Cleaning water supply device for cleaning air

Abstract

The present invention provides a cleaning water supply device comprising: an ionized water generation module for generating and supplying cleaning water containing radical ions by electrolyzing general water; and a cleaning water supply module for generating cleaning water containing the ionized water introduced from the ionized water generation module and supplying the cleansing water to the outside. The ionized water generation module includes: an electrolysis tank into which general water or cleaning water recovered from the cleaning water supply module is introduced, and which provides an ionized water generation space in which the ionized water is generated; a decomposition electrode positioned inside the electrolysis tank to perform electrolysis; a water inlet pipe for supplying general water to the electrolysis tank; and a cleaning water recovery pipe for recovering cleaning water from the cleaning water supply module and supplying the cleaning water to the electrolysis tank.

Description

Cleaning water supply device for air cleaning

[0001] The present invention relates to a cleaning water supply device that supplies cleaning water to clean the air by spraying it into air passing through a filter in an air purification device.

[0002] In semiconductor manufacturing lines (including flat panel display manufacturing lines and solar panel manufacturing lines), it is important to control the contamination of the air supplied to the line to improve yield. Recently, with the miniaturization of semiconductor manufacturing processing technology, the impact of air contamination on the yield of semiconductor processes is increasing. In particular, water-soluble ionic gases (NH4 + , SO x , NO x ) has a close impact on the yield of semiconductor processes.

[0003] Typically, air supplied to semiconductor manufacturing lines is purified and filtered by a device including a water showering system. The water showering system comprises a filter and a cleaning water supply means, and sprays the cleaning water onto the front side of the filter through which air flows, thereby cleaning and filtering ionic gases contained in the air. The water showering system uses deionized water to reduce air contamination by contaminants contained in the cleaning water. Therefore, the use of deionized water increases operating costs for the water showering system. Furthermore, deionized water does not have a high cleaning power against ionic gases, limiting the water showering system's ability to clean ionic gases.

[0004] The purpose of the present invention is to provide a cleaning water supply device that supplies cleaning water capable of cleaning pollutants including ionic gases contained in air.

[0005] A cleaning water supply device according to one embodiment of the present invention is characterized by including an ion water generation module that electrolyzes general water to generate and supply cleaning water containing radical ions, and a cleaning water supply module that generates and supplies cleaning water containing the ion water flowing in from the ion water generation module to the outside.

[0006] In addition, the ion water generation module may include an electrolysis tank that provides an ion water generation space into which the general water or the cleaning water recovered from the cleaning water generation module flows and generates the ion water, a decomposition electrode positioned inside the electrolysis tank to perform the electrolysis, a water inlet pipe that supplies the general water to the electrolysis tank, and a cleaning water recovery pipe that recovers the cleaning water from the cleaning water supply module and supplies it to the electrolysis tank.

[0007] In addition, the ion water generation module may include a sensing control tank having a sensing ion water space into which the ion water flows from the electrolysis tank, an upper connecting pipe having the other end penetrating the upper plate of the electrolysis tank and extending inward, one end connected to the sensing control tank, and providing a path through which the ion water is supplied, and a lower connecting pipe having the other end penetrating one side wall of the electrolysis tank and being connected, one end connected to the lower side of the sensing control tank, and providing a path through which the ion water flows.

[0008] In addition, the washing water supply device may further include a particle filter membrane positioned in front of the water inlet pipe or at the lower portion of the upper connection pipe to filter particles contained in the general water or ionized water, an ion water sensor positioned in the sensing control tank or electrolysis tank to sense the characteristics of the ionized water including pH or oxidation-reduction potential, and a level sensor positioned in the sensing control tank or electrolysis tank to measure the level of the ionized water.

[0009] In addition, the sensing ion water space of the sensing control tank is formed to have a height equal to or greater than that of the ion water generation space of the electrolysis tank, and the bottom surface is located at a height equal to or lower than that of the bottom surface of the ion water generation space of the electrolysis tank, and the level sensor is located in the sensing control tank so as to sense and control the height of the electrolysis tank through the height of the sensing control tank.

[0010] In addition, the decomposition electrode may include a first electrode plate formed in a plate shape and positioned inside the electrolysis tank, a first electrode connection portion formed in a circular bar shape and electrically connected to the first electrode plate on the upper side of the first electrode plate, a first electrode terminal formed in a circular bar shape, a lower end connected to the first electrode connection portion, and an upper end extending to the upper side of the electrolysis tank, a second electrode plate spaced apart from and facing the first electrode plate inside the electrolysis tank, a second electrode connection portion formed in a circular bar shape and electrically connected to the second electrode plate on the upper side of the second electrode plate, and a second electrode terminal formed in a circular bar shape, a lower end connected to the second electrode connection portion, and an upper end extending to the upper side of the electrolysis tank.

[0011] In addition, the cleaning water supply module may include a cleaning water storage tank that receives the cleaning water flowing in from the ion water generation module, a cleaning water inflow pipe that provides a path for the cleaning water generated in the electrolysis tank to flow into the cleaning water storage tank, a cleaning water supply pipe that supplies the cleaning water of the cleaning water storage tank to the outside, and a used water recovery pipe that provides a path for used water to be recovered from the outside to the cleaning water storage tank.

[0012] In addition, a cleaning water supply device according to one embodiment of the present invention is characterized by including an ion water generation module that electrolyzes general water to generate and supply cleaning water containing radical ions, a cleaning water supply module that generates cleaning water containing the ion water flowing in from the ion water generation module and supplies the cleaning water to the outside, and a used water storage module that recovers and stores used water used externally and supplies it to the ion water generation module.

[0013] Additionally, the above-mentioned cleaning water supply module can produce cleaning water by mixing general water with the above-mentioned ion water.

[0014] In addition, the cleaning water supply module can supply the cleaning water to an air purification water shower system, an exhaust gas treatment scrubber, or a cooling tower installed in an external semiconductor manufacturing process line, a flat panel display manufacturing process line, or a solar panel manufacturing process line.

[0015] The cleaning water supply device of the present invention generates and supplies cleaning water for cleaning air by electrolyzing general water, so that operating costs can be reduced because pure water is not used.

[0016] In addition, the cleaning water supply device of the present invention reuses cleaning water, thereby reducing the generation of waste water and reducing operating costs.

[0017] In addition, the cleaning water supply device of the present invention supplies cleaning water containing radical ions generated by applying electric energy to general water, thereby increasing the cleaning power for ionic gases contained in air.

[0018] In addition, the cleaning water supply device of the present invention supplies cleaning water containing fine air bubbles (or microbubbles) generated by hydrogen gas and oxygen gas, thereby causing the microbubbles to burst upon contact with contaminants, thereby increasing physical cleaning power and simultaneously generating secondary radicals.

[0019] Figure 1 is a configuration diagram of a cleaning water supply device for air cleaning according to one embodiment of the present invention.

[0020] Figure 2 is a vertical cross-sectional view of AA of the ion water generation module illustrated in Figure 1.

[0021] Figure 3 is a vertical cross-sectional view of BB in Figure 2.

[0022] Figure 4 is a schematic diagram showing the arrangement of the decomposition electrode of Figure 3.

[0023] Figure 5 is an enlarged view of C in Figure 4.

[0024] Figure 6 is a vertical cross-sectional view of the cleaning water supply module illustrated in Figure 1.

[0025] Figure 7 is a configuration diagram of a washing water supply device according to another embodiment of the present invention.

[0026] Figure 8 is a vertical cross-sectional view of the usage water storage module illustrated in Figure 7.

[0027] Hereinafter, a cleaning water supply device for air cleaning according to one embodiment of the present invention will be described.

[0028] First, a cleaning water supply device for air cleaning according to one embodiment of the present invention will be described.

[0029] FIG. 1 is a schematic diagram of a cleaning water supply device for air cleaning according to one embodiment of the present invention. FIG. 2 is a vertical cross-sectional view of the ion water generation module illustrated in FIG. 1 taken along line AA. FIG. 3 is a vertical cross-sectional view of the ion water generation module illustrated in FIG. 2 taken along line BB. FIG. 4 is a schematic diagram showing the arrangement of the decomposition electrode illustrated in FIG. 3. FIG. 5 is an enlarged view of line C illustrated in FIG. 6 is a vertical cross-sectional view of the cleaning water supply module illustrated in FIG. 1.

[0030]

[0031] A cleaning water supply device (10) for air cleaning according to one embodiment of the present invention may include an ion water generation module (100) and a cleaning water supply module (200), as shown in FIGS. 1 to 6.

