Vacuum assembly

Abstract

According to various embodiments, a vacuum assembly comprises: a first vacuum flange (102) and a second vacuum flange (112), which are designed to be vacuum-tightly joined together along a coupling direction (101); a fluid coupling having a fluid coupling plug (106) coupled to the first vacuum flange (102) and a fluid coupling socket (116) coupled to the second vacuum flange (112), said fluid coupling socket (116) having a recess (116v), which tapers in the coupling direction (101), for receiving the fluid coupling plug (106); and one or more fluid connections, a first fluid connection (206) of which is fluid-conductively coupled to the recess (116v) for example and / or a second fluid connection (216) of which is fluid-conductively coupled to the fluid coupling plug (106) for example.

Description

[0001] Description

[0002] Vacuum arrangement

[0003] Several embodiments relate to a vacuum arrangement.

[0004] In general, a substrate can be treated (processed) in a vacuum, for example, coated, so that its chemical and / or physical properties can be modified. Various coating processes can be used to coat a substrate, with physical vapor deposition (PVD) being a well-established example. A vacuum coating system, for instance, can be used to deposit one or more layers onto a substrate or multiple substrates using chemical and / or physical vapor deposition. Such a vacuum coating system can be of the rotary table type or the continuous flow type.

[0005] Vacuum processing utilizes a variety of components, including vacuum chamber housings, flanges, covers, rotary unions, and more. These components are typically assembled, maintained, and disassembled, for example, during maintenance. This work is time-consuming and costly, especially when the component design is complex, as is often the case with vacuum coating systems.

[0006] Various designs provide a vacuum arrangement which reduces this effort.

[0007] The following are various examples that refer to what has been described previously and depicted in the figures.

[0008] Example 1 is set up according to one of the attached claims.

[0009] Example 2 is configured according to Example 1 and / or is a vacuum arrangement comprising: a first vacuum flange and a second vacuum flange, which are configured to be brought into a vacuum-tight joined state along a coupling direction; a fluid coupling comprising a fluid coupling plug connected to the first vacuum flange (e.g., rigidly and / or adjacent to it) and a fluid coupling socket connected to the second vacuum flange (e.g., rigidly and / or adjacent to it); wherein the fluid coupling socket has a recess for receiving the fluid coupling plug; wherein the recess and / or the fluid coupling plug are oriented in the coupling direction (e.g.,(truncated cone-shaped), one or more than one optional fluid connection, of which a first fluid connection is fluidly coupled to the recess, for example, and / or of which a second fluid connection is fluidly coupled to the fluid coupling plug, for example.

[0010] Example 3 is set up according to one of Examples 1 to 2, further comprising a vacuum chamber housing which has the first vacuum flange or the second vacuum flange (e.g. as the first mounting flange and / or as part of a mounting terminal).

[0011] Example 4 is set up according to Example 3, wherein the vacuum chamber housing has an interior space into which a through-opening (e.g. providing a receiving space for receiving a processing device) of the first mounting flange opens (e.g. in the coupling direction)).

[0012] Example 5 is configured according to one of Examples 1 to 4, further comprising a processing module which has the first vacuum flange or the second vacuum flange, e.g. as a second mounting flange. Example 6 is configured according to Example 5, wherein the processing module comprises the processing device and / or a chamber cover which has the second mounting flange (e.g. as a first mounting flange and / or as part of a mounting terminal), wherein the processing device is preferably fluidly coupled to the fluid coupling plug and / or projects in the coupling direction.

[0013] Example 7 is set up according to one of Examples 1 to 6, with the fluid coupling plug protruding in the coupling direction, e.g. from the wall (e.g. the chamber cover).

[0014] Example 8 is set up according to one of Examples 1 to 7, wherein the fluid coupling plug has a first fluid channel which extends at least sectionally along the coupling direction and / or is fluidly coupled to an additional fluid port.

[0015] Example 9 is set up according to one of Examples 1 to 8, wherein the fluid coupling plug tapers in the coupling direction, e.g. complementary to the fluid coupling socket.

[0016] Example 10 is configured according to one of Examples 1 to 9, wherein the fluid coupling (e.g. its sealing structure) has one or more than one (e.g. annular) sealing device, each of which is preferably configured to seal a gap between the fluid coupling plug and the fluid coupling socket and / or wherein: a first sealing device is arranged on an end face (towards the coupling direction) of the fluid coupling plug; a second sealing device surrounds the fluid coupling plug (e.g. a cylindrical outer wall thereof) along a closed path.

[0017] Example 11 is set up according to Example 10, wherein the first sealing device and / or the second sealing device are attached to the fluid coupling plug and / or have a sealing ring (e.g. elastomer ring).

[0018] Example 12 is set up according to Example 10 or 11, wherein the fluid coupling plug has a first fluid channel which opens into a through-opening of the first sealing device.

[0019] Example 13 is set up according to one of Examples 10 to 12, wherein the second sealing device has two wiper rings and a sealing ring (e.g. O-ring) arranged between them.

[0020] Example 14 is configured according to one of Examples 1 to 13, wherein the fluid coupling plug and the fluid coupling socket form a gap, a section of which preferably adjoins one or more than one (e.g. the first and / or second) sealing device, e.g. arranged between the first and second sealing devices; a suction channel (e.g. formed in the fluid coupling socket) which opens into the gap (e.g. a section thereof); preferably a suction port which is fluidly coupled to the suction channel.

[0021] Example 15 is configured according to any one of Examples 1 to 14, wherein the first vacuum flange has one or more centering pins projecting in the coupling direction, and wherein the second vacuum flange has one or more complementary centering openings. This facilitates the joining of the vacuum flanges.

[0022] Example 16 is set up according to one of Examples 1 to 15, wherein the first vacuum flange has several centering pins which differ from one another, e.g., in a first dimension along the coupling direction (also referred to as length) and / or a second dimension (e.g., diameter) transverse to the coupling direction (also referred to as width). This makes it easier to join the vacuum flanges.

[0023] Example 17 is configured according to one of Examples 1 to 16, further comprising a force transmission device (e.g., a gearbox, e.g., in the form of a toggle clamp) which is configured, in response to being actuated, to transmit a force between the first vacuum flange and the second vacuum flange, preferably towards each other and / or pressing them against each other. This facilitates assembly.

