Optical inspection module and inspection unit

Abstract

The purpose of the present invention is to easily attach and detach a plurality of optical inspection units to a probe card.　This optical inspection module includes: a plurality of lens units for irradiating a plurality of solid-state imaging elements with light from a light source as inspection light; and a holder including a bottom wall to which the plurality of lens units are detachably supported. The holder can be detachably attached to a probe card that extracts electrical signals output from the plurality of solid-state imaging elements by irradiation with inspection light in a state in which the plurality of lens units are supported in advance.

Description

Optical Inspection Module and Inspection Unit

[0001] The present invention relates to an optical inspection module and an inspection unit used to inspect solid-state imaging devices such as CCDs (Charge Coupled Devices) and CMOSs ​​(Complementary Metal Oxide Semiconductors).

[0002] An optical inspection unit device that irradiates a solid-state imaging element with inspection light to inspect its photoelectric conversion characteristics is known, for example, from Patent Document 1. This inspection unit device includes a probe card that holds probe pins that extract output from the output terminal portion of the imaging element and has multiple openings through which light passes to the imaging element, an optical inspection unit that is disposed opposite the light receiving portion of the imaging element and emits test light through the multiple openings in the probe card, and a holding means that simultaneously positions and holds the multiple optical inspection units by arranging the exit side of the optical inspection unit opposite the light receiving portion of the imaging element with the optical axis of the optical inspection unit aligned with the light receiving surface of the imaging element, and individually performs conversion adjustment for each optical inspection unit to match the light from the light irradiation device to the specifications of the imaging element.

[0003] Japanese Patent Application Laid-Open No. 2007-311515

[0004] However, in the above-mentioned conventional device, the holding means is fixed to the probe card and only functions as a holding means for each lens unit on the probe card.

[0005] Therefore, the worker must mount and remove the lens units one by one from the probe card, making the work of mounting and removing a plurality of lens units to and from the device very cumbersome.

[0006] Therefore, an object of the present invention is to provide an optical inspection module that can be easily attached to and detached from a probe card while a plurality of lens units are held in advance. Another object of the present invention is to provide an optical inspection module that can be easily positioned with respect to a probe card.

[0007] An optical inspection module according to one embodiment includes a plurality of lens units that irradiate a plurality of solid-state imaging elements with light from a light source as inspection light, and a holder including a bottom wall with a plurality of holding holes into which the plurality of lens units are fitted. The holder is detachably attachable to a holding portion of a probe card that extracts electrical signals output from the plurality of solid-state imaging elements in response to the irradiation of inspection light, with the plurality of lens units held in advance. The holding portion has a plurality of openings that communicate with the plurality of holding holes when the holder is attached, and the holder has an attachment means for a user to attach the holder with the plurality of lens units held in it to the holding portion.

[0008] The holder, which already has multiple lens units supported, can be attached to and detached from the probe card. This allows the user (operator) to attach multiple lens units to the probe card at once, making the user's work easier.

[0009] The mounting means is a pair of handles, which are connected to opposite sides of the holder, respectively, and each handle has a handle portion to be grasped by the user's fingers.

[0010] By providing a pair of grips with handle portions on both sides of the holder, the user can handle the optical inspection module with both hands while supporting a plurality of lens units.

[0011] The holder is attached to the recessed holding portion of the probe card so that the bottom wall is accommodated in the recessed holding portion. The handle is connected to the holder so that the handle is positioned above the top surface of the holder, and is set so that the handle is positioned above the top surface of the probe card when the holder is attached to the holding portion.

[0012] The handle portion that the user holds is set higher than the upper surface of the holder, making it easy for the user to grip the handle (handle portion).Even when the holder is attached to the holding portion, the handle portion is set higher than the upper surface of the probe card, making it easy for the user to grip the handle (handle portion) even when the optical inspection module is attached to the probe card.

[0013] A protruding portion is provided on each side of the holder, and the pair of handles are connected to the upper surfaces of the protruding portions on both sides, and the upper surfaces of the protruding portions on both sides are set at a position lower than the upper surface of the holder.

[0014] The handle can be positioned low while still providing the necessary space for the user to grip it. In particular, there are cases where sufficient height cannot be secured above the probe card, but even in such situations, the handle can still function properly.

[0015] The mounting means is a pair of handles that can be detachably fixed to opposite sides of the holder, and fixing portions for fixing the handles are provided on each side.

[0016] The handle is detachably attached to the holder, so that the operator can attach the handle only when attaching or detaching the holder to the probe card. Also, by providing a fixing portion on the top surface of the holder, it is possible to secure a larger area for the bottom wall of the holder on which multiple lens units are installed.

