Optical system capable of easily inspecting large area and observation device comprising same

Abstract

Disclosed are an optical system capable of easily inspecting a large area and an observation device comprising same. According to an aspect of the present embodiment, the observation device for observing an object to be observed comprises: a plurality of light sources for emitting light for observing an observation area; a plurality of imaging systems for propagating light to the observation area and a reference mirror inside the imaging systems to generate interference light including optical characteristics of the object to be observed; a plurality of image sensors for receiving interference light interfered by each imaging system and sensing the optical characteristics of object light reflected from an object to be detected; and a control unit for controlling the operation of each light source and observing the object to be observed, on the basis of the sensing value by each image sensor, wherein each imaging system is implemented such that the size of an image formed on the image sensor is larger than an image of the observation area.

Description

An optical system capable of easily inspecting a large area and an observation device including the same

[0001] The present embodiment relates to an optical system capable of easily inspecting a wide area of ​​an observation target and an observation device including the same.

[0002] The content described in this section merely provides background information for the present embodiment and does not constitute prior art.

[0003] Observation equipment is a device that inspects the object of observation (surface, etc.) or the observation area for various purposes, such as whether an abnormality has occurred. Observation equipment uses a magnifying optical system that has a magnification greater than 1 and the image formed on the image sensor, etc. is larger than the image of the object of observation (or the observation area), or uses a reduction optical system that has a magnification less than 1 and the image formed on the image sensor, etc. is smaller than the image of the object of observation (or the observation area).

[0004] Examples of reduction and enlargement optical systems are shown in Fig. 17.

[0005] Fig. 17a is a drawing showing the configuration of a device for observing an observation object using a reduction optical system, and Fig. 17b is a drawing showing the configuration of a device for observing an observation object using a magnification optical system.

[0006] As illustrated in Fig. 17a, the observation area (1710) passes through a reduction optical system (1720) and an image is formed on an image sensor (1730) having a smaller size than the image of the observation area (1710). The observation device can inspect the observation area (1710) using the sensing value of the image sensor (1730).

[0007] At this time, if the observation device wants to observe multiple observation areas (1710a, 1710b) adjacent to each other within one observation target, it can observe multiple observation areas (1710a, 1710b) without difficulty by including a reduction optical system.

[0008] On the other hand, as illustrated in Fig. 17b, the observation area passes through a magnifying optical system (1740) and an image is formed on an image sensor (1750) having a size larger than that of the observation area (1710). Accordingly, the observation device including the reduction optical system can collectively sense the observation area (1710) and then collectively observe the observation target through a post-processing (image processing) process.

[0009] On the other hand, if the observation device wants to observe multiple adjacent observation areas (1710a, 1710b) within a single observation target, it has a problem as illustrated in Fig. 17b because it includes a magnifying optical system. As described above, since the size of the image sensor (1750) is larger than the image of the observation area (1710), a problem arises in that the physical arrangement of the image sensors (1750a, 1750b) for observing the aforementioned observation areas (1710a, 1710b) becomes impossible.

[0010] Accordingly, conventional observation devices including magnifying optical systems have the inconvenience of having to move the observation area within the entire area of ​​the observation object to observe the entire observation object when the observation area is smaller than the entire area of ​​the observation object. Accordingly, conventional observation devices including magnifying optical systems have had considerable inconvenience in observing the observation object.

[0011] One object of the present invention is to provide an optical system and an observation device including the same that can easily observe a wide area even if the observation area is relatively narrower than the observation target.

[0012] According to one aspect of the present embodiment, an observation device for observing an observation object includes one or more light sources for irradiating light for observation of an observation area, a plurality of imaging systems for generating object light or interference light including optical characteristics of an observation object by transmitting light to the observation area or the observation area and a reference mirror inside the observation area, a plurality of image sensors for sensing optical characteristics of a detection object by receiving light generated in each imaging system, and a control unit for controlling the operation of each light source, controlling the operation of each image sensor, and observing the observation object based on the sensing value of each image sensor, wherein each imaging system is implemented such that the size of an image formed on the image sensor is larger than an image of the observation area.

[0013] According to one aspect of the present embodiment, each imaging system is characterized by including a deflection element that converts an optical path.

[0014] According to one aspect of the present embodiment, the image sensors are characterized in that they are arranged so as not to physically overlap.

[0015] According to one aspect of the present embodiment, the biasing element is characterized in that it changes the path of light so that the image sensors are positioned so that they do not physically overlap, and each observation area is positioned at a preset interval in the width direction and the length direction.

[0016] According to one aspect of the present embodiment, the deflection element is characterized in that it can be implemented as a mirror, a diffraction grating, a prism, or a metasurface.

[0017] According to one aspect of the present embodiment, the control unit is characterized in that it controls the operation of each image sensor in synchronization with the speed or position at which the observation object moves.

[0018] According to one aspect of the present embodiment, the control unit is characterized in that it can simultaneously observe an area greater than a preset standard value of the observation object.

[0019] According to one aspect of the present embodiment, there is provided an observation system, comprising: a stage for placing and moving an observation object; and an observation device for measuring optical characteristics of the observation object by observing an observation area in synchronization with the speed or position of the observation object on the stage, wherein the observation device comprises one or more light sources for irradiating light for observation of the observation area; a plurality of imaging systems for generating object light or interference light including optical characteristics of the observation object by propagating the light to the observation area or the observation area and a reference mirror inside the observation area; a plurality of image sensors for receiving the light generated in each imaging system and sensing the optical characteristics of the detection object; and a control unit for controlling the operation of each image sensor and observing the observation object based on the sensing value of each image sensor, wherein each imaging system is implemented such that the size of an image formed on the image sensor is larger than that of an image of the observation area.

[0020] According to one aspect of the present embodiment, the imaging system is characterized in that each observation area is arranged without gaps in one direction, but is arranged at a preset interval in a direction perpendicular thereto.

[0021] According to one aspect of the present embodiment, an observation device is provided, which includes an optical mask that receives interference light that has passed through a focusing system and generates a plurality of phase-shifting interference patterns, wherein the optical mask includes an optical array that receives the interference light and induces phase shifts at different angles on its own, and a circularly polarizing beam splitter that receives light that has passed through the optical array and reflects one circularly polarized component and transmits another circularly polarized component.

[0022] According to one aspect of the present embodiment, the optical array is implemented as a geometric phase optical element and is characterized in that it induces a phase shift for incident interference light.

[0023] According to one aspect of the present embodiment, the optical array is characterized in that it is implemented as a structure having a meta surface or a structure including a liquid crystal.

[0024] According to one aspect of the present embodiment, the optical array is characterized in that it separates incident light into a polarization component identical to that of the incident light and a polarization component opposite to that of the incident light.

[0025] According to one aspect of the present embodiment, the circular polarizing beam splitter is characterized by having a helical structure (Chirality).

