Heat dissipation device for marx generator, and marx generator

Abstract

Provided is a heat dissipation device for a Marx generator. The device comprises N cooling plates arranged in sequence; a switch assembly of a Marx generator is fixed on each cooling plate, and the switch assemblies on the N cooling plates are sequentially connected in series; each cooling plate has a water inlet and a water outlet, cooling water flows into the cooling plate from the water inlet and flows out from the water outlet, and the water inlets and water outlets of different cooling plates are connected by means of water cooling lines to achieve the flow of the cooling water across the cooling plates; the cooling water flows in from the water inlet of the first cooling plate, flows out from the water outlet of the first cooling plate, sequentially passes through m cooling plates except the second cooling plate, then flows into the water inlet of an N-th cooling plate, flows out from the water outlet of the N-th cooling plate, sequentially flows through k cooling plates, and then flows out from the water outlet of the second cooling plate, wherein m+k=N-3, 0≤m≤N-3, 0≤k≤N-3, and the m cooling plates and the k cooling plates are different from each other.

Description

Heat dissipation device for Marx generator and Marx generator Technical Field

[0001] The present disclosure relates to the technical field of heat dissipation, and in particular to a heat dissipation device for a Marx generator and a Marx generator. Background Art

[0002] The main function of a pulsed high-voltage modulator is to generate pulsed high voltage to power the magnetron, thereby generating the microwaves required by the accelerator tube. The switch is the core component of the pulsed high-voltage modulator, generating the pulsed high voltage by controlling the discharge of the energy storage element.

[0003] The switch extension includes a Marx pulse generator, which consists of multiple switch components connected in series to form a high-voltage switch assembly. This circuit generates high-voltage pulses by charging and discharging capacitors in groups. Due to the internal resistance of the switch components, when large charge and discharge currents flow through them for extended periods, heat accumulates and causes the switch components to become overheated. If the heat within the switch components cannot be dissipated promptly, the temperature will exceed the normal operating range, causing the switch components to burn out. Therefore, effective heat dissipation from the switch components is generally required.

[0004] However, since the switch component generates a relatively large voltage during discharge, the relatively high voltage difference may easily lead to a high voltage hazard problem during heat dissipation.

[0005] The above information disclosed in this section is only for understanding the background of the disclosed concept of the present disclosure and therefore the above information may contain information that does not constitute prior art. Summary of the Invention

[0006] In view of at least one aspect of the above technical problems, the present disclosure provides a heat dissipation device for a Marx generator and a Marx generator.

[0007] According to a first aspect of the present disclosure, a heat dissipation device for a Marx generator is provided, comprising: N cooling plates arranged in sequence, each cooling plate having a switch assembly of the Marx generator fixed thereto, and the switch assemblies on the N cooling plates being connected in series in sequence; each cooling plate having a water inlet and a water outlet, cooling water flowing into the cooling plate from the water inlet and out of the water outlet, the water inlets and water outlets of different cooling plates being connected by water-cooling wiring to achieve cross-cooling water flow; wherein the cooling water flows into the water inlet of the first cooling plate, flows out of the water outlet of the first cooling plate, passes through m cooling plates other than the second cooling plate in sequence, flows into the water inlet of the Nth cooling plate, flows out of the water outlet of the Nth cooling plate, passes through k cooling plates in sequence, and flows out of the water outlet of the second cooling plate, wherein m+k=N-3, 0≤m≤N-3, 0≤k≤N-3, and the m cooling plates and the k cooling plates are different from each other.

[0008] According to an embodiment of the present disclosure, the water cooling connection is connected to the 1st cooling plate and m cooling plates in sequence according to the first connection rule: the water inlet of the 1+a×pth cooling plate is connected to the water outlet of the 1+(a+1)pth cooling plate, and the water outlet of the 1+m×pth cooling plate is connected to the water inlet of the Nth cooling plate, wherein a∈[0,m-1], p is an integer greater than 1, m≥1, and 1+m×p<N.

[0009] According to an embodiment of the present disclosure, 1≤N-(1+m×p)≤p.

[0010] According to an embodiment of the present disclosure, 2≤p≤4.

[0011] According to an embodiment of the present disclosure, the value of p is 2.

[0012] According to an embodiment of the present disclosure, N is an odd number, N-(1+m×p)=2.

[0013] According to an embodiment of the present disclosure, N is an even number, N-(1+m×p)=1.

[0014] According to an embodiment of the present disclosure, the water cooling connection is connected to the first cooling plate and the k cooling plate in sequence according to the second connection rule: the water outlet of the Nb×qth cooling plate is connected to the water outlet of the N-(b+1)×qth cooling plate, and the water outlet of the Nk×qth cooling plate is connected to the water inlet of the second cooling plate, wherein b∈[0,k-1], q is an integer greater than 1, k≥1, and Nk×q>2.

[0015] According to an embodiment of the present disclosure, 1≤(Nk×q)-2≤q.

[0016] According to an embodiment of the present disclosure, 2≤q≤4.

[0017] According to an embodiment of the present disclosure, the cooling plate includes a first surface and a second surface opposite to each other. The switch assembly is located on the first surface and is metal-connected to the first surface.

[0018] According to an embodiment of the present disclosure, N cooling plates are arranged in sequence along a first direction, water inlets and water outlets are provided on the sides of the cooling plates, and the water inlets and water outlets corresponding to the N cooling plates are arranged alternately along the first direction.

[0019] According to an embodiment of the present disclosure, the switching component of the Marx generator includes: an IGBT; a voltage regulator diode, the input end of the voltage regulator diode is electrically connected to the first end of the IGBT; a capacitor, the capacitor is connected in series between the second end of the IGBT and the output end of the voltage regulator diode; and an input diode, the input diode is electrically connected to the first end of the IGBT.

[0020] According to a second aspect of the present disclosure, a Marx generator is further provided, comprising any one of the heat dissipation devices described above.

[0021] In the heat dissipation device for a Marx generator according to an embodiment of the present disclosure, the switch components on N cooling plates are connected in series to achieve charging and discharging. During discharge, each switch component generates 1 unit of voltage, and N switch components generate N units of voltage.

