Substrate storage container

Abstract

A substrate storage container 1 comprises a container body 2 and a lid 3. The container body 2 has a back wall 22, an upper wall 23, a lower wall 24, and a pair of side walls 25, 26. The substrate storage container 1 is further provided with lateral substrate support parts 5 that are disposed so as to form a pair in the lateral direction D3 within a substrate storage space 27, and that are capable of supporting edges of a plurality of substrates W in a state in which adjacent substrates W among the plurality of substrates W are aligned with a predetermined spacing therebetween. The lateral substrate support parts 5 and the side walls 25, 26 are integrally formed. An inner surface 232 of the upper wall 23 and / or an inner surface 242 of the lower wall 24 includes: an inner region 233, 243 located at an inner side D34 in the lateral direction D3; and outer regions 234, 244 located at both outer sides D33 in the lateral direction D3 with respect to the inner region 233, 243. The outer regions 234, 244 are displaced toward an outer side D23 in the vertical direction D2 as the outer regions 234, 244 extend toward the inner side D34 in the lateral direction D3. The inner region 233, 243 includes: a step surface 237, 247 recessed on the outer side D23 in the vertical direction D2 with respect to the outer regions 234, 244; and a guide part 238, 248 that is displaced on an inner side D24 or the outer side D23 in the vertical direction D2 with respect to the step surface 237, 247.

Description

Substrate storage container

[0001] The present invention relates to a substrate storage container for storing substrates such as semiconductor wafers.

[0002] 2. Description of the Related Art Conventionally, containers for storing substrates such as semiconductor wafers have been known that include a container body, a lid, and side substrate support portions.

[0003] The container body has a cylindrical wall portion with a container body opening formed at one end and a closed other end. A substrate storage space is formed within the container body. The substrate storage space is surrounded by the wall portion and is capable of storing multiple substrates. The lid body is detachable from the container body opening and is capable of closing the container body opening. The side substrate support portions are provided on the wall portion in pairs within the substrate storage space. When the container body opening is not closed by the lid body, the side substrate support portions are capable of supporting the edges of multiple substrates while arranging adjacent substrates in parallel and spaced apart by a predetermined distance.

[0004] A front retainer is provided on a portion of the lid that faces the substrate storage space when the container body opening is closed. The front retainer is capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid. A rear-side substrate support portion is provided paired with the front retainer. The rear-side substrate support portion is capable of supporting the edges of the plurality of substrates. When the container body opening is closed by the lid, the rear-side substrate support portion cooperates with the front retainer to support the plurality of substrates, thereby holding the plurality of substrates in a state where adjacent substrates are spaced apart at a predetermined interval and arranged side by side.

[0005] The walls of the container body include a back wall, an upper wall, a lower wall, a first side wall, and a second side wall. A pair of lateral substrate support portions are provided in the left-right direction, and are provided on the first side wall and the second side wall (sometimes simply referred to as "side walls" when describing the same) so as to form a pair within the substrate storage space.

[0006] The side substrate support portions can be configured as separate bodies fixed to the side walls of the container body, or as integral bodies formed with the side walls of the container body. In the latter case, when molding the container body and the side substrate support portions, it is necessary to integrally mold the substrate storage space of the container body and the side substrate support portions. To mold the substrate storage space of the container body, the core of the mold (also referred to as the "main core") must be moved (removed) from within the substrate storage space to the front (toward the opening of the container body) during molding. Meanwhile, the side substrate support portions may have protrusions or inclinations to reduce the contact area between the side substrate support portions and the substrate. Such protrusions or inclinations result in so-called undercuts in the direction of movement of the main core. To mold side substrate support portions with undercuts, a sliding core is used separately from the main core to mold the undercut portion, and the sliding core must be moved (removed) laterally inward (into the substrate storage space) during molding.

[0007] Japanese Patent Application Laid-Open No. 2001-345373

[0008] In a substrate storage container in which the main core of a mold is moved from within the substrate storage space of the container body toward the container body opening to form the substrate storage space and the slide core is moved laterally inward to form the lateral substrate support portions, it is desirable that the main core and slide core move smoothly during molding. If the core does not move smoothly, for example, friction between the core and the inner surface of the container body or displacement of the molded product due to the core dragging it is likely to occur, resulting in a decrease in molding quality.

[0009] The present invention aims to provide a substrate storage container in which the main core of a mold is moved from within the substrate storage space of the container body toward the container body opening to form the substrate storage space, and the slide core is moved laterally inward to form the lateral substrate support portion, and in which the main core and slide core can move smoothly during molding.

