Adjustment system and method for aligning a coupling component with an optical or electronic application component

Abstract

The invention relates to an adjustment system (1) for aligning a coupling component (B), in particular an optical fibre, with respect to an optical or electronic application component (A), the adjustment system (1) comprising: a base body (10), to which the application component (A) can be fixed; a magnetic-field generating device (20), which is arranged on the base body (10) and is designed to generate a levitation magnetic field (M); an adjustment body (40), which can be moved relative to the base body (10) in a manner mechanically decoupled therefrom and comprises: at least one permanent magnet (43) and a holding device (45) for holding the coupling component (B); a levitation controlling device (60) which, in cooperation with an actuating device (70) that is functionally connected to the levitation controlling device (60), brings about a floating movement of the permanent magnet (43) relative to the base body (10) and brings about coupling of the coupling component (B) to the application component (A). The invention also relates to a method for aligning a coupling component with an optical or electronic application component.

Description

[0001] Adjustment system and method for aligning a coupling component to an optical or electronic application component

[0002] The invention relates to an adjustment system and a method for aligning a coupling component to an optical or electronic application component. The coupling component can be an optical or electrical coupling component.

[0003] Adjustment systems for aligning an optical coupling component, in particular an optical fiber, with respect to or relative to an application component, such as an optical fiber or an optical chip of a wafer, are known from the general state of the art. Through a contactless or contact-based coupling between the optical coupling component and, for example, the optical chip of the wafer, the correct function of the wafer can be tested by transmitting an optical test signal into the wafer based on the coupling, and the test is performed based on a desired effect on or in the wafer.

[0004] The positioning systems known from the prior art comprise a mechanical positioning device such as a linear stage or a hexapod, on which either the application component, for example, the wafer, or the coupling component, such as an optical fiber, is arranged and, in particular, fixed. According to a method using such positioning systems, the coupling component is aligned with respect to the respective application component with a predetermined accuracy.

[0005] It is an object of the present invention to provide an actuating system and a method for aligning a coupling component with respect to an application component, which is an alternative to the known actuating systems both in terms of the device and the method and which in particular has a higher bandwidth in the control, so that very fast coupling processes between the coupling component and the application component are possible.

[0006] This object is achieved by the features of the independent claims. Further embodiments are specified in the subclaims that refer back to them.

[0007] The positioning system according to the invention is intended for aligning a coupling component, in particular an optical fiber, relative to an optical or electronic application component, in particular an optical fiber or an optical chip. The positioning system according to the invention comprises: a base body on which the application component can be arranged and preferably fixed; a magnetic field generating device arranged on the base body and designed to generate a levitation magnetic field; at least one positioning body which is mechanically decoupled from the base body and movable relative to the latter and comprises: at least one permanent magnet and a holding device for holding the coupling component; a levitation control device which is functionally connected to the magnetic field generating device and is configured to:to send a magnetic field generation signal to the magnetic field generation device for setting and optionally additionally changing one or more of the following properties (E1), (E2) of the magnetic field: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, a control device that is functionally connected to the levitation control device and is configured to generate command signals for positioning the at least one actuating body relative to the base body and to send them to the levitation control device, wherein a sequence of command signals results in a dynamic change in the magnetic field strength distribution or the magnetic field strength direction in the levitation magnetic field, with which the permanent magnet and with it the actuating body can be moved relative to the base body and suspended relative to it in accordance with the command signals, preferably in several degrees of freedom and particularly preferably in six degrees of freedom,and the coupling component can be coupled to the application component.,

[0008] The movement of the at least one adjusting body relative to the base body is preferably completely free-floating and thus without blocking any degree of freedom; however, it is also conceivable to move the adjusting body in such a way that it is floating relative to the base body that at least one degree of freedom is blocked.

[0009] According to the invention, at least one preferably small and lightweight actuator is magnetically levitated. The actuator and the magnetic field generating device form a motion system that allows the actuator to move in up to six degrees of freedom to perform the task of probing, i.e., bringing the coupling component closer or relatively roughly closer to the application component, and the task of scanning or alignment, i.e., fine adjustment or movement up to the desired matching or coupling position, at which the physical conditions for coupling and for a corresponding test, for example, through a scanning process, are met.

