Backup device and substrate work device

Abstract

This backup device 32 for backing up a substrate 90 on which predetermined work is performed from below comprises: a base plate 71 having two or more rows of through hole rows 71B in which a plurality of vertically penetrating through holes 71A are arranged; a base plate lifting mechanism 72 for lifting and lowering the base plate 71; a support plate 74 for supporting a backup pin 73 inserted into each through hole 71A from below; a plurality of locking members 75 provided on the base plate 71, the locking members 75 being provided on each of the through holes 71A, and being capable of being displaced to a locking position in which the backup pin 73 is locked in the base plate 71, and a non-locking position without being locked in the base plate 71; a displacement head 76A provided for each through hole row 71B, the displacement head 76A moving along a through hole row to displace one locking member 75 at a time in sequence, in a state with the base plate 71 lowered and each backup pin 73 in contact with the support plate 74; and a control part 60. The displacement head 76A can selectively displace a discretionary locking member 75 under control by the control part 60. When moving each displacement head 76A along the through hole row 71B, the control part 60 individually controls each displacement head 76A, and displaces the locking members 75 so that the locking members 75 corresponding to the backup pins 73 used for backup of the substrate 90 among the backup pins 73 positioned below a work position 38 of the substrate 90 are positioned at the locking position, and the locking members 75 corresponding to the backup pins 73 not used for backup of the substrate 90 are positioned at the non-locking position.

Description

Backup device and board working device

[0001] The technology disclosed in this specification relates to a backup device and a substrate working device.

[0002] Conventionally, known board working devices that perform predetermined operations on a board backed up by a backup device include a screen printing device that prints a circuit pattern on a board, a dispenser that applies adhesive to a board with a printed circuit pattern, and a component mounting device that mounts components on a board with a printed circuit pattern.The backup device is a device that backs up a board from below using multiple backup pins.The arrangement of the backup pins is changeable, and the arrangement is changed depending on the type of board and the front and back sides.In the following explanation, changing the arrangement of the backup pins is referred to as backup pin reconfiguration.

[0003] In addition, backup pin setup has also been automated in the past (see, for example, Patent Document 1). The backup pin setting device described in Patent Document 1 has a plurality of backup pins arranged in a matrix or staggered pattern. Each backup pin is equipped with a fixing mechanism that fixes the backup pin using hydraulic pressure, air pressure, elastic force, electromagnetic force, or the like, a spring, and a displacement sensor (or pressure sensor). A control unit detects the amount of displacement (or pressure) of the backup pin when the support plate is raised relative to the printed wiring board and the tip of the backup pin abuts against the component, determines whether the tip of the backup pin abuts against the component, and controls the abutting backup pin to a free state, and the backup pin that does not abut against the component to a fixed state.

[0004] Patent No. 3837698

[0005] In recent years, there have been an increasing number of cases where a large number of backup pins, such as hundreds or thousands, are used to improve printing quality due to the miniaturization of circuit patterns and components, and to stabilize the board surface height when mounting components on a board. As mentioned above, the backup pin setting device described in Patent Document 1 is equipped with a fixing mechanism, spring, displacement sensor, etc. for each backup pin, so the number of parts increases as the number of backup pins increases. For this reason, the backup pin setting device described in the same document is not suitable for cases where there are a large number of backup pins.

[0006] Furthermore, since the fixing mechanism described in the document fixes the backup pins using hydraulic pressure, air pressure, elastic force, electromagnetic force, etc., a physical output interface for sending a signal to switch the state of the fixing mechanism is required for each backup pin, and a physical input interface for receiving a signal from the displacement sensor is also required for each backup pin. Therefore, as the number of backup pins increases, the number of output interfaces and input interfaces also increases. In this sense, the backup pin setting device described in the document is not suitable for cases where there are a large number of backup pins. In the following explanation, output interfaces and input interfaces are collectively referred to as IO (Input / Output), and the number of these is referred to as the number of IO points.

[0007] Furthermore, since signal input and output are usually performed sequentially for each IO, if there are a large number of IOs, it takes time to change the backup pins. In this sense, the backup pin setting device described in the document is not suitable for cases where there are a large number of backup pins.

[0008] This specification discloses a technique that allows backup pin setup changeover in a short time while suppressing an increase in the number of IOs and parts, even if there are a large number of backup pins.

[0009] A backup device according to one aspect of the present invention is a backup device that backs up a substrate on which a predetermined operation is being performed from below, and includes a base plate having two or more rows of through holes in which a plurality of through holes penetrating in the vertical direction are aligned, a lifting mechanism that lifts and lowers the base plate, a support member that supports from below backup pins inserted into each of the through holes, a plurality of locking members provided on the base plate, each of which is provided for each of the through holes, and which are displaceable between an locking position where the backup pin is locked to the base plate and an unlocking position where the backup pin is not locked to the base plate, and a displacement head provided for each of the through hole rows, and which allows the base plate to be lowered to lock each of the backup pins. a control unit; and a displacement head that moves along the row of through holes to displace the locking members one by one in sequence while a push pin is in contact with the support member, wherein the displacement head is capable of selectively displacing any of the locking members under the control of the control unit, and the control unit individually controls each of the displacement heads as it moves along the row of through holes to displace the locking members so that, of the backup pins located below the working position of the substrate, the locking members corresponding to the backup pins used to back up the substrate are positioned at the locking position, and the locking members corresponding to the backup pins not used to back up the substrate are positioned at the non-locking position.

[0010] According to the above configuration, even if there are a large number of backup pins, it is possible to change the backup pins in a short time while suppressing an increase in the number of I / O points and parts.

[0011] Schematic diagram of a component mounting line according to the first embodiment. Top view of a component mounting device. Side view of a head unit and a head moving mechanism as viewed from the front. Block diagram showing the electrical configuration of the component mounting device. Side view of a backup device as viewed from the front (base plate lowered). Top view of a base plate. Partial cross-sectional view of a base plate. Top view of a support plate and a locking member displacement mechanism. Side view of a support plate and a locking member displacement mechanism as viewed from the front. Top view of a locking member provided on a base plate (with the base plate seen through). Top view of a locking member, backup pin, and displacement head in a locked position. Top view of a locking member, backup pin, and displacement head in a non-locked position. Cross-sectional view of a locking member in a non-locked position. Base plate and backup Top view of the pin Top view of a locking member provided on the base plate (with the base plate seen through) Side view of the backup device as seen from the front (with the base plate raised) Side view of the backup pin, base plate, and displacement head according to embodiment 2 as seen from the right (with the displacement head lowered) Side view of the backup pin, base plate, and displacement head as seen from the right (with the displacement head moving rearward) Side view of the backup pin, base plate, and displacement head as seen from the right (with the rotating body rotating) Partial cross-sectional view of the backup pin, base plate, and locking member as seen from the front according to embodiment 3 Top view showing the locking member in the locked position Top view showing the locking member in the unlocked position

[0012] [Outline of the embodiment of the present disclosure] First, an outline of the embodiment of the present disclosure will be listed and described.