[0010] (1) A first aspect of the present invention is a substrate storage container comprising a container body having a container body opening at one end on the front side, and a lid that is detachable from the container body opening and can close the container body opening, wherein the container body has a rear wall, an upper wall, a lower wall, and a pair of side walls, and comprises a cylindrical wall portion whose other rear end is closed by the rear wall, the container body opening is formed by one end of the upper wall, one end of the lower wall, and one end of the side wall, and the container body has a substrate storage space formed by the inner surfaces of the upper wall, the lower wall, the side walls, and the rear wall, which is capable of storing a plurality of substrates and is in communication with the container body opening, and the substrate storage container is the inner surface of the upper wall and / or the inner surface of the lower wall include an inner region located on the inside in the horizontal direction and an outer region located on both sides of the inner region in the horizontal direction, the outer region being displaced outward in the vertical direction as it moves inward in the horizontal direction, and the inner region including a stepped surface that is recessed outward in the vertical direction relative to the outer region, and a guide portion that displaces inward or outward in the vertical direction relative to the stepped surface.

[0011] (2) A second aspect of the present invention is the substrate storage container according to (1), wherein the width of the step surface increases from the rear side to the front side.

[0012] (3) A third aspect of the present invention is a substrate storage container according to (1) or (2), in which the guide portion extends rearward from a position further rearward than the front end on the inner surface of the upper wall and / or the front end on the inner surface of the lower wall, and continues to a position further forward than the rear end, but does not extend all the way to the rear end.

[0013] According to the present invention, in a substrate storage container in which the main core of the mold is moved from the substrate storage space in the container body toward the side of the container body opening to form the substrate storage space, and the slide core is moved inward in the lateral direction to form the side substrate support portion, a substrate storage container in which the main core and the slide core can move smoothly during molding can be provided.

[0014] FIG. 3A is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to an embodiment of the present invention. FIG. 3B is a perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention as viewed obliquely from above. FIG. 3C is a perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention as viewed obliquely from below. FIG. 3D is a front view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. FIG. 3E is a cross-sectional view of the substrate storage container 1 according to an embodiment of the present invention as viewed from above downward. FIG. 3F is a schematic cross-sectional view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention, taken along the P-P cross-section shown in FIG. 2C and viewed from above downward. FIG. 3G is a cross-sectional view taken along the B-B line shown in FIG. 3A. FIG. 3H is a cross-sectional view taken along the C-C line shown in FIG. 3A. FIG. 3I is a cross-sectional view taken along the D-D line shown in FIG. 3A. FIG. 3J is a schematic cross-sectional view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention, taken along the Q-Q cross-section shown in FIG. 2C and viewed from below upward. FIG. 4A is a cross-sectional view taken along the B-B line shown in FIG. 4A. FIG. 4B is a cross-sectional view taken along the C-C line shown in FIG. 4A. FIG. 4C is a cross-sectional view taken along the D-D line shown in FIG. 4A. FIG. 5A is a cross-sectional view showing the arrangement of the main core C1, the slide core C2, and the movable-side mounting plate C3 before mold release in the container body 2 and the side substrate support portion 5. FIG. 5B is a schematic view of FIG. 5A. FIG. 5C is a partial longitudinal-sectional view showing the arrangement of the slide core C2 before mold release in the side substrate support portion 5. FIG. 5D is a schematic cross-sectional view showing the arrangement of the main core C1, the slide core C2, and the movable-side mounting plate C3 during the mold release process in the container body 2. FIG. 5E is a partial longitudinal-sectional view showing the arrangement of the slide core C2 during the mold release process in the side substrate support portion 5. FIG. 5F is a schematic longitudinal-sectional view showing the arrangement of the main core C1 and the slide core C2 during the mold release process in the container body 2. FIG. 5G is an enlarged view of part B in FIG. 7A. FIG. 5H is a view of a comparative form corresponding to FIG. 7B.

[0015] A substrate storage container 1 according to an embodiment of the present invention will now be described with reference to the drawings. Fig. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storage container 1 according to an embodiment of the present invention. Fig. 2A is a perspective view of a container body 2 of a substrate storage container 1 according to an embodiment of the present invention, viewed obliquely from above. Fig. 2B is a perspective view of a container body 2 of a substrate storage container 1 according to an embodiment of the present invention, viewed obliquely from below. Fig. 2C is a front view of a container body 2 of a substrate storage container 1 according to an embodiment of the present invention. Fig. 2D is a cross-sectional view of a substrate storage container 1 according to an embodiment of the present invention, viewed from above.

[0016] FIG. 3A is a schematic cross-sectional view of the container body 2 of the substrate storage container 1 according to one embodiment of the present invention, cut along the P-P cross section shown in FIG. 2C and viewed from above. FIG. 3B is a cross-sectional view along the B-B cross section shown in FIG. 3A. FIG. 3C is a cross-sectional view along the C-C cross section shown in FIG. 3A. FIG. 3D is a cross-sectional view along the D-D cross section shown in FIG. 3A. FIG. 4A is a schematic cross-sectional view of the container body 2 of the substrate storage container 1 according to one embodiment of the present invention, cut along the Q-Q cross section shown in FIG. 2C and viewed from below. FIG. 4B is a cross-sectional view along the B-B cross section shown in FIG. 4A. FIG. 4C is a cross-sectional view along the C-C cross section shown in FIG. 4A. FIG. 4D is a cross-sectional view along the D-D cross section shown in FIG. 4A.

