Suction pad and suction pad assembly

Abstract

According to the present invention, a suction pad is disclosed. The present invention comprises a suction pad comprising: a body having an opening extending in a longitudinal direction; a pad cover connected to one end of the body and extending in a radial direction of the body; a first pattern unit having a plurality of protrusions protruding from a surface of the pad cover and disposed in parallel in the radial direction; and a second pattern unit disposed on the pad cover to be closer to the opening than the first pattern unit.

Description

Absorbent pads and absorbent pad assemblies

[0001] The present invention relates to an absorption pad and an absorption pad assembly.

[0002] In general, a transport robot or the like is used to supply and unload substrates to processing devices, etc. For example, when transporting and transporting objects to be absorbed, such as glass plates, liquid crystal display panel substrates, resinous plate-shaped molded products, and metal thin plates, a vacuum suction device may be used to absorb the objects to be absorbed.

[0003] A vacuum suction device is used to transport products such as substrates by suction and desorption, and is typically installed in a transport or mounting system or device so that the object can be suctioned through direct contact with the object. The vacuum suction pad applied to the vacuum suction device typically consists of a suction port connected to the suction port of a vacuum pump, and a flexible suction pad fixed to the end of the suction port, and while compressed air passes through the vacuum pump, the air inside the suction pad is drawn into the vacuum pump and discharged to the outside together with the compressed air, thereby generating a negative pressure inside the suction pad to suction the object.

[0004] At this time, although the suction pad may initially maintain the suction state, the object may fall out of the vacuum suction device during transportation or installation because the suction pad does not form a close contact with the object. This may cause various problems, such as delays in transportation and installation work, as well as damage to the object, resulting in economic losses. Accordingly, there is a growing demand for a suction pad that can suction objects in various directions and angles and maintain airtightness with respect to the object.

[0005] Embodiments of the present invention can provide an adsorption pad that maintains a stable suction force while securing a contact area in contact with an adsorbate.

[0006] One aspect of the present invention provides an adsorption pad comprising a body having an opening extending in a longitudinal direction, a pad cover connected to one end of the body and extending in a radial direction of the body, a first pattern unit having a plurality of protrusions protruding from a surface of the pad cover and arranged parallel to the radial direction, and a second pattern unit arranged on the pad cover closer to the opening than the first pattern unit.

[0007] The adsorption pad according to the present invention may be provided with a first pattern unit and a second pattern unit on the adsorption surface to secure the surface area of ​​the adsorption surface while not obstructing smooth air flow within the adsorption space.

[0008] Figure 1 is a conceptual diagram schematically illustrating a substrate adsorption device according to one embodiment of the present invention.

[0009] Figure 2 is a perspective view of the suction pad assembly of Figure 1.

[0010] Figure 3 is a perspective view of the suction pad of Figure 2.

[0011] Fig. 4 is a cross-sectional view of the absorption pad of Fig. 3.

[0012] Figure 5 is a drawing showing the bottom surface of the absorption pad of Figure 3.

[0013] Figure 6 is a cross-sectional view taken along line X-X' of Figure 5.

[0014] Figure 7 is a drawing showing an enlarged view of area A of Figure 5.

[0015] Figure 8 is a cross-sectional view taken along line Y-Y' of Figure 7.

[0016] One aspect of the present invention provides an adsorption pad comprising a body having an opening extending in a longitudinal direction, a pad cover connected to one end of the body and extending in a radial direction of the body, a first pattern unit having a plurality of protrusions protruding from a surface of the pad cover and arranged parallel to the radial direction, and a second pattern unit arranged on the pad cover closer to the opening than the first pattern unit.

[0017] Additionally, the first pattern unit has a first pad protrusion disposed adjacent to the opening of the body and a second pad protrusion disposed radially outward from the first pad protrusion, and at least one of the first pad protrusion and the second pad protrusion can have a height that changes in the radial direction.

[0018] Additionally, the first pattern unit may further include a third pad protrusion disposed radially outside the second pad protrusion.

[0019] Additionally, the first pad protrusion and the second pad protrusion may have side walls facing each other that are concave.

[0020] Additionally, the second pattern unit may have a support protrusion disposed on the outside of the opening and a guide groove sunken into the support protrusion.

[0021] Additionally, the second pattern unit may further include a connector connecting the adjacent support protrusions.

[0022] Additionally, the pad cover may further include a sub-pattern that is arranged to be circulated on the outside of the first pattern unit.

