Adjustment mechanism and processing device

Abstract

Disclosed in the present application is an adjustment mechanism. The adjustment mechanism comprises an elastic member, a first moving assembly moving in a first direction, and a second moving assembly moving in a second direction, which is different from the first direction, wherein two ends of the elastic member are connected to the first moving assembly and the second moving assembly, respectively; and the first moving assembly is in transmission connection with the second moving assembly, such that the second moving assembly is driven by the first moving assembly and the elastic member to move in the second direction so as to change the position of a component to be adjusted in the second direction. The adjustment mechanism in the present application is used for adjusting the height of a structure for supporting a target product, that is, causing the height of the component to be adjusted to be adjustable, and thus the requirement for changing the supporting height for the target product is met. Further provided in the present application is a processing device.

Description

Adjustment mechanism and processing device

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 18, 2023, with application number 202311751074.4 and invention name “Adjustment Mechanism and Processing Device”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of wafer processing technology, and in particular to an adjustment mechanism and a processing device. Background Art

[0003] Wafers are silicon wafers used to manufacture silicon semiconductor circuits. Slicing and subsequent slicing are two of the most important steps in wafer processing. Both the slicing and slicing equipment require the wafer to be positioned in a fixed position during processing.

[0004] The positioning mechanisms used in existing technologies all rely on manually operated clamps to tighten the iron frame supporting the wafer. However, since this clamp cannot be adjusted in height, it cannot adapt to the changes in support height caused by different processes. For example, in some processes, the back of the wafer contacts the receiving stage, while in other processes, the front of the wafer contacts the receiving stage. When the front of the wafer contacts the receiving stage, due to the thickness of the wafer, the iron frame supporting the wafer will be lifted to a height equal to the wafer thickness. Since the clamp cannot be adjusted in height, it cannot meet the support height requirements when the front of the wafer contacts the receiving stage. Summary of the Invention

[0005] In view of this, the present application provides an adjustment mechanism to make the height of the structure used to support the target product adjustable, thereby meeting the demand for changing the support height of the target product.

[0006] The present application also provides a processing device.

[0007] To achieve the above objectives, this application provides the following technical solutions:

[0008] The first aspect of the present application provides an adjustment mechanism, including an elastic member, a first movable component that moves along a first direction, and a second movable component that moves along a second direction different from the first direction. The two ends of the elastic member are respectively connected to the first movable component and the second movable component. The first movable component is transmission-connected to the second movable component so that the second movable component moves along the second direction under the drive of the first movable component and the elastic member to change the position of the component to be adjusted along the second direction.

[0009] In one possible implementation, the first movable component includes a lifting rod having a lifting inclined surface, and the second movable component includes a rotating member, which is slidingly connected to the lifting inclined surface so that the movement of the first movable component along the first direction is converted into the movement of the second movable component along the second direction.

[0010] In one possible implementation, the first movable component also includes a positioning member, and a locking ring that cooperates with the positioning member is provided on the lifting rod. The locking ring includes a first limiting ring and a second limiting ring arranged in parallel. By moving the lifting rod along the first direction, the contact position of the positioning member and the locking ring is changed. When the end of the positioning member is located in the first limiting ring, the second movable component is located at a first height. When the end of the positioning member is located in the second limiting ring, the second movable component is located at a second height.

[0011] In a possible implementation, the first movable assembly further includes a lower support block, and the lifting rod is movably connected to a first mounting hole provided along a first direction on the lower support block.

[0012] In a possible implementation, a positioning hole for installing the positioning member is provided on the lower support block, and the positioning hole is communicated with the first mounting hole;

[0013] The positioning member is connected to the positioning hole, and the positioning member has an elastic portion so that the positioning member can switch from cooperating with the first limiting ring to cooperating with the second limiting ring.

[0014] In one possible implementation, the adjustment mechanism also includes a guide structure for guiding when the second movable component moves, and the guide structure includes a linear bearing extending along the second direction and a guide column capable of moving along the linear bearing. One end of the linear bearing is fixedly connected to the bearing mounting hole of the lower support block, and the other end is slidably connected to one end of the guide column, and the other end of the guide column is fixedly connected to the second movable component.

[0015] In one possible implementation, the second movable component includes an upper support block, the rotating member is fixed on the upper support block and placed in the second mounting hole on the lower support block, the second mounting hole is connected to the first mounting hole, and the outer surface of the rotating member is in contact with the lifting inclined surface of the lifting rod.

