X-ray diffractometer

Abstract

Disclosed in the present invention is an X-ray diffractometer, comprising a sample stage, an X-ray source, and at least one detector group. The sample stage is provided with a sample placement area used for placing a sample; the X-ray source is used for emitting X-rays to the sample placement area; the detector group comprises a plurality of detectors that are arranged in a row along a bending arrangement direction, and the arrangement direction extends within a central plane of the detector group; the first surface of each detector having an effective detection area faces the sample placement area, and the effective detection area is used for detecting the diffracted X-rays; and the effective detection areas of the plurality of detectors are arranged at intervals in the arrangement direction. The plurality of detectors are arranged in a bending arrangement mode, and the plurality of detectors can detect the diffracted X-rays simultaneously, so that the detection efficiency is improved, and diffraction information of the X-rays continuously distributed in space can be obtained; and the effective detection areas of the detectors are in a two-dimensional pixel array, thus acquiring more diffraction information.

Description

An X-ray diffractometer

[0001] The present invention claims priority to Chinese patent applications entitled “AN X-RAY DIFFRACTOR”, filed with the Patent Office of China on April 1, 2024, with application numbers 202410388690.6, 202420684851.1, 202420661301.8 and 202420676430.4, the entire contents of which are incorporated herein by reference. Technical Field

[0002] The embodiments of the present invention relate to a detection and analysis instrument, and in particular to an X-ray diffractometer. Background Art

[0003] With the continuous advancement of science and technology, people have gradually developed instruments for testing materials, such as X-ray diffractometers. X-ray diffractometers use the principle of diffraction to accurately measure the crystal structure, texture, and stress of materials, and accurately perform phase analysis, qualitative analysis, and quantitative analysis. They are widely used in metallurgy, petroleum, chemical industry, scientific research, aerospace, teaching, and materials production.

[0004] Generally speaking, an X-ray diffractometer consists of an X-ray source, a sample stage, a detector, and a controller. The detector is a single point detector. During detection, X-rays are directed toward the sample stage after adjusting the optical path. The detector moves along an arc, simultaneously detecting the X-rays diffracted from the sample. Each movement collects data from only a small angle. Furthermore, because X-rays diffracted from the sample form a cone with the sample as the vertex, the detector can only detect a relatively small portion of the diffracted X-rays as it moves along the arc. This results in a small amount of data available for analysis, which can lead to measurement inconvenience.

[0005] Application Contents

[0006] In order to solve the above technical problems, an embodiment of the present invention provides an X-ray diffractometer that is convenient for measurement.

[0007] The embodiments of the present invention solve the technical problems by adopting the following technical solutions:

[0008] An X-ray diffractometer comprises: a sample stage having a sample placement area for placing a sample; an X-ray source, the X-ray source being used to emit X-rays toward the sample placement area; and at least one detector group, the detector group comprising a plurality of detectors, the plurality of detectors being arranged in a row along a curved arrangement direction, the arrangement direction extending within a central plane of the detector group, the first surface of each detector having an effective detection area facing the sample placement area, the effective detection area being used to detect diffracted X-rays, the effective detection areas of the plurality of detectors being arranged at intervals along the arrangement direction, wherein the central plane is a plane where the geometric centers of the effective detection areas of the first surfaces of the plurality of detectors of the detector group are located.

[0009] Optionally, the detector group is capable of rotating around an axis perpendicular to the central plane, the axis being perpendicular to a travel path of X-rays from the X-ray source to the sample placement area, and the axis passing through the sample placement area.

[0010] Optionally, the arrangement direction extends in the form of an arc, the axis passes through the center of the arc, and the center is located in the central plane.

[0011] Optionally, the center of the arc is located in the sample placement area.

[0012] Optionally, the X-ray diffractometer includes two detector groups, and the two detector groups are arranged along a lateral direction of the two detector groups in a manner that does not hinder each other from detecting the X-rays.

[0013] Optionally, the effective detection area has a first dimension along the arrangement direction and a second dimension along the transverse direction, and the transverse direction is perpendicular to a straight line where the first dimension lies.

[0014] Optionally, the effective detection area includes a plurality of pixels, and the plurality of pixels are arranged in a two-dimensional array.

[0015] Optionally, the distance between the effective detection areas of two adjacent detectors in the detector group does not exceed the first size of the effective detection area of ​​the detector, and along the lateral direction, the gap between the effective detection areas of two adjacent detectors of one of the two detector groups overlaps with a detector of the other of the two detector groups.

[0016] Optionally, the first surfaces of the plurality of detectors are perpendicular to the central plane, and the lateral direction is perpendicular to the central plane, and the lateral direction of one of the two detector groups is parallel to the lateral direction of the other of the two detector groups.

[0017] Optionally, the X-ray diffractometer further includes a main support, and the switching unit is connected to the main support.

[0018] Optionally, the switching unit includes an adjustment mechanism, a connecting block, and a pad, wherein the adjustment mechanism is connected to the main support, the connecting block is connected to the adjustment mechanism, the X-ray source is connected to the connecting block, and the pad is movably connected to the main support, and the adjustment mechanism is used to adjust the connecting block so that the X-ray source can move relative to the two detector groups;

[0019] When the adjusting mechanism adjusts the connecting block to move the X-ray source to the second position in a direction away from the main support, an accommodating gap into which the spacer block can be inserted is formed between the connecting block and the main support.

[0020] Optionally, the adjustment mechanism includes a fixed block, a sliding block and a locking knob, wherein the fixed block is fixedly connected to the main bracket, the sliding block is connected to the connecting block, and the sliding block is slidably connected to the fixed block, and the locking knob is rotatably connected to the fixed block;

[0021] When the locking knob is loosened, the connecting block can drive the sliding block to move relative to the fixed block when subjected to an external force. When the locking knob is tightened so that the locking knob abuts against the sliding block, the fixed block and the sliding block are relatively fixed.

[0022] Optionally, the connecting block has a groove for accommodating a cushion block, and when the connecting block moves to the first position in a direction close to the main support, the cushion block is accommodated in the groove.

[0023] Optionally, the sample stage is mounted on the main support.

[0024] Optionally, the X-ray diffractometer also includes a fixed bracket having a curved surface facing the sample placement area, and the second surface of the multiple detectors of the at least one detector group opposite to the first surface is installed on the curved surface, and the fixed bracket is rotatably mounted on the main bracket.

[0025] Optionally, the X-ray diffractometer further comprises a base, wherein the base is rotatably mounted on the main support, and the fixed support is mounted in the base.

[0026] Optionally, the X-ray diffractometer further comprises an anti-scattering member located between the sample placement area and the at least one detector group, the anti-scattering member being connected to the base, the anti-scattering member being provided with a plurality of channels respectively connected to a plurality of detectors of the at least one detector group, the plurality of channels being formed by an end surface of the anti-scattering member close to the sample placement area passing through toward the base.

[0027] Optionally, the X-ray diffractometer also includes an optical path component, which is located between the X-ray source and the sample placement area and connected to the X-ray source. The incident end of the optical path component is docked with the emission end of the X-ray source, and the optical path component is used to adjust the X-rays emitted by the X-ray source and emit them toward the sample placement area.

[0028] Optionally, the X-ray diffractometer further includes a cooling assembly, which is provided on the back side of the fixing bracket away from the curved surface, and is used to cool the detector group.

[0029] Optionally, the cooling assembly includes a heat sink and a cooling tube, the heat sink is arranged on the back side of the fixed bracket away from the curved surface, and the cooling tube is arranged on the supporting surface of the heat sink away from the fixed bracket, wherein the cooling tube extends along the arrangement direction of the multiple detectors of the detector group.

[0030] Optionally, a bearing surface of the heat sink facing away from the fixing bracket is provided with a receiving groove extending along an arrangement direction of the multiple detectors of the detector group, and the cooling pipe is received in the receiving groove.

[0031] Optionally, the cooling assembly further includes a plurality of fixing members, which are spaced apart and arranged on a bearing surface of the heat sink facing away from the fixing bracket, and are used to constrain the cooling pipe to be located in the receiving groove.

[0032] Optionally, the cooling assembly further includes an insulating heat conductor, which is sandwiched between the fixing bracket and the heat sink.

[0033] Optionally, the heat conducting member is flexible.

[0034] Optionally, the back surface is a curved surface, the heat dissipation plate is a curved plate, and the cooling pipe is a curved pipe.

[0035] Optionally, the X-ray source includes a accommodating tube, a mounting frame and an X-ray tube, the mounting frame is inserted into the accommodating tube, the X-ray tube is inserted into the accommodating tube and mounted on the mounting frame, the X-ray tube is used to emit X-rays, and the accommodating tube is provided with a transmission hole allowing the X-rays to pass through; wherein, the X-ray tube is provided with a first light outlet and a second light outlet arranged at intervals, and the mounting frame and the X-ray tube can rotate together relative to the accommodating tube.

[0036] Optionally, the first light outlet is used to emit a linear X-ray beam, and the second light outlet is used to emit a point X-ray beam.

[0037] Optionally, the mounting bracket includes a liquid cooling pipe, which is used to cool the X-ray tube. When the mounting bracket rotates, the liquid cooling pipe rotates together with the X-ray tube.

