Pulse shaping apparatus and pulse shaping method using same

Abstract

The present invention relates to a pulse shaping apparatus and a pulse shaping method using same and, more specifically, to a pulse shaping apparatus capable of shaping various types of pulses, and a pulse shaping method using same. The present invention provides the pulse shaping apparatus (10) comprising one or more power modules (M) for applying an output voltage (Vo) to both ends (L1, L2) of a load terminal (L), wherein the power module (M) comprises one or more first power modules (100) connected to one end (L1) of the load terminal (L) and one or more second power modules (200) connected to the other end (L2) of the load terminal (L), each of the first power module (100) and the second power module (200) comprises a step voltage application unit (ST) for applying a step voltage, and the first power module (100) and / or the second power module (200) further comprises a ramped voltage application unit (SL) for applying a ramped voltage.

Description

Pulse shaping device and pulse shaping method using the same

[0001] The present invention relates to a pulse shaping device and a pulse shaping method using the same, and more specifically, to a pulse shaping device capable of shaping pulses of various shapes and a pulse shaping method using the same.

[0002] In general, a high-voltage pulse generation circuit is a circuit required to supply pulse power to load devices that require high voltage, such as various test equipment or plasma generation devices (PSII, etc.).

[0003] One of the conventional pulse generation circuits can be configured to apply a pulse having a certain level of voltage to a load using a switch element and a charging capacitor.

[0004] However, conventional pulse generation circuits can only apply a pulse waveform of positive voltage to a load, and cannot apply a pulse waveform of negative voltage to a load. They also have the problem of not being able to adjust the voltage level of the applied pulse in various ways or form pulse waveforms of various shapes.

[0005] The purpose of the present invention is to provide a pulse shaping device capable of shaping a pulse waveform of negative voltage or pulse waveforms of various shapes at various voltage levels, and a pulse shaping method using the same, according to the above-mentioned problems.

[0006] In addition, the purpose of the present invention is to provide a pulse shaping device having a slope voltage application unit capable of shaping a pulse waveform in which a slope voltage is combined, and a pulse shaping method using the same.

[0007] The present invention was created to achieve the above-described purpose of the present invention, and discloses a pulse shaping device (10) including one or more power modules (M) for applying an output voltage (Vo) to both ends (L1, L2) of a load end (L).

[0008] The above power module (M) may include one or more first power modules (100) connected to one end (L1) of the load end (L) and one or more second power modules (200) connected to the other end (L2) of the load end (L).

[0009] The first power module (100) and the second power module (200) may each include a step voltage application unit (ST) for step voltage application.

[0010] At least one of the first power module (100) and the second power module (200) may further include a ramp voltage application unit (SL) for applying a ramp voltage.

[0011] The above step voltage application unit (ST) may include one or more voltage sources (Vs) and a plurality of switches (S1 to S2).

[0012] The step voltage application unit (ST) may include a first switch (S1) connected in series with the voltage source (Vs), and a second switch (S2) connected in parallel with the voltage source (Vs) and the first switch (S2).

[0013] The above-mentioned voltage application unit (SL) can be connected in series to the voltage source (Vs).

[0014] The above-mentioned ramp voltage applying unit (SL) is a ramp voltage applying capacitor (C) connected in series to the voltage source (Vs). SL ), the capacitor for applying the above-mentioned slope voltage (C SL ) for charging the constant current supply unit (CS), and the capacitor (C) for applying the slope voltage SL ) may include an energy discharge unit (ED) for discharging energy charged in the battery.

[0015] The above constant current supply unit (CS) is a capacitor (C) for applying the slope voltage SL ) may include a switch (Sa) and a diode (D) connected to both ends, and a current source (Is) connected to both ends of the switch (Sa).

[0016] The above constant current supply unit (CS) includes a rectifier (RF) for rectifying AC input, and a filter capacitor (C) for smoothing the output of the rectifier (RF) and supplying it to the current source (Is). link ) may be included.

[0017] The above energy discharge unit (ED) is a capacitor (C) for applying the slope voltage. SL ) may include a transformer (TR) and a switch (Sb) connected to both ends of the transformer (TR), and a diode (D) connected to the secondary coil of the transformer (TR) to limit the current direction.

