Workpiece conveying robot and method for controlling workpiece conveying robot

Abstract

In a substrate conveying robot (100) of the present invention, a control unit (30) executes processing in which: a pull-out part (59) moves a workpiece (200) to a gripping position (P) at which the workpiece (200) is gripped by a gripping part (53); and the gripping part (53) grips the workpiece (200) that has been moved to the gripping position (P).

Description

Work transport robot and method for controlling work transport robot

[0001] The present disclosure relates to a workpiece transport robot and a method for controlling the workpiece transport robot.

[0002] Conventionally, workpiece transport robots have been disclosed. JP 5-154431 A discloses an industrial robot. The industrial robot is equipped with a workpiece holding device. The workpiece holding device holds a glass substrate, which serves as the workpiece. The glass substrate has a rectangular shape. The workpiece holding device includes first clamping means and second clamping means. The first clamping means has claws. The claws of the first clamping means clamp two opposing sides of the glass substrate from a first direction. The second clamping means has a pair of pivoting arms. The pair of pivoting arms clamp two opposing sides of the glass substrate from a second direction.

[0003] Japanese Patent Application Publication No. 5-154431

[0004] However, when the glass substrate is accommodated in a box-shaped accommodation unit, there may be insufficient space around the glass substrate for the first clamping means and the second clamping means to grip the glass substrate, which may result in the glass substrate not being gripped properly.

[0005] This disclosure has been made to solve the above-mentioned problems, and one purpose of this disclosure is to provide a work transport robot and a control method for a work transport robot that can properly grip a workpiece even when there is no space to grip the workpiece at the location where the workpiece is placed.

[0006] A work transport robot according to a first aspect of this disclosure comprises a robot arm, a hand attached to the robot arm and holding a workpiece, and a control unit that controls the operation of the robot arm and the hand, wherein the hand includes a drawer unit that draws out the workpiece and a gripper unit that grips the workpiece, and the control unit executes a process of moving the workpiece by the drawer unit to a gripping position where the gripper unit will grip the workpiece, and causing the gripper unit to grip the workpiece that has been moved to the gripping position.

[0007] In the workpiece transport robot according to the first aspect of this disclosure, as described above, the control unit executes a process of moving the workpiece by the drawer unit to a gripping position where the gripper unit grips the workpiece, and then gripping the workpiece moved to the gripping position by the gripper unit. This allows the workpiece to be moved to the gripping position even if there is not enough space for the gripper unit to grip the workpiece at the location where the workpiece was previously placed. As a result, the workpiece can be properly gripped.

[0008] A control method for a work transport robot according to a second aspect of this disclosure is a control method for a work transport robot comprising a robot arm, a hand attached to the robot arm and holding a work, and a control unit that controls the operation of the robot arm and the hand, wherein the hand includes a drawer section that draws out the work and a gripper section that grips the work, and comprises moving the work by the drawer section to a gripping position where the gripper section grips the work, and gripping the work moved to the gripping position by the gripper section.

[0009] A control method for a workpiece transport robot according to a second aspect of this disclosure includes, as described above, moving the workpiece by the drawer to a gripping position where the gripper grips the workpiece, and gripping the workpiece moved to the gripping position by the gripper. This allows the workpiece to be moved to the gripping position even if there is not enough space for the gripper to grip the workpiece at the location where the workpiece was previously placed. As a result, a control method for a workpiece transport robot that can properly grip the workpiece can be provided.

[0010] According to the present disclosure, the workpiece transport robot and the method for controlling the workpiece transport robot can properly grip the workpiece even when there is no space to grip the workpiece at the location where the workpiece is placed.

[0011] 1 is a block diagram of a substrate transport robot according to a first embodiment; FIG. 2 is a diagram showing the substrate transport robot, one accommodation unit, and another accommodation unit according to the first embodiment; FIG. 3 is a perspective view of a hand according to the first embodiment as seen from the tip side; FIG. 4 is a perspective view of the hand according to the first embodiment as seen from the base end side; FIG. 5 is a diagram showing a claw portion of the hand according to the first embodiment; FIG. 6 is a perspective view of the hand according to the first embodiment as seen from the side; FIG. 7 is a diagram showing the claw portion of the hand according to the first embodiment; FIG. 8 is a side view of a substrate; FIG. 9 is a flow diagram for explaining the operation of the substrate transport robot when transporting a substrate accommodated in one accommodation unit to another accommodation unit according to the first embodiment; FIG. 10 is a perspective view showing a state in which the substrate has been moved to a gripping position by a frictional drawer; FIG. 11 is a side view showing a state in which the frictional drawer has contacted the underside of the substrate; FIG. 12 is a side view showing a state in which the substrate has been lifted from below by the frictional drawer; FIG. 13 is a side view showing a state in which the substrate has been moved to a gripping position by the frictional drawer; FIG. 14 is a diagram showing a state in which a substrate gripped by a gripper is transported from one accommodation unit to another accommodation unit; FIG. 15 is a flow diagram for explaining the operation of the substrate transport robot when transporting a substrate accommodated in another accommodation unit to the first accommodation unit according to the first embodiment; FIG. 1 is a diagram showing a state in which a substrate gripped by a gripper according to the first embodiment is transported from another accommodation unit to one accommodation unit. FIG. 2 is a perspective view of a hand according to a second embodiment. FIG. 3 is a perspective view of a frictional drawer according to the second embodiment. FIG. 4 is a top view of a frictional drawer according to the second embodiment. FIG. 5 is a diagram for explaining the operation of gripping a substrate by a hand according to the second embodiment. (a) is a diagram showing a state before the substrate is gripped by the hand. (b) is a diagram showing a state in which the substrate has been gripped by the hand. FIG. 6 is a perspective view of a hand according to a modified example of the first embodiment. (b) is a perspective view of a gripper according to a modified example of the first embodiment. (c) is a side view of a gripper according to a modified example of the first embodiment. (d) is a perspective view of a frictional drawer according to a modified example of the second embodiment.

[0012] First Embodiment A first embodiment of the present disclosure that embodies the present disclosure will now be described with reference to the drawings. In this specification, the up-down direction is referred to as the Z direction. The upper side is referred to as the Z1 side, and the lower side is referred to as the Z2 side. The direction from the tip to the base end of the hand 50 is referred to as the A direction. The tip side and base end side of the hand 50 are referred to as the A1 side and the A2 side, respectively. The direction perpendicular to the A direction is referred to as the B direction. The right side as viewed from the tip of the hand 50 is referred to as the B1 side, and the left side as viewed from the tip of the hand 50 is referred to as the B2 side. The A direction and the B direction are directions along a horizontal plane. The A direction and the B direction are examples of a first direction and a second direction, respectively.

