Substrate manufacturing system

Abstract

A substrate manufacturing system (100) comprises: a self-propelled robot (1) that includes a robot arm (11), and a hand (14) which is attached to the tip of the robot arm and holds a substrate accommodation container (F) accommodating a substrate (C), and that holds and conveys the substrate accommodation container by means of the hand; an imaging unit (2) that is moved by the robot arm; and a substrate manufacturing device (3) to which the substrate accommodation container is conveyed by the self-propelled robot, the substrate manufacturing device including a state display unit (38) an image of which is captured by the imaging unit.

Description

PCB Manufacturing System

[0001] This disclosure relates to substrate manufacturing systems.

[0002] 2. Description of the Related Art Conventionally, substrate manufacturing apparatuses have been known.

[0003] Japanese Patent No. 6377918 discloses a substrate processing system including two load lock chambers, four processing chambers, one transfer chamber, and one substrate transfer robot. An interface serving as a substrate manufacturing apparatus for transferring substrates into and out of the substrate manufacturing apparatus is provided outside the load lock chamber. A cassette containing a plurality of substrates to be transferred into and out of the substrate processing system is disposed in the interface. The cassette is transported by a self-propelled vehicle.

[0004] Patent No. 6377918

[0005] In the interface described in the above-mentioned Japanese Patent No. 6377918, the status of the interface may be confirmed through communication because a mobile vehicle transports a cassette serving as a substrate container. However, it may be difficult to confirm the status of the interface through communication due to a communication abnormality. In this case, it is inconvenient that it is difficult to properly transport the substrate container to the interface serving as a substrate manufacturing apparatus. Therefore, it is desirable to properly transport the substrate container to the substrate manufacturing apparatus even when it is difficult to confirm the status of the substrate manufacturing apparatus through communication.

[0006] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a substrate manufacturing system that can properly transport substrate containers to a substrate manufacturing device even when it is difficult to confirm the status of the substrate manufacturing device through communication.

[0007] According to one aspect of this disclosure, a substrate manufacturing system includes a robot arm, a self-propelled robot including a hand attached to the tip of the robot arm and holding a substrate storage container that stores substrates, the self-propelled robot holding and transporting the substrate storage container with the hand, and a substrate manufacturing device including an imaging unit moved by the robot arm and a substrate manufacturing device status display unit that is imaged by the imaging unit, the substrate storage container being transported by the self-propelled robot.

[0008] As described above, a substrate manufacturing system according to one aspect of the present disclosure includes an imaging unit disposed on a robot arm, and a substrate manufacturing apparatus including a substrate manufacturing apparatus status display unit imaged by the imaging unit, to which a substrate housing container is transported by a self-propelled robot. This allows the self-propelled robot to check the status of the substrate manufacturing apparatus based on the image of the substrate manufacturing apparatus status display unit imaged by the imaging unit. As a result, even when it is difficult to check the status of the substrate manufacturing apparatus via communication, the self-propelled robot can check the status of the substrate manufacturing apparatus, thereby allowing the self-propelled robot to properly transport a substrate housing container to the substrate manufacturing apparatus.

[0009] According to the present disclosure, even when it is difficult to check the state of a substrate manufacturing apparatus through communication, it is possible to appropriately transport a substrate container to the substrate manufacturing apparatus.

[0010] FIG. 1 is a perspective view showing a self-propelled robot and a substrate manufacturing apparatus in a substrate manufacturing system according to an embodiment. FIG. 2 is a block diagram of a substrate manufacturing system according to an embodiment. FIG. 3 is a plan view showing a self-propelled robot and a substrate manufacturing apparatus in a clean room of a substrate manufacturing system according to an embodiment. FIG. 4 is a diagram showing a block configuration of a self-propelled robot arranged in a clean room of a substrate manufacturing system according to an embodiment, and a terminal arranged in a monitoring room. FIG. 5 is a perspective view showing a status display unit of a substrate manufacturing apparatus in a substrate manufacturing system according to an embodiment. FIG. 6 is a diagram for explaining an operation of imaging the inside of a substrate manufacturing apparatus by a self-propelled robot in a substrate manufacturing system according to an embodiment. FIG. 7 is a diagram for explaining an operation of operating an operation device of a substrate manufacturing apparatus by a self-propelled robot in a substrate manufacturing system according to an embodiment.

[0011] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings.

[0012] A substrate manufacturing system 100 according to one embodiment will be described with reference to FIGS.

[0013] 1, the substrate manufacturing system 100 includes a self-propelled robot 1 and an imaging unit 2. The substrate manufacturing system 100 also includes a substrate manufacturing apparatus 3 for manufacturing a substrate C.

[0014] In the drawings, the front-to-back direction relative to the substrate manufacturing apparatus 3 is indicated by the X direction, the front is indicated by the X1 direction, and the rear is indicated by the X2 direction. The left-to-right direction relative to the substrate manufacturing apparatus 3 is indicated by the Y direction, the left is indicated by the Y1 direction, and the right is indicated by the Y2 direction. The up-down direction is indicated by the Z direction, the top is indicated by the Z1 direction, and the bottom is indicated by the Z2 direction.

[0015] Both the substrate manufacturing apparatus 3 and the self-propelled robot 1 are located within the clean room CR. The substrate manufacturing apparatus 3 and the self-propelled robot 1 can be operated remotely by an operator in a monitoring room MR or the like outside the clean room CR, or can be operated directly by an operator who enters the clean room CR wearing dustproof clothing.