[0018] The secondary coil of the above transformer (TR) is the filter capacitor (C link ) can be connected to.

[0019] The above first power module (100) is provided in multiple numbers, and the multiple first power modules (100) can be connected in series.

[0020] The second power module (200) is provided in multiple numbers, and the multiple second power modules (200) can be connected in series.

[0021] The above power module (M) may be provided in multiple numbers.

[0022] The above voltage source (Vs) may be a direct current voltage source.

[0023] The voltage sources (Vs) of the first power module (100) and the second power module (200) can be connected to the load terminal (L) with opposite poles.

[0024] It may further include a control unit that controls the on / off of the above switches (S1, S2, Sa, Sb).

[0025] In another aspect, the present invention discloses a pulse shaping method using a pulse shaping device (10).

[0026] The pulse shaping device according to the present invention and the pulse shaping method using the same have the advantage of being able to shape a pulse waveform of negative voltage or pulse waveforms of various shapes at various voltage levels.

[0027] In addition, the pulse shaping device according to the present invention and the pulse shaping method using the same have the advantage of being able to form a pulse waveform in which a gradient voltage is combined by including a gradient voltage applying unit.

[0028] FIG. 1 is a drawing showing a pulse shaping device according to one embodiment of the present invention.

[0029] Fig. 2 illustrates one embodiment of the pulse shaping device of Fig. 1.

[0030] Fig. 3 is a graph showing an example of a waveform of an output voltage that can be output according to the switch on / off control method provided in the pulse shaping device of Fig. 2.

[0031] Fig. 4 is a drawing showing the configuration of the slope voltage application unit of the pulse shaping device of Fig. 2.

[0032] Fig. 5 illustrates one embodiment of the slope voltage application unit of Fig. 4.

[0033] Fig. 6 is a graph showing a control method of switches provided in the pulse shaping device of Fig. 2 and the waveform of the output voltage according to the control method.

[0034] Fig. 7 is a graph explaining the principle of varying the slope of the slope voltage that constitutes the output voltage of Fig. 6.

[0035] FIG. 8a and FIG. 8b are diagrams illustrating examples of a pulse shaping device and output voltages that can be output according to one embodiment of the present invention.

[0036] FIG. 9a and FIG. 9b are diagrams illustrating examples of a pulse shaping device and output voltages that can be output according to another embodiment of the present invention.

[0037] FIGS. 10A and 10B are diagrams illustrating examples of a pulse shaping device and output voltages that can be output according to another embodiment of the present invention.

[0038] Figure 11a is a conceptual diagram illustrating a modified example of the pulse shaping device of Figure 2.

[0039] Fig. 11b is a graph showing an example of an output voltage that can be output from the pulse shaping device of Fig. 11a.

[0040] Hereinafter, a pulse shaping device according to the present invention will be described with reference to the attached drawings.

[0041] The pulse shaping device (10) according to the present invention may include one or more power modules (M) for applying an output voltage (Vo) to both ends (L1, L2) of the load end (L).

[0042] The output voltage (Vo) is the voltage applied between one end (L1) and the other end (L2) of the load end (L), and can have a waveform that is a combination of various step voltages and slope voltages.

[0043] Referring to FIG. 1, the power module (M) may include one or more first power modules (100) connected to one end (L1) of the load terminal (L) and one or more second power modules (200) connected to the other end (L2) of the load terminal (L).

[0044] The output voltage (Vo) applied to both ends (L1, L2) of the load end (L) of the pulse forming device (10) can be formed by the first power module (100) and the second power module (200).

[0045] The above first power module (100) is connected to one end (L1) of a load terminal (L) and serves as a power supply for applying a first voltage (V1) to the load terminal (L), and can be configured in various ways.

[0046] The above second power module (200) is connected to the other end (L2) of the load end (L) and is a power supply unit for applying a second voltage (V1) to the load end (L), and can be configured in various ways.

[0047] The first power module (100) and the second power module (200) may each include a step voltage application unit (ST) for step voltage application.

[0048] The above step voltage application unit (ST) may include one or more voltage sources (Vs) and a plurality of switches (S1 to S2). In this case, the voltage source (Vs) may be a direct current voltage source.

