Pneumatic system for industrial automation and method for operating a pneumatic system

Abstract

The invention relates to a pneumatic system (1) for industrial automation, comprising: a position controller device (2), at least one pressure controller device (3) and at least one pneumatic actuator (4), wherein the position controller device (2) is designed to control the position of the pneumatic actuator (4) and, within the scope of the position control, to output a target pressure signal to the pressure controller device (3), and wherein the pressure controller device (3) is designed to control pressure on the basis of the target pressure signal and, within the scope of the pressure control, to actuate the pneumatic actuator (4). Furthermore, the invention also relates to a method for operating a pneumatic system.

Description

[0001] Festo SE & Co. KG, Ruiter Straße 82, 73734 Esslingen

[0002] Pneumatic system for industrial automation and methods for operating a pneumatic system

[0003] The invention relates to a pneumatic system for industrial automation and a method for operating a pneumatic system.

[0004] Pneumatic systems for industrial automation are now used in many areas. In particular, pneumatic systems are used in wafer processing plants, where the slide valves, operated by pneumatic actuators, serve primarily to open or close the processing chamber opening for wafers, through which a wafer can be inserted. The pneumatic actuators of the system can also be used to drive a positioning structure for the wafers within the processing chamber.

[0005] The purpose of the present invention is to provide an improved pneumatic system.

[0006] The above problem is solved by a pneumatic system for industrial automation, comprising: a position controller device, at least one pressure controller device and at least one pneumatic actuator, wherein the position controller device is configured to perform position control of the pneumatic actuator and, within the scope of position control, to output a setpoint pressure signal to the pressure controller device, and wherein the pressure controller device is configured to perform pressure control based on the setpoint pressure signal and, within the scope of pressure control, to actuate the pneumatic actuator.

[0007] The pressure control is expediently subordinate to the position control. The position control can, for example, proceed as follows: The position controller receives a target position signal, then determines the corresponding target pressure signal and outputs it to the pressure controller. The target pressure signal corresponding to the target position signal is determined, for example, from a table of values ​​stored in the position controller's memory. The pressure controller then regulates the pressure to the target pressure corresponding to the target pressure signal and supplies this pressure to the pneumatic actuator. The actual pressure used for control, i.e., the pressure resulting from the actuation of the pneumatic actuator, is measured by pressure sensors and provided to the pressure controller as the actual pressure signal.The position signal corresponding to the position of the pneumatic actuator is provided to the position controller device as the actual position value.

[0008] By using two different devices for control – namely the position controller and the pressure controller – a more flexible system arrangement is possible. Furthermore, the system can be configured, upgraded, and / or maintained more flexibly. In particular, the position controller and the pressure controller can each be replaced individually without having to replace the other device. A proportional valve, especially a piezoelectric proportional valve, is preferably used in the pressure controller to provide the required control accuracy. Advantageous further developments of the invention are the subject of the dependent claims.

[0009] Preferably, the at least one pneumatic actuator is a single- or double-acting pneumatic cylinder.

[0010] Preferably, the pneumatic system further comprises a slide valve, wherein the slide valve has a valve element and an opening for the passage of a wafer that can be closed by the valve element, and wherein the pneumatic actuator serves to actuate the slide valve.

[0011] If the pneumatic system is exemplified as a wafer processing cell with a processing chamber, the slide valve can be used to close a processing chamber opening. The processing chamber, in which a pressure below atmospheric pressure, in particular a vacuum, prevails, can have an essentially rectangular basic shape and extend in a vertical direction (also called the y-direction), in a transverse direction perpendicular to the vertical direction (also called the x-direction), and in a horizontal direction (also called the z-direction), which is oriented perpendicular to both the vertical and transverse directions. The vertical, transverse, and horizontal directions can also be referred to as spatial directions. The processing chamber can also have other basic shapes.

