Self-floating probe

Abstract

The present invention provides a self-floating probe having a buffering means such that abrasion of an end portion and an object for inspection that comes into contact with the end portion is prevented. The present invention provides a self-floating probe for inspecting the electrical characteristics of the object for inspection, the self-floating probe comprising: a barrel part that can come into contact with the object for inspection; a compressible elastic part positioned inside the barrel part; a plunger part that is supported on one end of the elastic part and can come into contact with a circuit board; and a floating insulation part that is supported on the other end of the elastic part and can move according to the compression and restoration of the elastic part, wherein the barrel part comes into contact with the object for inspection when the elastic part is compressed.

Description

Self-floating probe

[0001] The present invention relates to a self-floating probe for inspecting electrical characteristics of an inspection target such as a semiconductor.

[0002] A probe refers to a pin that can be used in a testing device, such as a probe card or test socket, to contact and test the test object. Here, the probe serves to transmit electrical signals between the test object and the testing device.

[0003] Semiconductor device inspection is performed by contacting a test socket or probe card equipped with multiple probes with an inspection target, such as a semiconductor package or semiconductor wafer, and applying an electrical signal. The state in which the probes contact the inspection target and are compressed or compressed by force is called overdrive.

[0004] In this regard, prior art document No. 10-1310290 discloses a "pogo pin and a circuit inspection device using the same." The prior art document shows a structure in which a probe portion (112a) first contacts a test object (A), and in the contact state, the probe receives force and reaches an overdrive state.

[0005] The above probe may cause the probe portion (112a) to preferentially contact the inspection object (A) and be compressed by additional force, which may result in the probe portion (112a) or the inspection object (A) being worn or deformed. In addition, when multiple probes are simultaneously installed in the inspection device, the multiple probes may contact the inspection object at different heights due to manufacturing errors in the external terminals of the inspection object or the probes themselves, which may result in a problem in which only a specific probe is severely worn. This may result in a decrease in the yield of the inspection object.

[0006] [Prior Art Literature]

[0007] [Patent Document]

[0008] (Patent Document 1) Patent Publication No. 10-1310290

[0009] In order to solve the above-described problem, the present invention aims to provide a self-floating probe having a buffer means to prevent wear of an end portion and an inspection target in contact with the end portion.

[0010] In order to achieve the above-described object, a self-floating probe according to an embodiment of the present invention is a self-floating probe for testing electrical characteristics of an inspection object, comprising: a barrel portion capable of contacting the inspection object; an elastic portion positioned inside the barrel portion and capable of being compressed; a plunger portion supported at one end of the elastic portion and capable of being in contact with a circuit board; and a floating insulating portion supported at the other end of the elastic portion and capable of moving according to compression and restoration of the elastic portion; wherein the barrel portion can contact the inspection object in a compressed state of the elastic portion.

[0011] Additionally, in the self-floating probe according to an embodiment of the present invention, the floating insulating portion may be provided to protrude in the longitudinal direction from the barrel portion.

[0012] Additionally, in the self-floating probe according to an embodiment of the present invention, the floating insulating portion may include a support portion supported by the barrel portion and a protrusion portion having an outer diameter smaller than the support portion and capable of protruding outward from the barrel portion.

[0013] In addition, in the self-floating probe according to an embodiment of the present invention, the barrel portion may include an upper separation prevention portion formed such that the inner diameter becomes smaller in the longitudinal direction to prevent separation of the floating insulating portion.

[0014] In addition, a self-floating probe according to an embodiment of the present invention includes a barrel portion for exchanging electrical signals with an inspection target; an elastic portion positioned inside the barrel portion and compressible; a plunger portion movable according to compression and restoration of the elastic portion and exchanging electrical signals with a circuit board; and a floating insulating portion movable according to compression and restoration of the elastic portion; wherein, during inspection, the floating insulating portion contacts the inspection target and moves together with the inspection target while insulating the inspection target and the barrel portion, and when the floating insulating portion is inserted into the barrel portion, the barrel portion can be electrically connected to the inspection target.