[0049] The above step voltage application unit (ST) can have various circuit structures as long as it can output a step-type voltage by controlling the on / off operation of multiple switches (S1 to S2).

[0050] For example, referring to FIG. 2, the step voltage application unit (ST) may include a first switch (S1) connected in series with the voltage source (Vs), and a second switch (S2) connected in parallel with the voltage source (Vs) and the first switch (S2).

[0051] When the first switch (S1) connected in series with the voltage source (Vs) is turned on and the second switch (S2) is turned off, the voltage (Va) of the voltage source (Vs) can be applied to the load terminal (L).

[0052] Conversely, when the first switch (S2) connected in series with the voltage source (Vs) is turned off and the second switch (S2) is turned on, the voltage (Va) of the voltage source (Vs) is not applied to the load terminal (L), so a step-shaped voltage can be applied to the load terminal (L) based on the switching point.

[0053] Since both the first power module (100) and the second power module (200) include a step voltage applying unit (ST), the step voltage by the step voltage applying unit (ST) of the first power module (100) and the step voltage by the step voltage applying unit (ST) of the second power module (200) can be combined to form a step shape of the output voltage (Vo).

[0054] The above-described plurality of switches (S1 to S2) are switching elements that can be independently turned on and off and can be configured in various ways. For example, the switches (S1 to S2) are power semiconductor elements, and can be various semiconductor elements such as SCR (Thyristor), TRIAC (Triode AC Switch), GTO (Gate turn-off thyristor), IGBT (Insulated Gate Bidirectional Transistor), MOSFET (Metal Oxide Semiconductor Field Effect Transistor), etc., and are not limited to a specific element.

[0055] Meanwhile, the switches (S1 to S2) may each include a capacitor (C) connected in parallel as an energy storage device. In addition, the switches (S1 to S2) may each include a diode connected in parallel, thereby ensuring the reliability of the on / off operation.

[0056] In addition, the switches (S1 to S2) are illustrated as semiconductor switch elements, such as MOSFETs, in FIG. 1, but are not limited thereto. If the switches (S1 to S1) are configured as MOSFET switches, they may have an advantage in that pulse rise and fall times can be reduced compared to IGBTs.

[0057] When the above switches (S1 to S2) are MOSFET elements, three terminals of a gate (G), a drain (D), and a source (S) are formed in the switches (S1 to S2), and can be turned on and off by a gate signal (SG) applied to the gate (G).

[0058] As another example, when the switches (S1 to S2) are IGBT elements, three terminals of a gate (G), a collector (C), and an emitter (E) are formed in the switches (S1 to S2), and can be turned on and off by a gate signal (SG) applied to the gate (G).

[0059] The above-described plurality of switches (S1 to S2) can be configured to be independently turned on and off, and the pulse shaping device (10) of the present invention can include a control unit for turning on and off the switches (S1, S2).

[0060] Additionally, at least one of the first power module (100) and the second power module (200) may further include a slope voltage application unit (SL) for applying a slope voltage.

[0061] The above-mentioned slope voltage application unit (SL) may be provided only in the first power module (100), or only in the second power module (200), or may be provided in both the first power module (100) and the second power module (200).

[0062] FIG. 2 and FIG. 8a illustrate a case where only the second power module (200) is equipped with a ramp voltage application unit (SL), FIG. 8b illustrates a case where only the first power module (100) is equipped with a ramp voltage application unit (SL), and FIG. 8c illustrates a case where both the first power module (100) and the second power module (200) are equipped with ramp voltage application units (SL).

[0063] The above-described ramp voltage applying unit (SL) can be connected in series with the voltage source (Vs) of the above-described step voltage applying unit (ST). Accordingly, when the first switch (S1) connected in series with the voltage source (Vs) is turned on, the ramp voltage by the ramp voltage applying unit (SL) can be added to the DC voltage by the voltage source (Vs) and applied to the load terminal (L).

[0064] The above-mentioned slope voltage application unit (SL) can be configured in various ways as long as it can form a voltage form that increases or decreases constantly over time with a voltage having a slope.

