Coating carrier plate and coating apparatus

Abstract

The present application belongs to the field of solar cells. Disclosed are a coating carrier plate and a coating apparatus. A coating carrier plate, which is used for a coating apparatus, wherein the coating apparatus further comprises a jacking heat plate. The coating carrier plate comprises a frame and a tray, wherein the tray is fixedly arranged on the frame; and the frame comprises several ribs arranged in a criss-cross manner and conductive wrapping pieces, several conductive wrapping pieces being provided at the bottom of any one or more of the ribs. By means of the provision of the conductive wrapping pieces, the present application achieves good contact between the carrier plate and the jacking heat plate and improves the conductivity therebetween, and can withstand a high-power radio frequency current, thereby prolonging the service life of the apparatus and improving the quality of a coated product.

Description

Coating carrier and coating equipment Technical Field

[0001] The present application belongs to the technical field of solar cells and relates to coating processing, and specifically to a coating carrier and coating equipment. Background Art

[0002] Plate-type or capacitively coupled plasma-enhanced chemical vapor deposition (PECVD) vacuum coating lines utilize dynamic carrier motion and static coating. Coating lines typically consist of an inlet chamber, preheating chamber, process chamber, and outlet chamber. The carrier is driven by rollers through the inlet and preheating chambers before arriving at the process chamber. Power is supplied to generate plasma discharge for coating. The plate-type PECVD process chamber features a liftable aluminum heating plate and two upper and lower electrodes. The upper electrode is a flat plate, while the liftable heating plate serves as the grounded lower electrode. The capacitively coupled plasma-enhanced chemical vapor deposition process chamber features an upper electrode and a lower electrode, which forms a capacitively coupled discharge structure with the liftable heating plate and the coating carrier.

[0003] The carrier plate consists of a frame and a tray, secured together with screws and angle locks. A silicon wafer is placed on the carrier plate, which is then transported via rollers through a heating chamber, heating both the carrier plate and the wafer. Once the carrier plate and the wafer reach a desired temperature, they enter the process chamber. Once the carrier plate is in the chamber, a liftable heated aluminum plate lifts it off the transport rollers. The bottom of the carrier plate frame contacts the liftable heated aluminum plate, forming a lower electrode and a circuit with the upper electrode. When RF power is applied, a plasma glow discharge is generated between the upper and lower electrodes, dissociating the process gas within the chamber and depositing it onto the silicon wafer, achieving the desired coating.

[0004] However, during the heating and coating process, the bottom of the carrier's carbon fiber frame and the surface of the elevated heated aluminum plate can't fully contact each other, creating a gap that seriously affects conductivity. Furthermore, when high-power RF power is applied, the gap can easily cause discharges between the carrier frame and the heated aluminum plate. The arc instantly generates a large amount of heat, which can damage the carbon fiber carrier and the heated aluminum plate, shortening their lifespans and affecting the quality of the coated product. Therefore, increasing the conductivity of the carrier and heated aluminum plate has become an urgent issue to be addressed. Summary of the Invention

[0005] The present application aims to solve at least one of the technical problems in the above-mentioned related technologies to a certain extent.

[0006] To this end, the purpose of this application is to provide a coating carrier and coating equipment, which achieves good contact between the carrier and the lifting hot plate by setting a conductive wrapping sheet, improves the conductivity between the two, can withstand high-power RF power supply input, extend the service life of the equipment, and improve the quality of the coating products.

[0007] In order to solve the above technical problems, this application is implemented as follows:

[0008] The first aspect of the present application provides a coating carrier for coating equipment, the coating equipment also includes a lifting hot plate, the coating carrier includes a frame and a tray, the tray is fixed on the frame, and is characterized in that the frame includes a plurality of ribs and conductive wrapping sheets arranged in a criss-cross pattern, and at least one conductive wrapping sheet is provided at the bottom of any one or more of the ribs; after the lifting hot plate rises to a predetermined position, the bottom of the conductive wrapping sheet is in contact and connected with the upper surface of the lifting hot plate.

[0009] In addition, the coated carrier according to the present application may also have the following additional technical features:

[0010] In some embodiments, the conductive wrapping sheet is a U-shaped structure, with the opening facing upward and wrapped around the surface of the rib, and fixed to the rib.

[0011] In some embodiments, the conductive wrapping sheet is an L-shaped structure; the horizontal section of the L-shaped structure is wrapped around the lower surface of the rib, and the vertical section of the L-shaped structure is wrapped around the side surface of the rib and fixedly connected to the rib.

