Method for manufacturing micro-lens, micro-lens, and manufacturing system therefor

Abstract

Provided in the present invention are a method for manufacturing a micro-lens, a micro-lens, and a manufacturing system therefor. The method comprises: enabling a spray head to face a surface to be treated of a micro-lens to be treated; controlling the spray head to spray an oxyhydrogen flame at a preset gas flow rate, and continuously heating said micro-lens by means of the oxyhydrogen flame, wherein the heat transfer thickness during heating covers the height of said micro-lens; and heating said micro-lens to an instantaneous temperature that reaches a glass transition temperature, whereby a micro-nano viscoelastic flow is generated on said surface of said micro-lens and the micro-nano viscoelastic flow then flows under the action of tension and gravity, so that said surface of said micro-lens is polished and shaped. Compared with the prior art, the present invention improves the yield of the micro-lens.

Description

A method for manufacturing a microlens, a microlens and a manufacturing system thereof Technical Field

[0001] The present invention relates to the technical field of microlens manufacturing, and in particular to a microlens manufacturing method, a microlens and a manufacturing system thereof. Background Art

[0002] Compared to traditional large-scale lenses, microlenses, due to their extremely small unit size, flexible arrangement, and high precision, can be integrated within millimeter-scale spaces to improve resolution and transmittance, thereby achieving better image quality. Microlenses can meet the extreme demands of applications such as high-power lasers, aerospace, and solar energy. The use of quartz glass to manufacture microlenses and their arrays will gradually become a development trend in related industries. However, during the preparation and processing of microlenses, residues are easily left on the processed surface, resulting in low yields.

[0003] Summary of the Invention

[0004] To overcome the above-mentioned shortcomings of the prior art, the present invention provides a method for manufacturing a microlens. This method uses an oxyhydrogen flame to continuously and stably heat the microlens, achieving a better finished product than the prior art. The specific technical solution is as follows:

[0005] A method for manufacturing a microlens, the method comprising:

[0006] Direct the nozzle toward the surface of the microlens to be processed;

[0007] Controlling the nozzle to spray an oxyhydrogen flame with a preset gas flow rate to continuously heat the microlens to be processed by the oxyhydrogen flame, wherein the heat transfer thickness of the heating covers the height of the microlens to be processed;

[0008] The microlens to be processed is heated to an instantaneous temperature reaching the glass transition temperature, so that the surface to be processed of the microlens to be processed generates a micro-nano viscoelastic flow, and then the micro-nano viscoelastic flow flows under the action of tension and gravity, so as to achieve polishing and shape adjustment of the surface to be processed of the microlens to be processed.

[0009] In a specific embodiment, the glass transition temperature corresponding to polishing is greater than or equal to 1365°C; the glass transition temperature corresponding to shape adjustment is greater than or equal to 1470°C.

[0010] In a specific embodiment, continuously heating the microlens to be processed by the oxyhydrogen flame includes:

[0011] The nozzle is controlled to move relative to the microlens to be processed, or the microlens to be processed is controlled to move relative to the nozzle, or both the nozzle and the microlens to be processed are controlled to move relative to each other, so as to achieve continuous and uniform heating of the microlens to be processed by the oxyhydrogen flame.

[0012] Furthermore, the “controlling the movement of the nozzle relative to the microlens to be processed, or controlling the movement of the microlens to be processed relative to the nozzle” includes:

[0013] One of the nozzle and the microlens to be processed is fixed, and the other one of the nozzle and the microlens to be processed moves along a preset path within a preset range.

[0014] Furthermore, the preset path includes one or more of a raster scanning path, a nested scanning path and a pulse scanning path.

[0015] In a specific embodiment, before continuously heating the microlens to be processed by the oxyhydrogen flame, the method further includes: fixing the nozzle and the microlens to be processed so that the direction of the oxyhydrogen flame ejected from the nozzle is perpendicular to the surface to be processed of the microlens to be processed.

[0016] Furthermore, the diameter of the nozzle is greater than or equal to half the length of the microlens to be processed.