[0013] (1) A backup device according to an embodiment of the present disclosure is a backup device that backs up a substrate on which a predetermined operation is performed from below, and includes: a base plate having two or more rows of through holes in which a plurality of through holes penetrating in the vertical direction are aligned; an elevating mechanism that elevates the base plate; a support member that supports from below backup pins inserted into each of the through holes; a plurality of locking members provided on the base plate, each of which is provided for each of the through holes, and which are displaceable between an locking position where the backup pin is locked to the base plate and an unlocking position where the backup pin is not locked to the base plate; and a displacement head provided for each of the through hole rows, which is configured to move the base plate downward to lock each of the backup pins. The apparatus includes a displacement head that moves along the row of through holes to displace the locking members one by one in sequence while the up pins are in contact with the support member, and a control unit, wherein the displacement head is capable of selectively displacing any of the locking members under the control of the control unit, and when the control unit moves each of the displacement heads along the row of through holes, the control unit individually controls each of the displacement heads to displace the locking members so that, among the backup pins located below the working position of the substrate, the locking members corresponding to the backup pins used to back up the substrate are positioned at the locking position, and the locking members corresponding to the backup pins not used to back up the substrate are positioned at the non-locking position.

[0014] The backup device described in (1) above requires an IO for the control unit to control the displacement head. However, the number of IOs is limited to the number of through-hole rows plus a number of IOs related to the displacement head movement (e.g., IOs required to control the displacement head movement). This reduces the number of IOs compared to the backup pin setting device described in Patent Document 1. In particular, when an extremely large number of backup pins, such as hundreds or thousands, are used, the number of IOs can be significantly reduced. Furthermore, while the backup device described in (1) above requires a locking member for each through-hole, only one displacement head is required per through-hole row. This reduces the number of parts compared to the backup pin setting device described in Patent Document 1, which requires a fixing mechanism, spring, and displacement sensor (or pressure sensor) for each backup pin. In particular, when an extremely large number of backup pins, such as hundreds or thousands, are used, the number of parts can be significantly reduced. Furthermore, the backup device described in (1) above can reduce the number of IOs, thereby shortening the time required to change backup pins compared to the backup pin setting device described in Patent Document 1. In particular, when an extremely large number of backup pins, such as hundreds or thousands, are used, the time required for setup can be significantly reduced. Therefore, with the backup device described in (1) above, even if the number of backup pins is large, the number of I / O points and parts can be reduced and setup of the backup pins can be performed in a short time.

[0015] (2) In the backup device described in (1) above, the locking member may be rotatably supported on the base plate and may be rotatable between the locking position and the non-locking position.

[0016] The backup pin setting device described in Patent Document 1 mentioned above fixes the backup pin using hydraulic pressure, air pressure, elastic force, electromagnetic force, etc., and has a complex configuration. According to the backup device described in (2) above, the backup pin can be locked to the base plate by rotating the locking member to the locking position, so the backup pin can be locked with a simpler configuration than the backup pin setting device described in Patent Document 1.

[0017] (3) In the backup device described in (1) above, the locking member may be supported by the base plate so as to be slidable in the direction of the row of through holes, and may slide between the locking position and the unlocking position.

[0018] The backup pin setting device described in Patent Document 1 mentioned above fixes the backup pin using hydraulic pressure, air pressure, elastic force, electromagnetic force, etc., and has a complex configuration. According to the backup device described in (3) above, the backup pin can be locked to the base plate by sliding the locking member to the locking position, so the backup pin can be locked with a simpler configuration than the backup pin setting device described in Patent Document 1.

[0019] (4) In the backup device described in any one of (1) to (3) above, the backup pin may have a groove portion formed in the circumferential direction of the backup pin or a protruding portion protruding radially from the backup pin, and the locking position may be a position where at least a part of the locking member enters the groove portion or a position where at least a part of the locking member is directly below the protruding portion.

[0020] According to the backup device described in (4) above, the backup pin can be locked to the base plate by a part of the locking member in the locking position fitting into the recess, or by a part of the locking member being positioned directly below the protruding portion.

[0021] (5) In the backup device described in (4) above, the locking member may have a recess formed on the edge portion on the backup pin side in a top view, the recess being recessed in a direction away from the backup pin, and when the locking member is in the locking position, the edge portion of the recess may fit into the groove portion, or the edge portion of the recess may be located directly below the protrusion portion.

[0022] According to the backup device described in (5) above, the area where the locking member and the backup pin overlap when viewed in the axial direction of the backup pin can be made larger than when no recess is formed, which allows the backup pin to be locked more stably.

[0023] (6) In the backup device described in any one of (1) to (5) above, the displacement head may be switchable between a state in which the engaging member can be displaced and a state in which the displaceable member cannot be displaced, and the control unit may selectively displace the engaging member by moving the displacement head while switching the state of the displacement head.

[0024] According to the backup device described in (6) above, by moving the displacement head while switching the state thereof, any of the locking members can be selectively displaced.

[0025] (7) In the backup device described in (6) above, the locking member may be a metal member that is attracted to a magnet, the displacement head may have an electromagnet, the state in which the locking member can be displaced may be a state in which the electromagnet is excited, and the state in which the locking member cannot be displaced may be a state in which the electromagnet is not excited, and when the displacement head with the electromagnet excited moves in one direction along the row of through holes, the locking member in the non-locking position is attracted and displaced to the locking position, and when the displacement head moves in the other direction, the locking member in the locking position is attracted and displaced to the non-locking position.

[0026] According to the backup device described in (7) above, by switching the state of the electromagnet, the displacement head can be switched between a state in which it is possible to displace the locking member and a state in which it is not possible to displace the locking member.