[0012] In some embodiments, a waist hole is provided on the side wall of the conductive wrapping sheet, and the waist hole is a vertically arranged long strip hole; the conductive wrapping sheet and the rib are adjustably locked and connected through the waist hole.

[0013] In some embodiments, the adjustable locking connection is specifically as follows: a bolt is provided in the waist hole, and the bolt is threadedly fastened to the screw hole provided on the rib; the setting position of the conductive package sheet relative to the rib is adjusted up and down by changing the locking position of the waist hole and the bolt.

[0014] In some embodiments, the number of conductive wraps provided on a single rib is 1-20.

[0015] In some embodiments, the conductive sheet is an aluminum sheet, the thickness of the aluminum sheet is 0.1-1 mm, and the sag of the aluminum sheet relative to the lower surface of the rib is 0-2 mm.

[0016] In some embodiments, the conductive wrapping sheet and conductive belt include a stainless steel inner belt and a conductive layer provided on a surface of the stainless steel inner belt.

[0017] In some embodiments, the conductive sheet is metal.

[0018] An embodiment of the present application also provides a coating device, which includes the coating carrier as described above.

[0019] A second aspect of the present application further provides a coating carrier for use in a coating device, comprising a carrier and a lifting hot plate, wherein the carrier comprises a frame and a tray, the tray being fixed to the frame, the frame comprising a plurality of ribs and conductive strips arranged in a crisscross pattern, and at least one conductive strip being provided between any two ribs;

[0020] The two ends of the conductive belt are fixedly connected to the corresponding ribs; the middle section of the conductive belt hangs down, and after the lifting hot plate rises to a predetermined position, it contacts and connects with the upper surface of the lifting hot plate.

[0021] In addition, the coated carrier according to the present application may also have the following additional technical features:

[0022] In some embodiments, the middle section of the conductive strip naturally droops, specifically: the distance between the lowest point of the conductive strip and the lower surface of the rib is 0.5-5 mm.

[0023] In some embodiments, the conductive tape is a long flexible tape structure.

[0024] In some embodiments, the conductive strip includes fixed areas at both ends and a sagging area in the middle, and the sagging area is partially or entirely located under the ribs.

[0025] In some embodiments, the conductive strip includes a stainless steel inner strip and a conductive coating provided on a surface of the stainless steel inner strip.

[0026] In some embodiments, the conductive tape is made of conductive metal.

[0027] In some embodiments, the conductive tape has a thickness of 0.1-1 mm.

[0028] In some embodiments, both ends of the conductive strip are fixed to the corresponding ribs via locking angle brackets or bolts.

[0029] In some embodiments, the number of the conductive strips provided between two adjacent ribs is 1-20.

[0030] An embodiment of the present application also provides a coating device, which includes the coating carrier as described above.

[0031] Compared with the prior art, the present invention has at least the following beneficial effects:

[0032] In the embodiment of the present application, the provided coating carrier plate achieves good contact between the carrier plate and the lifting hot plate by providing a conductive wrapping sheet, thereby improving the conductivity between the two, being able to withstand high-power RF power supply input, and not easily causing discharge between the carrier plate frame and the lifting hot plate, thereby avoiding damage to the carbon fiber carrier plate and the lifting hot plate by the large amount of heat generated instantaneously by the discharge arc, extending the service life of the carrier plate and the lifting hot plate, and improving the quality of the coating product.

[0033] In the embodiment of the present application, the provided coating carrier plate achieves good contact between the carrier plate and the lifting hot plate by providing a conductive tape, thereby improving the conductivity between the two, being able to withstand high-power RF power supply input, and not easily causing discharge between the carrier plate frame and the hot plate, thereby avoiding damage to the carbon fiber carrier plate and the lifting hot plate by the large amount of heat generated instantaneously by the discharge arc, extending the service life of the carrier plate and the lifting hot plate, and improving the quality of the coating product.

[0034] In the embodiment of the present application, the provided coating carrier is provided with a conductive wrapping sheet having an up and down adjustment function, which can adapt to various coating working conditions and ensure good contact between the carrier and the lifting hot plate.