[0012] A slide valve is defined as a device that has a closing element (hereinafter also referred to as a valve member) and an opening that can be closed by the closing element. The slide valve can have a valve housing in which an opening is formed in a first valve housing wall and a further opening in a second valve housing wall for the passage of a wafer. The opening in the first valve housing wall can be closed by a valve member that is movable relative to the valve housing. The opening and the further opening are preferably configured to correspond, such that the extent of the further opening corresponds in both the vertical and transverse directions to the extent of the opening in both directions. The respective extent is selected such that the wafer can pass through both the opening and the further opening.Additionally, the further opening is arranged parallel to the opening, allowing a wafer to be transported from and / or into the processing chamber. In a deactivated position, the opening in the first valve housing wall of the slide valve is not closed by the valve element, while in an activated position, the opening in the first valve housing wall of the slide valve is closed by the valve element. Accordingly, in this context, the deactivated position can also be referred to as the closed position of the valve element and the activated position as the open position of the valve element.

[0013] The valve housing of the slide valve can also consist of only the first valve housing wall with an opening formed therein, which can be closed by the valve element movable relative to the valve housing. The valve element can preferably be movably guided by means of a guide unit formed on the valve housing.

[0014] To ensure the tightest possible closure of the opening, the valve element can have a circumferential, in particular rubber-elastic, sealing element on its side facing the opening.

[0015] Preferably, the pneumatic system further comprises a wafer support for placing a wafer, a positioning structure which can be moved by the pneumatic actuator relative to the wafer support in order to position a wafer relative to the wafer support, in particular to lift a wafer lying on the wafer support from the wafer support and / or to lower a wafer onto the wafer support.

[0016] The wafer support is located within the processing area and serves to align the wafer during processing. For example, the wafer may rest on the wafer support during processing, and the support may lock the wafer in place using an electromagnetic field. This prevents the wafer from moving on the support during processing, which would lead to defective processing, particularly during photolithography. The wafer is positioned relative to the support by means of the positioning structure, which is formed, for example, by at least one piston rod, also referred to as a positioning piston rod, of the pneumatic actuator, which in this context can be called a positioning actuator.It is also conceivable that several pneumatic actuators, in particular at least three pneumatic actuators, are used as positioning actuators, and that the positioning structure is formed by the multiple positioning piston rods of the positioning actuators. Alternatively, the positioning structure can be designed separately and set in motion only by at least one pneumatic actuator. In an advantageous further development of the invention, the pressure regulator device is arranged separately from the position regulator device. This separate arrangement improves the flexibility of the pneumatic system.It is possible to arrange the pressure regulator device within an area where the use of electronics is to be minimized, and the position regulator device in a different area where no special requirements are placed on the use of electronics. Such a design is particularly advantageous in wafer processing, since, within a processing area and especially near the wafer being processed, there should be as little electronics as possible whose electric and / or electromagnetic fields could negatively affect the processing.

[0017] Preferably, the pressure regulator device has a pressure regulator device outer housing, and the position regulator device has a position regulator device outer housing separate from the pressure regulator device outer housing. This has the advantage that the position regulator device and the pressure regulator device can be designed as separate modules, with each of the position regulator device outer housings preferably containing all the components required for the operation of the position regulator device and the pressure regulator device.

[0018] Preferably, an internal pressure signal, resulting from the pneumatic actuation of the actuator, is fed to the pressure regulator device and not to the position controller device. Accordingly, pressure control preferably takes place exclusively within the pressure regulator device. This allows the pressure control to be tailored to the hardware used in the pressure regulator device, eliminating the need for pressure control to be implemented on the position controller device that would have to be adapted to different pressure regulator devices. Consequently, the pressure regulator device can be easily replaced or substituted with another pressure regulator device using different hardware without requiring any modifications to the position controller device.

[0019] Preferably, the pneumatic system comprises a plurality of pressure regulator devices and a plurality of pneumatic actuators, wherein the position regulator device is configured to perform a respective position control for each pneumatic actuator and, within the scope of the respective position control, to output a respective setpoint pressure signal to a respective pressure regulator device, and wherein each pressure regulator device is configured to perform a respective pressure control based on the respective setpoint pressure signal and, within the scope of the respective pressure control, to actuate a respective pneumatic actuator. These actuators can be a plurality of identical actuators or a combination of different actuators. Similarly, the plurality of pressure regulator devices can be a plurality of identical pressure regulator devices or a combination of different pressure regulator devices.It is particularly advantageous that pressure control is performed exclusively in the respective pressure regulator device, and that the position regulator device performs only position control. "Identical" in this context means that the actuator and / or pressure regulator device can be of the same type, although they may exhibit manufacturing-related variations. A combination of different actuators and / or pressure regulator devices could, for example, consist of different types of actuators and / or pressure regulator devices, or any combination of identical and different types of actuators and / or pressure regulator devices.

