Profiling apparatus

Abstract

A profiling apparatus (100) is provided with: a crimping tool (10); a swinging body (20) to which the crimping tool (10) is attached; an apparatus base (30); and a rotation stopping mechanism (50) for restricting rotation of the swinging body (20). The rotation stopping mechanism (50) is provided with a rotation stopping member (51). The rotation stopping member (51) has a groove defining part (54) defining a groove (54a) that opens toward a base end surface (30a). The groove defining part (54) is provided with a sealing surface (51b) that contacts or separates from the base end surface (30a). The apparatus base (30) is provided with a communication path (57) that can communicate with the groove (54a), and a suction port (36) that communicates with the communication path (57).

Description

Copying device

[0001] The present disclosure relates to a copying device.

[0002] Conventionally, copying devices are used in chip mounters that transport semiconductor chips onto lead frames of die bonding devices. The copying device includes a base having a concave hemispherical surface and a movable member that is an oscillator having a convex hemispherical surface. The copying device abuts the surface of the movable member against a reference surface of an object that the movable member is to copy. As the surface of the movable member abuts against the reference surface, the copying device rotates the movable member along the object, thereby making the movable member parallel to the object. In other words, the copying device performs an operation to copy the surface of the movable member to the object. During this operation, the movable member rotates around an X-axis and a Y-axis that are orthogonal to each other in the same plane.

[0003] The copying device disclosed in Patent Document 1 uses a rotation prevention device to prevent a movable member from rotating around a Z-axis that is perpendicular to a plane including the X-axis and the Y-axis. The rotation prevention device disclosed in Patent Document 1 includes a rotation prevention pin provided on the movable member and a side plate, and a pin insertion groove provided on a rotation prevention ring. The rotation prevention pin is engaged with the pin insertion groove. In the rotation prevention device disclosed in Patent Document 1, the rotation prevention ring is supported by a presser member and is interposed between the movable member mounted on a base and the presser member.

[0004] Patent No. 4713966

[0005] In the copying device, the movement of the anti-rotation ring between the movable member and the pressing member causes the base and the anti-rotation ring to come into sliding contact with each other, which may generate particles.

[0006] A copying device according to one aspect of the present disclosure includes a device base, a swinging body, a crimping tool, and a rotation-preventing mechanism. The device base includes a base end surface. The base end surface includes a base engagement surface that is either a concave spherical surface or a convex spherical surface. The swinging body is swingably attached to the device base and includes a swinging body engagement surface configured to engage with the base engagement surface, and a swinging body crimping surface different from the swinging body engagement surface. The crimping tool has a crimping tool swinging surface attached to the swinging body crimping surface, and a crimping tool abutment surface different from the crimping tool swinging surface. The rotation-preventing mechanism is configured to restrict rotation of the swinging body around a first axis perpendicular to the swinging body crimping surface. The rotation-preventing mechanism includes a rotation-preventing member, two protrusions, and two recesses. The anti-rotation member surrounds the oscillator around the first axis and is attached to the device base so as to be reciprocable in a first axial direction along which the first axis extends. The two protrusions are provided on the outer peripheral surface of the oscillator and are arranged side by side in a second axial direction along which a second axis perpendicular to the first axis extends. The two recesses are provided on the anti-rotation member and configured to engage with the two protrusions, respectively. The copying device oscillates the oscillator while restricting rotation of the oscillator with the anti-rotation mechanism, thereby making the crimping tool abutment surface parallel to a reference plane. The anti-rotation member has a groove defining portion that defines a groove that opens toward the base end face. The groove defining portion has a sealing surface that faces the base end face and contacts or separates from the base end face. The device base includes a communication passage and a suction port. The suction port, which is formed inside the device base so as to be able to communicate with the groove, communicates with the communication passage.

[0007] FIG. 1 is an exploded perspective view showing a copying apparatus. FIG. 2 is a cross-sectional view showing the copying apparatus of FIG. 1. FIG. 3 is a perspective view showing a rotation prevention member of FIG. 1. FIG. 4 is a view of the copying apparatus of FIG. 1 as seen in the axial direction of the apparatus base. FIG. 5 is a schematic view showing the operation of the copying apparatus of FIG. 1. FIG. 6 is a schematic view showing the operation of the copying apparatus of FIG. 1. FIG. 7 is a view of the copying apparatus of FIG. 1 as seen in the axial direction of the apparatus base. FIG. 8 is a view of the copying apparatus of FIG. 1 as seen in the axial direction of the apparatus base.

[0008] An embodiment of the copying device will be described below with reference to Figures 1 to 8. <Overall Image of the Copying Device> As shown in Figures 1 and 2, the copying device 100 includes a crimping tool 10, an oscillator 20, a device base 30, a locking mechanism 40, and an anti-rotation mechanism 50.

[0009] <Crimping Tool> As shown in Figure 2, the crimping tool 10 is a columnar body having a crimping tool contact surface 10a and a crimping tool oscillation surface 10b, which are both axial end surfaces. The central axis of the crimping tool 10 coincides with a first axis L1 extending in a first axial direction A1. The crimping tool contact surface 10a and the crimping tool oscillation surface 10b are aligned in the first axial direction A1. In other words, the crimping tool 10 has a crimping tool oscillation surface 10b, and also has a crimping tool contact surface 10a that is different from the crimping tool oscillation surface 10b.

[0010] The crimping tool 10 is attached to a swinging body 20. The crimping tool swinging surface 10b faces a swinging body crimping surface 20a (described later) and is attached to the swinging body crimping surface 20a. As shown in Fig. 5, the crimping tool abutment surface 10a faces a reference surface S (described later).

