Coating device

Abstract

The present disclosure relates to the technical field of processing of semiconductors or photovoltaic materials, and particularly to a coating device, which solves the problem of low productivity of the coating device. The coating device comprises: a chamber, a furnace door, at least one furnace door conveying mechanism, and a furnace door sealing mechanism. The coating device is provided with the furnace door conveying mechanism, and is cooperatively provided with the furnace door sealing mechanism, and a furnace opening direction is cooperatively set, such that after coating of a previous batch of products is completed, the furnace door sealing mechanism can open a furnace opening and transport the previous batch of products out of the chamber, and is docked with one furnace door conveying mechanism, and the furnace door conveying mechanism transfers the previous batch of products. The furnace door conveying mechanism can transfer the next batch of products to the furnace door sealing mechanism in a timely manner, such that the furnace door sealing mechanism can convey the next batch of products into the chamber in a timely manner and seal the furnace opening for coating, thereby improving the product transportation efficiency, improving the coating efficiency, and improving the productivity of the coating device.

Description

Coating device TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of semiconductor or photovoltaic material processing, in particular to a coating device.

[0002] BACKGROUND

[0003] Semiconductor product manufacturing equipment includes diffusion equipment, oxidation equipment, cleaning equipment, and coating equipment, etc. Among them, the coating process is to deposit a thin film on the semiconductor product by gaseous substances. The coating device mainly uses a boat module to carry and transport products to put the products into the furnace body or take them out of the furnace body.

[0004] However, the boat moving module and the boat pushing module have complex structure, complex transportation mode and low transportation efficiency, thereby resulting in low production capacity of the coating device.

[0005] SUMMARY

[0006] Therefore, the embodiments of the present disclosure provide a coating device to solve the problem of low production capacity of the coating device.

[0007] The embodiments of the present disclosure provide a coating device, comprising: a cavity having a furnace opening facing downward, the cavity being configured to coat products; a furnace door configured to carry the products and capable of covering the furnace opening; at least one furnace door conveying mechanism configured to buffer and / or transport the furnace door loaded with the products; and a furnace door covering mechanism arranged below the furnace opening, capable of being connected with each of the furnace door conveying mechanisms, configured to receive the furnace door loaded with uncoated products conveyed by at least one of the furnace door conveying mechanisms, and to carry the furnace door loaded with uncoated products upward to cover the furnace opening, and to carry the furnace door loaded with coated products downward to separate the furnace door from the furnace opening, and to be connected with at least one of the furnace door conveying mechanisms to transport the furnace door loaded with coated products.

[0008] In some embodiments, the number of furnace door conveying mechanisms is multiple, and the multiple furnace door conveying mechanisms are arranged in a vertical direction; wherein when the furnace door covering mechanism is lifted to different preset positions, the furnace door covering mechanism can be located in the same horizontal plane as the furnace door conveying mechanisms located at different positions.

[0009] In some embodiments, the coating device further comprises: a loading and unloading mechanism configured to carry the furnace door and lift the furnace door to connect with different furnace door conveying mechanisms respectively; a loading and unloading device configured to load the uncoated product to the furnace door carried by the loading and unloading mechanism or unload the coated product from the furnace door carried by the loading and unloading mechanism; wherein when the loading and unloading mechanism is lifted to different preset loading positions, the loading and unloading device loads the uncoated product to the furnace door carried by the loading and unloading mechanism, and the loading and unloading mechanism conveys the furnace door loaded with the uncoated product to different furnace door conveying mechanisms; when the loading and unloading mechanism is lifted to different preset unloading positions, different furnace door conveying mechanisms convey the furnace door loaded with the coated product to the loading and unloading mechanism.

[0010] In some embodiments, the loading and unloading device comprises: a moving module assembly above the loading and unloading mechanism when the loading and unloading mechanism is at the preset loading position, the moving module assembly being configured to move in a first horizontal direction, a second horizontal direction and a vertical direction, wherein the first horizontal direction is the same as the horizontal moving direction of the furnace door on the loading and unloading mechanism, and the second horizontal direction is perpendicular to the first horizontal direction; a gripper connected with the moving module assembly and moving with the moving module assembly, the gripper being configured to grasp or place the product.

[0011] In some embodiments, the coating device further comprises: a feeding mechanism arranged adjacent to the loading and unloading mechanism and configured to transport a carrier to a loading position to enable the loading and unloading device to load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism, the carrier being configured to contain the product; wherein the feeding mechanism comprises: a first sub-feeding mechanism configured to transport the carrier to a turnover position; a turnover device connected with the first sub-feeding mechanism and configured to turn over the carrier at the turnover position; and a second sub-feeding mechanism connected with the turnover device and configured to transport the turned-over carrier to the loading position to enable the loading and unloading device to load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism.

[0012] In some embodiments, the carrier has a first support surface and a second support surface arranged at an angle; wherein the turnover device comprises: a first rotating shaft arranged horizontally and extending in a direction perpendicular to the moving direction of the carrier on the first sub-feeding mechanism; a first bearing plate connected to the first rotating shaft and rotating under the drive of the first rotating shaft, configured to bear the carrier and capable of contacting the first support surface of the carrier; a second bearing plate connected to the first rotating shaft and rotating under the drive of the first rotating shaft, configured to bear the carrier and capable of contacting the second support surface of the carrier; wherein the second bearing plate is arranged at an angle with the first bearing plate to form an accommodation space for accommodating the carrier, so that the carrier is transferred from being borne by the first bearing plate to being borne by the second bearing plate during the rotation of the first rotating shaft.

[0013] In some embodiments, the coating device further comprises: a discharging mechanism adjacent to the loading and unloading mechanism and arranged side by side with the feeding mechanism, so that the loading and unloading device can unload the carrier on the furnace door borne by the loading and unloading mechanism to the discharging mechanism; at least one feeding and discharging device arranged on the side of the discharging mechanism away from the feeding mechanism or on the side of the feeding mechanism away from the discharging mechanism, configured to place the uncoated product into the carrier on the feeding mechanism, or take the coated product out of the carrier on the discharging mechanism, or transport the empty carrier on the discharging mechanism to the feeding mechanism; a transverse moving device connecting the feeding mechanism and the discharging mechanism, configured to move the carrier on the discharging mechanism to the feeding mechanism.

[0014] In some embodiments, the coating device further comprises: a first box buffer mechanism arranged adjacent to the feeding and discharging device, configured to buffer the box containing the uncoated product; a second box buffer mechanism arranged above or below the first box buffer mechanism, configured to buffer the box containing the coated product or the empty box; wherein the feeding and discharging device transports the uncoated product in the box on the first box buffer mechanism into the carrier on the feeding mechanism, or transports the coated product in the carrier on the discharging mechanism to the box on the second box buffer mechanism.