[0015] The present invention has the effect of preventing wear of an end by dispersing the force received from the inspection target through a buffer means.

[0016] In addition, the present invention has an effect of preventing wear of the end portion regardless of whether the inspection device is equipped with a buffer means by itself.

[0017] FIG. 1 is a drawing showing a self-floating probe according to an embodiment of the present invention.

[0018] FIG. 2 is a drawing showing a cross-section of a self-floating probe according to an embodiment of the present invention.

[0019] FIG. 3a is a drawing showing a restoration state of a self-floating probe according to an embodiment of the present invention.

[0020] FIG. 3b is a drawing showing a compressed state of a self-floating probe according to an embodiment of the present invention.

[0021] FIG. 4a is a drawing showing a restoration state of a self-floating probe according to an embodiment of the present invention.

[0022] FIG. 4b is a drawing showing a compressed state of a self-floating probe according to an embodiment of the present invention.

[0023] Figure 5 is a drawing showing a state in which a probe according to a comparative example is equipped in a testing device.

[0024] FIG. 6 is a drawing showing a state in which a self-floating probe according to an embodiment of the present invention is equipped in an inspection device.

[0025] Those skilled in the art will be able to develop various devices that embody the principles of the invention and fall within the scope and spirit of the invention, even if not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concept and should be understood as being in no way limiting to the specifically listed embodiments and conditions.

[0026] The above-described objects, features and advantages will become more apparent through the following detailed description of the invention in conjunction with the accompanying drawings, so that those skilled in the art will be able to easily implement the technical idea of ​​the invention.

[0027] The embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal illustrations of the present invention. The dimensions of components depicted in these drawings may be exaggerated for the purpose of effectively explaining the technical content. The form of the illustrations may be altered due to manufacturing techniques and / or tolerances.

[0028] When describing various embodiments, components that perform the same function will be given the same names and reference numbers for convenience even if the embodiments are different. In addition, the expression "at least one of A, B, and C" means that it is composed of one, two, or three of A, B, and C. In addition, the cross-section and cross-sectional area may mean the cross-section and the area thereof perpendicular to the longitudinal direction unless otherwise specified. In addition, the longitudinal direction may mean the compression and tension directions of the elastic part. Furthermore, the configuration and operation already described in other embodiments will be omitted for convenience.

[0029] Hereinafter, a self-floating probe (1) (hereinafter referred to as 'self-floating probe') according to an embodiment of the present invention will be described.

[0030] FIG. 1 is a drawing showing a self-floating probe (1) according to an embodiment of the present invention. FIG. 2 is a drawing showing a cross-section of a self-floating probe (1) according to an embodiment of the present invention. FIG. 3a is a drawing showing a restored state of a self-floating probe according to an embodiment of the present invention. FIG. 3b is a drawing showing a compressed state of a self-floating probe according to an embodiment of the present invention. FIG. 4a is a drawing showing a restored state of a self-floating probe according to an embodiment of the present invention. FIG. 4b is a drawing showing a compressed state of a self-floating probe according to an embodiment of the present invention. FIG. 5 is a drawing showing a state in which a probe according to a comparative example is equipped in an inspection device (60). FIG. 6 is a drawing showing a state in which a self-floating probe (1) according to an embodiment of the present invention is equipped in an inspection device (60).

[0031] Referring to FIGS. 1 and 2, a self-floating probe (1) can test the electrical characteristics of an inspection target (50). The self-floating probe (1) can include a barrel portion (100), an elastic portion (200), a plunger portion (300), and a floating insulating portion (400). The barrel portion (100) of the self-floating probe (1) can contact the inspection target (50) in a compressed state of the elastic portion (200).

[0032] The inspection object (50) may refer to electronic components such as a semiconductor socket, a semiconductor wafer, a display module, a camera module, etc., but is not limited thereto. The inspection object (50) may be provided with an external terminal (51) that makes contact with the barrel portion (100). The external terminal (51) may be in at least one of a pad type and a solder type, but is not limited thereto.

