Inertial measurement device

Abstract

An inertial measurement device (100) comprises: a first inertial sensor (111); a first wiring substrate (121) on which the first inertial sensor (111) is mounted; a support member (130) that supports the first inertial sensor (111); a first heat insulation member (141) that is disposed between a first support part (131) of the support member (130) and the first wiring substrate (121) in a first direction, which is the arrangement direction of the first support part (131) and the first wiring substrate (121), and inhibits heat flow between the first inertial sensor (111) and the support member (130); and a first vibration isolation means (151) that is disposed between the first heat insulation member (141) and the first support part (131) in the first direction.

Description

Inertial Measurement Unit

[0001] Conventionally, drones use their onboard inertial measurement units to monitor their operational status. However, resonances generated within the aircraft can be transmitted to the inertial measurement units. These vibrations are considered noise, rather than the inertia related to the drone's operation that the inertial measurement units are intended to capture.

[0002] Patent Document 1 describes a technique for absorbing unnecessary vibrations generated in an inertial measurement unit by using a flexible wiring board, while Patent Document 2 describes a technique for adjusting and absorbing the frequency range of unnecessary vibrations generated in an inertial measurement unit by using a weight.

[0003] Japanese Patent Publication No. 2016-148677 Chinese Utility Model Registration No. 209587041

[0004] However, the inventors discovered that incorporating a vibration-isolating structure into an inertial measurement unit prevents accurate measurement results. As a result of extensive research, the inventors discovered that heat dissipation based on the vibration-isolating structure causes the temperature of the inertial sensor included in the inertial measurement unit to deviate from a specific range, preventing accurate measurement results.

[0005] The present invention has been made based on the inventor's findings, and provides an inertial measurement unit that can eliminate unnecessary vibrations while maintaining the inertial sensor within an appropriate temperature range.

[0006] An inertial measurement device according to one aspect of the present invention comprises a first inertial sensor, a first wiring board on which the first inertial sensor is mounted, a support member that supports the first inertial sensor, a first insulating member that is arranged between the first supporting portion and the first wiring board in a first direction, which is the direction in which a first supporting portion of the support member and the first wiring board are aligned, and that obstructs the flow of heat between the first inertial sensor and the support member, and a first vibration-damping means that is arranged between the first insulating member and the first supporting portion in the first direction.

[0007] According to the present invention, the inertial sensor can be maintained at an appropriate temperature and unnecessary vibrations transmitted to the inertial sensor can be suppressed.

[0008] FIG. 1 is a perspective view showing an inertial measurement unit with the cover removed; FIG. 2 is a cross-sectional view of the inertial measurement unit; FIG. 3 is a cross-sectional view of an inertial measurement unit according to another embodiment; FIG. 4 is a cross-sectional view of an inertial measurement unit according to another embodiment; FIG. 5 is a perspective view of an inertial measurement unit according to another embodiment;

[0009] Hereinafter, embodiments of an inertial measurement unit according to the present invention will be described with reference to the drawings. Note that the following embodiments are presented as examples to explain the present invention and are not intended to limit the present invention. For example, the shapes, structures, materials, components, relative positional relationships, connection states, numerical values, mathematical formulas, the content of each step in a method, and the order of each step shown in the following embodiments are merely examples and may include content not described below. Furthermore, while geometric expressions such as parallel and orthogonal may be used, these expressions do not imply mathematical precision and include substantially acceptable errors, deviations, and the like. Furthermore, expressions such as simultaneous and identical also include substantially acceptable ranges.

[0010] The drawings are schematic diagrams in which emphasis, omission, or adjustment of proportions is appropriately made for the purpose of explaining the present invention, and differ from the actual shapes, positional relationships, and proportions. The X-axis, Y-axis, and Z-axis shown in the drawings represent Cartesian coordinates arbitrarily set for the purpose of explaining the drawings. In other words, the Z-axis is not necessarily an axis along the vertical direction, and the X-axis and Y-axis are not necessarily located within a horizontal plane.

