Temperature measuring apparatus and control method therefor

Abstract

The present application relates to a temperature measuring apparatus, and a control method therefor. The temperature measuring apparatus comprises a temperature measuring device and a vacuum coating chamber, a temperature measuring window capable of being opened and closed being provided on a chamber body of the vacuum coating chamber, and the temperature measuring window facing an evaporation boat disposed in the vacuum coating chamber. The temperature measuring device is disposed facing the temperature measuring window, and when the temperature measuring window is opened, the temperature measuring apparatus can measure the temperature of the evaporation boat by means of the temperature measuring window. Compared with the related art, in which an ambient temperature sensor is disposed inside a vacuum chamber, an embodiment of the present application disposes a temperature measuring device outside the vacuum coating chamber and measures the temperature of the evaporation boat by means of the openable temperature measuring window. High-temperature gas inside the vacuum coating chamber is barely deposited on the temperature measuring device, which helps to improve the accuracy of temperature measurement data of the temperature measuring device, thereby enabling accurate non-contact temperature measurement in a vacuum coating environment.

Description

Temperature measuring device and control method thereof

[0001] Cross-reference to related applications

[0002] This application is based on the Chinese Patent Application No. 2024208292810 entitled "Temperature measuring device" filed on April 19, 2024, which is incorporated by reference in its entirety into this application. TECHNICAL FIELD

[0003] The present application relates to the technical field of vacuum coating, in particular to a temperature measuring device and a control method thereof. BACKGROUND

[0004] Vacuum coating refers to a method of heating metal or non-metallic materials under high vacuum conditions, so that they evaporate and condense on the surface of the coated part (metal, semiconductor or insulator) to form a thin film. Among them, how to accurately detect the temperature of the evaporation source (or called evaporation boat) is a very important factor for the control process of vacuum coating.

[0005] In the related art, the temperature of the evaporation source is detected by setting an ambient temperature sensor in the vacuum chamber. However, the related art has the problem that the ambient temperature sensor cannot normally detect.

[0006] SUMMARY

[0007] In view of the above problems, the present application provides a temperature measuring device and a control method thereof, which can solve the problem that the ambient temperature sensor cannot normally detect in the related art.

[0008] In a first aspect, the present application provides a temperature measuring device, which comprises a temperature measuring device and a vacuum coating chamber. The chamber of the vacuum coating chamber is provided with an openable and closable temperature measuring window, and the temperature measuring window is opposite to the evaporation boat arranged inside the vacuum coating chamber.

[0009] The temperature measuring device is arranged towards the temperature measuring window. After the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window.

[0010] In the present application, the temperature measuring window is arranged on the chamber of the vacuum coating chamber and is opposite to the evaporation boat arranged inside the vacuum coating chamber. After the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. It can be seen that the temperature measuring device of the present application is arranged outside the vacuum coating chamber, and the temperature of the evaporation boat is measured through the openable temperature measuring window. The high-temperature gas inside the vacuum coating chamber is almost not deposited on the temperature measuring device, which is conducive to improving the accuracy of the temperature measurement data of the temperature measuring device, so that non-contact accurate temperature measurement in the vacuum coating environment can be realized.

[0011] In some embodiments, the flange device is arranged on the cavity of the vacuum coating chamber, and the flange device is provided with an opening, and the temperature measurement window is arranged on the opening of the flange device.

[0012] In the embodiments of the present application, the temperature measurement window is arranged on the opening of the flange device on the cavity of the vacuum coating chamber, which can increase the flexibility of the arrangement of the temperature measurement window, and the temperature measurement device can be arranged towards the temperature measurement window, so that the temperature of the evaporation boat can be measured through the temperature measurement window.

[0013] In some embodiments, the flange device comprises a front flange and a rear flange connected to each other, the front flange and the rear flange are both provided with an opening, and the openings of the front flange and the rear flange are opposite to each other, and the temperature measurement window is arranged on the opening of the front flange.

[0014] In the embodiments of the present application, the temperature measurement window is arranged on the opening of the front flange, which can increase the distance between the temperature measurement window and the evaporation boat, and can further prevent the high-temperature gas in the vacuum coating chamber from being deposited on the temperature measurement window, thereby improving the clarity of the temperature measurement window and further improving the accuracy of the temperature measurement data of the temperature measurement device.