[0032] The above-mentioned cleaning water supply device (10) can manufacture and supply cleaning water by electrolyzing general water to generate ionized water containing radical ions and / or microbubbles. That is, the cleaning water supply device (10) can generate ionized water containing radical ions by using electrolysis in the ionized water generation module (100), and supply cleaning water containing ionized water supplied from the ionized water generation module (100) to a water shower system while generating and storing the cleaning water in the cleaning water supply module (200). Here, the general water may refer to industrial water or municipal water generally used in a semiconductor manufacturing process line. Therefore, the general water may be water different from deionized water. In addition, the radical ions are H + Wow OH - It can mean. In addition, the microbubble can be a bubble formed by H2 or O2 generated when radical ions combine with each other.

[0033] The above cleaning water supply device (10) can be connected to a water showering system (20) for air cleaning of a semiconductor process line (including a flat panel display manufacturing process line and a solar panel manufacturing process line) to supply cleaning water. The cleaning water is sprayed as if showering onto the surface of the filter (filter) of the water showering system, and flows downward along the surface of the filter, and water-soluble ionic gas (NH4) contained in the air passing through the filter + , SO x , NO x ), it can clean the air by contacting or dissolving impurities such as organic matter or fine particles. In addition, the cleaning water can remove impurities attached to the surface of the filter medium by contacting or dissolving them as it flows downward along the surface of the filter medium. The water shower system can be equipped with a separate drain pipe (21) for draining the used water.

[0034] The above cleaning water uses radical ions and microbubbles generated by electrolysis to clean the air, thereby increasing the cleaning power for the air and the surface of the filter medium without using separate chemicals. In addition, the cleaning water of the cleaning water supply device (10) contains radical ions and microbubbles, thereby efficiently cleaning the ionic components contained in the air passing through the filter medium of the water shower system. In addition, the cleaning water of the cleaning water supply device (10) can efficiently separate and remove ionic gases attached to the surface of the filter medium. Therefore, the cleaning water can prevent contaminants from accumulating on the surface of the filter medium.

[0035] The above-mentioned cleaning water supply device (10) supplies cleaning water containing ionized water produced from general water instead of conventional purified water, thereby reducing the operating costs of a water shower system. In addition, the above-mentioned cleaning water supply device (10) produces ionized water by circulating a portion of the cleaning water, thereby reducing the amount of general water used and the amount of wastewater generated.

[0036] The above-mentioned cleaning water supply device (10) can supply cleaning water to various devices such as a scrubber for exhaust gas treatment and a cooling tower that require cleaning water in addition to the water shower system.

[0037] Hereinafter, one side and the other side may refer to the +x-axis direction and the -x-axis direction in Fig. 1, and length may refer to the distance in the one side and the other direction. In addition, front side and back side may refer to the +y-axis direction and the -y-axis direction, and width may refer to the distance in the front side and back side direction. In addition, upper side and lower side may refer to the +z-axis direction and the -z-axis direction, and height may refer to the distance in the upper side and lower side direction.

[0038] The above ion water generation module (100) may include an electrolysis tank (110) and a decomposition electrode (120). In addition, the ion water generation module (100) may further include a particle filter membrane (130). In addition, the ion water generation module (100) may further include a sensing control tank (140), an upper connection pipe (150), and a lower connection pipe (155). In addition, the ion water generation module (100) may further include a water inlet pipe (160), an ion water supply pipe (165), a cleaning water recovery pipe (170), a decomposition tank drain pipe (173), a control tank drain pipe (175), an ion water sensor (180), and a level sensor (190).

[0039] The above ion water generation module (100) can electrolyze general water to generate ion water containing radical ions and microbubbles. In addition, the ion water generation module (100) can receive cleaning water from the cleaning water supply module (200) and generate ion water. The ion water generation module (100) generates ion water using general water at the beginning of operation, and can thereafter generate ion water by receiving cleaning water. In addition, the ion water generation module (100) can additionally receive general water to generate ion water when the supply of cleaning water is insufficient. Here, the cleaning water may refer to water formed by mixing the ion water generated by the ion water generation module (100) and the used water used in the water shower system (20) in the cleaning water supply module (200). The cleaning water may be formed by mixing the ion water and the used water at a predetermined ratio according to the required cleaning power. In addition, a portion of the cleaning water may be discharged depending on the degree of contamination. For example, if the contamination level of the washing water is too high, some of it can be discharged to prevent the contamination level of the ion water from increasing.

[0040] The above ion water generation module (100) may be formed by additionally providing a sensing control tank (140) connected to the electrolysis tank (110). The ion water generation module (100) may be formed separately from the electrolysis tank (110) that generates ion water using electrolysis and the sensing control tank (140) that senses the characteristics of the ion water. In this case, the ion water sensor (180) and the level sensor (190) may be installed in the sensing control tank (140). The electrolysis tank (110) of the ion water generation module (100) may be formed as an area in which all of the water or cleaning water flowing into it is electrolyzed. In addition, the ion water generation module (100) may sense the characteristics of the ion water generated in the electrolysis tank (110) in the sensing control tank (140) to control the discharge or supply of the ion water or cleaning water. In addition, the ion water generation module (100) can filter the generated ion water with a particle filter membrane (130) to remove particle components contained in the ion water and then supply the ion water to the cleaning water supply module (200).

[0041] The above ion water generation module (100) can supply ion water to the sensing control tank (140) at the pressure at which general water is supplied into the electrolysis tank (110). Since the electrolysis tank (110) is sealed, the ion water can be moved to the sensing control tank (140) by the pressure of the general water supplied.

[0042] The above ion water generation module (100) can independently perform a self-cleaning function of discharging ion water at predetermined cleaning time intervals in order to maintain the electrolysis efficiency of the decomposition electrode (120) above a certain level. Here, the cleaning time interval refers to the total time for which electrolysis has been performed, and can be set to 1,000 hours, 10,000 hours, etc. Accordingly, the above ion water generation module (100) can perform self-cleaning at 1,000-hour intervals.

[0043] Meanwhile, in the case where the ion water generation module (100) does not include a sensing control unit (140), an ion water supply pipe (165) may be directly connected to the electrolysis tank (110) so that ion water can be directly supplied from the electrolysis tank (110) to the cleaning water supply module (200). In this case, an ion water sensor (180) and a level sensor (190) may be installed in the electrolysis tank (110).

[0044] The above ion water generation module (100) is not specifically illustrated, but may be installed in a water inlet pipe (160), an ion water supply pipe (165), a cleaning water recovery pipe (170), a decomposition tank drain pipe (173), and a control tank drain pipe (175) to control the flow of fluid (general water, cleaning water, or used water) inside the pipes and may include a control valve for controlling the flow of fluid and a flow sensor for measuring the flow rate of the fluid. Accordingly, the above ion water generation module (100) can control the flow rate of ion water as needed, and the water inlet pipe (160), the ion water supply pipe (165), the cleaning water recovery pipe (170), and the ion water drain pipe can individually control the flow of fluid.

[0045] The electrolysis tank (110) may include a water inlet (111), a first upper connection port (112), a first lower connection port (113), a cleaning water recovery port (114), a decomposition tank drain port (115), and an electrode penetration port (116). In addition, the electrolysis tank (110) may further include an air vent port (117).

[0046] The electrolysis tank (110) may be formed in a box shape with a hollow interior. The electrolysis tank (110) may provide an ion water formation space (110a) in which electrolysis of general water or cleaning water is performed. The electrolysis tank (110) may be formed to have an appropriate internal space according to the amount of ion water required. The electrolysis tank (110) may be formed in a shape in which the length is longer than the width. Accordingly, the electrolysis tank (110) may increase the area of ​​the electrode plate on which electrolysis is performed, thereby allowing electrolysis to be performed more efficiently.

[0047] The electrolysis tank (110) may be formed so that the upper surface of the lower plate is inclined downward toward the decomposition tank drain (115). In addition, the electrolysis tank (110) may open and close the air vent (117). Therefore, the electrolysis tank (110) may discharge the ionized water inside to the outside more efficiently when discharging the ionized water to the outside for reasons such as internal cleaning.

[0048] The electrolysis tank (110) may be formed of a material such as plastic or resin that is corrosion-resistant and insulating. In addition, the electrolysis tank (110) may be formed of a material such as stainless steel, and may be formed by coating a resin coating layer that is electrically insulating on the surface.

[0049] The water inlet (111) may be formed by penetrating from the outer surface to the inner surface of the other side wall of the electrolysis tank (110). The water inlet (111) may be formed below the middle of the other side wall. In addition, the water inlet (111) may be formed in the middle of the width of the other side wall. The water inlet (111) may provide a path for general water to flow into the internal space of the electrolysis tank (110). The water inlet (111) may allow water to flow from the other side of the electrolysis tank (110) and to flow to one side. The water inlet (111) may supply water so that the water flows in the direction in which the electrode plates described below extend. Therefore, the general water flows smoothly between the electrode plates, and stagnation or eddies in the flow do not occur between the inside of the electrolysis tank (110) and the electrode plates.