[0010] With the levitation control device used according to the invention, in particular the mechanical stiffness of such a control system is adjusted, wherein a measure of the mechanical stiffness can be defined by the time period in which a deviation of an actual state of the coupling component (B) from a target state is compensated. In particular, the levitation control device can be configured such that in a scanning and alignment step, which runs up to the predetermined intermediate state or a predetermined coupling state with a coupling of the coupling component to the application component, a greater mechanical stiffness is realized by a change in the magnetic field strength compared to the magnetic field strength in a preceding step. The change in the magnetic field strength is achieved according to the invention in particular by a change in determinants of a subsequent control.This has the advantage that the system stiffness, i.e. the mechanical response to external disturbances, can be made relatively soft or very soft during an initial step in which the coupling component or the actuating body contacts the application component. Conversely, the system stiffness can then be set relatively high or very high during the scanning or alignment process, so that the actuating body can follow the trajectories specified by the control device very precisely. In addition, the levitation control device can also be used to define or set a maximum contact force of the actuating body or the coupling component when coupling it to an optical or electronic application component. In a coupling step, the contact force of the actuating body or the coupling component can be limited when coupling it.

[0011] A scanning method is understood here in particular to mean that, in an actual state of the actuating body or the coupling component, a search of a predetermined area on the application component for a location at which a maximum of a measure for the transmission of a signal to the respective location of the application component occurs.

[0012] In this way, additional and unfavorable vibration modes caused by a force sensor used in state-of-the-art actuating systems are eliminated, since the force sensor, which has a mass, must be moved during the actuating or positioning process.

[0013] It is easily conceivable to provide a plurality of actuating bodies (i.e. two or more actuating bodies), wherein one of the actuating bodies, several or all of the actuating bodies are made to float simultaneously by the magnetic field generating device and are moved or positioned in up to six degrees of freedom by means of the levitation control device, wherein at the same time the mechanical stiffness of the respective movement system consisting of the actuating body or one of the actuating bodies and the magnetic field generating device can be adjusted in a targeted manner and depending on the task to be solved by the movement system (i.e. for example probing or scanning or alignment).

[0014] According to a further aspect of the invention, a method is provided for aligning a coupling component, in particular an optical fiber, with respect to an application component, which is in particular an optical or electronic application component, the method comprising the following steps, of which individual or all steps can be carried out simultaneously or one after the other:

[0015] (A1) Generation of a levitation magnetic field by a magnetic field generation device,

[0016] (A2) Arranging at least one actuating body with a permanent magnet in the levitation magnetic field, wherein the coupling component is arranged and preferably fixed to the actuating body,

[0017] (A3) Changing the levitation magnetic field by a corresponding electrical control of the magnetic field generating device, whereby one or more of the following properties (E1), (E2) of the magnetic field are changed: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction,

[0018] (A4) due to the changing properties of the levitation magnetic field, execution of actuating movements of the at least one actuating body in at least three and preferably in six degrees of freedom and coupling one end of the coupling component to a predetermined position of the application component.

[0019] Herein, an application component and a coupling component are understood to be components that can be coupled to one another using the actuating system according to the invention and are coupled to one another in the method according to the invention. The application component is the component to which the coupling component is intended to be coupled or is coupled. Coupling is preferably contactless, although contact coupling is also conceivable.

[0020] Here, a "wafer" refers to a substrate in the form of a base plate, which can be circular or square. The base plate is suitable for the production of an electronic component and can, in particular, be manufactured as a single-crystal or polycrystalline semiconductor blank, a so-called ingot.

[0021] The term “state” with respect to the coupling component or the actuating body is understood herein to mean a position or an orientation or both a position and an orientation of the coupling component or the actuating body, wherein the position or the orientation can each be relative values, for example with respect to the application component.

[0022] Here, “coupling an end of the coupling component to a predetermined position of the application component” is understood to mean, in particular, coupling an end of the coupling component to a predetermined position of the application component. The term “along” here, in the context of a direction specified herein, which may in particular also relate to the course of a contour line or a surface or a direction of a component or a structural component such as an axis or a shaft or a central axis thereof, in relation to a reference direction or a reference axis, means that a section of the course or the tangent to a respective contour line or respective surface or the direction in an explicitly or implicitly predetermined viewing direction locally or in sections at an angle of a maximum of 45 degrees and in particular of a maximum of 30 degrees from the respective reference direction orreference axis to which the respective direction is related.

