Process for producing a sintered layered body with annealing step using a heating element with limited molybdenum contamination

The described process addresses the challenge of producing large-scale, high-purity layered bodies with reduced contamination and improved oxygen transfer by using a heating element with a molybdenum gradient and specific powder compositions, achieving enhanced properties suitable for semiconductor applications.

WO2025254810A1PCT designated stage Publication Date: 2025-12-11HERAEUS CONAMIC NORTH AMERICA LLC
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Patent Information

Application Number
PCT/US2025/029794
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-06-05
Filing Date
2025-05-16
Publication Date
2025-12-11

AI Technical Summary

Technical Problem

Existing spark plasma sintering (SPS) methods face challenges in producing large-scale layered bodies with diameters of at least 200 mm, requiring high purity, etch resistance, and reduced contamination, while also minimizing furnace contamination and enhancing oxygen transfer during heat treatment.

Method used

A process involving a heating element with an inner and outer region, where the outer region has a lower molybdenum content, is used to produce a layered body through spark plasma sintering, utilizing carbon die walls and specific powder compositions like yttria and alumina, subjected to heat and pressure to achieve a diameter of at least 200 mm with improved properties and reduced contamination.

Benefits of technology

The process successfully produces large-scale layered bodies with enhanced properties, reduced contamination, and improved oxygen transfer, suitable for semiconductor manufacturing applications.

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Abstract

One aspect is a process for producing a layered body, including introducing a first powder into an interior volume to obtain a first powder layer in the interior volume. The interior volume has a cross-sectional width of at least 200 mm and is bordered by an interior surface of a die having a wall of carbon. The first powder layer is subjected to heat and pressure to obtain the layered body. The heat is generated by an electrical voltage applied across the die or the interior volume and the layered body comprises a first layer. The layered body is subjected to heat treatment using a heating element. The heating element comprises an inner region and an outer region that at least partially surrounds the inner region. A molybdenum content of the outer region is less than a molybdenum content of the inner region.
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Citation Information

Patent Citations

  • Plasma resistant yttrium aluminum oxide chamber components

    WO2022154936A9

  • Heater using mosi2 having superior paste resistance as main constituent

    JP2005327478A

  • Multilayer sintered ceramic body

    WO2022133180A1