[0017] FIG. 5A is a cross-sectional view showing the arrangement of the main core C1, slide core C2, and movable-side mounting plate C3 in the container body 2 and the side substrate support portion 5 before demolding. FIG. 5B is a schematic diagram of FIG. 5A. FIG. 5C is a partial vertical cross-sectional view showing the arrangement of the slide core C2 in the side substrate support portion 5 before demolding. FIG. 6A is a cross-sectional view showing the arrangement of the main core C1, slide core C2, and movable-side mounting plate C3 in the container body 2 during the demolding process. FIG. 6B is a partial vertical cross-sectional view showing the arrangement of the slide core C2 in the side substrate support portion 5 during the demolding process. FIG. 7A is a vertical cross-sectional view showing the arrangement of the main core C1 and slide core C2 in the container body 2 during the demolding process. FIG. 7B is an enlarged view of portion B in FIG. 7A. FIG. 7C is a view of a comparative embodiment corresponding to FIG. 7B.

[0018] For ease of explanation, the direction from the container body 2 to the lid 3 (to be described later, the lower left direction in FIG. 1 ) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12, and these are defined as the front-rear direction D1. Furthermore, the direction from the lower wall 24 to the upper wall 23 (to be described later, the upper direction in FIG. 1 ) is defined as the upper direction D21, and the opposite direction is defined as the lower direction D22, and these are defined as the up-down direction D2. Furthermore, the direction from the second side wall 26 to the first side wall 25 (to be described later, the upper left direction in FIG. 1 ) is defined as the left direction D31, and the opposite direction is defined as the right direction D32, and these are defined as the left-right direction D3 or lateral direction D3. The word "direction" may also be referred to as "side."

[0019] The outer side D33 in the horizontal direction D3 refers to the side away from the center of the horizontal direction D3 (FIG. 2D shows the center line J20 of the container body 2 in the horizontal direction D3), and for example, in the case of the lateral substrate support portion 5 or the first side wall 25 on the left side D31, this refers to the left direction or the left side D31. The inner side D34 in the horizontal direction D3 refers to the side toward the center of the horizontal direction D3, and for example, in the case of the lateral substrate support portion 5 or the first side wall 25 on the left side D31, this refers to the right direction or the right side D32. The outer side D23 in the vertical direction D2 refers to the side away from the center of the vertical direction D2, and for example, in the case of the bottom wall 24, this refers to the bottom direction or the bottom side D22. The inner side D24 in the vertical direction D2 refers to the side toward the center of the vertical direction D2, and for example, in the case of the bottom wall 24, this refers to the top direction or the top side D21.

[0020] The substrates W stored in the substrate storage container 1 are thin, disc-shaped silicon wafers, glass wafers, sapphire wafers, etc., which are used in industry. In this embodiment, the substrates W are silicon wafers with a diameter of 300 mm.

[0021] As shown in FIGS. 1 and 2A to 2D, the substrate storage container 1 has a container body 2, a lid 3, side substrate support portions 5, a rear substrate support portion 6, and a front retainer .

[0022] The container body 2 has a container body opening 21 formed at one end on the front side D11 and a cylindrical wall portion 20 that is closed at the other end on the rear side D12. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. Side substrate support portions 5 are arranged in the portion of the wall portion 20 that forms the substrate storage space 27. The substrate storage space 27 is capable of storing multiple substrates W.

[0023] The side substrate support portions 5 are provided on the wall portion 20 in pairs in the left-right direction D3 within the substrate storage space 27. When the container body opening 21 is not closed by the lid body 3, the side substrate support portions 5 can support the edges of the plurality of substrates W while arranging adjacent substrates W in parallel with a predetermined distance between them.

[0024] 2A to 2D, a rear-side substrate support portion 6 is provided at the rear side of the substrate storage space 27. The rear-side substrate support portion 6 can support the rear portions of the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3.

[0025] The lid 3 is detachable from the container body opening 21 and is capable of closing the container body opening 21. A front retainer 7 (see FIG. 2D ) is provided on a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3 (the back surface of the lid 3 shown in FIG. 1 ). The front retainer 7 is arranged to form a pair with the rear substrate support portion 6.

[0026] The front retainer 7 can support the front edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. When the container body opening 21 is closed by the lid 3, the front retainer 7 supports the plurality of substrates W in cooperation with the rear substrate support part 6, thereby holding the plurality of substrates W in a state where adjacent substrates W are spaced apart at a predetermined interval and arranged side by side. Each part will be described in detail below.

[0027] 1, the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25 (left wall), and a second side wall 26 (right wall). The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like, and in this embodiment, are integrally molded from polycarbonate.

[0028] The first side wall 25 and the second side wall 26 face each other in the left-right direction D3, and the upper wall 23 and the lower wall 24 face each other in the up-down direction D2. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22 and constitute an opening periphery 28 that forms the substantially rectangular container body opening 21.