[0016] In one possible implementation, the upper support block is provided with a first ear plate and a second ear plate arranged in parallel and spaced apart on the surface close to the first movable component, and a bearing connecting rod is fixedly connected between the first ear plate and the second ear plate, and the bearing connecting rod is used to connect to the rotating part.

[0017] In a possible implementation, the upper supporting block includes a support rod and a lifting arm, and two lifting arms are provided, and the two lifting arms are provided at both ends of the support rod;

[0018] Each of the lifting arms is provided with a rotating member;

[0019] Each of the lifting arms is connected to a guide structure.

[0020] In a possible implementation, the lower support block includes a connecting plate and a mounting arm, and two mounting arms are provided, and the two mounting arms are provided at both ends of the connecting plate;

[0021] The mounting arm is corresponding to the lifting arm, and the support rod is corresponding to the connecting plate;

[0022] The installation arm is slidably connected to the lifting rod; and the guide structure is connected inside the installation arm.

[0023] In a possible implementation, two lifting rods are provided, and the two lifting rods are arranged in parallel along the first direction;

[0024] The adjustment mechanism further includes a pull plate and a linear drive device. The end of the lifting rod away from the first mounting hole is fixedly connected to the pull plate, and the pull plate is detachably connected to the linear drive device.

[0025] In a possible implementation, the elastic member is a tension spring, one end of the tension spring is connected to the first movable assembly via a first screw, and the other end of the tension spring is connected to the second movable assembly via a second screw;

[0026] The second direction is a vertical direction, and the first direction is a horizontal direction.

[0027] It can be seen from the above technical solution that the adjustment mechanism provided by the present application includes a first movable component and a second movable component, the second movable component is connected to the first movable component through an elastic member, the first movable component is connected to the second movable component by transmission, and under the drive of the first movable component and the elastic member, the second movable component is moved along the second direction, thereby changing the position (such as height) of the component to be adjusted (such as a support platform for supporting the target product) along the second direction, thereby meeting the support height change requirement of the target product. By setting the elastic member, the reliable contact between the second movable component and the transmission structure is ensured, thereby ensuring the reliability of the position change of the second movable component along the second direction, and at the same time, the second movable component can be reset by the elastic member. The adjustment mechanism provided by the present application can adjust the height of the component to be adjusted (such as a support platform for supporting the target product) along the second direction, thereby meeting the support height change requirement of the target product.

[0028] The second aspect of the present application further provides a processing device, comprising a support platform for supporting a target product, wherein the support platform is provided with an adjustment mechanism for adjusting the support height of the support platform, and the adjustment mechanism is the above-mentioned adjustment mechanism.

[0029] The processing device of the present application includes the above-mentioned adjustment mechanism, and therefore has the advantages of the above-mentioned adjustment mechanism, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0031] FIG1 is a schematic structural diagram of an adjustment mechanism according to an embodiment of the present application at one angle;

[0032] FIG2 is a schematic structural diagram of the adjustment mechanism provided in an embodiment of the present application from another angle;

[0033] FIG3 is a schematic cross-sectional view of the structure at position AA in FIG2 ;

[0034] FIG4 is a schematic diagram of the exploded structure of the first movable assembly provided in an embodiment of the present application;

[0035] FIG5 is a schematic structural diagram of a lifting rod provided in an embodiment of the present application;

[0036] FIG6 is a schematic structural diagram of the assembled first movable assembly provided in an embodiment of the present application;

[0037] FIG7 is a schematic diagram of the exploded structure of the second movable assembly provided in an embodiment of the present application;

[0038] FIG8 is a schematic structural diagram of the second movable assembly after assembly according to an embodiment of the present application at one angle;

[0039] FIG9 is a schematic structural diagram of the second movable assembly after assembly according to an embodiment of the present application from another angle;

[0040] FIG10 is a schematic structural diagram of an upper supporting block provided in an embodiment of the present application;

[0041] FIG11 is a schematic structural diagram of a support platform of a splitter provided in an embodiment of the present application;

[0042] FIG12 is a schematic diagram of a partially enlarged structure of portion B in FIG11 .