[0065] For example, the above-mentioned voltage-applying unit (SL) is a capacitor (C) for applying a voltage-applying ramp connected in series to the voltage source (Vs), as shown in FIGS. 4 and 5. SL ), the capacitor for applying the above-mentioned slope voltage (C SL) for charging the constant current supply unit (CS), and the capacitor (C) for applying the slope voltage SL ) may include an energy discharge unit (ED) for discharging energy charged in the battery.

[0066] Capacitor for applying the above-mentioned slope voltage (C) SL ) is a capacitor connected in series to a voltage source (Vs), and can form a voltage in the form of a slope by being linearly charged or discharged.

[0067] That is, the capacitor (C) for applying the above-mentioned slope voltage SL ) Voltage at both ends (V) SL ) is a capacitor (C SL ) During the charging process, a linearly increasing and slope-shaped slope voltage can be formed.

[0068] The above constant current supply unit (CS) is a capacitor (C) for applying the slope voltage. SL ) can be configured in various configurations for charging.

[0069] The above constant current supply unit (CS) supplies a constant current (I1) of a certain size to the capacitor (C). SL ) by supplying it to the capacitor (C SL ) increases steadily over time and the capacitor (C SL ) Voltage at both ends (V) SL ) can be increased at a constant slope.

[0070] For example, the constant current supply unit (CS) is, as shown in Fig. 5, a capacitor (C) for applying the slope voltage. SL ) may include a switch (Sa) and a diode (D) connected to both ends of the switch (Sa), and a current source (Is) connected to both ends of the switch (Sa).

[0071] The above switch (Sa) operates on and off the capacitor (C) SL ) the constant current (I1) of the current source (Is) is transferred to the capacitor (C SL) can be configured in various ways, and for example, it can be configured identically or similarly to the switches (S1, S2) of the step voltage application unit (ST) described above.

[0072] The above diode (D) is connected to the capacitor (C) from the current source (Is). SL ) to limit the direction of current flowing toward the capacitor (C) to one direction. SL ) can be charged at a constant rate.

[0073] The above current source (Is) is a current source that supplies a constant current (I1) of a certain size and is connected to both ends of the switch (Sa). Therefore, when the switch (Sa) is turned on, the constant current (I1) of the current source (Is) flows to the switch (Sa) and the capacitor (C SL ) does not flow, and when the switch (Sa) is turned off, the constant current (I1) of the current source (Is) passes through the diode (D) to the capacitor (C). SL ) can flow into the capacitor (C SL ) is charged linearly and the voltage across the two ends (V SL ) can also increase at a certain slope.

[0074] Referring to Fig. 5, the constant current supply unit (CS) includes a rectifier (RF) for rectifying an alternating current input (AC input), and a filter capacitor (C) for smoothing the output of the rectifier (RF) and supplying it to the current source (Is). link ) may be included.

[0075] The energy discharge unit (ED) above is a capacitor (C) for applying the slope voltage after applying the slope voltage. SL ) is a configuration for discharging energy charged in a capacitor (C SL ) can discharge the energy stored in it to the outside, various configurations are possible.

[0076] The above energy discharge unit (ED) is a capacitor (C) for applying the slope voltage. SL ) may be a discharge circuit connected to both ends.

[0077] The above energy discharge unit (ED) is a capacitor (C) for applying the slope voltage. SL ) may include a transformer (TR) and a switch (Sb) connected to both ends of the transformer (TR), and a diode (D) connected to the secondary coil of the transformer (TR) to limit the current direction.

[0078] The above switch (Sb) turns the capacitor (C) on and off through an on / off operation. SL ) to allow current to flow from the primary coil of the transformer (TR), and various configurations are possible, and for example, it can be configured identically or similarly to the switches (S1, S2) of the step voltage application unit (ST) described above.

[0079] The above capacitor (C SL ) is being charged, the switch (Sb) of the energy discharge unit (ED) is in the off state, so the capacitor (C SL ) is not discharged through the energy discharge unit (ED), but when the switch (Sb) is turned on, a current (I) flows to the primary coil of the transformer (TR) connected to the switch (Sb). TR ) flows through the capacitor (C) SL ) can begin to discharge the energy charged in it.

[0080] Current (I) in the primary coil of the above transformer (TR) TR ) can be induced in the secondary coil of the transformer (TR) which is mutually inductively coupled with the primary coil.

