Planar electrostatic spray nozzle module and electrostatic spray device using same

Abstract

The present invention provides a planar electrostatic spray nozzle module that can operate without a pressure pump by utilizing the capillary phenomenon of a flow path formed on a planar substrate. The planar electrostatic spray nozzle module comprises: two substrates of which respective one surfaces are joined to each other; a flow path formed with a microscopic depth on one side or both sides of a joining surface where the two substrates are joined; and a first electrode that contacts water flowing in the flow path, wherein the flow path includes a reservoir channel through which water is supplied from the outside, and a spray channel having one end connected to the reservoir channel through an inlet and the other end open to the outside through a spray port, wherein the spray channel is formed of a microtube having a narrower width than the reservoir channel. Through this configuration, the planar electrostatic spray nozzle module can realize stable electrostatic spraying without using a pressure pump.

Description

Flat electrostatic spray nozzle module and electrostatic spray device using the same

[0001] The present invention relates to a flat electrostatic spray nozzle module and an electrostatic spray device using the same, and more specifically, to a flat electrostatic spray nozzle module capable of electrostatic spraying without a pressure pump by utilizing the capillary phenomenon of a flow path formed in a flat nozzle, and an electrostatic spray device using the same.

[0002] Electrospray is a method of spraying liquid by concentrating an electric field on a micro-sized nozzle that sprays liquid into several to several dozen droplets. Electrostatic spraying is a technology that converts a liquid into charged fine droplets of a certain size and sprays them. Electrostatic spraying can be categorized into several spray modes, such as simple jet and cone jet, depending on the characteristics of the liquid used and the nozzle radius. Cone jet mode electrostatic spraying has the characteristic of stably generating charged fine droplets that are very small in size compared to the nozzle. When water is electrostatically sprayed, droplets that contain hydroxyl radicals and negative charges, which are harmless to the human body but have strong sterilizing properties, are generated, and these can be utilized in various industrial fields, such as sterilization and fine dust removal.

[0003] However, in the case of water electrostatic spray, due to the high surface tension and electrical conductivity of water, a high onset voltage (cone jet mode onset voltage) is required to realize electrostatic spraying, and there is a problem that the spray amount is small. The high onset voltage causes discharge at the end of the nozzle, which causes the electrostatic spray to become unstable and may generate ozone that is harmful to the human body. To realize water electrostatic spraying without causing discharge, a nozzle made of a non-conductive material with a very small diameter can be used. This is because the smaller the nozzle diameter, the greater the electric field applied to the nozzle, which in turn lowers the electrostatic spray onset voltage, enabling stable electrostatic spraying.

[0004] Patent Publication No. 10-2453344 describes a micro-sized, ultra-fine array nozzle based on MEMS (Micro-Electro-Mechanical Systems) technology. This prior art utilizes micro-diameter, non-conductive nozzles arranged in a three-dimensional array to achieve stable electrostatic spraying. However, the manufacturing process for these three-dimensional micro-array nozzles is challenging.

[0005] Conventional electrostatic spray nozzles require a pressure pump to supply water to the nozzle at a constant pressure to spray water. This pressure pump hinders the miniaturization of electrostatic spray devices, and the noise generated by the pressure pump makes it difficult to use electrostatic spray devices for sterilization and dust removal in small spaces, such as indoors.

[0006] The present invention has been proposed to solve such problems, and its purpose is to provide a flat electrostatic spray nozzle module that is relatively simple to manufacture and capable of electrostatic spraying without a pressure pump by utilizing the capillary phenomenon of a flow path formed on a flat substrate.

[0007] In order to solve the above problem, a flat electrostatic spray nozzle module according to an embodiment of the present invention includes two substrates having one surface joined to each other, a channel formed with a microscopic depth on one or both sides of the joining surface where the two substrates are joined, and a first electrode that contacts water flowing in the channel, the channel includes a water storage channel through which water is supplied from the outside, and a spray channel having one end connected to the water storage channel through an inlet and the other end open to the outside through a spray port, and the spray channel may be formed of a microtube having a narrower width than the water storage channel.

[0008] Meanwhile, an electrostatic spray device using a flat electrostatic spray nozzle module according to one embodiment of the present invention may include a flat electrostatic spray nozzle module that sprays droplets, a water storage unit that supplies water to the flat electrostatic spray nozzle module, and a collector electrode that is positioned at a predetermined distance from the spray port of the flat electrostatic spray nozzle module.

[0009] The flat electrostatic spray nozzle module of the present invention can realize stable electrostatic spraying without using a pressure pump by utilizing the capillary phenomenon of the micro-gap structure of the water reservoir formed on a substrate of a non-conductive material and the micro-tube structure of the spray passage, and can provide a compact, noiseless electrostatic spraying device for indoor use.

[0010] The flat electrostatic spray nozzle module of the present invention can easily process micro-depth and micro-width channels by using a non-conductive resin that is durable and easy to laser process as a channel forming substrate.

[0011] The flat electrostatic spray nozzle module of the present invention can easily manufacture a safe and compact electrostatic spray nozzle by arranging an electrode for applying a high voltage to a liquid inside the nozzle.

[0012] The flat electrostatic spray nozzle module of the present invention can realize stable electrostatic spraying with a low applied voltage by arranging an electrode for concentrating an electric field near the nozzle spray port.

[0013] FIG. 1 is an exemplary diagram of an electrostatic spraying device using a flat electrostatic spraying nozzle module according to one embodiment of the present invention.