[0043] Wherein: 100, adjustment mechanism, 1, first movable component, 101, pull block, 102, pull plate, 103, lifting rod, 1031, pulling head end, 1032, alignment plane, 1033, first rod segment, 1034, first limiting ring, 1035, second limiting ring, 1036, second rod segment, 1037, lifting inclined surface, 104, first sliding sleeve, 105, second sliding sleeve, 106, first mounting hole, 107, lower support block, 1071, mounting arm, 1072, connecting plate, 108, positioning member, 109, first connecting bolt, 110, positioning hole, 111, second mounting hole, 112, bearing mounting hole, 113, through hole, 114, connecting flange, 115, connecting through hole, 2, second movable component, 201. Rotating member, 202. Upper support block, 2021. First ear plate, 2022. Second ear plate, 2023. Support rod, 2024. Lifting arm, 203. Bearing connecting rod, 3. Linear bearing, 4. Guide column, 5. Elastic member, 6. Second screw, 200. Wafer fixing iron frame, 300. Support platform, 400. Clamping part. DETAILED DESCRIPTION

[0044] One aspect of the present application discloses an adjustment mechanism, which allows the height of a structure used to support a target product to be adjusted, thereby meeting the need for changing the support height of the target product.

[0045] Another aspect of the present application also discloses a processing device.

[0046] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0047] Referring to Figures 1 to 12, the adjustment mechanism 100 of the present application includes an elastic member 5, a first movable component 1, and a second movable component 2. The first movable component 1 moves in a first direction, and the second movable component 2 moves in a second direction different from the first direction. The two ends of the elastic member 5 are respectively connected to the first movable component 1 and the second movable component 2. The first movable component 1 and the second movable component 2 are in transmission connection, so that the second movable component 2 moves in the second direction under the drive of the first movable component 1 and the elastic member 5 to change the position of the component to be adjusted along the second direction. When the adjustment mechanism is applied to a processing device, the component to be adjusted can be a support platform 300 for supporting a target product, so that the support height of the target product can be adjusted by adjusting the structure.

[0048] It should be noted that the movement of the second movable component 2 along the second direction mentioned above can be understood as the movement of the second movable component 2 as a whole along the second direction, and can also be understood as the movement of a part of the second movable component 2 along the second direction. The same applies to the first movable component.

[0049] The target product is placed on the second movable component 2. The second direction is a vertical direction, and the first direction is a horizontal direction.

[0050] In the present application, when the first movable component moves in the positive direction along the first direction, the second movable component moves in the positive direction along the second direction (vertically upward movement hereinafter), and the elastic member 5 is deformed (when the elastic member is a tension spring, the tension spring is stretched). When the first movable component moves in the negative direction along the first direction, the second movable component moves in the negative direction along the second direction (vertically downward movement hereinafter) under the action of its own gravity, and is reset under the action of the elastic member.

[0051] The adjustment mechanism 100 of the present application includes a first movable component 1 and a second movable component 2. The second movable component 2 is connected to the first movable component 1 through an elastic member 5. The first movable component 1 is in transmission connection with the second movable component 2. Driven by the first movable component 1 and the elastic member 5, the second movable component 2 moves in the second direction, thereby changing the height of the component to be adjusted in the second direction, thereby meeting the support height change requirements of the target product. By providing the elastic member 5, the reliable contact between the second movable component 2 and the transmission structure is ensured, thereby ensuring the reliability of the position change of the second movable component in the second direction. The adjustment mechanism 100 provided in the present application can adjust the height of the support platform 300 in the second direction, for example, and can reset the second movable component through the elastic member, thereby meeting the support height change requirements of the target product.

[0052] Specifically, the first movable assembly 1 includes a lifting rod 103 having a lifting inclined surface 1037. Referring to Figures 3 and 4, the second movable assembly 2 includes a rotating member 201 that is slidably connected to the lifting inclined surface 1037, so that movement of the first movable assembly 1 in a first direction is converted into movement of the second movable assembly 1 in a second direction. The lifting inclined surface 1037 of the lifting rod 103 is slidably connected to the rotating member 201. By changing the contact position between the rotating member 201 and the lifting inclined surface 1037, the position of the second movable assembly 2 in the second direction is changed to meet the product positioning requirements.

