Quick-drain valve structure and cleaning device

Abstract

A quick-drain valve structure and a cleaning device, the quick-drain valve structure comprising: a valve tube (10), which comprises a first end (10c) and a second end (10d) arranged opposite each other, the first end (10c) being configured to connect to a cleaning tank (200), and the valve tube (10) being provided with at least one drain port (101); a cylinder (20), which is fitted within the valve tube (10) and is connected to the second end (10d); and a valve core assembly (30), which comprises a sealing sleeve assembly (31) and a piston rod (32), wherein the sealing sleeve assembly (31) is fitted within the valve tube (10) and forms, together with the inner wall of the valve tube (10), mutually sealing dynamic seal surfaces capable of sliding relative to each other, and between the dynamic seal surfaces of the sealing sleeve assembly (31) and the valve tube (10), a drain groove (301) is formed close to the first end (10c); the end of the sealing sleeve assembly (31) facing the second end (10d) is movably sleeved on the outer side of the cylinder (20); and one end of the piston rod (32) is arranged in the cylinder (20), and the other end of the piston rod (32) extends out from the interior of the cylinder (20), and is connected to the sealing sleeve assembly (31) and can move in the radial direction of the piston rod (32).

Description

Quick-discharge valve structure and cleaning device TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a quick-discharge valve structure and a cleaning device. BACKGROUND

[0002] A semiconductor tank cleaning device is used to clean a wafer. Referring to FIG. 1, which is a schematic diagram of a semiconductor tank cleaning device cleaning a wafer, the semiconductor tank cleaning device includes a containing tank 10a and a valve 20a arranged on the bottom side of the containing tank 10a. During cleaning, the wafer 101a is immersed below the liquid level 102a of the cleaning chemical solution, and after cleaning, the valve 20a is opened to discharge the cleaning chemical solution from the containing tank 10a.

[0003] During liquid discharge, the liquid discharge speed needs to be reduced at the beginning of the liquid discharge, otherwise the rapid lateral flow of the chemical solution can easily cause wafer 101a to be stacked, which is defined as a slow-discharge stage. When the liquid level 102a drops to a point where there is no risk of stacking, the valve opening of the valve 20a is increased, and the chemical solution is quickly discharged, which is defined as a fast-discharge stage.

[0004] Because the thickness of different wafers 101a, the temperature and viscosity of the chemical solution used, and other working conditions are different, it is necessary to provide a quick-discharge valve structure that can adjust the liquid discharge time in the slow-discharge stage. SUMMARY

[0005] To solve the above technical problems, the present application provides a quick-discharge valve structure and a cleaning device, which can improve the problem that the existing semiconductor tank cleaning device cannot adjust the liquid discharge time in the slow-discharge stage according to different working conditions.

[0006] To solve the above technical problems, in a first aspect, the present application provides a quick-discharge valve structure, comprising:

[0007] a valve pipe comprising a first end and a second end arranged oppositely, the first end being used to connect with a cleaning tank, and at least one liquid discharge port being arranged on the valve pipe;

[0008] a cylinder being sleeved in the valve pipe and connected with the second end;

[0009] a valve core assembly comprising a sealing sleeve assembly and a piston rod;

[0010] the sealing sleeve assembly is sleeved in the valve pipe and forms a power sealing surface with the inner wall of the valve pipe, which is sealed from each other and can slide relative to each other, and a liquid discharge groove is arranged between the sealing sleeve assembly and the power sealing surface of the valve pipe close to the first end; one end of the sealing sleeve assembly towards the second end is movably sleeved on the outside of the cylinder;

[0011] One end of the piston rod is arranged in the cylinder, and the other end extends out of the interior of the cylinder and is movably connected with the seal sleeve assembly along the radial direction of the piston rod for driving the seal sleeve assembly to move along the axial direction of the piston rod;

[0012] The seal sleeve assembly has a first limit position close to the first end and a second limit position close to the second end, the seal sleeve assembly blocks the first end when being located at the first limit position, and the drain groove is communicated with the drain port when the seal sleeve assembly is away from the first limit position; the seal sleeve assembly avoids at least part of the drain port when being located at the second limit position.

[0013] In some embodiments, the seal sleeve assembly comprises:

[0014] A sealing plug is sleeved in the valve pipe and forms the power sealing surface; one end of the sealing plug towards the second end is provided with a blind hole extending along the axial direction of the piston rod;

[0015] A support bowl is sleeved on the outside of the cylinder towards one end of the second end, and the support bowl is also sleeved in the blind hole; the bowl bottom of the support bowl is provided with a stepped hole, the stepped hole comprises a first hole segment with a larger diameter towards the first end and a second hole segment with a smaller diameter towards the second end;

[0016] A locking member is arranged in the stepped hole in a clearance fit in the radial direction of the piston rod, the other end of the piston rod passes through the second hole segment in a clearance fit in the radial direction of the piston rod and is connected with the locking member, and the locking member is limitedly fitted with the step of the stepped hole and the sealing plug in a direction parallel to the axial direction of the piston rod, respectively.

[0017] In some embodiments, one end of the piston rod arranged in the cylinder divides the interior space of the cylinder into a first gas cavity and a second gas cavity;

[0018] The end surface of the seal sleeve assembly towards the second end is surrounded by the cylinder and the valve pipe to form a third gas cavity;

[0019] The cylinder is provided with a first gas passage communicated with the first gas cavity, a second gas passage communicated with the second gas cavity, and a breathing hole communicated with the third gas cavity;

[0020] The first gas passage and the second gas passage are used for connecting external gas pressure control devices, and the breathing hole communicates the third gas cavity with an external atmospheric environment.

