Device for rotating rotor and method for rotating rotor

Abstract

Provided is a device (100) for rotating a rotor while maintaining a sealed space. Provided is the device (100) comprising: a rotor that is provided with a rotating shaft (101) and an extending portion (102) extending from the rotating shaft (101), wherein the rotating shaft (101) is supported by a bearing, and N (N is a natural number) ferromagnetic bodies (103) are arranged on the extending portion (102) at equal intervals around a first circle having a predetermined radius; a stator in which a plurality of electromagnetic coils (104), the number of which is other than N, are arranged at equal intervals around a second circle having the same radius as the predetermined radius at the same center as the center of the first circle; and a wall formed of a non-magnetic body disposed between the rotor and the stator. The device (100) rotates the rotor by sequentially energizing the plurality of electromagnetic coils (104).

Description

Rotor rotating device and rotor rotating method

[0001] The present invention relates to a device for rotating a rotor and a method for rotating a rotor.

[0002] Patent Document 1 discloses an axial gap motor.

[0003] JP 2023-9830 A

[0004] Axial gap motors have a structure in which the disk portion of the rotor is sandwiched between the stator, or the stator is sandwiched between the disk portions of the rotor. However, with such a structure, when the rotor is placed in an enclosed space, the rotating shaft or power wiring can cause air to pass through, making it impossible to maintain the seal. Therefore, an object of the present disclosure is to provide a device and method for rotating a rotor while maintaining an enclosed space.

[0005] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings.

[0006] According to one embodiment, the rotor is disposed inside the sealed space and the stator is disposed outside the sealed space, thereby maintaining the sealed space.

[0007] According to the embodiment, it is possible to provide a device that rotates a rotor while maintaining a sealed space.

[0008] FIG. 1 is a cross-sectional view and a schematic perspective view showing a configuration of a device for rotating a rotor according to an embodiment; FIG. 2 is a first diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor including a ferromagnetic material according to a first embodiment; FIG. 3 is a second diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor including a ferromagnetic material according to the first embodiment; FIG. 4 is a first diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor including a permanent magnet according to a second embodiment; FIG. 5 is a second diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor including a permanent magnet according to the second embodiment; FIG. 6 is a diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor including a ferromagnetic material according to a third embodiment; FIG. 7 is a diagram showing a variation of a device for rotating a rotor according to an embodiment; FIG. 8 is a diagram showing a variation of a device for rotating a rotor according to an embodiment; FIG. 9 is a diagram showing a variation of a device for rotating a rotor according to an embodiment;

[0009] Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the invention according to the claims is not limited to the following embodiments. Furthermore, not all of the configurations described in the embodiments are necessarily essential as means for solving the problems. For clarity of explanation, the following description and drawings have been omitted and simplified as appropriate. In each drawing, the same elements are given the same reference numerals, and repeated explanations are omitted as necessary.

[0010] (Description of a Rotor Rotating Device According to an Embodiment) Fig. 1 is a cross-sectional view and a schematic perspective view showing the configuration of a rotor rotating device according to an embodiment. The rotor rotating device according to an embodiment will be described with reference to Fig. 1.

[0011] 1, a rotor rotating device 100 includes a rotor having a rotating shaft 101, an extension 102, and a ferromagnetic material or permanent magnet 103, and a stator having an electromagnetic coil 104. For example, the ferromagnetic material is a metal including iron / steel, ferritic / martensitic stainless steel, nickel, cobalt, etc. The permanent magnet can be a ferrite magnet or a neodymium magnet.

[0012] The rotating shaft 101 is provided at the center of the rotor. The rotating shaft 101 is supported by a bearing 105. An extension portion 102 extends around the rotating shaft 101. The extension portion 102 may extend in a circular shape centered on the rotating shaft 101. The extension portion 102 is not limited to a circular shape, and may have an elliptical or polygonal shape, for example. The extension portion 102 may be plate-shaped, but is not limited to a plate-shaped shape.

[0013] In the extension 102, N (N is a natural number) ferromagnetic bodies or permanent magnets 103 are arranged at equal intervals around a first circle of a predetermined radius.

[0014] The stator is provided with an air gap in the rotor, and a plurality of electromagnetic coils 104 other than N are arranged at equal intervals around a second circle having the same center as the center of the first circle and the same radius as the predetermined radius. The air gap may be, for example, a wall. The device may not have a wall.