[0053] In order to limit the position of the lifting rod 103 and thus ensure the position of the rotating member 201 on the lifting inclined surface 1037, the first movable component 1 also includes a positioning member 108, and the lifting rod 103 is provided with a locking ring that cooperates with the positioning member 108. Specifically, the locking ring includes a first limiting ring 1034 and a second limiting ring 1035 arranged in parallel. By moving the lifting rod 103 along the first direction (for example, the lifting rod 103 can be pulled by a cylinder), the contact position of the positioning member 108 and the locking ring is changed. When the end of the positioning member 108 is located in the first limiting ring 1034, the second movable component 2 is located at a first height in the second direction. When the end of the positioning member 108 is located in the second limiting ring 1035, the second movable component 2 is located at a second height in the second direction. It can be understood that the stroke of the end of the positioning member 108 relative to the lifting rod 103 is a first length, and the axial length of the lifting slope 1037 along the lifting rod 103 is a second length, and the second length is greater than the first length, thereby ensuring that when the positioning member 108 is in the two limiting rings, the rotating member 201 is always in contact with the lifting slope 1037.

[0054] The first movable assembly 1 further includes a lower support block 107, and the lifting rod 103 is movably connected to a first mounting hole 106 provided along a first direction on the lower support block 107. In order to improve the smoothness of the lifting rod 103 when being pulled in the first mounting hole 106, thereby facilitating the position switching of the positioning member 108 between the first limiting ring 1034 and the second limiting ring 1035, the lifting rod 103 includes a first rod segment 1033 and a second rod segment 1036 located on both sides of the locking ring. The first rod segment 1033 is slidably connected to the first sliding sleeve 104, and the second rod segment 1036 is slidably connected to the second sliding sleeve 105. As shown in Figures 4 and 5, the first rod segment 1033 is arranged near the pulling head end 1031 of the lifting rod 103. A aligning plane 1032 is provided on the side of the pulling head end 1031. The aligning plane 1032 and the lifting inclined surface 1037 are located on the same side of the lifting rod 103. When installing the lifting rod 103, it is installed with reference to the position of the aligning plane 1032 to ensure that the lifting inclined surface 1037 is in contact with the rotating part 201.

[0055] To install the positioning member 108, a positioning hole 110 is provided on the lower support block 107. The positioning member 108 is connected to the positioning hole 110. The positioning member has an elastic portion to enable the positioning member 108 to switch from cooperating with the first limiting ring 1034 to cooperating with the second limiting ring 1035. For the first limiting ring 1034, the cooperation here can be understood as the positioning member being located within the first limiting ring as described above, and the same applies to the second limiting ring 1035. The positioning hole 110 is connected to the first mounting hole 106. The end of the positioning member 108 near the first mounting hole 106 is provided with a telescopic head. Specifically, the positioning member 108 is a spring plunger that is threaded into the positioning hole 110.

[0056] To ensure the reliability of the movement of the second movable component 2 along the second direction, the adjustment mechanism 100 also includes a guide structure for guiding the movement of the second movable component 2. As shown in Figures 3 and 7, the guide structure includes a linear bearing 3 and a guide column 4. The axis of the linear bearing 3 is arranged along the second direction, and the guide column 4 is movably connected within the axial hole of the linear bearing 3. Specifically, one end of the linear bearing 3 is fixedly connected to the bearing mounting hole 112 of the lower support block 107, and the other end is slidably connected to one end of the guide column 4. The other end of the guide column 4 is fixedly connected to the second movable component 2. The guide column 4 is slidably connected within the linear bearing 3, ensuring that the position of the second movable component 2 changes along the second direction.

[0057] In one embodiment, the second movable component 2 includes an upper supporting block 202, and the rotating member 201 is fixed on the upper supporting block 202 and placed in the second mounting hole 111 on the lower support block 107. As shown in Figure 6, the second mounting hole 111 is connected to the first mounting hole 106, and the outer surface of the rotating member 201 contacts the top elevation slope 1037 of the top elevation rod 103.

[0058] To connect the rotating member 201, the upper support block 202 is provided with a first ear plate 2021 and a second ear plate 2022, which are arranged in parallel and spaced apart on the surface thereof near the first movable assembly 1. A bearing connecting rod 203 is fixedly connected between the first ear plate 2021 and the second ear plate 2022, and the bearing connecting rod 203 is used to connect to the rotating member 201. The rotating member 201 is a bearing, which is a deep groove ball bearing or a tapered roller bearing, or can also be a roller.