[0022] After flowing out of the first cooling plate, the cooling water passes through m cooling plates in sequence, and finally reaches the Nth cooling plate. Affected by the voltage generated by the discharge of the switch components, it accumulates a voltage difference of N units. Then, the cooling water flows out of the Nth cooling plate, passes through k cooling plates in sequence, and flows back to the second cooling plate. During this return process, the accumulated N voltage differences are offset, resulting in a voltage difference of only 2 units between the outlet of the second cooling plate and the inlet of the first cooling plate. Furthermore, since m + k = N - 3, the cooling water flows through each cooling plate, dissipating heat for each switch component. At the same time, compared to cooling water flowing into the first cooling plate and finally out of the Nth cooling plate, the cooling water voltage is greatly reduced, thereby significantly reducing the risk of high voltage. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to better understand the present disclosure, the present disclosure will be described in detail according to the following drawings:

[0024] FIG1 is a block diagram of a conventional pulse high voltage modulator;

[0025] FIG2 is a schematic structural diagram of a traditional Marx generator;

[0026] FIG3 is an enlarged view of the structure within the dotted box in FIG2 ;

[0027] FIG4 is a schematic structural diagram of a conventional heat dissipation device for a Marx generator;

[0028] FIG5 is a schematic structural diagram of another conventional heat sink for a Marx generator;

[0029] FIG6 is an enlarged view of a partial structure of a heat dissipation device for a Marx generator according to an embodiment of the present disclosure;

[0030] 7 is a schematic diagram of the connection of water cooling wiring for a heat sink of a Marx generator according to some exemplary embodiments of the present disclosure;

[0031] FIG8 is a schematic diagram of connection of water cooling wiring of a heat sink for a Marx generator according to other exemplary embodiments of the present disclosure;

[0032] 9 is a schematic diagram illustrating the connection of water cooling wiring for a heat sink for a Marx generator according to an embodiment of the present disclosure according to a first connection rule;

[0033] FIG10 illustrates a specific connection diagram of connecting the water cooling wires of the heat sink for the Marx generator according to the first connection rule according to the embodiment of the present disclosure;

[0034] FIG11 illustrates another specific connection diagram of connecting the water cooling wires of the heat sink for the Marx generator according to the first connection rule according to an embodiment of the present disclosure;

[0035] FIG12 illustrates another specific connection diagram of connecting the water cooling wires of the heat sink for the Marx generator according to the first connection rule according to the embodiment of the present disclosure;

[0036] FIG13 illustrates another specific connection diagram of connecting the water cooling wires of the heat sink for the Marx generator according to the first connection rule according to the embodiment of the present disclosure;

[0037] FIG14 is a schematic diagram illustrating connecting water cooling wires of a heat sink for a Marx generator according to an embodiment of the present disclosure according to a second connection rule; and

[0038] FIG15 is a schematic diagram showing the connection of water cooling wiring of a heat sink for a Marx generator according to further exemplary embodiments of the present disclosure. DETAILED DESCRIPTION

[0039] Specific embodiments of the present disclosure will be described in detail below. It should be noted that the embodiments described herein are intended to be illustrative only and are not intended to limit the present disclosure. In the following description, a large number of specific details are set forth to provide a thorough understanding of the present disclosure. However, it will be apparent to those skilled in the art that these specific details are not necessarily required to practice the present disclosure. In other examples, known structures, materials, or methods are not specifically described to avoid obscuring the present disclosure.

[0040] Throughout this specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with the embodiment or example is included in at least one embodiment of the present disclosure. Thus, appearances of the phrases "in one embodiment," "in an embodiment," "an example," or "an example" in various places throughout this specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, or characteristics may be combined in any suitable combinations and / or subcombinations in one or more embodiments or examples. Furthermore, one of ordinary skill in the art will understand that the term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0041] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise," "include," etc. used herein indicate the presence of features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0042] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0043] Figure 1 is a block diagram of a conventional pulse high-voltage modulator, Figure 2 is a schematic diagram of the structure of a conventional Marx generator, Figure 3 is an enlarged view of the structure within the dotted box in Figure 2, Figure 4 is a schematic diagram of the structure of a conventional heat dissipation device for a Marx generator, and Figure 5 is a schematic diagram of the structure of another conventional heat dissipation device for a Marx generator.

[0044] The main function of the pulsed high-voltage modulator is to generate pulsed high voltage to power the magnetron, thereby generating the microwaves required by the accelerator tube. As shown in Figure 1, the pulsed high-voltage modulator can include: an accelerator control system 1, a DC power supply 2, a switch branch 3, a pulse transformer 4, a magnetron filament power supply 5, and a magnetron 6.

[0045] Under the control of the accelerator control system 1 , the DC power supply 2 rectifies and inverts the mains electricity to generate DC power, for example, 700V DC power, to supply power to the switch extension 3 .

[0046] The switch branch 3 is the core component of the pulse high voltage modulator and mainly consists of a Marx generator 31 , a trigger timing control circuit 32 and an auxiliary power supply circuit 33 .

[0047] After the Marx generator 31 in the switch extension 3 is charged, it discharges to the pulse transformer 4 under the control of the trigger timing control unit 32. The DC output of the DC power supply 2 is converted into pulse power, which is provided to the pulse transformer 4 for boosting to generate pulse high voltage, and then power the magnetron 6.

[0048] The Marx generator 31 is a method for realizing pulse modulation power supply. It is a device that uses capacitors to charge in parallel and then discharge in series. The Marx generator 31 can realize nanosecond narrow pulses and very high pulse frequency.

[0049] As shown in Figure 2, the Marx generator may include a DC charging power supply 311 and multiple switch components 312 connected in series. The DC charging power supply 311 is a power supply, and each switch component 312 is used to charge and discharge to generate a high-voltage pulse circuit. The number of switch components 312 can be set according to the pulse voltage required.

[0050] Specifically, referring to Figure 3, in some embodiments, the switching component of the Marx generator 312 may include: an IGBT (insulated gate bipolar transistor) 3121; a Zener diode 3123, the input end of the Zener diode 3123 is electrically connected to the first end of the IGBT; a capacitor C, the capacitor C is connected in series between the second end of the IGBT 3121 and the output end of the Zener diode 3123; and an input diode 3122, the input diode 3122 is electrically connected to the first end of the IGBT 3121.

[0051] Specifically, the gate of the IGBT 3121 is connected to a drive circuit (not shown) to be turned on or off according to a drive signal from the drive circuit.