[0033] The barrel portion (100) may be provided so as to be in contact with the inspection object (50). The barrel portion (100) may expose the plunger portion (300) to the outside through one end, and may expose the floating insulating portion (400) to the outside through the other end.

[0034] The barrel portion (100) may have a hollow portion (130) at the center. The barrel portion (100) may accommodate an elastic portion (200) therein through the hollow portion (130). The barrel portion (100) may provide a space in which the plunger portion (300) moves in the longitudinal direction according to the compression and tension of the elastic portion (200). The barrel portion (100) may provide a space in which a part of the floating insulating portion (400) moves in the longitudinal direction according to the compression and tension of the elastic portion (200).

[0035] The barrel portion (100) may include an upper separation prevention portion (110) formed so that the inner diameter decreases in the longitudinal direction (upward direction) to prevent the floating insulation portion (400) from being separated, and a lower separation prevention portion (120) formed so that the inner diameter decreases in the longitudinal direction (downward direction) to prevent the plunger portion (300) from being separated. The barrel portion (100) may further include an external fixing portion (140) formed so as to protrude horizontally from the outer surface of the barrel portion (100). The external fixing portion (140) may fix the barrel portion (100) to the inspection device (60).

[0036] The barrel portion (100) can contact the external terminal (51) of the inspection object (50) at the end, and the shape of the end is not limited.

[0037] The upper separation prevention part (110) can form an upper hollow (131) in which the hollow (130) narrows at the upper part of the hollow (130). The upper separation prevention part (110) can prevent the floating insulation part (400) from separating from the barrel part (100) by the restoring force of the elastic part (200).

[0038] The lower separation prevention part (120) can form a lower hollow (132) in which the hollow (130) narrows at the bottom of the hollow (130). The lower separation prevention part (120) can prevent the plunger part (300) from separating from the barrel part (100) by the restoring force of the elastic part (200).

[0039] The elastic member (200) may be a spring coil, but is not limited thereto. The elastic member (200) may be positioned inside the barrel member (100) and may be compressible and extensible. One end of the elastic member (200) may support the plunger member (300) or may be supported by the plunger member (300) to move the plunger member (300) through compression and extensibility. The other end of the elastic member (200) may support the floating insulating member (400) or may be supported by the floating insulating member (400) to move the floating insulating member (400) through compression and extensibility.

[0040] The elastic member (200) can be compressed in the longitudinal direction by the force (pressure) applied by the inspection object (50) to the floating insulating member (400). The elastic member (200) can be compressed in the longitudinal direction by the force applied by the inspection device (60) (or the contact terminal of the circuit board) to the plunger member (300). The state in which the elastic member (200) is compressed or the state in which compression is completed is referred to as the overdrive state.

[0041] The elastic member (200) can be stretched (restored) in the longitudinal direction when the force applied by the inspection object (50) to the floating insulating member (400) is released. The elastic member (200) can be stretched (restored) in the longitudinal direction when the force applied by the inspection device (60) (or the contact terminal of the circuit board) to the plunger member (300) is released.

[0042] The plunger portion (300) may be supported by one end of the elastic portion (200) or may be brought into contact with the circuit board by supporting one end of the elastic portion (200). Specifically, the plunger portion (300) may be brought into contact with a contact terminal of the circuit board.

[0043] The plunger portion (300) may be exposed in the longitudinal direction from the barrel portion (100) at least in part. The plunger portion (300) may include a tip portion (310) that can be in direct contact with a contact terminal, an internal moving portion (320) that is connected to the tip portion (310) and can move longitudinally inside the barrel portion (100), a plunger holding portion (330) that is connected to the internal moving portion (320) and suppresses rotation of the plunger portion (300), and a moving slope portion (340) that decreases or increases the outer diameter between the tip portion (310) and the internal moving portion (320).