[0011] In addition, in the following, multiple inventions may be collectively described as one embodiment, and some of the contents described below may be described as optional components related to the present invention.

[0012] FIG. 1 is a perspective view of the inertial measurement unit 100 with the cover 170 removed. FIG. 2 is a cross-sectional view of the inertial measurement unit 100. The inertial measurement unit (IMU) is a general term for acceleration sensors, angular velocity sensors (gyro sensors), and the like. For example, the inertial measurement unit includes at least one of an acceleration sensor and an angular velocity sensor to detect at least one of acceleration in each of three mutually orthogonal axes, i.e., the X-axis, the Y-axis, and the Z-axis, and angular velocity around each of the three axes. The inertial measurement unit 100 includes a first inertial sensor 111, a first wiring board 121, a support member 130, a first heat insulating member 141, and a first vibration isolation means 151. In this embodiment, the inertial measurement unit 100 includes a third vibration isolation means 153, a fourth vibration isolation means 154, a fifth vibration isolation means 155, and a sixth vibration isolation means 156.

[0013] First inertial sensor 111 is not limited to any sensor capable of detecting inertia. In the present embodiment, inertial measurement unit 100 is mounted on a drone and used to control the operation of the drone, and therefore first inertial sensor 111 includes a plurality of sensors that respectively detect acceleration in a first direction (Z-axis direction in the drawing), angular velocity about the first direction, acceleration in a second direction (X-axis direction in the drawing) intersecting (orthogonal to) the first direction, angular velocity about the second direction, acceleration in a third direction (Y-axis direction in the drawing) intersecting (orthogonal to) the first direction and the second direction, and angular velocity about the third direction.

[0014] The first wiring board 121 is a board on which the first inertial sensor 111 is mounted, and is a board that includes a wiring pattern that electrically connects electronic components mounted to process and output signals output by the first inertial sensor 111, and a wiring pattern that supplies power to the first inertial sensor 111 and other electronic components. The first wiring board 121 may be either a rigid board or a flexible board, but in the case of this embodiment, the first wiring board 121 is a flexible board.

[0015] The support member 130 is a structural member that supports the first inertial sensor 111. The shape, structure, and material of the support member 130 are not limited. In this embodiment, the support member 130 is rectangular box-shaped and integrally includes a first support portion 131 corresponding to the bottom, a third support portion 133 and a fourth support portion 134 corresponding to wall portions that are perpendicular to the first direction, and a fifth support portion 135 and a sixth support portion 136 that are perpendicular to the second direction. The support member 130 does not directly support the first inertial sensor 111, but supports it via any one of a first vibration isolation means 151, a third vibration isolation means 153, a fourth vibration isolation means 154, a fifth vibration isolation means 155, and a sixth vibration isolation means 156 (hereinafter, these may be collectively referred to as "vibration isolation means") and a first heat insulating member 141.

[0016] The first heat insulating member 141 is disposed between the first support member 131 and the first wiring board 121 in a first direction, which is the alignment direction of the first support member 131 and the first wiring board 121, and is a member that inhibits the flow of heat between the first inertial sensor 111 and the support member 130. The heat insulating performance of the first heat insulating member 141 is at least higher than that of the vibration isolation means, and is desirably higher than that of the support member 130 or the first wiring board 121. Specifically, the thermal conductivity of the first heat insulating member 141 is ideally less than 0.15 W / m·K, for example. This makes it possible to maintain the first inertial sensor 111 within a predetermined temperature range and stabilize the measurement performance of the first inertial sensor 111.

[0017] In this embodiment, because the first wiring board 121 is a flexible board, the first heat insulating member 141 prevents bending of the first wiring board 121 on the order of microns. This improves the measurement accuracy of the first inertial sensor 111. The first heat insulating member 141 has higher rigidity than the first wiring board 121, which is a flexible board, and supports the first wiring board 121 to prevent bending. The rigidity is determined based on the Young's modulus of the material and the moment of inertia calculated from the shape. Therefore, the first heat insulating member 141 has a surface that can support the entire surface of the first wiring board 121 that has the largest area, and has the rigidity to prevent bending of the first wiring board 121 on the order of microns. For example, the first heat insulating member 141 has a thickness that is 10 times or more that of the first wiring board 121.