[0021] In some embodiments, the cylinder comprises:

[0022] a cylinder body, one end of which is provided with an opening towards the first end;

[0023] a first flange, which is arranged at the end of the cylinder body away from the opening;

[0024] an end cover, which covers the opening;

[0025] the piston rod extends from the end cover, and a first sealing ring is arranged between the outer periphery of the piston rod and the inner periphery of the end cover, and a second sealing ring is arranged between one end of the piston rod arranged in the cylinder body and the inner wall of the cylinder body, so as to separate the first gas cavity and the second gas cavity.

[0026] In some embodiments, the contact surface of the end face of the end cover towards the second end and the cylinder body is a bevel, and the distance between the bevel and the axis of the piston rod decreases in the direction close to the second end; and / or,

[0027] a third sealing ring is arranged between the outer periphery of the end cover and the inner periphery of the cylinder body.

[0028] In some embodiments, the first flange is provided with a positioning boss towards the end face of the valve pipe, and the outer peripheral wall of the positioning boss cooperates with the inner wall of the valve pipe;

[0029] the cylinder body is connected to the end face of the positioning boss towards the valve pipe.

[0030] In some embodiments, the valve pipe comprises:

[0031] a valve pipe body;

[0032] a second flange, which is arranged at the first end of the valve pipe body, and the inner diameter of the second flange is greater than the inner diameter of the valve pipe body;

[0033] a sealing ring, which is sleeved in the second flange and abuts against the first end of the valve pipe body;

[0034] the sealing sleeve assembly abuts against the sealing ring when the sealing sleeve assembly is located at the first limit position, so as to block the liquid discharge groove.

[0035] In some embodiments, the abutment surface of the sealing sleeve assembly and the sealing ring abutting against each other is a bevel.

[0036] In some embodiments, one side of the sealing ring away from the valve pipe body is provided with a fourth sealing ring.

[0037] In some embodiments, a fifth sealing ring is arranged between the sealing sleeve assembly and the inner wall of the valve pipe, and the fifth sealing ring is arranged close to the second end.

[0038] In some embodiments, the drain groove is a groove provided on a surface of the sealing sleeve assembly opposite to the inner wall of the valve tube, and the groove extends along the axial direction of the piston rod from the end surface of the sealing sleeve assembly close to the first end.

[0039] In some embodiments, the groove is discontinuous in the circumferential direction of the sealing sleeve assembly.

[0040] In some embodiments, the diameter of the portion of the sealing sleeve assembly close to the first end is smaller than the diameter of the portion of the sealing sleeve assembly close to the second end, and an annular gap between the portion of the sealing sleeve assembly close to the first end and the inner wall of the valve tube constitutes the drain groove.

[0041] The inner wall of the portion of the valve tube close to the second end and the surface of the sealing sleeve assembly opposite to the inner wall of the valve tube form the power sealing surface, respectively.

[0042] In some embodiments, the inner diameter of the portion of the valve tube close to the first end is larger than the inner diameter of the portion of the valve tube close to the second end, and an annular gap between the portion of the valve tube close to the first end and the sealing sleeve assembly constitutes the drain groove.

[0043] The inner wall of the portion of the valve tube close to the second end and the surface of the sealing sleeve assembly opposite to the inner wall of the valve tube form the power sealing surface, respectively.

[0044] In a second aspect, the embodiments of the present application further provide a cleaning device, which comprises a cleaning tank and the fast-drain valve structure as described in the above embodiments.

[0045] The side wall of the cleaning tank is provided with a drain pipe, and the fast-drain valve structure is connected to the drain pipe.

[0046] As described above, the fast-drain valve structure of the present embodiments, when the valve core assembly moves from the first limit position to the second limit position, experiences the slow-drain stage and the fast-drain stage in sequence, and the drain time of the slow-drain stage can be adjusted by controlling the moving speed of the valve core assembly in the moving stroke.

[0047] In addition, in the present embodiments, the piston rod and the sealing sleeve assembly are movably connected in the radial direction of the piston rod, so that the piston rod is not subjected to radial stress when the sealing sleeve assembly is deformed by force in the radial direction of the piston rod, and the reliability of the sealing structure of the outer wall of the piston rod is not damaged, and the installation precision requirement between the piston rod and the sealing sleeve assembly is reduced, i.e., the coaxiality error of the two can be appropriately increased. BRIEF DESCRIPTION OF DRAWINGS

[0048] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments consistent with the application and, together with the description, further serve to explain the principles of the application. In order to more clearly illustrate the technical solutions of the embodiments of the application, the drawings needed to be used in the following embodiment description will be briefly introduced. Obviously, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

[0049] FIG. 1 is a schematic diagram of a semiconductor slot cleaning device cleaning a wafer;

[0050] FIG. 2 is a schematic diagram of a sectional structure of a fast discharge valve structure according to the related art;

[0051] FIG. 3 is a schematic diagram of a sectional structure of FIG. 2;

[0052] FIG. 4 is a schematic diagram of a discharge time adjustment of the fast discharge valve structure of FIG. 2;

[0053] FIG. 5 is a schematic diagram of a cleaning device according to an embodiment of the application;

[0054] FIG. 6 is a schematic diagram of a valve pipe connection state according to an embodiment of the application;

[0055] FIGS. 7-10 are schematic diagrams of a fast discharge valve structure in different motion states according to an embodiment of the application;

[0056] FIG. 11 is a schematic diagram of a sectional structure of a fast discharge valve structure according to an embodiment of the application;

[0057] FIG. 12 is a schematic diagram of a piston rod connection structure according to an embodiment of the application;

[0058] FIG. 13 is a schematic diagram of a cylinder body (including a first flange) according to an embodiment of the application;

[0059] FIG. 14 is an enlarged schematic diagram of portion E in FIG. 8;

[0060] FIGS. 15a-15d are schematic diagrams of a valve pipe body according to an embodiment of the application;

[0061] FIG. 16 is a schematic diagram of a sealing plug according to an embodiment of the application;

[0062] FIG. 17 is a schematic diagram of FIG. 16 in direction A;

[0063] FIG. 18 is a schematic diagram of a valve pipe and valve core assembly in direction A;

[0064] FIG. 19 is a schematic diagram of a sealing plug according to an embodiment of the application;

[0065] FIG. 20a and FIG. 20b are structural schematic diagrams of another valve pipe body according to an embodiment of the present application.