[0035] The coating apparatus of the present application includes the coating carrier described above, and thus has at least all the features and advantages of the coating carrier described above, which will not be described in detail here. Additional aspects and advantages of the present application will be described in part in the following description, and in part will become apparent from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] FIG1 is a schematic diagram of a top view of a coating carrier disclosed in an embodiment of the present application;

[0037] FIG2 is a schematic diagram of the aluminum sheet assembly structure disclosed in an embodiment of the present application (side view);

[0038] FIG3 is a longitudinal cross-sectional view of the assembly structure of the U-shaped conductive wrap and ribs disclosed in an embodiment of the present application;

[0039] FIG4 is a longitudinal cross-sectional view of an L-shaped conductive wrap and rib assembly structure disclosed in an embodiment of the present application;

[0040] FIG5 is a schematic diagram of a top view of the coating carrier disclosed in an embodiment of the present application;

[0041] FIG6 is a schematic side view of the structure of the coating carrier (where the conductive tape is provided) disclosed in an embodiment of the present application;

[0042] FIG7 is a schematic diagram of the three-dimensional structure of the coating carrier (where the conductive tape is provided) disclosed in an embodiment of the present application;

[0043] FIG8 is a schematic structural diagram of a special-shaped conductive tape disclosed in an embodiment of the present application;

[0044] FIG9 is a schematic diagram of the assembly structure of the special-shaped conductive tape disclosed in an embodiment of the present application; wherein (a) is a bottom view and (b) is a three-dimensional view.

[0045] Description of reference numerals:

[0046] 1-guide rail; 2-rib; 3-conductive sheet; 4-bolt; 5-waist hole;

[0047] 10-frame ribs; 20-conductive tape; 30-locking angle bracket;

[0048] 21-Conductive belt fixing area; 22-Conductive belt sagging area; 23-Mounting screw hole. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0050] The embodiments of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0051] Please refer to FIG1 . In some embodiments of the present application, a coating carrier is provided, which can be used in coating equipment. For example, in the preparation process of solar cells, the process of coating the cell wafers is involved. During the coating process, a liftable heated aluminum plate is required to lift the carrier containing the silicon wafers to a suitable position for coating. In the lifted state, the upper surface of the heated aluminum plate will contact the lower surface of the carrier. The coating carrier can be used to achieve good contact between the heated aluminum plate and the carrier, and can be used to solve the problem in the prior art that the gap between the two leads to poor conductivity and easy arc discharge, thereby affecting the coating quality and the service life of the heated aluminum plate and the carrier. In addition, the coating carrier can also be used in other equipment or for other types of conductive contact needs. The embodiments of the present application do not impose specific restrictions on the specific use scenarios and working conditions of the coating carrier.

[0052] Specifically, the coated carrier plate comprises a carrier plate and a conductive wrapper 3. The carrier plate comprises a frame and a tray, which are secured together using screws and angle locks. The frame is made of carbon fiber and includes several crisscrossing carbon fiber ribs 2 and two transverse guide rails 1 (transverse refers to the horizontal direction as shown in Figure 1). The lower surfaces of the ribs 2 and guide rails 1 are both flat.

[0053] Among them, the guide bar 1 can be the ribs on both sides of the frame along the conveying direction of the conveying roller, which is used to carry the pallet; a number of ribs parallel to the two guide bars 1 are provided between them, and a number of ribs parallel to each other and perpendicular to the two guide bars are also provided; among them, the two vertical ribs 2 located at both ends of the guide bar are provided with a conductive wrapping sheet 3, and the conductive wrapping sheet 3 is used to contact and connect with the heating aluminum plate (also called jacking hot plate) of the jacking frame provided in the process chamber.

[0054] In some embodiments of the present application, the conductive wrapping piece 3 is a U-shaped structure, with its opening upwardly sleeved on the outer surface of the rib 2. Referring to Figures 2 and 3, the side wall of the U-shaped conductive wrapping piece 3 is provided with a waist hole 5, which is a vertically arranged elliptical or long strip. The bolt 4 is connected to the corresponding rib bolt through the waist hole 5, and the conductive wrapping piece 3 is fixed by tightening the bolt. The bottom wall of the U-shaped conductive wrapping piece 3 is in contact with the heated aluminum plate used for jacking; when the contact between the two is not good and needs to be adjusted, the locking position of the bolt and the waist hole 5 is adjusted by loosening the bolt 4, that is, loosening the bolt 4 and moving the conductive wrapping piece 3 up and down to the appropriate position, and then tightening the bolt 4 to fix the conductive wrapping piece 3 again, so that the position of the bottom wall of the conductive wrapping piece 3 is suitable for good contact with the heated aluminum plate. Due to the setting of the conductive wrapping sheet 3 of the present application, the conductive wrapping sheet is first contacted when the heated aluminum plate is lifted. The conductivity of the conductive wrapping sheet is higher than that of the carbon fiber ribs and is better, thereby reducing the poor conductivity due to gaps between the carrier plate and the heated aluminum plate, thereby further reducing arc discharge between the carrier plate and the heated aluminum plate during ignition, improving the quality of the coated product and the service life of the lifting hot plate (i.e., the heated aluminum plate) and the carrier plate.