[0024] Example 18 is configured according to one of Examples 1 to 17 and / or is a vacuum arrangement comprising: a rotary feedthrough having a stator and a rotor rotatably mounted therein (e.g. by means of a bearing device); a vacuum chamber housing having a first housing opening which is configured relative to the rotary feedthrough such that the rotary feedthrough can pass through the first housing opening (e.g. for transporting the rotary feedthrough through the housing opening); wherein the vacuum chamber housing further comprises a mounting surface facing the first housing opening which is configured to be brought into a vacuum-tight joined state with the stator (e.g. with a vacuum flange thereof).

[0025] Example 19 is configured according to one of Examples 1 to 18 and / or is a vacuum arrangement comprising: a rotary feedthrough having a stator and a rotor rotatably mounted therein; a vacuum chamber housing having a mounting surface configured to be brought into a vacuum-tight joined state with the stator (e.g., with a vacuum flange thereof); a transport device configured to transport a substrate in the vacuum chamber housing, the transport device optionally being configured to be coupled to the rotor by means of a toothed connection (e.g., Hirth toothed connection).

[0026] Example 20 is configured according to one of Examples 18 to 19, further comprising a transport device which is configured to transport a substrate in the vacuum chamber housing, wherein the transport device is configured to be coupled to the rotor (e.g., a mounting device thereof), wherein the transport device preferably comprises one or more than one mounting base and (e.g., per mounting base) a segment of an (e.g., annular) substrate carrier (also referred to as substrate carrier segment) which is configured to be mounted on the mounting base.

[0027] Example 21 is set up according to one of Examples 18 to 20, wherein the vacuum chamber housing has a housing opening which is bounded and / or surrounded by the mounting surface, wherein the stator preferably has a (e.g. housing-shaped) frame (also referred to as stator frame) which, in the assembled state, is arranged outside the vacuum chamber housing.

[0028] Example 22 is set up according to one of Examples 18 to 21, wherein the stator has a vacuum flange which, in the assembled state, is arranged in the vacuum chamber housing and / or which protrudes from the stator frame (e.g. collar-shaped).

[0029] Example 23 is configured according to one of Examples 1 to 22 and / or is a vacuum arrangement comprising: a processing module having a chamber lid and a transport base; a transport fork, wherein the transport base has a recess for receiving the transport fork; wherein the processing module further comprises a locking device configured to positively lock the transport fork received in the recess, so that movement of the transport fork out of the transport base is blocked.

[0030] Example 24 is set up according to Example 23, wherein the processing module has a (e.g. the) processing device which is coupled to the chamber lid.

[0031] Example 25 is configured according to Example 23 or 24, wherein the chamber cover has a vacuum flange (e.g., the first or the second). Example 26 is configured according to one of Examples 23 to 25, further comprising a vacuum chamber housing which has a chamber opening for receiving the processing module, wherein the vacuum chamber housing preferably has a vacuum flange (e.g., the first or second), e.g., as a first mounting flange (e.g., as part of a mounting terminal), which is penetrated by the chamber opening, wherein the vacuum flange and the chamber cover (e.g., a second vacuum flange thereof) are configured to be brought into a vacuum-tight joined state.

[0032] Example 27 is set up according to one of Examples 23 to 26, wherein the locking device (e.g. a locking blade thereof) is set up to engage in the recess and / or in an opening (e.g. recess) of the transport fork.

[0033] Example 28 is set up according to one of Examples 23 to 27, wherein the processing module has a bearing device by means of which a shaft of the locking device is rotatably mounted.

[0034] Example 29 is configured according to any one of Examples 23 to 28, wherein the processing module has an actuator configured to be actuated in response to the actuator to bring the locking device into a first state in which the movement of the transport fork out of the transport base is blocked, and / or to bring it into a second state in which the blockage of the movement of the transport fork out of the transport base is removed (i.e., released).

[0035] Example 30 is configured according to one of Examples 23 to 29, wherein the processing module has a reset device configured to transmit a (spring-elastic and / or gravitationally generated) force (e.g., restoring force) between the locking device and the transport base, against which the locking device can be positioned, e.g., brought into a first state in which the movement of the transport fork out of the transport base is blocked, or e.g., brought into a second state in which the movement of the transport fork out of the transport base is released.

[0036] Example 31 is set up according to one of Examples 23 to 30, wherein the transport fork has two parallel beam-shaped tines (also called fork tines).

[0037] Example 32 is set up according to one of Examples 23 to 31, wherein the transport fork has a (e.g., standard-compliant) mounting device for attaching it to a forklift. This facilitates the retrofitting of the forklift.

[0038] Example 33 is configured according to one of Examples 23 to 32, furthermore comprising a set of (e.g., identical) transport forks, each of which is configured to accommodate the transport fork; and / or comprising a set of (e.g., identical) industrial trucks, each of which is configured to accommodate the transport fork. This facilitates the retrofitting of the industrial trucks.

[0039] Example 34 is configured according to one of Examples 23 to 33, wherein the transport device and / or the rotor have a (e.g., ring-shaped) coupling device by means of which they can be coupled, wherein the coupling device preferably has: a toothed section (e.g., having one or more machine teeth), preferably a Hirth toothed section. A Hirth toothed section facilitates assembly.

[0040] Example 35 is configured according to one of Examples 23 to 34, wherein the transport device and / or the rotor have a plurality of uneven positive-locking profiles, e.g., tooth-shaped positive-locking profiles (then also referred to as teeth), which are arranged one after the other, for example, along a closed path. The plurality of uneven positive-locking profiles can, for example, be arranged one after the other along a closed path that revolves around the axis of rotation. Alternatively or additionally, the plurality of uneven positive-locking profiles can be configured according to a Hirth coupling. A Hirth coupling facilitates assembly.

[0041] Example 36 is set up according to one of Examples 23 to 35, further comprising: a drive system which is coupled to the rotor or at least set up to drive a rotary motion of the rotor.

[0042] Example 37 is set up according to one of Examples 1 to 36, furthermore comprising a first (e.g. plate-shaped) wall which has the first vacuum flange, e.g. as a first mounting flange (e.g. as part of a mounting terminal).