[0052] A first end of the capacitor C is connected to the collector of the IGBT 3121 , and a second end of the capacitor C is connected to the output end of the Zener diode 3123 , and is connected to the emitter of the IGBT 3121 through the Zener diode 3123 .

[0053] In some embodiments, the switch component 312 further includes a resistor 3124 connected in series with the Zener diode 3123. The resistor 3124 and the Zener diode 3123 both function as voltage regulators, providing a stable voltage to the emitter of the IGBT 3121.

[0054] The IGBT 3121 is used for pulse modulation. Specifically, the DC charging power supply charges the capacitor C through the charging inductor and the input diode 3122 of each switch component 312, forming a parallel charging capacitor array and a charging loop, as shown by the light gray arrow in Figure 2.

[0055] When the discharge trigger comes, each IGBT 3121 is turned on, and the capacitor on the switch component 312 forms a series discharge circuit through the IGBT 3121, as shown by the dark gray arrow in Figure 2. The voltage generated by the discharge of each switch component is 1V. c , for n switch components, the voltage generated by discharge is nV c .

[0056] The Zener diode 3123, the input diode 3122 and the IGBT 3121 will accumulate a lot of heat during the charging and discharging process. In order to dissipate the heat of the switch component 312, the conventional practice is to add a large-volume tooth-shaped heat sink to the switch component and use conduction heat dissipation to dissipate the heat of the switch component.

[0057] However, the inventors discovered that high-power heat sinks have complex structures, large size, difficult installation, and high costs, which limit the practical application of switch assemblies. Using water cooling to cool the switch assembly offers better cooling performance, lower operating noise, and makes the switch assembly more compact, enabling miniaturization.

[0058] However, the inventors also found that when the switch assembly of the Marx generator is water-cooled in the manner shown in FIG5 , the water-cooling effect is good, but there is a problem of voltage difference between the water inlet end of the cooling water and the water outlet end where the cooling water finally flows out, resulting in a high voltage hazard and easily injuring workers.

[0059] Specifically, referring to FIG. 5 , there are nine cooling plates 10 , and each cooling plate 10 is provided with a water inlet 11 and a water outlet 12 , through which the cooling water flows inside the cooling plate 10 .

[0060] The water cooling connection 13 sequentially connects the water inlet 11 and the water outlet 12 of the 1st cooling plate to the 9th cooling plate, so that the cooling water can flow across the cooling plates, thereby allowing the cooling water to flow through the 9 cooling plates in sequence and flow out of the water outlet of the 9th cooling plate.

[0061] The switch components of the Marx generator are located on the cooling plate 10, and the switch components on different cooling plates 10 are connected in series. When the discharge trigger comes, each IGBT is turned on, and the capacitors on the switch components form a series discharge loop through the IGBT. Each switch component generates 1Vc The voltage of the entire series circuit generates 9V c voltage.

[0062] Since the cooling plates 10 and the switch assembly form an equipotential, each cooling plate also generates a voltage of 1Vc. Therefore, the voltage at the water inlet of the first cooling plate is 0V, and the voltage at the water outlet of the first cooling plate is 1Vc. There is a voltage difference of 2Vc between the water inlet 11 of the first cooling plate and the water outlet 12 of the second cooling plate, and there is a voltage difference of 9Vc between the water inlet 11 of the first cooling plate and the water outlet 12 of the ninth cooling plate. In this way, when water cooling is performed in the manner shown in Figure 5, there will be a voltage difference of 9Vc between the water inlet end and the final water outlet end.

[0063] It should be understood that Figure 5 only uses nine cooling plates as an example. If the number of cooling plates 10 is n (see Figure 4 ), a voltage difference of nVc will exist between the water inlet and the final water outlet. If n is large enough, this voltage difference can reach as high as 10kV. Since the internal resistance of the cooling water is around 1kΩ, the current in the cooling water is approximately 120A, which is dangerously high and can easily cause harm to the human body.

[0064] In view of this, an embodiment of the present disclosure provides a heat dissipation device for a Marx generator, which may include N cooling plates. After the cooling water flows out from the first cooling plate, it passes through m cooling plates in sequence, and finally flows to the Nth cooling plate, and then passes through k cooling plates 10 in sequence, and finally flows back to the second cooling plate and out. This reflux process can offset most of the N unit voltage differences generated when the cooling water flows through the first cooling plate and from m cooling plates to N cooling plates 10, so that the final voltage of the cooling water is only the voltage difference between the water outlet of the second cooling plate and the water inlet of the first cooling plate, that is, only 2 voltage differences, which greatly reduces the voltage of the cooling water. And because m+k=N-3, that is, the cooling water flows through each cooling plate, heat dissipation is achieved for each switch component, thereby achieving effective heat dissipation for each cooling plate while greatly reducing the high voltage hazard.

[0065] FIG6 is an enlarged view of a local structure of a heat sink for a Marx generator according to an embodiment of the present disclosure, FIG7 is a schematic diagram of a connection of a water-cooling connection of a heat sink for a Marx generator according to some exemplary embodiments of the present disclosure, FIG8 is a schematic diagram of a connection of a water-cooling connection of a heat sink for a Marx generator according to other exemplary embodiments of the present disclosure, FIG9 is a schematic diagram illustrating how to connect the water-cooling connection of a heat sink for a Marx generator according to an embodiment of the present disclosure according to a first connection rule, FIG10 is a schematic diagram illustrating a specific connection of the water-cooling connection of a heat sink for a Marx generator according to an embodiment of the present disclosure according to the first connection rule, and FIG11 is a schematic diagram illustrating how to connect the water-cooling connection of a heat sink for a Marx generator according to an embodiment of the present disclosure according to the first connection rule. FIG12 illustrates another specific connection schematic diagram of connecting the water-cooling wiring of the heat sink for the Marx generator according to the embodiment of the present disclosure according to the first connection rule. FIG13 illustrates another specific connection schematic diagram of connecting the water-cooling wiring of the heat sink for the Marx generator according to the embodiment of the present disclosure according to the first connection rule. FIG14 illustrates a schematic diagram of connecting the water-cooling wiring of the heat sink for the Marx generator according to the embodiment of the present disclosure according to the second connection rule. FIG15 is a connection schematic diagram of the water-cooling wiring of the heat sink for the Marx generator according to some further exemplary embodiments of the present disclosure.