[0050] The first upper connecting port (112) may be formed by penetrating from the outer surface to the inner surface on one side of the upper plate of the electrolysis tank (110). In addition, the first upper connecting port (112) may be formed on the upper side of one side wall. The first upper connecting port (112) may provide a path for supplying ion water to the sensing control tank (140). Meanwhile, when the sensing control tank (140) is not provided, the first upper connecting port (112) may be formed as an ion water supply port (143).

[0051] The above ionized water may include radical ions formed by electrolysis. In addition, the ionized water may further include microbubbles formed by the recombination of radical ions that are electrolyzed. The radical ions and microbubbles may move upward within the electrolysis tank (110). When the ionized water is taken from the upper portion of the electrolysis tank (110), the radical ions and microbubbles may be contained in a relatively large amount. In addition, the general water may be electrolyzed more efficiently when it flows in from the water inlet (111) or the cleaning water recovery port (114) and passes through the entire electrode plate. Therefore, the first upper connecting port (112) is preferably formed on the upper portion of the electrolysis tank (110). In addition, the first upper connecting port (112) may be formed on one side of the electrolysis tank (110).

[0052] The first lower connecting port (113) may be formed on the lower side of one side wall of the electrolysis tank (110). The first lower connecting port (113) may provide a passage connecting the lower part of the electrolysis tank (110) and the sensing control tank (140). When discharging the ionized water filled inside the electrolysis tank (110) and the sensing control unit to clean it, the first lower connecting port (113) may allow the ionized water to flow in or out between the electrolysis tank (110) and the sensing control unit. Therefore, the ionized water may be more efficiently discharged to the outside from the electrolysis tank (110) and the sensing control unit (140).

[0053] The above-mentioned cleaning water recovery port (114) may be formed by penetrating from the outer surface to the inner surface of the lower side of the other side wall of the electrolysis tank (110). The cleaning water recovery port (114) may be formed adjacent to the water inlet (111). In addition, the cleaning water recovery port (114) may be formed integrally with the water inlet (111). The cleaning water recovery port (114) may provide a path for the cleaning water of the cleaning water supply module (200) to flow into the electrolysis tank (110). After the cleaning water flows into the electrolysis tank (110), it may be formed into ionized water containing radical ions and microbubbles through electrolysis again.

[0054] The above-mentioned decomposition tank drain port (115) may be formed by penetrating from the outer surface to the inner surface of the lower plate of the electrolysis tank (110). In addition, the decomposition tank drain port (115) may be formed on the other side of the lower plate. The decomposition tank drain port (115) may provide a path for electrode contaminants or water used for washing the inside of the electrolysis tank (110) or the decomposition electrode (120) to be discharged to the outside of the electrolysis tank (110). Since the lower plate of the electrolysis tank (110) is formed to be inclined upward with the decomposition tank drain port (115) as the center, ionized water can be more efficiently drained to the decomposition tank drain port (115).

[0055] The electrode penetration holes (116) may be formed from the outer surface to the inner surface of the upper plate of the electrolysis tank (110). The electrode penetration holes (116) may provide a path for the electrode rods of the electrode plates to penetrate. The number of electrode penetration holes (116) may correspond to the number of electrode plates of the decomposition electrode (120). The electrode penetration holes (116) may be formed alternately from one side to the other side of the upper plate and spaced apart from the front side to the rear side. For example, when there are four electrode plates, the number of electrode penetration holes (116) may be four. In addition, the electrode penetration holes (116) may be positioned two on each side, and two on each side may be positioned at the front and rear sides.

[0056] The above air vent (117) may be formed by penetrating from the outer surface to the inner surface of the upper plate of the electrolysis tank (110). The air vent (117) may provide a path for air inside the electrolysis tank (110) to be discharged to the outside when water or cleaning water flows into the inside of the electrolysis tank (110). The air vent (117) may automatically open and close when the internal pressure of the electrolysis tank (110) is higher than the reference pressure, thereby preventing an explosion due to an increase in the internal pressure of the electrolysis tank (110). In addition, the air vent (117) may provide a path for air to flow into the inside of the electrolysis tank (110) so that ion water filled inside the electrolysis tank (110) can be smoothly discharged to the outside during the process of cleaning the decomposition electrode (120).

[0057] The above-mentioned decomposition electrode (120) may include a first electrode plate (121), a first electrode connection portion (122), a first electrode terminal (123), a second electrode plate (124), a second electrode connection portion (125), and a second electrode terminal (126).

[0058] The above-mentioned decomposition electrode (120) comes into contact with general water contained inside the electrolysis tank (110) and can perform electrolysis using power supplied from the outside. The above-mentioned decomposition electrode (120) can electrolyze general water to generate ionized water containing radical ions and microbubbles. The above-mentioned decomposition electrode (120) can be electrically connected to a power supply means (not shown) located outside the electrolysis tank (110). The power supply means may be configured as a part of the cleaning water supply device (10) or may be a part of a semiconductor manufacturing process line.

[0059] The first electrode plate (121) and the second electrode plate (124) may be applied with voltages of opposite polarities. For example, a + voltage may be applied to the first electrode plate (121), and a - voltage may be applied to the second electrode plate (124). The first electrode plate (121), the first electrode connection portion (122), and the first electrode terminal (123) may be electrically connected to each other. In addition, the second electrode plate (124), the second electrode connection portion (125), and the second electrode terminal (126) may be electrically connected to each other.

[0060] The first electrode plate (121) and the second electrode plate (124) may be formed in an appropriate number according to the width of the electrolysis tank (110). For example, when the width of the electrolysis tank (110) is small, the first electrode plate (121) and the second electrode plate (124) may be formed in one piece each. In addition, when the width of the electrolysis tank (110) is large, the first electrode plate (121) and the second electrode plate (124) may be formed in two or more pieces each. Hereinafter, a case in which the first electrode plate (121) and the second electrode plate (124) are formed in two pieces each will be described.

[0061] The first electrode plate (121) and the second electrode plate (124) may be positioned inside the electrolysis tank (110) so as to extend in a direction parallel to the direction in which the water supplied from the water supply port flows. That is, the first electrode plate (121) and the second electrode plate (124) may be positioned so as to extend in the x direction and be spaced apart from each other in the y direction. Accordingly, the first electrode plate (121) and the second electrode plate (124) may electrolyze the water without impeding the flow of the water.

[0062] Meanwhile, the first electrode plate (121) and the second electrode plate (124) may require regular cleaning to remove impurities that adhere to the surface during the electrolysis process. In this case, the first electrode plate (121) and the second electrode plate (124) may be applied with a voltage of a different polarity or magnitude than the voltage applied during the electrolysis process.

[0063] The first electrode plate (121) may be formed in a plate shape having a predetermined thickness and may be formed with a smaller area than the front plate of the electrolysis tank (110). The first electrode plate (121) may be formed with an appropriate area considering the area of ​​the front plate of the electrolysis tank (110) and the required electrolysis area. However, the first electrode plate (121) may be formed with an area excluding an area required for other purposes from the area of ​​the front plate of the electrolysis tank (110) in order to increase the efficiency of electrolysis. In addition, the first electrode plate (121) may be positioned so that one side faces the front plate of the electrolysis tank (110). That is, the first electrode plate (121) may be positioned so as to extend in one direction and the other direction. In addition, the first electrode plates (121) may be positioned to be spaced apart from each other in the front and rear directions.

[0064] Among the two first electrode plates (121), one may be positioned in contact with or adjacent to the front plate of the electrolysis tank (110). That is, the first electrode plate (121) may be positioned so that one side thereof is in contact with the front plate of the electrolysis tank (110) or the space between the first electrode plate (121) and the front plate of the electrolysis tank (110) is minimized. Since the water flowing into the space between the first electrode plate (121) and the front plate of the electrolysis tank (110) is not electrolyzed, it is preferable to minimize the water or cleaning water flowing between the first electrode plate (121) and the front plate of the electrolysis tank (110). The first electrode plate (121) may be positioned at a distance of 0 to 5 mm from the front plate of the electrolysis tank (110).

[0065] The first electrode plate (121) may be formed of a catalyst metal for electrolysis. For example, the first electrode plate (121) may be formed of a material such as iridium (Ir), ruthenium (Ru), gold (Au), platinum (Pt), or copper (Cu). The first electrode plate (121) may be formed to a thickness of 0.5 to 5.0 mm. In addition, the first electrode plate (121) may be formed by coating platinum on titanium. In this case, the titanium may be formed to a thickness of 0.5 to 5.0 mm, and the platinum may be coated to a thickness of 0.3 to 5.0 μm.