[0038] Optionally, the mounting frame includes a mounting plate, and the mounting plate is detachably mounted on the accommodating cylinder.

[0039] Optionally, the X-ray tube includes a tube body and an end plate connected to one end of the tube body, the first light outlet and the second light outlet are spaced apart on the outer wall of the tube body, the tube body is inserted into the accommodating cylinder, and the end plate is detachably mounted on the mounting plate, the liquid cooling pipe includes a liquid inlet pipe and a liquid outlet pipe, and the end plate is provided with a liquid inlet and a liquid outlet connected to the interior of the X-ray tube, the liquid inlet pipe is connected to the liquid inlet, and the liquid outlet pipe is connected to the liquid outlet.

[0040] Optionally, the accommodating tube includes a tube body and a support plate, the transmission hole is provided in the tube body, the support plate has a first through hole, the mounting plate is located outside the accommodating tube and abuts against the support plate, and the mounting frame is inserted into the accommodating tube via the first through hole.

[0041] Optionally, the mounting plate is detachably connected to the support plate, and when the mounting plate is detached from the support plate, the mounting frame and the X-ray tube can rotate together relative to the accommodating cylinder.

[0042] Optionally, the mounting plate has a second through hole, the end plate is located outside the accommodating cylinder, and the tube body is inserted into the accommodating cylinder via the second through hole.

[0043] Optionally, the mounting plate has a third through hole and a fourth through hole, the liquid inlet pipe is connected to the liquid inlet via the third through hole, and the liquid outlet pipe is connected to the liquid outlet via the fourth through hole.

[0044] Optionally, the cylinder includes a cylinder body and a side plate, and the side plate is detachably connected to the cylinder body.

[0045] Optionally, the X-ray source further includes a power cord, which is fixed to the mounting bracket and electrically connected to the X-ray tube.

[0046] The beneficial effects of the embodiments of the present invention are as follows: the X-ray diffractometer provided by the embodiments of the present application includes a sample stage, an X-ray source, and at least one detector group, the sample stage having a sample placement area for placing a sample; the X-ray source is used to emit X-rays toward the sample placement area; the detector group includes a plurality of detectors, the plurality of detectors are arranged in a row along a curved arrangement direction, the arrangement direction extends within the central plane of the detector group, the first surface of each detector having an effective detection area faces the sample placement area, the effective detection area is used to detect diffracted X-rays, and the effective detection areas of the plurality of detectors are arranged at intervals along the arrangement direction. In an X-ray diffractometer with the above structure, the plurality of detectors are arranged in a curved arrangement, and the plurality of detectors can simultaneously detect diffracted X-rays, thereby improving the detection efficiency and being able to obtain diffraction information of X-rays continuously distributed in space, so that the distribution of the diffracted X-rays in space can be more comprehensively known, which is beneficial to improving the detection effect of the X-ray diffractometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] One or more embodiments are exemplarily illustrated by pictures in the corresponding drawings. These exemplifications do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements. Unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0048] FIG1 is a schematic structural diagram of an X-ray diffractometer according to one embodiment of the present application;

[0049] FIG2 is a cross-sectional view of FIG1 ;

[0050] FIG3 is a schematic diagram of a portion of the structure in FIG1 ;

[0051] FIG4 is an exploded view of the structure of FIG3;

[0052] FIG5 is a further cross-sectional view of FIG4;

[0053] FIG6 is a cross-sectional view of an X-ray source;

[0054] FIG7 is a perspective view of FIG3;

[0055] FIG8 is a schematic diagram of a detection module according to one embodiment;

[0056] FIG9 is a schematic diagram of multiple detector groups;

[0057] Figure 10 is a front view of Figure 9;

[0058] FIG11 is a schematic diagram of two detector groups and a fixing bracket;

[0059] FIG12 is an exploded view of the structure of FIG11;

[0060] FIG13 is a schematic diagram of a portion of the structure in FIG1 ;

[0061] FIG14 is an exploded view of the structure of FIG13;

[0062] FIG15 is a cross-sectional view of FIG13;

[0063] FIG16 is a schematic structural diagram of the cooling assembly in FIG15;

[0064] FIG17 is an exploded view of the structure of FIG16;

[0065] FIG18 is a schematic diagram of FIG1 from another perspective;

[0066] FIG19 is a schematic diagram of the switching unit in FIG18 when it is in the second position;

[0067] FIG20 is a schematic structural diagram of the switching unit in FIG18;

[0068] FIG21 is an exploded view of the structure of FIG20;

[0069] FIG22 is a cross-sectional view of FIG20;

[0070] FIG23 schematically illustrates a detector according to an embodiment.

[0071] FIG24 schematically shows a simplified cross-sectional view of a detector according to an embodiment.

[0072] FIG25 schematically shows a detailed cross-sectional view of a detector according to an embodiment.

[0073] FIG26 schematically illustrates a detailed cross-sectional view of a detector according to an alternative embodiment;

[0074] In the figure: 10, X-ray diffractometer; 20, sample stage; 30, X-ray source; 40, detector assembly; 50, main bracket; 60, fixed bracket; 70, base; 80, cooling assembly; 90, anti-scattering element; 100, connecting arm; 140, switching unit; 160, optical path assembly; 21, sample placement area; 31, accommodating cylinder; 32, mounting bracket; 33, X-ray tube; 34, power cord; 35, housing; 311, cylinder; 312, support plate; 3111, cylinder body; 3112, side plate; 31a, transmission hole; 31b, protruding column; 31c, jack; 31d, first through hole; 321, mounting plate; 322, liquid cooling pipe; 323, inner cylinder; 324, bottom plate; 325, liquid inlet connector; 326, liquid outlet connector; 3221, liquid inlet pipe; 3222, liquid outlet pipe; 32a, second through hole; 32b, third through hole; 32c, fourth through hole; 32d, first through hole; 32e, second through hole; 32f, fifth through hole; 32g, sixth through hole; 331, tube body; 332, end plate; 33a, first light outlet; 33b, second light outlet; 33c, liquid inlet; 33d, liquid outlet; 41, detector; 411, effective detection area; 412, non-detection area; 41a, first surface; 41b, second surface; 41c, first dimension; 41d, gap; 41e, second dimension; P0, arrangement direction; M1, center plane; L1, axis; L2, transverse direction; 51, base; 52, bracket plate; 71, first plate; 72, side panel; 73, second plate; 721, first side panel; 722, second side panel; 70a, first curved surface; 70b, opening; 70c, accommodating chamber; 70d, second curved surface; 61, first fixing bracket; 62, second fixing bracket; 63, connecting protrusion; 60a, curved surface; 60b, mounting hole; 60c, recessed hole; 60d, plug post; 60e, back surface; 81, heat sink; 82, cooling pipe; 83, fixing member; 84, liquid inlet plug Connector; 85, liquid outlet plug connector; 86, thermal conductor; 80a, storage groove; 80b, receiving surface; 90a, channel; 141, adjustment mechanism; 142, connecting block; 143, pad; 144, pulley; 1411, fixed block; 1412, sliding block; 1413, locking knob; 140a, hole; 140b, recessed portion; 140c, groove; 150, pixel; 110, radiation absorption layer; 120, electronic device layer; 111, first doped region; 112, intrinsic region; 113, second doped region; 114, discrete region; 119A, electrical contact; 119B, electrical contact; 121, electronic system; 131, through hole. DETAILED DESCRIPTION

[0075] For ease of understanding of the present invention, the present invention will be described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed on" another element, it can be directly on the other element or there can be one or more centered elements therebetween. When an element is described as being "connected" to another element, it can be directly connected to the other element or there can be one or more centered elements therebetween. The orientation or positional relationship indicated by the terms "upper", "lower", "inside", "outside", "vertical", "horizontal", etc. used in this specification is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0076] Unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0077] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0078] As an example, FIG23 schematically illustrates a detector 41. Detector 41 can include an array of pixels 150 (also referred to as sensing elements). The array can be a rectangular array (as shown in FIG23), a honeycomb array, a hexagonal array, or any other suitable array. The array of pixels 150 in the example of FIG23 has four rows and seven columns; however, in general, an array of pixels 150 can have any number of rows and any number of columns.

[0079] Each pixel 150 can be configured to detect radiation incident thereon from a radiation source (not shown), and can be configured to measure the characteristics of the radiation (e.g., the energy, wavelength, and frequency of the particles). Radiation can include particles, such as photons and subatomic particles. Each pixel 150 can be configured to count the number of radiation particles whose energy falls into multiple energy intervals incident thereon over a period of time. All pixels 150 can be configured to count the number of radiation particles incident thereon within multiple energy intervals over the same period of time. When the incident radiation particles have similar energies, the pixel 150 can simply be configured to count the number of radiation particles incident thereon over a period of time, without measuring the energy of each radiation particle.

[0080] Each pixel 150 may have its own analog-to-digital converter (ADC) configured to digitize an analog signal representing the energy of an incident radiation particle, or an analog signal representing the total energy of a plurality of incident radiation particles, into a digital signal.