[0066] Referring to Figures 6 to 15, the heat dissipation device for the Marx generator may include: N cooling plates 10 arranged in sequence, each cooling plate 10 is fixed with a switch assembly of the Marx generator, and the switch assemblies on the N cooling plates 10 are connected in series in sequence; each cooling plate 10 has a water inlet 11 and a water outlet 12, cooling water flows into the interior of the cooling plate 10 from the water inlet 11 and flows out from the water outlet 12, and the water inlets 11 and the water outlets 12 of different cooling plates 10 are connected by water cooling wiring to achieve cross-cooling of the cooling water. The cooling water flows through the cooling plates 10; wherein, the cooling water flows in from the water inlet 11 of the first cooling plate, flows out from the water outlet 12 of the first cooling plate, and passes through m cooling plates except the second cooling plate in sequence, flows into the water inlet 11 of the N cooling plate, flows out from the water outlet 12 of the N cooling plate, flows through k cooling plates 10 in sequence, and flows out from the water outlet 12 of the second cooling plate, wherein, m+k=N-3, 0≤m≤N-3, 0≤k≤N-3, the m cooling plates and the k cooling plates 10 are different from each other.

[0067] In some embodiments, the cooling plate 10 includes a first surface and a second surface opposite to each other. The switch assembly is located on the first surface and is metal-connected to the first surface.

[0068] In some embodiments, the metal connection may be any of a bolt connection, a rivet connection, or a weld.

[0069] In a specific embodiment, the cooling plate 10 is made of metal, and the cooling plate 10 is fixedly connected to the switch assembly by bolts.

[0070] 3 , in some embodiments, the switching component of the Marx generator includes: an IGBT 3121; a Zener diode 3123, wherein the input end of the Zener diode 3123 is electrically connected to the first end of the IGBT 3121; a capacitor C, wherein the capacitor C is connected in series between the second end of the IGBT 3121 and the output end of the Zener diode 3123; and an input diode 3122, wherein the input diode 3122 is electrically connected to the first end of the IGBT 3121.

[0071] The gate of the IGBT 3121 is connected to a driving circuit (not shown) to be turned on or off according to a driving signal from the driving circuit.

[0072] A first end of the capacitor C is connected to the collector of the IGBT 3121 , and a second end of the capacitor C is connected to the output end of the Zener diode 3123 , and is connected to the emitter of the IGBT 3121 through the Zener diode 3123 .

[0073] In some embodiments, the switch assembly further includes a resistor connected in series with the Zener diode 3123. The resistor and the Zener diode 3123 both function as voltage regulators, providing a stable voltage to the emitter of the IGBT 3121.

[0074] The IGBT 3121 is used for pulse modulation. Specifically, the DC charging power supply charges the capacitor C through the charging inductor and the input diode 3122 of each switching component, forming a parallel charging capacitor C array.

[0075] When the discharge trigger comes, each IGBT 3121 is turned on, and the capacitor C on the switch component forms a series discharge circuit through the IGBT 3121. The voltage generated by the discharge of each switch component is 1V. c , for N switch components, the voltage generated by discharge is NV c .

[0076] As shown in FIG. 6 , in the switch assembly located on the first surface of the cooling plate 10 , the number of IGBTs 3121 may be two, the number of diodes 3120 may be eight, and the diodes 3120 include an input diode 3122 and a Zener diode 3123 .

[0077] Because cooling plate 10 is made of metal and is connected to the switch assembly through metal, it is at the same potential as the switch assembly. The voltage across cooling plate 10 is consistent with the voltage generated by the switch assembly. As cooling water flows through cooling plate 10, the voltage generated by each cooling plate accumulates. After cooling water flows from the first cooling plate to the Nth cooling plate, the voltage generated by N cooling plates 10 is accumulated.

[0078] When the cooling water flows back from the Nth cooling plate toward the 1st cooling plate, the direction of the accumulated voltage drop is opposite due to the opposite flow directions. For example, the accumulated voltage of the cooling water flowing from the 1st cooling plate to the Nth cooling plate can be a positive voltage, and the accumulated voltage of the cooling water flowing from the Nth cooling plate to the 1st cooling plate can be a negative voltage. The positive and negative voltages cancel each other out. Therefore, the accumulated voltage of the cooling water flowing back from the Nth cooling plate toward the 1st cooling plate can be offset by the accumulated voltage of the cooling water flowing from the 1st cooling plate to the Nth cooling plate. The final voltage is only the voltage difference between the water outlet 12 of the second cooling plate and the water inlet 11 of the first cooling plate.

[0079] If the voltage generated by one switching component is 1Vc, the final voltage of the cooling water is only the voltage of two cooling plates, that is, 2Vc.

[0080] 9 , in some embodiments, N cooling plates 10 are arranged in sequence along a first direction X, the water inlet 11 and the water outlet 12 are provided on the side of the cooling plate 10 , and the water inlet 11 and the water outlet 12 corresponding to the N cooling plates 10 are arranged alternately along the first direction X.

[0081] A cooling water circulation pipe is provided inside the cooling plate 10, and both ends of the cooling water circulation pipe are respectively connected to the water inlet 11 and the water outlet 12. Cooling water flows in the cooling water circulation pipe to remove heat generated by the switch components.

[0082] In some embodiments, the second surface may be coated with thermal grease, which has good thermal conductivity and can further dissipate the heat generated by the switch assembly.

[0083] It is not difficult to find that the m cooling plates 10 and the k cooling plates 10 are the cooling plates 10 other than the first, second, and Nth cooling plates among the N cooling plates 10, and the m cooling plates and the k cooling plates 10 are different from each other. In other words, the cooling water flows through N cooling plates 10 before flowing into the first cooling plate and finally flowing out of the second cooling plate, thereby cooling all N cooling plates 10.

[0084] The value of N can be determined based on the number of switch components. Each cooling plate 10 is used to cool and dissipate heat for a switch component. The number of switch components can be set based on the pulse voltage required. The embodiment of the present disclosure does not specifically limit the value of N.

[0085] In some embodiments, if the value of m is 0, the k cooling plates 10 are the remaining cooling plates 10 excluding the first, second, and Nth cooling plates. In other words, the water-cooling connection connects the water outlet 12 of the first cooling plate to the water inlet 11 of the Nth cooling plate. Cooling water flows from the water outlet 12 of the first cooling plate through the water-cooling connection and directly into the water inlet 11 of the Nth cooling plate. The water-cooling connection sequentially connects the Nth cooling plate, the k cooling plates 10, and the second cooling plate.