[0044] The inner moving part (320) may have an outer diameter larger than that of the tip part (310). The moving slope part (340) may be formed so that its outer diameter gradually decreases from the outer diameter of the inner moving part (320) to the outer diameter of the tip part (310). The tip part (310) may have an outer diameter smaller than that of the plunger-side opening and may thus pass through the opening.

[0045] The tip portion (310) may be exposed longitudinally at least in part through the plunger-side opening of the barrel portion (100). At least a part of the tip portion (310) may pass through the plunger-side opening depending on the compression and tension of the elastic portion (200).

[0046] The internal moving part (320) can move longitudinally within the barrel part (100). The internal moving part (320) can support one end of the elastic part (200) longitudinally.

[0047] The plunger retaining portion (330) may be formed to protrude in the longitudinal direction from the inner moving portion (320). The plunger retaining portion (330) may enter the inside of the elastic portion (200) and contact the inner side of the elastic portion (200) to suppress the rotation of the plunger portion (300) and maintain the longitudinal direction. The plunger retaining portion (330) may be spaced apart from the inner side of the elastic portion (200), but when it is misaligned in the longitudinal direction (vertical direction) by the elastic portion (200), it may contact the inner side of the elastic portion (200) and suppress the rotation of the plunger portion (300). Here, the rotation may mean a phenomenon in which the plunger portion (300) provided to extend in the longitudinal direction is tilted.

[0048] The moving slope (340) may be provided so that the outer diameter gradually increases or decreases between the tip (310) and the inner moving part (320). The moving slope (340) may prevent the plunger part (300) from being separated from the barrel part (100) by contacting the lower separation prevention part (120).

[0049] The floating insulating portion (400) may be supported by the other end of the elastic portion (200) or may be in contact with the inspection target (50) by supporting the other end of the elastic portion (200). The floating insulating portion (400) may be provided to protrude in the longitudinal direction from the barrel portion (100). Specifically, the floating insulating portion (400) may be in contact with the external terminal (51) of the inspection target (50). The floating insulating portion (400) may be made of an insulating material. The floating insulating portion (400) may be made of an elastically deformable material.

[0050] The floating insulating portion (400) may be exposed in the longitudinal direction from the barrel portion (100) at least in part. The floating insulating portion (400) may include a protrusion (410) that can be in direct contact with an external terminal (51), a support portion (420) that is connected to the protrusion (410) and supported by the barrel portion (100), a floating maintenance portion (430) that suppresses rotation of the floating insulating portion (400), and a support slope portion (440) whose outer diameter decreases between the protrusion (410) and the support portion (420).

[0051] The outer diameter of the support member (420) may be larger than the outer diameters of the protrusion member (410) and the floating retaining member (430). The outer diameter of the support slope member (440) may gradually decrease from the outer diameter of the support member (420) to the outer diameter of the protrusion member (410). The protrusion member (410) may have an outer diameter smaller than the opening on the floating insulating member side and may pass through the opening.

[0052] The protrusion (410) may be exposed in the longitudinal direction at least partially through the opening on the floating insulation side of the barrel section (100). At least a portion of the protrusion (410) may pass through the opening on the floating insulation side according to the compression and tension of the elastic section (200). The protrusion (410) may be in direct contact with the inspection target (50) (or the external terminal (51)).

[0053] The support member (420) may be movable in the longitudinal direction within the barrel member (100). The support member (420) may support the other end of the elastic member (200) in the longitudinal direction. The support member (420) may be in contact with the inner wall of the upper separation prevention member (110) and may be supported by the inner wall, thereby preventing separation of the floating insulation member (400).

[0054] The support member (420) may include a support slope member (440) whose outer diameter decreases at one end. The support slope member (440) may prevent the floating insulation member (400) from being detached by being supported by contacting the inclined inner wall of the upper detachment prevention member (110). However, the support member (420) may include the support slope member (440), but is not limited thereto. The support slope member (440) may increase the contact area between the support member (420) and the inner wall of the upper detachment prevention member (110), thereby providing high stability.