[0018] In this embodiment, the weight of the first heat insulating member 141 is set to a compression ratio that allows the first vibration isolation means 151 to reduce vibrations in a predetermined frequency range. When the inertial measurement unit 100 is mounted on a drone, motor vibrations can be cited as an example of noise that is carried by the first inertial sensor 111. On the other hand, the accelerations and angular velocities required to control the drone's operation are lower in frequency than the motor vibrations. Therefore, the weight of the first heat insulating member 141 is set to a compression ratio that allows the first vibration isolation means 151 to reduce vibrations in a predetermined high-frequency range.

[0019] When the inertial measurement unit 100 is mounted on a drone, size and weight are also limited. For these reasons, the thermal conductivity of the material constituting the first insulating member 141 is preferably selected from the range of 0.08 to 0.24 W / m·K. Furthermore, the specific gravity of the material constituting the first insulating member 141 is preferably selected from the range of 1.2 to 2.0 (1200 kg / m^3 to 2000 kg / m^3 (density equivalent, ^ indicates a power)). An example of a material that meets these performance requirements is a heat-resistant board (insulating board) made of at least one of glass fiber, mineral fiber, clay, carbon fiber, and plant fiber, and a binder that binds them together.

[0020] The vibration isolation means is a device or component that suppresses vibrations (accelerations) transmitted from outside the inertial measurement unit 100 to the first inertial sensor 111 other than the vibrations to be measured. The type of vibration isolation means is not limited. For example, a vibration isolation device formed by combining multiple mechanical elements including springs may be used as the vibration isolation means. Alternatively, a member that isolates vibrations based on physical properties, such as rubber or elastomer, may be used as the vibration isolation means. In this embodiment, the inertial measurement unit 100 includes a foam rubber member as the vibration isolation means.

[0021] The shape of the vibration-isolating means is not limited, but in this embodiment it is a rectangular parallelepiped. Note that the vibration-isolating means may have a shape with a cutout or a shape with a hole formed in one part.

[0022] The vibration isolation means is disposed in the measurement direction of the first inertial sensor 111. In the present embodiment, the first inertial sensor 111 has measurement directions in three mutually orthogonal directions: a first direction (the Z-axis direction in the figure), a second direction (the X-axis direction in the figure), and a third direction (the Y-axis direction in the figure). Therefore, the inertial measurement unit 100 includes a first vibration isolation means 151 disposed between the first heat insulating member 141 and the first support unit 131 in the first direction. The inertial measurement unit 100 also includes a third vibration isolation means 153 disposed between the first heat insulating member 141 and the third support unit 133 in the second direction, and a fourth vibration isolation means 154 disposed on the opposite side of the third vibration isolation means 153 with respect to the first heat insulating member 141 and disposed between the first heat insulating member 141 and the fourth support unit 134. The inertial measurement device 100 also includes, in the third direction, a fifth vibration-damping means 155 arranged between the first insulating member 141 and the fifth support portion 135, and a sixth vibration-damping means 156 arranged on the opposite side of the fifth vibration-damping means 155 relative to the first insulating member 141 and arranged between the first insulating member 141 and the sixth support portion 136.

[0023] In the present embodiment, the third vibration isolating means 153, the fifth vibration isolating means 155, the fourth vibration isolating means 154, and the sixth vibration isolating means 156 are integrally formed in the stated order as an annular member surrounding the first heat insulating member 141. Because the first heat insulating member 141 is a rectangular parallelepiped, the third vibration isolating means 153, the fifth vibration isolating means 155, the fourth vibration isolating means 154, and the sixth vibration isolating means 156 are rectangular annular.