[0081] The pixels 150 may be configured to operate in parallel. For example, while one pixel 150 is measuring an incoming radiation particle, another pixel 150 may be waiting for a radiation particle to arrive. The pixels 150 may not necessarily be individually addressable.

[0082] The detector 41 described herein may be applied to, for example, X-ray diffractometers, X-ray telescopes, X-ray mammography, industrial X-ray feature detection, X-ray microscopy or microradiography, X-ray casting inspection, X-ray non-destructive testing, X-ray weld inspection, X-ray digital subtraction angiography, etc. It may also be appropriate to use the detector 41 in place of a photographic plate, photographic film, a photostimulated phosphor plate (PSP plate), an X-ray image intensifier, a scintillator, or other semiconductor X-ray detectors.

[0083] FIG24 schematically illustrates a simplified cross-sectional view of the detector 41 of FIG23 along line 2-2, according to an embodiment. Specifically, the detector 41 may include a radiation absorbing layer 110 and an electronics layer 120 (which may include one or more ASICs or application-specific integrated circuits) for processing or analyzing electrical signals generated in the radiation absorbing layer 110 by incident radiation. The detector 41 may or may not include a scintillator (not shown). The radiation absorbing layer 110 may comprise a semiconductor material, such as silicon, germanium, GaAs, CdTe, CdZnTe, or a combination thereof. The semiconductor material may have a high mass attenuation coefficient for the radiation of interest.

[0084] 25 schematically illustrates a detailed cross-sectional view of the detector 41 of FIG. 23 along line 2-2 as an example. Specifically, the radiation absorbing layer 110 may include one or more diodes (e.g., pin or pn) formed by one or more discrete regions 114 of the first doping region 111 and the second doping region 113. The second doping region 113 may be separated from the first doping region 111 by an optional intrinsic region 112. The discrete regions 114 may be separated from each other by the first doping region 111 or the intrinsic region 112. The first doping region 111 and the second doping region 113 may have opposite types of doping (e.g., the first doping region 111 is p-type and the second doping region 113 is n-type, or the first doping region 111 is n-type and the second doping region 113 is p-type). In the example of FIG. 25 , each discrete region 114 of the second doping region 113 forms a diode with the first doping region 111 and the optional intrinsic region 112. That is, in the example of FIG25 , the radiation absorbing layer 110 has a plurality of diodes (more specifically, seven diodes corresponding to seven pixels 150 in a row of the array of FIG23 , with only two pixels 150 labeled in FIG25 for simplicity). The plurality of diodes may have an electrical contact 119A serving as a common electrode. The first doped region 111 may also have a plurality of discrete portions.

[0085] The electronic device layer 120 may include an electronic system 121 suitable for processing or interpreting signals generated by radiation incident on the radiation absorbing layer 110. The electronic system 121 may include analog circuits such as filter networks, amplifiers, integrators, and comparators, or digital circuits such as microprocessors and memories. The electronic system 121 may include one or more ADCs (analog-to-digital converters). The electronic system 121 may include components shared by the pixels 150 or components dedicated to a single pixel 150. For example, the electronic system 121 may include an amplifier dedicated to each pixel 150 and a microprocessor shared between all pixels 150. The electronic system 121 may be electrically connected to the pixels 150 through the through-holes 131. The space between the through-holes may be filled with a filling material 130, which may increase the mechanical stability of the connection between the electronic device layer 120 and the radiation absorbing layer 110. Other bonding techniques may connect the electronic system 121 to the pixels 150 without using the through-holes 131.

[0086] When radiation from a radiation source (not shown) strikes the radiation absorbing layer 110, which includes a diode, the radiation particle may be absorbed and generate one or more charge carriers (e.g., electrons, holes) through various mechanisms. The charge carriers may drift to one of the diode electrodes under an electric field. The electric field may be an external electric field. The electrical contact 119B may include a plurality of discrete portions, each of which is in electrical contact with the discrete region 114. The term "electrical contact" may be used interchangeably with the term "electrode." In one embodiment, the charge carriers may drift in multiple directions such that the charge carriers generated by a single radiation particle are substantially not shared by two different discrete regions 114 (where "substantially not shared" means that less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of the charge carriers flow to a different discrete region 114 compared to the rest of the charge carriers). Charge carriers generated by radiation particles incident on the periphery of the footprint of one of the discrete regions 114 are substantially not shared with another of the discrete regions 114. A pixel 150 associated with a discrete region 114 may be an area around the discrete region 114 in which substantially all (greater than 98%, greater than 99.5%, greater than 99.9%, or greater than 99.99%) of the charge carriers generated by radiation particles incident thereon flow toward the discrete region 114. That is, less than 2%, less than 1%, less than 0.1%, or less than 0.01% of the charge carriers flow out of the pixel 150.

[0087] FIG26 schematically illustrates a detailed cross-sectional view of the detector 41 of FIG23 along line 2-2, according to an alternative embodiment. More specifically, the radiation absorbing layer 110 may include resistors of a semiconductor material such as silicon, germanium, GaAs, CdTe, CdZnTe, or combinations thereof, but not diodes. The semiconductor material may have a high mass attenuation coefficient for the radiation of interest. In one embodiment, the electronics layer 120 of FIG26 is similar in structure and function to the electronics layer 120 of FIG25 .

[0088] When radiation strikes radiation-absorbing layer 110, which includes a resistor but not a diode, it can be absorbed and generate one or more charge carriers through a variety of mechanisms. A radiation particle can generate 10 to 100,000 charge carriers. These charge carriers can drift to electrical contacts 119A and 119B under an electric field. This electric field can be an external electric field. Electrical contact 119B can include multiple discrete sections. In one embodiment, charge carriers can drift in multiple directions, such that charge carriers generated by a single radiation particle are substantially not shared by two different discrete sections of electrical contact 119B (where "substantially not shared" means that less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of these charge carriers flow to a different discrete section compared to the rest of the charge carriers). Charge carriers generated by a radiation particle incident on the periphery of the footprint of one of these discrete sections of electrical contact 119B are substantially not shared by another of these discrete sections of electrical contact 119B. A pixel 150 associated with a discrete portion of electrical contact 119B can be a region around the discrete portion in which substantially all (greater than 98%, greater than 99.5%, greater than 99.9%, or greater than 99.99%) of the charge carriers generated by radiation particles incident therein flow toward the discrete portion of electrical contact 119B. That is, less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of these charge carriers flow out of the pixel associated with the discrete portion of electrical contact 119B.

[0089] Figures 1-3 show a schematic structural diagram of an X-ray diffractometer 10 according to one embodiment of the present application. The X-ray diffractometer 10 includes a sample stage 20, an X-ray source 30, and at least one detector group 40. A sample placement area 21 for placing a sample is provided on the sample stage 20. The X-ray source 30 is used to emit X-rays to the sample placement area 21. The at least one detector group 40 is used to detect X-rays diffracted from the sample placement area 21 after being irradiated by the X-rays emitted by the X-ray source 30. In this way, information such as the material and category of the sample can be determined based on the detection results of the detector group 40.

[0090] In some embodiments, the sample placement area 21 can be rotated relative to the X-ray source 30 as needed, thereby indirectly adjusting the angle at which the X-rays emitted by the X-ray source 30 are directed toward the sample placement area 21 .

[0091] X-ray source 30

[0092] In some embodiments, as shown in Figures 4-5 , the X-ray source 30 includes a housing tube 31, a mounting bracket 32, and an X-ray tube 33. The mounting bracket 32 ​​is inserted into the housing tube 31, and the X-ray tube 33 is inserted into the housing tube 31 and mounted on the mounting bracket 32. The X-ray tube 33 and the mounting bracket 32 ​​are capable of rotating together relative to the housing tube 31. The X-ray tube 33 is configured to emit X-rays, and the housing tube 31 is provided with a transmission hole 31a through which the X-rays are transmitted. Thus, X-rays emitted by the X-ray tube 33 can pass through the transmission hole 31a and be directed toward the sample stage 20.

[0093] In some embodiments, as shown in FIG4 , the accommodating tube 31 includes a body 311 and a support plate 312. The support plate 312 is disposed on the body 311. The body 311 is provided with a transmission hole 31a. The support plate 312 is used to support the X-ray tube 33. It is understood that the support plate 312 and the body 311 can be integrally formed or detachably connected, and the specific configuration can be determined according to needs.

[0094] In some embodiments, as shown in FIG4 , the barrel 311 includes a barrel body 3111 and a side panel 3112. The side panel 3112 is detachably connected to the barrel body 3111 to enclose a space for accommodating the mounting bracket 32. The side panel 3112 is provided with a transmissive hole 31a. It is understood that there are various options for connecting the side panel 3112 to the barrel body 3111, such as by bolts, by hooks or other snap-on structures, or by magnetic attraction. Of course, other methods are also possible, which will not be elaborated here.

[0095] In some embodiments, as shown in FIG5 , the side panel 3112 is provided with a first positioning structure, and the barrel body 3111 is provided with a second positioning structure that cooperates with the first positioning structure. The first positioning structure and the second positioning structure cooperate to achieve rapid positioning of the side panel 3112 and the barrel body 3111. In this embodiment, the first positioning structure is two spaced-apart protrusions 31b, and the second positioning structure is two spaced-apart sockets 31c. When the protrusions 31b are inserted into the sockets 31c, the side panel 3112 is quickly positioned relative to the barrel body 3111, facilitating rapid assembly.