[0017] In a specific embodiment, before continuously heating the microlens to be processed by the oxyhydrogen flame, the method further includes: preheating the microlens to be processed.

[0018] Furthermore, the preheating operation includes heating the microlens to be processed to a temperature between 300° C. and 600° C.

[0019] In a specific embodiment, during the process of continuously heating the microlens to be processed by the oxyhydrogen flame, an image of the surface to be processed of the microlens to be processed is collected by a microscope and displayed on a display connected to the microscope.

[0020] The present invention also provides a microlens, which is manufactured by the above-mentioned microlens manufacturing method.

[0021] The present invention also provides a microlens manufacturing system, comprising: a nozzle and a controller;

[0022] The nozzle is used to spray the oxyhydrogen flame;

[0023] The controller is configured to control the nozzle to be directed toward the surface of the microlens to be processed; and to control the nozzle to spray an oxyhydrogen flame with a preset gas flow rate, so that the oxyhydrogen flame continuously heats the microlens to be processed, so that the heat transfer thickness of the heating covers the height of the microlens to be processed; thereby heating the microlens to be processed to an instantaneous temperature reaching the glass transition temperature, causing a micro-nano viscoelastic flow to be generated on the surface of the microlens to be processed, and then causing the micro-nano viscoelastic flow to flow under the action of tension and gravity, thereby achieving polishing and shape adjustment of the surface of the microlens to be processed.

[0024] The present invention has at least the following beneficial effects:

[0025] The present invention provides a method for fabricating a microlens. This method uses an oxyhydrogen flame to continuously and stably heat the microlens to be processed, controlling the instantaneous temperature of the microlens to the glass transition temperature corresponding to polishing and shape adjustment. The micro-nano viscoelastic flow generated after reaching the glass transition temperature is used to eliminate residual micron-scale steps and smooth any nanometer-scale roughness in the microlens. After the instantaneous temperature continues to rise to the glass transition temperature corresponding to shape adjustment, the micro-nano viscoelastic flow is used to alter the geometric shape of the microlens, thereby achieving polishing and shape adjustment of the microlens. Compared to existing technologies, the present invention achieves better polishing results and utilizes the instantaneous temperature of the microlens for shape adjustment, resulting in a higher yield.

[0026] Furthermore, the nozzle and the microlens to be processed in this method can be both fixed or moved relative to each other, providing high flexibility. By setting a preset path, such as a pulse scanning path, when the nozzle and the microlens are in relative motion, uniform heating and instantaneous temperature stability of the microlens to be processed can be achieved. Furthermore, by preheating the microlens before heating, the microlens to be processed can reach thermal equilibrium more quickly when heated by the oxyhydrogen flame, shortening the heating time. This results in efficient polishing and shaping, ultimately improving the yield of the microlenses. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0028] FIG1 is a schematic flow chart of a method for manufacturing a microlens according to the present invention;

[0029] FIG2 is a schematic diagram of a method for manufacturing a microlens according to the present invention;

[0030] FIG3 is a schematic diagram of the nozzle, oxyhydrogen flame and microlenses to be processed according to the present invention;

[0031] Figure 4 shows the instantaneous temperature T of the microlens to be processed W Working distance d S , scanning speed v S Schematic diagram of the relationship between

[0032] FIG5 is a schematic diagram of the critical transition temperature of micro-nano viscoelastic flow on the surface of a microlens to be processed;

[0033] Figure 6 shows the height H of the microlens to be processed and its shape error e f Schematic diagram of;

[0034] FIG7 is a schematic diagram of a raster scanning path;

[0035] FIG8 is a schematic diagram of a nested scan path;

[0036] FIG9 is a schematic diagram of a pulse scanning path;

[0037] FIG10 is a schematic diagram of the temperature deviation e of the preset path.

[0038] Reference numerals: 1 - nozzle; 2 - oxyhydrogen flame; 3 - microlens to be processed; 31 - surface to be processed. DETAILED DESCRIPTION

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0040] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limiting the present invention.