[0016] The self-propelled robot 1 includes a robot arm 11 and transports a substrate housing container F that houses a plurality of substrates C. The substrate housing container F is, for example, a so-called FOUP (Front-Opening Unified Pod), which is a dedicated container for transporting and storing wafers, which are substrates C.

[0017] The imaging unit 2 is disposed on the robot arm 11. The imaging unit 2 captures an image of the substrate housing container F when the self-propelled robot 1 transports the substrate housing container F.

[0018] In the substrate manufacturing apparatus 3, a substrate storage container F is transported by a self-propelled robot 1. The substrate manufacturing apparatus 3 is a substrate transport apparatus that transports substrates C without processing the substrates C. The substrate manufacturing apparatus 3 is, for example, a so-called EFEM (Equipment Front End Module). The substrate manufacturing apparatus 3 includes a substrate transport chamber 33 and a substrate transport robot 34 disposed inside the substrate transport chamber 33. The substrate transport robot 34 transports substrates C between the substrate storage container F and the substrate processing apparatus 8 via the substrate transport chamber 33. The substrate transport robot 34 is an apparatus that transfers substrates C between the substrate storage container F and the substrate processing apparatus 8. The substrate processing apparatus 8 is disposed adjacent to the rear side (X2 direction side) of the substrate manufacturing apparatus 3.

[0019] As shown in FIGS. 2 and 4, the substrate manufacturing system 100 also includes a terminal 5 having a display unit 5 a and a remote control unit 6 that receives operation instructions for driving the self-propelled robot 1 .

[0020] In principle, the terminal 5 and the remote control unit 6 are located outside the clean room CR. The terminal 5 is located, for example, in a monitoring room MR for monitoring the status of the clean room CR. The terminal 5 is a desktop personal computer having a display as the display unit 5a. The terminal may also be a laptop computer, an information terminal with a touch panel, a tablet terminal, a smartphone, etc. The display unit 5a displays moving images captured by the imaging unit 2. The terminal 5 has a communication unit for communicating with the communication unit 15 (described later) of the self-propelled robot 1 and the communication unit 36 ​​(described later) of the substrate manufacturing apparatus 3.

[0021] Remote control unit 6 includes, for example, a stick operation unit 6a such as a joystick. Remote control unit 6 is connected to terminal 5 and transmits operation instructions to self-propelled robot 1 via terminal 5. Note that the remote control unit may transmit operation instructions directly to the self-propelled robot without using a terminal.

[0022] The substrate manufacturing system 100 also includes an operation touch panel 7 that accepts input operations related to the substrate manufacturing apparatus 3. The operation touch panel 7 is disposed near the substrate manufacturing apparatus 3. The operation touch panel 7 is, for example, installed on a stand 70 beside the substrate manufacturing apparatus 3, and is disposed near a second side wall 31b described below.

[0023] (Detailed configuration of self-propelled robot) As shown in Figures 1 to 3, the self-propelled robot 1 includes a box-shaped housing 10, a robot arm 11 installed on the top of the housing 10, a moving unit 12 installed on the bottom of the housing 10, a bracket 2a, a hand attachment unit 13, a hand 14, a communication unit 15, and a control unit 16.

[0024] The housing 10 has a rectangular top surface 10a. The top surface 10a is used as a support surface on which a substrate container F and the like are placed. The housing 10 has a slide base 110 that can be pulled out horizontally to expand the area of ​​the top surface 10a. The robot arm 11 of the self-propelled robot 1 is a vertically articulated arm. The robot arm 11 can be driven to freely change the positions of the imaging unit 2 and the hand 14. The moving unit 12 has multiple wheels 12a that rotate while supporting the housing 10 from below, and a servo motor that drives the multiple wheels 12a. In principle, the moving unit 12 moves the self-propelled robot 1 linearly along the longitudinal direction of the housing 10. Furthermore, the moving unit 12 rotates while maintaining its position when changing its direction of movement. The moving unit 12 is a so-called AGV (Automatic Guided Vehicle), which is a traveling device that moves autonomously along a predetermined route while detecting obstacles in the vicinity to avoid colliding with them.

[0025] The bracket 2a is attached to the tip of the robot arm 11. The hand attachment unit 13 is attached to the bracket 2a. The hand attachment unit 13 is a so-called tool changer for interchangeably attaching various hands 14. The hand attachment unit 13 is attached to the tip of the robot arm 11 via the bracket 2a.

[0026] The hand 14 is replaceably attached to the hand attachment portion 13. The hand 14 is attached to the tip of the robot arm 11 via the bracket 2a and the hand attachment portion 13. The hand 14 includes a holding hand 14a that holds a substrate container F that houses a substrate C. Specifically, the holding hand 14a has a pair of rod-shaped members for holding the substrate container F. The self-propelled robot 1 holds and transports the substrate container F using the holding hand 14a. The holding hand 14a holds the substrate container F by sandwiching a protrusion F1 located at the upper end of the substrate container F by bringing the pair of rod-shaped members close to each other. Other types of hands 14 include an operating hand 14b (see FIG. 7 ) that has a touch operation portion 141 for operating a touch panel and a suction hand that has a suction portion for suctioning the substrate C. The self-propelled robot 1 moves to a hand storage cabinet that stores various types of hands 14 and automatically replaces the hand 14, even when no operator is present. In other words, the self-propelled robot 1 performs what is known as an auto-tool change.