[0096] In some embodiments, the support plate 312 is provided with a first through hole 31 d , and the first through hole 31 d is used for the mounting bracket 32 ​​to be inserted into the accommodating tube 31 .

[0097] In some embodiments, as shown in Figure 5, the mounting frame 32 includes a mounting plate 321, which is detachably mounted on the accommodating tube 31, and the mounting plate 321 is located outside the accommodating tube 31 and abuts against the support plate 312. The mounting plate 321 is provided with a second through hole 32a for inserting the X-ray tube 33, and the mounting plate 321 is used to install the X-ray tube 33.

[0098] When the mounting plate 321 is removed from the supporting plate 312 , that is, the locking state between the mounting plate 321 and the supporting plate 312 is released, the mounting frame 32 and the X-ray tube 33 can rotate together relative to the accommodating cylinder 31 .

[0099] 5 , the mounting frame 32 further includes a liquid cooling pipe 322 connected to the mounting plate 321 for cooling the X-ray tube 33. When the mounting frame 32 rotates, the liquid cooling pipe 322 rotates with the X-ray tube 33.

[0100] In some embodiments, the liquid cooling pipe 322 includes a liquid inlet pipe 3221 and a liquid outlet pipe 3222, both of which are in communication with the X-ray tube 33. During use, the liquid inlet pipe 3221 and the liquid outlet pipe 3222 can be connected to an external liquid coolant supply device to enable the liquid coolant supply device to supply liquid coolant to cool the X-ray tube 33.

[0101] In some embodiments, as shown in FIG5 , the mounting plate 321 has a third through hole 32 b and a fourth through hole 32 c . The third through hole 32 b is used to connect the liquid inlet pipe 3221 to the X-ray tube 33 , and the fourth through hole 32 c is used to connect the liquid outlet pipe 3222 to the X-ray tube 33 .

[0102] In some embodiments, as shown in FIG5 , the mounting frame 32 further includes an inner cylinder 323 and a bottom plate 324 . One end of the inner cylinder 323 is connected to the mounting plate 321 , and the other end of the inner cylinder 323 is connected to the bottom plate 324 . The inner cylinder 323 is used to accommodate the X-ray tube 33 . The inner cylinder 323 is provided with a first through hole 32 d and a second through hole 32 e . The first through hole 32 d and the second through hole 32 e are respectively spaced apart and arranged on the peripheral wall of the inner cylinder 323 . The first through hole 32 d and the second through hole 32 e are both used to allow X-rays emitted by the X-ray tube 33 to pass through. The bottom plate 324 is provided with an escape hole that communicates with the inner cylinder 323 .

[0103] As can be understood, as shown in Figure 6, the base plate 324 is provided with a fifth through hole 32f and a sixth through hole 32g. The fifth through hole 32f connects to the liquid inlet pipe 3221, and the sixth through hole 32g connects to the liquid outlet pipe 3222. The fifth through hole 32f is provided with a liquid inlet connector 325, and the sixth through hole 32g is provided with a liquid outlet connector 326. The liquid inlet connector 325 is used to connect to the output pipeline of an external liquid coolant supply device, and the liquid outlet connector 326 is used to connect to the recovery pipeline of the external liquid coolant supply device. In this way, when an external liquid coolant supply device is connected, its output pipeline can supply liquid coolant to the liquid inlet pipe 3221 through the fifth through hole 32f, and the recovery pipeline can recover the liquid coolant after absorbing heat from the liquid outlet pipe 3222 through the sixth through hole 32g.

[0104] In some embodiments, the X-ray tube 33 is provided with a first light outlet 33 a, and the first light outlet 33 a is used to emit a linear X-ray beam.

[0105] In some embodiments, the X-ray tube 33 is provided with a second light outlet 33 b, and the second light outlet 33 b is used to emit a point-shaped X-ray beam.

[0106] In some embodiments, as shown in FIG5 , the X-ray tube 33 is provided with a first light outlet 33a and a second light outlet 33b spaced apart from each other. By rotating the X-ray tube 33 so that the first light outlet 33a or the second light outlet 33b is aligned with the transmission aperture 31a, the type of X-rays emitted by the X-ray source 30 can be switched. For example, when the first light outlet 33a is aligned with the transmission aperture 31a, the X-rays emitted by the X-ray source 30 are linear X-ray beams. When the second light outlet 33b is aligned with the transmission aperture 31a, the X-rays emitted by the X-ray source 30 are point X-ray beams.

[0107] In some embodiments, as shown in FIG6 , the X-ray tube 33 includes a tube body 331 and an end plate 332 connected to one end of the tube body 331. The tube body 331 is inserted into the barrel 311 through the second through hole 32a. The end plate 332 is detachably mounted on the mounting plate 321 and is located outside the accommodating barrel 31. The outer circumferential wall of the tube body 331 is provided with a first light outlet 33a and / or a second light outlet 33b. Thus, when the mounting bracket 32 ​​rotates relative to the accommodating barrel 31, the end plate 332 drives the tube body 331 to rotate with the mounting bracket 32, thereby adjusting different areas of the outer circumferential wall of the tube body 331 to face the transmission hole 31a.

[0108] It can be understood that, as shown in Figure 7, along the direction perpendicular to the central axis L1 of the tube body 331, the size of the end plate 332 is larger than the size of the tube body 331, so that when the tube body 331 is inserted into the cylinder 311, the end plate 332 is located outside the cylinder 311, thereby supporting the tube body 331 to prevent the tube body 331 from falling.

[0109] In some embodiments, as shown in FIG6 , the end plate 332 is provided with a liquid inlet 33c and a liquid outlet 33d. The liquid inlet 33c is connected to the liquid inlet pipe 3221 via the third through hole 32b, and the liquid outlet 33d is connected to the liquid outlet pipe 3222 via the fourth through hole 32c. A cooling channel (not shown) is built into the end plate 332 so that when the liquid coolant flows from the liquid inlet pipe 3221 to the liquid inlet 33c, it can flow through the cooling channel to the liquid outlet 33d, and then from the liquid outlet 33d to the liquid outlet pipe 3222, thereby cooling the X-ray tube 33.

[0110] In some embodiments, the X-ray source 30 further includes a power cord 34 , which is fixed to the mounting bracket 32 ​​and electrically connected to the X-ray tube 33 . In some embodiments, the power cord 34 may also be fixedly mounted to the accommodating tube 31 .

[0111] In some embodiments, the X-ray source 30 further includes a cover 35 , which is detachably mounted on the support plate 312 . The cover 35 can prevent the X-ray tube 33 from being exposed to the outside world, thereby preventing external dust from contaminating the X-ray tube 33 .

[0112] With the X-ray source 30 of the above embodiment, since the X-ray tube 33 and the liquid cooling pipe 322 are both mounted on the mounting frame 32, when switching between a linear X-ray beam and a point X-ray beam, the mounting frame 32 is rotated, and the X-ray tube 33 and the liquid cooling pipe 322 will rotate together with the mounting frame 32, without the need to remove the liquid cooling pipe 322 from the X-ray tube 33. Compared with the method of first removing the liquid cooling pipe 322 before rotating the X-ray tube 33, the method of the present application is more convenient to operate.

[0113] Detector Group 40

[0114] In some embodiments, as shown in Figures 7-8, the detector group 40 includes a plurality of detectors 41, and the plurality of detectors 41 are arranged in a row along a curved arrangement direction P0, and the curved arrangement direction P0 extends within the central plane M1 of the detector group 40. The first surface 41a of each detector 41 having an effective detection area 411 faces the sample placement area 21, and the second surface 41b of each detector 41 faces away from the sample placement area 21. The first surface 41a and the second surface 41b are two surfaces arranged opposite to each other.

[0115] The effective detection area 411 is used to detect the diffracted X-rays, and the effective detection areas 411 of the plurality of detectors 41 are arranged at intervals along the curved arrangement direction P0.

[0116] It is understood that the curved arrangement direction P0 refers to an arrangement in a non-linear direction. For example, the curved arrangement direction P0 can be an arc-shaped arrangement direction P0, a wavy arrangement direction P0, or any other arrangement, as long as the arrangement enables the detector group 40 to detect the diffracted X-rays. It should be noted that the curved arrangement direction P0 extends within the center plane M1 of the detector group 40, where the center plane M1 refers to the plane containing the geometric center of the effective detection area 411 of the first surface 41a of the multiple detectors 41.

[0117] Detector 41 has a non-detection region 412, which is arranged around an effective detection region 411, as shown in FIG23 . Effective detection region 411 includes a plurality of pixels 150 arranged in a two-dimensional array. The number of rows and columns in the two-dimensional array can be arbitrary and is not specifically limited. Non-detection region 412 is an area that cannot detect diffracted X-rays, as shown in FIG23 .

