Manufacturing system

Abstract

This manufacturing system (100, 200) is respectively provided with: a self-propelled robot (1, 201) that includes a robot arm (11) and a moving unit (12) that moves the robot arm; and a self-propelled robot mounting detection unit (2, 202) that is moved by the robot arm and detects the state inside a manufacturing device (3, 203).

Description

Manufacturing Systems

[0001] This disclosure relates to manufacturing systems.

[0002] Conventionally, a substrate manufacturing system equipped with a self-propelled robot including a robot arm has been disclosed. The plasma processing system for substrates disclosed in Patent Document 1 includes a chamber in which substrates are processed using plasma, and a self-propelled robot device equipped with an arm. The self-propelled robot device docks with the chamber to perform maintenance work such as cleaning the inside of the chamber.

[0003] Special Publication No. 2008-535256

[0004] In the field of substrate manufacturing systems, including the plasma processing system of Patent Document 1, when an abnormality occurs inside a substrate manufacturing apparatus, such as a chamber for manufacturing a substrate, an operator must go to the site and directly check the internal condition of the substrate manufacturing apparatus. This requires relatively complicated work, which increases the operator's workload. Therefore, it is desirable to be able to easily check the internal condition of the substrate manufacturing apparatus. If the substrate manufacturing apparatus is located inside a clean room and the operator is outside the clean room, the operator must prepare for entering the clean room by, for example, changing into dustproof clothing before going to the site, which increases the operator's workload. Furthermore, the operator's workload increases in manufacturing systems other than substrate manufacturing systems as well.

[0005] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a manufacturing system that allows workers to easily check the internal state of manufacturing equipment while reducing the burden of checking the internal state of the manufacturing equipment on the workers.

[0006] A manufacturing system according to one aspect of this disclosure includes a self-propelled robot including a robot arm and a moving unit that moves the robot arm, and a detection unit mounted on the self-propelled robot that is moved by the robot arm and detects the internal condition of the manufacturing device.

[0007] As described above, a manufacturing system according to one aspect of the present disclosure includes a self-propelled robot-mounted detector that detects the internal condition of the manufacturing equipment. This allows the self-propelled robot-mounted detector to detect the internal condition of the manufacturing equipment, thereby enabling the operator to check the internal condition of the manufacturing equipment without having to physically visit the site, which increases the operator's workload. When the manufacturing equipment is installed in a clean room, this eliminates the need for the operator to prepare for entering the clean room, such as changing into dustproof clothing, thereby shortening work time. Furthermore, the self-propelled robot-mounted detector is moved by a robot arm. This allows the self-propelled robot-mounted detector to be positioned at various positions and angles by the robot arm, allowing the operator to freely detect the internal condition of the manufacturing equipment. As a result, the internal condition of the manufacturing equipment can be easily checked while reducing the operator's workload for checking the internal condition of the manufacturing equipment.

[0008] According to the present disclosure, the internal state of a manufacturing device can be easily checked while reducing the burden on the worker of checking the internal state of the manufacturing device.

[0009] FIG. 1 is a perspective view showing a self-propelled robot and a substrate manufacturing apparatus of a substrate manufacturing system according to a first embodiment. FIG. 2 is a block diagram of a substrate manufacturing system according to a first embodiment. FIG. 3 is a plan view showing a self-propelled robot and a substrate manufacturing apparatus in a clean room of the substrate manufacturing system according to a first embodiment. FIG. 4 is a diagram showing a block configuration of a self-propelled robot, a substrate manufacturing apparatus, an imaging unit mounted on the self-propelled robot, and an imaging unit mounted on the substrate manufacturing apparatus in a clean room of the substrate manufacturing system according to a first embodiment, and a terminal and a remote control unit in a monitoring room. FIG. 5 is a perspective view showing a substrate transport robot of a substrate manufacturing apparatus of the substrate manufacturing system according to a first embodiment. FIG. 6 is a flowchart for explaining control processing when an abnormality occurs in a substrate in the substrate manufacturing system according to a first embodiment. FIG. 7 is a perspective view showing a self-propelled robot and a manufacturing apparatus of a manufacturing system according to a second embodiment.

[0010] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0011] First Embodiment A substrate manufacturing system 100 according to a first embodiment will be described with reference to Figures 1 to 6. The substrate manufacturing system 100 is an example of a "manufacturing system."

[0012] (Overall configuration of substrate manufacturing system) As shown in Figures 1 and 2, the substrate manufacturing system 100 comprises a self-propelled robot 1 including a robot arm 11 and a moving unit 12 that moves the robot arm 11, and an imaging unit 2 mounted on the self-propelled robot and arranged on the robot arm 11.

[0013] The self-propelled robot-mounted imaging unit 2 detects the internal state of the substrate manufacturing apparatus 3 for manufacturing the substrate C. In particular, the self-propelled robot-mounted imaging unit 2 detects the internal state of the substrate manufacturing apparatus 3 by capturing an image of the inside of the substrate manufacturing apparatus 3 from outside the substrate manufacturing apparatus 3. The substrate manufacturing apparatus 3 is a concept that includes not only an apparatus that directly manufactures the substrate C, but also an apparatus that transports the substrate C for manufacturing the substrate C. The self-propelled robot-mounted imaging unit 2 is an example of a "self-propelled robot-mounted detection unit." The substrate manufacturing apparatus 3 is an example of a "manufacturing apparatus."

[0014] In the drawings, the front-to-back direction relative to the substrate manufacturing apparatus 3 is indicated by the X direction, the front is indicated by the X1 direction, and the rear is indicated by the X2 direction. The left-to-right direction relative to the substrate manufacturing apparatus 3 is indicated by the Y direction, the left is indicated by the Y1 direction, and the right is indicated by the Y2 direction. The up-down direction is indicated by the Z direction, the top is indicated by the Z1 direction, and the bottom is indicated by the Z2 direction.

[0015] 2 and 3 , the substrate manufacturing system 100 includes a substrate manufacturing apparatus 3 including a substrate transfer chamber 33 and a substrate transfer robot 34 disposed inside the substrate transfer chamber 33, and an imaging unit 4 mounted on the substrate manufacturing apparatus that is disposed inside the substrate manufacturing apparatus 3. The "inside of the substrate manufacturing apparatus 3" means the same as the inside of the substrate transfer chamber 33. The substrate manufacturing apparatus 3 and the self-propelled robot 1 are both disposed in a clean room CR. The substrate manufacturing apparatus 3 and the self-propelled robot 1 are each operated remotely by an operator located in a monitoring room MR or the like outside the clean room CR, or are directly operated by an operator who enters the clean room CR wearing dustproof clothing.

[0016] The imaging unit 4 mounted on the substrate manufacturing apparatus detects the internal state of the substrate manufacturing apparatus 3 by capturing an image of the interior of the substrate manufacturing apparatus 3 from inside the substrate manufacturing apparatus 3. The substrate transport robot 34 transports the substrate C between a substrate housing container F that houses the substrate C and the substrate processing apparatus 8. The substrate manufacturing apparatus 3 is, for example, a so-called EFEM (Equipment Front End Module), which is an apparatus that transfers the substrate C or the substrate housing container F to and from the substrate processing apparatus 8. The substrate housing container F is, for example, a so-called FOUP (Front-Opening Unified Pod), which is a dedicated container for transporting and storing wafers, which are substrates C. The substrate processing apparatus 8 is disposed adjacent to the rear side (X2 direction side) of the substrate manufacturing apparatus 3.

[0017] As shown in FIG. 4 , the substrate manufacturing system 100 also includes a terminal 5 having a display unit 5 a and a remote control unit 6 that accepts various operations for driving the self-propelled robot 1 and the substrate manufacturing apparatus 3 .