[0014] FIG. 2 is a drawing showing a planar electrostatic spray nozzle module and an absorbent inserted into the planar electrostatic spray nozzle module according to one embodiment of the present invention.

[0015] FIG. 3 is an enlarged view showing a spray path formed at an end of a flat electrostatic spray nozzle module according to one embodiment of the present invention.

[0016] FIG. 4 is a drawing showing a planar electrostatic spray nozzle having a multi-nozzle structure according to one embodiment of the present invention.

[0017] FIG. 5 is a drawing showing a manufacturing process of a flat electrostatic spray nozzle module according to one embodiment of the present invention.

[0018] FIG. 6 is a drawing showing a planar electrostatic spray nozzle module having ring-shaped and planar electrodes for electric field concentration according to another embodiment of the present invention.

[0019] Figure 7 is a photograph showing the results of an electrostatic spraying experiment of a flat electrostatic spraying nozzle module according to another embodiment of the present invention.

[0020] Fig. 8 is an exemplary diagram of an air purifier using a flat electrostatic spray nozzle module according to another embodiment of the present invention.

[0021] Figure 9 is an exemplary diagram of a humidifier using a flat electrostatic spray nozzle module according to another embodiment of the present invention.

[0022] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. To more clearly explain the features of this embodiment, a detailed description of general details widely known to those skilled in the art to which the present invention pertains will be omitted. The present invention may be implemented in various different forms and is not limited to the embodiments described below. Like reference numerals in this specification and drawings represent like elements.

[0023] Figure 1 is a drawing showing an embodiment of an electrostatic spraying device (10) equipped with a flat electrostatic spraying nozzle module of the present invention. The electrostatic spraying device (10) according to the present invention may include a flat electrostatic spraying nozzle module (100), a water storage unit (200), a power supply unit (300), and a collector electrode (400).

[0024] The water storage unit (200) stores water and supplies water to the flat electrostatic spray nozzle module (100) through a water supply pipe according to the operation of the electrostatic spray device. The amount of water supplied to the electrostatic spray nozzle can be controlled by a valve (210) installed in the water supply pipe. It is preferable to use pure water from which electrolytes have been removed.

[0025] The power supply unit (300) applies a high voltage to the water supplied to the flat electrostatic spray nozzle module (100). When conditions such as an electric force and surface tension formed in the water are satisfied, the water is formed into a cone shape at the spray port located at the end of the flat electrostatic spray nozzle module (100). At this time, when a high voltage is applied to the water, the water is converted into charged fine droplets and electrostatically sprayed in a cone shape. The electrostatically sprayed fine droplets contain hydroxyl radicals having sterilizing properties. A collector electrode (400) is arranged at a certain distance in a direction opposite to the spray port of the nozzle module. The collector electrode (400) is an electrode connected to the ground to attract charged droplets sprayed from the flat electrostatic spray module (100). Due to the electric force formed by the collector electrode (400), the charged droplets sprayed from the flat electrostatic spray module (100) spread in the direction of the collector electrode (400).

[0026] Below, the detailed configuration of a flat electrostatic spray nozzle module (100) according to an embodiment is described based on FIGS. 2 and 3.

[0027] FIG. 2(a) is a drawing showing a plan view of a flat electrostatic spray nozzle module (100), FIG. 2(b) is a drawing showing a plan view of an absorbent material (140) that can be inserted into a flow path formed on the upper surface of a first substrate (110) of the flat electrostatic spray nozzle module (100), FIG. 2(c) is a drawing showing a width-direction cross-sectional view of the flat electrostatic spray nozzle module (100) in a water storage flow path (120) taken along the line A-A' shown in FIG. 2(a), and FIG. 2(d) is a drawing showing a width-direction cross-sectional view of the flat electrostatic spray nozzle module (100) in a spray flow path (130) taken along the line B-B' shown in FIG. 2(a).

[0028] Figures 3(a) and (b) are enlarged views of the spray path (130) formed at the end of a flat electrostatic spray nozzle module.

[0029] As illustrated in FIGS. 2(a) and (c), a planar electrostatic spray nozzle module (100) according to an embodiment of the present invention has a planar structure in which a first substrate (base substrate) (110) and a second substrate (cover substrate) (150) having a thin thickness are bonded together, and a flow path may be formed on the upper surface of the first substrate (110) corresponding to the bonding surface of the two substrates. The flow path may also be formed on the lower surface of the second substrate (150). In addition, the flow path may be simultaneously formed on the upper surface of the first substrate (110) and the lower surface of the second substrate (150). In either case, the shape of the flow path and the manufacturing process of the planar electrostatic spray nozzle module are the same, and the following describes a case in which the flow path is formed on the upper surface of the first substrate (110).

[0030] The upper surface of the first substrate (110) has a concave groove shape, and a flow path is formed along the groove through which water can flow. The flow path is formed at a certain microscopic depth on the upper surface of the first substrate (110). The thickness of the first substrate (110) is preferably several tens to several hundred is set to the thickness of .

[0031] In order to realize electrostatic water spraying without causing discharge in a flat electrostatic spray nozzle module (100) according to one embodiment of the present invention, a non-conductive material is used for the first substrate (110), and a polymer-based synthetic resin may be used. The material of the first substrate (110) may be at least one selected from polyimide, acrylic, polycarbonate, polyethylene terephthalate, and polyethylene, but is not limited thereto.