[0066] The first electrode plate (121) may further include a first electrode protrusion (121a) on the upper side. The first electrode protrusion (121a) may be formed to protrude upward from the upper side of the first electrode plate (121). The first electrode protrusion (121a) may have the same thickness as the first electrode plate (121) and may be formed as a block having a predetermined length and height. The first electrode protrusion (121a) may be formed integrally with the first electrode plate (121). The first electrode protrusion (121a) may be positioned offset to one side or the other with respect to the center of the longitudinal direction of the first electrode plate (121). The first electrode protrusion (121a) may be omitted when the first electrode connection (122) is directly connected to the first electrode plate (121).

[0067] The first electrode connecting portion (122) may be formed in a circular bar shape with a predetermined diameter. The first electrode connecting portion (122) may be formed to have a diameter thicker than the thickness of the first electrode plate (121). In addition, the first electrode connecting portion (122) may be formed to have a diameter larger than the length of the first electrode protrusion (121a). The first electrode connecting portion (122) may be electrically connected to the first electrode plate (121) on the upper side of the first electrode plate (121). In addition, the first electrode connecting portion (122) may be directly connected to the first electrode plate (121). In addition, the first electrode connecting portion (122) may be connected to the first electrode protrusion. The above first electrode connection portion (122) can be positioned offset to one side or the other with respect to the longitudinal center of the first electrode plate (121).

[0068] Since the first electrode connection portion (122) is formed in a circular bar shape, when it penetrates the electrode penetration hole (116) of the electrolysis tank (110), the space between it and the electrode penetration hole (116) can be effectively sealed by a separate O-ring. If the first electrode connection portion (122) is formed in the same shape as the first electrode protrusion (121a), even if an O-ring is used, the space between it and the electrode penetration hole (116) may not be sufficiently sealed. The first electrode connection portion (122) can be sealed so that the space between it and the electrode penetration hole (116) is effectively sealed so that ion water does not leak.

[0069] The first electrode connecting portion (122) may be formed in a shape in which the upper diameter is larger than the lower diameter. Accordingly, the first electrode connecting portion (122) may be connected to the lower portion, which has a relatively smaller diameter, on the first electrode protrusion (121a), and the first electrode terminal (123) may be stably connected to the upper portion.

[0070] The first electrode terminal (123) may be formed in a circular bar shape having a diameter smaller than the upper diameter of the first electrode connection portion (122). The first electrode terminal (123) may be formed of an electrically conductive material. The lower end of the first electrode terminal (123) may be electrically connected to the first electrode connection portion (122), and the upper end may extend to the upper portion of the electrolysis tank (110). In addition, the first electrode terminal (123) may extend to the upper outer side of the electrolysis tank (110) through the electrode penetration hole (116). The first electrode terminal (123) may be coupled with a first insulating portion (123a) formed of an O-ring or an insulating material at a position where the first electrode terminal (123) penetrates the electrolysis tank (110). The first insulating portion (123a) can electrically insulate the first electrode terminal (123) from the electrolysis tank (110). In addition, the first insulating portion (123a) can seal a space between the first electrode terminal (123) and the electrode penetration hole (116) of the electrolysis tank (110). Therefore, it is possible to prevent ion water from leaking between the first electrode terminal (123) and the electrode penetration hole (116) of the electrolysis tank (110).

[0071] The second electrode plate (124) may be formed into a plate shape having the same shape and area as the first electrode plate (121). In the case where the second electrode plates (124) are formed in two, the second electrode plate (124) positioned at the front inside the electrolysis tank (110) may be positioned between the two first electrode plates (121), and the second electrode plate (124) positioned at the rear may be positioned such that the front side faces the rear side of the first electrode plate (121) and the rear side faces the rear plate of the electrolysis tank. At this time, the second electrode plate (124) may be positioned in contact with or adjacent to the rear plate of the electrolysis tank (110) in the same manner as the first electrode plate (121). The second electrode plate (124) may be positioned such that the space between the rear plates of the electrolysis tank (110) is minimized. Since the water flowing into the space between the second electrode plate (124) and the rear plate of the electrolysis tank (110) is not electrolyzed, it is preferable to minimize the space between the second electrode plate (124) and the rear plate of the electrolysis tank (110). The second electrode plate (124) may be positioned at a distance of 0 to 5 mm from the rear plate of the electrolysis tank (110).

[0072] The second electrode plate (124) is formed to have the same area and shape as the first electrode plate (121) and is spaced apart from each other to face each other. Since the voltage is applied to the same area of ​​the first electrode plate (121) and the second electrode plate (124) facing each other during the electrolysis process, there is no area where the voltage is partially concentrated in the area facing each other. In addition, the second electrode plate (124) can be spaced apart from the first electrode plate (121) by the same distance as the entirety. Therefore, the first electrode plate (121) and the second electrode plate (124) are not partially damaged during the electrolysis process, and the lifespan can be increased. In addition, since the first electrode plate (121) and the second electrode plate (124) are formed to have the same area, the efficiency of electrolysis can be increased.

[0073] The second electrode plate (124) may be formed of the same material as the first electrode plate (121). The second electrode plate (124) may be formed of a catalytic metal for electrolysis. For example, the second electrode plate (124) may be formed of a material such as iridium (Ir), ruthenium (Ru), gold (Au), platinum (Pt), or copper (Cu). The second electrode plate (124) may be formed to a thickness of 0.5 to 5.0 mm. In addition, the second electrode plate (124) may be formed by coating platinum on titanium. In this case, the titanium may be formed to a thickness of 0.5 to 5.0 mm, and the platinum may be coated to a thickness of 0.3 to 5.0 μm.

[0074] The second electrode plate (124) may further include a second electrode protrusion (124a) on the upper side. The second electrode protrusion (124a) may be formed to protrude upward from the upper side of the second electrode plate (124). The second electrode protrusion (124a) may have the same thickness as the second electrode plate (124) and may be formed as a block having a predetermined length and height. The second electrode protrusion (124a) may be formed integrally with the second electrode plate (124). The second electrode protrusion (124a) may be positioned offset to one side or the other with respect to the center of the longitudinal direction of the second electrode plate (124). In addition, the second electrode protrusion (124a) may be positioned on the opposite side to the first electrode protrusion (121a) with respect to the center of the second electrode plate (124). For example, if the first electrode protrusion (121a) is located on the other side with respect to the center of the first electrode plate (121), the second electrode protrusion (124a) can be located on one side with respect to the center of the second electrode plate (124). Accordingly, the second electrode connection portion (125) and the second electrode terminal (126) connected to the second electrode protrusion (124a) are located spaced apart from the first electrode connection portion (122) and the first electrode terminal (123) in one direction of length, so that they do not cause interference.

[0075] The second electrode connecting portion (125) may be formed in a circular bar shape with a predetermined diameter. The second electrode connecting portion (125) may be formed in the same shape as the first electrode connecting portion (122). The second electrode connecting portion (125) may be formed to have a diameter greater than the thickness of the second electrode plate (124). In addition, the second electrode connecting portion (125) may be formed to have a diameter greater than the length of the second electrode protrusion (124a). The second electrode connecting portion (125) may be electrically connected to the second electrode plate (124) on the upper side of the second electrode plate (124). In addition, the second electrode connecting portion (125) may be directly connected to the second electrode plate (124). In addition, the second electrode connecting portion (125) may be connected to the second electrode protrusion. The second electrode connection portion (125) may be positioned offset to one side or the other with respect to the longitudinal center of the second electrode plate (124). The second electrode connection portion (125) may be positioned offset to one side with respect to the longitudinal center of the second electrode plate (124). In addition, the second electrode connection portion (125) may be positioned on the opposite side of the second electrode protrusion (124a) with respect to the center of the second electrode plate (124) in the same manner as the second electrode protrusion (124a).

[0076] The second electrode connection portion (125) may be formed in the same shape as the first electrode connection portion (122). Since the second electrode connection portion (125) is formed in a circular bar shape, when it passes through the electrode penetration hole (116) of the electrolysis tank (110), the space between it and the electrode penetration hole (116) can be efficiently sealed by a separate O-ring. In the case where the second electrode connection portion (125) is formed in the same shape as the second electrode protrusion (124a), even if an O-ring is used, the space between it and the electrode penetration hole (116) may not be sufficiently sealed. The second electrode connection portion (125) can be sealed so that the space between it and the electrode penetration hole (116) is effectively sealed so that ion water does not leak.

[0077] The second electrode connecting portion (125) may be formed in a shape in which the upper diameter is larger than the lower diameter. Accordingly, the second electrode connecting portion (125) may be connected to the lower portion, which has a relatively smaller diameter, on the second electrode protrusion (124a), and the second electrode terminal (126) may be stably connected to the upper portion.

