Gas inlet valve and adjustment element for the gas inlet valve

Abstract

The invention relates to a gas inlet valve (1) for the controlled admittance of a fluid into a vacuum process chamber, wherein the gas inlet valve (1) has: a gas application unit (2) with a gas inlet (21), a gas outlet (22) and an internal volume (23) which connects the gas inlet (21) and the gas outlet (22), wherein the gas application unit has a sealing surface (24) in the internal volume (23); an adjustment element (4) which projects into the gas application unit (2) and has a closure element (45) with a valve disc (46) positioned within the internal volume (23); a drive unit (3) which is coupled to the adjustment element (4) outside the gas application unit (2); and a flexible seal element (44) which is connected to the gas application unit (2) and to the adjustment element (4) and atmospherically separates the drive unit (3) from the internal volume (23). The adjustment element (4) has a coupling arrangement (41), wherein the coupling arrangement (41) has a coupling portion (42), designed for coupling the adjustment element (4) to the drive unit (3), and a first clamping portion (43). The closure element (45) has a second clamping portion (47) and the flexible seal element (44) is connected to the adjustment element (4) by clamping between the first clamping portion (43) and the second clamping portion (47).

Description

GAS INLET VALVE AND ADJUSTING ELEMENT FOR THE GAS INLET VALVE FIELD OF THE INVENTION

[0001] The present invention relates to a gas inlet valve for inlet of a fluid into a vacuum process chamber and an adjustment device for the valve. BACKGROUND OF THE INVENTION

[0002] Vacuum process chambers are used for integrated circuit (IC), semiconductor, flat panel or substrate production, whereby the vacuum chambers are flooded with a process gas after evacuation for at least some of the process steps. Production must take place in a protected atmosphere and, if possible, without the presence of contaminating particles. Evacuation is carried out using a vacuum valve, which connects the vacuum process chamber to a vacuum pump and differs fundamentally from a gas inlet valve in terms of its design, technical requirements and purpose. While a generic gas inlet valve is designed for the defined application of a fluid into the vacuum process chamber (upstream), classic vacuum valves are intended for regulating the pressure conditions in the chamber (downstream) or for loading and unloading the chamber.Opening cross-sections, closing and opening times and sealing requirements differ accordingly.

[0003] Furthermore, vacuum chambers have at least one or two vacuum chamber openings through which the elements to be processed can be guided into and / or out of the vacuum chamber. For example, in a manufacturing facility for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially pass through several vacuum process chambers, in each of which the elements are processed using a separate processing device.

[0004] The element can, for example, be placed by a robot on extended support pins of a lifting system and then lowered onto a carrier, e.g., a potential plate (chuck). The robot arm, which typically carries the element, is then moved out of the chamber. After the element has been placed, the pins can be lowered and are then separated from it, meaning there is no contact between the pins and the element. After the robot arm is removed and the chamber is closed, the chamber is usually evacuated and then filled with a process gas, after which processing of the element can begin.

[0005] A gas inlet valve is provided for filling the process chamber with one or more specific process gases or precursors. This allows for various substrate processing steps, such as the targeted deposition of a material layer on a wafer or etching of the wafer surface. In particular, a specific amount of process fluid is released into the process chamber, and a reaction between the process fluid and the wafer is initiated or accelerated, for example, using a plasma.

[0006] Gas inlet valves are specifically designed for the defined control or regulation of gas flow and are located, for example, within a pipe system between a vacuum process chamber (or a transfer chamber) and a gas source, the atmosphere, or another vacuum process chamber. The opening cross-section of such gas inlet valves is typically significantly smaller than that of a vacuum valve.

[0007] Depending on the application, gas inlet valves can be used not only to completely open and close an opening, but also to control or regulate a flow by continuously adjusting the opening cross-section between an open position and a gas-tight closed position.

[0008] When the process gas is introduced into the vacuum chamber, low flow effects within the chamber and a rapid and precise filling of the chamber is of great importance. For example, a defined amount or volume of a defined process gas should be admitted into the chamber with one opening cycle of the gas inlet valve. For this purpose, rapid actuation of the valve and precise adjustment of the resulting valve opening cross-section are desirable.