[0023] Another aspect of the present invention provides an adsorption pad assembly comprising a shaft having a passage through which a gas moves therein and an adsorption pad disposed at one end of the shaft, wherein the adsorption pad comprises a body having an opening extending in a longitudinal direction, a pad cover connected to one end of the body and extending in a radial direction of the body, a first pattern unit having a plurality of protrusions protruding from a surface of the pad cover and arranged in parallel in the radial direction, and a second pattern unit disposed on the pad cover closer to the opening than the first pattern unit.

[0024] Other aspects, features and advantages other than those described above will become apparent from the following drawings, claims and detailed description of the invention.

[0025] The configuration and operation of the present invention will be described in detail with reference to embodiments of the present invention illustrated in the attached drawings below.

[0026] The present invention is capable of various modifications and embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, as well as the methods for achieving them, will become clearer with reference to the embodiments described in detail below, along with the drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various forms.

[0027] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same reference numerals and redundant descriptions thereof will be omitted.

[0028] In the examples below, the terms first, second, etc. are not used in a limiting sense, but are used for the purpose of distinguishing one component from another.

[0029] In the examples below, singular expressions include plural expressions unless the context clearly indicates otherwise.

[0030] In the examples below, terms such as “include” or “have” mean that a feature or component described in the specification is present, and do not preclude the possibility that one or more other features or components may be added.

[0031] For convenience of explanation, the sizes of components in the drawings may be exaggerated or reduced. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily indicated for convenience of explanation, and thus the present invention is not necessarily limited to what is shown.

[0032] FIG. 1 is a conceptual diagram schematically illustrating a substrate adsorption device according to one embodiment of the present invention, FIG. 2 is a perspective view of the adsorption pad assembly of FIG. 1, and FIG. 3 is a perspective view of the adsorption pad of FIG. 2.

[0033] Referring to FIGS. 1 and 2, the substrate adsorption device (1) may include an adsorption pad assembly (10) connected to a first pipe (20A), a second pipe (20B), and a third pipe (20C).

[0034] A substrate adsorption device (1) according to the present invention is a device used when transporting a substrate (SB) from a predetermined stage to the next stage. The substrate adsorption device (1) may include an adsorption pad assembly (10) having an adsorption pad (100) that comes into contact with a substrate (SB) for transporting the substrate (SB).

[0035] The substrate adsorption device (1) is mounted on an external structure and can adsorb and move the substrate (SB) by the suction force of the adsorption pad assembly (10). For example, the substrate adsorption device (1) can transport the substrate (SB) for a processing process of the substrate (SB).

[0036] For example, the substrate adsorption device (1) may be used for processing a substrate (SB) into a predetermined number of split elements, processing a process of removing scrap material generated when the substrate (SB) is cut, processing a process of cleaning the surface of the substrate (SB), etc. The substrate (SB) may be returned to a predetermined stage at each processing stage, and when the processing is completed, may be returned to another stage for the next processing.

[0037] For example, the substrate (SB) may be formed of a brittle material substrate such as a glass substrate or a ceramic substrate, or a resin substrate such as a PET (polyethylene terephthalate resin) substrate or a polyimide resin substrate. In addition, the substrate (SB) may include a metal plate. For example, the substrate (SB) may be a metal plate that forms a frame and structural components of a ship, aircraft, automobile, or home appliance. For example, the material of the metal plate may be formed of high-strength steel or a hardenable steel alloy, or a non-ferrous metal plate such as aluminum or magnesium. In addition, the metal plate may be a flat metal plate or a curved metal plate having a set thickness. However, the shape and material of the substrate (SB) are not limited thereto and may be appropriately selected depending on the purpose.

[0038] The substrate adsorption device (1) can transfer the substrate (SB) to a later process of the process and transfer it to the next processing process after the process is completed.

[0039] The substrate adsorption device (1) can form an adsorption structure for transporting a substrate (SB) by connecting a first pipe (20A) and a second pipe (20B). In addition, a plurality of joints inserted into the first pipe (20A) and the second pipe (20B) can be connected along the same axis to form an adsorption structure that fits the shape of the substrate (SB). The joints constituting the substrate adsorption device (1) can vary the arrangement of the mounted adsorption pad assembly (10).

[0040] Referring to FIGS. 2 and 3, a plurality of suction pad assemblies (10) can be mounted on the substrate suction device (1), and a suction line (12) can be provided for each suction pad assembly (10) connected to the plurality of joints.