[0023] The term "transverse" means herein in the context of a directional indication mentioned herein, which in particular can also relate to the course of a contour line or a surface or a direction of a part or a structural component such as an axis or a shaft or a central axis thereof, in relation to a reference direction or a reference axis, that a section of the course or the tangent to a respective contour line or respective surface or the direction in an explicitly or implicitly predetermined viewing direction deviates locally or in sections by an angle which is between 45 degrees and 135 degrees, and preferably by an angle which is between 67 degrees and 113 degrees, from the respective reference direction or reference axis to which the respective directional indication is related.

[0024] Herein, a “distance”, in particular between two objects or two surfaces or reference points, is understood to mean in particular the shortest distance or the shortest distance between the two objects or surfaces or reference points, whereby the shortest distance or the shortest distance is not equal to zero in terms of amount, unless explicitly stated otherwise in this regard.

[0025] Herein, the term "fixed" with respect to two component parts and in particular with respect to two contact points or contact surfaces or reference sides of each of two component parts is understood to mean that the two component parts and in particular the two contact points or contact surfaces or reference sides maintain predetermined positions relative to one another, even if external forces act on at least one of the component parts or internal stresses act in at least one of the component parts or at least one of the component parts executes a movement.

[0026] The term "annular" in relation to a component, and in particular a retaining part, means that, viewed in the direction of a longitudinal axis of the cavity encompassed by the component, a cross-sectional contour results that is defined by an inner edge surface surrounding the cavity and an outer edge surface. The inner edge line resulting from the inner edge surface in the longitudinal axis of the cavity and the outer edge line resulting from the outer edge surface in the longitudinal axis of the cavity can, but must, be non-circular or substantially circular.

[0027] A "central line" or another reference direction of a reference line, such as in particular a central axis or a centrally running line or a center line of at least one structural component or part or region or guideway, is defined herein in particular as a connecting line of the centroids of the smallest cross-sectional areas of the respective structural component along a determined or specified direction or between two determined or specified ends. In the event that the reference line can be curved or at least partially curved, the reference direction can generally be understood as a local central line.However, the reference direction herein can also be understood as the direction of a straight reference line, whereby a line is used to determine the straight reference line whose position relative to the curved line results in the smallest deviation between these lines or the smallest deviation area. The same applies if a straight reference line is to be derived from a curved line.

[0028] If the word "or" is used herein, it is to be understood – unless explicitly stated otherwise – as an inclusive "or" or "adjunction" or "alternative." Specifically, the phrase "characteristic A or characteristic B" would refer to either characteristic A alone, characteristic B alone, or the combination of characteristic A and characteristic B.

[0029] Embodiments of the invention are described below with reference to the accompanying figures. These show: Figure 1 shows a schematic functional representation of an embodiment of the actuating system according to the invention, wherein the actuating body is in a position in which the end of the coupling component is spaced from the application component.

[0030] Figure 2 shows the embodiment of the actuating system according to the invention according to Figure 1, wherein the actuating body is in a position in which the end of the coupling component contacts the application component,

[0031] Figure 3 is a schematic functional representation of a further embodiment of the actuating system according to the invention, which, compared to the embodiment of Figure 1, has a guide system on which the actuating movement of the actuating body is partially guided, wherein the actuating body is in a position in which the end of the coupling component is located at a distance from the location of the application component,

[0032] Figure 4 shows the embodiment of the actuating system according to the invention according to Figure 3, wherein the actuating body is in a position in which the end of the coupling component contacts the location of the application component,

[0033] The positioning system 1 according to the invention serves to align a coupling component, in particular an optical fiber, with respect to an optical or electronic application component. The application component is generally assigned the reference symbol "A" and the coupling component is generally assigned the reference symbol "B." In Figure 1, the application component A is shown as a wafer A1 and the coupling component B as an optical fiber B1.

[0034] The actuating system 1 comprises a base body 10, a magnetic field generating device 20 for generating and optionally changing a levitation magnetic field M, an actuating body 40 with a permanent magnet 43 and with a

[0035] Holding device 45, a levitation control device 60 and a control device 70.