[0055] Optionally, the conductive wrapping piece 3 can be a long U-shaped structure whose length matches the length of a single rib, or a short U-shaped structure. When the conductive wrapping piece 3 is a short U-shaped structure, one or more short conductive wrapping pieces are provided on a rib; specifically, the number of conductive wrapping pieces 3 provided on a single rib on each side is 1-20, and the number can be increased or decreased based on actual needs.

[0056] In the above embodiment, the conductive sheet 3 is an aluminum sheet with a thickness of 0.1-1 mm. The aluminum sheet can be adjusted to have a 0-2 mm sag relative to the lower surface of the rib through waist holes.

[0057] In other embodiments of the present application, the setting position of the conductive wrapping sheet 3 is not limited to the two vertical ribs located at both ends of the carrier as shown in Figure 1, but can also be any rib at any position of the carrier frame. The number can be increased as needed, or all ribs can be wrapped with conductive wrapping sheets.

[0058] In some embodiments of the present application, the material of the conductive wrapping sheet 3 is not limited to aluminum, but can also be any other conductive material, such as copper, iron, etc., as long as the conductivity is better than carbon fiber, so as to better reduce or eliminate arc discharge.

[0059] Optionally, the conductive wrapping sheet may be made of other conductive materials, and a conductive layer is provided on the surface of the conductive wrapping sheet. The conductive layer may be formed by spraying or plating.

[0060] In some embodiments of the present application, the conductive wrapping sheet 3 can be formed into the aforementioned U-shape or L-shape, as shown in Figure 4. Both sides of the U-shaped conductive wrapping sheet 3 are secured with bolts. The L-shaped conductive wrapping sheet is fixed to the side of the rib on one side, with its bottom flush with or at a certain distance from the bottom of the rib. Due to the effect of gravity, it sags slightly, allowing the conductive wrapping sheet to achieve better contact between the carrier rib and the heated aluminum plate.

[0061] As another specific embodiment of the present invention, please refer to FIG5 . In some embodiments of the present application, a coating carrier is provided, which can be used in coating equipment. For example, in the preparation process of solar cells, the process of coating the cell wafers is involved. During the coating process, a liftable heated aluminum plate is required to lift the carrier containing the silicon wafers to a suitable position for coating. In the lifted state, the upper surface of the heated aluminum plate will contact the lower surface of the carrier. The coating carrier can be used to achieve good contact between the heated aluminum plate (also called the lifting hot plate) and the carrier. It can be used to solve the problem in the prior art that the gap between the two leads to poor conductivity and easy arc discharge, thereby affecting the coating quality and the service life of the heated aluminum plate and the carrier. In addition, the coating carrier can also be used in other equipment or for other types of conductive contact requirements. The embodiments of the present application do not impose specific restrictions on the specific use scenarios and working conditions of the coating carrier.

[0062] Specifically, the coating carrier includes a carrier and a conductive tape 20. The carrier includes a frame and a tray, which are secured together using screws and angle locks. The frame is made of carbon fiber and includes several crisscrossing carbon fiber ribs 10, the lower surfaces of which are all flat.

[0063] Among them, the conductive belt 20 is a long strip structure, which is installed between the two ribs on the inner side of the carrier frame. Specifically, the conductive belt is installed between the first and second ribs on the left and right sides of the carrier, and the two ends of the conductive belt 20 are fixed to the corresponding ribs using locking angle codes 30. The length of the conductive belt 20 is greater than the distance between the two ribs, so that the middle section of the conductive belt 20 is drooped, which is convenient for achieving good contact and connection with the upper surface of the heated aluminum plate at the bottom for jacking.

[0064] In some embodiments of the present application, the lowest point of the conductive tape 20 exceeds the lower surface of the frame rib by 0.5-5 mm.