[0017] The handle is a rod-shaped handle that stands upright from the connection part, with one end connected to the connection part and the other end having a handle part, and the pair of connection parts are located opposite each other, passing through the center point of the holder in an approximate planar view, and are located in an asymmetrical position with respect to the center line of the holder in an approximate planar view.

[0018] The connection portion connecting the pair of handles is located on the top surface of the holder at a position that faces each other and passes through the center point in a plan view, and at a position that is asymmetrical with respect to the center line, thereby stabilizing the user's operation of attaching and detaching the optical inspection module to and from the probe card.

[0019] The holder further has a positioning means, which is a plurality of guide holes corresponding to a plurality of guide pins connected to the holding portion, and when the user attaches the holder to the holding portion, the holder is attached to a predetermined position on the holding portion by inserting each guide pin into each guide hole.

[0020] The positioning means allows the holder (optical inspection module) to be attached to a predetermined position on the probe card. Furthermore, by providing guide holes corresponding to the guide pins of the holding portion as the positioning means, the optical inspection module can be lowered straight down from above the holding portion to be attached. This allows the multiple holding holes of the holder to be directly connected to the openings of the holding portion from above. In particular, when the lower end of the lens unit protrudes from the lower end of the holding hole, the lower end of the lens unit is inserted straight into the opening, preventing damage to the lens unit.

[0021] The holder further has fixing means for fixing the holder in a state where it is attached to the holding part, and positioning means. The fixing means is a hole portion communicating with the hole of the holding part for inserting a predetermined fixture, the attachment means is a pair of handles, and the positioning means is a plurality of guide holes corresponding to the plurality of guide pins connected to the holding part. The attachment means is provided on both sides of the holder in one direction, and the fixing means is provided on both sides of the holder in the other direction different from the pair of handles, and the positioning means is provided between the attachment means and the fixing means.

[0022] The fixing means, positioning means, and mounting means are provided at predetermined positions on the holder, respectively, so that when a user handles the optical inspection module (holder), they do not get in the way and are easy to handle.

[0023] Each of the plurality of lens units includes a barrel portion and a flange portion formed at one end of the barrel portion and having a diameter larger than that of the holding hole, and the holder includes a base holder including a bottom wall on which the flange portion is housed, and a light-transmitting plate that transmits light from the light source and is detachably fixed onto the base holder.

[0024] By fixing the light-transmitting plate onto the base holder with the flange portion sandwiched therebetween, it is possible to prevent the plurality of lens units in the holder from falling off while still allowing light from the light source to pass through.

[0025] According to one embodiment, the inspection unit includes a probe card disposed between a light source device and a plurality of solid-state imaging elements, irradiating light from the light source device as inspection light onto the light-receiving surfaces of the plurality of solid-state imaging elements and extracting electrical signals output from the plurality of solid-state imaging elements in response to the inspection light, and an optical inspection module connected to the probe card. The optical inspection module includes a plurality of lens units that irradiate the plurality of solid-state imaging elements with the inspection light, and a holder including a bottom wall with a plurality of holding holes into which the plurality of lens units are removably fitted and held. The holder is removably attachable to a holding portion of the probe card that extracts electrical signals output from the plurality of solid-state imaging elements in response to the irradiation of the inspection light, with the plurality of lens units held in advance. The holding portion has a plurality of openings that respectively communicate with the plurality of holding holes when the holder is attached, and the holder has an attachment means for a user to attach the holder with the plurality of lens units held in the holding portion.

[0026] According to the present invention, the optical inspection module can be easily attached to and detached from the probe card in a state where a plurality of lens units are held in advance.

[0027] 9 is a schematic explanatory diagram of an inspection device including an optical inspection module according to the present embodiment. FIG. 10 is a schematic diagram showing the positional relationship between an inspection unit and a solid-state imaging element. FIG. 11 is a perspective view of a probe card. FIG. 12 is a perspective view of an optical inspection module. FIG. 13 is an enlarged perspective view of a main part of an inspection unit. FIG. 14 is a cross-sectional view taken along A-A in FIG. 5. FIG. 15 is a diagram showing a holding part of a probe card. FIG. 16 is a diagram explaining the positioning of a holder. FIG. 17 is a plan view explaining a second embodiment. FIG. 18 is a cross-sectional view taken along B-B in FIG. 9. FIG. 19 is a diagram showing a modified example of a handle. FIG. 19 is a diagram explaining a modified example of an inspection unit.