[0118] In some embodiments, referring to Figures 7-8, Figure 7 shows a detector assembly 40, a sample stage 20, and an X-ray source 30. The detector assembly 40 is capable of rotating about an axis L1 perpendicular to the central plane M1. The axis L1 is perpendicular to the path of X-rays traveling from the X-ray source 30 to the sample placement area 21, and the axis L1 passes through the sample placement area 21. Because the detector assembly 40 is capable of rotating about the axis L1 perpendicular to the central plane M1, the detector assembly 40 is capable of obtaining diffraction information of X-rays that are continuously distributed in space. Furthermore, because the effective detection area 411 of the detector 41 is a two-dimensional pixel array, more diffraction information is obtained, thereby enabling a more comprehensive understanding of the spatial distribution of the diffracted X-rays, which is beneficial for improving the detection performance of the X-ray diffractometer 10.

[0119] In some embodiments, the curved arrangement direction P0 extends in the form of an arc, and the axis L1 passes through the center of the arc, and the center is located in the central plane M1.

[0120] In some embodiments, the center of the arc is located in the sample placement area 21 , which is beneficial for the diffracted X-rays to be directed to the multiple detectors 41 .

[0121] In some embodiments, as shown in FIG9 , the X-ray diffractometer 10 includes two detector groups 40 , which are arranged along the lateral direction L2 of the two detector groups 40 in a manner that does not hinder each other from detecting X-rays. That is, the two detector groups 40 are respectively arranged along the direction of the axis L1, and the two detector groups 40 do not overlap.

[0122] In some embodiments, as shown in FIG9 , the effective detection areas 411 of the multiple detectors 41 of the two detector groups 40 have a first dimension 41c along the arrangement direction P0 and a second dimension 41e along the lateral direction L2 , which is perpendicular to the straight line where the first dimension 41c is located.

[0123] In some embodiments, as shown in FIG10 , the distance between the effective detection areas 411 of two adjacent detectors 41 in the detector group 40 does not exceed the first size 41 c of the effective detector 41, and, along the lateral direction L2, the gap 41 d between the effective detection areas 411 of two adjacent detectors 41 of one detector group 40 of the two detector groups 40 overlaps with a detector 41 of the other detector group 40 of the two detector groups 40, that is, when observed in the lateral direction L2, the distance between the effective detection areas 411 of two adjacent detectors 41 in the same column is smaller than the first size 41 c of the detectors 41 in the adjacent column, so that multiple effective detection areas 411 in the same column can overlap with multiple effective detection areas 411 in another column.

[0124] The two detector groups 40 are staggered, allowing for the detection of more diffraction information from X-rays diffracted from the sample placement area 21. This allows for the cross-combination of the diffraction information from the sample's X-rays detected by the two detector groups 40, thereby obtaining spatially continuously distributed X-ray diffraction information. Furthermore, because the effective detection area 411 of the detectors 41 is a two-dimensional pixel array, more diffraction information is obtained, enabling a more comprehensive understanding of the spatial distribution of the diffracted X-rays, thereby improving the detection performance of the X-ray diffractometer 10.

[0125] In some embodiments, as shown in FIG10 , first surfaces 41 a of the plurality of detectors 41 are perpendicular to central plane M1, and lateral directions L2 are perpendicular to central plane M1. Furthermore, lateral direction L2 of one detector 41 in the two detector groups 40 is parallel to lateral direction L2 of the other detector group 40 in the two detector groups 40. In other words, the two detector groups 40 are arranged in parallel and side by side, facilitating better detection of diffracted X-rays.

[0126] Main bracket 50

[0127] In some embodiments, as shown in FIG1-2 , the X-ray source 30 further includes a main support 50 , which includes a base 51 and a support plate 52 . The support plate 52 is connected to the base 51 , and the base 51 is used to abut a supporting surface such as the ground.

[0128] In some embodiments, the sample stage 20 is mounted on the support plate 52 , that is, the sample stage 20 is supported by the support plate 52 and has a preset height from the ground, and the preset height from the ground is set according to actual needs.

[0129] Fixed bracket 60

[0130] In some embodiments, as shown in FIG11 , the X-ray diffractometer 10 further includes a fixed bracket 60 for mounting at least one detector assembly 40. The fixed bracket 60 extends along a curved arrangement direction P0. The fixed bracket 60 includes a curved surface 60 a facing the sample placement area 21 and a back surface 60 e facing away from the curved surface 60 a. The second surfaces 41 b of the plurality of detectors 41 of the at least one detector assembly 40 are mounted on the curved surface 60 a. In some embodiments, the curved surface 60 a is an arcuate surface.

[0131] In some embodiments, the arrangement direction P0 extends in the form of an arc, and the fixing bracket 60 can rotate relative to the sample placement area 21 , so that the detector group 40 can rotate around the axis L1 perpendicular to the central plane M1 .

[0132] In some embodiments, as shown in FIG12 , the fixing bracket 60 is provided with at least one row of multiple mounting holes 60 b spaced apart along the curved arrangement direction P0, and each mounting hole 60 b is used to mount a detector 41. In this embodiment, the fixing bracket 60 is provided with two rows of mounting holes 60 b, and each row of mounting holes 60 b corresponds to mounting a detector group 40.

[0133] In some embodiments, as shown in FIG. 12 , the fixing bracket 60 includes a first fixing bracket 61 and a second fixing bracket 62 connected to each other. The first fixing bracket 61 is used to install one set of detector groups 40 , and the second fixing bracket 62 is used to install another set of detector groups 40 .

[0134] It is understandable that there are many ways to connect the first fixing bracket 61 and the second fixing bracket 62, as long as the connection between the two can be achieved, and there is no limitation here. For example, one of the first fixing bracket 61 and the second fixing bracket 62 is provided with a recessed hole 60c, and the other is provided with a plug 60d that docks with the recessed hole 60c, and the plug 60d is inserted into the recessed hole 60c to achieve a quick positioning connection between the two. For another example, both the first fixing bracket 61 and the second fixing bracket 62 are provided with bolt holes (not shown in the figure), and a fast connection can be achieved by passing a connecting member such as a bolt through the bolt holes of the two. For another example, one of the first fixing bracket 61 and the second fixing bracket 62 is provided with a card slot (not shown in the figure), and the other is provided with a card protrusion (not shown in the figure) that can be engaged with the card slot, which can also achieve a quick connection between the two.

[0135] In some embodiments, the fixing bracket 60 is provided with a connecting protrusion 63, which is disposed on a side of the fixing bracket 60 facing away from the detector assembly 40. There are multiple connecting protrusions 63, which are distributed at intervals.

[0136] Base 70

[0137] In some embodiments, as shown in Figures 13-14, the X-ray diffractometer 10 further includes a base 70 having a first curved surface 70a facing the sample placement area 21 and a second curved surface 70d facing away from the first curved surface 70a. The fixing bracket 60 is mounted on the second curved surface 70d. In some embodiments, the first curved surface 70a and the second curved surface 70d are arcuate surfaces.

[0138] In some embodiments, the base 70 is rotatably mounted on the main support 50. The base 70 rotates relative to the main support 50, thereby indirectly driving the fixed support 60 to rotate relative to the main support 50, thereby adjusting the position of at least one detector group 40 mounted on the fixed support 60, thereby enabling detection of diffracted X-rays from other positions.

[0139] In some embodiments, as shown in Figures 13-14, the base 70 includes a first plate 71 and a side panel 72, and the side panel 72 is respectively connected to the first plate 71 and the main bracket 50. The first plate 71 has a first curved surface 70a facing the sample placement area 21 and a second curved surface 70d away from the first curved surface 70a. The second curved surface 70d is used to install the fixed bracket 60.

[0140] In some embodiments, the first plate 71 is provided with an opening 70 b for exposing the at least one detector group 40 , and the at least one detector group 40 detects the X-rays emitted after diffraction from the sample placement area 21 through the opening 70 b .

[0141] In some embodiments, the first plate 71 is shaped like an arc plate, and the bending direction of the first plate 71 is the same as the curved arrangement direction P0 of the detector group 40 , that is, the first curved surface 70 a has the same bending trend as the curved surface 60 a .

[0142] In some embodiments, as shown in Figures 13-14, the side panels 72 include a first side panel 721 and a second side panel 722. The first side panel 721 and the second side panel 722 are respectively connected to the first plate 71. The first side panel 721 and the second side panel 722 can provide a certain shielding effect, preventing external forces from directly acting on the fixed bracket 60 and the at least one detector group 40. In this embodiment, the fixed bracket 60 is connected to the first side panel 721 and / or the second side panel 722 via the connecting protrusion 63, thereby fixing the at least one detector group 40 mounted on the fixed bracket 60 relative to the base 70.

[0143] In some embodiments, the base 70 also includes a second plate 73, which is connected to the side panel 72. The first plate 71, the second plate 73 and the side panel 72 together form a accommodating chamber 70c, which can accommodate the fixed bracket 60 and at least one detector group 40.

[0144] In some embodiments, the shape of the second plate 73 can be arbitrary, and can be an arc shape, or a bent plate in the shape of a broken line that bends toward the first plate 71 . Of course, it can also be other shapes, which is not limited here.

[0145] In some embodiments, the base 70 is generally fan-shaped.

[0146] Cooling assembly 80

[0147] In some embodiments, as shown in Figures 15-16, the X-ray diffractometer 10 further includes a cooling assembly 80, which is disposed on the back side 60e of the fixed bracket 60 away from the curved surface 60a. The cooling assembly 80 is used to cool the detector assembly 40.