[0043] Example 38 is set up according to one of Examples 1 to 37, furthermore having a second (e.g. frame-shaped) wall which has the second vacuum flange, e.g. as a second mounting flange.

[0044] Example 39 is set up according to one of Examples 1 to 38, further comprising the transport device which has a substrate carrier holding device and / or one or more than one substrate carrier segment.

[0045] Example 40 is set up according to Example 39, comprising the substrate support holding device: a rotary axis, several mounting bases (also referred to as the mounting device of the substrate support holding device) arranged (around the rotary axis) in a pattern symmetrical to the rotary axis, each mounting base comprising: a (e.g.a movable, rotatable, mounted receiving device for receiving a substrate carrier segment, preferably configured according to one of Examples 1 to 17; a first actuating element (also referred to as an alignment element) configured (preferably in response to being actuated) to change an angle (also referred to as an alignment angle) between the axis of rotation and the receiving device; an optional locking device configured to selectively lock or release the change of the angle (preferably in response to being actuated); an optional pivot joint by means of which the receiving device is movably mounted.

[0046] Example 41 is configured according to Example 39 or 40, comprising the or each substrate support segment: two opposing end faces configured to each other (e.g., edges angled towards each other) such that the substrate support segment tapers towards an axis of rotation; a mounting device facing the axis of rotation for mounting the substrate support segment; a substrate holding device configured to hold a substrate and arranged between the two end faces; two interlocking contours configured to be complementary to each other, each interlocking contour being provided on one of the end faces.

[0047] Example 42 is set up according to one of Examples 1 to 41, wherein the fluid coupling plug is arranged next to the first vacuum flange, e.g. outside an area around which a sealing device (e.g. having a sealing surface and / or sealing groove) of the first vacuum flange runs.

[0048] Example 43 is configured according to one of Examples 1 to 42, wherein the fluid coupling bushing is arranged next to the second vacuum flange, e.g., outside an area around which a sealing device (e.g., having a sealing surface and / or sealing groove) of the second vacuum flange extends. Example 44 is configured according to one of Examples 1 to 43, which is used for processing a substrate in a vacuum or at least for providing a processing system (e.g., a rotary table system) configured for processing the substrate.

[0049] Example 45 is set up according to Example 44, wherein the processing is carried out by means of a processing device which is supplied with a gaseous fluid (also referred to as gas) by means of the fluid coupling, wherein the substrate is preferably exposed to a plasma which is formed by means of the fluid.

[0050] Example 46 is set up according to Example 44 or 45, wherein the substrate is transported by means of a transport device (e.g. in the vacuum and / or along a closed path) to which a torque is supplied by means of the rotary feedthrough.

[0051] Example 47 is set up according to one of Examples 44 to 46, wherein the processing is carried out by means of a processing device which is part of the processing module which includes the transport base.

[0052] They show:

[0053] Figures 1A to 8B each show a vacuum arrangement according to different embodiments in different views.

[0054] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims.

[0055] Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), direct or indirect connections, and direct or indirect couplings. In the figures, identical or similar elements are designated with identical reference numerals where appropriate.

[0056] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect. Several elements can, for example, be coupled to one another along an interaction chain along which the interaction can be exchanged, e.g., a fluid (then also referred to as fluid-conducting coupled). For example, two coupled elements can exchange an interaction with each other, e.g., a mechanical, hydrostatic, thermal, and / or electrical interaction. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) can feature that they are fluid-conducting coupled to one another. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g., physical) coupling, e.g.,by means of direct physical contact. A coupling can be designed to transmit a mechanical interaction (e.g. force, torque, etc.).

[0057] The term "actuator" (e.g., comprising an actuator) can be understood as a transducer designed to influence a state, a process (e.g., a coating process), or a device in response to an actuator being controlled. The actuator can convert an applied force into mechanical movements or changes in physical quantities such as pressure or temperature. A mechanical actuator, for example, can be designed to convert mechanical energy into mechanical energy when actuated.

[0058] In this context, a processing device is understood to be a device for processing a substrate, whereby the substrate can be modified, for example, its temperature and / or its chemical composition. A coating device, as an exemplary processing device, is configured to provide a coating material to which, for example, the transport path and / or the substrate are exposed. The coating material can, for example, be emitted towards the transport path and / or the substrate, e.g., in a so-called emission direction. The coating device includes, for example, a coating material source by means of which the coating material is provided (e.g., emitted). The coating device can, for example, be configured to perform a vapor deposition process, such as physical vapor deposition (PVD) or chemical vapor deposition (CVD).

[0059] According to various embodiments, a storage device can be configured to hold (e.g., guide and / or position) one or more components. For example, the storage device can have one or more bearings per component for holding (e.g., guide and / or position) the component. Each bearing of the storage device can be configured to provide the component with one or more degrees of freedom (e.g., translational or rotational) according to which the component can be moved. Examples of bearings include: radial bearings, thrust bearings, radial-axial bearings, and linear bearings (also called linear guides). Each linear bearing can, for example, provide the component with exactly one translational degree of freedom.

[0060] In this context, an assembly device is understood to be a device designed for assembly, for example, for mounting on a complementary assembly device (also referred to as a counter-assembly device). During assembly, several components are connected to one another (e.g., rigidly) using their respective assembly devices. Assembly can be (e.g., exclusively) positive-locking and / or detachable. The assembly device preferably has a (e.g., planar) mounting surface which, during assembly, rests against a complementary mounting surface of the counter-assembly device. The assembly device can, for example, have a mounting surface and / or one or more (e.g., integral) mounting profiles (e.g., positive-locking profiles), which are provided, for example, by means of a feature (e.g., a projection or recess) on the assembly device. Examples of mounting profiles include: a thread, a groove (e.g.,for keyway mounting and / or dovetail groove), a locking lug, a bayonet fitting, a pin, etc. Examples of unevenness include: an opening (e.g., through hole and / or threaded hole), a bolt (e.g., a threaded bolt).