[0015] In some embodiments, a sealing ring is fixedly arranged between the front flange and the rear flange, which can increase the sealing performance of the temperature measurement device.

[0016] In some embodiments, a movable cover plate is arranged between the front flange and the rear flange, and the cover plate can shield or unshield the opening arranged on the rear flange by moving, so as to achieve the effect of flexibly closing or opening the temperature measurement window.

[0017] In some embodiments, the vacuum coating chamber comprises a containing cavity part and a connecting cavity part, the containing cavity part is used to form a cavity space containing the evaporation boat, the connecting cavity part is in communication with the containing cavity part, and the flange device is arranged on the connecting cavity part.

[0018] In some embodiments, the temperature measurement window comprises germanium glass, which can allow infrared light signals or detection light signals of the temperature measurement device to pass through, thereby avoiding problems such as infrared temperature measurement failure or detection light temperature measurement failure caused by glass reflection.

[0019] In some embodiments, the temperature measurement device comprises an infrared temperature measurement instrument or a laser temperature measurement instrument.

[0020] In some embodiments, the temperature measurement device comprises a plurality of temperature measurement devices, and a plurality of temperature measurement windows are correspondingly arranged on the cavity of the vacuum coating chamber, and different temperature measurement windows are opposite to different evaporation boats arranged in the vacuum coating chamber.

[0021] In the embodiments of the present application, the temperature of the corresponding evaporation boat inside the vacuum coating chamber is measured by multiple temperature measuring devices, which can improve the accuracy of the evaporation boat temperature detection.

[0022] In some embodiments, the temperature measuring device further comprises a control device connected with the temperature measuring device and the evaporation boat, to adjust the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device.

[0023] In the embodiments of the present application, the evaporation power of the evaporation boat is adjusted by the control device according to the temperature measurement data output by the temperature measuring device, which can realize automatic closed-loop control of the coating process and improve the stability of the coating quality.

[0024] In the first aspect, the present application provides a control method of a temperature measuring device, wherein the method is applied to a control device in any one of the temperature measuring devices in the first aspect, and the method comprises:

[0025] Adjusting the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring device in the temperature measuring device.

[0026] In some embodiments, adjusting the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring device in the temperature measuring device comprises:

[0027] Adjusting the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring device by using a PID algorithm.

[0028] In some embodiments, adjusting the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring device in the temperature measuring device comprises:

[0029] In the case of including multiple evaporation boats in the temperature measuring device, the temperature measurement data of each evaporation boat output by the temperature measuring device is used to adjust the evaporation power of each evaporation boat respectively.

[0030] The above description is only a summary of the technical solutions of the present application, in order to more clearly understand the technical means of the present application, the specific embodiments of the present application can be implemented according to the content of the description, and in order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following specific embodiments of the present application are described. BRIEF DESCRIPTION OF DRAWINGS

[0031] By reading the detailed description of the preferred embodiments below, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of illustrating the preferred embodiments and are not considered limiting the present application. Moreover, the same reference numbers are used to represent the same components throughout the drawings. In the drawings:

[0032] Fig. 1 is a structural schematic diagram of a temperature measuring device according to some embodiments of the present application;

[0033] Fig. 2 is a structural schematic diagram of a temperature measuring device according to some other embodiments of the present application;

[0034] Fig. 3 is a structural schematic diagram of a temperature measuring device according to some other embodiments of the present application;

[0035] Fig. 4 is a structural schematic diagram of a flange device according to some embodiments of the present application;

[0036] Fig. 5 is a schematic diagram of a cover plate moving position according to some embodiments of the present application;

[0037] Fig. 6 is an exploded schematic diagram of a temperature measuring device according to some embodiments of the present application;

[0038] Fig. 7 is a partial sectional schematic diagram of Fig. 6 along the direction of A;

[0039] Fig. 8 is a schematic diagram of an automatic adjustment flow of evaporation power according to some embodiments of the present application. DETAILED DESCRIPTION

[0040] The embodiments of the technical solutions of the present application will be described in detail below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present application, and therefore only serve as examples, and cannot limit the protection scope of the present application.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs; the terms used herein are only for the purpose of describing specific embodiments of the present application, and are not intended to limit the present application; the terms "include" and any variations thereof in the specification and claims of the present application and the above description of drawings are intended to cover non-exclusive inclusion.

