Driving device, positioning device, processing device, and device manufacturing method

Abstract

A stage device 1 includes: a first drive shaft 100 for driving a stage 2 in an X-axis direction by magnetism; a second drive shaft 200 for driving the stage 2 and the first drive shaft 100 integrally by magnetism in a Y-axis direction intersecting the X-axis direction; a first gas floating part 10 for floating an X slider 21 from an X guide 110 by gas; and a second gas floating part 20 for floating a Y slider 150 from a Y guide 210 by gas. The X slider 21 and the first drive shaft 100 constitute a first linear motor 120 for driving the X slider 21 along the first drive shaft 100, and the Y slider 150 and the second drive shaft 200 constitute a second linear motor 220 for driving the Y slider 150 along the second drive shaft 200.

Description

Driving device, positioning device, processing device, and device manufacturing method

[0001] The present disclosure relates to a drive device and the like.

[0002] Patent Document 1 discloses a drive device or actuator for use in a vacuum environment, which includes a slider that is driven in a predetermined movement direction by gas pressure in an air servo chamber, and a guide that extends in the movement direction to guide the slider. The slider floats above the guide and moves smoothly thanks to an air bearing formed by compressed air supplied between the outer periphery of the slider and the inner periphery of the guide via an air pad.

[0003] Patent No. 6893170

[0004] Pneumatic actuators such as those described in Patent Document 1 have the problem that it is difficult to improve responsiveness or speed when driving the slider due to physical constraints based on the principle of converting gas pressure in an air servo chamber into thrust for the slider.

[0005] The present disclosure has been made in view of these circumstances, and aims to provide a drive device and the like that can achieve both smoothness and responsiveness when driving a driven body.

[0006] In order to solve the above problems, a driving device according to one aspect of the present disclosure includes a first driving shaft that magnetically drives a driven body in a first direction, a second driving shaft that magnetically drives the driven body and the first driving shaft together in a second direction that intersects with the first direction, a first gas levitation unit that uses gas to levitate the driven body from the first driving shaft, and a second gas levitation unit that uses gas to levitate the first driving shaft from the second driving shaft.

[0007] According to this aspect, high responsiveness during driving can be achieved by the first drive shaft and the second drive shaft, which magnetically drive the driven body and the first drive shaft, and high smoothness during driving can be achieved by the first gas levitation portion and the second gas levitation portion, which levitate the driven body and the first drive shaft using gas.

[0008] Another aspect of the present disclosure is a positioning device that positions a driven body using the above-described driving device.

[0009] Yet another aspect of the present disclosure is a processing device that performs a predetermined process on the driven body positioned by the positioning device.

[0010] Yet another aspect of the present disclosure is a device manufacturing method, which manufactures a device through processing by the processing apparatus described above.

[0011] Any combination of the above components, or any conversion of these expressions into methods, devices, systems, recording media, computer programs, etc., are also encompassed within the present disclosure.

[0012] According to the present disclosure, smoothness and responsiveness can both be achieved when driving a driven body.

[0013] FIG. 1 is a perspective view schematically showing a stage device according to a first embodiment. FIG. 2 is a perspective view schematically showing the details of a first linear motor. FIG. 3 is a cross-sectional view schematically showing a first gas floating unit that uses floating gas to smooth the X-axis direction drive of the X-slider by the first drive shaft. FIG. 4 is a cross-sectional view schematically showing a second gas floating unit that uses floating gas to smooth the Y-axis direction drive of the Y-slider by the second drive shaft. FIG. 5 is a perspective view schematically showing a stage device according to a second embodiment. FIG. 6 is a schematic view of the first linear motor as viewed in the Y-axis direction. FIG. 7 is a partially enlarged view of the first magnet unit.

[0014] Hereinafter, with reference to the drawings, a detailed description of embodiments of the present disclosure (hereinafter also referred to as "embodiments") will be given. In the description and / or drawings, identical or equivalent components, members, processes, etc. will be designated by the same reference numerals, and redundant description will be omitted. The scale and shape of each part shown in the drawings are set for convenience to simplify the description and should not be interpreted as limiting unless otherwise specified. The embodiments are merely examples and do not limit the scope of the present disclosure in any way. Not all features and combinations thereof presented in the embodiments are necessarily essential to the present disclosure. For convenience, the embodiments are presented broken down into components for each function and / or functional group that realizes the features. However, one component in an embodiment may actually be realized by a combination of multiple separate components, or multiple components in an embodiment may actually be realized by a single integrated component. Furthermore, although multiple embodiments and variants may be disclosed in parallel, any components of each embodiment and / or each variant may be combined in any manner as long as they do not interfere with each other's functions.

[0015] FIG. 1 is a perspective view schematically illustrating a stage device 1 serving as a driving device or positioning device according to a first embodiment of the present disclosure. In this embodiment, for convenience, a three-dimensional coordinate system or XYZ coordinate system is established, which is formed by mutually orthogonal X-, Y-, and Z-axes. The X-axis direction is a first direction in which a first driving axis 100 (described later) drives a stage 2 or table as a driven body. The Y-axis direction is a second direction in which a second driving axis 200 (described later) drives the stage 2 and the first driving axis 100 together. The Z-axis direction is a third direction, which is the normal direction to the driving plane or XY plane formed by the X and Y axes. The XY plane is preferably a horizontal plane, and in this case, the Z-axis direction is vertical. Note that the X, Y, and Z axes do not need to be orthogonal to each other, as long as they at least intersect each other. In other words, the X, Y, and Z axes may be different from each other.

[0016] The stage device 1 includes a first drive shaft 100 that magnetically drives the stage 2 in the X-axis direction, and a second drive shaft 200 that magnetically drives the stage 2 and the first drive shaft 100 together in the Y-axis direction. In this embodiment, a pair (i.e., two) substantially identical second drive shafts 200 are provided at both ends of the first drive shaft 100 extending in the X-axis direction. In the following description, the two second drive shafts 200 will not be distinguished from one another and will be described collectively unless otherwise specified.

[0017] The one first drive shaft 100 and the two second drive shafts 200 form a substantially H-shape when viewed in the Z-axis direction or from above. The two second drive shafts 200 are fixedly installed on the surface of a base 3, which has a surface in the XY plane or a horizontal plane. The one first drive shaft 100 is spaced apart from the surface of the base 3 in the Z-axis direction and in a non-contact state so that it can move in the Y-axis direction on the base 3 via the two second drive shafts 200. The base 3 is further fixedly installed on the surface of a base 4, which has a surface in the XY plane or a horizontal plane.

[0018] An object (not shown) is placed on the surface of the stage 2, which constitutes the driven body. Here, the "surface" in this embodiment refers to the surface on the +Z side (the upper surface in FIG. 1), and the "rear surface" in this embodiment refers to the surface on the -Z side (the lower surface in FIG. 1). An object or workpiece, such as a semiconductor wafer, may be placed on the surface of the stage 2. In this case, the stage device 1 constitutes a positioning device that positions the object placed on the stage 2 as the driven body, and further constitutes part of a processing device that performs a processing operation on the object positioned by the positioning device. Examples of processing devices include semiconductor manufacturing equipment such as exposure devices, ion implantation devices, heat treatment devices, ashing devices, sputtering devices, dicing devices, inspection devices, and cleaning devices, as well as FPD (Flat Panel Display) manufacturing equipment.