[0032] As illustrated in Fig. 2(c), a second substrate (150) may be bonded to the upper portion of the first substrate (110) to shield the upper portion of the flow path from the outside of the flat electrostatic spray nozzle module. To this end, the first substrate (110) and the second substrate (150) may be bonded to each other by interposing an adhesive on one surface to be bonded to each other. In addition, the second substrate (150) may be thermally laminated to the upper portion of the first substrate (110). As a result, a flow path with a microscopic depth through which water flows along the bonding surface is formed on the upper surface of the first substrate (110) corresponding to one side of the bonding surface where the first substrate (110) and the second substrate (150) are bonded. The flow path is formed parallel to the bonding surfaces of the two substrates.

[0033] In the above description, the flow path is formed on the upper surface of the first substrate (110), but the flow path can be formed as a concave groove having the same shape as the concave groove formed on the upper surface of the first substrate (110) on the lower surface of the second substrate (150) corresponding to the other side of the bonding surface (not shown). In addition, the flow path can be formed in the shape of a concave groove on both sides of the bonding surface, that is, on the upper surface of the first substrate (110) and the lower surface of the second substrate (150) (not shown), and in this case, the flow path can be completed by bonding the two substrates so that the concave grooves formed on both sides of the bonding surface match each other.

[0034] As for the material of the second substrate (150), a non-conductive material, like the first substrate (110), may be used, and various types of polymers may be used. The material of the second substrate (150) may be at least one selected from polyimide, acrylic, polycarbonate, polyethylene terephthalate, and polyethylene, but is not limited thereto. When the second substrate (150) is thermally laminated on top of the first substrate (110), it is preferable to use a polymer with strong heat resistance as the second substrate (150).

[0035] As shown in Fig. 2(a), the channel formed parallel to the upper surface of the first substrate (110) on the upper portion of the first substrate may include a water storage channel (120) and a spray channel (130) connected to the water storage channel (120). As shown in Figs. 2(c) and (d), the water storage channel (120) and the spray channel (130) are formed in a concave groove shape on the upper portion of the first substrate (110), and the second substrate (150) covers the upper portion of the channel. Therefore, the water storage channel (120) and the spray channel (130) form micro-gaps and micro-tubes between the first and second substrates, and water supplied from the outside to the water storage channel (120) moves along the channel due to the capillary phenomenon of the channel having the shape of the micro-gaps and micro-tubes. The depth of the concave grooves of the water storage channel (120) and the spray channel (130) is tens to hundreds. It can be formed in the size of. Above, the first substrate (110) is described as being made of a single layer of substrate, but as described later, depending on the process of forming the path, the first substrate (110) can be formed by bonding two substrates (110a, 110b).

[0036] As illustrated in FIG. 1, water can be intermittently or continuously supplied to the water storage (120) from a water storage unit (200) installed outside the flat electrostatic spray nozzle module (100). To this end, a water supply port (152) to which a water supply pipe is connected may be formed on the second substrate (150). The water supply port (152) may be arranged above the water storage channel (120), but the position of the water supply port (152) is not limited. The timing and amount of water supplied to the water storage channel (120) can be controlled by a valve (210) installed in the water supply pipe. At this time, the water storage unit (200) is preferably arranged at a higher position than the flat electrostatic spray nozzle module (100). Through this mutual arrangement structure, water can be smoothly supplied from the water storage unit (200) to the nozzle module.

[0037] The width of the water reservoir (120) is much wider than the width of the spray channel (130) described later. Therefore, the water reservoir (120) is formed with a wide width and a fine micro-crack structure. The sides of the water reservoir (120) are all blocked except for the inlet (132) through which water flows from the water reservoir (120) into the spray channel (130). Therefore, water supplied from the outside of the nozzle module to the water reservoir (120) flows toward the inlet (132) due to the capillary phenomenon of the micro-crack structure of the water reservoir (120) and can flow into the spray channel (130) through the inlet (132).

[0038] The water storage channel (120) can store a large amount of water compared to the spray channel (130), and the flat electrostatic spray nozzle module (100) can continuously supply a sufficient amount of water to the spray channel (130) to maintain electrostatic spraying.

[0039] The width of the water storage channel (120) can be manufactured in a shape that becomes narrower linearly or stepwise as it gets closer to the inlet (132). Due to the structure in which the width of the water storage channel (120) gradually becomes narrower, the water supplied to the water storage channel (120) can flow more smoothly toward the inlet (132) of the spray channel (130).

[0040] The spray channel (130) has a micro-tubular structure with a very narrow width compared to the reservoir channel (120), as illustrated in Fig. 3(a). One end of the spray channel (130) corresponds to the inlet (132) and is connected to the reservoir channel (120). The other end of the spray channel (130) is connected to a spray port (134). The spray port (134) is formed on the outer surface of the flat electrostatic spray nozzle module (100), and the spray channel (130) is opened to the outside of the flat electrostatic spray nozzle module (100) through the spray port (134). The spray channel (130) can be formed with a constant width from the inlet (132) to the spray port (134). Water flowing into the spray channel (130) from the water storage channel (120) can flow toward the spray port (134), which is the outlet of the spray channel (130), by the capillary phenomenon of the microtubular structure. In this way, in the flat electrostatic spray nozzle module (100) according to one embodiment of the present invention, by utilizing the capillary phenomenon of the water storage channel (120) and the spray channel (130), water supplied from the outside to the flat electrostatic spray nozzle module (100) can move to the spray port (134) without using a pressure pump.

