Attaching / detaching mechanism and article conveying device

Abstract

This attaching / detaching mechanism is provided on the upper surface of a traction device for coupling a conveyance cart, which conveys an article to be used in a board work machine for performing prescribed board work on a board, and the traction device, which pulls the conveyance cart. The attaching / detaching mechanism couples the traction device and the conveyance cart as the traction device approaches under the conveyance cart and is positioned with respect to the conveyance cart.

Description

Attachment / detachment mechanism and article transport device

[0001] This specification discloses techniques relating to an attachment / detachment mechanism and an article transport device.

[0002] The coupling section described in Patent Document 1 is disposed between the bottom plate of the lower part of the loading platform and the upper surface of the transport vehicle, and couples the dolly body to the transport vehicle that has entered underneath the dolly body so that the dolly body can be towed. When an operator rotates the operating knob of the coupling section described in Patent Document 1, the rear locking member slides from the unlocked position to the locked position, thereby coupling the dolly and the transport vehicle.

[0003] The self-propelled robot described in Patent Document 2 is equipped with a coupling device for holding a basket cart to be transported. The coupling device described in Patent Document 2 includes a coupling claw and a magnet, and secures the basket cart. Specifically, the coupling device described in Patent Document 2 temporarily secures the basket cart by placing a magnet on a rotating member and then rotating the rotating member to couple the basket cart with the coupling claw.

[0004] International Publication No. 2023 / 037498 Japanese Patent Application Laid-Open No. 2020-040459

[0005] In the coupling section described in Patent Document 1, the operator rotates an operating knob to couple the cart and the transport vehicle. In the coupling device described in Patent Document 2, a magnet is placed on a rotating member to temporarily fix the cart and the transport vehicle, and then the rotating member is rotated to couple the cart and the transport vehicle with the coupling claw. In both of the coupling mechanisms described in Patent Document 1, the coupling between the transport cart that transports the articles and the towing device that tows the transport cart can be complicated.

[0006] In view of the above circumstances, this specification discloses an attachment / detachment mechanism and an article transport device that can simplify the connection between a transport cart that transports articles and a towing device that tows the transport cart.

[0007] This specification discloses an attachment / detachment mechanism that is provided on the upper surface of a towing device that tows a transport cart, which transports items used in a substrate-related work machine that performs specified substrate-related work on a substrate, and that connects the transport cart, wherein the towing device enters below the transport cart and is positioned relative to the transport cart, and the attachment / detachment mechanism connects the towing device to the transport cart.

[0008] The present specification also discloses an article transport device including a transport cart for transporting articles used in a substrate-related operation machine that performs a predetermined substrate-related operation on a substrate, and a towing device coupled to the transport cart for towing the transport cart, wherein the towing device is positioned relative to the transport cart by entering below the transport cart, and includes an attachment / detachment mechanism on an upper surface of the towing device for connecting the towing device to the transport cart.

[0009] This specification discloses the technical idea of ​​changing "the detachable mechanism according to claim 5" to "the detachable mechanism according to claim 5 or claim 6" in claim 7 of the claims originally attached to the application (hereinafter referred to as "original claims"). Also, this specification discloses the technical idea of ​​changing "the detachable mechanism according to claim 5" to "the detachable mechanism according to any one of claims 5 to 8" in claim 9 of the original claims.

[0010] Furthermore, this specification discloses the technical idea of ​​changing "the detachable mechanism according to claim 9" to "the detachable mechanism according to claim 9 or claim 10" in claim 11 originally claimed. Also, this specification discloses the technical idea of ​​changing "the detachable mechanism according to claim 9" to "the detachable mechanism according to any one of claims 9 to 11" in claim 12 originally claimed. Furthermore, this specification discloses the technical idea of ​​changing "the detachable mechanism according to claim 5" to "the detachable mechanism according to any one of claims 5 to 12" in claim 13 originally claimed.

[0011] The above-described attachment / detachment mechanism allows the towing device to enter below the transport cart and be positioned relative to the transport cart, and the towing device and the transport cart can be coupled together. The above-described attachment / detachment mechanism also applies to the article transport device.

[0012] 1 is a plan view showing an example of the configuration of production equipment. FIG. 2 is a partial perspective view showing an example of the configuration of a station and a transport cart. FIG. 3 is a perspective view showing an example of a state in which a storage case capable of storing articles is mounted on the transport cart of FIG. 2. FIG. 4 is a perspective view showing another example of a state in which a storage case capable of storing articles is mounted on the transport cart of FIG. 2. FIG. 5 is a perspective view showing an example of a towing device and a detachable mechanism. FIG. 6 is a perspective view showing an example of a towing device having a detachable mechanism mounted on its upper surface. FIG. 7 is a perspective view showing an example of the configuration of the bottom of the transport cart. FIG. 8 is a see-through perspective view of the detachable mechanism in a state in which the towing device is positioned relative to the transport cart. FIG. 9 is a perspective view showing an example of the detachable mechanism in a state in which the connecting member is stored on the upper surface of the towing device. FIG. 10 is a perspective view showing an example of the detachable mechanism in a state in which the connecting member protrudes above the towing device. FIG. 11 is a perspective view showing an example of the bottom of the transport cart to which the connecting member is connected. FIG. 12 is a partial perspective view showing an example of the detachable mechanism before the restriction of the connecting member is released. FIG. 13 is a partial perspective view showing an example of the detachable mechanism after the restriction of the connecting member is released. FIG. 14 is a schematic view showing an example of the configuration of a connecting portion and a connected portion. FIG. 15 is a flowchart showing an example of a method for connecting the transport cart and the towing device.