[0028] Hereinafter, an embodiment will be described with reference to the drawings. This embodiment is an example for explaining the present invention, and appropriate omissions and simplifications have been made in order to clarify the explanation. Furthermore, the present invention is not limited to this embodiment, and all applications consistent with the concept of the present invention are included in the technical scope of the present invention.

[0029] This embodiment will be described below. Fig. 1 is a schematic diagram showing an example of an inspection apparatus 1 for inspecting solid-state imaging elements on a wafer W. Fig. 2 is a schematic diagram showing the positional relationship between an inspection unit 6 and a solid-state imaging element e. For example, the inspection apparatus 1 includes a light source device 2, a prober device 3, a tester section 4, and an inspection unit 6 including an optical inspection module 5.

[0030] The light source device 2 is used to irradiate light onto the light receiving surface of a solid-state imaging element e, such as a CCD or CMOS, in an inspection of the photoelectric conversion characteristics of the solid-state imaging element e. The light emitted from the light source device 2 is irradiated onto the solid-state imaging element e via an optical inspection module 5.

[0031] The prober device 3 includes, for example, a transport and positioning device 30 that places, transports, and positions a wafer W having a plurality of solid-state imaging elements e to be inspected. The prober device 3 is connected to an inspection unit 6 between the positioned wafer W and the light source device 2, the inspection unit 6 including a probe card 31 that supplies power to each solid-state imaging element e and receives electrical signals output from each solid-state imaging element e. The probe card 31 has probe pins 32 that contact each solid-state imaging element e, and electrically connects the tester unit 4 and each solid-state imaging element e.

[0032] The tester section 4 has, for example, a test head (not shown), receives the electrical signals output from each solid-state image pickup element e, and measures the characteristics of each solid-state image pickup element e.

[0033] The inspection unit 6 has a probe card 31 arranged between the light source from the light source device 2 and the plurality of solid-state imaging elements e, and an optical inspection module 5 attached to the probe card 31. The optical inspection module 5 has a plurality of lens units 50 that transmit light from the light source device 2 and irradiate the light receiving surfaces of the solid-state imaging elements e with the light as inspection light, and a holder 51 that detachably supports the plurality of lens units 50. Details of the optical inspection module 5 will be described later.

[0034] First Example A first example will be described below. FIG. 3 is a schematic diagram of a probe card 31. The probe card 31 has, for example, an electronic board (not shown) below a plate 311, and probe pins 32 are connected to the electronic board. The probe card 31 has a holder 312 that holds an optical inspection module 5. A bottom wall of the holder 312 is provided with a plurality of openings 315 through which a plurality of lens units 50 can be inserted in the vertical direction. The holder 312 may be concave and open at the top so that an operator can attach the optical inspection module 5 from above. In the illustrated example, the holder 312 has a substantially square shape in a plan view, but the shape may be any shape. For example, the holder 312 may have a substantially rectangular, polygonal, circular, or elliptical shape in a plan view.

[0035] Fig. 4 is a schematic perspective view of an example of the optical inspection module 5. Fig. 5 is an enlarged view of a main part showing the optical inspection module 5 (part of the inspection unit 6) in a state where it is attached to the probe card 31. Fig. 6 is a cross-sectional view taken along line A-A in Fig. 5.

[0036] In the optical inspection module 5, a plurality of lens units 50 are detachably supported by a holder 51. The optical inspection module 5 can be attached to and detached from the holding portion 312 of the probe card 31 with the plurality of lens units 50 previously attached to and held in the holder 51. Note that the plurality of lens units 50 can be attached and detached individually even when the holder 51 is held in the holding portion 312. This simplifies handling because it is only necessary to attach the optical inspection module 5 with the lens units 50 held therein to the holding portion 312 of the probe card 31, rather than providing the plurality of lens units 50 detachably to the holder 51 after the holder 51 is installed in the holding portion 312.

[0037] The optical inspection module 5 is provided with a fixing means for fixing it to the holder 312. For example, the fixing means may be a screw portion.

[0038] Specifically, as shown in Figures 3 and 4, the threaded portion comprises a plurality of (two in Figure 3) female threaded portions 313 arranged side by side at the front and rear ends of the holding portion 312, and a plurality of holes 516 (which may have female threads) formed in the front-rear direction side portions of the holder 51 (more specifically, at positions corresponding to the front-rear direction side walls 515 of the base holder 510 and the side walls 515 of the upper holder 511, which will be described later) at positions corresponding to these female threaded portions 313. Male screws that can be threaded into the female threaded portions 313 are inserted into the plurality of holes 516. Note that the fixing means is not limited to the above-mentioned threaded portions, and bolts, pins, etc. may also be used for fixing.