[0019] The first drive shaft 100, which drives the stage 2 (the driven body) in the X-axis direction, is equipped with an X guide 110 extending in the X-axis direction. The X guide 110 forms the main body of the first drive shaft 100. An X slider 21 is provided on this X guide 110 and is movable or slidable in the X-axis direction while being guided by the X guide 110. The front surface (the surface on the +Z side) of the X slider 21 is connected to the back surface (the surface on the -Z side) of the stage 2, and they integrally form the driven body. Therefore, the stage 2 can move in the X-axis direction integrally with the X slider 21 while being guided by the X guide 110. As will be described later, a floating gas such as compressed air is supplied between the inner circumferential surface of the X slider 21 (the driven body) and the outer circumferential surface of the X guide 110 (the first drive shaft 100), allowing the X slider 21 to float above the X guide 110 and move smoothly and substantially without contact.

[0020] In order to drive a driven body formed by the stage 2 and X slider 21 along the X-axis direction, a first linear motor 120 is arranged between the driven body and the first drive shaft 100. In this embodiment, a pair (i.e., two) of substantially identical first linear motors 120 are provided on both sides in the Y-axis direction of the X slider 21 (and the X guide 110 serving as the main body of the first drive shaft 100) as the driven body. Furthermore, each first linear motor 120 is provided on the X slider 21 on the back side of the driven body formed by the stage 2 and X slider 21. In this way, by providing each first linear motor 120 on the X slider 21 on the back side, away from the stage 2 on the front side, it is possible to reduce the adverse effects that magnetic fields leaking from each first linear motor 120 could have on processing of semiconductor wafers and the like on the stage 2 (for example, irradiation of electron beams that are easily affected by magnetism).

[0021] Generally, a linear motor comprises a coil section made up of multiple coils that generate a magnetic field when an external current is passed through them, and a magnet section made up of multiple magnets that interact with the magnetic field generated by the coil section. The first linear motor 120 according to this embodiment also comprises a first coil section 130 as the coil section, and a first magnet section 140 as the magnet section. To configure the first linear motor 120 that drives the X-slider 21 (and the stage 2) as the driven body along the X-axis direction, one of the first coil section 130 and the first magnet section 140 can be provided on the X-slider 21, and the other on the first drive shaft 100.

[0022] In the first linear motor 120, it is preferable that the first coil section 130 is provided on the X-slider 21, and the first magnet section 140 is provided on the first drive shaft 100. As shown in the figure, the first magnet section 140 may be attached to a columnar beam section 160 that spans between a pair of Y-sliders 150 (described later), which are part of the first drive shaft 100. These may be arranged in any desired manner. For example, as viewed in the Z-axis direction, the X-slider 21, the first magnet section 140 (or the first coil section 130), and the beam section 160 are arranged in this order from the central X-slider 21 toward the outside in the Y-axis direction. Furthermore, the first magnet section 140 and the beam section 160, which are elongated in the X-axis direction, are arranged substantially parallel to each other on both sides in the Y-axis direction of the X-guide 110, which is also elongated in the X-axis direction. However, the first magnet portion 140 and the beam portion 160 are not in contact with the X guide 110, and the X slider 21 is able to move through the gap.

[0023] The first coil unit 130 is driven in the X-axis direction together with the X-slider 21 due to magnetic interaction with the first magnet unit 140. Because the first coil unit 130 moves in this manner, the first linear motor 120 is a so-called moving coil type linear motor. In this case, the first magnet unit 140 is stationary in the X-axis direction (it moves in the Y-axis direction by the second drive shaft 200), which has the advantage of reducing fluctuations in the magnetic field leaking outside the first linear motor 120. This is particularly preferable when processing semiconductor wafers or the like on the stage 2 is susceptible to magnetic influences.

[0024] In this type of moving coil type first linear motor 120, the length of the first coil section 130 in the X-axis direction is shorter than the length of the first magnet section 140 in the X-axis direction. For example, the length of the first coil section 130 in the X-axis direction is preferably equal to or shorter than the lengths of the X-slider 21 and / or the stage 2 in the X-axis direction. Furthermore, the length of the first magnet section 140 in the X-axis direction is preferably a length that can cover the range of motion of the X-slider 21 in the X-axis direction. As will be described later, the relatively short first coil section 130 can move in the X-axis direction integrally with the X-slider 21 and the stage 2 as the driven body, within the installation range of the relatively long first magnet section 140.

[0025] On the other hand, if the processing of semiconductor wafers or the like on stage 2 is not susceptible to magnetic influences, first linear motor 120 may be configured as a so-called moving magnet type. Specifically, first coil section 130 is provided on first drive shaft 100 (e.g., beam section 160), and first magnet section 140 is provided on X-slider 21 (not shown). In this case, first coil section 130, which generates heat when a current flows through it, is isolated from the driven object integral with stage 2 or X-slider 21, thereby effectively suppressing heat transfer to stage 2 and / or the workpiece, such as a semiconductor wafer. This is particularly preferable when the workpiece, such as a semiconductor wafer, is susceptible to heat.

[0026] In this type of moving magnet type first linear motor 120, the length of the first coil section 130 in the X-axis direction is longer than the length of the first magnet section 140 in the X-axis direction. For example, the length of the first coil section 130 in the X-axis direction is preferably a length that can cover the range of motion of the X-slider 21 in the X-axis direction. Furthermore, the length of the first magnet section 140 in the X-axis direction is preferably equal to or shorter than the length of the X-slider 21 and / or the stage 2 in the X-axis direction. The relatively short first magnet section 140 can move in the X-axis direction integrally with the X-slider 21 and stage 2 as the driven body, within the installation range of the relatively long first coil section 130.

[0027] By providing a pair of first linear motors 120 as described above on both sides of the X-slider 21 and stage 2 as the driven bodies in the Y-axis direction, the driven bodies can be stably driven in the X-axis direction while effectively suppressing undesirable rotation such as yawing (rotation around the Z-axis).

[0028] 2 is a perspective view that schematically shows the details of the first linear motor 120. This figure shows the first linear motor 120 in FIG. 1 as viewed from the rear side (−Z side).

[0029] The first coil unit 130 includes a holder 131 and a coil 132 held by the holder 131. While not shown in detail, the coil 132 is, for example, a typical three-phase coil. Specifically, a U-phase coil, a V-phase coil, and a W-phase coil (not shown) are periodically arranged along the X-axis direction, which is the drive direction. Currents (e.g., U-phase current, V-phase current, and W-phase current) flowing through the coils 132 of each phase may be supplied via the holder 131. The coils 132 are arranged to protrude from the holder 131 on the rear side toward the front side (+Z side). The coil 132 or coil group as a whole is preferably formed in a flat plate shape with the Y-axis direction as its normal direction. The holder 131 is fixedly attached, preferably to a side surface on the rear side, of the X-slider 21, which serves as the driven body. Therefore, the first coil unit 130 can move in the X-axis direction integrally with the X-slider 21.