[0059] Specifically, referring to Figures 8 and 10, the upper support block 202 includes a support rod 2023 and a lifting arm 2024. Two lifting arms 2024 are provided, disposed at either end of the support rod 2023. The support rod 2023 and the lifting arm 2024 are fixedly connected or integrally formed. The support rod 2023 is used to support the target product. The lifting arm 2024 contacts the lifting inclined surface 1037 via a rotating member 201. By pulling the lifting rod 103, the contact position of the rotating member 201 and the lifting inclined surface 1037 is changed, thereby changing the height of the lifting arm 2024. To improve the stability of the support rod 2023 when its support position changes, each lifting arm 2024 is provided with a rotating member 201, and each lifting arm 2024 is connected to the aforementioned guide structure.

[0060] In one embodiment, lower support block 107 includes a connecting plate 1072 and mounting arms 1071. Two mounting arms 1071 are provided, one at each end of connecting plate 1072. Each mounting arm 1071 is provided with a first mounting hole 106, and jacking rod 103 is slidably connected to mounting arm 1071. Second mounting hole 111 and bearing mounting hole 112 are also provided on mounting arms 1071, as shown in FIG6 . Mounting arms 1071 are provided corresponding to jacking arms 2024, and support rods 2023 are provided corresponding to connecting plate 1072.

[0061] The adjustment mechanism also includes a pull plate 102 and a linear drive device. Two lifting rods 103 are provided, arranged parallel to each other along a first direction. To facilitate simultaneous movement of the two lifting rods 103, the ends of the lifting rods 103 distal from the first mounting holes 106 are fixedly connected to the pull plate 102 via first connecting bolts 109. The pull plate 102 is detachably connected to the linear drive device via a pull block 101. The linear drive device is a pneumatic cylinder or linear motor. The pull block 101 is fixedly connected to the pull plate 102.

[0062] In one embodiment, the elastic member 5 is a tension spring, one end of which is connected to the lower support block 107 of the first movable assembly 1 via a first screw, and the other end is connected to the upper support block 202 of the second movable assembly 2 via a second screw 6. A through hole 113 is also provided on the lower support block 107 for the tension spring to pass through. The tension spring is inserted into through hole 113, facilitating connection of the two ends of the tension spring to the lower support block 107 and the upper support block 202, respectively. A connecting flange 114 is also provided on the lower support block 107, as shown in FIG6 . A connecting through hole 115 is provided on the connecting flange 114. The first movable assembly is connected to the support platform 300 via a second connecting bolt connected to the connecting through hole 115.

[0063] The adjustment mechanism 100 of the present application can meet the need for adjusting the support height of a target product. In one embodiment, the target product is a wafer.

[0064] The present application also provides a processing device, including a support platform 300 for supporting a target product (which may also be referred to as a product to be processed, such as a wafer, specifically a wafer fixing iron frame 200), and an adjustment mechanism is provided on the support platform 300, wherein the adjustment mechanism is the above-mentioned adjustment mechanism 100, and the component to be adjusted is the support platform 300. The processing device may further include a clamping portion 400, and the adjustment structure and the clamping portion 400 cooperate to form a fixture, so that the height of the fixture can be adjusted by the adjustment mechanism, which can also be understood as adjusting the height of the support platform 300, with reference to Figures 11 and 12. In one embodiment, the processing device may be a wafer splitter.

[0065] Example:

[0066] Example 1: An adjustment mechanism, which includes an elastic member 5, a first movable component 1 that moves along a first direction, and a second movable component 2 that moves along a second direction different from the first direction. The two ends of the elastic member 5 are respectively connected to the first movable component 1 and the second movable component 2. The first movable component 1 is transmission-connected to the second movable component 2, so that the second movable component 2 moves along the second direction under the drive of the first movable component 1 and the elastic member 5 to change the position of the component to be adjusted along the second direction.

[0067] Example 2: An adjustment mechanism according to Example 1, wherein the first movable component 1 includes a lifting rod 103 having a lifting inclined surface 1037, and the second movable component 2 includes a rotating member 201, and the rotating member 201 is slidingly connected to the lifting inclined surface 1037, so that the movement of the first movable component 1 along the first direction is converted into the movement of the second movable component 2 along the second direction.

[0068] Example 3: The adjustment mechanism according to Example 1 or 2, wherein the first movable component 1 also includes a positioning member 108, and a locking ring cooperating with the positioning member 108 is provided on the lifting rod 103, and the locking ring includes a first limiting ring 1034 and a second limiting ring 1035 arranged in parallel. By moving the lifting rod 103 along the first direction, the contact position of the positioning member 108 and the locking ring is replaced. When the end of the positioning member 108 is located in the first limiting ring 1034, the second movable component 2 is located at a first height, and when the end of the positioning member 108 is located in the second limiting ring 1035, the second movable component 2 is located at a second height.