[0009] Some processing steps typically take place at elevated process temperatures, in particular above 100°C or above 150°C.

[0010] In this case, a temperature difference between the process gas and the valve components in contact with this process gas can result in inhomogeneous fluid flows or fluid distributions or undesirable deposition processes on the valve.

[0011] A consequence of such undesirable deposition processes in particular can be a shortened service life of a gas inlet valve or a reduced reliability and precision with increasing operating time, in particular with regard to the amount of gas applied through the valve per process cycle.

[0012] In the event of such a functional impairment, replacement of the affected gas inlet valve is usually indicated. This involves a comparatively significant financial outlay, as well as significant intervention in the processing system and calibration of the new valve. Alternatively, affected valve components can typically be repaired or replaced, but this involves complex disassembly and assembly work and correspondingly long downtimes. OBJECT OF THE INVENTION

[0013] Therefore, it is an object of the invention to provide an improved gas inlet valve for a vacuum process to avoid the above-mentioned disadvantages.

[0014] In particular, the task is to provide a gas inlet valve for a processing system, which on the one hand can provide a fast and continuously precise flooding of a vacuum process chamber with a process gas and on the other hand a robust, simple and time-optimized maintenance process.

[0015] In particular, the task is to provide a gas inlet valve with replaceable components that can be maintained more easily and quickly. SUMMARY OF THE INVENTION

[0016] The present invention relates to an adjusting element for a gas inlet valve and a corresponding valve. The fundamental approach of the invention is the design of the adjusting element and the valve in such a way that wear-intensive and / or contamination-prone parts of the valve are assigned to the adjusting element, allowing the latter to be replaced more easily and quickly, while maintaining or reliably restoring precise functionality of the valve.

[0017] During deposition processes in a vacuum process chamber, such as ALD (atomic layer deposition) processes, deposits can form on the gas inlet valve. These deposits can occur particularly on the valve disk and / or on a flexible sealing element. These deposits are increasingly formed due to temperature differences between a process gas and the body temperature of these valve components.

[0018] Due to this specific exposure, these components are intended as parts of the replaceable adjustment element. The adjustment element also features a coupling arrangement that allows the adjustment element to be coupled to the gas inlet valve drive. The flexible sealing element is clamped between the valve plate and the coupling arrangement, thus forming a single unit with the valve plate and the coupling arrangement.

[0019] This combined arrangement allows for easy replacement of the adjustment element through joint removal and installation. This simultaneously ensures precise positioning of the flexible sealing element relative to the valve housing, in particular to a gas application unit, simply by coupling the adjustment element to the drive unit. Thus, a reliable operating condition, i.e., in particular, a reliable sealing effect, can be achieved during installation of the adjustment element and the subsequent final assembly of the valve.

[0020] The invention accordingly relates to an adjusting element for a gas inlet valve for providing a fluid flow through a gas application unit of the gas inlet valve and for interrupting the fluid flow by interacting with the gas application unit. The adjusting element comprises a closure element with a valve plate and a flexible sealing element that is connected to the adjusting element and can be connected to the gas application unit.

[0021] The adjusting element also has a coupling arrangement, wherein the coupling arrangement has a coupling section at a first end designed to couple the adjusting element to a drive unit of the gas inlet valve and a first clamping section at a second end opposite the first end.

[0022] The closure element has a second clamping section at an end opposite the valve plate. The sealing element is connected to the adjusting element by clamping between the first clamping section and the second clamping section.

[0023] In the context of the present invention, a fluid is understood to mean at least one gas, a gas mixture, or a precursor-containing gas. The fluid can, in particular, be a process or precursor gas.

[0024] By clamping the sealing element, it can be reliably positioned and permanently held in this position. Furthermore, by loosening the clamp, the sealing element can be removed and replaced. which in particular makes it possible to renew this sealing element in the adjusting element.

[0025] Overall, the combination of the components of the adjustment element provides a compact and prefabricated complete spare part that can be easily and quickly inserted into a gas inlet valve without the need for further relative positioning, in particular of the sealing element or the valve plate.

[0026] In one embodiment, the adjustment element may comprise a clamping element and the clamping element may connect the closure element and the coupling arrangement.