[0148] In some embodiments, as shown in FIG16 , the cooling assembly 80 includes a heat sink 81 and a cooling tube 82. The heat sink 81 is disposed on the back surface 60 e of the fixed bracket 60, which faces away from the curved surface 60 a. The cooling tube 82 is disposed on the receiving surface 80 b of the heat sink 81, which faces away from the fixed bracket 60. The cooling tube 82 extends along the curved arrangement direction P0 of the multiple detectors 41 of the detector assembly 40. That is, the curvature direction of the cooling tube 82 is the same as the curved arrangement direction P0 of the multiple detectors 41, which facilitates the cooling tube 82 to cool the multiple detectors 41 in the detector assembly 40.

[0149] In some embodiments, the heat dissipation plate 81 is a curved plate, and the cooling tube 82 is a curved tube.

[0150] It can be understood that if there are multiple detector groups 40, the cooling tube 82 bends and extends from the first detector group 40 of the multiple detector groups 40 along the lateral direction L2 of the detector group 40, then turns to the adjacent second detector group 40 and bends and extends again until the cooling tube 82 covers the multiple detector groups 40, which is conducive to cooling and dissipating the heat of the multiple detector groups 40 at the same time.

[0151] In some embodiments, as shown in Figures 16-17 , a receiving surface 80b of the heat sink 81, facing away from the fixing bracket 60, is provided with a receiving groove 80a extending along the arrangement direction P0 of the multiple detectors 41 of the detector assembly 40. The cooling tube 82 is located within the receiving groove 80a. This facilitates the storage of the cooling tube 82 and prevents the cooling tube 82 from swinging freely relative to the heat sink 81.

[0152] In some embodiments, as shown in Figures 16-17, the cooling assembly 80 also includes a plurality of fixing members 83, which are spaced apart on the receiving surface 80b of the heat sink 81 facing away from the fixing bracket 60, and the plurality of fixing members 83 are used to constrain the cooling pipe 82 to be located in the receiving groove 80a.

[0153] In some embodiments, the cooling assembly 80 also includes a liquid inlet connector 84 and a liquid outlet connector 85. The liquid inlet connector 84 is connected to one end of the cooling tube 82, and the liquid outlet connector 85 is connected to the other end of the cooling tube 82. The liquid inlet connector 84 is used to connect to an external liquid supply pipe, and the liquid outlet connector 85 is used to connect to an external return pipe, thereby facilitating the quick connection of the cooling tube 82.

[0154] In some embodiments, as shown in Figures 16-17, the cooling assembly 80 also includes an insulating heat conductor 86, which is clamped between the fixed bracket 60 and the heat sink 81, which is beneficial to the insulation between the multiple detector groups 40 and the heat sink 81, thereby ensuring the stability of the multiple detector groups 40.

[0155] In some embodiments, the heat conducting member 86 is flexible and can be a silicone member formed of heat-conductive silicone, or a flexible plastic member, or other materials.

[0156] Anti-scattering element 90

[0157] In some embodiments, as shown in FIG2 and FIG18 , the X-ray diffractometer 10 further includes an anti-scatter member 90 positioned between the sample placement area 21 and at least one detector assembly 40. The anti-scatter member 90 is connected to the base 70 and is configured to prevent diffracted X-rays from being directed toward the detector assembly 40 within a non-target detection region. In other words, the anti-scatter member 90 can provide a screening effect. The non-target detection region refers to an area outside the intended detection region of the detector assembly 40.

[0158] In some embodiments, the anti-scatter member 90 is provided with multiple channels 90 a respectively connected to multiple detectors 41 of at least one detector group 40 , and the multiple channels 90 a are formed by passing through one end of the anti-scatter member 90 close to the sample placement area 21 toward the base 70 .

[0159] In some embodiments, the anti-scattering member 90 can extend along the curved arrangement direction P0 of the multiple detectors 41 of the detector group 40. The shape of the anti-scattering member 90 can be any shape, for example, it can be an arc shape with only one end close to the sample stage 20, or it can be a fan-shaped shape as a whole. The specific shape can be set according to needs.

[0160] Connecting arm 100

[0161] In some embodiments, as shown in Figures 1 and 2, the X-ray diffractometer 10 also includes a connecting arm 100, one end of the connecting arm 100 is connected to the base 70, and the other end of the connecting arm 100 is used to connect to the driving device. In this way, when the driving device drives the connecting arm 100 to swing, the connecting arm 100 can also drive the base 70 to rotate.

[0162] In some embodiments, the X-ray source 30 further includes a driving device (not shown), which can drive the connecting arm 100 to drive the base 70 to rotate.

[0163] In some embodiments, the driving device can also drive the sample stage 20 to rotate, thereby adjusting the position of the sample placement area 21 relative to the main support 50.

[0164] In some embodiments, the drive device includes a drive motor, a transmission mechanism, and a bearing seat. The drive motor is connected to the transmission mechanism, the bearing seat is fixedly mounted on the main support 50, and the transmission mechanism is connected to the connecting arm 100 and the sample stage 20. In this way, the drive motor can drive the sample stage 20 and the connecting arm 100 to rotate.

[0165] In some embodiments, the driving device may drive the sample stage 20 or the connecting arm 100 to rotate independently, or may drive the sample stage 20 and the connecting arm 100 to rotate simultaneously.

[0166] In some embodiments, the driving device may include two separate power sources, respectively used to control the rotation of the sample stage 20 and the rotation of the connecting arm 100.

[0167] Switching unit 140

[0168] In some embodiments, as shown in Figures 18-19, the X-ray diffractometer 10 further includes a switching unit 140, which is connected to the main support 50, and the X-ray source 30 is connected to the switching unit 140. The switching unit 140 is used to adjust the position of the X-ray source 30 relative to the main support 50, so as to switch the position of the X-rays emitted by the X-ray source 30 toward the sample placement area 21 and then emitted to the detector group 40 after diffraction. That is, the switching unit 140 can move the X-ray source 30 relative to the at least two detector groups 40 to a first position or a second position. As shown in Figure 18, the switching unit 140 moves the X-ray source 30 relative to the at least two detector groups 40 to the first position; as shown in Figure 19, the switching unit 140 moves the X-ray source 30 relative to the at least two detector groups 40 to the second position.

[0169] In some embodiments, when the X-ray source 30 is in the first position, an extension of the path of the X-rays from the X-ray source 30 to the sample placement area 21 passes through a detector 41 in one of the two detector groups 40 or through one of the gaps 41d between the multiple detectors 41 in the one detector group 40. That is, in this first position, an extension of the path of the X-rays from the X-ray source 30 to the sample placement area 21 passes through one of the detectors 41 in one of the detector groups 40 or through one of the gaps 41d between the multiple detectors 41 in the one detector group 40, thereby enabling detection by a single detector group 40. In this case, the detector group 40 typically needs to rotate to obtain spatially continuously distributed X-ray diffraction information.

[0170] When the X-ray source 30 is in the second position, the extension of the X-ray path from the X-ray source 30 to the sample placement area 21 passes between the two detector assemblies 40. The two detector assemblies 40 jointly detect the diffracted X-rays, facilitating cross-combination of the detected diffraction information of the sample's X-rays. In this case, compared to when the X-ray source 30 is in the first position, the two detector assemblies 40 generally do not need to rotate to obtain spatially continuously distributed X-ray diffraction information. Furthermore, because the two detector assemblies 40 jointly detect the diffracted X-rays, more X-ray diffraction information is detected per unit time (i.e., detection efficiency is higher), shortening detection time.

[0171] In some embodiments, as shown in Figures 20-21, the switching unit 140 includes an adjustment mechanism 141, a connecting block 142, and a spacer 143. The adjustment mechanism 141 is connected to the main support 50, the connecting block 142 is connected to the adjustment mechanism 141, the X-ray source 30 is connected to the connecting block 142, and the spacer 143 is movably connected to the main support 50. The adjustment mechanism 141 is used to adjust the connecting block 142 to allow the X-ray source 30 to move relative to the two detector assemblies 40. When the adjustment mechanism 141 adjusts the connecting block 142 to move the X-ray source 30 away from the main support 50 by a predetermined distance, a receiving gap is formed between the connecting block 142 and the main support 50, into which the spacer 143 can be inserted.

[0172] It is understandable that the power for moving the connecting block 142 to move the preset distance can be achieved by manual pushing or by the adjusting mechanism 141 , and the specific setting can be made according to needs.

[0173] In some embodiments, as shown in Figures 20-21, the adjustment mechanism 141 includes a fixed block 1411, a sliding block 1412, and a locking knob 1413. The fixed block 1411 is connected to the main bracket 50, and the sliding block 1412 is connected to the connecting block 142. The sliding block 1412 is slidably connected to the fixed block 1411, and the locking knob 1413 is rotatably connected to the fixed block 1411. When the locking knob 1413 is loosened, the connecting block 142 is subjected to an external force and can drive the sliding block 1412 to move relative to the fixed block 1411. When the locking knob 1413 is tightened so that the locking knob 1413 abuts the sliding block 1412, the fixed block 1411 and the sliding block 1412 are fixed relative to each other.