[0027] (8) The backup device described in (6) above may include a displacement head lifting mechanism that raises and lowers the displacement head, wherein the state in which the locking member can be displaced is a state in which the displacement head is raised above the lower end of the locking member, and the state in which the locking member cannot be displaced is a state in which the displacement head is lowered below the lower end of the locking member, and when the displacement head is raised above the lower end of the locking member and moves in one direction along the row of through holes, the locking member in the non-locking position is pushed by the displacement head and displaced to the locking position, and when the displacement head moves in the other direction, the locking member in the locking position is pushed by the displacement head and displaced to the non-locking position.

[0028] According to the backup device described in (8) above, by raising and lowering the displacement head, the displacement head can be switched between a state in which it is possible to displace the locking member and a state in which it is not possible to displace the locking member.

[0029] (9) In the backup device described in (8) above, the displacement head comprises a head main body and a rotating body rotatably supported on an upper end of the head main body, the rotating body being supported on a rotating shaft extending in a direction perpendicular to the row of through holes and parallel to the surface of the base plate, and the upper end of the rotating body being located above the lower end of the locking member when the locking member can be displaced, and one end of the rotating body being locked to the rotating body and the other end being locked to the head main body. and a biasing member biased by the biasing member, wherein the range of displacement of the locking member is restricted between the locking position and the non-locking position, and when the locking member is displaced to the locking position or the non-locking position and further displacement is restricted, the rotating body is rotated by a reaction force from the locking member until its upper end is below the lower end of the locking member, and after passing under the locking member in that state, is biased by the biasing member to rotate in the opposite direction and return to a position where its upper end is above the lower end of the locking member.

[0030] When the range of displacement of the locking member is restricted between the locked position and the unlocked position, if the displacement head does not have a rotating body, when the locking member is displaced to the position where displacement is restricted, the displacement head will be blocked by the locking member and will not be able to move any further. According to the backup device described in (9) above, when the displacement head moves further after pushing the locking member to the position where displacement is restricted, the rotating body rotates due to the reaction force from the locking member until its upper end is below the lower surface of the locking member. This allows the displacement head to pass under the locking member. Then, after passing under the locking member, it rotates in the opposite direction to return to a position where its upper end is above the lower end of the locking member, making it possible to displace the next locking member.

[0031] (10) A board work device according to an embodiment of the present disclosure is a board work device that performs a predetermined operation on a board, and includes a backup device described in any one of (1) to (9) above, and a work unit that performs the predetermined operation on the board that is backed up from below by the backup device.

[0032] According to the board working device described in (10) above, even if the number of backup pins is large, the number of I / O points and the number of parts can be reduced and the setup of the backup pins can be changed in a short time.

[0033] [Details of the embodiments of the present disclosure] The following describes details of the embodiments of the present disclosure. The present disclosure is not limited to these examples, but is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims.

[0034] <Embodiment 1> In the following description, the left-right direction shown in Fig. 2 is referred to as the X direction, the front-rear direction as the Y direction, the up-down direction shown in Fig. 3 as the Z direction, and the right side shown in Fig. 2 is referred to as the upstream side and the left side as the downstream side. In the following description, the reference numerals in the drawings may be omitted for the same components, with some exceptions.

[0035] 1, a component mounting line 11 for mounting components onto boards will be described. The component mounting line 11 is equipped with a plurality of board working devices (loader 12, screen printing device 13, print inspection device 14, dispenser 15, a plurality of component mounting devices 1, post-mounting appearance inspection device 16, reflow device 17, post-cure appearance inspection device 18, unloader 19, etc.) that perform predetermined operations on boards, and these devices are arranged in a row via a plurality of conveyors 20.

[0036] Of these devices, the screen printing device 13, the dispenser 15, and the component mounting device 1 are equipped with a backup device that backs up the board from below. These devices equipped with a backup device are examples of board work devices equipped with a backup device. In the following explanation, the component mounting device 1 will be used as an example of a board work device equipped with a backup device.

[0037] 2, the component mounting apparatus 1 includes a stand 30, a transport conveyor 31, four component supply devices 33, a head unit 34, a head moving mechanism 35, two component imaging cameras 36, a board imaging camera 37, a backup device 32 (see FIG. 5), a control unit 60 (see FIG. 4), and an operation unit 61 (see FIG. 4). The head unit 34 and the head moving mechanism 35 are examples of a working unit.

[0038] The stand 30 has a rectangular shape in a plan view and a flat top surface. The area 38 indicated by the two-dot dashed line in Figure 2 is a work position (hereinafter referred to as work position 38) where the board 90 is fixed when mounting components 91 on the board 90. The work position 38 is not constant and varies depending on the size and shape of the board 90. Even for the same type of board 90, the work position 38 may differ between the front and back sides.

[0039] The transport conveyor 31 is a device that transports the board 90 carried in from the upstream side to the work position 38, and carries the board 90, on which components 91 have been mounted at the work position 38, downstream. The transport conveyor 31 includes a pair of conveyor belts 31A, 31B that move in a circular motion in the X direction, a plurality of rollers around which these conveyor belts are wound, and a conveyor drive motor 66 (see FIG. 4) that rotates and drives the rollers.

[0040] The component supply devices 33 are arranged in four locations, two on each side in the X direction, on both sides of the component mounting apparatus 1 in the Y direction. The component supply device 33 shown in FIG. 2 is a tape component supply device that supplies components 91 held on a component tape. The component supply device 33 has multiple tape feeders 33A attached to it, aligned horizontally in the X direction. Each tape feeder 33A is equipped with a reel around which the component tape is wound, and an electric feeding device that unwinds the component tape from the reel, and supplies the components 91 one by one. The component supply device 33 is not limited to a tape component supply device, but may be a tray component supply device that supplies components placed on a tray, or some other type of component supply device.

[0041] The head unit 34 has a plurality of (here, five) mounting heads 39 that pick up and release components 91. The head unit 34 according to the first embodiment is a so-called in-line type, and the plurality of mounting heads 39 are arranged side by side in the X direction. The head unit 34 will be described later.

[0042] The head movement mechanism 35 is a mechanism that moves the head unit 34 in the X and Y directions within a predetermined movable range. The head movement mechanism 35 includes a beam 40 that supports the head unit 34 so that it can move back and forth in the X direction, a pair of Y-axis guide rails 41 that support the beam 40 so that it can move back and forth in the Y direction, an X-axis motor 62 (see FIG. 4) that moves the head unit 34 back and forth in the X direction, and a Y-axis motor 63 (see FIG. 4) that moves the beam 40 back and forth in the Y direction. These motors may be servo motors or linear motors. The same applies to the other motors.