[0027] In particular, the clamping element can be connected to the closure element and the coupling arrangement in such a way that a clamping force is produced between the first clamping section and the second clamping section by an interaction of the clamping element with the closure element and the coupling arrangement.

[0028] In particular, the clamping element can be designed as a screw, bolt, threaded rod, magnet or as an alternative element that is capable of applying a corresponding clamping force.

[0029] In a design as a screw, a screw head of the screw can interact with the coupling arrangement and a thread of the screw can interact with the closure element, in particular wherein the closure element has a corresponding internal thread.

[0030] In one embodiment, the coupling arrangement may have a radially outwardly directed first projection on the first clamping portion, and the first projection may provide an enlarged support surface (clamping surface).

[0031] In one embodiment, the closure element may have a radially outwardly directed second projection on the second clamping portion and the second projection may provide an enlarged support surface (clamping surface).

[0032] In particular, the first or second projection can be rounded at its radial end region.

[0033] The arrangement of such a cantilever can cause a shift in the forces acting on the flexible sealing element when the sealing element moves. The force is then not applied at the edge or transition area of ​​the clamp, i.e. not in the area where the sealing element touches the two clamping sections, but is shifted radially outwards from this edge area. In addition, bending stresses arising when the sealing element moves do not occur at a specific point or are limited to the transition area, but are distributed in the material of the sealing element further across the sealing element. These effects allow the material stress on the sealing element to be distributed more evenly and consequently an improved, i.e. longer, service life of the sealing element results.

[0034] By shaping the projection with a rounded end, the flexible sealing element does not move along a specific edge, but rather any possible deformation (bending) of the flexible sealing element during movement occurs along the rounded edge. This further reduces localized stress on the flexible sealing element and results in an improved, i.e., longer, service life.

[0035] In one embodiment, a central extension axis of the coupling arrangement can be defined by a longitudinal extension of the coupling arrangement, and an outer width can be defined by a transverse extension of the coupling arrangement in the first clamping section, wherein the longitudinal extension is oriented orthogonally to the transverse extension. The first clamping section can be shaped such that the clamping width at its open clamping end is greater than the outer width at its opposite end.

[0036] In particular, a cross-sectional area defined by a cross section through the first clamping section orthogonal to the extension axis can be maximum with respect to the extension of the clamping section at the clamping end. In other words, the clamping section can have its greatest spatial extent at the end in contact with the sealing element.

[0037] According to one embodiment, the flexible sealing element clamped between the first clamping section and the second clamping section can be designed as a membrane, in particular a metal membrane. The flexible sealing element can accordingly be made of a metal-containing material.

[0038] In one embodiment, the coupling section may have an internal thread for connecting the adjusting element to the drive unit. The internal thread may be provided, in particular, at an end of the coupling arrangement opposite the valve plate.

[0039] The invention also relates to a gas inlet valve for the controlled inlet of a fluid into a vacuum process chamber, wherein the gas inlet valve comprises a gas application unit with a gas inlet, a gas outlet, and an internal volume connecting the gas inlet and the gas outlet. The gas application unit has a sealing surface in the internal volume.

[0040] The gas inlet valve also features an adjustment element that extends into the gas application unit and has a closure element with a valve disk located within the internal volume. The adjustment element is mounted so that it can move along an adjustment axis in both the closing and opening directions.

[0041] The gas inlet valve further comprises a drive unit coupled to the adjustment element outside the gas application unit and providing adjustment of the adjustment element along the adjustment axis. The valve disk can be moved in the opening direction by means of the drive unit into an open position, in which the valve disk is spaced from the sealing surface and a fluid passage is provided.

[0042] The drive unit can have an electric motor or a pneumatic system for adjusting the adjustment element.

[0043] Furthermore, a flexible sealing element is provided which is connected to the gas application unit and to the adjustment element and atmospherically separates the drive unit from the internal volume.

[0044] The adjusting element has a coupling arrangement, wherein the coupling arrangement has a coupling section at a first end designed to couple the adjusting element to the drive unit and a first clamping section at a second end opposite the first end.

[0045] The closure element also has a second clamping section at an end opposite the valve plate, and the sealing element is connected to the adjusting element by clamping between the first clamping section and the second clamping section.