[0086] Specifically, the above connection method is described by taking 9 cooling plates 10 as an example. If m is 0, then k is 6. The k cooling plates 10 are the 8th cooling plate to the 3rd cooling plate.

[0087] Referring to Figure 7, the water inlet 11 of the first cooling plate is connected to a water cooling connection, and cooling water flows from the water cooling connection into the water inlet 11 of the first cooling plate. The water outlet 12 of the first cooling plate is connected to the water inlet 11 of the ninth cooling plate through a water cooling connection. The water outlet 12 of the ninth cooling plate is connected to the water inlet 11 of the eighth cooling plate through a water cooling connection, and the water outlet 12 of the eighth cooling plate is connected to the water inlet 11 of the seventh cooling plate through a water cooling connection, and so on, until the water outlet 12 of the fourth cooling plate is connected to the water inlet 11 of the third cooling plate through a water cooling connection. Finally, the water outlet 12 of the third cooling plate is connected to the water inlet 11 of the second cooling plate through a water cooling connection. The water outlet 12 of the second cooling plate is connected to a water cooling connection, and cooling water finally flows out of the water outlet 12 of the second cooling plate through the water cooling connection.

[0088] In some embodiments, the value of k is 0, and the m cooling plates are the remaining cooling plates 10 excluding the first cooling plate, the second cooling plate, and the Nth cooling plate. That is, the water-cooling connection connects the water outlet of the first cooling plate to the water inlet of the third cooling plate, connects the water outlet of the third cooling plate to the water inlet of the fourth cooling plate, and so on, until it is connected to the water inlet of the Nth cooling plate. The water outlet of the Nth cooling plate is directly connected to the water outlet of the second cooling plate via the water-cooling connection. The water outlet of the second cooling plate is connected to a water-cooling connection, and the cooling water ultimately flows out of the water outlet of the second cooling plate through the water-cooling connection.

[0089] As shown in Figure 8, the number of cooling plates 10 is 9, k is 0, and m is 6. The water inlet 11 of the first cooling plate is connected to a water cooling connection, and cooling water flows into the water inlet 11 of the first cooling plate from the water cooling connection. The water outlet 12 of the first cooling plate is connected to the water inlet 11 of the third cooling plate through a water cooling connection. The water outlet 12 of the third cooling plate is connected to the water inlet 11 of the fourth cooling plate through a water cooling connection. The water outlet 12 of the fourth cooling plate is connected to the water inlet 11 of the fifth cooling plate through a water cooling connection. The water outlet 12 of the fifth cooling plate is connected to the water inlet 11 of the sixth cooling plate through a water cooling connection. The water outlet 12 of the sixth cooling plate is connected to the water inlet 11 of the seventh cooling plate through a water cooling connection. The water outlet 12 of the seventh cooling plate is connected to the water inlet 11 of the eighth cooling plate through a water cooling connection. The water outlet 12 of the eighth cooling plate is connected to the water inlet 11 of the ninth cooling plate via a water cooling connection. The water outlet 12 of the ninth cooling plate is also connected to the water inlet 11 of the second cooling plate via a water cooling connection. The water outlet 12 of the second cooling plate is also connected to a water cooling connection, and the cooling water ultimately flows out of the water outlet 12 of the second cooling plate through the water cooling connection.

[0090] In some embodiments, 0<m<N-3, 0<k<N-3. That is, both m and k are not 0. The first cooling plate is not directly connected to the Nth cooling plate, and the Nth cooling plate is not directly connected to the second cooling plate. This makes the length of the water-cooling connection shorter than when the first cooling plate is directly connected to the Nth cooling plate, or when the Nth cooling plate is directly connected to the second cooling plate, facilitating manufacturing.

[0091] On the other hand, if the first cooling plate is directly connected to the Nth cooling plate through a water-cooling connection, the pressure drop of the cooling water flowing in the water-cooling connection is the sum of the voltages of the N cooling plates. If the sum of the voltages of the N cooling plates is too large, it will lead to excessive power loss, which will in turn produce excessive heat loss, which is not conducive to heat dissipation. It can be seen from this that the more cooling plates the water-cooling connection jumps over, the greater the pressure drop of the cooling water in the water-cooling connection, and thus the greater the heat loss. Therefore, compared to directly connecting the first cooling plate to the Nth cooling plate and the Nth cooling plate directly to the second cooling plate, the first cooling plate is not directly connected to the Nth cooling plate, and the Nth cooling plate is not directly connected to the second cooling plate, so that the number of cooling plates jumped over by the water-cooling connection is smaller, thereby making the pressure drop of the cooling water flowing in each water-cooling connection smaller, reducing heat loss.

[0092] Referring to Figure 9, in some embodiments, the water cooling connection is connected in sequence to the 1st cooling plate and the m cooling plates according to the first connection rule: the water outlet 12 of the 1+a×pth cooling plate is connected to the water inlet 11 of the 1+(a+1)pth cooling plate, and the water outlet 12 of the 1+m×pth cooling plate is connected to the water inlet 11 of the Nth cooling plate, where a∈[0,m-1], p is an integer greater than 1, m≥1, and 1+m×p<N.

[0093] In other words, the water-cooling wiring can be connected to the cooling plates 10 according to a preset first connection rule. This makes the connection of the water-cooling wiring more regular, which is beneficial for the preparation of the heat dissipation device. Moreover, because the first connection rule is consistent for different cooling plates 10, the number of cooling plates 10 spanned by the water-cooling wiring is consistent, thereby ensuring a consistent voltage drop of the cooling water in different water-cooling wirings. In turn, the heat loss generated by the different water-cooling wiring spanning the cooling plates 10 is consistent, which is beneficial for balanced heat dissipation.

[0094] Here, a can take values ​​of 0, 1, 2, ..., m-1. p-1 can be used to represent the number of cooling plates 10 bridged. In other words, the above default rule means that when connecting cooling plates 10, the water outlets 12 and water inlets 11 of two cooling plates separated by p-1 cooling plates are bridged.

[0095] For example, if the value of p is 2, when the water-cooling wiring uses the first connection rule described above to connect the cooling plates 10, the number of jumpers is 1. The values ​​of a are 0, 1, 2, ..., m-1 in sequence. Then the water outlet 12 of the first cooling plate is connected to the water inlet 11 of the third cooling plate, the water outlet 12 of the third cooling plate is connected to the water inlet 11 of the fifth cooling plate, and so on, until the water outlet 12 of the 1+(m-1)×p cooling plate is connected to the water inlet 11 of the 1+m×p cooling plate. The water outlet 12 of the 1+m×p cooling plate is connected to the water inlet 11 of the Nth cooling plate.