[0030] The first magnet unit 140 includes a substantially rectangular parallelepiped housing 141 and magnets 142 arranged on the inner circumferential surface of the housing 141. The housing 141 is made of, for example, a magnetically shielding material or a soft magnetic material, such as carbon steel or permalloy. A long opening 143 extending in the X-axis direction over substantially the entire length of the rear surface of the housing 141 is formed (the front surface of the housing 141 is closed by a magnetically shielding material or the like). Although not explicitly illustrated, a first magnetic shielding unit 144, described later with reference to FIG. 7 and the like, may be provided on the edge of the opening 143 or on the side surface of the housing 141. The aforementioned flat coil 132 is inserted into the substantially rectangular parallelepiped space within the housing 141 formed by the opening 143. Furthermore, magnets 142, such as permanent magnets whose magnetic poles are periodically changed, are arranged along the X-axis direction on the inner circumferential surface of the housing 141, which forms the sidewall surface of the space.

[0031] Thus, in the approximately rectangular parallelepiped space within the housing 141, the coil 132 or coil group in the first coil unit 130 and the magnet 142 or magnet group in the first magnet unit 140 face each other in the Y-axis direction. When a three-phase alternating current or the like is passed through the coil 132, which functions as an electromagnet, magnetically interacts with the magnet 142, generating a thrust that drives the coil 132, which serves as a movable unit, in the X-axis direction. The flat coil 132 is driven along the X-axis direction within the approximately rectangular parallelepiped space within the housing 141. The X-slider 21 and stage 2, which serve as driven bodies to which the coil 132 or first coil unit 130 is fixed, are also driven in the X-axis direction integrally with the first coil unit 130 while being guided by the X-guide 110.

[0032] 2 , the coil 132 through which a current flows is provided so as to protrude from the holder 131 toward the front surface (+Z side), and the first magnet unit 140 or the magnet 142 that interacts with the magnetic field generated by the coil 132 is provided from the front surface side to cover the coil 132. In this first linear motor 120, the opening 143 through which the magnetic field from the coil 132 and / or the magnet 142 leaks is provided on the back surface side, far from the stage 2, thereby reducing the adverse effects that the magnetic field may have on the processing of semiconductor wafers and the like on the stage 2.

[0033] 1 , second drive shaft 200, which drives stage 2 and X slider 21, which serve as driven bodies, and first drive shaft 100 together in the Y-axis direction, is provided with Y guide 210 extending in the Y-axis direction. Y guide 210 constitutes the main body of second drive shaft 200. On this Y guide 210, Y slider 150 is provided, which is movable or slidable in the Y-axis direction while being guided by Y guide 210.

[0034] Y slider 150 is a part of the above-mentioned first drive shaft 100. Specifically, a pair (i.e., two) of substantially identical Y sliders 150 are integrally provided at both ends in the X-axis direction of X guide 110, which serves as the main body of first drive shaft 100. When a pair of second drive shafts 200 drive a pair of Y sliders 150 in the Y-axis direction, the entire first drive shaft 100, which is integrally configured with Y sliders 150, and the stage 2 and X slider 21, which serve as driven bodies, are also driven integrally in the Y-axis direction. In this way, the objects driven by second drive shaft 200 include the entire first drive shaft 100, of which Y slider 150 is a part, and the driven body constituted by stage 2 and X slider 21.

[0035] Stage 2 as the driven body can move in the Y-axis direction integrally with Y slider 150 while being guided by Y guide 210. As will be described later, floating gas such as compressed air is supplied between the inner peripheral surface of Y slider 150 constituting first drive shaft 100 and the outer peripheral surface of Y guide 210 constituting second drive shaft 200, so Y slider 150 floats above Y guide 210 and can move smoothly and substantially without contact.

[0036] In order to drive the object to be driven, including stage 2 and Y slider 150, along the Y axis direction, second linear motor 220 is configured between the object to be driven and second drive shaft 200. In this embodiment, a pair (i.e., two) substantially identical second linear motors 220 are provided on the outer sides of each Y guide 210 and each Y slider 150 in the X axis direction.

[0037] Second linear motor 220 includes second coil portion 230 as a coil portion and second magnet portion 240 as a magnet portion. In order to configure second linear motor 220 that drives Y slider 150, which is the driven object, along the Y-axis direction, one of second coil portion 230 and second magnet portion 240 may be provided on Y slider 150, and the other may be provided on second drive shaft 200.

[0038] In the second linear motor 220, it is preferable that the second coil unit 230 is provided adjacent to the second drive shaft 200 and the second magnet unit 240 is provided on the Y-slider 150. As shown in the figure, the second coil unit 230 may be fixedly installed on the base 4 adjacent to the second drive shaft 200. Because the base 4, the surface plate 3, and the second drive shaft 200 are fixed to one another, the second coil unit 230 provided on any of them should be interpreted as being substantially provided on the second drive shaft 200. The second coil unit 230 (particularly, the coil 232 described below) is not in contact with the Y-guide 210 or the Y-slider 150, and the second magnet unit 240 (particularly, the housing 241 described below) is movable in the Y-axis direction through the gap. In this way, the second coil unit 230 is provided at a position spaced apart in the X-axis direction from the Y-guide 210, which serves as the main body of the second drive shaft 200.

[0039] The second coil unit 230 includes a holder 231 installed on the base 4 and a coil 232 held by the holder 231. While not shown in detail, the coil 232 is, for example, a typical three-phase coil. Specifically, a U-phase coil, a V-phase coil, and a W-phase coil (not shown) are periodically arranged along the Y-axis direction, which is the drive direction. Currents (e.g., U-phase current, V-phase current, and W-phase current) flowing through the coils 232 of each phase may be supplied via the holder 231. The coils 232 are arranged to protrude from the back side (-Z side) of the holder 231 toward the front side (+Z side). The coils 232 or the coil group as a whole are preferably formed in a flat plate shape with the X-axis direction as the normal direction. Furthermore, when viewed in the Z-axis direction, the entire second coil unit 230 and / or the coils 232 extend along the Y-axis direction substantially parallel to the Y guide 210.

[0040] The second magnet unit 240 includes a substantially rectangular parallelepiped housing 241 and magnets (not shown) arranged on the inner circumferential surface of the housing 241. The housing 241 is fixedly attached to a side surface of the Y slider 150, which is the object to be driven, with the X-axis direction being the normal direction. Therefore, the second magnet unit 240 can move in the Y-axis direction integrally with the Y slider 150.

[0041] The housing 241 is made of, for example, a magnetic shielding material or a soft magnetic material such as carbon steel or permalloy. A substantially rectangular parallelepiped space 243 is formed inside the housing 241, penetrating in the Y-axis direction and opening at the back surface. This housing 241 has an inverted U-shape when viewed in the Y-axis direction. The aforementioned flat coil 232 is inserted into the substantially rectangular parallelepiped space 243 inside the housing 241. In addition, magnets (not shown), such as permanent magnets with periodically alternating magnetic poles, are arranged along the Y-axis direction on the inner peripheral surface of the housing 241, which is the side wall surface of the space 243.