[0013] 1. Embodiment 1-1. Configuration Example of Production Equipment 1 The mounting / removal mechanism 80 and the item transport device 90 can be applied to various production facilities 1 that produce product boards. As shown in FIG. 1 , the production equipment 1 of the embodiment includes at least one (four in this figure) component mounting machine 10, an exchange system 30, an item moving device 40, a station group 50, a transport cart 60, a towing device 70, a line control device LC0, a production management device WC0, and a transport management device CC0. The mounting / removal mechanism 80 is provided in the towing device 70. The item transport device 90 includes the transport cart 60 and the towing device 70. In the following description, the X direction is the horizontal width direction of the component mounting machine 10 and the transport direction of the board. The Y direction is the horizontal depth direction of the component mounting machine 10 and a direction perpendicular to the X direction in a horizontal plane. The Z direction is the vertical direction perpendicular to the X and Y directions.

[0014] At least one (four) component mounting machines 10 are installed along the board transport direction (X direction). The component mounting machine 10 is included in a board-related operation machine WM0 that performs predetermined board-related operations on boards. The component mounting machine 10 loads a board, positions it at a predetermined position, mounts multiple components on the positioned board, and then removes the board with the mounted components. In other words, the board-related operations performed by the component mounting machine 10 include board loading, positioning, and removal. Furthermore, the board-related operations performed by the component mounting machine 10 also include component supply, picking, and mounting. The board-related operation machine WM0 also includes a printer that prints solder on a board, an inspection machine that inspects boards with printed solder and boards with mounted components, a reflow oven that heats boards with mounted components to bond the components to the board, and so on. The board-related operation machine WM0 is not limited to the component mounting machine 10.

[0015] For example, the component mounting machine 10 is equipped with a component supply device that supplies components to be mounted on a board. The component supply device is provided with a plurality of detachable feeders 20. The feeders 20 are included in the item AR0 used in the component supply operation by the component mounting machine 10. The component supply device also has at least one slot that can accommodate the plurality of feeders 20. The component supply device of the embodiment is provided at two positions, a first position and a second position.

[0016] The first position operably holds the installed feeder 20. The operation of the feeder 20 installed at the first position is controlled by the component mounting machine 10 during work on boards, and components are sequentially supplied to a take-out section provided at a predetermined position on the feeder 20. The second position is located below the first position and stocks the installed feeder 20. In other words, the second position holds the feeder 20 used in production as a backup and temporarily holds the feeder 20 used in production.

[0017] The operation of replacing the feeder 20 between the first position and the second position, and the operation of replenishing and recovering the feeder 20 are performed using an exchange system 30 and an article moving device 40. Specifically, as shown in FIG. 1 , the exchange system 30 includes a first rail 31 and a second rail 32. The first rail 31 and the second rail 32 form a travel path for the article moving device 40. The first rail 31 and the second rail 32 are provided along the arrangement direction of at least one (four) component mounting machine 10 (the board transport direction (X direction)). The first rail 31 and the second rail 32 extend across substantially the entire area of ​​the production facility 1 in the board transport direction (X direction).

[0018] The article moving device 40 is provided so as to be able to travel along a travel path formed by a first rail 31 and a second rail 32. The article moving device 40 receives power from a power transmitting unit provided on the first rail 31 via a power receiving unit provided opposite the power transmitting unit through contactless power supply. The power received by the power receiving unit is used for the travel of the article moving device 40, predetermined work, etc., via a power receiving circuit. The article moving device 40 detects its position (current position) on the travel path, for example, using a position detection device. The position detection device can detect the position (current position) of the article moving device 40 on the travel path, for example, by optical position detection, position detection using electromagnetic induction, etc.

[0019] The above-mentioned predetermined operations also include an exchange operation in which equipment detachably provided on the substrate-related operation machine WM0, such as the component mounting machine 10, is exchanged between the substrate-related operation machine WM0 and the component mounting machine WM0. In the embodiment, the article moving device 40 performs an exchange operation of the feeder 20, which is the feeder 20 that supplies components to be mounted on a board, between the article moving device 40 and the component mounting machine 10, which is the substrate-related operation machine WM0. The article moving device 40 can also perform an exchange operation of the feeder 20 between the station group 50 and the station group 50.

[0020] Specifically, the article moving device 40 performs a feeder 20 replacement operation between a first position and a second position of the component supply device of the component mounting machine 10. The article moving device 40 also transports the feeder 20 from the station group 50 to the first position or the second position of the component supply device to perform a feeder 20 replenishment operation. Furthermore, the article moving device 40 transports the feeder 20 that is no longer needed by the component mounting machine 10 from the component supply device to the station group 50 to perform a feeder 20 recovery operation.

