary openings 200b in the mask net 200 are all second auxiliary openings 202, these second auxiliary openings 202 can be arranged in a row along the second direction A2, or they can be arranged in two rows along the second direction A2. Here, when these second auxiliary openings 202 are arranged in a row along the second direction A2, this row of second auxiliary openings 202 can be distributed on either side of the plurality of opening areas 200a in the first direction A1. When these second auxiliary openings 202 are arranged in two rows along the second direction A2, the two rows of second auxiliary openings 202 can be distributed on both sides of the plurality of opening areas 200a in the first direction A1, that is, the plurality of opening areas 200a can be distributed between the two rows of second auxiliary openings 202 in the first direction A1.

[0097] In this case, please refer to FIG12, which is a schematic structural diagram of a mask plate provided in an embodiment of the present application and compatible with the mask mesh shown in FIG11, wherein the multiple shielding strips 300 in the mask plate 000 may include: at least one second shielding strip 302 arranged corresponding to at least one row of second auxiliary openings 202. The extension direction of the second shielding strip 302 may be parallel to the second direction A2, and the second shielding strip 302 may cover the corresponding row of second auxiliary openings 202. In this way, the second shielding strip 302 can shield the second auxiliary openings 202, thereby preventing the material to be deposited from passing through the second auxiliary openings 202 and being deposited on the substrate during the process of depositing a film on a substrate using the mask plate 000.

[0098] Optionally, as shown in FIG12 , the width h3 of the second shielding strip 302 in the first direction A1 can be greater than or equal to the width h4 of the second auxiliary opening 202 in the first direction A1. Thus, during the process of depositing a film on a substrate using the mask 000, the second shielding strip 302 can effectively shield the second auxiliary opening 202, preventing the formation of additional film layer structures deposited based on the second auxiliary opening 202 on the substrate. Consequently, these additional film layer structures will not be cut during subsequent cutting of the substrate.

[0099] In the embodiment of the present application, referring to FIG12 , the length d3 of the second shielding strip 302 in the mask plate 000 in the second direction A2 can be greater than the width d4 of the area enclosed by the annular frame 100 in the second direction A2. This ensures that the second shielding strip 302 in the mask plate 000 completely shields the corresponding row of second auxiliary openings 202, and also ensures that when the two ends of the second shielding strip 302 are welded on the side of the mask net 200 facing away from the annular frame 100, the welding positions of the two ends are respectively located on two opposing edge portions of the annular frame 100 in the second direction A2, allowing the second shielding strip 302 to be more securely assembled on the mask net 200.

[0100] Optionally, as shown in FIG11 , in the mask web 200, the number of second auxiliary openings 202 in a row of auxiliary openings 200b can be the same as the number of opening areas 200a in a column of the mask web 200. That is, the number of second auxiliary openings 202 distributed in the second direction A2 within a row of second auxiliary openings 202 is the same as the number of opening areas 200a distributed in the second direction A2 within a column of opening areas 200a. Because the plurality of opening areas 200a in the mask web 200 are arranged in multiple rows along the second direction A2, the number of second auxiliary openings 202 distributed in the second direction A2 within a row of second auxiliary openings 202 is also equal to the number of rows of the plurality of opening areas 200a arranged in the second direction A2. In this way, for a row of opening areas 200a adjacent to a row of second auxiliary openings 202 in the plurality of opening areas 200a in the first direction A1, the boundaries of the respective opening areas 200a within the row of second auxiliary openings 202 are less likely to warp.

[0101] In the embodiment of the present application, referring again to FIG. 11 , when the plurality of auxiliary openings 200b includes two rows of second auxiliary openings 202, the plurality of opening areas 200a can be arranged between the two rows of second auxiliary openings 202 in the first direction A1, and two second auxiliary openings 202 can be arranged on either side of each row of opening areas 200a. This ensures that the two outermost opening areas 200a in each row of opening areas 200a are less likely to experience the undesirable phenomenon of warping. Thus, for the two outermost rows of opening areas 200a in the plurality of opening areas 200a in the first direction A1, the boundaries of each opening area 200a within them are less likely to experience the undesirable phenomenon of warping.

