Mask assembly and manufacturing method therefor

Abstract

A mask assembly and a manufacturing method therefor are provided. The mask assembly comprises multiple mask sheets and at least one connecting element. Each mask sheet comprises a separation portion surrounding an opening. The separation portion of a first mask sheet comprises a first connecting portion, and the separation portion of a second mask sheet adjacent to the first mask sheet comprises a second connecting portion. At least a part of the first connecting portion and at least a part of the second connecting portion have a gap. At least a part of the first connecting portion and at least a part of the second connecting portion are both located on the same side of the connecting element and are connected to the connecting element. The mask assembly comprises a filling element located at least in a portion of the gap; or the first connecting portion comprises a first surface facing the gap, and the second connecting portion comprises a second surface facing the gap. At least one of the first surface and the second surface has a slope angle relative to the connecting element of less than 90 degrees. In the described mask assembly, the step difference at the gap between adjacent mask sheets is small, resulting in a film layer deposited thereon having good uniformity in thickness.

Description

Mask assembly and its fabrication method Technical Field

[0001] At least one embodiment of this disclosure relates to a mask assembly and a method for manufacturing the same. Background Technology

[0002] Organic light-emitting diode (OLED) displays are the next generation of displays following liquid crystal displays (LCDs), offering advantages such as a wide color gamut, fast response time, and foldability. As display sizes gradually increase, the shipment volume of display panels can be effectively increased, thereby promoting improvements in performance such as higher resolution, wider color gamut, and faster response time, resulting in a better visual experience.

[0003] Summary of the Invention

[0004] At least one embodiment of this disclosure provides a mask assembly and a method for manufacturing it.

[0005] At least one embodiment of this disclosure provides a mask assembly including a plurality of mask sheets and at least one connecting element. Each mask sheet includes a plurality of openings and a partition surrounding the openings. The at least one connecting element is configured to connect at least two of the plurality of mask sheets. The plurality of mask sheets includes adjacent first and second mask sheets. The partition of the first mask sheet includes a first connecting portion, and the partition of the second mask sheet includes a second connecting portion. The first connecting portion is located outside the plurality of openings of the first mask sheet, and the second connecting portion is located outside the plurality of openings of the second mask sheet. The first connecting portion and the second connecting portion are close to each other, and there is a gap between at least a portion of the surfaces of the first connecting portion and the second connecting portion facing each other. At least a portion of the first connecting portion and at least a portion of the second connecting portion are located on the same side of the connecting element and are respectively connected to the connecting element. The mask assembly also includes a filling element located in at least a portion of the gap. Alternatively, the first connecting portion includes a first surface facing the gap, and the second connecting portion includes a second surface facing the gap. At least one of the first surface and the second surface has a slope angle of less than 90 degrees relative to the connecting element.

[0006] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein at least one of the first surface and the second surface has a slope angle of no more than 80 degrees relative to the connecting element.

[0007] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein at least one of the first surface and the second surface has a slope angle of 10 to 40 degrees relative to the connecting element.

[0008] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein at least one of the first surface and the second surface is intersected by a plane with an arc-shaped cross-section, the plane being parallel to the thickness direction of the connecting element and parallel to the arrangement direction of the first mask sheet and the second mask sheet.

[0009] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided in which the surfaces of the first connecting portion and the second connecting portion facing each other are in contact with the filling element.

[0010] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein the material of the filling element comprises one of the same material as the mask sheet and an optical adhesive.

[0011] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein the filling element and the first connecting portion have a first thickness difference, the first thickness difference being 1 / 5 to 1 / 2 of the maximum thickness of the first connecting portion, and the filling element and the second connecting portion have a second thickness difference, the second thickness difference being 1 / 5 to 1 / 2 of the maximum thickness of the second connecting portion.

[0012] For example, a mask assembly is provided according to at least one embodiment of the present disclosure, wherein at least one of the first thickness difference and the second thickness difference is 10 to 50 micrometers.

[0013] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided in which, in the arrangement direction of the first connecting portion and the second connecting portion, the size of the portion of the first connecting portion overlapping the connecting element in its thickness direction is not less than 1 / 4 of the maximum size of the first connecting portion; and / or, the size of the portion of the second connecting portion overlapping the connecting element in its thickness direction is not less than 1 / 4 of the maximum size of the second connecting portion.

[0014] For example, a mask assembly is provided according to at least one embodiment of the present disclosure, the mask assembly further comprising: a protective film layer located on the plurality of mask sheets and overlapping with the at least one connecting element.

[0015] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein the first connecting portion and the second connecting portion are both located on the same side of the connecting element.

[0016] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein the first connecting portion includes a first body portion and a first end portion, the first end portion being closer to the interval than the first body portion, and the first end portion being recessed relative to the first body portion in the thickness direction of the first connecting portion such that the first connecting portion has a first recess; the second connecting portion includes a second body portion and a second end portion, the second end portion being closer to the interval than the second body portion, and the second end portion being recessed relative to the second body portion in the thickness direction of the second connecting portion such that the second connecting portion has a second recess; a first portion of the connecting element is located in the first recess, and a second portion of the connecting element is located in the second recess.

[0017] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein the thickness of the first body portion and the thickness of the second body portion are both greater than the thickness of the connecting element, and the surface of the connecting element away from the interval is flush with the surface of at least one of the first body portion and the second body portion.

[0018] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, wherein at least two of the plurality of mask sheets are connected to form a mask assembly by at least one of the connecting elements, the mask assembly is an integral structure, the mask assembly further includes a mask frame, the mask frame includes a mask border, the mask assembly is located on the mask border, and at least a portion of the edges of the mask assembly are connected to the mask border.

[0019] For example, according to at least one embodiment of the present disclosure, a mask assembly is provided, the mask frame further comprising an auxiliary structure that overlaps with the area enclosed by the mask frame and is connected to the mask frame, the at least one connecting element comprising at least one auxiliary connecting element, at least a portion of the auxiliary connecting element being located on the auxiliary structure.