[0039] The fixing means can prevent the optical inspection module 5 from shifting position during inspection, and can fix each lens unit 50 to a predetermined position (each opening 315) of the probe card 31.

[0040] Each lens unit 50 has, for example, a cylindrical portion 500 made of a non-translucent material with both ends open, one or more optical lenses (not shown) built into the cylindrical portion 500, and a flange portion 501 formed on one end side of the cylindrical portion 500.

[0041] The holder 51 is engaged with the concave holding portion 312. For example, as shown in Fig. 5, it is desirable that the lower portion of the holder 51 has a shape (approximately square in plan view in the figure) that roughly fits the shape of the holding portion 312. This allows the area of ​​the bottom wall 514 of the holder 51, which will be described later, to be set large, making it possible to arrange more lens units 50.

[0042] The holder 51 is not limited to being approximately square in plan view, and can have any shape depending on the number of lens units 50 and the shape of the holding portion 312 of the probe card 31. For example, the holder 51 may be approximately rectangular in plan view, or may be polygonal, circular, elliptical, or the like. Note that the shape of the holder 51 does not necessarily need to be such that the lower portion of the holder 51 fits inside the holding portion 312, as long as the shape allows multiple lens units 50 to be fitted into multiple openings 315.

[0043] Specifically, as shown in FIG. 4 , the holder 51 includes a base holder 510, an upper holder 511, and a light-transmitting plate 513. The base holder 510 is the main body of the holder 51, and at least its lower portion is held by the holding portion 312. The base holder 510 includes a bottom wall 514 and side walls 515 extending upright and surrounding the bottom wall 514. The bottom wall 514 is provided with a plurality of holding holes 510A that respectively hold a plurality of lens units 50. Each holding hole 510A has a diameter large enough to allow the cylindrical portion 500 of each lens unit 50 to pass through, but smaller than the diameter of the flange portion 501 (not shown). As a result, with the cylindrical portion 500 of each lens unit 50 fitted into the holding hole 510A, the flange portion 501 is engaged with the bottom wall 514 of the base holder 510. The flange portion 501 may be fixed to the bottom wall 514 with a fastener (not shown) such as a screw. This prevents the individual lens units 50 from coming off the base holder 510.

[0044] Furthermore, the plurality of holding holes 510A in the bottom wall 514 are formed at positions corresponding to the plurality of openings 315 of the probe card 31 (not shown). For example, as shown in FIG. 6 , the tip of the cylindrical portion 500 protrudes from the bottom of the holding hole 510A and is set so that the tip is inserted into the opening 315 of the probe card 31. This allows the inspection light to be irradiated onto each corresponding solid-state imaging element e through each lens unit 50, as shown in FIG. 2 . That is, by attaching the holder 51 to which the plurality of lens units 50 are previously attached to the holding portion 312, all of the plurality of lens units 50 can be aligned at positions corresponding to the plurality of solid-state imaging elements e.

[0045] Furthermore, for example, a recess 530 is formed by the bottom wall 514 and the side wall 515. The flange portions 501 of the multiple lens units 50 are housed in the recess 530. The depth of the recess 530 (the height of the side wall 515) may be set at any value, but may be set to be equal to or slightly lower than the height of the flange portions 501.

[0046] The light-transmitting plate 513 is a plate-like member that covers the upper surface of the recess 530, and is made of a material that transmits light from the light source, such as a glass plate. That is, light from the light source is incident on each lens unit 50 via the light-transmitting plate 513. The light-transmitting plate 513 may be one that transmits light from the light source as is, or may be one that has variable transmittance.

[0047] The upper holder 511 is a frame body that is placed on and attached to the base holder 510 (side wall 515) via a light-transmitting plate 513. The upper holder 511 is fixed to the base holder 510 with fasteners (not shown) such as screws. This fixes the light-transmitting plate 513 to the base holder 510, and closes the recess 530. Closing the recess 530 prevents the lens unit 50 from coming off the holder 510.

[0048] Furthermore, if the height of the recess 530 is set to be equal to or slightly lower than the height of the flange portion 501, the plurality of lens units 50 are held and fixed to the holder 51 with the flange portions 501 pressed from above by the light-transmitting plate 513. This makes it possible to prevent the lens units 50 from shifting positions.