[0065] In some embodiments of the present application, the conductive strip 20 can be made of stainless steel plated with aluminum. Aluminum has good electrical conductivity and corrosion resistance, which can improve electrical conductivity. Stainless steel has good elasticity and flexibility. Therefore, when the heated aluminum plate below the carrier plate is lifted, the conductive strip 20 contacts the heated aluminum plate. The conductive strip's elasticity and flexibility facilitate surface contact with the lifted hot plate, significantly increasing the contact area between the carrier plate and the lifted hot plate, thereby increasing electrical conductivity between the two plates. When a high-power VHF power source is applied to the coating, arc discharge will not occur between the carrier plate and the lifted hot plate, thereby improving product quality and the service life of the lifted hot plate and the carrier plate.

[0066] In some embodiments of the present application, the thickness of the conductive tape 20 is between 0.1-1 mm.

[0067] Optionally, the arrangement position of the conductive strips 20 is not limited to the ribs shown in Figure 5, and a plurality of conductive strips 20 can be arranged between any two adjacent ribs. The number of conductive strips arranged between two adjacent ribs is 1-20.

[0068] In some of the aforementioned embodiments, as shown in Figures 6 and 7 , the locking angle bracket 3 is an L-shaped structure, comprising two perpendicular, end-connected right-angled plates. One of the right-angled plates (referred to as the first right-angled plate) is bolted to a rib running in the same direction as the conductive strip. The other right-angled plate (referred to as the second right-angled plate) is connected to a rib located at the end of the conductive strip (i.e., a rib running perpendicular to the strip's direction). Specifically, the bolt passes through the end of the strip and then threads onto the rib, securing the strip's end. Both ends of the conductive strip are secured using the aforementioned locking angle brackets.

[0069] Optionally, the number of bolts on the first right-angle plate is one, and the number of bolts on the second right-angle plate for fixing the end of the conductive strip is two.

[0070] In some embodiments of the present application, the two ends of the conductive belt 20 are not limited to being fixed to the corresponding ribs using locking angle brackets 30, and can also be fixed directly using bolts.

[0071] In other embodiments of the present application, the conductive strip 20 is a special-shaped conductive strip, as shown in FIG8 . The conductive strip 20 includes a conductive strip fixing area 21 and a conductive strip hanging area 22 . The special-shaped conductive strip has two conductive strip fixing areas 21, which are horizontally arranged at both ends of the conductive strip hanging area 22 ; the conductive strip hanging area 22 is also horizontally arranged and located below the two conductive strip fixing areas 21 . The conductive strip fixing areas 21 are provided with mounting screw holes 23 , which are rotatably connected to the corresponding ribs through the mounting screw holes 23 and the locking angle brackets 3 . The assembly structure of the special-shaped conductive strip is shown in FIG9 (a) and FIG9 (b). The locking angle brackets 30 are arranged crosswise with the conductive strip 20 , and the mounting screw holes 23 are rotatable relative to the locking angle brackets 30 and the ribs 10 , thereby making the height of the conductive strip 20 adjustable in real time to accommodate installation conditions at different heights.

[0072] In this embodiment, when the width of the conductive tape sagging area 22 is less than or equal to the width of the rib 10, the conductive tape sagging area 22 is completely located below the rib 10, and when the width of the conductive tape sagging area 22 is greater than the width of the rib 10, the conductive tape sagging area 22 is partially located below the rib 10. The above-mentioned setting method is conducive to the surface contact between the anisotropic conductive tape and the lifting hot plate. The rib 10 presses the anisotropic conductive tape sagging area 22 to the upper surface of the lifting hot plate, increasing the contact area between the carrier plate and the lifting hot plate, thereby increasing the conductivity between the carrier plate and the lifting hot plate.

[0073] Optionally, the material of the conductive strip is not limited to aluminum-plated stainless steel sheets, and may be other metal materials.

[0074] During operation, due to the setting of the conductive belt 20 of the present application, the conductive belt 20 is first contacted when the heated aluminum plate is lifted. The conductivity of the conductive belt 20 is higher than that of the carbon fiber ribs. As the heated aluminum plate is lifted higher, the contact area between the conductive belt and the heated aluminum plate becomes larger, and the conductivity becomes better, thereby reducing the poor conductivity due to gaps between the carrier plate and the heated aluminum plate, reducing arc discharge between the carrier plate and the heated aluminum plate during ignition, and improving the quality of the coated product and the service life of the heated aluminum plate and the carrier plate.