[0020] A method for manufacturing a mask assembly according to at least one embodiment of this disclosure includes: connecting at least two masks from a plurality of masks using at least one connecting element, wherein each mask includes a plurality of openings and a partition surrounding the openings, the plurality of masks includes adjacent first masks and second masks, the partition of the first mask includes a first connecting portion, the partition of the second mask includes a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask, the second connecting portion is located outside the plurality of openings of the second mask, the first connecting portion and the second connecting portion are close to each other and the first connecting portion... A gap exists between at least a portion of the surfaces of the first and second connecting portions facing each other; at least a portion of the first and second connecting portions are located on the same side of the connecting element and are respectively connected to the connecting element; and a filling element is formed in at least a portion of the gap; or, at least one of a portion of the end of the first connecting portion near the gap and a portion of the end of the second connecting portion near the gap is melted such that at least one of the first surface of the first connecting portion facing the gap and the second surface of the second connecting portion facing the gap has a slope angle of less than 90 degrees relative to the connecting element.

[0021] For example, in a method for manufacturing a mask assembly according to at least one embodiment of the present disclosure, forming a filler element in at least a portion of the interval includes: forming a filler material in the interval; and melting the filler material by means of a laser or an electron beam to form the filler element.

[0022] For example, in a method for manufacturing a mask assembly according to at least one embodiment of the present disclosure, the material of the filling element is the same as the material of the mask sheet.

[0023] For example, in a method for manufacturing a mask assembly according to at least one embodiment of the present disclosure, forming a filler element in at least a portion of the interval includes: filling the interval with optical adhesive; and curing the optical adhesive to form the filler element.

[0024] For example, in a method for manufacturing a mask assembly according to at least one embodiment of the present disclosure, the first connecting portion includes a first corner portion near the interval, the second connecting portion includes a second corner portion near the interval, and melting at least one of a portion of the end of the first connecting portion near the interval and a portion of the end of the second connecting portion near the interval includes melting at least one of the first corner portion of the first connecting portion and the second corner portion of the second connecting portion by means of a laser or an electron beam.

[0025] For example, a method for manufacturing a mask assembly according to at least one embodiment of the present disclosure further includes: forming a protective film layer on the plurality of mask sheets, wherein the protective film layer overlaps with the at least one connecting element. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings of the embodiments will be briefly described below. Obviously, the drawings described below only relate to some embodiments of this disclosure and are not intended to limit this disclosure.

[0027] Figure 1 is a partial structural schematic diagram of a mask assembly provided in at least one embodiment of this disclosure.

[0028] Figure 2 is a partial cross-sectional schematic diagram of a mask assembly provided in an embodiment of the present disclosure.

[0029] Figure 3 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of this disclosure.

[0030] Figure 4 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of the present disclosure.

[0031] Figure 5 is a schematic diagram of a mask assembly with a protective film layer provided in an embodiment of this disclosure.

[0032] Figure 6 is a partial structural schematic diagram of another mask assembly provided in an embodiment of the present disclosure.

[0033] Figure 7 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure.

[0034] Figure 8 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure.

[0035] Figure 9 is a schematic diagram of the structure of a mask frame provided in at least one embodiment of the present disclosure.

[0036] Figure 10 is a schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure when it is disposed on the mask frame shown in Figure 9.

[0037] Figure 11 is a schematic diagram of another mask frame structure provided in at least one embodiment of the present disclosure.

[0038] Figure 12 is a schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure when it is disposed on the mask frame shown in Figure 11.

[0039] Figures 13 and 14 are schematic diagrams illustrating the fabrication process of a mask assembly according to at least one embodiment of this disclosure.

[0040] Figure 15 is a schematic diagram of the structure of the mask assembly shown in Figure 3 after the protective film layer has been formed. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. Based on the described embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0042] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as “comprising” or “including” mean that an element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects.

[0043] Backplane mask (BP mask) typically refers to the mask used in OLED devices. The panel of an OLED device includes pixel circuitry and driving circuitry; the pixel circuitry controls the light emission of the OLED device. The BP mask plays a crucial role in the panel manufacturing process. By precisely controlling the layout and connections of the circuitry, it ensures that the pixel circuitry functions correctly, thereby achieving high-quality image display.

[0044] In their research, the inventors of this application discovered that as the size of OLED display panels continues to increase, the corresponding mask (e.g., a metal mask) also becomes larger, easily leading to significant sagging during use. Furthermore, when using a method of splicing multiple masks, gaps between the spliced ​​masks can compromise the flatness and thickness uniformity of the film layers applied to them. Moreover, when the gaps created by splicing multiple masks are of different sizes, the film layer on the mask will exhibit varying degrees of thinning at different locations, or even localized breakage, preventing complete coverage of the mask. For example, when the film layer on the mask serves as a protective layer, localized breakage can compromise the surface properties of the mask, affecting its lifespan.

[0045] At least one embodiment of this disclosure provides a mask assembly including a plurality of mask sheets and at least one connecting element. Each mask sheet includes a plurality of openings and a partition surrounding the openings. The at least one connecting element is configured to connect at least two of the plurality of mask sheets. The plurality of mask sheets include adjacent first and second mask sheets. The partition of the first mask sheet includes a first connecting portion, and the partition of the second mask sheet includes a second connecting portion. The first connecting portion is located outside the plurality of openings of the first mask sheet, and the second connecting portion is located outside the plurality of openings of the second mask sheet. The first connecting portion and the second connecting portion are close to each other, and there is a gap between at least a portion of the surfaces of the first connecting portion and the second connecting portion facing each other. At least a portion of the first connecting portion and at least a portion of the second connecting portion are both located on the same side of the connecting element and are respectively connected to the connecting element. The mask assembly also includes a filling element located in at least a portion of the gap. Alternatively, the first connecting portion includes a first surface facing the gap, and the second connecting portion includes a second surface facing the gap. At least one of the first surface and the second surface has a slope angle of less than 90 degrees relative to the connecting element.

[0046] In at least one embodiment of the mask assembly provided in this disclosure, adjacent first and second mask sheets are connected by a connecting element, thereby providing support at the connection point to reduce sagging. Furthermore, by providing a filling element in at least a portion of the interval between the first and second connecting portions, or by making at least one of the first surface of the first connecting portion and the second surface of the second connecting portion have a slope angle of less than 90 degrees relative to the connecting element, it is beneficial to ensure that the film layer disposed on the mask sheet has uniform thickness, good flatness, and is less prone to local breakage.

[0047] The mask assembly and its manufacturing method provided in the embodiments of this disclosure will be described in more detail below with reference to the accompanying drawings, so that the corresponding technical solutions can be clearer and easier to understand.

[0048] Figure 1 is a partial structural schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure; Figure 2 is a partial cross-sectional schematic diagram of a mask assembly provided in an embodiment of the present disclosure, for example, Figure 2 can be a cross-sectional schematic diagram of the mask assembly in Figure 7 along line A-A'; Figure 3 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of the present disclosure, for example, Figure 2 can be a cross-sectional schematic diagram of the mask assembly in Figure 1 along line B-B'.