[0015] In some embodiments, the shape of the cavity includes a cube, and the horizontal cross-sectional shape of the furnace door includes a rectangle; wherein in the case that the number of the coating devices is multiple, the multiple coating devices are arranged above and below and / or side by side.

[0016] In some embodiments, the coating device further comprises a first purification chamber configured to accommodate the loading and unloading mechanism and the loading device; a second purification chamber configured to accommodate a plurality of the furnace door conveying mechanisms; a cooling device disposed on the top of the first purification chamber and configured to cool the first purification chamber; and a cleaning device disposed on the top of the first purification chamber and configured to clean the furnace door on the loading and unloading mechanism.

[0017] The coating device provided by the embodiments of the present disclosure is provided with a furnace door conveying mechanism, and is provided with a furnace door closing mechanism and a furnace opening direction, so that after the coating of the previous batch of products is completed, the furnace door closing mechanism can open the furnace opening and transport the previous batch of products out of the cavity, and is connected with a furnace door conveying mechanism, and the furnace door conveying mechanism transports the previous batch of products. The furnace door conveying mechanism can timely transport the next batch of products to the furnace door closing mechanism, so that the furnace door closing mechanism can timely send the next batch of products into the cavity and close the furnace opening for coating, thereby improving the transportation efficiency of the products, improving the coating efficiency, and thereby improving the production capacity of the coating device.

[0018] BRIEF DESCRIPTION OF DRAWINGS

[0019] FIG. 1 shows a structural schematic diagram of a coating device provided by an embodiment of the present disclosure.

[0020] FIG. 2 shows a partial enlarged view of the A area shown in FIG. 1.

[0021] FIG. 3 shows a partial enlarged view of the B area shown in FIG. 2.

[0022] FIG. 4 shows a top view of a furnace door and a carrier provided by an embodiment of the present disclosure.

[0023] FIG. 5 shows a structural schematic diagram of a carrier provided by an embodiment of the present disclosure.

[0024] FIG. 6 shows a structural schematic diagram of a coating device provided by another embodiment of the present disclosure.

[0025] 10, coating device; 100, cavity; 110, furnace mouth; 200, furnace door; 350, furnace door conveying mechanism; 300, first furnace door conveying mechanism; 400, furnace door closing mechanism; 500, second furnace door conveying mechanism; 600, loading and unloading mechanism; 700, loading and unloading equipment; 710, moving module assembly; 7110, first horizontal module; 7120, second horizontal module; 7130, vertical module; 720, gripper; 800, feeding mechanism; 810, first sub-feeding mechanism; 820, first turnover device; 8210, first rotating shaft; 8220, first bearing plate; 8230, second bearing plate; 830, second sub-feeding mechanism; 900, carrier; 901, opening; 910, first support surface; 920, second support surface; 930, third support surface; 1000, discharging mechanism; 1001, first sub-discharging mechanism; 1002, second turnover device; 1012, second rotating shaft; 1022, third bearing plate; 1032, fourth bearing plate; 1003, second sub-discharging mechanism; 1100, loading and unloading equipment; 1110, first mechanical hand; 1120, second mechanical hand; 1200, transverse moving device; 1300, first box buffer mechanism; 1400, second box buffer mechanism; 1500, first purification chamber; 1600, second purification chamber; 1700, cooling device; 1800, cleaning device; 1900, pump equipment; 2000, heat exhaust device.

[0026] Manner of implementing the present application

[0027] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present disclosure.

[0028] The manufacturing of solar cells generally includes processes such as texturing, diffusion, etching, coating, screen printing and sintering, which all need to be performed in specific manufacturing equipment. Specifically, the manufacturing equipment includes diffusion equipment, oxidation equipment, dry cleaning equipment and coating equipment, etc. Among them, the coating process is to deposit a thin film on the silicon wafer by gaseous substances to reduce sunlight reflection and play a passivation role on the surface of the silicon wafer. The coating equipment includes plasma enhanced chemical vapor deposition (PECVD) equipment, low-pressure chemical vapor deposition (LPCVD) equipment, atomic layer deposition (ALD) equipment, etc., which all include a purification table, a furnace body, a gas source cabinet, an automation device, etc. The purification table can carry and transport products and cool and purify the products after process processing, the products are processed in a sealed furnace body, the gas source cabinet provides reaction gas, and the automation device is used to take and place products.

[0029] The purification table equipment in the coating device generally includes a boat pushing module, a boat carrying module, a side boat discharging module, a buffer rack, a cooling system, a heat exhaust system, etc., mainly using each boat module to carry and transport products so that the products are placed into or taken out of the furnace body. The boat module structure is complex, the transportation mode is complex and the transportation efficiency is low, resulting in low productivity of the coating device.

[0030] To solve the above problems, the present embodiment provides a coating device, which is provided with a furnace door conveying mechanism, and is cooperated with a furnace door closing mechanism and a furnace opening direction, so that after the coating of the previous batch of products is completed, the furnace door closing mechanism can open the furnace opening and transport the previous batch of products out of the cavity, and is connected with a furnace door conveying mechanism, and the previous batch of products is transported by the furnace door conveying mechanism. The furnace door conveying mechanism can timely transport the next batch of products to the furnace door closing mechanism, so that the furnace door closing mechanism can timely send the next batch of products into the cavity and close the furnace opening for coating, which improves the transportation efficiency of the products, improves the coating efficiency, and thus improves the productivity of the coating device.

[0031] The specific structure of the coating device will be described below in combination with embodiments.

[0032] FIG. 1 shows a schematic diagram of a coating device according to an embodiment of the present disclosure. As shown in FIG. 1, the coating device 10 comprises a cavity 100, a furnace door 200, at least one furnace door conveying mechanism 350, and a furnace door closing mechanism 400. The cavity 100 has a furnace opening 110 facing downward, and is configured to coat products. The furnace door 200 is configured to carry products and can close the furnace opening 110. The furnace door conveying mechanism 350 is configured to buffer or transport the furnace door 200 loaded with products, or to buffer and transport the furnace door 200 loaded with products. The furnace door closing mechanism 400 is arranged below the furnace opening 110, can be connected to each furnace door conveying mechanism 350, and is configured to receive the furnace door 200 loaded with uncoated products transported by the at least one furnace door conveying mechanism 350, and to carry the furnace door 200 loaded with uncoated products upward to close the furnace door 200 with the furnace opening 110, and to carry the furnace door 200 loaded with coated products downward to separate the furnace door 200 from the furnace opening 110, and to interface with the at least one furnace door conveying mechanism 350 to transport the furnace door 200 loaded with coated products.