[0027] The communication unit 15 is a wireless communication unit. The communication unit 15 transmits and receives various information to and from the terminal 5. Specifically, the communication unit 15 transmits image information D1 captured by the imaging unit 2 to the terminal 5. The communication unit 15 also receives operation instructions from the remote control unit 6.

[0028] The control unit 16 is a robot controller that controls the operation of each part of the self-propelled robot 1. The control unit 16 includes, for example, a calculation device such as a central processing unit (CPU). The control unit 16 also includes memory such as a random access memory (RAM) and a read-only memory (ROM), and a storage device such as a hard disk. The control unit 16 executes control processing using the calculation device based on programs and parameters stored in the storage device. In detail, the control unit 16 controls the operation of the robot arm 11, the hand 14, and the moving unit 12. The control unit 16 also controls the operation of the imaging unit 2. The control unit 16 acquires image information D1 captured by the imaging unit 2 and transmits it to the terminal 5 via the communication unit 15. The control unit of the self-propelled robot may be configured as an integrated robot controller that controls the robot arm, hand, moving unit, imaging unit, etc., or may be configured as separate controllers for each of the components: robot arm, hand, moving unit, imaging unit, etc. The self-propelled robot may also be equipped with an integrated robot controller that controls the robot arm, hand, and moving unit, and the imaging unit may be equipped with a dedicated controller that is separate from the robot controller of the self-propelled robot.

[0029] (Detailed Configuration of Imaging Unit) As shown in FIGS. 1 to 3, the imaging unit 2 is moved by the robot arm 11. The imaging unit 2 is a camera having an image sensor that captures moving images and still images. The imaging unit 2 is attached to a bracket 2a. The imaging unit 2 is attached to the tip of the robot arm 11 via the bracket 2a. Therefore, when replacing the hand 14, there is no need to remove the imaging unit 2, and the attached state to the robot arm 11 is maintained.

[0030] When the substrate housing container F is held by the holding hand 14a at the tip of the robot arm 11, the imaging unit 2 images the substrate housing container F in order to correct the position of the holding hand 14a with respect to the substrate housing container F. The imaging unit 2 also images the interior of the substrate manufacturing apparatus 3 in order to check for abnormalities in the substrates C inside the substrate manufacturing apparatus 3. The imaging unit 2 is communicatively connected to the control unit 16 wirelessly or via a cable, and transmits image information D1 to the terminal 5 via the control unit 16.

[0031] 1 to 3, the substrate manufacturing apparatus 3 includes a mounting table 30 for a substrate storage container F, a box-shaped housing 31, a window 32, a substrate transfer chamber 33 which is the internal space of the housing 31, a substrate transfer robot 34, an abnormality detection unit 35, a communication unit 36, a control unit 37, and a status display unit 38. The status display unit 38 is an example of a manufacturing apparatus status display unit.

[0032] Two mounting tables 30 are disposed outside the housing 31, in front of the housing 31. The two mounting tables 30 are spaced apart in the left-right direction (Y direction). A substrate container F is placed on the mounting tables 30 by the self-propelled robot 1. The substrate container F on the mounting tables 30 is moved by the self-propelled robot 1 after processing by the substrate manufacturing apparatus 3. The interior of the housing 31 (substrate transfer chamber 33) is filled with nitrogen and sealed. The housing 31 has a wide shape that is longer in the left-right direction (Y direction) than in the front-back direction (X direction). The housing 31 has a first sidewall 31a and a second sidewall 31b that is different from the first sidewall 31a. The first sidewall 31a is a sidewall on the front (X1 direction) of the housing 31 and is disposed along the mounting tables 30. The second sidewall 31b is a sidewall on the left (Y1 direction) of the housing 31. The housing 31 also has openable and closable shutters 31c that form part of the first side wall 31a. The shutters 31c are arranged one behind each mounting table 30. The housing 31 also has doors 31d that form part of the second side wall 31b. The doors 31d are opened and closed by the operator and the hand 14 of the self-propelled robot 1, or by the operator.

[0033] The substrate transport robot 34 is a horizontal articulated robot. The substrate transport robot 34 has a hand 34a at its tip for placing the substrate C. The substrate transport robot 34 is capable of freely changing the position of the hand 34a by driving it. The abnormality detection unit 35 is a sensor that detects abnormalities in the substrate C. In detail, the abnormality detection unit 35 detects the tilt and positional deviation of the substrate C placed on the hand 34a of the substrate transport robot 34, the presence or absence of the substrate C on the hand 34a, etc. The abnormality detection unit 35 is, for example, a mapping sensor. The abnormality detection unit 35 is disposed, for example, in the substrate transport robot 34. The abnormality detection unit may also be disposed on the inner surface of the housing. When the abnormality detection unit 35 detects an abnormality in the substrate C, the substrate manufacturing apparatus 3 switches from a normal state mode in which the substrate manufacturing apparatus 3 operates to an abnormal state mode in which the operation of the substrate manufacturing apparatus 3 is stopped. If an abnormality occurs in the substrate C and the substrate manufacturing apparatus 3 continues to operate, there is a risk of damaging the substrate C, so the substrate manufacturing apparatus 3 switches to the abnormal state mode and stops the operation of the substrate manufacturing apparatus 3. In short, the substrate manufacturing apparatus 3 cannot be operated in the abnormal state mode.