[0055] The floating retaining member (430) may be formed to protrude in the longitudinal direction from the support member (420). The floating retaining member (430) may enter the inside of the elastic member (200) and contact the inner side of the elastic member (200) to suppress the rotation of the floating insulating member (400) and maintain the longitudinal direction. The floating retaining member (430) may be spaced apart from the inner side of the elastic member (200), but when it is misaligned in the longitudinal direction by the elastic member (200), it may contact the inner side of the elastic member (200) and suppress the rotation of the floating insulating member (400). Here, the rotation may mean a phenomenon in which the floating retaining member (430) provided to extend in the longitudinal direction tilts.

[0056] Referring to FIGS. 3a and 3b, the self-floating probe (1) can be switched to one of a restoration state, a pressurized state, and a compression state.

[0057] When inspecting an inspection object (50), the floating insulation part (400) comes into contact with the inspection object (50) (restored state) and moves together with the inspection object (50) while insulating the inspection object (50) and the barrel part (100) (pressurized state), and when the floating insulation part (400) is inserted into the barrel part (100), the barrel part (100) can be electrically connected to the inspection object (50) (compressed state).

[0058] As shown in Fig. 3a, the restoration state refers to the state before and immediately after the inspection object (50) comes into contact with the self-floating probe (1). That is, in the restoration state, the inspection object (50) does not apply any force to the self-floating probe (1). In the restoration state, the self-floating probe (1) and the inspection object (50) can be electrically insulated while still in contact with each other.

[0059] The pressurized state refers to a state in which the elastic part (200) is compressed after the inspection object (50) comes into contact with the self-floating probe (1). That is, in the pressurized state, the inspection object (50) can apply a pressing force to the self-floating probe (1). Specifically, in the pressurized state, the inspection object (50) can move in the longitudinal direction together with the floating insulating part (400) while pressing the floating insulating part (400) to compress the elastic part (200). In the pressurized state, the self-floating probe (1) and the inspection object (50) can be electrically insulated while being in contact with each other.

[0060] As shown in Fig. 3b, the compressed state means a state in which the inspection object (50) is in contact with the self-floating probe (1). That is, in the compressed state, the inspection object (50) can apply a pressure to the self-floating probe (1). Specifically, in the compressed state, the inspection object (50) can contact the barrel portion (100) while pressing the floating insulating portion (400) to complete the compression of the elastic portion (200). In the compressed state, the self-floating probe (1) and the inspection object (50) can be electrically connected while in contact with each other. As a result, a current path can be formed in the inspection object (50) and the barrel portion (100).

[0061] In a compressed state, the floating insulating member (400) can be introduced into the barrel member (100), and the upper end of the floating insulating member (400) can be positioned at the same height as the upper end of the barrel member (100) (pad-type external terminal) or, in some cases, at a lower height than the upper end of the barrel member (100) (solder-type external terminal).

[0062] The self-floating probe (1) can have a floating insulating part (400) in contact with the inspection object (50) in the first state, which is a restored state, a floating insulating part (400) in the second state, which is a pressurized state, move in the longitudinal direction together with the inspection object (50), and a barrel part (100) in contact with the inspection object (50) in the third state, which is a compressed state.

[0063] The self-floating probe (1) operates in the order of the first state, the second state, and the third state for the purpose of inspecting the inspection object (50), and when the inspection is completed, it can operate in the order of the third state, the second state, and the first state.

[0064] Referring to FIGS. 4a and 4b, the floating insulating portion (400) may be subjected to countersink processing at the upper end. The floating insulating portion (400) may be provided in a shape in which the upper surface is sunken in the longitudinal direction (downward direction).

[0065] When the inspection object (50) includes a solder-type external terminal (51), the floating insulating portion (400) can minimize wear of the external terminal (51) by contacting the solder through the sunken surface (Fig. 4a). As described above, when the inspection object (50) includes a pad-type external terminal (51), the floating insulating portion (400) can minimize wear of the external terminal (51) by contacting the solder through the flat surface (Fig. 3a). Nevertheless, the shape of the floating insulating portion (400) is not limited to the above-described example.