[0015] The electromagnetic coils 104 are, for example, coils wound around an iron core, and when a current is passed through the coil, a magnetic field is generated, magnetizing the iron core and causing it to function like a magnet. By passing current through the multiple electromagnetic coils 104 in sequence, the ferromagnetic materials or permanent magnets 103 and the electromagnetic coils 104 interact with each other to rotate the rotor. Since there are N ferromagnetic materials or permanent magnets 103 and the number of multiple electromagnetic coils 104 is more than N, the rotor can be rotated.

[0016] By using the gap as a wall of an enclosed space such as a chamber, it is possible to provide a device that rotates a rotor while maintaining an enclosed space.

[0017] (Explanation of Energizing Procedure of Electromagnetic Coil of Device for Rotating Rotor Having Ferromagnetic Material According to First Embodiment) Fig. 2 is a first diagram showing an energizing procedure of an electromagnetic coil of a device for rotating a rotor having a ferromagnetic material according to the first embodiment. Fig. 3 is a second diagram showing an energizing procedure of an electromagnetic coil of a device for rotating a rotor having a ferromagnetic material according to the first embodiment. The energizing procedure of an electromagnetic coil of a device for rotating a rotor having a ferromagnetic material according to the first embodiment will be described with reference to Figs. 2 and 3 .

[0018] Ferromagnetic materials that are not permanent magnets are attracted to the magnetism generated by the electromagnetic coils 104. Therefore, by sequentially energizing the electromagnetic coils 104, the rotor equipped with the ferromagnetic materials rotates. In this case, the number of ferromagnetic materials in the rotor is different from the number of electromagnetic coils 104 in the stator. The number of ferromagnetic materials in the rotor according to the first embodiment is, for example, seven, and the number of electromagnetic coils 104 is, for example, six.

[0019] 2 and 3, seven ferromagnetic bodies are arranged at equal intervals on a circle, and electromagnetic coils 104 are arranged at equal intervals on the same circle as the ferromagnetic bodies, as indicated by A, B, C, D, E, and F.

[0020] When the angle is 0°, where the position of one of the ferromagnetic bodies is aligned with electromagnetic coil A, the number of electromagnetic coils differs from the number of ferromagnetic bodies, so the positions of electromagnetic coil B and one of the ferromagnetic bodies are misaligned. Therefore, when current is applied to electromagnetic coil B and electromagnetic coil C, the ferromagnetic body is attracted to electromagnetic coil B and electromagnetic coil C, causing the rotor to rotate to the right.

[0021] When the rotor rotates 8.6°, the current to electromagnetic coil B stops and current is applied to electromagnetic coils C and D. Therefore, when current is applied to electromagnetic coils C and D, the ferromagnetic material is attracted to electromagnetic coils C and D, causing the rotor to rotate to the right.

[0022] When the rotor rotates 17.1°, the current to electromagnetic coil C stops and current is applied to electromagnetic coils D and E. Therefore, when current is applied to electromagnetic coils D and E, the ferromagnetic material is attracted to electromagnetic coils D and E, causing the rotor to rotate to the right.

[0023] When the rotor rotates 25.7°, the current to electromagnetic coil D stops and current is applied to electromagnetic coils E and F. Therefore, when current is applied to electromagnetic coils E and F, the ferromagnetic material is attracted to electromagnetic coils E and F, causing the rotor to rotate to the right.

[0024] As shown in Figure 3, when the rotor rotates one revolution (360 / 7 = approximately 51.4°, where 360 ​​is the number of ferromagnetic bodies), the current conduction pattern of the electromagnetic coils completes one cycle. In this way, by sequentially energizing the electromagnetic coils, the rotor equipped with ferromagnetic bodies can be rotated.

[0025] (Explanation of a method for energizing an electromagnetic coil of a device for rotating a rotor having a permanent magnet according to a second embodiment) Fig. 4 is a first diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor having a permanent magnet according to a second embodiment. Fig. 5 is a second diagram showing a procedure for energizing an electromagnetic coil of a device for rotating a rotor having a permanent magnet according to a second embodiment. The procedure for energizing an electromagnetic coil of a device for rotating a rotor having a permanent magnet according to a second embodiment will be described with reference to Figs. 4 and 5 .