[0066] The implementation, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. The above-mentioned drawings have shown the specific embodiments of the present application, and will be described in more detail hereinafter. These drawings and the following description are not intended to limit the scope of the present application in any way, but to explain the present application to those skilled in the art by referring to the specific embodiments. DETAILED DESCRIPTION

[0067] The exemplary embodiments will be described in detail herein with reference to the accompanying drawings. In the following description, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments are not meant to represent all implementations consistent with the present application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of the present application as detailed in the appended claims.

[0068] It should be noted that, in this document, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by an "including a" does not exclude the existence of additional identical elements in the process, method, article, or apparatus that includes the element. Furthermore, components, features, elements with the same name in different embodiments of the present application can have the same meaning or different meanings, and the specific meaning thereof should be determined in the light of its explanation in the specific embodiment or further in the light of the context in the specific embodiment.

[0069] It will be further understood that the terms "comprises" and / or "comprising," or "includes" and / or "including" when used in this specification, specify the presence of stated features, steps, operations, elements, components, items, and / or groups but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, items, and / or groups thereof. As used herein the term "and / or," "and / or," "one or more of the following," and / or similar phrases, can be interpreted to include one or more of the items in the following list, for example, "A, B, or C" or "A, B, and / or C" means "A; B; C; A and B; A and C; B and C; A, B, and C." The exception to this definition is that the combination of elements, functions, steps, or operations in some way are inherently mutually exclusive.

[0070] It should be understood that, although the terms first, second, third, etc. can be employed in this text to describe various information, these information should not be limited to these terms. These terms are only used to distinguish one piece of information from another piece of information. For example, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as the first information, without departing from the scope of this text. Depending on the context, the singular form "a", "an" and "the" used in this text are intended to include the plural form as well, unless the context indicates the contrary.

[0071] It should be understood that the terms "top", "bottom", "upper", "lower", "vertical", "horizontal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on this application.

[0072] For the convenience of description, in the following embodiments, the orthogonal space formed by the horizontal plane and the vertical direction is taken as an example for description, and this precondition should not be understood as a limitation on this application.

[0073] Please refer to Fig. 2 and Fig. 3, Fig. 2 is a perspective view of a quick drain valve structure of the related art, and Fig. 3 is a sectional view of Fig. 2. The quick drain valve structure comprises a valve pipe 10b, a cylinder 20b and a valve core assembly 30b. The side wall of the valve pipe 10b is provided with a drain port 11b. The cylinder 20b is arranged at one end of the valve pipe 10b. The other end of the valve pipe 10b is connected to a cleaning tank through a flange 12b. The valve core assembly 30b comprises a sealing sleeve 31b and a piston rod 32b. The sealing sleeve 31b is composed of a first section with a small outer diameter and a second section with a large outer diameter. The connection between the two sections forms a step 33b. One end of the piston rod 32b is located in the cylinder 20b, which divides the internal space of the cylinder 20b into two air chambers 21b and 22b. The other end of the piston rod 32b is threadedly connected to the sealing sleeve 31b. The cylinder 20b is provided with gas passages h1 and h2 corresponding to the two air chambers 21b and 22b respectively. The gas pressure of the air chambers 21b and 22b is adjusted to control the piston rod 32b to drive the sealing sleeve 31b to move reciprocally.

[0074] Specifically, the slow drain passage h3 is formed between the first section of the sealing sleeve 31b and the inner wall of the flange 12b. When the valve core assembly 30b moves towards the flange 12b, the step 33b can completely block the slow drain passage h3. When the valve core assembly 30b moves away from the flange 12b, the cleaning liquid can flow through the slow drain passage h3 and be drained from the drain port 11b, forming a slow drain. When the valve core assembly 30b moves away from the flange 12b and the end face of the sealing sleeve 31b is separated from and staggered with the end face of the flange 12b, the cleaning liquid is directly drained from the drain port 11b, forming a quick drain. Assuming that the length of the first section of the sealing sleeve 31b is Lb, the slow drain time Tb (Tb = Lb / Vb) can be controlled by controlling the moving speed Vb of the valve core assembly 30b. Please refer to Fig. 4, which is a drain time adjustment diagram of the quick drain valve structure.

[0075] Although the above-mentioned quick drain valve structure can adjust the drain time of the slow drain stage for different working conditions, the sealing sleeve 31b has a radial force due to the inconsistent forces in the up-down direction during the opening and closing processes of the valve core assembly 30b because of the gravity of water. Since the sealing sleeve 31b is threadedly connected to the piston rod 32b and the movement of the sealing sleeve 31b relies on the guidance of the piston rod 32b, the sealing ring of the piston rod 32b is prone to sealing failure under the long-term radial force. Based on this, the application provides a quick drain valve structure and a cleaning device.

[0076] First, the application environment of the quick drain valve structure is introduced. Please refer to FIG. 5, which is a structural schematic diagram of a cleaning device provided by an embodiment of the present application. The cleaning device can include a quick drain valve structure 100 and a cleaning tank 200. A plurality of wafers to be cleaned 102 can be vertically placed in the cleaning tank 200. The sidewall of the cleaning tank 200 is provided with a drain pipe 210. The quick drain valve structure 100 is connected with the drain pipe 210 to control the discharge time of the cleaning liquid after the cleaning is completed. The quick drain valve structure 100 of each embodiment of the present application can be applied to the cleaning device. The quick drain valve structure 100 of the present application is described in detail below with specific embodiments.