[0174] In this way, when the position of the X-ray source 30 needs to be adjusted, it is only necessary to loosen the locking knob 1413, and the locking knob 1413 will be released from the abutment with the sliding block 1412. At this time, the movable block can be pushed to drive the sliding block 1412 to slide relative to the fixed block 1411, thereby adjusting the position of the X-ray source 30 and switching the detection mode of the X-ray source 30.

[0175] Furthermore, as shown in Figures 20-21, the connecting block 142 is provided with a hole 140a. When the locking knob 1413 is unlocked, the user can pull the connecting block 142 through the hole 140a to drive the sliding block 1412 to move relative to the fixed block 1411, which is convenient for user operation.

[0176] In other embodiments, the adjustment structure includes a fixed block 1411, a sliding block 1412, a gear, and a driving member. The fixed block 1411 is fixedly connected to the main support 50, the sliding block 1412 is connected to the connecting block 142, and the sliding block 1412 can slide relative to the fixed block 1411. The gear is rotatably mounted on the fixed block 1411, and the driving member is connected to the gear. The sliding block 1412 is provided with a first rack that meshes with the gear. When the driving member drives the gear to rotate, the sliding block 1412 can drive the connecting block 142 to move relative to the fixed block 1411 under the action of the first rack, thereby adjusting the position of the X-ray source 30 and switching the detection mode of the X-ray source 30.

[0177] In some embodiments, the fixed block 1411 and the sliding block 1412 can be slidably connected to each other by setting a guide groove, that is, one of the fixed block 1411 and the sliding block 1412 can be snapped into the guide groove, thereby ensuring that the fixed block 1411 and the sliding block 1412 are connected to each other and can slide relative to each other.

[0178] In some embodiments, a recessed portion 140 b is provided on one side of the connecting block 142 facing the fixing block 1411 , and a sliding block 1412 is provided in the recessed portion 140 b , which helps to save space.

[0179] In some embodiments, as shown in FIG21 , the spacer 143 is provided with a limiting guide groove 140e. The limiting guide groove 140e is connected to the main bracket 50 via a limiting member. The limiting guide groove 140e is used to guide the spacer 143 to move in a directional manner into the accommodation gap. The limiting member can be a bolt or other means, as long as the spacer 143 can be slidably connected to the main bracket 50.

[0180] In some embodiments, as shown in FIG22 , the adjustment assembly further includes a pulley 144, which is mounted on the fixed block 1411. When the sliding block 1412 moves a preset distance, the pulley 144 abuts the connecting block 142, thereby preventing the connecting block 142 from moving forward. The adjustment mechanism 141 has moved the X-ray source 30 from the first position to the second position, which facilitates rapid mode switching of the X-ray source 30, improves user experience, and prevents the connecting block 142 from exceeding a safe distance and detaching from the fixed block 1411 when moving.

[0181] In some embodiments, as shown in Figure 22, a sliding block 1412 is provided in the recess 140b, and the pulley 144 partially extends into the recess 140b. When the pulley 144 abuts against the end wall of the recess 140b, the adjustment mechanism 141 has moved the X-ray source 30 from the first position to the second position, which is conducive to quickly realizing the mode switching of the X-ray source 30.

[0182] In some embodiments, the connecting block 142 has a groove 140c for accommodating the cushion block 143. When the connecting block 142 moves toward the main support 50, the cushion block 143 is accommodated in the groove 140c. When the connecting block 142 moves a predetermined distance away from the main support 50, the cushion block 143 is pushed and inserted into the accommodating gap, thereby indirectly contacting the connecting block 142 and the main support 50 through the cushion block 143.

[0183] In some embodiments, there are two spacers 143, both of which are positioned within the groove 140c of the connecting block 142. When the connecting block 142 moves a predetermined distance away from the main support 50, the two spacers 143 are pushed in opposite directions so that the two spacers 143 are inserted into the accommodation gap between the connecting block 142 and the main support 50. This fills the accommodation gap between the X-ray source 30 and the main support 50 caused by the movement of the connecting block 142, thereby facilitating force balance on the connecting block 142.

[0184] Optical path component 160

[0185] In some embodiments, as shown in Figures 1-2, the X-ray diffractometer 10 further includes an optical path assembly 160. The optical path assembly 160 is disposed between the X-ray source 30 and the sample placement area 21 and is connected to the X-ray source 30. The incident end of the optical path assembly 160 is connected to the emission end of the X-ray source 30. The optical path assembly 160 is used to adjust the X-rays emitted by the X-ray source 30 and direct them toward the sample placement area 21. In this way, under the action of the optical path assembly 160, the X-rays emitted by the X-ray source 30 can be adjusted so as to irradiate the sample placed in the sample placement area 21.

[0186] In some embodiments, the optical path assembly 160 is mounted on the side panel 3112 , making it convenient for the user to switch the type of X-rays emitted by the X-ray tube 33 .

[0187] In some embodiments, because the optical path assembly 160 may extend beyond the side plate 3112 in a direction parallel to the surface of the side plate 3112, when it is necessary to change the type of X-rays emitted by the X-ray tube 33, that is, when switching between a linear X-ray beam and a point X-ray beam, rotating the mounting frame 32 and the X-ray tube 33 may cause the mounting plate 321 of the mounting frame 32 to collide with the optical path assembly 160. Therefore, to solve this problem, the optical path assembly 160 can be removed from the side plate 3112 before rotating the mounting frame 32 and the X-ray tube 33, thereby preventing the mounting plate 321 from colliding with the optical path assembly 160 due to the rotation of the mounting frame 32 and the X-ray tube 33.

[0188] In some embodiments, the X-ray source 30 can also be designed so that when switching between a linear X-ray beam and a point X-ray beam, the mounting frame 32 and the X-ray tube 33 can be pulled out of the accommodating tube 31 for a certain distance to ensure that the mounting plate 321 of the mounting frame 32 is away from the optical path assembly 160, thereby avoiding the mounting plate 321 colliding with the optical path assembly 160 due to the rotation of the mounting frame 32 and the X-ray tube 33.

[0189] In some embodiments, the optical path assembly 160 includes a shutter, a first slit, a filter, and a second slit. The shutter controls the timing of the X-ray exposure to the photosensitive element, the first slit aligns the incoming X-rays, the filter filters the X-rays, and the second slit diverges the X-rays. In actual use, the X-rays travel through the shutter, the first slit, the filter, and the second slit in sequence before being emitted to the sample placement area 21.

[0190] It is understandable that the structure of the optical path component 160 is not limited to the structure mentioned in this embodiment, and it can also adopt other structures as long as it can achieve the adjustment of X-rays.

[0191] In some embodiments, the X-ray diffractometer 10 further includes a controller (not shown), which is disposed on the main support 50 and is respectively connected to the sample stage 20, the X-ray source 30 and at least one detector group 40. The controller is used to control the rotation of the sample stage 20, and to control the X-ray source 30 to emit X-rays, and to obtain diffraction information detected by at least one detector group 40.

[0192] The X-ray diffractometer 10 provided in an embodiment of the present application includes a sample stage 20, an X-ray source 30, and at least one detector group 40. The sample stage 20 has a sample placement area 21 for placing a sample; the X-ray source 30 is used to emit X-rays toward the sample placement area 21; the detector group 40 includes a plurality of detectors 41, which are arranged in a row along a curved arrangement direction P0, the arrangement direction P0 extending within the central plane M1 of the detector group 40. The first surface 41a of each detector 41 having an effective detection area 411 faces the sample placement area 21, and the effective detection area 411 is used to detect diffracted X-rays. The effective detection areas 411 of the plurality of detectors 41 are arranged at intervals along the arrangement direction P0. In the X-ray diffractometer 10 using the above structure, the plurality of detectors 41 are arranged in a curved arrangement P0. The plurality of detectors 41 can simultaneously detect diffracted X-rays, thereby improving detection efficiency and obtaining diffraction information of X-rays that is continuously distributed in space. Moreover, since the effective detection area 411 of the detector 41 is a two-dimensional pixel array, more diffraction information is obtained, so that the distribution of the diffracted X-rays in space can be more comprehensively known, which is conducive to improving the detection effect of the X-ray diffractometer 10.

[0193] The above description is only an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An X-ray diffractometer, characterized in that include: a sample stage having a sample placement area for placing a sample; An X-ray source, configured to emit X-rays toward the sample placement area; At least one detector group, the detector group comprising a plurality of detectors, the plurality of detectors being arranged in a row along a curved arrangement direction, the arrangement direction extending within a central plane of the detector group, a first surface of each detector having an effective detection area facing the sample placement area, the effective detection area being used to detect diffracted X-rays, the effective detection areas of the plurality of detectors being arranged at intervals along the arrangement direction, The central plane is a plane where the geometric center of the effective detection area of ​​the first surface of the plurality of detectors of the detector group is located.

2. The X-ray diffractometer according to claim 1, characterized in that The detector group is capable of rotating around an axis perpendicular to the central plane, the axis being perpendicular to a travel path of X-rays from the X-ray source to the sample placement area, and the axis passing through the sample placement area.