[0041] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0042] The present invention provides a method for manufacturing a microlens, referring to FIG1 , the method comprising:

[0043] S100: directing the nozzle toward the surface to be processed of the microlens to be processed.

[0044] S200: Controlling the nozzle to spray an oxyhydrogen flame with a preset gas flow rate to continuously heat the microlens to be processed by the oxyhydrogen flame, and the heat transfer thickness of the heating covers the height of the microlens to be processed.

[0045] S300: heating the microlens to be processed to an instantaneous temperature reaching the glass transition temperature, so that the surface to be processed of the microlens to be processed generates a micro-nano viscoelastic flow, and then the micro-nano viscoelastic flow flows under the action of tension and gravity, so as to achieve polishing and shape adjustment of the surface to be processed of the microlens to be processed.

[0046] 2, the principle of this method is: the microlens to be processed is heated by an oxyhydrogen flame. When the instantaneous temperature of the microlens to be processed reaches or exceeds the glass transition temperature corresponding to polishing, a viscoelastic fluid is formed on the surface of the microlens to be processed and moves at a speed v under the action of tension and gravity. f Flow, namely viscoelastic flow, can completely eliminate residual steps at the micrometer scale on the surface of the microlens to be processed and maintain good shape accuracy. At the same time, it can completely smooth rough topography at the nanometer scale and repair sub-surface damage.

[0047] After eliminating the residual steps at the micron scale, the microlens to be processed is heated until its instantaneous temperature reaches or exceeds the glass transition temperature corresponding to the shape adjustment. The continuously generated viscoelastic flow will gradually change the geometric shape of the microlens to be processed, thereby achieving the effect of microlens shape adjustment, for example, adjusting the original trapezoidal or rectangular outline to an arc-shaped outline.

[0048] Specifically, in step S100, referring to FIG3 , there is a working distance d between the output end of the nozzle and the surface to be processed. S Optionally, the working distance d S In the subsequent heating process of step S200, the thickness of the heat transfer d can be kept constant, increased or decreased. WCover the height H of the microlens to be processed.

[0049] For example, the nozzle can be connected to an H2-O2 generator to achieve the effect of spraying an oxyhydrogen flame.

[0050] When performing step S200, the nozzle can be optionally controlled to move relative to the microlens to be processed, or the microlens to be processed can be controlled to move relative to the nozzle, or both the nozzle and the microlens to be processed can be controlled to move relative to each other, thereby achieving continuous and uniform heating of the microlens to be processed by the oxyhydrogen flame.

[0051] In an embodiment where one of the nozzle and the microlens to be processed is fixed and the other moves along a preset path within a preset range, the nozzle can be fixed on a gantry, and the microlens to be processed can be directly or indirectly connected to a motion platform, and the motion platform can drive the microlens to be processed to move relative to the nozzle, and the relative motion speed of the microlens to be processed is defined as v S The inventors have found through experiments that when the preset gas flow rate is 1 slm, the instantaneous temperature T W Working distance d S and relative velocity v S There is a relationship as shown in Figure 4, that is, the instantaneous temperature T W With the working distance d S and relative velocity v S In addition, it should be noted that the preset range can be understood as the range of the fixed side, that is, the projection of the moving side on the fixed side does not exceed the fixed side.

[0052] In embodiments where both the nozzle and the microlens to be processed are fixed, it can be understood that this is single-point oxyhydrogen flame heating. In this case, the nozzle diameter can be set to be greater than or equal to half the length of the microlens to be processed. This is because, typically, the heat-affected diameter of the oxyhydrogen flame is approximately twice the nozzle diameter. Therefore, setting the nozzle diameter greater than or equal to half the length of the microlens to be processed ensures that the entire microlens to be processed is heated by the oxyhydrogen flame during single-point oxyhydrogen flame heating.

[0053] In addition, preferably, when the nozzle and the microlens to be processed are fixed, the direction of the oxyhydrogen flame ejected from the nozzle is perpendicular to the surface to be processed of the microlens to be processed.