[0049] As shown in Figure 1, the mask assembly 123 includes multiple mask sheets 100. Each mask sheet 100 includes multiple openings 101 and a partition 102 surrounding each opening 101. For example, a portion of the partition 102 is located between two adjacent openings 101. For example, a portion of the partition 102 is located outside the multiple openings 101 of the mask sheet 100. For example, a display panel includes a display area and a peripheral area surrounding the display area. The display area includes multiple sub-pixels arranged in an array, such as red sub-pixels emitting red light, green sub-pixels emitting green light, and blue sub-pixels emitting blue light, etc. The display area is configured to display an image. For example, each opening of the mask sheet 100 corresponds to a main display area, but the embodiments of this disclosure do not limit the specific size of each opening. For example, each opening 101 of the mask sheet 100 can serve as a mask opening for forming an encapsulation layer in the display panel. The encapsulation layer may include inorganic materials such as silicon nitride and silicon oxide, and the embodiments of this disclosure do not limit this. For example, each opening 101 of the mask 100 can also serve as a mask opening for forming a common layer in the display panel, such as a hole transport layer, an electron transport layer, or other whole film layers.

[0050] As shown in FIG1, the mask assembly 123 further includes at least one connecting element 200. The connecting element 200 is configured to connect at least two of the plurality of mask sheets 100. For example, the mask assembly may include multiple rows and columns of mask sheets, each column and each row of mask sheets including multiple mask sheets 100. For example, two adjacent rows of mask sheets can be connected by a connecting element 200, and two adjacent columns of mask sheets can also be connected by a connecting element 200. The embodiments of this disclosure do not limit the size of the connecting element 200.

[0051] As shown in Figure 1, the multiple masks 100 in the mask assembly 123 include adjacent first mask 110 and second mask 120. The partition 102 of the first mask 110 includes a first connecting portion 1021, and the first connecting portion 1021 is located outside the plurality of openings 101 of the first mask 110. For example, the first connecting portion 1021 can be a portion of the partition 102 located on one side of the plurality of openings 101. The partition 102 of the second mask 120 includes a second connecting portion 1022, and the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask 120. For example, the second connecting portion 1022 can be a portion of the partition 102 located on one side of the plurality of openings 101.

[0052] As shown in Figure 1, the first connecting portion 1021 and the second connecting portion 1022 are close to each other. At least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on the same side of the connecting element 200 and are respectively connected to the connecting element 200. For example, as shown in Figure 2, in the Z direction, at least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are both located on one side of the connecting element 200. For example, at least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 overlap the connecting element 200. At least a portion of the surface of the first connecting portion 1021 and at least a portion of the surface of the second connecting portion 1022 face each other and are spaced 300 apart. For example, the first connecting portion 1021 and the second connecting portion 1022 may be spaced apart, so that the space 300 is located between the first connecting portion 1021 and the second connecting portion 1022. For example, a portion of the first connecting portion 1021 may be close to and spaced apart from a portion of the second connecting portion 1022; at the same time, another portion of the first connecting portion 1021 and another portion of the second connecting portion 1022 may be in contact with each other. For example, refer to the relevant description of FIG4 in the following embodiments. The embodiments of this disclosure do not limit the position of the interval 300 between at least a portion of the surface of the first connecting portion 1021 and at least a portion of the surface of the second connecting portion 1022.

[0053] As shown in Figures 1 and 2, in some embodiments, the mask assembly further includes a filling element 400 located in at least a portion of the gap 300 between the first connecting portion 1021 and the second connecting portion 1022. For example, the filling element 400 may completely fill the gap 300, or the filling element 400 may be located in a portion of the gap 300; the embodiments of this disclosure are not limited in this regard. Thus, the filling element 400 can provide support for the film layer (e.g., the protective film layer 500 in the following embodiments) disposed on the first mask sheet 110 and the second mask sheet 120, so that the thickness of the film layer is more uniform at the gap 300, reducing the risk of local thinning or breakage.

[0054] In at least one embodiment of the mask assembly provided in this disclosure, adjacent first and second mask sheets are connected by connecting elements, thereby providing support at the connection point to reduce sagging. By providing filling elements in at least a portion of the interval between the first and second connecting portions, it is beneficial to ensure that the film layer disposed on the mask sheet has uniform thickness, good flatness, and is less prone to local breakage.

[0055] As shown in Figures 1 and 3, in some embodiments, the first connecting portion 1021 includes a first surface 104 facing the gap 300, and the second connecting portion 1022 includes a second surface 106 facing the gap 300. The slope angle of the first surface 104 relative to the connecting element 200 is β1, and β1 is less than 90 degrees. The slope angle of the second surface 106 relative to the connecting element 200 is β2, and β2 is also less than 90 degrees. For example, the first surface 104 is a curved surface, and the angle between the cross-section of the first surface 104 and the surface of the connecting element 200 facing the first mask 110 is less than 90 degrees. The distance between the cross-section and the connecting element 200 in the Z direction is half the dimension of the first mask 110 in the Z direction.

[0056] In at least one embodiment of the mask assembly provided in this disclosure, by making the slope angle of at least one of the first surface of the first connecting portion and the second surface of the second connecting portion relative to the connecting element less than 90 degrees, the step difference between the film layer located on the first mask sheet and the second mask sheet and the connecting element at the interval can be reduced, so that the thickness of the film layer at the interval is more uniform, and it will not be thinned or broken. When the film layer disposed on the mask sheet is used as a protective film layer, it is beneficial to ensure that the surface characteristics of the mask sheet are not damaged, thereby helping to extend the service life of the mask sheet.

[0057] In some embodiments, as shown in FIG3, at least one of the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 has a slope angle relative to the connecting element 200 of no more than 80 degrees. For example, it can be at least one of 10-60 degrees, 20-50 degrees, 30-70 degrees, and 40-65 degrees. The specific angles of the above slope angles are not listed in this disclosure embodiment. The slope angles can also be other angles within the range of 10-89 degrees. This setting helps to reduce the step difference between the surfaces of the first mask 110 and the second mask 120 away from the connecting element 200 and the connecting element 200, so that the film layer disposed on the first mask 110 and the second mask 120 transitions smoothly at the connecting element 200, which helps to ensure the uniformity of the film layer thickness and reduces the risk of local breakage.