[0034] The communication unit 36 ​​is a wireless communication unit. The communication unit 36 ​​transmits and receives various information to and from the terminal 5. In particular, the communication unit 36 ​​transmits to the terminal 5 status information indicating whether the terminal 5 is in an abnormal status mode or a normal status mode.

[0035] The control unit 37 is a controller that controls the operation of each unit of the substrate manufacturing apparatus 3. The control unit 37 includes, for example, a computing device such as a CPU (Central Processing Unit). The control unit 37 also includes memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory), and a storage device such as a hard disk. The control unit 37 executes control processing using the computing device based on programs and parameters stored in the storage device. In detail, the control unit 37 controls the operation of the substrate transport robot 34, the hand 34a, and the shutter 31c. The control unit of the substrate manufacturing apparatus may be configured as an integrated controller that controls the anomaly detection unit, communication unit, substrate transport robot, hand, shutter, etc., or may be configured as separate controllers for each of the components such as the anomaly detection unit, communication unit, substrate transport robot, hand, and shutter. In addition, the substrate manufacturing apparatus may be provided with an integrated controller that controls the abnormality detection unit, communication unit, and shutter, and the substrate transport robot may be provided with a dedicated controller that is separate from the controller of the substrate manufacturing apparatus.

[0036] The status display unit 38 displays the status of the substrate manufacturing apparatus 3. The status display unit 38 is disposed near the mounting table 30. Specifically, the status display unit 38 is disposed above the substrate housing container F when the substrate housing container F is disposed on the mounting table 30. The status display unit 38 also displays the status by lighting up. The status display unit 38 has a light source that can be turned on and off. The light source is, for example, an LED (Light Emitting Diode).

[0037] 5 , the status display unit 38 displays whether the substrate storage container F on the mounting table 30 is in an untransportable state or whether the substrate storage container F on the mounting table 30 is in a transportable state. The status display unit 38 also displays whether the substrate manufacturing apparatus 3 is in an error state, whether the substrate manufacturing apparatus 3 is in a communication abnormal state, or whether the substrate storage container F is placed on the mounting table 30. The status display unit 38 includes a status display unit 38 a indicating that the substrate storage container F on the mounting table 30 is in an untransportable state, and a status display unit 38 b indicating that the substrate storage container F on the mounting table 30 is in a transportable state. The status display unit 38 also includes a status display unit 38 c indicating that the substrate manufacturing apparatus 3 is in an error state, a status display unit 38 d indicating that the substrate manufacturing apparatus 3 is in a communication abnormal state, and a status display unit 38 e indicating that the substrate storage container F is placed on the mounting table 30. The status display units 38a, 38b, 38c, 38d, and 38e are arranged separately from one another. The status display units 38a, 38b, 38c, 38d, and 38e are arranged in a line. The status display units 38a and 38b are examples of a first status display unit and a second status display unit, respectively.

[0038] The status display unit 38a is lit when the substrate housing container F on the mounting table 30 cannot be transported. In particular, when the substrate housing container F is locked on the mounting table 30, the control unit 37 turns on the status display unit 38a because the substrate housing container F on the mounting table 30 is in use. The status display unit 38b is lit when the substrate housing container F on the mounting table 30 can be transported. In particular, when the substrate housing container F is unlocked on the mounting table 30, the control unit 37 turns on the status display unit 38b because the substrate housing container F on the mounting table 30 is not in use.

[0039] The status display unit 38c is lit when the substrate manufacturing apparatus 3 is in an error state. Specifically, the control unit 37 turns on the status display unit 38c when it is determined that the substrate manufacturing apparatus 3 is in an error state. The status display unit 38d is lit when the substrate manufacturing apparatus 3 is in a communication abnormal state. Specifically, the control unit 37 turns on the status display unit 38d when it is determined that the substrate manufacturing apparatus 3 is in a communication abnormal state. The status display unit 38e is lit when a substrate housing container F is placed on the mounting table 30. Specifically, the control unit 37 turns on the status display unit 38e when it is determined that a substrate housing container F is placed on the mounting table 30 based on the detection result of an occupancy sensor that detects that the substrate housing container F is placed on the mounting table 30.

[0040] The status display unit 38 is imaged by the imaging unit 2. Specifically, the status display unit 38 is imaged by the imaging unit 2 when the self-propelled robot 1 is stopped at a robot stop position P1 (see FIG. 3 ) in front of the mounting table 30 for holding a substrate housing container F. When communication with the substrate manufacturing apparatus 3 is not possible, the control unit 16 of the self-propelled robot 1 adopts the status of the substrate manufacturing apparatus 3 acquired based on the image of the status display unit 38 taken by the imaging unit 2. When communication with the substrate manufacturing apparatus 3 is possible, the control unit 16 adopts the status of the substrate manufacturing apparatus 3 acquired from the substrate manufacturing apparatus 3 via communication.

[0041] When the control unit 16 determines that the substrate storage container F on the mounting table 30 is in a state where it cannot be transported based on the image of the status display unit 38 captured by the imaging unit 2, the control unit 16 performs control not to recover the substrate storage container F from the mounting table 30. That is, when the status display unit 38a is lit, the control unit 16 performs control not to recover the substrate storage container F from the mounting table 30. Furthermore, when the control unit 16 determines that the substrate storage container F on the mounting table 30 is in a state where it can be transported based on the image of the status display unit 38 captured by the imaging unit 2, the control unit 16 performs control to recover the substrate storage container F from the mounting table 30 and transport it. That is, when the status display unit 38b is lit, the control unit 16 performs control to recover the substrate storage container F from the mounting table 30 and transport it.