[0102] Alternatively, referring to FIG. 11 , the length L3 of the second auxiliary openings 202 in the second direction A2 can be equal to the width L4 of the opening area 200a in the second direction A2. In this case, the distance between two adjacent second auxiliary openings 202 in a row of second auxiliary openings 202 can be equal to the distance between two adjacent opening areas 200a in a column of opening areas 200a. This ensures that the second auxiliary openings 202 and the opening areas 200a are evenly distributed in the second direction A2, enabling the mask web 200 to be stretched more stably in the second direction A2.

[0103] In the embodiment of the present application, the width h4 of the second auxiliary opening 202 in the first direction A1 can be less than or equal to the width L of the opening area 200a in the first direction A1 plus twice the distance F between two adjacent opening areas distributed in the first direction A1. In this way, it is ensured that a sufficient number of opening areas 200a can be distributed in the mask web 200 in the first direction A1, thereby increasing the utilization rate of the mask web 200.

[0104] Optionally, as shown in FIG. 11 , in the first direction A1 , a distance E between the second auxiliary opening 202 and an adjacent opening area 200 a may be less than or equal to a distance F between two adjacent opening areas 200 a .

[0105] In one possible scenario, when the minimum distance between the outermost opening area 200a distributed in the first direction A1 and the outer contour of the mask net 200 is larger, it means that there is sufficient space between the outermost opening area 200a distributed in the first direction A1 and the outer contour of the mask net 200 to distribute the second auxiliary opening 202. In this case, the distance E between the second auxiliary opening 202 and the adjacent opening area 200a distributed in the first direction A1 can be equal to the distance F between the two adjacent opening areas 200a distributed in the first direction A1, so as to ensure that the second auxiliary opening 202 and the opening area 200a are evenly distributed in the first direction A1, so that the mask net 200 can be stretched more stably in the first direction A1.

[0106] In another possible situation, when the minimum distance between the outermost opening area 200a distributed in the first direction A1 and the outer contour of the mask net 200 is small, the distance E between the second auxiliary opening 202 and the opening area 200a distributed adjacent to the first direction A1 can be made smaller than the distance F between the two opening areas 200a distributed adjacent to each other in the first direction A1, so as to ensure that the second auxiliary opening 202 can be normally set in the mask net 200, so that the boundary of the opening area 200a distributed adjacent to the second auxiliary opening 202 in the first direction A1 is not prone to the undesirable phenomenon of warping.

[0107] Please refer to Figure 13, which is a schematic diagram of the structure of another mask plate provided in an embodiment of the present application. The mask plate 000 can have multiple functional openings 200c, which can be distributed around the periphery of the multiple opening areas 200a. It should be noted that the functions of the multiple functional openings 200c are the same as in the above embodiment and will not be repeated here.

[0108] In the embodiment of the present application, there are many possible situations for the distribution positions of the multiple functional openings 20c. The embodiment of the present application will be described using the following two possible situations as examples:

[0109] In the first possible scenario, as shown in FIG13 , the orthographic projection of the functional opening 200c in the mask plate 000 onto a reference plane parallel to the mask web 200 lies within the orthographic projection of the auxiliary opening 200b onto the reference plane. For example, when the distance E between the second auxiliary opening 202 and adjacent opening regions 200a distributed along the first direction A1 is less than the distance F between two adjacent opening regions 200a distributed along the first direction A1, this indicates that the distance E between the second auxiliary opening 202 and the adjacent opening regions 200a distributed along the first direction A1 is relatively small, and the functional opening 200c in the mask plate 000 cannot be located between the second auxiliary opening 202 and the adjacent opening regions 200a distributed along the first direction A1. In this case, the orthographic projection of the functional opening 200c onto the reference plane can lie within the orthographic projection of the second auxiliary opening 202 onto the reference plane. In other words, the functional opening 200c can lie within the second auxiliary opening 202.

[0110] Furthermore, in this case, the second shielding strips 302 may have functional openings 200c. Thus, the second shielding strips 302 can only shield the areas of the second auxiliary openings 202 not covered by the functional openings 200c, without shielding the areas where these functional openings 200c are located. This ensures that subsequent film deposition on the substrate can proceed normally based on these functional openings 200c.