[0013] 1, the substrate transport robot 100 includes a robot arm 10, a self-propelled carriage 20, a control unit 30, a tool attachment unit 40, and a hand 50. The substrate transport robot 100 is an example of a workpiece transport robot.

[0014] As shown in FIG. 2 , in the first embodiment, the substrate transfer robot 100 is a vertical articulated robot. The substrate transfer robot 100 includes a plurality of joint axes JT. For example, the robot arm 10 includes six joint axes JT1, JT2, JT3, JT4, JT5, and JT6. The number of joint axes JT may be other than six. In addition, the drive unit 11 shown in FIG. 1 is disposed in each of the joint axes JT1 to JT6.

[0015] The robot arm 10 is placed on the self-propelled cart 20. As shown in Fig. 1 , the self-propelled cart 20 includes wheels 21 and a drive unit 22. The drive unit 22 is, for example, a motor that drives the wheels 21. The operation of the drive unit 22 is controlled by a control unit 30.

[0016] 1 , the control unit 30 controls the operation of the robot arm 10 and the hand 50. The control unit 30 also controls the overall operation of the substrate transport robot 100. The control unit 30 includes a main control unit 31, a servo control unit 32, and a drive circuit unit 33. The main control unit 31 and the servo control unit 32 each include, for example, a CPU (Central Processing Unit). The main control unit 31 controls the joint axis JT of the substrate transport robot 100. The servo control unit 32 controls the power supplied to the drive unit 11 of the joint axis JT based on a command from the main control unit 31. The control unit 30 is a robot controller.

[0017] The drive circuit unit 33 supplies drive power to the drive unit 11 of the joint axis JT. The drive circuit unit 33 includes an inverter circuit that supplies AC power to the drive unit 11. A drive circuit unit 33 is provided for each joint axis JT.

[0018] The drive unit 11 is a drive source for operating the substrate transport robot 100. The drive unit 11 includes a servo motor, an encoder, and a reducer. The servo motor rotates when power is supplied. The servo motor rotates its rotation shaft by, for example, three-phase AC power. The encoder detects the rotation angle of the servo motor. The encoder then outputs a detection value indicating the detected rotation angle of the servo motor to the main control unit 31 and the servo control unit 32.

[0019] The tool mounting unit 40 mounts the hand 50 exchangeably on the robot arm 10. The tool mounting unit 40 is, for example, an automatic tool changer.

[0020] As shown in FIG. 3 , the hand 50 is attached to the robot arm 10 and holds the substrate 200. The hand 50 is attached to the robot arm 10 via the tool attachment unit 40. The hand 50 includes a support unit 51, a support unit 52, a gripper 53, a drive unit 55, a movement mechanism 56, a drive unit 57 shown in FIG. 4 , a movement mechanism 58, and a friction drawer 59. The gripper 53 includes a gripper 53 a and a gripper 53 b. The friction drawer 59 is an example of a drawer and a first friction drawer. The gripper 53 a and the gripper 53 b are an example of a first gripper and a second gripper, respectively. The substrate 200 is an example of a workpiece.

[0021] The support portion 51 is a rod-shaped member extending along direction A. The support portion 52 is a rod-shaped member extending along direction B, which is perpendicular to direction A. The support portion 51 and the support portion 52 are connected to each other.

[0022] In the first embodiment, the gripping portion 53a grips the substrate 200 from direction A, which is horizontal. Specifically, the gripping portion 53a includes a claw portion 531a and an abutment portion 532a shown in FIG. 4. The claw portion 531a is attached to a plate-shaped member 54a. The claw portion 531a is attached to the member 54a so as to protrude from the member 54a toward the Z2 side. The member 54a is attached to a frame-shaped member 54b. The support portion 51 penetrates the member 54b. The claw portion 531a is an example of a first claw portion.

[0023] The claw portion 531a grips the leading end side of the substrate 200 in the direction A. As shown in Fig. 5, the claw portion 531a is formed with a recess 533a for hooking the leading end side of the substrate 200.

[0024] 4, in the first embodiment, the contact portion 532a contacts the base end side of the substrate 200. The contact portion 532a is a columnar member extending along the Z2 direction. A pair of the columnar contact portions 532a is arranged. Alternatively, the contact portion 532a may be a plate-like member extending along the B direction.

[0025] As shown in FIG. 3, the drive unit 55 drives the gripping unit 53a. The drive unit 55 is disposed on the support unit 51. The drive unit 55 is connected to the member 54b. The drive unit 55 moves the claw portion 531a along the A direction together with the members 54b and 54a. The drive unit 55 is a linear movement mechanism that moves the claw portion 531a along the A direction. The drive unit 55 is, for example, an air cylinder or a motor. As shown in FIG. 6, when the drive unit 55 moves the claw portion 531a, the substrate 200 is gripped from the A direction by the claw portion 531a and the abutment portion 532a. Furthermore, the movement mechanism 56 moves the abutment portion 532a along the Z direction. The movement mechanism 56 is, for example, an air cylinder.

[0026] In the first embodiment, as shown in Fig. 4, the gripping portion 53b grips the substrate 200 from direction B along a horizontal direction intersecting direction A. The gripping portion 53b includes a pair of claws 531b. The pair of claws 531b grip the substrate 200 from direction B. As shown in Fig. 7, protrusions 532b that protrude in the horizontal direction are disposed at the tips of the pair of claws 531b. The protrusions 532b support the lower surface of the substrate 200.

[0027] In the first embodiment, as shown in FIG. 4 , the drive unit 57 drives the gripping unit 53b. The drive unit 57 is disposed on the support unit 52. The drive unit 57 is disposed for each of the pair of claws 531b. The drive unit 57 moves the claws 531b along direction B. The drive unit 57 is a linear movement mechanism that moves the claws 531b along direction B. The drive unit 57 is, for example, an air cylinder. The drive unit 57 moves the pair of claws 531a toward each other, causing the pair of claws 531b to grip the substrate 200 from direction B.

[0028] The movement mechanism 58 moves each of the pair of claws 531b along the Z direction. The movement mechanism 58 is, for example, an air cylinder.

[0029] As shown in FIG. 3 , the frictional drawer 59 is a member for drawing out the substrate 200. The frictional drawer 59 draws out the substrate 200 by frictional force. The frictional drawer 59 is disposed at the tip of the hand 50. The frictional drawer 59 includes an attachment portion 59a and a contact portion 59b. The attachment portion 59a is attached to the member 54a. The attachment portion 59a has a Y-shape. The contact portions 59b are disposed at each of the bifurcated portions of the attachment portion 59a. The contact portions 59b are made of, for example, rubber. Note that the contact portions 59b may be made of a material other than rubber as long as they can draw out the substrate 200 by frictional force.