[0061] In this context, a tenon is understood to be a (for example, cylindrical or cuboid) extension of a component designed to connect it to another component. For instance, the tenon can be provided as a stepped end section. The component complementary to the tenon can, for example, have a (e.g., groove-shaped) gap into which the tenon fits (e.g., frictionally). In this case, the tenon can also be referred to as a bung (also called a tongue and groove), especially if it closes a complementary bung hole.

[0062] An exemplary implementation of the mounting device is configured as a flange, e.g., a vacuum flange. The flange can be configured for rigid and / or detachable connection to another flange. Two connected flanges form a so-called flange connection. The flange can have a mounting surface (e.g., planar). Optionally, the flange can be penetrated by an opening (also referred to as a flange opening) which is surrounded by the mounting surface, e.g., along a closed path. The flange connection can be configured so that two flanges are arranged with their mounting surfaces facing each other, e.g., in contact. The flange opening of a vacuum chamber housing can open into the interior of the vacuum chamber housing, e.g., adjacent to it. Optionally, the flange can have a groove that surrounds the flange opening, e.g.,The groove runs along the closed path surrounding the flange opening and / or adjoins the mounting surface. A gasket, such as a metal or plastic gasket, can optionally be accommodated in the groove (also referred to as a sealing groove). Optionally, the flange can have a projection that extends over the mounting surface. For example, the mounting surface may protrude.

[0063] An exemplary implementation of the assembly device is configured as a coupling device. A coupling device is designed to connect two components (e.g., shafts), one or more of which are rotatably mounted, for example, by means of a rigid, elastic, movable, and / or detachable connection between the two components. The coupling device is specifically designed to transmit a torque between the two components, for example, by setting them into a rotary motion. An exemplary implementation of the coupling device may, for example, include a clamping device, teeth, or similar elements for connecting the two components.

[0064] The term "vacuum pressure" here refers to a negative pressure in the vacuum range (i.e., a pressure of less than 0.3 bar), e.g., a pressure in a range of approximately 10 mbar to approximately 1 mbar (in other words, rough vacuum) can be provided, or less, e.g., a pressure in a range of approximately 1 mbar to approximately 10 3 mbar (in other words, fine vacuum) or less, e.g., a pressure in the range of approximately 10 3 mbar to approximately 10 7 mbar (in other words, high vacuum) or less, e.g., a pressure of less than high vacuum, e.g., less than approximately 10 7 mbar.

[0065] Here, the term "vacuum-" in connection with a component (e.g., chamber, line, valve, etc.) indicates that the component is vacuum-compatible (e.g., tested for vacuum operation) and is then also referred to as a vacuum component. Examples of vacuum components include: vacuum chamber, vacuum line, vacuum valve, vacuum pump, vacuum chamber housing, etc. A vacuum component is designed to provide and / or operate under a vacuum pressure, and / or to provide (e.g., withstand) a pressure differential between the vacuum pressure and atmospheric pressure.

[0066] According to various embodiments, the vacuum chamber can be provided by means of a chamber housing in which one or more chambers are provided. The chamber housing can, for example, be coupled to a pump arrangement, e.g., a vacuum pump arrangement (e.g., gas-conducting), to provide a negative pressure or a vacuum (vacuum chamber housing) and be designed to be stable enough to withstand the effects of atmospheric pressure in the evacuated state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can enable the removal of some of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in a chamber housing. In other words, the chamber housing can be configured as a vacuum chamber housing.A coating chamber can be set up as a vacuum chamber.

[0067] A rotary table system features a disc-shaped substrate carrier (also called a turntable) that holds multiple substrates and is set in rotation, transporting the substrates along a circular path. The rotary table system represents a compact alternative to the continuous flow system, where the substrate is transported along a straight path through the entire vacuum coating system, requiring significantly more installation space.

[0068] In this context, a sealing device is understood to be a device for sealing. Exemplary components (also referred to as sealing components) of the sealing device include: one or more sealing surfaces; a sealing groove; one or more seals (e.g., a metal gasket or a plastic gasket); one or more wipers. The plastic gasket may, for example, include or consist of an elastomer (also referred to as an elastomeric seal). The sealing device (or at least one or more sealing components thereof) may, for example, be a seal along a closed path. Exemplary types of seals include: O-ring, lip seal, double-lip seal. Exemplary properties of a seal include: a hardness of less than 85 Shore A; annular shape; and / or having a sealing lip.

[0069] A sealing device can generally be used to seal two areas against each other, thereby preventing or at least reducing material exchange between the two areas (e.g., through the sealing device). According to various embodiments, a pressure differential sealed during operation (e.g., by means of a sealing device), between which mass transfer is reduced or prevented, can have a value in the range of a few millibars (mbar) to several bar (bar), e.g., in a range of approximately 1 mbar to approximately 10 bar, e.g., in a range of less than approximately 1 mbar (in the case of vacuum to vacuum), e.g., in a range of approximately 1 bar (in the case of atmosphere to vacuum) to approximately 6 bar (in the case of coolant to vacuum or atmosphere).

[0070] Fig. 1 A illustrates a vacuum arrangement according to various embodiments 100a in a schematic side view or cross-sectional view, preferably set up according to Example 1 .

[0071] An exemplary implementation of the fluid coupling connector (preferably according to Example 9) has a fluid coupling connector 106 that tapers conically in the coupling direction 101 and has a first fluid channel 106s (also referred to as the connector channel) extending at least partially along the coupling direction 101. For example, the fluid coupling connector 106 can be mandrel-shaped. The connector channel 106s can, for example, open into a fluid connection (also referred to as the connector port) or be fluid-conductingly coupled to it by means of a first fluid line. Alternatively or additionally, the fluid coupling connector 106 can have an end face 106s towards which the fluid coupling connector 106 tapers, and which has an opening (also referred to as the end face opening or channel opening) into which the connector channel 106s opens.For the sake of simplicity, reference is made here to a configuration in which the first vacuum flange 102 (e.g., monolithic) is part of a chamber cover 104, e.g., a plate-shaped one, forming a wall. It can be understood that what is described here can apply analogously to a configuration in which the fluid coupling bushing 116 is part of a chamber cover 104, e.g., a plate-shaped one, forming a wall 114 (e.g., a terminal wall).