[0111] For the second possible scenario, please refer to FIG14 , which is a schematic structural diagram of a mask provided in another embodiment of the present application. The functional opening 200c in the mask 000 is distributed between the auxiliary opening 200b and the adjacent opening area 200a. For example, when the distance E between the second auxiliary opening 202 and the opening area 200a adjacently distributed in the first direction A1 is approximately equal to the distance F between the two opening areas 200a adjacently distributed in the first direction A1, it indicates that the distance E between the second auxiliary opening 202 and the opening area 200a adjacently distributed in the first direction A1 is relatively large, so that the functional opening 200c in the mask 000 can be distributed between the second auxiliary opening 202 and the opening area 200a adjacent to the first direction A1.

[0112] Furthermore, in this case, the functional openings 200c may not be provided in the second shielding strip 302, and the orthographic projection of the second shielding strip 302 on the reference plane does not overlap with the orthographic projection of the functional openings 200c on the reference plane. This ensures that the second shielding strip 302 does not block the functional openings 200c, thereby ensuring that subsequent film deposition on the substrate can proceed normally based on the functional openings 200c.

[0113] For a third optional implementation, please refer to Figures 15 and 16. Figure 15 is a top view of a mask net provided in another embodiment of the present application, and Figure 16 is a schematic structural diagram of a mask plate provided in an embodiment of the present application that cooperates with the mask net shown in Figure 15. Referring to Figure 15, where the plurality of auxiliary openings 200b may include at least one row of first auxiliary openings 201 and at least one row of second auxiliary openings 202, the first auxiliary openings 201 may be arranged in a single row along the first direction A1 or in two rows along the first direction A1. The second auxiliary openings 202 may be arranged in a single row along the second direction A2 or in two rows along the second direction A2. Here, as shown in Figure 16, the mask plate 000 may include at least one first shielding strip 301 corresponding to the at least one row of first auxiliary openings 201 and at least one second shielding strip 302 corresponding to the at least one row of second auxiliary openings 202. The position and structural relationship of the plurality of auxiliary openings 200b and the plurality of shielding strips 300 can be referred to in the above embodiments and will not be further described here.

[0114] The above embodiments are schematically illustrated using mask plate 000 as a deposition mask. Specifically, after the material to be deposited passes through opening 200a in the deposition mask, a thin film can be deposited on the substrate. For example, the resulting thin film may include the first and second inorganic encapsulation layers of a display panel.

[0115] In other possible implementations, the mask in the above embodiment may also be an open mask. That is, a thin film can be deposited on a substrate using an evaporation process through such an open mask. For example, the thin film may include a light-emitting functional layer (e.g., a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer) and a cathode layer in a display panel.

[0116] In summary, the mask plate provided in the embodiment of the present application includes: an annular frame, a mask net and a shielding strip. By providing auxiliary openings located at the periphery of a plurality of opening areas on the mask net, and providing shielding strips to cover the auxiliary openings, it is possible to ensure that no additional film layer structure is formed on the substrate, while ensuring that the probability of warping defects occurring at the boundaries of the opening areas provided at the edges of the mask net is low. In this way, in the process of depositing a film on a substrate using such a mask plate, the material to be deposited can accurately pass through each opening area and be deposited on the substrate, so that the thin film formed in the substrate based on the deposition of each opening area does not contain redundant shadow parts, thereby making the accuracy of the thin film to be formed on the substrate higher, so as to ensure that the display panel obtained after the subsequent cutting of the substrate has a higher reliability.

[0117] The present application also provides a method for manufacturing a mask plate. The method is used to manufacture the mask plate in the above embodiment. The method may include the following steps:

[0118] Step S1: Form a mask net fixedly connected to the annular frame on one side of the annular frame. The mask net has a plurality of opening areas arranged in an array and auxiliary openings located outside the plurality of opening areas. The orthographic projections of the plurality of opening areas and the auxiliary openings on a reference plane parallel to the mask net are all located within the area enclosed by the orthographic projection of the annular frame on the reference plane.

[0119] For example, the mask net may be stretched by a stretching process first, and then the stretched mask net may be welded to one side of the annular frame by welding.

[0120] Step S2: forming a shielding strip on the side of the mask mesh facing away from the annular frame, wherein the shielding strip can cover the auxiliary opening.

[0121] For example, the shielding strips may be stretched using a stretching process, and then the stretched shielding strips may be welded to the side of the mask net facing away from the annular frame.

[0122] In the embodiments of the present application, the structural principles of the mask plate can refer to the embodiments described above for the structure of the mask plate, and the embodiments of the present application will not be repeated here.