[0042] In the description of the embodiments of the present application, the meaning of "a plurality of" is more than two (including two), unless otherwise explicitly and specifically limited. It should be understood that the terms "front", "back" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the embodiments of the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0043] In the embodiments of the present application, unless otherwise clearly specified and limited, the terms "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0044] The temperature measuring device and the control method thereof related in the embodiments of the present application can be applied to the winding type coating application scene in the battery production process; of course, it can also be applied to other scenes.

[0045] The following embodiments are described for the convenience of illustration, taking the temperature measuring device and the control method thereof in the embodiments of the present application applied to the winding type coating application scene in the battery production process as an example. It should be understood that when the temperature measuring device and the control method thereof in the embodiments of the present application are applied to other scenes, the implementation principle and technical effects are similar.

[0046] In view of the problem that the environmental temperature sensor cannot normally detect in the related art, the temperature measuring device in the embodiments of the present application can be arranged outside the vacuum coating cavity, and the temperature of the evaporation boat is measured through the openable temperature measuring window, so that the high-temperature gas in the vacuum coating cavity hardly deposits on the temperature measuring device, which is beneficial to improve the accuracy of the temperature measurement data of the temperature measuring device, so that non-contact accurate temperature measurement in the vacuum coating environment can be realized.

[0047] In some embodiments, FIG. 1 is a structural schematic diagram of a temperature measuring device provided by some embodiments of the present application, as shown in FIG. 1, the temperature measuring device in the embodiments of the present application can include but not limited to a temperature measuring device 10 and a vacuum coating cavity 11.

[0048] For example, the temperature measuring device 10 in the embodiments of the present application can include but not limited to an infrared temperature measuring instrument or a laser temperature measuring instrument. For example, the temperature measuring device 10 can use a high-resolution infrared temperature measuring instrument, and the time for collecting temperature data is as short as milliseconds.

[0049] The cavity of the vacuum coating cavity 11 in the embodiments of the present application can be provided with an openable temperature measuring window 110, and the temperature measuring window 110 is opposite to the evaporation boat (not shown in FIG. 1) arranged inside the vacuum coating cavity 11, so that the evaporation boat can be observed through the temperature measuring window 110.

[0050] Exemplarily, the temperature measuring window 110 in the embodiment of the present application can include, but is not limited to, a glass with high temperature resistance and high light transmittance. For example, the temperature measuring window 110 can include a germanium glass, which can allow the infrared light signal or the detection light signal of the temperature measuring device 10 to pass through, thereby avoiding problems such as failure of infrared temperature measurement or failure of detection light temperature measurement caused by reflection of the glass.

[0051] The temperature measuring device 10 in the embodiment of the present application can be arranged towards the temperature measuring window 110. After the temperature measuring window 110 is opened, the temperature measuring device 10 can measure the temperature of the evaporation boat through the temperature measuring window 110. It should be noted that the temperature measuring device 10 can very quickly measure the temperature of the evaporation boat through the temperature measuring window 110, and therefore, the time length during which the temperature measuring window 110 is opened is usually very short, that is, the high-temperature gas in the vacuum coating chamber 11 will hardly deposit on the temperature measuring device.

[0052] Exemplarily, the temperature measuring device 10 can be fixedly arranged around the temperature measuring window 110 and towards the temperature measuring window 110 by a support. Of course, the temperature measuring device 10 can also adopt other fixing manners, which will not be described one by one in the embodiment of the present application.

[0053] It should be understood that after the temperature measuring window 110 is closed, the temperature measuring device cannot measure the temperature of the evaporation boat through the temperature measuring window 110, and the high-temperature gas in the vacuum coating chamber 11 will not deposit on the temperature measuring device, thereby facilitating improvement of the accuracy of the temperature measurement data of the temperature measuring device.

[0054] It should be noted that one or more evaporation boats can be arranged in the vacuum coating chamber. In the case that a plurality of evaporation boats are arranged in the vacuum coating chamber and the number of measurable points of the temperature measuring device is greater than or equal to the number of evaporation boats, the temperature measuring device can measure the temperature of all the evaporation boats in the vacuum coating chamber 11 by one temperature measuring device 10 through one temperature measuring window 110. It can be seen that the way of measuring the temperature of all the evaporation boats in the vacuum coating chamber 11 by one temperature measuring device 10 can save the cost of the measuring device.