[0030] The sensor unit 60 is attached to the robot arm 10. The sensor unit 60 emits and receives detection light to detect the position of a detection target. The sensor unit 60 includes a sensor unit 61 and a sensor unit 62. The sensor unit 61 emits detection light toward a mirror unit 63. The sensor unit 61 emits detection light along direction A. The detection light emitted from the sensor unit 61 is irradiated onto the mirror unit 63. The detection light reflected from the detection target is received by the sensor unit 61 via the mirror unit 63. The sensor unit 61 is attached to the tool mounting unit 40 via a plate-shaped member 54c. The sensor unit 61 is attached to the B1 side of the member 54c. The sensor unit 61 is, for example, an optical sensor.

[0031] The sensor unit 62 emits detection light in a direction different from that of the sensor unit 61. Specifically, the sensor unit 62 emits detection light in the Z2 direction. The sensor unit 62 is attached to the tool mounting unit 40 via a plate-shaped member 54c. The sensor unit 62 is attached to the B2 side of the member 54c. The sensor unit 62 is, for example, an optical sensor.

[0032] The mirror unit 63 is disposed on the hand 50. The mirror unit 63 reflects the detection light emitted from the sensor unit 61 toward the detection target, and also reflects the detection light reflected from the detection target toward the sensor unit 61. The mirror unit 63 is attached to the member 54a via a plate-shaped member 54d. The mirror unit 63 is inclined at an angle of, for example, 45 degrees with respect to the A direction.

[0033] The imaging unit 64 captures an image of the detection target. The imaging unit 64 is, for example, a two-dimensional camera. The imaging unit 64 is attached to the tool attachment unit 40 via a plate-shaped member 54e. The imaging direction of the imaging unit 64 is the Z2 direction.

[0034] In the first embodiment, as shown in FIG. 2 , the substrate transfer robot 100 grasps the substrate 200 from the accommodation unit 300 in which the substrate 200 is accommodated in advance, and transfers the substrate 200 to the accommodation unit 310. The accommodation unit 300 includes a housing 301 and a plurality of shelf units 302. The shelf units 302 are arranged in a plurality of tiers. A space 303 is formed between the shelf units 302. The substrate 200 is arranged on the surface of the shelf units 302. That is, in the first embodiment, a plurality of substrates 200 are arranged in the vertical direction. The accommodation unit 310 includes a housing 311. The substrate 200 is transferred into the housing 311. The accommodation unit 310 is attached to the self-propelled carriage 20. The accommodation units 300 and 310 are examples of a first accommodation unit and a second accommodation unit, respectively.

[0035] In the first embodiment, as shown in FIG. 8 , the substrate 200 includes a plurality of stacked substrate portions. The stacked substrate portions are temporarily fixed by a temporary fixing member 210. Specifically, the substrate portion includes a target substrate 201 to be processed, a metal plate 202 disposed on the upper surface of the target substrate 201, and a bake plate 203 disposed on the lower surface of the target substrate 201. For example, a plurality of target substrates 201 are stacked. The bake plate 203 functions as a spacer when processing the target substrate 201. The temporary fixing member 210 is, for example, adhesive tape. In addition, positioning pins 220 are arranged to penetrate the substrate 200. The positioning pins 220 are arranged on one end side and the other end side of the substrate 200. The positioning pins 220 protrude downward from the bake plate 203. The target substrate 201, the metal plate 202, and the bake plate 203 are examples of a work portion.

[0036] Next, with reference to FIG. 9, the operation of the substrate transport robot 100 when transporting the substrate 200 housed in one housing section 300 to another housing section 310 will be described.

[0037] In step S1, the control unit 30 executes a process of moving the self-propelled carriage 20 to the accommodation unit 300 in which the substrate 200 is accommodated in advance.

[0038] In step S2, the control unit 30 executes a process of detecting the substrate 200 using the sensor unit 61 and the sensor unit 62. The control unit 30 executes a process of capturing an image of the substrate 200 stored in the storage unit 300 using the imaging unit 64. The control unit 30 recognizes the position of the storage unit 300 based on the detection results of the sensor unit 61 and the sensor unit 62 and the image captured by the imaging unit 64.

[0039] In step S3, the control unit 30 recognizes the number of shelves of the shelf section 302 on which the substrate 200 to be grasped first is located among the multiple substrates 200 stored in the storage section 300, based on the detection results of the sensor section 61 and the sensor section 62 and the image captured by the imaging section 64.

[0040] In step S4, in the first embodiment, as shown in Fig. 10 , the control unit 30 executes a process of moving the substrate 200 by the frictional drawer 59 to a gripping position P where the gripper 53 grips the substrate 200. Specifically, as shown in Fig. 11 , the control unit 30 operates the robot arm 10 to insert the frictional drawer 59 from below the substrate 200 placed on the shelf 302 into the space 303 of the shelf 302. The frictional drawer 59 is located below the end of the substrate 200 on the A2 side. The control unit 30 operates the robot arm 10 to bring the frictional drawer 59 into contact with the underside of the substrate 200.

[0041] In the first embodiment, as shown in FIGS. 12 and 13 , the control unit 30 executes a process of sliding the substrate 200 along the horizontal direction using the frictional draw-out unit 59 to move it to the gripping position P while the substrate 200 and the frictional draw-out unit 59 are in contact with each other. The control unit 30 also executes a process of sliding the substrate 200 along the horizontal direction using the frictional draw-out unit 59 to move it to the gripping position P while the frictional draw-out unit 59 is lifting the substrate 200 from below. The control unit 30 operates the robot arm 10 to slide the substrate 200 along the horizontal direction using the frictional draw-out unit 59. Specifically, first, as shown in FIG. 12 , the robot arm 10 lifts the substrate 200 using the frictional draw-out unit 59. Next, as shown in FIG. 13 , the robot arm 10 slides the substrate 200 along the horizontal direction using the frictional draw-out unit 59. At this time, the substrate 200 is tilted so that the A1 side is lower. The substrate 200 is slid toward the A2 side. At the gripping position P, a part of the substrate 200 is pulled out to the outside of the accommodation section 300. At the gripping position P, the side surface of the substrate 200 is exposed from the outside of the accommodation section 300.

[0042] In step S5, in the first embodiment, the control unit 30 executes a process of causing the gripping unit 53 to grip the substrate 200 that has been moved to the gripping position P. The control unit 30 drives the drive unit 55 to grip the substrate 200 from direction A using the claws 531a and the abutment portions 532a. The control unit 30 drives the drive unit 57 to grip the substrate 200 from direction B using the pair of claws 531b. At the gripping position P, the side surfaces of the substrate 200 are exposed from the outside of the accommodation unit 300, and therefore the substrate 200 is gripped by the pair of claws 531b without interference between the claws 531b and the housing 301.