[0123] In summary, the manufacturing method of the mask plate provided in the embodiment of the present application forms a mask net and a shielding strip on the annular frame in sequence. By providing auxiliary openings located at the periphery of multiple opening areas on the mask net, and providing shielding strips to cover the auxiliary openings, it is possible to ensure that no additional film layer structure is formed on the substrate, while ensuring that the probability of warping defects occurring at the boundaries of the opening areas provided at the edges of the mask net is low. In this way, in the process of depositing a film on a substrate using such a mask plate, the material to be deposited can accurately pass through each opening area and be deposited on the substrate, so that the thin film formed in the substrate based on the deposition of each opening area does not contain redundant shadow parts, thereby making the accuracy of the thin film to be formed on the substrate higher, so as to ensure that the display panel obtained after the subsequent cutting of the substrate has a higher reliability.

[0124] Embodiments of the present application also provide a display panel. This display panel can be an organic light-emitting diode (OLED) display panel or a quantum dot light-emitting diode (QLED) display panel. The display panel can include at least one functional film layer formed using the mask described in the above embodiments.

[0125] For example, a display panel may include: a driver backplane, multiple light-emitting devices located on one side of the driver backplane, and an encapsulation layer located on a side of the multiple light-emitting devices facing away from the driver backplane. The encapsulation layer includes: a first inorganic encapsulation layer, an organic encapsulation layer, and a second inorganic encapsulation layer stacked together. Both the first and second inorganic encapsulation layers may be formed using the mask plates described in the above embodiments.

[0126] It should be noted that in the accompanying drawings, the sizes of layers and regions may be exaggerated for clarity of illustration. It will also be understood that when an element or layer is referred to as being "on" another element or layer, it may be directly on the other element, or there may be an intermediate layer. In addition, it will be understood that when an element or layer is referred to as being "under" another element or layer, it may be directly under the other element, or there may be more than one intermediate layer or element. In addition, it will also be understood that when a layer or element is referred to as being "between" two layers or elements, it may be the only layer between the two layers or elements, or there may also be more than one intermediate layer or element. Similar reference numerals throughout the text indicate similar elements.

[0127] In this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. The term "plurality" refers to two or more than two, unless expressly limited otherwise.

[0128] The above description is merely an optional embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A mask plate, characterized in that: include: Ring frame; a mask net located at one side of the annular frame and fixedly connected to the annular frame, the mask net having a plurality of opening areas arranged in an array and auxiliary openings located at the periphery of the plurality of opening areas, and orthographic projections of the plurality of opening areas and the auxiliary openings on a reference plane parallel to the mask net are both located within an area enclosed by the orthographic projection of the annular frame on the reference plane; And, a shielding strip is located on a side of the mask net away from the annular frame, wherein the shielding strip covers the auxiliary opening.

2. The mask plate according to claim 1, characterized in that: The plurality of opening areas are arranged in a plurality of columns along the first direction, and are arranged in a plurality of rows along the second direction; The mask net has a plurality of the auxiliary openings, and the plurality of the auxiliary openings include: first auxiliary openings arranged in at least one row along the first direction, and / or second auxiliary openings arranged in at least one row along the second direction.

3. The mask plate according to claim 2, characterized in that: The number of the shielding strips is multiple, and the multiple shielding strips include: at least one first shielding strip arranged corresponding to at least one row of the first auxiliary openings, and / or, at least one second shielding strip arranged corresponding to at least one row of the second auxiliary openings; Among them, the extension direction of the first shielding strip is parallel to the first direction, and the first shielding strip covers a corresponding row of the first auxiliary openings; the extension direction of the second shielding strip is parallel to the second direction, and the second shielding strip covers a corresponding row of the second auxiliary openings.

4. The mask plate according to claim 3, characterized in that: In the case where the plurality of auxiliary openings include the at least one row of first auxiliary openings, a width of the first shielding strip in the second direction is greater than or equal to a width of the first auxiliary opening in the second direction; And / or, when the plurality of auxiliary openings include the at least one row of second auxiliary openings, a width of the second shielding strip in the first direction is greater than or equal to a width of the second auxiliary opening in the first direction.