[0096] It is understood that the first connection rule above limits the selection of m cooling plates. That is, the m cooling plates are, in order, the third cooling plate, ..., the 1+(m-1)×p cooling plate, and the 1+m×p cooling plate. The k cooling plates 10 are the remaining cooling plates 10 excluding the m cooling plates, the first cooling plate, the second cooling plate, and the Nth cooling plate selected above.

[0097] It's not difficult to see that since the first, second, and Nth cooling plates are fixed, after connecting m cooling plates according to the first connection rule, the remaining k cooling plates 10 are also fixed. The water-cooling wiring only needs to connect the Nth cooling plate, the kth cooling plate 10, and the second cooling plate in sequence. Thus, connecting the cooling plates 10 according to the first connection rule can ensure that the cooling water cools all the switch components located on the N cooling plates 10, while reducing the risk of high voltage and simultaneously minimizing heat loss during the cooling water flow.

[0098] It is understood that the water-cooling connection follows the first connection rule described above, connecting m cooling plates up to the 1+m×pth cooling plate. In other words, the connection between the 1+m×pth cooling plate and the Nth cooling plate is not subject to the first connection rule. The following example uses N = 9 and m = 2 as an example for detailed description.

[0099] Referring to Figure 10, according to the above-mentioned first connection rule, the first cooling plate is connected to the third cooling plate, the third cooling plate is connected to the fifth cooling plate, and after the fifth cooling plate, it is not limited by the above-mentioned first connection rule, that is, the fifth cooling plate can be directly connected to the ninth cooling plate.

[0100] In order to make the water-cooling wiring connect more cooling plates 10 according to the above rules, so that the connection of the cooling plates 10 can be more regular, the heat loss generated by the flow of cooling water in different water-cooling wirings can be more balanced. In some embodiments, 1≤N-(1+m×p)≤p. Wherein, N represents the serial number of the Nth cooling plate, and 1+m×p represents the serial number of the 1+m×pth cooling plate. In other words, the number of cooling plates 10 spaced between the Nth cooling plate and the 1+m×pth cooling plate is limited. In other words, the value of m can be limited, thereby limiting the number of cooling plates 10 connected according to the above-mentioned first connection rule.

[0101] For example, if the value of N-(1+m×p) is 1, it means that the number of cooling plates 10 between the Nth cooling plate and the 1+m×pth cooling plate is 0. If the value of N-(1+m×p) is p, it means that the number of cooling plates 10 between the Nth cooling plate and the 1+m×pth cooling plate is p-1.

[0102] 1≤N-(1+m×p)≤p represents the number of cooling plates 10 between the Nth cooling plate and the 1+m×pth cooling plates, which is between 0 and p-1. This allows the water-cooling connection to connect the maximum number of cooling plates 10 between the 1st and Nth cooling plates according to the first connection rule. The following example uses N = 9 and p = 2 as an example for detailed description.

[0103] Referring to Figure 11, 1≤9-(1+m×2)≤2, from which it can be concluded that 3≤m≤3.5, that is, the value of m is limited to 3. According to the above-mentioned first connection rule, the m cooling plates are the 3rd cooling plate, the 5th cooling plate, and the 7th cooling plate, respectively. The 7th cooling plate is the last cooling plate between the 1st cooling plate and the Nth cooling plate that meet the above-mentioned first connection rule. Therefore, by limiting the value of m by the above equation, all cooling plates 10 between the 1st cooling plate and the Nth cooling plate that meet the above-mentioned first connection rule can be selected and connected.

[0104] In some embodiments, 2≤p≤4. When p is equal to 2, the number of cooling plates 10 connected by the water-cooling wiring can be 1, that is, the 1st cooling plate is connected to the 3rd cooling plate, the 3rd cooling plate is connected to the 5th cooling plate, and so on. When p is equal to 3, the number of cooling plates 10 connected by the water-cooling wiring can be 2, that is, the 1st cooling plate is connected to the 4th cooling plate, the 4th cooling plate is connected to the 7th cooling plate, and so on. When p is equal to 4, the number of cooling plates 10 connected by the water-cooling wiring can be 3, that is, the 1st cooling plate is connected to the 5th cooling plate, the 5th cooling plate is connected to the 9th cooling plate, and so on. Within the above range, the number of cooling plates 10 connected by the water-cooling wiring will not be too many, and thus the voltage drop generated by the cooling water in the water-cooling wiring will not be too much, which can ensure that the heat loss is not too large, and is conducive to heat dissipation.

[0105] Referring to Figures 12 and 13, in some embodiments, p takes a value of 2. That is, the number of water-cooling wiring jumpers is 1, so that the water-cooling wiring is connected to the next cooling plate every time there is a cooling plate, so that the length of the water-cooling wiring connecting different cooling plates 10 is basically the same. In addition, because one cooling plate is jumped when connecting the 1st cooling plate, m cooling plates to the Nth cooling plate, the number of cooling plate 10 intervals between two adjacent cooling plates in the remaining k cooling plates 10 is also 1, so that when connecting k cooling plates 10, the water-cooling wiring also jumps over 1 cooling plate for connection. As a result, the length of the water-cooling line connecting m cooling plates 10 is the same as that of the water-cooling line connecting k cooling plates 10, so that the heat loss is minimized when the heat loss generated is the same.

[0106] The following is a specific description using an example where N is 9, p is 2, and m is 3.

[0107] If N is 9 and m is 3, then k is 3. The m cooling plates are the 3rd cooling plate, the 5th cooling plate, and the 7th cooling plate, respectively. The k cooling plates 10 are the 8th cooling plate, the 6th cooling plate, and the 4th cooling plate, respectively.

[0108] The first cooling plate is connected to the third cooling plate, the third cooling plate is connected to the fifth cooling plate, the fifth cooling plate is connected to the seventh cooling plate, and the seventh cooling plate is connected to the ninth cooling plate.