[0042] When it is determined that the substrate manufacturing apparatus 3 is in an error state or in a communication abnormality state based on the image of the status display unit 38 captured by the imaging unit 2, the control unit 16 may transmit information indicating that the substrate manufacturing apparatus 3 is in an error state or in a communication abnormality state to the terminal 5. Furthermore, the control unit 16 determines whether or not the substrate housing container F is placed on the mounting table 30 based on the image of the status display unit 38 captured by the imaging unit 2.

[0043] 6 and 7 , the remote control unit 6 remotely controls the self-propelled robot 1, causing the self-propelled robot 1 to perform an operation on the substrate manufacturing apparatus 3 for manufacturing the substrate C. In detail, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform at least one of the following operations: capturing images of the interior of the substrate manufacturing apparatus 3; and operating the operation touch panel 7 of the substrate manufacturing apparatus 3.

[0044] 6, when an abnormality is detected in the substrate manufacturing apparatus 3, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to have the imaging unit 2 capture an image of the interior of the substrate manufacturing apparatus 3. In particular, when the self-propelled robot 1 is remotely controlled by the remote control unit 6, it moves to a predetermined position P2 (see FIG. 3) near the substrate manufacturing apparatus 3. When the self-propelled robot 1 moves to the predetermined position P2, the remote control unit 6 receives an operation command to move the robot arm 11.

[0045] More specifically, when the substrate manufacturing apparatus 3 switches from the normal state mode to the abnormal state mode, the self-propelled robot 1 moves by the movement unit 12 to a predetermined position P2 where the imaging unit 2 captures an image of the interior of the substrate manufacturing apparatus 3. The predetermined position P2 is a position where the self-propelled robot 1 faces the second side wall 31b of the substrate manufacturing apparatus 3, which has the window 32, in a plan view. The self-propelled robot 1 includes a position detection unit for detecting that the self-propelled robot 1 has reached the predetermined position P2. The position detection unit is a proximity sensor or a magnetic sensor. For example, the self-propelled robot 1 detects its proximity to the substrate manufacturing apparatus 3 using a proximity sensor to detect that it has reached the predetermined position P2. Furthermore, for example, the self-propelled robot 1 detects that it has reached the predetermined position P2 by detecting the magnetic tape used for movement of the self-propelled robot 1 using a magnetic sensor to detect that it has reached the predetermined position P2. When self-propelled robot 1 reaches predetermined position P2, it stops moving by moving unit 12 and positions robot arm 11 so that imaging unit 2 peers into the interior of substrate manufacturing apparatus 3 through window 32 of substrate manufacturing apparatus 3. Self-propelled robot 1 then switches to a remote operation mode in which it accepts remote operation by remote operation unit 6. Self-propelled robot 1 also transmits image information D1 captured by imaging unit 2 to terminal 5 via communication unit 15. That is, self-propelled robot 1 transmits image information D1, which is a moving image showing the interior of substrate manufacturing apparatus 3 captured by imaging unit 2, to terminal 5 in real time. This allows a worker in monitoring room MR to visually confirm the moving image showing the interior of substrate manufacturing apparatus 3 displayed on display unit 5a of terminal 5 in real time.

[0046] The worker in the monitoring room MR operates the remote control unit 6 while viewing the moving image displayed on the display unit 5a of the terminal 5. When the self-propelled robot 1 receives an operation instruction from the remote control unit 6 via the communication unit 15 in the remote operation mode, the self-propelled robot 1 moves the robot arm 11 so as to move the imaging unit 2 in accordance with the received operation instruction. For example, the imaging unit 2 is moved in the forward / backward, left / right, and up / down directions relative to the self-propelled robot 1 in accordance with the operation direction of the stick operation unit 6a of the remote control unit 6. At this time, for example, the self-propelled robot 1 moves the robot arm 11 so as to move the imaging unit 2 without changing the attitude of the imaging unit 2. In this way, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform the task of capturing images of the interior of the substrate manufacturing apparatus 3.

[0047] 7, self-propelled robot 1 is remotely controlled by remote control unit 6, and performs the task of operating operation touch panel 7 with operating hand 14b. In particular, when self-propelled robot 1 is remotely controlled by remote control unit 6, it moves to a predetermined position P3 (see FIG. 3) near substrate manufacturing apparatus 3. When self-propelled robot 1 moves to predetermined position P3, remote control unit 6 accepts an operation instruction to move robot arm 11.