[0077] Please refer to FIGS. 5-11. FIG. 6 is a structural schematic diagram of a valve pipe connection state provided by an embodiment of the present application. FIGS. 7-10 are structural schematic diagrams of a quick drain valve structure in different motion states provided by an embodiment of the present application. FIG. 11 is a cross-sectional structural schematic diagram of a quick drain valve structure provided by an embodiment of the present application. The quick drain valve structure can include a valve pipe 10, a cylinder 20, and a valve core assembly 30.

[0078] The valve pipe 10 includes a first end 10c and a second end 10d arranged oppositely. The first end 10c is used to be connected with the cleaning tank 200. The valve pipe 10 is provided with at least one drain port 101. The specific shape and size of the drain port 101 are not particularly limited. For example, three drain ports 101 can be uniformly arranged along the circumferential direction of the valve pipe 10 as shown in FIG. 6. The drain port 101 can be rectangular, circular, trapezoidal, or the like. The cylinder 20 is sleeved in the valve pipe 10 and connected with the second end 10d of the valve pipe 10.

[0079] The valve core assembly 30 comprises a sealing sleeve assembly 31 and a piston rod 32. The sealing sleeve assembly 31 is sleeved in the valve tube 10 and forms a power sealing surface with the inner wall of the valve tube 10, i.e., the surface opposite to the sealing sleeve assembly 31 and the inner wall of the valve tube 10 are sealing surfaces and can slide relative to each other. The cooperation between the sealing sleeve assembly 31 and the power sealing surface of the valve tube 10 can guide the movement of the sealing sleeve assembly 31. A liquid discharge groove 301 is arranged between the sealing sleeve assembly 31 and the power sealing surface of the valve tube 10 near the first end 10c. The specific structure of the liquid discharge groove 301 is not particularly limited in the embodiment. For example, the sealing sleeve assembly 31 can have the structure of the sealing sleeve 31b in FIG. 3. The sealing sleeve assembly 31 can comprise a first section with a smaller outer diameter and a second section with a larger outer diameter. The second section is near the second end 10d and forms the power sealing surface with the surface opposite to the sealing sleeve assembly 31. The first section is near the first end 10c and forms the liquid discharge groove 301 with the annular gap between the surface opposite to the sealing sleeve assembly 31 and the inner wall of the valve tube 10. One end of the sealing sleeve assembly 31 near the second end 10d is movably sleeved outside the air cylinder 20. In some embodiments, a gap 302 is arranged between the inner periphery of the sealing sleeve assembly 31 and the outer periphery of the air cylinder 20 to ensure that the two do not contact and rub when moving relative to each other.

[0080] One end of the piston rod 32 is arranged in the air cylinder 20 and the other end extends from the inside of the air cylinder 20 and is movably connected with the sealing sleeve assembly 31 along the radial direction of the piston rod 32 to drive the sealing sleeve assembly 31 to move along the axial direction of the piston rod 32. For example, the piston rod 32 and the sealing sleeve assembly 31 are connected in a clearance fit, and the piston rod 32 and the sealing sleeve assembly 31 are limited in the direction parallel to the axial direction of the piston rod 32, so that the sealing sleeve assembly 31 can be driven to move along the axial direction of the piston rod 32 while avoiding the application of stress along the radial direction of the piston rod 32 to the piston rod 32 when the sealing sleeve assembly 31 is deformed in the radial direction of the piston rod 32, which can damage the reliability of the sealing structure of the outer wall of the piston rod 32.

[0081] The sealing sleeve assembly 31 has a first limit position Pmin close to the first end 10c and a second limit position Pmax close to the second end 10d, and the distance between the first limit position Pmin and the second limit position Pmax is the movement stroke L of the valve core assembly 30. Please refer to FIGS. 7-10, which show the whole process of the movement of the sealing sleeve assembly 31 from the first limit position Pmin to the second limit position Pmax, wherein the second limit position Pmax in FIG. 10 is only for illustration, and in actual application, the second limit position Pmax can be offset to the left side of the second limit position Pmax in FIG. 10 by a small distance, so as to control the sealing sleeve assembly 31 to continue to move to the left side by a small distance on the basis of the second limit position Pmax in FIG. 10 in actual application.

[0082] When the sealing sleeve assembly 31 is located at the first limit position Pmin, the first end 10c is blocked (which can be used for the cleaning stage), please refer to FIG. 7; when the sealing sleeve assembly 31 is away from the first limit position Pmin, the drainage groove 301 is in communication with the drainage port 101, please refer to FIGS. 8 and 9, when the sealing sleeve assembly 31 moves from the first limit position Pmin to the critical position shown in FIG. 9 (i.e., the sealing sleeve assembly 31 just blocks the drainage port 101), the liquid medicine can only flow through the drainage groove 301 first, and then be discharged through the drainage port 101, which belongs to the slow drainage stage. When the sealing sleeve assembly 31 is away from the critical position, the sealing sleeve assembly 31 avoids part of the drainage port 101, at this time, the liquid medicine can be directly discharged from the drainage port 101, entering the fast drainage stage; when the sealing sleeve assembly 31 is located at the second limit position Pmax, at least part of the drainage port 101 is avoided, i.e., the outer periphery of the sealing sleeve assembly 31 shields part of the drainage port 101 or does not shield the drainage port 101, please refer to FIG. 10, the end face of the sealing sleeve assembly 31 towards the first end 10c of the valve pipe 10 is exposed in the drainage port 101, and the liquid medicine can be directly discharged from the drainage port 101, and the discharge speed rapidly increases, corresponding to the fast drainage stage. It can be understood that the second limit position Pmax can be designed as follows: when the sealing sleeve assembly 31 is located at the second limit position Pmax, the drainage port 101 is completely avoided, and the drainage speed can reach the maximum, which can be designed according to the needs. The liquid discharge time adjustment diagram of the fast drainage valve structure of the embodiment can refer to FIG. 4, and it needs to be noted that from the process of just opening to completely opening the drainage port 101, the drainage speed is a continuous and rapid increase process, but the corresponding time is very short, so the “pulse shape” curve in FIG. 4 does not reflect this process.

