The invention provides a micro cylindrical mirror array manufacturing method based on
electrochemical corrosion, and belongs to the technical field of optical element precision manufacturing, and the method comprises the steps:
cutting the surface of a substrate through a precision
cutting technology to form an initial groove structure, then placing the initial groove structure in an
electrolyte, constructing an electrochemical
reaction system, and forming a micro cylindrical mirror array; applying an
electric field to guide ions in the
electrolyte to generate a selective
dissolution reaction with the surface of the groove; and regulating and controlling process parameters of an electrochemical
reaction system, so that the bottoms of the grooves are gradually rounded, bent and evolved under the driving of interface energy and the action of
electrochemical kinetics, then the sections of the grooves evolve to form a cylindrical form with a target curvature, and finally, the micro cylindrical mirror array is obtained. The technical problems that in existing micro cylindrical mirror array manufacturing, a curved surface is difficult to construct accurately, the array consistency is insufficient, the process is complex, the material adaptability is poor, and products with
high surface quality, controllable curvature
radius and high array consistency cannot be efficiently obtained under the condition that a complex photoetching structure and high-energy beam
processing are not needed are solved.