[0011] <Oscillator> The oscillator 20 will be described using Figures 1 and 2. The oscillator 20 is a columnar body. The oscillator 20 has an oscillator crimping surface 20a on a first end surface and an oscillator engagement surface 20b, which is a convex spherical surface, on a second end surface. The oscillator crimping surface 20a and the oscillator engagement surface 20b are aligned in the first axial direction A1. The central axis of the oscillator 20 coincides with the first axis L1. The first axis L1 is perpendicular to the oscillator crimping surface 20a. The crimping tool 10 is attached to the oscillator crimping surface 20a. As will be described later, the oscillator engagement surface 20b engages with the base engagement surface 301a. In other words, the oscillator 20 has an oscillator engagement surface 20b that engages with the base engagement surface 301a and an oscillator crimping surface 20a that is different from the oscillator engagement surface 20b.

[0012] The rocker 20 has a rocker inner circumferential surface 20c that defines a rocker insertion hole 21. The rocker insertion hole 21 opens at the rocker crimping surface 20a and the rocker engagement surface 20b. The rocker inner circumferential surface 20c connects the rocker crimping surface 20a and the rocker engagement surface 20b. The rocker 20 is a cylindrical body that extends from the rocker crimping surface 20a to the rocker engagement surface 20b.

[0013] The rocker 20 has a holding rocker end face 20d that is continuous with the rocker inner circumferential surface 20c. The holding rocker end face 20d is a concave spherical surface formed between the rocker crimping surface 20a and the rocker engagement surface 20b. The rocker insertion hole 21 includes a first portion and a second portion. The first portion is located between the holding rocker end face 20d and the rocker crimping surface 20a. The second portion is located between the holding rocker end face 20d and the rocker engagement surface 20b. The inner diameter of the first portion is larger than the inner diameter of the second portion. In other words, the rocker insertion hole 21 expands in diameter in the first axial direction A1 in the direction from the rocker engagement surface 20b toward the rocker crimping surface 20a.

[0014] The oscillator 20 has an oscillator outer peripheral surface 20e. The oscillator outer peripheral surface 20e is continuous with the oscillator crimping surface 20a and the oscillator engagement surface 20b. The second axis L2 shown in FIG. 4 is perpendicular to the first axis L1. The direction in which the second axis L2 extends is defined as the second axial direction A2. The oscillator 20 has two protrusions, namely, a first protrusion 23a and a second protrusion 23b. The first protrusion 23a and the second protrusion 23b are located on the oscillator outer peripheral surface 20e and extend in the second axial direction A2. The first protrusion 23a and the second protrusion 23b are located on opposite sides of the first axis L1. In other words, the first protrusion 23a and the second protrusion 23b are provided on the oscillator outer peripheral surface 20e of the oscillator 20 and are arranged side by side in the second axial direction A2.

[0015] As shown in Figures 5 and 6, the first protrusion 23a and the second protrusion 23b have a circular cross section when viewed from the second axial direction A2. <Device Base> As shown in Figures 1 and 2, the device base 30 is a quadrangular prism. The axial direction of the device base 30 is the direction in which the base axis LB of the device base 30 extends. The device base 30 has a base end surface 30a at a first axial end and a top plate installation surface 30b at a second axial end. The base end surface 30a includes a base engagement surface 301a which is a concave spherical surface. The top plate installation surface 30b is a surface different from the base end surface 30a and is located opposite the base end surface 30a. The portion of the base end surface 30a other than the base engagement surface 301a is parallel to the top plate installation surface 30b.

[0016] The rocker engagement surface 20b faces the base engagement surface 301a in the axial direction of the device base 30. The crimping tool 10, the rocker 20, and the device base 30 are aligned in the axial direction of the device base 30. The radius of curvature of the base engagement surface 301a matches the radius of curvature of the rocker engagement surface 20b. The rocker 20 can rock along the base engagement surface 301a. The rocker 20 is attached to the device base 30 so as to be able to rock.

[0017] The device base 30 has a base inner peripheral surface 30c. The base inner peripheral surface 30c defines a base engagement surface 301a and a base insertion hole 31 that opens at the top plate installation surface 30b. The base axis LB coincides with the central axis of the base insertion hole 31. The device base 30 has a base outer surface 30e composed of four surfaces. The base outer surface 30e extends between the outer edge of the base end surface 30a and the outer edge of the top plate installation surface 30b. The base engagement surface 301a is located inside the base end surface 30a when viewed in the axial direction of the device base 30.

[0018] The base inner peripheral surface 30c includes a first demarcated surface 301c and a second demarcated surface 302c. A base step surface 30d is provided between the first demarcated surface 301c and the second demarcated surface 302c. The base step surface 30d is perpendicular to the first demarcated surface 301c and the second demarcated surface 302c and is parallel to the top board installation surface 30b. The base step surface 30d faces the same direction as the top board installation surface 30b.

[0019] The first demarcation surface 301c extends from the base engagement surface 301a to the base step surface 30d in the direction of extension of the base axis LB. The second demarcation surface 302c extends from the top board installation surface 30b to the base step surface 30d in the direction of extension of the base axis LB. The inner diameter of the portion of the base insertion hole 31 defined by the first demarcation surface 301c is smaller than the inner diameter of the portion of the base insertion hole 31 defined by the second demarcation surface 302c. In other words, the diameter of the base insertion hole 31 increases from the base end surface 30a toward the top board installation surface 30b in the axial direction of the device base 30.

[0020] The base end surface 30a has a first base mounting hole H1 and a second base mounting hole H2 at two diagonally opposite corners of the four corners of the base end surface 30a. Almost the entire base engagement surface 301a is formed of an annular porous material 32. A plurality of holes are formed in the annular porous material 32. The device base 30 has an air bearing port 33 on the base outer surface 30e. An air bearing air supply / discharge chamber 34 is formed inside the device base 30. The air bearing air supply / discharge chamber 34 communicates with the air bearing port 33 and also communicates with the outside of the device base 30 via the annular porous material 32.