[0026] According to one aspect of the present embodiment, the circularly polarized beam splitter is characterized in that it reflects a circularly polarized component of light incident thereon that has the same rotational direction as its own helical structure, and transmits a circularly polarized component that rotates in the opposite direction.

[0027] According to one aspect of the present embodiment, an optical characteristic detection method is provided, characterized in that it includes a first detection process of detecting an interference pattern of object light and reference light transmitted through an optical mask, an acquisition process of grouping the interference patterns detected in the first detection process according to an optical axis rotation angle of a geometric phase optical pixel to acquire a plurality of interference pattern images, and a second detection process of detecting an optical characteristic of the object light using the plurality of interference pattern images acquired in the acquisition process, in a method for detecting an optical characteristic of an observation object by an observation device.

[0028] According to one aspect of the present embodiment, an observation device for observing an observation object is provided, comprising: one or more light sources for irradiating light for observation of an observation area; a plurality of imaging systems for transmitting light to the observation area or the observation area and a reference mirror inside the observation area to generate object light or interference light including optical characteristics of the observation object; a plurality of image sensors for receiving the light generated in each imaging system and sensing the optical characteristics of the detection object; a plurality of optical masks for receiving interference light that has passed through each imaging system from in front of each image sensor on an optical path and generating a plurality of phase-shifting interference patterns; and a control unit for controlling the operation of each image sensor and observing the observation object based on the sensing values ​​of each image sensor, wherein each optical mask includes an optical array for receiving interference light and inducing a phase shift at a different angle on its own; and a circularly polarizing beam splitter for receiving light that has passed through the optical array and reflecting one circularly polarized component and transmitting another circularly polarized component.

[0029] According to one aspect of the present embodiment, an observation device for observing an observation object includes one or more light sources for irradiating light for observation of an observation area, a plurality of imaging systems for generating object light or interference light including optical characteristics of an observation object by transmitting light to the observation area or the observation area and a reference mirror inside the observation area, a plurality of image sensors for receiving light generated in each imaging system and sensing the optical characteristics of a detection object, and a control unit for controlling the operation of each image sensor and observing the observation object based on the sensing value of each image sensor, wherein each imaging system is characterized in that each observation area is arranged without gaps in one direction, but is arranged at a preset interval in a direction perpendicular thereto.

[0030] According to one aspect of the present embodiment, the imaging system is characterized by including an objective lens.

[0031] According to one aspect of the present embodiment, the image sensor, the objective lens, and the observation area are characterized in that their centers are arranged on the same line or are arranged at a position within a preset error range from the same line.

[0032] According to one aspect of the present embodiment, the objective lens is characterized in that its area or diameter is larger than that of the image sensor and the observation device.

[0033] According to one aspect of the present embodiment, the objective lens is characterized in that it is arranged parallel to an adjacent objective lens in one direction.

[0034] According to one aspect of the present embodiment, an observation system is provided, comprising a stage for placing and moving an observation object, and an observation device for measuring optical characteristics of the observation object by observing an observation area in synchronization with the speed or position of the observation object on the stage, wherein the observation device includes one or more light sources for irradiating light for observation of the observation area, a plurality of imaging systems for generating object light or interference light including optical characteristics of the observation object by propagating the light to the observation area or the observation area and a reference mirror inside the observation area, a plurality of image sensors for receiving the light generated in each imaging system and sensing the optical characteristics of the detection object, and a control unit for controlling the operation of each image sensor and observing the observation object based on the sensing value of each image sensor, wherein each imaging system is characterized in that each observation area is arranged without a gap in one direction, but is arranged at a preset interval in a direction perpendicular thereto.

[0035] According to one aspect of the present embodiment, the observation area is characterized in that the stage is arranged without gaps in a vertical direction in which the observation object is moved, and the stage is arranged at a preset interval in the direction in which the observation object is moved.

[0036] According to one aspect of the present embodiment, the control unit is characterized in that it controls the operation of each image sensor in synchronization with the speed of the stage or the position of the observation object.

[0037] As described above, according to one aspect of the present embodiment, there is an advantage in that a wide area can be easily observed even if the observation area is relatively narrower than the observation target.

[0038] FIG. 1 is a diagram illustrating an example of an observation system according to one embodiment of the present invention.

[0039] FIG. 2 is a drawing showing the configuration of an observation device according to the first embodiment of the present invention.

[0040] FIG. 3 is a drawing showing an example of an observation device according to the first embodiment of the present invention.

[0041] FIG. 4 is a drawing showing an observation area of ​​an observation device according to a first embodiment of the present invention.

[0042] FIG. 5 is a drawing illustrating a process of observing an observation object by an observation device according to a first embodiment of the present invention.

[0043] Figure 6 is a drawing showing the configuration of an observation device according to a second embodiment of the present invention.

[0044] FIG. 7 is a drawing illustrating the configuration of an optical mask according to a second embodiment of the present invention.

[0045] FIG. 8 is a drawing explaining the optical characteristics of an optical array according to a second embodiment of the present invention.

[0046] FIG. 9 is a drawing illustrating the material properties of a material constituting an optical array according to a second embodiment of the present invention.

[0047] FIG. 10 is a drawing illustrating the structure of an optical array according to a second embodiment of the present invention.

[0048] FIG. 11 is a drawing showing the structure and chiral volume grating characteristics of a circular polarizing beam splitter according to a second embodiment of the present invention.

[0049] FIG. 12 is a drawing explaining the optical characteristics of a circular polarizing beam splitter according to the second embodiment of the present invention.

[0050] FIG. 13 is a drawing illustrating the optical characteristics of an optical mask according to a second embodiment of the present invention.

[0051] Fig. 14 is a drawing illustrating an optical characteristic detection process of an observation device according to a second embodiment of the present invention.

[0052] FIG. 15 is a diagram illustrating a pixel structure of a phase-shifted interference pattern detected by an image sensor according to a second embodiment of the present invention.

[0053] Figure 16 is a flowchart illustrating a method for detecting optical characteristics of an observation object by an observation device according to a second embodiment of the present invention.

[0054] Figure 17 is a drawing showing the configuration of a device for observing an object of observation using a reduction optical system or a magnification optical system.

[0055] Fig. 18 is a drawing showing an example of an observation device according to a third embodiment of the present invention.

[0056] Fig. 19 is a drawing showing an observation area of ​​an observation device according to a third embodiment of the present invention.

[0057] Figure 20 is a drawing illustrating a process of observing an observation object by an observation device according to a third embodiment of the present invention.

[0058] The present invention is susceptible to various modifications and embodiments. Specific embodiments are illustrated and described in detail in the drawings. However, this is not intended to limit the present invention to specific embodiments, but rather to encompass all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present invention. Throughout the description of each drawing, similar reference numerals have been used to designate similar components.

[0059] Terms such as first, second, A, and B may be used to describe various components, but these components should not be limited by these terms. These terms are used solely to distinguish one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component. The term "and / or" includes a combination of multiple related items described herein or any of multiple related items described herein.