[0021] The station group 50 is provided on the substrate carry-in side (left side of the drawing in FIG. 1 ) of the production facility 1. As shown in FIGS. 1 and 2 , the station group 50 is provided with at least one station 50s (two in the drawing) that can transfer an item AR0 used in a substrate-related operation machine WM0 such as a feeder 20. The station 50s may take various forms as long as it can transfer the item AR0. For example, the station 50s is equipped with a plurality of rollers and can transfer the item AR0 from a transport cart 60 and can transfer the item AR0 to the transport cart 60.

[0022] The station 50s can also store a storage case AC0 shown in FIG. 3 that can store an item AR0. In this case, the station 50s can also use a plurality of rollers to load the storage case AC0 from a transport cart 60 and load the storage case AC0 back to the transport cart 60. The storage case AC0 may have, for example, a plurality of slots, each of which can be equipped with a feeder 20. The feeder 20 installed in the slot of the storage case AC0 loaded into the station 50s is supplied with power from the station 50s via the storage case AC0, and becomes capable of communicating with the line control device LC0. As a result, the identification information of the slot of the storage case AC0 and the feeder 20 installed in that slot are associated and recorded in the line control device LC0.

[0023] The transport cart 60 transports an item AR0 used in the substrate-related performing operation machine WM0. In this embodiment, the transport cart 60 transports the item AR0 to or from the station 50s. The transport of the item AR0 by the transport cart 60 is not limited to the station 50s; if possible, the transport cart 60 may transport the item AR0 directly to or from the substrate-related performing operation machine WM0. The transport cart 60 may take various forms as long as it can transport the item AR0. For example, as shown in FIGS. 2 and 3 , the transport cart 60 includes a main body 60a, a loading platform 60b, and multiple (e.g., four) wheels 60c. The loading platform 60b is provided on top of the main body 60a and can carry the item AR0. Furthermore, as shown in FIG. 3 , the loading platform 60b can also carry a storage case AC0 capable of accommodating the item AR0.

[0024] The loading platform 60b is equipped with a plurality of rollers 60b1 and is capable of carrying the item AR0 into the station 50s and carrying the item AR0 out of the station 50s. The loading platform 60b is also capable of carrying the storage case AC0 into the station 50s and carrying the storage case AC0 out of the station 50s. The loading platform 60b secures the item AR0 or the storage case AC0 except when carrying the item AR0 or the storage case AC0 in or out. When carrying the item AR0 or the storage case AC0 in or out, the loading platform 60b releases the securement of the item AR0 or the storage case AC0.

[0025] A plurality of (four) wheels 60c are provided on the lower part of the main body 60a, and the transport cart 60 is towed by a traction device 70. Specifically, the traction device 70 is connected to the main body 60a so as to be able to tow the transport cart 60 when the traction device 70 is inserted below the main body 60a. The traction device 70 is not limited as long as it is capable of automatic travel. For example, a known automatic guided vehicle (AGV), an autonomous mobile robot (AMR), or the like can be used as the traction device 70.

[0026] The line control device LC0 is configured to be able to input and output various data via a network to and from each device that makes up the production facility 1. The line control device LC0 monitors the operating status of the production facility 1, and controls the substrate-related operation machine WM0 such as the component mounting machine 10, the exchange system 30, the article moving device 40, and the station group 50. The line control device LC0 stores various data for controlling the substrate-related operation machine WM0, the exchange system 30, the article moving device 40, and the station group 50.

[0027] The production control device WC0 can manage at least one (one in the figure) production facility 1. The production control device WC0 is configured to be able to communicate with the line control device LC0 of at least one (one) production facility 1, and manages the production of product boards by at least one (one) production facility 1. The transport control device CC0 can manage the transport carts 60 and the towing devices 70.

[0028] The transport management device CC0 is capable of communicating with the transport cart 60, the towing device 70, the line control device LC0, and the production management device WC0, and controls the transport cart 60 to travel and transfer the item AR0 according to the production status of the product boards in the production facility 1. For example, if the towing device 70 is an autonomous transport robot, the towing device 70 can move while recognizing its own position in the production facility 1 using a known camera, sensor, or the like. If the towing device 70 is an unmanned transport vehicle, the towing device 70 can move using a guide unit such as a magnetic tape, for example.

[0029] When the transport cart 60 arrives at the target station 50s, it sends the item AR0 or storage case AC0 to the station 50s, and the station 50s receives the item AR0 or storage case AC0 from the transport cart 60. The station 50s can also send the item AR0 or storage case AC0 to the transport cart 60, and the transport cart 60 can also receive the item AR0 or storage case AC0 from the station 50s.

[0030] Furthermore, the transport cart 60 can send the item AR0 or storage case AC0 to one station 50s, move to another station 50s, and receive the item AR0 or storage case AC0 from the station 50s. The transport cart 60 can also receive the item AR0 or storage case AC0 from one station 50s, move to the other station 50s, and send the item AR0 or storage case AC0 received from the first station 50s to the other station 50s. The item AR0 can be delivered while it is housed in the storage case AC0, or it can be delivered without being housed in the storage case AC0.

[0031] Furthermore, the item AR0 is not limited to the feeder 20. The item AR0 may be, for example, a mask used in solder printing, a substrate support member capable of supporting a substrate, or the like. As shown in FIG. 4 , for example, the mask can be transported in a storage case AC0 and transferred in the storage case AC0. In this case, the transfer mechanism provided on the side of the station 50s can grasp the storage case AC0 containing the mask and transfer it from the transport cart 60 to the station 50s. Furthermore, the transfer mechanism provided on the side of the station 50s can grasp the storage case AC0 containing the mask and transfer it from the station 50s to the transport cart 60.