[0041] The depth of the spray channel (130) can be set to be the same as the depth of the water reservoir channel (120), and the cross-section of the spray channel (130) can be formed in a square shape. The depth and width of the spray channel (130) can be set to the same size, but are not limited thereto. The depth and width of the spray channel (130) can be set to several tens to several hundreds. It can be set to a fine size. In the case of an electrostatic spray nozzle, the narrower the diameter of the nozzle, the lower the starting voltage for generating electrostatic spraying can be, and the electrostatic spraying can be stably realized. In the case of a flat electrostatic spray nozzle module (110) according to one embodiment of the present invention, the width and depth of the spray path (130) are formed into a fine micro-tubular structure, so that stable electrostatic spraying is possible at a low starting voltage.

[0042] Hereinafter, a manufacturing process of a first substrate (110) according to an embodiment of the present invention will be described. The water reservoir channel (120) and the spray channel (130) formed on the first substrate (110) can be manufactured through a UV imprint (embossing) process. In the UV imprint process, a metal mold having a convex pattern formed corresponding to the concave groove shape of the water reservoir channel (120) and the spray channel (130) is first prepared. A photocurable resin such as a UV resin is poured into the metal mold, and a base substrate made of a non-conductive material is pressed on top of the mold while being UV-cured. Through this manufacturing process, the first substrate (110) can be obtained by laminating the UV resin having the water reservoir channel (120) and the spray channel (130) formed on the base substrate. The method of forming the concave groove-shaped channel on the first substrate (110) is not limited to the UV imprint method. Instead of UV resin, a thermoplastic resin can be used and the concave groove pattern can be formed by thermocompression with a metal mold.

[0043] In addition, the first substrate (110) can be manufactured using precision laser processing. When precision laser processing is used, the first substrate (110) is manufactured by dividing it into an upper first substrate (110a) and a lower first substrate (110b). First, a substrate made of a durable, non-conductive material that can be precisely laser processed is prepared for processing the upper first substrate (110a). At this time, the thickness of the substrate is set to be the same as the depth of the flow path. Thereafter, a pattern of a water reservoir (120) and a spray channel (130) is cut out from the substrate through laser processing, thereby completing the upper first substrate (110a) in which a portion corresponding to the pattern of the water reservoir (120) and the spray channel (130) penetrates the upper and lower surfaces of the substrate. Next, the upper first substrate (110a) with the pattern portion of the euro cut out can be bonded to the lower first substrate (PI, etc.) (110b) which is a non-conductive material substrate using a method such as a hot-melt adhesive, thereby completing the first substrate (110) in which the euro is formed.

[0044] In the planar electrostatic spray nozzle module (100) of the present invention, a high voltage of several kV is applied to the water supplied to the water reservoir (120) to generate an electrostatic spray cone. To apply the high voltage to the nozzle module, an electrode for applying the high voltage is placed inside the nozzle module. The electrode for applying the high voltage can be placed anywhere where it can come into contact with water. If the electrode for applying the high voltage is placed close to the spray port of the nozzle module, voltage loss can be reduced.

[0045] In a planar electrostatic spray nozzle module (100) according to one embodiment of the present invention, a first electrode (160) used for applying a high voltage may be disposed on the inner surface of a channel formed in the electrostatic spray nozzle module, that is, on the lower surface, side surface, upper surface, etc. of the channel. FIGS. 2(c) and (d) show a structure in which the first electrode (160) is disposed on the lower surface of the water storage channel (120) and the spray channel (130), respectively. In FIGS. 2(c) and (d), the first electrode (160) is illustrated as being disposed over the entire area of ​​the water storage channel (120) and the spray channel (130), but the first electrode (160) may be disposed only in a part of the inner surface of the channel that can come into contact with water moving in the channel. Due to the first electrode (160) disposed on the inner surface of the channel, the channel becomes hydrophilic, so that the flow of water in the channel can become smoother.

[0046] In a flat electrostatic spray nozzle module (100) according to one embodiment of the present invention, a hydrophilic coating layer (170) can be formed on the inner surface of the spray channel (130) to ensure smooth water flow. To this end, the inner surface of the spray channel (130) can be coated with a hydrophilic material. It is preferable that the hydrophilic coating be formed on at least one of the upper surface, lower surface, and side surface forming the inner surface of the spray channel (130) and over the entire length of the spray channel (130). The hydrophilic coating can be implemented through a method of vacuum deposition of a metal having hydrophilic properties, such as chromium and titanium, using an electron beam (e-beam). The hydrophilic coating can use various hydrophilic materials, such as metals, ceramic compositions, and synthetic resins, and various coating techniques, in addition to deposition, can be utilized, such as spraying and spinning.

[0047] A hydrophilic coating layer (170) can be formed on the inner surface of the water storage channel (120) along the entire length of the water storage channel (120), similar to the spray channel (130).

[0048] In a flat electrostatic spray nozzle module (110) according to one embodiment of the present invention, an absorbent (140) may be inserted into a water storage channel (120). FIG. 2(b) is a drawing showing an absorbent (140) inserted into a water storage channel (120). The absorbent (140) facilitates the flow of water supplied to the water storage channel (120) by the capillary phenomenon of the microporous structure formed inside the absorbent (140).

[0049] The absorbent is manufactured in a size that can be inserted into the concave groove of the water reservoir (120), and can be manufactured in the form of a thin plate having a thickness smaller than or equal to the depth of the water reservoir (120). As the absorbent (140), general absorbent materials such as paper, fiber, ceramic, synthetic resin, and porous materials can be used. Any material that has a microporous structure formed inside and can absorb water by the capillary principle can be used without limitation. It is preferable that the absorbent be installed so as to be in contact with the inlet (132) of the spray channel (130). In addition, the absorbent serves to filter foreign substances contained in water. Although the absorbent is described above as being inserted into the water reservoir (120), an absorbent that can be inserted into the spray channel (130) can be processed through microprocessing using a laser, etc.