[0060] When a component is referred to as being "connected" or "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but that there may be other components intervening. Conversely, when a component is referred to as being "directly connected" or "connected" to another component, it should be understood that there are no other components intervening.

[0061] The terminology used in this application is solely for the purpose of describing specific embodiments and is not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. It should be understood that terms such as "comprise" or "have" in this application do not preclude the presence or addition of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification.

[0062] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs.

[0063] Terms defined in commonly used dictionaries should be interpreted to have a meaning consistent with their meaning in the context of the relevant technology, and will not be interpreted in an idealized or overly formal sense unless expressly defined in this application.

[0064] In addition, each configuration, process, procedure or method included in each embodiment of the present invention may be shared within a scope that is not technically inconsistent with each other.

[0065] FIG. 1 is a diagram illustrating an example of an observation system according to one embodiment of the present invention.

[0066] Referring to FIG. 1, an observation system (100) according to one embodiment of the present invention includes an observation device (110) and a stage (120).

[0067] The observation system (100) observes an observation object moving on a stage (120) for various purposes, such as detecting the shape of the observation object or detecting the occurrence of anomalies on the surface. The observation system (100) observes the observation object by measuring the optical characteristics of the object light reflected from the observation object (e.g., a semiconductor, a display device, etc.). Here, the measured optical characteristics may include some or all of the phase, amplitude, and polarization components of the object light.

[0068] The observation device (110) measures the optical characteristics of the observation object to observe the observation area and the observation object. Although the observation device (110) includes an imaging system that operates as a magnifying optical system, it can easily inspect an area wider than the observation area. In particular, as will be described later, the observation device (110) can easily inspect an area wider than the observation area by observing the observation area in synchronization with the speed or position of the observation object on the stage (120). Accordingly, the inconvenience of having to move the observation area within the entire area of ​​the observation object to observe, unlike conventional observation devices, can be eliminated. A more specific configuration of the observation device (110) will be described later with reference to FIGS. 2 to 16.

[0069] The stage (120) places and moves an observation object. The stage (120) moves the observation object placed on it toward the observation device (110) at a preset speed. As the stage (120) moves the observation object, the entire observation object can be observed even if the observation device (110) is observing only one point. In some cases, the stage (120) transmits the movement position with respect to a reference point to the observation device (110), thereby enabling the observation device (110) to determine how much the observation object has moved from an initial position or a preset point, or at what position it is currently located. The stage (120) may transmit the movement position at preset intervals, or may transmit its own position when the reference point or the observation object passes a set point.

[0070] FIG. 2 is a drawing showing the configuration of an observation device according to the first embodiment of the present invention, and FIG. 3a is a drawing showing an example of an implementation of the observation device according to the first embodiment of the present invention.

[0071] Referring to FIGS. 2 and 3a, an observation device (110) according to a first embodiment of the present invention includes one or more light sources (210a to 210n), a plurality of imaging systems (220a to 220n), a plurality of image sensors (230a to 230n), and a control unit (240). Each imaging system (220) includes a beam splitter (310), a tube lens (320), a deflection element (330), and an objective lens (340). Furthermore, the observation device (110) may further include a communication unit (250).

[0072] Each light source (210a to 210n) irradiates light for observation of the observation area (350).

[0073] Each imaging system (220a to 220n) transmits light to an observation area (350) or transmits light between the observation area (350) and a reference mirror (370) to generate object light or interference light containing the optical characteristics of the observation target.

[0074] Each image sensor (230a to 230n) receives object light or interference light generated by each imaging system (220a to 220n) and senses the optical characteristics of the observation target. Each image sensor (230a to 230n) receives object light or interference light and senses the optical characteristics of the object light, thereby enabling (a device user, etc.) to observe the observation target. Each image sensor (230a to 230n) may perform sensing (On) or not perform sensing (Off). Since the image sensors (230a to 230n) perform sensing at a specific point in time under the control of the control unit (240), they can sense the optical characteristics of the observation target in synchronization with the speed or position of the stage (120).

[0075] The control unit (240) controls the operation of each image sensor (230a to 230n) and observes the observation target based on the sensing value of each image sensor (230a to 230n). The control unit (240) controls the operation of each image sensor (230a to 230n) in synchronization with the speed of the stage (120) or the position of the observation target, as will be described later with reference to FIG. 5. The operation of each light source (210a to 210n) may be controlled, but the control unit (240) may control the operation of each image sensor (230a to 230n) for the convenience of control and operation. The control unit (240) controls the operation of each image sensor (230a to 230n) to perform sensing at each point in time when a preset time has elapsed, thereby enabling the observation of an area greater than a preset reference value of the observation target at one time (as will be described later with reference to FIG. 5). Alternatively, if the communication unit (250) receives from the stage (120) that the observation target or the observation target mounted on the stage is passing through each preset location, the control unit (240) can control each image sensor (230a to 230n) to sense at that time. Accordingly, the control unit (240) can simultaneously observe an area of ​​the observation target that is greater than a preset reference value by only performing post-processing to the extent of combining the sensing values ​​sensed by each image sensor (230a to 230n) for a certain period of time.

[0076] Furthermore, the observation device (110) may further include a communication unit (250). The communication unit (250) receives, more specifically, from an encoder (not shown) within the stage (120), the (movement) position of a reference point within the stage (120) or the position of an observation object placed on the stage (120). The communication unit (250) transmits the received information to the control unit (240), thereby allowing the control unit (240) to determine whether the observation object is located at a point where an image is to be sensed and control the image sensor (230).

[0077] Each imaging system (220a to 220n) can be implemented as a magnifying optical system (an optical system in which the size of the image formed on the image sensor, etc. is larger than the image of the target area because the magnification is greater than 1) to observe the phase among the optical characteristics of the observation target, as shown in Fig. 3a.

[0078] The beam splitter (310) reflects light irradiated from the light source (210) to the observation area (350), and transmits light reflected from the observation area (350) to the image sensor (230).

[0079] The tube lens (320) and / or the objective lens (340) enable the light reflected from the beam splitter (310) and traveling to the observation area (350) to be focused onto the observation area (350). Only the objective lens (340) may be included to perform the aforementioned operation, or both the tube lens (320) and the objective lens (340) may be included to perform the aforementioned operation.

[0080] The deflection element (330) is arranged on the optical path along which the light reflected from the beam splitter (310) proceeds to the observation area (350), thereby converting the optical path. The deflection element (330) can be mainly arranged between the tube lens (320) and the objective lens (340), and any element capable of changing the optical path, such as a mirror, a diffraction grating, a prism, or a metasurface, may be implemented. The deflection element (330) converts the path of the light reflected from the beam splitter (310) (so that it proceeds to the observation area (350)) toward the observation area (350). As described above, the imaging system (220) operates as a magnifying optical system. The area of ​​the image sensor (230) is implemented to be larger than the area of ​​the observation area (350). When the observation area (350) and the image sensor (230) are arranged on the same axis, the problem of the conventional magnifying optical system (the image sensors (230) are physically overlapped and arranged) is the same as that of the conventional magnifying optical system, as shown in FIG. 17b.