[0042] As described above, in a substantially rectangular parallelepiped space 243 within the housing 241, the coil 232 or coil group in the second coil unit 230 and the magnet or magnet group (not shown) in the second magnet unit 240 face each other in the X-axis direction. When a three-phase alternating current or the like is passed through the coil 232, which functions as an electromagnet, magnetically interacts with the magnet (not shown), generating a thrust that drives the second magnet unit 240 (as a movable unit) in the Y-axis direction. The inverted-U-shaped housing 241, as viewed in the Y-axis direction, sandwiches the flat coil 232 from above (the coil 232 is contained in the space 243 within the housing 241), and is driven in the Y-axis direction along the flat coil 232. The Y-slider 150, which serves as a driven object to which the housing 241 of the second magnet unit 240 is fixed, is also driven in the Y-axis direction integrally with the second magnet unit 240 while being guided by the Y guide 210.

[0043] 1 , the coil 232 through which a current flows is provided so as to protrude from the holder 231 toward the front surface (+Z side), and the second magnet unit 240 that acts on the magnetic field generated by the coil 232 is provided from the front surface side so as to cover the coil 232. In this second linear motor 220, the space 243 through which the magnetic field from the coil 232 and / or the second magnet unit 240 leaks is provided on the back surface side, far from the stage 2, so that the adverse effects that the magnetic field may have on the processing of semiconductor wafers and the like on the stage 2 can be reduced.

[0044] The second linear motor 220, which moves the second magnet unit 240 as described above, is a so-called moving magnet type linear motor. In this case, the second coil unit 230, which generates heat when a current flows through it, is isolated from the driven object integral with the stage 2 or the Y-slider 150 (and, in the illustrated example, the second coil unit 230 is also thermally isolated from the second drive shaft 200 via the base 4 and the surface plate 3), thereby effectively suppressing heat transfer to the stage 2 and / or the workpiece, such as a semiconductor wafer. This is particularly preferable when the workpiece, such as a semiconductor wafer, is susceptible to heat or when the stage 2 itself is susceptible to deformation due to heat.

[0045] In such a moving magnet type second linear motor 220, the length of the second coil section 230 in the Y-axis direction is longer than the length of the second magnet section 240 in the Y-axis direction. For example, the length of the second coil section 230 in the Y-axis direction is preferably a length that can cover the range of motion of the Y slider 150 in the Y-axis direction. Furthermore, the length of the second magnet section 240 in the Y-axis direction is preferably equal to or shorter than the length of the Y slider 150 and / or the stage 2 in the Y-axis direction. The relatively short second magnet section 240 can move in the Y-axis direction integrally with the Y slider 150, which is the object to be driven, within the installation range of the relatively long second coil section 230.

[0046] In the illustrated example, the first linear motor 120 is preferably a moving coil type in order to reduce the magnetic influence on the stage 2 etc., and the second linear motor 220 is preferably a moving magnet type in order to reduce the thermal influence on the stage 2 etc. In this way, in the stage device 1 according to this embodiment, it is preferable that the first linear motor 120 and the second linear motor 220 are different types.

[0047] On the other hand, in order to further reduce the influence of magnetism on the stage 2 and the like, the second linear motor 220 may be configured as a moving coil type. Specifically, the second coil section 230 is provided on the Y-slider 150, and the second magnet section 240 is provided on the second drive shaft 200 (for example, the base 4) (not shown). In this case, the second magnet section 240 is stationary, which has the advantage of reducing fluctuations in the magnetism that leaks outside the second linear motor 220. This is particularly preferable when the processing of semiconductor wafers and the like on the stage 2 is susceptible to magnetic influences.

[0048] In such a moving coil type second linear motor 220, the length of the second coil section 230 in the Y-axis direction is shorter than the length of the second magnet section 240 in the Y-axis direction. For example, the length of the second coil section 230 in the Y-axis direction is preferably equal to or shorter than the length of the Y slider 150 and / or the stage 2 in the Y-axis direction. Furthermore, the length of the second magnet section 240 in the Y-axis direction is preferably a length that can cover the range of motion of the Y slider 150 in the Y-axis direction. The relatively short second coil section 230 can move in the Y-axis direction integrally with the Y slider 150, which is the object to be driven, within the installation range of the relatively long second magnet section 240.

[0049] By providing a pair of second linear motors 220 as described above on both sides of the first drive shaft 100 as the driven object in the X-axis direction, the driven object can be stably driven in the Y-axis direction while effectively suppressing undesirable rotation such as yawing (rotation around the Z-axis).

[0050] Next, the gas floating portion for smoothing the X-axis direction drive by the first drive shaft 100 and the Y-axis direction drive by the second drive shaft 200 will be described.

[0051] 3 is a cross-sectional view schematically showing first gas floating unit 10, which uses floating gas to smooth the X-axis direction drive of X-slider 21 by first drive shaft 100. Specifically, the ZX cross section is shown schematically at the center in the Y-axis direction of X-guide 110, which is the main body of first drive shaft 100. First gas floating unit 10 uses gas to float X-slider 21, as the driven body, from X-guide 110, which is the main body of first drive shaft 100.

[0052] To enable the X-slider 21 to move smoothly in the X-axis direction along the X-guide 110, an air pad 170 serving as a hydrostatic bearing is formed between the outer circumferential surface of the X-guide 110 and the inner circumferential surface of the X-slider 21. The air pad 170 is formed by constantly supplying a first floating gas, such as compressed air, between the outer circumferential surface of the X-guide 110 and the inner circumferential surface of the X-slider 21 through a first floating pipe 127 provided inside the X-guide 110, which is the main body of the first driving shaft 100. The X-slider 21, floating from the X-guide 110 by the air pad 170, can move smoothly without substantially coming into contact with the X-guide 110.

[0053] The air pads 170 are preferably provided at symmetrical positions sandwiching the center of the X-slider 21 in the X-axis direction and / or Y-axis direction from both the positive and negative sides in the X-axis direction and / or Y-axis direction. The air pads 170 are also preferably provided at symmetrical positions sandwiching the X-guide 110 from both the positive and negative sides in the Z-axis direction. Such symmetrical arrangement of the air pads 170 in the X-axis direction, Y-axis direction, Z-axis direction, etc. effectively suppresses undesired rotation of the X-slider 21.

[0054] The first flotation tube 127 includes a positive side first flotation tube 127P and a negative side first flotation tube 127N. In this embodiment, the positive side first flotation tube 127P and the negative side first flotation tube 127N, which are provided inside the X guide 110, communicate with a flotation gas relay tube provided inside the Y guide 210, as described below. However, the positive side first flotation tube 127P and the negative side first flotation tube 127N may also be attached directly to the X guide 110 and communicate with a flotation gas supply tube or tube (not shown) that supplies flotation gas from the outside. Alternatively, the tubes that supply flotation gas to the air pad 170, such as the positive side first flotation tube 127P and the negative side first flotation tube 127N, may be provided inside the X slider 21 rather than inside the X guide 110. In this case, a floating gas supply pipe or tube (not shown) may be provided that is directly attached to the outside of the X-slider 21 to supply floating gas from the outside.

[0055] The positive-side first floating gas from a pump (not shown) is supplied to air pad 170 on the positive side in the X-axis direction, for example, via a positive-side floating gas relay pipe inside positive-side Y guide 210 and positive-side first floating pipe 127P inside X guide 110. Similarly, the negative-side first floating gas from a pump (not shown) is supplied to air pad 170 on the negative side in the X-axis direction, for example, via a negative-side floating gas relay pipe inside negative-side Y guide 210 and negative-side first floating pipe 127N inside X guide 110.