[0021] The device base 30 has a locking port 35 and a suction port 36 on the base outer surface 30e. The device base 30 also defines a communication passage 37 therein. When the base end surface 30a abuts against a rotation prevention member 51 (described later), the communication passage 37 connects the suction port 36 to a groove 54a (described later). The communication passage 37 has an opening 38 formed in the base end surface 30a. In other words, the copying device 100 has the communication passage 37 formed inside the device base 30 and capable of communicating with the groove 54a, and the suction port 36 that connects to the communication passage 37.

[0022] A top plate 60 is attached to the top plate installation surface 30b. The top plate 60 covers the opening of the base insertion hole 31 formed in the top plate installation surface 30b. <Locking Mechanism> As shown in Figures 1 and 2, the locking mechanism 40 includes a lock piston 41 and a lock shaft 42. The locking mechanism 40 also includes a magnet holding member 43, a magnet 44, a first seal 45, and a second seal 46.

[0023] The lock piston 41 has a disk-shaped piston body 411 and a male thread portion 412 extending from the center of the piston body 411. The axial direction of the lock piston 41 coincides with the axial direction of the device base 30. The lock piston 41 is housed in the base insertion hole 31 so as to be able to reciprocate in the axial direction of the device base 30 along the base inner circumferential surface 30c.

[0024] The lock piston outer peripheral surface 41c of the piston body 411 faces the second demarcating surface 302c. A second seal 46 is provided on the lock piston outer peripheral surface 41c. The second seal 46 seals between the second demarcating surface 302c and the lock piston outer peripheral surface 41c. The piston body 411 has a lock piston step surface 41d that faces the base step surface 30d in the axial direction of the device base 30. The lock piston step surface 41d faces the same direction as the base end surface 30a.

[0025] The axial direction of the lock shaft 42 coincides with the axial direction of the device base 30. The lock shaft 42 is housed in the base insertion hole 31. The lock shaft 42 can reciprocate integrally with the lock piston 41 in the axial direction of the device base 30.

[0026] The lock shaft 42 has a lock shaft insertion hole 42a that extends in the axial direction of the lock shaft 42. The lock shaft 42 has a female thread portion 421 on the inner circumferential surface that defines the lock shaft insertion hole 42a. The male thread portion 412 of the piston body 411 and the female thread portion 421 of the lock shaft 42 are threadedly engaged with each other.

[0027] The lock shaft 42 has a lock shaft extension portion 42b. The lock shaft extension portion 42b extends further than other portions of the lock shaft 42 in a direction perpendicular to the base axis LB. The lock shaft 42 has a lock shaft engagement surface 42c which is a convex spherical surface. The lock shaft engagement surface 42c faces the holding rocker end surface 20d of the rocker 20. The radius of curvature of the lock shaft engagement surface 42c matches the radius of curvature of the holding rocker end surface 20d which is a concave spherical surface. The lock shaft engagement surface 42c is engageable with the holding rocker end surface 20d.

[0028] The lock shaft 42 is inserted into the rocker insertion hole 21. The outer peripheral surface of the lock shaft 42 is spaced from the rocker inner peripheral surface 20c. The lock shaft extension 42b is housed in the rocker insertion hole 21 so that the lock shaft engagement surface 42c and the holding rocker end surface 20d face each other. In other words, the rocker 20 is provided at a position where the rocker engagement surface 20b and the base engagement surface 301a face each other so that the rocker 20 can rock relative to the lock shaft 42.

[0029] The magnet holding member 43 is fixed to the first demarcating surface 301c. The axial direction of the magnet holding member 43 coincides with the axial direction of the device base 30. The magnet holding member 43 is cylindrical. The magnet holding member 43 is located between the piston body 411 and the base end face 30a in the axial direction of the device base 30. The magnet holding member 43 has a magnet holding member end face 43b that faces the lock piston step surface 41d. The magnet holding member 43 holds the magnet 44 in a groove formed in the end face opposite the magnet holding member end face 43b in the axial direction of the device base 30.

[0030] The lock shaft 42 is inserted through the magnet holding member 43. The inner peripheral surface of the magnet holding member 43 faces the outer peripheral surface of the lock shaft 42. A groove is formed in the inner peripheral surface of the magnet holding member 43, and a first seal 45 is provided in the groove. The first seal 45 provides a seal between the magnet holding member 43 and the lock shaft 42.

[0031] The locking air chamber 48 is defined by the second defining surface 302c, the locking piston step surface 41d, the base step surface 30d, and the magnet holding member end surface 43b. The locking port 35 on the base outer surface 30e is in communication with the locking air chamber 48.

[0032] <Rotation-Prevention Mechanism> As shown in FIG. 1, the rotation-prevention mechanism 50 includes a rotation-prevention member 51 and a plurality of attachment pins, that is, a first attachment pin P1 and a second attachment pin P2.

[0033] As shown in FIG. 3 , the anti-rotation member 51 has a cylindrical anti-rotation body 52 and a flange portion 53 extending from the anti-rotation body 52. ​​As shown in FIG. 2 , the axial direction of the anti-rotation member 51 coincides with the axial direction of the device base 30. The anti-rotation body 52 has an anti-rotation inner circumferential surface 52b that defines an anti-rotation insertion hole 52a, and also has an anti-rotation outer circumferential surface 52c. The inner diameter of the anti-rotation body 52 is larger than the outer diameter of the oscillating body 20. The oscillating body 20 is inserted into the anti-rotation insertion hole 52a. The oscillating body 20 can oscillate along the base engagement surface 301a in the anti-rotation insertion hole 52a. The anti-rotation member 51 surrounds the oscillating body 20 around the first axis L1.

[0034] 2, a first axial end of the anti-rotation member 51 faces the base end surface 30a, and a second axial end of the anti-rotation member 51 does not face any other member. An anti-rotation inner peripheral surface 52b of the anti-rotation member 51 faces the oscillator outer peripheral surface 20e. The anti-rotation inner peripheral surface 52b is spaced from the oscillator outer peripheral surface 20e.