[0049] <Attachment Means> The holder 51 includes attachment means for an operator to attach the optical inspection module 5. The attachment means is, for example, a pair of handles 52. Each handle 52 is provided on each side of the holder 51 so that the operator can carry the holder 51 using both hands.

[0050] Furthermore, it is desirable that the pair of handles 52 be provided on both sides in a direction different from that of the fixing means. In the illustrated example, the handles 52 are provided in a direction different from that of the both sides in the length direction (front and rear sides) where the holes 516 of the screw portions are provided, i.e., on both sides in the width direction (left and right sides), and are fixed in positions facing each other across the center line C1 in the width direction. This allows the operator to carry the holder 51 approximately horizontally with the fingers of both hands while positioned approximately in the center of the width direction. Furthermore, when fixing the optical inspection module 5 (or the holder 51) to the probe card 31 with the fixing means, the handles 52 can be removed without getting in the way.

[0051] Each handle 52 is provided upright from a side of the holder 51. Each handle 52 has a handle portion 52A. The handle portions 52A are located above the left and right sides of the holder 51, respectively. Specifically, each handle portion 52A may be provided at a position spaced a predetermined distance above the upper end of the holder 51, and at a position spaced a predetermined distance above the upper end of the probe card 31 when the holder 51 is attached to the probe card 31. This makes it easy to insert fingers below the handle 52 and handle the holder 51 when attaching (or removing) the optical inspection module 5 (holder 51) to the probe card 31. That is, the handle portion 52A, which is held by an operator, is set higher than the upper surface of the holder 51, making it easy for the operator to grip the handle portion 52A. Furthermore, even when the holder 51 is attached to the holding part 312, the position of the handle part 52A is set higher than the upper surface of the probe card 31, so that the operator can easily grip the handle 52 (handle part 52A) even when the optical inspection module 5 is attached to the probe card 31. The connection position of the handle 52 to the holder 51 may be on the upper surface of both sides of the holder 51 or on the side surface.

[0052] Furthermore, it is desirable that the upper end of the handle 52 be set at a position lower than a predetermined position above the holder 51. For example, as shown in FIG. 1 , when the optical inspection module 5 is attached to the inspection device 1, an object (e.g., the light source device 2) may be placed at a relatively short distance above the optical inspection module 5. In such a case, it is desirable that the handle 52 be set so as not to come into contact with the object. For example, due to the configuration of the inspection device 1, there may be a height limit (see FIG. 6 ) between the light source device 2 and the prober device 3 (probe card 31). In this case, the optical inspection module 5 (holder 51) attached to the probe card 31 needs to be within this height limit.

[0053] As an example corresponding to the above, for example, the base holder 510 may have protruding portions 510B extending from both the left and right sides thereof, and the handles 52 may be provided upright on each of the protruding portions 510B. In this case, the height of the protruding portions 510B may be set lower than the height of the base holder 510.

[0054] This allows the height of the handle portion 52A to be kept low even when the handle 52 is provided. That is, by setting the connection position of the handle 52 lower than the upper surface of the holder 51, the height of the upper end of the handle 52 (the position of the handle portion 52A in the illustrated example) can be set low while ensuring space below the handle portion 52A for inserting fingers. In particular, there are cases where a sufficient height cannot be ensured above the probe card 31, but even in such a situation, the handle 52 can fully function.

[0055] Furthermore, it is desirable that each handle portion 52A is provided so that its inner end in the width direction does not protrude inward from each protruding portion 510B. In other words, it is desirable that the inner end does not overlap the recess 530 in plan view, and it is even more desirable that it does not overlap the upper holder 511. This makes it easier to attach and detach the lens unit 50 and the upper holder 511 to and from the base holder 510 without interfering with the work.

[0056] Furthermore, it is preferable that the outer widthwise ends of each handle 52A protrude outward from both side ends of the holder 51 (base holder 510). This makes it easier for an operator to hook the handle 52A onto his or her fingers when holding the holder 51, facilitating work.

[0057] <Positioning Means> The inspection unit 6 has a positioning means for positioning the optical inspection module 5 (or the holder 51) when mounting it relative to the probe card 31. As the positioning means, for example, a guide pin 31C may be provided at the bottom of the holding portion 312, and a guide hole 510C into and out of which the guide pin 31C can be inserted may be provided in the holder 51.