[0029] The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The container body 2 has a box-like outer shape formed by the outer surfaces of the wall 20. The inner surfaces of the wall 20, i.e., the inner surface of the rear wall 22, the inner surface 232 of the upper wall 23 (see FIGS. 4A and 4B), the inner surface 242 of the lower wall 24 (see FIGS. 3A and 3B), the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a substrate storage space 27 surrounded thereby. The container body opening 21 formed in the opening periphery 28 is surrounded by the wall 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27 with the upper and lower surfaces of the substrates W positioned approximately horizontally.

[0030] Latch engagement recesses 231A, 231B, 241A, and 241B recessed outward in the vertical direction D2 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one near each of the left and right ends of the upper wall 23 and the lower wall 24.

[0031] A top flange 236 is fixed to the center of upper wall 23. Top flange 236 is a member that is hung on and suspended from substrate storage container 1 when suspending substrate storage container 1 in an AMHS (automated wafer transport system), PGV (wafer substrate transport vehicle), or the like.

[0032] The first side wall 25 has a symmetrical shape to the second side wall 26, and the lateral board support portion 5 on the left side D31 has a symmetrical shape to the lateral board support portion 5 on the right side D32. Therefore, the following description will mainly focus on the first side wall 25 and the lateral board support portion 5 on the left side D31, and for the second side wall 26 and the lateral board support portion 5 on the right side D32, the description of the first side wall 25 and the lateral board support portion 5 on the left side D31 will be used with the left and right reversed, and the description will be omitted or simplified.

[0033] The lateral substrate support portions 5 are formed integrally with the first side wall 25 and the second side wall 26, respectively, and are arranged in pairs in the left-right direction D3. As shown in FIGS. 2D, 5C, and 6B, the lateral substrate support portions 5 have a plate portion 51 and a plate support portion 52. The plate portion 51 is plate-shaped and has a generally arc shape in plan view. A total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, 25 in the up-down direction D2. Adjacent plate portions 51 are arranged in a parallel positional relationship and spaced apart from each other at intervals of 10 mm to 12 mm in the up-down direction D2.

[0034] A plate support portion 52 is provided between adjacent plate portions 51, 51 in the vertical direction D2. The plate support portion 52 and the side walls 25, 26 are integrally formed. An inter-plate space 53 is formed between adjacent plate portions 51, 51 in the vertical direction D2. A substrate W is inserted into the inter-plate space 53. Above the uppermost plate portion 51, another plate-shaped member is arranged parallel to the plate portion 51. This member is located at the top and acts as a guide for the substrate W being inserted into the substrate storage space 27.

[0035] The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3. The 50 plate portions 51 and the plate-like guide members parallel to the plate portions 51 are positioned parallel to the plate portions 51.

[0036] 2D, 5B, and 6A, a convex portion 511 is provided on the upper surface of the plate portion 51 of the lateral substrate support portion 5. The convex portion 511 protrudes in the upward direction D21 and extends in the lateral direction D3. A substrate W supported by the lateral substrate support portion 5 comes into contact only with the protruding end of the convex portion 511 and does not come into planar contact with the lateral substrate support portion 5. The lateral substrate support portion 5 can support the edges of multiple substrates W while keeping adjacent substrates W among the multiple substrates W spaced apart at a predetermined interval and parallel to each other.

[0037] The protrusion 511 protrudes upward in the upward direction D21 and extends in the lateral direction D3, forming an undercut in the direction of movement (forward direction D11) of the main core C1, which will be described later. Therefore, a slide core C2 that moves inward in the lateral direction D34 is required to form the protrusion 511. The main core C1 and slide core C2 will be described in detail later.

[0038] The number of rear-side substrate support portions 6 is provided, specifically 25, corresponding to each substrate W that can be stored in the substrate storage space 27. The rear-side substrate support portions 6 are positioned in a paired relationship with front retainers 7 (see FIG. 2D ) fixed to the lid 3 in the front-rear direction D1. When a substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the rear-side substrate support portions 6 clamp the edge of the substrate W. The rear-side substrate support portions 6 may, for example, be configured separately from the container body 2 and fixed to the container body 2, or may be formed integrally with the container body 2, or may be formed integrally with the side substrate support portions 5.

[0039] As shown in FIG. 1 , the lid 3 has a generally rectangular shape that roughly matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and when the lid 3 is attached to the opening periphery 28, the lid 3 can close the container body opening 21. An annular seal member 4 is attached to the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1 ), a surface (sealing surface) that faces the surface of a step formed immediately behind the opening periphery 28 D12 when the lid 3 is closing the container body opening 21. The seal member 4 is made of elastically deformable thermoplastic elastomers such as POE (polyoxyethylene), PEE, polyesters, polyolefins, fluororubber, silicone rubber, etc. The seal member 4 is arranged around the outer periphery of the lid 3.

[0040] When the lid 3 is attached to the opening periphery 28, the sealing member 4 is sandwiched between the sealing surface and the inner surface of the lid 3 and elastically deforms, so that the lid 3 hermetically closes the container body opening 21. By removing the lid 3 from the opening periphery 28, it becomes possible to load and unload the substrates W into and from the substrate storage space 27 inside the container body 2.