[0036] The base body 10 can be designed as a plate or as a hollow body or as a frame device or as a housing or in some other way. The magnetic field generating device 20 is arranged on the base body 10. The actuating body 40 has a frame part 41, a permanent magnet 43 and a holding device 45 for holding the coupling component B. The permanent magnet 43 and the holding device 45 are each fastened to the frame part 41. The permanent magnet 43 is realized in terms of its material, its dimensions and its shape such that the actuating body 40 can be moved in a floating and preferably freely floating manner, i.e. without any blocking of a degree of freedom, in the correspondingly changing levitation magnetic field M. In particular, the permanent magnet 43 can be a single neodymium magnet.However, it is also conceivable that the permanent magnet 43 consists of an arrangement of several individual magnets, which are arranged, for example, in the form of a Halbach array.

[0037] The holding device 45, which is shown purely schematically in Figure 1, is designed to fix and hold the coupling component B in the form of an optical fiber B1. The holding device 45 can be designed as a gripping device. With the gripping device, it is possible for the holding device 45 to grip the coupling component B, so that this coupling component B is positioned in a predetermined or defined manner relative to the frame part 41 and is thus stable in this predetermined position relative to the frame part 41 during the adjusting movement of the adjusting body 40 and the subsequent coupling of the coupling component B to the application component A. Upon actuation of the gripping device, its actuation state can be changed between a gripping state and an open state.In the gripping state, the coupling component B is held or fixed by the gripping device in a predetermined location and position relative to the actuating body 40 or the frame part 41. In the open state, the gripping device is designed and, in particular, shaped or adjusted in such a way that the coupling component B can be fed to the gripping device and received by it, and that the gripping device can be brought into the gripping state in a next step, i.e., in particular, shaped or adjusted, wherein, in the gripping state, the coupling component B is held or fixed to the actuating body 40 or the frame part 41.

[0038] Under the influence of the levitation magnetic field M, the actuating body 40 is levitating relative to the base body 10 in order to perform actuating movements, during which the coupling component B is coupled to the application component A in a predetermined or defined manner. Properties of the levitation magnetic field M, which preferably change, cause actuating movements of the actuating body 40, with which a coupling of an end B1 of the coupling component B, which is fixed to the actuating body 40, to or at a predetermined location P of the application component A is achieved.

[0039] The actuating system 1 can have a guide system 80 or a guide device 81 for guiding movements of the actuating body 40, as shown in Figures 3 and 4.

[0040] If, as shown in Figures 1 and 2, the actuating system 1 does not have a guide system or guide device, the actuating body 40 is movable under the influence of the levitation magnetic field M relative to the base body 10 and freely suspended relative to it, i.e. completely mechanically decoupled from it, in particular movable in several degrees of freedom and particularly preferably movable in six degrees of freedom.

[0041] For this purpose, the levitation magnetic field M is formed in a region located on one side of the longitudinal extension L of the base body 10.

[0042] By means of the levitation magnetic field M generated by the magnetic field generating device 20, the actuating body 40 is manipulated to execute predetermined or defined actuating movements relative to the base body 10. Optionally, the magnetic field generating device 20 can change one or more of the following properties (E1), (E2) of the magnetic field over time when controlled accordingly by the levitation control device 60:

[0043] (E1) the magnetic field strength distribution,

[0044] (E2) the magnetic field strength direction.

[0045] An embodiment of the actuating system 1, which according to Figures 3 and 4 has a guide system 80, provides guidance of the actuating body 40 on a guide device 81. For this purpose, the guide device 81 has a first guide component 83, in particular with a guide track 85, and the actuating body 40 has a second guide component 84, in particular with a second guide track 86. The first guide component 83 and, if applicable, the first guide track 85 and the second guide component 84 and, if applicable, the second guide track 86 are designed such that they can be guided to one another, e.g. by the first guide component 83 and, if applicable, the first guide track 85 and the second guide component 84 and, if applicable, the second guide track 86 being movement-coupled.In this case, only one of the guide components 83, 84 may have a guide track, while the other of the guide components 83, 84 may have a guide part that engages in or rests against the guide track. In this way, the adjusting body 40 is arranged on the first guide component 83 so that it can be linearly moved or displaced. Instead of a guide track, a guide plane may also be provided, so that the adjusting body 40, in contact with the guide plane, can execute adjusting movements in two directions.

[0046] When the actuating body 40 is guided on a guide device 81, the movement of the actuating body 40 in the operating area C of the actuating system 1 is not freely suspended relative to the base body 10, but is realized with less than six degrees of freedom.