[0046] In embodiments, the adjusting element may be designed according to one of the embodiments described herein.

[0047] In one embodiment, the flexible sealing element can be connected to the gas application unit by means of clamps between a flow component having the gas inlet and the gas outlet and an adjustment component holding the drive unit.

[0048] In one embodiment of the gas inlet valve, the sealing surface, the valve disk and the sealing element may have a circular cross-section, wherein the sealing surface is formed by a shoulder in the internal volume.

[0049] In particular, the valve disk divides the internal volume in the closed position into a first and a second partial internal volume, with the gas inlet having free access to the first partial volume and the gas outlet having free access to the second partial volume. In this arrangement, the gas outlet can be connected to a vacuum chamber, in particular having free access to the vacuum process chamber, and the gas inlet can, in particular, have free access to a process gas source.

[0050] The adjusting element and the gas inlet valve according to the invention are described in more detail below using exemplary embodiments schematically illustrated in the drawings. Identical elements are identified by identical reference numerals in the figures. The described embodiments are generally not drawn to scale and are not to be understood as limiting. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Further advantages of the present invention will become apparent from the detailed description and the drawings.

[0052] Figure 1 shows an embodiment of an inventive Gas inlet valve in a sectional view;

[0053] Figure 2 shows an embodiment of an inventive Adjustment element in cross section; and

[0054] Figure 3 shows part of the gas application unit and the Adjustment unit in a detailed view. DETAILED DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 shows an embodiment of a gas inlet valve 1 according to the invention in a sectional view.

[0056] The gas inlet valve 1 has a gas application unit 2, which in turn has a gas inlet 21, two gas outlets 22, and an internal volume 23, wherein the internal volume 23 has free access to the gas inlet 21 and the gas outlets 22 or connects them. The gas application unit 2 has a sealing surface 24 in the internal volume 23. The sealing surface 24 here forms the valve seat of the gas inlet valve 1.

[0057] The gas inlet valve 1 also has a drive unit 3. In the embodiment shown, the drive unit 3 is designed as a pneumatic drive. However, it is understood that in an alternative In the embodiment according to the invention, an electromechanical drive unit with an electric motor can be provided.

[0058] The gas inlet valve 1 is shown in an open position, i.e., a fluid flow through the internal volume 23, in particular from the gas inlet 21 to the gas outlets 22, is possible. The pneumatic drive unit 3 has a first reciprocating piston 31 and a second reciprocating piston 32, which can be moved in the opening direction 0 by means of a pressurization in a respective lifting cylinder and can thus move the valve 1 into the open position. The pressurization can be provided by means of respective compressed air channels 31a and 32a.

[0059] Furthermore, a return element 33, e.g., a spring, is arranged such that the return element 33 exerts a return force in the closing direction S. The return force is exerted directly on the first piston 31 and, upon contact between the two pistons, also on the second piston 32.

[0060] Due to the arrangement of the return element 33, the valve 1 is held in the closed position or moved into this position without active pressure being applied to the lifting cylinders.

[0061] The gas inlet valve 1 also has an adjusting element 4. The adjusting element 4 is designed such that it can be coupled to the drive unit (as shown).

[0062] For this purpose, the adjusting element 4 has a coupling arrangement 41, wherein a coupling section 42 is formed at a first end of the coupling arrangement 41. This section 42 corresponds to a corresponding counterpart of the drive unit 3. For example, the second reciprocating piston 32 also has a coupling section at its lower end. The drive-side coupling section can, for example, have an external thread, and the coupling section 42 of the adjusting element 4 can have an internal thread. By means of an interaction, in particular screwing, of the threads, a robust and precise coupling of the adjusting element 4 to the drive 3 can be achieved.

[0063] According to alternative embodiments, the coupling can be provided, for example, by a clamping or snap-in mechanism. The invention also extends to other connection variants known to those skilled in the art, such as a magnetic connection between the two components.

[0064] The coupling arrangement 41 also has a clamping portion 43 at a second end. The second end is arranged opposite the first end along an extension axis E. The clamping portion 43 provides a first clamping surface (support surface) by means of which a flexible sealing element 44 is connected to the adjustment element 4 by clamping together with a counterpart, e.g., an opposite clamping surface.