3. The X-ray diffractometer according to claim 2, characterized in that The arrangement direction extends in the form of an arc, the axis passes through the center of the arc, and the center is located in the central plane.

4. The X-ray diffractometer according to claim 3, characterized in that The center of the arc is located in the sample placement area.

5. The X-ray diffractometer according to any one of claims 1 to 4, characterized in that: The X-ray diffractometer includes two detector groups, which are arranged along a lateral direction of the two detector groups in a manner that the two detector groups do not hinder each other from detecting the X-rays.

6. The X-ray diffractometer according to claim 5, characterized in that The effective detection area has a first dimension along the arrangement direction and a second dimension along the transverse direction, wherein the transverse direction is perpendicular to a line where the first dimension lies.

7. The X-ray diffractometer according to claim 6, characterized in that The effective detection area includes a plurality of pixels, and the plurality of pixels are arranged in a two-dimensional array.

8. The X-ray diffractometer according to claim 6, wherein: The distance between the effective detection areas of two adjacent detectors in the detector group does not exceed the first size of the effective detection area of ​​the detector, and, along the lateral direction, the gap between the effective detection areas of two adjacent detectors of one of the two detector groups overlaps with a detector of the other of the two detector groups.

9. The X-ray diffractometer according to claim 5, characterized in that The first surfaces of the plurality of detectors are perpendicular to the central plane, and the lateral direction is perpendicular to the central plane, The lateral direction of one of the two detector groups is parallel to the lateral direction of the other of the two detector groups.

10. The X-ray diffractometer according to claim 5, characterized in that The invention also includes a switching unit, the switching unit is connected to the X-ray source, and the switching unit is used to move the X-ray source to a first position or a second position relative to the two detector groups. wherein, when the X-ray source is located at the first position, an extension line of a travel path of X-rays from the X-ray source to the sample placement area passes through a detector of one of the two detector groups or one of the multiple gaps between the multiple detectors; When the X-ray source is located at the second position, an extension line of a travel path of X-rays from the X-ray source to the sample placement area passes between the two detectors.

11. The X-ray diffractometer according to claim 10, wherein: It also includes a main bracket, and the switching unit is connected to the main bracket.

12. The X-ray diffractometer according to claim 11, wherein: The switching unit includes an adjustment mechanism, a connecting block, and a pad, wherein the adjustment mechanism is connected to the main support, the connecting block is connected to the adjustment mechanism, the X-ray source is connected to the connecting block, and the pad is movably connected to the main support, and the adjustment mechanism is used to adjust the connecting block so that the X-ray source can move relative to the two detector groups; When the adjusting mechanism adjusts the connecting block to move the X-ray source to the second position in a direction away from the main support, an accommodating gap into which the spacer block can be inserted is formed between the connecting block and the main support.

13. The X-ray diffractometer according to claim 12, wherein: The adjustment mechanism includes a fixed block, a sliding block and a locking knob, wherein the fixed block is fixedly connected to the main bracket, the sliding block is connected to the connecting block, and the sliding block is slidably connected to the fixed block, and the locking knob is rotatably connected to the fixed block; When the locking knob is loosened, the connecting block can drive the sliding block to move relative to the fixed block when subjected to an external force. When the locking knob is tightened so that the locking knob abuts against the sliding block, the fixed block and the sliding block are relatively fixed.

14. The X-ray diffractometer according to claim 12, wherein: The connecting block has a groove for accommodating a cushion block. When the connecting block moves to the first position in a direction close to the main bracket, the cushion block is accommodated in the groove.

15. The X-ray diffractometer according to claim 11, wherein The sample stage is mounted on the main support.

16. The X-ray diffractometer according to claim 11, wherein: It also includes a fixed bracket having a curved surface facing the sample placement area, and the second surfaces of the multiple detectors of the at least one detector group opposite to the first surface are installed on the curved surface. The fixed bracket is rotatably installed on the main bracket.

17. The X-ray diffractometer according to claim 16, wherein: It also includes a base, which is rotatably mounted on the main bracket, and the fixed bracket is installed in the base.

18. The X-ray diffractometer according to claim 17, wherein: It also includes an anti-scattering member located between the sample placement area and the at least one detector group, the anti-scattering member is connected to the base, the anti-scattering member is provided with a plurality of channels respectively connected to the plurality of detectors of the at least one detector group, and the plurality of channels are formed by the end surface of the anti-scattering member close to the sample placement area passing through toward the base.

19. The X-ray diffractometer according to claim 1, wherein It also includes an optical path component, which is located between the X-ray source and the sample placement area and is connected to the X-ray source. The incident end of the optical path component is docked with the emission end of the X-ray source. The optical path component is used to adjust the X-rays emitted by the X-ray source and then emit them toward the sample placement area.

20. The X-ray diffractometer according to claim 16, wherein: It also includes a cooling component, which is arranged on the back side of the fixing bracket away from the curved surface, and is used to cool the detector group.

21. The X-ray diffractometer according to claim 20, wherein: The cooling assembly includes a heat sink and a cooling tube. The heat sink is arranged on the back side of the fixed bracket away from the curved surface, and the cooling tube is arranged on the supporting surface of the heat sink away from the fixed bracket, wherein the cooling tube extends along the arrangement direction of the multiple detectors of the detector group.

22. The X-ray diffractometer according to claim 21, wherein: A receiving groove extending along the arrangement direction of the multiple detectors of the detector group is provided on the bearing surface of the heat dissipation plate facing away from the fixing bracket, and the cooling pipe is received in the receiving groove.

23. The X-ray diffractometer according to claim 22, wherein: The cooling assembly further includes a plurality of fixing members, which are spaced apart and arranged on a bearing surface of the heat sink facing away from the fixing bracket. The plurality of fixing members are used to constrain the cooling pipe to be located in the receiving groove.

24. The X-ray diffractometer according to claim 21, wherein The cooling assembly further includes an insulating heat-conducting member, which is sandwiched between the fixing bracket and the heat dissipation plate.

25. The X-ray diffractometer according to claim 24, wherein: The heat conducting member is flexible.

26. The X-ray diffractometer according to claim 21, wherein The back surface is a curved surface, the heat dissipation plate is a curved plate, and the cooling pipe is a curved pipe.

27. The X-ray diffractometer according to any one of claims 1 to 26, wherein: The X-ray source includes a housing tube, a mounting frame, and an X-ray tube. The mounting frame is inserted into the housing tube, the X-ray tube is inserted into the housing tube and mounted on the mounting frame, the X-ray tube is used to emit X-rays, and the housing tube is provided with a transmission hole allowing the X-rays to transmit; The X-ray tube is provided with a first light outlet and a second light outlet arranged at intervals, and the mounting bracket and the X-ray tube can rotate together relative to the accommodating cylinder.

28. The X-ray diffractometer according to claim 27, wherein: The first light outlet is used to emit a linear X-ray beam, and the second light outlet is used to emit a point X-ray beam.

29. The X-ray diffractometer according to claim 27, wherein: The mounting frame includes a liquid cooling pipe, which is used to cool the X-ray tube. When the mounting frame rotates, the liquid cooling pipe rotates together with the X-ray tube.

30. The X-ray diffractometer according to claim 29, wherein: The mounting frame includes a mounting plate, and the mounting plate is detachably mounted on the accommodating cylinder.

31. The X-ray diffractometer according to claim 30, wherein: The X-ray tube includes a tube body and an end plate connected to one end of the tube body, the first light outlet and the second light outlet are spaced apart and arranged on the outer peripheral wall of the tube body, the tube body is inserted into the accommodating cylinder, and the end plate is detachably mounted on the mounting plate. The liquid cooling pipe includes a liquid inlet pipe and a liquid outlet pipe. The end plate is provided with a liquid inlet and a liquid outlet communicated with the interior of the X-ray tube. The liquid inlet pipe is communicated with the liquid inlet, and the liquid outlet pipe is communicated with the liquid outlet.

32. The X-ray diffractometer according to claim 31, wherein The accommodating tube includes a tube body and a support plate, the transmission hole is provided in the tube body, the support plate has a first through hole, the mounting plate is located outside the accommodating tube and abuts against the support plate, and the mounting frame is inserted into the accommodating tube via the first through hole.

33. The X-ray diffractometer according to claim 32, wherein: The mounting plate is detachably connected to the support plate. When the mounting plate is detached from the support plate, the mounting bracket and the X-ray tube can rotate together relative to the accommodating cylinder.

34. The X-ray diffractometer according to claim 31, wherein The mounting plate has a second through hole, the end plate is located outside the accommodating cylinder, and the tube body is inserted into the accommodating cylinder via the second through hole.

35. The X-ray diffractometer according to claim 31, wherein The mounting plate has a third through hole and a fourth through hole. The liquid inlet pipe is connected to the liquid inlet via the third through hole, and the liquid outlet pipe is connected to the liquid outlet via the fourth through hole.

36. The X-ray diffractometer according to claim 32, wherein: The cylinder includes a cylinder body and a side plate, and the side plate is detachably connected to the cylinder body.

37. The X-ray diffractometer according to claim 27, wherein: The X-ray source further includes a power cord, which is fixed to the mounting bracket and electrically connected to the X-ray tube.

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