[0018] In principle, the terminal 5 and remote control unit 6 are located outside the clean room CR. The terminal 5 is located, for example, in a monitoring room MR for monitoring the status of the clean room CR. The terminal 5 is a desktop personal computer having a display as a display unit 5a. The terminal may also be a laptop computer, an information terminal with a touch panel, a tablet terminal, a smartphone, or the like. The display unit 5a displays moving images captured by the self-propelled robot-mounted imaging unit 2 and the substrate manufacturing apparatus-mounted imaging unit 4. The terminal 5 has a communication unit for communicating with the communication unit 15 of the self-propelled robot 1 (see FIG. 2) and the communication unit 36 ​​of the substrate manufacturing apparatus 3 (see FIG. 2).

[0019] The remote control unit 6 includes, for example, a keyboard with various buttons and a joystick. The remote control unit 6 is connected to the terminal 5 and transmits operation instructions to the self-propelled robot 1 and the substrate manufacturing apparatus 3 via the terminal 5. Note that the remote control unit may transmit operation instructions directly to the self-propelled robot and the substrate manufacturing apparatus without using a terminal. The remote control unit 6 accepts a range change instruction to move the robot arm 11 to change the imaging range 20 (see FIG. 3 ) of the self-propelled robot-mounted imaging unit 2. In particular, for example, when the self-propelled robot 1 moves to an internal imaging position P described below, the remote control unit 6 moves the robot arm 11 to change the imaging range 20 of the self-propelled robot-mounted imaging unit 2. The remote control unit 6 also accepts imaging instructions for the self-propelled robot-mounted imaging unit 2 and the substrate manufacturing apparatus-mounted imaging unit 4.

[0020] (Detailed configuration of self-propelled robot) As shown in Figures 1 and 2, the self-propelled robot 1 includes a box-shaped housing 10, a robot arm 11 installed on the top of the housing 10, a moving unit 12 installed on the bottom of the housing 10, a hand attachment unit 13, a hand 14, a communication unit 15, and a control unit 16.

[0021] The housing 10 has a rectangular top surface 10a. The top surface 10a is used as a support surface on which a substrate container F and the like are placed. The housing 10 has a slide base 110 that can be pulled out horizontally to expand the area of ​​the top surface 10a. The robot arm 11 of the self-propelled robot 1 is a vertically articulated arm. The robot arm 11 can be driven to freely change the positions of the self-propelled robot-mounted imaging unit 2 and hand 14. The moving unit 12 has multiple wheels 12a that rotate while supporting the housing 10 from below, and a servo motor that drives the multiple wheels 12a. In principle, the moving unit 12 moves the self-propelled robot 1 linearly along the longitudinal direction of the housing 10. Furthermore, the moving unit 12 rotates while maintaining its position when changing its direction of movement. The moving unit 12 is a so-called AGV (Automatic Guided Vehicle), which is a traveling device that travels on its own along a predetermined route while detecting obstacles in the vicinity to avoid colliding with them. The moving unit 12 can also travel off the predetermined route by remote control using the remote control unit 6.

[0022] The self-propelled robot 1 includes a bracket 2a attached to the tip of the robot arm 11. A hand attachment unit 13 is attached to the bracket 2a. The hand 14 is replaceably attached to the hand attachment unit 13. In other words, the hand attachment unit 13 is a so-called tool changer for replaceably attaching various hands 14. The hand attachment unit 13 is attached to the tip of the robot arm 11 on which the self-propelled robot-mounted imaging unit 2 is disposed. The hand 14 is attached to the hand attachment unit 13 at the tip of the robot arm 11 on which the self-propelled robot-mounted imaging unit 2 is disposed, and holds a substrate housing container F that houses substrates C. More specifically, the hand 14 has a pair of rod-shaped members for holding the substrate housing container F. The self-propelled robot 1 holds and transports the substrate housing container F with the hand 14. The hand 14 holds the substrate housing container F by bringing the pair of rod-shaped members close to each other, thereby sandwiching and holding a protrusion F1 located at the top end of the substrate housing container F. Other types of hands 14 include hands 14 with touch operation units for operating a touch panel, and hands 14 with suction units for suctioning the substrate C. Even when no operator is present, the self-propelled robot 1 moves to a hand storage cabinet that stores various types of hands 14 and automatically changes hands 14. In other words, the self-propelled robot 1 performs what is known as an auto-tool change.

[0023] The communication unit 15 is a wireless communication unit. The communication unit 15 transmits and receives various information to and from the terminal 5. Specifically, the communication unit 15 transmits image information D1 (see FIG. 2 ) of the interior of the substrate manufacturing apparatus 3 captured by the self-propelled robot-mounted imaging unit 2 to the terminal 5. The communication unit 15 also receives imaging instructions for the self-propelled robot-mounted imaging unit 2 input to the remote control unit 6. The communication unit 15 also receives range change instructions input to the remote control unit 6 in order to move the robot arm 11 and change the imaging range 20 (see FIG. 3 ) captured by the self-propelled robot-mounted imaging unit 2. The communication unit 15 also receives instructions to replace the hand 14 input to the remote control unit 6.

[0024] The control unit 16 is a robot controller that controls the operation of each part of the self-propelled robot 1. The control unit 16 includes, for example, a calculation device such as a central processing unit (CPU). The control unit 16 also includes memory such as a random access memory (RAM) and a read-only memory (ROM), and a storage device such as a hard disk. The control unit 16 executes control processing using the calculation device based on programs and parameters stored in the storage device. Specifically, the control unit 16 controls the operation of the robot arm 11, the hand 14, and the moving unit 12. The control unit 16 also captures images of the internal state of the substrate manufacturing apparatus 3 using the self-propelled robot-mounted imaging unit 2 based on an imaging command from the terminal 5. The control unit 16 then acquires image information D1 captured by the self-propelled robot-mounted imaging unit 2 and transmits the image information D1 to the terminal 5 via the communication unit 15. The control unit of the self-propelled robot may be configured as an integrated robot controller that controls each of the robot arms, hands, moving units, and imaging units mounted on the self-propelled robot, or may be configured as separate controllers for each of the components: robot arms, hands, moving units, imaging units mounted on the self-propelled robot, etc. The self-propelled robot may also be equipped with an integrated robot controller that controls each of the robot arms, hands, and moving units, and the imaging unit mounted on the self-propelled robot may be equipped with a dedicated controller that is separate from the robot controller of the self-propelled robot.

[0025] (Detailed configuration of the imaging unit mounted on the self-propelled robot) The imaging unit 2 mounted on the self-propelled robot is a camera having an image sensor that captures moving and still images. The imaging unit 2 mounted on the self-propelled robot is attached to a bracket 2a. That is, the imaging unit 2 mounted on the self-propelled robot is attached to the tip of the robot arm 11 via the bracket 2a. A hand attachment unit 13 is also attached to the bracket 2a. The bracket 2a is positioned closer to the robot arm 11 than the hand attachment unit 13. When replacing the hand 14, the imaging unit 2 mounted on the self-propelled robot does not need to be removed from the bracket 2a, and its attachment to the robot arm 11 is maintained.

[0026] When the hand 14 at the tip of the robot arm 11 holds the substrate housing container F, the self-propelled robot-mounted imaging unit 2 images the substrate housing container F in order to correct the position of the hand 14 relative to the substrate housing container F. The self-propelled robot-mounted imaging unit 2 also images the interior of the substrate manufacturing apparatus 3 through the window 32 in the second side wall 31 b of the substrate manufacturing apparatus 3 in order to check for abnormalities in the substrates C inside the substrate manufacturing apparatus 3. An "abnormality in the substrates C inside the substrate manufacturing apparatus 3" refers to a positional or angular deviation of the substrates C from a predetermined position where the substrates C are placed, the substrates C falling off the hand 34 a, damage to the substrates C, etc. The self-propelled robot-mounted imaging unit 2 is communicatively connected to the control unit 16 wirelessly or via a wire, and transmits image information D1 to the terminal 5 via the control unit 16. The self-propelled robot-mounted imaging unit 2 also receives imaging instructions from the terminal 5 via the control unit 16.