[0050] As illustrated in Fig. 3(b), at least a portion of the spray channel (130) can be manufactured as a multi-microtubule (136) structure. The multi-microtubule (136) is a structure in which multiple microtubules are arranged in parallel with each other. Each microtubule constituting the multi-microtubule (136) has a microtubule structure with a small width, like the single microtubule constituting the spray channel (130) illustrated in Fig. 3(a). That is, Fig. 3(a) can be said to be a spray channel composed of a single microtubule, and Fig. 3(b) can be said to be a spray channel in which multiple microtubules are arranged in parallel. When the spray channel (130) is formed of multiple microtubes (136), as shown in Fig. 3(b), one end of the multiple microtubes (136) may be connected to the reservoir channel (120) through different inlets (132), and the other ends of the multiple microtubes (136) may be joined together and connected to the spray channel (130). In Fig. 3(b), the other ends of the multiple microtubes (136) are shown as being joined at the middle point of the spray channel (130), but the other ends of the multiple microtubes (136) may be joined at the end of the spray channel (130), i.e., at the spray port (134).

[0051] In the case of a spray channel (130) having multiple microtubes (136) as in Fig. 3(b), the possibility of water flowing into the spray channel (130) from the reservoir channel (120) is increased compared to a spray channel (130) having a single microtube, so that the flow of water in the channel can be made smoother. In addition, when an absorbent is inserted into the reservoir channel (120), water in the reservoir channel (120) flows into the spray channel (130) through the absorbent in contact with the inlet (132) of the spray channel (130). However, when the spray channel (130) has a structure of multiple microtubes (136), the portion of the absorbent (140) inserted into the reservoir channel (120) that comes into contact with the inlet (132) of the multiple microtubes (136) increases, so that water flowing into the multiple microtubes (136) from the reservoir channel (120) can be made smoother.

[0052] Fig. 4 shows a planar electrostatic spray nozzle module (100a, 100b) having a multi-nozzle structure. The planar electrostatic spray nozzle module (100a, 100b) having a multi-nozzle structure is composed of a plurality of nozzles, that is, a plurality of spray ports, and electrostatic spraying is performed through each spray path (130a, 130b, 130c) formed in each nozzle. One end of each spray path (130a, 130b, 130c) is connected to a reservoir path (120) through a different inlet, and the other end of each spray path (130a, 130b, 130c) is connected to a different spray port (134a, 134b, 134c). In the planar electrostatic spray nozzle module (100a, 100b) having a multi-nozzle structure, droplets are sprayed simultaneously from a plurality of spray ports, thereby increasing the spray amount of droplets. Fig. 4(a) shows an example of a planar electrostatic spray nozzle module (100a) with a multi-nozzle structure in which the spray directions of each nozzle are designed to be identical. In addition, the spray directions of each nozzle may be designed differently depending on the purpose of the electrostatic spray device. Fig. 4(b) shows an example of a planar electrostatic spray nozzle module (100b) with a multi-nozzle structure in which the spray directions of each nozzle are separated from each other by the same angle and are manufactured to face the radial direction.

[0053] FIGS. 5(a) to (e) illustrate a process of forming a first electrode (160) for applying a high voltage to a planar electrostatic spray nozzle module (100). The planar electrostatic spray nozzle module (100) illustrated in FIG. 5(a) includes an electrode terminal (162) for applying a high voltage to the first electrode (160) arranged on the lower surface of the flow path of the first substrate (110). FIGS. 5(b) to (e) illustrate cross-sectional views of the nozzle module in the water reservoir channel (120) taken along the line C-C' illustrated in FIG. 5(a) according to the manufacturing process sequence of the planar electrostatic spray nozzle module (100). The cross-sectional structure in the spray path (130) has the same shape as the cross-sectional structure of the water reservoir channel (120) except that the width is smaller than that of the cross-sectional structure in the water reservoir channel (120). Below, the formation process of the first electrode (160) is described based on the case where the first substrate (110) is manufactured through the precision laser processing method described above.

[0054] Electroless plating can be used as a method for forming a high-voltage electrode inside the euro. In the electroless plating technique, a metal layer such as copper is first formed on a non-conductive base substrate corresponding to the lower first substrate (110b). This metal layer is etched in a predetermined pattern to form a first electrode (160) as shown in Fig. 5(b). Nickel can be electrolessly plated on the upper portion of the electrode to protect the electrode surface. The first electrode (160) for high-voltage application can be formed on the base substrate through various methods, such as screen printing, in addition to the electroless plating technique.

[0055] In the next step, the upper first substrate (110a) is processed using a precision machining laser so that a portion corresponding to the pattern of the euro penetrates across the upper and lower surfaces of the substrate. Thereafter, as shown in Fig. 5(c), the upper first substrate (110a) is bonded to the upper first substrate (110b) using a method such as a hot-melt adhesive. This completes the first substrate (110) in which the first electrode (160) is positioned between the upper first substrate (110a) and the lower first substrate (110b). When bonding the upper first substrate (110a) to the lower first substrate (110b), it may be difficult to match the width of the first electrode (160) formed on the upper surface of the lower first substrate (110b) with the width of the flow path formed on the upper first substrate (110a), so the width of the first electrode (160) may be bonded slightly wider than the width of the water reservoir (120) and the spray flow path (130), as shown in Fig. 5(c).