[0026] The permanent magnets have either a north or south pole facing one side, and are all aligned in the same direction. The permanent magnets are attracted or repelled by the magnetic field generated by the electromagnetic coils 104. Therefore, by sequentially energizing the electromagnetic coils 104, the rotor equipped with the permanent magnets rotates. Because the magnetic force of the permanent magnets is used, the rotor can be rotated more powerfully than in the device according to the first embodiment. In this case, the number of permanent magnets in the rotor differs from the number of electromagnetic coils 104 in the stator. The number of permanent magnets in the rotor according to the first embodiment is, for example, seven, and the number of electromagnetic coils 104 is, for example, six.

[0027] 4 and 5, seven permanent magnets are arranged at equal intervals on a circle. Electromagnetic coils 104 are also arranged at equal intervals on the same circle as the permanent magnets, A, B, C, D, E, and F. For example, if all the north poles are in contact with the electromagnetic coils, the electromagnetic coils 104 will become south poles when current is passed in the positive direction, and will become north poles when current is passed in the negative direction.

[0028] When the angle is 0°, where one of the permanent magnets is aligned with electromagnetic coil A, the positions of electromagnetic coil B and one of the permanent magnets are misaligned because the number of electromagnetic coils and the number of permanent magnets are different. Therefore, when electromagnetic coils B and C are energized in the positive direction, the permanent magnets are attracted to electromagnetic coils B and C, causing the rotor to rotate to the right. Furthermore, when electromagnetic coils E and F are energized in the negative direction at the same time, the permanent magnets are repelled by electromagnetic coils E and F, causing the rotor to rotate to the right.

[0029] When the rotor rotates 8.6°, the current to electromagnetic coils B and E stops, current to electromagnetic coils C and D is applied in the positive direction, and current to electromagnetic coils F and A is applied in the negative direction. Therefore, when current is applied to electromagnetic coils C and D in the positive direction, the permanent magnet is attracted to electromagnetic coils C and D, causing the rotor to rotate to the right. On the other hand, when current is applied to electromagnetic coils F and A in the negative direction, the permanent magnet is repelled by electromagnetic coils F and A, causing the rotor to rotate to the right.

[0030] When the rotor rotates 17.1°, the current to electromagnetic coils C and F stops, current to electromagnetic coils D and E is applied in the positive direction, and current to electromagnetic coils A and B is applied in the negative direction. Therefore, when current is applied to electromagnetic coils D and E in the positive direction, the permanent magnet is attracted to electromagnetic coils D and E, causing the rotor to rotate to the right. On the other hand, when current is applied to electromagnetic coils A and B in the negative direction, the permanent magnet is repelled by electromagnetic coils A and B, causing the rotor to rotate to the right.

[0031] When the rotor rotates 25.7°, the current to electromagnetic coils A and D stops, current to electromagnetic coils E and F is applied in the positive direction, and current to electromagnetic coils B and C is applied in the negative direction. Therefore, when current is applied to electromagnetic coils E and F in the positive direction, the permanent magnet is attracted to electromagnetic coils E and F, causing the rotor to rotate to the right. On the other hand, when current is applied to electromagnetic coils B and B in the negative direction, the permanent magnet is repelled by electromagnetic coils B and C, causing the rotor to rotate to the right.

[0032] As shown in Figure 3, when the rotor rotates one revolution (360 / 7 = approximately 51.4°, where 1 revolution is divided by the number of permanent magnets), the current flow pattern of the electromagnetic coils goes around once. In this way, by sequentially energizing the electromagnetic coils, it is possible to rotate the rotor, which is made of ferromagnetic material.

[0033] (Explanation of procedure for energizing electromagnetic coils of a device for rotating a rotor having a ferromagnetic material according to the third embodiment) Fig. 6 is a diagram showing a procedure for energizing electromagnetic coils of a device for rotating a rotor having a ferromagnetic material according to the third embodiment. With reference to Fig. 6, a procedure for energizing electromagnetic coils of a device for rotating a rotor having a ferromagnetic material according to the third embodiment will be described.

[0034] The number of ferromagnetic bodies in the rotor according to the third embodiment is, for example, eight, and the number of electromagnetic coils 104 is, for example, six.

