Nozzle, nozzle unit, and coating device

Abstract

One embodiment of this nozzle comprises a base part and a through-hole. The base part has a first end surface and a second end surface positioned on the opposite side to the first end surface, and contains a ceramic as a main component. The through-hole passes through from the first end surface to the second end surface and has a central axis extending in a first direction. The base part has a first part and a second part. The first part includes a first end surface and a first outer wall surface that decreases in outer diameter D1 as the first outer wall surface approaches the first end surface in the first direction. The second part includes a second end surface and a second outer wall surface connected to the first outer wall surface and the second end surface. The through-hole has a first hole part connected to the first end surface and having a constant inner diameter d1. A dimension L1 of the first hole in the first direction is 20-200 times the inner diameter d1 of the first hole.

Description

Nozzle, nozzle unit and coating device

[0001] The present disclosure relates to a nozzle, a nozzle unit, and an application device.

[0002] 2. Description of the Related Art As a nozzle used for applying a fluid, for example, the nozzle described in Patent Document 1 is known.

[0003] Japanese Patent Application Laid-Open No. 2007-268532

[0004] In order to eject and apply a fluid from a nozzle, pressure must be applied to the fluid inside the nozzle from one side of the nozzle. In this disclosure, the pressure applied to the fluid inside the nozzle at this time is referred to as the "application pressure." Deviations in the application pressure can occur due to errors in the operation of the device. If this deviation causes the application pressure to become too high, excess fluid may be applied or dripping may occur. If the application pressure becomes too low, the fluid may not be applied sufficiently, or application may not be possible at all. In this way, deviations in the application pressure can sometimes cause poor application when using a nozzle.

[0005] Therefore, the present disclosure provides a nozzle, a nozzle unit, and a coating device that are less likely to vary in coating amount even if a deviation in coating pressure occurs.

[0006] (1) One embodiment of a nozzle according to the present disclosure comprises: a base portion made primarily of ceramic, the base portion having a first end surface and a second end surface opposite the first end surface; and a through hole penetrating from the first end surface to the second end surface and having a central axis extending in a first direction, wherein the base portion has: a first portion including the first end surface and a first outer wall surface having an outer diameter D1 that decreases toward the first end surface in the first direction; and a second portion including the second end surface and a second outer wall surface connected to the first outer wall surface and the second end surface, wherein the through hole has a first hole portion connected to the first end surface and having a constant inner diameter d1, and a dimension L1 of the first hole portion in the first direction is 20 to 200 times the inner diameter d1 of the first hole portion.

[0007] (2) One embodiment of a nozzle according to the present disclosure includes: a base portion having a first end surface and a second end surface located opposite the first end surface, the base portion being made primarily of ceramic; and a through hole penetrating from the first end surface to the second end surface and having a central axis extending in a first direction, the through hole having a first hole portion connected to the first end surface and having a constant inner diameter d1, and a density ρ of 1200 kg / m ３ When a fluid having a friction loss coefficient f of 10,000 flows in at a cross-sectional average flow velocity V of 0.00533 m / s, the pressure loss Δp1 in the first hole portion is 3.4 to 85 kPa.

[0008] (3) One embodiment of a nozzle according to the present disclosure includes: a base portion made primarily of ceramic and having a first end surface and a second end surface opposite the first end surface; and a through hole penetrating from the first end surface to the second end surface and having a central axis extending in a first direction, wherein the base portion includes: a first portion including the first end surface and a first outer wall surface having an outer diameter D1 that decreases with increasing distance from the first end surface in the first direction; and a second portion including the second end surface and a second outer wall surface connected to the first outer wall surface and the second end surface, wherein the through hole includes: a first hole portion connected to the first end surface and having a constant inner diameter d1; and a second hole portion connected to the second end surface and the first hole portion and having an inner diameter d2 that decreases with increasing distance from the second end surface in the first direction. The dimension L1 of the first hole portion in the first direction is 5 to 20 times the dimension L2 of the second hole portion in the first direction.

[0009] (4) One embodiment of a nozzle according to the present disclosure is the nozzle of (2) above, wherein the base has a first part including the first end surface and a first outer wall surface whose outer diameter D1 decreases as the base approaches the first end surface in the first direction, and a second part including the second end surface and a second outer wall surface connected to the first outer wall surface and the second end surface.

[0010] (5) One embodiment of the nozzle according to the present disclosure is the nozzle according to any one of (1), (3), and (4) above, wherein the second outer wall surface has an area for press-fitting into a fixing member that fixes the nozzle.

[0011] (6) One embodiment of the nozzle according to the present disclosure is the nozzle according to any one of the above (1) to (5), wherein the density ρ is 1000 kg / m ３ When a fluid having a friction loss coefficient f of 1.2 flows in at a cross-sectional average flow velocity V of 0.00533 m / s, the pressure loss Δp2 in the first hole portion is 0.34 to 8.5 Pa.

[0012] (7) One embodiment of the nozzle according to the present disclosure is the nozzle of any one of (1) and (3) to (5) above, wherein the first hole portion is located at least from the first portion to the second portion.