[0081] The above diode (D) is connected to the secondary coil of the transformer (TR) and acts as a capacitor (C) by limiting the direction of current flowing in the secondary coil. SL ) can be discharged.

[0082] At this time, the secondary coil of the transformer (TR) is the filter capacitor (C link ) can be connected to the filter capacitor (C) of the constant current supply unit (CS). link) is used to charge the battery, so that the energy can be recovered and utilized rather than being consumed and lost by the resistance.

[0083] Meanwhile, as illustrated in FIGS. 1 and 2, the first voltage (V1) of the first power module (100) and the second voltage (V2) of the second power module (200) may be connected to the load terminal (L) with opposite poles. The first power module (100) is connected in parallel to both ends (L1, L2) of the load terminal (L), and the second power module (200) is connected in series to both ends (L1, L2) of the load terminal (L). Consequently, in embodiments of the present invention, the output voltage (Vo) applied to the load terminal (L) may be the difference between the first voltage (V1) of the first power module (100) and the second voltage (V2) of the second power module (200). That is, the difference between the first voltage (V1) by the first power module (100) and the second voltage (V2) by the second power module can be applied to the load terminal (L) as the output voltage (Vo).

[0084] FIG. 3 illustrates a waveform of an output voltage (Vo) that can be formed in the pulse forming device (10) of FIG. 2, assuming that the first power module (100) includes a step voltage applying unit (ST) and the second power module (200) includes a step voltage applying unit (ST) and a ramp voltage applying unit (SL). At this time, if the voltage source (Vs) of the step voltage applying unit (ST) of the first power module (100) is a constant voltage source of Va and the voltage source (Vs) of the step voltage applying unit (ST) of the second power module (100) is a constant voltage source of Vb, an output voltage (Vo) waveform that combines a step voltage having voltage values ​​of Va and -Vb and a ramp voltage having a slope can be formed through on-off control of the switches (S1, S2, Sa, Sb) at each time point (t1 to t5).

[0085] FIG. 3 illustrates a case where the voltage source (Vs) of the step voltage application unit (ST) of the first power module (100) has a constant voltage value of Va and the voltage source (Vs) of the step voltage application unit (ST) of the second power module (100) has a constant voltage value of Vb, but Va and Vb may have the same size, and in this case, the slope voltage in the section between t2 and t3 may appear as a voltage form that starts at 0 V and decreases constantly.

[0086] The minimum value (Vc) of the output voltage (Vo) indicated by the above-described slope voltage may vary depending on the size of the constant current (I1) supplied from the above-described slope voltage application unit (SL), which will be described later.

[0087] Next, referring to Fig. 6, the on / off operation control of the switches (S1, S2, Sa, Sb) at each point in time in the pulse forming device (10) of Fig. 2 and the current (I1, I2, I3, I) within the device are controlled accordingly. TR ), and voltage (V SL , Vo, VTR) would like to explain in detail.

[0088] First, in FIG. 6, SG illustrates a gate signal according to time, and the gate signal can be controlled to turn on the first switch (S1) of the step voltage application unit (ST) of the first power module (100), the second switch (S3) of the step voltage application unit (ST) of the second power module (200), the switch (Sa) of the constant current supply unit (CS) and the switch (Sb) of the energy discharge unit (ED) in the on state in the section t1 to t2.

[0089] As a result, the constant current (I1) from the current source (Is) is applied to the capacitor (C) for applying the ramp voltage. SL ) and the current (I2) flowing through the switch (Sa) is equal to the constant current (I1), and the capacitor (C SL ) the current (I3) toward the terminal becomes 0.

[0090] Accordingly, in the t1~t2 interval, the capacitor (C SL ) voltage at both ends (V)SL ) is discharged through the energy discharge section (ED) and gradually decreases, and the voltage at both ends of the transformer (TR) (V TR ) is applied and current (I) is applied to the primary coil. TR ) flows through the secondary coil and the filter capacitor (C link ) can be charged.

[0091] In the case of the t1~t2 section, only the first voltage (V1) by the step voltage application unit (ST) of the first power module (100) is applied to the load terminal (L), so the output voltage (Vo) in the t1~t2 section can be expressed as a constant voltage of Va, which is the voltage value of the voltage source (Vs) of the first power module (100).