[0081] As the deflection elements (330) are arranged within each imaging system (220a to 220n), the observation area (350) can be formed so that it is spaced apart by a predetermined interval (r2) in the width direction and the length direction as described later with reference to FIG. 4, and the adjacent image sensors (230a to 230n) can be arranged so that they do not physically overlap (r1 > 0). Each light source (210a to 210n) can operate simultaneously, and each image sensor (230a to 230n) can receive the interference light interfered by each imaging system (220a to 220n) and sense the optical characteristics of the object light reflected from the observation target. Accordingly, even if the imaging systems (220) implemented as magnifying optical systems are arranged in an array, the occurrence of problems similar to those in the prior art can be resolved.

[0082] Meanwhile, each imaging system (220a to 220n) can be implemented as a magnifying optical system as shown in Fig. 3b to observe the amplitude or polarization component among the optical characteristics of the observation target.

[0083] FIG. 3b is a drawing showing another embodiment of an observation device according to the first embodiment of the present invention.

[0084] Referring to FIGS. 2 and 3b, each imaging system (220) according to the first embodiment of the present invention includes a tube lens (320), a deflection element (330), an objective lens (340), a polarizing beam splitter (360), a reference mirror (370), and QWP (Quarter Wave Plate, 380a to 380c).

[0085] The polarizing beam splitter (360) splits the light irradiated from the light source (210) into different directions according to the polarization direction, or causes the light reflected from the reference mirror (370) and the observation area (350) to interfere with each other and advance to the image sensor (230).

[0086] The QWP (380a) is arranged on the path of light that is branched from the polarizing beam splitter (360) and proceeds to the observation area (350), and converts linearly polarized light incident on it into circularly polarized light and circularly polarized light into linearly polarized light. The light branched from the polarizing beam splitter (360) passes through the QWP (380a) and is converted into either left-hand circularly polarized light or right-hand circularly polarized light. Meanwhile, the light reflected from the observation area (350) passes through the QWP (380a) and is converted into linearly polarized light again. At this time, since the light that has finally passed through the QWP (380a) passes through the QWP (380a) twice, it has a polarization direction that is perpendicular to the linearly polarized direction when it was first incident on the QWP (380a).

[0087] QWP (380b) is placed on the path of light that is branched from the polarizing beam splitter (360) and proceeds to the reference mirror (370), and performs the same operation as QWP (380a). However, since the remaining light from among the light branched from the polarizing beam splitter (360) enters QWP (380b), it has a polarization direction that is perpendicular to the polarization direction of the light that passes through QWP (380a).

[0088] The QWP (380c) is positioned in front of the image sensor (230) on the light path incident on the image sensor (230) and converts each linearly polarized light into circularly polarized light. As described above, the light split from the polarizing beam splitter (360) passes through each QWP (380a, 380b) twice, and thus has a linearly polarized state with a different polarization direction. Accordingly, the QWP (380c) converts each light into a circularly polarized state in front of the image sensor (230).

[0089] The tube lens (320) and / or the objective lens (340) focus the light that is branched from the polarizing beam splitter (360) and travels to the observation area (350) onto the observation area (350).

[0090] The biasing element (330) performs the above-described operation.

[0091] Since each of the imaging systems (220a to 220n) has a structure as shown in FIG. 3a or FIG. 3b, the observation device (110) according to the first embodiment of the present invention performs observation as shown in FIGS. 4 and 5.

[0092] Fig. 4 is a drawing showing an observation area of ​​an observation device according to a first embodiment of the present invention, and Fig. 5 is a drawing illustrating a process of observing an observation object by an observation device according to the first embodiment of the present invention. Figs. 4 and 5 are drawings illustrating a process of observing an observation area (350) while light irradiated from each light source (210) passes through each imaging system (220) in a plan view direction (top view). For convenience, it is illustrated that four imaging systems form four observation areas, but it is not necessarily limited thereto.

[0093] Due to the characteristics of the magnifying optical system, the observation areas (350) formed in each imaging system (220) are implemented to be smaller than the size of the objective lens (340). At this time, since each deflection element (330) is included in each imaging system (220), the observation areas (350) formed in each imaging system (220) are spaced at a preset interval (r) in the width (w) direction. 21 ) are formed at a distance of more than 1000 m, and are spaced apart at a preset interval (r) in the length (h) direction. 22 ) are formed at a distance of more than . Here, the preset interval (r 21 ) and preset intervals (r 22 ) can be formed as an integer multiple of the width (w) and length (h) of the observation area (350), respectively. For example, a preset interval (r 21 ) and preset intervals (r 22 ) may be spaced apart by only the width (w) and length (h) of the observation area (350), or may be spaced apart by n times the width (w) and length (h) of the observation area (350), where n is 2 or more.

[0094] At this time, the observation areas (e.g., 350b in FIG. 5) that are arranged closest to each other in the longitudinal direction with respect to one observation area (e.g., 350a in FIG. 5) are arranged so as not to overlap each other in the longitudinal direction.

[0095] As each imaging system (220a to 220n) is implemented so that the aforementioned conditions are satisfied and observation areas are formed, observation of the observation target can proceed as follows.

[0096] As illustrated in Figure 5a, observation is performed at a single point in time. Accordingly, the image sensor (230) observes the observation target corresponding to each observation area (350).

[0097] Thereafter, as illustrated in FIGS. 5b to 5d, the control unit (240) synchronizes with the speed or position of the stage (120) to conduct observation (controls whether to operate the image sensor). The control unit (240) analyzes the speed or position information of the stage (120) to analyze whether the stage (120) has moved by the width (w) or length (h) of the observation area (350) according to the movement direction of the stage (120). When the stage (120) or the observation target mounted thereon has moved by the aforementioned amount, the control unit (240) operates each image sensor (230) to conduct additional observation. FIG. 5 illustrates an example in which the stage (120) moves in the direction of the length (h) of the observation area (350). When observation is conducted in this manner, after an appropriate amount of time has passed or an appropriate number of observations have been conducted depending on the number of light sources (210), imaging systems (220), and image sensors (230) after the observation has begun, the observation target can be observed in an expanded form (510) of the observation area (350) as illustrated in FIG. 5d. When the number of light sources (210) and imaging systems (220) increases and the number of observation areas (350) increases in the width direction or length direction, the observation device (110) can observe a desired area at once after an appropriate amount of time has passed.

[0098] Accordingly, the observation device (110) can observe a desired area at one time even if it includes an imaging system (220) implemented as a magnifying optical system.