[0041] The suction pad assembly (10) may include a shaft (11) and a suction pad (100). Specifically, the suction pad assembly (10) may be provided with a structure having an intake pipe through which gas suctioned from the suction pad (100) installed at one end passes.

[0042] The shaft (11) may have a passage through which gas moves inside. The shaft (11) may connect a suction pad (100) that contacts the substrate (SB) and a suction line (12). In addition, as an optional embodiment, the shaft (11) may be configured to have a structure in which some parts are overlapped and inserted to alleviate shock during transport.

[0043] An adsorption pad (100) may be placed at one end of the shaft (11). The adsorption pad (100) may directly contact the substrate (SB) to adsorb and fix the substrate (SB). For example, the adsorption pad (100) may have a hemispherical shape and may be formed of a material having elasticity to alleviate shock.

[0044] Fig. 4 is a cross-sectional view of the suction pad of Fig. 3, Fig. 5 is a drawing showing the bottom surface of the suction pad of Fig. 3, and Fig. 6 is a cross-sectional view taken along X-X' of Fig. 5.

[0045] Referring to FIGS. 4 to 6, the suction pad (100) may include a body (101), a pad cover (102), a first pattern unit (110), and a second pattern unit (120). The suction pad (100) may be placed between a suction line (12) and an object. The suction pad (100) may form a passage through which a negative pressure fluid flows. The suction pad (100) is formed to have an area that comes into contact with a portion of the object, and is mounted to cover the object, thereby having an suction force for transporting the object.

[0046] The body (101) can be connected to the shaft (11) to fix the pad cover (102). One end of the body (101) can be connected to the shaft (11), and the other end can be connected to the pad cover (102). The body (101) can form a passage for exhausting gas by forming an intake port in the center of the pad cover (102). For example, the body (101) can have a first opening (101H) extending in the longitudinal direction. The first opening (101H) extends with a predetermined diameter and can form a passage for flowing gas in a space sealed by the pad cover (102). In addition, the body (101) can be provided with a connecting means for connecting to the shaft (11) at one end, so that the suction pad (100) can be easily attached and detached.

[0047] The pad cover (102) may be connected to one end of the body (101) and may have a structure that extends in the radial direction of the body (101). The pad cover (102) may form a suction port connected to the body (101) and may form a contact surface with the object. The pad cover (102) may have one side open toward the object and may be formed to have depth inside. The pad cover (102) may be in close contact with the upper end of the object to block air flow outside the pad cover (102).

[0048] The pad cover (102) is elastically supported so that it can move slightly in an oblique direction with respect to the body (101) when vertically descending or ascending to adsorb an object, so that the pad cover (102) can reliably adsorb even if the surface of the object is curved. The pad cover (102) can be made of soft elastic rubber, silicone, synthetic resin, etc. so that the volume of the contact surface with the object can be expanded. In addition, the pad cover (102) can be made of heat-resistant rubber, silicone, synthetic resin, etc. in order to adsorb a high-temperature object. However, the material of the pad cover (102) is not limited thereto and various materials can be applied.

[0049] The suction pad (100) can induce a gas flow between the target object and the pad cover (102). For example, the pad cover (102) can have a repeating pattern on the surface that contacts the target object. The pad cover (102) can reliably absorb the substrate (SB) even if the substrate (SB) surface has a curve due to the pattern repeatedly formed on the same surface. Accordingly, a complete vacuum state between the target object and the pad cover (102) can be maintained.

[0050] The pad cover (102) forms a gas flow passage between the shaft (11) and the object, and may be formed with a step. Specifically, the pad cover (102) may be formed in a shape having an outer diameter that gradually increases from the body (101) and the connecting end. The diameter of the adsorption surface that adsorbs the object may have the largest diameter, but the portion through which the gas passes may be formed with a relatively small diameter. Accordingly, the surface that comes into contact with the adsorbed object is widened, enabling stable adsorption, and as the diameter decreases, the path through which the gas flows can be guided in one direction.

[0051] The pad cover (102) may have a folding section. The pad cover (102) is provided to be elastically foldable or bendable, and the gap may be widened or narrowed to have elasticity in the rising or falling direction. In detail, the pad cover (102) may have at least one foldable section. The folding section of the pad cover (102) may be widened or folded at a predetermined angle, so that the path through which gas is sucked can be appropriately adjusted.

[0052] The pad cover (102) may have a second opening (102H) having a larger diameter than the first opening (101H). In addition, the pad cover (102) may have a larger radius than the second opening (102H) to form an adsorption surface. The adsorption surface may have a diameter that is enlarged from the second opening (102H) and may have an inclined surface that is inclined at a certain angle. In other words, the pad cover (102) may be formed such that the cross-sectional area becomes smaller as it goes upward from the adsorption surface.