[0033] The coating device 10 is provided with at least one furnace door conveying mechanism 350, and is cooperated with the furnace door closing mechanism 400 and the direction of the furnace opening 110, so that after the coating of the previous batch of products is completed, the furnace door closing mechanism 400 can open the furnace opening 110 and transport the previous batch of products out of the cavity 100, and interface with one furnace door conveying mechanism 350 to transport the previous batch of products by the furnace door conveying mechanism 350. The furnace door conveying mechanism 350 can timely transport the next batch of products to the furnace door closing mechanism 400, so that the furnace door closing mechanism 400 can timely transport the next batch of products into the cavity 100 and close the furnace opening 110 for coating, thereby improving the transportation efficiency of the products, improving the coating efficiency, and thus improving the production capacity of the coating device.

[0034] The products can be silicon wafers, wafers, solar panels, glass substrates, etc. For example, the products can be silicon wafers with sections, and the coating device 10 can passivate the sections of the silicon wafers with sections.

[0035] The shape of the cavity 100 can be rectangular or cylindrical, and the present disclosure does not specifically limit the shape of the cavity 100. The shape of the furnace door 200 can be rectangular or circular, as long as the furnace door 200 can carry products and close the furnace opening 110, and the present disclosure does not specifically limit the shape of the cavity 100.

[0036] In some embodiments, the shape of the cavity 100 comprises a cuboid, and the horizontal cross-sectional shape of the furnace door 200 comprises a rectangle. The cavity 100 is generally in a horizontal position, and a plurality of furnace tubes are stacked in the cavity 100. The furnace tubes are made of quartz, which is easy to break. The furnace tubes serve as reaction cavities and are cylindrical due to process limitations. The number and size of the furnace tubes are limited due to space limitations in the factory. The number of products that can be accommodated by the cavity 100 is limited. The shapes of the products or the carriers 900 containing the products are mostly rectangular. Therefore, compared with the cylindrical furnace tubes, the cuboid cavity 100 can accommodate more products in the same space, thereby further improving the production capacity of the coating device 10. In addition, the cuboid cavity 100 facilitates the vertical arrangement or side-by-side arrangement of the coating device 10, thereby saving the space occupied by the coating device 10. Therefore, when the number of coating devices 10 is large, the plurality of coating devices 10 are arranged vertically and / or side by side to improve the production efficiency of the coating device 10.

[0037] The furnace door conveying mechanism 350 can be a conveyor line, which can include a first power source, a first transmission assembly, and a first conveyor belt. The first power source drives the first transmission assembly to move, and the first transmission assembly carries the first conveyor belt to move, so that the first conveyor belt transports the furnace door 200 loaded with uncoated products. The first power source can be a motor, an electric cylinder, a pneumatic cylinder, or the like. The first transmission assembly can be a roller, a pulley, a synchronous wheel, a gear, or the like. The first conveyor belt can be a belt, a mesh belt, a synchronous belt, or the like.

[0038] The furnace door closing mechanism 400 can include a conveyor line and a first lifting device located below the conveyor mechanism. Illustratively, the furnace door closing mechanism 400 can include a second power source, a second transmission assembly, and a second conveyor belt. The second power source drives the second transmission assembly to move, and the second transmission assembly carries the second conveyor belt to move, so that the second conveyor belt transports the furnace door 200 loaded with uncoated products. The second power source can be a motor, an electric cylinder, a pneumatic cylinder, or the like. The second transmission assembly can be a roller, a pulley, a synchronous wheel, a gear, or the like. The second conveyor belt can be a belt, a mesh belt, a synchronous belt, or the like. Illustratively, the first lifting device is arranged below the conveyor line and connected with the conveyor line to drive the conveyor line to rise, so that the furnace door 200 loaded with uncoated products on the second conveyor belt is closed with the furnace port 110, or the furnace door 200 loaded with coated products on the second conveyor belt is lowered, so that the furnace door 200 loaded with coated products on the second conveyor belt is separated from the furnace port 110.

[0039] The coating device 10 further includes a pump device 1900 connected with the cavity 100 and configured to supply reaction gas into the cavity 100 for coating the products in the cavity 100.

[0040] The products are contained in the carrier 900, and the carrier 900 is provided with an opening 901, and the reaction gas enters the carrier 900 from the opening 901 in the cavity 100 to coat the products in the carrier 900.

[0041] In some embodiments, the number of furnace door conveying mechanisms 350 is multiple, and the multiple furnace door conveying mechanisms 350 are arranged at different vertical positions. When the furnace door closing mechanism 400 is lifted to different preset positions, the furnace door closing mechanism 400 can be located at the same horizontal plane as one of the furnace door conveying mechanisms 350.

[0042] For example, continuing to refer to FIG. 1, the number of furnace door conveying mechanisms 350 is two, which are a first furnace door conveying mechanism 300 and a second furnace door conveying mechanism 500. The first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 can be arranged on the same side of the furnace door closing mechanism 400, and the pump device 1900 is arranged on the other side of the furnace door closing mechanism 400.

[0043] For example, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 can also be arranged on different sides of the furnace door closing mechanism 400. For example, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 are arranged on opposite sides of the furnace door closing mechanism 400. For another example, the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 are arranged on adjacent sides of the furnace door closing mechanism 400.

[0044] The first furnace door conveying mechanism 300 transports the furnace door 200 loaded with uncoated products in the horizontal direction, so that the furnace door 200 loaded with uncoated products is conveyed by the first furnace door conveying mechanism 300 to the furnace door closing mechanism 400. The furnace door closing mechanism 400 transports the furnace door 200 loaded with uncoated products in the horizontal direction, so that the furnace door 200 loaded with uncoated products is located below the furnace opening 110. The furnace door closing mechanism 400 is lifted, so that the uncoated products loaded on the furnace door 200 enter the cavity 100, and the furnace door 200 is closed with the furnace opening 110, so that the cavity 100 is in a sealed state, and the products in the sealed cavity 100 are coated.

[0045] After the coating is completed, the furnace door closing mechanism 400 is lowered, so that the furnace door 200 loaded with coated products is separated from the furnace opening 110, and the coated products loaded on the furnace door 200 exit the cavity 100, and the second furnace door conveying mechanism 500 is docked. The furnace door closing mechanism 400 transports the furnace door 200 loaded with coated products in the horizontal direction, so that the furnace door 200 loaded with coated products is conveyed by the furnace door closing mechanism 400 to the second furnace door conveying mechanism 500.