[0027] (Detailed configuration of substrate manufacturing apparatus) As shown in Figures 2 and 3, the substrate manufacturing apparatus 3 includes a mounting table 30 for a substrate storage container F, a box-shaped housing 31, a window section 32, a substrate transport chamber 33 which is the internal space of the housing 31, a substrate transport robot 34, an abnormality detection section 35 (see Figure 2), a communication section 36, a control section 37, and an abnormality reset button 38.

[0028] Two mounting tables 30 are disposed outside the housing 31, in front of the housing 31. The two mounting tables 30 are spaced apart in the left-right direction (Y direction). A substrate container F is placed on the mounting tables 30 by the self-propelled robot 1. The substrate container F on the mounting tables 30 is moved by the self-propelled robot 1 after processing by the substrate manufacturing apparatus 3. The interior of the housing 31 (substrate transfer chamber 33) is filled with nitrogen and sealed. The housing 31 has a wide shape that is longer in the left-right direction (Y direction) than in the front-back direction (X direction). The housing 31 has a first sidewall 31a and a second sidewall 31b that is different from the first sidewall 31a and has a window portion 32 disposed therein. The first sidewall 31a is a sidewall on the front (X1 direction) of the housing 31 and is disposed along the mounting tables 30. The second sidewall 31b is a sidewall on the left (Y1 direction) of the housing 31. The housing 31 also has openable and closable shutters 31c that form part of the first side wall 31a. The shutters 31c are arranged one behind each mounting table 30. The housing 31 also has doors 31d that form part of the second side wall 31b. The doors 31d are opened and closed by the operator and the hand 14 of the self-propelled robot 1, or by the operator.

[0029] The window 32 shown in FIG. 1 is used to check the interior of the substrate manufacturing apparatus 3. The window 32 constitutes a part of the housing 31 of the substrate manufacturing apparatus 3. Specifically, the window 32 is disposed in the second side wall 31b of the housing 31. The window 32 is formed by fitting a transparent plate member into an opening provided in the second side wall 31b. The window 32 is disposed above the door 31d (in the Z1 direction). The window 32 is also disposed above the top surface 10a of the housing 10 of the self-propelled robot 1. The window may be disposed directly on the door so as to constitute a part of the door. A substrate transfer robot 34 is installed in the center of the substrate transfer chamber 33 in the left-right direction. In the substrate transfer chamber 33, the substrate transfer robot 34 transfers substrates C between the substrate storage container F and the substrate processing apparatus 8. Therefore, the internal space of the substrate transfer chamber 33 and the internal space of the substrate processing apparatus 8 form sealed spaces that communicate with each other.

[0030] The substrate transport robot 34 shown in FIGS. 3 and 5 is a robot having a horizontal articulated arm. The substrate transport robot 34 has a hand 34a at its tip for placing a substrate C. The substrate transport robot 34 can freely change the position of the hand 34a by driving it. The abnormality detection unit 35 (see FIG. 2) is a sensor that detects abnormalities in the substrate C. Specifically, the abnormality detection unit 35 detects the tilt and positional deviation of the substrate C placed on the hand 14 of the substrate transport robot 34, the presence or absence of the substrate C on the hand 34a, etc. The abnormality detection unit 35 is, for example, a mapping sensor. The abnormality detection unit 35 is disposed, for example, in the substrate transport robot 34. The abnormality detection unit may also be disposed on the inner surface of the housing. When the abnormality detection unit 35 detects an abnormality in the substrate C, the substrate manufacturing apparatus 3 switches from a normal state mode in which the substrate manufacturing apparatus 3 operates to an abnormal state mode in which the operation of the substrate manufacturing apparatus 3 is restricted. If an abnormality occurs in the substrate C and the substrate manufacturing apparatus 3 continues to operate, there is a risk of damaging the substrate C. Therefore, the substrate manufacturing apparatus 3 is switched to an abnormal state mode to restrict the operation of the substrate manufacturing apparatus 3. Specifically, in the abnormal state mode, the substrate manufacturing apparatus 3 stops and becomes inoperable. Note that when the abnormal state mode is switched to, rather than stopping the substrate manufacturing apparatus 3, the operation of the substrate manufacturing apparatus may be restricted by restricting the movement speed of the substrate manufacturing apparatus to a low value or by restricting the movable range of the substrate manufacturing apparatus.

[0031] When substrate manufacturing apparatus 3 switches from normal state mode to abnormal state mode, self-propelled robot 1 moves to internal imaging position P where self-propelled robot-mounted imaging unit 2 captures an image of the interior of substrate manufacturing apparatus 3. Internal imaging position P is a predetermined position where self-propelled robot 1 faces second side wall 31b of substrate manufacturing apparatus 3 in a plan view, and where self-propelled robot-mounted imaging unit 2 assumes a posture such that it peers into the interior of substrate manufacturing apparatus 3 through window 32 of substrate manufacturing apparatus 3.

[0032] The communication unit 36 ​​shown in Fig. 2 is a wireless communication unit. The communication unit 36 ​​transmits and receives various information to and from the terminal 5. In particular, the communication unit 36 ​​transmits image information D2 of the interior of the substrate manufacturing apparatus 3 captured by the imaging unit 4 mounted on the substrate manufacturing apparatus to the terminal 5. The communication unit 36 ​​also transmits status information to the terminal 5 indicating whether the apparatus is in an abnormal status mode or a normal status mode. The communication unit 36 ​​also receives an imaging instruction for the imaging unit 4 mounted on the substrate manufacturing apparatus input to the remote control unit 6.

[0033] The control unit 37 is a controller that controls the operation of each component of the substrate manufacturing apparatus 3. The control unit 37 includes, for example, a computing device such as a central processing unit (CPU). The control unit 37 also includes memories such as a random access memory (RAM) and a read-only memory (ROM), and a storage device such as a hard disk. The control unit 37 executes control processing using the computing device based on programs and parameters stored in the storage device. Specifically, the control unit 37 controls the operation of the substrate transport robot 34, the hand 34a, and the shutter 31c. The control unit 37 also captures an image of the internal state of the substrate manufacturing apparatus 3 using the imaging unit 4 mounted on the substrate manufacturing apparatus based on an imaging instruction from the terminal 5. The control unit 37 then acquires image information D2 captured by the imaging unit 4 mounted on the substrate manufacturing apparatus and transmits the image information D2 to the terminal 5 via the communication unit 36. The control unit of the substrate manufacturing apparatus may be configured as an integrated controller that controls the substrate transport robot, hand, shutter, and imaging unit mounted on the substrate manufacturing apparatus, etc., or may be configured as separate controllers for each of the components of the substrate transport robot, hand, shutter, and imaging unit mounted on the substrate manufacturing apparatus, etc. Furthermore, the substrate manufacturing apparatus may include an integrated controller that controls the abnormality detection unit, communication unit, abnormality reset button, and shutter, and the substrate transport robot and imaging unit mounted on the substrate manufacturing apparatus may include dedicated controllers that are separate from the controller of the substrate manufacturing apparatus.

[0034] The abnormality reset button 38 is a button for resetting the abnormal state mode of the substrate manufacturing apparatus 3. The abnormality reset button 38 is disposed, for example, on the second side wall 31b of the housing 31. The abnormality reset button 38 is located between the window portion 32 and the door 31d in the vertical direction. The self-propelled robot 1 resets the abnormal state mode and switches to the normal state mode by operating the abnormality reset button 38 with the hand 14 of the robot arm 11. The abnormality reset button 38 can also be directly operated by an operator. The abnormality reset button 38 is an example of a "reset operation unit."