[0058] In some embodiments, as shown in FIG3, at least one of the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 has a slope angle of 10 to 40 degrees relative to the connecting element 200. For example, it can be at least one of 10 to 30 degrees, 15 to 20 degrees, 25 to 30 degrees, and 35 to 40 degrees. The specific angles of the above slope angles are not listed one by one in the embodiments of this disclosure. The slope angles can also be other angles within the range of 10 to 39 degrees. Therefore, the step difference between the surfaces of the first mask 110 and the second mask 120 away from the connecting element 200 and the connecting element 200 can be further reduced, thereby reducing the risk of local breakage of the film layer disposed on the first mask 110 and the second mask 120.

[0059] In some embodiments, as shown in FIG3, at least one of the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 can be a curved surface, so that the cross-section of it by a plane is arc-shaped. For example, both the first surface 104 of the first mask 110 and the second surface 106 of the second mask 120 are curved surfaces, and the curvatures of the first surface 104 and the second surface 106 can be the same or different, which is not limited in the embodiments of this disclosure. The aforementioned plane is parallel to the thickness direction of the connecting element 200 and parallel to the arrangement direction of the first mask 110 and the second mask 120. As shown in FIG3, the thickness direction of the connecting element 200 can be the Z direction, and the arrangement direction of the first mask 110 and the second mask 120 can be the X direction. For example, at least a portion of the first surface 104 and the second surface 106 can be a curved surface, and the other portion can be an inclined surface, and the slope angles of the curved surface and the inclined surface relative to the connecting element 200 can be the same or different, which is not limited in the embodiments of this disclosure.

[0060] This configuration ensures that the film layers on the first and second masks have uniform thickness at the intervals, allowing for a smooth transition between the first surface and the connecting element, as well as between the second surface and the connecting element, thereby helping to guarantee the uniformity of the film layer thickness.

[0061] Figure 4 is a partial cross-sectional schematic diagram of another mask assembly provided in an embodiment of the present disclosure.

[0062] In some embodiments, as shown in FIG4, the edge of the first connecting portion 1021 of the first mask 110 contacts the edge of the second connecting portion 1022 of the second mask 120, and a gap 300 is formed between a portion of the first surface 104 and a portion of the second surface 106 of the first connecting portion 1021. In the Z direction, the gap 300 gradually increases in size in the X direction. For example, a filling element may be provided in the gap 300 shown in FIG4, which helps to further ensure uniform thickness and good flatness of the film layer disposed on the mask. The embodiments of this disclosure are not limited thereto; for example, the gap 300 shown in FIG4 may not contain a filling element 400.

[0063] In some embodiments, as shown in FIG2, the mask assembly includes a first connecting portion 1021 and a second connecting portion 1022 of the filling element 400, both of which face each other and are in contact with the filling element 400. This reduces the step difference between the surface of the first mask sheet 110 away from the connecting element 200 and the connecting element 200, and the step difference between the surface of the second mask sheet 120 away from the connecting element 200 and the connecting element 200. In other words, the portion of the film layer located on the first connecting portion 1021 can smoothly transition to the portion of the filling element 400 located on the side away from the connecting element 200, and the portion of the film layer located on the second connecting portion 1022 can also smoothly transition to the portion of the filling element 400 located on the side away from the connecting element 200. This makes the thickness of the film layer uniform and less prone to local breakage.

[0064] For example, as shown in FIG2, the contact area between the filling element 400 and the first mask 110 may be the same as or different from the contact area between the filling element 400 and the second mask 120. For example, the filling element 400 may contact only one of the first mask 110 and the second mask 120, and the filling element 400 may have a small gap with the other of the first mask 110 and the second mask 120, and this gap may have little effect on the thickness of the film layer disposed on the first mask 110 and the second mask 120. For example, the shapes of the filling elements 400 disposed in multiple intervals of multiple rows of mask sheets in the mask assembly may be different, thereby adapting to intervals of different sizes. The embodiments of this disclosure do not limit the shape of the filling element 400.

[0065] In some embodiments, as shown in FIG2, the first connecting portion 1021 and the second connecting portion 1022 are both located on the same side of the connecting element 200, and a portion of the first connecting portion 1021 and a portion of the second connecting portion 1022 overlap the connecting element 200 and are both connected to the connecting element 200.

[0066] In some embodiments, as shown in FIG2, the material of the filling element 400 can be the same as the material of the mask 100, for example, it can be a polymer film material such as polyethylene, polypropylene, or polyvinyl chloride. For example, the material of the filling element 400 may include optical adhesive, for example, the filling material 400 can be formed by curing optical adhesive, thereby better adapting to gaps of different sizes. For example, in multiple gaps of different sizes, the filling element 400 can contact the first connecting portion 1021 and the second connecting portion 1022 on both sides of each gap 300, thereby better ensuring the uniformity of the film layer thickness on the first mask 110 and the second mask 120.

[0067] For example, as shown in FIG2, the maximum thickness of the first connecting portion 1021 is L1, the maximum thickness of the second connecting portion 1022 is L2, and the maximum thickness of the filling element 400 is L0. There is a first thickness difference between the filling element 400 and the first connecting portion 1021, the value of which is |L1-L0|, and |L1-L0| is 1 / 5 to 1 / 2 of L1. For example, the maximum thickness L0 of the filling element 400 can be greater than or less than L1, and |L1-L0| can be 1 / 5 to 1 / 4, 1 / 4 to 1 / 3, or 1 / 3 to 1 / 2 of L1; the embodiments of this disclosure do not limit this.

[0068] For example, as shown in FIG2, there is a second thickness difference between the filling element 400 and the second connecting portion 1022, the value of which is |L2-L0|, and |L2-L0| is 1 / 5 to 1 / 2 of L2. For example, the maximum thickness of the filling element 400 may be greater than or less than the maximum thickness of the second connecting portion 1022, and |L2-L0| may be 1 / 5 to 1 / 4, 1 / 4 to 1 / 3, or 1 / 3 to 1 / 2 of L2. The embodiments of this disclosure do not limit this.

[0069] For example, as shown in Figure 2, at least one of the values ​​of the first thickness difference |L1-L0| and the second thickness difference |L2-L0| is 10 to 50 micrometers, such as 10 to 20 micrometers, 20 to 30 micrometers, 30 to 40 micrometers or 40 to 50 micrometers. The embodiments of this disclosure do not limit this.