[0069] Embodiment 4: The adjustment mechanism according to any one of embodiments 1-3, wherein the first movable component 1 further includes a lower support block 107, and the lifting rod 103 is movably connected to a first mounting hole 106 set along a first direction on the lower support block 107.

[0070] Embodiment 5: The adjustment mechanism according to any one of embodiments 1 to 4, wherein a positioning hole 110 for mounting the positioning member 108 is provided on the lower support block 107 , and the positioning hole 110 is connected to the first mounting hole 106 ;

[0071] The positioning member 108 is connected to the positioning hole 110 . The positioning member 108 has an elastic portion so that the positioning member 108 can switch from cooperating with the first limiting ring 1034 to cooperating with the second limiting ring 1035 .

[0072] Example 6: An adjustment mechanism according to any one of Examples 1-5, wherein the adjustment mechanism also includes a guide structure for guiding when the second movable component 2 moves, the guide structure includes a linear bearing 3 extending along the second direction and a guide column 4 capable of moving along the linear bearing 3, one end of the linear bearing 3 is fixedly connected to the bearing mounting hole 112 of the lower support block 107, and the other end is slidably connected to one end of the guide column 4, and the other end of the guide column 4 is fixedly connected to the second movable component 2.

[0073] Example 7: An adjustment mechanism according to any one of Examples 1-6, wherein the second movable component 2 includes an upper support block 202, the rotating member 201 is fixed on the upper support block 202 and placed in the second mounting hole 111 on the lower support block 107, the second mounting hole 111 is connected to the first mounting hole 106, and the outer surface of the rotating member 201 is in contact with the top elevation slope 1037 of the top elevation rod 103.

[0074] Example 8: An adjustment mechanism according to any one of Examples 1-7, wherein a first ear plate 2021 and a second ear plate 2022 arranged in parallel and spaced apart are provided on the surface of the upper support block 202 close to the first movable component 1, and a bearing connecting rod 203 is fixedly connected between the first ear plate 2021 and the second ear plate 2022, and the bearing connecting rod 203 is used to connect to the rotating part 201.

[0075] Embodiment 9: The adjustment mechanism according to any one of embodiments 1-8, wherein the upper supporting block 202 includes a support rod 2023 and a lifting arm 2024, and two lifting arms 2024 are provided, and the two lifting arms 2024 are provided at both ends of the support rod 2023;

[0076] Each of the lifting arms 2024 is provided with a rotating member 201;

[0077] Each of the lifting arms 2024 is connected to a guide structure.

[0078] Embodiment 10: The adjustment mechanism according to any one of embodiments 1-9, wherein the lower support block 107 includes a connecting plate 1072 and a mounting arm 1071, and two mounting arms 1071 are provided, and the two mounting arms 1071 are provided at both ends of the connecting plate 1072;

[0079] The mounting arm 1071 is provided correspondingly to the lifting arm 2024 , and the support rod 2023 is provided correspondingly to the connecting plate 1072 ;

[0080] The mounting arm 1071 is slidably connected to the lifting rod 103 ; the guide structure is connected inside the mounting arm 1071 .

[0081] Embodiment 11: The adjustment mechanism according to any one of embodiments 1-10, wherein two lifting rods 103 are provided, and the two lifting rods 103 are arranged in parallel along the first direction;

[0082] The adjustment mechanism further includes a pull plate 102 and a linear drive device. The end of the lifting rod 103 away from the first mounting hole 106 is fixedly connected to the pull plate 102, and the pull plate 102 is connected to the linear drive device.

[0083] Embodiment 12: The adjustment mechanism according to any one of embodiments 1 to 11, wherein the elastic member 5 is a tension spring, one end of which is connected to the first movable component 1 via a first screw, and the other end of which is connected to the second movable component 2 via a second screw 6;

[0084] The second direction is a vertical direction, and the first direction is a horizontal direction.

[0085] Example 13: A processing device, which includes a support platform 300 for supporting a target product, and the support platform 300 is provided with an adjustment mechanism for adjusting the support height of the support platform 300, and the adjustment mechanism is the adjustment mechanism described in any one of Examples 1-12.

[0086] In the description of this solution, it should be understood that the terms "upper", "lower", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this solution.

[0087] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or to implicitly indicate the quantity of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features.