[0083] The fast discharge valve structure of the embodiment can adjust the discharge time of the slow discharge stage by controlling the moving speed of the valve core assembly 30 in the moving stroke L, when the valve core assembly 30 moves from the first limit position Pmin to the intermediate critical position (see FIG. 9) corresponding to the slow discharge stage, and continues to move from the intermediate critical position to the second limit position Pmax corresponding to the fast discharge stage. In addition, in the embodiment, the piston rod 32 and the sealing sleeve assembly 31 are movably connected in the radial direction of the piston rod 32, so that the sealing sleeve assembly 31 can avoid exerting radial stress on the piston rod 32 when it is deformed under stress in the radial direction of the piston rod 32, which can damage the reliability of the sealing structure of the outer wall of the piston rod 32, and can also reduce the installation precision requirement between the piston rod 32 and the sealing sleeve assembly 31, that is, the coaxiality error between the two can be appropriately increased.

[0084] As an example of the movably connected piston rod 32 and the sealing sleeve assembly 31 in the radial direction of the piston rod 32, please refer to FIGS. 8, 9 and 11. The sealing sleeve assembly 31 can include a sealing plug 311, a support bowl 312 and a locking member 313. The sealing plug 311 is sleeved in the valve tube 10 and forms the aforementioned power sealing surface with the inner wall of the valve tube 10; one end of the sealing plug 311 towards the second end 10d is provided with an axially extending blind hole 303. The support bowl 312 is sleeved on the outside of the cylinder 20 towards the second end 10d, and in some embodiments, a gap 302 is provided between the inner periphery of the support bowl 312 and the outer periphery of the cylinder 20 to ensure that the two do not produce contact friction when moving relative to each other. The support bowl 312 is also sleeved in the blind hole 303; the bottom of the support bowl 312 is provided with a stepped hole 304, which includes a first hole segment 3041 with a larger diameter towards the first end 10c and a second hole segment 3042 with a smaller diameter towards the second end 10d; the locking member 313 is gap-fitted in the stepped hole 304 in the radial direction of the piston rod 32, the other end of the piston rod 32 is gap-fitted through the second hole segment 3042 in the radial direction of the piston rod 32 and connected with the locking member 313, and the locking member 313 is limited in cooperation with the step of the stepped hole 304 and the sealing plug 311 in the direction parallel to the axial direction of the piston rod 32, so as to realize the movement of the piston rod 32 along the axial direction of the piston rod 32. Since the locking member 313 is gap-fitted in the stepped hole 304 in the radial direction of the piston rod 32 and can move in the radial direction of the piston rod 32, the piston rod 32 can also move in the radial direction of the piston rod 32 along with the locking member 313.

[0085] The sealing plug 311 and the support bowl 312 can be connected through a threaded structure. As an example, please continue to refer to FIG. 8, the contact surface between the sealing plug 311 and the support bowl 312 is a stepped surface, which can include two sections, three sections, or multiple sections. In FIG. 8, the contact surface is a stepped structure composed of three stepped surfaces, and the threaded structure 315 is arranged on the middle stepped surface among the three stepped surfaces, so as to reduce the assembly difficulty while ensuring the stability of the assembly. As some examples, the support bowl 312 can be a polymer material such as PP, PVC, PVDF, etc., which has high rigidity, good temperature resistance and corrosion resistance, and is embedded in the sealing plug 311 to provide rigid support for the sealing sleeve assembly 31; the sealing plug 311 can be made of PTFE material, which can provide high purity and chemical stability, and will not cause corrosion, wear and other problems when in contact with chemical liquid medium, nor will it contaminate the liquid.

[0086] It should be noted that the connection mode of the locking member 313 and the piston rod 32 can be various, such as the shaft hole fitting structure between the two, for example, a through hole extending in the radial direction of the piston rod 32 can be arranged on the end of the piston rod 32 facing the first end 10c, and the locking member 313 is a pin matched with the through hole. In other embodiments, the end of the piston rod 32 facing the first end 10c can be provided with external threads, and the locking member 313 can be a component with internal threads such as a nut or a cap. The internal threads of the component are matched with the external threads of the end of the piston rod 32 facing the first end 10c. On this basis, the component can also be arranged in a convex shape and gap-fitted with the first hole section 3041 and the second hole section 3042 of the stepped hole 304 in the radial direction of the piston rod 32, as shown in FIG. 12.

[0087] In this embodiment, the piston rod 32 is connected with the sealing sleeve assembly 31 through the locking member 313, and is gap-fitted with the sealing sleeve assembly 31 in the radial direction of the piston rod 32, so as to avoid the piston rod 32 from being subjected to radial stress when the sealing sleeve assembly 31 is deformed by radial force, and to avoid damaging the reliability of the sealing structure of the outer wall of the piston rod 32.

[0088] In one embodiment, referring to FIG. 9, FIG. 11 and FIG. 13, which is a structural schematic diagram of a cylinder body according to an embodiment of the present application, a detailed structural scheme of the cylinder driving the piston rod is provided. In this embodiment, the piston rod 32 is arranged in the cylinder 20 to divide the internal space of the cylinder 20 into a first gas cavity 305 and a second gas cavity 306; the sealing sleeve assembly 31 and the cylinder 20 and the valve tube 10 together enclose a third gas cavity 307; the cylinder 20 is provided with a first gas passage 201 communicating with the first gas cavity 305, a second gas passage 202 communicating with the second gas cavity 306, and a breathing hole 203 communicating with the third gas cavity 307. The first gas passage 201 and the second gas passage 202 are used to connect external gas pressure control devices, and the breathing hole 203 communicates the third gas cavity 307 with the external atmosphere.