[0075] It should be noted that the specific structures and working principles of the temperature sensor, controller, etc. can all refer to the existing technology, and this embodiment does not limit this and will not be described in detail here.

[0076] Parts of the present invention that are not described in detail are well known to those skilled in the art.

[0077] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A coating carrier, used in a coating device, the coating device further comprising a lifting hot plate, the coating carrier comprising a frame and a tray, the tray being fixed on the frame, characterized in that: The frame includes a plurality of ribs and conductive wrapping sheets arranged in a crisscross pattern, and at least one conductive wrapping sheet is provided at the bottom of any one or more of the ribs; after the lifting hot plate rises to a predetermined position, the bottom of the conductive wrapping sheet is in contact and connected with the upper surface of the lifting hot plate.

2. The coating carrier according to claim 1, characterized in that: The conductive wrapping sheet is a U-shaped structure with an opening facing upwards and wrapped around the surface of the rib and fixedly connected to the rib.

3. The coating carrier according to claim 1, characterized in that: The conductive wrapping sheet is an L-shaped structure; the horizontal section of the L-shaped structure is wrapped around the lower surface of the rib, and the vertical section of the L-shaped structure is wrapped around the side surface of the rib and fixedly connected to the rib.

4. The coating carrier according to claim 1, characterized in that: A waist hole is provided on the side wall of the conductive wrapping sheet, and the waist hole is a vertically arranged long strip hole; the conductive wrapping sheet and the rib are adjustably locked and connected through the waist hole.

5. The coating carrier according to claim 4, characterized in that: The adjustable locking connection is specifically as follows: a bolt is provided in the waist hole, and the bolt is threadedly fastened to the screw hole provided on the rib; the setting position of the conductive package sheet relative to the rib is adjusted up and down by changing the locking position of the waist hole and the bolt.

6. The coating carrier according to claim 1, characterized in that: The number of conductive wrapping sheets arranged on a single rib is 1-20.

7. The coating carrier according to any one of claims 1 to 3, characterized in that: The conductive package sheet is an aluminum sheet, and the thickness of the aluminum sheet is 0.1-1 mm; the droop amount of the aluminum sheet relative to the lower surface of the rib is 0-2 mm.

8. The coating carrier according to claim 1, characterized in that: The conductive wrapping sheet and conductive belt include a stainless steel inner belt and a conductive layer arranged on the surface of the stainless steel inner belt.

9. The coating carrier according to claim 1, characterized in that: The conductive package sheet is made of metal.

10. A coating carrier, used in a coating device, the coating device further comprising a lifting hot plate, the coating carrier comprising a frame and a tray, the tray being fixed on the frame, characterized in that: The frame includes a plurality of ribs and conductive strips arranged in a crisscross pattern, and at least one conductive strip is provided between any two ribs; The two ends of the conductive belt are fixedly connected to the corresponding ribs; the middle section of the conductive belt hangs down, and after the lifting hot plate rises to a predetermined position, it contacts and connects with the upper surface of the lifting hot plate.

11. The coating carrier according to claim 10, characterized in that: The middle section of the conductive strip sags specifically when the distance between the lowest point of the conductive strip and the lower surface of the rib is 0.5-5 mm.

12. The coating carrier according to claim 10, characterized in that: The conductive tape is a long flexible tape structure.

13. The coating carrier according to claim 10, characterized in that: The conductive strip comprises fixed areas at two ends and a sagging area in the middle, and the sagging area is partially or completely located under the ribs.

14. The coating carrier according to claim 10, characterized in that: The conductive belt comprises a stainless steel inner belt and a conductive layer arranged on the surface of the stainless steel inner belt.

15. The coating carrier according to claim 10, characterized in that: The conductive tape is made of metal.

16. The coating carrier according to claim 10, characterized in that: The thickness of the conductive tape is 0.1-1 mm.

17. The coating carrier according to claim 10, characterized in that: The two ends of the conductive strip are fixedly connected to the corresponding ribs through locking angle brackets or bolts.

18. The coating carrier according to claim 10, characterized in that: The number of the conductive strips arranged between two adjacent ribs is 1-20.

19. A coating device, characterized in that: It comprises the coating carrier as claimed in claim 1.

20. A coating device, characterized in that: It comprises the coating carrier as claimed in claim 10.

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