[0099] In the description above with reference to FIGS. 2 and 3, it is illustrated and described that the light sources (210a to 210n) in the observation device (110) are included in the number of imaging systems (220a to 220n) and irradiate light to each imaging system (220a to 220n), but it is not necessarily limited thereto. The light irradiated from the light source (210) may be split into a plurality of parts by an optical configuration such as a beam splitter, and accordingly, the light sources (210) in the observation device (110) may be included in a number less than the number of imaging systems (220a to 220n), or only one.

[0100] FIG. 6 is a drawing illustrating the configuration of an observation device according to a second embodiment of the present invention, and FIG. 14 is a drawing illustrating an optical characteristic detection process of an observation device according to a second embodiment of the present invention.

[0101] Referring to FIG. 6, an observation device (600) according to a second embodiment of the present invention further includes a plurality of optical masks (610a to 610n) in addition to the configuration of the observation device (110) according to the first embodiment of the present invention.

[0102] Each optical mask (610a to 610n) receives interference light that has passed through each imaging system (220a to 220n) in front of each image sensor (230a to 230n) on the optical path, and generates a plurality of phase-shifting interference patterns. Taking FIG. 2 as an example, each optical mask (610a to 610n) is arranged between the QWP (380c) and the image sensor (230) and can perform the above-described operation. Each optical mask (610a to 610n) can generate a plurality of phase-shifting interference patterns even without including a plurality of cameras or a plurality of image sensors as in the related art by using a geometrical phase optical element. The specific structure and operation of each optical mask (610a to 610n) are illustrated in FIGS. 7 to 13.

[0103] FIG. 7 is a drawing illustrating the configuration of an optical mask according to a second embodiment of the present invention.

[0104] Referring to FIG. 7, an optical mask (610) according to one embodiment of the present invention includes an optical array (710) and a circular polarizing beam splitter (720).

[0105] The optical array (710) receives the interference light interfered by the interferometer (210) and induces a phase shift, but induces a phase shift at multiple different angles with respect to the interference light.

[0106] As the optical array (710) is implemented as a geometric phase optical element as shown in FIGS. 8 and 9, it induces a phase shift for the incident interference light.

[0107] FIG. 8 is a drawing illustrating the optical characteristics of an optical array according to a second embodiment of the present invention, FIG. 9 is a drawing illustrating the material characteristics of a material constituting an optical array according to a second embodiment of the present invention, and FIG. 10 is a drawing illustrating the structure of an optical array according to a second embodiment of the present invention.

[0108] The optical array (710) is implemented as a geometric phase optical element. The optical array (710) may be implemented as a structure having a meta surface as shown in FIG. 9a, or as a structure including a liquid crystal as shown in FIG. 9b.

[0109] The optical array (710) can be implemented as a structure having a metasurface, as illustrated in FIG. 9A. The anisotropic structure (910) having a metasurface is formed of a high-refractive index material having a rectangular cross-section and a tall columnar shape, and can be arranged in a rotated form at each local location. The rectangular cross-section of the high-refractive index material having a nano-size smaller than the radio wave wavelength exhibits optical anisotropy, and its rotational arrangement induces rotation of the optical axis. The anisotropic structures (610) having a metasurface can be manufactured by an E-beam lithography process or a semiconductor process for precisely manufacturing nano-sized structures.

[0110] Alternatively, the optical array (710) may be implemented as a liquid crystal-based anisotropic structure (610) as illustrated in FIG. 9B. Since the liquid crystal-based anisotropic structure (910) itself exhibits the properties of an anisotropic material, the structure (910) may be arranged in a rotated form, such as the arrangement of Φ(x) values, which are liquid crystal alignment directions, at each local location, thereby inducing a geometrical phase effect. When the optical array (710) is implemented as a liquid crystal-based anisotropic structure, it may be produced relatively inexpensively.

[0111] In this way, the optical array (710) implemented as a geometric phase optical element has the optical characteristics illustrated in FIG. 8. The optical array (710) generates an additional geometric phase shift phenomenon due to the difference in the optical axis direction of the anisotropic material. Accordingly, when the optical array (710) is implemented as an anisotropic material having Γ as phase retardance, when light having a circular polarization in one direction is incident on the optical array (710), the following output light is output.

[0112]

[0113]

[0114]

[0115]

[0116] Here, T is the Jones matrix, and E in The incident light incident on the silver optical array (710), E GP The light output from the optical array (710) is Silver is circularly polarized, is the left-hand circular polarization, θ is the rotation angle of the optical axis of the anisotropic material, and n e is the refractive index of the fast axis of the anisotropic material, n o represents the refractive index of the slow axis of the anisotropic material, and t represents the thickness of the anisotropic material in the direction of light propagation.

[0117] According to the above-described formula, when light of one polarization is incident on the optical array (710), a polarization component identical to the incident light (a component including a cos term in the formula related to the emitted light) and an opposite polarization component (a component including a sine term in the formula related to the emitted light) whose phase is shifted (delayed) by twice the optical axis rotation angle of the anisotropic material are emitted.

[0118] Meanwhile, the optical array (710) having these characteristics is implemented with an anisotropic material that induces a geometrical phase effect, as illustrated in FIG. 10, and includes a plurality of optical pixels (1010) implemented in an array form.

[0119] At this time, the optical pixels (1010) do not receive interference light from different points (of the observation object) as in the past, but multiple (at least three) adjacent optical pixels (1010a to 1010d) receive interference light from the same point (of the observation object). However, each optical pixel (1010) receiving interference light from the same point is also implemented with an anisotropic material having the properties described above, but has different optical axis rotation angles. For example, as illustrated in FIG. 10, assuming that four optical pixels (1010a to 1010d) adjacent horizontally (x-axis direction) and vertically (y-axis) receive interference light from the same point, each optical pixel (1010a to 1010d) can have an optical axis rotation angle of 0°, 45°, 90°, or 135°.

[0120] Accordingly, among the incident light passing through each optical pixel (1010a to 1010d), the polarization component whose phase is shifted (delayed) experiences a phase shift of 0°, 90°, 180°, and 270°, which is twice the optical axis rotation angle.

[0121] In this way, when the number of optical pixels (1010a to 1010d) receiving interference light at the same point within the optical array (710) is n, and the size of the pixel within the image sensor (230) is Λ, the optical pixels (1010a to 1010d) within the optical array (710) can be arranged repeatedly in a cycle of nΛ. In FIG. 10, since the optical pixels (1010a to 1010d) are arranged horizontally and vertically adjacent to each other, they can be arranged repeatedly in a cycle of 2Λ in the horizontal and vertical directions within the optical array (710). Even if the optical array (710) having such an arrangement of optical pixels (1010) receives interference light only once, it can obtain all phase-shift interference patterns for analyzing the optical characteristics of the observation target. Accordingly, the optical array (710) can fundamentally block the influence of external disturbances such as vibrations in the process of acquiring all interference patterns having different phase shift angles as in the conventional case, and there is no need to have multiple image sensors. Since only a very thin optical mask (610) needs to be placed in front of one image sensor (230), it can have a simple structure, and the overall volume of the optical mask (610) or the observation device (600) including the same can be significantly reduced.