[0089] In operation, taking FIG. 9 as an example, when the first gas passage 201 is ventilated and the second gas passage 202 is exhausted, the piston rod 32 drives the sealing sleeve assembly 31 to move to the right, and vice versa, when the first gas passage 201 is exhausted and the second gas passage 202 is ventilated. During the movement, the volume of the third gas cavity 307 increases or decreases, and the breathing hole 203 communicates the third gas cavity 307 with the external atmosphere, thereby balancing the internal and external gas pressures of the third gas cavity 307. In this embodiment, the breathing hole 203 is away from the drug liquid discharge passage, which can prevent the drug liquid from entering the third gas cavity 307 through the breathing hole 203.

[0090] As an example, referring to FIG. 7, FIG. 10 and FIG. 13, the cylinder 20 can include a cylinder body 21, an end cover 22 and a first flange 23. The cylinder body 21 is provided with an opening at one end facing the first end 10c, and the end cover 22 covers the opening. The first flange 23 is arranged at one end of the cylinder body 21 away from the opening, and the cylinder body 21 can be connected to the second end 10d of the valve tube 10 through the first flange 23. The piston rod 32 extends from the end cover 22, and a first sealing ring 41 is arranged between the outer periphery of the piston rod 32 and the inner periphery of the end cover 22 to seal the gap therebetween. A second sealing ring 42 is arranged between the inner wall of the cylinder body 21 and the end of the piston rod 32 arranged in the cylinder body 21 to separate the first gas cavity 305 and the second gas cavity 306. In some embodiments, in order to improve the sealing performance, the end face of the end cover 22 facing the second end 10d of the valve tube 10 and the contact surface 51 of the cylinder body 21 are inclined surfaces, and the distance between the inclined surfaces and the axis of the piston rod 32 decreases in the direction approaching the second end 10d of the valve tube 10. Correspondingly, the inner wall of the cylinder body 21 has an inclined surface for abutting the contact surface 51. In some embodiments, a third sealing ring 43 is arranged between the outer periphery of the end cover 22 and the inner periphery of the cylinder body 21 to seal the gap therebetween.

[0091] In one embodiment, referring to FIG. 13 and FIG. 14, which is an enlarged structural schematic diagram of part E in FIG. 8, the first flange 23 is provided with a positioning boss 231 at the end face facing the valve pipe 10, the outer peripheral wall of the positioning boss 231 is limitedly matched with the inner wall of the valve pipe 10, and the cylinder body 21 is connected to the end face of the positioning boss 231 facing the valve pipe 10. In this embodiment, the positioning boss 231 is arranged on the first flange 23 to assemble with the valve pipe 10, so that the coaxiality of the assembly of the two can be ensured.

[0092] In one embodiment, the application further provides a specific embodiment of a valve pipe, referring to FIG. 6, FIG. 7 and FIG. 15a-15d, which are structural schematic diagrams of a valve pipe body provided in the embodiment of the application. The valve pipe 10 can include a valve pipe body 11, a second flange 12 and a sealing ring 13. A drain port 101 is arranged on the valve pipe body 11. The second flange 12 is arranged at the first end 10c of the valve pipe body 11, the inner diameter of the second flange 12 is larger than the inner diameter of the valve pipe body 11, the sealing ring 13 is sleeved in the second flange 12 and abuts against the first end 10c of the valve pipe body 11; and the sealing sleeve assembly 31 abuts against the sealing ring 13 when located at the first limit position Pmin to block the drain groove 301. In application, the flange of the drain pipe 210 can be clamped and fixed between the adapter flange 220 and the second flange 12 to realize the fixed connection of the valve pipe body 11 and the drain pipe 210, so as to realize the connection with the cleaning tank 200. It can be understood that the distance L0 between the drain port 101 and the first end 10c of the valve pipe body 11 corresponds to the stroke in the slow drainage stage. As an example, the sealing ring 13 can be made of PTFE or PVDF material to avoid corrosion when contacting with the liquid medicine and to avoid pollution of the liquid medicine. As an example, the adapter flange 220 can be composed of two half rings.

[0093] In the scheme of the related art shown in FIG. 3, the thrust of the valve core assembly 30b directly acts on the flange 12b, and the flange 12b is generally made of PTFE material, which is soft in texture and poor in dimensional stability, and is easy to deform to cause overall failure. In the embodiment of the application, the sealing ring 13 only bears the extrusion force of the valve core assembly 30, and the thrust of the valve core assembly 30 is finally transmitted to the valve pipe 10, and the valve pipe 10 is made of PVC, PP, PVDF or other materials which are relatively better in rigidity than PTFE, so that the dimensional stability of this embodiment is better.

[0094] In some embodiments, referring to FIG. 10, in order to enhance the sealing of the joint, the abutting surface 52 of the sealing sleeve assembly 31 and the sealing ring 13 abutting with each other is a bevel. Specifically, the inner peripheral edge region of the end surface of the sealing ring 13 towards the valve pipe body 11 is a bevel, which is located inside the end surface of the first end 10c of the valve pipe body 11, and the distance between the bevel and the axis of the sealing ring 13 decreases in the direction away from the first end 10c of the valve pipe body 11; the outer peripheral edge region of the end surface of the sealing sleeve assembly 31 towards the sealing ring 13 is a bevel, which is in close contact with the bevel of the sealing ring 13 when the sealing sleeve assembly 31 is in the first limit position Pmin.

[0095] In some embodiments, the sealing ring 13 is provided with a fourth sealing ring 44 away from the valve pipe body 11. Further, the fifth sealing ring 45 is provided between the sealing sleeve assembly 31 and the inner wall of the valve pipe 10, and the fifth sealing ring 45 is close to the second end 10d. The fifth sealing ring 45 can be one or more than one, and the fifth sealing ring 45 can block the drug liquid from entering the third air cavity 307 through the gap between the dynamic sealing surface and the inner wall of the valve pipe 10, and entering the internal through the gap 302 between the sealing sleeve assembly 31 and the air cylinder 20 to corrode the first sealing ring 41, damage the sealing of the air cylinder 20, and affect the size of the air cylinder 20 due to high-temperature drug liquid.