[0020] Advantageously, the position controller device has a position controller device outer housing, and each pressure controller device has its own separate pressure controller device outer housing. When using multiple pressure controller devices, each can be arranged in a separate pressure controller device outer housing, which can be positioned separately from the position controller device outer housing and separate from the other pressure controller device outer housings. For example, it is possible to position the pressure controller device associated with a pneumatic actuator as close as possible to it in order to keep the length of the pressure line connecting the pressure controller device to the associated pneumatic actuator as short as possible.

[0021] Preferably, each pressure regulator device is designed as a plate-shaped valve module. The valve module comprises all components necessary for the operation of the pressure regulator device, in particular one or more valve assemblies, preferably a power supply or a connection for a power supply and / or a controller. In such a design, the outer housing of the pressure regulator device is accordingly plate-shaped, which can facilitate the arrangement of the pressure regulator devices within the pneumatic system. For example, the valve module can be arranged on an outer surface of the associated pneumatic actuator. "Plate-shaped" in the sense of the application refers to a substantially cuboid shape whose extension is along one of the spatial directions, i.e.,along the vertical direction, the transverse direction or the latitude direction, is greater than the extent along the remaining spatial directions.

[0022] Preferably, the pressure regulator device has an input for connection to a pressure fluid source to supply the pressure regulator device with pressure fluid, and an output that can be connected to a consumer, in particular a pneumatic actuator. For signal communication, especially to the position controller device, the pressure regulator device has an interface to which, for example, a signal line can be connected. This can preferably be a point-to-point connection. The communication system underlying the signal connection can preferably be a communication system from the OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), bus communication system, or Link group, whereby a power supply can also be provided via the signal connection.

[0023] Preferably, the valve modules are arranged in a row in a specific direction and / or are part of a valve manifold. For example, the plate-shaped valve modules can be arranged such that they each abut each other with the outer surface that has the greatest extent along a spatial direction, wherein the row direction is then a direction oriented perpendicular to this spatial direction.

[0024] Advantageously, the position controller device is implemented as a higher-level controller, in particular a PLC, on which a position controller program is expediently executed to provide the target pressure signal. Such higher-level controllers are already used in pneumatic systems and are thus well-established, so that for use as a position controller device, only the position controller program needs to be implemented. Preferably, the position controller device does not have any components required for a pressure regulator, in particular no valve assembly. The position controller device can have one or more signal inputs via which a target position signal and / or actual position value can be received, as well as one or more signal outputs to be connected to one or more pressure regulator devices, in particular to transmit a target pressure signal.The respective signal connection can be established via a signal line or wirelessly.

[0025] Preferably, the pneumatic system includes the wafer.

[0026] The previously defined task is also solved by a procedure for operating a pneumatic system. The procedure comprises the following steps: Performing, using the position controller, the position control of the pneumatic actuator; outputting, within the framework of position control, a target pressure signal to the pressure controller; performing, with the pressure controller, pressure control based on the target pressure signal; and actuating, within the framework of pressure control, the pneumatic actuator.

[0027] Preferably, the method further comprises the steps: moving the valve element into an open position in which the opening is open, moving the wafer through the opening.

[0028] The invention is explained in more detail below with reference to the accompanying drawing, in which Figure 1 shows a schematic representation of a pneumatic system designed as a wafer processing cell.

[0029] Figure 2 is a schematic representation of the pneumatic system from Figure 1 with a wafer support.

[0030] Figure 3 shows a schematic representation of a pneumatic system designed as a wafer processing system.

[0031] Figure 4 shows a block diagram of a pneumatic system for industrial automation.

[0032] Figure 5 shows a schematic representation of a first embodiment of a slide valve in a deactivated fourth position and in an activated position.

[0033] Figure 6 shows a schematic representation of a second embodiment of a slide valve in a deactivated fourth position, in a partially activated position and in an activated position.

[0034] Figure 7 shows a schematic representation of a third embodiment of a slide valve in a deactivated fourth position, in a partially activated position and in an activated position and

[0035] Figure 8 shows a schematic representation of a fourth embodiment of a slide valve in a deactivated position, in a partially activated position and in an activated position.