[0122] Referring again to FIG. 7, light of each polarization component emitted from the optical array (710) is incident on a circular polarization beam splitter (720). Since the circular polarization beam splitter (720) has the characteristics illustrated in FIG. 11, it can operate as illustrated in FIG. 12.

[0123] FIG. 11 is a drawing illustrating the structure and chiral volume grating characteristics of a circular polarizing beam splitter according to a second embodiment of the present invention, FIG. 12 is a drawing explaining the optical characteristics of a circular polarizing beam splitter according to a second embodiment of the present invention, and FIG. 13 is a drawing explaining the optical characteristics of an optical mask according to a second embodiment of the present invention.

[0124] Referring to Fig. 11, the circularly polarized beam splitter (720) has a helical structure, i.e., chiral characteristics. A device in which the molecular directions of anisotropic structures (1110) are sequentially rotated and aligned along the vertical axis (y-axis) is called a chiral device. For example, when a chiral dopant is added to a nematic liquid crystal in which all liquid crystal molecules are oriented in a certain direction, the chiral dopant can induce chiral alignment of the nematic liquid crystal. At this time, the period T of the chiral characteristics y can be determined depending on the concentration of the chiral dopant.

[0125] Additionally, the liquid crystal boundary surface can be aligned with a period T using various methods. x When aligned to have , the chiral liquid crystal alignment layer can be fabricated as a volume grating. In general, the propagation of light in a volume grating satisfies the Bragg diffraction condition between the propagation constants of the incident and outgoing light and the grating vector according to Floquet's theorem.

[0126] Under these conditions, the circularly polarizing beam splitter (720) operates as illustrated in FIG. 12. The circularly polarizing beam splitter (720) reflects a circularly polarized component of light incident thereon that has the same rotational direction as its own helical structure, and transmits a circularly polarized component rotating in the opposite direction. More specifically, since the volume grating characteristic is selectively exhibited in the circularly polarizing beam splitter (720) depending on the circularly polarized direction of the incident light, the circularly polarizing beam splitter (720) can selectively perform the function of a mirror or a beam splitter depending on the polarization direction of the incident light. For example, when the circularly polarizing beam splitter (720) has a left helicity as illustrated in FIG. 12, the left circularly polarized component of light incident thereon can be reflected, and only the right circularly polarized component can be transmitted.

[0127] The optical mask (610) operates as shown in FIG. 13, as it includes an optical array (710) and a circular polarizing beam splitter (720) having the characteristics described above.

[0128] As described above, when object light polarized in one direction (e.g., left-circular polarization) and reference light polarized in another direction (e.g., right-circular polarization) are respectively incident on the optical array (710), each light passes through the optical array (710) and is emitted with the same polarization component as the incident light without phase shift and the opposite polarization component with phase shift.

[0129] A circularly polarizing beam splitter (720) receives light emitted from an optical array (710), reflects only one polarization component (e.g., left-hand circularly polarized light) among the incident polarization components, and transmits the remaining polarization components. One of the transmitted polarization components corresponds to light whose phase has not shifted, and the other corresponds to light whose phase has shifted by twice the optical axis rotation angle. The components transmitting through the circularly polarizing beam splitter (720) interfere with each other to form an interference pattern, and then proceed to the image sensor (230).

[0130] For example, if the thickness (Γ) of the optical array (710) is adjusted to π / 2, the following interference pattern is formed in the interference light passing through the optical mask (610).

[0131]

[0132]

[0133]

[0134]

[0135] Here, Silver is the object light component of the incident light, The reference light component among the incident light, The object light component transmitted through the optical array (710) is the reference light component transmitted through the optical array (710), The object light component transmitted through the circular polarizing beam splitter (720), Silver represents the reference light component transmitted through the circular polarizing beam splitter (720), and I(θ) represents the interference pattern image for the optical axis rotation angle θ.

[0136] Referring again to FIG. 6, the image sensor (230) receives a plurality of phase-shifting interference patterns transmitted through the optical mask (610) and measures the optical characteristics of the object light reflected from the observation target based on the received interference patterns. As illustrated in FIG. 15, the image sensor (230) can acquire (a plurality of) phase-shifting interference pattern images that are phase-shifted by the same angle depending on the optical axis rotation angle.

[0137] FIG. 15 is a diagram illustrating a pixel structure of a phase-shifted interference pattern detected by a detection unit according to a second embodiment of the present invention.

[0138] Referring to FIGS. 15A and 15B, the image sensor (230) can group a plurality of interference patterns that are phase-shifted by the same angle according to the optical axis rotation angle, thereby obtaining a plurality of phase-shifted interference patterns. The image sensor (230) can detect the optical characteristics (phase, amplitude, polarization) of the object light from the obtained plurality of phase-shifted interference patterns.

[0139] Since the image sensor (230) can receive at least three interference patterns shifted at different angles from the optical mask (610), it can detect the amplitude of the object light, the amplitude of the reference light, and the phase of the object light compared to the reference light, respectively, as follows.

[0140]

[0141]

[0142]

[0143]

[0144]

[0145] Here, A R is the amplitude of the reference light, A O represents the amplitude of the object light, and S represents the Stokes parameter.

[0146] Through the above-described process, the image sensor (230) can detect the phase and amplitude of the object light.

[0147] In addition, the image sensor (230) can detect the polarization state of the object light by using a plurality of interference patterns received. The image sensor (230) can detect the Stokes parameters (Stokes' parameters {S0, S1, S2, S3}) representing the polarization of light from the amplitude of the left-circular polarization, the phase of the left-circular polarization, the amplitude of the right-circular polarization, and the phase of the right-circular polarization. The image sensor (230) can detect the Stokes parameters according to the following equation.

[0148]

[0149]

[0150]

[0151]

[0152]

[0153] Here, A r is the amplitude of the circular polarization, is the phase of the circularly polarized light, A l is the amplitude of the left-hand circular polarization, Each represents the phase of the left-hand circular polarization.

[0154] At this time, each Stokes parameter is calculated as follows.

[0155]

[0156] The image sensor (230) can detect the polarization state from the amplitude and phase of the object light as described above.

[0157] Accordingly, even if the observation device (6000) receives interference light from the observation object only once, the image sensor (230) can detect the optical characteristics of the object light. Accordingly, the image sensor (230) can detect a three-dimensional shape (of the observation object) with a pixel size of Λ.

[0158] Even in the description given above with reference to FIG. 6, etc., it is illustrated and described that the light sources (210a to 210n) in the observation device (600) are included as many as the number of imaging systems (220a to 220n) and irradiate light to each imaging system (220a to 220n), but it is not necessarily limited thereto. The light irradiated from the light source (210) may be split into a plurality of parts by an optical configuration such as a beam splitter, and accordingly, the light source (210) in the observation device (600) may be included less than the number of imaging systems (220a to 220n), or only one.