[0035] In addition to the abnormality reset button 38, the substrate manufacturing system 100 also includes an operation touch panel 7 for operating the substrate manufacturing apparatus 3 as a component for resetting the abnormal condition mode of the substrate manufacturing apparatus 3. The operation touch panel 7 is, for example, installed on a stand 70 beside the substrate manufacturing apparatus 3 and positioned near the second side wall 31b. The operation touch panel 7 is an operation unit that accepts input operations such as substrate processing procedures by the substrate manufacturing apparatus 3. The abnormal condition mode is reset by touching a reset button displayed on the operation touch panel 7. The operation touch panel 7 is operated by the hand 14 of the self-propelled robot 1 and an operator. The abnormal condition mode can also be reset by the remote control unit 6. More specifically, the substrate manufacturing system 100 can reset the abnormal condition mode by transmitting a reset signal from the remote control unit 6 to the substrate manufacturing apparatus 3 via the self-propelled robot 1. Note that the reset signal may also be transmitted directly from the remote control unit to the substrate manufacturing apparatus 3. The operation touch panel 7 is an example of a "reset operation unit."

[0036] (Detailed Configuration of the Imaging Unit Mounted on the Substrate Manufacturing Apparatus) The imaging unit 4 mounted on the substrate manufacturing apparatus shown in FIGS. 2 and 3 is a camera having an image sensor that captures moving and still images. The imaging unit 4 mounted on the substrate manufacturing apparatus is disposed on the substrate transport robot 34. The imaging unit mounted on the substrate manufacturing apparatus may also be disposed on the ceiling or other interior surface of the substrate manufacturing apparatus. In the normal state mode, the imaging range of the imaging unit 4 mounted on the substrate manufacturing apparatus is changed by the remote control unit 6. In the abnormal state mode, the operation of the substrate manufacturing apparatus 3 is restricted (stopped), so the imaging range of the imaging unit 4 mounted on the substrate manufacturing apparatus is fixed. Therefore, when switching from the normal state mode to the abnormal state mode, the hand 34a and the substrate C placed on the hand 34a may be outside the imaging range, and the abnormal state of the substrate C may not be confirmed from the image information D2 of the imaging unit 4 mounted on the substrate manufacturing apparatus. In such cases, the operator confirms the abnormal state of the substrate C using the imaging unit 2 mounted on the self-propelled robot, whose imaging range 20 can be changed by the remote control unit 6. The imaging unit 4 mounted on the substrate manufacturing apparatus is communicatively connected to the control unit 37 wirelessly or via a wire, and transmits image information D2 to the terminal 5 via the control unit 37. The imaging unit 4 mounted on the substrate manufacturing apparatus also receives an imaging instruction from the terminal 5 via the control unit 37. The timing of imaging by the imaging unit 4 mounted on the substrate manufacturing apparatus precedes the timing of imaging by the imaging unit 2 mounted on the self-propelled robot. In other words, after the imaging unit 4 mounted on the substrate manufacturing apparatus captures an image of the interior of the substrate manufacturing apparatus 3, the imaging unit 2 mounted on the self-propelled robot captures an image of the interior of the substrate manufacturing apparatus 3. Details will be described below together with the control process in FIG. 6 .

[0037] (Control Processing of Board Manufacturing System) The control processing of board manufacturing system 100 will be described with reference to Fig. 6. Each step described below is executed by control unit 16 of self-propelled robot 1 and control unit 37 of board manufacturing apparatus 3. That is, control unit 16 and control unit 37 cooperate to execute the following control processing.

[0038] First, in step S1, the control unit 37 of the substrate manufacturing apparatus 3 determines whether the abnormality detection unit 35 has detected an abnormality in the substrate C inside the substrate manufacturing apparatus 3. If an abnormality in the substrate C is detected, the process proceeds to step S2. If an abnormality in the substrate C is not detected, step S1 is repeated.

[0039] In step S2, the control unit 37 of the substrate manufacturing apparatus 3 switches from the normal state mode to the abnormal state mode. That is, the operation of the substrate manufacturing apparatus 3 is restricted (stopped). At this time, the operation of the imaging unit 4 mounted on the substrate manufacturing apparatus, which is connected to the control unit 37 of the substrate manufacturing apparatus 3, is also restricted (stopped). Therefore, the imaging range of the imaging unit 4 mounted on the substrate manufacturing apparatus is fixed.

[0040] In step S3, the control unit 37 of the substrate manufacturing apparatus 3 determines whether or not an image capture instruction for the imaging unit 4 mounted on the substrate manufacturing apparatus has been received from the terminal 5 in the monitoring room MR. If an image capture instruction for the imaging unit 4 mounted on the substrate manufacturing apparatus has been received from the terminal 5, the process proceeds to step S3. If an image capture instruction for the imaging unit 4 mounted on the substrate manufacturing apparatus has not been received from the terminal 5, the process returns to step S2.

[0041] In step S4, the control unit 37 of the substrate manufacturing apparatus 3 causes the imaging unit 4 mounted on the substrate manufacturing apparatus to capture an image of the interior of the substrate manufacturing apparatus 3. Then, the process proceeds to step S5. Note that when an abnormality in the substrate C is detected in step S1, the imaging by the imaging unit 4 mounted on the substrate manufacturing apparatus may be triggered only by the detection of the abnormality in the substrate in step S1, rather than by an imaging instruction from the terminal 5 as a trigger for imaging by the imaging unit 4 mounted on the substrate manufacturing apparatus.

[0042] In step S5, the control unit 37 of the substrate manufacturing apparatus 3 determines whether or not a reset operation for the abnormal state mode has been performed, such as by pressing the abnormality reset button 38. If a reset operation for the abnormal state mode has been performed, the process proceeds to step S10. If a reset operation for the abnormal state mode has not been performed, the process proceeds to step S6. Typically, the reset operation in step S5 is performed on the assumption that the abnormality in the substrate C has been resolved. In this case, "the abnormality in the substrate C has been resolved" means, for example, a case in which the abnormality detection unit 35 detects an abnormality in the substrate C, but it is determined that the worker is not abnormal based on the image information D2 of the imaging unit 4 mounted on the substrate manufacturing apparatus.

[0043] In step S6, control unit 16 of self-propelled robot 1 determines whether or not an image capture instruction has been received from terminal 5 for self-propelled robot-mounted imaging unit 2. If an image capture instruction has been received from terminal 5 for self-propelled robot-mounted imaging unit 2, the process proceeds to step S7. If an image capture instruction has not been received from terminal 5 for self-propelled robot-mounted imaging unit 2, the process returns to step S5.

[0044] In step S7, control unit 16 of self-propelled robot 1 moves self-propelled robot 1 to internal imaging position P where self-propelled robot-mounted imaging unit 2 captures an image of the inside of substrate manufacturing apparatus 3. Then, the process proceeds to step S8. Note that the detection of an abnormality in the substrate in step S1 may be the only trigger for moving the self-propelled robot to the internal imaging position.

[0045] In step S8, control unit 16 of self-propelled robot 1 causes self-propelled robot-mounted imaging unit 2 to capture an image of the interior of substrate manufacturing apparatus 3. Note that when self-propelled robot-mounted imaging unit 2 captures an image of the interior of substrate manufacturing apparatus 3, remote control unit 6 changes imaging range 20 of self-propelled robot-mounted imaging unit 2 as needed. Then, the process proceeds to step S9.