[0072] An exemplary implementation of the fluid coupling socket 116 (preferably according to Example 9) has a recess 116v (also referred to as the plug receptacle 116v) that tapers in a complementary manner to the fluid coupling plug 106, into which a second fluid channel 116s (also referred to as the socket channel 116s) extends at least partially along the coupling direction 101. The socket channel 116s can, for example, open into a fluid connection (also referred to as a socket connection) or be fluid-conductingly coupled to it by means of a fluid line.

[0073] An exemplary implementation of the first vacuum flange 102 has a sealing surface facing the end face 102s and / or extending transversely to the coupling direction 101. Alternatively or additionally, the first vacuum flange 102 extends along a closed path around the fluid coupling connector 106.

[0074] An exemplary implementation of the second vacuum flange 112 has a sealing surface facing away from the recess 116b and / or extending transversely to the coupling direction 101. Alternatively or additionally, the second vacuum flange 112 extends along a closed path around the fluid coupling bushing 116.

[0075] Fig.1B illustrates a vacuum arrangement according to various embodiments 100b in a schematic side view or cross-sectional view, preferably set up according to one of the embodiments 100a and / or according to Example 10.

[0076] In the vacuum-tight joined state, the facing sealing surfaces of the first vacuum flange 102 and the second vacuum flange 112 can touch each other and / or contact the same seal 152. The joined state can be maintained, for example, by a force based on atmospheric pressure, which presses the first vacuum flange against the second vacuum flange.

[0077] An exemplary implementation of the sealing structure has a first sealing device 154 (e.g., comprising a sealing ring) which is attached to the end face 102s and surrounds the channel opening. Furthermore, the sealing structure has a second sealing device 156 (e.g., comprising a sealing ring) which surrounds the fluid coupling connector 106 along a closed path.

[0078] An exemplary implementation (preferably according to Example 14) has a slit-shaped cavity 258 (also referred to as a gap section) formed between the fluid coupling plug and the fluid coupling socket, wherein the cavity is bounded by the first and second sealing devices, e.g. on opposite sides.

[0079] An exemplary implementation (preferably according to) the (e.g., annular) gap between the fluid coupling plug 106 and the fluid coupling coupling 116 has an (e.g., annular) section 258 (also referred to as gap section 258 or collection chamber 258) arranged between the first sealing device 154 and the second sealing device 156. Furthermore, a suction channel 260 opens into the gap section 258, which facilitates the extraction of fluid from the gap section 258. The suction channel 260 can, for example, open into a fluid connection (also referred to as a suction connection) or be fluid-conductingly coupled to it by means of a fluid line (also referred to as a suction line). Fig. 2A illustrates a vacuum arrangement according to various embodiments 200a in a schematic cross-sectional view, preferably configured according to one of the embodiments 100a to 100b and / or preferably according to Example 15 or Example 16.

[0080] An exemplary implementation (preferably according to Example 16) of the first vacuum flange has several centering pins 202, each of which tapers in the coupling direction 101 and / or is mandrel-shaped, e.g., has a cylindrical section. The second vacuum flange 114 can have an opening for each of the centering pins 202, into which the centering pin 202 engages when the two vacuum flanges 102, 114 are joined.

[0081] An exemplary implementation of the connector channel 106s is fluidly coupled to the connector terminal 206 by means of a first fluid line 206I. An exemplary implementation of the socket channel 116s is fluidly coupled to the socket terminal 216 by means of a second fluid line 226I.

[0082] An exemplary implementation of the vacuum arrangement further includes an electrical coupling device 252, which has an electrical plug and an electrical coupling.

[0083] Fig. 2B illustrates a vacuum arrangement according to various embodiments 200b in a schematic side view or cross-sectional view, preferably set up according to one of the embodiments 100a to 200a and / or preferably according to Example 15 or Example 16.

[0084] An exemplary implementation of the vacuum chamber arrangement features several centering pins 202, which differ from one another in length and diameter. This achieves stepwise centering and thus facilitates assembly.

[0085] Fig. 3A illustrates a vacuum arrangement according to various embodiments 300a in a schematic cutaway detail view of the fluid coupling bushing 116, preferably configured according to one of the embodiments 100a to 200b, and Fig. 3B a side view 300b thereof.

[0086] An exemplary implementation of the 116v connector receptacle features (e.g., per sealing device) one or more frustoconical 316k sections. This facilitates the insertion of the sealing devices. The 116v connector receptacle also features a cylindrical 316z section per frustoconical section, which is bounded by a cylindrical circumferential surface. This improves the seal.

[0087] An exemplary implementation of the fluid coupling socket 116 has a housing 352 in which the plug receptacle 116v is formed. The housing 352 has a mounting device 352m for mounting the housing 352 to the second vacuum flange 112.

[0088] An exemplary implementation of the extraction channel 260 is fluidly coupled to the extraction port 360 by means of the extraction line 360I.

[0089] Fig. 4A illustrates a vacuum arrangement according to various embodiments 400a in a schematic cross-sectional view, preferably configured according to one of the embodiments 100a to 300b and / or preferably configured according to Example 3.

[0090] An exemplary implementation (preferably according to Example 4) of the mounting terminal adjoins a chamber opening 802o, which opens into the interior 802k (also referred to as the housing interior 802k) of the vacuum chamber housing 802. The mounting terminal has the second vacuum flange 112 (then also referred to as the chamber flange), which is provided, for example, as part of a projecting chamber wall 114 (then also referred to as the terminal wall) and / or surrounds the chamber opening 802o along a closed path. The mounting terminal further includes the fluid coupling socket 116, for example arranged next to the chamber flange 112, and the socket connection 216.

[0091] An exemplary implementation (preferably according to Example 6 and / or Example 23) of the processing module has a chamber cover 104, which includes the first vacuum flange 102 (also referred to as the cover flange 102). Furthermore, the chamber cover 104 has the fluid coupling connector 106, for example, arranged next to the cover flange 102, and the connector terminal 206. A processing device 852 (e.g., comprising a sputtering device and / or plasma source) is also attached to the chamber cover 104 (then also referred to as the process cover 104). The chamber cover 104 also has one or more media passages 854 (e.g., comprising a fluid passage), which are fluidly coupled to the connector channel 106s via the connector terminal 206 and / or via which the processing device 852 is fluidly coupled to the fluid coupling connector 106.