[0046] Exemplarily, the first furnace door conveying mechanism 300 is located below or above the second furnace door conveying mechanism 500. When the furnace door closing mechanism 400 is lifted to the first preset position, the furnace door closing mechanism 400 is at the same horizontal plane as the first furnace door conveying mechanism 300, and when the furnace door closing mechanism 400 is lifted to the second preset position, the furnace door closing mechanism 400 is at the same horizontal plane as the second furnace door conveying mechanism 500. Thus, the arrangement of the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 can save space, thereby facilitating the improvement of the production capacity of the coating device 10 in a limited space.

[0047] The first preset position can be a position of the first furnace door conveying mechanism 300 when the distance between the first furnace door conveying mechanism 300 and the ground is the first preset distance. The first preset position and the first preset distance can be determined according to actual needs, and the disclosure is not specifically limited.

[0048] The second preset position can be a position of the second furnace door conveying mechanism 500 when the distance between the second furnace door conveying mechanism 500 and the ground is the second preset distance. The second preset position and the second preset distance can be determined according to actual needs, and the disclosure is not specifically limited.

[0049] When the first furnace door conveying mechanism 300 is located below the second furnace door conveying mechanism 500, the first preset position is below the second preset position. When the first furnace door conveying mechanism 300 is located above the second furnace door conveying mechanism 500, the first preset position is above the second preset position.

[0050] In some embodiments, as shown in FIGS. 1 and 2, the coating device 10 further comprises a loading and unloading mechanism 600 and a loading and unloading device 700. The loading and unloading mechanism 600 is configured to carry the furnace door 200 and lift the furnace door 200 to be connected to different furnace door conveying mechanisms 350. Exemplarily, the loading and unloading mechanism 600 can be connected to the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500. The loading and unloading device 700 is configured to load the uncoated product into the furnace door 200 carried by the loading and unloading mechanism 600, or unload the coated product from the furnace door 200 carried by the loading and unloading mechanism 600. When the loading and unloading mechanism 600 is lifted to different preset loading positions, the loading and unloading device 700 loads the uncoated product into the furnace door 200 carried by the loading and unloading mechanism 600, and the loading and unloading mechanism 600 conveys the furnace door 200 loaded with the uncoated product to different furnace door conveying mechanisms 350. When the loading and unloading mechanism 600 is lifted to different preset unloading positions, different furnace door conveying mechanisms 350 convey the furnace door 200 loaded with the coated product to the loading and unloading mechanism 600. Through automatic loading and unloading, the loading and unloading efficiency is improved, thereby improving the production efficiency of the coating device 10.

[0051] The loading and unloading device 700 can be a mechanical hand or can be composed of other components, as long as it can achieve the function of loading the uncoated product to the furnace door 200 carried by the loading and unloading mechanism 600 or unloading the coated product from the furnace door 200 carried by the loading and unloading mechanism 600. The structure of the loading and unloading device 700 is not limited in the present disclosure.

[0052] The loading and unloading mechanism 600 is arranged on the side of the first furnace door conveying mechanism 300 and the second furnace door conveying mechanism 500 away from the furnace door closing mechanism 400. When the loading and unloading mechanism 600 is lifted to the third preset position, the loading and unloading mechanism 600 is at the same horizontal plane as the first furnace door conveying mechanism 300, and the loading and unloading mechanism 600 transports the furnace door 200 loaded with the uncoated product in the horizontal direction, so that the furnace door 200 loaded with the uncoated product is conveyed from the loading and unloading mechanism 600 to the first furnace door conveying mechanism 300. When the loading and unloading mechanism 600 is lifted to the fourth preset position, the loading and unloading mechanism 600 is at the same horizontal plane as the second furnace door conveying mechanism 500, and the second furnace door conveying mechanism 500 transports the furnace door 200 loaded with the coated product in the horizontal direction and away from the furnace door closing mechanism 400, so that the furnace door 200 loaded with the coated product is conveyed from the second furnace door conveying mechanism 500 to the loading and unloading mechanism 600, and the loading and unloading mechanism 600 transports the furnace door 200 loaded with the coated product in the horizontal direction and away from the second furnace door conveying mechanism 500. The third preset position is the preset loading position, and the fourth preset position is the preset unloading position.

[0053] The third preset position can be the position of the first furnace door conveying mechanism 300 when the distance between the first furnace door conveying mechanism 300 and the ground is the first preset distance. The third preset position and the first preset distance can be determined according to actual needs, and the present disclosure does not make specific limitations.

[0054] The fourth preset position can be the position of the second furnace door conveying mechanism 500 when the distance between the second furnace door conveying mechanism 500 and the ground is the second preset distance. The fourth preset position and the second preset distance can be determined according to actual needs, and the present disclosure does not make specific limitations.

[0055] When the first furnace door conveying mechanism 300 is located below the second furnace door conveying mechanism 500, the third preset position is located below the fourth preset position. When the first furnace door conveying mechanism 300 is located above the second furnace door conveying mechanism 500, the third preset position is located above the fourth preset position.

[0056] The loading and unloading mechanism 600 can include a conveyor line and a second lifting device. The loading and unloading mechanism 600 can include a fourth power source, a fourth transmission assembly, and a fourth conveyor belt. The fourth power source drives the fourth transmission assembly to move, and the fourth transmission assembly carries the fourth conveyor belt to move, so that the fourth conveyor belt transports the furnace door 200 loaded with uncoated products or the furnace door 200 loaded with coated products. The fourth power source can be a motor, an electric cylinder, a pneumatic cylinder, or the like. The fourth transmission assembly can be a roller, a pulley, a synchronous wheel, a gear, or the like. The fourth conveyor belt can be a belt, a mesh belt, a synchronous belt, or the like. The second lifting device is arranged below the conveyor line and connected to the conveyor line, and drives the fourth conveyor belt to move to the third preset position or the fourth preset position.

[0057] In some embodiments, referring to FIG. 2, the loading and unloading device 700 includes a moving module assembly 710 and a gripper 720. The moving module assembly 710 is arranged above the loading and unloading mechanism 600 when the loading and unloading mechanism 600 is located at the preset loading position. The moving module assembly 710 is configured to move in a first horizontal direction X1, a second horizontal direction X2, and a vertical direction Y1. The first horizontal direction X1 is the same as the horizontal moving direction of the furnace door 200 on the loading and unloading mechanism 600, and the second horizontal direction X2 is perpendicular to the first horizontal direction X1. The gripper 720 is connected to the moving module assembly 710 and moves with the moving module assembly 710, and is configured to grasp or place products. The loading and unloading device 700 has a simple structure and is arranged above the loading and unloading mechanism 600, thereby reducing the floor area of the coating device 10.