[0048] More specifically, the self-propelled robot 1 moves to a predetermined position P3 using the movement unit 12 to operate the operation touch panel 7 with the operating hand 14b, for example, when performing setting operations to start operating the substrate manufacturing apparatus 3 or an abnormality reset operation to return the substrate manufacturing apparatus 3 from an abnormal state mode. The predetermined position P3 is a position where the self-propelled robot 1 faces the operation touch panel 7 in a planar view. The self-propelled robot 1 includes a position detection unit for detecting that the self-propelled robot 1 has reached the predetermined position P3. The position detection unit is, for example, a proximity sensor or a magnetic sensor. For example, the self-propelled robot 1 detects that it has reached the predetermined position P3 by detecting its proximity to the operation touch panel 7 using a proximity sensor. Furthermore, for example, the self-propelled robot 1 detects that it has reached the predetermined position P3 by detecting a magnetic tape used for moving the self-propelled robot 1 using a magnetic sensor. When self-propelled robot 1 reaches predetermined position P3, it stops moving using movement unit 12 and assumes a position for robot arm 11 that allows imaging unit 2 to capture an image of the screen of operation touch panel 7 and allows operating hand 14b to operate operation touch panel 7. Self-propelled robot 1 then switches to remote operation mode, in which it accepts remote operation from remote operation unit 6. Self-propelled robot 1 also transmits image information D1 captured by imaging unit 2 to terminal 5 via communication unit 15. That is, self-propelled robot 1 transmits image information D1, which is a moving image showing the screen of operation touch panel 7 captured by imaging unit 2, to terminal 5 in real time. This allows a worker in monitoring room MR to visually confirm the moving image showing the screen of operation touch panel 7 displayed on display unit 5a of terminal 5 in real time.

[0049] The worker in the monitoring room MR operates the remote control unit 6 while viewing the moving image displayed on the display unit 5a of the terminal 5. When the self-propelled robot 1 receives an operation instruction from the remote control unit 6 via the communication unit 15 in remote operation mode, the self-propelled robot 1 moves the robot arm 11 so as to move the image capturing unit 2 and the operating hand 14b in accordance with the received operation instruction. For example, the image capturing unit 2 and the operating hand 14b are moved in the forward / backward, left / right, and up / down directions relative to the self-propelled robot 1 in accordance with the operation direction of the stick operating unit 6a of the remote control unit 6. At this time, for example, the self-propelled robot 1 moves the robot arm 11 so as to move the image capturing unit 2 and the operating hand 14b without changing the orientation of the image capturing unit 2 and the operating hand 14b. Then, the operating hand 14b operates a desired button displayed on the operation touch panel 7. The desired button may be a button for performing a setting operation when starting operation of the substrate manufacturing apparatus 3 or a button for performing an abnormality reset operation when returning the substrate manufacturing apparatus 3 from an abnormal state mode. In this way, the self-propelled robot 1 is remotely controlled by the remote control unit 6 to perform tasks such as operating the operation touch panel 7 .

[0050] Effect of the Present Embodiment As described above, the present embodiment includes the imaging unit 2 disposed on the robot arm 11, and the substrate manufacturing device 3 that includes the status display unit 38 imaged by the imaging unit 2 and to which the substrate housing container F is transported by the self-propelled robot 1. This allows the self-propelled robot 1 to check the status of the substrate manufacturing device 3 based on the image on the status display unit 38 imaged by the imaging unit 2. As a result, even when it is difficult to check the status of the substrate manufacturing device 3 through communication, the status of the substrate manufacturing device 3 can be checked, and therefore the substrate housing container F can be appropriately transported to the substrate manufacturing device 3.

[0051] In the present embodiment, as described above, when communication with the substrate manufacturing apparatus 3 is not possible, the self-propelled robot 1 adopts the state of the substrate manufacturing apparatus 3 acquired based on the image of the state display unit 38 captured by the imaging unit 2. This allows the substrate housing container F to be easily and appropriately transported to the substrate manufacturing apparatus 3 even when it is difficult to confirm the state of the substrate manufacturing apparatus 3 through communication.

[0052] In the present embodiment, as described above, the substrate manufacturing apparatus 3 includes the mounting table 30 on which the substrate housing container F is placed, and the status display unit 38 displays whether the substrate housing container F on the mounting table 30 is in a state where it cannot be transported or whether the substrate housing container F on the mounting table 30 is in a state where it can be transported. This allows the self-propelled robot 1 to confirm whether the substrate housing container F on the mounting table 30 is in a state where it can be transported or whether the substrate housing container F on the mounting table 30 is in a state where it cannot be transported. As a result, the substrate housing container F can be easily and appropriately transported to the substrate manufacturing apparatus 3.

[0053] In the present embodiment, as described above, self-propelled robot 1 includes control unit 16 that performs control not to recover substrate storage container F from mounting table 30 when it is determined that substrate storage container F on mounting table 30 is in an untransportable state based on the image on status display unit 38 captured by imaging unit 2, but to recover and transport substrate storage container F from mounting table 30 when it is determined that substrate storage container F on mounting table 30 is in a transportable state based on the image on status display unit 38 captured by imaging unit 2. This allows substrate storage container F to be easily and appropriately transported to substrate manufacturing apparatus 3 based on the image on status display unit 38 captured by imaging unit 2.

[0054] In the present embodiment, as described above, status display unit 38 includes status display unit 38a, which indicates that the substrate housing container F on mounting table 30 is in a state where it cannot be transported, and status display unit 38b, which is arranged separately from status display unit 38a and indicates that the substrate housing container F on mounting table 30 is in a state where it can be transported. As a result, because status display unit 38a and status display unit 38b are provided separately, self-propelled robot 1 can easily confirm whether the substrate housing container F on mounting table 30 is in a state where it can be transported or whether the substrate housing container F on mounting table 30 is in a state where it cannot be transported, compared to when only a single status display unit is provided.

[0055] In the present embodiment, as described above, the status display unit 38 is disposed near the mounting table 30. This allows the imaging unit 2 of the self-propelled robot 1 approaching the mounting table 30 to transport the substrate housing container F to easily capture an image of the status display unit 38.