[0056] The flat electrostatic spray nozzle module (100) may have a hydrophilic coating layer (170) on the inner surface of the water reservoir (120) and the spray passage (130) as in 5(d) to ensure smooth flow of water in the passage.

[0057] As shown in Fig. 5(e), a second substrate (150) can be bonded to the upper portion of the first substrate (110) to shield the upper portion of the water reservoir (120) and the spraying passage (130). The second substrate (150) and the first substrate (110) can be bonded using an adhesive. In addition, since the second substrate (150) can be thermally bonded to the upper portion of the first substrate (110), it is preferable to use a polymer (PI, PET, etc.) with excellent heat resistance.

[0058] The flat electrostatic spray nozzle module (100) can have a hydrophilic coating layer (170) formed along the flow path on the lower surface of the second substrate (150). In this case, it is preferable that the hydrophilic coating layer (170) formed along the flow path on the lower surface of the second substrate (150) be formed over the entire length of the flow path.

[0059] The process for forming the first electrode (160) described above is based on the case of manufacturing the first substrate (110) using a laser precision processing method. The first substrate (110) can be manufactured through a UV imprint process as described above.

[0060] Among the outer surfaces of the planar electrostatic spray nozzle module (100) manufactured by laminating the first and second substrates, the side where the spray port is formed can be cut off, leaving only a part around the spray port, by laser processing. That is, as shown in Fig. 2(a), the side where the spray port (134) is formed can be formed in a sharp shape. Through this structure, it is possible to avoid a phenomenon in which some of the droplets sprayed from the spray port (134) condense on the outer surface of the nozzle module, thereby interfering with spraying.

[0061] A planar electrostatic spray nozzle module according to another embodiment of the present invention may further include an electrode for concentrating an electric field. FIGS. 6(a) and 6(b) are drawings showing a planar electrostatic spray nozzle module (100) in which a second electrode (510, 520) is arranged at an end of the electrostatic spray nozzle module, i.e., near the spray port (134). The second electrode (510, 520) concentrates an electric field at the spray port (134) located at the end of the electrostatic spray nozzle module. This lowers the electrostatic spray initiation voltage, thereby realizing stable electrostatic spraying. The second electrode (510, 520) may be connected to ground, such as the collector electrode (400).

[0062] The second electrode (510, 520) is preferably positioned close to the spray port (134) of the nozzle module to form an electric field near the spray port (134) located at the end of the nozzle module. In addition, the second electrode (510, 520) is preferably positioned symmetrically with respect to the longitudinal central axis (501) of the spray path (130).

[0063] FIG. 6(a) is a drawing showing a planar electrostatic spray nozzle module (100) including a ring-shaped second electrode (510) according to one embodiment of the second electrode. The ring-shaped second electrode (510) is a circular ring-shaped electrode, and may be in the shape of a donut or a hollow ring-shaped disk. It is preferable to arrange the central axis passing through the center of the ring-shaped second electrode (510) so as to coincide with the longitudinal central axis (501) of the spray path (130). In addition, it is preferable to arrange the ring-shaped second electrode (510) in a space close to the spray port (134) located at the end of the nozzle module.

[0064] FIG. 6(b) is a drawing showing a planar electrostatic spray nozzle module (100) equipped with a planar second electrode (520) according to another embodiment of the second electrode, and FIG. 6(c) is a drawing showing a cross-sectional view in the width direction of the planar electrostatic spray nozzle module (100) taken along the line D-D' shown in FIG. 6(b). The planar second electrodes (520) are a pair of planar electrodes, and each of them can be arranged symmetrically at positions above and below the flow path with respect to a horizontal plane passing through the longitudinal central axis (501) of the flow path. The planar second electrodes (520) can be horizontally embedded in the lower substrate (110b) of the first substrate (110) and the inside of the second substrate (150), as shown in FIG. 6(c), respectively. Additionally, in order to concentrate the electric field generated by the planar second electrode (520) near the spray port (134) of the nozzle module, the planar second electrode (520) may be placed close to the spray port (134) of the nozzle module. It is preferable that the planar second electrode (520) be placed so as to extend to the end of the nozzle module.

[0065] Figure 7 is a photograph of the experimental results showing that electrostatic spraying is generated without using a pressure pump through the electrostatic spraying device of Figure 1. Figure 7(a) shows that the width of the spray path (130) is 125 In a planar electrostatic spray nozzle module, the results of an electrostatic spray experiment in which no absorbent material was inserted into the flow path and no hydrophilic coating was applied to the inner surface of the flow path showed that a cone was formed at the end of the nozzle module when a voltage of about 6.2 kV was applied inside the flow path. Figures 7(b) and (c) show that the width of the spray flow path (130) is 275 These are the results of an electrostatic spray experiment in a planar electrostatic spray nozzle module in which a hydrophilic coating was applied to the inner surface of the flow path. At this time, a cone was formed at the end of the nozzle module at an applied voltage of approximately 5 kV in cases where an absorbent was inserted into the flow path (Fig. 7(b)) and when no absorbent was used (Fig. 7(c)).

[0066] Fig. 8(a) is a perspective view showing the inside of an air purifier (800) according to one embodiment of an electrostatic spray device using a flat electrostatic spray nozzle module (101).

[0067] An air purifier (800) may include a water storage unit (201) that stores water, a flat electrostatic spray nozzle module (101) that converts water supplied from the water storage unit (201) into droplets and sprays them, a collector electrode (401) that spreads droplets sprayed from the flat electrostatic spray nozzle module (101) into an internal space of the air purifier (800) by electrical attraction, and a blower unit (600) that blows out air that has been sterilized and dust-removed by hydroxyl radicals and anions contained in the droplets.