[0092] Next, in the t2 to t3 section, the gate signal can be controlled to turn off the second switch (S2) of the step voltage application unit (ST) of the first power module (100), the first switch (S1) of the step voltage application unit (ST) of the second power module (200), and the switch (Sa) of the constant current supply unit (CS), and to turn off the switch (Sb) of the energy discharge unit (ED).

[0093] In the t2~t3 section, only the second voltage (V2) by the step voltage application unit (ST) of the second power module (200) is applied to the load terminal (L) with the opposite polarity, so in the t2~t3 section, the output voltage (Vo) can be formed by adding Vb, which is the voltage value of the voltage source (Vs) of the second power module (100), and the slope voltage by the slope voltage application unit (SL).

[0094] That is, it can be seen that by appropriately controlling the on / off operation of the switches (S1, S2, Sa, Sb) of the first power module (100) and the second power module (200), the waveform of the desired output voltage (Vo) can be formed in various ways (combination of negative voltage, step voltage, multi-level voltage, and slope voltage).

[0095] Next, Fig. 7 is a graph explaining a method of varying the slope of a slope voltage applied by a slope voltage applying unit (SL) according to an embodiment of the present invention.

[0096] Referring to Figure 7, as the magnitude of the current (I1) coming from the current source (Is) increases from the solid line (K1) to the dotted line (K2), the capacitor (C) for applying the ramp voltage SL ) Capacitor for applying slope voltage during charging (C) SL ) also increases the current (I3) flowing through the capacitor (C) during the same time interval. SL ) increases the amount of charge charged to the capacitor (C SL ) voltage across both ends (V) SL ) increases (voltage (V) in the t2~t3 section SL ) increases from α1 to α2), resulting in a capacitor (C) for applying a slope voltage SL ) can be seen that the slope of the applied voltage increases from β1 to β2.

[0097] Accordingly, the present invention can control the slope of the applied ramp voltage differently by controlling the size of the current (I1) coming from the current source (Is) and can also adjust the minimum voltage value (Vc) formed by the ramp voltage.

[0098] Next, FIGS. 8a to 10b illustrate examples of output voltages (Vo) that can be formed according to various combinations of the first power module (100) and the second power module (200). Since FIGS. 8a and 8b are similar to the embodiment of FIG. 2 described above, a detailed description thereof will be omitted.

[0099] Fig. 9a illustrates an example in which, unlike Fig. 8a, the first power module (100) further includes a ramp voltage application unit (SL), and it can be seen that, similar to Fig. 8b, various waveforms in which step voltages and ramp voltages are variously combined can be formed.

[0100] FIG. 10a illustrates an example in which, unlike FIGS. 8a and 8b, both the first power module (100) and the second power module (200) further include a ramp voltage application unit (SL), and it can be seen that, similar to FIGS. 8b and 9b, various waveforms in which step voltages and ramp voltages are variously combined can be formed.

[0101] Meanwhile, in FIGS. 2, 4, and 5, the step voltage applying unit (ST) includes a single voltage source (Vs), but the present invention is not limited thereto, and it is of course possible to include a plurality of voltage sources (Vs) having the same or different voltage levels. In addition, the description is centered on one example of the step voltage applying unit (ST), and the arrangement or number of the voltage sources (Vs) and switches (S1, S2) of the step voltage applying unit (ST) of the present invention are not limited to the examples illustrated in the drawings.

[0102] Likewise, it is obvious that the on / off control method of the switches (S1, S1, Sa, Sb) described in Fig. 6 is exemplary and can be varied to obtain a desired waveform as needed. In addition, the on / off control method of the switches (S1, S1, Sa, Sb) to obtain the same waveform can also be varied.

[0103] Meanwhile, the first power module (100) described above may be provided in multiple numbers, and the multiple first power modules (100) may be connected in series. Similarly, the second power module (200) may also be provided in multiple numbers, and the multiple second power modules (200) may be connected in series with each other.

[0104] In this case, since the first power module (100) and the second power module (200) constitute one power module (M), the power modules (M) can be provided in multiple numbers, and accordingly, a pulse waveform of higher voltage can be formed, and an output voltage (Vo) that combines a step voltage and a slope voltage having a greater number of multi-levels, as shown in FIG. 11b, can be formed.