[0056] In the present embodiment, as described above, the status display unit 38 is disposed above the substrate housing container F when the substrate housing container F is placed on the mounting table 30. This allows the imaging unit 2 to capture an image of the status display unit 38 when the self-propelled robot 1 is stopped at a robot stopping position for holding the substrate housing container F. As a result, when the substrate housing container F is transportable, the transport of the substrate housing container F can be started quickly.

[0057] In this embodiment, as described above, the status display unit 38 displays the status by lighting up. This allows the status display unit 38 to be configured simply because the status can be displayed simply by lighting up.

[0058] In the present embodiment, as described above, the status display unit 38 displays whether the substrate manufacturing apparatus 3 is in an error state, whether the substrate manufacturing apparatus 3 is in a communication abnormal state, and whether a substrate housing container F is placed on the mounting table 30 included in the substrate manufacturing apparatus 3. This allows the self-propelled robot 1 to confirm whether the substrate manufacturing apparatus 3 is in an error state or whether the substrate manufacturing apparatus 3 is in a communication abnormal state. As a result, the self-propelled robot 1 can quickly take action, such as notifying an operator. The self-propelled robot 1 can also confirm whether a substrate housing container F is placed on the mounting table 30. As a result, the self-propelled robot 1 can confirm that a substrate housing container F is placed on the mounting table 30, and then successfully transport the substrate housing container F from the mounting table 30.

[0059] In the present embodiment, as described above, the imaging unit 2 also serves as an imaging unit that images the substrate housing container F when the holding hand 14a holds the substrate housing container F. This allows the imaging unit 2 that images the substrate housing container F to be used to capture images when performing work on the substrate manufacturing device 3, eliminating the need to provide a dedicated imaging unit 2. As a result, the configuration of the self-propelled robot 1 can be prevented from becoming complicated.

[0060] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and includes all modifications (modifications) within the meaning and scope of the claims.

[0061] For example, in the above embodiment, an example was shown in which the substrate manufacturing apparatus is a substrate transport apparatus that transports substrates between a substrate storage container and a substrate processing apparatus, but the present disclosure is not limited to this. In the present disclosure, the substrate manufacturing apparatus may be a substrate transport apparatus serving as a so-called sorter that transports substrates between substrate storage containers, or a substrate transport apparatus serving as a so-called stocker that transports substrates between a substrate storage container and a substrate storage unit. Furthermore, the substrate manufacturing apparatus may be a substrate processing apparatus that processes substrates. Furthermore, the substrate manufacturing apparatus may be equipped with an aligner that positions the substrate within the apparatus and detects eccentricity of the substrate.

[0062] In the above embodiment, an example has been described in which the status display unit displays whether the substrate storage container on the mounting table is in a state where it cannot be transported, whether the substrate storage container on the mounting table is in a state where it can be transported, whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication abnormality state, and whether the substrate storage container is placed on the mounting table, but the present disclosure is not limited to this. In the present disclosure, the status display unit may display at least one of whether the substrate storage container on the mounting table is in a state where it cannot be transported, whether the substrate storage container on the mounting table is in a state where it can be transported, whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication abnormality state, and whether the substrate storage container is placed on the mounting table. Furthermore, the status display unit may display a state other than these.

[0063] In the above embodiment, an example was described in which the status indicator included a first status indicator indicating that the substrate storage container on the mounting table is in a state where it cannot be transported, and a second status indicator arranged separately from the first status indicator and indicating that the substrate storage container on the mounting table is in a state where it can be transported, but the present disclosure is not limited to this. In the present disclosure, a single status indicator may be provided that indicates that the substrate storage container on the mounting table is in a state where it can be transported and that the substrate storage container on the mounting table is in a state where it cannot be transported. For example, the single status indicator may be either lit or unlit to indicate that the substrate storage container on the mounting table is in a state where it cannot be transported, and may be either lit or unlit to indicate that the substrate storage container on the mounting table is in a state where it can be transported.

[0064] In the above embodiment, an example in which the status display unit is disposed near the mounting table has been described, but the present disclosure is not limited to this. In the present disclosure, the status display unit may be disposed in a location other than near the mounting table.

[0065] In the above embodiment, an example in which the number of mounting tables is two is shown, but the present disclosure is not limited to this. In the present disclosure, the number of mounting tables may be any number.

[0066] In the above embodiment, an example has been described in which the imaging unit is attached to the robot arm of the self-propelled robot via a bracket, but the present disclosure is not limited to this. In the present disclosure, the imaging unit may be held by a hand of the robot arm of the self-propelled robot. The imaging unit may be configured to be moved by the robot arm.

[0067] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0068] [Aspects] The above-described embodiments are specific examples of the following aspects.

[0069] (Aspect 1) A substrate manufacturing system comprising: a self-propelled robot including a robot arm and a hand attached to the tip of the robot arm and holding a substrate storage container that stores substrates, the self-propelled robot holding and transporting the substrate storage container with the hand; an imaging unit moved by the robot arm; and a substrate manufacturing device including a substrate manufacturing device status display unit that takes an image of the imaging unit, the substrate storage container being transported by the self-propelled robot.

[0070] (Aspect 2) The substrate manufacturing system according to Aspect 1, wherein when the self-propelled robot is unable to communicate with the substrate manufacturing apparatus, the self-propelled robot adopts the state of the substrate manufacturing apparatus acquired based on an image of the substrate manufacturing apparatus state display unit captured by the imaging unit.