[0056] Note that the first flotation gas may be supplied to both the positive-side and negative-side air pads 170 from either the positive-side or negative-side flotation gas relay pipe and first flotation pipe 127. For example, the first flotation gas from a pump (not shown) may be supplied to both the positive-side and negative-side air pads 170 via the positive-side flotation gas relay pipe inside the positive-side Y guide 210 and the positive-side first flotation pipe 127P inside the X guide 110. In this case, on the negative side where the first flotation gas is not supplied, all or part of the negative-side flotation gas relay pipe inside the negative-side Y guide 210 and at least part of the negative-side first flotation pipe 127N may not be provided.

[0057] When stage device 1 is used in a vacuum chamber, it is necessary to prevent the first floating gas, such as compressed air, supplied to air pad 170 from leaking into the vacuum chamber. Therefore, in this embodiment, exhaust grooves 172, 174, and 176 for exhausting the first floating gas in air pad 170 to the outside of the vacuum chamber are provided on the inner circumferential surface of X-slider 21. As shown in the figure, exhaust grooves 172, 174, and 176 are provided at positions that sandwich air pad 170 on both the positive and negative sides in the X-axis and / or Y-axis directions. In other words, exhaust grooves 172, 174, and 176 are provided on the inner circumferential surface of X-slider 21, outside air pad 170.

[0058] Exhaust grooves 172, 174, 176 are provided so that the pressure therein decreases sequentially from the inside or center to the outside, i.e., so that the degree of vacuum therein increases sequentially. For example, exhaust groove 172 may be at atmospheric pressure, exhaust groove 174 at a low vacuum, and exhaust groove 176 at a medium vacuum. Exhaust grooves 172, 174, 176 with different pressures or degrees of vacuum are achieved by a plurality of first exhaust pipes 129 (only one is shown in FIG. 3 for convenience) provided inside X guide 110, which is the main body of first drive shaft 100. Specifically, by opening the first exhaust pipe 129, which is connected to the atmosphere or air at atmospheric pressure, at a position opposite the exhaust groove 172, the exhaust groove 172 becomes atmospheric pressure, by opening the first exhaust pipe 129, which is connected to a low vacuum pump or the like (not shown), at a position opposite the exhaust groove 174, the exhaust groove 174 becomes a low vacuum, and by opening the first exhaust pipe 129, which is connected to a medium vacuum pump or the like (not shown), at a position opposite the exhaust groove 176, the exhaust groove 176 becomes a medium vacuum.

[0059] The above-described plurality of exhaust grooves 172, 174, 176 and plurality of first exhaust pipes 129 allow the first floating gas in the air pad 170 to be sequentially exhausted to outside the vacuum chamber via atmospheric pressure (exhaust groove 172), low vacuum (exhaust groove 174), and medium vacuum (exhaust groove 176). This effectively prevents the first floating gas in the air pad 170 from leaking into the vacuum chamber.

[0060] In this way, the stage device 1 according to this embodiment can be used in a vacuum environment such as inside a vacuum chamber. Here, vacuum refers to a state of space filled with gas at a pressure lower than normal atmospheric pressure. Depending on the pressure range, vacuum can be classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), high vacuum (0.1 Pa to 10 -5 Pa), ultra-high vacuum (10 -5 The stage device 1 according to this embodiment may be used in any of the above vacuum environments, or in a non-vacuum environment. The stage device 1 according to this embodiment is particularly suitable for use in a low-pressure vacuum environment where a high degree of cleanliness is required.

[0061] First exhaust pipe 129 includes first positive exhaust pipe 129P and first negative exhaust pipe 129N. In this embodiment, first positive exhaust pipe 129P and first negative exhaust pipe 129N provided inside X guide 110 are connected to exhaust relay pipes provided inside Y guide 210, as described below. In this case, first exhaust pipe 129 exhausts the first floating gas to Y guide 210, which is the main body of second drive shaft 200 in which the exhaust relay pipes are provided. The exhaust relay pipes in Y guide 210 are connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to achieve the aforementioned atmospheric pressure (exhaust groove 172), low vacuum (exhaust groove 174), and medium vacuum (exhaust groove 176), respectively. However, first positive exhaust pipe 129P and first negative exhaust pipe 129N may be connected directly to the outside of X guide 110 and communicate with an exhaust pipe or tube (not shown) that supplies atmospheric pressure, low vacuum, medium vacuum, etc. from the outside. Alternatively, pipes such as first positive exhaust pipe 129P and first negative exhaust pipe 129N that supply atmospheric pressure, low vacuum, medium vacuum, etc. may be provided inside X slider 21 rather than inside X guide 110. In this case, an exhaust pipe or tube (not shown) that is connected directly to the outside of X slider 21 and supplies atmospheric pressure, low vacuum, medium vacuum, etc. from the outside may be provided.

[0062] The exhaust air from exhaust groove 172 is discharged to the atmosphere via first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside X guide 110 and an exhaust relay pipe for atmospheric pressure inside Y guide 210. The exhaust air from exhaust groove 174 is discharged via first exhaust pipe 129 (129P and / or 129N) for low vacuum inside X guide 110, an exhaust relay pipe for low vacuum inside Y guide 210, and a low vacuum pump. The exhaust air from exhaust groove 176 is discharged via first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside X guide 110, an exhaust relay pipe for medium vacuum inside Y guide 210, and a medium vacuum pump.

[0063] Note that exhaust from both positive-side and negative-side exhaust grooves 172, 174, 176 may be performed through first exhaust pipe 129 and an exhaust relay pipe on either the positive or negative side. For example, exhaust from both positive-side and negative-side exhaust grooves 172, 174, 176 may be performed through positive-side first exhaust pipe 129P inside X guide 110 and a positive-side exhaust relay pipe inside positive-side Y guide 210. In this case, at least a portion of negative-side first exhaust pipe 129N on the negative side where exhaust is not performed, and all or a portion of the negative-side exhaust relay pipe inside negative-side Y guide 210, may not be provided.

[0064] 4 is a cross-sectional view schematically showing second gas floating unit 20, which uses floating gas to smooth the Y-axis direction drive of Y-slider 150 by second drive shaft 200. Specifically, a YZ cross section at the center in the X-axis direction of Y guide 210, which is the main body of second drive shaft 200, is shown. Components similar to those of first gas floating unit 10 shown in FIG. 3 are given the same reference numerals, and redundant explanations will be omitted. Second gas floating unit 20 uses gas to float Y-slider 150 (part of first drive shaft 100), which is the object to be driven, from Y guide 210, which is the main body of second drive shaft 200.

[0065] To enable Y slider 150 to move smoothly in the Y-axis direction along Y guide 210, air pad 170 serving as a hydrostatic bearing is formed between the outer circumferential surface of Y guide 210 and the inner circumferential surface of Y slider 150. Air pad 170 is formed by constantly supplying a second floating gas, such as compressed air, between the outer circumferential surface of Y guide 210 and the inner circumferential surface of Y slider 150 through second floating pipe 137 provided inside Y guide 210, which is the main body of second drive shaft 200. Alternatively, a pipe such as second floating pipe 137 that supplies floating gas to air pad 170 may be provided inside Y slider 150 rather than inside Y guide 210. In this case, a floating gas supply pipe or tube (not shown) that is directly attached to the outside of Y slider 150 to supply floating gas from the outside may be provided. The Y slider 150 floats above the Y guide 210 due to the air pad 170 and can move smoothly without substantially contacting the Y guide 210 .