[0013] (8) One embodiment of the nozzle according to the present disclosure is the nozzle of any one of (1) to (7) above, wherein the inner diameter d1 of the first hole portion is 0.05 to 0.30 mm, and the dimension L1 of the first hole portion in the first direction is 5 mm or more.

[0014] (9) One embodiment of the nozzle according to the present disclosure is the nozzle of any one of (1) and (3) to (8) above, wherein the first portion includes a third portion having a third outer wall surface connected to the first outer wall surface and the first end surface, and the outer diameter D3 of the third outer wall surface is constant.

[0015] (10) One embodiment of the nozzle according to the present disclosure is the nozzle of (9) above, wherein the outer diameter D2 of the second outer wall surface is constant, and the outer diameter D3 of the third outer wall surface is 1 / 40 to 1 / 5 of the outer diameter D2 of the second outer wall surface.

[0016] (11) One embodiment of the nozzle according to the present disclosure is the nozzle according to (9) or (10) above, wherein the dimension L3 of the third portion in the first direction, the outer diameter D3 of the third outer wall surface, and the inner diameter d1 of the first hole portion satisfy the following formula (1): Formula (1): L3≦378×[D3 ３ -(d1 ４ / D3)]

[0017] (12) One embodiment of the nozzle according to the present disclosure is the nozzle according to any one of (9) to (11) above, wherein the dimension L3 of the third portion in the first direction is 0.1 to 0.5 mm.

[0018] (13) One embodiment of the nozzle according to the present disclosure is the nozzle of any one of (9) to (12) above, wherein the difference between the outer diameter D3 of the third outer wall surface and the inner diameter d1 of the first hole portion is 0.03 to 0.2 mm.

[0019] (14) One embodiment of a nozzle according to the present disclosure is the nozzle of (1) above, wherein the through hole has a second hole portion connected to the first hole portion and having an inner diameter d2 that decreases with increasing distance from the second end face in the first direction.

[0020] (15) One embodiment of a nozzle according to the present disclosure is the nozzle of (2) above, wherein the through hole has a second hole portion connected to the first hole portion and having an inner diameter d2 that decreases with increasing distance from the second end face in the first direction.

[0021] (16) One embodiment of a nozzle according to the present disclosure is the nozzle of any one of (3), (14), and (15) above, wherein the second hole portion includes a first tapered portion and a second tapered portion that have different inclinations relative to the central axis in a cross-sectional view passing through the central axis, the first tapered portion is connected to the first hole portion, and the second tapered portion is connected to the first tapered portion.

[0022] (17) One embodiment of the nozzle according to the present disclosure is the nozzle according to (16) above, wherein an inclination θ1 of the first tapered portion relative to the central axis is smaller than an inclination θ2 of the second tapered portion relative to the central axis.

[0023] (18) One embodiment of the nozzle according to the present disclosure is the nozzle of any one of (3) and (14) to (16) above, wherein the surface roughness Ra21 of the inner wall surface of the first hole portion is smaller than the surface roughness Ra22 of the inner wall surface of the second hole portion.

[0024] (19) One embodiment of the nozzle according to the present disclosure is the nozzle of any one of (1) and (3) to (18) above, wherein the surface roughness Ra32 of the second outer wall surface is smaller than the surface roughness Ra31 of the first outer wall surface.

[0025] (20) One embodiment of the nozzle according to the present disclosure is the nozzle according to any one of (1) to (19) above, wherein the base portion is mainly composed of zirconia.

[0026] (21) One embodiment of a nozzle unit according to the present disclosure includes: a nozzle according to any one of (1) to (20) above; and a fixing member that fixes the nozzle by a press-fitting method.

[0027] (22) One embodiment of the coating device according to the present disclosure includes the nozzle according to any one of (1) to (20) above.

[0028] (23) One embodiment of the coating device according to the present disclosure is the nozzle according to (22), wherein the coating pressure is 34 to 170 kPa.

[0029] According to the present disclosure, it is possible to obtain a nozzle, a nozzle unit, and a coating device in which the coating amount is less likely to vary even if a deviation in coating pressure occurs.

[0030] FIG. 1 is a perspective view of a nozzle according to an embodiment of the present disclosure; FIG. 2 is a plan view of a nozzle according to an embodiment of the present disclosure; FIG. 3 is a cross-sectional view of a nozzle taken along line A-A in FIG. 1; FIG. 4 is an enlarged view of a main part B shown in FIG. 3; FIG. 5 is a graph showing simulation results of application pressure-application diameter for two types of adhesive when the inner diameter d1 of the first hole portion is set to 0.10 mm, 0.12 mm, and 0.15 mm, respectively, and the dimension L1 of the first hole portion in the first direction is set to 10 mm (±0.05 mm); FIG. 6 is a cross-sectional view of a nozzle unit according to an embodiment of the present disclosure; and FIG. 7 is a plan view of an application device according to an embodiment of the present disclosure.