[0032] 1-2. Configuration Example of Attachment / Detachment Mechanism 80 There is a demand for simplifying the connection between the transport cart 60 that transports the article AR0 and the towing device 70 that tows the transport cart 60. Therefore, as shown in Figures 5 and 6, an attachment / detachment mechanism 80 is provided on the upper surface 70u of the towing device 70. As shown in Figures 3 and 4, the attachment / detachment mechanism 80 allows the towing device 70 to enter below the transport cart 60 and be positioned relative to the transport cart 60, and can also connect the towing device 70 to the transport cart 60.

[0033] The detachment mechanism 80 may take various forms as long as it can connect the towing device 70 and the transport cart 60 as described above. For example, the detachment mechanism 80 may include a connecting member 81 and a driving unit 82. The detachment mechanism 80 may also include a moving mechanism 80s and a guide mechanism 80g. The detachment mechanism 80 may also include a guided member 83. The detachment mechanism 80 may also include a connecting unit 84. As shown in FIGS. 5 and 6 , the detachment mechanism 80 of this embodiment includes a connecting member 81, a driving unit 82, a moving mechanism 80s, a guide mechanism 80g, a guided member 83, and a connecting unit 84.

[0034] The same applies to the transport cart 60, which may take various forms. For example, the transport cart 60 may include a forward direction guide member 61. The transport cart 60 may also include a backward direction guide member 62. The transport cart 60 may also include a connected portion 63. As shown in FIG. 7 , the transport cart 60 of this embodiment includes a forward direction guide member 61, a backward direction guide member 62, and a connected portion 63. The features described in this specification may be selected and applied as appropriate. The features described in this specification may also be combined as appropriate.

[0035] As shown in FIG. 6 , for example, the detachable mechanism 80 can include a connecting member 81 and a drive unit 82. The connecting member 81 is a member that protrudes above the towing device 70 and can be connected to the transport cart 60. The drive unit 82 drives the connecting member 81 to protrude from the upper surface 70u of the towing device 70. In the above embodiment, the drive unit 82 drives the connecting member 81 to protrude above the towing device 70, thereby positioning the towing device 70 relative to the transport cart 60 and connecting the connecting member 81 to the transport cart 60. The drive unit 82 only needs to be able to cause the connecting member 81, which is housed in the upper surface 70u of the towing device 70, to protrude above the towing device 70, and the connecting member 81 and the drive unit 82 can take various forms.

[0036] The same applies to positioning, and various configurations can be used to position the towing device 70 relative to the transport cart 60. For example, as shown in Fig. 7, the transport cart 60 can be provided with a travel direction side guide member 61. The travel direction side guide member 61 is a member that is provided above the towing device 70 on the travel direction side (arrow FS0 side) when the transport cart 60 is connected to the towing device 70, and guides the towing device 70 to a predetermined position when positioning the towing device 70 in the forward / backward direction (arrow FB0 direction).

[0037] In the above embodiment, as shown in Fig. 6, the attachment / detachment mechanism 80 can include a guided member 83. The guided member 83 is a member provided on the traveling direction side (arrow FS0 side) of the towing device 70, and is guided by the traveling direction-side guiding member 61. In this embodiment, as shown in Fig. 8, when the towing device 70 enters below the transport cart 60, the guided member 83 is guided by the traveling direction-side guiding member 61, and the towing device 70 is positioned at a predetermined position in the traveling / retreating direction (arrow FB0 direction).

[0038] The forward direction guiding member 61 and the guided member 83 may take various forms as long as they can position the traction device 70 relative to the transport cart 60 as described above. For example, as shown in Figures 6 and 7, the forward direction guiding member 61 and the guided member 83 may each be V-shaped. The forward direction guiding member 61 is provided on the bottom 60d of the transport cart 60 together with the backward direction guiding member 62 and the connected portion 63, which will be described later. In this case, the V-shaped guided member 83 is guided by the forward direction guiding member 61, which is also V-shaped, and the traction device 70 is positioned at a predetermined position in the forward / backward direction (the direction of arrow FB0).

[0039] As shown in Figures 6 and 7, the travel direction guiding member 61 and the guided member 83 can be provided symmetrically in the advancing / retreating direction (direction of arrow FB0) of the traction device 70. The travel direction guiding member 61 and the guided member 83 can be formed into similar V-shapes. In this case, as shown in Figure 8, the guided member 83 can be in close surface contact with the travel direction guiding member 61. The predetermined position corresponds to the position in the advancing / retreating direction (direction of arrow FB0) of the traction device 70 when the guided member 83 is in surface contact with the travel direction guiding member 61.

[0040] 6 to 8 , for example, each of the travel direction side guiding member 61 and the guided member 83 can be formed in a V shape so as to gradually narrow in width toward the travel direction (direction of arrow FD0) of the traction device 70. Also, each of the travel direction side guiding member 61 and the guided member 83 can be formed in a V shape so as to gradually widen in width toward the travel direction (direction of arrow FD0) of the traction device 70. In other words, each of the travel direction side guiding member 61 and the guided member 83 can be formed in a V shape so as to gradually change in width toward the travel direction (direction of arrow FD0) of the traction device 70.