[0036] Figures 1 and 2 show a pneumatic system 1 designed as a wafer processing cell with a position controller device 2 in a position controller device outer housing, a plurality of pressure controller devices 3, each exemplified as a plate-shaped valve module, in separate pressure controller device outer housings, a plurality of pneumatic actuators 4, a slide valve 5, and a processing chamber 6. In the illustrated embodiment, the plurality of pressure controller devices 3 are arranged separately from the position controller device 2.

[0037] For illustrative purposes, a plurality of pressure regulator devices 3 and a plurality of pneumatic actuators 4 are present. It is also possible that only one pressure regulator device 3 and / or only one pneumatic actuator 4 is present. For illustrative purposes, the plurality of pressure regulator devices 3 and the plurality of pneumatic actuators 4 serve to actuate the slide valve 5 and to actuate a positioning structure 22. It is also possible that the pressure regulator devices 3 (or a single pressure regulator device 3) and / or the pneumatic actuators 4 (or a single pneumatic actuator 4) serve only to actuate the slide valve 5 or only to actuate the positioning structure 22. In particular, it is not necessary that both the slide valve 5 and the positioning structure 22, as well as the respective associated pressure regulator devices 3 and / or pneumatic actuators 4, are present.

[0038] The processing chamber 6, in which, for example, a pressure below atmospheric pressure prevails, has an essentially rectangular shape and extends in a vertical direction (which can also be called the y-direction), in a transverse direction perpendicular to the vertical direction (which can also be called the x-direction), and in a lateral direction (which can also be called the z-direction) and is oriented perpendicular to both the vertical and transverse directions. The processing chamber 6 has a processing chamber opening 7, which can be closed by means of the slide valve 5 to seal the processing chamber 6 from the environment. The slide valve 5 has a valve body 8 in which an opening 9 and a further opening 10 for the passage of a wafer 11 are formed, and a valve element 12 that is movable relative to the valve body 8.The opening 9 is formed in a first valve housing wall 13, and the further opening 10 is formed in a second valve housing wall 14, wherein the first valve housing wall 13 and the second valve housing wall 14 are spaced apart from each other in the transverse direction. The opening 9 has, by way of example, a substantially rectangular cross-section, its extent in the vertical and transverse directions being selected to allow passage of the wafer 11. The further opening 10 is designed to correspond with the opening 9 such that its extent in the vertical, transverse, and width directions corresponds to the extent of the opening 9 in these directions.Additionally, the further opening 10 is aligned with the opening 9, so that the wafer 11 can pass through the further opening 10 and the opening 9, even if the wafer's extent is greater than the transverse distance between the first valve housing wall 13 and the second valve housing wall 14. The slide valve 5 abuts the processing chamber 6 with the first valve housing wall 13 in such a way that the opening 9 overlaps the processing chamber opening 7, at least partially, to allow the wafer 11 to pass through.

[0039] The opening 9 and / or the second opening 10 may also have a cross-section that deviates from a substantially rectangular one. Furthermore, it is possible that the valve housing 8 only has the first valve housing wall 13, in which the opening 9 is formed and which can be closed by the valve element 10. The valve element 12 is arranged, by way of example, between the first valve housing wall 13 and the second valve housing wall 14 of the valve housing 8. The opening 9 can be closed by the valve element 12. For the tightest possible closure of the opening 9, the valve element 12 has a circumferential, in particular rubber-elastic, sealing element 15 on its side facing the opening 9.

[0040] In the activated position of the slide valve 5 shown, the opening 9 for the passage of the wafer 11 through the valve element 12 is closed. A deactivated position, in this context, refers to a position of the slide valve 5 in which the opening 9 is not closed by the valve element 12, thus allowing the passage of the wafer 11. In the illustrated embodiment, two of the several pneumatic actuators 4, which can also be referred to as the first valve actuator 16 and the second valve actuator 17, are used to actuate the slide valve 5. To enable an initial displacement of the valve element 12 along the vertical direction, the valve element 12 is coupled to a first piston rod 18 of the first valve actuator 16, which is designed as a pneumatic cylinder.A second displacement of the valve element 12 along the transverse direction is enabled by the second valve actuator 17, which, via a second piston rod 19 that moves along the transverse direction, can cause a tilting movement of the first valve actuator 16 about a bearing 20 on which the first valve actuator 16 is rotatably mounted. The second valve actuator 17 additionally provides the pressure force acting on the sealing element 15, which is required to close the opening 9.