[0054] Optionally, the microlenses to be processed can be preheated before being heated by the oxyhydrogen flame. This allows the preheated microlenses to reach thermal equilibrium more quickly when heated by the oxyhydrogen flame, shortening the heating time. Preferably, the preheating process heats the microlenses to a temperature between 300°C and 600°C.

[0055] Example 1

[0056] This example provides a first specific implementation method: heating the microlens to be processed to an instantaneous temperature of 1365°C or above using an oxyhydrogen flame, thereby achieving polishing of the microlens to be processed. It should be noted that the instantaneous heating temperature of 1365°C or above is primarily based on the glass transition temperature corresponding to polishing. The glass transition temperatures corresponding to polishing and shaping were determined by the inventors through extensive experimentation. The following is an illustrative example of the experimental process.

[0057] Specifically, the nozzle adopts a copper nozzle with a diameter of 0.6 mm, which is perpendicular to the surface to be processed of the microlens to be processed, and the working distance between the output end of the copper nozzle and the surface to be processed of the microlens to be processed is d S Under the preset gas flow rate of 1slm, a single-point hydrogen-oxygen flame heating experiment was carried out on a microlens (material: quartz, microlens length × width: 0.3mm × 1mm). The heating time was set to 120s. During the process, the instantaneous temperature T W And detect its profile and surface roughness S a .

[0058] For example, the instantaneous temperature T is measured by an infrared thermal imager. W Acquisition is performed by collecting the contour image of the surface to be processed through a microscope, and the collected image is displayed on a monitor connected to the microscope.

[0059] In the experiment, as shown in Figure 5, as the working distance d S Reduced from 14mm to 8mm, instantaneous temperature T W When the temperature increases from 1260℃ to 1520℃, the roughness S of the processed surface of the processed microlens a From 140nm to 0.15nm. When the instantaneous temperature T W When the temperature reaches 1420°C or above, the surface of the microlens to be processed can reach atomic-level roughness and tend to be stable.

[0060] Therefore, the critical transition temperature corresponding to the smoothing of rough morphology to stable surface quality at the nanoscale is defined as 1420℃.

[0061] In addition, when the instantaneous temperature T W When the temperature reaches 1470℃, the micron-scale residual steps are completely eliminated, but at the instantaneous temperature T W This phenomenon is not observed when the instantaneous temperature T W As the temperature continues to increase from 1470° C., the height of the microlens to be processed decreases significantly, and it can be considered that the geometric shape of the microlens to be processed has changed.

[0062] Therefore, the critical transition temperatures from heat flow enhancement to residual step elimination and residual step elimination to shape profile adjustment at the micrometer scale are defined as 1365°C and 1470°C, respectively.

[0063] It can be understood that residual step elimination is polishing the microlens, and shape profile adjustment is shaping the microlens. Therefore, it can be concluded that the glass transition temperature corresponding to polishing is greater than or equal to 1365°C, and the glass transition temperature corresponding to shaping is greater than or equal to 1470°C.

[0064] Therefore, the polishing effect can be achieved when the microlens to be processed is heated to an instantaneous temperature of 1365° C. or above. Preferably, the microlens to be processed is heated to an instantaneous temperature of 1420° C. or above to achieve the best polishing effect.

[0065] In this regard, the inventors also verified the polishing effect. Specifically, a copper nozzle with a diameter of 0.6 mm was used, and the preset gas flow rate was 1 slm and the working distance was d S is 8mm, relative speed v S The oxyhydrogen flame polishing effect verification experiment of the curved contour microlens array (material: quartz, microlens array length × width: 6mm × 1mm) was carried out at a speed of 1mm / s. The preheating temperature of the microlens to be processed was set to 300℃, and the number of cycles of the preset path was set to 72 times. The microlens to be processed was heated to an instantaneous temperature between 1365℃ and 1470℃ by the oxyhydrogen flame. The height H of the microlens to be processed and the shape error e of the processed surface of the microlens to be processed were observed. f .