[0041] 7, the transport cart 60 may also include a rearward direction guide member 62. The rearward direction guide member 62 is a member that is provided above the towing device 70 on the rearward direction side (arrow BS0 side) when the transport cart 60 is coupled to the towing device 70, and guides the towing device 70 to a specified position in positioning the towing device 70 in the width direction (arrow WD0 direction) perpendicular to the forward / backward direction (arrow FB0 direction) of the towing device 70 on a horizontal plane.

[0042] 9 and 10 , after the traction device 70 is positioned at a predetermined position in the forward / backward direction (direction of arrow FB0), the drive unit 82 moves the connecting member 81 in the backward direction (direction of arrow BD0) of the traction device 70, causing the connecting member 81 to protrude above the traction device 70. In this embodiment, as shown in FIG. 11 , when the connecting member 81 protruding above the traction device 70 moves in the backward direction (direction of arrow BD0) of the traction device 70, the connecting member 81 is guided by the backward direction guide member 62 and is positioned at a predetermined position in the width direction (direction of arrow WD0).

[0043] The reverse direction guide member 62 may take various forms as long as it can position the traction device 70 relative to the transport cart 60 as described above. As shown in FIG. 7 , for example, the reverse direction guide member 62 may include a tapered portion 62a formed in a V-shape. In this case, as shown in FIG. 11 , the connecting member 81 protruding upward from the traction device 70 is guided by the tapered portion 62a formed in a V-shape, and the traction device 70 is positioned at a predetermined position in the width direction (direction of arrow WD0). Furthermore, the connecting member 81 protruding upward from the traction device 70 is guided along the tapered portion 62a and connected to the reverse direction guide member 62.

[0044] As shown in Fig. 7, the tapered portion 62a formed in a V-shape can be provided symmetrically in the forward / backward direction (direction of arrow FB0) of the traction device 70. The specified position corresponds to the position in the width direction (direction of arrow WD0) of the traction device 70 in a state where the connecting member 81 protruding upward from the traction device 70 is connected to the backward direction guide member 62. As shown in Figs. 7 and 11, for example, the tapered portion 62a can be formed in a V-shape so as to gradually narrow in width toward the backward direction (direction of arrow BD0) of the traction device 70.

[0045] Furthermore, if the tip of the connecting member 81 protruding above the traction device 70 is formed in a V shape, the tapered portion 62a can also be formed in a V shape so as to gradually widen in the retreat direction (arrow BD0 direction) of the traction device 70. In other words, the tapered portion 62a can be formed in a V shape so that the width gradually changes in the retreat direction (arrow BD0 direction) of the traction device 70.

[0046] The drive unit 82 can cause the connecting member 81 to protrude above the towing device 70 by various methods, and the manner in which the connecting member 81 protrudes above the towing device 70 is not limited. For example, the drive unit 82 can cause the connecting member 81 to protrude above the towing device 70 by using a biasing member 82s such as a spring. For example, the biasing member 82s can apply a biasing force to the connecting member 81 in the traveling direction of the towing device 70 (the direction of arrow FD0). However, as shown in FIG. 9 , the connecting member 81 stored in the upper surface 70u of the towing device 70 is restricted from protruding above the towing device 70 by the biasing member 82s.

[0047] 10 , when the drive unit 82 moves the connecting member 81 in the backward direction (direction of arrow BD0) of the towing device 70, the drive unit 82 releases the restriction on the connecting member 81, causing the connecting member 81 to protrude above the towing device 70. For example, the drive unit 82 can release the restriction on the connecting member 81 just before the position (release position) where the backward direction guide member 62 of the transport cart 60 is provided in the forward / backward direction (direction of arrow FB0) of the towing device 70, causing the connecting member 81 to protrude above the towing device 70. For example, the drive unit 82 can include a motor 82a. The attachment / detachment mechanism 80 can include a movement mechanism 80s and a guide mechanism 80g.

[0048] The moving mechanism 80s uses the power of the motor 82a to move the connecting member 81 in the forward / backward direction of the traction device 70 (the direction of the arrow FB0). The motor 82a and the moving mechanism 80s are not limited as long as they can move the connecting member 81 as described above. The moving mechanism 80s may be, for example, a known sliding mechanism such as a belt mechanism. For example, as shown in FIG. 12 , the moving mechanism 80s includes a pulley 80sp and a belt 80sb. The connecting member 81 is connected to the belt 80sb of the moving mechanism 80s. As the motor 82a rotates, the belt 80sb moves, moving the connecting member 81 in the backward direction of the traction device 70 (the direction of the arrow BD0). The guide mechanism 80g guides the operating member 81a provided on the connecting member 81 as the moving mechanism 80s moves, preventing the connecting member 81 from protruding upward, until the moving mechanism 80s moves to a release position in the forward / backward direction of the traction device 70 (the direction of the arrow FB0).

[0049] As shown in Figures 12 and 13, the actuating member 81a may be, for example, a pin member. The actuating member 81a moves together with the connecting member 81 in the backward direction of the traction device 70 (in the direction of arrow BD0) until it reaches the release position. As shown in Figure 12, when the connecting member 81 reaches the release position, the actuating member 81a rides up onto the guide mechanism 80g. The actuating member 81a then moves along an inclined surface provided on the guide mechanism 80g and slides downward. This allows the connecting member 81 to rotate about the rotation shaft 81b, and the restriction on the connecting member 81 is released.