[0092] Fig. 4B illustrates a vacuum arrangement according to various embodiments 400b in a schematic top view from the coupling direction 101, preferably set up according to one of the embodiments 100a to 400a and / or preferably according to Example 6.

[0093] An exemplary implementation of the chamber wall 114 includes a mounting device 860 for mounting the processing device, wherein the mounting device 860 has one or more media passages 854. The chamber flange 102 has one or more seals 152 which surround the mounting device 860 along a closed path.

[0094] Fig. 5A illustrates a processing module according to various embodiments 500a in a schematic cross-sectional view, preferably configured according to one of the embodiments 100a to 400b and / or preferably configured according to Example 23.

[0095] An exemplary implementation of the transport base 502 is arranged on the side of the chamber cover 104 opposite the processing device (not shown). The transport base 502 has one or more recesses 504 (also referred to as fork receptacles) for receiving a transport fork. The transport base 502 can have one or more openings 504o that open into the fork receptacle 504 along the coupling direction 101. Alternatively or additionally, the fork receptacle 504 can extend longitudinally along the coupling direction 101. The transport base 502 can, for example, be configured as a workpiece carrier.

[0096] An exemplary implementation of the locking device (preferably according to Example 27) has one or more pairs of detent blades 506, each detent blade 506 being rotatably mounted and / or which (e.g., their rotational movement) are coupled to one another by means of an actuator 508 (e.g., a gearbox thereof). The fork receptacle 504 is arranged between the detent blades 506 of a pair (or at least between their axis of rotation).

[0097] An exemplary implementation of the locking blade 506 is rotatably mounted by means of a bearing device 510, so that it can be moved into a first position and a second position by means of a rotary movement. In the first position, the locking blade 506 engages in the fork receptacle 504. In the second position, the locking blade 506 is positioned next to the fork receptacle 504.

[0098] An exemplary implementation of the return mechanism (preferably configured according to Example 30) has one or more springs 512 that couple the detent blade 506 to the mounting base 502. The detent blade 506 can be deflected from the first position and / or into the second position against a return force generated by the return mechanism (e.g., its spring).

[0099] It can be understood that the restoring force can alternatively or additionally be generated based on the weight of the detent blade. In this case, the restoring device (preferably configured according to Example 30) can be configured such that the detent blade 506 can be deflected from two positions and / or into the first position against a restoring force generated by the restoring device (e.g., its spring). This facilitates the operation of the locking device.

[0100] An exemplary implementation of the actuator 508 is configured as a mechanical actuator and / or features a lever as a transmission mechanism. The actuator 508 can, for example, be configured to generate a torque in response to being actuated, by means of which a rotary movement of one or more detent blades 506 can be induced.

[0101] Fig. 5B illustrates a vacuum arrangement according to various embodiments 500b in a schematic cross-sectional view, preferably configured according to one of the embodiments 100a to 500a and / or preferably configured according to Example 23.

[0102] An exemplary implementation of the transport fork 552 is designed to be inserted into the fork receptacle 504 along the coupling direction 101. Each locking blade is designed to be rotated from the first position and / or into the second position by inserting the fork receptacle 504 into the fork receptacle 504 along the coupling direction 101.

[0103] An exemplary implementation (preferably according to Example 32) of the vacuum arrangement includes a forklift 560 to which the transport fork 552 is mounted.

[0104] An exemplary implementation of the industrial truck features a frame and several wheels by means of which the frame (also referred to as the truck frame) is supported on a surface. The truck frame has a mounting device to which the transport fork 552 is mounted or can be mounted.

[0105] Fig. 6A illustrates a vacuum arrangement according to various embodiments 600a in a schematic top view, preferably configured according to one of the embodiments 100a to 500b and / or preferably configured according to Example 31.

[0106] An exemplary implementation (preferably according to) the beam-shaped tines has, for example, a recess 602a (also referred to as a locking recess) for each tine. Furthermore, the locking device has a detent blade 506 for each locking recess 602a, which engages in the locking recess 602a when the transport fork 552 is inserted into the fork receptacle, for example, by moving the detent blade 506 into its first position. This implements a positive locking of the transport fork 552 in the locking recess 602a, thus blocking movement of the transport fork 552 out of the fork receptacle 504. By actuating the actuator 508, the locking blade 506 can be moved into the second position, so that the locking blade is moved out of the locking recess 602a, which releases the positive locking mechanism.

[0107] An exemplary implementation of the locking device (preferably according to Example 28) has a shaft 610 by means of which several detent blades 506 are coupled to each other and / or by means of which at least one detent blade 506 is coupled to the actuator 508. The shaft 610 can, for example, be rotatably mounted by means of a bearing device. The shaft 610 can be configured to exchange torque between several detent blades 506 and / or between at least one detent blade 506 and the actuator 508.

[0108] Fig. 6B illustrates a vacuum arrangement according to embodiments 600a in a schematic top view, preferably configured according to one of embodiments 100a to 600a, in a state 600b in which the transport fork 552 is at least partially inserted into the locking recess 602a and / or is positively locked in the locking recess 602a by means of the locking device.

[0109] Fig. 7A illustrates a vacuum arrangement according to various embodiments 700a in a schematic cross-sectional view, preferably configured according to one of the embodiments 100a to 600b and / or preferably configured according to Example 18.

[0110] An exemplary implementation of the vacuum chamber housing 802 comprises a housing base 704 and a housing top 702, and two housing openings, each opening opening into the housing interior 802k. The two housing openings include a first housing opening 702o that penetrates the housing top 702 (e.g., along a rotational axis 105), and a second housing opening 704o that penetrates the housing base 704 (e.g., along the rotational axis 105). Furthermore, the vacuum assembly includes a chamber cover configured to provide a vacuum-tight seal for the first housing opening.

[0111] An exemplary implementation of the first housing opening 702o has a larger diameter D than the second housing opening 704o and / or than the mounting surface 706 (also referred to as the housing mounting surface 706). Furthermore, the first housing opening 702o has a larger diameter D than the rotary feedthrough 720, e.g., its stator 720s. This allows the rotary feedthrough 720 to be inserted through the first housing opening 702o into the housing interior 802k and subsequently mounted on the mounting surface 706.