[0066] The plurality of air pads 170 are preferably provided at symmetrical positions sandwiching the center of the Y slider 150 in the Y-axis direction and / or the X-axis direction from both the positive and negative sides in the Y-axis direction and / or the X-axis direction. The plurality of air pads 170 are also preferably provided at symmetrical positions sandwiching the Y guide 210 from both the positive and negative sides in the Z-axis direction. Such symmetrical arrangement of the plurality of air pads 170 in the X-axis direction, Y-axis direction, Z-axis direction, etc. effectively suppresses undesired rotation of the Y slider 150.

[0067] The second flotation tube 137 includes a positive side second flotation tube 137P and a negative side second flotation tube 137N. The positive side second flotation tube 137P and the negative side second flotation tube 137N are provided inside the Y guide 210.

[0068] The positive-side second floating gas from a pump (not shown) is supplied to air pad 170 on the positive side in the Y axis direction, for example, via positive-side second floating pipe 137P inside Y guide 210. Similarly, the negative-side second floating gas from a pump (not shown) is supplied to air pad 170 on the negative side in the Y axis direction, for example, via negative-side second floating pipe 137N inside Y guide 210.

[0069] The second flotation gas may be supplied to both the positive-side and negative-side air pads 170 from either the positive-side or negative-side second flotation pipe 137. For example, the second flotation gas from a pump (not shown) may be supplied to both the positive-side and negative-side air pads 170 via the positive-side second flotation pipe 137P inside the Y guide 210. In this case, at least a portion of the negative-side second flotation pipe 137N on the negative side to which the second flotation gas is not supplied may not be provided.

[0070] As described above with reference to Fig. 3 , first flotation pipe 127, which supplies the first flotation gas to air pad 170 in first gas flotation unit 10, communicates with flotation gas relay pipe 157 provided inside Y guide 210 in Fig. 4 . This flotation gas relay pipe 157 is connected to a pump (not shown) that is a supply source of the first flotation gas. The first flotation gas from the pump (not shown) is supplied to air pad 170 in first gas flotation unit 10 via flotation gas relay pipe 157 inside Y guide 210 and first flotation pipe 127 inside X guide 110. In this way, inside Y guide 210, which is the main body of second drive shaft 200, the second flotation gas for flotation of Y slider 150 is supplied via second flotation pipe 137, and the first flotation gas for flotation of X slider 21 is supplied or relayed via flotation gas relay pipe 157, simultaneously.

[0071] When the stage device 1 is used in a vacuum chamber, it is necessary to prevent the second floating gas, such as compressed air, supplied to the air pad 170 from leaking into the vacuum chamber. Therefore, in this embodiment, exhaust grooves 172, 174, and 176 for exhausting the second floating gas in the air pad 170 to the outside of the vacuum chamber are provided on the inner circumferential surface of the Y-slider 150. As shown in the figure, the exhaust grooves 172, 174, and 176 are provided at positions sandwiching the air pad 170 on both the positive and negative sides in the Y-axis and / or X-axis directions. In other words, the exhaust grooves 172, 174, and 176 are provided on the inner circumferential surface of the Y-slider 150, outside the air pad 170.

[0072] Exhaust grooves 172, 174, 176 are provided so that the pressure therein sequentially decreases, i.e., the degree of vacuum therein sequentially increases, from the inside or center to the outside. For example, exhaust groove 172 may be at atmospheric pressure, exhaust groove 174 at a low vacuum, and exhaust groove 176 at a medium vacuum. Exhaust grooves 172, 174, 176 with different pressures or degrees of vacuum are achieved by multiple second exhaust pipes 139 (only one is shown in FIG. 4 for convenience) provided inside Y guide 210, which is the main body of second drive shaft 200. Specifically, by opening the second exhaust pipe 139, which is connected to the atmosphere or air at atmospheric pressure, at a position opposite the exhaust groove 172, the exhaust groove 172 becomes atmospheric pressure, by opening the second exhaust pipe 139, which is connected to a low vacuum pump or the like (not shown), at a position opposite the exhaust groove 174, the exhaust groove 174 becomes a low vacuum, and by opening the second exhaust pipe 139, which is connected to a medium vacuum pump or the like (not shown), at a position opposite the exhaust groove 176, the exhaust groove 176 becomes a medium vacuum.

[0073] The above-described plurality of exhaust grooves 172, 174, 176 and plurality of second exhaust pipes 139 allow the second floating gas in the air pad 170 to be sequentially exhausted to outside the vacuum chamber via atmospheric pressure (exhaust groove 172), low vacuum (exhaust groove 174), and medium vacuum (exhaust groove 176). This effectively prevents the second floating gas in the air pad 170 from leaking into the vacuum chamber.

[0074] Second exhaust pipes 139 include a positive-side second exhaust pipe 139P and a negative-side second exhaust pipe 139N. Positive-side second exhaust pipe 139P and negative-side second exhaust pipe 139N are provided inside Y guide 210. These second exhaust pipes 139 are connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to realize the aforementioned atmospheric pressure (exhaust groove 172), low vacuum (exhaust groove 174), and medium vacuum (exhaust groove 176), respectively.

[0075] The exhaust air from exhaust groove 172 is discharged to the atmosphere via second exhaust pipe 139 (139P and / or 139N) for atmospheric pressure inside Y guide 210. The exhaust air from exhaust groove 174 is discharged via second exhaust pipe 139 (139P and / or 139N) for low vacuum inside Y guide 210 and a low vacuum pump. The exhaust air from exhaust groove 176 is discharged via second exhaust pipe 139 (139P and / or 139N) for medium vacuum inside Y guide 210 and a medium vacuum pump.

[0076] Note that exhaust from both positive-side and negative-side exhaust grooves 172, 174, 176 may be performed through either positive-side or negative-side second exhaust pipe 139. For example, exhaust from both positive-side and negative-side exhaust grooves 172, 174, 176 may be performed through positive-side second exhaust pipe 139P inside Y guide 210. In this case, at least a portion of negative-side second exhaust pipe 139N on the negative side where exhaust is not performed may not be provided.

[0077] As described above with reference to Fig. 3, first exhaust pipe 129, which exhausts the first floating gas from exhaust grooves 172, 174, and 176 in first gas flotation section 10, communicates with exhaust relay pipe 159 provided inside Y guide 210 in Fig. 4. This exhaust relay pipe 159 is connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to realize the aforementioned atmospheric pressure (exhaust groove 172 in Fig. 3), low vacuum (exhaust groove 174 in Fig. 3), and medium vacuum (exhaust groove 176 in Fig. 3), respectively.