[0053] The pad cover (102) may have multiple patterned protrusions formed on the suction surface. The patterns continuously formed on the pad cover (102) can prevent the object from being detached and increase its sturdiness. In addition, the multiple patterned protrusions formed on the pad cover (102) can absorb impact upon contact with the substrate (SB) and secure a maximum contact surface with the substrate (SB).

[0054] The first pattern unit (110) may be arranged on the suction surface of the pad cover (102). The first pattern unit (110) may have a plurality of protrusions that protrude from the surface of the pad cover (102) and are arranged radially in parallel. The first pattern unit (110) may be arranged to circle the suction surface of the pad cover (102). The first pattern unit (110) may be arranged to be spaced apart from an adjacent first pattern unit (110) by a predetermined distance.

[0055] Specifically, the first pattern units (110) can be arranged continuously in the circumferential direction of the pad cover (102). The first pattern units (110) arranged adjacently are arranged at a predetermined angle based on the central axis of the pad cover (102). That is, by allowing gas to flow between the first pattern unit (110) and the neighboring first pattern unit (110), the gas in the receiving space formed by the contact of the pad cover (102) can be guided to form an intake airflow.

[0056] As the area in contact with the target increases, the suction force can increase. Therefore, in order to fix the suction state of the substrate (SB), it is necessary to make the area in contact with the substrate (SB) sufficiently large so that the suction force acting on the range covered by the pad cover (102) is large. However, in the case of a conventional suction pad that directly adheres the suction surface to the target, there are cases where the suction is released due to the suction of a curved substrate (SB) or the movement of the substrate (SB) during transport. In other words, simply increasing the suction range acting on the substrate (SB) may cause the axis center to shift and deviate during the transport operation.

[0057] The suction pad (100) of the present invention has a first pattern unit (110) and a second pattern unit (120) protruding from the surface of the suction surface to secure a maximum contact surface with the substrate (SB), while being able to suck up air remaining between the substrate (SB) and the suction surface. Air flowing between the first pattern unit (110) and an adjacent first pattern unit (110) can pass between the second pattern units (120) on the inside of the pad cover (102) and pass through the suction line (12).

[0058] Figure 7 is an enlarged view of area A of Figure 5, and Figure 8 is a cross-sectional view taken along line Y-Y' of Figure 7.

[0059] Referring to FIGS. 7 and 8, the first pattern unit (110) may have an arrangement set so that the gas flows in a certain direction.

[0060] The first pattern unit (110) may have a first pad protrusion (111), a second pad protrusion (112), and a third pad protrusion (113).

[0061] The first pattern unit (110) protrudes from the inclined surface of the pad cover (102), but the maximum height protruding from the surface of the pad cover (102) may have different heights.

[0062] The first pad protrusion (111) may be positioned adjacent to the first opening (101H) of the body (101). The first pad protrusion (111) may have a first width (111w) and a first length (111L). The first pad protrusion (111) may be positioned most innerwardly among the first pattern units (110) and may have the highest protrusion height. The first pad protrusion (111) adjacent to the center of the suction pad (100) may protrude the highest and receive the greatest pressure.

[0063] The first pad protrusion (111) may be provided with different heights on one side and the other side. Specifically, the protrusion height of the side wall facing the second pad protrusion (112) may be different from the protrusion height of the opposite side of the first pad protrusion (111). The first pad protrusion (111) may protrude to a first height (h1), and may be provided with a shape that is partially inclined toward the second pad protrusion (112) with a first inclination angle (S1).

[0064] The second pad protrusion (112) may be arranged radially outside the first pad protrusion (111). The second pad protrusion (112) may be arranged between the first pad protrusion (111) and the third pad protrusion (113). In addition, the second pad protrusion (112) may be provided in a concave shape on both sides. Specifically, the protrusion height of the side wall facing the first pad protrusion (111) and the protrusion height of the side wall facing the third pad protrusion (113) may be different. The second pad protrusion (112) may protrude to a second height (h2), and the second pad protrusion (112) may be provided in a shape that is partially inclined toward the third pad protrusion (113) with a second inclination angle (S2).

[0065] The third pad protrusion (113) may be positioned radially outside the second pad protrusion (112). The third pad protrusion (113) may have a protruding shape with one side protruding to a third height (h3) and a cross-section having a third inclination angle (S3).