[0058] The guide pin 31C may be fixed to the bottom of the holding portion 312, or may be detachably mounted in an attachment hole (not shown) provided in the bottom of the holding portion 312. As shown in FIG. 7 , the guide pin 31C protrudes higher than the upper surface of the holding portion 312 (i.e., the upper surface of the probe card 31 forming the holding portion 312). This makes it easier for an operator to identify the position of the guide pin 31C, and even if multiple lens units 50 protrude from the lower end of the holder 51, the tip ends of each of the multiple lens units 50 can be smoothly inserted into the corresponding openings 315. In other words, the tip ends of the multiple lens units 50 can be prevented from colliding with the probe card 31 and being damaged. Note that in the above case, by making the guide pin 31C detachable from the attachment hole of the holding portion 312, even if there is the height restriction, the guide pin 31C can be removed after the optical inspection module 5 (holder 51) is attached, so that the guide pin 31C does not get in the way.

[0059] 7 and other drawings, the guide pins 31C are provided at the four corners of the holding portion 312. On the other hand, the guide holes 510C corresponding to the guide pins 31C are formed at the four corners of the holder 51 (in the illustrated example, the four corners of the base holder 510). As a result, as shown in FIG. 8, the guide pins 31C are inserted into the guide holes 510C at the four corners of the base holder 510, and the holder 51 is positioned with respect to the probe card 31.

[0060] 8, the guide hole 510C is provided on the same side as the pair of handles 52, and at a position some distance away from the handles 52. This prevents the guide pin 31C from coming into contact with the worker's fingers or arm when working with the handles 52, and also allows the worker to clearly see the guide pin 31C.

[0061] Furthermore, the guide hole 510C is provided at a position that is somewhat separated from the hole 516 of the holder 51. This allows the optical inspection module 5 to be fixed to the probe card 31 without being interfered with by the positioning means (the guide pin 31C in the illustrated example).

[0062] In this embodiment, the pair of handles 52 are provided on the left and right protruding portions 510B of the base holder 510, but this is not limiting. For example, they may be fixed to the upper surface of the holder 51 as shown in FIG.

[0063] Furthermore, the guide pin 31C may be fixed to the holding portion 312. In this case, the guide pin 31C may be set at a position equal to or higher than the upper surface of the probe card 31 that forms the holding portion 312, and lower than the upper surface of the holder 51 when the optical inspection module 5 is attached. This prevents the guide pin 31C from getting in the way even when there is the height restriction described above, and makes it possible to eliminate the need for work to attach and detach the guide pin 31C.

[0064] <Second Example> A second example will be described. Note that the same components as those in the first example will be assigned the same reference numerals, and only the different components will be described. Figures 9 and 10 are diagrams illustrating the handle position in the second example. The handle 53 in this example is detachably attached to the holder 51. For example, as shown in Figure 10, the upper holder 511 may be provided with a connection portion 517 for detachably attaching the handle 53.

[0065] For example, the handle 53 may be detachably attached to the holder 51. In this case, unlike the first embodiment, each handle 52 does not need to be connected to each side of the holder 51 at two points, but may be connected to each side at one point. Specifically, as shown in FIG. 10 , the handle 53 may be a generally rod-shaped handle having a handle portion 53A at one end that is gripped by an operator and a connecting portion 517 at the other end that can be connected to the holder 51. As shown in FIG. 10 , the handle portion 53A may be a generally I-shaped grip formed coaxially with the other end. The connecting portion 517 may be, for example, a female thread portion that can be threaded into a male thread portion (not shown) formed at the other end of the handle 53. Furthermore, the method of connecting the connecting portion and the other end of the handle may not be the above-mentioned screw connection, but may be, for example, a magnetic connection, or any other method.

[0066] 9, the upper holder 511 may be a rectangular frame body, and a connecting portion 517 may be provided at a position that is asymmetric with respect to a center line C3 in the width direction of the frame body (i.e., a position that does not face the center line C3), and may be connected to the other end of the pair of handles 53. Note that FIG. 9 shows the position of the connecting portion 517.

[0067] Specifically, one connecting portion 517 is provided on each side of the holder 51 (upper holder 511 in the figure) in one direction (both sides in the width direction in the figure). The pair of connecting portions 517 are positioned opposite each other with respect to the center point C0 in the width direction, and are set at positions asymmetrical with respect to the center line C3 in the width direction. In other words, the pair of connecting portions 517 are positioned opposite each other with respect to the center point C0, and are set at equal distances D1 from the center line C3 in the width direction and equal distances D2 from the center line C1 in the length direction. This allows the operator to easily attach and detach the handles 53, and also allows the operator to carry the holder 51 horizontally and stably, even though each handle 53 is supported at a single point.