[0078] In this way, the exhaust gas (first floating gas) from exhaust groove 172 in first gas flotation unit 10 is discharged to the atmosphere via first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside X guide 110 and exhaust relay pipe 159 for atmospheric pressure inside Y guide 210. The exhaust gas (first floating gas) from exhaust groove 174 in first gas flotation unit 10 is discharged via first exhaust pipe 129 (129P and / or 129N) for low vacuum inside X guide 110, exhaust relay pipe 159 for low vacuum inside Y guide 210, and a low vacuum pump. The exhaust gas (first floating gas) from exhaust groove 176 in first gas flotation unit 10 is discharged via first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside X guide 110, exhaust relay pipe 159 for medium vacuum inside Y guide 210, and a medium vacuum pump.

[0079] As described above, inside Y guide 210, which is the main body of second drive shaft 200, second gas flotation unit 20 is simultaneously evacuated (to atmospheric pressure / low vacuum / medium vacuum) through second exhaust pipe 139, and first gas flotation unit 10 is simultaneously evacuated (to atmospheric pressure / low vacuum / medium vacuum) through exhaust relay pipe 159. Note that, for convenience, second exhaust pipe 139 and exhaust relay pipe 159 are shown as separate entities in Figure 4, but because they have the same purpose of exhaust (to atmospheric pressure / low vacuum / medium vacuum), second exhaust pipe 139 and exhaust relay pipe 159 may be configured as an integrated unit (the low vacuum pump and medium vacuum pump connected to second exhaust pipe 139 and exhaust relay pipe 159 may also be shared).

[0080] According to the first embodiment as described above, high responsiveness during driving can be achieved by the first drive shaft 100 and second drive shaft 200, which use magnetism (first linear motor 120 and second linear motor 220) to drive the driven body such as X-slider 21 and the first drive shaft 100, and high smoothness during driving can be achieved by the first gas floatation unit 10 and second gas floatation unit 20, which use gas to levitate the driven body such as X-slider 21 and the first drive shaft 100. Because the first gas floatation unit 10 and the second gas floatation unit 20 are equipped with a mechanism for exhausting the levitated gas, the stage device 1 according to this embodiment can be used in a vacuum environment such as a vacuum chamber.

[0081] 5 is a perspective view that schematically shows a stage device 1 as a driving device or positioning device according to a second embodiment of the present disclosure. The same components as those in the first embodiment described above are given the same reference numerals, and redundant explanations will be omitted.

[0082] A first linear motor 120 is provided between the driven body, which is formed by the stage 2 and the X-slider 21, and the first drive shaft 100 to drive the driven body along the X-axis direction. In this embodiment, one first linear motor 120 is provided on the back side (-Z side) of the stage 2, which serves as the driven body. In the example shown, the first linear motor 120 is provided on the front side (+Z side) of the X-slider 21 (and the X-guide 110, which serves as the main body of the first drive shaft 100), which can move integrally with the stage 2. However, the first linear motor 120 may also be provided on the back side of the X-slider 21. By providing the first linear motor 120 on the back side of the stage 2 in this way, it is possible to reduce the adverse effects that magnetic fields leaking from the first linear motor 120 could have on the processing of semiconductor wafers and the like on the stage 2 (for example, the irradiation of electron beams, which are easily affected by magnetic fields).

[0083] 6 is a schematic diagram of the first linear motor 120 as viewed in the Y-axis direction (in the ZX plane). The first linear motor 120 includes a first coil section 130 as a coil section and a first magnet section 140 as a magnet section. The first linear motor 120 may be a moving magnet type, but is preferably a moving coil type for the same reasons as in the first embodiment. In this case, the first coil section 130 is provided on the X-slider 21 and / or stage 2 that constitute the driven body, and the first magnet section 140 is provided on the first drive shaft 100 (support plate 161, described below).

[0084] In the illustrated example, holder 131 of first coil unit 130 is fixedly attached to the surface of X-slider 21. To avoid interference with connecting unit 22 that interconnects both ends of stage 2 and X-slider 21 in the X-axis direction, holder 131 is placed in the X-axis direction region sandwiched between both connecting units 22. Stage 2 and X-slider 21, which are interconnected by connecting unit 22, and first coil unit 130 fixed to X-slider 21, form a movable unit that can move integrally in the X-axis direction.

[0085] First magnet unit 140 may be attached to a flat support plate 161. As shown in FIG. 5 , support plate 161 is bridged between a pair of Y sliders 150 that are part of first drive shaft 100, and supports first magnet unit 140. As shown in FIG. 6 , support plate 161 and first magnet unit 140 are disposed in a Z-axis direction position that does not contact X-slider 21 and stage 2 that constitute the movable unit, and therefore do not interfere with movement of the movable unit in the X-axis direction. Furthermore, first linear motor 120 (driving point) can be disposed in a Z-axis direction position close to the center of gravity of the entire movable unit that is constituted by X-slider 21 and stage 2, allowing stable driving while suppressing undesirable pitching rotation of the movable unit.

[0086] When viewed in the Z-axis direction or from above, first magnet section 140 preferably has a generally rectangular shape with an X axis of symmetry in the X-axis direction and a Y axis of symmetry in the Y-axis direction that are substantially the same as those of rectangular X guide 110. In this case, the center of gravity or center of first magnet section 140 when viewed in the Z-axis direction substantially coincides with the center of gravity or center of X guide 110. Furthermore, the center or middle of first magnet section 140 in the Y-axis direction substantially coincides with the center or middle of stage 2 and / or X slider 21 as the driven body in the Y-axis direction.

[0087] In this way, the driven body can be stably driven in the X-axis direction while effectively suppressing undesirable rotation such as yawing (rotation around the Z-axis) by using one first magnet section 140 or one first linear motor 120 arranged symmetrically with respect to the driven body. This has the advantage that the stage device 1 can be configured with one first linear motor 120, which is less than the first embodiment in FIG. 1 in which two first linear motors 120 are provided.

[0088] As shown in the partially enlarged view of FIG. 7 , the first magnet unit 140 includes a substantially rectangular parallelepiped housing 141 and magnets 142 arranged on the inner circumferential surface of the housing 141. The housing 141 is made of, for example, a magnetically shielding material or a soft magnetic material, such as carbon steel or permalloy. A long opening 143 extending in the X-axis direction over substantially the entire length of the side surface on the -Y side of the housing 141 is formed (the side surface on the +Y side of the housing 141 is closed by a magnetically shielding material or the like). A flat coil 132 (not shown) protruding from the holder 131 (see FIG. 6 ) of the first coil unit 130 toward the +Y side is inserted into the substantially rectangular parallelepiped space within the housing 141 formed by the opening 143. Furthermore, magnets 142, such as permanent magnets whose magnetic poles are periodically alternating, are arranged along the X-axis direction on the inner circumferential surface of the housing 141, which forms the top and / or bottom of the space.

[0089] Thus, in the substantially rectangular parallelepiped space within the housing 141, the coil 132 or coil group (not shown) of the first coil unit 130 and the magnet 142 or magnet group (not shown) of the first magnet unit 140 face each other in the Z-axis direction. When a three-phase alternating current or the like is passed through the coil 132 (not shown), which functions as an electromagnet, magnetically interacts with the magnet 142, generating a thrust that drives the first coil unit 130 (as a movable unit) in the X-axis direction. The flat coil 132 (not shown) is driven along the X-axis direction within the substantially rectangular parallelepiped space within the housing 141. The X-slider 21 and stage 2, to which the first coil unit 130 is fixed, as driven bodies, are also driven in the X-axis direction integrally with the first coil unit 130 while being guided by the X-guide 110.