[0031] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. However, for the sake of convenience, each of the drawings below shows a simplified view of only the main components necessary for explaining the embodiments. Therefore, the embodiments of the present disclosure may include any components not shown in the drawings. Furthermore, the dimensions of the components in each drawing do not faithfully represent the actual dimensions, dimensional ratios, etc. of the components. For convenience, the directions of the nozzle, nozzle unit, and coating device are defined using the Cartesian coordinate system XYZ. The positive side of the Z direction is considered to be the upper side.

[0032] In the following description, expressions such as "constant," "orthogonal," "vertical," or "parallel" may be used. These expressions do not necessarily mean "constant," "orthogonal," "vertical," or "parallel" in the strict sense. In other words, these expressions allow for deviations due to, for example, manufacturing precision, installation precision, etc. Furthermore, a numerical range expressed using "to" includes the numerical values ​​before and after it as the lower limit and upper limit, respectively.

[0033] [Nozzle] As described below, the nozzle of the present disclosure is designed to have a relatively high flow path resistance, which makes it difficult for the coating amount to vary even if a deviation in coating pressure occurs. In this disclosure, "flow path resistance" is synonymous with pressure loss in the flow path. While a nozzle with low flow path resistance can apply fluid with a slight coating pressure, it is easily affected by deviations in coating pressure, which makes it easy for the above-mentioned coating defects to occur. In contrast, a nozzle with high flow path resistance requires a high coating pressure to apply the fluid, so even if a slight deviation in coating pressure occurs, the coating amount does not change or changes only slightly. Therefore, a nozzle with high flow path resistance makes it difficult for the coating amount of fluid to vary even if a deviation in coating pressure occurs. Note that if the flow path resistance is too high, the required coating pressure may exceed the pressure resistance of the nozzle or coating device, which may cause damage to the nozzle or coating device. Therefore, the flow path resistance needs to be adjusted within an appropriate range.

[0034] There is no particular limitation on the fluid that can be applied by the nozzle of the present disclosure. Examples of fluids include adhesives, cream solder, etc. Examples of adhesives include epoxy resin adhesives, acrylic resin adhesives, conductive adhesives, etc. Examples of conductive adhesives include silver paste, etc. Specific examples of adhesives include ThreeBond 3304J and Fujikura Kasei Dotite AA13-06. Note that the term "fluid" in this disclosure is a concept that includes paste-like substances.

[0035] As shown in FIG. 1 and other figures, the nozzle 100 of the present disclosure includes a base 1 and a through hole 2. The base 1 has a first end surface 1a and a second end surface 1b located opposite the first end surface 1a. The through hole 2 penetrates the base 1 from the first end surface 1a to the second end surface 1b and has a central axis CA extending in a first direction (Z direction). When applying a fluid using the nozzle 100, the fluid can be ejected from the first end surface 1a of the through hole 2 by applying pressure so that the fluid flows from the second end surface 1b side to the first end surface 1a side.

[0036] 3, the through hole 2 has a first hole portion 21. The first hole portion 21 is a portion that is connected to the first end surface 1a and has a constant inner diameter d1.

[0037] The pressure loss Δp in the first hole portion 21 is derived from the Darcy-Weisbach equation below: Δp=ρgh ｆ =ρgf×(L1 / d1)×(V ２ / 2g) Δp: Pressure loss due to friction [Pa] (= kg / ms ２ ) ρ: Fluid density [kg / m ３ ] g: Gravitational acceleration [m / s ２ ] h ｆ : head loss due to friction [m] f: friction loss coefficient L1: dimension of first hole portion 21 in the first direction [m] d1: inner diameter of first hole portion 21 [m] V: cross-sectional average flow velocity [m / s]

[0038] The Darcy-Weisbach equation indicates that the larger the dimension L1 of the first hole 21 in the first direction, the larger the pressure loss Δp, i.e., the flow path resistance, in the first hole 21. The Darcy-Weisbach equation also indicates that the smaller the inner diameter d1 of the first hole 21, the larger the pressure loss Δp, i.e., the flow path resistance, in the first hole 21. The friction loss coefficient f can also be referred to as the pipe friction coefficient.

[0039] The dimension L1 of the first hole 21 in the first direction may be 20 to 200 times the inner diameter d1 of the first hole 21. When the dimension L1 is 20 times or more the inner diameter d1, the flow path resistance becomes sufficiently high, and when the dimension L1 is 200 times or less the inner diameter d1, the flow path resistance does not become too high. When the dimension L1 is 60 to 120 times the inner diameter d1, the flow path resistance tends to be more appropriate.

[0040] When the dimension L1 in the first direction of the first hole portion 21 is 5 mm or more, the flow path resistance is likely to be sufficiently high. When the inner diameter d1 of the first hole portion 21 is 0.05 to 0.30 mm, the flow path resistance is likely to be appropriate, and when it is 0.07 to 0.15 mm, the flow path resistance is likely to be even more appropriate.