[0105] In another aspect, the present invention discloses a pulse shaping method using the pulse shaping device described above.

[0106] The pulse forming method may include a switching control step for controlling the on / off operation of switches (S1, S2, Sa, Sb) provided in the first power module (100) and the second power module (200), and an output step for outputting the difference between the first voltage (V1) by the first power module (100) and the second voltage (V2) by the second power module (200) as an output voltage (Vo) to be applied to the load terminal (L).

[0107]

[0108] The above is only a description of some of the preferred embodiments that can be implemented by the present invention, and as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the technical ideas of the present invention described above and the technical ideas underlying them are all included in the scope of the present invention.

Claims

1. A pulse shaping device (10) including one or more power modules (M) for applying an output voltage (Vo) to both ends (L1, L2) of a load (L), The above power module (M) includes one or more first power modules (100) connected to one end (L1) of the load end (L) and one or more second power modules (200) connected to the other end (L2) of the load end (L). The above first power module (100) and the above second power module (200) each include a step voltage applying unit (ST) for step voltage application, A pulse shaping device (10), characterized in that at least one of the first power module (100) and the second power module (200) further includes a ramp voltage applying unit (SL) for applying a ramp voltage.

2. In claim 1, A pulse shaping device (10), characterized in that the step voltage application unit (ST) includes one or more voltage sources (Vs) and a plurality of switches (S1 to S2).

3. In claim 2, A pulse shaping device (10), characterized in that the step voltage applying unit (ST) includes a first switch (S1) connected in series with the voltage source (Vs), and a second switch (S2) connected in parallel with the voltage source (Vs) and the first switch (S2).

4. In claim 3, A pulse shaping device (10) characterized in that the above-mentioned slope voltage applying unit (SL) is connected in series to the above-mentioned voltage source (Vs).

5. In claim 4, The above-mentioned ramp voltage applying unit (SL) is a ramp voltage applying capacitor (C) connected in series to the voltage source (Vs). SL ), the capacitor for applying the above-mentioned slope voltage (C) SL ) for charging the constant current supply unit (CS), and the capacitor (C) for applying the slope voltage SL ) A pulse shaping device (10) characterized by including an energy discharge unit (ED) for discharging energy charged in the device.

6. In claim 5, The above constant current supply unit (CS) is a capacitor (C) for applying the slope voltage. SL ) A pulse shaping device (10) characterized by including a switch (Sa) and a diode (D) connected to both ends, and a current source (Is) connected to both ends of the switch (Sa).

7. In claim 6, The above constant current supply unit (CS) includes a rectifier (RF) for rectifying AC input and a filter capacitor (C) for smoothing the output of the rectifier (RF) and supplying it to the current source (Is). link ) is further characterized by a pulse shaping device (10).

8. In claim 7, The above energy discharge unit (ED) is a capacitor (C) for applying the slope voltage. SL ) includes a transformer (TR) and a switch (Sb) connected to both ends of the transformer (TR), and a diode (D) connected to the secondary coil of the transformer (TR) to limit the current direction. The secondary coil of the above transformer (TR) is the filter capacitor (C link ) is characterized by being connected to a pulse shaping device (10).

9. In claim 1, The above first power module (100) is provided in multiples, A pulse shaping device (10) characterized in that the plurality of first power modules (100) are connected in series.

10. In claim 1, The above second power module (200) is provided in multiples. A pulse shaping device (10) characterized in that the above plurality of second power modules (200) are connected in series.

11. In claim 1, A pulse forming device (10) characterized in that the above power modules (M) are provided in multiple numbers.

12. In claim 2, The above voltage source (Vs) is a direct current voltage source, A pulse shaping device (10), characterized in that the voltage sources (Vs) of the first power module (100) and the second power module (200) are connected to the load terminal (L) with opposite poles.

13. In claim 8, A pulse shaping device (10) characterized by further including a control unit that controls the on / off of the above switches (S1, S2, Sa, Sb).

14. A pulse shaping method using a pulse shaping device (10) according to any one of claims 1 to 13.

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