[0035] 2 and 3, the flange portion 53 extends from the end of the anti-rotation body 52 facing the base end face 30a. The flange portion 53 is perpendicular to the first axis L1 and extends in a direction from the anti-rotation inner circumferential surface 52b toward the anti-rotation outer circumferential surface 52c. The flange portion 53 faces the base end face 30a and extends in a direction perpendicular to the first axis L1. The flange portion 53 surrounds the anti-rotation body 52 all around.

[0036] The anti-rotation member 51 has a sealing surface 51b that faces the base end surface 30a. As will be described later, the sealing surface 51b can come into contact with or be separated from the base end surface 30a. The anti-rotation member 51 has an anti-rotation lower surface 51a, which is the end surface opposite the sealing surface 51b in the axial direction of the device base 30.

[0037] As shown in FIG. 1 , the anti-rotation member 51 has two recesses, a first recess 51c and a second recess 51d, on the anti-rotation lower surface 51a. The first recess 51c and the second recess 51d are recessed from the anti-rotation lower surface 51a in the axial direction of the anti-rotation member 51. The first recess 51c engages with the first protrusion 23a on the oscillator outer peripheral surface 20e, and the second recess 51d engages with the second protrusion 23b on the oscillator outer peripheral surface 20e. In other words, the anti-rotation member 51 has two recesses that engage with the two protrusions, respectively. As described above, the first protrusion 23a and the second protrusion 23b each have a circular cross section when viewed in the direction along the second axis L2. The swinging body 20 is capable of swinging along the base engaging surface 301a while the first protrusion 23a and the second protrusion 23b are in sliding contact with the first recessed portion 51c and the second recessed portion 51d, respectively.

[0038] The first recessed portion 51c and the second recessed portion 51d are open at the inner peripheral surface 52b and the outer peripheral surface 52c of the anti-rotation member 52. In other words, the first recessed portion 51c and the second recessed portion 51d each define a notch or groove that penetrates the anti-rotation member body 52 in the second axial direction A2. As a result, the first protrusion 23a and the second protrusion 23b can reciprocate in the first recessed portion 51c and the second recessed portion 51d, respectively, in the second axial direction A2.

[0039] The third axis L3 shown in Figure 4 is perpendicular to the first axis L1 and the second axis L2. The direction in which the third axis L3 extends is referred to as a third axial direction A3. As shown in Figure 3, the flange portion 53 has a first mounting hole defining portion 53a and a second mounting hole defining portion 53b extending in the third axial direction A3. The first mounting hole defining portion 53a and the second mounting hole defining portion 53b are located on opposite sides of the anti-rotation body 52 in the third axial direction A3.

[0040] As shown in FIGS. 1 and 3 , the first mounting hole defining portion 53a defines a first anti-rotation mounting hole H3, and the second mounting hole defining portion 53b defines a second anti-rotation mounting hole H4. The first anti-rotation mounting hole H3 penetrates the first mounting hole defining portion 53a in the first axial direction A1. The second anti-rotation mounting hole H4 penetrates the second mounting hole defining portion 53b in the first axial direction A1. That is, each of the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4, which are multiple mounting holes, is formed in the flange portion 53. The first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4 are elongated holes extending in the third axial direction A3. As shown in FIG. 1 , the first base mounting hole H1 and the first anti-rotation mounting hole H3 are aligned in the first axial direction A1. Furthermore, the second base mounting hole H2 and the second anti-rotation mounting hole H4 are aligned in the first axial direction A1.

[0041] As shown in FIG. 1 , the first mounting pin P1 has a first pin flange portion P11 and a first pin insertion portion P12. The first pin insertion portion P12 is cylindrical with a partially cut-out outer surface. The first pin flange portion P11 is disk-shaped. The diameter of the first pin flange portion P11 is larger than the opening width of the first anti-rotation mounting hole H3 in the short direction. The diameter of the first pin flange portion P11 is smaller than the opening width of the first anti-rotation mounting hole H3 in the long direction. Note that the diameter of the first pin flange portion P11 may be larger than the opening width of the first anti-rotation mounting hole H3 in the long direction.

[0042] The second mounting pin P2 has a second pin flange portion P21 and a second pin insertion portion P22. The second pin insertion portion P22 is cylindrical with a partially cut-out outer surface. The second pin flange portion P21 is disk-shaped. The diameter of the second pin flange portion P21 is larger than the opening width of the second anti-rotation mounting hole H4 in the short direction. The diameter of the second pin flange portion P21 is smaller than the opening width of the second anti-rotation mounting hole H4 in the long direction. Note that the diameter of the second pin flange portion P21 may be larger than the opening width of the second anti-rotation mounting hole H4 in the long direction.

[0043] The first pin insertion portion P12 of the first mounting pin P1 is inserted into the first anti-rotation mounting hole H3 and the first base mounting hole H1, and is fixed to the device base 30. Furthermore, the second pin insertion portion P22 of the second mounting pin P2 is inserted into the second anti-rotation mounting hole H4 and the second base mounting hole H2, and is fixed to the device base 30. In other words, the first mounting pin P1 and the second mounting pin P2 are each fixed to two of the four corners of the base end face 30a that are diagonally opposite each other.

[0044] The first mounting hole defining portion 53a is placed on the first pin flange portion P11, and the second mounting hole defining portion 53b is placed on the second pin flange portion P21. As a result, the anti-rotation member 51 is supported by the first mounting pin P1 and the second mounting pin P2. In other words, the anti-rotation member 51 is supported on the device base 30 by the first mounting pin P1 and the second mounting pin P2.