[0041] The lid 3 is provided with a latch mechanism. The latch mechanism is provided near both left and right ends of the lid 3, and as shown in Fig. 1, includes two upper latch portions 32A that can protrude in an upward direction D21 from the upper edge of the lid 3 and two lower latch portions 32B that can protrude in a downward direction D22 from the lower edge of the lid 3. The two upper latch portions 32A are located near both left and right ends of the upper edge of the lid 3, and the two lower latch portions 32B are located near both left and right ends of the lower edge of the lid 3.

[0042] An operating portion 33 is provided on the outer surface of the lid 3. By operating the operating portion 33 from the front side D11 of the lid 3, the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper and lower edges of the lid 3, or can be made not to protrude from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid 3 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid 3 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening peripheral portion 28 of the container body 2.

[0043] A recess (not shown) is formed inside the lid 3, recessed outward from the board storage space 27. A front retainer 7 (see FIG. 2D) is fixed to the recess (not shown) and the portion of the lid 3 outside the recess.

[0044] The front retainer 7 has front retainer board receiving portions. The front retainer board receiving portions are arranged in pairs, two at a predetermined distance in the left-right direction D3. The front retainer board receiving portions, arranged in pairs in this manner, are arranged in 25 pairs in parallel in the up-down direction D2. When a substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the front retainer board receiving portions clamp and support the edge of the edge of the substrate W.

[0045] Next, the shapes of the inner surface 242 of the lower wall 24 and the inner surface 232 of the upper wall 23 of the container body 2 will be described in detail. The configuration relating to the features of the present invention is generally symmetrical both left and right and top and bottom. Therefore, a description of one of the left and right sides of the configuration relating to the features of the present invention is incorporated into a description of the other of the left and right sides. A description of one of the top and bottom sides of the configuration relating to the features of the present invention is incorporated into a description of the other of the top and bottom sides.

[0046] 3A to 3D, the inner surface 242 (upper surface; the surface forming the board storage space 27) of the lower wall 24 includes an inner region 243 located on the inner side D34 in the lateral direction D3, and outer regions 244, 244 located on both outer sides D33 in the lateral direction D3 relative to the inner region 243. The inner region 243 has a generally trapezoidal shape extending from the rear side D12 to the front side D11 (the rear side D12 is the upper base and the front side D11 is the lower base) in a top view. The outer region 244 is adjacent to the outer side D33 in the lateral direction D3 relative to the inner region 243.

[0047] The outer region 244 is displaced toward the outer side D23 in the up-down direction D2 as it moves toward the inner side D34 in the lateral direction D3. In this embodiment, the displaced shape is a slope that is inclined flatly with respect to the D1-D3 plane. The slope may be composed of multiple slope portions. The slope angle θ244 (see FIGS. 3B and 7B) is, for example, 0.5 to 1.5 degrees. It is preferable that the entire outer region 244 is displaced, but only a portion of the outer region 244 may be displaced.

[0048] The inner region 243 includes a step surface 247 recessed toward the outer side D23 in the vertical direction D2 relative to the outer region 244, and a guide portion 248 displaced toward the inner side D24 in the vertical direction D2 relative to the step surface 247. The height H247 of the step surface 247 at the outer side D33 in the horizontal direction D3 is, for example, 0.5 to 1.5 mm. The width W247 of the step surface 247 increases from the rear side D12 toward the front side D11. The step surface 247 displaces toward the outer side D23 in the vertical direction D2 as it moves toward the inner side D34 in the horizontal direction D3. For example, the inclination angle θ247 of the step surface 247 (see FIG. 3B ) is 0.5 to 1.5 degrees. The degree of displacement of the outer region 244 (typically, the inclination angle θ244) is equal to the degree of displacement of the step surface 247 (typically, the inclination angle θ247 shown in FIG. 3B ).

[0049] The guide portion 248 extends from a position on the inner surface 242 of the lower wall 24 that is further rearward D12 than the front end 2421 to a position further forward D11 than the rear end 2422, but does not extend all the way to the rear end 2422.

[0050] 4A to 4D, the inner surface 232 (lower surface; the surface forming the board storage space 27) of the upper wall 23 has a configuration basically similar to that of the inner surface 242 of the lower wall 24 in terms of the features of the present invention. A relatively major difference is that the guide portion 248 of the lower wall 24 protrudes inward D24 in the vertical direction D2, while the guide portion 238 of the upper wall 23 is recessed outward D23 in the vertical direction D2.

[0051] The inner surface 232 (lower surface; the surface forming the board storage space 27) of the upper wall 23 includes an inner region 233 located on the inner side D34 in the lateral direction D3, and outer regions 234, 234 located on both outer sides D33 in the lateral direction D3 relative to the inner region 233. The inner region 233 has a generally trapezoidal shape extending from the rear side D12 to the front side D11 (the rear side D12 is the upper base and the front side D11 is the lower base) in a bottom view. The outer region 234 is adjacent to the outer side D33 in the lateral direction D3 relative to the inner region 233.