[0088] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0089] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present application. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An adjustment mechanism, characterized in that: It includes an elastic member, a first movable component moving along a first direction, and a second movable component moving along a second direction different from the first direction. The two ends of the elastic member are respectively connected to the first movable component and the second movable component. The first movable component is transmission-connected to the second movable component so that the second movable component moves along the second direction under the drive of the first movable component and the elastic member to change the position of the component to be adjusted along the second direction.

2. The adjustment mechanism according to claim 1, characterized in that: The first movable component includes a lifting rod having a lifting inclined surface, and the second movable component includes a rotating member, which is slidably connected to the lifting inclined surface so that the movement of the first movable component along the first direction is converted into the movement of the second movable component along the second direction.

3. The adjustment mechanism according to claim 2, characterized in that: The first movable component also includes a positioning piece, and a locking ring cooperating with the positioning piece is arranged on the lifting rod, and the locking ring includes a first limiting ring and a second limiting ring arranged in parallel. By moving the lifting rod along the first direction, the contact position of the positioning piece and the locking ring is changed. When the end of the positioning piece is located in the first limiting ring, the second movable component is located at a first height, and when the end of the positioning piece is located in the second limiting ring, the second movable component is located at a second height.

4. The adjustment mechanism according to claim 3, characterized in that: The first movable assembly also includes a lower support block, and the lifting rod is movably connected to a first mounting hole arranged along a first direction on the lower support block.

5. The adjustment mechanism according to claim 4, characterized in that: The lower support block is provided with a positioning hole for installing the positioning member, and the positioning hole is connected to the first mounting hole; The positioning member is connected to the positioning hole, and the positioning member has an elastic portion so that the positioning member can switch from cooperating with the first limiting ring to cooperating with the second limiting ring.

6. The adjustment mechanism according to claim 4 or 5, characterized in that: The adjustment mechanism also includes a guide structure for guiding when the second movable component moves, and the guide structure includes a linear bearing extending along the second direction and a guide column that can move along the linear bearing. One end of the linear bearing is fixedly connected to the bearing mounting hole of the lower support block, and the other end is slidably connected to one end of the guide column. The other end of the guide column is fixedly connected to the second movable component.

7. The adjustment mechanism according to claim 6, characterized in that: The second movable component includes an upper supporting block, the rotating member is fixed on the upper supporting block and placed in a second mounting hole on the lower supporting block, the second mounting hole is connected to the first mounting hole, and the outer surface of the rotating member is in contact with the lifting inclined surface of the lifting rod.

8. The adjustment mechanism according to claim 7, characterized in that: The upper support block is provided with a first ear plate and a second ear plate which are arranged in parallel and spaced apart on the surface close to the first movable component, and a bearing connecting rod is fixedly connected between the first ear plate and the second ear plate, and the bearing connecting rod is used to connect with the rotating member.

9. The adjustment mechanism according to claim 7 or 8, characterized in that: The upper support block comprises a support rod and a lifting arm, wherein two lifting arms are provided, and the two lifting arms are provided at both ends of the support rod; Each of the lifting arms is provided with a rotating member; Each of the lifting arms is connected to a guide structure.

10. The adjustment mechanism according to claim 9, characterized in that: The lower support block includes a connecting plate and a mounting arm, wherein two mounting arms are provided, and the two mounting arms are provided at both ends of the connecting plate; The mounting arm is arranged correspondingly to the lifting arm, and the support rod is arranged correspondingly to the connecting plate; The installation arm is slidably connected to the lifting rod; and the guide structure is connected inside the installation arm.

11. The adjustment mechanism according to any one of claims 4 to 10, characterized in that: The two lifting rods are provided, and the two lifting rods are arranged in parallel along the first direction; The adjustment mechanism further includes a pull plate and a linear drive device. The end of the lifting rod away from the first mounting hole is fixedly connected to the pull plate, and the pull plate is connected to the linear drive device.

12. The adjustment mechanism according to any one of claims 1 to 11, characterized in that: The elastic member is a tension spring, one end of which is connected to the first movable component via a first screw, and the other end of which is connected to the second movable component via a second screw; The second direction is a vertical direction, and the first direction is a horizontal direction.

13. A processing device, characterized in that: It comprises a supporting platform for supporting a target product, wherein the supporting platform is provided with an adjusting mechanism for adjusting the supporting height of the supporting platform, and the adjusting mechanism is the adjusting mechanism according to any one of claims 1-12.

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