[0047] Thus, the actuating system 1 according to the invention can comprise a mechanical guide device 80 with a first guide component 83, wherein the actuating body 40 has a second guide component 84 that is kinematically coupled to the first guide component 83, wherein the actuating body 40 is moved on the guide device 80 under the influence of the levitation magnetic field M. The actuating system 1 can be designed such that the mechanical guide device 80 provides a desired path for the movement of the actuating body 40 relative to the application component A, wherein the mechanical guide device 80 is configured such that the desired path is defined according to one of the following types (r), (s):

[0048] (r) the target path can be defined with only two spatial coordinates and the control device 70 is configured to determine command signals for executing a movement of the actuating body 40 along the target path and in a third spatial coordinate and in the process to establish a respective current relative position relative to the application component A, (s) the target path is to be defined with three spatial coordinates and the control device 70 is configured to determine command signals for executing a movement of the actuating body 40 along the target path and in the process to establish a respective current relative position relative to the application component A.

[0049] The actuating system 1 can also be designed with any other combination of features described herein such that the mechanical guide device 80 is configured to provide a desired path for the movement of the actuating body 40 relative to the application component A and additionally the position of the actuating body 40 relative to the application component A along the desired path, wherein the control device (70) is configured to determine command signals for executing a movement of the actuating body (40) along the provided desired path.

[0050] To generate and optionally change the levitation magnetic field M, the levitation control device 60 is functionally connected to the magnetic field generating device 20 via a first functional connection F1 and the control device 70 is functionally connected to the levitation control device 60 via a second functional connection F2.

[0051] To control the levitation control device 60, the control device 70 generates and sends a magnetic field control signal to the levitation control device 60 via the second functional connection F2. The magnetic field control signal is preferably generated in the control device 70 based on a desired command that defines a desired actuating movement of the actuating body 40 relative to the base body 10 or to the magnetic field generating device 20 or to the levitation magnetic field M generated thereby. The desired command can be entered manually into the control device 70 or determined by the control device 70 or another function or generated automatically.Based on the magnetic field actuating signal, the levitation control device 60 generates a preferably time-dependent magnetic field generation signal and sends it via the first functional connection F1 to the magnetic field generation device 20, which, based on the magnetic field generation signal, generates a levitating magnetic field M with which the actuating body 40 executes the desired actuating movements relative to the base body 10. For this purpose, the levitation control device 60 can have a control function with which the levitation control device 60 generates the magnetic field generation signal in a time-varying manner such that an actual actuating movement of the actuating body 40 that deviates from the desired actuating movement thereof is corrected such that the distance between a current point on the actual actuating movement path and the desired actuating movement path or from a corresponding point on the desired actuating movement path is minimized.

[0052] A further embodiment of the actuating system 1 according to the invention, with any other combination of features described herein, comprises a control device 70 with at least one control function, which is configured such that the movement of the actuating body 4 from a starting position to an alignment state or a coupling state with a coupling of the coupling component B to a predetermined position P of the application component A takes place along a desired path as a reference variable, wherein the command signals are determined from a manipulated variable defined by one or more of the following properties (E1), (E2) of the levitation magnetic field: (E1) a magnetic field strength distribution, (E2) a magnetic field strength direction. The control device 70 can be configured such that the desired path is predetermined or is determined by a desired path determination function, in particular using a scanning method.

[0053] In the aforementioned embodiments of the actuating system, it can be provided that the control device 70 has at least two control functions, wherein the control device 70 has a switching function with which, based on a decision criterion, a switchover from a first control function to a second control function or vice versa takes place. It can be provided that the decision criterion is an intermediate state of the actuating body (40) or the coupling component (B), wherein the intermediate state is defined by one or both of the following determinants (a), (b): (a) a position, (b) an orientation.

[0054] The two control functions can differ in particular in that when the first control function is carried out, changes are made to at least one property (E1), (E2) of the levitation magnetic field (M), the magnetic field strengths of which lie in a first value range, and in that when the second control function is carried out, changes are made to at least one property (E1), (E2) of the levitation magnetic field (M), the magnetic field strengths of which lie in a second value range, wherein the values ​​of the second value range are at least one factor greater than the greatest value of the first value range. The factor can have at least the value 1.1 and in particular at least the value 1.5.