[0045] As shown in Figures 2, 5, and 6, the first mounting pin P1 is fixed to the device base 30 so that the first pin flange portion P11 and the first mounting hole defining portion 53a can come into contact with or separate from each other. The first mounting pin P1 is fixed to the device base 30 so that the anti-rotation member 51 can reciprocate along the first pin insertion portion P12. The second mounting pin P2 is fixed to the device base 30 so that the second pin flange portion P21 and the second mounting hole defining portion 53b can come into contact with or separate from each other. The second mounting pin P2 is fixed to the device base 30 so that the anti-rotation member 51 can reciprocate along the second pin insertion portion P22. In other words, the anti-rotation member 51 is attached to the device base 30 by the first mounting pin P1 and the second mounting pin P2 so that the seal surface 51b and the base end face 30a can come into contact with or separate from each other. The anti-rotation member 51 is reciprocatable along the first axis L1 relative to the base end surface 30a. In other words, the anti-rotation member 51 is attached to the device base 30 so as to be reciprocatable in the first axial direction A1 in which the first axis L1 extends.

[0046] Furthermore, as described above, the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4 are each an elongated hole extending in the third axial direction A3, so that the anti-rotation member 51 can reciprocate along the third axis L3 while in sliding contact with the first mounting pin P1 and the second mounting pin P2.

[0047] As shown in FIGS. 2 and 3 , the anti-rotation member 51, specifically the flange portion 53, has a groove-defining portion 54. The groove-defining portion 54 includes a first step 541 located on the outer circumferential edge of the flange portion 53 and a second step 542 located on the inner circumferential edge of the flange portion 53. The first step 541 is provided along the entire outer circumferential edge of the flange portion 53. The second step 542 extends along the entire inner circumferential edge of the flange portion 53 and is continuous with the anti-rotation inner circumferential surface 52b. The first step 541 is spaced apart from the second step 542 in a direction perpendicular to the first axial direction A1. The first step 541 is disposed around the second step 542 so as to surround the second step 542. The first step 541 is connected to the first mounting hole-defining portion 53a and the second mounting hole-defining portion 53b.

[0048] The anti-rotation member 51 has a groove 54a that opens toward the base end face 30a. The groove 54a is formed by a space surrounded by a first step 541, a second step 542, a first mounting hole defining portion 53a, and a second mounting hole defining portion 53b in the flange portion 53. Therefore, the first step 541, the second step 542, the first mounting hole defining portion 53a, and the second mounting hole defining portion 53b form a groove defining portion 54 that defines the groove 54a. In this way, the groove defining portion 54 defines the groove 54a that opens toward the base end face 30a.

[0049] Each of the first step portion 541 and the second step portion 542 has a step upper surface 54d that faces the base end face 30a. Each of the first mounting hole defining portion 53a and the second mounting hole defining portion 53b has a defining portion upper surface 53c that faces the base end face 30a. The step upper surface 54d and the defining portion upper surface 53c are located on the same plane. The step upper surface 54d and the defining portion upper surface 53c form the sealing surface 51b. In other words, the groove defining portion 54 has the sealing surface 51b that faces the base end face 30a.

[0050] Groove 54a is formed in flange 53 so as to extend around first axis L1. At the connection between first step 541 and first mounting hole defining portion 53a, groove 54a expands in the third axial direction A3 from second step 542 toward first step 541. At the connection between first step 541 and second mounting hole defining portion 53b, groove 54a expands in the third axial direction A3 from second step 542 toward first step 541. In other words, groove 54a has expanded groove portions 54c in portions adjacent to first anti-rotation mounting hole H3 and second anti-rotation mounting hole H4 that are expanded in a direction perpendicular to first axis L1 more than other portions of groove 54a.

[0051] As shown in FIGS. 1 to 4 , when the sealing surface 51b of the anti-rotation member 51 contacts the base end face 30a, the suction port 36 communicates with the groove 54a via the communication passage 37. The communication passage 37 is formed inside the device base 30 and has an opening 38 formed in the base end face 30a. As described above, the anti-rotation member 51 is reciprocable along the third axis L3. The opening 38 is provided in the base end face 30a so that the suction port 36 and the groove 54a can communicate with each other even when the anti-rotation member 51 moves in the third axis direction A3 as a result of the reciprocating movement. In other words, the opening 38 is aligned with the enlarged groove portion 54c in the first axis direction A1.

[0052] The sealing surface 51b will be described with reference to Figures 1 and 3. When air is sucked from the suction port 36 by a pressure supply source (not shown), the sealing surface 51b can block the flow of air between the groove portion 54a and the outside of the anti-rotation member 51. The sealing surface 51b and the base end surface 30a are configured to form a metal-to-metal seal between the sealing surface 51b and the base end surface 30a. This metal-to-metal seal is achieved, for example, by adjusting the surface roughness, etc., of the sealing surface 51b and the base end surface 30a. As long as the surface roughness, etc., can be adjusted, a metal-to-metal seal can be achieved regardless of the material of the sealing surface 51b.

[0053] 1 to 6, the copying operation of the copying apparatus 100 will be described. First, the copying operation when the reference surface S is inclined in the third axis direction A3 as shown in FIGS.

[0054] As shown in Fig. 5, the copying apparatus 100 is in an initial position. The copying apparatus 100 is attached to, for example, a transport apparatus (not shown). In the initial position of the copying apparatus 100, the crimping tool abutment surface 10a faces the reference plane S, and the crimping tool 10 is spaced apart from the reference plane S. In the initial position, the first axis L1, which is the axis of the crimping tool 10 and the oscillator 20, coincides with the base axis LB of the apparatus base 30. In the initial position, the reference plane axis LS, which extends in a direction perpendicular to the reference plane S, is not parallel to the first axis L1 and the base axis LB.