[0035] 6, eight ferromagnetic bodies are arranged at equal intervals on a circle, and electromagnetic coils 104 are arranged at equal intervals on the same circle as the ferromagnetic bodies, as indicated by A, B, C, D, E, and F.

[0036] When the angle is 0°, where the position of one of the ferromagnetic bodies is aligned with electromagnetic coil A, the number of electromagnetic coils differs from the number of ferromagnetic bodies, so the positions of electromagnetic coil B and one of the ferromagnetic bodies are misaligned. Therefore, when electromagnetic coil B and electromagnetic coil E are energized, the ferromagnetic body is attracted to electromagnetic coil B and electromagnetic coil E, causing the rotor to rotate to the right.

[0037] When the rotor rotates 7.5°, current begins to flow through electromagnetic coils C and F. As a result, the ferromagnetic material is attracted to electromagnetic coils B, C, E, and F, causing the rotor to rotate to the right.

[0038] When the rotor rotates 15°, the current to electromagnetic coils B and E is stopped. As a result, the ferromagnetic material is attracted to electromagnetic coils C and F, causing the rotor to rotate to the right.

[0039] When the rotor rotates 22.5°, current begins to flow through electromagnetic coils A and D. As a result, the ferromagnetic material is attracted to electromagnetic coils C, D, F, and A, causing the rotor to rotate to the right.

[0040] When the rotor rotates 30°, the current to electromagnetic coils C and F is stopped. As a result, the ferromagnetic material is attracted to electromagnetic coils A and D, causing the rotor to rotate to the right.

[0041] When the rotor rotates one revolution (360 / 8 = approximately 45°, calculated by dividing one revolution by the number of ferromagnetic bodies), the current flow pattern of the electromagnetic coils goes around once. In this way, by energizing the electromagnetic coils in order, it is possible to rotate the rotor equipped with ferromagnetic bodies. Here, "in order" does not necessarily mean consecutively, but also includes energizing them in a discontinuous manner.

[0042] (Description of Variations of the Rotor Rotating Device According to the Embodiment) Fig. 7 is a diagram showing variations of the rotor rotating device according to the embodiment. With reference to Fig. 7, variations of the rotor rotating device according to the embodiment will be described.

[0043] 7A, the walls filling the gaps can be made of austenitic stainless steel such as SUS 304. The walls can be made of any non-magnetic material, such as glass, resin, ceramics, magnesium alloys, and aluminum alloys.

[0044] As shown in Figure 7B, the device may include a bearing, such as a thrust bearing, between the rotor and the wall.

[0045] As shown in Figure 7C, the wall may have a thin-walled structure, where the wall is thinned only in the rotor portion, and the wall is shaped to match the shape of the rotor.

[0046] As shown in FIG. 7D, only the rotor portion needs to be made of a non-magnetic material such as glass.

[0047] The rotor may be in contact with the wall, as shown in FIG. 7E.

[0048] As shown in Figure 7F, the rotor may be provided with a tire and supported around its periphery, the tire supporting the extension of the rotor.

[0049] As shown in Figure 7G, the electromagnetic coil may be built into the outer wall of the device, i.e., the stator is built into the wall.

[0050] Such a device may be attached to a scanning electron microscope (SEM) device, a chemical vapor deposition (CVD) device, a pressure vessel, a reactor, a reaction vessel, a sealed vessel, or the chamber of a physical vapor deposition (PVD) device. In this way, the device can be applied to a device in which the rotor is immersed in a fluid or powder and the stator is immersed in a gas.

[0051] The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit and scope of the present invention. For example, the extension portion may include M (M is a natural number) ferromagnetic bodies arranged at equal intervals around a third circle having the same center as the first circle and a second predetermined radius smaller than the radius of the first circle. In this case, the stator includes a plurality of electromagnetic coils other than M arranged at equal intervals around a fourth circle having the same center as the second circle and a radius equal to the second predetermined radius.

[0052] Similarly, M (M is a natural number) permanent magnets may be arranged at equal intervals around a third circle having the same center as the first circle and a second predetermined radius smaller than the radius of the first circle in the extension section, while a plurality of electromagnetic coils other than M may be arranged at equal intervals around a fourth circle having the same center as the second circle and a radius equal to the second predetermined radius in the stator.