[0078] The second electrode terminal (126) may be formed in a circular bar shape having a diameter smaller than the upper diameter of the second electrode connection portion (125). The second electrode terminal (126) may be formed in the same shape as the first electrode terminal (123). The second electrode terminal (126) may be formed of an electrically conductive material. The lower end of the second electrode terminal (126) may be electrically connected to the second electrode connection portion (125), and the upper end may extend to the upper portion of the electrolysis tank (110). In addition, the second electrode terminal (126) may extend to the upper outer side of the electrolysis tank (110) through the electrode through-hole (116). The second electrode terminal (126) may be electrically connected to a power supply means located on the outside of the electrolysis tank (110) in the same manner as the first electrode terminal (123).

[0079] The second electrode terminal (126) may be coupled with a second insulating portion (126a) formed of an O-ring or an insulating material at a position where it penetrates the electrolysis tank (110). The second insulating portion (126a) may electrically insulate the second electrode terminal (126) from the electrolysis tank (110). In addition, the second insulating portion (126a) may seal a space between the second electrode terminal (126) and the electrode penetration hole (116) of the electrolysis tank (110). Therefore, the second electrode terminal (126) may prevent ion water from leaking between the electrode penetration hole (116) of the electrolysis tank (110).

[0080] The particle filter membrane (130) may be formed of a porous filter material. That is, the particle filter membrane (130) may be formed by arranging a plurality of micro-holes penetrating from one surface to the other surface. The particle filter membrane (130) may be provided with micro-holes that can sufficiently pass a required flow rate of cleaning water. The particle filter membrane (130) may be formed to have the same area as or a smaller area than the other side wall of the electrolysis tank (110). The particle filter membrane (130) may be located at the front side of the water inlet (111) or the front side of the water inlet pipe (160). More specifically, the particle filter membrane (130) may be located between the other ends of the first electrode plate (121) and the second electrode plate (124) and the other side wall of the electrolysis tank (110). At this time, the space between the decomposition electrode (120) and the other side wall of the electrolysis tank (110) may be separated. The above particle filter membrane (130) can filter particles contained in the water flowing in from the water inlet (111) or the cleaning water flowing in from the cleaning water recovery port (114).

[0081] The above particle filter membrane (130) can filter out particles contained in electrolyzed ionized water while allowing it to pass through. Since the ionized water is formed by electrolyzing general water, it may contain particles contained in general water. Therefore, the ionized water needs to have particles removed before being supplied to the cleaning water supply module (200).

[0082] The above sensing control unit (140) may include a second upper connection port (141), a second lower connection port (142), an ion water supply port (143), and a control unit drain port (144).

[0083] The sensing control tank (140) may be formed in a box shape with a hollow interior. The sensing control tank (140) may provide a sensing ion water space (140a) in which ion water flowing in from the electrolysis tank (110) is temporarily stored. The sensing control tank (140) may be formed to have the same height as or a greater height than the electrolysis tank (110). The sensing control tank (140) may be formed to have a smaller width and length than the electrolysis tank (110). More specifically, the height of the sensing ion water space (140a) of the sensing control tank (140) may be formed to be the same height as or greater than the height of the ion water formation space (110a). The width and length of the sensing ion water space (140a) of the sensing control tank (140) may be formed to be smaller than the width and length of the ion water formation space (110a).

[0084] The sensing control tank (140) may store ion water required to measure the characteristics of ion water and detect the level of ion water. Preferably, the sensing control tank (140) may control the ion water to the same level as the electrolysis tank (110). To this end, the sensing control tank (140) may be positioned so that the bottom surface thereof is at the same height as the bottom surface of the electrolysis tank (110). That is, the sensing ion water space (140a) of the sensing control tank (140) may be positioned so that the bottom surface thereof is at the same height as or lower than the bottom surface of the ion water formation space (110a).

[0085] In addition, the sensing control tank (140) may be formed with a relatively higher height on one upper side than on the other upper side. That is, the sensing control tank (140) may be provided with a sensing upper space (140b) inside one upper side. The sensing upper space (140b) may provide a space for temporarily receiving ionized water when a large amount of ionized water is temporarily supplied from the electrolysis tank (110). The sensing control tank (140) may provide an abnormal warning regarding an abnormal water level of the electrolysis tank (110) through a water level sensor.

[0086] The sensing control tank (140) may be formed of the same material as the electrolysis tank (110). The sensing control tank (140) may be formed of a material such as plastic or resin that is corrosion-resistant and insulating. In addition, the sensing control tank (140) may be formed of a material such as stainless steel, and an electrically insulating resin coating layer may be formed on the surface.

[0087] The second upper connecting port (141) may be formed by penetrating from the outer surface to the inner surface below the middle of the other side plate of the sensing control tank (140). The second upper connecting port (141) may provide a path for ion water to flow into the interior of the sensing control tank (140). It is preferable that the second upper connecting port (141) be formed below the middle of the other side wall of the electrolysis tank (110). Therefore, the second upper connecting port (141) may allow ion water to flow below the middle of the sensing control tank (140) and rise to the upper part of the sensing control unit.

[0088] The second lower connecting port (142) may be formed on the lower side of the other side wall of the sensing control unit (140). The second lower connecting port (142) may be formed on the lower side of the second upper connecting port (141). In addition, the second lower connecting port (142) may be formed at the same height as the first lower connecting port (113) of the electrolysis tank (110). The second lower connecting port (142) may provide a passage connecting the lower part of the electrolysis tank (110) and the sensing control unit (140) together with the first lower connecting port (113). When discharging the ionized water filled therein to clean the electrolysis tank (110) and the sensing control unit, the second lower connecting port (142) may allow the ionized water to flow in or out between the electrolysis tank (110) and the sensing control unit together with the first lower connecting port (113). Therefore, the ion water can be more efficiently discharged to the outside from the electrolysis tank (110) and the sensing control tank (140).

[0089] The above ion water supply port (143) may be formed by penetrating from the outer surface to the inner surface on one side of the upper plate of the electrolysis tank (110). In addition, the ion water supply port (143) may be formed on the upper side of one side wall. The ion water supply port (143) may provide a path for the ion water to be supplied to the cleaning water supply module (200). The ion water supply port (143) may be located on the upper side of the sensing upper space (140b).

[0090] The above control tank drain port (144) may be formed by penetrating from the outer surface to the inner surface of the lower plate of the sensing control tank (140). In addition, the control tank drain port (144) may provide a path for ionized water used to wash the interior of the sensing control tank (140) to be discharged to the outside of the sensing control.

[0091] The upper connecting pipe (150) may have one end extending inwardly through the upper plate of the electrolysis tank (110) and one end connected to the sensing control tank (140). More specifically, the other end of the upper connecting pipe (150) may be connected to the first upper connecting port (112) of the electrolysis tank (110), and one end may be connected to the second upper connecting port (141) of the sensing control tank (140). The upper connecting pipe (150) may provide a path through which ion water generated in the electrolysis tank (110) is supplied to the sensing control tank (140).

[0092] The lower connecting pipe (155) may have its other end connected to penetrate one side wall of the electrolysis tank (110) and its other end connected to the lower side of the sensing control tank (140). More specifically, the other end of the lower connecting pipe (155) may be connected to the first lower connecting port (113) of the electrolysis tank (110) and its one end may be connected to the second lower connecting port (142) of the sensing control tank (140). The lower connecting pipe (155) may provide a path for the water or ion water of the electrolysis tank (110) to move to the sensing control tank (140). The lower connecting pipe (155) may enable the water or ion water of the electrolysis tank (110), which has a relatively large volume, to be discharged more smoothly during the cleaning process of the electrolysis tank (110) and the sensing control tank (140). In addition, the lower connecting pipe (155) can allow the ion water of the electrolysis tank (110) to flow to the sensing control tank (140) so that the ion water levels of the electrolysis tank (110) and the sensing control tank (140) are the same. The lower connecting pipe (155) has a control valve installed in the middle and can control the flow of the ion water.

[0093] The water inlet pipe (160) may have one end connected to the water inlet port (111) of the electrolysis tank (110). In addition, the other end of the water inlet pipe (160) may be connected to an external water storage means (not shown). The water inlet pipe (160) may supply general water from the water storage means to the internal space of the electrolysis tank (110). The water inlet pipe (160) may have a separate transfer pump (P) installed in the middle. The transfer pump (P) may supply general water at a predetermined pressure into the interior of the electrolysis tank (110) through the water inlet pipe (160). In addition, the transfer pump (P) may supply general water into the interior of the electrolysis tank (110) so that the generated ion water may be transferred to a sensing storage tank.

[0094] The other end of the ion water supply pipe (165) may be connected to the ion water supply port (143) of the electrolysis tank (110). In addition, one end of the ion water supply pipe (165) may be connected to the cleaning water supply module (200). The ion water supply pipe (165) may supply ion water generated inside the electrolysis tank (110) to the cleaning water supply module (200). The ion water supply pipe (165) may have a separate transfer pump (P) installed in the middle. The transfer pump (P) may supply ion water to the inside of the cleaning water storage tank (210) at a predetermined pressure through the ion water supply pipe (165).