[0096] In the embodiments of the present application, the drain groove 301 can be a groove provided on the surface opposite to the inner wall of the valve pipe 10 of the sealing sleeve assembly 31, and the groove extends in the axial direction from the end surface of the sealing sleeve assembly 31 close to the first end 10c. Of course, the drain groove 301 can also be a groove provided on the inner wall of the valve pipe 10.

[0097] As an example, as described above, the drain groove 301 can be implemented by using the drain groove structure shown in FIG. 3. Specifically, the diameter of the part of the sealing sleeve assembly 31 close to the first end 10c is smaller than the diameter of the part of the sealing sleeve assembly 31 close to the second end 10d, that is, the sealing sleeve assembly 31 is in the stepped shaft structure. The annular gap between the part of the sealing sleeve assembly 31 close to the first end 10c and the inner wall of the valve pipe 10 constitutes the drain groove 301 (i.e., the above-mentioned groove, which is an annular groove), and the part of the sealing sleeve assembly 31 close to the second end 10d and the inner wall of the valve pipe 10 form the above-mentioned dynamic sealing surface, respectively.

[0098] As a preferred example of an implementation of the drain groove, please refer to FIGS. 16-18. FIG. 16 is a structural schematic diagram of a sealing plug provided by an embodiment of the present application, FIG. 17 is a schematic diagram of FIG. 16 in the direction of A, and FIG. 18 is a schematic diagram of the valve tube and the valve core assembly 30 after assembly. FIG. 19 is a structural schematic diagram of a sealing plug provided by an embodiment of the present application. The drain groove 301 is a groove provided on the surface of the sealing sleeve assembly 31 opposite the inner wall of the valve tube 10. The groove extends along the axial direction of the piston rod 32 from the end face of the sealing sleeve assembly 31 close to the first end 10c. On this basis, the groove is discontinuous in the circumferential direction of the sealing sleeve assembly 31, that is, the diameter of the sealing sleeve assembly 31 at each position in the direction parallel to the axial direction of the piston rod 32 remains unchanged, and only a local position on the surface of the sealing sleeve assembly 31 opposite the inner wall of the valve tube 10 forms the drain groove 301 (a non-continuous groove in the circumferential direction). In this way, the cooperation between the sealing sleeve assembly 31 and the valve tube 10 can be more stable. In this case, the drain groove 301 can be provided with one or more, and when multiple are provided, they can be uniformly distributed along the circumferential direction of the sealing sleeve assembly 31. The surface of the sealing sleeve assembly 31 can also be provided with a number of annular grooves 314 for setting a corresponding number of fifth sealing rings 45. The radial cross section (perpendicular to the axial direction of the piston rod 32) of the drain groove 301 can be a circular arc shape as shown in FIG. 17, or a rectangular shape as shown in FIG. 19, or other regular or irregular shapes.

[0099] Compared with the structure shown in FIG. 3, the drain groove 301 of the present embodiment can have a longer slow drainage stage stroke. Moreover, the structure shown in FIG. 3 is achieved by changing the diameter (i.e., a stepped shaft), and the present embodiment has no annular gap and no step, so the assembly and movement of the overall structure are more stable. As an example, the sum of the radial cross-sectional areas of all drain grooves 301 is between 100 and 300 square millimeters, which can meet the slow drainage requirements of various working conditions.

[0100] As another example of the implementation of the drain groove, please refer to FIG. 20a and FIG. 20b, which are structural schematic diagrams of another valve tube body provided by the embodiments of the present application. The inner diameter d1 of the portion of the valve tube 10 close to the first end 10c is greater than the inner diameter d2 of the portion of the valve tube 10 close to the second end 10d. The annular gap between the portion of the valve tube 10 with the greater inner diameter (i.e., the portion of the valve tube 10 close to the first end 10c) and the sealing sleeve assembly 31 constitutes the drain groove 301. The inner wall of the portion of the valve tube 10 with the smaller diameter (i.e., the portion of the valve tube 10 close to the second end 10d) and the surface of the sealing sleeve assembly 31 opposite to the inner wall of the valve tube 10 form the power sealing surface described above, respectively. In the embodiments, the outer diameter of the sealing sleeve assembly 31 can be set to be uniform. By setting the inner diameter of the valve tube 10 to be a stepped hole structure with one end larger and one end smaller (d1>d2), the sealing sleeve assembly 31 is sleeved in the valve tube 10, and an annular gap is formed between the inner wall of the portion of the valve tube 10 with the greater inner diameter and the sealing sleeve assembly 31, which constitutes the drain groove 301.

[0101] The above describes in detail the structure of the quick-drain valve and the cleaning device provided by the embodiments of the present application. The principles and implementation manners of the embodiments of the present application are described by using specific examples. It should be noted that the descriptions of the various embodiments in the present application are each focused on a certain aspect. The parts not described or recorded in detail in a certain embodiment can be referred to the relevant descriptions of other embodiments.

[0102] The above is only the preferred embodiments of the present application, and does not limit the patent scope of the present application. The technical features of the technical solutions of the present application can be combined in any manner. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described. Any equivalent structure or equivalent flow conversion based on the content of the present application and the drawings, or direct or indirect application in other related technical fields, as long as the combination of the technical features does not exist contradictions, are also included in the patent protection scope of the present application.