[0046] In step S9, the control unit 37 of the substrate manufacturing apparatus 3 determines whether an abnormality mode reset operation, such as pressing the abnormality reset button 38, has been performed. If an abnormality mode reset operation has been performed, the process proceeds to step S10. If an abnormality mode reset operation has not been performed, step S9 is repeated. Typically, the reset operation of step S9 is performed on the assumption that the abnormality in the substrate C has been resolved. In this case, "the abnormality in the substrate C has been resolved" refers to, for example, a case in which the abnormality detection unit 35 detects an abnormality in the substrate C, but the image information D2 from the imaging unit 4 mounted on the substrate manufacturing apparatus and the image information D1 from the imaging unit 2 mounted on the self-propelled robot are determined to be normal for the worker. Other examples of "the abnormality in the substrate C has been resolved" include a case in which the worker, wearing dustproof clothing, enters the clean room CR, opens the door 31d of the substrate manufacturing apparatus 3, and directly removes the abnormality in the substrate C. Alternatively, the self-propelled robot may be driven to open the door of the substrate manufacturing apparatus using its hand and directly remove the abnormality in the substrate.

[0047] In step S10, the abnormal state mode is reset by the control unit 37 of the substrate manufacturing apparatus 3. That is, the abnormal state mode is switched to the normal state mode.

[0048] [Effects of the First Embodiment] In the first embodiment, as described above, the self-propelled robot is provided with a detection unit (image capture unit 2) mounted on the self-propelled robot that detects the internal state of the substrate manufacturing apparatus 3. This allows the detection unit mounted on the self-propelled robot to detect the internal state of the substrate manufacturing apparatus 3. Therefore, the internal state of the substrate manufacturing apparatus 3 can be confirmed without the need for an operator to visit the site, which increases the operator's workload. When the substrate manufacturing apparatus 3 is disposed within a clean room CR, the preparation process for entering the clean room CR, such as the operator changing into dustproof clothing, can be eliminated, thereby shortening work time. Furthermore, the detection unit (image capture unit 2) mounted on the self-propelled robot is moved by the robot arm 11 of the self-propelled robot 1. This allows the robot arm 11 to position the detection unit mounted on the self-propelled robot at various positions and angles, allowing the internal state of the substrate manufacturing apparatus 3 to be freely detected. As a result, the internal state of the substrate manufacturing apparatus 3 can be easily confirmed while reducing the operator's workload for checking the internal state of the substrate manufacturing apparatus 3.

[0049] In the first embodiment, as described above, the detection unit mounted on the self-propelled robot is the imaging unit 2 mounted on the self-propelled robot that detects the internal state of the substrate manufacturing apparatus 3 by capturing an image of the inside of the substrate manufacturing apparatus 3. This allows the imaging unit 2 mounted on the self-propelled robot to capture an image of the inside of the substrate manufacturing apparatus 3 and the internal state of the substrate manufacturing apparatus 3 to be confirmed from the captured image, making it possible to more easily confirm the internal state of the substrate manufacturing apparatus 3 while further reducing the burden of the operator's confirmation work.

[0050] In the first embodiment, as described above, the self-propelled robot 1 includes a worker's terminal 5 having a display unit 5a, and a communication unit 15 that transmits image information D1 of the interior of the substrate manufacturing apparatus 3 captured by the self-propelled robot-mounted imaging unit 2 to the terminal 5. This allows the worker's terminal 5 having the display unit 5a to acquire the image information D1 via the communication unit 15, thereby reducing the burden of the worker's checking work and allowing the worker to easily check the internal state of the substrate manufacturing apparatus 3 using the display unit 5a of the terminal 5.

[0051] In the first embodiment, as described above, the self-propelled robot 1 is attached to the tip of the robot arm 11 on which the self-propelled robot-mounted imaging unit 2 is disposed, and includes the hand 14 that holds the substrate housing container F that houses the substrates C, and the substrate housing container F is held and transported by the hand 14. In this way, the self-propelled robot 1 used to transport the substrate housing container F can easily check the internal state of the substrate manufacturing apparatus 3 while further reducing the burden of checking work on the worker.

[0052] In the first embodiment, as described above, self-propelled robot 1 includes bracket 2a attached to the tip of robot arm 11, hand attachment section 13 attached to bracket 2a, and hand 14 replaceably attached to hand attachment section 13, and self-propelled robot-mounted imaging unit 2 is attached to bracket 2a. This allows hand 14 to be replaced without removing bracket 2a from robot arm 11, and therefore hand 14 can be replaced while maintaining the attachment state of self-propelled robot-mounted imaging unit 2 to bracket 2a.

[0053] In the first embodiment, as described above, the substrate manufacturing apparatus 3 includes the abnormality detection unit 35 that detects an abnormality in the substrate C, and when the abnormality detection unit 35 detects an abnormality in the substrate C, the substrate manufacturing apparatus 3 switches from a normal state mode in which the substrate manufacturing apparatus 3 operates to an abnormal state mode in which the operation of the substrate manufacturing apparatus 3 is restricted (stopped). As a result, in the abnormal state mode, the imaging unit 2 mounted on the self-propelled robot can capture an image of the inside of the substrate manufacturing apparatus 3 to check for an abnormality in the substrate C.

[0054] In the first embodiment, as described above, when self-propelled robot 1 switches from normal state mode to abnormal state mode, it moves to internal imaging position P, where self-propelled robot-mounted imaging unit 2 captures an image of the interior of substrate manufacturing apparatus 3. In this way, when self-propelled robot 1 switches from normal state mode to abnormal state mode, it is possible to move self-propelled robot 1 to internal imaging position P, thereby eliminating the process of having an operator operate self-propelled robot 1 to move self-propelled robot 1, which is a workload for the operator, to a position where self-propelled robot-mounted imaging unit 2 can capture an image of the interior of substrate manufacturing apparatus 3.

[0055] As described above, in the first embodiment, when self-propelled robot 1 moves to internal imaging position P, a remote control unit 6 is provided that accepts a range change instruction to move robot arm 11 and change imaging range 20 captured by self-propelled robot-mounted imaging unit 2. This allows remote control unit 6 to easily change imaging range 20 of self-propelled robot-mounted imaging unit 2 to an imaging range 20 that the worker wants to check.

[0056] In the first embodiment, as described above, the self-propelled robot 1 is provided with the abnormality reset button 38 and operation touch panel 7 for resetting the abnormality mode, and the self-propelled robot 1 resets the abnormality mode and switches to the normal state mode by operating either the abnormality reset button 38 or the operation touch panel 7 with the robot arm 11. In this way, because the abnormality reset button 38 and the operation touch panel 7 can be operated with the robot arm 11, the abnormality mode can be easily reset without the burden on the worker of having to go to the site and operate either the abnormality reset button 38 or the operation touch panel 7.

[0057] As described above, the first embodiment includes the substrate manufacturing apparatus 3 including the substrate transport robot 34 that transports substrates, and the imaging unit 4 mounted on the substrate manufacturing apparatus that is disposed inside the substrate manufacturing apparatus 3 and captures an image of the interior of the substrate manufacturing apparatus 3 to detect the internal state of the substrate manufacturing apparatus 3. Unlike the imaging unit 2 mounted on the self-propelled robot that is disposed outside the substrate manufacturing apparatus 3, the imaging unit 4 mounted on the substrate manufacturing apparatus can thereby capture an image of the interior of the substrate manufacturing apparatus 3 from inside the substrate manufacturing apparatus 3, allowing the internal state of the substrate manufacturing apparatus 3 to be confirmed in detail.

[0058] In the first embodiment, as described above, the imaging unit 4 mounted on the substrate manufacturing apparatus images the interior of the substrate manufacturing apparatus 3, and then the imaging unit 2 mounted on the self-propelled robot images the interior of the substrate manufacturing apparatus 3. In this way, when the imaging unit 4 mounted on the substrate manufacturing apparatus cannot sufficiently confirm the internal state of the substrate manufacturing apparatus 3, the imaging unit 2 mounted on the self-propelled robot can be used to confirm the internal state of the substrate manufacturing apparatus 3 in detail.