[0065] The coupling arrangement 41 can be designed, for example, as a tube or hollow cylinder.

[0066] The adjusting element 4 further comprises a closure element 45, which provides a valve plate 46 at one end and a second clamping portion 47 at an opposite end. The valve plate 46 has a seal 48 that contacts the valve seat 24 when the valve 1 is closed, thus providing a sealing interaction between the seal 48 and the valve seat 24, i.e., a closed valve state. A fluid flow through the gas application unit is then interrupted.

[0067] The second clamping section 47 forms the counterpart for clamping the flexible sealing element 44 and provides a corresponding clamping surface. The sealing element 44 is thus connected to the adjustment element 4 by clamping between the first clamping section 43 and the second clamping section 47.

[0068] According to an alternative embodiment, the sealing element 44 can additionally be connected to the coupling arrangement 41 and / or the closure element 45 by means of a joining process. For example, the sealing element 44 can be welded to the coupling arrangement 41 and / or the closure element 45.

[0069] The clamping of the coupling arrangement 41 and the closure element 45 is effected by means of a clamping element 49. The clamping element 49, through its interaction with the coupling arrangement 41 and the closure element 45, provides a clamping force or tensile force, by which a corresponding clamping pressure is generated between the clamping sections 43 and 47 and the sealing element 44 is held.

[0070] The clamping element 49 is designed as a screw. The clamping force can thus be adjusted by adjusting the tightening torque of the screw.

[0071] The adjustment element 4 extends into the inner volume 23 and is adjustably mounted outside the gas application unit 2. The valve plate 46 is arranged within the inner volume 23 and is movable along an adjustment axis V in the closing direction S and in the opening direction O.

[0072] In the closed position, the valve disk 46 is pressed against the sealing surface 24. The disk-side seal 48, e.g., a gasket, serves to ensure a gas-tight seal. The seal 48 can be arranged (as shown here) on the disk 46 or (in other embodiments) on the sealing surface 24. This seal 48 consists in particular of an elastomer, thermoplastic, metal, etc., and can have a shape adapted to the shape of the disk 46 (e.g., an O-ring) or can be vulcanized to the disk 46.

[0073] In the example shown, the flexible sealing element 44 is designed as a membrane, in particular as a metal membrane. The sealing element 44 is also connected to the gas application unit 2 and, through this external connection, seals the internal volume 23. The flexible membrane 44 thus provides a flexible seal for the internal volume 23, in particular with respect to a drive unit 3, i.e., the seal remains tight even when the adjustment element 4 moves. The sealing element 44 can also be connected to the gas application unit 2, for example, by means of clamps.

[0074] The drive unit 3 is coupled to the adjustment element 4 outside the gas application unit 2 and is capable of providing an adjustment of the adjustment element 4 along the adjustment axis V. The valve plate 46 can thus be brought into an open position in the opening direction 0 by means of the drive unit 3, in which the valve plate 46 is spaced from the sealing surface 24 and thus a gas flow between the gas inlet 21 and the gas outlet 22 is provided through the internal volume 23.

[0075] Figure 2 shows an adjusting element 4 according to the invention for a gas inlet valve. The adjusting element 4 is shaped and intended to be inserted into a gas inlet valve, for example, as a spare part, whereby comparatively little assembly effort is required while simultaneously ensuring reliable valve tightness.

[0076] For this purpose, the adjusting element 4 has, on the one hand, a valve plate 46, which is part of a lower closure element 45. By means of the valve plate 46, an interruption of a fluid flow through the gas inlet valve can be effected, in particular by pressing the plate 46 with its sealing material 48 onto a corresponding valve seat on the valve. In addition, an upper coupling arrangement 41 is provided, which enables a connection of the adjusting element 4 to the gas inlet valve, in particular to a drive of the valve. For this purpose, the coupling arrangement 41 has a coupling section 42. The coupling section 42 here has an internal thread as a coupling. The internal thread can be connected to the drive, e.g., to a drive rod, by screwing.