[0055] A further embodiment of the actuating system 1 according to the invention, with any other combination of features described herein, comprises an optical sensor 46 which is arranged or fastened to the actuating body 40 and which is functionally coupled to the actuating device 70, wherein the optical sensor 46 is configured to determine current optical data about an actual area of ​​the outer surface of the electronic application component A, on which the optical sensor 46 is located in its current position. The optical sensor 46 can be configured to transmit the current optical data to the actuating device 70 or can have a transmission function that can transmit current optical data to the actuating device 70.

[0056] In the aforementioned embodiments of the actuating system, it can be provided that the control device 70 is configured, upon receipt of the respective current optical actual data, to determine a respective current difference from predetermined target data about the target area of ​​the outer surface of the application component A, to which the electronic application component A is to be coupled, and to determine the command signals to be transmitted to the levitation control device 60 from the respective current difference.

[0057] To change the actuation state of the gripping device between a gripping state and an open state, it can be designed such that it can be adjusted between the open state and the gripping state using thermal energy, preferably thermal radiation. For this purpose, the gripping device can be designed, in particular, as a ring-shaped or pincer-shaped holding part.

[0058] The annular or pincer-shaped holding part encloses a holding area in which a portion of the coupling component B can be located, wherein the annular or pincer-shaped holding part is shaped in its open state such that its holding area provided for use with the gripping device is large enough or has a receiving shape in which the coupling component B is located in a portion in the holding area and is movable relative to this in the central line of the holding area. The central line of the holding area is defined herein such that the portion of the coupling component B located in the holding area is movable along the central line of the holding area. This can in particular be a central line or center line of the coupling component B.In the gripping state or in the open state, the pincer-shaped holding part can have an opening that opens the holding area in a direction transverse to the central line of the holding area, so that in the open state it is possible for a section of the coupling component B, which is intended to be received in the holding area, to be movable transversely to the central line of the holding area from the outside into it and vice versa, whereas the section of the coupling component B, in the gripping state, is not movable relative to the pincer-shaped holding part, at least transversely to the central line or center line of the coupling component B. Here, the movements refer to forces with amounts that occur as intended in the method according to the invention.

[0059] In particular, the holding part can be selected or formed, at least in one section, from a material that is deformed from the open state to the gripping state due to the effect of a first thermal radiation, preferably due to the effect of a first thermal radiation, in which at least a section of the annular holding part lies in terms of amount in a first temperature range. The material can also be selected or formed in such a way that is deformed from the gripping state to the open state due to the effect of a second thermal radiation, preferably due to the effect of a second thermal radiation, in which at least a section of the annular holding part lies in terms of amount in a first temperature range. It can be provided that a cooling process follows the second thermal radiation.Alternatively, it can be provided that the values ​​of the first temperature range are greater in magnitude than the values ​​of the first temperature range, or vice versa.

[0060] In one embodiment of the actuating system 1 according to the invention, the gripping device comprises a laser device that is functionally connected to the control device 70 via a third functional connection F3 and is designed such that, based on actuating signals, heat radiation can be directed onto the gripping device to actuate it. To actuate the gripping device, the control device 70 sends a corresponding gripping device actuating signal to the gripping device via the third functional connection F3.

[0061] The ring-shaped or pincer-shaped holding part can also be realized in such a way that it can be mechanically changed between the gripping state and the open state.

[0062] The method according to the invention for aligning a coupling component B, in particular an optical fiber, with respect to an application component A, comprises the following steps, of which individual or all steps can be carried out simultaneously or one after the other:

[0063] (A1) Generation of a levitation magnetic field M by a magnetic field generating device 60,

[0064] (A2) Arranging at least one actuator 40 with a permanent magnet 43 in the levitation magnetic field M, wherein the coupling component B is fixed to the actuator 40,

[0065] (A3) Changing the levitation magnetic field M by a corresponding electrical control of the magnetic field generating device 60, wherein one or more of the following properties (E1), (E2) of the magnetic field are changed: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction,

[0066] (A4) due to the changing properties of the levitation magnetic field M, execution of actuating movements of the at least one actuating body 40, wherein the actuating body hovers relative to the application component A, and coupling one end B1 of the coupling component B to a predetermined position P of the application component A, wherein the actuating body 40 is moved in at least three and preferably in six degrees of freedom.