[0041] In the processing chamber 6, a wafer support 21 is arranged on which the wafer 11 can be placed for processing. The positioning of the wafer 11 relative to the wafer support 21 is effected by means of a positioning structure 22, which in the illustrated embodiment is formed by three positioning piston rods 23 of the three of the several actuators 4, which can also be referred to as positioning actuators 24. By way of example, the wafer 11 is lowered onto or lifted from the wafer support 21 by the positioning structure 22.

[0042] Position controller 2 is implemented as an example of a higher-level controller on which a position controller program is executed to provide a target pressure signal. Position controller 2 is configured to control the position of several pneumatic actuators 4. For each of the several pneumatic actuators 4, position controller 2 receives or generates a position request in the form of a target position signal, then determines the corresponding target pressure signal and outputs it to the respective pressure controller 3. For this purpose, position controller 2 and the respective pressure controller 3 are interconnected. The communication system underlying this connection is preferably a communication system from the OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), bus communication system, or Link group.

[0043] The target pressure signal corresponding to the position setpoint signal is determined, for example, from a table of values ​​stored in a memory of the position controller device 2. The respective pressure controller device 3 then regulates the pressure to the target pressure corresponding to the setpoint signal and provides this pressure to the respective pneumatic actuator 4, in particular by pneumatically actuating the respective pneumatic actuator 4, i.e., expediently by pressurizing and / or depressurizing a respective pressure chamber of the respective pneumatic actuator 4. The actual pressure used for the control, i.e., the pressure resulting from the actuation of the respective pneumatic actuator 4, is detected by means of pressure sensors (not shown in Figure 1) and provided to the respective pressure controller device 3 as an actual pressure signal.

[0044] The position request serves as an example to move the respective pneumatic actuator 4 from a first position to a second position. Specifically, the pneumatic actuator 4 is to be moved from a first end position, which can also be described as the deactivated position, to a second end position, which can be described as the activated position, or vice versa. Using the slide valve 5 as an example, the movement corresponds to a movement from the position in which the opening 9 of the slide valve 5 is not closed by the valve element 12, to the position in which the opening 9 of the slide valve 5 is closed by the valve element 12, or vice versa.For the positioning actuators 24, the deactivated position corresponds to the position in which the positioning piston rods 23 are retracted to such an extent that the wafer 11 rests on the wafer support 21 and the positioning piston rods 23 do not protrude vertically from the wafer support 21. In the activated position of the positioning actuators 24, the positioning piston rods 23 protrude from the wafer support 21 to lift the wafer 11 from the wafer support 21. For a uniform lowering and lifting of the wafer 11 onto or from the wafer support 21, it is necessary that all positioning piston rods 23 move synchronously with each other.The position of each pneumatic actuator 4 is expediently detected by means of a position sensor 25, and the corresponding position signal is provided to the position controller 2 as the actual position value. For this purpose, the position sensors 25 are each connected to the position controller 2 via a signal line 26. Accordingly, only position control takes place in the position controller 2 and / or only pressure control takes place in the respective pressure controller 3. The actual pressure signal is only supplied to the pressure controller 3 and not to the position controller 2.

[0045] By way of example, the majority of pressure regulator devices 3 are shown here as part of a valve manifold 27, which is connected to the position controller device 2 via a signal line 26. Proportional valves (not shown), in particular piezoelectric proportional valves, which exhibit the required control accuracy, are preferably used in the pressure regulator devices 3. Each pressure regulator device 3 is pneumatically connected to one of the majority of pneumatic actuators 4 via a pressure line 28. The valve manifold 27 has an inlet (not shown) through which the valve manifold 27 can be connected to a pressure fluid source (not shown) to supply the valve manifold 27, and thus the majority of pressure regulator devices 3, with pressure fluid. The respective pressure line 28 is connected to an output of the respective pressure regulator device 3.For power supply, the valve manifold 27 has a voltage connection through which the majority of pressure regulator devices 3 can be supplied with power. A common controller for the individual pressure regulator devices 3 can be located in the valve manifold 27. Alternatively, the controller can be routed separately from the valve manifold 27 and connected to it via an interface (not shown). The communication system underlying this connection can preferably be a communication system from the OPC UA (Open Platform Communication Unified Architecture), OPC UA over TSN (Time-sensitive Networking), or bus communication system 10 Link group, whereby a power supply can also be provided via this connection.