[0043] 14 , the control unit 30 executes a process of transporting the substrate 200 gripped by the gripper 53 to the accommodation unit 310. The control unit 30 operates the robot arm 10 to transport the substrate 200 gripped by the gripper 53 to the accommodation unit 310. After transporting the substrate 200 to the accommodation unit 310, the control unit 30 releases the grip of the substrate 200 by the gripper 53. Note that the operations from steps S4 to S6 are repeated for the number of substrates 200 accommodated in the accommodation unit 300.

[0044] Next, with reference to FIG. 15, the operation of the substrate transport robot 100 when transporting a substrate 200 accommodated in one accommodation section 310 to another accommodation section 300 will be described.

[0045] In step S11, the control unit 30 executes a process of moving the self-propelled carriage 20 to the accommodation unit 300 in which the substrate 200 is accommodated in advance, similar to step S1 described above.

[0046] In step S12 , the control unit 30 recognizes the position of the storage unit 300 based on the detection results of the sensor units 61 and 62 and the image captured by the imaging unit 64 , similar to step S2 above.

[0047] In step S13, similar to step S3 above, the control unit 30 recognizes the number of shelves 302 on which the substrate 200 to be initially placed is located based on the detection results of the sensor units 61 and 62 and the image captured by the imaging unit 64.

[0048] In step S14, the control unit 30 executes a process of causing the substrate 200 accommodated in the accommodation unit 310 to be gripped by the gripper 53.

[0049] In step S15, the control unit 30 executes a process of transporting the substrate 200 gripped by the gripper 53 to the storage unit 300. First, the control unit 30 slides the substrate 200 gripped by the gripper 53 toward the rear of the storage unit 300. Then, when the substrate 200 reaches the gripping position P, the control unit 30 releases the grip of the substrate 200 by the gripper 53. Thereafter, as shown in FIG. 16 , the control unit 30 slides the substrate 200 toward the rear of the storage unit 300, for example, by the claw 531a. Note that the control unit 30 may also slide the substrate 200 toward the rear of the storage unit 300 by a part of the hand 50 other than the claw 531a. Note that the operations of steps S14 and S15 are repeated the number of times equal to the number of substrates 200 stored in the storage unit 300.

[0050] Effect of First Embodiment The control unit 30 executes a process of moving the substrate 200 by the frictional pull-out unit 59 to a gripping position P where the gripping unit 53 grips the substrate 200, and gripping the substrate 200 moved to the gripping position P by the gripping unit 53. As a result, even if there is not enough space for the gripping unit 53 to grip the substrate 200 at the location where the substrate 200 was previously placed, the substrate 200 is moved to the gripping position P. As a result, the substrate 200 can be gripped appropriately.

[0051] The frictional drawing unit 59 draws out the substrate 200 by frictional force. The control unit 30 executes a process in which the frictional drawing unit 59 slides the substrate 200 along the horizontal direction and moves it to the gripping position P while the substrate 200 is in contact with the frictional drawing unit 59. This allows the substrate 200 to be moved by frictional force without providing a mechanism for sucking air, as is the case when the substrate 200 is suctioned by a suction unit, thereby suppressing an increase in the number of parts.

[0052] The control unit 30 executes a process of causing the frictional pull-out unit 59 to slide the substrate 200 in the horizontal direction and move it to the gripping position P, while the frictional pull-out unit 59 is lifting the substrate 200 from below. This reduces the contact area between the substrate 200 and the portion where the substrate 200 was placed, allowing the substrate 200 to be pulled out smoothly.

[0053] The gripping unit 53 includes a gripping unit 53a that grips the substrate 200 from direction A along the horizontal direction, and a gripping unit 53b that grips the substrate 200 from direction B along the horizontal direction intersecting direction A. The control unit 30 controls the gripping units 53a and 53b to grip the substrate 200 that has been moved to the gripping position P. As a result, the substrate 200 is gripped by both the gripping units 53a and 53b, and thus, falling off of the substrate 200 can be prevented.

[0054] The substrate transfer robot 100 includes a self-propelled carriage 20 on which the robot arm 10 is placed. The control unit 30 executes a process of moving the self-propelled carriage 20 to a storage unit 300 in which a substrate 200 has been stored in advance, moving the substrate 200 placed in the storage unit 300 to a gripping position P by a frictional pull-out unit 59, gripping the substrate 200 moved to the gripping position P by a gripper 53, and transporting the substrate 200 gripped by the gripper 53 to the storage unit 310. As a result, the substrate transfer robot 100 including the self-propelled carriage 20 can appropriately grip the substrate 200 even when there is insufficient space for the gripper 53 to grip the substrate 200. Furthermore, even when a plurality of storage units 300 are arranged at spaced apart positions, a single substrate transfer robot 100 can be self-propelled to transport the substrate from the plurality of storage units 300 to the storage unit 310.

[0055] The frictional drawer 59 is disposed at the tip of the hand 50. As a result, when the substrate 200 is disposed in the storage unit 300, the frictional drawer 59 disposed at the tip of the hand 50 can draw out the substrate 200 on the front side of the storage unit 300 without inserting the hand 50 all the way into the storage unit. Therefore, interference between the hand 50 and the storage unit 300 can be suppressed.

[0056] The substrate transport robot 100 is a vertical articulated robot that can perform complex operations, and can therefore easily move the substrate 200 to the gripping position P.

[0057] The substrates 200 include a stacked substrate 201 to be processed, a metal plate 202, and a bake plate 203. The stacked substrates 201 to be processed, the metal plate 202, and the bake plate 203 are temporarily fixed by a temporary fixing member 210. When the upper surfaces of the plurality of substrates 200 temporarily fixed by the temporary fixing member 210 are lifted by suction using a suction unit or the like, the weight of the substrates 200 may cause the temporarily fixed state to be released. Therefore, by moving the substrates 200 to a gripping position P for gripping by the gripping unit 53 and gripping the substrates 200 moved to the gripping position P with the gripping unit 53, the plurality of substrates 200 can be transported while preventing the temporarily fixed state from being released.

[0058] A plurality of substrates 200 are arranged in the vertical direction. As a result, by moving the substrates 200 to the gripping position P by the frictional pull-out portion 59, it is possible to prevent the substrates 200 arranged in the vertical direction from interfering with the gripping portion 53.

[0059] Second Embodiment The configuration of a hand 150 according to a second embodiment will be described. As shown in Figure 17, the hand 150 has substantially the same configuration as the hand 50 according to the first embodiment, except that the configuration of the frictional drawer 160 is different from that of the frictional drawer 59 according to the first embodiment, the image capture unit 64 is attached to the A1 side of the support unit 52, and the mirror unit 63 is not provided. The frictional drawer 160 is an example of the drawer and second frictional drawer defined in the claims.