5. The mask plate according to claim 3, characterized in that: The length of the first shielding strip in the first direction is greater than the width of the area surrounded by the annular frame in the first direction; And / or, the length of the second shielding strip in the second direction is greater than the width of the area enclosed by the annular frame in the second direction.

6. The mask plate according to claim 2, characterized in that: In the case where the plurality of auxiliary openings include the at least one row of first auxiliary openings, in the second direction, a distance between the first auxiliary opening and an adjacent opening area is less than or equal to a distance between two adjacent opening areas; And / or, when the plurality of auxiliary openings include the at least one row of second auxiliary openings, in the first direction, a distance between the second auxiliary opening and an adjacent opening area is less than or equal to a distance between two adjacent opening areas.

7. The mask plate according to claim 2, characterized in that: In the case where the plurality of auxiliary openings include the at least one row of first auxiliary openings, the number of first auxiliary openings in one row of the first auxiliary openings is the same as the number of opening areas in one row of the opening areas; And / or, in the case where the plurality of auxiliary openings include the at least one row of second auxiliary openings, the number of the second auxiliary openings in a row of the auxiliary openings is the same as the number of the opening areas in a column of the opening areas.

8. The mask plate according to claim 7, characterized in that: In the case where the plurality of auxiliary openings include two rows of the first auxiliary openings, the plurality of opening areas are arranged between the two rows of the first auxiliary openings in the second direction, and two first auxiliary openings are arranged on both sides of each column of the opening areas; And / or, when the plurality of auxiliary openings include two rows of the second auxiliary openings, the plurality of opening areas are arranged between the two rows of the second auxiliary openings in the first direction, and two second auxiliary openings are arranged on both sides of each row of the opening areas.

9. The mask plate according to claim 8, characterized in that: The length of the first auxiliary opening in the first direction is equal to the width of the opening area in the first direction; And / or, the length of the second auxiliary opening in the second direction is equal to the width of the opening area in the second direction.

10. The mask plate according to any one of claims 2 to 9, characterized in that: The width of the first auxiliary opening in the second direction is less than or equal to the width of the opening area in the second direction plus twice the distance between two adjacent opening areas in the second direction; And / or, the width of the second auxiliary opening in the first direction is less than or equal to the width of the opening area in the first direction plus twice the distance between two adjacent opening areas in the first direction.

11. The mask plate according to any one of claims 1 to 9, characterized in that: The mask plate has a plurality of functional openings, and the plurality of functional openings are distributed around the periphery of the plurality of opening areas.

12. The mask plate according to claim 11, characterized in that: When the orthographic projection of the functional opening on the reference plane is located within the orthographic projection of the auxiliary opening on the reference plane, the shielding strip has the functional opening.

13. The mask plate according to claim 11, characterized in that: When the functional opening is distributed between the auxiliary opening and the adjacent opening area, the orthographic projection of the shielding strip on the reference plane does not coincide with the orthographic projection of the functional opening on the reference plane.

14. The mask plate according to claim 11, characterized in that: The plurality of functional openings include: a plurality of alignment openings for aligning with the substrate to be deposited, and / or a plurality of detection openings for forming a test film layer on the substrate to be deposited.

15. A method for preparing a mask plate, characterized in that: The method comprises: A mask net fixedly connected to the annular frame is formed on one side of the annular frame, the mask net having a plurality of opening areas arranged in an array and auxiliary openings located at the periphery of the plurality of opening areas, and orthographic projections of the plurality of opening areas and the auxiliary openings on a reference plane parallel to the mask net are both located within an area enclosed by the orthographic projection of the annular frame on the reference plane; A shielding strip is formed on a side of the mask mesh away from the annular frame, and the shielding strip covers the auxiliary opening.

16. A display panel, characterized in that: The display panel comprises: at least one functional film layer, wherein the at least one functional film layer is formed based on the mask plate according to any one of claims 1 to 14.

17. The display panel according to claim 16, characterized in that: The display panel comprises: a driving backplane, a plurality of light emitting devices located on one side of the driving backplane, and an encapsulation layer located on a side of the plurality of light emitting devices away from the driving backplane; The encapsulation layer includes: a first inorganic encapsulation layer, an organic encapsulation layer, and a second inorganic encapsulation layer which are stacked, and the first inorganic encapsulation layer and the second inorganic encapsulation layer are both the functional film layers.

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