[0058] In some embodiments, the moving module assembly 710 includes a first horizontal module 7110, a second horizontal module 7120, and a vertical module 7130. The first horizontal module 7110 is connected to the second horizontal module 7120 and perpendicular to the second horizontal module 7120. The vertical module 7130 is connected to the second horizontal module 7120 and the gripper 720. The first horizontal module 7110 drives the second horizontal module 7120 and the vertical module 7130 to move in the first horizontal direction X1. The second horizontal module 7120 drives the vertical module 7130 to move in the second horizontal direction X2. The vertical module 7130 drives the gripper 720 to move in the vertical direction Y1, so that the gripper 720 can accurately grasp or place products.

[0059] In some embodiments, as shown in FIG. 1, FIG. 2 and FIG. 6, the coating device 10 further comprises a feeding mechanism 800. The feeding mechanism 800 is arranged adjacent to the loading and unloading mechanism 600, and is configured to transport the carrier 900 to a loading position, so that the loading and unloading device 700 can load the carrier 900 from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600, and the carrier 900 is configured to contain products. The feeding mechanism 800 comprises a first sub-feeding mechanism 810, a first turnover device 820 and a second sub-feeding mechanism 830. The first sub-feeding mechanism 810 is configured to transport the carrier 900 to a first turnover position, the first turnover device 820 is connected with the first sub-feeding mechanism 810 and is configured to overturn the carrier 900 located at the first turnover position, and the second sub-feeding mechanism 830 is connected with the first turnover device 820 and is configured to transport the overturned carrier 900 to the loading position, so that the loading and unloading device 700 can load the carrier 900 from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600. By adjusting the position of the carrier 900 through the feeding mechanism 800, the orientation of the opening 901 of the carrier 900 is adjusted, which prepares for subsequent coating.

[0060] The feeding mechanism 800 can be a conveyor line. For example, the feeding mechanism 800 can comprise a fifth power source, a fifth transmission assembly and a fifth conveyor belt. The fifth power source drives the fifth transmission assembly to move, and the fifth transmission assembly carries the fifth conveyor belt to move, so that the fifth conveyor belt transports the carrier 900 containing uncoated products. The fifth power source can be a motor, an electric cylinder, a pneumatic cylinder or the like. The fifth transmission assembly can be a roller, a pulley, a synchronous wheel, a gear or the like. The fifth conveyor belt can be a belt, a mesh belt, a synchronous belt or the like.

[0061] In some embodiments, the first turnover device 820 can overturn the carrier 900 located at the first turnover position by 90 degrees or 180 degrees, so that the opening 901 of the carrier 900 is exposed in the cavity 100, and the reaction gas can enter the carrier 900 from the opening 901 in the cavity 100. For example, the first turnover device 820 can overturn the carrier 900 located at the first turnover position by 30 degrees, 60 degrees, 150 degrees or the like, which is not limited in the present disclosure.

[0062] The feeding mechanism 800 is arranged on the side of the loading and unloading mechanism 600 away from the furnace door conveying mechanism 350, and the feeding mechanism 800 and the loading and unloading mechanism 600 are located at the same horizontal plane when the loading and unloading mechanism 600 is lifted to the fifth preset position. The feeding mechanism 800 transports the carrier 900 containing uncoated products in the horizontal direction, so as to transport the carrier 900 to the loading position. For example, the second lifting device drives the fourth conveyor belt to lift to the fifth preset position.

[0063] The fifth preset position can be a position of the feeding mechanism 800 when the distance between the feeding mechanism 800 and the ground is the third preset distance. The fifth preset position and the third preset distance can be determined according to actual needs, and the present disclosure does not make specific limitations.

[0064] The second sub-feeding mechanism 830 is arranged adjacent to the loading and unloading mechanism 600, and the second sub-feeding mechanism 830 is arranged on a side of the loading and unloading mechanism 600 away from the furnace door conveying mechanism 350. The first turnover device 820 is connected with the second sub-feeding mechanism 830, and the first turnover device 820 is arranged on a side of the second sub-feeding mechanism 830 away from the loading and unloading mechanism 600. The first sub-feeding mechanism 810 is connected with the first turnover device 820, and the first sub-feeding mechanism 810 is arranged on a side of the first turnover device 820 away from the second sub-feeding mechanism 830. The first sub-feeding mechanism 810 transports the carrier 900 containing the uncoated products to the first turnover position, the first turnover device 820 turns over the carrier 900 containing the uncoated products at the first turnover position, so that the carrier 900 containing the uncoated products is turned over from the first sub-feeding mechanism 810 to the second sub-feeding mechanism 830, and the exposure opening 901 is exposed. The second sub-feeding mechanism 830 transports the carrier 900 containing the uncoated products after turning over to the loading position, so that the loading and unloading device 700 can load the carrier 900 containing the uncoated products from the loading position to the furnace door 200 carried by the loading and unloading mechanism 600.

[0065] In some embodiments, the carrier 900 has a first support surface 910 and a second support surface 920 arranged at an angle. The first turnover device 820 includes a first rotating shaft 8210, a first bearing plate 8220, and a second bearing plate 8230. The first rotating shaft 8210 is horizontally arranged, and the extension direction of the first rotating shaft 8210 is perpendicular to the moving direction of the carrier 900 on the first sub-feeding mechanism 810. The first bearing plate 8220 is connected with the first rotating shaft 8210 and rotates under the drive of the first rotating shaft 8210, is configured to carry the carrier 900, and can be in contact with the first support surface 910 of the carrier 900. The second bearing plate 8230 is connected with the first rotating shaft 8210 and rotates under the drive of the first rotating shaft 8210, is configured to carry the carrier 900, and can be in contact with the second support surface 920 of the carrier 900. The second bearing plate 8230 is arranged at an angle with the first bearing plate 8220 to form an accommodation space for accommodating the carrier 900, so that the carrier 900 is switched from being carried by the first bearing plate 8220 to being carried by the second bearing plate 8230 during the rotation of the first rotating shaft 8210. The first turnover device 820 has a simple structure and high turnover efficiency.

[0066] Exemplarily, as shown in FIGS. 3-6, the carrier 900 is a rectangular structure, the first support surface 910 and the second support surface 920 are arranged at 90 degrees, the opening 901 is arranged on the first support surface 910, and the second carrier plate 8230 is arranged at 90 degrees with the first carrier plate 8220. The first sub-feeding mechanism 810 transports the carrier 900 to the first turnover position, the first carrier plate 8220 carries the first support surface 910, and the second carrier plate 8230 carries the second support surface 920. During the rotation of the first rotation shaft 8210 by 90 degrees, the carrier 900 is converted from being carried by the first support surface 910 to being carried by the second support surface 920. When the first rotation shaft 8210 is rotated to 90 degrees, the carrier 900 is turned over to the second sub-feeding mechanism 830, and the second sub-feeding mechanism 830 transports the carrier 900 turned over by 90 degrees to the loading position.