[0068] Furthermore, when the handle 53 is connected to the holder 51, the handle portion 53A is located directly above the connection portion 517 of the holder 51, and the operator can easily see the positioning means described above because the operator holds the handle portion 53A and carries the holder 51. The handle portion 53A is not limited to the generally I-shape shown in Fig. 10, but may be of any shape that can be gripped by the user, such as a generally T-shape or a generally L-shape.

[0069] Furthermore, the fixing means, positioning means, and mounting means are each provided at the aforementioned predetermined positions on the upper surface of the holder 51. For example, the mounting means are provided on both sides of the holder 51 in one direction, the fixing means are provided on both sides of the holder 51 in a direction different from the mounting means, and the positioning means is provided between the mounting means and the fixing means. This makes it easy for the user to handle the optical inspection module 5 (holder 51) without any of these getting in the way.

[0070] Several examples according to the present embodiment have been described above. However, the present invention is not limited to the above-described embodiments and includes various other embodiments. For example, the above-described embodiments (including several examples) have been described in detail to clearly explain the present invention, and are not necessarily limited to those including all of the described configurations. Furthermore, it is possible to replace part of the configuration of one example with the configuration of another example, and it is also possible to add the configuration of another example to the configuration of one example. Furthermore, it is possible to add, delete, or replace part of the configuration of each example with other configurations.

[0071] For example, although each optical inspection module 5 shown in the drawings in the above embodiment includes a specific number of lens units 50, any number of lens units 50 may be included in each optical inspection module 5. Furthermore, the arrangement of the multiple lens units 50 within the optical inspection module 5 may be any arrangement.

[0072] Furthermore, for example, in the above embodiment, the holder 51 is shown to have a handle as an attachment means, and examples include the handle 52 fixed to the holder 51 and the handle 53 detachable from the holder 51. However, the handle is not an essential component of the optical inspection module 5.

[0073] For example, as another example of the attachment means, instead of a handle, a protrusion 54 may be provided on the upper surface of the widthwise side of the holder 51 (e.g., the upper surface of the widthwise side of the upper holder 511) that protrudes outward, as shown in FIG. 11 . The protrusion 54 may protrude, for example, to an extent that allows an operator to support the holder 51 (the upper holder 511 in the above example) from below with the operator's fingers or the like. This allows the upper holder 511 to function as an attachment means, thereby reducing the number of parts. Furthermore, as another example of the attachment means, instead of the protrusion 54, recesses may be formed inward on both widthwise sides of the upper holder 511 (not shown). The protrusions 54 and recesses may have any shape as long as they allow a user to hook their fingers or a tool onto them to lift the holder 51.

[0074] In the above embodiment, the holder 51 includes the base holder 510, the light-transmitting plate 513 placed on the base holder, and the upper holder 511 that fixes the light-transmitting plate 513 to the base holder 510. However, the light-transmitting plate 513 is not an essential component of the optical inspection module 5.

[0075] The holder 51 only needs to have the function of the base holder 510 having at least the plurality of holding holes 510A. For example, the holder 51 having only the base holder 510 may be provided with the attachment means (not shown).

[0076] The light-transmitting plate 513 does not have to be configured to be fixed to the holder 51. For example, the light-transmitting plate 513 may be configured to be placed on the holder 51 after the holder 51 holding the plurality of lens units 50 is attached to the probe card 31 (not shown).

[0077] Furthermore, in the above embodiment, the inspection unit 6 is configured such that one optical inspection module 5 is attached to one probe card 31. However, the inspection unit 6 is not limited to the above configuration. For example, one probe card 31 may be provided with a plurality of optical inspection modules 5. An example of a configuration in which a plurality of optical inspection modules 5 are held by a probe card 31 is shown in FIG. 12 .

[0078] In order to increase the number of solid-state imaging elements e to be inspected at one time, it is necessary to increase the number of lens units 50 held by the probe card 31. For this reason, there is a demand for the optical inspection module 5 to hold a larger number of lens units 50. On the other hand, since the lower ends of the lens units 50 protrude in the optical inspection module 5, there is a risk that the lens units 50 may hit the probe card 31 or the like when attaching (or removing) the optical inspection module 5, and care must be taken when handling the optical inspection module 5. For this reason, by making it possible to detachably attach multiple optical inspection modules 5 to one probe card 31, it is possible to group an easy-to-handle number of lens units 50 and attach and detach them to and from the probe card 31 in groups 550.