[0046] Figure 3 shows a pneumatic system 1 designed as a wafer processing system with several processing chambers 6 arranged around a distribution chamber 29, each of the several processing chambers 6 being able to be shut off from the distribution chamber 29 by means of a spool valve 5. The distribution chamber 29 can also be shut off from the environment by means of a spool valve 5. Furthermore, the pneumatic system 1 comprises a position controller device 2 in a position controller device outer housing and a plurality of pressure controller devices 3, each exemplified as a plate-shaped valve module, in separate pressure controller device outer housings. Each of the spool valves 5 is pneumatically connected to one of the several pressure controller devices 3 via a pressure line 28.

[0047] The position controller device 2 is designed to perform position control of the individual pneumatic actuators (not shown) arranged in the spool valves 5 as described above, wherein the position of each pneumatic actuator 4 is expediently detected by means of a position sensor (not shown) and the corresponding position signal is provided to the position controller device 2 as the actual position value, for which purpose the position sensors are each connected to the position controller device 2 via a signal line 26.

[0048] The current pressure used for the pressure control described above, i.e. the pressure resulting from the actuation of the respective pneumatic actuator (not shown) to actuate the respective slide valve 5, is detected by means of pressure sensors not shown in Figure 2 and provided to the respective pressure regulator device 3 as an actual pressure signal.

[0049] Figure 4 shows a block diagram of a pneumatic system 1 for industrial automation. The depicted pneumatic system 1 comprises, by way of example, a position controller 2, a pressure controller 3, and a pneumatic actuator 4. The position controller 2 receives a target position signal XSoll, then determines the corresponding target pressure signal pSoll and outputs it to the pressure controller 3. The target pressure signal pSoll corresponding to the target position signal XSoll is determined, for example, from a table of values ​​stored in a memory of the position controller 2. The pressure controller 3 then regulates the pressure to the target pressure p corresponding to the target pressure signal pSoll and supplies this pressure to the pneumatic actuator 4. The current pressure used for the regulation, i.e.,The pressure resulting from the actuation of the pneumatic actuator 4 is detected by means of pressure sensors (not shown) and provided to the pressure regulator 3 as a current pressure signal. The position signal corresponding to the position of the pneumatic actuator 4 is provided to the position controller 2 as the current position value x. Figure 5 shows a first embodiment of the slide valve 5, which can be used as an example for shutting off the distribution chamber 29 from the environment, in a deactivated position (left) and an activated position (right), wherein in the deactivated position the opening 9 in the first valve housing wall 13 of the slide valve 5 is not closed by the valve element 12 and in the activated position the opening 9 in the first valve housing wall 13 of the slide valve 5 is closed by the valve element 12.In the illustrated embodiment, the valve element 12 rests against the first valve housing wall 13 with the circumferential, in particular rubber-elastic, sealing element 15 arranged on its side facing the opening 9, so that in the activated position the sealing force used for sealing, acting on the sealing element 15, is applied by a pressure difference between the pressure prevailing in the distributor chamber 29 and the ambient pressure, wherein the pressure in the distributor chamber 29 is below the ambient pressure.

[0050] In the illustrated embodiment, a valve actuator 16 designed as a pneumatic cylinder is used to actuate the slide valve 5, the first piston rod 18 of which is coupled to the valve member 12 in terms of movement and enables the displacement of the valve member 12 along the vertical direction.

[0051] Figure 6 shows a second embodiment of a slide valve 5, as depicted in Figure 1, in a deactivated position (left), in a partially activated position (center), and in an activated position (right). In the deactivated position, the opening 9 in the first valve housing wall 13 of the slide valve 5 is not closed by the valve element 12, and in the activated position, the opening 9 in the first valve housing wall 13 of the slide valve 5 is closed by the valve element 12. In the partially activated position, the movement of the valve element 12 along the vertical direction is complete, and a displacement of the valve element 12 along the transverse direction has not yet occurred.