[0050] 13 , when the restriction on the connecting member 81 is released, the connecting member 81 is rotated by the biasing member 82s, and the connecting member 81 protrudes above the towing device 70. In this way, when the moving mechanism 80s moves the connecting member 81 in the backward direction of the towing device 70 (the direction of the arrow BD0), the restriction on the connecting member 81 by the guide mechanism 80g is released at the release position, and the connecting member 81 is rotated by the biasing member 82s, and the connecting member 81 protrudes above the towing device 70.

[0051] The detachable mechanism 80 may include a connecting portion 84. The connecting portion 84 electrically connects the towing device 70 and the transport cart 60. In this case, the transport cart 60 may include a connected portion 63. The connected portion 63 is electrically connected to the connecting portion 84. The connecting portion 84 and the connected portion 63 may be formed using connecting members that are mechanically and electrically connectable, such as connectors. Furthermore, the connecting portion 84 and the connected portion 63 may also be formed using connecting members that are electrically connectable without contact, such as optical communication or contactless power supply.

[0052] For example, as shown in FIG. 8 , the drive unit 82 can move the connecting portion 84 in the traveling direction of the towing device 70 (direction of arrow FD0) to electrically connect the connecting portion 84 to the connected portion 63. Furthermore, the connecting portion 84 and the connected portion 63 can be connected at a timing different from the timing at which the towing device 70 and the transport cart 60 are coupled, but it is preferable to connect them at the same timing as the timing at which the towing device 70 and the transport cart 60 are coupled. As described above, the drive unit 82 includes a motor 82a, and the attachment / detachment mechanism 80 includes a moving mechanism 80s. In this case, the moving mechanism 80s can use the power of the motor 82a to move the coupling member 81 in the retreating direction of the towing device 70 (direction of arrow BD0) and move the connecting portion 84 in the traveling direction of the towing device 70 (direction of arrow FD0).

[0053] 12 and 13 , a connecting member 81 is connected to a lower belt 80sb of the moving mechanism 80s, and the belt 80sb moves with the rotation of the motor 82a, moving the connecting member 81 in the backward direction (arrow BD0 direction) of the towing device 70. A connecting portion 84 is connected to an upper belt 80sb of the moving mechanism 80s, and the belt 80sb moves with the rotation of the motor 82a, moving the connecting member 81 in the forward direction (arrow FD0 direction) of the towing device 70. As a result, the connecting portion 84 and the connected portion 63 are connected at the same timing as the towing device 70 and the transport cart 60 are connected.

[0054] Furthermore, a floating connector FC0 can be used when a connecting member that can be mechanically and electrically connected, such as a connector, is used for the connecting portion 84 and the connected portion 63. For example, as shown in Fig. 14, in the floating connector FC0, the connected portion 63 is provided so that it cannot move relative to the connecting portion 84, and the connecting portion 84 is provided so that it can move relative to the connecting portion 84 in a plane 80p that is perpendicular to the connection direction with the connected portion 63 (the direction of arrow CN0). This facilitates mechanical connection between the connecting portion 84 and the connected portion 63.

[0055] The connecting portion 84 and the connected portion 63 include a power connecting portion C1 and a signal connecting portion C2. A power line capable of transmitting electric power is connected to the power connecting portion C1. For example, power (driving power) can be supplied to the transport cart 60 from the battery of the towing device 70 via the power connecting portion C1, eliminating the need for a power source to be mounted on the transport cart 60. The transport cart 60 can operate various devices using the driving power supplied from the towing device 70. A signal line capable of transmitting control signals is connected to the signal connecting portion C2. The detachable mechanism 80 can control the transport cart 60 via the signal connecting portion C2 of the connecting portion 84.

[0056] The drive unit 82 can move the connecting member 81 protruding above the towing device 70 in the traveling direction of the towing device 70 (the direction of the arrow FD0) while storing the connecting member 81 in the upper surface 70u of the towing device 70, thereby releasing the connection between the towing device 70 and the transport cart 60. As described above, for example, the drive unit 82 includes a motor 82a, and the attachment / detachment mechanism 80 includes a moving mechanism 80s and a guide mechanism 80g. The drive unit 82 rotates the motor 82a in a direction opposite to the rotation direction of the motor 82a when moving the connecting member 81 in the retreating direction of the towing device 70 (the direction of the arrow BD0). This allows the drive unit 82 to move the connecting member 81 protruding above the towing device 70 in the traveling direction of the towing device 70 (the direction of the arrow FD0).

[0057] The connecting member 81 protruding above the towing device 70 moves in the direction of travel of the towing device 70 (in the direction of arrow FD0) to a release position. When the connecting member 81 reaches the release position, the operating member 81a moves along an inclined surface provided on the guide mechanism 80g and rides up onto the guide mechanism 80g. This causes the connecting member 81 to rotate about the rotation shaft 81b in the direction opposite to that at the time of release and be housed in the upper surface 70u of the towing device 70. The connecting member 81 housed in the upper surface 70u of the towing device 70 is restricted from protruding upward from the towing device 70 by the biasing member 82s. The connecting member 81 and the operating member 81a then move further in the direction of travel of the towing device 70 (in the direction of arrow FD0) beyond the release position and return to their pre-release states.