[0067] Exemplarily, the first support surface 910 and the third support surface 930 have a gap in the vertical direction, which forms the opening 901, wherein the third support surface 930 is arranged opposite to the second support surface 920.

[0068] In some embodiments, the coating device 10 further comprises a discharging mechanism 1000, at least one feeding and discharging device 1100, and a horizontal moving device 1200. The discharging mechanism 1000 is arranged adjacent to the loading and unloading mechanism 600 and side by side with the feeding mechanism 800, so that the loading and unloading device 700 can unload the carrier 900 on the furnace door 200 carried by the loading and unloading mechanism 600 to the discharging mechanism 1000. The discharging mechanism 1000 transports the carrier 900 containing the coated products in the horizontal direction and away from the loading and unloading mechanism 600. The feeding and discharging device 1100 is arranged on the side of the discharging mechanism 1000 away from the feeding mechanism 800 or on the side of the feeding mechanism 800 away from the discharging mechanism 1000, and is configured to place the carrier 900 containing uncoated products into the carrier 900 on the feeding mechanism 800, or take the coated products out of the carrier 900 on the discharging mechanism 1000, or transport the empty carrier 900 on the discharging mechanism 1000 to the feeding mechanism 800. The horizontal moving device 1200 connects the feeding mechanism 800 and the discharging mechanism 1000, and is configured to move the carrier 900 on the discharging mechanism 1000 to the feeding mechanism 800. Through the discharging mechanism 1000, the feeding and discharging device 1100, and the horizontal moving device 1200, automatic discharging is realized, and the production efficiency of the coating device 10 is improved.

[0069] The unloading mechanism 1000 can be a conveying line. For example, the unloading mechanism 1000 can include a sixth power source, a sixth transmission assembly, and a sixth conveying belt. The sixth power source drives the sixth transmission assembly to move, and the sixth transmission assembly carries the sixth conveying belt to move, so that the sixth conveying belt transports the carrier 900 containing the coated product. The sixth power source can be a motor, an electric cylinder, a pneumatic cylinder, or the like. The sixth transmission assembly can be a roller, a pulley, a synchronous wheel, a gear, or the like. The sixth conveying belt can be a belt, a mesh belt, a synchronous belt, or the like.

[0070] In some embodiments, as shown in FIGS. 1, 2, and 6, the unloading mechanism 1000 includes a first sub-unloading mechanism 1001, a second turnover device 1002, and a second sub-unloading mechanism 1003. The first sub-unloading mechanism 1001 is arranged adjacent to the loading and unloading mechanism 600 and side by side with the second sub-unloading mechanism 830, so that the loading and unloading device 700 can unload the carrier 900 on the furnace door 200 carried by the loading and unloading mechanism 600 to the first sub-unloading mechanism 1001. The first sub-unloading mechanism 1001 transports the carrier 900 containing the coated product to the second turnover position. The second turnover device 1002 is connected with the first sub-unloading mechanism 1001 and arranged side by side with the first turnover device 820, and is configured to turn over the carrier 900 at the second turnover position. The second sub-unloading mechanism 1003 is connected with the second turnover device 1002 and arranged side by side with the first sub-unloading mechanism 810, and is configured to transport the turned-over carrier 900 to achieve unloading.

[0071] In some embodiments, the second turnover device 1002 can turn over the carrier 900 at the second turnover position by 90 degrees or 180 degrees, so that the carrier 900 is in an unloading state. For example, the second turnover device 1002 can turn over the carrier 900 at the second turnover position by an angle of 30 degrees, 60 degrees, 150 degrees, or the like, which is not limited in the present disclosure.

[0072] Exemplarily, the second turnover device 1002 can include a second rotating shaft 1012, a third bearing plate 1022, and a fourth bearing plate 1032. The second rotating shaft 1012 is horizontally arranged, and the extending direction of the second rotating shaft 1012 is perpendicular to the moving direction of the carrier 900 on the second sub-unloading mechanism 1003. The third bearing plate 1022 is connected with the second rotating shaft 1012, rotates under the driving of the second rotating shaft 1012, is configured to bear the carrier 900, and can be in contact with the second support surface 920 of the carrier 900. The fourth bearing plate 1032 is connected with the second rotating shaft 1012, rotates under the driving of the second rotating shaft 1012, is configured to bear the carrier 900, and can be in contact with the first support surface 910 of the carrier 900. The third bearing plate 1022 and the fourth bearing plate 1032 are arranged at an angle, forming a containing space for containing the carrier 900, so that the carrier 900 is switched from being borne by the third bearing plate 1022 to being borne by the fourth bearing plate 1032 in the rotating process of the second rotating shaft 1012. The second turnover device 1002 has simple structure and high turnover efficiency.

[0073] The third bearing plate 1022 and the fourth bearing plate 1032 are arranged at an angle of 90 degrees. The first sub-unloading mechanism 1001 transports the carrier 900 to the second turnover position, the third bearing plate 1022 bears the second support surface 920, and the fourth bearing plate 1032 bears the first support surface 910. In the rotating process of the second rotating shaft 1012 by 90 degrees, the carrier 900 is switched from being borne by the second support surface 920 by the third bearing plate 1022 to being borne by the first support surface 910 by the fourth bearing plate 1032. When the second rotating shaft 1012 is rotated to 90 degrees, the carrier 900 is turned over to the second sub-unloading mechanism 1003, and the second sub-unloading mechanism 1003 transports the carrier 900 turned over by 90 degrees.

[0074] Exemplarily, the horizontal moving device 1200 is connected with the first sub-feeding mechanism 810 and the second sub-unloading mechanism 1003.

[0075] In some embodiments, when the feeding and unloading equipment 1100 is arranged on the side of the feeding mechanism 800 away from the unloading mechanism 1000, the feeding and unloading equipment 1100 takes away the coated products in the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-feeding mechanism 810.

[0076] In some embodiments, when the loading and unloading device 1100 is disposed on the side of the unloading mechanism 1000 away from the loading mechanism 800, the horizontal transfer device 1200 moves the carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810, so as to facilitate the loading and unloading device 1100 to take away the coated products in the carrier 900, and the loading and unloading device 1100 to place the uncoated products in the empty carrier 900 on the first sub-loading mechanism 810.