[0066] 6, the height H of the microlens after polishing remains basically unchanged. Since the micron-level residual steps on the surface of the microlens to be processed are completely eliminated and the nano-level rough topography is smoothed, the shape error e f The initial ±1.7μm is reduced to less than ±0.5μm, improving the consistency of the microlens. In addition, it should be noted that oxyhydrogen flame polishing does not produce hydroxyl groups on the treated surface of the microlens, ensuring its good optical performance.

[0067] Example 2

[0068] This embodiment provides a second specific implementation method: heating the microlens to be processed to an instantaneous temperature of 1470° C. or above by an oxyhydrogen flame, thereby achieving polishing and shape adjustment of the microlens to be processed.

[0069] The single-point oxyhydrogen flame heating experiment in Example 1 shows that as the instantaneous temperature continues to increase from 1470°C, the height of the processed microlens decreases significantly, changing its geometric shape, thereby achieving shape adjustment of the processed microlens. Furthermore, since 1470°C exceeds the glass transition temperature corresponding to polishing, this embodiment achieves both shape adjustment and polishing.

[0070] Example 3

[0071] This embodiment provides a fixed nozzle and a fixed microlens to be processed, while the other moves along a preset path within a preset range. To achieve uniform heating of the microlens by the oxyhydrogen flame and ensure instantaneous temperature stability, three preset paths are proposed: a raster scanning path, a nested scanning path, and a pulse scanning path. See Figures 7, 8, and 9, respectively, for these three preset paths.

[0072] Optionally, during the process of heating the microlens to be processed by the oxyhydrogen flame, either the nozzle or the microlens to be processed can be moved relative to the other along any one or a combination of the above-mentioned preset paths.

[0073] Specifically, the inventors conducted an experimental analysis on the above three preset paths, and the experimental process is as follows:

[0074] The nozzle adopts a copper nozzle with a diameter of 0.6mm. S is 5mm, scanning speed v S When the speed is 1 mm / s, quartz glass (without microlens, length × width: 54 mm × 54 mm) is polished / shaped by oxyhydrogen flame. The instantaneous temperature T corresponding to the observation point n (number: 33) on the surface of the quartz glass during the process is recorded by infrared thermal imager. g , calculate the temperature deviation e. Referring to Figure 10, among the three scanning paths, the temperature deviation e of the pulse scanning path is the smallest, only ±6.3°C. Therefore, among the three preset paths, the pulse scanning path is preferably used, which is conducive to obtaining a stable polishing / shaping effect.

[0075] The present invention further provides a microlens, which can be manufactured by the method described in any of the above embodiments.

[0076] In addition, the present invention also provides a microlens manufacturing system, including a nozzle and a controller.

[0077] Specifically, a nozzle is used to spray an oxyhydrogen flame, and a controller is used to control the nozzle to direct the nozzle toward the surface of the microlens to be processed and control the nozzle to spray the oxyhydrogen flame at a preset gas flow rate. The oxyhydrogen flame continuously heats the microlens to a thickness that covers the height of the microlens to be processed, thereby heating the microlens to an instantaneous temperature reaching the glass transition temperature. This generates a micro-nano viscoelastic flow on the surface of the microlens to be processed. The micro-nano viscoelastic flow then flows under the action of tension and gravity, thereby achieving polishing and shaping of the surface of the microlens to be processed.

[0078] In summary, the present invention provides a method for fabricating a microlens, which utilizes an oxyhydrogen flame to heat a microlens to be processed. The instantaneous temperature of the microlens to be processed is controlled to be greater than or equal to the glass transition temperature. The micro-nano viscoelastic flow generated after the glass transition temperature is reached is utilized to eliminate residual micron-scale steps in the microlens and smooth any nano-scale roughness in the microlens. After the instantaneous temperature continues to rise to the glass transition temperature corresponding to the desired shape adjustment, the micro-nano viscoelastic flow is utilized to change the geometric shape of the microlens to be processed, thereby achieving polishing and shape adjustment of the microlens and a higher yield. The present invention's method for fabricating a microlens, derived through extensive experiments, exhibits excellent novelty, creativity, and practicality, and is worthy of widespread promotion.