[0058] As shown in Fig. 3, for example, the transport cart 60 can transport the feeder 20. Furthermore, as shown in Fig. 4, the transport cart 60 can also transport a mask. The transport cart 60 can transport not only the feeder 20 and the mask, but also various other items AR0 used in the substrate-related performing machine WM0. Thus, different types of items AR0 to be transported may have different shapes, weights, etc., and multiple types of transport carts 60 capable of transporting different types of items AR0 may be used.

[0059] In this case, for example, if the arrangement of the backward direction guide members 62 in the transport carts 60 differs, multiple types of attachment / detachment mechanisms 80 are required that match the arrangement of the backward direction guide members 62. Similarly, if the arrangement of the connected parts 63 in the transport carts 60 differs, multiple types of attachment / detachment mechanisms 80 are required that match the arrangement of the connected parts 63. Therefore, when multiple types of transport carts 60 that can transport different types of articles AR0 are provided, it is preferable that the arrangement of the backward direction guide members 62 in the transport carts 60 and the arrangement of the connected parts 63 in the transport carts 60 are the same for each of the multiple types of transport carts 60.

[0060] As a result, the towing device 70 can be connected to multiple types of transport carts 60 using one type of attachment / detachment mechanism 80. The same applies to the arrangement of the forward direction guide members 61 on the transport carts 60. In other words, the arrangement of the forward direction guide members 61 on the transport carts 60, the arrangement of the backward direction guide members 62 on the transport carts 60, and the arrangement of the connected portions 63 on the transport carts 60 may be the same for each of the multiple types of transport carts 60.

[0061] 1-3. Configuration Example of Item Transport Apparatus 90 The item transport apparatus 90 includes a transport cart 60 and a towing device 70. The transport cart 60 transports an item AR0 used in a substrate-related operation machine WM0 that performs a predetermined substrate-related operation on a substrate. The towing device 70 is connected to the transport cart 60 and tows the transport cart 60. The towing device 70 enters below the transport cart 60 and is positioned relative to the transport cart 60, and includes an attachment / detachment mechanism 80 on an upper surface 70u of the towing device 70 that connects the towing device 70 to the transport cart 60. Therefore, what has already been described about the attachment / detachment mechanism 80 also applies to the item transport apparatus 90. Note that duplicated explanations will be omitted in this specification.

[0062] 1-4. Example of a Method for Connecting the Transport Cart 60 and the Traction Device 70 As shown in FIG. 15, the method for connecting the transport cart 60 and the traction device 70 includes a positioning step and a connecting step. The positioning step is a step of positioning the traction device 70 relative to the transport cart 60 (step S11). Specifically, the traction device 70 moves in the forward direction (direction of arrow FD0) until the guided member 83 of the attachment / detachment mechanism 80 comes into close contact with the forward direction guiding member 61 of the transport cart 60. When the guided member 83 comes into close contact with the forward direction guiding member 61, the traction device 70 is positioned at a predetermined position in the forward / backward direction (direction of arrow FB0).

[0063] The coupling and connecting step refers to a step of coupling the towing device 70 and the transport cart 60 and electrically connecting them (step S12). Specifically, after the towing device 70 is positioned at a predetermined position in the forward / backward direction (the direction of arrow FB0), the drive unit 82 moves the connecting member 81 in the backward direction (the direction of arrow BD0) of the towing device 70, causing the connecting member 81 to protrude above the towing device 70. The drive unit 82 also moves the connecting portion 84 in the forward direction (the direction of arrow FD0) of the towing device 70, electrically connecting the connecting portion 84 to the connected portion 63. Thus, what has been described above with respect to the attachment / detachment mechanism 80 and the item transport device 90 also applies to the method of connecting the transport cart 60 and the towing device 70. The method of connecting the transport cart 60 and the towing device 70 may include the matters already described herein, as appropriate. Furthermore, redundant description will be omitted in this specification.

[0064] 2. Example of Effect of the Embodiment According to the attachment / detachment mechanism 80, the towing device 70 can enter below the transport cart 60 and be positioned relative to the transport cart 60, and the towing device 70 can be coupled to the transport cart 60. What has been described above about the attachment / detachment mechanism 80 can also be applied to the item transport device 90.

[0065] 3. Other Configurations For example, the detachable mechanism 80 may be provided on the side of the towing device 70. In this case, the towing device 70 translates laterally relative to the transport cart 60, and the detachable mechanism 80 connects the towing device 70 to the transport cart 60. In this configuration, in the above description, "the upper surface 70u of the towing device 70" should be read as "the side surface of the towing device 70." Also, in the above description, "the towing device 70 enters below the transport cart 60" should be read as "the towing device 70 translates laterally relative to the transport cart 60." Furthermore, in the above description, "above the towing device 70" should be read as "to the side of the towing device 70." The same applies to the article transport device 90 equipped with the above-described detachable mechanism 80. The same applies to the method of connecting the transport cart 60 and the towing device 70 using the above-described detachable mechanism 80.