Claims

1. A quick exhaust valve structure characterized by, include: A valve tube, comprising a first end and a second end oppositely disposed, wherein the first end is used to connect to the cleaning tank, and the valve tube is provided with at least one drain port; a cylinder, sleeved in the valve tube and connected to the second end; A valve core assembly, including a sealing sleeve assembly and a piston rod; The sealing sleeve assembly is sleeved in the valve tube and forms a dynamic sealing surface with the inner wall of the valve tube that is sealed and slidable relative to each other, and a drainage groove is provided between the sealing sleeve assembly and the dynamic sealing surface of the valve tube at a portion near the first end; the sealing sleeve assembly is movably sleeved on the outer side of the cylinder at one end facing the second end; One end of the piston rod is disposed in the cylinder, and the other end extends from the interior of the cylinder and is movably connected to the sealing sleeve assembly along the radial direction of the piston rod, for driving the sealing sleeve assembly to move along the axial direction of the piston rod; The sealing sleeve assembly has a first extreme position close to the first end and a second extreme position close to the second end. When the sealing sleeve assembly is at the first extreme position, it blocks the first end. When the sealing sleeve assembly is away from the first extreme position, the drainage groove is connected to the drainage port. When the sealing sleeve assembly is at the second extreme position, it avoids at least part of the drainage port.

2. The quick dump valve structure according to claim 1, characterized by, The sealing sleeve assembly comprises: a sealing plug, which is sleeved in the valve tube and forms the dynamic sealing surface; an end of the sealing plug facing the second end is provided with a blind hole extending along the axial direction of the piston rod; A support bowl, one end of which faces the second end and is sleeved on the outside of the cylinder, and the support bowl is also sleeved in the blind hole; a stepped hole is provided on the bottom of the support bowl, and the stepped hole includes a first hole section with a larger diameter facing the first end and a second hole section with a smaller diameter facing the second end; A locking piece is arranged in the stepped hole with a clearance fit in the radial direction of the piston rod, and the other end of the piston rod passes through the second hole section with a clearance fit in the radial direction of the piston rod and is connected to the locking piece, and the locking piece is respectively fitted with the step of the stepped hole and the sealing plug in a direction parallel to the axial direction of the piston rod for upper limit positioning.

3. The quick dump valve structure according to claim 1, characterized by, One end of the piston rod is arranged in the cylinder to divide the internal space of the cylinder into a first air cavity and a second air cavity; The end surface of the sealing sleeve assembly facing the second end, the cylinder and the valve pipe form a third air cavity; The cylinder is provided with a first gas channel communicating with the first gas cavity, a second gas channel communicating with the second gas cavity, and a breathing hole communicating with the third gas cavity; The first gas channel and the second gas channel are used to connect to an external air pressure control device, and the breathing hole connects the third air cavity to the external atmospheric environment.

4. The quick dump valve structure according to claim 3, characterized by The cylinder comprises: a cylinder body, having an opening at one end thereof facing the first end; a first flange, disposed at an end of the cylinder body away from the opening; an end cap, sealing the opening; The piston rod extends from the end cover, and a first sealing ring is arranged between the outer periphery of the piston rod and the inner periphery of the end cover, and a second sealing ring is arranged between one end of the piston rod arranged in the cylinder body and the inner wall of the cylinder body to separate the first gas cavity and the second gas cavity.

5. The quick dump valve structure according to claim 4, characterized by The contact surface of the end face of the end cover towards the second end and the cylinder body is a bevel, and the distance between the bevel and the axis of the piston rod decreases along the direction close to the second end; and / or, A third sealing ring is arranged between the outer periphery of the end cover and the inner periphery of the cylinder body.

6. The quick dump valve structure according to claim 4, characterized by The end face of the first flange towards the valve pipe is provided with a positioning boss, and the outer peripheral wall of the positioning boss cooperates with the inner wall of the valve pipe; The cylinder body is connected to the end face of the positioning boss towards the valve pipe.

7. The quick dump valve structure of claim 1, wherein The valve pipe comprises: a valve pipe body; a second flange arranged at the first end of the valve pipe body, and the inner diameter of the second flange is greater than the inner diameter of the valve pipe body; a sealing ring sleeved in the second flange and abutting against the first end of the valve pipe body; When the sealing sleeve assembly is located at the first limit position, the sealing sleeve assembly abuts against the sealing ring to block the drain groove.

8. The quick dump valve structure of claim 7, wherein The abutting surfaces of the sealing sleeve assembly and the sealing ring are bevels.

9. The quick dump valve structure of claim 7, wherein One side of the sealing ring away from the valve pipe body is provided with a fourth sealing ring.

10. The quick dump valve structure of claim 1, wherein A fifth sealing ring is arranged between the sealing sleeve assembly and the inner wall of the valve pipe, and the fifth sealing ring is arranged close to the second end.

11. The quick dump valve structure of claim 1, wherein The drain groove is a groove arranged on the surface opposite to the inner wall of the valve pipe of the sealing sleeve assembly, and the groove extends along the axial direction of the piston rod from the end face of the sealing sleeve assembly close to the first end.

12. The quick dump valve structure of claim 11, wherein, The groove is discontinuous in the circumferential direction of the sealing sleeve assembly.

13. The quick dump valve structure of claim 11, wherein, The diameter of the part of the sealing sleeve assembly close to the first end is smaller than the diameter of the part of the sealing sleeve assembly close to the second end, and the annular gap between the part of the sealing sleeve assembly close to the first end and the inner wall of the valve pipe constitutes the drain groove. The part of the sealing sleeve assembly close to the second end and the inner wall of the valve pipe form the power sealing surface, respectively.

14. The quick dump valve structure of claim 1, wherein The inner diameter of the part of the valve pipe close to the first end is greater than the inner diameter of the part of the valve pipe close to the second end, and the annular gap between the part of the valve pipe close to the first end and the sealing sleeve assembly constitutes the drain groove. The inner wall of the part of the valve pipe close to the second end and the surface of the sealing sleeve assembly opposite to the inner wall of the valve pipe form the power sealing surface, respectively.

15. A cleaning apparatus, characterized by The quick drain valve structure comprises a washing tank and the quick drain valve structure of any one of claims 1-14; The side wall of the washing tank is provided with a drain pipe, and the quick drain valve structure is connected with the drain pipe.

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