[0077] In some embodiments, when the loading and unloading device 1100 is disposed on the side of the unloading mechanism 1000 away from the loading mechanism 800, the loading and unloading device 1100 takes away the coated products in the carrier 900 on the second sub-unloading mechanism 1003, and transports the empty carrier 900 on the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

[0078] In some embodiments, when the loading and unloading device 1100 is disposed on the side of the unloading mechanism 1000 away from the loading mechanism 800, the loading and unloading device 1100 takes away the coated products in the carrier 900 on the second sub-unloading mechanism 1003, so as to facilitate the loading and unloading device 1100 to place the uncoated products in the empty carrier 900 on the second sub-unloading mechanism 1003, and the horizontal transfer device 1200 moves the carrier 900 containing the uncoated products from the second sub-unloading mechanism 1003 to the first sub-loading mechanism 810.

[0079] The feeding and discharging device 1100 can include a first mechanical arm 1110 and a second mechanical arm 1120. The first mechanical arm 1110 and the second mechanical arm 1120 can be disposed simultaneously on a side of the discharging mechanism 1000 away from the feeding mechanism 800 or on a side of the feeding mechanism 800 away from the discharging mechanism 1000. The first mechanical arm 1110 and the second mechanical arm 1120 can work cooperatively to place the uncoated products into the carriers 900 on the first sub-feeding mechanism 810, or take the coated products out of the carriers 900 on the second sub-discharging mechanism 1003, or transport the empty carriers 900 on the second sub-discharging mechanism 1003 to the first sub-feeding mechanism 810. The first mechanical arm 1110 and the second mechanical arm 1120 can also work separately, the first mechanical arm 1110 places the uncoated products into the carriers 900 on the first sub-feeding mechanism 810, the second mechanical arm 1120 takes the coated products out of the carriers 900 on the second sub-discharging mechanism 1003, and transports the empty carriers 900 on the second sub-discharging mechanism 1003 to the first sub-feeding mechanism 810, or the second mechanical arm 1120 places the uncoated products into the carriers 900 on the first sub-feeding mechanism 810, the first mechanical arm 1110 takes the coated products out of the carriers 900 on the second sub-discharging mechanism 1003, and transports the empty carriers 900 on the second sub-discharging mechanism 1003 to the first sub-feeding mechanism 810.

[0080] In some embodiments, as shown in FIG. 6, the coating device 10 further includes a first magazine buffer mechanism 1300 and a second magazine buffer mechanism 1400. The first magazine buffer mechanism 1300 and the second magazine buffer mechanism 1400 are disposed in a stacked manner. FIG. 6 shows a top view of the coating device 10, and since the first magazine buffer mechanism 1300 and the second magazine buffer mechanism 1400 are disposed in a stacked manner, the first magazine buffer mechanism 1300 is represented by a dashed line box in FIG. 6, i.e., the embodiment shown in FIG. 6 is that the first magazine buffer mechanism 1300 is disposed below the second magazine buffer mechanism 1400. In other embodiments, the first magazine buffer mechanism 1300 can also be disposed above the second magazine buffer mechanism 1400.

[0081] The first magazine buffer mechanism 1300 is disposed adjacent to the feeding and discharging device 1100 and is configured to buffer the magazines containing the uncoated products. The second magazine buffer mechanism 1400 is disposed above or below the first magazine buffer mechanism 1300 and is configured to buffer the magazines containing the coated products or the empty magazines.

[0082] The loading and unloading device 1100 transports the uncoated products in the box on the first box buffer mechanism 1300 into the carrier 900 on the loading mechanism 800, or transports the coated products in the carrier 900 on the unloading mechanism 1000 to the box on the second box buffer mechanism 1400. The uncoated products are buffered by the first box buffer mechanism 1300 to prevent the loading from being not timely, the empty box is buffered by the second box buffer mechanism 1400 to facilitate the unloading, and the box containing the coated products is buffered and transported by the second box buffer mechanism 1400 to achieve the unloading, thereby achieving the automatic loading and unloading and improving the production efficiency.

[0083] As shown in FIG. 4, the furnace door 200 can be provided with a plurality of rows, a plurality of columns, and a plurality of layers of carriers 900 arranged side by side, and each carrier 900 contains a plurality of stacked products, so as to increase the number of products carried by the furnace door 200 and further improve the coating efficiency, thereby further improving the production capacity of the coating device 10.

[0084] In some embodiments, as shown in FIG. 1, the coating device 10 further comprises a first purification chamber 1500, a second purification chamber 1600, a cooling device 1700, and a cleaning device 1800. The first purification chamber 1500 is configured to accommodate the loading and unloading mechanism 600 and the loading device 700, the second purification chamber 1600 is configured to accommodate a plurality of furnace door conveying mechanisms 350, the cooling device 1700 is arranged on the top of the first purification chamber 1500 and is configured to cool the first purification chamber 1500, and the cleaning device 1800 is arranged on the top of the first purification chamber 1500 and is configured to clean the furnace door 200 on the loading and unloading mechanism 600.

[0085] The cooling device 1700 comprises a water cooling mechanism and an air cooling mechanism, and the water cooling mechanism and the air cooling mechanism simultaneously cool the furnace door 200 loaded with the coated products and the products when the furnace door 200 loaded with the coated products is conveyed by the second furnace door buffer mechanism 500 to the loading and unloading mechanism 600. The top of the cavity 100, the first purification chamber 1500, and the second purification chamber 1600 is provided with a heat exhaust device 2000, and the heat in the cavity 100, the first purification chamber 1500, and the second purification chamber 1600 is exhausted through the heat exhaust device 2000.

[0086] The cleaning device 1800 comprises a dust suction and cleaning roller assembly to clean the furnace door 200 carried by the loading and unloading mechanism 600. For example, the loading and unloading mechanism 600 lifts the furnace door 200 loaded with the uncoated products to the sixth preset position, the dust suction and cleaning roller assembly is in rolling connection with the edge of the upper surface of the furnace door 200 loaded with the uncoated products, and the dust suction and cleaning roller assembly is rolled to clean the edge of the upper surface of the furnace door 200 loaded with the uncoated products.

[0087] The sixth preset position can be a position of the loading and unloading mechanism 600 when the loading and unloading mechanism 600 lifts the furnace door 200 loaded with the uncoated product to contact the cleaning device 1800, and the fourth preset distance can be determined according to actual needs, and the present disclosure is not specifically limited.

[0088] In the description, "one embodiment", "an embodiment", or the like means that the described embodiment can include a particular feature, structure, or characteristic, but every embodiment can not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Furthermore, in describing features, structures, or characteristics of an embodiment, as used in the specification and the claims, the term "exemplary" means "an example of' and is not necessarily used to refer to a "best" or "ideal" embodiment or to imply that all such embodiments identified as "exemplary" are identical or similar to one another.