[0060] 18 , in the second embodiment, the frictional drawer 160 includes a first claw 161 that contacts the front surface, which is the Z1 side surface, of the substrate 200 and a second claw 162 that contacts the back surface, which is the Z2 side surface, of the substrate 200, and draws out the substrate 200 by friction with the substrate 200. Specifically, the first claw 161 is disposed on the Z1 side of the frictional drawer 160, and the second claw 162 is disposed on the Z2 side of the frictional drawer 160. That is, the first claw 161 and the second claw 162 are spaced apart in the Z direction. The frictional drawer 160 also includes a substantially U-shaped, plate-shaped upper support member 163, and the first claw 161 is attached to the B2 side of the upper support member 163. The frictional drawer 160 also includes a plate-shaped lower support member 164, and the second claw 162 is attached to the B1 side of the lower support member 164. The lower support member 164 also includes a cutout portion 164a that is a portion cut out of the lower support member 164. The cutout portion 164a is formed to prevent the lower support member 164 from interfering with other members.

[0061] 19 , the width W of the first claw portion 161 and the width W of the second claw portion 162 in the direction B are substantially equal. In addition, the pitch p between the first claw portion 161 and the second claw portion 162 in the direction B is approximately four to five times the width W. Note that the above-described sizes of the width W and pitch p are merely examples and are not limited to these.

[0062] 18 , a buffer member 165 is disposed on the side of the first claw portion 161 that comes into contact with the front surface of the substrate 200. A buffer member 165 is also disposed on the side of the second claw portion 162 that comes into contact with the back surface of the substrate 200. The buffer member 165 is formed from, for example, urethane. The buffer member 165 absorbs the impact caused by contact between the first claw portion 161 and the second claw portion 162 and the substrate 200.

[0063] 20 , in the second embodiment, the distance d between the first claw portion 161 and the second claw portion 162 in the Z direction, which is the thickness direction of the substrate 200, is larger than the thickness t of the substrate 200. For example, the distance d is approximately 1.5 to 3 times the thickness t. Note that the distance d described above is an example and is not limited to this.

[0064] 19 , in direction A, which is the direction in which first claw portion 161 and second claw portion 162 extend, the length of first claw portion 161 is shorter than the length of second claw portion 162. For example, length L1 of the portion of first claw portion 161 that is further distal than stopper 166 is approximately 0.1 to 0.3 times length L2 of the portion of second claw portion 162 that is further distal than stopper 166.

[0065] In the second embodiment, as shown in FIG. 19 , the tip surface 161 a of the first claw 161 is inclined so as to intersect with the A direction, which is the direction in which the first claw 161 extends, at an angle other than 90 degrees. For example, when viewed from the Z direction, the tip surface 161 a is inclined toward the A2 side from the B1 side, which is the inside of the first claw 161, toward the B2 side, which is the outside. That is, when viewed from the Z direction, the B1 side, which is the inside of the first claw 161, protrudes toward the A1 side, which is the tip side, more than the B2 side, which is the outside. This prevents the contact area between the first claw 161 and the surface of the Z1 side of the substrate 200 from increasing even when the rectangular substrate 200 rotates clockwise or counterclockwise within the A-B plane. The tip surface 165 a of the buffer member 165 disposed on the first claw 161 shown in FIG. 18 is also inclined like the tip surface 161 a of the first claw 161.

[0066] In the second embodiment, as shown in FIG. 18 , the frictional drawer 160 includes stoppers 166 that prevent the substrate 200 from moving in the A2 direction, which is toward the base ends of the first and second claws 161 and 162. For example, a pair of stoppers 166 is provided. The pair of stoppers 166 is attached to a generally U-shaped upper support member 163. The pair of stoppers 166 extends in the Z2 direction from the upper support member 163. The pair of stoppers 166 is formed, for example, from resin. As a result, because resin is relatively hard, even if the substrate 200 abuts against the stoppers 166, it is possible to prevent the substrate 200 from moving in the A2 direction. Furthermore, the pair of stoppers 166 has, for example, a cylindrical shape. As a result, it is possible to prevent the substrate 200 from being damaged even if the substrate 200 abuts against the stoppers 166.

[0067] 17 , in the second embodiment, the sensor unit 167 detects the substrate 200 accommodated in the accommodation unit 300 shown in FIG. 2. The sensor unit 167 includes a first sensor unit 167a arranged on the tip end side of the support unit 51 and a second sensor unit 167b arranged on the base end side of the support unit 51. The second sensor unit 167b has a configuration similar to that of the sensor unit 62 of the first embodiment. The first sensor unit 167a and the second sensor unit 167b are, for example, optical sensors that irradiate detection light in the Z2 direction and receive the detection light in order to detect the position of the detection target.

[0068] Next, with reference to FIG. 20 , the gripping operation of the substrate 200 by the hand 150 will be described. The control unit 30 executes a process of detecting the substrate 200 using the first sensor unit 167a and the second sensor unit 167b. The control unit 30 executes a process of gripping the substrate 200 accommodated in the accommodation unit 300 using the hand 150 based on the detection result of the sensor unit 167. Specifically, as shown in FIG. 20A , the control unit 30 moves the hand 150 so that the substrate 200 is positioned between the first claw unit 161 and the second claw unit 162. At this time, the substrate 200 abuts against the stopper 166, thereby preventing the substrate 200 from moving in the A2 direction beyond the stopper 166. Furthermore, even if the substrate 200 is tilted with respect to the B direction, the contact area between the substrate 200 and the first claw unit 161 is relatively small as long as the tilt direction of the substrate 200 and the tilt direction of the tip surface 161a of the first claw unit 161 are the same. In the second embodiment, as shown in FIG. 20B , the control unit 30 rotates the hand 150 while the substrate 200 is positioned between the first claw 161 and the second claw 162, thereby executing a process of bringing the first claw 161 into contact with the front surface of the substrate 200 and bringing the second claw 162 into contact with the rear surface of the substrate 200. For example, the control unit 30 rotates the joint axis JT6 at the most distal end of the robot arm 10 to rotate the hand 150. As a result, the substrate 200 is sandwiched between the first claw 161 and the second claw 162. Note that by adjusting the amount of rotation of the joint axis JT6, the substrate 200 can be sandwiched between the first claw 161 and the second claw 162 even if the thickness t of the substrate 200 changes. For example, when the thickness t is small, the amount of rotation of the joint axis JT6 is increased, and when the thickness t is large, the amount of rotation of the joint axis JT6 is decreased. Furthermore, even if the thickness t is the same, the frictional force between the first claw portion 161 and the second claw portion 162 and the substrate 200 can be adjusted by adjusting the rotation amount of the joint shaft JT6. For example, the frictional force increases by increasing the rotation amount of the joint shaft JT6, and decreases by decreasing the rotation amount of the joint shaft JT6. Then, the control unit 30 executes a process of sliding the substrate 200 along the horizontal direction using the friction drawer 160 to move it to the gripping position P while the first claw portion 161 and the second claw portion 162 are in contact with the substrate 200.