[0059] In the first embodiment, as described above, the substrate transport robot 34 transports the substrates C between the substrate storage container F that stores a plurality of substrates C and the substrate processing apparatus 8, and the imaging unit 4 mounted on the substrate manufacturing apparatus is disposed on at least one of the ceiling inside the substrate manufacturing apparatus 3 and the substrate transport robot 34. As a result, when the imaging unit 4 mounted on the substrate manufacturing apparatus is disposed on the ceiling inside the substrate manufacturing apparatus 3, the imaging unit 4 can capture images from a position that overlooks the entire interior of the substrate manufacturing apparatus 3. When the imaging unit 4 mounted on the substrate manufacturing apparatus is disposed on the substrate transport robot 34, the imaging unit 4 can capture images from a position relatively close to the substrates C that are transported by the imaging unit 4 to the substrate transport robot 34.

[0060] In the first embodiment, as described above, the substrate manufacturing apparatus 3 includes a window 32 that constitutes part of the housing 31 of the substrate manufacturing apparatus 3 and that is used to check the interior of the substrate manufacturing apparatus 3, and the self-propelled robot-mounted imaging unit 2 images the interior of the substrate manufacturing apparatus 3 through the window 32. This allows the self-propelled robot-mounted imaging unit 2 to easily image the interior of the substrate manufacturing apparatus 3 through the window 32 while reducing the burden of checking work on the worker.

[0061] In the first embodiment, as described above, the self-propelled robot 1 transports a substrate storage container F that stores substrates C, and the substrate manufacturing apparatus 3 includes a mounting table 30 on which the substrate storage container F is placed by the self-propelled robot 1, a first side wall 31 a arranged along the mounting table 30, and a second side wall 31 b that has a window 32 and is different from the first side wall 31 a. The self-propelled robot-mounted imaging unit 2 images the interior of the substrate manufacturing apparatus 3 from the outside of the substrate manufacturing apparatus 3 through the window 32 in the second side wall 31 b. This allows the self-propelled robot-mounted imaging unit 2 to image the interior of the substrate manufacturing apparatus 3 from the side of the second side wall 31 b, which is different from the side of the first side wall 31 a on which the mounting table 30 is located. This prevents the mounting table 30 on the side of the first side wall 31 a from interfering with imaging by the self-propelled robot-mounted imaging unit 2.

[0062] As described above, the first embodiment is provided with a substrate transport device serving as the substrate manufacturing apparatus 3, which includes the substrate transport robot 34 that transports the substrate C. This makes it possible to easily check the internal state of the substrate manufacturing apparatus 3 while reducing the burden of checking work on the operator in the substrate transport device (such as a so-called EFEM) serving as the substrate manufacturing apparatus 3 that includes the substrate transport robot 34 that transports the substrate C.

[0063] Second Embodiment The configuration of a manufacturing system 200 according to a second embodiment of the present disclosure will be described. Note that in the drawings, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0064] 7 includes a self-propelled robot 201, an imaging unit 202 mounted on the self-propelled robot, a manufacturing device 203, the terminal 5 shown in Fig. 2, the remote control unit 6 shown in Fig. 2, and an operation touch panel 7. Note that the imaging unit 202 mounted on the self-propelled robot is an example of a "detection unit mounted on the self-propelled robot."

[0065] The self-propelled robot 201 includes a housing 10 , a robot arm 11 , a movement unit 12 that moves the robot arm 11 , a hand attachment unit 13 , a hand 214 , a communication unit 15 , and a control unit 16 .

[0066] Self-propelled robot 201 removes workpiece W from manufacturing apparatus 203 after it has been processed by manufacturing apparatus 203, and stores the removed workpiece W in storage section 300. Self-propelled robot 201 also removes workpiece W from storage section 300 before it is processed by manufacturing apparatus 203, and places the removed workpiece W in manufacturing apparatus 203. Workpiece W is, for example, a plate-shaped workpiece such as a printed circuit board or a metal plate. When workpiece W is a printed circuit board, the printed circuit board may include multiple stacked board portions.

[0067] The hand 214 is replaceably attached to the hand attachment portion 13. The hand 214 is attached to the tip of the robot arm 11 via the hand attachment portion 13. The hand 214 includes a gripping hand 214a that grips the workpiece W. Specifically, the gripping hand 214a has a first pair of claws and a second pair of claws for gripping the workpiece W. The self-propelled robot 201 grips and transports the workpiece W with the gripping hand 214a. The gripping hand 214a clamps and grips the workpiece W by bringing the first pair of claws closer together in a first direction along the tip to base end of the gripping hand 214a and bringing the second pair of claws closer together in a second direction orthogonal to the first direction in a horizontal plane. Note that another type of hand is a hand (not shown) that has a touch operation portion for operating a touch panel. Even when no operator is present, the self-propelled robot 201 moves to a hand storage cabinet that stores various types of hands 214 and automatically changes the hand 214. In other words, the self-propelled robot 201 performs what is called an auto-tool change.

[0068] The self-propelled robot-mounted imaging unit 202 is disposed on the robot arm 11. The self-propelled robot-mounted imaging unit 202 captures an image of the workpiece W when the self-propelled robot 201 transports the workpiece W. The self-propelled robot-mounted imaging unit 202 is a camera having an image sensor that captures moving images and still images. The self-propelled robot-mounted imaging unit 202 is attached to the tip of the robot arm 11 via a hand 214. The self-propelled robot-mounted imaging unit 202 captures an image of the interior of the manufacturing apparatus 203 to check for any abnormalities therein. The self-propelled robot-mounted imaging unit 202 is communicatively connected to the control unit 16 wirelessly or via a wire, and transmits image information D1 to the terminal 5 via the control unit 16.

[0069] The manufacturing device 203 is an automatic machine, a processing machine, or the like. For example, the manufacturing device 203 is a processing machine that processes the workpiece W. For example, if the workpiece W is a printed circuit board, the manufacturing device 203 is a processing machine that drills holes in the printed circuit board. Furthermore, for example, if the workpiece W is a metal plate such as a copper plate, the manufacturing device 203 is a processing machine that drills holes in the metal plate.

[0070] The manufacturing apparatus 203 includes a housing 231 , a window 232 , a workpiece placement chamber 233 , an abnormality detection unit 235 , a communication unit 236 , and a control unit 237 .

[0071] The housing 231 has a housing main body 231a and an opening / closing door 231b that is attached to the housing main body 231a in an openable / closable manner. The opening / closing door 231b opens and closes an opening that connects a workpiece placement chamber 233, which is the internal space of the housing 231, with the external space of the housing 231. The opening / closing door 231b opens and closes, for example, by rotating relative to the housing main body 231a. With the opening / closing door 231b open, the self-propelled robot 201 removes the workpiece W from the manufacturing apparatus 203 or places the workpiece W in the manufacturing apparatus 203. A window 232 that allows viewing into the interior of the manufacturing apparatus 203 is provided in the opening / closing door 231b.

[0072] The abnormality detection unit 235 is a sensor that detects an abnormality in the manufacturing apparatus 203. When the abnormality detection unit 235 detects an abnormality in the manufacturing apparatus 203, the manufacturing apparatus 203 switches from a normal state mode in which the manufacturing apparatus 203 operates to an abnormal state mode in which the operation of the manufacturing apparatus 203 is stopped. In short, in the abnormal state mode, the manufacturing apparatus 203 cannot be operated. The communication unit 236 is a wireless communication unit. The communication unit 236 transmits and receives various information to the terminal 5. In detail, the communication unit 236 transmits status information to the terminal 5 indicating whether the manufacturing apparatus 203 is in the abnormal state mode or the normal state mode.