[0067] The method according to the invention can comprise gripping the coupling component B by a gripping device of the actuating body 40 before carrying out the actuating movements, wherein the gripping device fixes the coupling component B in a predetermined orientation and position relative to a frame part 41 of the actuating body 40.

[0068] The method according to the invention can in particular comprise the following steps for coupling the coupling component B to the application component A:

[0069] (A5) in a probing step, changing at least one property (E1), (E2) of the levitation magnetic field M, whose magnetic field strengths lie in a first value range, wherein in the probing step the coupling component B is brought closer to the application component A up to a predetermined local distance in front of or from a defined scanning or alignment position or location,

[0070] (A6) in a scanning and / or alignment step, generating a further change in at least one property (E1), (E2) of the levitation magnetic field M, the magnetic field strengths of which lie in a second value range, wherein in the scanning or alignment step the coupling component B is approximated to the application component A up to a coupling position or location, and wherein the values ​​of the second value range are at least a factor greater than the largest value of the first value range.

[0071] The factor can have a value of at least 1.5. This results in a comparatively low system stiffness during the probing step, so that unintentional contact between the coupling component B and the application component A or other parts of the positioning system has no negative effects, such as damage to the coupling component B or the application component A. On the other hand, a comparatively high system stiffness results during the scan / alignment process, so that the positioning body can very well follow the trajectories specified by the control device.

[0072] The invention also provides a method for coupling a coupling component B arranged on an actuating body 40 to an application component (A), wherein the actuating body 40 has a permanent magnet 43 and is moved by a dynamically changing levitation magnetic field such that the coupling component B is moved from a starting state into a predetermined alignment state in which the coupling component B assumes a predetermined distance and a predetermined orientation relative to the application component A, wherein the levitation magnetic field is defined by one or more of the following properties (E1), (E2): (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, wherein the method comprises the following steps:

[0073] (51) in an initial step, setting a first follow-up control and moving the actuator 40 with changes in the levitation magnetic field M until the coupling component B assumes an intermediate state which has a predetermined difference to the alignment state,

[0074] (52) starting from the intermediate state in a scanning or alignment step, setting a second follow-up control with movement of the actuating body 40 by changes in the magnetic field strengths of the levitation magnetic field M until the coupling component B reaches the predetermined alignment state, wherein the follow-up control in the scanning or alignment step is set relative to the follow-up control in the probing step such that the system stiffness during the follow-up control in the scanning or alignment step is greater than the stiffness of the follow-up control in the probing step, wherein a greater stiffness is defined by a shorter time in which a deviation of an actual state of the coupling component B from a desired state is compensated.

[0075] In general, the greater system stiffness in step (S2) can be realized in that the largest gradient of the change in one or more of the properties (E1), (E2) of the magnetic field in step (S2) is greater than the largest gradient of the change in the respective property (E1), (E2) of the magnetic field in step (S1) or that at least 51% or at least 60% of the largest gradients of the change in one or more of the properties (E1), (E2) of the magnetic field in step (S2) is greater than the largest gradient of the change in the respective property (E1), (E2) of the magnetic field in step (S1).

[0076] The method according to the invention can be implemented in such a way that the largest gradient of the change in one or more of the properties (E1), (E2) of the magnetic field in step (S2) is at least a factor of 1.1 greater than the largest gradient of the change in the respective property (E1), (E2) of the magnetic field in step (S1).

[0077] The method according to the invention can be implemented in combination with any other combination of method steps otherwise defined herein in such a way that step (S2) is followed by a coupling step (S3) in which the coupling component B is coupled to the application component A, wherein the contact force is limited to a predetermined maximum value.

[0078] List of reference symbols

[0079] 1 adjustment system

[0080] 10 base bodies

[0081] 20 Magnetic field generating device

[0082] 40 actuators

[0083] 41 frame part

[0084] 43 Permanent magnet

[0085] 45 Holding device

[0086] 46 Sensor

[0087] 60 Levitation control device

[0088] 70 Control device

[0089] 80 guidance system

[0090] 81 Guide device , 84 Guide component , 86 Guideway

[0091] A application component

[0092] A1 wafers

[0093] B coupling component

[0094] B1 optical fiber

[0095] C Operating range of the control system 1

[0096] F1 first functional connection

[0097] F2 second functional connection

[0098] F3 third functional connection

[0099] L Longitudinal extension of the base body 10

[0100] M Levitation magnetic field

[0101] P Place of the application component A, with or at which a coupling of an end B1 of the coupling component B, which is fixed to the actuating body 40, takes place