[0069] Effect of the Second Embodiment The frictional pull-out unit 160 includes a first claw 161 that contacts the front surface of the substrate 200 and a second claw 162 that contacts the back surface of the substrate 200, and pulls out the substrate 200 by friction with the substrate 200. The control unit 30 executes a process in which the frictional pull-out unit 160 slides the substrate 200 horizontally to the gripping position while the first claw 161 and the second claw 162 are in contact with the substrate 200. Here, shavings and the like generated in other processes may adhere to the substrate 200. In this case, simply supporting the back surface of the substrate 200, as with the frictional pull-out unit 59 of the first embodiment, may cause the substrate 200 to slip. For this reason, the sliding movement of the frictional pull-out unit 59 must be performed slowly. In contrast, in the second embodiment, both surfaces of the substrate 200 are held by the first claw 161 and the second claw 162, allowing the frictional pull-out unit 160 to slide relatively quickly. As a result, the time required to transport the substrate 200 can be reduced.

[0070] The distance d between the first claw portion 161 and the second claw portion 162 in the thickness direction of the substrate 200 is larger than the thickness t of the substrate 200, and the control unit 30 rotates the hand 150 with the substrate 200 positioned between the first claw portion 161 and the second claw portion 162, thereby executing a process of bringing the first claw portion 161 into contact with the front surface of the substrate 200 and bringing the second claw portion 162 into contact with the back surface of the substrate 200. As a result, the distance d between the first claw portion 161 and the second claw portion 162 in the thickness direction of the substrate 200 is larger than the thickness t of the substrate 200, so that the substrate 200 can be positioned between the first claw portion 161 and the second claw portion 162 even if there is a manufacturing error in the thickness t of the substrate 200 or the distance d between the first claw portion 161 and the second claw portion 162. Furthermore, since the substrate 200 is sandwiched between the first claw portion 161 and the second claw portion 162, the substrate 200 can be further prevented from slipping.

[0071] In the direction in which the first claw portion 161 and the second claw portion 162 extend, the length of the first claw portion 161 is shorter than the length of the second claw portion 162. This makes the contact area between the surface of the substrate 200 and the first claw portion 161 relatively small, which is particularly effective when it is desirable to avoid contact of the surface of the substrate 200 with the first claw portion 161 as much as possible.

[0072] The tip surface 161a of the first claw portion 161 is inclined so as to intersect at an angle other than 90 degrees with the extension direction of the first claw portion 161. This makes it possible to prevent the contact area between the substrate 200 and the first claw portion 161 from increasing even when the substrate 200 is rotating within the A-B plane as viewed from the Z direction.

[0073] The frictional drawer 160 includes a stopper 166 that prevents the substrate 200 from moving toward the base ends of the first claw 161 and the second claw 162. This prevents the contact area between the surface of the substrate 200 and the first claw 161 from increasing due to the substrate 200 moving toward the base end of the first claw 161.

[0074] The hand 150 includes a sensor unit 167 that detects the substrate 200 accommodated in the accommodation unit 300. Based on the detection result of the sensor unit 167, the control unit 30 executes a process of gripping the substrate 200 accommodated in the accommodation unit 300 by the hand 150. This allows the position of the substrate 200 to be detected, so that the hand 150 can appropriately grip the substrate 200.

[0075] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and includes all modifications (modifications) within the meaning and scope of the claims.

[0076] In the first embodiment, the control unit 30 slides the substrate 200 in a state in which the frictional pull-out portion 59 lifts the substrate 200 from below and tilts the substrate 200, but the present disclosure is not limited to this. For example, the control unit 30 may bring the frictional pull-out portion 59 into contact with the lower surface of the substrate 200 and slide the substrate 200 without tilting the substrate 200.

[0077] In the first embodiment, the frictional pull-out unit 59 pulls out the substrate 200 by friction, but the present disclosure is not limited thereto. For example, as in the modified hand 250 shown in FIG. 21 , the substrate 200 may be pulled out by an adsorption unit 251. The adsorption unit 251 adsorbs the substrate 200. The control unit 30 executes a process of sliding the substrate 200 adsorbed by the adsorption unit 251 along the horizontal direction to the gripping position P. The adsorption unit 251 adsorbs the substrate 200 by, for example, air suction. The adsorption unit 251 adsorbs the upper surface of the substrate 200. Note that the adsorption unit 251 may also adsorb the lower surface of the substrate 200. The adsorption unit 251 is attached to the member 54 a at the tip of the hand 250 via a plate-shaped member 252. By adsorbing the substrate 200 with the adsorption unit 251, the adsorption force between the adsorption unit 251 and the substrate 200 becomes relatively large, allowing the substrate 200 to be reliably pulled out. The suction portion 251 is an example of a drawer portion.

[0078] In the first embodiment, the grip portion 53 a includes the claw portion 531 a and the abutment portion 532 a, but the present disclosure is not limited to this. For example, the grip portion 53 a may include a pair of claw portions 531 a.

[0079] In the first embodiment, the gripping portion 53 includes one gripping portion 53a and one gripping portion 53b. However, the present disclosure is not limited to this. For example, a plurality of gripping portions 53a and a plurality of gripping portions 53b may be provided. This allows the gripping portion 53 to grip the substrate 200 even when the substrate 200 is relatively heavy. Alternatively, the gripping portion 53 may include only the gripping portion 53b.

[0080] In the first embodiment, an example in which the robot arm 10 is mounted on the self-propelled carriage 20 has been described, but the present disclosure is not limited to this. For example, the present disclosure can also be applied to a substrate transport robot 100 in which the robot arm 10 is fixed to the floor.

[0081] In the first embodiment, the friction drawer 59 is disposed at the tip of the hand 50, but the present disclosure is not limited to this. For example, the friction drawer 59 may be disposed in the center of the hand 50.

[0082] In the first embodiment, the substrate transport robot 100 is a vertical articulated robot, but the present disclosure is not limited to this. For example, the present disclosure can also be applied to a substrate transport robot that is a horizontal articulated robot.

[0083] In the first embodiment, the substrate transfer robot 100 transfers the stacked substrate 201, the metal plate 202, and the bake plate 203, but the present disclosure is not limited to this. For example, the substrate transfer robot 100 may transfer only one substrate that is not stacked.