[0077] Furthermore, a flexible sealing element 44 forms an integral part of the adjustment element 4. The flexible sealing element 44 is arranged and fastened between the closure element 45 and the coupling arrangement 41. In the embodiment shown, the flexible sealing element 44 is clamped between the closure element 45 and the coupling arrangement 41 by means of a screw 49. The screw is screwed to the closure element 45 by its thread and, through its screw head, which interacts with the coupling arrangement 41, exerts a force on the two components (closure element 45 and coupling arrangement 41) that draws them together. This causes the retaining clamping or pressing of the sealing element 44. The screw 49 and the coupling arrangement 41 extend along the extension axis E. As an alternative to a screw, another clamping device can be used.

[0078] Figure 3 shows a section of the gas inlet valve 1 with adjustment element 4 from Figure 1. The flexible sealing element 44 is clamped on its inner side between the closure element 45 and the coupling arrangement 41. On the outer side, the flexible sealing element 44 is clamped between two housing parts 1a and 1b of the gas inlet valve 1. This provides atmospheric separation or sealing of the internal volume 23 from the drive unit 3.

[0079] In the embodiment shown, the clamping section 43 of the coupling arrangement 41 has a particularly advantageous geometry. The clamping section has a projection 50. The projection has a clamping width 51 that is larger than an outer width 52 of the coupling arrangement 41 in the clamping section 43.

[0080] The projection 50 has in particular a clamping width 51 which is greater than an outer width 52 of the coupling arrangement 41 in the upper region of the clamping section 43.

[0081] In particular, the clamping width 51 provided by the projection 50 is greater than an outer width of the closure element 45 in the clamping section 47.

[0082] In particular, a support surface or clamping surface provided by the clamping portion 47 of the closure element 45 (which is parallel to the extension axis E and extends orthogonally to the extension axis E) is smaller than an opposite support surface or clamping surface provided by the projection 50.

[0083] In particular, the clamping surface of the projection 50 and the clamping surface of the clamping portion 47 of the closure element 45 extend parallel.

[0084] As a result, a movement of the flexible sealing element 44 during opening and / or closing of the valve 1 can be shifted outwards away from a typically highly stressed clamping zone of the clamp. This leads to a more even distribution of bending stresses in the flexible sealing element 44, in particular in the material used for the sealing element 44, e.g. metal.

[0085] As a result, this specific design of the clamping section 43 can extend the service life of the adjusting element and / or the valve.

[0086] In the illustrated embodiment, the projection 50 is rounded at its outer end. This contributes to a further improved distribution of the load on the sealing element 44 and thus to an extended service life, since the sealing element 44 is moved and / or flexibly bent along the circumference of the rounded portion, eliminating point-specific bending loads.

[0087] The larger clamping width 51 also allows a larger clamping surface and thus improved clamping of the sealing element 44 to be provided.

[0088] In the embodiment shown, a cross section of the clamping portion 43 has the shape of a stud, as can be seen in Figure 3.

[0089] While the invention will be described with reference to exemplary embodiments, many other changes and variations may be made without departing from the scope of the present invention. Therefore, it is intended that the appended claims cover such changes and variations as fall within the true scope of the invention.

Claims

CLAIMS 1 . Adjusting element (4) for a gas inlet valve (1) for providing a fluid flow through a gas application unit (2) of the gas inlet valve (1) and for interrupting the fluid flow by interacting with the gas application unit (2), with - a closure element (45) with valve plate (46) and - a flexible sealing element (44) which is connected to the adjusting element (4) and can be connected to the gas application unit (2), characterized in that - the adjusting element (4) has a coupling arrangement (41), wherein the coupling arrangement (41) o has at a first end a coupling section (42) designed for coupling the adjusting element (4) to a drive unit (3) of the gas inlet valve (1) and o has at a second end opposite the first end a first clamping section (43), - the closure element (45) has a second clamping section (47) at an end opposite the valve plate (46), and - the sealing element (44) is connected to the adjusting element (4) by clamping between the first clamping section (43) and the second clamping section (47).

2. Adjusting element (4) according to claim 1, wherein the adjusting element (4) has a clamping element (49) and the clamping element (49) connects the closure element (45) and the coupling arrangement (41).