Claims

Claims 1. An actuating system (1) for aligning a coupling component (B), in particular an optical fiber, relative to an optical or electronic application component (A), the actuating system (1) comprising: a base body (10) to which the application component (A) can be fixed, a magnetic field generating device (20) arranged on the base body (10) and designed to generate a levitation magnetic field (M), an actuating body (40) which is mechanically decoupled from the base body (10) and movable relative thereto and comprises: at least one permanent magnet (43) and a holding device (45) for holding the coupling component (B), a levitation control device (60) which is functionally connected to the magnetic field generating device (20) and is configured to send a magnetic field generating signal to the magnetic field generating device for setting and optionally additionally changing one or more of the following properties (E1),(E2) of the magnetic field to transmit: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, a control device (70) which is functionally connected to the levitation control device (60) and is configured to generate command signals for positioning the actuating body (40) relative to the base body (10) and to transmit them to the levitation control device, wherein a sequence of command signals results in a dynamic change in the magnetic field strength distribution or the magnetic field strength direction in the levitation magnetic field (M), with which the permanent magnet (43) and with it the actuating body (40) can be moved relative to the base body (10) and suspended relative to it in accordance with the command signals, and the coupling component (B) can be coupled to the application component (A).

2. Actuating system (1) according to claim 1, wherein the holding device for holding the coupling component (B) is realized as a gripping device and in such a way that this can be adjusted between an open state and a gripping state due to thermal energy, preferably due to thermal radiation.

3. Actuating system (1) according to claim 2, wherein the actuating system (1) comprises a laser device which is functionally connected to the actuating device (70) and is designed such that, based on actuating signals, heat radiation can be directed onto the gripping device for actuating the same.

4. Actuating system (1) according to one of the preceding claims, wherein the actuating system (1) comprises a guide device (80) with a first guide component (83), wherein the actuating body (40) has a second guide component (84) which is kinematically coupled to the first guide component (83), wherein the actuating body (40) is moved under the influence of the levitation magnetic field (M) on the guide device (80).

5. A method for aligning a coupling component (B), in particular an optical fiber, with respect to an application component (A), the method comprising the following steps, of which individual or all steps can be carried out simultaneously or one after the other: (51) Generation of a levitation magnetic field (M) by a magnetic field generation device (60), (52) Arranging at least one adjusting body (40) with a permanent magnet (43) in the levitation magnetic field (M), wherein the coupling component (B) is arranged on the adjusting body (40), (53) Changing the levitation magnetic field (M) by a corresponding electrical control of the magnetic field generating device (60), wherein one or more of the following properties (E1), (E2) of the magnetic field are changed: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, (54) due to the changing properties of the levitation magnetic field (M) execution of actuating movements of the at least one actuating body (40), wherein the actuating body hovers relative to the application component (A), and in the process coupling one end (B1) of the coupling component (B) to a predetermined position (P) of the application component (A), wherein the actuating body (40) is moved in at least three and preferably in six degrees of freedom.

6. The method according to claim 5, wherein the actuating body (40) is guided by the levitation magnetic field (M) on a first guide component (83) of a guide device (80).

7. The method according to claim 5 or 6, wherein, before the actuating movements of the actuating body (40) are carried out, the coupling component (B) is gripped by a gripping device of the actuating body (40), the gripping device fixing the coupling component (B) in a predetermined orientation and position relative to a frame part (41) of the actuating body (40) to which the permanent magnet (43) is fastened.

8. The method according to any one of claims 5 to 7, wherein the method comprises the following steps for coupling the coupling component (B) to the application component (A): (55) in a probing step, changing at least one property (E1), (E2) of the levitation magnetic field (M), the magnetic field strengths of which lie in a first value range, wherein in the probing step the coupling component (B) is brought closer to the application component (A) to a predetermined distance before reaching a defined scanning or alignment position or location, (S6) in a scanning or alignment step, generating a further change at least one property (E1), (E2) of the levitation magnetic field (M), the magnetic field strengths of which lie in a second value range, wherein the values ​​of the second value range are at least a factor greater than the largest value of the first value range.

9. The method according to claim 8, wherein the factor has a value of at least 1.5.

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