[0041] As shown in FIG. 3 , the through hole 2 may further include a second hole portion 22. The second hole portion 22 is a portion that connects the second end surface 1b and the first hole portion 21 and has an inner diameter d2 that decreases with increasing distance from the second end surface 1b in the first direction. By including the second hole portion 22 in the through hole 2, fluid is less likely to stagnate on the second end surface 1b side of the first hole portion 21. In other words, fluid can be stably introduced into the through hole 2 from the fixing member 200 described below. Furthermore, by including the second hole portion 22 in the through hole 2, the through hole 2 becomes smaller from the second hole portion 22 to the first hole portion 21, which reduces the possibility of fluid stagnation at the connection between the second hole portion 22 and the first hole portion 21. Note that the second hole portion 22 may or may not be connected to the second end surface 1b as shown in FIG. 3 . When the second hole portion 22 is not connected to the second end surface 1 b, a third hole portion having a constant inner diameter d3 may be connected to the second end surface 1 b side of the second hole portion 22. Furthermore, the through hole 2 does not have to have the second hole portion 22.

[0042] When the through hole 2 has a second hole portion 22 connected to the second end surface 1b, the dimension L1 in the first direction of the first hole portion 21 may be 5 to 20 times the dimension L2 in the first direction of the second hole portion 22. When the dimension L1 is 5 times or more the dimension L2, the flow path resistance becomes sufficiently high, and when the dimension L1 is 20 times or less the dimension L2, the flow path resistance does not become too high.

[0043] Density ρ is 1200 kg / m ３ The pressure loss Δp1 in the first hole portion 21 when a fluid having a friction loss coefficient f of 10,000 flows in at a cross-sectional average flow velocity V of 0.00533 m / s may be 3.4 to 85 kPa. When the pressure loss Δp1 is 3.4 kPa or more, the flow path resistance is sufficiently high, and when the pressure loss Δp1 is 85 kPa or less, the flow path resistance does not become too high. Note that the pressure loss Δp1 is the pressure loss assuming that the fluid is an adhesive such as ThreeBond 3304J or Fujikura Kasei Dotite AA13-06.

[0044] Density ρ is 1000 kg / m ３ When a fluid having a friction loss coefficient f of 1.2 flows in at a cross-sectional average flow velocity V of 0.00533 m / s, the pressure loss Δp2 in the first hole portion 21 may be 0.34 to 8.5 Pa. When the pressure loss Δp2 is 0.34 Pa or more, the flow path resistance becomes sufficiently high, and when the pressure loss Δp2 is 8.5 Pa, the flow path resistance does not become too high. Note that the pressure loss Δp2 is the pressure loss assuming that the fluid is water.

[0045] The surface roughness Ra21 of the inner wall surface 21s of the first hole portion 21 may be smaller than the surface roughness Ra22 of the inner wall surface 22s of the second hole portion 22. The surface roughness Ra21 affects the friction loss coefficient f, and therefore affects the pressure loss Δp in the first hole portion 21. Because the first hole portion 21 is the main portion that is subjected to flow path resistance, a relatively small surface roughness Ra21 reduces the possibility of the fluid clogging the through hole 2. Furthermore, a relatively small surface roughness Ra21 reduces variation in the surface roughness Ra21 between nozzles, which in turn can reduce variation in the pressure loss Δp in the first hole portion 21 between nozzles.

[0046] The nozzle of the present disclosure can apply adhesive so that the relationship between application pressure and application diameter is as shown in Fig. 5. The application time in the simulation of Fig. 5 is 50 ms.

[0047] As shown in FIG. 4 , the second hole 22 may include a first tapered portion 221 and a second tapered portion 222 that have different inclinations with respect to the central axis CA in a cross-sectional view passing through the central axis CA. In this case, the inner wall surface 22s of the second hole 22 includes an inner wall surface 221s of the first tapered portion 221 and an inner wall surface 222s of the second tapered portion 222. The first tapered portion 221 may be connected to the first hole 21. The second tapered portion 222 may be connected to the first tapered portion 221. This makes it easier to adjust the angle of the connecting portion between the first hole 21 and the second hole 22, taking into account factors such as fluid flowability, while reducing the dimension L2 of the second hole 22.

[0048] The second tapered portion 222 may be connected to the second end surface 1b as shown in FIG. 4, or may not be connected to the second end surface 1b.

[0049] 4 , when the first tapered portion 221 is connected to the first hole portion 21 and the second tapered portion 222 is connected to the first tapered portion 221, the inclination θ1 of the first tapered portion 221 with respect to the central axis CA may be smaller than the inclination θ2 of the second tapered portion 222 with respect to the central axis CA. With this configuration, fluid is less likely to stagnate at the connection portion between the first tapered portion 221 and the first hole portion 21.

[0050] The inclination θ1 of the first tapered portion 221 relative to the central axis CA is, for example, 15 to 45 degrees. The inclination θ2 of the second tapered portion 222 relative to the central axis CA is, for example, 30 to 60 degrees.