[0109] During reflow, the ninth cooling plate connects to the eighth cooling plate, the eighth cooling plate connects to the sixth cooling plate, the sixth cooling plate connects to the fourth cooling plate, and the fourth cooling plate connects to the second cooling plate. It can be seen that adjacent cooling plates 10 belonging to the m cooling plates are separated by one cooling plate from the k cooling plates 10. Thus, when connecting m cooling plates and k cooling plates 10, the water cooling wires are connected across one cooling plate.

[0110] Referring to Figure 12 , in some embodiments, p is 2, N is an odd number, and N-(1+m×p)=2. That is, for an odd number N, there is one cooling plate between the Nth cooling plate and the 1+m×pth cooling plate. This allows for defining the maximum value of m that complies with the first connection rule when N is an odd number. That is, the 1+m×pth cooling plate is the N-2th cooling plate.

[0111] It is worth noting that when N is an odd number, when the water cooling wiring connects the 1st cooling plate to the Nth cooling plate, the two cooling plates separated by one cooling plate are connected according to the first connection rule of bridging one cooling plate.

[0112] During reflow, the Nth cooling plate is connected to the N-1th cooling plate, i.e., there is no jumper between the Nth and N-1th cooling plates. Subsequently, when k cooling plates 10 are connected, the water cooling wires are sequentially connected to the k cooling plates 10 according to the second connection rule of jumping one cooling plate.

[0113] Referring to Figure 13 , in some embodiments, p is 2, N is an even number, and N-(1+m×p)=1. That is, for an even number, there are 0 cooling plates between the Nth cooling plate and the 1+m×pth cooling plate. This allows for defining the maximum value of m that complies with the first connection rule when N is an even number. That is, the 1+m×pth cooling plate is the N-1th cooling plate.

[0114] It's worth noting that when N is an even number, the water-cooling cable connects the first cooling plate and m cooling plates by following the first connection rule of bridging one cooling plate, connecting the two cooling plates separated by one cooling plate. After all m cooling plates are connected, the (N-1)th cooling plate is connected to the (N)th cooling plate. That is, there is no bridging cooling plate 10 between the last cooling plate of the m cooling plates and the (N)th cooling plate.

[0115] During reflow, the Nth cooling plate to the second cooling plate are sequentially connected according to the second connection rule of bridging one cooling plate.

[0116] Referring to Figure 14, in some embodiments, the water cooling connection is connected in sequence to the Nth cooling plate and the kth cooling plate 10 according to the second connection rule: the water outlet 12 of the Nb×qth cooling plate is connected to the water inlet 11 of the N-(b+1)×qth cooling plate, and the water outlet 12 of the Nk×qth cooling plate is connected to the water inlet 11 of the second cooling plate, where b∈[0,k-1], q is an integer greater than 1, k≥1, and Nk×q>2.

[0117] The second connection rule is used to limit the selection of the k cooling plates 10. The water-cooling wiring can be connected to the cooling plates 10 according to the second connection rule, so that the connection of the water-cooling wiring is more regular.

[0118] Here, the values ​​of b are 0, 1, 2, ..., k-1. q-1 can be used to represent the number of cooling plates 10 to be bridged. In other words, the above preset rule means that when connecting cooling plates 10, the water outlets 12 and water inlets 11 of two cooling plates separated by q-1 cooling plates are bridged.

[0119] For example, if the value of q is 2, when the water-cooling wiring uses the second connection rule described above to connect the cooling plate 10, the number of jumpers is 1. The value of b is 0, 1, 2, ..., k-1 in sequence. Then the water outlet 12 of the Nth cooling plate is connected to the water inlet 11 of the N-2th cooling plate, the water outlet 12 of the N-2th cooling plate is connected to the water inlet 11 of the N-4th cooling plate, and so on, until the water inlet 11 of the N-(k-1)×qth cooling plate is connected to the water outlet 12 of the Nk×qth cooling plate. The water outlet 12 of the Nk×qth cooling plate is connected to the water inlet 11 of the second cooling plate.

[0120] It is understood that the second connection rule limits the selection of k cooling plates 10. Therefore, the remaining cooling plates 10 of the N cooling plates 10, except for the first cooling plate, the second cooling plate, the Nth cooling plate 10, and the kth cooling plate 10, all belong to the m cooling plates. The water cooling connection only needs to connect the first cooling plate, the mth cooling plate, and the Nth cooling plate in sequence.

[0121] In some embodiments, 1≤(Nk×q)-2≤q. Here, Nk×q represents the sequence number of the Nk×qth cooling plate. In other words, the number of cooling plates 10 between the Nk×qth cooling plate and the second cooling plate is limited. In other words, the value of k can be limited, thereby limiting the number of cooling plates 10 connected according to the second connection rule, so as to maximize the value of k.

[0122] For example, if the value of (Nk×q)-2 is 1, it means that the number of cooling plates 10 between the Nk×qth cooling plate and the second cooling plate is 0. If the value of (Nk×q)-2 is q, it means that the number of cooling plates 10 between the Nk×qth cooling plate and the second cooling plate is q-1.

[0123] 1≤(Nk×q)-2≤q represents that the number of cooling plates 10 between the Nk×qth cooling plate and the second cooling plate is between 0 and q-1, so that the water cooling connection can connect the maximum number of cooling plates 10 between the Nth cooling plate and the second cooling plate according to the second connection rule.

[0124] The following is a specific description taking N as 9 and q as 2 as an example.

[0125] 1≤(9-k×2)-2≤2. Therefore, 2.5≤k≤3, meaning the value of k is limited to 3. According to the second connection rule, the k cooling plates 10 are, in order, the 7th cooling plate, the 5th cooling plate, and the 3rd cooling plate. The 3rd cooling plate is the last cooling plate between the Nth cooling plate and the 2nd cooling plate that meet the second connection rule. Therefore, by limiting the value of k using the above equation, all cooling plates 10 between the Nth cooling plate and the 2nd cooling plate that meet the second connection rule can be selected and connected.

[0126] In some embodiments, 2 ≤ q ≤ 4. When q is 2, the number of cooling plates 10 connected across the water-cooling wiring can be 1. When q is 3, the number of cooling plates 10 connected across the water-cooling wiring can be 2. When q is 4, the number of cooling plates 10 connected across the water-cooling wiring can be 3. Within the above range, the number of cooling plates 10 connected across the water-cooling wiring is not excessive, thereby minimizing the voltage drop generated by the cooling water in the water-cooling wiring, thereby minimizing heat loss and facilitating heat dissipation.