[0052] The outer region 234 is displaced toward the outer side D23 in the up-down direction D2 as it moves toward the inner side D34 in the lateral direction D3. In this embodiment, the displaced shape is a slope that is inclined flatly with respect to the D1-D3 plane. The slope may be composed of multiple slope portions. The inclination angle θ234 of the outer region 234 (see FIG. 4B ) is, for example, 0.5 to 1.5 degrees. It is preferable that the entire outer region 234 is displaced, but it may also be in a form in which only a portion of the outer region 234 is displaced.

[0053] The inner region 233 includes a step surface 237 recessed toward the outer side D23 in the vertical direction D2 relative to the outer region 234, and a guide portion 238 displaced toward the outer side D23 in the vertical direction D2 relative to the step surface 237. The height H237 of the step surface 237 at the outer side D33 in the horizontal direction D3 is, for example, 0.5 to 1.5 mm. The width W237 of the step surface 237 increases from the rear side D12 toward the front side D11. The step surface 237 displaces toward the outer side D23 in the vertical direction D2 as it moves toward the inner side D34 in the horizontal direction D3. For example, the inclination angle θ237 of the step surface 237 (see FIG. 4B ) is 0.5 to 1.5 degrees. The degree of displacement of the outer region 234 (typically, the inclination angle θ234) is equal to the degree of displacement of the step surface 237 (typically, the inclination angle θ237 shown in FIG. 4B ).

[0054] The guide portion 238 extends from a position on the inner surface 232 of the upper wall 23 that is further rearward D12 than the front end 2321 to a position further forward D11 than the rear end 2322, but does not extend all the way to the rear end 2322.

[0055] Next, the core of the mold that forms the substrate storage space 27 of the container body 2 (the inner surface of the container body 2) and the side substrate support portions 5 will be described. As described above, the side substrate support portions 5 have convex portions 511 that form undercuts. Therefore, in order to integrally mold the substrate storage space 27 of the container body 2 and the side substrate support portions 5, it is necessary to use a main core C1 that moves from within the substrate storage space 27 toward the front side D11 (the side of the container body opening 21) and a slide core C2 that moves toward the inside D34 in the lateral direction D3.

[0056] 3C, 4C, and 5A to 6B, the main core C1 forms at least the entire inner region 243 of the lower wall 24, the entire inner region 233 of the upper wall 23, a portion of the outer region 244 of the lower wall 24 (the region adjacent to the inner region 243), a portion of the outer region 234 of the upper wall 23 (the region adjacent to the inner region 233), and the container body opening 21. The slide core C2 forms at least the remaining portions of the outer region 244 of the lower wall 24, the remaining portions of the outer region 234 of the upper wall 23, and the lateral substrate support portions 5 (plate portions 51, inter-plate spaces 53). The comb-shaped portions C21 (see FIG. 6B) of the slide core C2 form the plate portions 51 and the inter-plate spaces 53.

[0057] A movable-side mounting plate C3 is attached and fixed to the front side D11 of the main core C1. When the movable-side mounting plate C3 moves in the front-rear direction D1, the main core C1 also moves in the front-rear direction D1 in conjunction with the movement of the main core C1 to the front side D11, and the slide core C2 moves inward D34 in the lateral direction D3 in conjunction with the movement of the main core C1 to the front side D11.

[0058] More specifically, the main core C1 facing the entire inner region 243 of the lower wall 24, the entire inner region 233 of the upper wall 23, a portion of the outer region 244 of the lower wall 24 (the region adjacent to the inner region 243), a portion of the outer region 234 of the upper wall 23 (the region adjacent to the inner region 233), and the regions where the container body opening 21 is to be formed moves toward the front side D11. In conjunction with the movement of the main core C1 toward the front side D11, the pair of slide cores C2 in the lateral direction D3 facing the remaining portions of the outer region 244 of the lower wall 24, the remaining portions of the outer region 234 of the upper wall 23, and the regions where the lateral substrate support portions 5 (plate portions 51, spaces between plate portions 53) are to be formed move toward the inside D34 in the lateral direction D3.

[0059] 7A and 7B , during the movement of the slide core C2, the contact area between the surface of the slide core C2 on the outer side D23 in the up-down direction D2 and the outer region 244 of the inner surface 242 of the bottom wall 24 displaced to the outer side D23 in the up-down direction D2 is small. The same is true for the contact area between the surface of the slide core C2 on the outer side D23 in the up-down direction D2 and the outer region 234 of the inner surface 232 of the top wall 23. Therefore, the slide core C2 can easily move smoothly to the inner side D34 in the lateral direction D3. The outer regions 244, 234 where such a relationship exists are formed by the main core C1.

[0060] In addition, as in the comparative example shown in FIG. 7C , if the outer region 244 of the inner surface 242 of the lower wall 24 (the outer region 234 of the inner surface 232 of the upper wall 23) is not displaced outward D23 in the vertical direction D2, the contact area between the surface of the slide core C2 on the outer side D23 in the vertical direction D2 and the outer region 244 of the inner surface 242 of the lower wall 24 (the outer region 234 of the inner surface 232 of the upper wall 23) is large, and therefore, the slide core C2 does not easily move smoothly inward D3 in the lateral direction D3.