[0053] This application claims priority based on Japanese Patent Application No. 2024-072138, filed April 26, 2024, the disclosure of which is incorporated herein in its entirety by reference.

[0054] 100 Rotor rotating device, 101 Rotating shaft, 102 Extension, 103 Ferromagnetic material or permanent magnet, 104 Electromagnetic coil

Claims

1. A device comprising: a rotor having a rotating shaft and an extension extending from said rotating shaft, said rotating shaft being supported by a bearing; N (N is a natural number) ferromagnetic bodies arranged at equal intervals around a first circle of a predetermined radius on said extension; a stator having a plurality of electromagnetic coils other than N arranged at equal intervals around a second circle having the same center as the center of said first circle and the same radius as said predetermined radius; and a wall made of a non-magnetic material arranged between said rotor and said stator; and said rotor is rotated by sequentially passing current through said plurality of electromagnetic coils.

2. A device comprising: a rotor having a rotating shaft and an extension extending from said rotating shaft, said rotating shaft being supported by a bearing, and said extension having N (N is a natural number) permanent magnets arranged at equal intervals around a first circle of a predetermined radius; a stator having a plurality of electromagnetic coils other than N arranged at equal intervals around a second circle having the same center as the center of said first circle and the same radius as said predetermined radius; and a wall made of a non-magnetic material arranged between said rotor and said stator, wherein said rotor is rotated by sequentially passing current through said plurality of electromagnetic coils.

3. The device according to claim 1 or 2, wherein the wall is made of austenitic stainless steel, glass, resin, ceramics, magnesium alloy or aluminum alloy.

4. The device according to claim 1 or 2, further comprising a bearing between said rotor and said wall.

5. An apparatus according to claim 1 or 2, wherein said wall is shaped to match the shape of said rotor.

6. The device of claim 1 or 2, wherein the rotor is in contact with the wall.

7. Apparatus according to claim 1 or 2, comprising a tire bearing around an extension of said rotor.

8. The device according to claim 1 or 2, wherein the stator is built into the wall.

9. The apparatus of claim 1 or 2, wherein the apparatus is attached to a chamber of a scanning electron microscope (SEM) apparatus, a chemical vapor deposition (CVD) apparatus, a pressure vessel, a reactor, a reaction vessel, a sealed vessel, or a physical vapor deposition (PVD) apparatus.

10. The device according to claim 1 or 2, wherein the rotor is immersed in a fluid or powder, and the stator is immersed in a gas.

11. The apparatus of claim 1, wherein the extension portion has M (M is a natural number) ferromagnetic bodies arranged at equal intervals around a third circle having the same center as the center of the first circle and a second predetermined radius smaller than the radius of the first circle, and the stator has a plurality of electromagnetic coils other than M arranged at equal intervals around a fourth circle having the same center as the center of the second circle and a radius equal to the second predetermined radius.

12. The apparatus of claim 2, wherein the extension has M permanent magnets (M is a natural number) arranged at equal intervals around a third circle having the same center as the center of the first circle and a second predetermined radius smaller than the radius of the first circle, and the stator has a plurality of electromagnetic coils other than M arranged at equal intervals around a fourth circle having the same center as the center of the second circle and a radius equal to the second predetermined radius.

13. A method for rotating a rotor comprising a rotating shaft and an extension extending from the rotating shaft, the rotating shaft being supported by a bearing, and N (N is a natural number) ferromagnetic bodies arranged at equal intervals around a first circle of a predetermined radius on the extension; a stator comprising a plurality of electromagnetic coils other than N arranged at equal intervals around a second circle having the same center as the first circle and the predetermined radius; and a wall made of a non-magnetic material arranged between the rotor and the stator, wherein current is passed through the plurality of electromagnetic coils in sequence.

14. A method for rotating a rotor comprising a rotating shaft and an extension extending from the rotating shaft, the rotating shaft being supported by a bearing, and N (N is a natural number) permanent magnets arranged at equal intervals around a first circle of a predetermined radius on the extension; a stator comprising a plurality of electromagnetic coils other than N arranged at equal intervals around a second circle having the same center as the first circle and the predetermined radius; and a wall made of a non-magnetic material arranged between the rotor and the stator, wherein current is applied to the plurality of electromagnetic coils in sequence.

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