[0159] Figure 16 is a flowchart illustrating a method for detecting optical characteristics of an observation object by an observation device according to a second embodiment of the present invention.

[0160] The image sensor (230) detects an interference pattern of the object light and reference light transmitted through the optical mask (610) (S1610). The image sensor (230) detects an interference pattern formed by the object light polarized in the same direction and the reference light polarized in the same direction transmitted through the optical mask (610).

[0161] The image sensor (230) groups the detected interference patterns according to the optical axis rotation angle of the geometric phase optical pixels to obtain multiple interference pattern images (S1620).

[0162] The image sensor (230) detects the optical characteristics of the object light using the acquired multiple interference pattern images (S1630).

[0163] Fig. 18 is a drawing showing an example of an observation device according to a third embodiment of the present invention.

[0164] Referring to FIG. 18a, an observation device according to a third embodiment of the present invention is also implemented in the same manner as the observation device (110) according to the first embodiment of the present invention, but may have different types of imaging systems (220a to 220n). Each imaging system (220) includes a beam splitter (310), a tube lens (320), and an objective lens (330).

[0165] The beam splitter (310) reflects light irradiated from the light source (210) to the observation area (1820), and transmits light reflected from the observation area (1820) to the image sensor (230).

[0166] The tube lens (320) and / or the objective lens (1810) focus the light reflected from the beam splitter (310) and traveling to the observation area (1820) onto the observation area (1820). Only the objective lens (1810) may be included to perform the above-described operation, or both the tube lens (320) and the objective lens (1810) may be included to perform the above-described operation.

[0167] The objective lens (1810) has a relatively significantly large (single-sided) area or diameter compared to the area of ​​the observation area (1820), and also has a large area or diameter compared to the image sensor (230). It has a (single-sided) area or diameter that is several to several tens of times larger than the area of ​​the observation area (1820). Accordingly, the objective lens (1810) can focus light reflected from the beam splitter (310) or light passing through the tube lens (320) onto the observation area (1820), and directs light reflected from the observation area (1820) back toward the tube lens (320) or the beam splitter (310).

[0168] At this time, the center of the image sensor (230), the objective lens (1810, including the tube lens), and the observation area (1820) are arranged on the same line or at a position within a preset error range therefrom. Since the (single-sided) area or diameter of the objective lens (1810) is implemented to be larger than the size or diameter of the image sensor (230) or the observation area (1820), when each optical configuration (230, 1810, 1820) is arranged as described above, the interval (r2) between adjacent objective lenses (1810) is smaller than the interval (r1) between adjacent image sensors (230) or the interval between observation areas (1820). Therefore, even if the imaging systems (220) are implemented as magnifying optical systems, each optical configuration within the imaging system can be arranged and operated without difficulty.

[0169] In particular, the observation area (1820) is arranged parallel to the direction perpendicular to the movement direction of the stage (120) (on the same plane) as will be described later with reference to FIG. 19. Each light source (210a to 210n) can operate simultaneously, and each image sensor (230a to 230n) can sense the optical characteristics of the object light reflected from the observation target by receiving the interference light interfered by each imaging system (220a to 220n). Accordingly, even if the imaging systems (220) implemented as magnifying optical systems are arranged in an array, the occurrence of problems similar to those in the prior art can be resolved.

[0170] Meanwhile, each imaging system (220a to 220n) can be implemented as a magnifying optical system (an optical system in which the size of the image formed on the image sensor, etc. is larger than the image of the target area because the magnification is greater than 1) to observe the amplitude or polarization component among the optical characteristics of the observation target, as shown in Fig. 17b.

[0171] FIG. 18b is a drawing showing another implementation example of an observation device according to a third embodiment of the present invention.

[0172] Referring to FIGS. 2 and 18b, each imaging system (220) according to the third embodiment of the present invention includes a tube lens (320), an objective lens (1810), a polarizing beam splitter (1830), a reference mirror (370), and QWP (Quarter Wave Plate, 1840a to 1840c).

[0173] The polarizing beam splitter (1830) splits the light irradiated from the light source (210) into different directions according to the polarization direction, or causes the light reflected from the reference mirror (370) and the observation area (1820) to interfere with each other and advance to the image sensor (230).

[0174] The QWP (1840a) is positioned on the path of light that is branched from the polarizing beam splitter (1830) and proceeds to the observation area (1820), and converts linearly polarized light incident on it into circularly polarized light and circularly polarized light into linearly polarized light. The light branched from the polarizing beam splitter (1830) passes through the QWP (1840a) and is converted into either left-handed or right-handed circularly polarized light. Meanwhile, the light reflected from the observation area (1820) passes through the QWP (1840a) and is converted back into linearly polarized light. At this time, since the light that has finally passed through the QWP (1840a) passes through the QWP (1840a) twice, it has a polarization direction that is perpendicular to the linearly polarized direction when it was first incident on the QWP (1840a).

[0175] QWP (1840b) is placed on the path of light that is branched from the polarizing beam splitter (1830) and proceeds to the reference mirror (370), and performs the same operation. However, since the remaining light from the light branched from the polarizing beam splitter (1830) enters QWP (1840b), it has a polarization direction that is perpendicular to the polarization direction of the light that passes through QWP (1840a).

[0176] The QWP (1840c) is positioned in front of the image sensor (230) on the light path incident on the image sensor (230) and converts each linearly polarized light into circularly polarized light. As described above, the light split from the polarizing beam splitter (1830) passes through each QWP (1840a, 1840b) twice, and thus has a linearly polarized state with a different polarization direction. Accordingly, the QWP (1840c) converts each light into a circularly polarized state in front of the image sensor (230).

[0177] The tube lens (320) and / or objective lens (1810) focus the light that is branched from the polarizing beam splitter (1830) and proceeds to the observation area (1820) onto the observation area (1820), or directs the light reflected from the observation area (1820) back toward the tube lens (320) or the polarizing beam splitter (1830).

[0178] Since each of the imaging systems (220a to 220n) has a structure as shown in FIG. 18a or FIG. 18b, the observation device (110) according to the first embodiment of the present invention performs observation as shown in FIGS. 19 and 20.

[0179] Fig. 19 is a drawing showing an observation area of ​​an observation device according to a third embodiment of the present invention, and Fig. 20 is a drawing illustrating a process of observing an observation object by an observation device according to a third embodiment of the present invention. Figs. 19 and 20 are drawings showing a process of observing an observation area (1820) while light irradiated from each light source (210) passes through each imaging system (220) in a plan view direction (top view), and for convenience, three imaging systems are illustrated as forming three observation areas, but the present invention is not necessarily limited thereto.