[0089] It should be understood that "on", "above", and "upper" in the present disclosure should be interpreted in the broadest possible way, such that "on" means not only "directly on", but also includes the meaning of "on" with intermediate features or layers therebetween, and "above" or "upper" includes the meaning of "above" or "upper" with no intermediate features or layers therebetween (i.e., directly on).

[0090] In addition, spatially relative terms, such as "under", "below", "lower", "over", "upper" and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. The devices can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0091] It should be noted that, in this document, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without more limitations, an element defined by the statement "comprising a" does not exclude the existence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0092] The above merely provides preferred embodiments of the present disclosure, and is not used to limit the present disclosure. Any modification, equivalent replacement, and the like made in the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A coating apparatus, characterized in that, include: A cavity having a downward-facing furnace opening, the cavity being configured to coat a product; The furnace door is configured to carry the product and to cover the furnace opening; At least one furnace door conveying mechanism is configured to buffer and / or transport the furnace door loaded with the product; A furnace door closing mechanism, disposed below the furnace opening, is connected to each of the furnace door conveying mechanisms. It is configured to receive a furnace door loaded with uncoated products transported by at least one of the furnace door conveying mechanisms, raise the furnace door loaded with uncoated products to close the furnace door to the furnace opening, and lower the furnace door loaded with coated products to separate the furnace door from the furnace opening. It also docks with at least one of the furnace door conveying mechanisms to transfer the furnace door loaded with coated products.

2. The coating apparatus according to claim 1, characterized in that, The number of furnace door conveying mechanisms is multiple, and the multiple furnace door conveying mechanisms are arranged at intervals along the vertical direction; When the furnace door closing mechanism is raised or lowered to different preset positions, the furnace door closing mechanism can be located on the same horizontal plane as the furnace door conveying mechanism located at different positions.

3. The coating apparatus according to claim 2, characterized in that, Also includes: The loading and unloading mechanism is configured to carry the furnace door and carry the furnace door to lift, and is connected to different furnace door conveying mechanisms respectively; The loading and unloading equipment is configured to load the uncoated product onto the furnace door carried by the loading and unloading mechanism, or to unload the coated product from the furnace door carried by the loading and unloading mechanism. Specifically, when the loading and unloading mechanism is raised and lowered to different preset loading positions, the loading and unloading equipment loads the uncoated product onto the furnace door carried by the loading and unloading mechanism, and the loading and unloading mechanism transports the furnace door loaded with the uncoated product to different furnace door conveying mechanisms; when the loading and unloading mechanism is raised and lowered to different preset unloading positions, different furnace door conveying mechanisms transport the furnace door loaded with the coated product to the loading and unloading mechanism.

4. The coating apparatus according to claim 3, characterized in that, The loading and unloading equipment includes: The mobile module assembly is located above the loading and unloading mechanism when the loading and unloading mechanism is located at the preset loading position. The mobile module assembly is configured to move along a first horizontal direction, a second horizontal direction, and a vertical direction, wherein the first horizontal direction is the same as the horizontal movement direction of the furnace door on the loading and unloading mechanism, and the second horizontal direction is perpendicular to the first horizontal direction. The gripper, connected to the mobile module assembly, moves with the mobile module assembly and is configured to grip or place the product.

5. The coating apparatus according to claim 3, characterized in that, Also includes: A feeding mechanism, disposed adjacent to the loading and unloading mechanism, is configured to transport a carrier to a loading position so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism, the carrier being configured to hold the product; The feeding mechanism includes: The first sub-feeding mechanism is configured to transport the carrier to the tilting position; A flipping device, connected to the first sub-feeding mechanism, is configured to flip the carrier located at the flipping position; The second sub-feeding mechanism, connected to the tilting device, is configured to transport the tilted carrier to the loading position so that the loading and unloading equipment can load the carrier from the loading position to the furnace door carried by the loading and unloading mechanism.

6. The coating apparatus according to claim 5, characterized in that, The vehicle has a first support surface and a second support surface that are set at an angle; The flipping device includes: The first rotating shaft is horizontally positioned, and the extending direction of the first rotating shaft is perpendicular to the moving direction of the carrier on the first sub-loading mechanism. A first bearing plate is connected to the first rotating shaft and rotates under the drive of the first rotating shaft. It is configured to support the vehicle and can contact the first supporting surface of the vehicle. The second bearing plate is connected to the first rotating shaft and rotates under the drive of the first rotating shaft. It is configured to support the carrier and can contact the second support surface of the carrier. The second support plate is angled to the first support plate to form a receiving space, which is used to receive the vehicle so that during the rotation of the first shaft, the vehicle is switched from being supported by the first support plate to being supported by the second support plate.

7. The coating apparatus according to claim 5, characterized in that, Also includes: The unloading mechanism is adjacent to the loading and unloading mechanism and is arranged side by side with the loading mechanism, so that the loading and unloading equipment can unload the carrier on the furnace door carried by the loading and unloading mechanism to the unloading mechanism. At least one loading / unloading device, located on the side of the unloading mechanism away from the loading mechanism or on the side of the loading mechanism away from the unloading mechanism, is configured to place the uncoated product into the carrier on the loading mechanism, or remove the coated product from the carrier on the unloading mechanism, or transport an empty carrier on the unloading mechanism to the loading mechanism. A traversing device, connecting the loading mechanism and the unloading mechanism, is configured to move the carrier on the unloading mechanism to the loading mechanism.

8. The coating apparatus according to claim 7, characterized in that, Also includes: The first material box buffer mechanism is arranged adjacent to the loading and unloading equipment and is configured to buffer the material box containing the uncoated product; The second material box buffer mechanism is disposed above or below the first material box buffer mechanism and is configured to buffer the material box containing the coated product or the empty material box. The loading and unloading equipment transports the uncoated product in the material box on the first material box buffer mechanism to the carrier on the loading mechanism, or transports the coated product in the carrier on the unloading mechanism to the material box on the second material box buffer mechanism.

9. The coating apparatus according to any one of claims 1 to 8, characterized in that, The cavity has a cube shape, and the horizontal cross-sectional shape of the furnace door has a rectangle shape. In the case where there are multiple coating devices, the multiple coating devices are arranged vertically and horizontally. Set in a single position and / or side by side.

10. The coating apparatus according to any one of claims 3 to 7, characterized in that, Also includes: A first purification chamber is configured to house the loading and unloading mechanism and the loading equipment; The second purification chamber is configured to accommodate multiple furnace door conveying mechanisms; A cooling device is disposed at the top of the first purification chamber and is configured to cool the first purification chamber. A cleaning device, located at the top of the first purification chamber, is configured to clean the furnace door on the loading and unloading mechanism.

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