[0066] Referring again to FIG. 7, the first pattern unit (110) may be formed to have approximately the same width. Specifically, the first pad protrusion (111) may be formed to have a first width (111w) and a first length (111L). The second pad protrusion (112) may be provided to have a second width (112w) and a second length (112L), and the third pad protrusion (113) may be provided to have a third width (113w) and a third length (113L). At this time, the widths of the first pad protrusion (111), the second pad protrusion (112), and the third pad protrusion (113) may be formed to be the same. In addition, the third length (113L) of the third pad protrusion (113) may be formed to be greater than the lengths of the first pad protrusion (111) and the second pad protrusion (112).

[0067] The first pattern unit (110) forms a passage through which gas passes by the first pad protrusion (111), the second pad protrusion (112), and the third pad protrusion (113) formed with a partial difference in thickness, thereby allowing the flow of gas to be discharged more efficiently.

[0068] Additionally, the first pad protrusion (111) and the second pad protrusion (112) may have side walls facing each other formed to be concave.

[0069] Specifically, the side wall where the first pad protrusion (111) faces the second pad protrusion (112) may be defined as the first side wall (W1), and the side wall where the second pad protrusion (112) faces the first pad protrusion (111) may be defined as the second side wall (W2). When the first pad protrusion (111) and the second pad protrusion (112) are viewed from a plan view, the first side wall (W1) may be formed to be recessed inwardly of the first pad protrusion (111), and the second side wall (W2) may be formed to be recessed inwardly of the second pad protrusion (112). Since the first side wall (W1) and the second side wall (W2) are provided in a roughly arch shape when viewed from a plan view, they may form a support portion of the suction surface but may not obstruct the flow of air within the suction space.

[0070] Referring to FIG. 8, the cross-sectional shape of the first side wall (W1) is formed to have a concave slope toward the inside of the first pad protrusion (111), and the cross-sectional shape of the second side wall (W2) can protrude from the bottom surface of the second pad protrusion (112) with a slope.

[0071] The second pad protrusion (112) has a third side wall (W3) facing the third pad protrusion (113), and the third side wall (W3) may be formed to have an inward slope toward the second pad protrusion (112). The third side wall (W3) may protrude parallel to the fourth side wall (W4) facing it.

[0072] That is, the first pattern unit (110) is formed to protrude from the surface of the pad cover (102), but is all inclined toward the outer radial direction of the pad cover (102). As a result, the first pattern unit (110) has a relatively thicker thickness as it approaches the central axis of the pad cover (102), and has a different inclination angle from the surface of the pad cover (102), thereby forming a contact surface that uniformly contacts the substrate (SB).

[0073] The second pattern unit (120) may be placed on the pad cover (102) closer to the first opening (101H) than the first pattern unit (110).

[0074] The second pattern unit (120) is positioned closest to the body (101) so as to guide the air within the adsorption space toward the body (101).

[0075] The second pattern unit (120) may be provided with a support protrusion (121), a guide groove (122), and a connector (123). The second pattern unit (120) may be provided in a shape in which the support protrusions (121) and the connectors (123) are arranged continuously. The second pattern unit (120) may have the support protrusions (121) and the connectors (123) alternately arranged in a radial direction centered on the first opening (101H).

[0076] The support protrusion (121) may be arranged on the outside of the first opening (101H). The support protrusion (121) may be arranged in a circular manner along the edge of the first opening (101H) and may protrude to a predetermined height.

[0077] The guide groove (122) may be provided in a sunken shape in the support protrusion (121). The guide groove (122) may be a shape partially sunken from the protruding surface of the support protrusion (121). At this time, the sunken shape of the guide groove (122) may have a height higher than or equal to the surface of the connector (123). In addition, the sunken shape of the guide groove (122) may be arranged continuously together with the support protrusion (121), thereby forming a groove connected around the first opening (101H). Accordingly, the second pattern unit (120) may form a flow path that induces a flow of gas around the first opening (101H).

[0078] The connector (123) may be provided in a shape that connects adjacent support protrusions (121). The connector (123) may be positioned to protrude between consecutive support protrusions (121), but with a protrusion height that is relatively lower than that of the support protrusions (121).