[0066] Referring to Fig. 5, since the probe (1') according to the comparative example does not have a buffer means, the barrel part (100') can directly contact the inspection object (50) before and after inspection of the inspection object (50). Since the probe (1') according to the comparative example receives the pressure applied by the inspection object (50) alone without a buffer means, the end of the barrel part (100') is prone to wear.

[0067] In a case where a plurality of probes (1') are provided in an inspection device (60) according to a comparative example such as Fig. 5, since the contact heights of the inspection object (50) and the probe (1') are different from each other depending on the manufacturing error of the inspection object (50) and / or the probe (1'), a problem may arise in which wear of the external terminal (51) of a specific probe (1') and / or a specific inspection object (50) is accelerated.

[0068] Referring to Fig. 6, since the self-floating probe (1) is equipped with a buffer means, the pressure applied by the inspection object (50) is distributed and received together with the buffer means, so that wear of the end of the barrel portion (100) can be suppressed.

[0069] The present invention can reduce wear on the end of the barrel portion (100) by receiving the pressure from the inspection object (50) through the floating insulating portion (400), which is a buffering means, in a pressurized state. The present invention can reduce wear on the end of the barrel portion (100) by receiving the pressure from the inspection object (50) in a compressed state by dividing it through the floating insulating portion (400), which is a buffering means, and the barrel portion (100).

[0070] Since the present invention includes a floating insulation part (400) as a buffering means, it is possible to provide a self-floating probe (1) that maintains high durability even if the inspection device (60) is not equipped with a buffering means.

[0071] Since the present invention includes a floating insulation part (400) as a buffer means, it is possible to provide a self-floating probe (1) that is compatible regardless of whether the inspection device (60) is equipped with a buffer means.

[0072] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0073] [Explanation of symbols]

[0074] 1: Self-floating probe

[0075] 50: Inspection target

[0076] 51: External terminal

[0077] 60: Inspection device

[0078] 100: Barrel

[0079] 110: Upper detachment prevention unit

[0080] 120: Lower detachment prevention part

[0081] 130: Hollow

[0082] 131: Upper hollow

[0083] 132: Lower hollow

[0084] 140: External fixed part

[0085] 200: Elasticity

[0086] 300: Plunger part

[0087] 310: Tip section

[0088] 320: Internal moving part

[0089] 330: Plunger retainer

[0090] 340: Moving slope

[0091] 400: Floating insulation

[0092] 410: Protrusion

[0093] 420: Support

[0094] 430: Floating maintenance unit

[0095] 440: Support slope

Claims

1. In a self-floating probe for testing the electrical characteristics of an inspection target, A barrel portion that can come into contact with the above inspection object; A compressible elastic member located inside the above barrel portion; A plunger portion supported on one end of the elastic portion and capable of contacting a circuit board; and It includes a floating insulating part supported on the other end of the elastic part and movable according to the compression and restoration of the elastic part; A self-floating probe in which the barrel part contacts the inspection object while the elastic part is in a compressed state.

2. In paragraph 1, The above floating insulation part is, A self-floating probe protruding longitudinally from the above barrel portion.

3. In paragraph 1, The above floating insulation part is, A self-floating probe comprising a support portion supported by the barrel portion and a protrusion portion having an outer diameter smaller than the support portion and capable of protruding outward from the barrel portion.

4. In paragraph 1, The above barrel part, A self-floating probe including an upper separation prevention part formed so that the inner diameter becomes smaller in the longitudinal direction to prevent separation of the floating insulating part.

5. Barrel section that exchanges electrical signals with the inspection target; A compressible elastic member located inside the above barrel portion; A plunger part that can move according to the compression and restoration of the elastic part and exchanges electrical signals with the circuit board; and It includes a floating insulating part that is movable according to the compression and restoration of the elastic part; A self-floating probe in which, during inspection, the floating insulating part moves together with the inspection object while insulating the inspection object and the barrel part by contacting the inspection object, and when the floating insulating part is introduced into the barrel part, the barrel part is electrically connected to the inspection object.

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