[0043] The two component imaging cameras 36 are each provided between two component supply devices 33 aligned in the X direction. The component imaging cameras 36 capture images of components 91 picked up by the mounting head 39 from below. The captured images are used to determine the acceptability of the component shape and the position and angle of the components 91 relative to the mounting head 39. The board imaging camera 37 captures images of fiducial marks marked on the top surface of the board 90 from above. The board imaging camera 37 is attached to the head unit 34 and moves in the X and Y directions together with the head unit 34. The board imaging camera 37 is also used to determine the acceptability of the mounting position and mounting angle of the components 91 mounted on the board 90. The backup device 32 (see FIG. 5) is disposed below the transport conveyor 31 and backs up the board 90 from below after it is transported to the work position 38 by the transport conveyor 31. "Backup" can also be interpreted as "support." The backup device 32 will be described later.

[0044] The head unit 34 will be described with reference to FIG. 3. The head unit 34 has multiple mounting heads 39, a Z-axis motor 64 (see FIG. 4) that raises and lowers the mounting heads 39 individually, and an R-axis motor 65 (see FIG. 4) that rotates the mounting heads 39 all around their axes at once. The mounting heads 39 each have a cylindrical nozzle shaft 39A that extends vertically and a suction nozzle 39B that is detachably attached to the lower end of the nozzle shaft 39A. Negative and positive pressures are supplied to the suction nozzle 39B from an air supply device (not shown) via the nozzle shaft 39A. The suction nozzle 39B picks up a component 91 when negative pressure is applied, and releases the component 91 when positive pressure is applied.

[0045] Here, an in-line type head unit 34 has been described as an example of the head unit 34, but the head unit 34 may also be a so-called rotary head in which a plurality of mounting heads 39 are arranged on the circumference.

[0046] 3. Electrical Configuration of the Component Mounting Apparatus The electrical configuration of the component mounting apparatus 1 will be described with reference to Fig. 4. The component mounting apparatus 1 includes a control unit 60 and an operation unit 61. The control unit 60 includes an arithmetic processing unit 60A, a motor control unit 60B, a memory unit 60C, an image processing unit 60D, an external input / output unit 60E, and a feeder communication unit 60F. The control unit 60 also serves as a control unit for the backup device 32.

[0047] The arithmetic processing unit 60A includes a CPU, RAM, etc., and controls each unit of the component mounting apparatus 1 by executing a control program stored in the storage unit 60C. The motor control unit 60B controls each motor, such as the X-axis motor 62 and the Y-axis motor 63, under the control of the arithmetic processing unit 60A. The storage unit 60C stores various programs and data executed by the arithmetic processing unit 60A. The various data includes backup pin data that indicates the erected positions of backup pins provided in the backup device 32. Backup pin data is created for each type of board 90 and for each front and back side of the board 90.

[0048] The image processing unit 60D is configured to take in image signals output from the component imaging camera 36 and the board imaging camera 37. The external input / output unit 60E is a so-called interface, and is configured to take in detection signals output from various sensors 50 provided in the main body of the component mounting apparatus 1. In addition, the external input / output unit 60E is configured to control the operation of various actuators 51 (such as the air supply device and the backup device 32) based on control signals output from the arithmetic processing unit 60A.

[0049] The feeder communication unit 60F is connected to the tape feeder 33A and controls the tape feeder 33A in an integrated manner. The operation unit 61 includes a display device such as a liquid crystal display, and an input device. The input device is configured with a touch panel arranged on the front of the display device, various operation buttons, and the like.

[0050] 5 , the backup device 32 includes a base plate 71, a base plate lifting mechanism 72 (an example of a lifting mechanism) that lifts and lowers the base plate 71, a plurality of backup pins 73 that back up the substrate 90 from below, a support plate 74 (an example of a support member) that supports from below the backup pins 73 that are inserted into the through holes 71A of the base plate 71, a plurality of locking members 75 provided on the underside of the base plate 71, and a locking member displacement mechanism 76 that displaces the locking members 75.

[0051] 6, the base plate 71 has two or more rows of through holes 71B, each row having a plurality of through holes 71A that penetrate in the up-down direction and are aligned in a row in the front-rear direction. In the base plate 71 according to the first embodiment, the plurality of through holes 71A are formed in a matrix that is aligned in the front-rear and left-right directions. The arrangement of the through holes 71A is not limited to a matrix, and may be a staggered pattern or another arrangement.

[0052] As shown in Figure 7, the base plate 71 has a certain thickness. The through-hole 71A has different inner diameters in the upper and lower sections. The upper section has a constant inner diameter from top to bottom. The lower section is tapered, with the inner diameter increasing as it goes downward.

[0053] 4-2. Base Plate Elevating Mechanism The base plate elevating mechanism 72 will be described with reference to FIG. 5. The underside of the four corners of the base plate 71 is fixed to support columns 72A. Each support column 72A is inserted into a hole 30A formed in the base 30 and is supported by the base 30 so as to be able to move up and down. The base plate elevating mechanism 72 includes these support columns 72A and an electric motor 72B that raises and lowers at least one of the support columns 72A. The base plate 71 is raised and lowered by rotation of the electric motor 72B. The base plate elevating mechanism 72 shown in FIG. 5 is an example, and any appropriate mechanism can be used as the base plate elevating mechanism 72. For example, the base plate elevating mechanism 72 may raise and lower the base plate 71 by air pressure.

[0054] 7, the backup pin 73 is a cylindrical member that is inserted into the through-hole 71A of the base plate 71 from below. The backup pin 73 has an upper flange portion 73A that widens conically downward, and a lower flange portion 73B that widens conically upward below the upper flange portion 73A. The upper flange portion 73A is an example of a protruding portion that protrudes radially from the backup pin 73.

[0055] The outer shape of the upper flange portion 73A substantially matches the shape of the internal space below the through-hole 71A. The vertical distance between the upper flange portion 73A and the lower flange portion 73B is the same as or slightly wider than the thickness of the locking member 75, which will be described later. The lower flange portion 73B is not necessarily provided.