[0071] (Aspect 3) The substrate manufacturing system described in Aspect 1, wherein the substrate manufacturing apparatus includes a mounting table on which the substrate storage container is placed, and the substrate manufacturing apparatus status display unit displays whether the substrate storage container on the mounting table is in a state where it cannot be transported or whether the substrate storage container on the mounting table is in a state where it can be transported.

[0072] (Aspect 4) The substrate manufacturing system described in Aspect 3, wherein the self-propelled robot includes a control unit that controls not to recover the substrate storage container from the mounting table when it is determined that the substrate storage container on the mounting table is in a state where it cannot be transported based on an image of the substrate manufacturing apparatus status display unit captured by the imaging unit, and to recover and transport the substrate storage container from the mounting table when it is determined that the substrate storage container on the mounting table is in a state where it can be transported based on the image of the substrate manufacturing apparatus status display unit captured by the imaging unit.

[0073] (Aspect 5) A substrate manufacturing system as described in Aspect 3 or 4, wherein the substrate manufacturing apparatus status display unit includes a first status display unit that indicates that the substrate container on the mounting table is in a state where it cannot be transported, and a second status display unit that is arranged separately from the first status display unit and that indicates that the substrate container on the mounting table is in a state where it can be transported.

[0074] (Aspect 6) The substrate manufacturing system according to any one of Aspects 3 to 5, wherein the substrate manufacturing apparatus status display unit is disposed near the mounting table.

[0075] (Aspect 7) The substrate manufacturing system according to aspect 6, wherein the substrate manufacturing apparatus state display unit is disposed above the substrate housing container in a state in which the substrate housing container is disposed on the mounting table.

[0076] (Aspect 8) The substrate manufacturing system according to any one of Aspects 1 to 7, wherein the substrate manufacturing apparatus status display unit displays the status by lighting up.

[0077] (Aspect 9) A substrate manufacturing system according to any one of aspects 1 to 8, wherein the substrate manufacturing apparatus status display unit displays at least one of whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication abnormality state, and whether the substrate container is placed on a mounting table provided on the substrate manufacturing apparatus.

[0078] (Aspect 10) The substrate manufacturing system according to any one of Aspects 1 to 9, wherein the imaging unit also serves as an imaging unit that images the substrate housing container when the substrate housing container is held by the holding hand.

[0079] REFERENCE SIGNS LIST 1 Self-propelled robot 2 Imaging unit 3 Substrate manufacturing apparatus 11 Robot arm 14 Hand 14a Holding hand (hand) 16 Control unit 38 Status display unit (substrate manufacturing apparatus status display unit) 38a Status display unit (first status display unit) 38b Status display unit (second status display unit) 100 Substrate manufacturing system C Substrate F Substrate storage container

Claims

1. A substrate manufacturing system comprising: a robot arm; a self-propelled robot including a hand attached to the tip of the robot arm and holding a substrate storage container that contains substrates, the self-propelled robot holding and transporting the substrate storage container with the hand; an imaging unit moved by the robot arm; and a substrate manufacturing device including a substrate manufacturing device status display unit that takes an image of the imaging unit, the substrate storage container being transported by the self-propelled robot.

2. The substrate manufacturing system of claim 1, wherein the self-propelled robot adopts the status of the substrate manufacturing apparatus obtained based on an image of the substrate manufacturing apparatus status display unit captured by the imaging unit when the substrate manufacturing apparatus is unable to communicate.

3. The substrate manufacturing system of claim 1, wherein the substrate manufacturing equipment includes a mounting stage on which the substrate storage container is placed, and the substrate manufacturing equipment status display unit displays whether the substrate storage container on the mounting stage is in a state where it cannot be transported or whether the substrate storage container on the mounting stage is in a state where it can be transported.

4. The substrate manufacturing system of claim 3, further comprising a control unit that controls the self-propelled robot not to recover the substrate storage container from the mounting table when it is determined that the substrate storage container on the mounting table is in a state where it cannot be transported based on an image of the substrate manufacturing equipment status display unit captured by the imaging unit, and to recover and transport the substrate storage container from the mounting table when it is determined that the substrate storage container on the mounting table is in a state where it can be transported based on an image of the substrate manufacturing equipment status display unit captured by the imaging unit.

5. A substrate manufacturing system as described in claim 3, wherein the substrate manufacturing equipment status display unit includes a first status display unit that indicates that the substrate container on the mounting table is in a state where it cannot be transported, and a second status display unit that is arranged separately from the first status display unit and that indicates that the substrate container on the mounting table is in a state where it can be transported.

6. The substrate manufacturing system according to claim 3, wherein the substrate manufacturing equipment status display unit is disposed near the mounting table.

7. The substrate manufacturing system according to claim 6, wherein the substrate manufacturing equipment status display unit is disposed above the substrate housing container with the substrate housing container disposed on the mounting table.

8. The board manufacturing system according to claim 1, wherein the board manufacturing equipment status display unit displays the status by lighting up.

9. The substrate manufacturing system of claim 1, wherein the substrate manufacturing apparatus status display unit displays at least one of whether the substrate manufacturing apparatus is in an error state, whether the substrate manufacturing apparatus is in a communication abnormality state, and whether the substrate container is placed on a mounting table provided on the substrate manufacturing apparatus.

10. The substrate manufacturing system according to claim 1, wherein the imaging unit also serves as an imaging unit that images the substrate container when the substrate container is held by the hand.

Images