[0112] An exemplary implementation of the mounting surface 706 of the vacuum chamber housing 802 is annular and / or implemented by means of an annular vacuum flange 716 (also referred to as feedthrough flange 716), which limits and / or penetrates the second housing opening 704o.

[0113] An exemplary implementation of the stator 720s of the rotary feedthrough 720 has a smaller diameter D than the first housing opening 702o and / or a larger diameter D than the second housing opening 704o and / or the mounting surface 706. Alternatively or additionally, the stator 720s has a flange as a mounting device, which is arranged complementary to the housing mounting surface 706.

[0114] An exemplary implementation of the rotor 720r of the rotary feedthrough 720 is rotatably mounted relative to the stator 720s by means of a bearing device, at least about an axis of rotation which, when the stator 720s is mounted on the housing mounting surface 706, is aligned along the axis of rotation direction 105.

[0115] An exemplary implementation of the rotary feedthrough 720 is configured to seal the second housing opening 704o in a vacuum-tight manner, for example, when the stator 720s is mounted on the housing mounting surface 706. Alternatively or additionally, the rotor 720r projects through the second housing opening 704o, for example, when the stator 720s is mounted on the housing mounting surface 706. Fig. 7B illustrates a vacuum arrangement according to various embodiments 700b in a schematic sectional perspective view, preferably configured according to one of the embodiments 100a to 700a and / or preferably configured according to Example 18.

[0116] An exemplary implementation of the chamber housing has two housing segments 702z, 704z, between which a gap 770 (also referred to as the housing gap) is formed, of which a first housing segment 702z has the housing top 702 and a second housing segment 704z has the housing bottom 704. The second housing segment 704z further has the feedthrough flange 716, through which the second housing opening 704o extends.

[0117] An exemplary implementation (preferably according to Example 19) of the transport device has several substrate carrier segments 780, each substrate carrier segment 780 being arranged in the housing gap 770. Furthermore, the transport device, e.g., its substrate carrier holding device 790, has a mounting base 792 for each substrate carrier segment, on which the substrate carrier segment is mounted.

[0118] An exemplary implementation of the mounting base 792 is rotatably mounted and / or has two clamping jaws that are slidably mounted relative to each other, between which a receiving gap is formed for receiving the substrate carrier segment 780.

[0119] An exemplary implementation of the multiple substrate carrier segments 780 provides a multi-part turntable as a substrate carrier, whose substrate carrier segments 780 are annular segment-shaped (for example, in the form of pie slices). The rotor provides a hub to which a clamping jaw is coupled for each substrate carrier segment for mounting and aligning the substrate carrier segment. The clamping jaw can, for example, be rotatably mounted, for instance, by means of a swivel joint with a shaft. The swivel joint facilitates tilting and / or lifting the substrate carrier, or more generally, aligning it. Furthermore, additional screws can be provided to lock the resulting position of the swivel joint.

[0120] An exemplary implementation of the substrate carrier holding device 790 has a first ring 766, which has several teeth facing the first housing opening 702o, which are configured to form a Hirth toothing. Complementarily, the rotor, e.g., its hub, has a second ring 768 (also referred to as a toothed ring), which has several teeth facing away from the first housing opening 702o, which are configured to form the Hirth toothing.

[0121] Fig. 8A illustrates a vacuum arrangement according to various embodiments 800a in a schematic cross-sectional view, preferably configured according to one of the embodiments 100a to 700b and / or preferably configured according to Example 18, when the transport device, e.g. its substrate carrier holding device 790, and the rotor 720r are coupled together.

[0122] An exemplary implementation of the mounting of the rotary feedthrough 720 involves attaching its stator 720s to the mounting surface (e.g., by means of screws) and its rotor 720r (e.g., toothed ring) to the substrate carrier holding device 790 (e.g., by means of screws). Optionally, the substrate carrier holding device 790 can be coupled to the rotor 720r by means of the Hirth coupling, which facilitates centering and the transmission of torque.

[0123] Fig. 8B illustrates a vacuum arrangement according to various embodiments 800a in a schematic cutaway perspective view, preferably configured according to one of the embodiments 100a to 700b and / or preferably configured according to Example 18, when the vacuum chamber housing, e.g. its housing mounting surface 706, and the stator 720s are coupled together.

[0124] An exemplary implementation of the stator features a stator frame 720g in the form of a housing in which a shaft 720w of the rotor 720r is arranged.

[0125] The following describes various work examples that relate to what has been described previously and depicted in the figures.

[0126] Example 1 uses a rotary table as a substrate carrier, which is mounted and / or supported by a Hirth coupling. The Hirth coupling ensures self-centering of the rotary table on the hub relative to its axis of rotation, simplifying maintenance (e.g., assembly). Furthermore, a coupling generally allows for the transmission of high torque, thus requiring less material for the remaining assembly.

[0127] Example 2 provides a rotary union which, including rotor and stator, can be transported out of the vacuum chamber, for example, without having to disassemble it, through an opening in the vacuum chamber housing, thus simplifying maintenance (e.g., disassembly and assembly). This reduces, for example, the maintenance time when the rotary union needs to be replaced.

[0128] Example 3 presents an automatically coupling fluid coupling comprising a fluid coupling plug and a fluid coupling socket. The geometry of the fluid coupling plug and socket allows for sufficient play during insertion, contributing to centering, and ensures that the sealing rings achieve an automatic seal upon connection.

[0129] Working Example 4 provides a mounting terminal that incorporates the fluid coupling socket and protrudes in a collar-like manner from a housing opening of the vacuum chamber housing, so that the fluid coupling socket is located outside the vacuum flange. This implements an atmospheric-side fluid coupling, which reduces the risk of contamination of the vacuum chamber interior.

[0130] Example 5 shows the fluid coupling, which is coupled to a mass flow controller. This simplifies the supply of sputtering gas to the processing device. The mass flow controller is attached to the vacuum chamber housing, so it does not need to be removed when the process module is disassembled. This simplifies maintenance.

[0131] Example 6 provides a process cover to which a processing device is attached or can be attached. The process cover has a first side on which the processing device is located and from which the fluid coupling plug protrudes. Complementarily, the vacuum chamber housing has a vacuum flange against which the first side of the process cover can be placed for mounting. The fluid coupling plug implements, for example, an automatically coupling fluid coupling.