[0066] 60: transport cart, 61: forward direction guide member, 62: backward direction guide member, 62a: tapered portion, 63: connected portion, 70: traction device, 70u: upper surface, 80: attachment / detachment mechanism, 81: coupling member, 81a: actuation member, 82: drive unit, 82a: motor, 82s: urging member, 83: guided member, 84: connection portion, 80s: movement mechanism, 80g: guide mechanism, 80p: flat surface, 90: article transport device, AR0: article, FC0: floating connector, WM0: substrate-related operation machine, Arrow FB0 direction: forward / backward direction, Arrow FD0 direction: forward direction, Arrow FS0 direction side: forward direction side, Arrow BD0 direction: backward direction, Arrow BS0 direction side: backward direction side, Arrow WD0 direction: width direction, Arrow CN0 direction: connection direction.

Claims

1. A detachable mechanism provided on the top surface of a towing device that connects a transport cart used in a substrate-related operation machine that transports items to perform specified substrate-related operations on substrates to a towing device that tows the transport cart, wherein the towing device enters below the transport cart and is positioned relative to the transport cart, and the detachable mechanism connects the towing device to the transport cart.

2. A detachable mechanism as described in claim 1, comprising: a connecting member that protrudes above the towing device and can be connected to the transport cart; and a drive unit that drives the connecting member to protrude from the top surface of the towing device, wherein the drive unit drives the connecting member to protrude above the towing device, thereby positioning the towing device relative to the transport cart and connecting the connecting member to the transport cart.

3. The transport cart comprises a guide member on the traveling direction side that is provided above the towing device when connected to the towing device and that guides the towing device to a predetermined position in the forward / backward direction; the detachment mechanism comprises a guided member that is provided on the traveling direction side of the towing device and is guided by the guide member on the traveling direction side; and the towing device is positioned at the predetermined position in the forward / backward direction when it enters below the transport cart, with the guided member being guided by the guide member on the traveling direction side.

4. The attachment / detachment mechanism according to claim 3, wherein the forward guide member and the guided member are each formed in a V-shape.

5. The transport cart includes a backward direction side guide member that is provided above the towing device when connected to the towing device and that guides the towing device to a specified position in a width direction perpendicular to the forward / backward direction of the towing device on a horizontal plane, and the drive unit, after the towing device has been positioned at a specified position in the forward / backward direction, moves the connecting member in the backward direction of the towing device while causing the connecting member to protrude above the towing device, and when the connecting member protruding above the towing device moves in the backward direction of the towing device, the connecting member is guided by the backward direction side guide member and positioned at the specified position in the width direction.

6. A detachable mechanism as described in claim 5, wherein the reverse direction guide member has a tapered portion formed in a V-shape, and the connecting member protruding above the traction device is guided along the tapered portion and connected to the reverse direction guide member.

7. The attachment / detachment mechanism described in claim 5, wherein the connecting member stored on the upper surface of the towing device is restricted from protruding upward from the towing device by a biasing member, and when the drive unit moves the connecting member in the backward direction of the towing device, it releases the restriction on the connecting member, causing the connecting member to protrude upward from the towing device.

8. The drive unit includes a motor, and the detachment mechanism includes: a movement mechanism that moves the connecting member in the forward / backward direction of the towing device by the power of the motor; and a guide mechanism that guides an operating member provided on the connecting member as the movement mechanism moves, and restricts the connecting member from protruding upward, until the connecting member reaches a release position in the forward / backward direction of the towing device; and when the connecting member is moved in the backward direction of the towing device by the movement mechanism, the restriction on the connecting member by the guide mechanism is released at the release position, and the connecting member is rotated by the biasing member, causing the connecting member to protrude above the towing device. An attachment / detachment mechanism as described in claim 7.

9. The detachable mechanism according to claim 5, wherein the detachable mechanism comprises a connection part that electrically connects the towing device and the transport cart, the transport cart comprises a connected part that is electrically connected to the connection part, and the drive part moves the connection part in the direction of travel of the towing device to electrically connect the connection part to the connected part.

10. The detachment mechanism according to claim 9, wherein the drive unit includes a motor, and the detachment mechanism includes a movement mechanism that uses the power of the motor to move the connecting member in the retreating direction of the towing device and move the connection unit in the advancing direction of the towing device.

11. The detachment mechanism described in claim 9, wherein the connecting portion and the connected portion are floating connectors in which the connected portion is arranged so as not to move relative to the connecting portion, and the connecting portion is arranged so as to be movable relative to the connected portion in a plane perpendicular to the direction of connection with the connected portion.

12. The detachable mechanism according to claim 9, wherein the transport cart is provided with a plurality of types of transportable articles, each of which has a different type, and the arrangement of the backward direction side guide member on the transport cart and the arrangement of the connected part on the transport cart are the same for each of the plurality of types of transport cart.

13. The attachment / detachment mechanism described in claim 5, wherein the drive unit moves the connecting member protruding above the towing device in the direction of travel of the towing device, and stores the connecting member on the top surface of the towing device, thereby releasing the connection between the towing device and the transport cart.

14. An article transport device comprising: a transport cart for transporting articles used in a substrate-related work machine that performs specified substrate-related work on a substrate; and a towing device that is connected to the transport cart and tows the transport cart, wherein the towing device enters below the transport cart and is positioned relative to the transport cart, and an attachment / detachment mechanism that connects the towing device to the transport cart is provided on the upper surface of the towing device.

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