[0051] The inner wall surface 22s of the second hole 22 may have a curved shape in a cross section passing through the central axis CA. The inclination of the tangent of the curve with respect to the central axis CA may decrease as the distance approaches the first end face 1a. This configuration makes it less likely for fluid to stagnate at the connection between the first tapered portion 221 and the first hole 21.

[0052] As shown in FIGS. 1 to 3 , the base 1 may have a first portion 11 and a second portion 12. The first portion 11 includes a first end surface 1a and a first outer wall surface 31s, the outer diameter D1 of which decreases as the base 1 approaches the first end surface 1a in the first direction (Z direction). The base 1 has a first outer wall surface 31s, the outer diameter D1 of which decreases as the base 1 approaches the first end surface 1a in the first direction (Z direction), which facilitates application of fluid to narrow portions and the like. Here, narrow portions may include, for example, a space between an electronic component and another component, or a space between an electronic component and a wall of an electronic component storage package. In other words, with the above configuration, when applying adhesive to an electronic component or an electronic component storage package using the nozzle 100, the fluid, such as adhesive, flowing through the through hole 2 can be applied to the desired position with high precision. The second portion 12 is a portion including the second end surface 1b and a second outer wall surface 32s connected to the first outer wall surface 31s and the second end surface 1b. The base 1 may have the first portion 11 but not the second portion 12, or may not have the second portion 12 or the first portion 11. In other words, the base 1 may be cylindrical.

[0053] The dimension of the base 1 in the first direction is, for example, 5 to 50 mm. The dimension of the first portion 11 in the first direction is, for example, 2.5 to 25 mm. The dimension of the second portion 12 in the first direction is, for example, 2.5 to 25 mm.

[0054] 3 , when the base 1 has a first portion 11 and a second portion 12, the first hole 21 may be located from the first portion 11 to the second portion 12. This configuration can increase the dimension of the first portion 11 in the first direction while reducing the need to increase the dimension of the nozzle 100 in the first direction. Note that the first hole 21 does not need to penetrate the entire second portion 12.

[0055] The second outer wall surface 32s may have a press-fit region for a fixing member 200 (described later) that fixes the nozzle 100. This configuration allows the nozzle 100 to be fixed to the fixing member 200 by a press-fit method when forming the nozzle unit 300 (described later). Furthermore, the press-fit region makes it less likely for a gap to form between the nozzle 100 and the fixing member 200, thereby reducing the possibility of the fluid flowing through the through hole 2 leaking from the gap between the nozzle 100 and the fixing member 200. Furthermore, compared to fixing the nozzle 100 to the fixing member 200 with an adhesive or the like, the possibility of the adhesive reacting with the fluid flowing through the through hole 2 can be reduced. Here, since the nozzle 100 has a base 1 mainly composed of ceramic, the press-fit region can be formed with high precision, and the possibility of the nozzle 100 being damaged by the pressure applied when the nozzle 100 is press-fitted into the fixing member 200 can be reduced. The outer diameter D2 of the second outer wall surface 32s may be constant at least in the press-fit region, or may be constant over the entire region including the press-fit region. The outer diameter D2 of the second outer wall surface 32s is, for example, 0.5 to 10 mm.

[0056] The surface roughness Ra32 of the second outer wall surface 32s may be smaller than the surface roughness Ra31 of the first outer wall surface 31s. With this configuration, the press-fitting force required when press-fitting the nozzle 100 into the fixing member 200 can be reduced. Furthermore, since the adhesion between the nozzle 100 and the fixing member 200 is improved, the possibility of the nozzle 100 falling off from the fixing member 200 is reduced. Furthermore, since the adhesion between the nozzle 100 and the fixing member 200 is improved, the possibility of fluid entering between the nozzle 100 and the fixing member 200 can be further reduced.

[0057] 1 to 3, the first portion 11 may include a third portion 13. The third portion 13 is a portion having a third outer wall surface 33s that connects to the first outer wall surface 31s and the first end surface 1a. The third outer wall surface 33s connects to the first outer wall surface 31s on the side of the first end surface 1a. The third portion 13 has the third outer wall surface 33s that connects to the first end surface 1a, and thus forms the tip portion of the nozzle 100.

[0058] The outer diameter D3 of the third outer wall surface 33s may be constant. The third outer wall surface 33s connects to the first end surface 1a side of the first outer wall surface 31s, i.e., the portion of the first outer wall surface 31s where the outer diameter D1 is smallest. Therefore, when the outer diameter D3 of the third outer wall surface 33s is constant, the outer diameter of the portion of the nozzle 100 on the first end surface 1a side is small and constant. This configuration narrows the tip of the nozzle 100, reducing the possibility of the nozzle 100 hitting these components when applying fluid to, for example, the wall of a package, the edge or groove of a substrate, or near an electronic component (e.g., a capacitor). This allows fluid to be applied to narrow areas and reduces the possibility of the nozzle 100 being damaged during fluid application, making it easier for the nozzle 100 to apply fluid stably and accurately. Hereinafter, the ability of the nozzle 100 to apply fluid stably and accurately is referred to as "enhancing application performance."