[0055] In the case that a plurality of evaporation boats are arranged in the vacuum coating chamber and the number of measurable points of the temperature measuring device is less than the number of evaporation boats, the temperature measuring device can include a plurality of temperature measuring devices 10, and a plurality of temperature measuring windows 110 can be correspondingly arranged on the cavity of the vacuum coating chamber 11. Different temperature measuring windows 110 are opposite to different evaporation boats arranged in the vacuum coating chamber 11, so that each temperature measuring device 10 can measure the temperature of at least one evaporation boat opposite thereto through the temperature measuring window 110 opposite thereto.

[0056] Exemplarily, assuming that the vacuum coating cavity is internally provided with 6 evaporation boats, the number of measurable points of the measuring device is 2, the temperature measuring device needs to include 3 measuring devices 10, and the cavity of the vacuum coating cavity 11 can be correspondingly provided with 3 temperature measuring windows 110. Different temperature measuring windows 110 are opposite to the corresponding 2 evaporation boats inside the vacuum coating cavity 11, so that each temperature measuring device 10 can measure the temperature of the opposite 2 evaporation boats through the opposite temperature measuring window 110.

[0057] For example, the first measuring device 10 can measure the temperature of the opposite evaporation boat a and evaporation boat b through the first temperature measuring window 110, the second measuring device 10 can measure the temperature of the opposite evaporation boat c and evaporation boat d through the second temperature measuring window 110, and the third measuring device 10 can measure the temperature of the opposite evaporation boat e and evaporation boat f through the third temperature measuring window 110.

[0058] It can be seen that the temperature of the corresponding evaporation boat inside the vacuum coating cavity 11 is measured by the plurality of temperature measuring devices 10 respectively, which can be beneficial to improve the accuracy of the evaporation boat temperature detection.

[0059] It should be understood that when the number of measurable points of the measuring device is greater than the number of evaporation boats, the temperature measuring device can also include a plurality of measuring devices 10, and the cavity of the vacuum coating cavity 11 can be correspondingly provided with a plurality of temperature measuring windows 110. Different temperature measuring windows 110 are opposite to different evaporation boats arranged inside the vacuum coating cavity 11, so that each temperature measuring device 10 can measure the temperature of the opposite at least one evaporation boat through the opposite temperature measuring window 110. In the embodiment of the present application, there can be a case that a plurality of temperature measuring devices measure the temperature of the same evaporation boat, and the temperature of the evaporation boat can be obtained by comprehensively calculating the measured plurality of temperature measurement data based on a preset measurement algorithm.

[0060] In conclusion, the temperature measuring device in the embodiments of the present application can include a temperature measuring device and a vacuum coating cavity. The cavity of the vacuum coating cavity is provided with an openable temperature measuring window, which is opposite to the evaporation boat arranged in the vacuum coating cavity. The temperature measuring device is arranged towards the temperature measuring window. After the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. Compared with the way of arranging an ambient temperature sensor in the vacuum cavity in the related art, the temperature measuring window is arranged on the cavity of the vacuum coating cavity and is opposite to the evaporation boat arranged in the vacuum coating cavity, and after the temperature measuring window is opened, the temperature measuring device can measure the temperature of the evaporation boat through the temperature measuring window. It can be seen that the temperature measuring device in the embodiments of the present application is arranged outside the vacuum coating cavity, and the temperature of the evaporation boat is measured through the openable temperature measuring window. The high-temperature gas in the vacuum coating cavity is almost not deposited on the temperature measuring device, which is beneficial to improve the accuracy of the temperature measurement data of the temperature measuring device, so that the non-contact accurate temperature measurement in the vacuum coating environment can be realized.

[0061] In some embodiments, FIG. 2 is a structural schematic diagram of a temperature measuring device provided by another embodiment of the present application. As shown in FIG. 2, the cavity of the vacuum coating cavity 11 can be provided with a flange device 12. The flange device 12 can be provided with an opening, and the temperature measuring window 110 can be arranged on the opening of the flange device 12, so that the temperature measuring device 10 can measure the temperature of the evaporation boat through the temperature measuring window 110.

[0062] It can be seen that in the embodiments of the present application, the temperature measuring window is arranged at the opening of the flange device on the cavity of the vacuum coating cavity, which can increase the flexibility of the arrangement of the temperature measuring window, and is beneficial to the temperature measuring device arranged towards the temperature measuring window, so that the temperature of the evaporation boat can be measured through the temperature measuring window.