[0061] The substrate storage container 1 according to the embodiment configured as described above can provide the following effects. The substrate storage container 1 of this embodiment includes a container body 2 having a container body opening 21 at one end of the front side D11, and a lid 3 that is detachable from the container body opening 21 and can close the container body opening 21. The container body 2 includes a rear wall 22, an upper wall 23, a lower wall 24, and a pair of side walls 25, 26, and includes a cylindrical wall portion 20 whose other end on the rear side D12 is closed by the rear wall 22. The container body opening 21 is formed by one end of the upper wall 23, one end of the lower wall 24, and one end of the side walls 25, 26. In the container body 2, a substrate storage space 27 capable of storing a plurality of substrates W and communicating with the container body opening 21 is formed by the inner surface 232 of the upper wall 23, the inner surface 242 of the lower wall 24, the inner surfaces of the side walls 25, 26, and the inner surface of the rear wall 22. The substrate storage container 1 further includes lateral substrate support portions 5 which are arranged in pairs in the horizontal direction D3 within the substrate storage space 27 and are capable of supporting the edges of multiple substrates W while adjacent substrates W are arranged in parallel with a predetermined distance apart. The lateral substrate support portion 5 and the side walls 25, 26 are formed integrally, and the inner surface 232 of the upper wall 23 and / or the inner surface 242 of the lower wall 24 have inner regions 233, 243 located on the inner side D34 in the horizontal direction D3, and outer regions 234, 244 located on both outer sides D33 in the horizontal direction D3 relative to the inner regions 233, 243, and the outer regions 234, 244 are displaced toward the outer side D23 in the vertical direction D2 as they move toward the inner side D34 in the horizontal direction D3, and the inner regions 233, 243 have step surfaces 237, 247 that are recessed toward the outer side D23 in the vertical direction D2 relative to the outer regions 234, 244, and guide portions 238, 248 that are displaced toward the inner side D24 or the outer side D23 in the vertical direction D2 relative to the step surfaces 237, 247.

[0062] In the substrate storage container 1 according to this embodiment, the main core C1 of the mold is moved from inside the substrate storage space 27 of the container body 2 toward the container body opening 21 (front side D11) to form most or all of the substrate storage space 27, and the slide core C2 is moved toward the inside D34 in the lateral direction D3 to mold all of the side substrate support portions 5 and the remaining part of the substrate storage space 27. According to the substrate storage container 1 according to this embodiment, the slide core C2 moves smoothly toward the inside D34 in the lateral direction D3 during molding.

[0063] More specifically, since the outer regions 234, 244 are displaced toward the outer side D23 in the up-down direction D2 as they move toward the inner side D34 in the lateral direction D3, the contact area between the surface of the slide core C2 on the outer side D23 in the up-down direction D2 and the inner surfaces 232, 242 of the outer regions 234, 244 is small during the process of the slide core C2 moving toward the inner side D34 in the lateral direction D3. Fig. 7C shows that the inner surface 242 of the outer region 244 of the lower wall 24 is displaced downward D22 at an inclination angle θ244, so the contact area between the lower surface of the slide core C2 and the inner surface 242 of the outer region 244 of the lower wall 24 is small. Therefore, the resistance between the slide core C2 and the inner surface 232 of the upper wall 23 and the inner surface 242 of the lower wall 24 is small. Therefore, the slide core C2 moves smoothly toward the inner side D34 in the lateral direction D3 during molding. Furthermore, due to the lack of smooth movement, it is difficult for the cores C1, C2 to rub against the inner surface of the container body 2, or for the cores C1, C2 to drag the molded product, causing the molded product to become misaligned, etc. This makes it possible to prevent deterioration in molding quality due to these factors.

[0064] In addition, in the substrate storage container 1 of this embodiment, the inner regions 233, 243 are provided with step surfaces 237, 247 that are recessed outward D23 in the vertical direction D2 relative to the outer regions 234, 244, and guide portions 238, 248 that are displaced inward D24 or outward D23 in the vertical direction D2 relative to the step surfaces 237, 247.

[0065] Therefore, with the substrate storage container 1 according to this embodiment, the main core C1 moves smoothly toward the front side D11 during molding. More specifically, the step surfaces 237, 247 and the guide portions 238, 248 restrict movement of the main core C1 in the up-down direction D2 and the lateral direction D3. Therefore, movement of the main core C1 is highly directional toward the front side D11. Therefore, the main core C1 moves smoothly toward the front side D11 during molding.

[0066] In this embodiment, the widths W237, W247 of the step surfaces 237, 247 increase from the rear side D12 toward the front side D11. Therefore, according to this embodiment, the main core C1 can move smoothly toward the front side D11 with high directivity toward the front side D11.