[0059] When the outer diameter D3 of the third outer wall surface 33s and the outer diameter D2 of the second outer wall surface 32s are constant, the outer diameter D3 of the third outer wall surface 33s may be 1 / 40 to 1 / 5 of the outer diameter D2 of the second outer wall surface 32s, which further improves the applicability.

[0060] When the outer diameter D3 of the third outer wall surface 33s is constant, the dimension L3 of the third portion 13 in the first direction, the outer diameter D3 of the third outer wall surface 33s, and the inner diameter d1 of the first hole portion 21 may satisfy the following formula (1). This configuration reduces the possibility of the third portion 13 being damaged when processing or manufacturing the nozzle 100. Formula (1): L3≦378×[D3 ３ -(d1 ４ / D3)]

[0061] The outer diameter D3 of the third outer wall surface 33s is, for example, 0.1 to 0.35 mm. The dimension L3 of the third portion 13 in the first direction is, for example, 0.1 to 0.5 mm. When the outer diameter D3 of the third outer wall surface 33s is constant and between 0.1 and 0.35 mm, and the dimension L3 of the third portion 13 in the first direction is between 0.1 and 0.5 mm, the applicability is particularly high. More specifically, when the outer diameter D3 of the third outer wall surface 33s is the above value, the application diameter of the fluid can be stabilized, and when the dimension L3 of the third portion 13 in the first direction is the above value, the application pressure of the fluid can be easily set to an appropriate value.

[0062] The difference between the outer diameter D3 of the third outer wall surface 33s and the inner diameter d1 of the first hole portion 21 is, for example, 0.03 to 0.2 mm. This configuration reduces the possibility of the third portion 13 being damaged when processing or manufacturing the nozzle 100. If the difference between the outer diameter D3 and the inner diameter d1 is 0.03 mm or more, the possibility of the third portion 13 being damaged when processing or manufacturing the nozzle 100 can be reduced. Furthermore, if the difference between the outer diameter D3 and the inner diameter d1 is 0.2 mm or less, the applicability can be improved.

[0063] [Nozzle Material] The base 1 is mainly composed of ceramic. By using ceramic as the main component, the nozzle 100 can be easily processed and maintain its strength, making it possible to form the nozzle 100 into the shape described above. In this disclosure, the term "main component" refers to the component with the highest content. The ceramic content in the base 1 may be 90% by mass or more.

[0064] Examples of ceramics include zirconia (zirconium oxide), aluminum oxide, mullite, silicon carbide, aluminum nitride, silicon nitride, etc. Among these, zirconia has high strength. Therefore, when the base 1 is mainly composed of zirconia, it becomes easier to form the nozzle 100 into the shape described above, particularly the shape having the third portion 13. Furthermore, zirconia has excellent wear resistance and chemical resistance. Therefore, when the base 1 is mainly composed of zirconia, the possibility of the nozzle 100 being worn or damaged is reduced. The zirconia content in the base 1 may be 90% by mass or more.

[0065] [Method of Manufacturing Nozzle] The method of manufacturing the nozzle 100 is not particularly limited, but the nozzle 100 can be manufactured, for example, as follows: In the following example, a nozzle 100 is manufactured in which the base 1 is mainly composed of zirconia (zirconium oxide).

[0066] (1) First, a molding material is prepared to form a molded body that will serve as the prototype of the nozzle 100. Specifically, the molding material is prepared by thoroughly mixing and pulverizing a mixed powder of zirconium oxide powder and yttrium oxide powder using a ball mill or the like, and then adding a binder to the pulverized powder and mixing the mixture. The mixed powder may be a mixture of 85 to 99 mass% zirconium oxide powder and 1 to 15 mass% yttrium oxide powder, or particularly a mixture of 90 to 98 mass% zirconium oxide powder and 2 to 10 mass% yttrium oxide powder. The zirconium oxide powder may have a purity of 95% or more, particularly 98% or more.

[0067] (2) Next, the prepared molding material is used to obtain a molded body having through holes 2. Specifically, the molding material is filled into a cavity of a molding die having a cavity including a structure for forming through holes 2, and injection molding is performed at a predetermined pressure to obtain a molded body. Note that the method for obtaining the molded body is not limited to the above-mentioned injection molding, and methods such as press molding, cast molding, cold isostatic pressing, and extrusion molding may also be used.

[0068] (3) Next, the resulting green body is fired to obtain a sintered body. Specifically, the green body is degreased by being placed in a degreasing furnace at 500 to 600°C for 2 to 10 hours, and then the degreased green body is fired in an oxygen atmosphere at 1300 to 1500°C for 0.5 to 3 hours to obtain a sintered body.

[0069] (4) Next, the inner wall surface of the obtained through hole 2 is subjected to polishing or the like to appropriately form the first hole portion 21, the second hole portion 22, etc. Specifically, the shape, surface roughness, etc. of the inner wall surface are adjusted by pressing an abrasive against the through hole 2 while rotating the nozzle 100 around the central axis CA as the rotation axis. Grinding oil may be used at this time.