[0056] 8A and 8B, the support plate 74 will be described. The support plate 74 is a plate-shaped member that includes a plurality of support portions 74A extending parallel to the front-rear direction, two horizontal frame portions 74B extending in the left-right direction on both the front and rear sides of the support portions 74A, and four legs 74C that are arranged on the left and right ends of the two horizontal frame portions 74B and raise the support plate 74 from the base 30.

[0057] The number of support portions 74A is the same as the number of through-hole rows 71B of the base plate 71. As shown in Fig. 5, the support portions 74A are located below the through-hole rows 71B, and support the backup pins 73 inserted into the through-holes 71A from below in a state in which the backup pins 73 protrude upward from the base plate 71 by a certain length.

[0058] As shown in FIG. 8A, a plurality of support portions 74A are provided spaced apart from one another in the left-right direction, and thus a plurality of elongated holes 74D extending in the front-rear direction are formed in the support plate 74.

[0059] 9 is a top view of the locking members 75 provided on the underside of the base plate 71, showing the base plate 71 in a virtual see-through state. The locking members 75 are members for locking the backup pins 73 to the base plate 71. A locking member 75 is provided for each through-hole 71A of the base plate 71. The locking members 75 according to the first embodiment are metallic members that are magnetically attracted, and more specifically, are made of iron, stainless steel, or the like that is magnetically attracted.

[0060] 10A , the locking member 75 according to the first embodiment is rotatably (one example of displaceably) supported by a screw 75A on the underside of the base plate 71. The screw 75A is located to the right of the corresponding through-hole 71A and slightly forward of the through-hole 71A. The configuration for rotatably supporting the locking member 75 is not limited to the screw 75A, and any other suitable configuration may be employed.

[0061] The locking member 75 is rotatable between a locking position shown in Fig. 10A and an unlocking position shown in Fig. 10B. The locking position is a position where the backup pin 73 is locked to the base plate 71, and the unlocking position is a position where the backup pin 73 is not locked to the base plate 71. More specifically, the locking position is a position where at least a portion of the locking member 75 is directly below the upper flange portion 73A, and the unlocking position is a position where the entire locking member 75 is not directly below the upper flange portion 73A.

[0062] 10A, the locking member 75 has a first arm 75B and a second arm 75C. When the locking member 75 is in the locking position, the first arm 75B extends to the left from the screw 75A. When the locking member 75 is in the locking position, the tip of the first arm 75B is located to the left of the through-hole 71A corresponding to the locking member 75.

[0063] A semicircular recess 75D recessed in a direction away from the backup pin 73 (i.e., toward the front) is formed on the edge of the first arm 75B on the backup pin 73 side (i.e., the rear edge) in a top view. When the locking member 75 is in the locking position, the edge of the recess 75D fits between the upper flange 73A and the lower flange 73B of the backup pin 73, and the edge of the recess 75D is positioned directly below the upper flange 73A of the backup pin 73.

[0064] The second arm 75C extends in a direction inclined relative to the direction in which the first arm 75B extends. As shown in Figure 10B, when the locking member 75 is in the unlocked position, the second arm 75C extends to the right. When the locking member 75 is in the unlocked position, the tip of the second arm 75C does not reach the adjacent through-hole row 71B to the right.

[0065] As shown in Fig. 10A, when locking member 75 rotates to the locking position, first arm 75B abuts against backup pin 73, restricting further rotation. As shown in Fig. 11, locking member 75 is formed with a rotation restricting portion 75E that abuts against backup pin 73 when locking member 75 rotates to the unlocking position. Rotation restricting portion 75E is formed by bending a portion of second arm 75C downward. Therefore, the range of rotation of locking member 75 is restricted between the locking position and the unlocking position.

[0066] 8A, the locking member displacement mechanism 76 includes a displacement head 76A provided for each through-hole row 71B, a displacement head support portion 76B extending in the left-right direction, and a displacement head moving mechanism 76C that moves the displacement head support portion 76B along the through-hole row 71B.

[0067] The displacement head 76A is fixed to a displacement head support portion 76B. The displacement head support portion 76B is a horizontally elongated member that is long in the left-right direction, and both longitudinal ends thereof are supported by a pair of guide rails 76D. The multiple displacement heads 76A are arranged at equal intervals in the left-right direction. Each displacement head 76A is associated with one through-hole row 71B and is located to the right of the associated through-hole row 71B.

[0068] 8B, the displacement heads 76A stand up from the displacement head support parts 76B. The displacement heads 76A other than the rightmost displacement head 76A are arranged between the through-hole row 71B to which that displacement head 76A corresponds and the through-hole row 71B immediately to the right of that through-hole row 71B, and are inserted into the elongated holes 74D of the support plate 74 from below.

[0069] An electromagnet 76J is provided at the upper end of the displacement head 76A. The electromagnet 76J is in an excited state when a switch such as a FET (Field Effect Transistor) is turned on (conductive), and in a de-excited state when the switch is turned off (non-conductive). The excited state is a state in which the displacement head 76A can displace the locking member 75. The de-excited state is a state in which the displacement head 76A cannot displace the locking member 75. A switch is provided for each displacement head 76A, and is turned on and off individually by the control unit 60.

[0070] The displacement head moving mechanism 76C includes a pair of guide rails 76D spaced apart in the left-right direction and extending in the front-to-rear direction, a ball screw 76E extending in the front-to-rear direction between the pair of guide rails 76D, and an electric motor 76G that rotates the ball screw 76E around its axis via a belt 76F.

[0071] As shown in Figure 8B, a nut 76H is fixed to the underside of the displacement head support part 76B. The nut 76H is threadedly engaged with a ball screw 76E, and the ball screw 76E rotates about its axis, causing the displacement head support part 76B to move in the front-to-rear direction. The configuration of the displacement head moving mechanism 76C is not limited to the configuration described above, and any other suitable configuration can be adopted. For example, the displacement head moving mechanism 76C may move the displacement head support part 76B using a linear motor.

[0072] As will be described in detail later, when the base plate 71 is lowered and the lower ends of the backup pins 73 are in contact with the support plate 74, the displacement head 76A moves along the through-hole row 71B (in other words, moves in the front-to-back direction) to rotate the locking members 75 one by one. The displacement head 76A can selectively rotate any of the locking members 75 under the control of the control unit 60.

[0073] 10A and 10B, the operation of the locking member displacement mechanism 76 to rotate one locking member 75 from the locked position to the unlocked position, and from the unlocked position to the locked position, will be described. The locking member 75 rotates when the base plate 71 is lowered and the lower ends of the backup pins 73 are in contact with the support plate 74.