[0095] The other end of the above-mentioned cleaning water recovery pipe (170) may be connected to the cleaning water recovery port (114) of the electrolysis tank (110). In addition, one end of the above-mentioned cleaning water recovery pipe (170) may be connected to the cleaning water supply module (200). The above-mentioned cleaning water recovery pipe (170) may recover the cleaning water stored in the cleaning water supply module (200) to the ion water generation module (100) when necessary. The above-mentioned cleaning water is a mixture of ion water generated and supplied from the ion water generation module (100) and used water that flows in after being used in the water shower system (20), as mentioned above.

[0096] A portion of the cleaning water stored in the cleaning water supply module (200) may be recovered by the ion water generation module (100) and converted into ion water. In this case, the cleaning water partially replaces the water supplied to the ion water generation module (100), and the amount of water supplied to the ion water generation module (100) may be reduced.

[0097] The above cleaning water recovery pipe (170) may have a transfer pump (P) installed in the middle. The cleaning water recovery pipe (170) may supply cleaning water from the cleaning water supply module (200) to the ion water generation module (100) by the pressure of the transfer pump (P). In addition, the cleaning water recovery pipe (170) may have a transfer filter (F) installed in the middle. The transfer filter may be formed as a general filter that filters foreign particles contained in a liquid such as water. The transfer filter may filter foreign particles contained in the cleaning water flowing through the cleaning water recovery pipe (170). Therefore, the cleaning water recovered to the ion water generation module (100) through the cleaning water recovery pipe (170) may have foreign particles removed.

[0098] The upper end of the above-mentioned decomposition tank drain pipe (173) can be connected to the decomposition tank drain port (115) of the electrolysis tank (110), and the lower end can be connected to an external wastewater storage means. The above-mentioned decomposition tank drain pipe (173) can drain water or ion water used for washing the inside of the electrolysis tank (110) to the outside.

[0099] The upper end of the above control tank drain pipe (175) can be connected to the control tank drain port (144) of the sensing control tank (140), and the lower end can be connected to an external wastewater storage means. The above control tank drain pipe (175) can drain water or ion water used to wash the inside of the sensing control tank (140) to the outside.

[0100] The ion water sensor (180) may include at least one sensor selected from a pH sensor, an electrical conductivity sensor, a temperature sensor, and a turbidity sensor. The ion water sensor (180) may further include an ORP (oxidation-reduction potential) sensor. The ion water sensor (180) may be installed outside the electrolysis tank (110) and may measure the ion water characteristics, such as pH, electrical conductivity, temperature, turbidity, or oxidation-reduction potential, of the supplied ion water. The cleaning water supply device (10) may control the characteristics of the ion water by reflecting the measured ion water characteristics. For example, the cleaning water supply device (10) may control the voltage applied to the first electrode plate (121) and the second electrode plate (124) based on the measured electrical conductivity. In addition, the cleaning water supply device (10) may control the drain timing of the cleaning water storage tank (210) based on the measured electrical conductivity, and may reduce the amount of wastewater generated by appropriately controlling the drain timing. The above-mentioned cleaning water supply device (10) can control the current value applied to the decomposition electrode (120), the flow rate of supplied water, the flow rate of recovered cleaning water, or the amount of waste water in the cleaning water storage tank (210) according to the ion water characteristics measured by the ion water sensor (180). Therefore, the above-mentioned cleaning water supply device (10) can control the characteristics of the cleaning water so that the cleaning water can maintain optimal cleaning power. The above-mentioned ion water sensor (180) can be installed in the electrolysis tank (110) or the sensing control tank (140).

[0101] The level sensor (190) may include an upper level sensor (191) and a lower level sensor (192). In addition, the level sensor (190) may further include a process level sensor (193). The level sensor (190) may sense the level of ion water stored in the sensing control tank (140). The level sensor (190) may generate a signal necessary to control the level of ion water.

[0102] The above level sensor (190) may be formed of general sensors that measure water level. For example, the level sensor (190) may be formed of a sensor such as a level switch, which is a contact-type level sensor, or an optical sensor, a laser sensor, a capacitance sensor, or an ultrasonic sensor, which is a non-contact level sensor.

[0103] The upper level sensor (191) is installed on the upper part of the sensing control tank (140) and can sense the upper limit level of the ion water stored in the sensing control tank (140). Here, the upper limit level may mean the maximum level of the ion water supplied to the sensing control tank (140). The upper level sensor (191) can sense a case where the level of the ion water becomes higher than the upper limit level and generate a signal. The ion water generation module (100) can stop the supply of water or cleaning water to the electrolysis tank (110) under the control of a separate control unit (not shown). In addition, the ion water generation module (100) can reduce the amount of water supplied to the electrolysis tank (110) or the amount of cleaning water recovered under the control of the control unit, thereby reducing the amount of ion water supplied to the sensing control tank (140).

[0104] The lower level sensor (192) is installed at the bottom of the sensing control tank (140) and can sense the lower limit level of the ion water stored in the sensing control tank (140). Here, the lower limit level may refer to the minimum level stored in the sensing control tank (140). The lower level sensor (192) can sense a case where the level of the ion water falls below the lower limit level and generate a signal. The electrolysis tank (110) and the sensing storage tank can discharge the ion water stored therein or the water used for cleaning to the outside through the decomposition tank drain (115) or the storage tank drain during the cleaning process. The lower level sensor (192) can sense the level of the ion water or the water stored in the storage tank drain. Therefore, the lower level sensor (192) can allow the level of the water or the ion water in the sensing storage tank to be checked from the outside. Meanwhile, since the electrolysis tank (110) and the sensing storage tank are connected to each other through a lower connecting pipe (155), the water level of the electrolysis tank (110) can be checked through the water level of the sensing storage tank.

[0105] The above process level sensor (193) may be positioned between the upper level sensor (191) and the lower level sensor (192) to sense the ion water level of the sensing control tank (140). The process level sensor (193) may be positioned adjacent to the lower end of the ion water supply pipe (165). The process level sensor (193) may be changed depending on the position of the lower end of the ion water supply pipe (165). The process level sensor (193) may sense whether the level of the ion water filled in the sensing control tank (140) is a level that can be supplied. That is, the process level sensor (193) may sense the level of the ion water in a state in which the ion water can be supplied (standby state). In addition, the process level sensor (193) may sense a normal state of the flow rate during the operation of the cleaning water supply device (10).

[0106] The above-described cleaning water supply module (200) may include a cleaning water storage tank (210) and a cleaning water supply pipe (220). In addition, the cleaning water supply module (200) may further include a used water recovery pipe (230), a cleaning water drain pipe (240), and a cleaning water sensor (250). In addition, the cleaning water supply module (200) may include a heating means, such as a heater, for heating the cleaning water, or a cooling means, such as a chiller, for cooling the cleaning water. The heating means and the cooling means may appropriately control the temperature of the cleaning water stored in the cleaning water storage tank (210) by reflecting the measured temperature of the cleaning water sensor (250).

[0107] The above-mentioned cleaning water supply module (200) stores cleaning water generated by mixing ionized water flowing in from the ionized water generation module (100) and used water recovered from the water shower system (20), and can supply cleaning water to the water shower system (20).

[0108] The above-mentioned cleaning water supply module (200) is not specifically illustrated, but may be installed in the cleaning water supply pipe (220), the used water recovery pipe (230), and the cleaning water drain pipe (240) and may include a control valve for controlling the flow of fluid (cleaning water) inside the pipes and a flow sensor for measuring the flow rate of the fluid. Accordingly, the cleaning water supply module (200) may control the flow rate in conjunction with the ion water characteristic value measured by the ion water sensor (180). The cleaning water supply module (200) may individually control the flow rates of the cleaning water supply pipe (220), the used water recovery pipe (230), or the cleaning water drain pipe (240). Accordingly, the cleaning water supply device (10) may minimize the amount of general water used.

[0109] The above-mentioned cleaning water storage tank (210) may include an ion water inlet (211), a cleaning water supply port (212), a cleaning water outlet (213), and a used water inlet (214). In addition, the above-mentioned cleaning water storage tank (210) may further include a cleaning water drain port (215).

[0110] The above-described cleaning water storage tank (210) may be formed in a box shape with a hollow interior. The cleaning water storage tank (210) may be formed to have an appropriate internal space according to the amount of cleaning water required. The cleaning water storage tank (210) may store cleaning water generated by mixing ionized water flowing in from the ionized water generation module (100) and used water flowing in from the water shower system (20). The cleaning water storage tank (210) may be formed of a material such as plastic or resin that is corrosion-resistant and electrically insulating.