[0180] As described above, the centers of the image sensor (230), the objective lens (1810), and the observation area (1820) are arranged to be coincident or at similar positions within one imaging system (220), and the (cross-sectional) area or diameter of the image sensor (230) is implemented to be larger than the image sensor (230) or the observation area (1820). At this time, the objective lens (1810) is arranged parallel to the adjacent objective lens, and the observation area (1820) within each imaging system is arranged without a gap (parallel) in a direction perpendicular to (on the same plane) the moving direction of the stage (120). As illustrated in FIG. 19, it can be confirmed that the objective lenses (1810a to 1810c) are arranged so that there is physically no gap (parallel), and the observation area (1820) is arranged without a gap in a direction perpendicular to the moving direction of the stage (120).

[0181] Accordingly, the observation device (110) can observe part or all of the observation area depending on the number of imaging systems (220) in a direction perpendicular to the movement direction of the stage (120), and are formed at a preset interval from each other in the movement direction of the stage (120). In particular, the preset interval may be an integer multiple of the length of the observation area (1820) (in the movement direction of the stage (120). Accordingly, the structure has a structure in which n observation areas can be arranged in the movement direction of the stage (120) between adjacent observation areas (1820).

[0182] As each imaging system (220a to 220n) is implemented so that the aforementioned conditions are satisfied and observation areas are formed, observation of the observation target can be performed as described above with reference to FIG. 5.

[0183] Although FIG. 16 describes each process as being executed sequentially, this is merely an illustrative description of the technical idea of ​​one embodiment of the present invention. In other words, a person of ordinary skill in the art to which one embodiment of the present invention pertains can modify and apply various modifications and variations by changing the order described in each drawing without departing from the essential characteristics of one embodiment of the present invention, or by executing one or more of the processes in parallel. Therefore, FIG. 16 is not limited to a chronological order.

[0184] Meanwhile, the processes illustrated in FIG. 16 can be implemented as computer-readable code on a computer-readable recording medium. A computer-readable recording medium includes all types of recording devices that store data that can be read by a computer system. That is, a computer-readable recording medium includes storage media such as magnetic storage media (e.g., ROM, floppy disks, hard disks, etc.) and optical readable media (e.g., CD-ROMs, DVDs, etc.). In addition, a computer-readable recording medium can be distributed across network-connected computer systems, so that the computer-readable code can be stored and executed in a distributed manner.

[0185] The above description is merely an example of the technical idea of ​​the present embodiment, and those skilled in the art will appreciate that various modifications and variations can be made without departing from the essential characteristics of the present embodiment. Therefore, the present embodiments are not intended to limit the technical idea of ​​the present embodiment, but rather to explain it, and the scope of the technical idea of ​​the present embodiment is not limited by these embodiments. The scope of protection of the present embodiment should be interpreted by the claims below, and all technical ideas within a scope equivalent thereto should be interpreted as being included in the scope of rights of the present embodiment.

[0186]

[0187] CROSS-REFERENCE TO RELATED APPLICATION

[0188] This patent application claims priority under 35 USC § 119(a) of Korean Patent Application No. 10-2023-0172317, filed in Korea on December 1, 2023, and Korean Patent Application No. 10-2024-0102305, filed in Korea on August 1, 2024, respectively, the entire contents of which are incorporated by reference herein. In addition, this patent application claims priority in countries other than the United States for the same reasons, the entire contents of which are incorporated by reference herein.

Claims

1. In an observation device for observing an observation target, One or more light sources for irradiating light for observation of the observation area; A plurality of imaging systems that propagate light through an observation area or an observation area and a reference mirror inside themselves to generate object light or interference light containing the optical properties of the object of observation; A plurality of image sensors that receive light generated from each imaging system and sense the optical characteristics of the detection target; and It includes a control unit that controls the operation of each image sensor and observes the observation target based on the sensing value of each image sensor. An observation device characterized in that each imaging system is implemented so that the size of the image formed on the image sensor is larger than the image in the observation area.

2. In paragraph 1, Each decision system, An observation device characterized by including a deflection element for converting an optical path.

3. In paragraph 2, The above image sensor, An observation device characterized in that it is arranged so as not to physically overlap.

4. In paragraph 3, The above biasing element is, An observation device characterized in that the image sensors are arranged so as not to physically overlap each other, and the path of light is converted so that each observation area is arranged at a preset interval in the width and length directions.

5. In paragraph 2, The above biasing element is, An observation device characterized in that it can be implemented with a mirror, a diffraction grating, a prism, or a metasurface.

6. In paragraph 1, The above control unit, An observation device characterized in that the operation of each image sensor is controlled in synchronization with the speed or position at which the observation target moves.

7. In paragraph 1, The above control unit, An observation device characterized in that it can simultaneously observe an area greater than a preset standard of the above observation target.

8. A stage for placing and moving observation objects; and An observation device that measures the optical characteristics of an observation object by observing an observation area in synchronization with the speed or position of the observation object on the stage, The above observation device, One or more light sources for irradiating light for observation of the observation area; A plurality of imaging systems that propagate light through an observation area or an observation area and a reference mirror inside themselves to generate object light or interference light containing the optical properties of the object of observation; A plurality of image sensors that receive light generated from each imaging system and sense the optical characteristics of the detection target; and It includes a control unit that controls the operation of each image sensor and observes the observation target based on the sensing value of each image sensor. An observation system characterized in that each imaging system is implemented so that the size of the image formed on the image sensor is larger than the image in the observation area.

9. In an observation device for observing an observation target, One or more light sources for irradiating light for observation of the observation area; A plurality of imaging systems that propagate light through an observation area or an observation area and a reference mirror inside themselves to generate object light or interference light containing the optical properties of the object of observation; A plurality of image sensors that receive light generated from each imaging system and sense the optical characteristics of the detection target; and It includes a control unit that controls the operation of each image sensor and observes the observation target based on the sensing value of each image sensor. An observation device characterized in that each imaging system is arranged so that each observation area is arranged without any gaps in one direction, but is arranged at a preset interval in the direction perpendicular thereto.

10. In paragraph 9, The above resolution is, An observation device characterized by including an objective lens.

11. In paragraph 10, The above image sensor, the objective lens and the observation area, An observation device characterized in that the center is placed on the same line or at a position within a preset error range from the same line.

12. In paragraph 11, The above objective lens is, An observation device characterized in that the area or diameter is larger than that of the image sensor and the observation device.

13. In paragraph 11, The above objective lens is, An observation device characterized by being arranged parallel to an adjacent objective lens in one direction.

14. A stage for placing and moving observation objects; and An observation device that measures the optical characteristics of an observation object by observing an observation area in synchronization with the speed or position of the observation object on the stage, The above observation device, One or more light sources for irradiating light for observation of the observation area; A plurality of imaging systems that propagate light through an observation area or an observation area and a reference mirror inside themselves to generate object light or interference light containing the optical properties of the object of observation; A plurality of image sensors that receive light generated from each imaging system and sense the optical characteristics of the detection target; and It includes a control unit that controls the operation of each image sensor and observes the observation target based on the sensing value of each image sensor. An observation system characterized in that each imaging system is arranged so that each observation area is arranged without any gaps in one direction, but is arranged at a preset interval in the direction perpendicular thereto.

Images