[0024] The third vibration isolation means 153 and the fourth vibration isolation means 154 are sandwiched between the third support portion 133 and the fourth support portion 134, and the frequency range to be isolated is determined based on the distance between the third support portion 133 and the fourth support portion 134, the characteristics and shape of the third vibration isolation means 153 in the second direction, and the characteristics and shape of the fourth vibration isolation means 154. The characteristics and shape of the fifth vibration isolation means 155 and the characteristics and shape of the sixth vibration isolation means 156 are determined similarly. Specifically, the spring constant k of the vibration isolation means can be derived using the Young's modulus of the vibration isolation means, the compression amount of the vibration isolation means divided by the original thickness, and the contact area of ​​the vibration isolation means with the thermal insulation material. The natural frequency can be controlled using the spring constant k and the mass m of the thermal insulation material, and the frequency range to be isolated can be determined.

[0025] The third vibration isolating means 153 and the fourth vibration isolating means 154 are not fixed to the first heat insulating member 141, meaning that the third vibration isolating means 153 and the fourth vibration isolating means 154 and the first heat insulating member 141 can slide relative to each other in the first direction. The same applies to the fifth vibration isolating means 155 and the sixth vibration isolating means 156 and the first heat insulating member 141. The third vibration isolating means 153, the fourth vibration isolating means 154, the fifth vibration isolating means 155, and the sixth vibration isolating means 156 are also not fixed to the support member 130. This allows the third vibration isolating means 153, the fourth vibration isolating means 154, the fifth vibration isolating means 155, and the sixth vibration isolating means 156 to slide into their predetermined positions after the first vibration isolating means 151 and the first heat insulating member 141 are fixed to the first support member 131, improving the ease of assembly of the inertial measurement unit 100. Furthermore, the third vibration isolating means 153, the fourth vibration isolating means 154, the fifth vibration isolating means 155, and the sixth vibration isolating means 156 are substantially unrelated to vibration isolation in the first direction, which simplifies the design of the first vibration isolating means 151. The third vibration isolating means 153, the fourth vibration isolating means 154, the fifth vibration isolating means 155, and the sixth vibration isolating means 156 are fixed by being sandwiched between the cover body 170 and the first support part 131 by fixing the cover body 170 to the support member 130 (see FIG. 2).

[0026] In this embodiment, the first wiring board 121 is fixed to the first heat insulating member 141, the first heat insulating member 141 is fixed to the first vibration isolating means 151, and the first vibration isolating means 151 is fixed to the first support portion 131. These fixing methods are not limited, and examples include adhesive fixation using an adhesive or double-sided tape, and fixation using a fastening member. The first wiring board 121, the first heat insulating member 141, the first vibration isolating means 151, and the first support portion 131 may be fixed with the same or different types of fasteners. Fixing the first wiring board 121, the first heat insulating member 141, the first vibration isolating means 151, and the first support portion 131 enables vibration isolation in the first direction even without a vibration isolating means on the opposite side of the first heat insulating member 141 from the first vibration isolating means 151. The first direction is aligned vertically, and the first vibration isolating means 151 is disposed below the first heat insulating member 141. This allows the weight of the first insulating member 141 to act on the first vibration-damping means 151, making it possible to adjust the frequency range that the first vibration-damping means 151 damps by the weight of the first insulating member 141, etc.

[0027] The inertial measurement unit 100 described above can suppress vibrations in a predetermined frequency range from being applied to the first inertial sensor 111 in each of the first, second, and third directions, thereby improving the measurement accuracy of the first inertial sensor 111. Furthermore, the first heat insulating member 141 suppresses the flow of heat between the first inertial sensor 111 and the support member 130, so that the first inertial sensor 111 can be maintained within a predetermined temperature range, thereby maintaining the measurement accuracy of the first inertial sensor 111.

[0028] The present invention is not limited to the above-described embodiments. For example, the present invention may be embodied in another embodiment by arbitrarily combining the components described in this specification or by excluding some of the components. Furthermore, the present invention also includes various modifications that would occur to a person skilled in the art without departing from the spirit of the present invention, i.e., the meaning of the wording of the claims.