[0132] Example 7 provides an automatic locking device (also called a locking latch) that automatically locks the transport fork in the fork receptacle as soon as the transport fork is inserted far enough into the fork receptacle. This prevents incorrect operation and resulting damage.

[0133] Example 8 presents a forklift truck with an attached transport fork that is designed to be locked (e.g., automatically) by a locking device when inserted into the fork receptacle. This reduces the risk of errors and damage. The automatic locking mechanism serves as a safety feature and can be implemented, for example, by means of a locking blade that engages in a recess in the transport fork. A lever can also be provided to lock the position of the locking blade, thus maintaining the locking action.

[0134] Example 9 provides a mounting base whose fork receptacle is bordered by one or more sacrificial walls (also called protective strips), which are, for example, replaceable. The replaceable sacrificial walls serve, for example, as protection and can be available in different geometries to allow for modification of the fork receptacle geometry.

[0135] Working example 10 provides a frustoconical fluid coupling plug, which facilitates the interlocking with the fluid coupling socket, and thus the assembly.

[0136] Working example 11 provides a fluid coupling whose fluid coupling plug and fluid coupling socket are set up to implement a quick coupling.

[0137] Example 12 presents a fluid coupling plug whose end-face sealing ring (e.g., O-ring) is only compressed when inserted into the fluid coupling socket, but does not need to slide. This improves control over the compression of the sealing ring, which enhances its sealing effect and reduces its wear. Optionally, an additional circumferential sealing ring can be provided, which seals against rough vacuum and / or provides a collection chamber that can be dried by means of intermediate extraction.

[0138] Example 13 provides a fluid (e.g., gaseous) which is exchanged during operation via the fluid coupling, e.g., to supply a processing device with the fluid. For example, the fluid can contain a sputtering gas, e.g., working gas and / or reactive gas.

Claims

Patent claims 1. Vacuum arrangement comprising: • a first vacuum flange (102) and a second vacuum flange (112), which are arranged to be brought into a vacuum-tight joined state along a coupling direction (101); • a fluid coupling comprising a fluid coupling plug (106) coupled to the first vacuum flange (102) and a fluid coupling socket (116) coupled to the second vacuum flange (112); • wherein the fluid coupling socket (116) has a recess (116v) that tapers in the coupling direction (101) for receiving the fluid coupling plug (106).

2. Vacuum arrangement according to claim 1, wherein the fluid coupling plug (106) tapers in the coupling direction (101) in a manner complementary to the fluid coupling socket (116).

3. Vacuum arrangement according to one of claims 1 to 2, further comprising: one or more than one fluid connection, wherein a first fluid connection (206) is fluidly coupled to the recess (116v) of the fluid coupling socket (116) and / or wherein a second fluid connection (206) is fluidly coupled to the fluid coupling plug (106).

4. Vacuum arrangement according to any one of claims 1 to 3, wherein the fluid coupling has one or more than one sealing device attached to the fluid coupling plug (106), wherein: • a first sealing device (154) is arranged on an end face of the fluid coupling plug (106); and / or • a second sealing device (156) surrounds the fluid coupling plug (106) along a closed path.

5. Vacuum arrangement according to claim 4, comprising a fluid coupling: • a gap formed between the fluid coupling plug (106) and the fluid coupling socket (116), wherein the gap is adjacent to one or more sealing devices; • a suction channel (260) that opens into the gap.

6. Vacuum arrangement according to any one of claims 1 to 5, wherein the first vacuum flange (102) has one or more than one centering pin (202) projecting in the coupling direction (101), and wherein the second vacuum flange (112) has one or more than one centering opening complementary thereto.

7. Vacuum arrangement according to any one of claims 1 to 6, further comprising: • a vacuum chamber housing (802) which includes the second vacuum flange (112); and • a processing module which includes the first vacuum flange (102).

8. Vacuum arrangement according to claim 7, further comprising: • a rotary feedthrough (720) which has a stator (720s) and a rotor (720r) rotatably mounted thereon; • wherein the vacuum chamber housing (802) has a first housing opening (702o) which is arranged relative to the rotary feedthrough (720) such that the rotary feedthrough (720) fits through the first housing opening (702o) for transporting the rotary feedthrough (720) through the housing opening (702o); • wherein the vacuum chamber housing (802) further comprises a mounting surface (706) facing the first housing opening (702o), which is arranged to be brought into a vacuum-tight joined state with the stator (720s).

9. Vacuum arrangement according to one of claims 7 or 8, comprising: • a transport device which is configured to transport a substrate in the vacuum chamber housing (802), wherein the transport device is configured to be coupled to the rotor (720r) by means of a Hirth coupling (766, 768); • wherein the transport device has one or more mounting bases (792) and, for each mounting base (792), a segment (780) of a substrate carrier which is configured to be mounted on the mounting base (792).

10. Vacuum arrangement according to one of claims 7 to 9, further comprising: • a transport fork (552); • wherein the processing module has a chamber cover (104) and a transport base, wherein the transport base has a recess for receiving the transport fork (552), wherein the chamber cover (104) is arranged to be vacuum-tightly joined to the first mounting flange; • wherein the processing module further comprises a locking device which is designed to positively lock the transport fork (552) received in the recess, so that movement of the transport fork (552) out of the transport base is blocked.

11. Vacuum arrangement according to claim 10, wherein the processing module has a processing device (852) which is coupled to the chamber lid (104); and / or wherein the chamber lid (104) has the first vacuum flange (102).

12. Vacuum arrangement according to one of claims 10 to 11, wherein the locking device has a detent blade which is configured to engage in the recess and / or in an opening of the transport fork (552).

13. Vacuum arrangement according to one of claims 10 to 12, wherein the processing module has a reset device which is configured to transmit a force between the locking device and the transport base against which the locking device can be positioned.

14. Vacuum arrangement according to one of claims 1 to 13, wherein the fluid coupling plug (106) has a first fluid channel which extends along the coupling direction (101).

15. Using the vacuum arrangement according to any one of claims 1 to 14 for generating and processing a substrate in a vacuum.

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