[0073] The control unit 237 is a controller that controls the operation of each unit of the manufacturing apparatus 203. The control unit 237 includes, for example, an arithmetic unit such as a CPU. The control unit 237 also includes memories such as RAM and ROM, and a storage device such as a hard disk. The control unit 237 executes control processing by the arithmetic unit based on programs, parameters, and the like stored in the storage device.

[0074] In the second embodiment, similarly to the first embodiment, the remote control unit 6 remotely controls the self-propelled robot 201, causing the self-propelled robot 201 to perform a task on the manufacturing apparatus 203. In particular, the self-propelled robot 201 is remotely controlled by the remote control unit 6 to perform at least one of the tasks of capturing images of the interior of the manufacturing apparatus 203 and operating the operation touch panel 7 of the manufacturing apparatus 203. The other configurations of the manufacturing system 200 are the same as those of the substrate manufacturing system 100 of the first embodiment.

[0075] Effect of the Second Embodiment As described above, the second embodiment includes a self-propelled robot-mounted detector (self-propelled robot-mounted image capture unit 202) that detects the internal state of the manufacturing apparatus 203. This allows the self-propelled robot-mounted detector to detect the internal state of the manufacturing apparatus 203, thereby enabling the operator to check the internal state of the manufacturing apparatus 203 without having to visit the site, which increases the operator's workload. When the manufacturing apparatus 203 is located in a clean room CR, the operator's preparation process for entering the clean room CR, such as changing into dustproof clothing, can be eliminated, thereby shortening work time. Furthermore, the self-propelled robot-mounted detector (self-propelled robot-mounted image capture unit 202) is moved by the robot arm 11 of the self-propelled robot 201. This allows the robot arm 11 to position the self-propelled robot-mounted detector at various positions and angles, allowing the operator to freely detect the internal state of the manufacturing apparatus 203. As a result, the operator's workload for checking the internal state of the manufacturing apparatus 203 can be reduced while easily checking the internal state of the manufacturing apparatus 203.

[0076] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and includes all modifications (modifications) within the meaning and scope of the claims.

[0077] For example, in the above embodiment, for convenience of explanation, the processing operation of the control unit is described using a flow-driven flowchart in which processing is performed in order according to a processing flow, but the present invention is not limited to this. In the present invention, the processing operation of the control unit may be performed by event-driven processing in which processing is performed on an event-by-event basis. In this case, the processing may be performed completely event-driven, or may be performed in a combination of event-driven and flow-driven.

[0078] In the above embodiment, the manufacturing apparatus is configured as a so-called EFEM that transports substrates between a substrate storage container and a substrate processing apparatus, but the present invention is not limited to this. In the present invention, the manufacturing apparatus may be configured as a so-called sorter that transports substrates between substrate storage containers, or as a so-called stocker that transports substrates between a substrate storage container and a substrate storage apparatus. Furthermore, the manufacturing apparatus may be equipped with an aligner that positions the substrates and detects eccentricity of the substrates.

[0079] In the above embodiment, the manufacturing apparatus is configured as an apparatus that transports substrates to manufacture the substrates, but the present invention is not limited to this. In the present invention, the manufacturing apparatus may be configured as an apparatus that manufactures substrates. In other words, the manufacturing apparatus may be configured as an apparatus that actually processes the substrates.

[0080] In the above embodiment, an example was shown in which the manufacturing system includes an imaging unit mounted on a substrate manufacturing apparatus, but the present invention is not limited to this. In the present invention, the manufacturing system does not necessarily have to include an imaging unit mounted on a substrate manufacturing apparatus.

[0081] In the above embodiment, the detection unit mounted on the self-propelled robot of the present invention is configured as an imaging unit that captures images of the internal state of the manufacturing apparatus, but the present invention is not limited to this. In the present invention, the detection unit mounted on the self-propelled robot of the present invention may be configured as a distance sensor or laser sensor that detects the internal state of the manufacturing apparatus. Furthermore, instead of the imaging unit mounted on the substrate manufacturing apparatus, a distance sensor or laser sensor disposed inside the substrate manufacturing apparatus may be provided.

[0082] Furthermore, in the above embodiment, an example was shown in which the self-propelled robot's onboard imaging unit was attached to the tip of the robot arm, but the present invention is not limited to this. In the present invention, the self-propelled robot's onboard imaging unit may be attached to a joint of the robot arm, rather than to the tip of the robot arm. In other words, the self-propelled robot's onboard imaging unit may be attached to a midpoint between the tip and base of the robot arm.

[0083] In the above embodiment, the window portion is provided on the second side wall, which is the left side wall of the manufacturing apparatus, but the present invention is not limited to this. In the present invention, the window portion may be provided on the right side wall of the manufacturing apparatus, etc.

[0084] In the above embodiment, the self-propelled robot is used to transport the substrate container, but the present invention is not limited to this. In the present invention, the self-propelled robot may be used to transport other replacement hands, etc.

[0085] In the above embodiment, an example was shown in which the imaging unit mounted on the self-propelled robot captured an image of the internal state of the manufacturing apparatus through a window when the manufacturing apparatus detected an abnormality in the substrate and switched from the normal state mode to the abnormal state mode, but the present invention is not limited to this. In the present invention, the imaging unit mounted on the self-propelled robot may capture an image of the internal state of the manufacturing apparatus through a window when the manufacturing apparatus is in the normal state mode.

[0086] In the above embodiment, an example was shown in which the control unit of the manufacturing device and the control unit of the self-propelled robot cooperate (multiple lower-level control units cooperate) to execute various control processes, but the present invention is not limited to this. The present invention may include a higher-level control unit that oversees the control of each of the control units of the manufacturing device and the self-propelled robot, and the higher-level control unit may play a central role in executing various control processes.

[0087] In the above embodiment, when the abnormal condition mode is switched to, an example is shown in which imaging is first performed by the imaging unit mounted on the substrate manufacturing apparatus, and then imaging is performed by the imaging unit mounted on the self-propelled robot, but the present invention is not limited to this. In the present invention, when the abnormal condition mode is switched to, imaging may be first performed by the imaging unit mounted on the self-propelled robot, and then imaging may be performed by the imaging unit mounted on the substrate manufacturing apparatus. Note that when the abnormal condition mode is switched to, imaging by the imaging unit mounted on the substrate manufacturing apparatus does not have to be performed.

[0088] In addition, in the above embodiment, an example was shown in which the communication unit of the self-propelled robot was a wireless communication unit, but the present invention is not limited to this. In the present invention, the communication unit of the self-propelled robot may be a wired communication unit. Similarly, the communication unit of the manufacturing device may be a wired communication unit instead of a wireless communication unit.

[0089] Furthermore, in the above embodiment, an example was shown in which the self-propelled robot's onboard imaging unit was attached to the robot arm of the self-propelled robot via a bracket, but the present disclosure is not limited to this. In the present disclosure, the self-propelled robot's onboard imaging unit may be held by the hand of the robot arm of the self-propelled robot. The self-propelled robot's onboard imaging unit may be configured to be moved by the robot arm.

[0090] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0091] Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0092] (Aspect 1) A manufacturing system comprising: a self-propelled robot including a robot arm and a movement unit that moves the robot arm; and a detection unit mounted on the self-propelled robot that is moved by the robot arm and detects an internal state of a manufacturing device.

[0093] (Aspect 2) The manufacturing system according to aspect 1, wherein the detection unit mounted on the self-propelled robot is an imaging unit mounted on the self-propelled robot that detects the state of the interior of the manufacturing device by capturing an image of the interior of the manufacturing device.

[0094] (Aspect 3) The manufacturing system according to Aspect 2, further comprising a terminal for an operator having a display unit, wherein the self-propelled robot includes a communication unit that transmits image information of the inside of the manufacturing device captured by an imaging unit mounted on the self-propelled robot to the terminal.