[0055] 1, 2, and 5, in the initial position, a pressure supply source (not shown) sucks air from the locking air chamber 48 through the locking port 35. As a result, the pressure supply source sets the supply pressure to the locking air chamber 48 to negative pressure. When the supply pressure is negative, the lock piston 41 is in a position in the axial direction of the device base 30 where a portion of the lock piston step surface 41d abuts against the base step surface 30d. In this case, the lock shaft extension portion 42b is in a position in the axial direction of the device base 30 where the holding rocker end surface 20d and the lock shaft engagement surface 42c are separated from each other.

[0056] In the initial position, a pressure supply source (not shown) supplies air to the air bearing port 33. The air is supplied between the base engagement surface 301a and the oscillator engagement surface 20b through the air bearing air supply / discharge chamber 34 and multiple holes formed in the annular porous material 32. Thus, the annular porous material 32 receives air supply from the air bearing port 33. This air supply pressurizes the gap between the oscillator engagement surface 20b and the base engagement surface 301a. As a result, the oscillator engagement surface 20b moves away from the base engagement surface 301a. At the same time, the oscillator 20 is attracted toward the base engagement surface 301a by the magnetic attraction of the magnet 44 held by the magnet holding member 43. As a result, a small gap is formed between the oscillator engagement surface 20b and the base engagement surface 301a, and this gap is maintained. Therefore, the device base 30 supports the swinging body 20 so that the swinging body 20 can swing relative to the device base 30 while being spaced apart from the base engagement surface 301a.

[0057] In the initial position, the suction port 36 is open to the atmosphere, and the anti-rotation member 51 is spaced apart from the base end face 30a. The anti-rotation member 51 spaced apart from the base end face 30a is supported by the first pin flange portion P11 and the second pin flange portion P21.

[0058] 6 , the copying apparatus 100 approaches the reference surface S along the base axis LB while maintaining a state in which the oscillating body 20 is able to oscillate along the base engagement surface 301 a. By approaching the reference surface S, the copying apparatus 100 presses the crimping tool abutment surface 10 a against the reference surface S. This pressing causes the oscillating body 20 to oscillate around the second axis L2 so as to oscillate along the reference surface S. As a result of this oscillation, the crimping tool abutment surface 10 a becomes parallel to the reference surface S, thereby achieving a parallel posture of the crimping tool 10 and the oscillating body 20.

[0059] FIG. 7 is a view of the copying apparatus 100 viewed from the base end surface 30a toward the top plate installation surface 30b. The axis LL2 in FIG. 7 indicates the position of the second axis L2 when the copying apparatus 100 is in the initial position. The oscillation of the crimping tool 10 and the oscillating body 20 in the third axis direction A3 induces movement of the first protrusion 23a and the second protrusion 23b in the third axis direction A3 in a plane perpendicular to the first axis L1. The movement of the first protrusion 23a and the second protrusion 23b induces movement of the anti-rotation member 51 in the third axis direction A3 in a plane perpendicular to the first axis L1. During this movement, the anti-rotation member 51 is restricted from rotating about the first axis L1 by the first mounting pin P1 and the second mounting pin P2. Furthermore, the first recessed portion 51c and the second recessed portion 51d of the anti-rotation member 51 are engaged with the first protrusion 23a and the second protrusion 23b of the oscillator 20, respectively. As a result, rotation of the oscillator 20 is restricted. In other words, the anti-rotation mechanism 50 restricts rotation of the oscillator 20 around the first axis L1 that is perpendicular to the oscillator crimping surface 20a. Therefore, the copying apparatus 100 makes the crimping tool abutment surface 10a parallel to the reference plane S by oscillating the oscillator 20 while restricting rotation of the oscillator 20 with the anti-rotation mechanism 50.

[0060] When the anti-rotation member 51 moves in the third axial direction A3 due to the swinging of the swing body 20, the relative positional relationship between the opening 38 and the groove 54a changes from the initial position. However, the groove enlargement 54c of the groove 54a still maintains communication between the suction port 36 and the groove 54a via the opening 38 and the communication passage 37.

[0061] Next, the copying operation when the reference surface S is inclined in the direction of the second axis L2 will be described with reference to Fig. 8. Note that the copying apparatus 100 in the initial position is as described above, and therefore, hereinafter, the operation of the anti-rotation member 51 in the process of the copying apparatus 100 pressing the crimping tool contact surface 10a against the reference surface S will be described.

[0062] FIG. 8 illustrates the copying apparatus 100 viewed from the base end surface 30a toward the top plate installation surface 30b when the reference plane S is tilted in the second axial direction A2. The axis LL3 in FIG. 8 indicates the position of the third axis L3 when the copying apparatus 100 is in the initial position. As shown in FIG. 8 , the oscillation of the crimping tool 10 and the oscillator 20 in the second axial direction A2 induces movement of the first protrusion 23a and the second protrusion 23b in the second axial direction A2 within a plane perpendicular to the first axis L1. The first protrusion 23a and the second protrusion 23b can reciprocate in the second axial direction A2 in the first recess 51c and the second recess 51d, respectively. The movement of the first protrusion 23a and the second protrusion 23b in the second axial direction A2 does not move the anti-rotation member 51 in the third axial direction A3.

[0063] The following describes a case where the inclination of the reference plane S is perpendicular to the first axis L1 and different from both the second axis A2 and the third axis A3. In this case, the oscillator 20 performs a motion in which the previously described oscillation around the second axis L2 and the oscillation around the third axis L3 are superimposed. In other words, even in this case, the anti-rotation member 51 restricts the rotation of the oscillator 20 around the first axis L1.

[0064] Therefore, the anti-rotation mechanism 50 restricts the rotation of the oscillating body 20 around the first axis L1 even when the inclination of the reference plane S is in a direction perpendicular to the first axis L1 and not in the second axis direction A2 or the third axis direction A3.

[0065] 1 to 3 and 6, the operation of the copying device 100 related to maintaining the parallel attitude of the oscillator 20 will be described. After realizing the parallel attitude of the crimping tool 10 and the oscillator 20, the copying device 100 performs the following operation.