[0052] In the illustrated embodiment, the first valve actuator 16 and the second valve actuator 17 serve to actuate the slide valve 5. The first displacement of the valve element 12 along the vertical direction, i.e., from the deactivated position to the partially activated position, is effected by the movement of the first piston rod 18 of the valve actuator 16. The second displacement of the valve element 12 along the transverse direction, i.e., from the partially activated position to the activated position, is effected by the second valve actuator 17, which, via the second piston rod 19, which moves along the transverse direction, can cause a tilting movement of the first valve actuator 16 about the bearing 20, on which the first valve actuator 16 is rotatably mounted.

[0053] To ensure the tightest possible closure of the opening 9, the valve element 12 has a circumferential, in particular rubber-elastic, sealing element 15 on its side facing the opening 9, wherein the pressure force required for closing the opening 9, acting on the sealing element 15, is provided by the second valve actuator 17.

[0054] Figure 7 shows a third embodiment of the slide valve 5 in a deactivated position (left), in a partially activated position (center), and in an activated position (right). In the deactivated position, the opening 9 in the first valve housing wall 13 of the slide valve 5 is not closed by the valve element 12, and in the activated position, the opening 9 in the first valve housing wall 13 of the slide valve 5 is closed by the valve element 12. In the partially activated position, the movement of the valve element 12 along the vertical direction is complete, and a displacement of the valve element 12 along the transverse direction has not yet occurred.

[0055] In the exemplary embodiment shown, the first valve actuator 16 and the second valve actuator 17 serve to actuate the slide valve 5. The first displacement along the vertical direction, i.e., from the deactivated position to the partially activated position, is effected by means of the first piston rod 18 of the first valve actuator 16. The displacement along the transverse direction, i.e., from the partially activated position to the activated position, is effected by a movement of the second piston rod 19 of the second valve actuator 17. For this purpose, in this embodiment, the second valve actuator 17 is mounted at an end of the first piston rod 18 facing the valve member 12, and the second piston rod 19 is coupled to the valve member 12 for movement.

[0056] To ensure the tightest possible closure of the opening 9, the valve element 12 has a circumferential, in particular rubber-elastic, sealing element 15 on its side facing the opening 9, wherein the pressure force required for closing the opening 9, acting on the sealing element 15, is provided by the second valve actuator 17.

[0057] Figure 8 shows a fourth embodiment of the slide valve 5 in a deactivated position (left), a partially activated position (center), and an activated position (right). In the deactivated position, the opening 9 in the first valve housing wall 13 of the slide valve 5 is not closed by the valve element 12, and in the activated position, the opening 9 in the first valve housing wall 13 of the slide valve 5 is closed by the valve element 12. In the partially activated position, the movement of the valve element 12 along the vertical direction is complete, and no displacement of the valve element 12 along the transverse direction has yet occurred.

[0058] In this embodiment, the first valve actuator 16 has at least one first bearing journal 31 and a second bearing journal 32 formed on the first piston rod 18 at an end of an actuator housing 30 facing away from the valve element 12. The first bearing journal 31 is slidably received in a cam 33. The first valve actuator 16 is coupled to a base 35 via a return element 34, which may be designed as a spring. In this embodiment, the first displacement and the second displacement are effected by means of the first valve actuator 16. The displacement from the deactivated position to the partially activated position is effected by means of a first partial movement of the first valve actuator 16, in which the first piston rod 18 is extended to such an extent that the second bearing journal 32 is rotatably received in a bearing seat 36.The bearing seat 36 is shown by way of example on a lower surface 37 of the valve housing 8 facing the first valve actuator 16. For the movement from the partially activated position to the activated position, the first valve actuator 16 performs a second partial movement, during which the first piston rod 18 is extended further. Due to the rotatable mounting of the second bearing journal 32 in the bearing seat 36, a tilting movement of the tiltably mounted first valve actuator 16 then begins, until the valve element 12 closes the opening 9. During this tilting movement, the first valve actuator 16 is moved towards the base 35 and the return element 34 is compressed. The movement is guided by the first bearing journal 31 in the cam 33. The position of the first bearing journal 31 within the cam 33 can be detected by means of a position sensor 25, wherein the position sensor 25 is connected to the position controller device 2 via a signal.