[0111] The above ion water inlet (211) may be formed by penetrating from the outer surface to the inner surface of the other side wall of the cleaning water storage tank (210). The ion water inlet (211) may be formed at the lower part of the other side wall. The ion water inlet (211) may provide a path for the ion water of the ion water generation module (100) to flow into the inner space of the cleaning water storage tank (210). The ion water inlet (211) may be connected to one end of the ion water supply pipe (165).

[0112] The above cleaning water supply port (212) may be formed by penetrating from the outer surface to the inner surface of one side wall of the cleaning water storage tank (210). The cleaning water supply port (212) may be formed on the upper part of the other side wall. The cleaning water supply port (212) may provide a path for the cleaning water of the cleaning water storage tank (210) to be supplied to the water shower system (20). The cleaning water supply port (212) may be connected to the other end of the cleaning water supply pipe (220).

[0113] The above cleaning water outlet (213) may be formed by penetrating from the outer surface to the inner surface of one side wall of the cleaning water storage tank (210). The cleaning water outlet (213) may be formed at the lower part of one side wall. The cleaning water outlet (213) may provide a path for the cleaning water of the cleaning water storage tank (210) to be recovered to the ion water generation module (100). The cleaning water outlet (213) may be coupled to one end of the cleaning water recovery pipe (170).

[0114] The above-mentioned water inlet (214) may be formed by penetrating from the outer surface to the inner surface of the upper plate of the cleaning water storage tank (210). In addition, the water inlet (214) may be formed on the upper part of the side plate of the cleaning water storage tank (210). The water inlet (214) may provide a path for the water used in the water shower system (20) to flow into the cleaning water storage tank (210). The water inlet (214) may be connected to the other end of the water recovery pipe (230).

[0115] The above-mentioned cleaning water drain port (215) may be formed by penetrating from the outer surface to the inner surface of the lower plate of the cleaning water storage tank (210). In addition, the cleaning water drain port (215) may be formed on one side of the lower plate. The cleaning water drain port (215) may provide a path for the cleaning water to be discharged to the outside of the cleaning water storage tank (210).

[0116] The above-mentioned cleaning water supply pipe (220) can have one end connected to a water shower system (20) and the other end connected to a cleaning water supply port (212) of a cleaning water storage tank (210). The above-mentioned cleaning water supply pipe (220) provides a path through which cleaning water of the cleaning water storage tank (210) is supplied to the water shower system (20).

[0117] The above cleaning water supply pipe (220) may have a separate transfer pump (P) and transfer filter (F) installed in the middle. The transfer pump (P) may supply cleaning water from the cleaning water storage tank (210) to the water shower system (20) through the cleaning water supply pipe (220). The transfer filter may filter out foreign particles contained in the cleaning water flowing through the cleaning water supply pipe (220).

[0118] The above-mentioned water recovery pipe (230) may have one end connected to the water shower system (20) and the other end connected to the water inlet (214) of the cleaning water storage tank (210). The above-mentioned water recovery pipe (230) provides a path through which the cleaning water formed by using the cleaning water in the water shower system (20) is recovered to the cleaning water storage tank (210).

[0119] The above-mentioned water recovery pipe (230) may have a separate transfer pump (P) and transfer filter (F) installed in the middle. The transfer pump (P) may supply the water discharged from the water shower system (20) through the water recovery pipe (230) to the cleaning water storage tank (210). The transfer filter may filter out foreign particles contained in the water flowing through the water recovery pipe (230). Therefore, the water may reduce contamination of the cleaning water storage tank (210).

[0120] The upper end of the above-mentioned cleaning water drain pipe (240) can be connected to the cleaning water drain port (215) of the cleaning water storage tank (210), and the lower end can be connected to an external water storage means. The above-mentioned cleaning water drain pipe (240) can drain the cleaning water used to clean the inside of the cleaning water storage tank (210) to the outside.

[0121] The above-mentioned cleaning water sensor (250) may include a pH sensor, an electrical conductivity sensor, a temperature sensor, and a turbidity sensor. The above-mentioned cleaning water sensor (250) may further include an ORP sensor. The above-mentioned cleaning water sensor (250) may be installed inside or outside the cleaning water storage tank (210) and may measure the characteristics of the cleaning water, such as pH, electrical conductivity, temperature, turbidity, or oxidation-reduction potential, of the stored cleaning water.

[0122] The above-mentioned cleaning water supply device (10) can control the amount of ionized water or used water flowing into the cleaning water storage tank (210) according to the pH of the cleaning water measured by the cleaning water sensor (250), or can control the characteristics of the generated ionized water by controlling the current value applied to the electrode plates. In addition, the cleaning water supply device (10) can control the temperature of the cleaning water stored in the cleaning water storage tank (210) by controlling the heating means or the cooling means. Therefore, the cleaning water supply device (10) can adjust the characteristics of the cleaning water by reflecting the measurement value measured by the cleaning water sensor (250) and allow the cleaning water to maintain optimal cleaning power.

[0123] The following describes a washing water supply device according to another embodiment of the present invention.

[0124] Fig. 7 is a configuration diagram of a cleaning water supply device according to another embodiment of the present invention. Fig. 8 is a vertical cross-sectional view of the used water storage module illustrated in Fig. 7.

[0125]

[0126] A cleaning water supply device (10) for air cleaning according to another embodiment of the present invention may include an ion water generation module (100), a cleaning water supply module (200), and a used water storage module (300), as shown in FIGS. 7 and 8.

[0127] The above-described cleaning water supply device (10) can generate ionized water using electrolysis, and can supply the cleaning water by mixing some general water with the ionized water to the water shower system (20). The cleaning water supply device (10) can generate ionized water using general water or used water. When the cleaning water supply device (10) generates ionized water using used water, the use of general water can be reduced. In addition, since the cleaning water supply device (10) generates the cleaning water by mixing some general water with the ionized water, the characteristics of the cleaning water can be controlled more efficiently.

[0128] A cleaning water supply device (10) according to another embodiment of the present invention does not include a sensing control tank (140) in the ion water generation module (100) compared to the cleaning water supply device (10) according to FIGS. 1 to 6, and may additionally include a used water storage module (300). Accordingly, in the cleaning water supply device (10), ion water generated in the electrolysis tank (110) can be directly supplied to the cleaning water supply module (200). In addition, the cleaning water supply device (10) can separately store the used water used in the water shower system (20) in the used water storage module (300) and directly return it to the electrolysis tank (110). In the cleaning water supply device (10), the used water is not returned to the cleaning water supply module (200).

[0129] Hereinafter, the cleaning water supply device (10) will be described focusing on the configuration that is different from the cleaning water supply device (10) according to FIGS. 1 to 6, and specific drawings and descriptions of identical and similar configurations may be omitted.

[0130] The above ion water generation module (100) may include an electrolysis tank (110) and a decomposition electrode (120). In addition, the above ion water generation module (100) may further include a particle filter membrane (130), a water inlet pipe (160), an ion water supply pipe (165), a used water recovery pipe (171), a decomposition tank drain pipe (173), an ion water sensor (180), and a level sensor (190).

[0131] The electrolysis tank (110), the decomposition electrode (120), and the particle filter membrane (130) above may be formed identically or similarly to the electrolysis tank (110), the decomposition electrode (120), and the particle filter membrane (130) of the cleaning water supply device (10) according to FIGS. 1 to 6. However, the electrolysis tank (110) may be formed with a used water recovery port (118) instead of a cleaning water recovery port (114).

[0132] The above water inlet pipe (160) may be formed identically or similarly to the water inlet pipe (160) of the cleaning water supply device (10) according to FIGS. 1 to 6. Accordingly, the water inlet pipe (160) may be coupled to the water inlet port (111) of the electrolysis tank (110) to supply water into the interior of the electrolysis tank (110). The water inlet pipe (160) may be mainly used when the supply of use water to the interior of the electrolysis tank (110) is insufficient and when the cleaning water supply device (10) is first operated to fill the interior of the electrolysis tank (110) with water.

[0133] The above ion water supply pipe (165) may have one end connected to the first upper connection port (112) of the electrolysis tank (110) and one end connected to the ion water inlet port (211) of the cleaning water storage tank (210). The above ion water supply pipe (165) may provide a path through which ion water generated in the electrolysis tank (110) is supplied to the cleaning water supply module (200).

[0134] The above-mentioned water recovery pipe (171) may have the other end connected to the water recovery port of the electrolysis tank (110). In addition, one end of the above-mentioned water recovery pipe (171) may be connected to the water storage module (300). The above-mentioned water recovery pipe (171) may provide a path for recovering the water of the water storage module (300) to the electrolysis tank (110). Here, the above-mentioned water may refer to the water that is used and discharged as cleaning water in the water shower system (20).

[0135] The above decomposition tank drain pipe (173) can be formed identically or similarly to the decomposition tank drain pipe (173) of the cleaning water supply device (10) according to FIGS. 1 to 6.