3. Adjusting element (4) according to claim 2, wherein the clamping element (49) is connected to the closure element (45) and the coupling arrangement (41) in such a way that by an interaction of the clamping element (49) with the closure element (45) and the Coupling arrangement (41) a clamping force between the first clamping section (43) and the second clamping section (47).

4. Adjusting element (4) according to claim 2 or 3, wherein the clamping element (49) is designed as a screw.

5. Adjustment element (4) according to claim 4, wherein a screw head of the screw cooperates with the coupling arrangement (41) and a thread of the screw cooperates with the closure element (45), in particular wherein the closure element has an internal thread.

6. Adjusting element (4) according to one of the preceding claims, wherein the coupling arrangement (41) has a radially outwardly directed first projection (50) on the first clamping section (43) and the first projection (50) provides an enlarged support surface.

7. Adjusting element (4) according to one of claims 1 to 5, wherein the closure element (45) has a radially outwardly directed second projection (50) on the second clamping section (47) and the second projection (50) provides an enlarged support surface.

8. Adjusting element (4) according to claim 6 or 7, wherein the first and / or the second projection (50) is rounded at its radial end region.

9. Adjusting element (4) according to one of the preceding claims, wherein - a central extension axis (E) is defined by a longitudinal extension of the coupling arrangement (41) and an outer width (52) is defined by a transverse extension of the coupling arrangement (41) in the first clamping section (43), wherein the longitudinal extension is oriented orthogonally to the transverse extension, and - the first and / or the second clamping section (43, 47) is shaped such that at its open clamping end there is a clamping width (51) which is greater than the outer width (52) at its opposite end.

10. Adjusting element (4) according to claim 9, wherein a cross-sectional area defined by a cross section through the first or the second clamping section (43) orthogonal to the extension axis (E) is maximum with respect to the extension of the clamping section at the clamping end.

11. Adjusting element (4) according to one of the preceding claims, wherein the flexible sealing element (44) clamped between the first clamping section (43) and the second clamping section (47) is designed as a membrane, in particular a metal membrane.

12. Adjusting element (4) according to one of the preceding claims, wherein the coupling section (42) has an internal thread for connecting the adjusting element (4) to the drive unit (3).

13. Gas inlet valve (1) for the controlled inlet of a fluid into a vacuum process chamber, the gas inlet valve (1) comprising: - a gas application unit (2) with a gas inlet (21), a gas outlet (22) and an internal volume (23) connecting the gas inlet (21) and the gas outlet (22), wherein the gas application unit has a sealing surface (24) in the internal volume (23), - an adjusting element (4) projecting into the gas application unit (2) with a closure element (45) with a valve plate (46) which is arranged within the internal volume (23), wherein the adjusting element (4) is movably mounted along an adjusting axis (V) in the closing direction (S) and in the opening direction (O), - a drive unit (3) which is coupled to the adjusting element (4) outside the gas application unit (2) and provides an adjustment of the adjusting element (4) along the adjustment axis (V), wherein the valve plate (46) can be brought into an open position in the opening direction (0) by means of the drive unit (3), in which the valve plate (46) is spaced from the sealing surface (24) and a fluid passage is provided, - a flexible sealing element (44) which is connected to the gas application unit (2) and to the adjusting element (4) and atmospherically separates the drive unit (3) from the internal volume (23), characterized in that - the adjusting element (4) has a coupling arrangement (41), wherein the coupling arrangement (41) o has at a first end a coupling section (42) designed to couple the adjusting element (4) to the drive unit (3) and o has at a second end opposite the first end a first clamping section (43), - the closure element (45) has a second clamping section (47) at an end opposite the valve plate (46), and - the flexible sealing element (44) is connected to the adjusting element (4) by clamping between the first clamping section (43) and the second clamping section (47).

14. Gas inlet valve (1) according to claim 13, wherein the adjusting element (4) is designed according to one of claims 1 to 12.

15. Gas inlet valve (1) according to claim 13 or 14, wherein the flexible sealing element (44) is connected to the gas application unit (2) by means of clamps between a flow component (1a) having the gas inlet (21) and the gas outlet (22) and an adjustment component (1b) holding the drive unit (3).

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