[0084] In the first embodiment described above, an example was shown in which the gripping portion 53a was formed of a claw portion 531a and an abutting portion 532a, and the gripping portion 53b was formed with a pair of claw portions 531b, but the present disclosure is not limited to this. For example, as shown in FIGS. 22 and 23 , the gripping portion of the present disclosure may be formed with a chuck portion 400. Specifically, instead of the claw portion 531a and the abutting portion 532a, a pair of chuck portions 400 that grip the substrate 200 from the A1 side and the A2 side may be arranged. Instead of the pair of claw portions 531b of the gripping portion 53b, a pair of chuck portions 400 that grip the substrate 200 from the B1 side and the B2 side may be arranged.

[0085] In the second embodiment described above, an example has been shown in which the distance d between the first claw portion 161 and the second claw portion 162 in the thickness direction of the substrate 200 is greater than the thickness t of the substrate 200, but the present disclosure is not limited to this. For example, the distance d between the first claw portion 161 and the second claw portion 162 may be approximately the same as the thickness t of the substrate 200. The substrate 200 may be inserted between the first claw portion 161 and the second claw portion 162 so as to come into contact with the first claw portion 161 and the second claw portion 162.

[0086] In the second embodiment, the length of the first claw portion 161 is shorter than the length of the second claw portion 162 in the direction A in which the first claw portion 161 and the second claw portion 162 extend, but the present disclosure is not limited to this. For example, the length of the first claw portion 161 and the length of the second claw portion 162 may be the same.

[0087] In the second embodiment, the tip surface 161 a of the first claw portion 161 is inclined so as to intersect with the direction A in which the first claw portion 161 extends at an angle other than 90 degrees, but the present disclosure is not limited to this. For example, the tip surface 161 a of the first claw portion 161 may be perpendicular to the direction A in which the first claw portion 161 extends.

[0088] In the second embodiment described above, an example was shown in which the frictional drawer 160 includes the stopper 166 that prevents the substrate 200 from moving toward the base ends of the first claw 161 and the second claw 162, but the present disclosure is not limited to this. For example, the stopper 166 may not be provided in the frictional drawer 160. Also, although an example was shown in which a pair of stoppers 166 are provided, only one stopper 166 may be provided.

[0089] In the second embodiment, the lower support member 164 includes the cutout portion 164a, which is a cutout portion of the lower support member 164. However, the present disclosure is not limited to this. For example, as in the friction drawer 170 shown in FIG. 24, the lower support member 171 may not include a cutout portion. In the friction drawer 170, a pair of stoppers 166 extend in the Z1 direction from the lower support member 164. The friction drawer 170 is an example of a drawer portion and a second friction drawer portion.

[0090] In the first and second embodiments, the control unit 30 as a robot controller controls the overall operation of the substrate transport robot 100. However, the present disclosure is not limited to this. For example, a higher-level control unit may be provided separately from the control unit 30, and the higher-level control unit may control the overall operation of the substrate transport robot 100.

[0091] In the first and second embodiments described above, an example in which the present disclosure is applied to the substrate transport robot 100 that transports the substrate 200 has been shown, but the present disclosure is not limited to this. For example, the present disclosure may be applied to a workpiece transport robot that transports a workpiece other than the substrate 200.

[0092] In the above first and second embodiments, an example has been shown in which the drive units 11 disposed in each of the joint axes JT1 to JT6 and the drive unit 22 disposed in the self-propelled carriage 20 are controlled by the same control unit 30, but the present disclosure is not limited to this. For example, the drive units 11 and the drive units 22 may be controlled by separate control units.

[0093] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0094] Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0095] (Aspect 1) A work transport robot comprising: a robot arm; a hand attached to the robot arm and holding a work; and a control unit that controls the operation of the robot arm and the hand, wherein the hand includes a drawer that draws out the work; and a gripper that grips the work, and the control unit executes a process of moving the work by the drawer to a gripping position where the gripper will grip the work, and causing the gripper to grip the work that has been moved to the gripping position.

[0096] (Aspect 2) The workpiece transport robot according to Aspect 1, wherein the pull-out unit includes a first friction pull-out unit that pulls out the workpiece by frictional force, and the control unit executes a process of sliding the workpiece along a horizontal direction using the first friction pull-out unit to move it to the gripping position while the workpiece and the first friction pull-out unit are in contact with each other.

[0097] (Aspect 3) In the workpiece transport robot according to Aspect 2, the control unit executes a process of sliding the workpiece along a horizontal direction using the first friction pull-out unit to move it to the gripping position while the first friction pull-out unit lifts the workpiece from below.

[0098] (Aspect 4) The workpiece transport robot according to any one of Aspects 1 to 3, wherein the drawer includes a suction unit that suctions the workpiece, and the control unit executes a process of sliding the workpiece suctioned by the suction unit along a horizontal direction to move it to the gripping position.

[0099] (Aspect 5) A work transport robot according to any one of Aspects 1 to 4, wherein the gripping unit includes: a first gripping unit that grips the work from a first direction along a horizontal direction; and a second gripping unit that grips the work from a second direction along a horizontal direction that intersects with the first direction; and the control unit controls the first gripping unit and the second gripping unit to grip the work that has been moved to the gripping position.

[0100] (Aspect 6) A work transport robot according to any one of Aspects 1 to 5, further comprising a self-propelled carriage on which the robot arm is placed, wherein the control unit executes a process of: moving the self-propelled carriage to a first storage unit in which the work is stored in advance; moving the work placed in the first storage unit to the gripping position by the drawer; gripping the work moved to the gripping position by the gripper; and transporting the work gripped by the gripper to a second storage unit.

[0101] (Aspect 7) The workpiece transport robot according to any one of Aspects 1 to 6, wherein the drawer is disposed at a tip of the hand.

[0102] (Aspect 8) The workpiece transport robot according to any one of Aspects 1 to 7, wherein the workpiece transport robot is a vertical articulated robot.

[0103] (Aspect 9) The workpiece transport robot according to any one of Aspects 1 to 8, wherein the workpiece includes a plurality of stacked workpiece portions, and the stacked workpiece portions are temporarily fixed by temporary fixing members.

[0104] (Aspect 10) The workpiece transport robot according to any one of Aspects 1 to 9, wherein a plurality of the workpieces are arranged along the vertical direction.

[0105] (Aspect 11) A work transport robot according to any one of Aspects 1 to 10, wherein the pull-out unit includes a second friction pull-out unit that includes a first claw unit that contacts the front surface of the workpiece and a second claw unit that contacts the back surface of the workpiece and pulls out the workpiece by friction with the workpiece, and the control unit executes a process of sliding the workpiece along a horizontal direction using the second friction pull-out unit to move it to the gripping position while the first claw unit and the second claw unit are in contact with the workpiece.

[0106] (Aspect 12) A work transport robot according to Aspect 11, wherein the distance between the first claw portion and the second claw portion in the thickness direction of the workpiece is greater than the thickness of the workpiece, and the control unit rotates the hand while the workpiece is positioned between the first claw portion and the second claw portion, thereby performing a process of bringing the first claw portion into contact with the front surface of the workpiece and bringing the second claw portion into contact with the back surface of the workpiece.