[0079] 1: Inspection device 2: Light source device 3: Prober device 4: Tester section 5: Optical inspection module 6: Inspection unit 30: Transport and positioning device 31: Probe card 31C: Guide pin 32: Probe pin 50: Lens unit 51: Holder 52: Handle 52A: Handle section 53: Handle 53A: Handle section 53B: Connection section 311: Plate 312: Holding section 315: Opening 500: Cylindrical section 501: Flange section 510: Base holder 510A: Holding hole 510B: Protruding section 510C: Guide hole 511: Upper holder 513: Light-transmitting plate 514: Bottom wall 515: Side wall 530: Recess

Claims

1. An optical inspection module comprising: a plurality of lens units that irradiate a plurality of solid-state imaging elements with light from a light source as inspection light; and a holder including a bottom wall with a plurality of holding holes into which the plurality of lens units are removably fitted and held, wherein the holder is removably attachable to a holding portion of a probe card that extracts electrical signals output from the plurality of solid-state imaging elements by irradiation with the inspection light, with the plurality of lens units held in advance; the holding portion has a plurality of openings that respectively communicate with the plurality of holding holes when the holder is attached; and the holder has an attachment means for a user to attach the holder, with the plurality of lens units held in it, to the holding portion.

2. The optical inspection module according to claim 1, wherein the mounting means is a pair of handles, the pair of handles being connected to opposite sides of the holder, and each of the handles having a handle portion to be grasped by the user's fingers.

3. The optical inspection module according to claim 2, wherein the holder is attached so that the bottom wall is accommodated in the concave holding portion of the probe card, and the handle is connected so that the handle portion is positioned above the top surface of the holder, and is set so that the handle portion is positioned above the top surface of the probe card when the holder is attached to the holding portion.

4. An optical inspection module as described in claim 3, wherein a protrusion is provided on each of the two side portions of the holder, the pair of handles are each connected to the upper surfaces of the protrusions on the two side portions, and the upper surfaces of the protrusions on the two side portions are set at a position lower than the upper surface of the holder.

5. The optical inspection module according to claim 1, wherein the mounting means is a pair of handles, the pair of handles being removably fixed to opposite side portions of the holder, and a pair of connecting portions for fixing the pair of handles respectively are provided on the upper surfaces of the side portions.

6. The optical inspection module described in claim 5, wherein the handle is a rod-shaped handle that stands upright from the connection part, one end of which is connected to the connection part and the other end of which has a handle part, and the pair of connection parts are positioned opposite each other, passing through the center point of the holder in a roughly planar view, and are positioned asymmetrically with respect to the center line of the holder in a roughly planar view.

7. The optical inspection module of claim 1, wherein the holder further has positioning means, which are a plurality of guide holes corresponding to a plurality of guide pins connected to the holding portion, and when a user attaches the holder to the holding portion, the holder is attached to a predetermined position on the holding portion by inserting each of the guide pins into each of the guide holes.

8. The optical inspection module of claim 1, wherein the holder further has a fixing means for fixing the holder in a state where it is attached to the holding part, and a positioning means, the fixing means being a hole portion that communicates with a hole in the holding part for inserting a predetermined fixing tool, the attachment means being a pair of handles, the positioning means being a plurality of guide holes corresponding to a plurality of guide pins connected to the holding part, the attachment means being provided on both sides of the holder in one direction, the fixing means being provided on both sides of the holder in the other direction different from the pair of handles, and the positioning means being provided between the attachment means and the fixing means.

9. An optical inspection module according to any one of claims 1 to 8, wherein each of the plurality of lens units includes a lens barrel portion and a flange portion formed at one end of the lens barrel portion and having a diameter larger than that of the retaining hole, and the holder includes a base holder including the bottom wall on which the flange portion is housed, and a light-transmitting plate that transmits light from the light source and is detachably fixed onto the base holder.

10. An inspection unit comprising: a probe card arranged between a light source device and a plurality of solid-state imaging elements, irradiating the light receiving surfaces of the plurality of solid-state imaging elements with light from the light source device as inspection light, and extracting electrical signals output from the plurality of solid-state imaging elements as a result of the irradiation; and an optical inspection module connected to the probe card, wherein the optical inspection module has: a plurality of lens units that irradiate the plurality of solid-state imaging elements with the inspection light; and a holder including a bottom wall with a plurality of holding holes into which the plurality of lens units are detachably fitted and held, the holder being detachably attachable to a holding portion of the probe card that extracts electrical signals output from the plurality of solid-state imaging elements as a result of the irradiation of the inspection light, with the plurality of lens units held in advance, the holding portion having a plurality of openings that respectively communicate with the plurality of holding holes when the holder is attached, and the holder having an attachment means for a user to attach the holder with the plurality of lens units held in the holder to the holding portion.

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