[0063] In some embodiments, FIG. 3 is a structural schematic diagram of a temperature measuring device provided by another embodiment of the present application. As shown in FIG. 3, on the basis of the above-mentioned embodiment, in order to further improve the flexibility of the arrangement of the temperature measuring window, the vacuum coating cavity 11 in the embodiments of the present application can include a containing cavity part 111 and a connecting cavity part 112. The connecting cavity part 112 can be in communication with the containing cavity part 111.

[0064] The containing cavity part 110 can be used to form a cavity space containing the evaporation boat. The flange device 12 can be arranged on the connecting cavity part 111. Since the connecting cavity part 111 is in communication with the containing cavity part 110, the temperature measuring window arranged at the opening of the flange device 12 can be opposite to the evaporation boat arranged in the containing cavity part 110.

[0065] In some embodiments, FIG. 4 is a structural schematic diagram of a flange device according to some embodiments of the present application. In some embodiments, the flange device is used in the temperature measuring device according to some embodiments of the present application. As shown in FIG. 4, the flange device 12 according to some embodiments of the present application can include a front flange 120 (i.e. the flange close to the temperature measuring device 10) and a rear flange 121 (i.e. the flange close to the vacuum coating chamber 11) connected to each other. In some embodiments, the front flange 120 and the rear flange 121 can be connected by fasteners or buckles.

[0066] Further, in order to increase the sealing of the temperature measuring device, a sealing ring 122 can be fixed between the front flange 120 and the rear flange 121.

[0067] In some embodiments, the front flange 120 and the rear flange 121 can be provided with openings, and the openings of the front flange 120 and the rear flange 121 are opposite to each other, so that the temperature detection signal can pass through.

[0068] In some embodiments, the temperature measuring window 110 can be arranged on the opening of the front flange 120, which can increase the distance between the temperature measuring window and the evaporation boat, and further prevent the high-temperature gas in the vacuum coating chamber from depositing on the temperature measuring window, thereby improving the clarity of the temperature measuring window and further improving the accuracy of the temperature measurement data of the temperature measuring device.

[0069] In some embodiments, a movable cover plate 123 can be arranged between the front flange 120 and the rear flange 121. The cover plate 123 can shield or unshield the opening arranged on the rear flange 121 by moving, so as to achieve the effect of flexibly closing or opening the temperature measuring window 110.

[0070] FIG. 5 is a schematic diagram of the moving position of the cover plate according to some embodiments of the present application. As shown in FIG. 5, when the cover plate 123 moves to a first position, the cover plate 123 can shield the opening arranged on the rear flange 121, and the temperature measuring window is in a closed state. When the cover plate 123 moves to a second position, the cover plate 123 can unshield the opening arranged on the rear flange 121, and the temperature measuring window is in an open state.

[0071] In some embodiments, a cover plate adjusting member (not shown in FIG. 4) can be arranged on the flange device and connected with the cover plate 123, so as to move the position of the cover plate 123 by the cover plate adjusting member. For example, the cover plate adjusting member can include but is not limited to a manual rotating member or an electric rotating member.

[0072] In some embodiments, for the convenience of understanding, on the basis of the above-mentioned embodiments, the temperature measuring device in the embodiments of the present application is taken as an example in which the temperature measuring device includes a temperature measuring window and the cover plate adjusting member is a manual rotating member, and the overall structure of the temperature measuring device is exemplarily introduced and described.

[0073] FIG. 6 is an exploded schematic view of the temperature measuring device provided in the embodiments of the present application, and FIG. 7 is a partial cross-sectional view of FIG. 6 along the direction A. In combination with FIGS. 6 and 7, the temperature measuring device in the embodiments of the present application can include a temperature measuring device (not shown in FIGS. 6 and 7), a vacuum coating cavity 11, and a flange device 12.

[0074] The vacuum coating cavity 11 can include a containing cavity portion 110 and a connecting cavity portion 111, and the connecting cavity portion 111 can be in communication with the containing cavity portion 110. It should be noted that the containing cavity portion 110 of the vacuum coating cavity 11 is not shown in FIG. 7.

[0075] The flange device 12 can include a front flange 120, a rear flange 121, a sealing ring 122, a cover plate 123, and a manual rotating member 124. The rear flange 121 can be arranged on the connecting cavity portion 111, and the front flange 120 and the rear flange 121 can be connected by fasteners. The fasteners can include, but are not limited to, fixing bolts arranged on the front flange 120 and fixing nuts arranged on the rear flange 121.