[0066] After the crimping tool contact surface 10a becomes parallel to the reference plane S, the pressure supply source (not shown) stops supplying air to the air bearing port 33 and sucks air from the air bearing port 33. As a result, the annular porous material 32 receives air discharged from the air bearing port 33. That is, the pressure supply source sucks air through the air bearing port 33, thereby creating a negative pressure in the air bearing air supply / discharge chamber 34. As a result of the negative pressure in the air bearing air supply / discharge chamber 34, the oscillator engagement surface 20b of the oscillator 20 comes into contact with the base engagement surface 301a of the apparatus base 30, while maintaining the crimping tool contact surface 10a parallel to the reference plane S. The oscillator engagement surface 20b comes into contact with the base engagement surface 301a and is attracted to the base engagement surface 301a. As a result, the copying apparatus 100 performs a temporary lock that maintains the parallel orientation of the crimping tool contact surface 10a with respect to the reference plane S. That is, the copying apparatus 100 fixes the tilted posture of the oscillating body 20 by sucking air from the air bearing air supply / discharge chamber 34 through the air bearing port 33 .

[0067] After the copying apparatus 100 is temporarily locked, the pressure supply source sucks air through the suction port 36. The sealing surface 51b seals the gap between the anti-rotation member 51 and the apparatus base 30. As a result, the anti-rotation member 51 is sucked to the base end surface 30a. Movement of the anti-rotation member 51 relative to the apparatus base 30 is restricted.

[0068] After the temporary lock and the anti-rotation member 51 are attached to the base end face 30a, the pressure supply source switches the air pressure supplied to the locking port 35 from negative to positive. This pressurizes the locking air chamber 48, which communicates with the locking port 35. Pressurizing the locking air chamber 48 causes the lock piston 41 and the lock shaft 42 to move in the axial direction of the device base 30, from the base end face 30a toward the top plate installation surface 30b, as shown by the two-dot chain line in FIG. 2 . This movement causes the lock shaft 42 to pressurize the lock shaft engagement surface 42c against the holding rocker end face 20d. This pressing force firmly engages the lock shaft 42 and the rocker 20. As a result, the rocker 20 is pressed in the direction from the base end face 30a toward the top plate installation surface 30b. Due to the temporary lock, the rocker 20 abuts the rocker engagement surface 20b against the base engagement surface 301a. That is, the pressing force generates a normal force against the pressing force at the contact surface between the rocker engagement surface 20b and the base engagement surface 301a. The normal force generates a static friction force at the contact surface that prevents the rocker 20 from rocking relative to the device base 30. This limits the rocking of the rocker 20 and the crimping tool 10 relative to the device base 30. As a result of the locking air chamber 48 being pressurized by the pressure supply source, the copying apparatus 100 performs a final lock, which maintains the crimping tool contact surface 10a parallel to the reference plane S, in addition to the temporary lock. Therefore, the copying apparatus 100 maintains the parallel posture of the crimping tool 10 and the rocker 20 relative to the reference plane S by the temporary lock and the final lock.

[0069] The copying apparatus 100 is then moved from the location where the copying operation was performed by a transport device (not shown). [Operation of this embodiment] The operation of this embodiment will be described.

[0070] The copying device 100 presses the crimping tool abutment surface 10a against the reference surface S and swings the crimping tool 10 and the oscillating body 20 along the base engagement surface 301a, thereby adjusting the crimping tool abutment surface 10a so that it is parallel to the reference surface S. The anti-rotation member 51 included in the anti-rotation mechanism 50 is attached to the device base 30 by the first mounting pin P1 and the second mounting pin P2, and restricts rotation of the oscillating body 20 about the first axis L1 by engaging with the first protrusion 23a and the second protrusion 23b.

[0071] After the copying operation and temporary locking, the copying apparatus 100 uses the pressure supply source to suck air from the groove 54a via the suction port 36 and the communication passage 37. As a result, the copying apparatus 100 adsorbs the anti-rotation member 51 to the base end face 30a. This suction prevents the anti-rotation member 51 from sliding against the apparatus base 30 and the oscillator 20 when the copying apparatus 100 is moved by the transport apparatus after the copying operation. As a result, the copying apparatus 100 reduces the generation of particles.

[0072] [Effects of this embodiment] The effects of this embodiment will be described. (1) After adjusting the crimping tool contact surface 10a so that it is parallel to the reference surface S through the copying operation, the copying apparatus 100 uses the suction port 36 to suck air from the groove portion 54a. As a result, the copying apparatus 100 adsorbs the anti-rotation member 51 to the base end surface 30a. This vacuum suction prevents the anti-rotation member 51 from sliding against the apparatus base 30 and the oscillating body 20 when the copying apparatus 100 operates after the copying operation. As a result, the copying apparatus 100 can reduce particles that may be generated by the anti-rotation member 51 sliding against the apparatus base 30 and the oscillating body 20.

[0073] (2) The anti-rotation member 51 is attached to the base end face 30a by the first attachment pin P1 and the second attachment pin P2, aligned in the first axial direction A1. The anti-rotation member 51, the first attachment pin P1, and the second attachment pin P2 are housed within the cross section of the device base 30 as viewed in the direction in which the base axis LB extends. The anti-rotation member 51 is attached to the base end face 30a without adding any additional member for attaching the anti-rotation member 51 to the base outer surface 30e. As a result, the copying apparatus 100 is prevented from becoming larger in size in the direction perpendicular to the base axis LB. This allows the copying apparatus 100 to be made more compact.

[0074] (3) The metal-touch seal formed between the sealing surface 51b and the base end face 30a restricts the flow of air between the groove 54a of the anti-rotation member 51 and the outside of the anti-rotation member 51. The metal-touch seal enables sealing between the sealing surface 51b and the base end face 30a without providing a sealing member between the sealing surface 51b and the base end face 30a. As a result, the copying apparatus 100 can adsorb the anti-rotation member 51 to the apparatus base 30 without using a sealing member, which can be a source of particle generation.