[0136] The above ion water sensor (180) and level sensor (190) may be formed identically or similarly to the ion water sensor (180) and level sensor (190) of the cleaning water supply device (10) according to FIGS. 1 to 6. However, the ion water sensor (180) may be installed in the electrolysis tank (110) to sense the characteristics of the ion water. In addition, the level sensor (190) may be installed in the electrolysis tank (110) to sense the upper and lower levels of the electrolysis tank (110) using the upper level sensor (191) and the lower level sensor (192).

[0137] The above cleaning water supply module (200) may include a cleaning water storage tank (210), a cleaning water supply pipe (220), and a water storage inlet pipe (225). In addition, the cleaning water supply module (200) may further include a cleaning water drain pipe (240) and a cleaning water sensor (250).

[0138] The above-described cleaning water storage tank (210) and cleaning water supply pipe (220) may be formed identically or similarly to the cleaning water storage tank (210) and cleaning water supply pipe (220) of the cleaning water supply device (10) according to FIGS. 1 to 6. However, the cleaning water storage tank (210) may omit the cleaning water outlet (213) and the used water inlet (214) and may be formed with a water storage inlet (216). The water storage inlet (216) may provide a path for general water to flow into the cleaning water storage tank (210). The cleaning water storage tank (210) may include an ion water inlet (211), a cleaning water supply inlet (212), a water storage inlet (216), and a cleaning water outlet.

[0139] The above-mentioned cleaning water storage tank (210) has an ion water supply pipe (165) connected to an ion water inlet (211), and can be filled with ion water supplied from an ion water generation module (100).

[0140] The water storage inlet pipe (225) may be connected at the lower end to a water storage inlet (216). In addition, the other end of the water storage inlet pipe may be connected to an external water storage means (not shown). The second water inlet pipe (160) may supply general water from the water storage means to the internal space of the cleaning water storage tank (210).

[0141] The above-mentioned cleaning water drain pipe (240) and cleaning water sensor (250) may be formed identically or similarly to the cleaning water drain pipe (240) and cleaning water sensor (250) of the cleaning water supply device (10) according to FIGS. 1 to 6.

[0142] The above-mentioned water storage module (300) may include a water storage tank (310) and a water inlet pipe (320). In addition, the above-mentioned water storage module (300) may further include a water discharge pipe (330).

[0143] The above-mentioned usage water storage module (300) receives and stores usage water discharged from the water shower system (20) and can supply usage water to the ion water generation module (100).

[0144] The above-mentioned water storage tank (310) may include a water inlet (311), a water supply port (312), and a water drain port (313). The above-mentioned water storage tank (310) may be formed identically or similarly to the cleaning water storage tank (210). The above-mentioned water storage tank (310) may provide a space in which the water used in the water shower system (20) is stored. The above-mentioned water storage tank (310) may be formed to have an appropriate volume depending on the amount of water stored.

[0145] The above-mentioned water inlet (311) may be formed at the lower part of one side wall of the water storage tank (310). The water inlet (311) may provide a path for the water of the water shower system (20) to flow into the internal space of the water storage tank (310). The water inlet (311) may be connected to the other end of the water inlet pipe (320).

[0146] The above-mentioned water supply port (312) may be formed by penetrating from the outer surface to the inner surface of the other side wall of the water storage tank (310). The water supply port (312) may be formed at the lower part of the other side wall. The water supply port (312) may provide a path for the water of the water storage tank (310) to be supplied to the electrolysis tank (110). The water supply port (312) may be connected to one end of the water recovery pipe (171).

[0147] The above-mentioned water drainage port (313) may be formed by penetrating from the outer surface to the inner surface of the lower plate of the water storage tank (310). The above-mentioned water drainage port (313) may provide a path for the water to be discharged to the outside of the water storage tank (310).

[0148] The above-mentioned water inlet pipe (320) can have one end connected to the water shower system (20) and the other end connected to the water inlet port (311) of the water storage tank (310). The water inlet pipe (320) provides a path for the water formed by the cleaning water used in the water shower system (20) to flow into the water storage tank (310). The water inlet pipe (320) can transfer the water to the water storage tank (310) by a transfer pump (P) installed in the middle.

[0149] The upper end of the above-mentioned water drain pipe (330) is connected to the water drain port (313) of the water storage tank (310), and the lower end can be connected to an external water storage means. The above-mentioned water drain pipe (330) can drain the water stored inside the water storage tank (310) to the outside.

[0150]

[0151] The present invention has been described in detail, focusing on preferred embodiments. These embodiments are not intended to limit the invention, but rather serve merely as examples and should be considered illustrative rather than restrictive. The true scope of the present invention should be determined not by the foregoing description, but by the technical spirit of the appended claims.

Claims

1. An ion water generation module that generates and supplies cleaning water containing radical ions by electrolyzing general water, and A cleaning water supply device characterized by including a cleaning water supply module that generates cleaning water containing the ion water flowing in from the ion water generation module and supplies it to the outside.

2. In paragraph 1, The above ion water generation module An electrolysis tank that provides an ion water generation space in which the general water or the cleaning water recovered from the cleaning water generation module is introduced and the ion water is generated; A decomposition electrode located inside the electrolysis tank and performing the electrolysis, A water inlet pipe supplying the general water to the electrolysis tank and A washing water supply device characterized by including a washing water recovery pipe that recovers the washing water from the washing water supply module and supplies it to the electrolysis tank.

3. In paragraph 2, The above ion water generation module A sensing control tank having a sensing ion water space into which the ion water flows from the electrolysis tank, An upper connecting pipe that extends inside by penetrating the upper plate of the electrolysis tank and connects the sensing control tank to one side and provides a path through which the ion water is supplied; and A cleaning water supply device characterized in that it includes a lower connecting pipe that is connected to the lower side of the sensing control tank and penetrates one side of the electrolysis tank and provides a path for the ion water to flow.

4. In paragraph 3, A particle filter membrane located in front of the water inlet pipe or at the lower part of the upper connecting pipe to filter particles contained in the general water or ionized water, An ion water sensor located in the sensing control tank or electrolysis tank and sensing the characteristics of the ion water including pH or oxidation-reduction potential; and A washing water supply device characterized in that it further includes a level sensor located in the sensing control tank or electrolysis tank and measuring the level of the ion water.

5. In paragraph 4, The sensing ion water space of the sensing control tank is formed to have a height equal to or greater than that of the ion water generation space of the electrolysis tank, and the bottom surface is located at a height equal to or lower than that of the bottom surface of the ion water generation space of the electrolysis tank. A washing water supply device characterized in that the level sensor is located in the sensing control tank and senses and controls the height of the electrolysis tank through the height of the sensing control tank.

6. In paragraph 2, The above decomposition electrode is A first electrode plate formed in a plate shape and positioned inside the electrolysis tank, A first electrode connecting portion formed in a circular bar shape and electrically connected to the first electrode plate on the upper side of the first electrode plate, A first electrode terminal formed in a circular bar shape, the lower end of which is connected to the first electrode connection portion, and the upper end of which extends to the upper end of the electrolysis tank; A second electrode plate facing and spaced apart from the first electrode plate inside the electrolysis tank, A second electrode connection portion formed in a circular bar shape and electrically connected to the second electrode plate on the upper side of the second electrode plate, and A cleaning water supply device characterized by comprising a second electrode terminal formed in a circular bar shape, the lower end of which is connected to the second electrode connection portion, and the upper end of which extends to the upper portion of the electrolysis tank.

7. In paragraph 3, The above washing water supply module A cleaning water storage tank that receives the cleaning water flowing in from the ion water generation module, A cleaning water inlet pipe that provides a path for the cleaning water generated in the electrolysis tank to flow into the cleaning water storage tank; A cleaning water supply pipe that supplies the cleaning water of the cleaning water storage tank to the outside, and A cleaning water supply device characterized by including a water recovery pipe that provides a path for the water from the outside to be recovered to the cleaning water storage tank.

8. An ion water generation module that electrolyzes general water to generate and supply cleaning water containing radical ions, A cleaning water supply module that generates cleaning water containing the ion water flowing in from the ion water generation module and supplies it to the outside; and A cleaning water supply device characterized by including a water storage module that recovers and stores water used externally and supplies it to the ion water generation module.

9. In paragraph 8, A cleaning water supply device characterized in that the above cleaning water supply module produces cleaning water by mixing general water into the above ionized water.

10. In paragraph 1 or paragraph 8, A cleaning water supply device characterized in that the cleaning water supply module supplies the cleaning water to an air purification water shower system, an exhaust gas treatment scrubber, or a cooling tower installed in an external semiconductor manufacturing process line, a flat panel display manufacturing process line, or a solar panel manufacturing process line.

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