[0076] For example, the sealing ring 122 and the cover plate 123 are arranged in sequence between the front flange 120 and the rear flange 121. The position of the cover plate 123 can be moved by the manual rotating member 124.

[0077] It should be understood that the opening of the front flange 120, the opening of the rear flange 121, and the connecting cavity portion 111 can be opposite to the evaporation boat area in the containing cavity portion 110, so that all the evaporation boats can be observed through the temperature measuring window 110, so as to facilitate the temperature measurement of the temperature measuring device.

[0078] The temperature measuring window 110 can be arranged on the opening of the front flange 121, and germanium glass G can be arranged on the temperature measuring window 110. The temperature measuring device can measure the temperature of each evaporation boat in the containing cavity portion 110 through the temperature measuring window 110.

[0079] In summary, the temperature measuring device in the embodiment of the present application can open the cover plate to measure the temperature of the evaporation boat through the temperature measuring window when the temperature measuring device detects the temperature, and close the cover plate when the temperature measuring device does not detect the temperature, so that the high-temperature gas in the vacuum coating cavity is hardly deposited on the temperature measuring window, which can improve the clarity of the temperature measuring window and the accuracy of the temperature measurement data of the temperature measuring device, thereby realizing non-contact accurate temperature measurement in the vacuum coating environment.

[0080] In some embodiments, on the basis of the above-mentioned embodiments, the temperature measuring device in the embodiment of the present application can further include a control device, wherein the control device can be connected with the temperature measuring device and the evaporation boat in the vacuum coating cavity to adjust the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring device.

[0081] For example, the control device can use a proportion integration differentiation (PID) algorithm to adjust the evaporation power of the evaporation boat in the vacuum coating cavity in real time according to the temperature measurement data output by the temperature measuring device; of course, other algorithms can also be used to adjust the evaporation power of the evaporation boat.

[0082] It should be understood that in the case where the vacuum coating cavity includes a plurality of evaporation boats, the control device can adjust the evaporation power of each evaporation boat according to the temperature measurement data of each evaporation boat output by the temperature measuring device, so that the temperature states of the evaporation boats can be consistent, thereby facilitating the stability of the coating quality.

[0083] For example, for each evaporation boat, the control device can determine the temperature of the evaporation boat by taking the average, maximum or minimum of the temperature measurement data of the evaporation boat output by the temperature measuring device, and then adjust the evaporation power of the evaporation boat according to the temperature of the evaporation boat, which is conducive to further improving the stability of the coating quality.

[0084] FIG. 8 is a schematic diagram of an automatic adjustment process of the evaporation power provided by the embodiment of the present application, as shown in FIG. 8, the process of the embodiment of the present application can include the following steps:

[0085] 1. During the coating process, the temperature measuring device collects temperature measurement data of each evaporation boat.

[0086] For example, the temperature measuring device can collect the temperature measurement data of each evaporation boat when it detects that a preset detection condition is met, wherein the preset detection condition can include but is not limited to reaching a preset interval or receiving a detection instruction.

[0087] 2. The control device receives temperature measurement data of each evaporation boat output by the temperature measurement device.

[0088] 3. The control device determines whether the temperature measurement data of each evaporation boat meets a preset temperature range.

[0089] 4. In a case where it is determined that the temperature measurement data of any evaporation boat is higher than or lower than the preset temperature range, the control device determines a power adjustment amount corresponding to the evaporation boat, and adjusts the evaporation power of the evaporation boat according to the power adjustment amount.

[0090] In a case where it is determined that the temperature measurement data of any evaporation boat belongs to the preset temperature range, the control device can determine that the evaporation power of the evaporation boat does not need to be adjusted.

[0091] It should be noted that steps 3-4 above are loop steps, and after step 4 is executed, step 3 is executed again, and so on, until the coating process ends.

[0092] In summary, in the embodiment of the present application, by adjusting the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measurement device, the automatic closed-loop control of the coating process can be realized, which is conducive to improving the stability of the coating quality.