[0070] By setting the first thickness difference between the filling element and the first connecting portion and the second thickness difference between the filling element and the second connecting portion within the above range, the step difference between the first connecting portion and the filling element and the step difference between the second connecting portion and the filling element can be small. This helps to ensure that the film layer on the first mask and the second mask has a small thickness change at the filling element, thereby reducing the risk of local breakage of the film layer.

[0071] For example, as shown in FIG2, in the X direction, the dimension of the portion of the first connecting portion 1021 overlapping with the connecting element 200 in its thickness direction is H1, and the dimension of the portion of the second connecting portion 1022 overlapping with the connecting element 200 in its thickness direction is H2. In some embodiments, H1 is not less than 1 / 4 of the maximum dimension of the first connecting portion 1021 in the X direction; for example, H1 can be 1 / 3, 1 / 2, or 3 / 4 of the maximum dimension of the first connecting portion 1021. For example, H2 is not less than 1 / 4 of the maximum dimension of the second connecting portion 1022; for example, H2 can be 1 / 3, 1 / 2, or 3 / 4 of the maximum dimension of the second connecting portion 1022.

[0072] This configuration ensures the reliability of the connection between the connecting element and the first and second connecting parts, thereby facilitating the enhancement of the support force between the first and second mask sheets through the connecting element.

[0073] In the embodiments of this disclosure, in the arrangement direction of the first connecting portion and the second connecting portion, since the size of the portion of the first connecting portion that overlaps with the connecting element in its thickness direction is smaller than the maximum size of the first connecting portion, the openings of the first mask and the second mask do not overlap with the connecting element, thereby reducing the influence of the connecting element on the opening area of ​​the first mask and the opening area of ​​the second mask.

[0074] Figure 5 is a schematic diagram of a mask assembly with a protective film layer provided in an embodiment of this disclosure.

[0075] In some embodiments, as shown in FIG5, the mask assembly may include a protective film layer 500, which is located on multiple mask sheets. For example, a portion of the protective film layer 500 is located on the first connecting portion 1021 of the first mask sheet 110 and the second connecting portion 120 of the second mask sheet 120. For example, the protective film layer 500 may cover the surfaces of the first connecting portion 1021 and the second connecting portion 1022 and overlap with the connecting element 200. For example, the protective film layer 500 may be the film layer located on the first mask sheet 110 and the second mask sheet 120 as described in the above embodiments. By providing the protective film layer 500, the erosion of the first connecting portion 1021 and the second connecting portion 1022 by substances such as water and oxygen can be reduced, thereby improving the service life of the first mask sheet 110 and the second mask sheet 120.

[0076] For example, as shown in Figure 5, the protective film layer 500 may include, but is not limited to, aluminum oxide. For example, the protective film layer 500 may be fabricated by processes such as chemical vapor deposition (CVD) to ensure that the protective film layer 500 has good density and uniform thickness.

[0077] For example, depending on different usage requirements, the mask assembly may not include the protective film layer 500, but may directly form other film layers. The embodiments of this disclosure do not limit this.

[0078] Figure 6 is a partial structural schematic diagram of another mask assembly provided in an embodiment of the present disclosure.

[0079] In some embodiments, as shown in FIG6, the first connecting portion 1021 includes a first main body portion 1101 and a first end portion 1102. The first end portion 1102 is closer to the first main body portion 1101 by a distance of 300, and in the thickness direction of the first connecting portion 1021, the first end portion 1102 is recessed relative to the first main body portion 1101, so that the first connecting portion 1021 has a first recess 0110. For example, in the Z direction, the size of the first end portion 1102 is smaller than the size of the first main body portion 1101, so that the first recess 0110 can serve as a receiving cavity for the first connecting portion 1021.

[0080] For example, as shown in FIG6, similar to the structure of the first connecting portion 1021, the second connecting portion 1022 includes a second main body portion 1201 and a second end portion 1202. The second end portion 1202 is closer to the second main body portion 1201 by a distance of 300, and in the thickness direction of the second connecting portion 1022, the second end portion 1202 is recessed relative to the second main body portion 1201, so that the second connecting portion 1022 has a second recess 0120. For example, in the Z direction, the size of the second end portion 1202 is smaller than the size of the second main body portion 1201, so that the second recess 0120 can serve as a receiving cavity for the second connecting portion 1022. For example, the first portion 210 of the connecting element 200 is located in the first recess 0110, and the second portion 220 of the connecting element 200 is located in the second recess 0120.

[0081] This design helps to reduce the overall size of the mask assembly in the Z direction (as shown in Figure 6), which is beneficial for a thinner and lighter design. At the same time, it can also enhance the connection between the first and second connecting parts and the connecting elements, so that the connecting elements can provide support for the first and second mask sheets.

[0082] In some embodiments, as shown in FIG6, the thickness of the first main body portion 1101 and the thickness of the second main body portion 1201 may both be greater than the thickness of the connecting element 200, and the surface of the connecting element 200 away from the interval 300 is flush with at least one of the surfaces of the first main body portion 1101 and the second main body portion 1201.

[0083] For example, as shown in FIG6, the connecting element 200 includes a first portion 210 near the first main body portion 1101 and a second portion 220 near the second main body portion 1201. The connecting element 200 also includes a central portion located between the first portion 210 and the second portion 220, which overlaps with the filling element 400. For example, the first portion 210 of the connecting element 200 can be embedded in the first recess 0110, and the second portion 220 of the connecting element 200 can be embedded in the second recess 0120. The surface of the connecting element 200 away from the interval 300 is flush with the surfaces of the first main body portion 1101 and the second main body portion 1201. This facilitates good connection between the surface of the connecting element 200 away from the interval 300 and at least one of the surfaces of the first main body portion 1101 and the second main body portion 1201, resulting in a flatter overall structure of the mask assembly.

[0084] Figure 7 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure; Figure 8 is a structural schematic diagram of another mask assembly provided in at least one embodiment of the present disclosure.

[0085] In some embodiments, as shown in Figures 7 and 8, at least two masks 100 of a plurality of masks 100 are connected by at least one connecting element 200 to form a mask assembly 212, and the mask assembly 212 is a single-piece structure. For example, the plurality of masks 100 may be arranged in an array. For example, as shown in Figure 7, in the X direction, every two adjacent masks 100 are connected by the connecting element 200. For example, the dimensions of two adjacent masks in the X direction may be the same or different. For example, as shown in Figure 8, in the Y direction, every two adjacent masks 100 are connected by the connecting element 200. For example, the dimensions of two adjacent masks in the Y direction may be the same or different. For example, in the X direction, two adjacent columns of masks 100 may be connected by the same connecting element 200. For example, in the Y direction, two adjacent rows of masks 100 may also be connected by the same connecting element 200, thereby simplifying the structure of the connecting element. For example, some of the masks 100 in the multiple masks 100 can also be set independently, that is, each mask in the portion of the masks 100 is not connected to the adjacent masks through connecting elements. The embodiments of this disclosure do not limit the connection form of the multiple masks 100 in the mask assembly, and can be flexibly set according to different design requirements.