[0067] In this embodiment, the guide portions 238, 248 extend toward the rear side D12 from a position farther back than the front end 2321 on the inner surface 232 of the upper wall 23 and / or the front end 2421 on the inner surface 242 of the lower wall 24, and continue to a position farther forward than the rear ends 2322, 2422, but do not extend all the way to the rear ends 2322, 2422. Therefore, according to this embodiment, it is possible to minimize adverse effects on the sealing surface of the container body 2 (for example, poor appearance of the sealing surface) caused by the provision of the guide portions 238, 248.

[0068] The present invention is not limited to the above-described embodiment, and modifications are possible within the technical scope described in the claims. For example, the shape and configuration of the substrate storage container 1 are not limited to those of the above-described embodiment.

[0069] The shape of the inner regions 233, 243 on the inner surface 232 of the upper wall 23 and / or the inner surface 242 of the lower wall 24 is not limited to a substantially trapezoidal shape in top view, but may be a substantially rectangular shape. The shape of the outer regions 234, 244 that displace toward the outer side D23 in the up-down direction D2 as they move toward the inner side D34 in the lateral direction D3 is not limited to a flat inclined surface, but may be, for example, a curved surface. The displacement direction of the guide portions 238, 248 is not limited to the displacement direction in the above embodiment.

[0070] The shape of the undercut in the direction of movement of the main core C1 in the lateral substrate support portion 5 is not limited to the convex portion 511 in this embodiment that protrudes to the upper side D21 and extends in the horizontal direction D3, but may be various types of protrusions or inclinations.

[0071] In this embodiment, both the upper wall 23 and the lower wall 24 have the feature of the present invention: "The inner surface 232 of the upper wall 23 and / or the inner surface 242 of the lower wall 24 have inner regions 233, 243 located on the inner side D34 in the horizontal direction D3, and outer regions 234, 244 located on both outer sides D33 in the horizontal direction D3 relative to the inner regions 233, 243, the outer regions 234, 244 being displaced toward the outer side D23 in the vertical direction D2 as they move toward the inner side D34 in the horizontal direction D3, and the inner regions 233, 243 have step surfaces 237, 247 that are recessed toward the outer side D23 in the vertical direction D2 relative to the outer regions 234, 244, and guide portions 238, 248 that are displaced toward the inner side D24 or the outer side D23 in the vertical direction D2 relative to the step surfaces 237, 247." However, the present invention is not limited to this, and only one of the upper wall 23 or the lower wall 24 may have the feature.

[0072] The movement direction of the slide core C2 is not limited to the inside D34 of the complete horizontal direction D3, but may be approximately the inside D34 of the horizontal direction D3 (inclined by several degrees in three dimensions relative to the inside D34 of the complete horizontal direction D3).

[0073] DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 20 Wall 21 Container body opening 22 Back wall 23 Top wall 232 Inner surface 2321 Front end 2322 Rear end 233 Inner region 234 Outer region 237 Step surface 238 Guide portion 24 Bottom wall 242 Inner surface 2421 Front end 2422 Rear end 243 Inner region 244 Outer region 247 Step surface 248 Guide portion 25 Side wall (first side wall) 26 Side wall (second side wall) 27 Substrate storage space 3 Lid 5 Lateral substrate support portion D1 Front-to-rear direction D11 Front side, front direction D12 Rear side, rear direction D2 Up-to-down direction D23 Outer side in up-to-down direction D24 Inner side in up-to-down direction D3 Lateral direction, lateral direction D33 Outer side in the horizontal direction D34 Inner side in the horizontal direction W Substrate W237 Width of the step surface W247 Width of the step surface

Claims

1. A substrate storage container comprising: a container body having a container body opening at one end on the front side; and a lid that is detachable from the container body opening and can close the container body opening, wherein the container body has a rear wall, an upper wall, a lower wall, and a pair of side walls, and comprises a cylindrical wall portion whose other rear end is closed by the rear wall, the container body opening is formed by one end of the upper wall, one end of the lower wall, and one end of the side wall, and a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening is formed in the container body by the inner surfaces of the upper wall, the inner surfaces of the lower wall, the inner surfaces of the side walls, and the inner surfaces of the rear wall, and the substrate storage container further comprises side substrate support parts that are arranged in pairs laterally within the substrate storage space and can support edges of a plurality of substrates while adjacent substrates of the plurality of substrates are arranged side by side at a predetermined interval, and the side substrate support parts and the side walls are formed integrally, A substrate storage container, wherein the inner surface of the upper wall and / or the inner surface of the lower wall comprises an inner region located inward in the horizontal direction and an outer region located outward in both horizontal directions from the inner region, the outer region being displaced outward in the vertical direction as it moves inward in the horizontal direction, and the inner region comprising a step surface that is recessed outward in the vertical direction relative to the outer region, and a guide portion that displaces inward or outward in the vertical direction relative to the step surface.

2. The substrate storage container according to claim 1, wherein the width of the step surface increases from the rear side to the front side.

3. A substrate storage container as described in claim 1 or 2, wherein the guide portion extends rearward from a position further rearward than the front end on the inner surface of the upper wall and / or the front end on the inner surface of the lower wall, and continues to a position further forward than the rear end, but does not extend all the way to the rear end.

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