[0093] In some embodiments, the embodiment of the present application also provides a control method of a temperature measurement device, wherein the method is applied to the control device in the above-mentioned temperature measurement device embodiment of the present application, and the method comprises:

[0094] Adjusting the evaporation power of the evaporation boat in the temperature measurement device according to the temperature measurement data output by the temperature measurement device in the temperature measurement device.

[0095] In some embodiments, adjusting the evaporation power of the evaporation boat in the temperature measurement device according to the temperature measurement data output by the temperature measurement device in the temperature measurement device comprises:

[0096] Adjusting the evaporation power of the evaporation boat in the temperature measurement device according to the temperature measurement data output by the temperature measurement device by using a PID algorithm.

[0097] In some embodiments, adjusting the evaporation power of the evaporation boat in the temperature measurement device according to the temperature measurement data output by the temperature measurement device in the temperature measurement device comprises:

[0098] In a case where the temperature measurement device comprises a plurality of evaporation boats, the evaporation power of each evaporation boat is adjusted according to the temperature measurement data of each evaporation boat output by the temperature measurement device.

[0099] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than limit them. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for some or all of the technical features. Such modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the claims and the description of the present application. In particular, as long as there is no structural conflict, each technical feature mentioned in each embodiment can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A temperature measuring device, wherein, The temperature measuring device comprises a temperature measuring apparatus and a vacuum coating chamber, and a temperature measuring window is arranged on the cavity of the vacuum coating chamber and can be opened and closed, and the temperature measuring window is opposite to an evaporation boat arranged in the vacuum coating chamber; The temperature measuring apparatus is arranged towards the temperature measuring window, and the temperature measuring apparatus can measure the temperature of the evaporation boat through the temperature measuring window after the temperature measuring window is opened.

2. The temperature measuring device according to claim 1, wherein A flange device is arranged on the cavity of the vacuum coating chamber, and the temperature measuring window is arranged on the opening of the flange device.

3. The temperature measuring device according to claim 2, wherein The flange device comprises a front flange and a rear flange connected to each other, and the front flange and the rear flange are both provided with an opening, and the openings of the front flange and the rear flange are opposite to each other, and the temperature measuring window is arranged on the opening of the front flange.

4. The temperature measuring device according to claim 3, wherein A sealing ring is fixedly arranged between the front flange and the rear flange.

5. The temperature measuring device according to claim 3 or 4, wherein A movable cover plate is arranged between the front flange and the rear flange, and the cover plate can shield or unshield the opening arranged on the rear flange by moving.

6. The temperature measuring device according to any one of claims 2 to 5, wherein The vacuum coating chamber comprises a containing cavity part and a connecting cavity part, the containing cavity part is used to form a cavity space containing the evaporation boat, the connecting cavity part is communicated with the containing cavity part, and the flange device is arranged on the connecting cavity part.

7. The temperature measuring device according to any one of claims 1 to 6, wherein The temperature measuring window comprises germanium glass.

8. The temperature measuring device according to any one of claims 1 to 7, wherein The temperature measuring apparatus comprises an infrared temperature measuring instrument or a laser temperature measuring instrument.

9. The temperature measuring device according to any one of claims 1 to 8, wherein The temperature measuring device comprises a plurality of temperature measuring apparatuses, and a plurality of temperature measuring windows are correspondingly arranged on the cavity of the vacuum coating chamber, and different temperature measuring windows are opposite to different evaporation boats arranged in the vacuum coating chamber.

10. The temperature measuring device according to any one of claims 1 to 9, wherein The temperature measuring device further comprises a control apparatus connected with the temperature measuring apparatus and the evaporation boat, so as to adjust the evaporation power of the evaporation boat according to the temperature measurement data output by the temperature measuring apparatus.

11. A control method of a temperature measuring device, wherein The method is applied to the control apparatus in the temperature measuring device as claimed in any one of claims 1-10, and the method comprises: adjusting the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring apparatus in the temperature measuring device.

12. The method of claim 11, wherein, The adjusting of the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring apparatus in the temperature measuring device comprises: adjusting the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring apparatus by using a PID algorithm.

13. The method of claim 11 or 12, wherein, The adjusting of the evaporation power of the evaporation boat in the temperature measuring device according to the temperature measurement data output by the temperature measuring apparatus in the temperature measuring device comprises: in the case that a plurality of evaporation boats are included in the temperature measuring device, adjusting the evaporation power of each evaporation boat according to the temperature measurement data of each evaporation boat output by the temperature measuring apparatus.

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