[0127] It should be noted that, in some embodiments, the selection of the m cooling plates and the k cooling plates 10 is not limited to the first connection rule and the second connection rule, and they may also be connected in other ways.

[0128] For example, when connecting the first cooling plate and m cooling plates, the number of cooling plates 10 bridged by the water-cooling connection may be different, and may be 0, 1, 2, or other numbers.

[0129] Referring to Figure 15 , taking N as an example, the water cooling connection can connect the water outlet 12 of the first cooling plate and the water inlet 11 of the third cooling plate 10, the water outlet 12 of the third cooling plate and the water inlet 11 of the fourth cooling plate, the water outlet 12 of the fourth cooling plate and the water inlet 11 of the sixth cooling plate, and the water outlet 12 of the sixth cooling plate and the water inlet 11 of the eighth cooling plate. In other words, the m cooling plates are the third cooling plate, the fourth cooling plate, the sixth cooling plate, and the eighth cooling plate. The k cooling plates 10 are the seventh cooling plate and the fifth cooling plate. The water cooling wiring connects the water outlet 12 of the 9th cooling plate and the water inlet 11 of the 7th cooling plate, connects the water outlet 12 of the 7th cooling plate 10 and the water inlet 11 of the 5th cooling plate, and the water outlet 12 of the 5th cooling plate is connected to the water inlet 11 of the 2nd cooling plate.

[0130] As can be seen from the above example, the water cooling connection can also be connected to the water outlets 12 and water inlets 11 of different cooling plates 10 in other ways to achieve the flow of cooling water across the cooling plates 10.

[0131] In the heat dissipation device for a Marx generator provided in the above embodiment, after the cooling water flows out of the first cooling plate 10, it passes through m cooling plates in sequence, finally flows to the Nth cooling plate, then passes through k cooling plates 10 in sequence, and finally flows back to the second cooling plate and out. This backflow process can offset most of the N units of voltage difference generated by the cooling water flowing through the first cooling plate and the m cooling plates to the N cooling plates 10, so that the final voltage of the cooling water is only the voltage difference between the water outlet 12 of the second cooling plate and the water inlet 11 of the first cooling plate, that is, only 2 voltage differences, which greatly reduces the voltage of the cooling water.

[0132] According to a second aspect of the present disclosure, a Marx generator is also provided, comprising a heat dissipation device for a Marx generator as provided in the above-described embodiment. The Marx generator may include a DC charging power supply and multiple switch assemblies connected in series. The DC charging power supply is a power supply, and each switch assembly is used for charging and discharging to generate a high-voltage pulse circuit. The number of switch assemblies can be set based on the required pulse voltage. The switch assemblies in the Marx generator are fixed to a cooling plate 10 in the heat dissipation device.

[0133] The embodiments of the present disclosure are described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be used in combination to advantage. The scope of the present disclosure is defined by the appended claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A heat dissipation device for a Marx generator, wherein: include: N cooling plates arranged in sequence, each of which is fixed with a switch assembly of the Marx generator, and the switch assemblies on the N cooling plates are connected in series in sequence; each cooling plate has a water inlet and a water outlet, cooling water flows into the interior of the cooling plate from the water inlet and flows out from the water outlet, and the water inlets and water outlets of different cooling plates are connected by water cooling wiring to realize the flow of cooling water across the cooling plates; Among them, the cooling water flows in from the water inlet of the first cooling plate, flows out from the water outlet of the first cooling plate, and passes through m cooling plates except the second cooling plate in sequence, flows into the water inlet of the Nth cooling plate, flows out from the water outlet of the Nth cooling plate, flows through k cooling plates in sequence, and flows out from the water outlet of the second cooling plate, wherein, m+k=N-3, 0≤m≤N-3, 0≤k≤N-3, and the m cooling plates and the k cooling plates are different from each other.

2. The heat dissipation device for Marx generator according to claim 1, wherein: The water cooling connection connects the first cooling plate and the m cooling plates in sequence according to the first connection rule: the water inlet of the 1+a×p cooling plate is connected to the water outlet of the 1+(a+1)p cooling plate, and the water outlet of the 1+m×p cooling plate is connected to the water inlet of the Nth cooling plate, wherein a∈[0,m-1], p is an integer greater than 1, m≥1, and 1+m×p<N.

3. The heat dissipation device for Marx generator according to claim 2, wherein: 1≤N-(1+m×p)≤p.

4. The heat dissipation device for Marx generator according to claim 3, wherein: 2≤p≤4。 5. The heat dissipation device for Marx generator according to claim 4, wherein: The value of p is 2.

6. The heat dissipation device for Marx generator according to claim 5, wherein: N is an odd number, N-(1+m×p)=2.

7. The heat sink for Marx generator according to claim 5, wherein: N is an even number, N-(1+m×p)=1.

8. The heat sink for Marx generator according to claim 1, wherein: The water cooling connection connects the Nth cooling plate and the kth cooling plate in sequence according to the second connection rule: the water outlet of the Nb×qth cooling plate is connected to the water inlet of the N-(b+1)×qth cooling plate, and the water outlet of the Nk×qth cooling plate is connected to the water inlet of the second cooling plate, wherein b∈[0,k-1], q is an integer greater than 1, k≥1, and Nk×q>2.

9. The heat sink for Marx generator according to claim 1, wherein: 1≤(Nk×q)-2≤q.

10. The heat sink for Marx generator according to claim 1, wherein: 2≤q≤4。 11. The heat sink for Marx generator according to any one of claims 1 to 10, wherein: The cooling plate comprises a first surface and a second surface which are opposite to each other. The switch component is located on the first surface and is metal-connected to the first surface.

12. The heat sink for Marx generator according to claim 11, wherein: The N cooling plates are arranged in sequence along a first direction, the water inlets and the water outlets are arranged on the sides of the cooling plates, and the water inlets and the water outlets corresponding to the N cooling plates are arranged alternately along the first direction.

13. The heat sink for Marx generator according to claim 11, wherein: The switch assembly of the Marx generator comprises: IGBT; A voltage zener diode, an input end of the voltage zener diode being electrically connected to a first end of the IGBT; A capacitor connected in series between the second end of the IGBT and the output end of the Zener diode; and An input diode is electrically connected to a first end of the IGBT.

14. A Marx generator, wherein: The Marx generator comprises a heat sink as claimed in any one of the preceding claims.

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