[0029] For example, if the direction of vibration of the object to be vibration-damped is limited to a first direction, the inertial measurement unit 100 may include a first inertial sensor 111, a first wiring board 121, a first insulating member 141, a first vibration-damping means 151, and a support member 130, as shown in Figure 3.

[0030] In addition to the first support portion 131, first vibration-isolating means 151, first insulating member 141, first wiring board 121, and first inertial sensor 111 arranged as shown in Figure 3, the inertial measurement unit 100 may also be equipped with a second insulating member 142 arranged on the opposite side of the first insulating member 141 from the first wiring board 121 in the first direction, and a second vibration-isolating means 152 arranged between the second insulating member 142 and the second support portion 132 of the support member 130 in the first direction, as shown in Figure 4.

[0031] This eliminates the need to fix adjacent members with adhesive or the like, and makes it possible to set the measurement direction of the first inertial sensor 111 to any direction.

[0032] 5, a weight 160 may be disposed between the first wiring board 121 and the first vibration isolation means 151. In the inertial measurement unit 100 shown in FIG. 5, the first wiring board 121 is fixed to the first heat insulating member 141, the first heat insulating member 141 is fixed to the weight 160, the weight 160 is fixed to the first vibration isolation means 151, and the first vibration isolation means 151 is fixed to the first support part 131.

[0033] This makes it possible to adjust the frequency range to be isolated by adjusting the weight of the weight 160, thereby expanding the options for the type and shape of the first insulating member 141 that can be used in the inertial measurement unit 100.

[0034] As shown in FIG. 6 , the inertial measurement device 100 includes, in addition to a first support portion 131, a first vibration isolation means 151, a first insulating member 141, a first wiring board 121, and a first inertial sensor 111, a second inertial sensor 112, and a second wiring board 122 on which the second inertial sensor 112 is mounted and which is connected to the first wiring board 121 by a flexible conductor, and the second wiring board 122 may be fixed to a seventh support portion 137 of the support member 130.

[0035] According to this, by differentiating the conditions of the two inertial sensors, for example by making the first wiring board 121 a flexible board and the second wiring board 122 a rigid board, the accuracy of the measurement values ​​can be improved by actively obtaining the measurement values ​​from the most suitable inertial sensor.

[0036] Furthermore, as shown in FIG. 7, in the inertial measurement unit 100, the third vibration isolation means 153, the fifth vibration isolation means 155, the fourth vibration isolation means 154, and the sixth vibration isolation means 156 may be separate from one another.

[0037] (Summary) The inertial measurement device 100 of the first aspect comprises a first inertial sensor 111, a first wiring board 121 on which the first inertial sensor 111 is mounted, a support member 130 that supports the first inertial sensor 111, a first insulating member 141 that is arranged between the first support portion 131 and the first wiring board 121 in a first direction, which is the alignment direction of the first support portion 131 of the support member 130 and the first wiring board 121, and that inhibits the flow of heat between the first inertial sensor 111 and the support member 130, and a first vibration-damping means 151 that is arranged between the first insulating member 141 and the first support portion 131 in the first direction.

[0038] The second aspect of the inertial measurement unit 100 includes the first aspect and is equipped with a second insulating member 142 arranged on the opposite side of the first insulating member 141 relative to the first wiring board 121 in the first direction, and a second vibration-damping means 152 arranged between the second insulating member 142 and the second support portion 132 of the support member 130 in the first direction.

[0039] According to the first or second aspect, the first heat insulating member 141 makes it difficult for heat from the first inertial sensor 111 to be transmitted to the support member 130, making it possible to maintain the first inertial sensor 111 at a predetermined temperature. Also, vibrations in a predetermined frequency range are made difficult to be transmitted to the first inertial sensor 111. As a result, it is possible to improve and stabilize the measurement accuracy of the first inertial sensor 111.