[0070] (5) Next, the outer wall surfaces of the obtained sintered body are subjected to cutting, polishing, etc. to appropriately form the first outer wall surface 31s, the second outer wall surface 32s, the third outer wall surface 33s, etc.

[0071] In this manner, the nozzle 100 can be manufactured. The through-hole 2 may be formed by punching a sintered body formed to the outer shape of the nozzle 100.

[0072] [Nozzle Unit] As shown in FIG. 6 , the nozzle unit 300 of the present disclosure includes a nozzle 100 and a fixing member 200. The fixing member 200 may be fixed to the nozzle 100 by a press-fit method. In the case of a shrink-fit method, an oven and a jig for insertion are required. In addition, in the case of an adhesive bonding method using an adhesive, an application device or jig for controlling the amount of adhesive applied is required, and processes such as applying the adhesive and wiping off excess adhesive may also be required. In addition, if the adhesive is thermosetting, an oven may be required. The method for fixing the nozzle 100 of the present disclosure to the fixing member 200 is not particularly limited. However, the press-fit method can be used at room temperature, so the nozzle 100 can be fixed to the fixing member 200 using only a jig and a press-fitting machine, and does not require a process such as applying an adhesive. Furthermore, since the press-fit method does not require an adhesive, there is no risk of the adhesive dissolving and mixing due to the influence of components such as solvents contained in the fluid to be coated.

[0073] The material of the fixing member 200 is, for example, a metal.

[0074] Here, fixing member 200 may have an inclined surface 204 inclined with respect to a central axis CA that connects to the opening on the side opposite to the side where nozzle 100 is fixed. Furthermore, when nozzle 100 has at least one of first tapered portion 221 and second tapered portion 222, the inclination of inclined surface 204 with respect to central axis CA may be smaller than at least one of the inclination θ1 of first tapered portion 221 with respect to central axis CA and the inclination θ2 of second tapered portion 222 with respect to central axis CA.

[0075] 7, a coating device 400 according to the present disclosure includes a nozzle 100. The nozzle 100 may be fixed to a fixing member 200 to form a nozzle unit 300. The coating device 400 may further include a syringe 401, a joint 402, and a tube 403. The syringe 401 may include a plunger 401a therein.

[0076] 7 is used, the fluid filled in the syringe 401 on the nozzle 100 side of the plunger 401a (i.e., the negative side in the Z direction), the fixing member 200, and the nozzle 100 is pressurized via a pressure medium filled in the syringe 401 on the joint 402 side of the plunger 401a (i.e., the positive side in the Z direction). The pressure medium is, for example, a gas or a liquid. The pressurized fluid flows through the through-hole 2 of the nozzle 100 toward the first end surface 1a and is discharged.

[0077] The coating pressure in the coating device 400 is not particularly limited, but is, for example, 34 to 170 kPa. The coating pressure may be set in consideration of not only the flow path resistance due to the through-hole 2 of the nozzle 100, but also the flow path resistance due to other flow paths through which the fluid passes, such as the fixing member 200.

[0078] In addition, the details shown in the above embodiments can be modified as appropriate without departing from the spirit of the present disclosure. The scope of the present invention includes the scope of the invention described in the claims and its equivalents. Various combinations of the embodiments are not limited to the examples of the above embodiments. Furthermore, combinations of the embodiments with each other are also possible.

[0079] 100 Nozzle 1 Base portion 1a First end surface 1b Second end surface 11 First portion 12 Second portion 13 Third portion 2 Through hole CA Central axis 21 First hole portion 22 Second hole portion d1 Inner diameter of first hole portion d2 Inner diameter of second hole portion L1 Dimension of first hole portion in first direction L2 Dimension of second hole portion in first direction 21s Inner wall surface of first hole portion 22s Inner wall surface of second hole portion 221 First tapered portion 222 Second tapered portion 221s Inner wall surface of first tapered portion 222s Inner wall surface of second tapered portion θ1 Inclination of first tapered portion with respect to central axis θ2 Inclination of second tapered portion with respect to central axis 31s First outer wall surface 32s Second outer wall surface 33s Third outer wall surface D1 Outer diameter of first outer wall surface D2 Outer diameter of second outer wall surface D3 Outer diameter of third outer wall surface 200 Fixing member 300 Nozzle unit 400 Coating device 401 Syringe 401a Plunger 402 Joint 403 Tube

Claims

1. A nozzle comprising: a base portion made primarily of ceramic and having a first end face and a second end face opposite the first end face; and a through hole penetrating from the first end face to the second end face and having a central axis extending in a first direction, wherein the base portion has: a first portion including the first end face and a first outer wall surface having an outer diameter D1 that decreases toward the first end face in the first direction; and a second portion including the second end face and a second outer wall surface connected to the first outer wall surface and the second end face; wherein the through hole has a first hole portion connected to the first end face and having a constant inner diameter d1, and a dimension L1 in the first direction of the first hole portion is 20 to 200 times the inner diameter d1 of the first hole portion.