[0075] (4) The groove 54a is formed with an enlarged groove portion 54c that is enlarged in a direction perpendicular to the first axis L1. The enlarged groove portion 54c allows the opening 38 and the groove 54a to remain in communication with each other even during the copying operation of the copying apparatus 100. As a result, even if the anti-rotation member 51 swings during the copying operation, the copying apparatus 100 can maintain the state in which the anti-rotation member 51 is attracted to the base end surface 30a.

[0076] (5) The base end surface 30a has a substantially rectangular shape when viewed in the direction in which the base axis LB extends. Of the four corners of the base end surface 30a, a first base mounting hole H1 and a second base mounting hole H2 are formed at two diagonally opposite corners. That is, the anti-rotation member 51 is attached to the base end surface 30a by a first mounting pin P1 and a second mounting pin P2 at two diagonally opposite corners of the base end surface 30a. As a result, the anti-rotation member 51 is accommodated within the cross section of the device base 30 as viewed in the direction in which the base axis LB extends. This prevents the anti-rotation member 51 from becoming a factor in increasing the size of the copying apparatus 100 in the direction perpendicular to the base axis LB. As a result, the copying apparatus 100 is made more compact.

[0077] [Modifications] The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other within the scope of technical compatibility.

[0078] The anti-rotation member 51 may have three or more first mounting holes and three or more mounting pins. For example, the flange portion 53 may have a portion that is perpendicular to the first axis L1 and extends in a direction different from the third axial direction A3, and the extending portion may define the third anti-rotation mounting hole.

[0079] The shape of the base end surface 30a of the device base 30 does not have to be approximately rectangular. For example, the base end surface 30a may be circular or hexagonal. The multiple mounting pins may be fixed to locations other than the two diagonal corners of the base end surface.

[0080] The enlarged groove portion 54c of the groove portion 54a does not have to be aligned with the opening 38 in the first axial direction A1. The groove portion 54a does not have to have the enlarged groove portion 54c. A metal-to-metal seal does not have to be formed between the seal surface 51b and the base end face 30a. In this case, the gap between the seal surface 51b and the base end face 30a may be sealed by a seal member provided on either the anti-rotation member 51 or the device base 30.

[0081] The anti-rotation member 51 does not have to include the flange portion 53, the anti-rotation mounting holes H3 and H4, and the mounting pins P1 and P2. For example, the anti-rotation member 51 may be attached to the device base 30 by a member attached to the base outer surface 30e.

[0082] The base engagement surface 301a may be a convex spherical surface. In this case, the oscillator engagement surface 20b is a concave spherical surface and has the same radius of curvature as the base engagement surface 301a. The enlarged groove portion 54c may be formed over the entire circumferential direction of the flange portion 53. In other words, the groove portion 54a may have the same width as the enlarged groove portion 54c at any point in the circumferential direction.

[0083] The groove 54 a does not have to be formed so as to extend completely around the first axis L1 in the flange 53. For example, the groove defining portion 54 may have a portion in the circumferential direction of the flange 53 where the first step 541 and the second step 542 are connected to each other so as to divide the groove 54 a.

Claims

1. An apparatus base having a base end surface including a base engagement surface which is either a concave spherical surface or a convex spherical surface; a rocker which is attached to the apparatus base so as to be able to swing, and has a rocker engagement surface configured to engage with the base engagement surface, and a rocker crimping surface different from the rocker engagement surface; a crimping tool which has a crimping tool rocking surface which is attached to the rocker crimping surface, and has a crimping tool abutment surface different from the crimping tool rocking surface; and a rotation prevention mechanism which is configured to restrict the rotation of the rocker around a first axis which is perpendicular to the rocker crimping surface, the rotation prevention mechanism comprising: a rotation prevention member which surrounds the rocker around the first axis, and which is attached to the apparatus base so as to be reciprocatable in a first axial direction along which the first axis extends; two protrusions which are provided on the outer circumferential surface of the rocker, and which are arranged side by side in a second axial direction along which a second axis which is perpendicular to the first axis extends; a copying device which makes the crimping tool abutment surface parallel to a reference plane by oscillating the oscillating body while restricting rotation of the oscillating body with the anti-rotation mechanism, wherein the anti-rotation member has a groove defining portion which defines a groove which opens toward the base end face, the groove defining portion having a sealing surface which faces the base end face and which contacts or is separated from the base end face, and the device base has a communication passage formed inside the device base so as to be able to communicate with the groove, and a suction port which communicates with the communication passage.

2. The copying device described in claim 1, wherein the anti-rotation member has a flange portion facing the base end face and extending in a direction perpendicular to the first axis, and a plurality of mounting holes penetrating the flange portion in the first axial direction, and the anti-rotation mechanism has a plurality of mounting pins that are respectively inserted into the mounting holes and fixed to the base end face to support the anti-rotation member, and the mounting holes are configured to allow the anti-rotation member to move relative to the mounting pins in a third axial direction along which a third axis extends perpendicular to the first axis and the second axis.

3. The copying device according to claim 1 or claim 2, wherein the sealing surface and the base end face are configured to form a metal-to-metal seal between the sealing surface and the base end face.

4. The copying device according to claim 2, wherein the groove portion has an enlarged groove portion in a portion adjacent to each of the plurality of mounting holes that is enlarged in a direction perpendicular to the first axis compared to other portions of the groove portion, and the communication passage has an opening formed in the end face of the base so as to be aligned with the enlarged groove portion in the first axial direction.

5. The copying device described in claim 2, wherein the plurality of mounting holes are two mounting holes, the plurality of mounting pins are two mounting pins, the base end face is approximately rectangular when viewed from the direction in which the first axis extends, and the two mounting pins are each fixed to two of the four corners of the base end face that are diagonally opposite each other.

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