[0040] The third aspect of the inertial measurement unit 100 includes the first aspect or the second aspect, and is provided with a third vibration isolation means 153 arranged between the first insulating member 141 and the third support portion 133 of the support member 130 in a second direction that intersects the first direction.

[0041] The fourth aspect of the inertial measurement unit 100 includes the third aspect and is provided with a fourth vibration isolation means 154 that is arranged on the opposite side of the third vibration isolation means 153 relative to the first insulating member 141 in the second direction and is arranged between the fourth support portion 134 of the support member 130.

[0042] According to the third or fourth aspect, vibrations in a predetermined frequency range in the second direction are less likely to be transmitted to the first inertial sensor 111. This can improve the measurement accuracy of the first inertial sensor 111, which also measures acceleration in the second direction.

[0043] The fifth aspect of the inertial measurement unit 100 includes any of the first to fourth aspects, and is provided with a fifth vibration isolation means 155 arranged between the first insulating member 141 and the fifth support portion 135 of the support member 130 in the first direction and in a third direction that intersects the second direction.

[0044] According to the fifth or sixth aspect, vibrations in a predetermined frequency range in the third direction are less likely to be transmitted to the first inertial sensor 111. This makes it possible to improve the measurement accuracy of the first inertial sensor 111, which also measures acceleration in the third direction.

[0045] The inertial measurement unit 100 of the seventh aspect includes the inertial measurement unit 100 of the fourth aspect, and the third vibration isolating means 153 and the fourth vibration isolating means 154 are not fixed to the first heat insulating member 141.

[0046] According to the seventh aspect, the third vibration isolation means 153 and the fourth vibration isolation means 154 are substantially unrelated to vibration isolation in the first direction, which simplifies the design of the first vibration isolation means 151. Furthermore, the assembly of the inertial measurement unit 100 can be facilitated.

[0047] The eighth aspect of the inertial measurement unit 100 includes any one of the first to seventh aspects, and the first wiring board 121 is flexible and the first insulating member 141 has higher rigidity than the first vibration isolation means 151.

[0048] According to the eighth aspect, the first insulating member 141 can prevent the first wiring board 121 from bending, thereby suppressing the impact of the bending of the first wiring board 121 on the measurement accuracy of the first inertial sensor 111.

[0049] The ninth aspect of the inertial measurement unit 100 includes any of the first to eighth aspects, and the first insulating member 141 is set to a weight that provides a compression rate that reduces vibrations in a specified frequency range for the first vibration-damping means 151.

[0050] According to the ninth aspect, the frequency range to be isolated by the first vibration isolation means 151 can be determined by the weight of the first heat insulating member 141 without using a weight or the like.

[0051] The tenth aspect of the inertial measurement unit 100 includes the first aspect, in which the first wiring board 121 is fixed to a first insulating member 141, the first insulating member 141 is fixed to a first vibration-isolating means 151, and the first vibration-isolating means 151 is fixed to a first support portion 131.

[0052] According to the tenth aspect, it is possible to achieve a vibration-damping effect in any direction in the first direction. There is no need to clamp and hold the first wiring substrate 121 in the first direction, and the number of components can be reduced, thereby making the inertial measurement unit 100 smaller and lighter.

[0053] The inertial measurement unit 100 of the eleventh aspect includes the inertial measurement unit 100 of the first aspect, and further includes a weight 160 disposed between the first wiring board 121 and the first vibration isolation means 151 .

[0054] The eleventh aspect is useful when the weight of the first heat insulating member 141 alone is not enough to isolate a desired frequency range from vibrations.

[0055] The twelfth aspect of the inertial measurement unit 100 includes the eleventh aspect, and the first wiring board 121 is fixed to a first insulating member 141, the first insulating member 141 is fixed to a weight 160, the weight 160 is fixed to a first vibration-isolating means 151, and the first vibration-isolating means 151 is fixed to a first support portion 131.

[0056] According to the twelfth aspect, even when the weight 160 is provided, it is not necessary to hold the first wiring substrate 121 in the first direction, and the inertial measurement unit 100 can be made smaller.