[0074] 10A, when the locking member 75 in the locked position is rotated to the unlocked position, the control unit 60 moves the displacement head 76A from front to back in an excited state. Front to back is an example of the other direction along the through-hole row 71B. When the excited displacement head 76A passes from front to back under the locking member 75 in the locked position, the second arm 75C of the locking member 75 in the locked position is attracted to the displacement head 76A, causing the locking member 75 to rotate counterclockwise (left) and reach the unlocked position shown in FIG. 10B.

[0075] 10B , when the locking member 75 in the unlocked position is rotated to the locked position, the control unit 60 moves the displacement head 76A in an excited state from rear to front. Rear to front is an example of one direction along the through-hole row 71B. When the excited displacement head 76A passes under the locking member 75 in the unlocked position from rear to front, the second arm 75C of the locking member 75 in the unlocked position is attracted to the displacement head 76A, causing the locking member 75 to rotate clockwise (to the right) and reach the locked position shown in FIG. 10A .

[0076] When selectively rotating only a specific locking member 75, the control unit 60 causes the displacement head 76A to pass under the locking member 75 to be rotated in an excited state, and causes the displacement head 76A to pass under the locking member 75 that is not to be rotated in a non-excited state. In this way, any locking member 75 can be selectively rotated.

[0077] 6. Backup Pin Setup Changeover The control unit 60 performs setup changeover of the backup pins 73 when the type or front and back of the substrate 90 being produced is changed. An example of setup changeover of the backup pins 73 will be described with reference to Figures 12 and 13. For convenience, in Figure 12, backup pins 73 used to back up the substrate 90 are indicated by black circles, and backup pins 73 not used to back up the substrate 90 are indicated by white circles.

[0078] 13, the hatched locking members 75 indicate the locking members 75 corresponding to the backup pins 73 used to back up the substrate 90, and the unhatched locking members 75 indicate the locking members 75 corresponding to the backup pins 73 not used to back up the substrate 90. As shown in Fig. 13, when the setup change is performed, the locking members 75 corresponding to the backup pins 73 used to back up the substrate 90 are positioned in the locking position, and the other locking members 75 are positioned in the non-locking position.

[0079] When changing the setup of the backup pins 73, the control unit 60 first moves the displacement head 76A to the frontmost (or rearmost) side of its movement range in the front-to-rear direction. Then, while moving each displacement head 76A rearward, the control unit 60 individually switches the excitation state of each displacement head 76A based on the backup pin data, thereby rotating the locking members 75 in the locking position that correspond to the backup pins 73 not used to back up the substrate 90 to the non-locking position.

[0080] When the displacement head 76A moves to the rearmost position of its forward / backward movement range, the control unit 60 moves each displacement head 76A forward while individually switching the excitation state based on the backup pin data, thereby rotating the locking member 75 corresponding to the backup pin 73 used to back up the substrate 90, among the locking members 75 in the non-locking position, to the locking position.

[0081] 7. Backup of the Substrate by the Backup Device Referring to FIG. 14 , the backup of the substrate 90 by the backup device 32 will be described. After the aforementioned setup change of the backup pins 73, the control unit 60 moves the retainer members 80 above both left and right ends of the substrate 90 using a retainer member moving mechanism (not shown) when the substrate 90 is carried into the work position 38, and then raises the base plate 71 in this state. The backup pins 73, which are engaged with the base plate 71 by the locking members 75, rise together with the base plate 71, lifting the substrate 90 from below. The lifted substrate 90 abuts at both left and right ends of the retainer members 80, restricting further lift, and is positioned in the vertical direction by the retainer members 80 and the backup pins 73. The backup pins 73 not engaged with the base plate 71 do not rise even when the base plate 71 rises, and are therefore not used to back up the substrate 90.

[0082] 8. Effects of the Embodiments According to the backup device 32 of the first embodiment, the control unit 60 requires an IO for controlling the displacement head 76A. However, the number of IOs is limited to the number of through-hole arrays 71B plus a number of IOs required to control the displacement head moving mechanism 76C. This reduces the number of IOs compared to the backup pin setting device described in Patent Document 1. In particular, when an extremely large number of backup pins 73, such as hundreds or thousands, are used, the number of IOs can be significantly reduced. Furthermore, while the backup device 32 requires a locking member 75 for each through-hole 71A, only one locking member 75 is required for each through-hole array 71B for the displacement head 76A. This reduces the number of parts compared to the backup pin setting device described in Patent Document 1, which requires a fixing mechanism, spring, and displacement sensor (or pressure sensor) for each backup pin 73. In particular, when an extremely large number of backup pins 73, such as hundreds or thousands, are used, the number of parts can be significantly reduced. Furthermore, because the backup device 32 can reduce the number of IOs, the time required to change the backup pins 73 can be reduced compared to the backup pin setting device described in Patent Document 1. In particular, the time required for setup can be significantly reduced when an extremely large number of backup pins 73, such as hundreds or thousands, are used. Therefore, with the backup device 32, even if there are a large number of backup pins 73, the setup of the backup pins 73 can be performed in a short time while suppressing the number of I / O points and parts.

[0083] According to the backup device 32, the backup pin 73 can be locked to the base plate 71 by rotating the locking member 75 to the locking position, so the backup pin 73 can be locked with a simpler configuration than the backup pin setting device described in Patent Document 1.

[0084] According to the backup device 32 , a part of the locking member 75 in the locking position is located directly below the upper flange portion 73 A (projection portion) of the backup pin 73 , so that the backup pin 73 can be locked to the base plate 71 .

[0085] In the backup device 32, the recess 75D is formed in the locking member 75, so that the overlapping area between the locking member 75 and the upper flange portion 73A of the backup pin 73 when viewed in the axial direction of the backup pin 73 can be made larger than when the recess 75D is not formed. This allows the backup pin 73 to be locked more stably.

[0086] According to the backup device 32, any of the locking members 75 can be selectively displaced by moving the displacement head 76A while switching the state thereof.

[0087] According to the backup device 32, by switching the state of the electromagnet 76J, the displacement head 76A can be switched between a state in which it is possible to displace the locking member 75 and a state in which it is not possible to displace the locking member 75.

[0088] According to the component mounting device 1 of the first embodiment, even if the number of backup pins 73 is large, the number of I / O points and the number of components can be reduced and the setup of the backup pins 73 can be changed in a short time.