[0059] The bearing seat 36 can also be formed on another side, in particular a side facing the first valve actuator 16, of the valve housing 8.

[0060] To ensure the tightest possible closure of the opening 9, the valve element 12 has a circumferential, in particular rubber-elastic, sealing element 15 on its side facing the opening 9, wherein the pressure force required for closing the opening 9, acting on the sealing element 15, is provided by the first valve actuator 16.

[0061] The above-described embodiments of the pneumatic system 1 have in common that the pneumatic actuators 3, each designed as a double-acting pneumatic cylinder, can each or partially also be designed as a single-acting pneumatic cylinder. The valve housing 8 shown in each case can also each or partially consist only of the first housing wall 13 and the opening 9 formed therein.

[0062] The first movement from the deactivated position and the partially activated position, and the second movement from the partially activated position to the activated position, can each occur sequentially or simultaneously.

Claims

Claims 1. Pneumatic system (1) for industrial automation, comprising: a position controller device (2), at least one pressure controller device (3) and at least one pneumatic actuator (4), wherein the position controller device (2) is configured to perform position control of the pneumatic actuator (4) and, within the scope of position control, to output a setpoint pressure signal to the pressure controller device (3), and wherein the pressure controller device (3) is configured to perform pressure control based on the setpoint pressure signal and, within the scope of pressure control, to actuate the pneumatic actuator (4).

2. Pneumatic system according to claim 1, further comprising a slide valve (5) wherein the slide valve (5) has a valve element (12) and an opening (9) that can be closed by the valve element (12) for the passage of a wafer, and wherein the pneumatic actuator (4) serves to actuate the slide valve (5).

3. Pneumatic system according to a preceding claim, wherein the pressure regulator device (3) is arranged separately from the position regulator device (2).

4. Pneumatic system according to a preceding claim, wherein the pressure regulator device (3) has a pressure regulator device outer housing and the position regulator device (2) has a Pressure regulator device - outer housing, separate position regulator device - outer housing.

5. Pneumatic system according to one of the preceding claims, wherein an actual pressure signal resulting from the pneumatic actuation of the actuator (4) is supplied to the pressure regulator device (3) and is not supplied to the position regulator device (2).

6. Pneumatic system according to a preceding claim, comprising a plurality of pressure regulator devices (3) and a plurality of pneumatic actuators (4, 16, 17, 24), wherein the position regulator device (2) is configured to perform a respective position control for each pneumatic actuator (4, 16, 17, 24) and, within the scope of the respective position control, to output a respective setpoint pressure signal to a respective pressure regulator device (3), and wherein each pressure regulator device (3) is configured to perform a respective pressure control based on the respective setpoint pressure signal and, within the scope of the respective pressure control, to actuate a respective pneumatic actuator (4, 16, 17, 24).

7. Pneumatic system according to claim 6, wherein the position controller device (2) has a position controller device outer housing and each pressure controller device (3) has a respective pressure controller device outer housing separate from the position controller device outer housing.

8. Pneumatic system according to a preceding claim, wherein each pressure regulator device (3) is designed as a plate-shaped valve module.

9. Pneumatic system according to claim 6 in combination with claim 8, wherein the valve modules are arranged in a linear arrangement. are hung in a row and / or are part of a valve manifold (27).

10. Pneumatic system according to a preceding claim, wherein the position controller device (2) is designed as a higher-level control system, in particular a PLC, on which a position controller program is expediently executed to provide the target pressure signal.

11. Pneumatic system according to claim 2, comprising the wafer (11) • 12. Method for operating a pneumatic system according to one of the preceding claims, comprising the steps of: performing, by means of the position control device (2), the position control of the pneumatic actuator (4), outputting, within the framework of the position control, a set pressure signal to the pressure control device (3), performing, with the pressure control device (3), the pressure control based on the set pressure signal and actuating, within the framework of the pressure control, the pneumatic actuator (4).

13. Method according to claim 12, further comprising the steps: moving the valve element (12) into an open position in which the opening (9) is open, moving the wafer (11) through the opening (9) .

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