[0057] The inertial measurement device 100 of the thirteenth aspect includes any of the first to twelfth aspects, and comprises a second inertial sensor 112, and a second wiring board 122 on which the second inertial sensor 112 is mounted and which is connected to the first wiring board 121 by a flexible conductor, and the second wiring board 122 is fixed to the seventh support portion 137 of the support member 130.

[0058] According to the thirteenth aspect, for example, the first wiring board 121 is a flexible board and the second wiring board 122 is a rigid board, and by obtaining measurement results from inertial sensors with different conditions, it is possible to determine which measurement result is optimal.

[0059] The present invention can be used in drones, aircraft, ships, automobiles, agricultural machinery, construction machinery, and the like.

[0060] 100...inertial measurement unit, 111...first inertial sensor, 112...second inertial sensor, 121...first wiring board, 122...second wiring board, 130...support member, 131...first support portion, 132...second support portion, 133...third support portion, 134...fourth support portion, 135...fifth support portion, 136...sixth support portion, 137...seventh support portion, 141...first heat insulating member, 142...second heat insulating member, 151...first vibration isolating means, 152...second vibration isolating means, 153...third vibration isolating means, 154...fourth vibration isolating means, 155...fifth vibration isolating means, 156...sixth vibration isolating means, 170...lid body

Claims

1. An inertial measurement device comprising: a first inertial sensor; a first wiring board on which the first inertial sensor is mounted; a support member that supports the first inertial sensor; a first heat insulating member that is arranged between the first support part and the first wiring board in a first direction that is the alignment direction of a first support part of the support member and the first wiring board, and that inhibits the flow of heat between the first inertial sensor and the support member; and a first vibration isolation means that is arranged between the first heat insulating member and the first support part in the first direction.

2. An inertial measurement device as described in claim 1, comprising: a second insulating member arranged on the opposite side of the first insulating member with respect to the first wiring board in the first direction; and a second vibration isolation means arranged between the second insulating member and a second support portion of the support member in the first direction.

3. An inertial measurement unit according to claim 1 or 2, further comprising a third vibration isolation means arranged between the first heat insulating member and the third support portion of the support member in a second direction intersecting the first direction.

4. An inertial measurement unit according to claim 3, further comprising a fourth vibration isolation means disposed on the opposite side of the first heat insulating member from the third vibration isolation means in the second direction, and disposed between the first heat insulating member and the fourth support portion of the support member.

5. An inertial measurement unit according to claim 3, further comprising a fifth vibration isolation means disposed between the first heat insulating member and the fifth support portion of the support member in a third direction intersecting the first direction and the second direction.

6. An inertial measurement unit according to claim 4, wherein the third vibration isolation means and the fourth vibration isolation means are not fixed to the first heat insulating member.

7. The inertial measurement unit according to claim 1, wherein the first wiring board is flexible, and the first heat insulating member has higher rigidity than the first vibration isolation means.

8. An inertial measurement unit according to claim 1, wherein the weight of the first heat insulating member is set to a compressibility that allows the first vibration isolation means to reduce vibrations in a predetermined frequency range.

9. The inertial measurement unit according to claim 1, wherein the first wiring board is fixed to the first heat insulating member, the first heat insulating member is fixed to the first vibration isolating means, and the first vibration isolating means is fixed to the first support part.

10. The inertial measurement unit according to claim 1, wherein a weight is disposed between the first wiring board and the first vibration isolation means.

11. An inertial measurement unit as described in claim 10, wherein the first wiring board is fixed to the first heat insulating member, the first heat insulating member is fixed to the weight, the weight is fixed to the first vibration isolating means, and the first vibration isolating means is fixed to the first support part.

12. An inertial measurement device as described in claim 1, comprising: a second inertial sensor; and a second wiring board on which the second inertial sensor is mounted and which is connected to the first wiring board by a flexible conductor, wherein the second wiring board is fixed to a seventh support portion of the support member.

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