[0107] (Aspect 13) The workpiece transport robot according to aspect 11 or aspect 12, wherein the length of the first claw portion is shorter than the length of the second claw portion in the direction in which the first claw portion and the second claw portion extend.

[0108] (Aspect 14) The workpiece transport robot according to any one of Aspects 11 to 13, wherein a tip surface of the first claw portion is inclined so as to intersect with a direction in which the first claw portion extends at an angle other than 90 degrees.

[0109] (Aspect 15) The workpiece transport robot according to any one of Aspects 11 to 14, wherein the second frictional draw-out portion includes a stopper that prevents the workpiece from moving toward the base ends of the first claw portion and the second claw portion.

[0110] (Aspect 16) The workpiece transport robot according to any one of Aspects 11 to 15, wherein the hand includes a sensor unit that detects the workpiece accommodated in a first accommodation unit, and the control unit executes a process of gripping the workpiece accommodated in the first accommodation unit by the hand based on a detection result of the sensor.

[0111] (Aspect 17) A method for controlling a work transport robot comprising: a robot arm; a hand attached to the robot arm and holding a work; and a control unit for controlling the operation of the robot arm and the hand, wherein the hand includes a drawer unit that draws out the work; and a gripper unit that grips the work. The method comprises: moving the work by the drawer unit to a gripping position where the gripper will grip the work; and gripping the work that has been moved to the gripping position by the gripper.

[0112] 10 Robot arm 20 Self-propelled carriage 30 Control unit 50 Hand 53 Gripper 53a Gripper (first gripper) 53b Gripper (second gripper) 59 Frictional pull-out unit (pull-out unit, first frictional pull-out unit) 100 Substrate transport robot (work transport robot) 150 Hand 160 Frictional pull-out unit (pull-out unit, second frictional pull-out unit) 161 First claw 161a Tip surface 162 Second claw 166 Stopper 167 Sensor unit 170 Frictional pull-out unit (pull-out unit, second frictional pull-out unit) 200 Substrate (work) 201 Substrate to be processed (work unit) 202 Metal plate (work unit) 203 Bake plate (work unit) 210 Temporary fixing member 251 Suction unit (pull-out unit) 300 Storage section (first storage section) 310 Storage section (second storage section) A direction (first direction) B direction (second direction) d Distance between first claw section and second claw section P Gripping position t Thickness of substrate

Claims

1. A work transport robot comprising: a robot arm; a hand attached to the robot arm and holding a workpiece; and a control unit that controls the operation of the robot arm and the hand, wherein the hand includes a drawer unit that draws out the workpiece and a gripper unit that grips the workpiece, and the control unit executes a process of moving the workpiece, by the drawer unit, to a gripping position where the gripper unit will grip the workpiece, and causing the gripper unit to grip the workpiece that has been moved to the gripping position.

2. The work transport robot according to claim 1, wherein the pull-out section includes a first friction pull-out section that pulls out the workpiece by frictional force, and the control section executes a process in which the first friction pull-out section slides the workpiece along a horizontal direction and moves it to the gripping position while the workpiece and the first friction pull-out section are in contact with each other.

3. The work transport robot according to claim 2, wherein the control unit executes a process in which the first friction pull-out unit lifts the work from below and then slides the work along a horizontal direction to move it to the gripping position.

4. A work transport robot as described in claim 1, wherein the drawer includes a suction part that suctions the workpiece, and the control part executes a process of sliding the workpiece suctioned by the suction part along a horizontal direction to move it to the gripping position.

5. A work transport robot as described in claim 1, wherein the gripping unit includes: a first gripping unit that grips the work from a first direction along a horizontal direction; and a second gripping unit that grips the work from a second direction along a horizontal direction that intersects with the first direction; and the control unit controls the first gripping unit and the second gripping unit to grip the work that has been moved to the gripping position.

6. A work transport robot as described in claim 1, comprising a self-propelled carriage on which the robot arm is placed, wherein the control unit executes a process of moving the self-propelled carriage to a first storage unit in which the work is stored in advance, moving the work placed in the first storage unit to the gripping position by the drawer unit, gripping the work moved to the gripping position by the gripper unit, and transporting the work gripped by the gripper unit to a second storage unit.

7. The workpiece transport robot according to claim 1, wherein the drawer is disposed at the tip of the hand.

8. The workpiece transport robot according to claim 1, wherein the workpiece transport robot is a vertical articulated robot.

9. The work transport robot according to claim 1, wherein the work includes a plurality of stacked work parts, and the stacked work parts are temporarily fixed by temporary fixing members.

10. The workpiece transport robot according to claim 1, wherein a plurality of the workpieces are arranged in the vertical direction.

11. The work transport robot described in claim 1, wherein the pull-out section includes a second friction pull-out section that includes a first claw section that contacts the front surface of the workpiece and a second claw section that contacts the back surface of the workpiece and pulls out the workpiece by friction with the workpiece, and the control section executes a process in which the second friction pull-out section slides the workpiece along a horizontal direction and moves it to the gripping position while the first claw section and the second claw section are in contact with the workpiece.

12. A work transport robot as described in claim 11, wherein the distance between the first claw portion and the second claw portion in the thickness direction of the workpiece is greater than the thickness of the workpiece, and the control unit performs a process of contacting the first claw portion with the front surface of the workpiece and contacting the second claw portion with the back surface of the workpiece by rotating the hand while the workpiece is positioned between the first claw portion and the second claw portion.

13. A workpiece transport robot according to claim 11, wherein the length of the first claw portion is shorter than the length of the second claw portion in the direction in which the first claw portion and the second claw portion extend.

14. A workpiece transport robot according to claim 11, wherein the tip surface of the first claw portion is inclined so as to intersect with the direction in which the first claw portion extends at an angle other than 90 degrees.

15. A work transport robot as described in claim 11, wherein the second friction pull-out portion includes a stopper that prevents the work from moving toward the base ends of the first and second claw portions.

16. A work transport robot as described in claim 11, wherein the hand includes a sensor unit that detects the work stored in the first storage unit, and the control unit executes a process of gripping the work stored in the first storage unit with the hand based on the detection result of the sensor.

17. A control method for a work transport robot comprising a robot arm, a hand attached to the robot arm and holding a workpiece, and a control unit for controlling the operation of the robot arm and the hand, wherein the hand includes a drawer section for drawing out the workpiece and a gripper section for gripping the workpiece, the control method comprising: moving the workpiece by the drawer section to a gripping position where the gripper section will grip the workpiece; and gripping the workpiece moved to the gripping position by the gripper section.

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