[0079] In addition, the second pattern unit (120) and the first pattern unit (110) may be arranged so that their arrangement positions are staggered. For example, the second pattern unit (120) may be arranged between the first pattern unit (110) and the neighboring first pattern unit (110). Specifically, the support protrusions (121) may be provided at positions that are arranged so as to be crossed so as not to be arranged in a straight line with the first pattern unit (110). Accordingly, the gas flowing between the first pattern units (110) naturally forms an air current that is gathered between the second pattern units (120). That is, the first pattern unit (110) and the second pattern unit (120) form a path for the gas to be sucked into the inside of the suction pad (100), so that the gas within the suction space can be quickly sucked.

[0080] The adsorption pad (100) may further include a sub-pattern (130) sunken into the pad cover (102).

[0081] The sub-pattern (130) may be arranged to run around the outside of the first pattern unit (110). The sub-pattern (130) may be arranged adjacent to the edge of the pad cover (102). The sub-pattern (130) may form a recessed groove in the thickness direction of the pad cover (102), and a portion of the recessed groove may form a line extending between the arranged first pattern units (110).

[0082] The suction pad (100) of the present invention may be provided with a first pattern unit (110) and a second pattern unit (120) on the suction surface that is absorbed by the substrate (SB). Accordingly, the continuous protrusion pattern may come into contact with the upper surface of the substrate (SB) to strengthen the suction force. In addition, the first pattern unit (110) and the second pattern unit (120) may be provided so as to secure the surface area of ​​the suction surface while not impeding the smooth flow of air within the suction space. In other words, the substrate (SB) may not be separated from the suction pad (100) and may be maintained in a state of being absorbed by the suction pad (100) with a strong suction force.

[0083] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the appended claims.

[0084] The specific implementations described in the examples are exemplary and do not limit the scope of the examples in any way. Furthermore, unless specifically stated as "essential," "important," or the like, an element may not be absolutely necessary for the application of the present invention.

[0085] The use of the term "above" and similar referential terms in the specification of embodiments (especially in the claims) may refer to both the singular and the plural. Furthermore, if a range is described in the embodiments, the invention is intended to include individual values ​​falling within the range (unless otherwise stated), and is equivalent to describing each individual value constituting the range in the detailed description. Finally, unless the order of steps constituting the method according to the embodiments is explicitly stated or otherwise stated to the contrary, the steps may be performed in any suitable order. The embodiments are not necessarily limited by the order in which the steps are described. The use of all examples or exemplary terms (e.g., "for example," etc.) in the embodiments is merely intended to describe the embodiments in detail, and the scope of the embodiments is not limited by the examples or exemplary terms, unless otherwise defined by the claims. Furthermore, those skilled in the art will recognize that various modifications, combinations, and variations may be made within the scope of the appended claims or their equivalents, depending on design conditions and factors.

Claims

1. A body having an opening extending in the longitudinal direction; A pad cover connected to one end of the above body and extending in the radial direction of the above body; A first pattern unit in which a plurality of protrusions protrude from the surface of the pad cover and are arranged in a parallel manner in the radial direction; and An adsorption pad, comprising: a second pattern unit disposed on the pad cover adjacent to the opening more than the first pattern unit.

2. In paragraph 1, The above first pattern unit a first pad protrusion positioned adjacent to the opening of the body; and A second pad protrusion is provided which is positioned radially outside the first pad protrusion; An adsorption pad, wherein at least one of the first pad protrusion and the second pad protrusion has a height that changes in the radial direction.

3. In paragraph 2, The above first pattern unit An adsorption pad further comprising a third pad protrusion positioned radially outer from the second pad protrusion.

4. In paragraph 2, An adsorption pad in which the first pad projection and the second pad projection have concave side walls facing each other.

5. In paragraph 1, The above second pattern unit a supporting projection arranged on the outside of the above opening; and An adsorption pad having a guide groove sunken into the above-mentioned support protrusion.

6. In paragraph 5, The above second pattern unit An adsorption pad further comprising a connector for connecting adjacent support projections.

7. In paragraph 1, An adsorption pad further comprising a sub-pattern sunken in the pad cover, the sub-pattern being arranged to circle the outer side of the first pattern unit.

8. In paragraph 1, The above pad cover An absorbent pad formed of at least one of heat-resistant rubber, silicone and synthetic resin.

9. A shaft having a passage through which gas moves inside; and Including an adsorption pad arranged at one end of the above shaft; The above absorbent pad A body having an opening extending longitudinally; A pad cover connected to one end of the above body and extending in the radial direction of the above body; A first pattern unit in which a plurality of protrusions protrude from the surface of the pad cover and are arranged in a parallel manner in the radial direction; and An adsorption pad assembly comprising: a second pattern unit disposed on the pad cover adjacent to the opening more than the first pattern unit;

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