[0090] As described above, in this embodiment, the coil 132 (not shown) through which current flows is arranged to protrude from the holder 131 toward the +Y side, and the first magnet part 140 or magnet 142 that interacts with the magnetic field generated by the coil 132 is arranged to cover the coil 132 from the +Y side.

[0091] In the first linear motor 120 according to this embodiment, the opening 143 in the first magnet section 140 is formed on a side surface normal to the Y-axis direction, which may result in leakage of magnetic field from the coil 132 and / or magnet 142 (not shown). Since the magnetic field leaking from the opening 143 may adversely affect the processing of semiconductor wafers and the like on the stage 2, a magnetic shielding section is provided in this embodiment to shield the magnetic field from the stage 2.

[0092] The magnetic shielding portion may include a first magnetic shielding portion 144 that magnetically shields at least the edge portion (upper and / or lower edge portion in FIGS. 6 and 7 ) of the opening 143 into which the coil 132 (not shown) is inserted. The first magnetic shielding portion 144 is made of a magnetic shielding material such as permalloy. Although not shown in detail, the first magnetic shielding portion 144 may cover the front and / or back surface of the housing 141 continuously from the edge portion of the opening 143.

[0093] The magnetic shielding unit may include a second magnetic shielding unit 145 that magnetically shields at least the front surface side (+Z side) of the first magnet unit 140 where the stage 2 as the driven body is located. The second magnetic shielding unit 145 is made of a magnetic shielding material such as permalloy. The second magnetic shielding unit 145 may cover the side surfaces of the housing 141 in the X-axis direction and the surface of the support plate 161 continuously from the surface of the housing 141.

[0094] The second drive shaft 200, the first gas flotation unit 10, and the second gas flotation unit 20 are configured in the same manner as in the first embodiment, and therefore a duplicated description will be omitted.

[0095] According to the second embodiment as described above, high responsiveness during driving can be achieved by the first drive shaft 100 and second drive shaft 200, which use magnetism (first linear motor 120 and second linear motor 220) to drive the driven body such as X-slider 21 and the first drive shaft 100, and high smoothness during driving can be achieved by the first gas floatation unit 10 and second gas floatation unit 20, which use gas to levitate the driven body such as X-slider 21 and the first drive shaft 100. Because the first gas floatation unit 10 and the second gas floatation unit 20 are equipped with a mechanism for exhausting the levitated gas, the stage device 1 according to this embodiment can be used in a vacuum environment such as a vacuum chamber.

[0096] The present disclosure has been described above based on the embodiments. Various modifications are possible to the combinations of the components and processes in the exemplary embodiments, and it will be obvious to those skilled in the art that such modifications are included within the scope of the present disclosure.

[0097] The configuration, operation, and function of each device and method described in the embodiments can be realized by hardware resources, software resources, or a combination of hardware and software resources. Examples of hardware resources include processors, ROM, RAM, and various integrated circuits. Examples of software resources include operating systems, applications, and other programs.

[0098] The present disclosure relates to a drive device and the like.

[0099] REFERENCE SIGNS LIST 1 stage device, 2 stage, 10 first gas levitation unit, 20 second gas levitation unit, 21 X slider, 100 first drive shaft, 110 X guide, 120 first linear motor, 130 first coil unit, 140 first magnet unit, 144 first magnetic shielding unit, 145 second magnetic shielding unit, 150 Y slider, 170 air pad, 172, 174, 176 exhaust groove, 200 second drive shaft, 210 Y guide, 220 second linear motor, 230 second coil unit, 240 second magnet unit.

Claims

1. A drive device comprising: a first drive shaft that magnetically drives a driven body in a first direction; a second drive shaft that magnetically drives the driven body and the first drive shaft together in a second direction intersecting the first direction; a first gas flotation part that uses gas to levitate the driven body from the first drive shaft; and a second gas flotation part that uses gas to levitate the first drive shaft from the second drive shaft.

2. The drive device according to claim 1, wherein the driven body and the first drive shaft form a first linear motor that drives the driven body along the first drive shaft, and the first drive shaft and the second drive shaft form a second linear motor that drives the first drive shaft along the second drive shaft.

3. The driving device described in claim 2, wherein in the first linear motor, a first coil section through which current flows is provided on the driven body, and a first magnet section that acts on the magnetic field generated by the first coil section is provided on the first drive shaft, and in the second linear motor, a second coil section through which current flows is provided on the second drive shaft, and a second magnet section that acts on the magnetic field generated by the second coil section is provided on the first drive shaft.

4. A drive device as described in claim 3, wherein in the second linear motor, the second coil portion is provided on the second drive shaft so as to protrude toward a third direction intersecting the first direction and the second direction, and the second magnet portion is provided on the first drive shaft so as to cover the second coil portion from the third direction.

5. A drive device as described in claim 4, wherein the second coil portion is provided at a position spaced apart from the main body of the second drive shaft in the first direction.

6. A drive device as described in claim 5, wherein the length of the second coil portion in the second direction is longer than the length of the second magnet portion in the second direction.

7. A drive device according to any one of claims 2 to 6, wherein the first linear motors are provided on both sides of the driven body in the second direction.

8. The drive device according to claim 7, wherein an object is placed on a surface of the driven body, and each of the first linear motors is provided on a back side of the driven body.

9. A drive device as described in claim 8, wherein in each of the first linear motors, a first coil portion through which current flows is provided on the driven body so as to protrude toward the surface side of the driven body, and a first magnet portion that interacts with the magnetic field generated by the first coil portion is provided on the first drive shaft so as to cover the first coil portion from the surface side of the driven body.

10. A drive device as described in claim 9, wherein the length of the first coil portion in the first direction is shorter than the length of the first magnet portion in the first direction.

11. The drive device according to any one of claims 2 to 6, wherein an object is placed on a surface of the driven body, and the first linear motor is provided on a rear surface side of the driven body.

12. A drive device as described in claim 11, wherein in the first linear motor, a first coil portion through which current flows is provided on the driven body so as to protrude in the second direction, and a first magnet portion that interacts with the magnetic field generated by the first coil portion is provided on the first drive shaft so as to cover the first coil portion from the second direction.

13. A drive device as described in claim 12, wherein the length of the first coil portion in the first direction is shorter than the length of the first magnet portion in the first direction.

14. The drive device according to claim 12, wherein the first magnet section is provided with a magnetic shielding section that magnetically shields at least the edge of the opening into which the first coil section is inserted.

15. The drive device according to claim 12, wherein the first magnet section is provided with a magnetic shielding section that magnetically shields at least the surface side on which the driven body is located.

16. A drive device according to any one of claims 1 to 6, which is used in a vacuum environment.

17. A positioning device for positioning a driven body using a driving device according to any one of claims 1 to 6.

18. A processing device which performs a predetermined process on the driven body positioned by the positioning device according to claim 17.

19. A device manufacturing method, comprising the steps of: manufacturing a device through said processing by the processing apparatus according to claim 18.

Images