[0089] <Embodiment 2> A displacement head according to embodiment 2 will be described. As shown in Fig. 15A, a displacement head 100 according to embodiment 2 includes a rod-shaped head main body 101 extending in the vertical direction, a rotating body 102 rotatably supported on the upper end of the head main body 101, and a displacement head lifting mechanism (not shown) that lifts and lowers the head main body 101.

[0090] The rotating body 102 according to the second embodiment has a triangular shape that is convex upward when viewed from the left-right direction. The rotating body 102 is supported on a rotation shaft that extends in the left-right direction (an example of a direction perpendicular to the row of through holes and parallel to the surface of the base plate) and rotates in the front-rear direction. One end of a coil spring 103 (an example of a biasing member) is engaged on both the front and rear sides of the underside of the rotating body 102. The other end of the front coil spring 103 is engaged with the front side of the head main body 101. The other end of the rear coil spring 103 is engaged with the rear side of the head main body 101. When the rotating body 102 rotates forward or backward, the coil spring 103 returns to the position shown in FIG. 15A . The coil spring 103 may be provided on only one of the front and rear sides. Synthetic rubber may be used instead of the coil spring 103. The displacement head lifting mechanism (not shown) is equipped with an electric motor, and the displacement head 76A is lifted and lowered by the driving force of the electric motor.

[0091] Figure 15A shows a state in which the displacement head 100 has been lowered by the displacement head lifting mechanism, and the upper end of the rotating body 102 is positioned below the lower end of the locking member 75. In this state, it is not possible to displace the locking member 75. Figure 15B shows a state in which the displacement head 100 has been raised by the displacement head lifting mechanism, and the upper end of the rotating body 102 is positioned above the lower end of the locking member 75. In this state, it is possible to displace the locking member 75.

[0092] 15A to 15C, an example will be described in which the locking member 75, which is in the locked position, is rotated to the unlocked position. In this case, the control unit 60 raises the displacement head 100 just before the locking member 75, which is to be rotated to the unlocked position. As a result, the upper end of the rotating body 102 is positioned above the lower end of the locking member 75. As shown in FIG. 15B, when the displacement head 100 moves rearward in this state, the locking member 75 is pushed by the rotating body 102 and rotates to the unlocked position.

[0093] 15C , when the locking member 75 rotates to the unlocked position, further rotation is restricted, and the rotating body 102 rotates due to the reaction force from the locking member 75 until its upper end is lower than the lower end of the locking member 75. This allows the displacement head 76A to pass under the locking member 75. After passing under the locking member 75, the rotating body 102 rotates in the opposite direction due to the coil spring 103, and returns to a position where its upper end is higher than the lower end of the locking member 75.

[0094] According to the backup device of the second embodiment, by raising and lowering the displacement head 100, the displacement head 100 can be switched between a state in which it is possible to displace the locking member 75 and a state in which it is not possible to displace the locking member 75.

[0095] According to the backup device, when the displacement head 76A moves further after pushing the locking member 75 to a position where its rotation is restricted, the rotating body 102 rotates due to the reaction force from the locking member 75 until its upper end is lower than the lower end of the locking member 75. This allows the displacement head 100 to pass under the locking member 75. After passing under the locking member 75, the rotating body 102 rotates in the opposite direction and returns to a position where its upper end is higher than the lower end of the locking member 75, making it possible to displace the next locking member 75.

[0096] 16 and 17 , a locking member 375 according to the third embodiment is supported by a base plate 371 so as to be slidable in the front-rear direction (the direction of the through-hole row). Sliding is an example of displacement.

[0097] 16, the locking member 375 is formed by bending a single metal plate and has a flat plate portion 375A and locking portions 375B rising up from the left and right edges of the flat plate portion 375A. The upper end of the right locking portion 375B is bent to the right to form a locking piece 375C. The upper end of the left locking portion 375B is bent to the left to form a locking piece 375C.

[0098] The base plate 371 according to the third embodiment has two slide holes 376 formed for each through-hole 71A. The two slide holes 376 are spaced apart in the left-right direction and extend parallel to each other in the front-rear direction. Each slide hole 376 has a certain width in the left-right direction, and by inserting the locking piece 375C into the slide hole 376 from below while the locking member 375 is bent, the locking piece 375C can be hooked onto the edge of the slide hole 376.

[0099] As the displacement head according to the third embodiment, the displacement head 76A according to the first embodiment can be used, or the displacement head 100 according to the second embodiment can be used. When the displacement head 76A according to the first embodiment is used, the material of the locking member 375 is a metal member that has the property of being attracted to a magnet.

[0100] Figure 17A shows locking member 375 in a locked position, and Figure 17B shows locking member 375 in an unlocked position. The locked position is where at least a portion of locking member 375 is directly below upper flange portion 73A, and the unlocked position is where locking member 375 is not entirely below upper flange portion 73A. Locking member 375 slides between the locked and unlocked positions.

[0101] According to the backup device of embodiment 3, the backup pin 73 can be locked to the base plate 371 by sliding the locking member 375 to the locking position, so the backup pin 73 can be locked with a simpler configuration than the backup pin setting device described in Patent Document 1.

[0102] <Other Embodiments> The technology disclosed in this specification is not limited to the embodiments described above and in the drawings, and for example, the following embodiments are also included in the technical scope disclosed in this specification.

[0103] (1) In the first embodiment, the through hole row 71B in which a plurality of through holes 71A are arranged in a single row is exemplified as the through hole row in which a plurality of through holes are arranged. The arrangement of the through holes 71A in the first embodiment can be said to be such that the centers of the through holes 71A are located on a common imaginary line when viewed from above. However, the arrangement of the through holes 71A is not limited to this. For example, as long as a portion of each through hole 71A is located on a common imaginary line, the centers of the through holes 71A do not necessarily have to be located on that imaginary line. More specifically, the center of one through hole 71A may be shifted to the right of the imaginary line, and the center of another through hole 71A may be shifted to the left of the imaginary line. Alternatively, as long as the plurality of through holes 71A are arranged so as to be considered as a single row, the through holes 71A do not necessarily have to be located on a common imaginary line.

[0104] (2) In the first embodiment described above, the locking member 75 has a shape in which the second arm 75C is inclined relative to the first arm 75B when viewed from above. However, the shape of the locking member 75 is not limited to this, and any appropriate shape may be adopted as long as the locking member 75 can be displaced between the locked position and the unlocked position. For example, the locking member may be L-shaped or rectangular when viewed from above.