[0079] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will appreciate that the present invention is not limited to the specific embodiments herein, and that various obvious changes, readjustments, and substitutions are possible for those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the scope of the present invention. The scope of the present invention is determined by the scope of the appended claims.

[0080] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for manufacturing a microlens, characterized in that: The method comprises: Direct the nozzle toward the surface of the microlens to be processed; Controlling the nozzle to spray an oxyhydrogen flame with a preset gas flow rate to continuously heat the microlens to be processed by the oxyhydrogen flame, wherein the heat transfer thickness of the heating covers the height of the microlens to be processed; The microlens to be processed is heated to an instantaneous temperature reaching the glass transition temperature, so that the surface to be processed of the microlens to be processed generates a micro-nano viscoelastic flow, and then the micro-nano viscoelastic flow flows under the action of tension and gravity, so as to achieve polishing and shape adjustment of the surface to be processed of the microlens to be processed.

2. The method for manufacturing a microlens according to claim 1, wherein: The glass transition temperature corresponding to polishing is greater than or equal to 1365°C; the glass transition temperature corresponding to shape adjustment is greater than or equal to 1470°C.

3. A method for manufacturing a microlens according to claim 1 or 2, characterized in that: The continuously heating the microlens to be processed by the oxyhydrogen flame comprises: The nozzle is controlled to move relative to the microlens to be processed, or the microlens to be processed is controlled to move relative to the nozzle, or both the nozzle and the microlens to be processed are controlled to move relative to each other, so as to achieve continuous and uniform heating of the microlens to be processed by the oxyhydrogen flame.

4. The method for manufacturing a microlens according to claim 3, wherein: The “controlling the movement of the nozzle relative to the microlens to be processed, or controlling the movement of the microlens to be processed relative to the nozzle” includes: One of the nozzle and the microlens to be processed is fixed, and the other one of the nozzle and the microlens to be processed moves along a preset path within a preset range.

5. The method for manufacturing a microlens according to claim 4, wherein: The preset path includes one or more of a raster scanning path, a nested scanning path, and a pulse scanning path.

6. A method for manufacturing a microlens according to claim 1 or 2, characterized in that: Before continuously heating the microlens to be processed by the oxyhydrogen flame, the method further includes: fixing the nozzle and the microlens to be processed so that the direction of the oxyhydrogen flame ejected from the nozzle is perpendicular to the surface to be processed of the microlens to be processed.

7. The method for manufacturing a microlens according to claim 6, wherein: The diameter of the nozzle is greater than or equal to half the length of the microlens to be processed.

8. A method for manufacturing a microlens according to claim 1 or 2, characterized in that: Before continuously heating the microlens to be processed by the oxyhydrogen flame, the method further includes: performing a preheating operation on the microlens to be processed.

9. The method for manufacturing a microlens according to claim 8, wherein: The preheating operation includes heating the microlens to be processed to a temperature between 300° C. and 600° C.

10. A method for manufacturing a microlens according to claim 1 or 2, characterized in that: During the process of continuously heating the microlens to be processed by the oxyhydrogen flame, an image of the surface to be processed of the microlens to be processed is collected by a microscope and displayed on a display connected to the microscope.

11. A microlens, characterized in that: The microlens is manufactured by the method according to any one of claims 1 to 10.

12. A microlens manufacturing system, characterized in that: include: Nozzle and controller; The nozzle is used to spray the oxyhydrogen flame; The controller is configured to control the nozzle to be directed toward the surface of the microlens to be processed; and to control the nozzle to spray an oxyhydrogen flame with a preset gas flow rate, so that the oxyhydrogen flame continuously heats the microlens to be processed, so that the heat transfer thickness of the heating covers the height of the microlens to be processed; thereby heating the microlens to be processed to an instantaneous temperature reaching the glass transition temperature, causing a micro-nano viscoelastic flow to be generated on the surface of the microlens to be processed, and then causing the micro-nano viscoelastic flow to flow under the action of tension and gravity, thereby achieving polishing and shape adjustment of the surface of the microlens to be processed.

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