[0086] Figure 9 is a schematic diagram of a mask frame provided in at least one embodiment of the present disclosure; Figure 10 is a schematic diagram of a mask assembly provided in at least one embodiment of the present disclosure disposed on the mask frame shown in Figure 9.

[0087] For example, as shown in FIG9, at least one embodiment of the mask assembly provided by this disclosure further includes a mask frame 600, which includes a mask border 160. For example, the mask border 160 surrounds an opening region. For example, the opening area of ​​the opening region surrounded by the mask border 160 is larger than the opening area of ​​each opening in the mask sheet. For example, as shown in FIG10, the mask sheet assembly 212 is located on the mask border 160, and at least a portion of the edge of the mask sheet assembly 212 is connected to the mask border 160. For example, the mask frame 600 includes an inner contour 601 and an outer contour 602, and the mask border 160 may be the portion enclosed by the inner contour 601 and the outer contour 602. For example, the mask frame 600 may be made of a metallic material. For example, a portion of the edge of the mask sheet assembly 212 may overlap and be connected to the mask border 160, for example, by welding, but not limited thereto. The embodiments of this disclosure do not limit the connection method between the mask sheet assembly 212 and the mask border 160.

[0088] Figure 11 is a schematic diagram of another mask frame structure provided by at least one embodiment of the present disclosure; Figure 12 is a schematic diagram of a mask assembly provided by at least one embodiment of the present disclosure disposed on the mask frame shown in Figure 11.

[0089] In some embodiments, FIG11 illustrates another mask frame 600 provided by at least one embodiment of the present disclosure. The mask frame 600 includes a mask border 160 and an auxiliary structure 165. The auxiliary structure 165 overlaps with an opening region enclosed by the mask border 160 and is connected to the mask border 160. For example, the auxiliary structure 165 divides an opening region enclosed by the mask border 160 into multiple opening sub-regions. The multiple opening sub-regions may correspond one-to-one with multiple mask sheets in a mask assembly. For example, the auxiliary structure 165 may be an integral structure with the mask border 160. For example, the auxiliary structure 165 may be a separate structure connected to the mask border 160. The embodiments of the present disclosure do not limit the form of the auxiliary structure.

[0090] In some embodiments, as shown in FIG12, at least one connecting element 200 in the mask assembly includes at least one auxiliary connecting element 260, at least a portion of which is located on the auxiliary structure 165. For example, the mask assembly may include a plurality of connecting elements 200, each of which may be disposed on or not disposed on the auxiliary structure 165. Connecting elements 200 disposed on the auxiliary structure 165 may serve as auxiliary connecting elements 260. For example, the connecting elements 200 other than the auxiliary connecting element 260 are structurally substantially no different from the auxiliary connecting element 260. For example, the number of auxiliary structures 165 is not greater than the number of connecting elements 260. For example, in the X direction, the size of the auxiliary structure 165 is larger than the size of the auxiliary connecting element 260, thereby providing stable support for the auxiliary connecting element 260 and effectively reducing the sag of the mask assembly 212.

[0091] At least one embodiment of this disclosure also provides a method for manufacturing a mask assembly. Figures 13 and 14 are schematic diagrams illustrating the manufacturing process of a mask assembly according to at least one embodiment of this disclosure. The method for manufacturing a mask assembly will be described below with reference to Figures 1-2, 4-5, and 13-14.

[0092] For example, as shown in FIG13, at least two mask sheets 100 are provided and connected by at least one connecting element 200. Referring to FIG1, each mask sheet 100 includes a plurality of openings 101 and a partition 102 surrounding each opening 101. The aforementioned at least two mask sheets 100 include an adjacent first mask sheet 110 and a second mask sheet 120. The partition 102 of the first mask sheet 110 includes a first connecting portion 1021, and the partition 102 of the second mask sheet 120 includes a second connecting portion 1022. The first connecting portion 1021 is located outside the plurality of openings 101 of the first mask sheet 110, and the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask sheet 120. For the structure of the first mask sheet 110 and the second mask sheet 120, please refer to the relevant description of the above embodiment, which will not be repeated here.

[0093] For example, as shown in FIG13, the first connecting portion 1021 and the second connecting portion 1022 are close to each other and have a spacing of 300. At least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on the same side of the connecting element 200 and are respectively connected to the connecting element 200. For example, a portion of the first connecting portion 1021 can be welded to the connecting element 200, and a portion of the second connecting portion 1022 can also be welded to the connecting element 200, thereby forming a mask assembly.

[0094] For example, referring to Figures 2 and 14, a filling element 400 is formed in at least a portion of the interval 300. For example, as shown in Figure 14, a filling material 0400 is formed in the interval 300. The filling material 0400 can be made of the same material as the first mask 110 or the second mask 120, for example, a polymer film material such as polyethylene, polypropylene, or polyvinyl chloride, which is not limited in the embodiments of this disclosure. For example, the dimension of the filling material 0400 in the X direction is smaller than the dimension of the interval 300 in the X direction, and the dimension of the filling material 0400 in the Z direction is greater than or equal to the dimension of the interval 300 in the Z direction. For example, the filling material 0400 has a gap with at least one of the first mask 110 and the second mask 120 in the X direction, thereby facilitating the formation of the filling material 0400 in the interval 300 and satisfying the filling range of the interval 300. For example, the dimensions of the filling material 0400 located in different intervals 300 can be different. For example, for an interval 300 with a larger dimension in the X direction, the volume of the filling material 0400 can be larger. For example, at least one of the dimensions of the filling material 0400 in the X direction and the dimensions in the Z direction can be increased to provide sufficient filling capacity for the interval 300.

[0095] Then, referring to Figures 2 and 14, the filler material 0400 is processed by a laser or electron beam to melt it, thereby forming a filler element 400 filled in the spacer 300. For example, after melting, the filler material 0400 can contact at least one of the opposing surfaces of the first connecting portion 110 and the second connecting portion 120 to ensure the uniformity of the film thickness subsequently formed on the first connecting portion 110 and the second connecting portion 120.