[0095] (Aspect 4) The manufacturing system according to Aspect 2 or 3, wherein the self-propelled robot includes a hand attached to a tip of the robot arm on which the self-propelled robot-mounted imaging unit is disposed, the hand holding a substrate housing container that houses substrates, and the hand holds and transports the substrate housing container.

[0096] (Aspect 5) The manufacturing system described in Aspect 2, wherein the self-propelled robot includes a bracket attached to the tip of the robot arm, a hand attachment portion attached to the bracket, and a hand replaceably attached to the hand attachment portion, and the self-propelled robot-mounted imaging unit is attached to the bracket.

[0097] (Aspect 6) A manufacturing system according to any one of Aspects 2 to 5, wherein the manufacturing apparatus includes an abnormality detection unit that detects an abnormality in the substrate, and when the abnormality detection unit detects an abnormality in the substrate, the manufacturing apparatus switches from a normal state mode in which the manufacturing apparatus operates to an abnormal state mode in which operation of the manufacturing apparatus is restricted.

[0098] (Aspect 7) The manufacturing system according to Aspect 6, wherein when the self-propelled robot switches from the normal state mode to the abnormal state mode, the self-propelled robot moves to an internal imaging position for imaging the interior of the manufacturing device using an imaging unit mounted on the self-propelled robot.

[0099] (Aspect 8) The manufacturing system according to Aspect 7, further comprising a remote control unit that receives a range change instruction to change the imaging range of the imaging unit mounted on the self-propelled robot by moving the robot arm when the self-propelled robot moves to the internal imaging position.

[0100] (Aspect 9) A manufacturing system according to any one of Aspects 6 to 8, further comprising an abnormality reset operation unit that resets the abnormal state mode, wherein the self-propelled robot resets the abnormal state mode and switches to the normal state mode by operating the abnormality reset operation unit with the robot arm.

[0101] (Aspect 10) A manufacturing system according to any one of Aspects 2 to 9, comprising: the manufacturing apparatus including a substrate transport robot that transports substrates; and an imaging unit mounted on the substrate manufacturing apparatus that is disposed inside the manufacturing apparatus and captures an image of the inside of the manufacturing apparatus to detect the internal condition of the manufacturing apparatus.

[0102] (Aspect 11) The manufacturing system according to aspect 10, wherein the imaging unit mounted on the substrate manufacturing apparatus images the interior of the manufacturing apparatus, and then the imaging unit mounted on the self-propelled robot images the interior of the manufacturing apparatus.

[0103] (Aspect 12) The manufacturing system according to Aspect 10 or 11, wherein the substrate transport robot transports the substrate between a substrate storage container that stores a plurality of the substrates and a substrate processing apparatus, and the imaging unit mounted on the substrate manufacturing apparatus is disposed on at least one of a ceiling inside the manufacturing apparatus and the substrate transport robot.

[0104] (Aspect 13) A manufacturing system according to any one of Aspects 2 to 12, wherein the manufacturing device includes a window portion that forms part of a housing of the manufacturing device and that allows the interior of the manufacturing device to be viewed, and the imaging unit mounted on the self-propelled robot images the interior of the manufacturing device from outside the manufacturing device through the window portion.

[0105] (Aspect 14) The manufacturing system described in Aspect 13, wherein the self-propelled robot transports a substrate storage container that stores substrates; the manufacturing apparatus includes: a mounting table on which the substrate storage container is placed by the self-propelled robot; a first side wall arranged along the mounting table; and a second side wall different from the first side wall and in which the window portion is arranged; and the imaging unit mounted on the self-propelled robot images the interior of the manufacturing apparatus through the window portion of the second side wall.

[0106] (Aspect 15) The manufacturing system according to any one of aspects 1 to 14, further comprising a substrate transfer device as the manufacturing device, the substrate transfer device including a substrate transfer robot that transfers a substrate.

Claims

1. A manufacturing system comprising: a self-propelled robot including a robot arm and a movement unit that moves the robot arm; and a detection unit mounted on the self-propelled robot that is moved by the robot arm and detects the internal condition of a manufacturing device.

2. A manufacturing system as described in claim 1, wherein the detection unit mounted on the self-propelled robot is an imaging unit mounted on the self-propelled robot that detects the internal condition of the manufacturing equipment by imaging the interior of the manufacturing equipment.

3. A manufacturing system as described in claim 2, further comprising an operator's terminal having a display unit, wherein the self-propelled robot includes a communication unit that transmits image information of the inside of the manufacturing equipment captured by an imaging unit mounted on the self-propelled robot to the terminal.

4. A manufacturing system as described in claim 2, wherein the self-propelled robot is attached to the tip of the robot arm on which the self-propelled robot-mounted imaging unit is located, includes a hand that holds a substrate container that contains substrates, and holds and transports the substrate container with the hand.

5. A manufacturing system as described in claim 2, wherein the self-propelled robot includes a bracket attached to the tip of the robot arm, a hand mounting portion attached to the bracket, and a hand replaceably attached to the hand mounting portion, and the imaging unit mounted on the self-propelled robot is attached to the bracket.

6. A manufacturing system as described in claim 2, wherein the manufacturing equipment includes an abnormality detection unit that detects abnormalities in the substrate, and when the abnormality detection unit detects an abnormality in the substrate, the manufacturing equipment switches from a normal state mode in which the manufacturing equipment operates to an abnormal state mode in which operation of the manufacturing equipment is restricted.

7. A manufacturing system as described in claim 6, wherein when the self-propelled robot switches from the normal state mode to the abnormal state mode, the self-propelled robot moves to an internal imaging position for imaging the inside of the manufacturing equipment using an imaging unit mounted on the self-propelled robot.

8. A manufacturing system as described in claim 7, further comprising a remote control unit that receives a range change instruction to move the robot arm and change the imaging range of the imaging unit mounted on the self-propelled robot when the self-propelled robot moves to the internal imaging position.

9. A manufacturing system as described in claim 6, further comprising an abnormality reset operation unit that resets the abnormal state mode, wherein the self-propelled robot resets the abnormal state mode and switches to the normal state mode by operating the abnormality reset operation unit with the robot arm.

10. A manufacturing system as described in claim 2, comprising: a manufacturing apparatus including a substrate transport robot that transports substrates; and an imaging unit mounted on the substrate manufacturing apparatus that is disposed inside the manufacturing apparatus and detects the internal condition of the manufacturing apparatus by imaging the inside of the manufacturing apparatus.

11. The manufacturing system according to claim 10, wherein after the imaging unit mounted on the substrate manufacturing apparatus images the interior of the manufacturing apparatus, the imaging unit mounted on the self-propelled robot images the interior of the manufacturing apparatus.

12. The manufacturing system described in claim 10, wherein the substrate transport robot transports the substrate between a substrate storage container that stores a plurality of the substrates and a substrate processing device, and the imaging unit mounted on the substrate manufacturing device is disposed on at least one of a ceiling inside the manufacturing device and the substrate transport robot.

13. The manufacturing system of claim 2, wherein the manufacturing equipment forms part of a housing of the manufacturing equipment and includes a window portion for checking the inside of the manufacturing equipment, and the imaging unit mounted on the self-propelled robot images the inside of the manufacturing equipment from outside the manufacturing equipment through the window portion.

14. The manufacturing system described in claim 13, wherein the self-propelled robot transports a substrate storage container that stores substrates, the manufacturing equipment includes a mounting table on which the substrate storage container is placed by the self-propelled robot, a first side wall arranged along the mounting table, and a second side wall different from the first side wall and in which the window portion is arranged, and the imaging unit mounted on the self-propelled robot images the interior of the manufacturing equipment through the window portion of the second side wall.

15. The manufacturing system according to claim 1, further comprising a substrate transport device as the manufacturing device, the substrate transport device including a substrate transport robot for transporting a substrate.

Images