[0105] (3) In the first embodiment, the recess 75D is formed in the first arm 75B of the locking member 75, but the recess 75D does not have to be formed.

[0106] (4) In the above embodiment, the backup pin 73 has an upper flange portion 73A (a protruding portion that protrudes in the radial direction). However, the backup pin 73 may have a groove that is recessed in the radial direction formed over the entire circumferential direction (or over a partial circumferential section). The locking position may be a position where at least a portion of the locking member 75 fits into the groove.

[0107] (5) In the above embodiment, the backup pins 73 that are not used to back up the substrate 90 are not engaged with the substrate 90. However, even if the backup pins 73 are not used to back up the substrate 90, the backup pins 73 that are not located below the work position 38 of the substrate 90 may remain engaged with the substrate 90. For example, when a smaller-sized substrate 90 is produced after a larger-sized substrate 90, the backup pins 73 that were used to back up the larger-sized substrate 90 may be engaged outside the work position 38 for the smaller-sized substrate 90. In this case, when backing up the smaller-sized substrate 90, these backup pins 73 do not come into contact with the substrate 90 and may remain engaged with the base plate 71.

[0108] (6) In the above embodiment, the component mounting device 1 is used as an example of the board work device, but the board work device is not limited to this. For example, the board work device may be a screen printing device 13 or a dispenser 15.

[0109] 1: Component mounting device (an example of a board working device) 13: Screen printing device (an example of a board working device) 15: Dispenser (an example of a board working device) 32: Backup device 38: Working position 60: Control unit 71: Base plate 71A: Through hole 71B: Row of through holes 72: Base plate lifting mechanism (an example of a lifting mechanism) 73: Backup pin 73A: Upper flange portion (an example of a protruding portion) 74: Support plate (an example of a support member) 75: Locking member 75D: Recess 76A: Displacement head 76J: Electromagnet 90: Board 100: Displacement head 101: Head main body portion 102: Rotating body 103: Coil spring (an example of a biasing member) 371: Base plate 375: Locking member

Claims

1. A backup device that backs up a substrate from below on which a predetermined operation is performed, comprising: a base plate having two or more rows of through holes in which a plurality of through holes penetrating in the vertical direction are aligned; an elevating mechanism that raises and lowers the base plate; a support member that supports from below backup pins inserted into each of the through holes; a plurality of locking members provided on the base plate, each provided for each through hole, and that are displaceable between an locking position in which the backup pin is locked to the base plate and an unlocking position in which the backup pin is not locked to the base plate; a displacement head provided for each of the through hole rows, that moves along the through hole rows and displaces the locking members one by one in a state in which the base plate is lowered and each backup pin is in contact with the support member; and a control unit, wherein the displacement head is capable of selectively displacing any of the locking members under the control of the control unit, the control unit controls each of the displacement heads individually when moving each of the displacement heads along the row of through holes, to displace the locking members so that, among the backup pins located below the working position of the substrate, the locking members corresponding to the backup pins used to back up the substrate are positioned at the locking position, and the locking members corresponding to the backup pins not used to back up the substrate are positioned at the non-locking position.

2. A backup device according to claim 1, wherein said locking member is rotatably supported on said base plate and rotates between said locking position and said unlocking position.

3. A backup device according to claim 1, wherein the locking member is supported on the base plate so as to be slidable in the direction of the row of through holes, and slides between the locking position and the non-locking position.

4. A backup device according to any one of claims 1 to 3, wherein the backup pin has a groove formed in the circumferential direction of the backup pin or a protruding portion protruding radially from the backup pin, and the locking position is a position where at least a part of the locking member is inserted into the groove or a position where at least a part of the locking member is directly below the protruding portion.

5. A backup device as claimed in claim 4, wherein the locking member has a recess formed on the edge on the backup pin side in a top view, the recess being recessed in a direction away from the backup pin, and when the locking member is in the locking position, the edge of the recess fits into the groove or is located directly below the protruding portion.

6. A backup device according to any one of claims 1 to 3, wherein the displacement head is switchable between a state in which it is possible to displace the engaging member and a state in which it is not possible to displace the engaging member, and the control unit selectively displaces the engaging member by moving the displacement head while switching between states.

7. A backup device as defined in claim 6, wherein the locking member is a metal member that is attracted to a magnet, the displacement head has an electromagnet, the state in which the locking member can be displaced is when the electromagnet is excited, and the state in which the locking member cannot be displaced is when the electromagnet is not excited, and when the displacement head with the electromagnet excited moves in one direction along the row of through holes, the locking member in the non-locking position is attracted and displaced to the locking position, and when the displacement head moves in the other direction, the locking member in the locking position is attracted and displaced to the non-locking position.

8. A backup device according to claim 6, comprising a displacement head lifting mechanism for raising and lowering the displacement head, wherein the state in which the locking member can be displaced is a state in which the displacement head has risen above the lower end of the locking member, and the state in which the locking member cannot be displaced is a state in which the displacement head has descended below the lower end of the locking member, and when the displacement head is raised above the lower end of the locking member and moves in one direction along the row of through holes, the locking member in the non-locking position is pushed by the displacement head and displaced to the locking position, and when the displacement head moves in the other direction, the locking member in the locking position is pushed by the displacement head and displaced to the non-locking position.

9. A backup device according to claim 8, wherein the displacement head comprises: a head main body; a rotating body rotatably supported on the upper end of the head main body, the rotating body being supported on a rotating shaft extending in a direction perpendicular to the row of through holes and parallel to the surface of the base plate, the upper end of the rotating body being positioned above the lower end of the locking member when the locking member is in a state in which it can be displaced; and a biasing member having one end engaged with the rotating body and the other end engaged with the head main body, the range in which the locking member can be displaced being restricted between the locked position and the unlocked position, When the locking member is displaced to the locking position or the non-locking position and further displacement is restricted, the rotating body rotates due to the reaction force from the locking member until its upper end is below the lower end of the locking member, and after passing under the locking member in that state, it is urged by the urging member to rotate in the opposite direction and return to a position where its upper end is above the lower end of the locking member.

10. A substrate working device that performs a specified operation on a substrate, comprising: a backup device according to any one of claims 1 to 3; and a working unit that performs the specified operation on the substrate that is backed up from below by the backup device.

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