[0096] For example, referring to Figures 2 and 14, the filler material 0400 formed in at least a portion of the interval 300 can be an optical adhesive, and further, by curing the optical adhesive, a filler element 400 can be formed. For example, the optical adhesive can be a UV-curable adhesive, but is not limited thereto. For example, by using a curable adhesive, the filler element 400 can be in contact with at least one of the first connecting portion 1021 and the second connecting portion 1022 on both sides of the intervals with different sizes, thereby better ensuring the uniformity of the film thickness formed on the first mask 110 and the second mask 120.

[0097] For example, referring to FIG. 5, a protective film layer 500 is formed on multiple masks (such as the first mask 110 and the second mask 120). For example, the protective film layer 500 is formed on the side of the filler element 400 away from the connecting element 200 and overlaps with the connecting element 200. For example, the protective film layer 500 can be formed by a chemical vapor deposition (CVD) process to achieve good density and uniform thickness. For example, the protective film layer 500 may include aluminum oxide, thereby reducing the erosion of the first mask 110 and the second mask 120 by water, oxygen, etc., thereby improving the service life of the first mask 110 and the second mask 120.

[0098] At least one embodiment of this disclosure also provides a process for fabricating another mask assembly. Figure 15 is a schematic diagram of the structure after a protective film layer has been formed in the mask assembly shown in Figure 3. The method for fabricating another mask assembly will be described below with reference to Figures 1, 3, 13 and 15.

[0099] As shown in Figure 13, at least two mask sheets 100 are provided and connected by at least one connecting element 200. Referring to Figure 1, each mask sheet 100 includes a plurality of openings 101 and a partition 102 surrounding the openings 101. The aforementioned at least two mask sheets 100 include an adjacent first mask sheet 110 and a second mask sheet 120. The partition 102 of the first mask sheet 110 includes a first connecting portion 1021, and the partition 102 of the second mask sheet 120 includes a second connecting portion 1022. The first connecting portion 1021 is located outside the plurality of openings 101 of the first mask sheet 110, and the second connecting portion 1022 is located outside the plurality of openings 101 of the second mask sheet 120. For the structure of the first mask sheet 110 and the second mask sheet 120, please refer to the relevant description of the above embodiment, which will not be repeated here.

[0100] As shown in Figure 13, the first connecting portion 1021 and the second connecting portion 1022 are close to each other and spaced 300 apart. At least a portion of the first connecting portion 1021 and at least a portion of the second connecting portion 1022 are located on the same side of the connecting element 200 and are respectively connected to the connecting element 200. For example, a portion of the first connecting portion 1021 can be welded to the connecting element 200, and a portion of the second connecting portion 1022 can also be welded to the connecting element 200, thereby forming a mask assembly.

[0101] Referring to FIG. 3, at least one of a portion of the end of the first connecting portion 1021 near the interval 300 and a portion of the end of the second connecting portion 1022 near the interval 300 is melted, such that at least one of the first surface 104 of the first connecting portion 1021 facing the interval 300 and the second surface 106 of the second connecting portion 1022 facing the interval 300 has a slope angle of less than 90 degrees relative to the connecting element 200. For example, referring to FIGS. 1 and 3, a portion of the end of the first connecting portion 1021 near the interval 300 is melted, such that the first surface 104 is curved. A portion of the end of the second connecting portion 1022 near the interval 300 is melted, such that the second surface 106 is an inclined surface relative to the connecting element 200, but the embodiments of this disclosure do not limit the shape of the first surface 104 and the second surface 106.

[0102] By melting at least one of the portion of the first connecting portion near the gap and the portion of the second connecting portion near the gap, the size of the gap in the alignment direction of the first and second connecting portions can be reduced, which helps to ensure the uniformity of the film thickness formed on the first and second mask sheets.

[0103] For example, referring to FIG13, the first connecting portion 1021 includes a first corner portion 1031 near the interval 300, and the second connecting portion 1022 includes a second corner portion 1032 near the interval 300. For example, the first corner portion 1031 is a portion of the end of the first connecting portion 1021 near the interval 300, and the second corner portion 1032 is a portion of the end of the second connecting portion 1022 near the interval 300. Melting at least one of the portion of the end of the first connecting portion 1021 near the interval 300 and the portion of the end of the second connecting portion 1022 near the interval 300 may include melting at least one of the first corner portion 1031 of the first connecting portion 1021 and the second corner portion 1032 of the second connecting portion 1022 using a laser or an electron beam.

[0104] For example, referring to Figures 3 and 13, the first surface 104 can be a surface formed by melting the first corner portion 1031 with a laser or electron beam, and the second surface 106 can be a surface formed by melting the second corner portion 1032 with a laser or electron beam. For example, the degree of melting of the first corner portion 1031 and the second corner portion 1032 with a laser or electron beam can be different. For example, the volume of the first corner portion 1031 and the second corner portion 1032 melted can be different, so that the first surface 104 and the second surface 106 have different shapes, and thus the slope angle of the first surface 104 relative to the connecting element 200 and the slope angle of the second surface 106 relative to the connecting element 200 can be different. The embodiments of this disclosure do not limit the degree of melting of the first corner portion 1031 and the second corner portion 1032.

[0105] For example, referring to FIG15, after forming the first surface 104 and the second surface 106, a protective film layer 500 can be formed on the first connecting portion 1021 and the second connecting portion 1022. For example, the protective film layer 500 is formed on the side of the filling element 400 away from the connecting element 200 and overlaps with the connecting element 200. For example, the protective film layer 500 can be formed by a chemical vapor deposition (CVD) process to achieve good density and uniform thickness. For example, the protective film layer 500 may include alumina, thereby reducing the erosion of the first connecting portion 1021 and the second connecting portion 1022 by water, oxygen, etc., thereby improving the service life of the first mask 110 and the second mask 120.

[0106] The following points need to be explained:

[0107] (1) The accompanying drawings of the embodiments of this disclosure only involve the structures involved in the embodiments of this disclosure, and other structures can be referred to the general design.

[0108] (2) Where there is no conflict, features of the same embodiment and different embodiments of this disclosure may be combined with each other.

[0109] The above description is merely an exemplary embodiment of this disclosure and is not intended to limit the scope of protection of this disclosure, which is determined by the appended claims.