[0068] The water storage unit (201) is preferably located above the flat electrostatic spray nozzle module (101) as shown in Fig. 8(a) to smoothly supply water to the flat electrostatic spray nozzle module (101). In addition, the water storage unit (201) may be located below the flat electrostatic spray nozzle module (101) (not shown), in which case the water in the water storage unit (201) can reach the flat electrostatic spray nozzle module (101) by utilizing the capillary phenomenon of the absorbent material filter inserted into the water storage unit (201).

[0069] The planar electrostatic spray nozzle module (101) built into the air purifier (800) may have a radial multi-nozzle structure. The air purifier (800) of Fig. 8(a) is an example using a planar electrostatic spray nozzle module (101) with a radial multi-nozzle structure having four nozzles. In the radial multi-nozzle, the spraying direction of each nozzle is directed in a radial direction separated by the same angle from each other. By the radial spraying of such a radial multi-nozzle, not only can the amount of sprayed droplets be increased, but also the droplets can be spread to the entire area of ​​the internal space of the air purifier (800). In the air purifier (800), the planar electrostatic spray nozzle module (101) may be arranged so that the spraying direction of the droplets intersects perpendicularly with the flow direction of air introduced from the outside of the electrostatic spray device. Due to this arrangement structure, the droplets sprayed from the multiple nozzles intersect at right angles with the contaminated air flowing in from the outside through the air inlet (814) located at the bottom of the air purifier (800) and moving upward, so that the outside air can effectively come into contact with the charged droplets.

[0070] The collector electrode (401) is plate-shaped and can be placed on the inner surface of the case (810) facing the spray nozzle of the electrostatic spray nozzle module. Since the sprayed droplets are charged particles, the electric attraction of the collector electrode (401) connected to the ground acts to spread them into the internal space of the air purifier (800).

[0071] The air purifier (800) may further include a ring-shaped second electrode (511). The ring-shaped second electrode (511) lowers the electrostatic spray initiation voltage by concentrating the electric field near the spray port of the nozzle module, thereby enabling stable electrostatic spraying. FIG. 8(b) illustrates the arrangement relationship of a flat electrostatic spray nozzle module (101), a ring-shaped second electrode (511), and a collector electrode (401) in one nozzle of a radial multi-nozzle structure. The ring-shaped second electrode (511) may be arranged in the space between the flat electrostatic spray nozzle module (101) and the collector electrode (401) such that the central axis of the ring-shaped second electrode (511) is aligned with the central axis of the flat electrostatic spray nozzle module. In addition, the ring-shaped second electrode (511) is preferably arranged near the spray port of the nozzle in order to concentrate the electric field on the nozzle of the flat electrostatic spray nozzle module.

[0072] An air inlet (814) is formed at the bottom of the air purifier (800) case (810) to introduce outside air into the air purifier (800). It is preferable that the air inlet (814) be positioned lower than the flat electrostatic spray nozzle module (101) arranged inside the air purifier (800). The outside polluted air introduced into the air purifier (800) through the air inlet (814) moves upward and comes into orthogonal contact with the droplets sprayed horizontally from the flat electrostatic spray nozzle module (101). Bacteria and fine dust contained in the polluted air are sterilized and collected as they come into contact with the hydroxyl radicals and negative charges contained in the droplets.

[0073] A blower (600) may be placed at the top of the air purifier (800). Clean air that has been sterilized and dust-collected by contact with charged droplets is discharged to the outside through a discharge port (816) formed in the cap portion (812) of the air purifier (800) by forced ventilation of the blower (600).

[0074] An auxiliary case (not shown) in which a power supply unit including a power supply for controlling the operation of the air purifier (800) and a power supply for applying high voltage is located may be installed at the bottom of the case (810).

[0075] Figure 9 is a perspective view illustrating an example of a moisturizer (900) according to another embodiment of an electrostatic spray device using a flat electrostatic spray nozzle module (102). An electrostatic spray moisturizer is a device that maintains moisture by spraying charged microdroplets onto a moisturizing target. When an electrostatic spray moisturizer is used on human skin, it can be used as a skin beauty auxiliary device capable of not only moisturizing but also sterilizing viruses.

[0076] The humidifier (900) may include a water storage unit (202) that stores water, a flat electrostatic spray nozzle module (102) that converts water supplied from the water storage unit (202) into droplets and sprays them, and a collector electrode (402) that attracts droplets sprayed from the flat electrostatic spray nozzle module (102) using electrical attraction.

[0077] A collector electrode (402) connected to the ground is positioned opposite to the spray port of a flat electrostatic spray nozzle module (102) to attract charged droplets sprayed from the spray port by electrical attraction. A discharge port (916) is formed on one side of the case (910) of the humidifier (900) (the lower surface of the case in FIG. 9) to discharge the charged droplets to the outside of the humidifier (900). At this time, a surface of the collector electrode (402) having a hollow disc shape may be positioned so as to be located on a portion of the opening surface of the discharge port (916). The droplets attracted by the collector electrode (402) may be discharged to the outside of the humidifier (900) through the remaining opening surface of the discharge port (916). In addition to the ring-shaped electrode illustrated in FIG. 9, a mesh-shaped electrode may be used as the collector electrode (402). In this case, the surface of the mesh-shaped electrode may be positioned so as to be positioned on the opening surface of the discharge port (916).