2. A ceramic-based base having a first end face and a second end face located opposite the first end face, and a through hole penetrating from the first end face to the second end face and having a central axis extending in a first direction, the through hole having a first hole portion connected to the first end face and having a constant inner diameter d1, and a density ρ of 1200 kg / m ３ and when a fluid having a friction loss coefficient f of 10,000 flows in at a cross-sectional average flow velocity V of 0.00533 m / s, the pressure loss Δp1 in the first hole portion is 3.4 to 85 kPa.

3. A nozzle comprising: a base portion made primarily of ceramic and having a first end face and a second end face opposite the first end face; and a through hole penetrating from the first end face to the second end face and having a central axis extending in a first direction, wherein the base portion has: a first portion including the first end face and a first outer wall surface, the outer diameter D1 of which decreases with increasing distance from the first end face in the first direction; and a second portion including the second end face and a second outer wall surface connected to the first outer wall surface and the second end face, wherein the through hole has: a first hole portion connected to the first end face and having a constant inner diameter d1; and a second hole portion connected to the second end face and the first hole portion, the inner diameter d2 of which decreases with increasing distance from the second end face in the first direction, wherein the dimension L1 of the first hole portion in the first direction is 5 to 20 times the dimension L2 of the second hole portion in the first direction.

4. A nozzle as described in claim 2, wherein the base has: a first portion including the first end face and a first outer wall surface whose outer diameter D1 decreases as the base approaches the first end face in the first direction; and a second portion including the second end face and a second outer wall surface connected to the first outer wall surface and the second end face.

5. A nozzle according to any one of claims 1, 3 and 4, wherein the second outer wall surface has an area for press-fitting into a fixing member that fixes the nozzle.

6. Density ρ is 1000 kg / m ３ and a fluid having a friction loss coefficient f of 1.2 is introduced at a cross-sectional average flow velocity V of 0.00533 m / s, and the pressure loss Δp2 in the first hole portion is 0.34 to 8.5 Pa. The nozzle according to any one of claims 1 to 5.

7. A nozzle according to any one of claims 1 and 3 to 5, wherein the first hole portion is located at least from the first portion to the second portion.

8. A nozzle according to any one of claims 1 to 7, wherein the inner diameter d1 of the first hole portion is 0.05 to 0.30 mm, and the dimension L1 of the first hole portion in the first direction is 5 mm or more.

9. A nozzle as claimed in any one of claims 1 and 3 to 8, wherein the first portion includes a third portion having a third outer wall surface connected to the first outer wall surface and the first end surface, and the outer diameter D3 of the third outer wall surface is constant.

10. The nozzle according to claim 9, wherein the outer diameter D2 of the second outer wall surface is constant, and the outer diameter D3 of the third outer wall surface is 1 / 40 to 1 / 5 of the outer diameter D2 of the second outer wall surface.

11. The nozzle according to claim 9 or 10, wherein the dimension L3 of the third portion in the first direction, the outer diameter D3 of the third outer wall surface, and the inner diameter d1 of the first hole portion satisfy the following formula (1): Formula (1): L3≦378×[D3 ３ -(d1 ４ / D3)] 12. A nozzle according to any one of claims 9 to 11, wherein the dimension L3 of the third portion in the first direction is 0.1 to 0.5 mm.

13. A nozzle according to any one of claims 9 to 12, wherein the difference between the outer diameter D3 of the third outer wall surface and the inner diameter d1 of the first hole portion is 0.03 to 0.2 mm.

14. The nozzle according to claim 1, wherein the through hole has a second hole portion connected to the first hole portion and having an inner diameter d2 that decreases with increasing distance from the second end face in the first direction.

15. The nozzle according to claim 2, wherein the through hole has a second hole portion connected to the first hole portion and having an inner diameter d2 that decreases with increasing distance from the second end face in the first direction.

16. A nozzle as described in any one of claims 3, 14 and 15, wherein the second hole portion includes a first tapered portion and a second tapered portion that have different inclinations relative to the central axis in a cross-sectional view passing through the central axis, the first tapered portion being connected to the first hole portion, and the second tapered portion being connected to the first tapered portion.

17. The nozzle according to claim 16, wherein the inclination θ1 of the first tapered portion relative to the central axis is smaller than the inclination θ2 of the second tapered portion relative to the central axis.

18. A nozzle according to any one of claims 3 and 14 to 16, wherein the surface roughness Ra21 of the inner wall surface of the first hole portion is smaller than the surface roughness Ra22 of the inner wall surface of the second hole portion.

19. A nozzle according to any one of claims 1 and 3 to 18, wherein the surface roughness Ra32 of the second outer wall surface is smaller than the surface roughness Ra31 of the first outer wall surface.

20. A nozzle according to any one of claims 1 to 19, wherein the base is primarily made of zirconia.

21. A nozzle unit comprising: a nozzle according to any one of claims 1 to 20; and a fixing member that fixes the nozzle by press-fitting.

22. An application device comprising the nozzle according to any one of claims 1 to 20.

23. The coating device according to claim 22, wherein the coating pressure is 34 to 170 kPa.

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