Claims

1. A mask assembly, comprising: Multiple photomasks, each photomask including multiple openings and partitions surrounding the openings; At least one connecting element is configured to connect at least two of the plurality of masks; The plurality of photomasks includes adjacent first and second photomasks. The first photomask has a dividing portion including a first connecting portion, and the second photomask has a dividing portion including a second connecting portion. The first connecting portion is located outside a plurality of openings in the first photomask, and the second connecting portion is located outside a plurality of openings in the second photomask. The first and second connecting portions are close to each other, and at least a portion of their facing surfaces are spaced apart. At least a portion of the first connecting portion and at least a portion of the second connecting portion are located on the same side of the connecting element and are respectively connected to the connecting element. The mask assembly further includes a filling element located within at least a portion of the interval; or, The first connecting portion includes a first surface facing the interval, and the second connecting portion includes a second surface facing the interval, wherein at least one of the first surface and the second surface has a slope angle of less than 90 degrees relative to the connecting element.

2. The mask assembly according to claim 1, wherein, At least one of the first surface and the second surface has a slope angle of no more than 80 degrees relative to the connecting element.

3. The mask assembly according to claim 1, wherein, At least one of the first surface and the second surface has a slope angle of 10 to 40 degrees relative to the connecting element.

4. The mask assembly according to any one of claims 1-3, wherein, At least one of the first surface and the second surface is intersected by a plane with an arc shape, the plane being parallel to the thickness direction of the connecting element and parallel to the arrangement direction of the first mask and the second mask.

5. The mask assembly according to claim 1, wherein, The surfaces of the first connecting portion and the second connecting portion that face each other are in contact with the filling element.

6. The mask assembly according to claim 1 or 5, wherein, The filling element is made of one of the same materials as the mask and optical adhesive.

7. The mask assembly according to any one of claims 1, 5, and 6, wherein, There is a first thickness difference between the filling element and the first connecting part, the first thickness difference being 1 / 5 to 1 / 2 of the maximum thickness of the first connecting part; and there is a second thickness difference between the filling element and the second connecting part, the second thickness difference being 1 / 5 to 1 / 2 of the maximum thickness of the second connecting part.

8. The mask assembly according to claim 7, wherein, At least one of the first thickness difference and the second thickness difference is 10 to 50 micrometers.

9. The mask assembly according to any one of claims 1-8, wherein, In the arrangement direction of the first connecting portion and the second connecting portion, the size of the portion of the first connecting portion that overlaps with the connecting element in its thickness direction is not less than 1 / 4 of the maximum size of the first connecting portion; and / or, the size of the portion of the second connecting portion that overlaps with the connecting element in its thickness direction is not less than 1 / 4 of the maximum size of the second connecting portion.

10. The mask assembly according to any one of claims 1-9, further comprising: A protective film layer is located on the plurality of masks and overlaps with the at least one connecting element.

11. The mask assembly according to any one of claims 1-10, wherein, The first connecting portion and the second connecting portion are both located on the same side of the connecting element.

12. The mask assembly according to any one of claims 1-11, wherein, The first connecting portion includes a first main body portion and a first end portion, the first end portion being closer to the gap than the first main body portion. In the thickness direction of the first connecting portion, the first end portion is recessed relative to the first main body portion, such that the first connecting portion has a first recess. The second connecting portion includes a second main body portion and a second end portion, the second end portion being closer to the gap than the second main body portion. In the thickness direction of the second connecting portion, the second end portion is recessed relative to the second main body portion, such that the second connecting portion has a second recess. The first part of the connecting element is located in the first recess, and the second part of the connecting element is located in the second recess.

13. The mask assembly according to claim 12, wherein, The thickness of the first main body and the thickness of the second main body are both greater than the thickness of the connecting element, and the surface of the connecting element away from the interval is flush with the surface of at least one of the first main body and the second main body.

14. The mask assembly according to any one of claims 1-13, wherein, At least two of the plurality of photomasks are connected to form a photomask assembly via at least one of the connecting elements, the photomask assembly being a single, integrated structure. The mask assembly further includes a mask frame, the mask frame including a mask border, the mask sheet assembly being located on the mask border, and at least a portion of the edges of the mask sheet assembly being flush with the mask border. connect.

15. The mask assembly of claim 14, wherein, The mask frame further includes an auxiliary structure, which overlaps with the area enclosed by the mask frame and is connected to the mask frame. The at least one connecting element includes at least one auxiliary connecting element, at least a portion of which is located on the auxiliary structure.

16. A method for manufacturing a mask assembly, comprising: At least two masks from a plurality of masks are connected by at least one connecting element, wherein each mask includes a plurality of openings and a partition surrounding the openings, the plurality of masks includes adjacent first and second masks, the partition of the first mask includes a first connecting portion, the partition of the second mask includes a second connecting portion, the first connecting portion is located outside the plurality of openings of the first mask, the second connecting portion is located outside the plurality of openings of the second mask, the first connecting portion and the second connecting portion are close to each other and at least a gap exists between at least a portion of their facing surfaces, at least a portion of the first connecting portion and at least a portion of the second connecting portion are located on the same side of the connecting element and are respectively connected to the connecting element; and A filling element is formed in at least a portion of the interval; or, at least one of a portion of the first connecting portion near the interval and a portion of the second connecting portion near the interval is melted such that at least one of the first surface of the first connecting portion facing the interval and the second surface of the second connecting portion facing the interval has a slope angle of less than 90 degrees relative to the connecting element.

17. The method for manufacturing a mask assembly according to claim 16, wherein, The formation of a filling element in at least a portion of the interval includes: A filling material is formed in the interval; and The filler material is melted using a laser or electron beam to form the filler element.

18. The method for manufacturing a mask assembly according to claim 16 or 17, wherein, The filling element is made of the same material as the mask.

19. The method for manufacturing a mask assembly according to claim 16, wherein, The formation of a filling element in at least a portion of the interval includes: The spacer is filled with optical adhesive; and The optical adhesive is cured to form the filling element.

20. The method for manufacturing a mask assembly according to claim 16, wherein, The first connecting portion includes a first corner portion near the interval, and the second connecting portion includes a second corner portion near the interval. Melting at least one of a portion of the first connecting portion near the interval and a portion of the second connecting portion near the interval includes: At least one of the first corner portion of the first connecting portion and the second corner portion of the second connecting portion is melted by laser or electron beam.

21. The method for manufacturing a mask assembly according to any one of claims 16-20, further comprising: A protective film layer is formed on the plurality of photomasks, wherein the protective film layer overlaps with the at least one connecting element.

Images