[0078] Through this arrangement structure, the charged droplets attracted to the collector electrode (402) are discharged to the outside through the discharge port (916). When the moisturizer (900) is used for skin beauty purposes, one side of the moisturizer case (910) in which the discharge port (916) is formed can be brought into contact with the human skin (S). At this time, the collector electrode (402) arranged to coincide with the opening surface of the discharge port (916) directly contacts the skin and grounds the skin, so that the skin adsorption power of the droplets increases, thereby improving the skin moisturizing effect. In addition, the hydroxyl radicals contained in the droplets sprayed from the flat electrostatic spray nozzle module (102) of the moisturizer (900) can sterilize viruses on the skin, thereby improving skin health.

[0079] The humidifier (900) may further include a ring-shaped second electrode (512). The ring-shaped second electrode (512) concentrates an electric field at the end of the nozzle module. This lowers the electrostatic spray initiation voltage, thereby enabling stable electrostatic spraying. The ring-shaped second electrode (512) may be positioned in a space between the flat electrostatic spray nozzle module (102) and the collector electrode (402). The ring-shaped second electrode (512) is preferably positioned in a space adjacent to the spray nozzle to concentrate an electric field near the spray nozzle of the electrostatic spray nozzle module.

[0080] While the present invention has been described above based on specific embodiments, those skilled in the art will appreciate that the present invention can be implemented in various modified forms without departing from its essential characteristics. Therefore, the technical protection scope of the present invention should not be defined by the embodiments, but rather by the technical concepts set forth in the claims.

[0081] [Explanation of symbols]

[0082] 10: Electrostatic spray device

[0083] 100, 101, 102: Planar electrostatic spray nozzle module 110: First substrate

[0084] 120: Low flow rate 130: Spray flow rate

[0085] 132: Inlet 134: Spray nozzle

[0086] 136: Multi-microtubule 140: Absorbent

[0087] 150: Second substrate 152: Water supply port

[0088] 160: First electrode 162: Electrode terminal for voltage application

[0089] 170: Hydrophilic coating layer

[0090] 200, 201, 202: Water storage

[0091] 300: Power supply

[0092] 400, 401, 402: Collector electrodes

[0093] 501: Longitudinal central axis of the spray path 510, 511, 512: Ring-shaped second electrode

[0094] 520: Planar second electrode

[0095] 600: Blower

[0096] 800: Air purifier 810, 910: Case

[0097] 812: Cap 814: Air inlet

[0098] 816, 916: Ejector

[0099] 900: Moisturizer

[0100] HV: High voltage S: Moisturizing target surface (skin)

Claims

1. Two substrates with one side joined to each other; A channel formed with a microscopic depth on one or both sides of the joint surface where the two substrates are joined; and including a first electrode in contact with the water flowing through the above-mentioned euro, The above euro is A reservoir with water supplied from outside; and It includes a spray path that is connected to the reservoir through an inlet at one end and is opened to the outside through a spray port at the other end. The above spray path is a flat electrostatic spray nozzle module made of a microtube with a narrow width compared to the above water reservoir path.

2. In claim 1, A flat electrostatic spray nozzle module in which the width of the above reservoir channel becomes narrower as it approaches the above spray channel.

3. In claim 1, At least a portion of the above spray path is formed of a multi-microtube in which a plurality of microtubes are arranged in parallel, A planar electrostatic spray nozzle module in which one end of each of the plurality of microtubes is connected to the water reservoir through different inlets, and the other end of each of the plurality of microtubes is connected to each other and connected to the spray passage.

4. In claim 1, The above spray nozzles are multiple, Each of the above multiple spray paths is a flat electrostatic spray nozzle module open to the outside through a different spray port.

5. In claim 4, A planar electrostatic spray nozzle module in which the spraying direction of each of the above multiple spray paths is a radial direction separated by the same angle from each other.

6. In claim 1, A flat electrostatic spray nozzle module having an absorbent material having a microporous structure inserted into the above-mentioned euro.

7. In claim 1, The inner surface of the above euro is a hydrophilic coated flat electrostatic spray nozzle module.

8. In claim 1, The above first electrode is a planar electrostatic spray nozzle module formed on the inner surface of the euro.

9. In claim 1, A planar electrostatic spray nozzle module further comprising a second electrode symmetrically arranged based on the longitudinal central axis of the spray path.

10. In claim 9, The second electrode is a ring-shaped electrode, and a planar electrostatic spray nozzle module is arranged in an external space adjacent to the spray port so that the central axis of the ring-shaped electrode coincides with the longitudinal central axis of the spray path.

11. In claim 9, The second electrode is a pair of planar electrodes, and a planar electrostatic spray nozzle module is horizontally embedded one by one inside each of the two substrates.

12. A flat electrostatic spray nozzle module as described in any one of claims 1 to 11; A water storage unit for supplying water to the above-mentioned flat electrostatic spray nozzle module; and An electrostatic spray device including a collector electrode positioned at a certain distance from the spray nozzle of the above-mentioned flat electrostatic spray nozzle module.

13. In claim 12, The above collector electrode is installed on the inner wall of the electrostatic spray device, An electrostatic spray device in which air drawn in from the outside moves through the space between the flat electrostatic spray nozzle module and the collector electrode.

14. In claim 12, An electrostatic spray device further comprising a blower for discharging air that has come into contact with droplets sprayed from the above-mentioned flat electrostatic spray nozzle module to the outside.

15. In claim 12, The case of the above electrostatic spray device is provided with an outlet for discharging droplets sprayed from the flat electrostatic spray nozzle module to the outside, An electrostatic spray device in which the above collector electrode is positioned so as to be located on a part of the opening surface of the discharge port

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